Multi-arc ion composite hard coating vacuum coating machine device
By employing staggered arc ion plating devices and staggered lifting columnar ejector pins in the vacuum coating machine, the problems of workpiece bottom obstruction and diamond powder adhesion are solved, achieving uniform coating of the workpiece and simplifying cleaning, thus improving the performance of the coating machine.
Patent Information
- Application Number
- CN202511406801.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-29
- Publication Date
- 2026-01-30
AI Technical Summary
In existing arc vacuum coating machines, the bottom of the workpiece comes into contact with the support during the coating process, causing obstruction and making it impossible to achieve a completely uniform coating. In addition, diamond powder tends to adhere to the surface of the arc ion plating device, increasing the difficulty of cleaning.
A multi-arc ion composite hard coating vacuum coating machine is designed, which adopts six sets of electric arc ion plating devices and staggered arc-starting needles, combined with a columnar ejector pin that can be repeatedly raised and lowered as a workpiece support, so as to realize the rotation and raising and lowering of the workpiece, thereby enhancing the uniformity and coverage of the coating.
It improves the uniformity of the coating, reduces coating dead zones, reduces diamond powder adhesion, simplifies the cleaning process, and enhances the coating effect.
Smart Images

Figure CN121428486A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of vacuum coating technology, specifically to a multi-arc ion composite hard coating vacuum coating machine device. Background Technology
[0002] Vacuum coating is a commonly used technique for coating metal parts. Its basic principle is to evaporate metal material using an electric arc discharge in a vacuum chamber, causing the metal material to contact the workpiece in a molecular state and deposit onto the workpiece surface to form a thin film. Vacuum coating gives the workpiece a distinct metallic color and can improve its wear resistance and corrosion resistance. Furthermore, this type of coating is usually stable, has strong adhesion to the workpiece, and is not prone to detachment or damage, thus maintaining the film's performance over a long period.
[0003] Existing arc-type vacuum coating machines do not have an anode on the inside. They evaporate the material that serves as the cathode only through an electric arc. During this process, diamond powder tends to adhere to the surface of the arc ion plating. Furthermore, since the bottom of the workpiece needs to be supported, the bottom of the workpiece will come into contact with the support. During the coating process, the contact surface between the support and the workpiece will be blocked. The blocked area cannot be covered during coating, which results in the workpiece not being able to achieve a completely uniform coating. Summary of the Invention
[0004] (a) Technical problems to be solved
[0005] In view of the above-mentioned shortcomings of the prior art, the present invention provides a multi-arc ion composite hard coating vacuum coating machine device, which can effectively solve the problems of the prior art.
[0006] (II) Technical Solution
[0007] To achieve the above objectives, the present invention provides the following technical solution:
[0008] This invention discloses a multi-arc ion composite hard coating vacuum coating machine device, comprising a coating machine body and a coating machine chamber door installed on the front side of the coating machine body. An arc emission source is fixedly installed on the inner wall of the front side of the coating machine chamber door. Electric heating wires and an arc ion plating device are installed inside both the coating machine body and the coating machine chamber door, and the arc ion plating device is equipped with an arc-starting needle. An anode receiving end is fixedly installed on the inner wall of the rear side of the coating machine body. A central shaft is rotatably mounted on the inner wall of the lower end of the coating machine body, and the upper end of the central shaft is fixed. The machine is equipped with a lower material tray and an upper material tray, both of which have storage slots. A connecting shaft is fixedly connected to the lower end of the central shaft, and the connecting shaft is rotatably mounted inside the coating machine body. The coating machine body is equipped with a rotating mechanism for driving the connecting shaft to rotate. A first rotating frame and a second rotating frame are slidably sleeved on the lower side of the central shaft, and both the first and second rotating frames are equipped with lifting mechanisms for raising and lowering. Both the first and second rotating frames are equipped with columnar pins on their upper sides via connecting components.
[0009] Furthermore, the electric heating wires and arc ion plating devices on the inner walls of the left and right sides of the coating machine body and the coating machine chamber door are all staggered vertically, the arc radiation source is directly opposite the anode receiving end, and the upper material tray is located at the center of the inner cavity of the coating machine body and the coating machine chamber door.
[0010] Furthermore, the rotating mechanism includes a driven wheel fixedly mounted on the connecting shaft and a drive motor fixedly mounted inside the coating machine body. A drive wheel parallel to the driven wheel is fixedly mounted on the power output shaft of the drive motor, and a transmission belt for transmission is mounted on the driven wheel and the drive wheel.
[0011] Furthermore, the lifting mechanism includes a transmission gear plate. A transmission gear plate is fixedly mounted on the lower side of the central shaft. Six sets of positioning shafts are arranged in a circular array on the upper outer side of the transmission gear plate, and all six sets of positioning shafts are rotatably mounted within the coating machine body. A transmission gear is fixedly mounted on one end of each of the six sets of positioning shafts, and all six sets of transmission gears mesh with the transmission gear plate. A transmission turntable is fixedly mounted on the other end of each of the six sets of positioning shafts. A first connecting rod is hinged to the outer surface of three sets of transmission turntables at an eccentric position, and a second connecting rod is hinged to the outer surface of the remaining three sets of transmission turntables at an eccentric position. A circular array is formed within the coating machine body. There are six sets of vertical guide slots, and three sets of the vertical guide slots each have a first connecting rod slidably installed in them, while the other three sets of the vertical guide slots each have a second connecting rod slidably installed in them. The lower ends of the three sets of first connecting rods are respectively hinged to the other ends of the three sets of first connecting rods, and the lower ends of the three sets of second connecting rods are respectively hinged to the upper ends of the three sets of second connecting rods. The inner sides of the three sets of first connecting rods are fixedly connected to a first movable ring frame, and the inner sides of the three sets of second connecting rods are fixedly connected to a second movable ring frame. The first and second movable ring frames are respectively connected to a first rotating frame and a second rotating frame through guide support assemblies.
[0012] Furthermore, the hinge points of the first and second connecting rods with the transmission turntable are staggered vertically, and the three sets of the first connecting rods and the three sets of the second connecting rods are arranged in a circular array. The three sets of the first connecting rods are arranged in a circular array on the outside of the first movable ring frame, and the three sets of the second connecting rods are arranged in a circular array on the outside of the second movable ring frame. The second movable ring frame and the first movable ring frame are arranged in parallel.
[0013] Furthermore, the guide support assembly includes a ball bearing bracket arranged in a ring array outside the first rotating frame and the second rotating frame, and guide balls are rolled inside the ball bearing bracket. The first movable ring frame and the second movable ring frame are provided with circular guide grooves that are adapted to the ball bearing bracket and the guide balls. The ball bearing bracket is displaced by sliding within the circular guide groove using the guide balls.
[0014] Furthermore, the connecting assembly includes a connecting bracket fixedly installed on the upper end of the second rotating frame, and an inner ejector pin mounting seat is arranged in a circular array on the connecting bracket. An outer ejector pin mounting seat is arranged in a circular array on the upper end of the first rotating frame. Both the inner and outer ejector pin mounting seats are provided with positioning mounting holes, and a screw is vertically inserted into the positioning mounting hole. The screw is fixedly installed on the lower end of the cylindrical ejector pin, and a nut is threaded onto the lower side of the screw.
[0015] Furthermore, the inner ejector pin mounting base is circular, and the outer ejector pin mounting base is annular. The inner diameter of the outer ejector pin mounting base is larger than the outer diameter of the inner ejector pin mounting base. The positioning mounting holes are arranged in a circular array on the inner and outer ejector pin mounting bases. The inner and outer ejector pin mounting bases are located at the lower opening of the storage slot on the lower material tray, and the center of the inner and outer ejector pin mounting bases is on the same perpendicular line as the center of the storage slot on the lower and upper material trays.
[0016] Furthermore, a washer is provided on the lower side of the cylindrical ejector pin, and the washer is movably sleeved on the screw. The cross-section of the cylindrical ejector pin is circular, and the end edges of the cylindrical ejector pin are all rounded.
[0017] (III) Beneficial Effects
[0018] Compared with the known prior art, the technical solution provided by this invention has the following beneficial effects:
[0019] By incorporating six sets of arc ion plating devices and arc-starting pins on the six inner walls of the coating machine body and the coating machine chamber door, various combinations can be formed in pairs to increase the applicability and effectiveness of the coating process. The anode receiving end reduces the adhesion of diamond powder to the arc ion plating device, thus reducing the labor required for cleaning. Furthermore, the structural design of this device allows for a wider energy range and a larger coverage area. Simultaneously, the use of repeatedly staggered, rising and falling cylindrical ejector pins as workpiece supports allows the workpiece to not only rotate but also rise and fall during the coating process. This ensures sufficient and uniform contact between the workpiece and the evaporated metal material, preventing incomplete coating of the bottom due to prolonged contact with a single support, thereby increasing the coating effect, reducing coating dead zones, and ensuring coating uniformity. Attached Figure Description
[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.
[0021] Figure 1 This is a schematic diagram of the external structure of the coating machine body and the coating machine compartment door in this invention;
[0022] Figure 2 This is a front view schematic diagram of the structure of the present invention;
[0023] Figure 3 This is a schematic diagram of the internal structure of the coating machine compartment door in this invention;
[0024] Figure 4 This is a schematic diagram of the internal structure of the coating machine body in this invention;
[0025] Figure 5 This is a schematic cross-sectional view of the coating machine body in this invention;
[0026] Figure 6 This is a schematic cross-sectional view of the rotating mechanism in this invention;
[0027] Figure 7 This is a rear view schematic diagram of a partial structure in this invention;
[0028] Figure 8 This is a schematic cross-sectional view of a partial structure in this invention;
[0029] Figure 9 This is a schematic diagram of the structure of the first movable ring frame and the second movable ring frame in this invention;
[0030] Figure 10 This is a schematic cross-sectional view of the connecting component in this invention;
[0031] Figure 11 This is a schematic diagram of the cylindrical ejector pin in this invention.
[0032] The labels in the diagram represent: 1. Coating machine body; 2. Coating machine chamber door; 3. Arc radiation source; 4. Electric heating wire; 5. Arc ion plating device; 6. Arc ignition needle; 7. Anode receiving end; 8. Positioning shaft; 9. Lower material tray; 10. Upper material tray; 11. Storage trough; 12. Connecting shaft; 13. Driven wheel; 14. Drive motor; 15. Drive wheel; 16. Transmission belt; 17. Transmission gear disc; 18. Positioning shaft; 19. Transmission gear; 20. Transmission turntable; 21. First 21. Connecting rod; 22. Vertical guide groove; 23. First connecting frame rod; 24. First movable ring frame; 25. Second connecting rod; 26. Second connecting frame rod; 27. Second movable ring frame; 28. First rotating frame; 29. Second rotating frame; 30. Connecting bracket; 31. Ball bearing bracket; 32. Guide ball; 33. Circular guide groove; 34. Inner ejector pin mounting seat; 35. Outer ejector pin mounting seat; 36. Positioning mounting hole; 37. Screw; 38. Columnar ejector pin; 39. Washer; 40. Nut. Detailed Implementation
[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.
[0034] Please see Figures 1-11 An embodiment of the present invention provides a multi-arc ion composite hard coating vacuum coating machine device, comprising a coating machine body 1 and a coating machine chamber door 2 installed on the front side of the coating machine body 1. An arc radiation source 3 is fixedly installed on the inner wall of the front side of the coating machine chamber door 2. An electric heating wire 4 and an arc ion plating device 5 are installed inside both the coating machine body 1 and the coating machine chamber door 2, and an arc ignition needle 6 is provided on the arc ion plating device 5. An anode receiving end 7 is fixedly installed on the inner wall of the rear side of the coating machine body 1. A central shaft 8 is rotatably installed on the inner wall of the lower end of the coating machine body 1, and a lower part is fixedly installed on the upper end of the central shaft 8. Material tray 9 and upper material tray 10, lower material tray 9 and upper material tray 10 are provided with storage slots 11. The lower end of the central shaft 8 is fixedly connected to a connecting shaft 12, and the connecting shaft 12 is rotatably installed inside the coating machine body 1. The coating machine body 1 is provided with a rotating mechanism for driving the connecting shaft 12 to rotate. The lower side of the central shaft 8 is slidably sleeved with a first rotating frame 28 and a second rotating frame 29, and the lower side of both the first rotating frame 28 and the second rotating frame 29 is provided with a lifting mechanism for lifting. The upper side of both the first rotating frame 28 and the second rotating frame 29 is provided with a columnar ejector pin 38 through a connecting assembly. Among them, as shown in the figure Figure 9 As shown, keyways are provided at the center of both the first rotating frame 28 and the second rotating frame 29, and a transmission key is provided on the lower side of the central shaft 8. Through the key connection, torque can be transmitted between the central shaft 8 and the first rotating frame 28 and the second rotating frame 29. At the same time, the first rotating frame 28 and the second rotating frame 29 can be axially displaced on the central shaft 8.
[0035] As a preferred embodiment of this example, Figure 2As shown, the electric heating wires 4 and the arc ion plating devices 5 on the inner walls of the coating machine body 1 and the coating machine chamber door 2 are staggered vertically. The arc emission source 3 faces the anode receiving end 7 directly, and the upper material tray 10 is located at the center of the inner cavity of the coating machine body 1 and the coating machine chamber door 2. This structure allows the heating source to surround the entire cavity, improving the heating effect and uniformity. The arc-starting needles and the arc ion plating devices are evenly and staggeredly distributed on the inner wall of the cavity, thereby increasing energy and expanding the coverage area. By having the anode receiving end 7 face the arc emission source 3 and receive its discharge, the adhesion of diamond powder to the surface of the arc ion plating device 5 can be reduced. The six sets of arc ion plating devices 5 can be divided into three parts, allowing for different combinations according to processing requirements. The anode receiving end 7 can be made of copper to ensure good conductivity.
[0036] As a preferred embodiment of this example, Figure 6 and Figure 7 As shown, the rotating mechanism includes a driven wheel 13 fixedly mounted on the connecting shaft 12 and a drive motor 14 fixedly mounted inside the coating machine body 1. A driving wheel 15, parallel to the driven wheel 13, is fixedly mounted on the power output shaft of the drive motor 14, and a transmission belt 16 for transmission is mounted on the driven wheel 13 and the driving wheel 15. This structure is used to drive the upper material tray 10 to rotate through the power of the drive motor 14, thereby driving the workpiece to rotate, so as to improve the coating effect and uniformity.
[0037] As a preferred embodiment of this example, Figure 5 , Figure 7 and Figure 8As shown, the lifting mechanism includes a transmission gear plate 17. The transmission gear plate 17 is fixedly installed on the lower side of the central shaft 8. Six sets of positioning shafts 18 are arranged in a ring array on the outer side of the upper end of the transmission gear plate 17, and all six sets of positioning shafts 18 are rotatably installed inside the coating machine body 1. A transmission gear 19 is fixedly installed on one end of each of the six sets of positioning shafts 18, and all six sets of transmission gears 19 mesh with the transmission gear plate 17. A transmission turntable 20 is fixedly installed on the other end of the six sets of positioning shafts 18. A first connecting rod 21 is hinged to the outer surface of three sets of transmission turntables 20 at an eccentric position, and a second connecting rod 25 is hinged to the outer surface of the other three sets of transmission turntables 20 at an eccentric position. Six sets of vertical shafts are arranged in a ring array inside the coating machine body 1. The guide groove 22 is provided, and three sets of vertical guide grooves 22 are each slidably provided with a first connecting rod 23, and the other three sets of vertical guide grooves 22 are each slidably provided with a second connecting rod 26. The lower ends of the three sets of first connecting rods 23 are respectively hinged to the other ends of the three sets of first connecting rods 21, and the lower ends of the three sets of second connecting rods 26 are respectively hinged to the upper ends of the three sets of second connecting rods 25. The inner side of the three sets of first connecting rods 23 is fixedly connected with a first movable ring frame 24, and the inner side of the three sets of second connecting rods 26 is fixedly connected with a second movable ring frame 27. The first movable ring frame 24 and the second movable ring frame 27 are respectively connected to the first rotating frame 28 and the second rotating frame 29 through guide support components. This structure is used to drive the transmission gear plate 17 to rotate through the rotation mechanism, so that the transmission turntable 20 can rotate longitudinally. By repeatedly pulling the first connecting rod 21 and the second connecting rod 25, the first movable ring frame 24 and the second movable ring frame 27 can be driven to perform reciprocating lifting and lowering movements. This allows the first rotating frame 28 and the second rotating frame 29 on the inner side, as well as the cylindrical ejector pin 38 on the upper side, to perform reciprocating lifting and lowering movements. The reciprocating lifting and lowering movements of the cylindrical ejector pin 38 can drive the workpiece on the inner side to be lifted and lowered from the placement groove 11 on the lower material tray 9. In combination with rotation and lifting, the contact degree with the evaporating material is increased, thereby improving the uniformity of film coating.
[0038] As a preferred embodiment of this example, Figure 5 , Figure 7 and Figure 8As shown, the hinge points of the first connecting rod 21 and the second connecting rod 25 with the transmission turntable 20 are staggered vertically, and the three sets of first connecting rods 21 and the three sets of second connecting rods 25 are arranged in a circular array. The three sets of first connecting frame rods 23 are arranged in a circular array outside the first movable ring frame 24, and the three sets of second connecting frame rods 26 are arranged in a circular array outside the second movable ring frame 27. The second movable ring frame 27 and the first movable ring frame 24 are arranged in parallel. This structure allows the three sets of transmission turntables 20 connected to the first connecting rod 21 and the three sets of transmission turntables 20 connected to the second connecting rod 25 to rotate synchronously via the transmission gear plate 17. These rotations can respectively drive the first movable ring frame 24 and the second movable ring frame 27 to move up and down in opposite directions. This allows the cylindrical ejector pins 38 on the inner ejector pin mounting base 34 and the outer ejector pin mounting base 35 to move up and down alternately, continuously pushing the workpiece to improve the uniformity of the coating. Furthermore, the bottom of the workpiece is not subjected to prolonged contact with the cylindrical ejector pins 38 on the inner or outer ejector pin mounting base 34, preventing uneven coating. Through this alternating contact and lifting motion, the contact points of the cylindrical ejector pins 38 can also contact the evaporated material and be coated during the alternating intervals.
[0039] As a preferred embodiment of this example, Figure 8 and Figure 10 As shown, the guide support assembly includes ball bearing brackets 31 arranged in a ring array outside the first rotating frame 28 and the second rotating frame 29, with guide balls 32 rotatably mounted within the ball bearing brackets 31. Circular guide grooves 33, adapted to the ball bearing brackets 31 and guide balls 32, are formed within the first movable ring frame 24 and the second movable ring frame 27. The ball bearing brackets 31 slide within the circular guide grooves 33 using the guide balls 32. The upper and lower surfaces of the ball bearing brackets 31 protrude from the upper and lower openings of the guide balls 32. The rolling of the ball bearing brackets 31 within the circular guide grooves 33 supports and guides the first rotating frame 28 and the second rotating frame 29, ensuring smooth and stable rotation. This structure allows the first rotating frame 28 and the second rotating frame 29 to not only rotate due to the torque of the central shaft 8, but also to move up and down with the lifting mechanism, thus meeting functional requirements.
[0040] As a preferred embodiment of this example, Figure 8 , Figure 9 and Figure 10As shown, the connecting assembly includes a connecting bracket 30 fixedly mounted on the upper end of the second rotating frame 29. The connecting bracket 30 has an inner ejector pin mounting seat 34 arranged in a circular array, and the upper end of the first rotating frame 28 has an outer ejector pin mounting seat 35 arranged in a circular array. Both the inner and outer ejector pin mounting seats 34 and 35 have positioning mounting holes 36, and a screw 37 is vertically inserted into each positioning mounting hole 36. The screw 37 is fixedly mounted on the lower end of the cylindrical ejector pin 38, and a nut 40 is threaded onto the lower side of the screw 37. This structure is used to fix the cylindrical ejector pin 38 to the upper ends of the inner and outer ejector pin mounting seats 34 and 35 using the screw 37 and nut 40. This not only facilitates disassembly and assembly but also facilitates replacement after wear.
[0041] As a preferred embodiment of this example, Figure 9 and Figure 10 As shown, the inner ejector pin mounting base 34 is circular, and the outer ejector pin mounting base 35 is annular. The inner diameter of the outer ejector pin mounting base 35 is larger than the outer diameter of the inner ejector pin mounting base 34. The positioning mounting holes 36 are arranged in annular array on the inner ejector pin mounting base 34 and the outer ejector pin mounting base 35. The inner ejector pin mounting base 34 and the outer ejector pin mounting base 35 are located at the lower opening of the storage groove 11 on the lower material tray 9, and the center of the inner ejector pin mounting base 34 and the outer ejector pin mounting base 35 is on the same vertical line as the center of the storage groove 11 on the lower material tray 9 and the upper material tray 10. This structure allows the inner ejector mounting base 34 to drive the cylindrical ejector pins 38 on its upper side to move up and down alternately with the outer ejector mounting base 35. This allows the cylindrical ejector pins 38 on the inner and outer ejector mounting bases 34 and 35 to move up and down alternately below a single storage slot 11, repeatedly lifting and lowering the workpiece. The support contact points can be changed to ensure that non-contact surfaces can contact the material for coating. This repeated process completes the full coating of the workpiece, reducing coating dead zones. Furthermore, the positioning mounting holes 36 allow the number of cylindrical ejector pins 38 to be adjusted according to the size of the workpiece, ensuring stable lifting and lowering and coating without dead zones.
[0042] As a preferred embodiment of this example, Figure 10 and Figure 11 As shown, a washer 39 is provided on the lower side of the cylindrical ejector pin 38, and the washer 39 is movably sleeved on the screw 37. The cross-section of the cylindrical ejector pin 38 is circular, and the edges of the cylindrical ejector pin 38 are all rounded. This structure reduces the friction between the cylindrical ejector pin 38 and the inner ejector pin mounting base 34 or the outer ejector pin mounting base 35 through the washer 39. At the same time, the rounded edges of the cylindrical ejector pin 38 can avoid sharp edges on the contact surface with the workpiece, which would lead to unnecessary friction from staggered contact, and consequently, wear on the workpiece or damage to the coated area.
[0043] Working principle: When in use, first place the workpiece stably in the placement slot 11 so that the workpiece falls on the cylindrical ejector pin 38. Then close the coating machine chamber door 2 and start the equipment. After sealing the cavity, perform vacuum treatment in the cavity and introduce argon protective gas into the cavity. Use electric heating wire 4 to heat the cavity. The electric arc radiation source 3 discharges and the anode receiving end 7 receives it. The electric arc ion plating device 5 allows the material to accept the evaporated molecular form material, thereby completing the coating.
[0044] When the equipment starts, the drive motor 14 drives the transmission belt 16 to rotate via the drive wheel 15. The transmission belt 16 drives the connecting shaft 12 to rotate via the driven wheel 13. The connecting shaft 12 drives the lower material tray 9 and the storage trough 11 to rotate synchronously via the central shaft 8. The transmission gear 17 also rotates synchronously. The meshing transmission gear 19 drives the transmission turntable 20 to rotate via the positioning shaft 18. The six sets of transmission turntables 20 drive the first connecting rod 21 and the second connecting rod 25 to swing up and down and pull the first connecting frame rod 23 and the second connecting frame rod 26 to move up and down in a staggered manner, so that the first movable ring frame 24 and the second movable ring frame 27 can reciprocate up and down. When the central shaft 8 rotates, it also drives the first rotating frame 28 and the second rotating frame 29 to rotate. The first rotating frame 28 and the second rotating frame 29 can rotate along the circular guide groove 33 via the guide ball 32 and can rise and fall with the rising and falling movement of the first movable ring frame 24 and the second movable ring frame 27. Synchronously, when the second rotating frame 29 and the first rotating frame 28 rise and fall, they drive the inner ejector pin mounting base 34 and the outer ejector pin mounting base 35 on their upper sides to reciprocate and rise and fall. This causes the cylindrical ejector pins 38 on the inner ejector pin mounting base 34 and the outer ejector pin mounting base 35 to reciprocate and rise and fall alternately. When the cylindrical ejector pins 38 on the inner ejector pin mounting base 34 and the outer ejector pin mounting base 35 rise and fall alternately, they will repeatedly lift the workpiece to perform lifting and lowering movements. Combined with the rotation of the workpiece, a good coating effect can be achieved to ensure the uniformity of coating. Furthermore, during the alternating process, the material can contact the bottom surface of the workpiece, and there will be no coating dead corners caused by the prolonged contact of a single set of cylindrical ejector pins 38.
[0045] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.
[0046] In the description of this application, it should be understood that the terms "front", "rear", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.
[0047] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
Claims
1. A multi-arc ion composite hard coating vacuum coater apparatus, characterized by: The coating machine includes a coating machine body (1) and a coating machine compartment door (2) installed on the front side of the coating machine body (1). An arc radiation source (3) is fixedly installed on the inner wall of the front side of the coating machine compartment door (2). An electric heating wire (4) and an arc ion plating device (5) are installed inside both the coating machine body (1) and the coating machine compartment door (2). An arc ignition needle (6) is provided on the arc ion plating device (5). An anode receiving end (7) is fixedly installed on the inner wall of the rear side of the coating machine body (1). A central shaft (8) is rotatably installed on the inner wall of the lower end of the coating machine body (1). A lower material tray (9) and an upper material tray (10) are fixedly installed on the upper end of the central shaft (8). The material tray (9) and the upper material tray (10) are provided with a storage groove (11). The lower end of the central shaft (8) is fixedly connected to a connecting shaft (12), and the connecting shaft (12) is rotatably installed in the coating machine body (1). The coating machine body (1) is provided with a rotating mechanism for driving the connecting shaft (12) to rotate. The lower side of the central shaft (8) is slidably sleeved with a first rotating frame (28) and a second rotating frame (29). The lower side of the first rotating frame (28) and the second rotating frame (29) are both provided with a lifting mechanism for lifting. The upper side of the first rotating frame (28) and the second rotating frame (29) are both provided with a columnar pin (38) through a connecting component.
2. The multi-arc ion composite hard coating vacuum coating machine device according to claim 1, characterized in that: The electric heating wires (4) and the electric arc ion plating device (5) on the inner walls of the left and right sides of the coating machine body (1) and the coating machine chamber door (2) are all staggered vertically. The electric arc radiation source (3) is directly opposite to the anode receiving end (7). The upper material tray (10) is located at the center of the inner cavity of the coating machine body (1) and the coating machine chamber door (2).
3. The multi-arc ion composite hard coating vacuum coating machine device according to claim 1, characterized in that: The rotating mechanism includes a driven wheel (13) fixedly mounted on the connecting shaft (12) and a drive motor (14) fixedly mounted inside the coating machine body (1). A drive wheel (15) parallel to the driven wheel (13) is fixedly mounted on the power output shaft of the drive motor (14), and a transmission belt (16) for transmission is mounted on the driven wheel (13) and the drive wheel (15).
4. The multi-arc ion composite hard coating vacuum coating machine device according to claim 1, characterized in that: The lifting mechanism includes a transmission gear plate (17). The transmission gear plate (17) is fixedly installed on the lower side of the central shaft (8). Six sets of positioning shafts (18) are arranged in a ring array on the outer side of the upper end of the transmission gear plate (17). All six sets of positioning shafts (18) are rotatably installed inside the coating machine body (1). A transmission gear (19) is fixedly installed on one end of each of the six sets of positioning shafts (18). All six sets of transmission gears (19) mesh with the transmission gear plate (17). A transmission turntable (20) is fixedly installed on the other end of each of the six sets of positioning shafts (18). A first connecting rod (21) is hinged to the outer surface of three sets of transmission turntables (20) at an eccentric position. A second connecting rod (25) is hinged to the outer surface of the other three sets of transmission turntables (20). The coating machine body (1) has six sets of positioning shafts arranged in a ring array inside. Vertical guide grooves (22), and three of the vertical guide grooves (22) are slidably provided with first connecting rods (23), and the other three vertical guide grooves (22) are slidably provided with second connecting rods (26). The lower ends of the three sets of first connecting rods (23) are respectively hinged to the other ends of the three sets of first connecting rods (21), and the lower ends of the three sets of second connecting rods (26) are respectively hinged to the upper ends of the three sets of second connecting rods (25). The inner side of the three sets of first connecting rods (23) is fixedly connected with a first movable ring frame (24), and the inner side of the three sets of second connecting rods (26) is fixedly connected with a second movable ring frame (27). The first movable ring frame (24) and the second movable ring frame (27) are respectively connected to the first rotating frame (28) and the second rotating frame (29) through guide support components.
5. The multi-arc ion composite hard coating vacuum coating machine device according to claim 4, characterized in that: The hinge points of the first connecting rod (21) and the second connecting rod (25) with the transmission turntable (20) are staggered vertically, and the three sets of the first connecting rods (21) and the three sets of the second connecting rods (25) are interleaved in a circular array. The three sets of the first connecting frame rods (23) are arranged in a circular array outside the first movable ring frame (24), and the three sets of the second connecting frame rods (26) are arranged in a circular array outside the second movable ring frame (27). The second movable ring frame (27) and the first movable ring frame (24) are arranged in parallel.
6. The multi-arc ion composite hard coating vacuum coating machine device according to claim 4, characterized in that: The guide support assembly includes a ball bearing bracket (31) arranged in a ring array outside the first rotating frame (28) and the second rotating frame (29), and a guide ball (32) is rolled inside the ball bearing bracket (31). The first movable ring frame (24) and the second movable ring frame (27) are provided with circular guide grooves (33) adapted to the ball bearing bracket (31) and the guide ball (32). The ball bearing bracket (31) slides within the circular guide groove (33) using the guide ball (32).
7. The multi-arc ion composite hard coating vacuum coating machine according to claim 1, characterized in that: The connecting assembly includes a connecting bracket (30) fixedly installed on the upper end of the second rotating frame (29), and an inner ejector pin mounting seat (34) is arranged in a ring array on the connecting bracket (30). An outer ejector pin mounting seat (35) is arranged in a ring array on the upper end of the first rotating frame (28). Both the inner ejector pin mounting seat (34) and the outer ejector pin mounting seat (35) are provided with positioning mounting holes (36), and a screw (37) is vertically inserted into the positioning mounting hole (36). The screw (37) is fixedly installed on the lower end of the cylindrical ejector pin (38), and a nut (40) is threaded onto the lower side of the screw (37).
8. The multi-arc ion composite hard coating vacuum coating machine according to claim 7, characterized in that: The inner ejector pin mounting base (34) is circular, and the outer ejector pin mounting base (35) is annular. The inner diameter of the outer ejector pin mounting base (35) is larger than the outer diameter of the inner ejector pin mounting base (34). The positioning mounting holes (36) are arranged in annular array on the inner ejector pin mounting base (34) and the outer ejector pin mounting base (35). The inner ejector pin mounting base (34) and the outer ejector pin mounting base (35) are located at the lower opening of the storage slot (11) on the lower material tray (9), and the center of the inner ejector pin mounting base (34) and the outer ejector pin mounting base (35) is on the same vertical line as the center of the storage slot (11) on the lower material tray (9) and the upper material tray (10).
9. The multi-arc ion composite hard coating vacuum coating machine according to claim 7, characterized in that: A gasket (39) is provided on the lower side of the cylindrical ejector pin (38), and the gasket (39) is movably sleeved on the screw (37). The cross-section of the cylindrical ejector pin (38) is circular, and the end edges of the cylindrical ejector pin (38) are all rounded.
Citation Information
Patent Citations
Annular component supporting mechanism capable of alternatively switching supporting point in rotation
CN103103490A
Arc ion plating device
CN111893440A
High-energy pulse arc evaporation source
CN113186499A
High-energy pulsed arc evaporation source
CN215404473U