Mechanical interlocking device of pressure tank, pressure tank and bubble discharging pipeline system

Abstract

The invention provides a pressure tank mechanical interlocking device, a pressure tank and a bubble discharging pipeline system.The pressure tank mechanical interlocking device comprises a locking piece, an interlocking piece and a valve, the locking piece is used for locking or loosening a cover body of the pressure tank, the interlocking piece is arranged to be capable of moving between a first position and a second position, and a valve element of the valve is mechanically coupled with the interlocking piece; when the interlocking piece is located at the first position, the interlocking piece stops operation on the locking piece, the valve is located at a first valve position allowing fluid to be introduced into the pressure tank, and when the interlocking piece moves from the first position to the second position, the interlocking piece is in linkage with the valve to be switched to a second valve position for cutting off fluid introduction and conducting pressure relief on the pressure tank. And meanwhile, the operation stopping on the locking piece is relieved. According to the mechanical interlocking device, the pressure tank can be forced to release pressure before the locking piece is opened, so that the safety is ensured.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing technology, and more specifically, relates to a pressure tank mechanical interlock device, a pressure tank and a degassing pipeline system. Background Technology

[0002] In existing technologies, high-viscosity photoresist is typically stored in bottles placed within a pressure tank. A stable supply of photoresist is achieved by introducing high-pressure process gas into the tank to overcome the viscous resistance of the photoresist itself. When the photoresist in the bottle is depleted, the system must be shut down for bottle replacement. The core step in this operation is to release the mechanical locking mechanism (such as clamps) of the pressure tank, open the cap to remove the old bottle, and insert the new one. However, this operation presents a fundamental safety hazard: if the pressure tank is forcibly opened while still retaining residual internal pressure, the high-pressure gas may be released instantaneously, causing the cap to splash or the equipment to be damaged, posing a serious threat to the personal safety of the operators. Therefore, several solutions have been proposed in the existing technology to ensure safe photoresist replacement.

[0003] Currently, common solutions mainly rely on process control and electrical control. For example, the operation manual clearly stipulates the step of "manually depressurizing before changing the glue", or the control system sets up program interlocks: when the host computer receives the glue changing instruction, it automatically closes the air supply solenoid valve and opens the pressure relief solenoid valve. Only after the pressure sensor detects that the pressure inside the tank has dropped to the safe threshold will the "allow opening the lid" prompt be given on the human-machine interface.

[0004] The aforementioned rubber replacement solutions improve operational safety to some extent; however, they all suffer from the following drawbacks: process control relies entirely on the operator's self-awareness and skill, and human negligence cannot be technically eliminated; the electrical control system may fail due to sensor malfunctions, program logic errors, or solenoid valve jamming, and its safety interlocks can be bypassed or overridden by abnormal electrical signals. Therefore, there is an urgent need for a device that does not rely on human judgment and the reliability of the electrical system, and can physically enforce "pressure relief before opening the cap" to completely eliminate the significant safety risks of opening the cap under pressure. Summary of the Invention

[0005] This invention provides a mechanical interlock device for a pressure tank, a pressure tank, and a rubber exchange and defoaming pipeline system. The mechanical interlock device for the pressure tank can ensure that the pressure tank can be opened after pressure is released, thereby improving safety.

[0006] The technical solution adopted by the present invention to solve its technical problem is as follows: The first aspect of the present invention provides a mechanical interlock device for a pressure tank, comprising: Locking components are used to lock or unlock the lid of a pressure vessel; An interlocking element, the interlocking element being movable between a first position and a second position; A valve, wherein the valve core is mechanically coupled to the interlocking component; When the interlock is in the first position, the interlock prevents the operation of the locking member, and the valve is in the first valve position that allows fluid to flow into the pressure tank; when the interlock moves from the first position to the second position, it links the valve to switch to the second valve position that cuts off the fluid flow and depressurizes the pressure tank, and at the same time releases the operation of the locking member.

[0007] In one embodiment, the interlocking element is a flip-up mechanical interlocking plate.

[0008] In one embodiment, the locking member includes a clamp and a tightening / loosening knob for actuating the clamp; in the first position, the mechanical interlock plate is in an upright state and at least partially obscures the tightening / loosening knob; in the second position, the mechanical interlock plate is in a lowered state and clears the obstruction of the tightening / loosening knob.

[0009] In one embodiment, a lock is also included for locking the interlocking member in the first position.

[0010] In one embodiment, the lock is a latch lock, which is fixed to a first mounting plate.

[0011] In one embodiment, the valve is fixed to a second mounting plate, and the valve is a mechanically interlocked valve. The movement of the interlocking component directly drives the valve core of the mechanically interlocked valve to rotate.

[0012] In one embodiment, the mechanical interlock valve has an inlet, an outlet, and an exhaust port; in the first... In the first valve position, the air inlet is connected to the air outlet, and the exhaust port is closed. In the second valve position, the air inlet is closed, and the air outlet is connected to the exhaust port.

[0013] A second aspect of the present invention provides a pressure vessel, including a vessel body, a cover body, and a mechanical interlocking device as described above.

[0014] A third aspect of the present invention provides a defoaming pipeline system, comprising: A pressure vessel for containing photoresist, connected to a pressure valve, wherein the pressure vessel is as described above; A liquid supply line is connected to the outlet of the pressure tank; A waste discharge branch is connected to the liquid supply pipeline, and a waste discharge valve is provided on the waste discharge branch. The main process pipeline, connected to the liquid supply pipeline, is used to deliver the photoresist to the downstream user. A cleaning branch is connected to the waste discharge branch, and a flushing valve is installed on the cleaning branch. A control valve is installed on the control air source pipeline; wherein the pressurization valve, the waste discharge valve, and the flushing valve are all controlled by the control valve, such that when the control valve is opened, the pressurization valve, the waste discharge valve, and the flushing valve are simultaneously driven to the open state.

[0015] In one embodiment, a shuttle valve is further included, the shuttle valve having a first inlet, a second inlet, and an outlet, the outlet being connected to the gas supply end of the pressure tank; the first inlet is connected to an automatic gas supply line controlled by a host computer, and the second inlet is connected to the gas supply line of a control valve; the automatic path switching valve is configured to connect the inlet with the higher pressure to the outlet according to the pressure status of the first inlet and the second inlet.

[0016] The mechanical interlock device for a pressure tank provided by this invention includes a locking element, an interlock element, and a valve. The locking element is used to lock or release the pressure tank cover. The interlock element is configured to move between a first position and a second position. The valve core is mechanically coupled to the interlock element. When the interlock element is in the first position, it prevents operation of the locking element, and the valve is in a first valve position that allows fluid to flow into the pressure tank. When the interlock element moves from the first position to the second position, its linked valve switches to a second valve position that cuts off fluid flow and depressurizes the pressure tank, while simultaneously releasing the operation restriction on the locking element. In this mechanical interlock device, the valve core is mechanically coupled to the interlock element. When the pressure tank is closed, the interlock element prevents operation of the locking element. When it is necessary to open the pressure tank, the operation restriction on the locking element must be released first. When the interlock element moves from the first position to the second position, its linked valve switches to a second valve position that cuts off fluid flow and depressurizes the pressure tank. This means that the pressure tank can be forcibly depressurized before the locking element is opened, ensuring safety. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of a pressure tank and a mechanical interlocking device installed thereon, provided in an embodiment of the present invention; Figure 2 A schematic diagram of the structure of the interlocking component of the mechanical interlocking device provided in the embodiment of the present invention; Figure 3 This is a schematic diagram illustrating the working principle of the defoaming pipeline system provided in an embodiment of the present invention. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] In the description of this invention, it should be understood that the terms “comprising” and “having” as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0021] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. It should be understood that the term "and / or" as used herein is merely a description of the relationship between related objects, indicating that three relationships may exist; for example, A and / or B can represent: A alone, A and B simultaneously, and B alone. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0023] Certain specialized processes in semiconductor manufacturing require the use of extremely high-viscosity photoresists (viscosity can reach thousands to tens of thousands of centipoises). For this purpose, equipment typically stores them in metal pressure tanks, and the photoresist is transported by introducing high-pressure process gas into the tank. However, this pressure tank-based supply system faces three main challenges in practice: First, safety hazards during resist replacement: Replacing the photoresist bottle requires opening the pressure tank. If the operator unlocks and opens the tank without confirming that the pressure has been completely released, there is a serious risk of personal injury due to the pressurized opening. Second, air bubble problems caused by resist replacement: When the photoresist bottle is depleted and replaced, air will be introduced into the supply line. Due to the extremely poor flowability of high-viscosity photoresist, these air bubbles cannot be expelled on their own, and if they enter the coating process, they will directly cause defects. Third, the risk of line blockage: Also due to its high viscosity, the photoresist remaining in the waste discharge line is prone to accumulate and solidify, causing blockages, requiring regular chemical flushing and maintenance. This application addresses the above problems by providing a pressure tank mechanical interlock device, a pressure tank, and a degassing pipeline system.

[0024] The mechanical interlock device for pressure tank, pressure tank and degassing pipeline system provided by the present invention will be described in detail below with reference to specific embodiments.

[0025] Figure 1 For a structural schematic diagram of the pressure tank and the mechanical interlock device installed thereon provided in an embodiment of the present invention, please refer to [link / reference]. Figure 1 The first aspect of this embodiment provides a mechanical interlock device 1 for a pressure tank, including a locking member 11, an interlock member 12, and a valve 13. The locking member 11 is used to lock or release the cover 21 of the pressure tank 2. The interlock member 12 is configured to move between a first position and a second position. The valve core of the valve 13 is mechanically coupled to the interlock member 12. When the interlock member 12 is in the first position, it prevents the operation of the locking member 11, and the valve 13 is in a first valve position that allows fluid to flow into the pressure tank 2. When the interlock member 12 moves from the first position to the second position, it links the valve 13 to switch to a second valve position that cuts off the fluid flow and depressurizes the pressure tank 2, while simultaneously releasing the operation restriction on the locking member 11.

[0026] In this embodiment, the locking member 11 is the direct operational object for sealing and opening the cover 21 of the pressure tank 2. Exemplarily, the locking member 11 is a mechanical component that requires manual rotation, manipulation, or pressing with the aid of tools, such as a clamp structure or a locking bolt structure. Its function is to receive external operating force to lock or loosen the cover 21. In this embodiment, the interlocking member 12 is a movable component that moves between a first position and a second position. Its core function is to physically allow or prevent the operability of the locking member 11, and through its own movement, directly drive the valve 13 to operate. In this embodiment, valve 13 is a fluid control element, typically installed on a gas or liquid supply pipeline connected to pressure tank 2. Its valve core is mechanically coupled to interlock component 12 via a rigid structure. The movement of interlock component 12 does not require conversion between electrical and pneumatic signals; instead, it is directly and unbufferedly transmitted to the valve core, causing it to produce a corresponding linear displacement or rotation, thereby changing the on / off state of valve 13. Valve 13 has at least two positions: a first position allows fluid to enter pressure tank 2, and a second position cuts off fluid entry, preferably connecting the interior of pressure tank 2 to a pressure relief port. In this embodiment, when the interlock 12 is in the first position, such as the prohibited opening state, the interlock 12, through its physical structure (such as a plate or stop), prevents the operator from contacting or effectively operating the locking element 11. Simultaneously, the valve 13 is maintained in the first valve position, allowing fluid to flow into the pressure tank 2, and the equipment can operate under normal pressure. When the operator needs to open the lid, the interlock 12 must first be moved from the first position to the second position (e.g., the permitted opening state). This movement triggers the valve core of the valve 13, switching it from the first valve position to the second valve position. The second valve position cuts off the pressure source to the pressure tank 2 and opens the pressure relief mechanism, ensuring the pressure inside the tank drops to a safe range. At the same time, after the interlock 12 moves to the second position, it releases the physical obstruction to the locking element 11, making the locking element 11 operable. In this embodiment, the steps for the operator to open the pressure tank 2 cover 21 are: move the interlock component 12 → release pressure → unlock the locking component 11. Any operation that skips moving the interlock component 12 (i.e., the pressure release step) and directly operates the locking component 11 will be impossible because the locking component 11 is physically blocked by the interlock component 12. Conversely, if the interlock component 12 is moved, the pressure release action will automatically occur as a necessary result of its linkage. This mechanical interlock device transforms the "release pressure before opening the cover" process into one that is forcibly executed by the mechanical structure. It achieves safety interlocking through hardware mechanical structure, without relying on the reliability of the electrical system, the stability of the software, or the operator's awareness. It fundamentally eliminates the possibility of opening the cover under pressure due to human error or system failure. Moreover, the purely mechanical structure is resistant to environmental interference (such as electromagnetic interference and dust), has a long service life, simple failure modes, and is easy to maintain. Furthermore, Figure 2 Please refer to the structural schematic diagram of the interlocking component of the mechanical interlocking device provided in the embodiment of the present invention. Figure 2 In this embodiment, the interlocking component 12 is a flip-up mechanical interlocking plate. This mechanical interlocking plate is usually mounted on the pressure tank 2 or a nearby bracket via a hinge or pivot, allowing it to be flipped approximately 90 degrees, thereby enabling switching between a first position (e.g., upright) and a second position (e.g., lying down). The flipping motion in this embodiment is easily coordinated with the rotation drive of the valve 13. Exemplarily, the locking member 11 includes a clamp 111 and a tightening / loosening knob 112 for driving the clamp. In the first position, the mechanical interlock plate is in an upright state and at least partially obscures the tightening / loosening knob 112; in the second position, the mechanical interlock plate is in a lowered state and clears the obstruction of the tightening / loosening knob 112. The clamp 111 is a metal ring surrounding the flange of the pressure tank 2, which achieves sealing by tightening or loosening. The tightening / loosening knob 112 is an operating handle for tightening or loosening the clamp 111. In this embodiment, when the mechanical interlock plate is in the upright position (first position), its plate body is against or close to the side of the pressure tank 2, located directly above or outside the rotation path of the tightening / loosening knob 112, forming a physical obstruction, preventing the operator from effectively holding and rotating the tightening / loosening knob 112 by hand or tool. When the mechanical interlock plate is flipped downwards (second position), its body moves away, and the previously covered tension knob 112 is fully exposed, allowing the operator to operate the tension knob 112. In this embodiment, the mechanical interlock plate covers the tension knob 112 when it is in the upright state, and leaves the tension knob 112 unobstructed when it is in the folded-down state, achieving low cost and good error prevention effect. Furthermore, the mechanical interlock device also includes a lock 14 for locking the interlocking member 12 in the first position. This embodiment adds a lock 14 for locking the interlocking member 12 in the first position. Optionally, the lock 14 can be a latch lock, a keyed lock, or a fastener that requires a tool to loosen. After the interlocking member 12 moves to the first position, the operator can fasten the latch or lock the lock to prevent accidental movement or arbitrary operation. The lock in this embodiment provides a second layer of security, preventing the interlocking member 12 from accidentally disengaging from the first position due to equipment vibration, accidental contact, or other unforeseen circumstances, thereby accidentally releasing the obstruction of the locking member 11 or accidentally changing the state of the valve 13. For example, the lock 14 in this embodiment is a latch lock, which is fixed to a first mounting plate 15, which is welded or bolted to the tank body of the pressure tank 2 or a sturdy support. Furthermore, the valve 13 is fixed to the second mounting plate 16. The valve 13 is a mechanically interlocked valve, and the movement of the interlocking member 12 directly drives the valve core of the valve 13 to rotate. In this embodiment, the second mounting plate 16 provides a stable mounting base for the valve 13. In this embodiment, the valve core of the valve 13 is rigidly connected to the interlocking member 12. When the interlocking member 12 flips, the valve core of the valve 13 rotates, thereby achieving valve position switching. This embodiment ensures that the movement of the valve 13 is synchronized with the movement of the interlocking member 12. In this embodiment, the interlocking member 12 is rotatably mounted on the second mounting plate 16.

[0027] The valve 13 includes an inlet, an outlet, and an exhaust port. In the first valve position, the inlet and outlet are connected, and the exhaust port is closed. In the second valve position, the inlet is closed, and the outlet and exhaust port are connected. In this embodiment, when the valve 13 is in the first valve position, the valve core is at an angle, so that the inlet from the gas source is connected to the outlet leading to the pressure tank 2, forming a pressurized channel. At the same time, the exhaust port leading to the atmosphere is blocked by the sealing surface inside the valve core. When the valve core is rotated by a certain angle (e.g., 90 degrees), the inlet is closed, cutting off the pressure source. At the same time, the outlet (connected to the pressure tank) is connected to the exhaust port, forming a pressure relief channel, allowing residual gas in the tank to be discharged into the atmosphere. Please see Figure 1 The second aspect of this embodiment provides a pressure tank 2, which includes a cover 21, a tank body 22, and a mechanical interlocking device 1 as described in the above embodiment. For example, the mechanical interlock device 1 of the pressure tank 2 includes a locking member 11, an interlock member 12, and a valve 13. The locking member 11 is used to lock or release the cover 21 of the pressure tank 2. The interlock member 12 is configured to move between a first position and a second position. The valve core of the valve 13 is mechanically coupled to the interlock member 12. When the interlock member 12 is in the first position, it prevents the operation of the locking member 11, and the valve 13 is in a first valve position that allows fluid to flow into the pressure tank 2. When the interlock member 12 moves from the first position to the second position, it links the valve 13 to switch to a second valve position that cuts off the fluid flow and depressurizes the pressure tank 2, while simultaneously releasing the operation of the locking member 11. The pressure tank 2 of this embodiment includes the mechanical interlock device 1 described in any of the above embodiments. In specific implementation, the device described in any of the above embodiments is installed as an integral module on the tank body of the pressure tank 2, and its locking member 11 acts on the cover 21 of the tank body. The pressure tank 2 of this embodiment can be directly used in occasions where safe material replacement is required, such as semiconductor coating and chemical feeding. In this embodiment, the steps for the operator to open the cover 21 are: move the interlock component 12 → release pressure through linkage → unlock the locking component. Any operation that skips moving the interlock component 12 (i.e., the pressure release step) and directly operates the locking component 11 will be impossible because the locking component 11 is physically blocked by the interlock component 12. Conversely, if the interlock component 12 is moved, the pressure release action will automatically occur as a necessary result of its linkage. This mechanical interlock device 1 transforms the "release pressure before opening the cover" process into one that is forcibly executed by the mechanical structure. It achieves safety interlocking through the hardware mechanical structure, without relying on the reliability of the electrical system, the stability of the software, or the operator's awareness, fundamentally eliminating the possibility of opening the cover under pressure due to human error or system failure.

[0028] Figure 3Please refer to the schematic diagram of the working principle of the defoaming pipeline system provided in the embodiment of the present invention. Figure 3 The third aspect of this embodiment provides a defoaming pipeline system including a pressure tank 2, a liquid supply pipeline 3, a main process pipeline 4, a waste discharge branch 5, a cleaning branch 6, and a control valve 7. The pressure tank 2 is used to contain photoresist and is connected to a pressure valve 23. The pressure tank 2 is the pressure tank described in the above embodiment. The liquid supply pipeline 3 is connected to the outlet of the pressure tank 2. The process pipeline has a first branch and a second branch. The waste discharge branch 5 is connected to the first branch of the liquid supply pipeline 3 and is equipped with a waste discharge valve 51. The main process pipeline 4 is connected to the second branch of the liquid supply pipeline 3. The upper part is used to transport photoresist to the downstream end. The cleaning branch 6 is connected to the waste discharge branch 5. The cleaning branch 6 is equipped with a flushing valve 61. The control valve 7 is located on the control air source pipeline and is configured such that when it is opened, the pressurizing valve 23 opens to pressurize the pressure tank 2, and the waste discharge valve 51 opens, so that the fluid in the pressure tank 2 is discharged through the waste discharge branch 5 to remove air bubbles in the liquid supply pipeline 3 after photoresist replacement. The flushing valve 61 opens simultaneously to inject cleaning fluid into the waste discharge branch 5 for pipeline flushing. In this embodiment, the control valve 7 is a manual control valve.

[0029] The degassing pipeline system of this embodiment is applied to the coating process in semiconductor chip manufacturing. A bottle containing high-viscosity photoresist is placed inside the pressure tank 2. By filling the bottle with high-pressure gas (such as nitrogen), uniform pressure is applied to the bottle, overcoming the extremely high viscosity of the photoresist and "extruding" it out for transport. The pressure tank 2 in this embodiment integrates the aforementioned mechanical interlock safety device. This device ensures that before opening the cap 21 for photoresist replacement, pressure must be forcibly released via mechanical linkage, fundamentally eliminating the significant personal safety hazard of opening the cap under pressure. The pressure valve 23 controls the introduction of high-pressure gas into the pressure tank 2; its opening and closing determines whether pressure is applied to the photoresist bottle. In this embodiment, the supply line 3 is connected to the outlet of the pressure tank 2. All photoresist pushed out of the glue bottle must first enter this line. The air bubbles generated after the photoresist is replaced exist in the initial cavity of the supply line 3. The supply line 3 is equipped with a sensor 31 for detecting the presence of photoresist in the line. When the photoresist in the glue bottle is about to run out, the fluid flow is interrupted, and the sensor 31 immediately detects that the line is empty and sends this signal to the host computer. The host computer determines that the glue bottle in the pressure tank 2 is empty and prompts the operator to perform the glue bottle replacement procedure. In this embodiment, the waste discharge branch 5 guides the waste liquid (including the photoresist containing air bubbles and rinsing waste liquid) to the waste liquid collection system. The waste discharge branch 5 is equipped with a waste discharge valve 51. When the waste discharge valve 51 is closed, the fluid flows to the main process line 4. When the waste discharge valve 51 is open, the part of the photoresist containing air bubbles will flow out first through this route. In this embodiment, the main process pipeline 4 is connected to the liquid supply pipeline 3. During normal production (non-defoaming), the waste discharge valve 51 is closed, and the photoresist is stably delivered to downstream users such as the coating unit through this pipeline. In this embodiment, the cleaning branch 6 is usually connected upstream of the waste discharge branch 5 or directly to the inlet point. The cleaning branch 6 introduces cleaning fluid. While defoaming, the flushing valve 61 is opened, and the cleaning fluid is injected into the waste discharge branch 5 to dilute and flush away any high-viscosity residual photoresist that may adhere to the pipe wall of the waste discharge branch 5, preventing it from clogging the pipeline after drying. The cleaning fluid mixes with the waste photoresist, which helps it to be discharged more smoothly into the waste liquid system. In this embodiment, the control valve 7 is a manual valve that is directly operated by the operator. The opening action of the control valve 7 triggers three subsequent actions: First, it triggers pressurization: the gas it outputs drives the pressurization valve 23 to open, and begins to supply gas to the pressure tank 2 for pressurization; Second, it triggers waste discharge: the gas it outputs simultaneously drives the waste discharge valve 51 to open, and opens the waste liquid discharge path; Third, it triggers flushing: the gas it outputs simultaneously drives the flushing valve 61 to open, and begins to inject cleaning fluid to clean the photoresist accumulated or blocked in the waste discharge branch 5. In this embodiment, control valve 7 is a manually controlled valve. The bubble removal process of high-viscosity photoresist has significant uncertainties. The bubble removal state is closely related to factors such as flow rate, colloid characteristics, and pipeline temperature, making it difficult to achieve precise automatic control through preset fixed time or flow models. The manual bubble removal valve is controlled by on-site personnel. The operator can directly observe the movement and disappearance of bubbles in the transparent liquid supply pipeline 3. When the operator confirms that the bubbles have been completely removed and the pipeline is filled with pure photoresist, the valve can be manually closed immediately. This closed-loop control, which is manually operated through human observation, achieves real-time, accurate determination of the bubble removal endpoint and zero-delay response, fundamentally avoiding the problems of insufficient bubble removal (residual bubbles affecting the process) or excessive bubble removal (causing waste of photoresist) caused by inaccurate timing of the automatic program. The use of a manual degassing valve allows operators to stop degassing as soon as they see all the bubbles have been removed, keeping the amount of waste glue discharged to the theoretical minimum (i.e., only including the volume of the pipeline cavity and a small amount of pre-conducting glue). Compared to automatic degassing programs that rely on fixed delays or high-flow rinsing, the manual method can effectively reduce the losses caused by excessive degassing each time the glue is changed. The bubble-removal pipeline system in this embodiment is applied to the coating process in semiconductor chip manufacturing. High-viscosity photoresist bottles are typically placed in pressure tank 2 and supplied to the glue supply pipeline system under pressure. When the sensor on the glue bottle outlet pipeline detects an empty tube, the machine recognizes that the glue bottle is empty, and a bottle replacement operation is required. A mechanical interlock valve forcibly depressurizes the pressure tank 2 before it is opened. After opening the pressure tank 2 cover, removing the old bottle and placing the new bottle, the mechanical interlock is established. After replacing the photoresist bottle, the section of pipe between the bottle and sensor 31 on the supply line 3 is empty and needs to be degassed. During degassed, control valve 7 is manually opened, simultaneously venting the three branches after control valve 7. Pressure valve 23, waste discharge valve 51, and rinsing valve 61 are opened simultaneously. At this time, pressure tank 2 supplies air and pressurizes the photoresist in the bottle, pushing it through waste discharge valve 51 into the waste discharge line. Cleaning fluid flows through rinsing valve 61 into the rinsing line, eventually converging into the waste discharge line, completing the rinsing of the photoresist waste discharge line. Once the empty section is filled with photoresist, degassed is complete, and control valve 7 can be closed. In this embodiment, degassed and rinsed operations are performed simultaneously, effectively reducing air bubbles in the supply line. In this embodiment, the operator only needs to open control valve 7; the system automatically executes the three complex processes of pressurization, degassed, and rinsing, which originally required separate steps, in parallel, greatly simplifying the operation, reducing human error, and significantly shortening the preparation time after changing the photoresist. Furthermore, the degassing pipeline system also includes a shuttle valve 8, which has a first inlet, a second inlet, and an outlet. The outlet is connected to the gas supply end of the pressure tank 2. The first inlet is connected to an automatic gas supply pipeline controlled by a host computer, and the second inlet is connected to the gas outlet of the control valve 7. The shuttle valve 8 is configured to automatically connect its higher-pressure inlet to the outlet based on the pressure status of the first and second inlets. In this embodiment, the first inlet of the shuttle valve 8 is connected to the automatic gas supply pipeline controlled by a host computer, and the second inlet is connected to the manual degassing gas supply pipeline controlled by the control valve 7. During normal production: the host computer controls the gas path to pressurize, the pressure at the first inlet of the shuttle valve 8 is high, and gas flows out through the outlet of the shuttle valve 8 to pressurize the pressure tank 2; during manual degassing, the operator opens the control valve 7, pressurizes its gas path, and the pressure at the second inlet of the shuttle valve is higher than that at the first inlet. The shuttle valve 8 automatically switches the gas path to the second inlet to pressurize and degas the pressure tank 2. In this embodiment, the shuttle valve 8 enables switching between manual degassing mode and automatic production mode. When the operator performs manual degassing, there is no need for the host computer to change any control mode or program. The system automatically identifies and switches the air source according to the air pressure, ensuring the continuity of production and ease of operation. In this embodiment, during the replacement of photoresist in pressure tank 2, the mechanical interlock device 1 on pressure tank 2 changes the process from depressurizing before opening the cap to being forced to do so by a mechanical structure. This mechanical interlock device 1 ensures that before opening the cap 21 for the replacement operation, pressure must be forcibly released through mechanical linkage, fundamentally eliminating the significant personal safety hazard of opening the cap under pressure and improving the safety of opening the pressure tank. During the degassing process, after control valve 7 is opened, the three branches after control valve 7 are simultaneously vented. Pressure valve 23, waste discharge valve 51, and flushing valve 61 are opened simultaneously, and pressure tank 2 is pressurized by supplying air, pushing the photoresist in the glue bottle to flow through waste discharge valve 51 into the waste discharge pipeline. The cleaning fluid flows through flushing valve 61 into the flushing pipeline and finally converges into the waste discharge pipeline, completing the flushing of the photoresist waste discharge pipeline. In this embodiment, the degassing and flushing operations are performed simultaneously, which can effectively reduce air bubbles in the glue supply pipeline.

[0030] In the above description, the terms "an embodiment," "some embodiments," "example," "specific example," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0031] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A mechanical interlock device for a pressure tank, characterized in that, include: Locking components are used to lock or unlock the lid of a pressure vessel; An interlocking element, wherein the interlocking element is configured to move between a first position and a second position; A valve, wherein the valve core is mechanically coupled to the interlocking component; When the interlock is in the first position, the interlock prevents the operation of the locking member, and the valve is in the first valve position that allows fluid to flow into the pressure tank; when the interlock moves from the first position to the second position, it links the valve to switch to the second valve position that cuts off the fluid flow and depressurizes the pressure tank, and at the same time releases the operation of the locking member.

2. The pressure tank mechanical interlock device according to claim 1, characterized in that, The interlocking component is a reversible mechanical interlocking plate.

3. The mechanical interlock device for pressure tanks according to claim 2, characterized in that, The locking component includes a clamp and a tightening knob for locking the clamp; in the first position, the mechanical interlock plate is in an upright state and at least partially covers the tightening knob; in the second position, the mechanical interlock plate is in a lowered state and leaves the tightening knob uncovered.

4. The pressure tank mechanical interlock device according to claim 1, characterized in that, It also includes a lock for locking the interlocking member in the first position.

5. The pressure tank mechanical interlock device according to claim 4, characterized in that, The lock is a latch lock, which is fixed to the first mounting plate.

6. The mechanical interlock device for pressure tanks according to claim 1, characterized in that, The valve is fixed to the second mounting plate. The valve is a mechanically interlocked valve. The movement of the interlocking component directly drives the valve core of the mechanically interlocked valve to rotate.

7. The pressure tank mechanical interlock device according to claim 6, characterized in that, The mechanical interlock valve has an inlet, an outlet, and an exhaust port; in the first valve position, the inlet... The air inlet is connected to the air outlet, and the air outlet is closed; in the second valve position, the air inlet is closed, and the air outlet is connected to the air outlet.

8. A pressure vessel, characterized in that, It includes a tank body, a cover body, and a mechanical interlocking device as described in any one of claims 1 to 7.

9. A defoaming pipeline system, characterized in that, include: A pressure vessel for containing photoresist, connected to a pressure valve, wherein the pressure vessel is the pressure vessel as described in claim 8; A liquid supply line is connected to the outlet of the pressure tank; A waste discharge branch is connected to the liquid supply pipeline, and a waste discharge valve is provided on the waste discharge branch. The main process pipeline, connected to the liquid supply pipeline, is used to deliver the photoresist to the downstream user. A cleaning branch is connected to the waste discharge branch, and a flushing valve is installed on the cleaning branch. A control valve is installed on the control air source pipeline; wherein the pressurization valve, the waste discharge valve, and the flushing valve are all controlled by the control valve, such that when the control valve is opened, the pressurization valve, the waste discharge valve, and the flushing valve are simultaneously driven to the open state.

10. The defoaming pipeline system according to claim 9, characterized in that, It also includes a shuttle valve having a first inlet, a second inlet, and an outlet, the outlet being connected to the gas supply end of the pressure tank; the first inlet being connected to an automatic gas supply pipeline controlled by a host computer, and the second inlet being connected to the gas outlet end of the control valve; the shuttle valve is configured to connect its higher-pressure inlet to the outlet according to the pressure state of the first inlet and the second inlet.

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