Display system, analysis device, control method, and computer-readable storage medium

Abstract

The invention provides a display system, an analysis apparatus, a control method, and a computer-readable storage medium for enabling a user to visually confirm, through a second display apparatus, a screen having the same size as a screen relating to analysis of a sample displayed on a first display apparatus. A display system is provided with a first display (12), a second display (22), a first computer (10) for controlling the first display (12), and a second computer (20) for controlling the second display (22), and the first computer (10) displays a first screen relating to analysis of a sample on the first display (12), and generates a second screen by copying the first screen. And a second screen is displayed on a second display (22).

Description

[0001] This application is a divisional application of an application with the application date of January 29, 2021, the application number of 202110123805.5, and the invention name of "Display system, analysis device, control method, and computer-readable storage medium". TECHNICAL FIELD

[0002] The present application relates to a display system, an analysis device, a control method, and a computer-readable storage medium. BACKGROUND

[0003] An analysis device such as an electron probe micro analyzer (EPMA) and a scanning electron microscope (SEM) irradiates a charged particle beam such as an electron beam and an ion beam to a sample. The analysis device is configured to detect a signal (secondary electron rays, reflected electron rays, characteristic X-rays, and the like) generated from the sample by the irradiation, thereby performing observation and analysis of the sample.

[0004] A spectroscopic measurement device that uses a spectroscopic microscope to observe a sample is disclosed in Japanese Patent Application Publication No. 2015-17971 (Patent Literature 1). The spectroscopic measurement device described in Patent Literature 1 has an image processing device that causes a display device (hereinafter referred to as "first display device") to display spectroscopic data acquired by the spectroscopic microscope.

[0005] PRIOR ART DOCUMENTS

[0006] PATENT LITERATURE

[0007] Patent Literature 1: Japanese Patent Application Publication No. 2015-17971 SUMMARY

[0008] PROBLEMS TO BE SOLVED BY THE INVENTION

[0009] In addition, the user sometimes wants to visually confirm the screen displayed on the first display device at a place different from the place where the first display device is provided. In such a case, a structure is considered in which a second display device is provided at a place different from the first display device and also causes the second display device to display the screen displayed in the first display device. However, in the case of this structure, a screen of a different size from the screen displayed on the first display device is displayed in the second display device due to a difference in the size of the display area of the first display device and the display area of the second display device, or the like. In this case, a problem occurs in that the user cannot visually confirm the screen of the same size as the screen displayed on the first display device through the second display device.

[0010] The present application has been achieved in order to solve the above-described problems, and has an object to provide a display system which allows a user to visually confirm a screen of the same size as a screen relating to analysis of a same sample as displayed in a first display device, by a second display device.

[0011] Solution to problem

[0012] A display system according to an aspect of the present disclosure is provided with a first display device, a second display device, and a control device which controls the first display device and the second display device. The control device causes the first display device to display a first screen relating to analysis of a sample, generates a second screen by copying the first screen, and causes the second display device to display the second screen.

[0013] A display system according to an aspect of the present disclosure is provided with a first display device which an analysis device has, a second display device whose size is different from that of the first display device, and a control device which controls the first display device and the second display device, wherein the control device displays a first screen relating to analysis of a sample on the first display device, in the first screen, displays an analysis result of the analysis device and an icon which indicates a kind of operation of the analysis device, the control device generates a second screen which is the same in size and scale as the first screen by copying the first screen, the control device causes the second display device to display the second screen without changing the size and scale of the second screen regardless of the size of a display area of the second display device, wherein a first reference point is set in the first screen, a second reference point which indicates the same position as a position on the first screen indicated by the first reference point is set in the second screen, the control device accepts designation by a user with respect to the second screen, the control device calculates a relative position of a position designated by the user in the second screen with the second reference point as a reference, the control device determines a position corresponding to the relative position when the first reference point is a reference in the first screen, and the control device performs processing with respect to the icon of the analysis device corresponding to the determined position.

[0014] An analysis device according to an aspect of the present disclosure is provided with the above-described first display device and control device, and an analysis section which analyzes the sample.

[0015] A control method according to an aspect of the present disclosure for controlling a first display device possessed by an analysis device includes the steps of generating a second screen identical in size and scale to a first screen by copying the first screen, the first screen being related to analysis of a sample and displayed on the first display device, in the first screen, an analysis result of the analysis device and an icon indicating a kind of operation of the analysis device being displayed, and sending the second screen to a control device that causes a second display device to display the second screen without changing the size and scale of the second screen regardless of the size of a display area of the second display device that is different in size from the first display device. The control method further includes setting a first reference point in the first screen, setting a second reference point indicating a position identical to a position on the first screen indicated by the first reference point in the second screen, accepting a designation by a user with respect to the second screen, calculating a relative position of a position designated by the user in the second screen with the second reference point as a reference, determining a position corresponding to the relative position in the first screen with the first reference point as a reference, and executing a process with respect to the icon of the analysis device corresponding to the determined position.

[0016] A computer-readable storage medium according to an aspect of the present disclosure stores a control program that causes a control device that controls a first display device possessed by an analysis device to execute the steps of generating a second screen identical in size and scale to a first screen by copying the first screen, the first screen being related to analysis of a sample and displayed on the first display device, in the first screen, an analysis result of the analysis device and an icon indicating a kind of operation of the analysis device being displayed, and sending the second screen to a control device that causes a second display device to display the second screen without changing the size and scale of the second screen regardless of the size of a display area of the second display device that is different in size from the first display device. The steps further include setting a first reference point in the first screen. The control program further causes the control device that causes the second display device to display the second screen to execute the steps of setting a second reference point indicating a position identical to a position on the first screen indicated by the first reference point in the second screen, accepting a designation by a user with respect to the second screen. The control program further causes the control device that controls the first display device to execute the steps of calculating a relative position of a position designated by the user in the second screen with the second reference point as a reference, determining a position corresponding to the relative position in the first screen with the first reference point as a reference, and executing a process with respect to the icon of the analysis device corresponding to the determined position.

[0017] The control method according to the aspect of the present disclosure is a control method for controlling a second display device, and includes the steps of receiving a screen related to analysis of a sample, displayed on a first display device possessed by an analysis device and copied by a control device, the copied screen being identical in size and scale to a screen displayed on the first display device, the screen displaying an analysis result of the analysis device and an icon indicating a kind of operation of the analysis device, and displaying the copied screen in the second display device whose size is different from that of the first display device, regardless of the size of a display area of the second display device, in a manner that does not change the size and scale of the copied screen. The control method further includes the steps of setting a second reference point indicating a position identical to a position on a screen of the first display device indicated by a first reference point set in the screen displayed on the first display device in the copied screen, causing the control device to accept designation by a user with respect to the copied screen, causing a control device controlling the first display device to calculate a relative position of a position designated by the user in the copied screen with the second reference point as a reference, determining a position corresponding to the relative position when the first reference point is taken as a reference in the screen displayed on the first display device, and executing a process corresponding to the determined position with respect to the icon of the analysis device.

[0018] The computer-readable storage medium according to the aspect of the present disclosure holds a control program that causes a control device that controls a second display device to execute the steps of receiving a screen that is related to analysis of a sample, displayed on a first display device possessed by an analysis device, and copied by a control device that controls the first display device, the copied screen being the same in size and scale as a screen displayed on the first display device that displays an analysis result of the analysis device and an icon indicating a kind of operation of the analysis device, and displaying the copied screen in the second display device that is different in size from the first display device, regardless of the size of a display area of the second display device, in a manner that does not change the size and scale of the copied screen. The control program also causes the control device that controls the second display device to execute the steps of setting a second reference point that indicates the same position on a screen of the first display device as a position indicated by a first reference point set in the screen displayed on the first display device in the copied screen, accepting a designation made by a user with respect to the copied screen, and causes the control device that controls the first display device to execute the steps of calculating a relative position of a position specified by the user in the copied screen with the second reference point as a reference, determining a position corresponding to the relative position when the first reference point is taken as a reference in the screen displayed on the first display device, and executing a process with respect to the icon of the analysis device corresponding to the determined position.

[0019] Effects of the Invention

[0020] According to the technology of the present disclosure, the second screen is displayed in the second display device in a manner that becomes the same size as the first screen displayed in the first display device, and thus the user can visually confirm the same size of the screen related to the analysis of the same sample as the first screen displayed in the first display device through the second display device. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a schematic view that explains a structure example of an analysis device and a display system according to an embodiment of the present invention.

[0022] Figure 2 is a view that schematically shows a structure example of an analysis section.

[0023] Figure 3 is a view that schematically shows a hardware structure of a first computer, a second computer, and a third computer.

[0024] Figure 4 is a view that shows a display example of a first display and a third display.

[0025] Figure 5 is an example of an observation image displayed by a remote display in a display system of a comparative example.

[0026] Figure 6 is an example of a captured screen displayed by a second display of the present embodiment.

[0027] Figure 7 is a diagram for explaining that a display region of a captured screen is changed in response to an operation by a user.

[0028] Figure 8 is a diagram for explaining a remote operation by a second user.

[0029] Figure 9 is a diagram for explaining an example in which a second computer integrally displays a second analysis screen and a second observation screen.

[0030] Figure 10 is a diagram for explaining an example in which a second computer displays a second analysis screen and a second observation screen in a switchable manner.

[0031] Figure 11 is a functional block diagram of a third computer.

[0032] Figure 12 is a functional block diagram of a first computer and a second computer.

[0033] Figure 13 is a flowchart showing processes executed in the first computer and the second computer.

[0034] Explanation of Reference Numerals

[0035] 1: electron gun; 2: deflection coil; 3: objective lens; 4: sample stage; 5: sample stage driving section; 7: deflection coil control section; 8: electron detector; 10: first computer; 11: first input device; 12: first display; 20: second computer; 21: second input device; 22: second display; 30: third computer; 32: third display; 50: analysis section; 100: display system; 120: first display region; 220: second display region; 320: third display region; 502, 602: reception section; 504: capturing section; 506: generation section; 508, 610: transmission section; 510, 604: display control section; 606: input section; 608: acquisition section; 1000: analysis apparatus. DETAILED DESCRIPTION

[0036] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In addition, in the drawings, the same or corresponding portions will be denoted by the same reference signs, and a description thereof will not be repeated. Furthermore, in the drawings, the ratio of the actual size is not illustrated, and in some cases, the ratio is changed in a manner that makes the configuration clear in order to make the configuration easy to understand.

[0037] [About display system and analysis device]

[0038] Figure 1 is a schematic diagram illustrating a configuration example of an analysis device 1000 and a display system 100 according to the embodiment of the present disclosure. The analysis device according to the present embodiment is configured to irradiate a charged particle beam to a sample, and to perform observation and analysis of the sample by detecting a signal generated from the sample. The analysis device 1000 is, for example, an electron probe micro analyzer (EPMA: Electron Probe Micro Analyzer).

[0039] In Figure 1 , the analysis section 50, the first computer 10, the second computer 20, the third computer 30, the first input device 11, the second input device 21, the first display 12, the second display 22, the third display 32, and the network 700 are illustrated. The first display 12 corresponds to the "first display device" of the present disclosure, the second display 22 corresponds to the "second display device" of the present disclosure, and the third display 32 corresponds to the "third display device" of the present disclosure. In addition, the first computer 10, the second computer 20, and the third computer 30 correspond to the "control device" of the present disclosure.

[0040] With reference to Figure 1 , the analysis device 1000 according to the present embodiment is provided with the analysis section 50, the first computer 10, the third computer 30, the first display 12, the third display 32, and the first input device 11.

[0041] The analysis section 50 is, for example, an electron beam irradiation device. In addition, the analysis section 50 can also be another device. The analysis section 50 is configured to irradiate an electron beam to the surface of a sample and to detect a signal emitted from the sample surface. The detected signal includes characteristic X-rays having an energy unique to an element included in the sample surface, secondary electrons, and reflected electrons, and the like. The analysis device 1000 analyzes the energy and intensity of the detected characteristic X-rays, and thereby can perform identification and quantification of an element present at an analysis position on the sample surface.

[0042] The first display 12 and the third display 32 display the shape and composition image, as well as the unevenness, of the sample surface based on the detected secondary and reflected electrons. The analyst (hereinafter also referred to as the "first user") can observe the shape and composition image, as well as the unevenness, of the sample surface. The first user can locate the analytical position on the sample surface while observing the secondary or reflected electron image. Specifically, the first user can set the irradiation position of the irradiated electron beam on the sample surface (i.e., the measurement position on the sample surface) while observing the electron image, and can specify the analytical target area on the sample surface.

[0043] In the analysis apparatus 1000, generally speaking, a large amount of information needs to be processed in each of the processes related to the control of the electron beam irradiation device and the analysis of characteristic X-rays detected by the electron beam irradiation device, which tends to increase the computational load of this information. Therefore, in the analysis apparatus 1000 according to this embodiment, the load is distributed by using different processing units to perform the processes related to the control of the analysis unit 50 and the processes related to the analysis of characteristic X-rays.

[0044] Specifically, the first computer 10 is an analytical computer used to analyze the characteristic X-rays detected by the analysis unit 50. The third computer 30 is a control computer used to control the analysis unit 50.

[0045] like Figure 1 As shown, the first computer 10 and the third computer 30 are communicatively connected. The third computer 30 is also communicatively connected to the analysis unit 50. The third computer 30 generates control signals for controlling the operation of each part of the analysis unit 50 and outputs the generated control signals to the analysis unit 50. Furthermore, the third computer 30 receives signals detected by the analysis unit 50 (at least one of secondary electrons and reflected electrons, and characteristic X-rays). The third computer 30 receives signals of at least one of secondary electrons and reflected electrons from the analysis unit 50 and generates an observation image of the analysis location (at least one of a secondary electron image and a reflected electron image). Additionally, the third computer 30 generates an image of the elemental distribution at the analysis location (X-ray image) based on the positional scanning of electron rays performed at the analysis location on the sample surface.

[0046] The first computer 10 receives characteristic X-ray signals from the third computer 30 and performs qualitative / quantitative analysis on the elements contained at the analysis location on the sample surface based on the received characteristic X-ray signals. Specifically, the first computer 10 generates an X-ray spectrum corresponding to the wavelength scan of the characteristic X-rays and performs qualitative and quantitative analysis based on the X-ray spectrum.

[0047] The analysis apparatus 1000 includes a display, which is an output device for providing various information, such as generated observation images and analysis results, to a first user. As described above, the processes related to the control of the analysis unit 50 and the processes related to the analysis of characteristic X-rays contain a large amount of information; therefore, a first display 12 and a third display 32 are used in this embodiment. The first display 12 is connected to a first computer 10 and has a first display area 120. The first computer 10 controls the first display 12. The first display 12 displays information related to the processes for the analysis of characteristic X-rays. The first display area 120 displays X-ray spectra and the results of qualitative and quantitative analyses performed based on these X-ray spectra.

[0048] The third display 32 is connected to the third computer 30 and has a third display area 320. The third computer 30 controls the third display 32. The third display 32 displays processing information related to the control of the analysis unit 50. The third display area 320 displays the image (at least one of a secondary electron image and a reflected electron image, and an X-ray image) that the first user wants to observe when setting the analysis position of the sample.

[0049] like Figure 1 As shown, for the sake of operability for the first user, the first display 12 and the third display 32 are configured close to each other.

[0050] The first input device 11 is connected to the first computer 10. The first input device 11 is configured to communicate with both the first computer 10 and the third computer 30. The first input device 11 is a device for inputting instructions from a first user into the first computer 10. The first input device 11 may be a keyboard, mouse, or touch panel, etc.

[0051] A first user uses the first input device 11 to specify a position on the first display area 120 via pointer P1, thereby reading the coordinates of the specified position and performing input operations for that position. Specifically, icons representing analytical items such as qualitative or quantitative analysis are displayed in the first display area 120. The first user uses the first input device 11 to specify the icon corresponding to the desired analytical item via pointer P1. The first computer 10 converts the operation input to the first input device 11 into the operation of pointer P1 displayed in the first display area 120. Thus, the first user can use the first input device 11 to specify analytical items and detailed settings of analytical items, as well as analytical conditions. Furthermore, icons are displayed in the first display area 120 and the third display area 320. The icons are not particularly limited as long as they are images used in the operation of the analytical device 1000 or in the analysis performed by the analytical device 1000 (e.g., substance identification or quantification).

[0052] The pointer P1 corresponding to the first input device 11 is configured to normally function on the first display region 120, but when the pointer P1 exceeds the end of the first display region 120 (the right end of the first display region 120 in this example) as indicated by an arrow Al and moves to the end of the third display region 320 (the left end of the third display region 320 in this example), functions in the third display region 320. That is, the pointer P1 functions in such a manner that the right end of the first display region 120 and the left end of the third display region 320 are virtually connected. Figure 1 Figure 1

[0053] Accordingly, the first user uses the first input device 11 to specify a position on the third display region 320 by the pointer P1, and thereby can read out the coordinates of the specified position and perform an input operation with respect to the position. Specifically, icons indicating control items of the analysis section 50 are displayed in the third display region 320. The first user uses the first input device 11 to specify an icon corresponding to a desired control item by the pointer P1. The first computer 10 converts the operation input with respect to the first input device 11 into an operation of the pointer P1 displayed in the third display region 320. Thereby, the first user can use the first input device 11 to specify a condition or the like of the desired control item.

[0054] The display system 100 according to the present embodiment includes the first computer 10, the second computer 20, the third computer 30, the first display 12, the second display 22, the third display 32, the first input device 11, the second input device 21, and the network 700.

[0055] The display system 100 displays at least a part of a captured image of a screen displayed in the first display 12 and at least a part of a captured image of a screen displayed in the third display 32 in the second display 22. The screen displayed in the first display 12 is sometimes referred to as a "first screen", and the screen displayed in the third display 32 is sometimes referred to as a "third screen". The captured image of the first screen and the captured image of the third screen are sometimes referred to as "captured images" in general. Here, the "captured image" is an image generated by capturing a screen displayed in a display (the first display 12 and the third display 32) by a computer (the first computer 10 and the third computer 30) on the analysis device 1000 side. The captured image is sometimes referred to as a "second screen". The second display 22 displays at least a part of the entire region of the second screen (see FIG. 6, for example). Figure 7

[0056] ​​​In addition, one or more images are included in each of the first screen, the second screen, and the third screen. In the present embodiment, the images are icons and observation images, and the like, which will be described later. In addition, in a case where an image (for example, an icon, which will be described later) that the user can operate is included in the first screen or the third screen, an image of the icon is also included in the captured screen. In a case where the user has operated the icon displayed in the first screen or the third screen, the icon is displayed in a form in which the operation has been performed (for example, a form in which the icon has been pressed). On the other hand, even in a case where the user has operated the icon displayed in the captured screen, the display form of the icon does not change. Furthermore, as will be described later, in a case where the user has operated the icon displayed in the captured screen, a process corresponding to the icon is executed by the first computer 10 or the third computer 30. Figure 8 As has also been described, in a case where the user has operated the icon displayed in the captured screen, a process corresponding to the icon is executed by the first computer 10 or the third computer 30.

[0057] In addition, the first screen is the same size as the captured screen of the first screen. Here, typically, "the same size as the captured screen of the first screen" means that the first screen is the same size and scale as the captured screen of the first screen. In addition, "the same size as the captured screen of the first screen" means that the images included in the first screen are the same size and scale as the images included in the captured screen of the first screen. In addition, the third screen is also the same size as the captured screen of the third screen.

[0058] In the present embodiment, an example in which the second display region 220 of the second display 22 is smaller than the first display region 120 of the first display 12 and the third display region 320 of the third display 32 is described. Thus, the second display 22 displays a part of the entire region of the captured screen of the first screen or a part of the entire region of the captured screen of the third screen. Furthermore, it is also possible that the area of the second display region 220 of the second display 22 is larger than the area of the first display region 120 of the first display 12 and larger than the area of the third display region 320 of the third display 32. In this case, the second display 22 displays the entire region of the captured screen of the first screen and the entire region of the captured screen of the third screen. According to the above, the second display 22 displays a screen of at least a part of the entire region of the captured screen of the first screen and a screen of at least a part of the entire region of the captured screen of the third screen.

[0059] The second display 22 is a display located at a place separate from the analysis device 1000, and is a so-called remote display. According to the configuration as described above, the user (hereinafter also referred to as "second user") can visually confirm the screen displayed in the first display 12 and the screen displayed in the third display 32 through the second display 22 even at a place separate from the analysis device 1000. Figure 1 The second display 22 is a display located at a place separate from the analysis device 1000, and is a so-called remote display. According to the configuration as described above, the user (hereinafter also referred to as "second user") can visually confirm the screen displayed in the first display 12 and the screen displayed in the third display 32 through the second display 22 even at a place separate from the analysis device 1000.

[0060] The first computer 10 and the second computer 20 are connected to the network 700 and configured to be able to communicate with each other. The second computer 20 controls the second display 22. The second display 22 has a second display area 220. The second computer 20 displays a captured image of the image displayed in the first display 12 and the image displayed in the third display 32 in the second display area 220.

[0061] The second input device 21 is connected to the second computer 20. The second input device 21 is configured to be able to communicate with the second computer 20. The second input device 21 is a device for inputting an instruction of the second user to the second computer 20. The second input device 21 is a keyboard, a mouse, a touch panel, or the like. The second user can use the second input device 21 to specify a position on the second display area 220 by the pointer P2. In addition, the second computer 20 can transmit information input from the second input device 21 to the first computer 10. The first computer 10 can also transmit the information to the third computer 30. Thus, the second user can use the second input device 21 to remotely operate the analysis device 1000.

[0062] In the present embodiment, the second user can be a maintainer of the analysis device 1000. The maintainer, for example, confirms whether appropriate display images are displayed in the first display 12 and the third display 32, or the like. In this case, the second user can visually confirm the image displayed in the first display 12 and the image displayed in the third display 32 in the second display even if the second user is located at a place separate from the analysis device 1000. At the same time, the second user can use the second input device 21 to remotely operate the analysis device 1000. Thus, the second user can appropriately perform remote maintenance of the analysis device 1000.

[0063] In addition, in the present embodiment, the second user can also be an analyzer of the sample. In this case, the second user can appropriately analyze the sample even if the second user is located at a place separate from the analysis device 1000.

[0064] [Structure of Analysis Unit]

[0065] Figure 2 is a diagram schematically showing Figure 1 a structure example of the analysis unit 50. Referring to Figure 2 , the analysis unit 50 includes the electron gun 1, the deflection coil 2, the objective lens 3, the sample stage 4, the sample stage driving unit 5, the plurality of spectrometers 6a, 6b, the deflection coil control unit 7, and the electron detector 8. The electron gun 1, the deflection coil 2, the objective lens 3, the sample stage 4, the spectrometers 6a, 6b, and the electron detector 8 are disposed in a measurement chamber not shown. During measurement of X-rays, the measurement chamber is evacuated to a state close to a vacuum.

[0066] The electron gun 1 is an excitation source that generates an electron beam E that irradiates a sample S on the sample stage 4, and is able to adjust the beam current of the electron beam E by controlling a condenser lens (not shown). The deflection coil 2 forms a magnetic field by being supplied with a drive current from the deflection coil control section 7. The electron beam E is able to be deflected by the magnetic field formed by the deflection coil 2.

[0067] The objective lens 3 is disposed between the deflection coil 2 and the sample S placed on the sample stage 4, and narrows the electron beam E that has passed through the deflection coil 2 to a small diameter. The sample stage 4 is a stage for placing the sample S, and is configured to be able to move in a horizontal plane by the sample stage drive section 5.

[0068] In the analysis section 50, the irradiation position of the irradiated electron beam E on the sample S is able to be scanned two-dimensionally by the driving of the sample stage 4 by the sample stage drive section 5 and / or the driving of the deflection coil 2 by the deflection coil control section 7. The deflection coil 2 and / or the sample stage 4 constitute a "scanning section" that scans the electron beam E on the sample S. Generally, when the scanning range is relatively small, scanning is performed by the deflection coil 2, and when the scanning range is relatively large, scanning is performed by the movement of the sample stage 4.

[0069] The spectrometers 6a, 6b are devices for detecting characteristic X-rays emitted from the sample S irradiated with the electron beam E. Furthermore, in the analysis section 50, the characteristic X-rays emitted from the sample S are able to be detected by the spectrometers 6a, 6b, 6c, and 6d. Figure 2 In the analysis section 50, the irradiation position of the irradiated electron beam E on the sample S is able to be scanned two-dimensionally by the driving of the sample stage 4 by the sample stage drive section 5 and / or the driving of the deflection coil 2 by the deflection coil control section 7. The deflection coil 2 and / or the sample stage 4 constitute a "scanning section" that scans the electron beam E on the sample S. Generally, when the scanning range is relatively small, scanning is performed by the deflection coil 2, and when the scanning range is relatively large, scanning is performed by the movement of the sample stage 4.

[0070] The spectrometer 6a includes a spectrometry crystal 61a, a detector 63a, and a slit 64a. The irradiation position of the irradiated electron beam E on the sample S, the spectrometry crystal 61a, and the detector 63a are disposed on a Roland circle that is not shown. The spectrometry crystal 61a is tilted while moving on a straight line 62a by a drive mechanism that is not shown. The detector 63a is rotated in response to the movement of the spectrometry crystal 61a by a drive mechanism that is not shown in a manner such that the incident angle of the characteristic X-rays with respect to the spectrometry crystal 61a and the exit angle of the diffracted X-rays satisfy the Bragg diffraction condition. Thus, wavelength scanning of the characteristic X-rays emitted from the sample S is able to be performed.

[0071] The spectrometer 6b is configured to include a spectrometry crystal 61b, a detector 63b, and a slit 64b. The spectrometer 6b and the spectrometer that is not shown are the same as the spectrometer 6a except for the spectrometry crystal, and thus a description thereof will not be repeated. Furthermore, the structure of each spectrometer is not limited to the structure described above, and various structures known heretofore can be employed.

[0072] The electron detector 8 is a device for detecting electron beams emitted from the sample S irradiated with the electron beam E. The electron detector 8 detects secondary electrons. The detection signal of the electron detector 8 is transmitted to the third computer 30.

[0073] In addition, backscattered electrons are also detected by an electron detector not shown. The detection signal of the backscattered electrons is also transmitted to the third computer 30.

[0074] The deflection coil control section 7 controls the drive current supplied to the deflection coil 2 according to the instruction from the third computer 30. By controlling the drive current in accordance with a predetermined drive current pattern (magnitude and change speed), scanning of the irradiation position of the electron beam E at a desired scanning speed on the sample S is enabled.

[0075] The third computer 30 performs various processes relating to the control of the analysis section 50 according to a program and a table built in. In addition, the third computer 30 generates an observation image of the analysis target region based on the position scanning of the electron beam E in the analysis target region on the sample S. Specifically, the third computer 30 generates a secondary electron image of the analysis target region of the sample S based on the secondary electrons detected by the electron detector 8. In addition, the third computer 30 generates a distribution image (X-ray image) of the analysis target element in the analysis target region of the sample S based on the characteristic X-rays detected by the four spectrometers 6.

[0076] The first computer 10 makes an X-ray spectrum based on the received wavelength scan when receiving the wavelength scan of the X-rays of the analysis target from the third computer 30. The first computer 10 performs qualitative analysis and / or quantitative analysis, and the like, based on the X-ray spectrum.

[0077] [Hardware structure of each computer]

[0078] Figure 3 is a diagram schematically showing the hardware structure of the first computer 10, the second computer 20, and the third computer 30.

[0079] Referring to Figure 3 , the first computer 10 is provided with a CPU 13, a memory 14, an input interface (hereinafter also referred to as an input I / F 15), a display controller 16, and a communication interface (hereinafter also referred to as a communication I / F 17).

[0080] The first computer 10 is configured to act in accordance with a program saved in the memory 14. The memory 14 includes a ROM (Read Only Memory), a RAM (Random Access Memory), and an HDD (Hard Disk Drive) not shown.

[0081] The ROM can store the program executed by the CPU 13. The program includes a process related to analyzing the characteristic X-rays detected by the analysis unit 50 and received by the third computer 30. The RAM temporarily stores the data used by the CPU 13 during program execution and can function as a temporary data storage device used as a working area. The HDD is a non-volatile storage device that can store the characteristic X-rays received from the third computer 30 and the analysis results of the characteristic X-rays. In addition to the HDD, a semiconductor storage device such as flash memory can be used, or a semiconductor storage device such as flash memory can be used instead of the HDD.

[0082] CPU 13 controls the first computer 10. CPU 13 expands the program stored in ROM of memory 14 into RAM or the like and executes the program.

[0083] Input I / F 15 is connected to the first input device 11. Input I / F 15 is an interface for communication between the first computer 10 and the first input device 11, and receives various signals from the first input device 11.

[0084] The display controller 16 is connected to the first display 12. The display controller 16 outputs a signal to the first display 12 indicating the content displayed in the first display area 120. If the first display 12 is a display with a touch panel, the display controller 16 receives a signal from the first display 12 indicating a touch operation by a first user.

[0085] Communication I / F 17 is connected to communication I / F 27 of the second computer 20 and communication I / F 37 of the third computer 30. Communication I / F 17 is an interface for communication between the first computer 10, the second computer 20, and the third computer 30, and is used for inputting and outputting various signals between the second computer 20 and the third computer 30.

[0086] The first computer 10 is implemented by installing software related to the analysis of characteristic X-rays on a general-function computer and storing dedicated programs and data in memory 14. Specifically, a basic software program called an operating system (OS) always runs on the first computer 10. This basic software program is responsible for displaying on the first display 12, processing operation inputs to the first input device 11, accessing memory 14, etc., and can perform processing in parallel.

[0087] On the other hand, a software program related to the analysis of characteristic X-rays is executed on the basic software program. The software program related to the analysis of characteristic X-rays is supplied from the outside to the memory 14 of the first computer 10, the CPU 13 reads out the supplied program code and executes the program code, whereby the software program related to the analysis of characteristic X-rays is realized.

[0088] The second computer 20 is provided with a CPU 23, a memory 24, an input I / F 25, a display controller 26, and a communication I / F 27. The second computer 20 is configured to act in accordance with a program saved in the memory 24. The memory 24 includes a ROM, a RAM, and an HDD, not shown.

[0089] The ROM is capable of saving a program executed by the CPU 23. The program includes a program of processing related to the control of the second display 22 and the control based on information from the second input device 21. The RAM is capable of temporarily saving data used by the CPU 23 in the course of executing a program, and is capable of functioning as a temporary data storage used as a work area. The HDD is a non-volatile storage device, and is capable of saving a detection signal of the analysis section 50 and information generated by the second computer 20. A semiconductor storage device such as a flash memory can be employed in addition to the HDD, or in place of the HDD.

[0090] The CPU 23 controls the analysis section 50 and the analysis device 1000 as a whole. The CPU 23 expands and executes a program saved in the ROM of the memory 24 in the RAM or the like.

[0091] The input I / F 25 is connected to the second input device 21. The input I / F 25 is an interface for communication between the second computer 20 and the second input device 21, and receives various signals from the second input device 21.

[0092] The display controller 26 is connected to the second display 22. The display controller 26 outputs a signal indicating the display content of the second display area 220 to the second display 22. In the case where the second display 22 is a display provided with a touch panel, the display controller 26 receives a signal representing a touch operation by an analyst with respect to the second display area 220 from the second display 22.

[0093] The communication I / F 27 is connected to the communication I / F 17 of the first computer 10. The communication I / F 27 is an interface for communication between the second computer 20 and the first computer 10, and inputs and outputs various signals between the second computer 20 and the first computer 10.

[0094] The second computer 20 can be realized by installing software related to the control of the second display 22 in a computer having general functions and saving dedicated programs and data in the memory 24. The program causes the captured screen transmitted from the first computer 10 to be displayed on the second display 22 in the same size as the captured screen. In addition, the program can cause the captured screen transmitted from the first computer 10 to be displayed on the second display 22 in the same resolution as the captured screen. With regard to the program, specifically, a basic software program called an OS is always running on the second computer 20. The basic software program is responsible for display in the second display 22, processing of operation input to the second input device 21, and access to the memory 24, and the like, and can perform processing in parallel.

[0095] The third computer 30 has a CPU 33, a memory 34, an input I / F 25, a display controller 36, and a communication I / F 37. The third computer 30 is configured to act in accordance with a program saved in the memory 34. The memory 34 includes a ROM, a RAM, and an HDD, which are not illustrated.

[0096] The ROM can save a program executed by the CPU 33. The program includes a program of processing related to the control of the analysis section 50. The RAM can temporarily save data utilized by the CPU 33 in the course of executing a program, and can function as a temporary data memory used as a work area. The HDD is a nonvolatile storage device, and can save a detection signal of the analysis section 50 and information generated by the third computer 30. A semiconductor storage device such as a flash memory can be used in addition to the HDD, or can be used instead of the HDD.

[0097] The CPU 33 controls the analysis section 50 and the entire analysis device 1000. The CPU 33 expands and executes a program saved in the ROM of the memory 34 in the RAM or the like.

[0098] The display controller 36 is connected to the third display 32. The display controller 36 outputs a signal indicating the display content of the third display region 320 to the third display 32. In the case where the third display 32 is a display having a touch panel, the display controller 36 receives a signal representing a touch operation of the first user with respect to the third display region 320 from the third display 32.

[0099] The communication I / F 37 is connected to the communication I / F 17 of the first computer 10 and the analysis section 50. The communication I / F 37 is an interface for the third computer 30 to communicate with the analysis section 50 and the first computer 10, and inputs and outputs various signals between the analysis section 50 and the first computer 10.

[0100] The third computer 30 is realized by installing a software related to the control of the analysis section 50 in a computer having a general function and saving a dedicated program and data in the memory 34. Specifically, a basic software program called an OS is always running on the third computer 30. The basic software program is responsible for display in the third display 32 and access to the memory 34 and the like, and can perform processing in parallel.

[0101] On the other hand, a software program related to the control of the analysis section 50 is executed on the basic software program. The software program related to the control of the analysis section 50 is supplied to the memory 34 of the third computer 30 from the outside, and the CPU 33 reads out the supplied program code and executes the program code, thereby realizing the software program related to the control of the analysis section 50.

[0102] In addition, at least one of the program saved in the memory 14, the program saved in the memory 24, and the program saved in the memory 34 can be saved in a storage medium and circulated as a program product. Alternatively, the program can be provided as a program product that can be downloaded by an information providing business person through a so-called Internet or the like. The controller reads the program provided through the storage medium or the Internet or the like. The controller stores the read program in a prescribed storage area (for example, a ROM). The controller executes the above-described display processing by executing the stored program.

[0103] The storage medium is not limited to a DVD-ROM (Digital Versatile Disk Read Only Memory), a CD-ROM (compact disc read-only memory), an FD (Flexible Disk), a hard disk, and can be a magnetic tape, a cassette tape, an optical disk (MO (Magnetic Optical Disc) / MD (Mini Disc) / DVD (Digital Versatile Disc)), an optical card, a mask ROM, an EPROM (Electronically Programmable Read-Only Memory), an EEPROM (Electronically Erasable Programmable Read-Only Memory), a flash ROM, or the like, a semiconductor memory that fixedly carries a program. In addition, the recording medium is a non-transitory medium that can be read by a computer.

[0104] [Display Examples of the First Display and the Second Display]

[0105] Figure 4 is a view showing an example of display of the first display 12 and the third display 32. Referring to Figure 4 , the third display 32 displays information related to the control of the analysis section 50. The first user can provide the third computer 30 with various instructions for controlling the analysis section 50 using the first input device 11 based on the display. In the third display region 320 of the third display 32, an icon indicating an observation condition in the analysis section 50, a numerical value indicating the observation condition, and an observation image I1 (either one of a secondary electron image and a reflection electron image, and an X-ray image) can be displayed. The third computer 30 generates the observation image I1 based on a signal of the characteristic X-ray transmitted from the analysis section 50 to the third computer 30.

[0106] The icon indicating the observation condition includes an icon 221, an icon 222, an icon 223, and an icon 224. The icon 221 is an icon for adjusting the position of the sample stage 4 (refer to Figure 2 ). The numerical value M1 is a numerical value indicating a numerical value related to the driving of the sample stage 4 (for example, the amount of driving of the sample stage 4). The icon 222 is an icon for adjusting the focal point of the electron beam. The numerical value M2 is a numerical value related to the focal point. The icon 223 is an icon for adjusting the pixel correction. The numerical value M3 is a numerical value related to the pixel correction. The icon 224 is an icon for adjusting the magnification of the observation image I1. The numerical value M4 is a numerical value related to the magnification. The first user can adjust each of the numerical values M1 to M4 using the first input device 11 while watching the observation image I1. In this way, the screen displayed by the third display 32 is a screen including the observation condition (the icon indicating the observation condition) and the observation image I1 of the sample. Hereinafter, the screen displayed by the third display 32 is also referred to as a "first observation screen". Furthermore, as a modification example, the first observation screen can be a screen not including the observation condition (the icon indicating the observation condition).

[0107] On the other hand, in the first display region 120 of the first display 12, an icon for processing and analyzing the characteristic X-ray transmitted from the third computer 30 to the first computer 10, a window W1 indicating the analysis result, and an image I2 in which the observation image I1 displayed on the first display 12 has been subjected to image processing are displayed.

[0108] The icon includes an icon 121, an icon 122, and an icon 123. The icon 121, the icon 122, and the icon 123 are icons indicating the analysis content. The icon 121 is an icon indicating qualitative analysis. The icon 122 is an icon indicating quantitative analysis. The icon 123 is an icon indicating surface analysis.

[0109] The first user can use the first input device 11 to select an observation image as an analysis target, select an analysis content by an icon or the like, and confirm a result of analysis and processing by the window W1 and the image I2 or the like. Further, in the example shown in the image I2, an example in which processing to enhance contrast of the observation image I1 is performed to enhance visual confirmation by the first user is shown. Figure 4

[0110] As such, the screen displayed by the first display 12 is a screen including an analysis content of a sample and an analysis result of the sample. Hereinafter, the screen displayed by the first display 12 is also referred to as a "first analysis screen". Further, as a modification example, the first analysis screen can be provided as a screen including an analysis content of a sample or an analysis result of the sample.

[0111] As described above, in the sample observation performed by the analysis device 1000, in a case where the sample S as an observation target is changed, control of each section of the analysis section 50 such as alignment of the sample S, focus of the electron beam, and change of magnification is performed. Information from the analysis section 50 is transmitted to the third computer 30 that controls the analysis section 50, and is displayed in the third display 32 for displaying information related to control. The first user provides an instruction related to control of each section of the analysis section 50 to the third computer 30 based on the information displayed on the third display 32. The third computer 30 reflects the instruction of the first user in the control of the analysis section 50.

[0112] Figure 5 is an example of an observation image I100 displayed by a remote display in a display system of a comparative example. The observation image displayed by the third display 32 on the analysis device side is displayed in a different size in the remote display due to a reason such as a difference in resolution of the third display 32 on the analysis device side and the remote display, or a difference in display area of the third display 32 on the analysis device side and the remote display. In the example of Figure 5 In the example of, a vertically long observation image I100 is displayed. In addition, in a case where a plurality of observation images are displayed in one screen by a display on the analysis device side, the observation images are displayed in different sizes, and thus the plurality of observation images are sometimes displayed in the remote display in a state where the arrangement of the plurality of observation images is different.

[0113] In a case where the observation image displayed by the display on the analysis device side is displayed in a different size in the remote display, the second user cannot visually confirm the actual observation image (an observation image of the same size as the observation image displayed by the display on the analysis device side). As a result, for example, in a case where the second user is a maintainer, the work of remote maintenance is hindered, and it can become impossible to perform appropriate remote maintenance. In addition, in a case where the second user is an analyst, it can become impossible to perform appropriate analysis of a sample. ​

[0114] Thus, the first computer 10 generates a captured screen of the first analysis screen displayed in the first display 12. In addition, the third computer 30 generates a captured screen of the first observation screen displayed in the third display 32. Hereinafter, the captured screen of the first observation screen will also be referred to as a "second observation screen", and the captured screen of the first analysis screen will also be referred to as a "second analysis screen".

[0115] The second computer 20 displays the captured screens (the second observation screen and the second analysis screen) generated by the first computer in the second display 22.

[0116] Figure 6 is an example of the captured screen displayed in the second display 22 of the present embodiment. In Figure 6 the example, the observation image I1 included in the second analysis screen is displayed. As Figure 6 indicated in the description of Figure 3 , the second display 22 displays a captured screen of a screen displayed in the display on the side of the analysis apparatus 1000, that is, the first display 12 and the third display 32. In addition, a program for displaying the captured screen in the same size as the captured screen transmitted is stored in the second computer 20 (see the description of ). Thus, it is possible to make the size of the screen displayed in the display on the side of the analysis apparatus 1000 the same as the size of the screen displayed in the second display 22. Thus, it is possible for the second user to visually confirm the screen in the second display 22, which has the same size as the screen displayed in the display on the side of the analysis apparatus 1000. In addition, in the case where the resolution of the display on the side of the analysis apparatus 1000 and the resolution of the second display 22 are the same, it is possible to make the resolution of the screen displayed in the display on the side of the analysis apparatus 1000 the same as the resolution of the screen displayed in the second display 22.

[0117] Figure 7 In addition, the second display 22 displays a screen of at least a part of the entire area of the captured screen. The second computer 20 can change the area of the captured screen displayed in the second display 22 according to the operation of the user. Figures 7-10 is a diagram showing the change of the area of the captured screen displayed in the second display 22. In Figure 7 , the solid line indicates the area of the captured screen displayed in the second display area 220 of the second display 22. In addition, the broken line indicates the area of the captured screen not displayed in the second display 22. In Figure 7 (A) of Figure 7The image shown in (B) (the image surrounded by a solid line). In Figure 7 In (B), icons 223 and 224 are displayed. According to this structure, the second user can cause the second display 22 to show the area in the captured image that the user wants to confirm.

[0118] In addition, the second user can use the captured screen displayed on the second display 22 to perform remote operation of the analysis device 1000. Figure 8 This is a diagram used to illustrate remote operations performed by a second user.

[0119] Figure 8 (A) is the first viewing screen displayed on the third display 32. Figure 8 (B) is the second viewing screen displayed on the second display 22. For example... Figure 8 As shown in (B), when the second user specifies the icon 224 of the second viewing screen (capture screen), the third computer 30 determines that the icon 224 of the first viewing screen has been virtually specified (refer to...). Figure 8 The pointer P1 is indicated by a dashed line in (A). In this way, the third computer 30 determines that the location specified by the second user in the area of ​​the second viewing screen and the same location in the first viewing screen have been virtually designated. The third computer 30 then instructs the analysis unit 50 to perform processing corresponding to the designated icon 224. The following will explain... Figure 8 Specific examples of the processing.

[0120] A first reference point is set in the first observation screen. Figure 8 In example (A), the top-left point of the first viewing screen is set as the first reference point. A second reference point is set in the second viewing screen. Figure 8 In example (B), the upper left point of the entire area of ​​the second viewing frame is set as the second reference point. Thus, the position represented by the first reference point is the same as the position represented by the second reference point. Furthermore, both the first and second reference points are represented using (X-coordinate, Y-coordinate). Figure 8 In the example, both the first and second reference points are represented by (0, 0).

[0121] In addition, such as Figure 8 As shown in (B), based on the second user's operation, the pointer P2 is used to specify the icon 224 in the area of ​​the second viewing screen. The coordinates of the position specified by the pointer P2 are set as (X, Y). The second computer 20 obtains the relative position of the position specified by the second user in the second viewing screen, with the second reference point (0, 0) as the reference. This relative position is (X, Y).

[0122] Next, the second computer 20 sends the relative position (X, Y) to the third computer 30 via the first computer 10. The third computer 30 determines the relative position in the first viewing frame based on the sent relative position (X, Y) and the first reference point. Figure 8 In example (A), the third computer 30 determines the relative position as the location positively indicated by the pointer P1 shown by the dashed line. The third computer 30 then performs processing corresponding to this determined relative position (the position positively indicated by the pointer P1 shown by the dashed line). Figure 9 In example (A), the third computer 30 performs the process of changing the magnification of the observed image I1. Figure 7 The example illustrates the situation where the second display 22 shows the second observation screen, but even when the second display 22 shows the second analysis screen, the second user can still remotely operate the second analysis screen.

[0123] According to this structure, the second user can remotely operate the analysis device 1000 using the capture screen (second analysis screen and second observation screen) displayed on the second display 22.

[0124] Next, other display examples of the second analysis screen and the second observation screen in the second computer 20 will be described. The second computer 20 is capable of displaying the second analysis screen and the second observation screen together on the second display 22. Figure 10 This diagram illustrates an example of how the second computer 20 displays the second analysis screen and the second observation screen together in the second display area 220. Hereinafter, the screen in which the second analysis screen and the second observation screen are integrated is sometimes referred to as an "integrated screen".

[0125] The second computer 20 generates an integrated screen by combining the end A1 of the second analysis screen with the end A2 of the second observation screen. The second computer 20 displays at least a portion of the entire area of ​​the integrated screen on the second display 22. Furthermore, the second user can change the area of ​​the entire integrated screen displayed on the second display (see reference). Figure 10 (Explanation).

[0126] In this way, the second display 22 shows an integrated screen, allowing the user to visually confirm the second analysis screen and the second observation screen in the same frame.

[0127] Next, other display examples of the second analysis screen and the second observation screen in the second computer 20 will be described. The second computer 20 is capable of displaying the second analysis screen and the second observation screen in a switchable manner in the second display area 220.

[0128] Figure 9is a diagram for explaining an example in which the second computer 20 displays the second analysis screen and the second observation screen in the second display region 220 in a switchable manner. When the second user performs a prescribed operation while the second computer 20 is displaying either one of the second analysis screen and the second observation screen, the other screen is switched to. In Figure 10 the example, the prescribed operation is an operation of moving the pointer P2 to the end of the second analysis screen. Further, the prescribed operation can be set to another operation, for example, an operation performed with respect to a switch button (not shown) displayed on the second display. In this way, the second computer 20 displays the second analysis screen and the second observation screen in a switchable manner, and thus the second user can visually confirm the second observation screen and the second screen that the second user desires.

[0129] Further, it can also be such that the second user is enabled to select whether to display the second observation screen and the second screen (refer to Figure 11 ) integrally on the second display 22 or to display the second observation screen and the second screen in a switchable manner on the second display 22 (refer to Figure 12 ).

[0130] [Function block diagram of first computer and second computer]

[0131] Figure 8 is a function block diagram of the third computer 30. The third computer 30 has a reception section 402, a generation section 406, a display control section 410, a capturing section 404, and a transmission section 408.

[0132] The analysis section 50 transmits data of the characteristic X-rays and the like to the third computer 30. The reception section 402 of the third computer 30 receives the data of the characteristic X-rays and the like. The generation section 406 generates the first observation screen on the basis of the data of the characteristic X-rays. The display control section 410 displays the generated first observation screen on the third display 32. The capturing section 404 generates the second observation screen by capturing the first observation screen. The transmission section 408 of the third computer 30 transmits the data of the second observation screen and the data of the characteristic X-rays to the first computer 10.

[0133] Figure 8 is a function block diagram of the first computer 10 and the second computer 20. The first computer 10 has a reception section 502, a capturing section 504, a generation section 506, a transmission section 508, and a display control section 510. The second computer 20 has a reception section 602, a display control section 604, an input section 606, an acquisition section 608, and a transmission section 610.

[0134] The receiving section 502 of the first computer 10 receives the data of the second observation screen and the data of the characteristic X-rays from the third computer 30. The generating section 506 generates the first analysis screen based on the data of the characteristic X-rays from the third computer 30. The display control section 510 displays the generated first analysis screen on the first display 12.

[0135] The capturing section 504 generates the second analysis screen by capturing the first analysis screen. The sending section 508 sends the data of the second observation screen received by the receiving section 502 and the data of the second analysis screen generated by the capturing section 504 to the second computer 20.

[0136] The receiving section 602 of the second computer 20 receives the data of the second analysis screen and the data of the second observation screen from the first computer 10. The second computer 20 stores the data of the second analysis screen and the data of the second observation screen in a prescribed storage area. The display control section 604 displays the second analysis screen and the second observation screen on the second display 22.

[0137] In addition, the second user can input a command to the second computer 20 using a second input device 21 such as a mouse. The input section 606 accepts the command from the second input device 21. In a case where the command accepted by the input section 606 is a command to move the pointer P2, the display control section 604 moves the pointer P2 displayed on the second display 22 in response to the command. In addition, in a case where the command accepted by the input section 606 is a command to specify an icon, the acquisition section 608 acquires a relative position of the specified position with the second reference point (refer to Figure 13 ) as a reference.

[0138] The sending section 610 sends the relative position acquired by the acquisition section 608 to the first computer 10. The first computer 10, when receiving the relative position, sends the relative position to the third computer 30. The third computer 30, when receiving the relative position, determines a relative position in the first observation screen with respect to the first reference point based on the relative position (refer to ​ ). The third computer 30 performs processing corresponding to the determined relative position.

[0139] [Flowchart of the First Computer and the Second Computer]

[0140] ​ is a flowchart indicating processing performed in the first computer 10 and the second computer 20. In step S2, the second computer 20 determines whether or not the second user has performed a remote start operation. The remote start operation is, for example, an operation performed on a remote start button (not shown) displayed on the second display 22.

[0141] In a case where the remote start operation is not performed (NO in step S2), the second computer 20 repeats the process of step S2 until the remote start operation is performed. In a case where it is determined that the remote start operation is performed (YES in step S2), the process proceeds to step S4. In step S4, the second computer 20 transmits a request signal to the first computer 10. The request signal is a signal for requesting the second observation picture and the second analysis picture.

[0142] In step S102, the first computer 10 receives the request signal. Next, in step S104, the capturing section 504 of the first computer 10 generates the second analysis picture and the second observation picture by capturing the first analysis picture and the first observation picture. Next, in step S106, the first computer 10 transmits the second analysis picture and the second observation picture to the second computer 20.

[0143] In step S6, the second computer 20 receives the second analysis picture and the second observation picture. Next, in step S8, the second analysis picture and the second observation picture are displayed on the second display 22.

[0144] [Modified Example]

[0145] (1) In the above-described embodiment, as an example of a method in which the second display 22 displays the pictures displayed on the first display 12 and the third display 32 in the same size, the configuration in which the first computer 10 generates the captured picture is described. However, the method can be another method. For example, the first computer 10 can transmit the data of the first analysis picture and the data of the first observation picture, and a control signal for causing the first analysis picture and the first observation picture to be displayed in the same size, to the second computer 20. The second display 22 displays the analysis picture and the observation picture in the same size as the first analysis picture and the first observation picture, on the basis of the control signal. In the case of this configuration, the second display 22 can display the analysis picture and the observation picture in the same size as the first analysis picture and the first observation picture.

[0146] (2) In the above-described embodiment, the configuration in which the analysis device 1000 is provided with two displays (the first display 12 and the third display 32) is described. However, the analysis device 1000 can be configured to be provided with one display, or can be configured to be provided with three or more displays. In addition, the second display 22 can be plural. Even in such a configuration, the first computer 10 performs a process (for example, a process of generating a captured picture) for causing the second display 22 to display a picture in the same size as a picture displayed on a display provided in the analysis device 1000.

[0147] (3) In the above-described embodiments, the configuration in which the analysis device 1000 is provided with the first computer 10 and the third computer 30 is described. However, the analysis device 1000 can be provided with one computer, and a configuration in which three or more computers are provided can also be adopted.

[0148] (4) In the above-described embodiments, the configuration in which the second display region 220 of the second display 22 is smaller than the first display region 120 of the first display 12 and the third display region 320 of the third display 32 is described. However, the second display region 220 of the second display 22 can also be set to be equal to or larger than the first display region 120 of the first display 12 and the third display region 320 of the third display 32.

[0149] (5) In the above-described embodiments, the configuration in which the first computer 10 is connected to the network 700 is described. However, the first computer 10 can also be connected to other computers by a wired method. In this configuration, the other computers and the second computer 20 are connected to the network 700, and are configured to be able to communicate with each other.

[0150] [Mode]

[0151] It is to be understood by those skilled in the art that the above-described multiple exemplary embodiments are specific examples of the following modes.

[0152] (First) A display system according to one embodiment includes a first display device, a second display device, and a control device that controls the first display device and the second display device. The control device causes the first display device to display a first screen related to analysis of a sample, generates a second screen by copying the first screen, and causes the second display device to display the second screen.

[0153] According to the display system according to the first, the second screen is displayed in the second display device in such a manner that the second screen has the same size as the first screen displayed in the first display device. Thus, a user can visually confirm, through the second display device, a screen having the same size as a screen related to analysis of the same sample displayed in the first display device.

[0154] (Second) In the display system according to the first, the control device generates the second screen by capturing the first screen.

[0155] According to the display system according to the second, a screen having the same size as a screen displayed in the first display device can be appropriately generated.

[0156] (Third) In the display system according to the first or the second, the control device can change a region displayed by the second display device in the second screen in accordance with a user's operation.

[0157] According to the display device described in the third aspect, the user can cause the second display device to display a region in the second image that the user wants to visually confirm.

[0158] (In the fourth aspect) In the display system described in any one of the first to third aspects, a first reference point is set in the first screen, a second reference point indicating the same position as the position indicated by the first reference point is set in the second screen, the control device accepts a designation by the user with respect to the second screen, determines a position corresponding to a relative position of the position designated by the user in the second screen from the second reference point when the first reference point is the reference in the first screen, and performs a process related to analysis of the sample in accordance with the determined position.

[0159] According to the display device described in the fourth aspect, the user can cause the analysis device to perform a process related to analysis of the sample by remote operation.

[0160] (In the fifth aspect) In the display system described in any one of the first to fourth aspects, the display system includes a third display device, the first screen is a screen including at least one of an analysis content of the sample and an analysis result, the control device causes the third display device to display a first observation screen including an observation image of the sample, generates a second observation screen by copying the first observation screen, and causes the second display device to display the second screen and the second observation screen.

[0161] According to the display device described in the fifth aspect, the second display device can display at least one of an analysis condition and an analysis result of the analysis section with the same size as the first analysis screen, and can display an observation content of the sample with the same size as the first observation screen.

[0162] (In the sixth aspect) In the display system described in the fifth aspect, the control device causes the second display device to display at least a part of a screen obtained by combining an end portion of the second screen with an end portion of the second observation screen.

[0163] According to the display system described in the sixth aspect, the second display device can display an integrated screen obtained by combining an end portion of the second observation screen with an end portion of the second screen, and thus the user can visually confirm both the second observation screen and the second screen in the same screen.

[0164] (In the seventh aspect) In the display system described in the fifth aspect, the control device switches between the second screen and the second observation screen and causes the second display device to display the screen after the switching.

[0165] According to the display device described in the seventh aspect, the second display device is capable of switching between the second observation screen and the second screen and displaying the screen after the switching, and thus the user is capable of visually confirming either one of the second observation screen and the second screen.

[0166] (A ninth aspect) An analysis device according to one embodiment includes the first display device and the control device described in any one of the first to seventh aspects, and an analysis section that analyzes a sample.

[0167] According to the analysis device described in the eighth aspect, the second screen is displayed in the second display device in such a manner that the second screen has the same size as the first screen displayed in the first display device. Thus, the user is capable of visually confirming, through the second display device, the screen having the same size as the screen displayed in the first display device and relating to the analysis of the sample by the analysis section.

[0168] (A ninth aspect) An analysis device according to one embodiment includes the first display device and the control device described in any one of the first to seventh aspects, and an analysis section that analyzes a sample.

[0169] According to the analysis device described in the eighth aspect, the second screen is displayed in the second display device in such a manner that the second screen has the same size as the first screen displayed in the first display device. Thus, the user is capable of visually confirming, through the second display device, the screen having the same size as the screen displayed in the first display device and relating to the analysis of the sample by the analysis section.

[0170] (A ninth aspect) An analysis device according to one embodiment includes the first display device and the control device described in any one of the first to seventh aspects, and an analysis section that analyzes a sample.

[0171] According to the analysis device described in the eighth aspect, the second screen is displayed in the second display device in such a manner that the second screen has the same size as the first screen displayed in the first display device. Thus, the user is capable of visually confirming, through the second display device, the screen having the same size as the screen displayed in the first display device and relating to the analysis of the sample by the analysis section.

[0172] (A ninth aspect) An analysis device according to one embodiment includes the first display device and the control device described in any one of the first to seventh aspects, and an analysis section that analyzes a sample.

[0173] According to the display device described in the eleventh aspect, the second screen is displayed in the second display device in such a manner that the second screen becomes the same size as the size of the first screen displayed in the first display device. Thus, the user can visually confirm the same-size screen related to the analysis of the same sample as the first screen displayed in the first display device through the second display device.

[0174] (12th aspect) A control program according to one embodiment causes a control device that controls a second display device to execute the following steps: receiving a screen related to the analysis of a sample, displayed in a first display device, and copied by the control device that controls the first display device; and displaying the screen in the second display device.

[0175] According to the program described in the twelfth aspect, the second screen is displayed in the second display device in such a manner that the second screen becomes the same size as the size of the first screen displayed in the first display device. Thus, the user can visually confirm the same-size screen related to the analysis of the same sample as the first screen displayed in the first display device through the second display device.

[0176] It is also planned to appropriately combine the embodiments disclosed herein within a range not contradictory in a technical sense to implement. Also, it should be considered that the embodiments disclosed herein are illustrative in all respects, not restrictive. The scope of the present embodiment is not shown by the description of the above-described embodiments, but by the claims, and the scope of the present embodiment includes all modifications within the same meaning and range as the claims.

Claims

1. A display system comprising: a first display device provided to an analysis device; a second display device having a size different from that of the first display device; and a control device that controls the first display device and the second display device, the control device displays a first screen related to analysis of a sample on the first display device, in the first screen, an analysis result of the analysis device and an icon indicating a kind of operation of the analysis device are displayed, the control device generates a second screen identical in size and scale to the first screen by copying the first screen, the control device causes the second display device to display the second screen without changing the size and scale of the second screen regardless of the size of a display area of the second display device, wherein a first reference point is set in the first screen, a second reference point indicating the same position as that on the first screen indicated by the first reference point is set in the second screen, the control device accepts designation by a user with respect to the second screen, the control device calculates a relative position of a position designated by the user in the second screen with reference to the second reference point, the control device determines a position corresponding to the relative position with reference to the first reference point in the first screen, and the control device performs processing of the icon with respect to the analysis device corresponding to the determined position.

2. The display system according to claim 1, wherein the control device generates the second screen by capturing the first screen.

3. The display system according to claim 1 or 2, wherein the control device is capable of changing a region displayed by the second display device in the second screen according to an operation by a user.

4. The display system according to claim 1 or 2, comprising a third display device, the first screen is a screen including at least one of an analysis content and an analysis result of the sample, the control device causes the third display device to display a first observation screen including an observation image of the sample, the control device generates a second observation screen by copying the first observation screen, and the control device causes the second display device to display the second screen and the second observation screen. wherein 5. The display system according to claim 4, wherein the control device causes the second display device to display at least a part of a screen obtained by combining an end portion of the second screen with an end portion of the second observation screen.

6. The display system according to claim 4, wherein the control device switches between the second screen and the second observation screen and causes the second display device to display the screen after the switching.

7. An analysis device comprising: the first display device and the control device according to any one of claims 1 to 6; and an analysis section that analyzes a sample. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 8. A control method for controlling a first display device possessed by an analysis apparatus, the control method comprising the steps of: generating a second screen identical in size and scale to a first screen by copying the first screen, the first screen being related to analysis of a sample and displayed on the first display device, in the first screen, an analysis result of the analysis apparatus and an icon indicating a kind of operation of the analysis apparatus being displayed; and sending the second screen to a control device that causes a second display device, which is different in size from the first display device, to display the second screen without changing the size and scale of the second screen, regardless of the size of a display area of the second display device, the control method further comprising: setting a first reference point in the first screen, setting a second reference point in the second screen, the second reference point indicating a position identical to a position on the first screen indicated by the first reference point, accepting a designation made by a user with respect to the second screen, calculating a relative position of a position designated by the user in the second screen with respect to the second reference point, determining a position corresponding to the relative position in the first screen with respect to the first reference point, and executing a process with respect to the icon of the analysis apparatus corresponding to the determined position.

9. A computer-readable storage medium storing a control program that causes a control device that controls a first display device possessed by an analysis apparatus to execute the steps of: generating a second screen identical in size and scale to a first screen by copying the first screen, the first screen being related to analysis of a sample and displayed on the first display device, in the first screen, an analysis result of the analysis apparatus and an icon indicating a kind of operation of the analysis apparatus being displayed; and sending the second screen to a control device that causes a second display device, which is different in size from the first display device, to display the second screen without changing the size and scale of the second screen, regardless of the size of a display area of the second display device, the steps further comprising setting a first reference point in the first screen, the control program further causing the control device that causes the second display device to display the second screen to execute the steps of: setting a second reference point in the second screen, the second reference point indicating a position identical to a position on the first screen indicated by the first reference point, accepting a designation made by a user with respect to the second screen, the control program further causing the control device that controls the first display device to execute the steps of: calculating a relative position of a position designated by the user in the second screen with respect to the second reference point, determining a position corresponding to the relative position in the first screen with respect to the first reference point, and executing a process with respect to the icon of the analysis apparatus corresponding to the determined position.

10. A control method for controlling a second display device, the control method comprising the steps of: receiving a screen displayed on a first display device of an analysis device and copied by a control device in relation to analysis of a sample, the copied screen being the same in size and scale as a screen displayed on the first display device and showing an analysis result of the analysis device and an icon indicating a kind of operation of the analysis device; and displaying the copied screen in the second display device which is different in size from the first display device, without changing the size and scale of the copied screen, regardless of the size of a display area of the second display device, the control method further comprising the steps of: setting a second reference point in the copied screen, the second reference point indicating a position on the screen of the first display device which is the same as a position indicated by a first reference point set in the screen displayed on the first display device, causing the control device to accept designation by a user with respect to the copied screen, causing the control device which controls the first display device to calculate a relative position of the position designated by the user in the copied screen with the second reference point as a reference, determine a position corresponding to the relative position when the first reference point is taken as a reference in the screen displayed on the first display device, and execute a process with respect to the icon of the analysis device corresponding to the determined position.

11. A computer-readable storage medium storing a control program which causes a control device which controls a second display device to execute the steps of: receiving a screen displayed on a first display device of an analysis device and copied by a control device of the first display device in relation to analysis of a sample, the copied screen being the same in size and scale as a screen displayed on the first display device and showing an analysis result of the analysis device and an icon indicating a kind of operation of the analysis device; and displaying the copied screen in the second display device which is different in size from the first display device, without changing the size and scale of the copied screen, regardless of the size of a display area of the second display device, the control program further causing a control device which controls the second display device to execute the steps of: setting a second reference point in the copied screen, the second reference point indicating a position on the screen of the first display device which is the same as a position indicated by a first reference point set in the screen displayed on the first display device, accepting designation by a user with respect to the copied screen, the control program further causing a control device which controls the first display device to execute the steps of: calculating a relative position of the position designated by the user in the copied screen with the second reference point as a reference, determining a position corresponding to the relative position when the first reference point is taken as a reference in the screen displayed on the first display device, and executing a process with respect to the icon of the analysis device corresponding to the determined position.

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