Tuning type laser tuning system and method

By using a novel tuning component for a tuned laser, which utilizes piezoelectric ceramics to drive the movement of an aspherical mirror, the problems of high processing precision, high cost, and complex structure in existing technologies have been solved. This enables high-precision, rapid optical frequency tuning and miniaturization, improving the system's reliability and vibration resistance.

CN121440342AActive Publication Date: 2026-01-30上海旷鹰赛光学科技有限公司
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Patent Information

Application Number
CN202511307537.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-09-14
Publication Date
2026-01-30
Estimated Expiration
2045-09-14

AI Technical Summary

Technical Problem

In existing tunable lasers, the spring bearings and shaft seats have high requirements for machining and installation accuracy, are complex to manufacture and costly, have complex mechanisms and large structural dimensions, are not easy to miniaturize, and are sensitive to vibration environments, which affects the repeatability of optical frequency tuning.

Method used

A tuning assembly consisting of a mounting bracket, an aspherical mirror, a top mirror component, a first piezoelectric ceramic, and a second piezoelectric ceramic drives the aspherical mirror to move through the deformation of the piezoelectric ceramic. Combined with a threaded connection and a guiding structure, the distance between the aspherical mirror and the TO component and the diffraction grating is adjusted, simplifying the structure and improving tuning accuracy and speed.

Benefits of technology

It achieves high-precision and fast optical frequency tuning, reduces costs, has a compact structure, is easy to miniaturize, improves system reliability and service life, and reduces sensitivity to vibration environments.

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Abstract

The invention provides a tuning type laser tuning system and method, and relates to the technical field of laser measurement, the tuning type laser tuning system comprises a housing, a TO assembly, a diffraction grating and a tuning assembly, the tuning assembly comprises a mounting rack, an aspherical mirror, a top mirror piece, a first piezoelectric ceramic, a second piezoelectric ceramic and a connecting support; a mounting claw is arranged at one end of the mounting frame, and a first mounting groove and a second mounting groove are formed in the mounting frame; the aspherical mirror is mounted on the mounting claw; the top mirror piece is in threaded connection with the mounting frame and abuts against the plane end of the aspherical mirror; the connecting bracket is connected with the mounting frame. The second piezoelectric ceramic shrinks and deforms in a power-on state, and the first piezoelectric ceramic expands and deforms, so that the mounting frame is warped and deformed, the top mirror piece is promoted to push the aspherical mirror, the distance between the aspherical mirror and the TO assembly and the distance between the aspherical mirror and the diffraction grating are adjusted, the motion repeatability precision is high, the tuning speed is high, the cost is low, the structure is simple and compact, miniaturization is facilitated, and the application range is wide. Installation and production are easy.
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Description

TECHNICAL FIELD

[0001] The present application relates to the field of laser measurement technology, in particular to a tuning laser tuning system and method. BACKGROUND

[0002] The tuning laser refers to the laser which can continuously change the laser output wavelength within a certain range. The tuning laser has wide application, and can be used in spectroscopy, photochemistry, medicine, biology, integrated optics, pollution monitoring, semiconductor material processing, information processing and communication, etc.

[0003] In the tuning laser, the common tuning mode is that the piezoelectric ceramic is electrified to deform and elongate to push the rotating shaft seat of the aspheric mirror, so that the rotating shaft seat rotates around the spring bearing, and a certain angle of the rotating shaft seat is rotated to realize the relative position of the aspheric mirror, the TO (the abbreviation of Transistor Outline, transistor package) component and the diffraction grating, so that the light frequency is tuned. Meanwhile, the mechanism needs to support the rotating shaft seat to provide support reaction force for the piezoelectric ceramic. The problems of the tuning mode are as follows: 1. The machining precision, installation precision and motion repeatability of the spring bearing and the rotating shaft seat are required to be high, the manufacturing is complex and the cost is high; 2. The mechanism is complex, the structure size is large, and it is not easy to realize miniaturization; 3. The motion mechanism is sensitive to the vibration environment, and the vibration environment makes the motion repeatability of the mechanism poor, which affects the tuning of the light frequency. SUMMARY

[0004] Therefore, the present application provides a tuning laser tuning system and method to solve the technical problems of the machining precision, installation precision and motion repeatability of the spring bearing and the rotating shaft seat being required to be high, the manufacturing being complex and the cost being high, and the mechanism being complex, the structure size being large and not easy to realize miniaturization.

[0005] The technical scheme of the present application is as follows: In a first aspect, the present application provides a tuning laser tuning system, comprising a shell, and a TO component, a diffraction grating and a tuning component installed on the shell, wherein the tuning component comprises a mounting frame, an aspheric mirror, a top mirror piece, a first piezoelectric ceramic, a second piezoelectric ceramic and a connecting bracket. The TO component and the diffraction grating are located on the side of the tuning component. One end of the mounting frame is provided with a mounting claw, and the other end is provided with a threaded hole. The mounting frame is provided with a first mounting groove and a second mounting groove. The mounting frame can be deformed. The aspheric mirror is installed on the mounting claw and can move along the axis direction of the threaded hole. The outer wall of the top mirror piece is provided with an external thread matched with the threaded hole, and the plane end of the aspheric mirror is in contact with the top mirror piece. The first piezoelectric ceramic is installed in the first mounting groove; The second piezoelectric ceramic is installed in the second mounting groove; The connecting bracket is connected to the mounting bracket and is used to connect the housing.

[0006] Based on the above technical solutions, preferably, the end of the mounting bracket away from the mounting claw is provided with a flat, straight section; the connecting bracket is threadedly connected to the housing; and the end of the top lens component away from the aspherical lens is provided with an internal hexagonal groove.

[0007] Based on the above technical solutions, preferably, the mounting claws are provided in multiples, and the multiple mounting claws are evenly distributed around the axis of the threaded hole.

[0008] Based on the above technical solutions, preferably, the end of the top mirror component that abuts against the aspherical mirror is a spherical surface, and the top mirror component is made of brass.

[0009] Based on the above technical solutions, preferably, the housing is provided with an installation platform, and the connecting bracket is threadedly connected to the installation platform; The tuned laser tuning system also includes an adjustment shim located between the mounting platform and the connecting bracket, the adjustment shim having an angle.

[0010] Based on the above technical solutions, preferably, the tilt angle of the adjusting shim is 0.1~3°, and the thickness of the adjusting shim is 0.1~0.5mm.

[0011] Based on the above technical solutions, preferably, the installation angle of the tuning component and its distance from the TO component and the diffraction grating are calculated according to the required tuning frequency of the laser, and the thickness and tilt angle of the required adjustment shim are determined.

[0012] Based on the above technical solutions, preferably, a fuse is also included, which connects the connecting bracket and the mounting bracket.

[0013] Based on the above technical solutions, preferably, the mounting bracket includes a connecting part, a deforming part, and a clamping part. The deforming part connects the connecting part and the clamping part. The threaded hole is disposed in the connecting part, the mounting claw is disposed in the clamping part, and the first mounting groove and the second mounting groove are disposed in the deforming part. The deforming part can warp under the shrinkage or expansion deformation of the first piezoelectric ceramic and the second piezoelectric ceramic to cause the top mirror component to push the aspherical mirror to move.

[0014] In a second aspect, the present invention provides a tuning method for a tuned laser, using the tuning laser tuning system described in the first aspect, the tuning method comprising: The first piezoelectric ceramic expands and deforms as the second piezoelectric ceramic contracts and deforms when energized. The mounting bracket warps under the deformation of the first piezoelectric ceramic and the second piezoelectric ceramic. The top mirror component moves towards the aspherical mirror under the deformation of the mounting bracket, pushing the aspherical mirror. The aspherical mirror moves along the axial direction of the threaded hole under the guidance of the mounting claw, thereby adjusting the distance between the aspherical mirror and the TO component and the diffraction grating.

[0015] The tuned laser tuning system and method of the present invention have the following advantages over the prior art: (1) The second piezoelectric ceramic shrinks and deforms when energized, the first piezoelectric ceramic expands and deforms, and the mounting bracket warps under the deformation of the first piezoelectric ceramic and the second piezoelectric ceramic, causing the top mirror to move forward and push the aspherical mirror. At the same time, the mounting claw plays a guiding role. The aspherical mirror can only move along the axial direction of the threaded hole, thereby adjusting the distance between the aspherical mirror and the TO component and the diffraction grating. It has high motion repeatability accuracy, fast tuning speed, low cost, simple and compact structure, easy to miniaturize, and easy to install and produce. (2) The mounting bracket is threadedly connected to the housing. The end of the mounting bracket away from the mounting claw is provided with a flat plate. By inserting a flat plate into the flat plate and rotating the mounting bracket, the mounting bracket and the top lens can be moved relative to the mounting bracket to complete the coarse adjustment of the aspherical lens. The end of the top lens away from the aspherical lens is provided with an internal hexagonal groove. By inserting a hexagonal plate into the internal hexagonal groove and rotating the top lens, the top lens can be moved relative to the mounting bracket to complete the fine adjustment of the aspherical lens. This achieves large-distance adjustment of the aspherical lens, improves adjustment efficiency, and, in conjunction with the micron-level adjustment of the first and second piezoelectric ceramics, achieves high-sensitivity adjustment of the aspherical lens. (3) The mounting claws are provided in multiple ways, and the multiple mounting claws are evenly distributed around the axis of the threaded hole to guide the movement of the aspherical mirror. This ensures that the movement direction of the aspherical mirror is always along the axis of the threaded hole, resulting in high repeatability of the aspherical mirror. (4) The end of the top lens that contacts the aspherical mirror is spherical and the top lens is made of brass, which can prevent the top lens from damaging the aspherical mirror during the process of pushing the aspherical mirror, thereby improving the reliability and service life of the system. (5) The adjusting shim is located between the mounting platform and the connecting bracket. The adjusting shim has an inclination angle. The initial installation inclination angle and distance of the tuning component can be adjusted according to the adjusting shim with different inclination angles and thicknesses. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of the tuned laser tuning system in an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the tuning component in an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of the mounting bracket of the tuning component in an embodiment of the present invention, showing warping deformation (the dashed line represents the position after deformation). Figure 4 This is a schematic flowchart of the tuning method for a tuned laser in an embodiment of the present invention.

[0018] Explanation of reference numerals in the attached drawings: 1-Housing, 2-TO assembly, 3-Diffraction grating, 4-Tuning assembly, 5-Adjustment shim, 6-Fuse; 11-Installation platform; 41-Mounting bracket, 411-Connecting part, 4111-Threaded hole, 4112-Straight flat part, 412-Deformation part, 4121-First mounting groove, 4122-Second mounting groove, 413-Clamping part, 4131-Mounting claw, 42-Aspherical mirror, 43-Top mirror part, 431-Internal hexagonal groove, 44-First piezoelectric ceramic, 45-Second piezoelectric ceramic, 46-Connecting bracket. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0020] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0021] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0023] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0024] The following disclosure provides numerous different embodiments or examples for implementing various structures of the invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. Additionally, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0025] The technical solution will now be explained in detail: Reference Figures 1-3As shown, a first aspect of the present invention provides a tuned laser tuning system, including a housing 1, and a TO component 2, a diffraction grating 3, and a tuning component 4 mounted on the housing 1. The tuning component 4 includes a mounting bracket 41, an aspherical mirror 42, a top mirror 43, a first piezoelectric ceramic 44, a second piezoelectric ceramic 45, and a connecting bracket 46, wherein: The TO component 2 and the diffraction grating 3 are located on the side of the tuning component 4, and their optical axes are coaxial. The mounting bracket 41 has a mounting claw 4131 at one end and a threaded hole 4111 at the other end. The inner side of the mounting bracket 41 has a first annular mounting groove 4121 and the outer side has a second annular mounting groove 4122. The mounting bracket 41 can deform and contract and expand along the axial direction of the threaded hole 4111. The mounting bracket 41 is made of Invar steel (a type of iron-nickel alloy with a composition of 36% nickel, 63.8% iron, and 0.2% carbon), which has a low coefficient of thermal expansion and is not affected by the operating temperature. The aspherical mirror 42 is mounted on the mounting claw 4131 and can move along the axial direction of the threaded hole 4111. The outer wall of the top mirror component 43 is provided with an external thread that matches the threaded hole 4111 and abuts against the planar end of the aspherical mirror 42; The first piezoelectric ceramic 44 is installed in the first mounting groove 4121, and the first piezoelectric ceramic 44 is in the shape of a ring; The second piezoelectric ceramic 45 is installed in the second mounting groove 4122, and the second piezoelectric ceramic 45 is in the shape of a ring; The connecting bracket 46 is connected to the mounting bracket 41 and is used to connect the housing 1.

[0026] The tuned laser tuning system proposed in this embodiment utilizes the shrinkage and deformation of the second piezoelectric ceramic 45 when energized, and the expansion and deformation of the first piezoelectric ceramic 44. The mounting bracket 41 warps under the deformation of the first piezoelectric ceramic 44 and the second piezoelectric ceramic 45, causing the top mirror component 43 to move forward and push the aspherical mirror 42. At the same time, the mounting claw 4131 acts as a guide, and the aspherical mirror 42 can only move along the axial direction of the threaded hole 4111, thereby adjusting the distance between the aspherical mirror 42 and the TO component 2 and the diffraction grating 3. It has high motion repeatability accuracy, fast tuning speed, low cost, simple and compact structure, and is easy to miniaturize and install in production.

[0027] In some embodiments, the mounting bracket 41 has a flat, L-shaped section 4112 at one end away from the mounting claw 4131, the connecting bracket 46 is threaded to the housing 1, and the top lens 43 has an internal hexagonal slot 431 at one end away from the aspherical lens 42. By inserting a flathead screwdriver into the flat, L-shaped section 4112 and rotating the mounting bracket 41, the mounting bracket 41 and the top lens 43 can be moved relative to the connecting bracket 46, completing the coarse adjustment of the aspherical lens 42. By inserting a hexagonal plate into the internal hexagonal slot 431 and rotating the top lens 43, the top lens 43 can be moved relative to the mounting bracket 41, completing the fine adjustment of the aspherical lens 42, achieving large-distance adjustment of the aspherical lens 42, improving adjustment efficiency, and simultaneously achieving high-sensitivity adjustment of the aspherical lens 42 by coordinating the micron-level adjustment of the first piezoelectric ceramic 44 and the second piezoelectric ceramic 45.

[0028] In some embodiments, multiple mounting claws 4131 are provided, and the multiple mounting claws 4131 are evenly distributed circumferentially around the axis of the threaded hole 4111. By guiding the movement of the aspherical mirror 42 with multiple mounting claws 4131, the movement direction of the aspherical mirror 42 can always be along the axis of the threaded hole 4111, resulting in high repeatability and accuracy of the movement of the aspherical mirror 42. In this embodiment, four mounting claws 4131 are provided, and the four mounting claws 4131 are evenly distributed circumferentially to stably guide the aspherical mirror 42.

[0029] In some embodiments, the end of the top lens 43 that abuts against the aspherical lens 42 has a spherical surface, and the top lens 43 is made of brass. This design prevents the top lens 43 from damaging the aspherical lens 42 during the pushing process, thus improving the system's reliability and lifespan.

[0030] In some embodiments, the housing 1 is provided with a mounting platform 11, and the connecting bracket 46 is threadedly connected to the mounting platform 11. The tuned laser tuning system further includes an adjusting shim 5, which is located between the mounting platform 11 and the connecting bracket 46, and the adjusting shim 5 has an angle. By using adjusting shims 5 with different angles and thicknesses, the initial mounting angle and distance of the tuning assembly 4 can be adjusted. The adjusting shim 5 is made of 304 stainless steel with good hardness and strength to meet hardness and strength requirements and improve the reliability of the device.

[0031] In some embodiments, the tilt angle of the adjusting shim 5 is 0.1° to 3°, and the thickness of the adjusting shim 5 is 0.1° to 0.5mm. The tilt angle of the adjusting shim 5 can be 0.1°, 0.5°, 1°, and 3°; the thickness of the adjusting shim 5 can be 0.1mm, 0.2mm, and 0.5mm. Using the adjusting shims 5 with the above-mentioned tilt angles and thicknesses, the initial installation tilt angle and distance of the tuning assembly 4 can be adjusted.

[0032] In some embodiments, the installation angle of the tuning component 4 and its distance from the TO component 2 and the diffraction grating 3 are calculated based on the required tuning frequency of the laser, and the thickness and tilt angle of the required adjustment shim 5 are determined.

[0033] In some embodiments, the tuned laser tuning system further includes a fuse 6, which connects the connecting bracket 46 and the mounting bracket 41. After the tuning component 4 is positioned, the fuse 6 is installed to connect the mounting bracket 41 and the connecting bracket 46 for fixation, preventing the mounting bracket 41 from loosening during use.

[0034] In some embodiments, the mounting bracket 41 includes a connecting portion 411, a deformable portion 412, and a clamping portion 413. The deformable portion 412 connects the connecting portion 411 and the clamping portion 413. A threaded hole 4111 is disposed in the connecting portion 411, and a mounting claw 4131 is disposed in the clamping portion 413. The first mounting groove 4121 and the second mounting groove 4122 are disposed in the deformable portion 412. The deformable portion 412 can warp under the contraction or expansion deformation of the first piezoelectric ceramic 44 and the second piezoelectric ceramic 45, thereby causing the top lens component 43 to push the aspherical mirror 42 to move. When the second piezoelectric ceramic 45 is energized, it contracts and deforms; when the first piezoelectric ceramic 44 expands and deforms, the deformable portion 412 warps and deforms. Under the deformation of the mounting bracket 41, the top lens component 43 pushes the aspherical mirror 42, achieving a 3µm displacement of the aspherical mirror 42 for multi-bandwidth precision tuning.

[0035] The assembly process of the tuned laser tuning system is as follows: First, the first piezoelectric ceramic 44 and the second piezoelectric ceramic 45 are bonded to the mounting bracket 41. Then, the aspherical mirror 42 is bonded to the mounting claw 4131. The top mirror 43 is installed from the rear end of the mounting bracket 41. After the top mirror 43 is installed in place, it contacts the aspherical mirror 42. The connecting bracket 46 is then connected to the external thread of the mounting bracket 41. Screws are screwed in from the mounting platform 11 side of the housing 1 to fix the connecting bracket 46 to the housing 1. After the mounting bracket 41 is installed in place, the flathead screwdriver on the mounting bracket 41 can be turned to make coarse adjustments to the tuning component 4. The top mirror 43 can be turned to make fine adjustments to the aspherical mirror 42. After the position of the tuning component 4 is adjusted in place, the fuse 6 is installed to prevent the mounting bracket 41 from loosening during use.

[0036] Based on the same concept, combined Figure 4 As shown, a second aspect of the present invention provides a tuning method for a tuned laser, using the tuning laser tuning system described in the first aspect embodiment. The tuning method includes: Step S1: The second piezoelectric ceramic 45 contracts and deforms when energized, while the first piezoelectric ceramic 44 expands and deforms. Step S2: The mounting bracket 41 warps under the deformation action of the first piezoelectric ceramic 44 and the second piezoelectric ceramic 45; Step S3: The top mirror component 43 moves towards the aspherical mirror 42 under the deformation of the mounting bracket 41, pushing the aspherical mirror 42. Step S4: The aspherical mirror 42 moves along the axial direction of the threaded hole 4111 under the guidance of the mounting claw 4131, thereby adjusting the distance between the aspherical mirror 42 and the TO component 2 and the diffraction grating 3.

[0037] The tuning method for a tuned laser proposed in this embodiment involves the second piezoelectric ceramic 45 shrinking and deforming when energized, and the first piezoelectric ceramic 44 expanding and deforming. The mounting bracket 41 warps under the deformation of the first piezoelectric ceramic 44 and the second piezoelectric ceramic 45, causing the top mirror component 43 to move forward and push the aspherical mirror 42, thereby adjusting the distance between the aspherical mirror 42 and the TO component 2 and the diffraction grating 3. This method has high motion repeatability accuracy, fast tuning speed, and low cost.

[0038] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A tunable laser tuning system, characterized by, The tuning system comprises a housing, a TO component, a diffraction grating and a tuning component mounted on the housing, wherein the tuning component comprises a mounting frame, an aspheric mirror, a top mirror, a first piezoelectric ceramic, a second piezoelectric ceramic and a connecting bracket, and wherein: The TO component and the diffraction grating are located on the side of the tuning component; One end of the mounting frame is provided with a mounting claw, and the other end is provided with a threaded hole, the mounting frame is provided with a first mounting groove and a second mounting groove, and the mounting frame can be deformed; The aspheric mirror is mounted on the mounting claw and can move along the axis of the threaded hole; The outer wall of the top mirror is provided with external threads matched with the threaded hole, and the plane end of the aspheric mirror is in contact with the top mirror; The first piezoelectric ceramic is mounted in the first mounting groove; The second piezoelectric ceramic is mounted in the second mounting groove; The connecting bracket is connected with the mounting frame and is used to connect the housing.

2. The tunable laser tuning system of claim 1, wherein, One end of the mounting frame away from the mounting claw is provided with a one-letter-shaped flat, the connecting bracket is threadedly connected with the housing, and one end of the top mirror away from the aspheric mirror is provided with an internal hexagonal groove.

3. The tunable laser tuning system of claim 1, wherein, The mounting claw is provided with a plurality of mounting claws which are uniformly distributed around the axis of the threaded hole.

4. The tunable laser tuning system of claim 1, wherein, The end of the top mirror in contact with the aspheric mirror is a spherical surface, and the top mirror is made of brass.

5. The tunable laser tuning system of claim 1, wherein, The housing is provided with a mounting platform, and the connecting bracket is threadedly connected with the mounting platform; The tuning system further comprises an adjusting gasket located between the mounting platform and the connecting bracket, and the adjusting gasket has an inclination angle.

6. The tunable laser tuning system of claim 5, wherein, The inclination angle of the adjusting gasket is 0.1-3°, and the thickness of the adjusting gasket is 0.1-0.5mm.

7. The tunable laser tuning system of claim 6, wherein, The installation angle of the tuning component and the distance from the TO component and the diffraction grating are calculated according to the required tuning frequency of the laser, and the thickness and inclination angle of the required adjusting gasket are determined.

8. The tunable laser tuning system of claim 1, wherein, The tuning system further comprises a fuse connected with the connecting bracket and the mounting frame.

9. The tunable laser tuning system of claim 1, wherein, The mounting frame comprises a connecting portion, a deformation portion and a clamping portion, the deformation portion connects the connecting portion and the clamping portion, the threaded hole is arranged on the connecting portion, the mounting claw is arranged on the clamping portion, the first mounting groove and the second mounting groove are arranged on the deformation portion, and the deformation portion can be warped and deformed under the contraction or expansion deformation of the first piezoelectric ceramic and the second piezoelectric ceramic, so as to drive the aspheric mirror to move.

10. A method of tuning a tunable laser, the method comprising: The tuning method of the tuning laser uses the tuning system of any one of claims 1-9, and comprises the following steps: The first piezoelectric ceramic is deformed by contraction under the electrification of the second piezoelectric ceramic; The mounting frame is warped and deformed under the deformation of the first piezoelectric ceramic and the second piezoelectric ceramic; The top mirror moves towards the aspheric mirror under the deformation of the mounting frame, and pushes the aspheric mirror; The aspheric mirror moves along the axis of the threaded hole under the guidance of the mounting claw, so as to adjust the distance between the aspheric mirror and the TO component and the diffraction grating.

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