Vacuum sample holder, vacuum sample holder driving system and vacuum processing system

Abstract

The invention relates to the technical field of vacuum equipment, in particular to a vacuum sample holder, a vacuum sample holder driving system and a vacuum processing system. The vacuum sample holder comprises a sample carrying frame and a rotary transmission assembly. The sample carrying frame is used for carrying samples. The rotating transmission assembly comprises a bevel gear set, a rotating transmission shaft and a straight gear set. And the bevel gear set is used for receiving the rotation drive and changing the rotation direction. The near end of the rotary transmission shaft is connected with the bevel gear set. The straight gear set is connected with the far end of the rotating transmission shaft and connected with the sample carrying frame so as to drive the sample carrying frame to rotate around the rotating axis.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of vacuum equipment, in particular to a vacuum sample holder, a vacuum sample holder driving system and a vacuum processing system. BACKGROUND

[0002] In the field of vacuum coating, the movement mode of the sample holder affects the uniformity of the film deposited on the sample surface. For example, a rotating motion can be introduced to improve the uniformity of the coating. However, the transmission of power from outside the vacuum to inside the vacuum needs to ensure the positioning accuracy of the power transmission. SUMMARY

[0003] The present disclosure provides a vacuum sample holder, comprising: a sample holder for carrying a sample; a rotating transmission assembly, comprising: a bevel gear set for receiving a rotating drive and changing the rotating direction; a rotating transmission shaft, a proximal end of which is connected with the bevel gear set; and a spur gear set, a distal end of the rotating transmission shaft is connected with the spur gear set, and the spur gear set is connected with the sample holder to drive the sample holder to rotate around a rotating axis.

[0004] The present disclosure provides a vacuum sample holder driving system, comprising: a rotating drive vacuum cavity; a vacuum sample holder according to any one of the embodiments of the present disclosure; and a rotating drive device, connected with the rotating drive vacuum cavity and connected with the rotating transmission assembly of the vacuum sample holder, for driving the rotating transmission assembly to drive the vacuum sample holder to rotate around the rotating axis.

[0005] The present disclosure provides a vacuum processing system, comprising: a processing vacuum cavity; a vacuum sample holder driving system according to any one of the embodiments of the present disclosure, the vacuum sample holder of the vacuum sample holder driving system being located in the processing vacuum cavity, the linear drive vacuum cavity of the vacuum sample holder driving system being in vacuum sealing connection with the processing vacuum cavity; and a beam generation device, in vacuum sealing connection with the processing vacuum cavity and at least partially located in the processing vacuum cavity to emit a beam into the processing vacuum cavity. BRIEF DESCRIPTION OF DRAWINGS

[0006] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced below. Obviously, the drawings in the following description are only one embodiment of the present disclosure, and those skilled in the art can also obtain other drawings according to these drawings without any creative effort.

[0007] Figure 1 A structural schematic diagram of a vacuum sample holder according to some embodiments of the present disclosure is shown; Figure 2 A cross-sectional schematic diagram of a vacuum sample holder according to some embodiments of the present disclosure is shown; Figure 3 A structural schematic diagram of a first spur gear according to some embodiments of the present disclosure is shown; Figure 4 A structural schematic diagram of a vacuum sample holder drive system according to some embodiments of the present disclosure is shown; Figure 5 A cross-sectional schematic diagram of a vacuum sample holder drive system according to some embodiments of the present disclosure is shown; Figure 6 A partially enlarged schematic diagram of a vacuum sample holder drive system according to some embodiments of the present disclosure is shown; Figure 7 A partially cross-sectional schematic diagram of a swing drive according to some embodiments of the present disclosure is shown; Figure 8 A structural schematic diagram of a vacuum processing system according to some embodiments of the present disclosure is shown.

[0008] In the above figures, the respective reference signs represent: 10000 - vacuum processing system 1000 - vacuum sample holder drive system 100 - vacuum sample holder 110 - sample holder 120 - rotary transmission assembly 121 - bevel gear set, 1211 - first bevel gear, 1212 - second bevel gear, 122 - rotary transmission shaft, 1221 - proximal end cylinder, 1222 - distal end cylinder, 1223 - flange, 123 - spur gear set, 1231 - first spur gear, 12311 - first upper spur gear, 12312 - first lower spur gear, 12313a, 12313b, 12313c, 12313d - coupling elastic member, 1232 - second spur gear, 124 - transmission shaft elastic member, 125 - rotary transmission fixing member, 126 - limiting member, 127 - flat key 130 - swing assembly 131 - swing holder, 1311 - swing arm, 1312 - base, 132 - swing transmission assembly, 1321 - swing transmission shaft 140 - heating assembly 141 - heating device, 142 - heating device fixing member, 144 - adapter 150 - thermocouple 200 - rotary sleeve 300-rotating driving device 310-rotating driving motor, 320-first rotating driving wheel, 330-second rotating driving wheel, 340-rotating driving magnetic assembly, 341-rotating driving seat, 342-rotating driving magnet, 350-rotating shaft, 360-rotating transmission magnetic assembly, 370-rotating driving wheel box, 380a-rotating photoelectric sensor, 380b-triggering baffle 400-outer sleeve 500-oscillating driving device 510-oscillating driving motor 520-first oscillating driving wheel 530-second oscillating driving wheel 540-oscillating driving magnetic assembly 541-oscillating driving seat, 542-oscillating driving magnet, 543-oscillating driving magnetic sleeve 550-oscillating shaft 560-oscillating transmission magnetic assembly 561-oscillating transmission magnet, 562-oscillating transmission magnetic sleeve 570-oscillating driving wheel box 143, 390a, 390b, 390c, 580a, 580b, 580c, 580d, 580e-bearing 600-bellows assembly 610-bellows 700-linear driving device 710-linear driving motor, 720-screw rod, 730-nut, 740-fixing plate, 750-sliding plate, 760-connector, 770-flange 2000-treatment vacuum chamber 3000-beam generating device DETAILED DESCRIPTION

[0009] Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, not all embodiments.

[0010] In the description of the disclosure, it needs to be explained that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top", "bottom", "transverse", "longitudinal" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the disclosure and simplifying the description, and does not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the disclosure. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance. In the description of the disclosure, it needs to be explained that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connected", "coupling" should be understood in a broad sense, for example, it can be fixed connection, or it can be detachable connection; it can be mechanical connection, or it can be electrical connection; it can be direct connection, or it can be indirect connection through intermediate medium; it can be the communication inside two elements. In the description of the disclosure, the distal end or the distal side refers to the end or side that goes deep into the vacuum environment (for example, the vacuum cavity), and the proximal end or the proximal side refers to the end or side opposite to the distal end or the distal side (for example, the end or side away from the vacuum cavity, or the end or side close to the wall of the vacuum cavity in the vacuum cavity, and the like). Or, on the transmission route, the end or side close to the driving device is the proximal end or the proximal side, and the end or side away from the driving device is the distal end or the distal side. For those skilled in the art, the specific meaning of the above terms in the disclosure can be understood according to the specific circumstances.

[0011] Figure 1 A structural schematic diagram of a vacuum sample holder 100 according to some embodiments of the disclosure is shown.

[0012] As Figure 1 shown, in some embodiments of the disclosure, the vacuum sample holder 100 can include a sample carrier 110 and a rotary transmission assembly 120. The sample carrier 110 is used to carry samples. The rotary transmission assembly 120 can include a bevel gear set 121, a rotary transmission shaft 122 and a straight gear set 123. The bevel gear set 121 is used to receive rotary drive and change the direction of rotation. The proximal end of the rotary transmission shaft 122 is connected with the bevel gear set 121. The straight gear set 123 is connected with the distal end of the rotary transmission shaft 122 and connected with the sample carrier 110 to drive the sample carrier 110 to rotate around the rotary axis.

[0013] As Figure 1 shown, in some embodiments of the disclosure, the bevel gear set 121 can include a first bevel gear 1211 and a second bevel gear 1212. The first bevel gear 1211 is used to receive rotary drive. The second bevel gear 1212 is engaged with the first bevel gear 1211 and connected with the proximal end of the rotary transmission shaft 122.

[0014] Those skilled in the art will understand that the rotation axis of the first bevel gear 1211 and the rotation axis of the second bevel gear 1212 can be at any suitable angle. For example... Figure 1 As shown, in some disclosed embodiments, the first bevel gear 1211 may include a first orthogonal bevel gear, and correspondingly, the second bevel gear 1212 may include a second orthogonal bevel gear, wherein the rotation axis of the first orthogonal bevel gear is orthogonal to the rotation axis of the second orthogonal bevel gear.

[0015] In some of the disclosed embodiments, the meshing surfaces of the first bevel gear 1211 and the second bevel gear 1212 may include a molybdenum disulfide (MoS2) film to reduce friction and wear, thereby improving the performance and lifespan of the bevel gear set 121.

[0016] like Figure 1 As shown, in some disclosed embodiments, the spur gear set 123 may include a first spur gear 1231 and a second spur gear 1232. The first spur gear 1231 is connected to the distal end of the rotary transmission shaft 122. The second spur gear 1232 meshes with the first spur gear 1231 and is connected to the sample holder 110 to drive the sample holder 110 to rotate about the rotation axis.

[0017] In some of the disclosed embodiments, the meshing surfaces of the first spur gear 1231 and the second spur gear 1232 may include a molybdenum disulfide (MoS2) film to reduce friction and wear, thereby improving the performance and lifespan of the spur gear set 123.

[0018] like Figure 1 As shown, in some disclosed embodiments, the second bevel gear 1212 is slidably connected to the proximal end of the rotary transmission shaft 122. The rotary transmission assembly 120 may further include a transmission shaft elastic element 124. The transmission shaft elastic element 124 is disposed on the rotary transmission shaft 122 and is used to adjust the mounting distance between the first bevel gear 1211 and the second bevel gear 1212 to reduce the tooth flank backlash between the first bevel gear 1211 and the second bevel gear 1212.

[0019] In some embodiments of this disclosure, the drive shaft elastic element 124 may include any suitable elastic member, such as a spring or a polymer elastomer. Springs may include, for example, compression springs, tension springs, etc. Polymer elastomers may include elastomers made of high-temperature resistant polymer materials, such as fluororubber, silicone rubber, or perfluoroether rubber. In some embodiments, the drive shaft elastic element 124 may include a spring sleeved on the rotating drive shaft 122, with the proximal end of the spring abutting against the distal end of the second bevel gear 1212 to apply an elastic force to the distal end of the second bevel gear 1212, thereby reducing the tooth flank clearance between the first bevel gear 1211 and the second bevel gear 1212.

[0020] In some of the disclosed embodiments, the drive shaft elastic element 124 can improve the transmission accuracy and smoothness of the bevel gear set 121.

[0021] Figure 2 A cross-sectional schematic diagram of a vacuum sample holder 100 according to some embodiments of the present disclosure is shown.

[0022] like Figure 2 As shown, in some disclosed embodiments, the rotary drive shaft 122 may include a proximal cylinder 1221 and a distal cylinder 1222. The proximal cylinder 1221 is used to connect the second bevel gear 1212, and the drive shaft elastic element 124 is sleeved on the proximal cylinder 1221. For example, in some embodiments, the proximal cylinder 1221 and the second bevel gear 1212 are connected by a flat key, with the two sides of the flat key respectively embedded in the keyways of the proximal cylinder 1221 and the second bevel gear 1212, to restrict the circumferential relative rotation of the proximal cylinder 1221 and the second bevel gear 1212, while the second bevel gear 1212 can move axially along the proximal cylinder 1221, thereby achieving a sliding connection between the second bevel gear 1212 and the rotary drive shaft 122. The lower end of the proximal cylinder 1221 is provided with a longitudinal mounting hole (e.g., a threaded hole). A rod (e.g., a screw) is connected to the longitudinal mounting hole (e.g., a threaded connection). A nut is provided on the rod to prevent the second bevel gear 1212 from falling axially downward. The distal cylinder 1222 is fixedly connected to the proximal cylinder 1221 (e.g., by welding, snap-fitting, or integral molding) to connect the first spur gear 1231. The diameter of the distal cylinder 1222 is larger than that of the proximal cylinder 1221. The transmission shaft elastic element 124 is disposed between the distal end face of the second bevel gear 1212 and the proximal end face of the distal cylinder 1222.

[0023] In some of the disclosed embodiments, the rotary drive shaft 122 may be a single-piece molded part. Those skilled in the art will understand that this is merely exemplary, and the rotary drive shaft 122 may also be composed of separately molded parts.

[0024] Figure 3 A schematic diagram of the structure of a first spur gear 1231 according to some embodiments of the present disclosure is shown.

[0025] like Figure 3As shown, in some disclosed embodiments, the first spur gear 1231 may include a first upper spur gear 12311, a first lower spur gear 12312, and at least one coupling elastic element (e.g., coupling elastic element 12313a, 12313b, 12313c, or 12313d). The first upper spur gear 12311 meshes with the teeth of the second spur gear 1232 on a first side. The first lower spur gear 12312 meshes with the teeth of the second spur gear 1232 on a second side. The first side and the second side are opposite to each other; for example, the first side is the left side of the teeth of the second spur gear 1232, and the second side is the right side of the teeth of the second spur gear 1232. At least one coupling elastic element is circumferentially arranged between the first upper spur gear 12311 and the first lower spur gear 12312, for connecting the first upper spur gear 12311 and the first lower spur gear 12312, to adjust the tooth flank clearance between the first upper spur gear 12311 and the second spur gear 1232, and the tooth flank clearance between the first lower spur gear 12312 and the second spur gear 1232. Figure 3 As shown, the first upper spur gear 12311 and the first lower spur gear 12312 may include multiple through holes arranged in a staggered manner. At least one coupling elastic element (e.g., coupling elastic elements 12313a, 12313b, 12313c, or 12313d) may be disposed within the overlapping space of the multiple through holes of the first upper spur gear 12311 and the first lower spur gear 12312, and connected to the sidewall of the through hole. Those skilled in the art will understand that the directional descriptions of the first upper spur gear 12311, the first lower spur gear 12312, the left side, the right side, etc., are introduced only for convenience of reference to the drawings and do not constitute a limitation on the position of the components.

[0026] In some embodiments of this disclosure, the coupling elastic elements (e.g., coupling elastic elements 12313a, 12313b, 12313c, 12313d) may include any suitable elastic member, such as a spring or a polymeric elastomer. Springs may include, for example, compression springs, tension springs, etc. Polymer elastomers may include elastomers made of high-temperature resistant polymer materials, such as fluororubber, silicone rubber, or perfluoroether rubber.

[0027] Those skilled in the art will understand that Figure 3 Four coupling elastic elements 12313a, 12313b, 12313c, and 12313d are shown, but this is merely exemplary. The first spur gear 1231 may also include other suitable numbers of coupling elastic elements, such as one coupling elastic element, two coupling elastic elements, five coupling elastic elements, etc.

[0028] In some disclosed embodiments, coupling elastic elements (e.g., coupling elastic elements 12313a, 12313b, 12313c, 12313d) are installed on the first spur gear 1231 in the spur gear set 123. The two ends of the coupling elastic elements (e.g., coupling elastic elements 12313a, 12313b, 12313c, 12313d) are respectively connected to the first upper spur gear 12311 and the first lower spur gear 12312. The elastic force of the coupling elastic elements (e.g., coupling elastic elements 12313a, 12313b, 12313c, 12313d) is used to automatically adjust the position between the teeth of the first upper spur gear 12311 and the first lower spur gear 12312 and the second spur gear 1232. This can increase the load without loosening, achieve better meshing, and thus effectively increase the stability of the sample transmission process.

[0029] like Figure 2 As shown, in some embodiments of this disclosure, the first lower spur gear 12312 is circumferentially fixedly connected to the rotary transmission shaft 122 by a flat key 127, and radial pressure is applied by a tightening bolt (not shown) to prevent axial displacement between the first lower spur gear 12312 and the rotary transmission shaft 122.

[0030] like Figure 2 As shown, in some embodiments of this disclosure, the rotary drive shaft 122 may further include a flange 1223. A first upper spur gear 12311 is disposed (e.g., engaged) between the flange 1223 and the first lower spur gear 12312. The flange 1223 and the first lower spur gear 12312 can limit the axial displacement of the first upper spur gear 12311, and the first upper spur gear 12311 can rotate relative to the rotary drive shaft 122.

[0031] In some disclosed embodiments, the drive shaft elastic element 124 and the coupling elastic elements (e.g., coupling elastic elements 12313a, 12313b, 12313c, 12313d) work together to reduce the tooth backlash of the rotary transmission assembly 120 and achieve better meshing through flexible adjustment, and also to compensate for thermal deformation accuracy, thereby preventing gear transmission jamming.

[0032] In some of the disclosed embodiments, the sample carried by the sample holder 110 can be rotated in-plane by the drive of the rotary transmission assembly 120. During process operations (e.g., coating), the heat distribution difference caused by the heating device 141 can be reduced, and the coating uniformity can be improved.

[0033] like Figure 1As shown, in some disclosed embodiments, the vacuum sample holder 100 may further include a swing assembly 130. The swing assembly 130 is connected to the sample holder 110 and is used to drive the sample holder 110 to swing. The swing assembly 130 may include a swing frame 131 and a swing transmission assembly 132. The swing frame 131 is connected to the sample holder 110. The swing transmission assembly 132 is used to drive the swing frame 131 to swing about a swing axis.

[0034] like Figure 1 As shown, in some disclosed embodiments, the swing frame 131 may include a swing arm 1311 and a base 1312. The swing arm 1311 is connected to the swing transmission assembly 132. The base 1312 is fixedly connected to the swing arm 1311, and the swing arm 1311 receives a drive from the swing transmission assembly 132 to swing about the swing axis and drive the base 1312 to swing.

[0035] like Figure 1 As shown, in some disclosed embodiments, the oscillating transmission assembly 132 may include an oscillating transmission shaft 1321. The oscillating transmission shaft 1321 is connected to the oscillating arm 1311 and is used to receive rotational drive to drive the oscillating frame 131 to oscillate about the oscillating axis.

[0036] In some of the disclosed embodiments, the swing of the swing frame 131 allows the sample carried on the sample holder 110 to reach different tilt angles, which facilitates more precise processing of the sample during process operations (e.g., coating).

[0037] like Figure 2 As shown, in some disclosed embodiments, the rotary transmission assembly 120 may further include a rotary transmission fixing member 125. The rotary transmission fixing member 125 passes through the proximal end of the base 1312 and is fixedly connected to the base 1312. The rotary transmission shaft 122 is rotatably connected to the rotary transmission fixing member 125 (e.g., through a bearing), and the rotary transmission shaft 122 is axially positioned by a limiting member 126 at its proximal end.

[0038] like Figure 1 As shown, in some disclosed embodiments, the vacuum sample holder 100 may further include a heating assembly 140. The heating assembly 140 may include a heating device 141 and a heating device fixing member 142. The heating device 141 is disposed on the proximal side of the sample-bearing end of the sample holder 110 and is used to heat the sample carried on the sample holder 110. The heating device fixing member 142 has its proximal end passing through and fixedly connected to the distal end of the base 1312, and its distal end fixedly connected to the heating device 141. A second spur gear 1232 is sleeved on the heating device fixing member 142 and rotatably connected to it.

[0039] like Figure 2As shown, in some disclosed embodiments, the heating assembly 140 further includes an adapter 144 and a bearing 143. The adapter 144 is sleeved on the heating device fixing member 142 and rotatably connected to the heating device fixing member 142. For example, the adapter 144 is rotatably connected to the heating device fixing member 142 via the bearing 143. The second spur gear 1232 is fixedly connected to the adapter 144, thereby achieving a rotatable connection with the heating device 142 via the adapter 144, and achieving a connection between the heating device 142 and the base 1312 via the heating device 142.

[0040] In some disclosed embodiments, the heating device 141 may include a surrounding heat shield and / or an upper heat shield to reduce heat leakage and make the heat in the heating zone more uniform. In some embodiments, the surrounding heat shield may include a circular cover.

[0041] Figure 4 A schematic diagram of the structure of a vacuum sample holder drive system 1000 according to some embodiments of the present disclosure is shown. Figure 5 A cross-sectional schematic diagram of a vacuum sample holder drive system 1000 according to some embodiments of the present disclosure is shown.

[0042] like Figure 4 and Figure 5 As shown, in some disclosed embodiments, the vacuum sample holder 100 may further include a thermocouple 150, which is thermally coupled to the sample carrier 110, for example, in direct or indirect contact, to measure the temperature of the sample carrier 110. In some embodiments, the temperature signal measured by the thermocouple 150 can be fed back to the control system for temperature regulation.

[0043] like Figure 4 and Figure 5 As shown, in some disclosed embodiments, the vacuum sample holder drive system 1000 may include a rotating sleeve 200, a vacuum sample holder 100 according to any embodiment of this disclosure, and a rotating drive device 300. The rotating sleeve 200 is used to form a rotating drive vacuum chamber. The rotating drive device 300 is connected to the rotating drive vacuum chamber and to the rotating transmission assembly 120 of the vacuum sample holder 100, and is used to drive the rotating transmission assembly 120 to drive the vacuum sample holder 100 to rotate about a rotation axis.

[0044] like Figure 4 and Figure 5As shown, in some disclosed embodiments, the rotary drive device 300 may include a rotary drive motor 310, a first rotary drive wheel 320, a second rotary drive wheel 330, a rotary drive magnetic assembly 340, a rotary shaft 350, and a rotary transmission magnetic assembly 360. The first rotary drive wheel 320 is connected to the output end of the rotary drive motor 310. The second rotary drive wheel 330 meshes with the first rotary drive wheel 320. The rotary drive magnetic assembly 340 is disposed outside the rotary sleeve 200 and is fixedly connected to the second rotary drive wheel 330. The rotary shaft 350 is rotatably connected to the rotary sleeve 200 (e.g., as shown in the figure). Figure 5 As shown, the near end of the rotating shaft 350 is rotatably connected to the rotating sleeve 200 via bearing 390a, and the far end of the rotating shaft 350 is rotatably connected to the rotating sleeve 200 via bearing 390b, and is connected to the bevel gear set 121. The rotary transmission magnetic assembly 360 is fixedly connected to the rotating shaft 350, and the rotary drive magnetic assembly 340 is magnetically coupled to the rotary transmission magnetic assembly 360 to drive the rotating shaft 350 to rotate.

[0045] like Figure 4 and Figure 5 As shown, in some disclosed embodiments, the rotary drive magnetic assembly 340 may include a rotary drive seat 341 and a rotary drive magnet 342. The rotary drive seat 341 is sleeved on the outside of the rotary sleeve 200 and rotatably connected to the proximal end of the rotary sleeve 200 (e.g., as shown in the figure). Figure 5 As shown, the rotary drive base 341 is rotatably connected to the proximal end of the rotary sleeve 200 via a bearing 390c, and the second rotary drive wheel 330 is sleeved on the rotary drive base 341 and fixedly connected to the rotary drive base 341. The rotary drive magnet 342 is fixedly connected to the rotary drive base 341.

[0046] In some disclosed embodiments, the rotary drive magnetic assembly 340 may further include a rotary drive magnetic sleeve (not shown in the figures). The rotary drive magnetic sleeve is disposed within the rotary drive base 341 and is fixedly connected to the rotary drive base 341. The rotary drive magnetic sleeve is used to mount the rotary drive magnet 342.

[0047] In some disclosed embodiments, the rotary drive magnetic assembly 360 may include a rotary drive magnetic sleeve and a rotary drive magnet. The rotary drive magnetic sleeve is fixedly connected to the rotary shaft 350. The rotary drive magnetic sleeve is used to mount the rotary drive magnet. The rotary drive magnet is magnetically coupled to the rotary drive magnet 342 to drive the rotary shaft 350 to rotate.

[0048] like Figure 4 and Figure 5As shown, in some disclosed embodiments, the rotary drive device 300 may further include a rotary drive wheel housing 370. The rotary drive wheel housing 370 is fixedly connected to the proximal end of the rotary sleeve 200. The rotary drive wheel housing 370 may include a rotary drive wheel receiving cavity for accommodating the first rotary drive wheel 320 and the second rotary drive wheel 330.

[0049] like Figure 4 As shown, in some disclosed embodiments, the rotary drive device 300 may further include a rotary photoelectric sensor 380a, used to return the position of the rotary shaft 350 to zero, ensuring the consistency of the sample transfer position each time, so as to guarantee the stability of sample transmission. In some embodiments, the rotary photoelectric sensor 380a may be disposed on the rotary drive wheel housing 370, and the trigger baffle 380b may be disposed on the rotary drive base 341.

[0050] like Figure 4 and Figure 5 As shown, in some disclosed embodiments, the vacuum sample holder drive system 1000 may further include an outer tube 400 and a swing drive device 500. The outer tube 400 is used to form a swing drive vacuum chamber. The swing drive device 500 is connected to the swing drive vacuum chamber and to the swing transmission assembly 132 of the vacuum sample holder 100, and is used to drive the swing transmission assembly 132 to drive the swing frame 131 to swing around the swing axis.

[0051] Figure 6 A partially enlarged schematic diagram of a vacuum sample holder drive system 1000 according to some embodiments of the present disclosure is shown.

[0052] like Figure 6 As shown, in some disclosed embodiments, the swing drive device 500 may include a swing drive motor 510, a first swing drive wheel 520, a second swing drive wheel 530, a swing drive magnetic assembly 540, a swing shaft 550, and a swing transmission magnetic assembly 560. The first swing drive wheel 520 is connected to the output end of the swing drive motor 510. The second swing drive wheel 530 meshes with the first swing drive wheel 520. The swing drive magnetic assembly 540 is disposed outside the outer sleeve 400 and is fixedly connected to the second swing drive wheel 530. The swing shaft 550 is sleeved inside the outer sleeve 400, with its proximal end rotatably connected to the proximal end of the outer sleeve 400, and its distal end rotatably connected to the distal end of the outer sleeve 400 and fixedly connected to the swing transmission shaft 1321, for example, as shown in... Figure 6As shown, the proximal end of the swing shaft 550 is rotatably connected to the proximal end of the outer sleeve 400 via bearing 580a, and the distal end of the swing shaft 550 is rotatably connected to the distal end of the outer sleeve 400 via bearing 580b. The swing transmission magnetic assembly 560 is fixedly connected to the swing shaft 550, and the swing drive magnetic assembly 540 is magnetically coupled to the swing transmission magnetic assembly 560 to drive the swing shaft 550 to rotate and drive the swing frame 131 to swing around the swing axis.

[0053] like Figure 5 and Figure 6 As shown, in some disclosed embodiments, the swing shaft 550 is a hollow shaft, the rotating sleeve 200 is sleeved inside the swing shaft 550, and the distal end of the rotating sleeve 200 extends into the swing transmission shaft 1321 and is rotatably connected to the swing transmission shaft 1321 (e.g., as shown). Figure 5 As shown, the distal end of the rotating sleeve 200 is rotatably connected to the swing drive shaft 1321 via the bearing 580c.

[0054] like Figure 6 As shown, in some disclosed embodiments, the oscillating drive magnetic assembly 540 may include an oscillating drive seat 541 and an oscillating drive magnet 542. The oscillating drive seat 541 is sleeved on the outer sleeve 400 and rotatably connected to the outer sleeve 400 (e.g., as shown in the figure). Figure 6 As shown, the proximal end of the swing drive seat 541 and the outer sleeve 400 can be rotatably connected via bearing 580d, and the proximal end of the swing drive seat 541 and the outer sleeve 400 can be rotatably connected via bearing 580e. The second swing drive wheel 530 is sleeved on the swing drive seat 541 and fixedly connected to it. The swing drive magnet 542 is fixedly connected to the swing drive seat 541.

[0055] Figure 7 A partial cross-sectional schematic diagram of a swing drive device 500 according to some embodiments of the present disclosure is shown.

[0056] like Figure 7 As shown, in some disclosed embodiments, the oscillating drive magnetic assembly 540 may include an oscillating drive magnetic sleeve 543 and an oscillating drive magnet 542. The oscillating drive magnetic sleeve 543 is disposed within the oscillating drive base 541 and is fixedly connected to the oscillating drive base 541 for mounting the oscillating drive magnet 542.

[0057] like Figure 7 As shown, in some disclosed embodiments, the oscillating drive magnetic assembly 560 may include an oscillating drive magnetic sleeve 562 and an oscillating drive magnet 561. The oscillating drive magnetic sleeve 562 is fixedly connected to the oscillating shaft 550 and is used to mount the oscillating drive magnet 561. The oscillating drive magnet 561 is magnetically coupled to the oscillating drive magnet 542 to drive the oscillating shaft 550 to rotate.

[0058] like Figure 7 As shown, in some disclosed embodiments, the oscillating drive magnet 542 and the oscillating transmission magnet 561 can be constructed using neodymium iron boron permanent magnets to form a Halbach array, working together to enhance the internal magnetic field while reducing external magnetic field leakage, thereby transmitting a stable load. The load borne by the oscillating shaft 550 and its supporting bearings (e.g., bearings 580a, 580b) is more stable, extending its service life. Furthermore, the oscillating drive magnet 542 and the oscillating transmission magnet 561 employ non-contact transmission, resulting in more thorough physical isolation, achieving a higher vacuum level, a wider operating temperature range, and reduced maintenance requirements.

[0059] Those skilled in the art will understand that Figure 7 The swing drive magnet 542 and swing transmission magnet 561 shown are only examples of Halbach arrays composed of neodymium iron boron permanent magnets. Other suitable types of magnets can be selected according to actual performance indicators and cost budgets.

[0060] like Figure 7 As shown, in some disclosed embodiments, the power outside the vacuum (outside the outer tube 400) is transmitted to the inside of the vacuum (inside the outer tube 400) by the swing drive magnetic component 540 and the swing transmission magnetic component 560, so as to drive the swing shaft 550 to rotate, thereby causing the sample holder 110 to swing.

[0061] like Figure 4 As shown, in some disclosed embodiments, the swing drive device 500 may further include a swing drive wheel housing 570. The swing drive wheel housing 570 is fixedly connected to the outer sleeve 400 and may include a swing drive wheel receiving cavity for accommodating the first swing drive wheel 520 and the second swing drive wheel 530.

[0062] In some disclosed embodiments, the swing drive device 500 may further include a swing photoelectric sensor (not shown in the figure) for returning the position of the swing shaft 550 to zero, ensuring the consistency of the sample transfer position each time, so as to guarantee the stability of sample transmission. In some embodiments, the swing photoelectric sensor may be disposed on the swing drive wheel box 570, and the swing trigger baffle (not shown in the figure) may be disposed on the swing drive seat 541.

[0063] like Figure 4 and Figure 5As shown, in some disclosed embodiments, the vacuum sample holder drive system 1000 may further include a bellows assembly 600 and a linear drive device 700. The bellows assembly 600 may include a bellows 610, which is sleeved outside the rotating sleeve 200 to form a linear drive vacuum chamber. The linear drive device 700 is connected to the linear drive vacuum chamber and to the outer sleeve 400 to drive the outer sleeve 400 to perform linear movement, thereby driving the sample holder 110 to perform linear movement.

[0064] like Figure 4 As shown, in some disclosed embodiments, the linear drive device 700 may include a linear drive motor 710, a lead screw 720, a nut 730, a fixed plate 740, and a sliding plate 750. The lead screw 720 is connected to the output end of the linear drive motor 710. The nut 730 is threadedly connected to the lead screw 720 and is used for lifting and lowering under the drive of the lead screw 720. The fixed plate 740 is disposed at the proximal end of the bellows 610 and is fixedly connected to the distal end of the bellows 610 via a connector 760. The sliding plate 750 is fixedly connected to the nut 730 and also fixedly connected to the proximal end of the bellows 610. The sliding plate 750 is used to lift and lower along the fixed plate 740 under the drive of the lead screw 720 via the nut 730.

[0065] In some disclosed embodiments, during the linear motion of the linearly driven vacuum cavity, the bellows 610 deflects (e.g., as...). Figure 5 As shown, the left end of the bellows 610 is offset upwards or downwards to provide a linear motion distance and maintain a vacuum environment within the linearly driven vacuum chamber.

[0066] In some embodiments of this disclosure, by driving the outer sleeve 400 to make linear motion and driving the sample carrier 110 to make linear motion, it can quickly and accurately dock with the sample transfer device (e.g., the robotic arm of the sample transfer device) so that the sample can be transferred between the sample transfer device and the sample carrier 110 more smoothly.

[0067] In some disclosed embodiments, the fixed plate 740 and the slide plate 750 can be connected by a cross roller linear guide (not shown in the figure), but this is only exemplary. The fixed plate 740 and the slide plate 750 can also be connected by other suitable means, such as a gear and rack drive, so that the slide plate 750 can move up and down along the fixed plate 740.

[0068] like Figure 4 and Figure 5 As shown, in some disclosed embodiments, the linear drive 700 may further include a flange 770. The flange 770 is vacuum-sealed to the distal end of the bellows assembly 600 and can be used to connect a processing vacuum chamber (e.g., Figure 8 The processing vacuum chamber 2000 is shown.

[0069] Figure 8 A schematic diagram of the structure of a vacuum processing system 10000 according to some embodiments of the present disclosure is shown.

[0070] like Figure 8 As shown, in some disclosed embodiments, the vacuum processing system 10000 may include a processing vacuum chamber 2000, a vacuum sample holder drive system 1000 according to any embodiment of this disclosure, and a beam generator 3000. The vacuum sample holder 100 of the vacuum sample holder drive system 1000 is at least partially located within the processing vacuum chamber 2000, and the linear drive vacuum chamber of the vacuum sample holder drive system 1000 is vacuum-sealed to the processing vacuum chamber 2000. The beam generator 3000 is vacuum-sealed to the processing vacuum chamber 2000 and is at least partially located within the processing vacuum chamber 2000 to emit a beam into the processing vacuum chamber 2000.

[0071] According to some embodiments of the present disclosure, the vacuum sample holder 100, the vacuum sample holder drive system 1000, and the vacuum processing system 10000 include three independent motion axes: a rotation axis 350 for sample rotation, a swing axis 550 for sample tilting and flipping, and an outer tube 400 for linear sample movement. These axes are connected to the vacuum chamber via a magnetic coupling seal and a bellows assembly 600. The three independent motion axes are integrated through an interlocking design, resulting in a compact structure that significantly improves the overall rigidity of the system and ensures high stability and accuracy during the motion process.

[0072] According to some embodiments of the present disclosure, the vacuum sample holder 100, the vacuum sample holder drive system 1000, and the vacuum processing system 10000 can ensure uniform film deposition by rotation, tilting can adjust the angle between the sample and the beam generating device 3000, and linear motion can be used to control the heating distance and improve the uniformity of film deposition.

[0073] It should be noted that the above are merely exemplary embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A vacuum sample holder, characterized in that, The vacuum sample holder comprises: a sample holder for holding a sample; a rotary transmission assembly comprising: a bevel gear set for receiving a rotary drive and changing a rotary direction; a rotary transmission shaft connected with the proximal end of the bevel gear set; and a spur gear set connected with the distal end of the rotary transmission shaft and the sample holder for driving the sample holder to rotate around a rotary axis.

2. The vacuum sample holder according to claim 1, wherein the bevel gear set comprises: a first bevel gear for receiving a rotary drive; a second bevel gear meshing with the first bevel gear and connected with the proximal end of the rotary transmission shaft; and / or the spur gear set comprises: a first spur gear connected with the distal end of the rotary transmission shaft; and a second spur gear meshing with the first spur gear and connected with the sample holder for driving the sample holder to rotate around a rotary axis.

3. The vacuum sample holder according to claim 2, wherein the second bevel gear is connected with the proximal end of the rotary transmission shaft in a sliding manner, the rotary transmission assembly further comprises: a transmission shaft elastic member arranged on the rotary transmission shaft for adjusting the installation distance between the first bevel gear and the second bevel gear.

4. The vacuum sample holder according to claim 3, wherein the rotary transmission shaft comprises: a proximal end cylinder for connecting the second bevel gear, and the transmission shaft elastic member is sleeved on the proximal end cylinder; and a distal end cylinder fixedly connected with the proximal end cylinder for connecting the first spur gear, the distal end cylinder has a larger diameter than the proximal end cylinder, and the transmission shaft elastic member is arranged between the distal end face of the second bevel gear and the proximal end face of the distal end cylinder.

5. The vacuum sample holder according to claim 2, wherein the first spur gear comprises: a first upper spur gear meshing with a first side of the teeth of the second spur gear; a first lower spur gear meshing with a second side of the teeth of the second spur gear; and at least one coupling elastic member arranged circumferentially between the first upper spur gear and the first lower spur gear for connecting the first upper spur gear and the first lower spur gear to adjust the tooth side clearance between the first upper spur gear and the second spur gear and the tooth side clearance between the first lower spur gear and the second spur gear.

6. The vacuum sample holder according to claim 5, wherein the first lower spur gear is circumferentially fixedly connected with the rotary transmission shaft by means of a flat key, and axial displacement between the first lower spur gear and the rotary transmission shaft is prevented by applying radial pressure by means of a jacking bolt; and / or the rotary transmission shaft further comprises a flange, the first upper spur gear is arranged between the flange and the first lower spur gear, the flange and the first lower spur gear are used to limit the axial displacement of the first upper spur gear, and the first upper spur gear is capable of rotating relative to the rotary transmission shaft.

7. The vacuum sample holder of claim 1, wherein, The vacuum sample holder further comprises: a swing assembly connected with the sample holder for driving the sample holder to swing, the swing assembly comprising: a swing holder connected with the sample holder; and a swing transmission assembly for driving the swing holder to swing around a swing axis. ​ 8. The vacuum sample holder of claim 7, wherein the swing frame comprises: a swing arm connected to the swing transmission assembly; and a base fixedly connected to the swing arm, the swing arm receiving a driving force from the swing transmission assembly to swing about a swing axis and drive the base to swing.

9. The vacuum sample holder of claim 8, wherein the rotation transmission assembly further comprises: a rotation transmission fixed member penetrating through a proximal end of the base and fixedly connected to the base, the rotation transmission shaft being rotatably connected to the rotation transmission fixed member, and the rotation transmission shaft being axially positioned by a limiting member of the proximal end, and / or the vacuum sample holder further comprises a heating assembly, the heating assembly comprising: a heating device disposed at a proximal side of a sample loading end of the sample holder for heating a sample loaded on the sample holder; and a heating device fixed member penetrating through a distal end of the base and fixedly connected to the base, a distal end of the heating device fixed member being fixedly connected to the heating device, the second spur gear being sleeved on the heating device fixed member and rotatably connected to the heating device fixed member.

12. The vacuum sample holder driving system of claim 11, wherein the rotation driving magnetic assembly comprises: a rotation driving seat sleeved outside the rotation sleeve and rotatably connected to a proximal end of the rotation sleeve, the second rotation driving wheel being sleeved on the rotation driving seat and fixedly connected to the rotation driving seat; and a rotation driving magnetic sleeve fixedly connected to the rotation driving magnetic sleeve seat for mounting a rotation driving magnet, and / or the rotation driving device further comprises: a rotation driving wheel box fixedly connected to the rotation sleeve, the rotation driving wheel box comprising a rotation driving wheel accommodating cavity for accommodating the first rotation driving wheel and the second rotation driving wheel.

12. The vacuum sample holder driving system of claim 11, wherein the rotation driving magnetic assembly comprises: a rotation driving seat sleeved outside the rotation sleeve and rotatably connected to a proximal end of the rotation sleeve, the second rotation driving wheel being sleeved on the rotation driving seat and fixedly connected to the rotation driving seat; and a rotation driving magnetic sleeve fixedly connected to the rotation driving magnetic sleeve seat for mounting a rotation driving magnet, and / or the rotation driving device further comprises: a rotation driving wheel box fixedly connected to the rotation sleeve, the rotation driving wheel box comprising a rotation driving wheel accommodating cavity for accommodating the first rotation driving wheel and the second rotation driving wheel. ​ ​ ​ ​ ​ ​ ​ ​ 10. A vacuum sample holder drive system, characterized by, ​ ​ ​ ​ ​ 11. The vacuum rack drive system of claim 10, wherein, ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 13. The vacuum rack drive system of claim 10, wherein, ​ ​ ​ The swing driving device is connected with the swing driving vacuum cavity and the swing transmission assembly of the vacuum sample holder, and is used to drive the swing transmission assembly to drive the swing holder to swing around the swing axis.

14. The vacuum rack drive system of claim 13, wherein, The swing driving device comprises: a swing driving motor; a first swing driving wheel connected with the output end of the swing driving motor; a second swing driving wheel engaged with the first swing driving wheel; a swing driving magnetic assembly arranged outside the outer sleeve and fixedly connected with the second swing driving wheel; a swing shaft sleeved in the outer sleeve, the proximal end of which is rotatably connected with the proximal end of the outer sleeve, the distal end of which is rotatably connected with the distal end of the outer sleeve and fixedly connected with the swing transmission shaft; and a swing transmission magnetic assembly connected with the swing shaft, the swing driving magnetic assembly and the swing transmission magnetic assembly being magnetically coupled to drive the swing shaft to rotate and drive the swing holder to swing around the swing axis.

15. The vacuum sample holder driving system according to claim 14, wherein the swing shaft is a hollow shaft, the rotating sleeve is sleeved in the swing shaft, and the distal end of the rotating sleeve extends to be sleeved in the swing transmission shaft and is rotatably connected with the swing transmission shaft, and / or the swing driving magnetic assembly comprises: a swing driving seat sleeved outside the outer sleeve and rotatably connected with the outer sleeve, and the second swing driving wheel is sleeved on the swing driving seat and fixedly connected with the swing driving seat; and a swing driving magnetic sleeve fixedly connected with the swing driving seat for mounting swing driving magnets, and / or the swing driving device further comprises: a swing driving wheel box fixedly connected with the outer sleeve and comprising a swing driving wheel accommodating cavity for accommodating the first swing driving wheel and the second swing driving wheel.

16. The vacuum rack drive system of claim 10, wherein, Further comprising: a bellows assembly comprising a bellows sleeved outside the rotating sleeve for forming a linear driving vacuum cavity; a linear driving device connected with the linear driving vacuum cavity and the outer sleeve to drive the outer sleeve to move linearly and drive the sample holder to move linearly.

17. The vacuum rack drive system of claim 16, wherein, The linear driving device comprises: a linear driving motor; a screw rod connected with the output end of the linear driving motor; a nut threadedly connected with the screw rod for lifting under the drive of the screw rod; a fixed plate arranged at the proximal end of the bellows and fixedly connected with the distal end of the bellows through a connecting piece; and a sliding plate fixedly connected with the nut and the proximal end of the bellows, the sliding plate being used to lift along the fixed plate under the drive of the screw rod through the nut.

18. A vacuum processing system, characterized by, comprising: a processing vacuum cavity; the vacuum sample holder driving system according to any one of claims 10-17, the vacuum sample holder of the vacuum sample holder driving system being located at least partially in the processing vacuum cavity, the linear driving vacuum cavity of the vacuum sample holder driving system being vacuum-sealably connected with the processing vacuum cavity; and a beam generating device vacuum-sealably connected with the processing vacuum cavity and located at least partially in the processing vacuum cavity to emit a beam into the processing vacuum cavity.

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