Chip feeding device and chip testing machine

Abstract

The invention relates to the technical field of semiconductor equipment, and discloses a chip feeding device and a chip test.The chip feeding device comprises a rack and at least two material picking modules vertically arranged on the rack, each material picking module comprises a material picking part and a first driving part, the material picking parts are connected with the first driving parts, the material picking parts are used for picking chips, and the first driving parts are connected with the first driving parts; the first driving piece is connected to the rack and used for driving the picking piece to rotate, and the rotating axis of the picking piece extends horizontally; in every two adjacent material picking modules, the material picking module located on the upper portion is the first material picking module, the material picking module located on the lower portion is the second material picking module, and a material picking piece of the first material picking module can pick up chips on a material picking piece of the second material picking module at a first preset position. On the basis of at least two material picking modules which are vertically arranged, a blue film feeding mechanism can be assisted in feeding materials to a turret transferring mechanism.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor equipment, and more particularly, relates to a chip feeding device and a chip testing machine. BACKGROUND

[0002] A semiconductor equipment, such as a turret chip testing machine, includes a turret transfer mechanism, and the feeding is usually realized by a feeding vibration disc. A suction member in the turret transfer mechanism takes the material on the feeding vibration disc in the form of lifting. Such a turret chip testing machine is difficult to realize chip feeding by using a blue film feeding mechanism. The reason is that the blue film feeding mechanism includes a bearing member for bearing a blue film tray and a driving member for driving the bearing member to move, which occupies a large space, and the lifting stroke of the suction member of the turret transfer mechanism is limited. The blue film feeding mechanism is difficult to be arranged below the turret transfer mechanism to feed the suction member of the turret transfer mechanism. SUMMARY

[0003] The main purpose of the present application is to provide a chip feeding device which can assist the blue film feeding mechanism to feed the turret transfer mechanism.

[0004] According to a first aspect of the present application, a chip feeding device is provided, which includes a rack and at least two pick-up modules vertically arranged on the rack. The pick-up module includes a pick-up piece and a first driving piece. The pick-up piece is connected to the first driving piece. The pick-up piece is used to pick up chips. The first driving piece is connected to the rack. The first driving piece is used to drive the pick-up piece to rotate. The rotation axis of the pick-up piece extends horizontally.

[0005] In the two adjacent pick-up modules, the upper one is a first pick-up module, and the lower one is a second pick-up module. The pick-up piece of the first pick-up module can pick up the chips on the pick-up piece of the second pick-up module at a first preset position.

[0006] In a specific embodiment of the present application, the pick-up module further includes a rotating disc. In the pick-up module, the number of pick-up pieces is multiple. The multiple pick-up pieces are connected to the end face of the rotating disc in the circumferential direction around the axis of the rotating disc. The rotation axis is the axis of the rotating disc. The rotating disc is connected to the first driving piece at the end of the rotating disc away from the pick-up pieces along the axis.

[0007] In a specific embodiment of the present application, the material picking member comprises a seat body, a first elastic member and a suction nozzle, the seat body is connected to the rotating disc and can slide along the rotating disc radially away from the center of the rotating disc, the seat body has a limiting part, the first elastic member connects the seat body and the rotating disc so that the limiting part abuts against the side wall surface of the rotating disc, and the suction nozzle is connected to the seat body and used for picking chips;

[0008] The material picking module further comprises a second driving member and an air path assembly, the second driving member is connected to the rack and arranged below the first driving member, the second driving member is used for driving the limiting part to move downward so as to drive the seat body to slide along the rotating disc radially away from the center of the rotating disc, thereby driving the suction nozzle to move, and the air path assembly is arranged on the rotating disc and connected to the suction nozzle, and is used for making the suction nozzle inhale or blow air.

[0009] In a specific embodiment of the present application, the number of the material picking members is four, and the four material picking members are arranged at equal intervals.

[0010] The air path assembly comprises a guide plate and an air pipe.

[0011] The guide plate has an avoiding through hole, the guide plate is arranged on the side of the rotating disc close to the first driving member along the axis of the rotating disc, and one side of the guide plate facing the rotating disc abuts against the rotating disc, the power output end of the first driving member penetrates through the avoiding through hole, one side of the guide plate facing the rotating disc is provided with a first arc-shaped groove, a second arc-shaped groove and a third arc-shaped groove, the first arc-shaped groove, the second arc-shaped groove and the third arc-shaped groove are arranged at intervals along a first circular track around the axis of the rotating disc, on the first circular track, a first air guide channel is arranged between the first arc-shaped groove and the second arc-shaped groove, a second air guide channel is arranged between the second arc-shaped groove and the third arc-shaped groove, and a third air guide channel is arranged between the third arc-shaped groove and the first arc-shaped groove, and the first arc-shaped groove, the second arc-shaped groove and the third arc-shaped groove are all communicated with a fourth air guide channel.

[0012] The rotating disc is provided with a first air hole, a second air hole, a third air hole and a fourth air hole arranged at intervals along a second circular track, and the first air hole, the second air hole, the third air hole and the fourth air hole are all communicated with the suction nozzles of the four material picking members through the air pipe respectively.

[0013] Among them, the first circular track and the second circular track are opposite along the axis of the rotating disc.

[0014] In a specific embodiment of the present invention, the first driving member includes a first motor, a clamp, a first connector and a second connector. The first motor is fixedly connected to the frame, the clamp is fixedly connected to the output shaft of the first motor, and the output shaft of the first motor and the clamp pass through the clearance through hole.

[0015] The output shaft of the first motor is fixedly connected to the turntable via the first connector, and the clamp is fixedly connected to the turntable via the second connector.

[0016] In a specific embodiment of the present invention, the end of the air guide plate away from the turntable is connected to the frame through a plurality of elastic components, and the plurality of elastic components are spaced apart around the axis of the turntable;

[0017] The elastic component includes a connecting shaft and a second elastic element. The connecting shaft is fixedly connected to the frame, and the axis of the connecting shaft is parallel to the axis of the turntable. The air guide plate is slidably connected to the connecting shaft. The second elastic element can elastically extend and retract along the axial direction of the connecting shaft. Along the axial direction of the connecting shaft, one end of the second elastic element abuts against the frame, and the other end abuts against the air guide plate, so that the air guide plate abuts against the turntable.

[0018] In a specific embodiment of the present invention, the picking component further includes a cam follower, which is connected to one end of the limiting portion along the axial direction of the turntable and close to the frame;

[0019] The second drive component includes a second motor and a cam. The second motor is fixedly connected to the frame, and the cam is fixedly connected to the output shaft of the second motor. The cam is used to contact the cam follower.

[0020] In a specific embodiment of the present invention, the chip loading device further includes a chip detection module, the chip detection module including a camera component, the camera component being disposed on one side of the picking module, the camera component being used to photograph the chip on the picking component at a second preset position.

[0021] In a specific embodiment of the present invention, the chip feeding device further includes a defective product collection box, which is disposed on one side of the picking module, and the picking module is located between the chip detection module and the defective product collection box.

[0022] The present invention also proposes a chip testing machine, including a blue film feeding mechanism, a turret transfer mechanism, and a chip loading device as described above. The blue film feeding mechanism is disposed below the chip loading device. The turret transfer mechanism includes a turret and a suction member. The suction member is connected to the turret and is used to drive the suction member to rotate. The turret is disposed on one side of the chip loading device, and the suction member can move to above the chip loading device. The chip loading device is used to transfer the chip on the blue film feeding mechanism to the suction member.

[0023] One of the above-described technical solutions of the present invention has at least one of the following advantages or beneficial effects:

[0024] The chip loading device of the present invention includes at least two picking modules arranged vertically, and adjacent picking modules are capable of transferring chips. Each picking module picks up a chip via a picking member and drives the picking member to rotate via a first driving member to transfer the chip. In practical applications, the chip loading device is positioned above the blue film feeding mechanism, and the turret transfer mechanism is positioned to one side of the chip loading device. The suction member of the turret transfer mechanism can move to the top of the chip loading device. Thus, the lowermost picking module picks up the chip from the blue film feeding mechanism and transfers it upwards to the picking module above it. Adjacent picking modules continue to transfer chips to the uppermost picking module. Finally, the suction member of the turret transfer mechanism removes the chip. Therefore, the chip loading device of the present invention, based on at least two vertically arranged picking modules, can assist the blue film feeding mechanism in feeding the turret transfer mechanism. Attached Figure Description

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0026] Figure 1 This is a structural diagram of the chip loading device according to an embodiment of the present invention;

[0027] Figure 2 This is an exploded view of the chip loading device according to an embodiment of the present invention;

[0028] Figure 3 This is an embodiment of the present invention. Figure 2 Enlarged diagram of A in the middle;

[0029] Figure 4 This is a structural diagram of the turntable and the material picking component in an embodiment of the present invention;

[0030] Figure 5 This is a structural diagram of the air guide plate according to an embodiment of the present invention;

[0031] Figure 6 This is a structural diagram of the chip testing machine according to an embodiment of the present invention;

[0032] Figure 7 This is an embodiment of the present invention. Figure 6 Enlarged diagram of B in the diagram.

[0033] In the diagram, 100 is the first circular trajectory; 200 is the second circular trajectory; 1 is the frame; 2 is the material pickup module; 21 is the material pickup component; 211 is the base; 2111 is the limiting part; 212 is the first elastic component; 213 is the suction nozzle; 214 is the cam follower; 22 is the first driving component; 221 is the first motor; 222 is the clamp; 223 is the first connecting component; 224 is the second connecting component; 23 is the turntable; 23A is the first vent; 23B is the second vent; 23C is the third vent; 23D is the fourth vent; 24 is the second driving component; 241 is the second motor; 242 is the cam. 25. Air path assembly; 251. Air guide plate; 251A. Clearance through hole; 251B. First arc groove; 251C. Second arc groove; 251D. Third arc groove; 251E. First air guide channel; 251F. Second air guide channel; 251G. Third air guide channel; 251H. Fourth air guide channel; 252. Air pipe; 3. Elastic component; 31. Connecting shaft; 32. Second elastic element; 4. Chip detection module; 5. Defective product collection box; 10. Blue film feeding mechanism; 20. Turret transfer mechanism; 201. Turret; 202. Suction component; 30. Chip loading device. Detailed Implementation

[0034] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0035] like Figure 6 and Figure 7As shown, this invention proposes a chip testing machine, including a blue film feeding mechanism 10, a turret conveying mechanism 20, and a chip loading device 30 as described below. The blue film feeding mechanism 10 is disposed below the chip loading device 30. The turret conveying mechanism 20 includes a turret 201 and a suction member 202. The suction member 202 is connected to the turret 201 and is used to drive the suction member 202 to rotate. The turret 201 is disposed on one side of the chip loading device 30, and the suction member 202 can move to above the chip loading device 30. The chip loading device 30 is used to load the chips on the blue film feeding mechanism 10... The chip is transferred to the pick-up member 202. It should be noted that the chip testing machine may also include an appearance inspection mechanism, an electrical performance testing mechanism, etc. The appearance inspection mechanism is used to inspect the appearance of the chip, while the electrical performance testing mechanism is used to inspect the electrical performance of the chip. This application does not limit this. After the pick-up member 202 of the turret transfer mechanism 20 picks up the chip, the turret 201 drives the pick-up member 202 to rotate, so that the chip is subjected to appearance inspection at the appearance inspection mechanism and electrical performance testing at the electrical performance testing mechanism. The turret transfer mechanism 20 is prior art, and this application will not elaborate on it.

[0036] The blue film feeding mechanism 10 includes an XYZ axis moving module, a blue film seat, a rotating module, a blue film lifting assembly, and a vision positioning device. The blue film seat is connected to the rotating module, which is connected to the XYZ axis moving module. The blue film lifting assembly is located below the blue film seat, and the vision positioning device is located above the blue film seat. The blue film loaded with chips is placed on the blue film seat. The XYZ axis moving module and the rotating module are used to drive the blue film seat to move and adjust its position. The vision positioning device is used to position the chips on the blue film. The blue film lifting assembly is used to push the chips off the blue film. The vision positioning device and the blue film lifting assembly work together to allow the chip feeding device 30 to pick up the chips.

[0037] Reference Figures 1 to 6 As shown, a preferred embodiment of the chip loading device 30 of this application includes a frame 1 and two picking modules 2. The picking modules 2 are arranged vertically on the frame 1. Each picking module 2 includes a picking component 21 and a first driving component 22. The picking component 21 is connected to the first driving component 22 and is used to pick up chips. The first driving component 22 is connected to the frame 1 and is used to drive the picking component 21 to rotate. The rotation axis of the picking component 21 extends horizontally. The picking component 21 of the upper picking module 2 can pick up the chip on the picking component 21 of the lower picking module 2 at a first preset position.

[0038] Specifically, the chip loading device 30 has two picking modules 2 arranged vertically, and chips can be transferred between adjacent picking modules 2. The picking module 2 picks up the chip through the picking member 21, and the picking member 21 is driven to rotate by the first driving member 22 to realize the transfer of the chip. In practical applications, the chip loading device 30 is located above the blue film feeding mechanism 10, and the turret transfer mechanism 20 is located on one side of the chip loading device 30. The suction member 202 of the turret transfer mechanism 20 can move to the chip loading position. Above the device 30, the lowest picking module 2 is used to pick up the chip in the blue film feeding mechanism 10 and transfer the chip upward to the picking module 2 above it. The two adjacent picking modules 2 continue to transfer the chip to the uppermost picking module 2. Finally, the pick-up member 202 of the turret transfer mechanism 20 takes away the chip. That is, the chip feeding device 30 of the present invention, based on at least two vertically arranged picking modules 2, can assist the blue film feeding mechanism 10 in feeding the turret transfer mechanism 20.

[0039] It should be noted that, as Figure 1 As shown, the first preset position is the position between the two vertical picking modules 2, where the first picking module picks up the chip on the picking part 21 of the second picking module.

[0040] In other embodiments, the number of picking modules 2 may be three, four or more, and this application does not limit this. When there are two or more picking modules 2, each of the two adjacent picking modules 2 in the vertical direction has a first preset position. Among the two adjacent picking modules 2, the picking module 2 located above is the first picking module, and the picking module 2 located below is the second picking module. The picking component 21 of the first picking module can pick up the chip on the picking component 21 of the second picking module at the corresponding first preset position.

[0041] Based on the chip feeding device 30, the blue film feeding mechanism 10 can be set below the turret transfer mechanism 20. Thus, the blue film feeding mechanism 10 and the turret transfer mechanism 20 of the chip tester are set vertically, reducing the occupancy of horizontal space. The chip tester has the characteristics of small horizontal space occupation and compact structure.

[0042] In this embodiment, the picking module 2 also includes a turntable 23. The picking module 2 has four picking components 21. The four picking components 21 are circumferentially connected to the end face of the turntable 23 around its axis, and the four picking components 21 are equally spaced. The axis of rotation is the axis of the turntable 23. The end of the turntable 23 away from the picking components 21 along its axis is connected to the first driving component 22. By setting the turntable 23, the number of picking components 21 can be set to multiple. During the rotation of the turntable 23, the picking components 21 can pick up the chips one by one, thereby achieving efficient transfer of the chips.

[0043] In this embodiment, the pickup component 21 includes a base 211, a first elastic member 212, and a nozzle 213. The base 211 is connected to the turntable 23 and can slide radially away from the center of the turntable 23. The base 211 has a limiting portion 2111. The first elastic member 212 connects the base 211 and the turntable 23 so that the limiting portion 2111 abuts against the side wall of the turntable 23. The nozzle 213 is connected to the base 211 and is used to pick up chips. The pickup module 2 also includes a second driving member 2. 4. The air path assembly 25 and the second drive member 24 are connected to the frame 1 and are located below the first drive member 22. The second drive member 24 is used to drive the limiting part 2111 to move downward, so as to drive the seat 211 to slide radially away from the center of the turntable 23, thereby driving the suction nozzle 213 to move. The air path assembly 25 is located on the turntable 23 and connected to the suction nozzle 213. The air path assembly 25 is used to make the suction nozzle 213 suck in or blow air. Specifically, a single picking module 2 has four stations, so as to Figure 1 Taking the lower picking module 2 in the current state as an example, the picking component 21 located on the lower side is at the first station, the picking component 21 located on the left side is at the second station, the picking component 21 located on the upper side is at the third station, and the picking component 21 located on the right side is at the fourth station. In practical applications, such as Figures 2 to 3 As shown, the second driving member 24 cooperates with the pick-up member 21 at the first station to pick up the chip. The specific process is as follows: the second driving member 24 drives the limiting part 2111 of the pick-up member 21 to move downward, thereby causing the seat 211 to slide radially away from the center of the turntable 23, thereby causing the suction nozzle 213 to move downward to contact the chip. Then, the air passage assembly 25 works to make the suction nozzle 213 suck in air to adsorb the chip, thereby realizing the chip pickup; the upper pick-up module in the two adjacent pick-up modules 2 The chip picking process of the lower picking module 2 and the chip picking of the blue film feeding mechanism 10 by the picking module 2 are both achieved through the above process. After the picking component 21 picks up the chip, during the process of the picking component 21 rotating from the first station to the third station, the air path component 25 keeps the suction nozzle 213 in the suction state to stably adsorb the chip. When the picking component 21 with the chip is located at the third station, the air path component 25 stops working so that the suction component 202 of the picking module 2 or the turret transfer mechanism 20 located above can pick up the chip.

[0044] In addition, such as Figure 3As shown, the first elastic element 212 is a spring, one end of which is fixedly connected to the seat 211 and the other end is fixedly connected to the connecting column. The connecting column is fixedly connected to the turntable 23. The spring causes the limiting part 2111 of the seat 211 to press against the side wall of the turntable 23. Its structure is simple and easy to install. The purpose of this structure is to stably connect the seat 211 to the turntable 23, and the seat 211 can move downward under the action of the second driving element 24.

[0045] Furthermore, the material picking component 21 also includes a guide rail and a slider. The guide rail is arranged radially along the turntable 23, the slider is slidably connected to the guide rail, and the seat 211 is fixedly connected to the slider. The arrangement of the guide rail and slider serves to guide the movement of the seat 211, and the structure is stable and reliable.

[0046] In this embodiment, the air path assembly 25 includes an air guide plate 251 and an air pipe 252. The air guide plate 251 has a clearance through hole 251A. The air guide plate 251 is disposed on the side of the turntable 23 along its axis close to the first driving member 22, and the side of the air guide plate 251 facing the turntable 23 abuts against the turntable 23. The power output end of the first driving member 22 passes through the clearance through hole 251A. The side of the air guide plate 251 facing the turntable 23 is provided with a first arc-shaped groove 251B, a second arc-shaped groove 251C, and a third arc-shaped groove 251D. The first arc-shaped groove 251B, the second arc-shaped groove 251C, and the third arc-shaped groove 251D are arranged at intervals around the axis of the turntable 23 along a first circular trajectory 100. On the first circular trajectory 100, the first arc-shaped groove 251B, the second arc-shaped groove 251C, and the third arc-shaped groove 251D are arranged at intervals around the axis of the turntable 23 along a first circular trajectory 100. A first air guide channel 251E is provided between 51C, a second air guide channel 251F is provided between the second arc-shaped groove 251C and the third arc-shaped groove 251D, and a third air guide channel 251G is provided between the third arc-shaped groove 251D and the first arc-shaped groove 251B. The first arc-shaped groove 251B, the second arc-shaped groove 251C, and the third arc-shaped groove 251D are all connected to a fourth air guide channel 251H, meaning there are four fourth air guide channels 251H. The turntable 23 has a first vent 23A, a second vent 23B, a third vent 23C, and a fourth vent 23D arranged at intervals along the second circular trajectory 200. The first vent 23A, the second vent 23B, the third vent 23C, and the fourth vent 23D all pass through an air pipe 252. Each of the four pick-up components 21 has a suction nozzle 213 connected to it, meaning there are four air pipes 252. The first circular track 100 and the second circular track 200 are aligned with the axis of the turntable 23. Therefore, when the turntable 23 rotates, the first vent 23A, the second vent 23B, the third vent 23C, and the fourth vent 23D are all aligned with the first circular track 100. Specifically, the first air guide channel 251E, the second air guide channel 251F, the third air guide channel 251G, and the fourth air guide channel 251H are all connected to a vacuum device via gas delivery pipes. When the four pick-up components 21 are located at four different workstations, the first vent 23A is aligned with and connected to the third air guide channel 251G, and the second vent 23B is aligned with and connected to the first air guide channel 251G. The third vent 23C is directly opposite to and connected to the second air guide channel 251F, and the fourth vent 23D is directly opposite to and connected to the fourth air guide channel 251H in the third arc groove 251D. The arc lengths of the first arc groove 251B and the second arc groove 251C are close to one-quarter of the circumference of the first circular trajectory 100, and the arc length of the third arc groove 251D is close to one-half of the circumference of the first circular trajectory 100. The vacuum equipment uses the third air guide channel 251G to allow the pick-up component 21 to adsorb the chip, and uses the first arc groove 251B and its fourth air guide channel 251H, the first air guide channel 251E, the second arc groove 251C and its fourth air guide channel 251H to stably adsorb the chip during the process of the pick-up component 21 rotating from the first station to the third station.For example, the first vent 23A, the second vent 23B, the third vent 23C, and the fourth vent 23D have the same diameter. Taking the first vent 23A as an example, during the rotation of the turntable 23, the first vent 23A can span and connect the third air guide channel 251G and the first arc-shaped groove 251B, span and connect the first air guide channel 251E and the first arc-shaped groove 251B, and span and connect the first air guide channel 251E and the second arc-shaped groove 251D. 51C, spanning and connecting the second air guide channel 251F and the second arc-shaped groove 251C, spanning and connecting the second air guide channel 251F and the third arc-shaped groove 251D, and spanning and connecting the third arc-shaped groove 251D and the third air guide channel 251G, to ensure the continuous adsorption force of the pickup element 21 connected to the first air vent 23A; similarly, the second air vent 23B, the third air vent 23C, and the fourth air vent 23D all satisfy the above conditions to ensure the continuous adsorption force.

[0047] In this embodiment, the first driving component 22 includes a first motor 221, a clamp 222, a first connector 223, and a second connector 224. The first motor 221 is fixedly connected to the frame 1, and the clamp 222 is fixedly connected to the output shaft of the first motor 221. The output shaft of the first motor 221 and the clamp 222 pass through an avoidance through hole 251A. The output shaft of the first motor 221 is fixedly connected to the turntable 23 through the first connector 223, and the clamp 222 is fixedly connected to the turntable 23 through the second connector 224. This ensures that the turntable 23 is stably set. Specifically, both the first connector 223 and the second connector 224 are screws, which have a simple structure, are easy to connect, and have high stability. There is one first connector 223, which fixes the turntable 23 to the side of the first motor 221's output shaft facing the material pickup 21. There are four second connectors 224, which fix the turntable 23 to the side of the clamp 222 facing the material pickup 21.

[0048] In this embodiment, the end of the air guide plate 251 away from the turntable 23 is connected to the frame 1 via four elastic components 3. The four elastic components 3 are spaced apart around the axis of the turntable 23. Each elastic component 3 includes a connecting shaft 31 and a second elastic element 32. The connecting shaft 31 is fixedly connected to the frame 1, and its axis is parallel to the axis of the turntable 23. The air guide plate 251 is slidably connected to the connecting shaft 31. The second elastic element 32 can elastically extend and retract along the axial direction of the connecting shaft 31. One end of the air guide plate 251 is pressed against the frame 1, and the other end is pressed against the air guide plate 251, so that the air guide plate 251 is pressed against the turntable 23. Specifically, the second elastic element 32 is a spring, which is sleeved on the outer periphery of the connecting shaft 31. Through the setting of the elastic element 3, the air guide plate 251 can be pressed against the turntable 23, ensuring the sealing performance between the air guide plate 251 and the turntable 23. Furthermore, some commonly used sealing methods in the art can be used to further ensure the sealing performance between the air guide plate 251 and the turntable 23. This application does not limit this.

[0049] In other embodiments, the number of elastic components 3 may be four or more. This application does not limit this, and it is set according to the actual application.

[0050] In this embodiment, the picking component 21 further includes a cam follower 214, which is connected to the end of the limiting part 2111 along the axial direction of the turntable 23 near the frame 1. The second driving component 24 includes a second motor 241 and a cam 242. The second motor 241 is fixedly connected to the frame 1, and the cam 242 is fixedly connected to the output shaft of the second motor 241. The cam 242 is used to contact the cam follower 214. Specifically, when the picking component 21 is in the first station, the cam 242 contacts the cam follower 214. When a chip picking operation is required, the second motor 241 drives the cam 242 to rotate so that the limiting part 2111 moves downward. The structure is simple and easy to install. After the picking component 21 picks up the chip, the second motor 241 drives the cam 242 to rotate and reset. The picking component 21 can also be successfully reset based on the setting of the first elastic member 212.

[0051] In addition, the cam follower 214 can follow the contour movement of the cam 242, which is conducive to the smooth operation of the material picking part 21 picking up materials.

[0052] In this embodiment, as Figure 7As shown, the chip loading device 30 also includes a chip detection module 4. The chip detection module 4 includes a camera component, which is disposed on one side of the picking module 2. The camera component is used to photograph the chip on the picking piece 21 at the second preset position, thereby inspecting the appearance of the chip. Specifically, the camera component is used to photograph the chip on the picking piece 21 at the second station in the picking module 2 located above, that is, the second preset position is the second station. At this time, the chip detection module 4 inspects the upper surface of the chip.

[0053] Furthermore, such as Figure 7 As shown, the chip feeding device 30 also includes a defective product collection box 5. The defective product collection box 5 is located on one side of the picking module 2, and the picking module 2 is located between the chip detection module 4 and the defective product collection box 5. At this time, the collection port of the defective product collection box 5 faces the fourth station of the picking module 2 located above. If the chip photographed by the above-mentioned camera component has an unqualified appearance quality, then the picking component 21 will not transfer the chip to the suction component 202 of the turret transfer mechanism 20 at the third station, but will instead transport the chip from the above-mentioned collection port to the defective product collection box 5 at the fourth station to recycle the unqualified chip.

[0054] Specifically, the vacuum equipment uses the third arc groove 251D and its fourth air guide channel 251H to stably adsorb the chip when the pick-up component 21 rotates from the third station to the fourth station. When the pick-up component 21 is in the fourth station, the vacuum equipment blows air onto the pick-up component 21 through the third arc groove 251D, its fourth air guide channel 251H, and the corresponding air pipe 252, thereby blowing the chip into the defective product collection box 5 through the collection port.

[0055] In other embodiments, the chip detection module 4 detects the chip on the pick-up piece 21 located at the second station in the pick-up module 2 below. At this time, the chip detection module 4 detects the lower surface of the chip, and the collection port of the defective product collection box 5 faces the fourth station of the pick-up module 2 below.

[0056] Based on the chip detection module 4 and the defective product collection box 5, the chip feeding device 30 of the present invention can not only assist the blue film feeding mechanism 10 in feeding the turret transfer mechanism 20, but also detect the appearance quality of the chip during the chip transfer process, which is beneficial to improving the detection efficiency of the chip testing machine.

[0057] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An on-chip material loading device, characterized by, The device comprises a rack (1) and at least two pick-up modules (2) vertically arranged on the rack (1). Each pick-up module (2) comprises a pick-up piece (21) and a first driving piece (22). The pick-up piece (21) is connected to the first driving piece (22). The pick-up piece (21) is used for picking up chips. The first driving piece (22) is connected to the rack (1) and used for driving the pick-up piece (21) to rotate. The rotation axis of the pick-up piece (21) extends horizontally. In the two adjacent pick-up modules (2), the upper one is a first pick-up module, and the lower one is a second pick-up module. The pick-up piece (21) of the first pick-up module can pick up the chips on the pick-up piece (21) of the second pick-up module at a first preset position.

2. The on-chip material loading device of claim 1, wherein, The pick-up module (2) further comprises a rotating disc (23). In the pick-up module (2), the number of pick-up pieces (21) is multiple. The multiple pick-up pieces (21) are connected to the end face of the rotating disc (23) in a circumferential direction around the axis of the rotating disc (23). The rotation axis is the axis of the rotating disc (23). The rotating disc (23) is connected to the first driving piece (22) at the end away from the pick-up pieces (21) along the axis.

3. The on-chip material loading device of claim 2, wherein, The pick-up piece (21) comprises a seat body (211), a first elastic piece (212) and a suction nozzle (213). The seat body (211) is connected to the rotating disc (23) and can slide along the radial direction of the rotating disc (23) away from the center of the rotating disc (23). The seat body (211) has a limiting part (2111). The first elastic piece (212) connects the seat body (211) and the rotating disc (23) so that the limiting part (2111) tightly abuts against the side wall surface of the rotating disc (23). The suction nozzle (213) is connected to the seat body (211) and used for picking up chips. The pick-up module (2) further comprises a second driving piece (24) and a gas path assembly (25). The second driving piece (24) is connected to the rack (1) and arranged below the first driving piece (22). The second driving piece (24) is used for driving the limiting part (2111) to move downward so as to drive the seat body (211) to slide along the radial direction of the rotating disc (23) away from the center of the rotating disc (23), thereby driving the suction nozzle (213) to move. The gas path assembly (25) is arranged on the rotating disc (23) and connected to the suction nozzle (213). The gas path assembly (25) is used for making the suction nozzle (213) to inhale or blow air.

4. The on-chip material loading device of claim 3, wherein, The number of pick-up pieces (21) is four. The four pick-up pieces (21) are arranged at equal intervals. The gas path assembly (25) comprises a gas guide plate (251) and a gas pipe (252). The air guide plate (251) has an avoiding through hole (251A), the air guide plate (251) is arranged on the side of the rotating disc (23) along the axis of the rotating disc (23) close to the first driving element (22), and the side of the air guide plate (251) facing the rotating disc (23) is tightly abutted against the rotating disc (23), the power output end of the first driving element (22) penetrates the avoiding through hole (251A), the side of the air guide plate (251) facing the rotating disc (23) is provided with a first arc-shaped groove (251B), a second arc-shaped groove (251C) and a third arc-shaped groove (251D), the first arc-shaped groove (251B), the second arc-shaped groove (251C) and the third arc-shaped groove (251D) are arranged along a first circular track (100) and are spaced apart around the axis of the rotating disc (23), the first arc-shaped groove (251B) and the second arc-shaped groove (251C) are provided with a first air guide channel (251E) on the first circular track (100), the second arc-shaped groove (251C) and the third arc-shaped groove (251D) are provided with a second air guide channel (251F), and the third arc-shaped groove (251D) and the first arc-shaped groove (251B) are provided with a third air guide channel (251G), and the first arc-shaped groove (251B), the second arc-shaped groove (251C) and the third arc-shaped groove (251D) are all communicated with a fourth air guide channel (251H); The rotating disc (23) is provided with a first air hole (23A), a second air hole (23B), a third air hole (23C) and a fourth air hole (23D) arranged along a second circular track (200) and spaced apart, the first air hole (23A), the second air hole (23B), the third air hole (23C) and the fourth air hole (23D) are respectively communicated with the suction nozzles (213) of the four material picking elements (21) through the air pipe (252); The first circular track (100) and the second circular track (200) are opposite along the axis of the rotating disc (23).

5. The on-chip material loading device of claim 4, wherein, The first driving element (22) comprises a first motor (221), a clamp (222), a first connecting element (223) and a second connecting element (224), the first motor (221) is fixedly connected to the rack (1), the clamp (222) is fixedly connected to the output shaft of the first motor (221), and the output shaft of the first motor (221) and the clamp (222) penetrate the avoiding through hole (251A); The output shaft of the first motor (221) is fixedly connected to the rotating disc (23) through the first connecting element (223), and the clamp (222) is fixedly connected to the rotating disc (23) through the second connecting element (224).

6. The on-chip material loading device of claim 4, wherein, The end of the air guide plate (251) away from the rotating disc (23) is connected to the rack (1) through a plurality of elastic components (3), and the plurality of elastic components (3) are arranged around the axis of the rotating disc (23) and are spaced apart. The elastic assembly (3) comprises a connecting shaft (31) and a second elastic member (32). The connecting shaft (31) is fixedly connected to the rack (1), and the axis of the connecting shaft (31) is parallel to the axis of the rotating disc (23). The air guide plate (251) is slidingly connected to the connecting shaft (31). The second elastic member (32) is elastically stretchable along the axis of the connecting shaft (31). One end of the second elastic member (32) is abuttingly connected to the rack (1), and the other end is abuttingly connected to the air guide plate (251), so that the air guide plate (251) is abuttingly connected to the rotating disc (23).

7. The on-chip material loading device of claim 3, wherein The picking member (21) further comprises a cam follower (214) connected to one end of the limiting part (2111) close to the rack (1) along the axis of the rotating disc (23). The second driving member (24) comprises a second motor (241) and a cam (242). The second motor (241) is fixedly connected to the rack (1). The cam (242) is fixedly connected to the output shaft of the second motor (241). The cam (242) is used to contact the cam follower (214).

8. The on-chip material loading device of claim 1, wherein, The chip loading device further comprises a chip detection module (4). The chip detection module (4) comprises a camera assembly. The camera assembly is arranged on one side of the picking module (2). The camera assembly is used to take pictures of the chips on the picking member (21) at the second preset position.

9. The on-chip material loading device of claim 8, wherein, The chip loading device further comprises an unqualified product collection box (5). The unqualified product collection box (5) is arranged on one side of the picking module (2). The picking module (2) is located between the chip detection module (4) and the unqualified product collection box (5). The unqualified product collection box (5) is used to collect unqualified chips.

10. A chip tester characterized by comprising: The chip loading device (30) comprises a blue film feeding mechanism (10), a turret transfer mechanism (20), and a chip loading device (30) according to any one of claims 1-9. The blue film feeding mechanism (10) is arranged below the chip loading device (30). The turret transfer mechanism (20) comprises a turret (201) and a suction member (202). The suction member (202) is connected to the turret (201). The turret (201) is used to drive the suction member (202) to rotate. The turret (201) is arranged on one side of the chip loading device (30). The suction member (202) can move above the chip loading device (30). The chip loading device (30) is used to transfer the chips on the blue film feeding mechanism (10) to the suction member (202).

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