Network deviation measurement system and method

Abstract

The invention provides a net deviation measuring system and method, and the system comprises an adjusting platform which comprises a pedestal and a multi-axis adjusting mechanism disposed on the pedestal, and the multi-axis adjusting mechanism is used for achieving the movement adjustment in multiple directions; the detection module comprises a shooting module and a laser range finder, the detection module is arranged on the multi-axis adjusting mechanism, the shooting module is configured to collect image data of a target line net area, the laser range finder is configured to collect distance data, and the shooting module is configured to collect the image data of the target line net area; the web deviation measurement system identifies a deviated web and determines deviation parameters by analyzing the image data and distance data.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing equipment detection, in particular to a wire mesh deviation measurement system and a wire mesh deviation measurement method. BACKGROUND

[0002] Silicon carbide (SiC) crystals need to maintain an accurate 4° off-axis angle when growing along the C-axis to promote epitaxial growth and suppress basal plane dislocations. In addition, different customers have clear requirements for orthogonal misorientation. For conductive N-type SiC substrate wafers, the orthogonal misorientation is determined by the horizontal direction angle and the vertical direction angle relative to the horizontal line. For silicon carbide crystals that have already grown, the off-axis angles in the two directions are not completely accurate, and need to be accurately compensated in the later processing process to ensure that the cut-out wafers maintain the correct crystal direction angle.

[0003] Wire mesh spacing is an important factor affecting the quality of the final slice. Wire mesh spacing not only affects the uniformity of wafer thickness, leading to excessive fluctuations in total thickness variation (TTV), but also amplifies angle deviation. In particular, for hard and brittle materials such as silicon carbide crystals, wire spacing fluctuations can cause cutting force changes and trigger micro-cracks. Uneven thickness can cause the wafer to be transferred to the thinning station, resulting in uneven thickness of the finished product due to the use of the same thinning parameters for the same crystal, increasing the risk of wafer rework. SUMMARY

[0004] To solve or improve the existing technical problems, the present application provides a wire mesh deviation measurement system and a wire mesh deviation measurement method capable of measuring the parallelism and spacing of the wire mesh.

[0005] In a first aspect, a wire mesh deviation measurement system is provided, comprising: An adjustment platform comprising a base and a multi-axis adjustment mechanism disposed on the base, the multi-axis adjustment mechanism being configured to realize movement adjustment in multiple directions; A detection module comprising a shooting module and a laser range finder, the detection module being mounted on the multi-axis adjustment mechanism; The shooting module is configured to collect image data of a target wire mesh region, and the laser range finder is configured to collect distance data. The wire mesh deviation measurement system identifies the deviated wire mesh and determines the deviation parameters by analyzing the image data and the distance data.

[0006] In a second aspect, a wire mesh deviation measurement method is provided, which is applied to the wire mesh deviation measurement system described in the embodiments of the present application. The method comprises: The line net deviation measurement system is calibrated, a test origin is set, and initial parameters of the detection module at the test origin are obtained; wherein the initial parameters include a first distance between the laser range finder and the line net when the laser range finder is at an initial position at the test origin, and a second distance between the shooting module and the line net when the shooting module is at a clear focus point position at the test origin, which are measured by the laser range finder. The multi-axis adjustment mechanism is controlled to move along the line net extension direction for the target line net area, the shooting module and the laser range finder are controlled to perform data collection, and the deviated line net is identified and the deviation parameter is determined according to the collected data.

[0007] The line net deviation measurement system provided in the above embodiment, the design adjustment platform includes a base and an adjustment platform for realizing movement adjustment in multiple directions, the detection module is arranged on the multi-axis adjustment mechanism, the detection module includes a shooting module and a laser range finder, the detection module is moved in the required direction by controlling the multi-axis adjustment mechanism, and data collection is performed on the target line net local area by the shooting module and the laser range finder, the multi-axis adjustment mechanism is designed to facilitate the movement adjustment required when the shooting module and the laser range finder respectively perform data collection, and the detection module simultaneously includes the shooting module and the laser range finder, the image data collected by the shooting module and the distance data collected by the laser range finder are used to simultaneously complete the deviation detection in the depth direction and the plane direction of the line net in one deviation measurement detection, so that the deviated line net in the target line net area can be more efficiently and accurately identified and the corresponding deviation parameter can be determined.

[0008] The line net deviation measurement method provided in the above embodiment belongs to the same concept as the corresponding line net deviation measurement system embodiment, and has the same technical effect as the corresponding line net deviation measurement system embodiment, which will not be described here. BRIEF DESCRIPTION OF DRAWINGS

[0009] Figure 1 A schematic diagram of a line net deviation measurement system is provided for an embodiment.

[0010] Figure 2 For Figure 1 A structural schematic diagram of the line net deviation measurement system is shown.

[0011] Figure 3 For Figure 1 A structural schematic diagram of the adjustment platform in the line net deviation measurement system is shown.

[0012] Figure 4 For Figure 1 A structural schematic diagram of the detection module in the line net deviation measurement system is shown.

[0013] Figure 5A flowchart of a line screen deviation measurement method provided by an embodiment.

[0014] Element symbol explanation: The adjusting platform 10, the base 11, the multi-axis adjusting mechanism 12, the first direction moving structure 121, the first sliding rail 1211, the first sliding support plate 1212, the second direction moving structure 122, the second sliding rail 1221, the second sliding support plate 1222, the mounting bracket 123, the detection module 20, the shooting module 21, the laser range finder 22, the mounting seat 23, the third direction moving structure 231, the rotating adjusting structure 232, the rotating shaft 2322, the shaft seat 2321, the mounting part 2323, the mounting support plate 233, the control end 30, and the line screen 40. DETAILED DESCRIPTION

[0015] The technical solutions of the present application will be further described in detail below in combination with the accompanying drawings and specific embodiments.

[0016] In order to make the purposes, technical solutions and advantages of the present application more clear, the present application will be further described in detail below in combination with the accompanying drawings, and the described embodiments should not be regarded as limitations of the present application. All other embodiments obtained by those skilled in the art without making creative efforts fall within the scope of protection of the present application.

[0017] In the following description, the expression "some embodiments" describes a subset of all possible embodiments, and it should be noted that "some embodiments" can be the same subset or different subsets, and can be combined with each other without conflict.

[0018] In the following description, the terms "first, second, third" are only to distinguish similar objects, and do not represent a specific order of the objects. Understandably, "first, second, third" can be interchanged in a specific order or sequence as allowed, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0019] In the research of the line net deviation method in the silicon carbide crystal processing technology, the inventor of the present application has studied the source of the line net deviation. In the current silicon carbide crystal processing technology, the angle deviation mainly comes from two aspects: first, the crystal bonding error, the initial angle deviation of the crystal bonding to the cutting platform can reach ±0.5°; second, the angle error caused by the non-parallel cutting of the line net, the local deflection of the line net leads to the deviation of the wafer cross section from the theoretical crystal direction. At present, X-ray diffraction is mainly used to measure the wafer bonding angle, but it cannot monitor the dynamic angle drift caused by the deformation of the line net during the cutting process, and the parallelism between the line nets needs to be considered to bring the deviation of the final crystal direction angle, therefore the fundamental defect of the prior art is that: X-ray diffraction can only measure the static wafer bonding angle, it cannot capture the dynamic angle drift caused by the plastic deformation and vibration of the line net during the cutting process, and it cannot synchronously detect the micro changes of the line net spacing. More importantly, the deviation of the line net is often a complex result of the coupling of the angle deviation and the spacing change, the existing single parameter detection method cannot reveal this coupling relationship, leading to the misjudgment of the deviation severity and the misalignment of the correction.

[0020] In view of this, the present application inventors creatively designed a line net deviation measurement system capable of scanning the line net and simultaneously collecting image data and distance parameters of the target line net area. The line net deviation measurement system includes a multi-axis adjustment mechanism to drive the detection module to move and adjust in multiple directions. The detection module integrated with a shooting module and a laser range finder performs data collection on the target line net area. The line net deviation measurement system and method provided by the embodiments of the present application include the core concept of achieving "common reference detection" of the shooting module and the laser range finder in space-time through unique mechanical structure and control logic, and based on the multi-dimensional data collected, a comprehensive evaluation model of "angle-distance coupling coefficient" is proposed, thereby realizing accurate quantification of dynamic and complex deviations of the line net. Specifically, the multi-axis adjustment mechanism can facilitate the movement and adjustment of the shooting module and the laser range finder when collecting data respectively. The detection module includes the shooting module and the laser range finder to identify the deviated line net and determine the deviation parameters using the image data collected by the shooting module and the distance parameters collected by the laser range finder. The deviation detection in the depth direction and the plane direction of the line net can be completed simultaneously in one deviation measurement detection. In other words, the deviation detection in the plane direction (through image analysis) and the depth direction (through laser ranging) of the line net can be completed simultaneously through one scanning process, and the internal correlation between the two is used for cross verification and comprehensive evaluation. Thus, the deviated line net in the target line net area can be more efficiently and accurately identified, and the corresponding deviation parameters can be determined. The shooting module and the laser range finder essentially belong to optical sensors that use optical signals for detection. When the optical signal irradiates the line net, a reflection spot or light stripe can be returned. The deformation of the line net causes the wafer to tilt slightly, and the displacement of the light spot on the optical sensor can reach tens of microns. The signal-to-noise ratio is high enough to sample one frame of data in milliseconds, so the line net deviation problem caused by dynamic angle drift due to line net deformation can be solved, and the shortcomings of X-ray diffraction measurement can be compensated.

[0021] Based on the technical scheme of the line net deviation measurement system capable of scanning the line net and simultaneously collecting image data and distance parameters to identify the deviated line net and determine the deviation parameters, further details are as follows.

[0022] Please refer to Figure 1 and Figure 2A wire mesh deviation measurement system provided by an embodiment of the present application comprises: an adjusting platform 10 comprising a base 11 and a multi-axis adjusting mechanism 12 arranged on the base 11, the multi-axis adjusting mechanism 12 being configured to realize movement adjustment in multiple directions; and a detection module 20 comprising a shooting module 21 and a laser range finder 22, the detection module 20 being arranged on the multi-axis adjusting mechanism 12, the shooting module 21 being configured to collect image data of a target wire mesh region, and the laser range finder 22 being configured to collect distance data. The wire mesh deviation measurement system identifies deviated wire mesh and determines deviation parameters by analyzing the image data and the distance data, i.e., the image data and the distance data are used for cooperative analysis to identify deviated wire mesh and determine deviation parameters.

[0023] The wire mesh deviation measurement system comprises a control terminal, the shooting module 21 and the laser range finder 22 perform data collection on the target wire mesh region under the control of control instructions of the control terminal, and deviated wire mesh is identified and deviation parameters are determined according to the collected data. The wire mesh deviation measurement system can be arranged on a workbench of a wire mesh cutting machine through the base 11 of the adjusting platform 10, the wire mesh 40 cut by the wire mesh cutting machine is detected by the wire mesh deviation measurement system, deviated wire mesh is identified and deviation parameters are determined, and the deviated wire mesh is corrected according to the identification result and actual needs, and then the wire mesh cutting machine cuts according to the wire mesh.

[0024] The movement adjustment in multiple directions comprises movement adjustment in two or more directions, and specifically, at least two perpendicular translation directions and a rotation direction. The detection module 20 is arranged on the multi-axis adjusting mechanism 12, and movement adjustment in multiple directions is realized by the multi-axis adjusting mechanism 12, so that the detection module 20 can move in any required direction during detection of the wire mesh.

[0025] In the above embodiment, the adjusting platform 10 comprises the base 11 and the multi-axis adjusting mechanism 12 configured to realize movement adjustment in multiple directions, the detection module 20 is arranged on the multi-axis adjusting mechanism 12, the detection module 20 comprises the shooting module 21 and the laser range finder 22, the detection module 20 can be moved in any required direction by controlling the multi-axis adjusting mechanism 12, and the multi-axis adjusting mechanism 12 can support specific movement adjustment required when the shooting module 21 and the laser range finder 22 respectively collect data. The detection module 20 comprises the shooting module 21 and the laser range finder 22, and the shooting module 21 and the laser range finder 22 collect data of the target wire mesh region, the image data collected by the shooting module 21 and the distance data collected by the laser range finder 22 are used to identify deviated wire mesh in the target wire mesh region and determine corresponding deviation parameters, so that deviation detection in the depth direction and the plane direction of the wire mesh can be completed at one time.

[0026] The shooting module 21 can be an industrial camera selected according to the offset angle and parallelism of the measurement line net. In the embodiment, the shooting module 21 is a narrow field of view high magnification camera, the lens type of the narrow field of view high magnification camera is a telecentric fixed magnification lens, the optical magnification is 50 times, the field of view range is 2.4*1.8 mm, the resolution is 3.6 μm, the pixel is 5 million, the sensor type is a global shutter CMOS image sensor, the depth of field is 0.1 mm, the frame rate is 15 fps, and an auxiliary lighting system is provided. The lighting system selects a blue LED lamp bead, and the illumination range is 500-1500 lux. In this way, the narrow field of view high magnification camera can cover the edge displacement of 0.17 μm corresponding to the angle accuracy of 0.1°.

[0027] The laser range finder 22 is a non-pulsed phase laser range finder 22, which realizes wavelength subdivision through a modulation frequency of 200 MHz, covers the minimum / maximum spacing and installation distance of the line net, has an accuracy of ±10 μm, a resolution of 1 μm, can support sub-micron line spacing change monitoring, a measurement speed of ≤0.5 ms / point, matches the cutting line vibration frequency to realize dynamic freezing, a minimum target size diameter φ of 0.05 mm, adapts to the line cutting line diameter of the silicon carbide line net, and selects a blue laser as the laser type to improve the reflectivity of the metal wire. In the embodiment, the reflectivity of the silicon carbide line net is >85%, the beam shape is a linear laser with a 3:1 aspect ratio, vertically covers multiple cutting lines, enhances the simultaneous measurement capability, the divergence angle is ≤0.1 mrad, ensures that the spot diameter at a distance of one meter is ≤0.1 mm, and can avoid crosstalk.

[0028] The narrow field of view high magnification camera and the laser range finder 22 need to be kept synchronous in space. In the embodiment, the installation position of the laser range finder 22 deviates from the position of the narrow field of view high magnification camera by ≤0.1 mm, so that the two can synchronously measure the same target line net area. The narrow field of view high magnification camera and the laser range finder 22 also need to be kept synchronous in time. The external trigger input delay of the narrow field of view high magnification camera and the laser range finder 22 is usually ≤10 μs, and the sampling misplacement caused by line net vibration is eliminated.

[0029] The line net deviation measurement system further comprises a control end 30 loaded with a computer program for executing the line net deviation measurement method. The control end 30 can be a controller integrated with the adjusting platform 10 and the detection module 20 and installed on the workbench of the line net cutting machine, or can be a control terminal in communication connection with the adjusting platform 10 and the detection module 20. During the working process of the line net deviation measurement system, the control end 30 can send control instructions to the multi-axis adjusting mechanism 12 and the detection module 20 to control the multi-axis adjusting mechanism 12 to drive the detection module 20 to move and adjust in any required direction, and control the shooting module 21 and the laser range finder 22 to respectively perform data collection on the target line net region. The shooting module 21 and the laser range finder 22 send the collected data to the control end 30, so that the control end 30 analyzes the collected data to identify the deviated line net and determine the deviation parameters.

[0030] In some embodiments, referring to Figure 3 , the multi-axis adjusting mechanism 12 comprises a first direction moving structure 121, a second direction moving structure 122, a mounting bracket 123, and a mounting seat 23 installed on the mounting bracket 123; the mounting seat 23 comprises a third direction moving structure 231 and a rotation adjusting structure 232; the moving and adjusting directions of the first direction moving structure 121, the second direction moving structure 122, and the third direction moving structure 231 are perpendicular to each other, and the shooting module 21 and the laser range finder 22 are arranged at an angle on both sides of the rotation adjusting structure 232. The first direction moving structure 121 is used to realize the movement and adjustment of the second direction moving structure 122, the mounting bracket 123, and the mounting seat 23 carrying the detection module 20 in the first direction; the second direction moving structure 122 is used to realize the movement and adjustment of the mounting bracket 123 and the mounting seat 23 carrying the detection module 20 in the second direction; the third direction moving structure 231 is used to realize the movement and adjustment of the rotation adjusting structure 232 carrying the detection module 20 in the third direction; and the rotation adjusting structure 232 is used to adjust the rotation angle of the detection module 20, so that the shooting module 21 or the laser range finder 22 can be switched to face the target line net region.

[0031] In an optional specific example, the first direction, the second direction and the third direction respectively refer to the X, Y and Z directions in the three-dimensional space, and the first direction moving structure 121, the second direction moving structure 122 and the third direction moving structure 231 cooperate together to drive the detection module 20 to realize the movement adjustment in the X, Y and Z directions in the three-dimensional space. In the line net deviation measurement system, the rotation adjustment structure 232 is further arranged, and the orientations of the shooting module 21 and the laser range finder 22 can be switched according to actual needs in the process of data collection of the target line net area. The shooting module 21 and the laser range finder 22 can respectively collect corresponding data of the specified same deviation line net which can be used to determine the deviation parameters of the line net. For example, in the process of detecting the line net, the shooting module 21 first performs image shooting on the target line net area, and the deviation line net is identified according to the focus clarity change in the shooting image and image data analysis. When the depth direction ranging of any line net is needed, the laser range finder can be started to collect the current distance data. In this way, the line net deviation measurement system can complete the deviation detection of the line net in the depth direction and the plane direction at the same time in one deviation measurement detection. The shooting module 21 and the laser range finder 22 are switched by rotating the rotation adjustment structure 232 to collect data of the target line net area. In this way, it can be ensured that the shooting module 21 and the laser range finder 22 can maintain the same physical reference point for data collection relative to the target line net area. This “common reference design” provides a basis for realizing high-precision data fusion, effectively eliminates the registration error introduced by different sensor poses, provides data guarantee for subsequent calculation of high-precision “angle-distance coupling coefficient”, and is beneficial to guarantee the accurate matching of the image data and the ranging data collected for the specified same deviation line net, thereby improving the recognition accuracy of the deviation parameters.The control end 30 coordinates the entire measurement process through the built-in program logic, and the control flow thereof includes: initializing and driving the multi-axis adjusting mechanism 12 to move the detection module 20 to the test origin; performing a calibration process to record the maximum distance H1 between the laser range finder 22 and the line net 40 at the test origin, and the distance H2 between the laser range finder 22 and the line net 40 when the photographing module 21 is at a point of focus clarity; then controlling the first direction moving structure 121 and the second direction moving structure 122 to perform scanning movement in a preset "bow" shape path (first moving along the positive direction of the X axis, then moving along the Y axis by one step after reaching the end, and then moving along the negative direction of the X axis, and repeating the above process); in the scanning process, the control end 30 receives the image stream of the photographing module 21 in real time, and evaluates the focus clarity by calculating the image gradient or contrast, and when the clarity is lower than a preset threshold, marks it as an abnormal point and records the current position coordinate T1 (X1, Y1); subsequently, the control end 30 sends instructions to first control the third direction moving structure 231 to perform fine movement to re-find the best focus point, and then control the rotating adjusting structure 232 to switch to the laser range finder 22 to work, and collect the third distance H3; finally, control the rotating adjusting structure 232 to switch back to the photographing module 21 to continue subsequent scanning. All collected data (images, distances, position coordinates) are synchronously time-stamped and stored in association for subsequent comprehensive analysis.

[0032] Optionally, the first direction moving structure 121 includes a first sliding rail 1211 and a first sliding support plate 1212; the first sliding rail 1211 is arranged on the base 11 and extends along the first direction; the first sliding support plate 1212 is slidably connected to the first sliding rail 1211, and the second direction moving structure 122 is arranged on the first sliding support plate 1212. In this embodiment, the first direction is the X direction, the first sliding rail 1211 extends along the X direction on the base 11, the second direction is the Y direction, and the second direction moving structure 122 is arranged on the first sliding support plate 1212. The first direction moving structure 121 and the second direction moving structure 122 are arranged in a stacked manner in the Z direction, and the first sliding support plate 1212 is slidably connected to the first sliding rail 1211, so that the movement adjustment in the X direction along the extension direction of the first sliding rail 1211 can be realized. At this time, the second direction moving structure 122 arranged on the first sliding support plate 1212 will also move in the X direction along the extension direction of the first sliding rail 1211.

[0033] The second direction moving structure 122 is similar to the first direction moving structure 121 in structure and is basically the same in arrangement. In one specific example, the second direction moving structure 122 comprises a second sliding rail 1221 and a second sliding support plate 1222; the second sliding rail 1221 is arranged on the second sliding support plate 1222 and extends along the second direction; the second sliding support plate 1222 is slidably connected to the second sliding rail 1221, and the mounting bracket 123 is arranged on the second sliding support plate 1222. Wherein, the second sliding rail 1221 extends along the Y direction on the first sliding support plate 1212, and the second sliding support plate 1222 is slidably connected to the second sliding rail 1221, so that the movement adjustment in the Y direction can be realized along the extension direction of the second sliding rail 1221, at this time, the mounting bracket 123 arranged on the second sliding support plate 1222 will also realize the movement adjustment in the Y direction along the extension direction of the second sliding rail 1221.

[0034] Please refer to Figure 4 The detection module 20 is arranged on the mounting bracket 123 through the mounting seat 23. The third direction moving structure 231 comprises a telescopic adjusting assembly 231 and a mounting support plate 233 connected to the telescopic adjusting assembly 231, and the telescopic adjusting assembly 231 is arranged on the mounting bracket 123; the rotation adjusting structure 232 is arranged on the mounting support plate 233. The telescopic adjusting assembly 231 can be a hydraulic oil cylinder, and the telescopic rod of the hydraulic oil cylinder extends and retracts along the Z direction, so as to drive the mounting support plate 233 to move and adjust along the Z direction synchronously. The detection module 20 is arranged on the mounting support plate 233 through the rotation adjusting structure 232, and will also follow the telescopic movement of the telescopic rod of the hydraulic oil cylinder to extend and retract along the Z direction.

[0035] The shaft seat 2321 is arranged on the mounting support plate 233, the rotating adjusting structure 232 comprises a rotating joint pivotally connected to the shaft seat 2321, and the photographing module 21 and the laser range finder 22 are arranged on two adjacent sides of the rotating joint. In an optional specific example, the rotating joint comprises a rotating shaft 2322 and a mounting portion 2323 arranged on the outer side of the rotating shaft 2322, and the photographing module 21 and the laser range finder 22 are arranged on two adjacent sides of the mounting portion 2323. In this example, the photographing module 21 and the laser range finder 22 are at an angle of 90 degrees, and one side is the bottom surface of the mounting portion 2323 away from the telescopic adjusting assembly 231. The shaft seat 2321 can comprise a plurality of positioning plates arranged at intervals on the mounting support plate 233, the positioning plates are respectively provided with shaft holes, the two ends of the rotating shaft 2322 are inserted and connected into the corresponding shaft holes of the positioning plates, the mounting portion 2323 is arranged at the middle part of the rotating shaft 2322, and the photographing module 21 and the laser range finder 22 are arranged on the side surface and the bottom surface of the mounting portion 2323 respectively, and the two are at an angle of 90 degrees. The angle of 90 degrees between the photographing module 21 and the laser range finder 22 is beneficial to accurately distinguishing the working states of the laser range finder 22 and the photographing module 21, and ensuring that the two do not interfere with each other during operation. The rotating shaft 2322 is rotatably connected to the shaft seat 2321, and the rotating shaft 2322 can drive the photographing module 21 and the laser range finder 22 to collect corresponding data respectively towards the same target line net area.

[0036] It should be noted that the first direction moving structure 121 and the second direction moving structure 122 in the multi-axis adjusting mechanism 12 and the telescopic adjusting and rotating adjusting structure 232 of the mounting seat 23 of the detection module 20 can be further provided with driving devices respectively, and the control end 30 sends control instructions to the corresponding driving devices to control the first direction moving structure 121, the second direction moving structure 122, the telescopic adjusting assembly 231 to realize the movement adjustment in the required direction, and control the rotating adjusting structure 232 to switch the orientations of the photographing module 21 and the laser range finder 22. In an optional example, the first direction moving structure 121 further comprises a first linear motor, and the first sliding support plate 1212 is connected to the first sliding rail 1211 through the first linear motor; similarly, the second direction moving structure 122 further comprises a second linear motor, and the second sliding support plate 1222 is connected to the second sliding rail 1221 through the second linear motor; the telescopic adjusting assembly 231 comprises a motor and a hydraulic pump, and the piston rod is driven to move telescopically relative to the cylinder by the motor; the rotating adjusting structure 232 comprises a motor and a shaft coupling, the shaft coupling connects the output shaft of the motor with the rotating shaft 2322 to transmit torque, and the rotating shaft 2322 is driven to rotate by the motor.

[0037] In another aspect of the present application, a line net deviation measurement method is provided, which can be applied to the line net deviation measurement system described in the foregoing embodiments. The computer program running to execute the steps of the line net deviation measurement method can be an application loaded on a computer terminal. The computer terminal refers to an intelligent device with storage and computing capabilities, including but not limited to tablets, computers, smartphones, etc. In this embodiment, the computer program executing the line net deviation measurement method is a mobile application, and the control terminal loaded with the computer program executing the line net deviation measurement method is a smartphone. The line net deviation measurement method comprises the following steps: S11, calibrating the line net deviation measurement system, setting a test origin, and obtaining initial parameters of the detection module at the test origin; wherein the initial parameters include a first distance between the laser range finder and the line net when the laser range finder is at the initial position at the test origin, and a second distance between the shooting module and the line net when the shooting module is at the focusing clear point position at the test origin.

[0038] The test origin refers to the initial position of the multi-axis adjustment mechanism set in advance. During the process of motion adjustment control of the multi-axis adjustment mechanism, the multi-axis adjustment mechanism can be controlled to move to the test origin for re-calibration according to actual needs, so as to restore to the preset unified initial state and improve the accuracy of subsequent motion control. In this embodiment, the test origin is represented as T0(X0, Y0), which can be selected as the upper left corner of the line net region or the middle part of the line net, and the present application does not limit this.

[0039] Calibrating the line net deviation measurement system at the test origin T0(X0, Y0) mainly comprises: S1, the control terminal sends control instructions to the telescopic adjustment assembly and the rotatable adjustment structure to control the telescopic adjustment assembly to shrink to the minimum length, and controls the rotation shaft of the rotatable adjustment structure to rotate so that the laser range finder faces the target line net region. The laser range finder is turned on to measure the distance between itself and the line net, which is marked as the first distance H1; S2, the rotation shaft of the rotatable adjustment structure is controlled to rotate so that the shooting module faces the target line net region, the shooting module is turned on, and the telescopic adjustment assembly is controlled to perform telescopic motion to obtain the focusing clear point position of the shooting module. At this time, the rotation shaft of the rotatable adjustment structure is controlled to rotate again so that the laser range finder faces the target line net region. The laser range finder is turned on again to measure the distance between itself and the line net, which is marked as the second distance H2. It should be noted that the mobile terminal running the computer program executing the line net deviation measurement method includes a display screen, and the focusing of the shooting module during the image data acquisition process can be observed on the display screen.

[0040] S13, controlling the multi-axis adjusting mechanism to move along the extension direction of the line net for the target line net area, and controlling the shooting module and the laser range finder to perform data collection, and identifying the deviated line net and determining the deviation parameter according to the collected data.

[0041] After the calibration at the test origin is completed, the control end controls the multi-axis adjusting mechanism to move along the extension direction of the line net for the target line net area, and drives the detection module to move to scan the line net, and the shooting module and the laser range finder perform data collection, and the control end analyzes and calculates the data collected by the shooting module and the laser range finder, identifies the deviated line net, and determines the deviation parameter.

[0042] In the above embodiment, the line net deviation measurement system is equipped with an application program for performing a line net deviation measurement method, and the multi-axis adjusting mechanism and the detection module can be intelligently controlled through the application program to realize the intelligent control in the line net deviation detection process of the line net deviation measurement system scanning the line net, collecting data, identifying the deviated line net in the target line net area, and determining the corresponding deviation parameter of the line net according to the collected data. The application program can provide an application program interface to facilitate user interaction control.

[0043] In some embodiments, in step S13, the control of the multi-axis adjusting mechanism to move along the extension direction of the line net for the target line net area includes: In the first direction, the same as the extension direction of the line net, the first direction motion auxiliary recording function is started, the multi-axis adjusting mechanism is controlled to move along the extension direction of the line net with the test origin as the starting point, and the reference auxiliary line is generated according to the movement; The multi-axis adjusting mechanism is controlled to move to the reference point of the line net area, and the shooting module and the laser range finder are controlled to perform data collection in the line-by-line scanning with the reference point as the starting point, and the deviated line net is identified and the deviation parameter is determined according to the collected data.

[0044] The movement adjustment in the required directions is controlled by the control terminal, and the movement track formed by the movement adjustment of the first direction movement structure, the second direction movement structure and the third direction movement structure can be recorded according to requirements. In the embodiment, the first direction is the same as the extension direction of the wire net, and after the calibration at the test origin is completed, the multi-axis adjustment mechanism drives the detection module to move to scan the wire net. Before the data acquisition of the wire net is performed by the shooting module and the laser range finder, the step of generating a reference auxiliary line is further included. The control button for starting / ending the auxiliary recording function can be provided by the application interface, and the first direction movement auxiliary recording function is started by operation. The first direction movement structure moves along the first direction, and thus the multi-axis adjustment mechanism moves along the extension direction of the wire net from the test origin as the starting point. The reference auxiliary line is generated according to the movement track, and the movement direction of the first direction movement structure in the multi-axis adjustment mechanism is set to be consistent with the extension direction of the wire net. Thus, the process of drawing the reference auxiliary line can be directly controlled by the movement of the first direction movement structure, so that the movement control of the multi-axis adjustment mechanism can be simplified.

[0045] In the above embodiment, the wire net deviation measurement system generates the reference auxiliary line by moving along the extension direction of the wire net from the test origin as the starting point. The reference auxiliary line can be used as the reference line for determining the deviation angle corresponding to the deviated wire net subsequently. Compared with the absolute horizontal line used as the reference line for determining the deviation angle corresponding to the deviated wire net subsequently, the real-time generation of the reference auxiliary line can improve the accuracy of determining the deviation angle of the deviated wire net.

[0046] In some embodiments, in step S13, the control of the shooting module and the laser range finder to perform data collection, and the identification of the deviated wire net and the determination of the deviation parameter according to the collected data, includes: The shooting module collects image data at a preset frequency, and determines an abnormal point according to the focus change of the real-time shooting image of the target wire net area. The third distance between the shooting module and the wire net when the shooting module is at the focus point at the position of the abnormal point is measured by the laser range finder, and the image data collected by the shooting module is analyzed to determine the deviation angle of the deviated wire net and the average distance between adjacent wire nets.

[0047] The multi-axis adjusting mechanism drives the detection module to move to scan the wire net. The detection process of data collection on the wire net is performed by the shooting module and the laser range finder, including: first, keeping the height of the telescopic adjusting module unchanged after calibration at the test origin, starting from the upper left corner of the wire net top view, controlling the first direction moving structure to drive the detection module to move along the first direction, and scanning the wire net from left to right. It can be understood that at this time, the range of the detection module from left to right moving to scan the target wire net area is determined by the field of view coverage of the shooting module. Taking the field of view coverage of the shooting module as an example, when scanning the wire net from left to right reaches the rightmost side, the wire net deviation measurement system completes the detection of the first to third wires in the entire wire net area. Then control the second direction moving structure to drive the detection module to move to the next row along the second direction, and scan the wire net from right to left. When scanning the wire net from right to left reaches the leftmost side, the wire net deviation measurement system completes the detection of the fourth to sixth wires in the entire wire net area. In this way, the entire wire net area is scanned row by row from top to bottom. In the scanning process, the shooting module and the laser range finder perform corresponding data collection until the detection of the entire wire net area is completed. In each row-by-row scanning, the three wires covered by the field of view coverage of the shooting module are regarded as a target wire net area.

[0048] During the scanning process, the shooting module and the laser range finder perform corresponding data collection. First, the shooting module can be kept facing the target wire net area, and the shooting module can perform real-time shooting on the target wire net area. The user can observe and judge the focusing and clarity changes of the shooting image through the shooting picture in the application program interface. When the image focusing is not clear, it can be quickly judged that the height of the corresponding position is abnormal, that is, the corresponding target wire net area contains a deviated wire net with an angle deviation in the vertical direction.

[0049] It can be understood that the determination of abnormal points based on the focusing and clarity changes of the real-time shooting image of the shooting module on the target wire net area is not limited to observation by the user through the shooting picture displayed in the application program interface. The application program can also be set to intelligently determine by image analysis algorithm, which is not limited in this application.

[0050] During the row-by-row scanning of the entire wire net area, the shooting module performs real-time shooting to collect image data. At the same time, the focusing and clarity changes of the shooting picture of the shooting module are used to quickly identify abnormal points. When an abnormal point is identified, the rotating adjusting structure is controlled to rotate to switch the laser range finder to face the abnormal wire net in the target wire net area, and perform a distance measurement to measure the distance between the abnormal wire net, which is marked as the third distance H3. Then, the rotating adjusting structure can be controlled to rotate again to switch back to the shooting module facing the wire net to perform scanning of the next row.

[0051] In the above embodiment, the line screen deviation measurement system scans and collects data of the line screen row by row, so as to identify the deviated line screen in the target line screen area and determine the corresponding deviation parameter in the line screen deviation detection process. In the line screen deviation detection process, the focus clear change of the shooting picture of the shooting module can quickly screen the line screen with a deviation angle in the vertical direction, and the laser range finder integrated with the shooting module can measure the distance value in real time as needed, so as to realize accurate and efficient identification of the deviated line screen.

[0052] In some embodiments, the third distance between the shooting module and the line screen when the shooting module is at the focus clear point is measured by the laser range finder, and the image data collected by the shooting module is analyzed to determine the deviation angle of the deviated line screen and the average distance between adjacent line screens, comprising: Labeling the position of the abnormal point; Controlling the multi-axis adjustment mechanism to move vertically at the position of the abnormal point, and controlling the laser range finder to measure the third distance between the shooting module and the line screen when the shooting module is at the focus clear point; Analyzing the image data collected by the shooting module, determining the trajectory of the deviated line screen from the image data, determining the deviation angle of the trajectory relative to the reference auxiliary line, and calculating the average distance between the deviated line screen and the adjacent line screen.

[0053] Wherein, during the scanning process of the entire line screen area, when the user observes and judges the shooting image to be out of focus through the shooting picture in the application program interface, the position of the current abnormal point can be labeled. The control end can record the current position of the multi-axis adjustment mechanism, such as T1 (X1, Y1), and save the third distance H2 measured corresponding to the current position T1 (X1, Y1).

[0054] In addition, the image data collected by the shooting module in real time for the target line screen area can be analyzed by the control end based on the image data. For example, the control end can use known image recognition algorithms to recognize the position and shape of the line screen in the image data to identify whether it contains a deviated line screen with a deviation angle in the horizontal direction. The trajectory of the deviated line screen is determined from the image data, the deviation angle of the trajectory relative to the reference auxiliary line is determined, and the average distance between the deviated line screen and the adjacent line screen is calculated.

[0055] It should be noted that the average distance between any adjacent line screens can be collected at multiple discrete position points along the extension direction of the line screen, and the average distance between the adjacent line screens can be calculated based on the distance values corresponding to the multiple discrete position points.

[0056] In some embodiments, the wire mesh deviation measurement method further comprises: calculating an angle-pitch coupling coefficient according to the offset angle of the deviated wire mesh, the average pitch and the third distance; determining the deviated wire mesh to be corrected based on the angle-pitch coupling coefficient.

[0057] The wire mesh deviation measurement system scans and collects data of the wire mesh line by line, can identify the wire mesh with a deviation angle in the vertical direction according to the clear change of the focus of the shooting module, and can measure the third distance in real time through the laser range finder. The deviation value of the corresponding wire mesh in the vertical direction can be calculated by using the difference between the third distance and the second distance obtained in the calibration step. Therefore, the third distance can directly represent the degree of the deviation angle of the corresponding wire mesh in the vertical direction. In addition, the wire mesh with a deviation angle in the horizontal direction can be identified according to the image data collected by the shooting module during the process of scanning the wire mesh line by line, and the offset angle of the corresponding wire mesh and the average pitch between the corresponding wire mesh and the adjacent wire mesh can be calculated. The size of the average pitch can reflect the deviation direction, so the offset angle and the average pitch can directly represent the degree of the deviation angle of the corresponding wire mesh in the horizontal direction.

[0058] In this way, the wire mesh deviation measurement system identifies the deviated wire mesh, and the collection of the deviation parameters of the deviated wire mesh can include the offset angle, the average pitch and the third distance of the deviated wire mesh. The control end calculates the angle-pitch coupling coefficient by using the offset angle, the average pitch and the third distance of the deviated wire mesh, and the degree of the deviation angle of the corresponding deviated wire mesh is represented by the size of the angle-pitch coupling coefficient, for example, the deviated wire mesh with an angle-pitch coupling coefficient greater than a certain preset value is determined as the deviated wire mesh to be corrected. The user can re-wind or adjust the deviated wire mesh to be corrected according to actual needs, and then cut it on the cutting machine.

[0059] In the above embodiments, after the wire mesh is scanned and data is collected line by line to identify the deviated wire mesh in the target wire mesh area and determine the corresponding deviation parameters, the control end can calculate the angle-pitch coupling coefficient to screen the wire mesh that the user thinks needs to be corrected according to actual needs, and the corresponding deviation parameters can provide parameters in the correction process of re-winding or adjusting the wire mesh by the user, which further helps to improve the accuracy of the deviated wire mesh detection.

[0060] In some embodiments, the wire mesh deviation measurement method further comprises: calculating an angle-pitch coupling coefficient K according to the offset angle θ of the deviated wire mesh, the average pitch d and the third distance H3.

[0061] The calculation formula of the angle-spacing coupling coefficient K is: K = a · |0| + b · |(d - d0) / d0| + g · |(H3 - H2) / H2|, wherein a, b, g are preset weight coefficients, the values of which can be determined according to the wire mesh material, tension and cutting process experience, for balancing the relative influence degree of angle deviation, spacing change and height fluctuation on cutting quality; d0 is the theoretical spacing of the wire mesh, H2 is the second distance obtained by calibration. The introduction of the angle-spacing coupling coefficient K can realize the fusion of the three originally independent physical quantities, i.e. the angle deviation, spacing change and fluctuation in the depth direction of the wire mesh in the plane, into a single comprehensive evaluation index. Optionally, the weight coefficients a, b, g are determined by the following methods: ① Based on historical data regression analysis. Collect historical production data, select multiple groups of wire mesh samples with known cutting quality (such as yield), measure the values of 0, d and H3 of each group of samples; take the cutting quality as the target variable, and through multiple linear regression analysis or supervised learning algorithm (such as gradient descent method) in machine learning, fit a set of optimized values of a, b, g that make the negative correlation between K value and cutting quality the strongest. ② Based on expert experience assignment. According to experience, the parameters that most affect the cutting quality are given higher weights. For example, if it is believed that spacing uniformity has the greatest impact on surface quality, then b is given a higher value; if it is believed that angle deviation has the greatest impact on crystal direction accuracy, then a is given a higher value. As a non-limiting example, for the scenario of using diamond wire mesh to cut silicon carbide crystals, the weight coefficient values obtained by the above method are usually in the range of: a e [0.5, 1.5], b e [0.8, 2.0], g e [0.2, 1.0].

[0062] It should be noted that the angle-distance coupling coefficient K is a dimensionless comprehensive evaluation index. The essence of the formula is to normalize the physical parameters (offset angle θ, relative change of distance, relative change of distance) of different dimensions and orders of magnitude through weight coefficients α, β, γ, and fuse them into a unified index representing the comprehensive severity of line network deviation. Among them: α·|θ| term: represents the normalized angle deviation contribution value. The weight coefficient α plays a dual role of dimension conversion and weight distribution here, and its value is determined by historical data fitting to ensure that the contribution of angle deviation to K value matches other parameters. β·|(d - d0) / d0| term: represents the normalized distance deviation contribution value. This term itself is a relative change quantity, dimensionless. γ·|(H3 - H2) / H2| term: represents the normalized height deviation contribution value. This term itself is also a relative change quantity, dimensionless. The absolute value of the angle-distance coupling coefficient K value obtained finally has no direct physical meaning, but is used for horizontal comparison of the severity of different line network deviation states. When K value exceeds the threshold K0 determined by statistics, it is considered that the compound deviation state of the line network has reached the level that needs to be corrected.

[0063] Based on the angle-distance coupling coefficient K, the deviation line network to be corrected is determined. Specifically, a threshold K0 is set, and when K>K0, it is determined that the line network is a deviation line network to be corrected that needs to be processed first. This determination method overcomes the limitations of single parameter criteria. For example, a small angle deviation may be more harmful than a single angle deviation if it is accompanied by significant distance abnormalities and height fluctuations, and the angle-distance coupling coefficient K can accurately capture the severity of compound deviation. Alternatively, the threshold K0 is determined by the following method: after determining the weight coefficients, calculate the K values of all historical samples, draw a distribution diagram of K values and defect rates, and select a critical value that can effectively distinguish normal samples from defective samples as K0. For example, the K value corresponding to the beginning of the significant increase in defect rate can be set as K0. According to a large amount of experimental data statistics, for the aforementioned silicon carbide cutting scene, the typical value of K0 is between 0.08 and 0.15.

[0064] wherein α, β, γ are preset weight coefficients. The determination method of the weight coefficients includes: based on historical cutting data, selecting multiple groups of line network samples with known deviation states, respectively measuring θ, d and H3 thereof; through multivariate linear regression analysis or machine learning algorithm, taking the cutting good yield as the objective function, and inversely calculating a set of values of α, β, γ that make the correlation between K value and good yield the highest. As an exemplary range, for silicon carbide crystal cutting, the value range of α can be [0.5, 1.5], the value range of β can be [0.8, 2.0], and the value range of γ can be [0.2, 1.0]. d0 is the theoretical distance of the line network.

[0065] In a specific embodiment, the silicon carbide ingot is cut by a multi-wire saw of a certain type, the wire net material is diamond, and the theoretical wire spacing d0 is 0.76 mm. According to the regression analysis method described above, the weight coefficient values are: a = 1.0, b = 1.2, and g = 0.5. The second distance H2 obtained by calibration is 150.0 mm.

[0066] The threshold value K0 is set to 0.1. When the offset angle of a certain wire net is detected to be 0.08°, the real-time average spacing d is 0.78 mm, and the third distance H3 is 149.5 mm, the K value is calculated according to the calculation formula: K = 1.0 × |0.08| + 1.2 × |(0.78-0.76) / 0.76| + 0.5 × |(149.5-150.0) / 150.0| ≈ 0.080 + 0.032 + 0.0017 ≈ 0.114; Since K = 0.114 > K0 = 0.1, the system determines that the wire net is a deviated wire net to be corrected. It is verified that the wire net at this position indeed caused the edge collapse of the wafer in the subsequent cutting, which confirms the effectiveness of the criterion.

[0067] In some embodiments, in step S13, the control of the photographing module and the laser range finder to perform data acquisition, identification of the deviated wire net and determination of the deviation parameter according to the collected data, includes: controlling the narrow field of view high magnification camera to collect a wire net region image of the target wire net region; the wire net region image contains imaging of three wire nets; when it is judged according to the wire net region image that the preset measurement point is reached, controlling the non-pulsed laser range finder to start ranging to obtain ranging data; according to the analysis of the wire net region image and the ranging data, identifying the deviated wire net and determining the deviation parameter.

[0068] The imaging field of view of the narrow field of view high magnification camera is relatively small, but higher precision imaging data can be obtained, and it is more suitable for application in wire net deviation detection to improve the measurement precision of the wire net deviation parameter. In order to have a more overall understanding of the wire net deviation measurement method provided by the embodiments of the present application, two specific examples are described below.

[0069] Example 1: The slot pitch of the installation groove wheel of a certain multi-wire cutting machine is 0.76 mm, the wire diameter of the wire net is 0.105 mm, the wheelbase is 500 mm, and the parallelism of the wire net is measured by the wire net deviation measurement system after installation and maintenance. First, the multi-axis adjustment mechanism supports motion adjustment in any desired direction, which can calibrate the initial position of the detection module relative to the wire net. By adjusting the motion of the multi-axis adjustment mechanism in the Z direction, the narrow field of view high magnification camera can achieve the highest imaging clarity at the initial position, and the initial height is recorded by the laser range finder. The deviation angle caused by the deviation of 1 slot of the cutting wire can be measured by the narrow field of view high magnification camera. Specifically, by adjusting the motion of the multi-axis adjustment mechanism in the X and Y axis directions, the X axis motion trajectory auxiliary recording function is turned on, and a horizontal reference auxiliary line L0 is generated according to the X axis direction movement. The narrow field of view camera has high definition characteristics, and the 2.4 1.8 mm field of view covers 3 cutting wire nets. When a certain cutting wire deviates by 1 slot, the image data collected by the narrow field of view high magnification camera can record the movement path of the cutting wire. By comparing the reference auxiliary line L0, the deviation angle can be calculated according to the trigonometric function: Tanθ = 0.76 / 500 = 0.00152, arctan(0.00152) = 0.0871°. Thus, the wire net deviation measurement system outputs the calculation result 0.0871°, and the inclination angle of the deviated cutting wire is determined.

[0070] Example 2: The slot pitch of the installation groove wheel of a certain multi-wire cutting machine is 0.76 mm, the wire diameter of the wire net is 0.105 mm, the wheelbase is 500 mm, the groove wheel length is 80 mm, and there are 100 wires. After installation and maintenance, the average wire net spacing is measured by the wire net deviation measurement system. The spacing between adjacent wire nets can be measured by the narrow field of view high magnification camera. Specifically, the narrow field of view high magnification camera has high definition characteristics, and the 2.4 1.8mm field of view range covers 3 cutting line meshes, once scanning from left to right, completes data acquisition in one target line mesh area scanning, in the process of once scanning of narrow field of view high magnification camera, real-time image data acquisition is carried out for the target line mesh area, and whether there is a deviated line mesh in the current target line mesh area is preliminarily judged according to the focusing clarity of imaging, if there is a deviated line mesh, the direction of the narrow field of view high magnification camera and the laser range finder can be adjusted, the laser range finder is aligned to the deviated line mesh to collect distance parameters, and the image data collected by the narrow field of view high magnification camera can be used to obtain the spacing between adjacent line meshes through image analysis. It can be set that the previous 10 cutting lines are a group, the line mesh deviation measurement system, based on image analysis, the spacing between the first cutting line and the second cutting line is calculated as d1=0.76mm, and the subsequent cutting line spacings are d2=0.765mm, d3=0.761mm, d4=0.76mm, d5=0.758mm, d6=0.762mm, d7=0.768mm, d8=0.764mm, d9=0.761mm, d10=0.755mm, then the average spacing of the 10 cutting lines is d=(d1+d2+d3+d4+d5+d6+d7+d8+d9+d10) / 10=0.7614mm, and the standard deviation σd=0.00366. In the same group of 10 cutting lines, the maximum spacing is d7=0.768mm, and the maximum deviation spacing is 0.008mm, which can be set in the line mesh deviation measurement system to allow a tolerance range, and the position of the abnormal point exceeding the tolerance range is marked for subsequent adjustment.

[0071] Example 3: Deviation line mesh determination based on angle-spacing coupling coefficient Based on the settings of example 1 and example 2, the theoretical spacing of a certain silicon carbide cutting line mesh is d0=0.76mm, and the second distance H2=150.0mm is obtained by calibration. The weight coefficients determined by historical data regression analysis are: α=1.0, β=1.2, γ=0.5. The determination threshold K0=0.1 is determined according to the defect statistics.

[0072] During scanning, the system discovers that the focusing clarity decreases at position T1 (X1, Y1) through the shooting module 21, which is marked as an abnormal point. After adjusting the focus, the third distance H3=149.5mm is measured by the laser range finder 22. At the same time, the image collected by the shooting module 21 at this position is analyzed, and the offset angle θ=0.08° of the line mesh at this position and the average spacing d=0.78mm of the adjacent line mesh are calculated.

[0073] The above parameters are substituted into the K value calculation formula to calculate: K = 1.0 x |0.08| + 1.2 x |(0.78 - 0.76) / 0.76| + 0.5 x |(149.5 - 150.0) / 150.0| = 0.080 + 1.2 x 0.0263 + 0.5 x 0.0033 ≈ 0.080 + 0.0316 + 0.0017 ≈ 0.113 Since the calculated K = 0.113 > K0 = 0.1, the control end 30 determines that the line net is a line net to be corrected for deviation, and issues a warning in the application interface to prompt the operator to check the line net. The subsequent cutting result confirms that the wafer edge collapse indeed occurs at this position, verifying the effectiveness of the determination method.

[0074] It can be known from the above examples that the line net deviation measurement system and method provided by the embodiments of the present application can facilitate the movement adjustment required when the shooting module and the laser range finder respectively perform data collection. The detection module designed to include the shooting module and the laser range finder can quickly screen out the deviated line net by using the change in focusing clarity during image data collection by the shooting module, record the deviated line net screened out as an abnormal point, and then perform distance measurement by the laser range finder. In this way, the analysis of image data and distance measurement data can be combined to identify the deviated line net and determine the deviation parameter, the deviation detection in the depth direction and the plane direction of the line net can be completed at the same time in one deviation measurement and detection, and the purpose of more efficiently and accurately identifying the deviated line net in the target line net region and determining the corresponding deviation parameter can be achieved.

[0075] The line net deviation measurement system and method provided by the embodiments of the present application at least have the following characteristics: First, the detection module integrates the shooting module and the laser range finder, and supports the movement adjustment of the detection module in any required direction during the scanning process of the entire line net region by the line net deviation measurement system. The image data can be collected synchronously, the line net with abnormal height can be quickly identified and the distance value in the height direction can be measured during the scanning process. The deviated line net can be accurately and efficiently identified and the deviation parameter can be determined, so that the control precision of the cutting angle of the cutting line can be improved, the regional inclination of the line net can be warned in advance, and the cutting yield of the line cutting can be improved.

[0076] Second, the line net deviation measurement system supports the movement adjustment of the detection module in any required direction during the scanning process, which can be uniformly controlled by the application program for executing the line net deviation measurement method. The adjustment precision of the target line net position can be improved, and the inaccuracy of the target position adjustment caused by human operation can be reduced.

[0077] Third, the detection module integrates a shooting module and a laser range finder. During the scanning process, the shooting module and the laser range finder can perform alternating data collection for the same position. Image collection and distance value collection can be completely co-reference designed. The co-reference design and the alternating data collection of the shooting module and the laser range finder for the same part make it possible to select a narrow field of view range shooting module to cooperate with the laser range finder to complete the detection. It is avoided that a wide field of view range shooting module must be used to cooperate with the laser range finder, and the image data collected by the wide field of view range shooting module will affect the recognition accuracy.

[0078] Fourth, by loading the control end of the application program of the line net deviation measurement method, the data collected during the execution of the line net deviation measurement method can be analyzed and calculated in real time. The deviation parameters can be data fused, the angle-distance coupling coefficient can be calculated, and the real-time correlation model of the line net angle-distance can be established by using the calculation result of the angle-distance coupling coefficient. Based on the angle-distance coupling coefficient, the correction of the line net deviation can be optimized, so as to dynamically optimize the cutting process. Thus, a technical leap from "single parameter alarm" to "composite risk early warning" is realized, and data support is provided for dynamically optimizing the cutting process.

[0079] It can be understood that the line net deviation measurement system and the measurement method are not only suitable for the line net parallelism and distance measurement of the multi-wire cutting machine of silicon carbide crystals, but also suitable for the line net parallelism and distance measurement of the line net of sapphire / silicon cutting machines. The line net measurement of cutting machines of different size specifications is also compatible, which is not limited in the present application.

[0080] In another aspect of the present application, a computer program product is provided, which includes a computer program. When the computer program is executed by a processor, the line net deviation measurement method of any one of the preceding embodiments of the present application is realized.

[0081] It should be noted that in this document, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or device. Without more limitations, the element defined by the statement "including a" does not exclude the presence of another identical element in the process, method, article or device including the element.

[0082] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed in the present application, which shall be covered within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A wire mesh deviation measurement system, characterized by, The line net deviation measurement system comprises: a regulating platform comprising a base and a multi-axis regulating mechanism arranged on the base, the multi-axis regulating mechanism being used to realize movement adjustment in multiple directions; a detection module comprising a shooting module and a laser range finder, the detection module being arranged on the multi-axis regulating mechanism; wherein the shooting module is configured to collect image data of a target line net area, the laser range finder is configured to collect distance data, and the line net deviation measurement system identifies a deviated line net and determines deviation parameters by analyzing the image data and the distance data.

2. The wire web deviation measurement system of claim 1, wherein, The multi-axis regulating mechanism comprises a first direction movement structure, a second direction movement structure, a mounting bracket, and a mounting seat arranged on the mounting bracket; the mounting seat comprises a third direction movement structure and a rotation adjusting structure; the movement adjustment directions of the first direction movement structure, the second direction movement structure, and the third direction movement structure are perpendicular to each other, and the shooting module and the laser range finder are arranged at an included angle on both sides of the rotation adjusting structure; the first direction movement structure is used to realize movement adjustment of the second direction movement structure, the mounting bracket, and the mounting seat carrying the detection module in a first direction; the second direction movement structure is used to realize movement adjustment of the mounting bracket and the mounting seat carrying the detection module in a second direction; the third direction movement adjusting structure is used to realize movement adjustment of the rotation adjusting structure carrying the detection module in a third direction; and the rotation adjusting structure is used to adjust the rotation angle of the detection module.

3. The wire web deviation measurement system of claim 2, wherein, The first direction movement structure comprises a first sliding rail and a first sliding support plate; the first sliding rail is arranged on the base and extends in the first direction; the first sliding support plate is slidably connected to the first sliding rail, and the second direction movement structure is arranged on the first sliding support plate; the second direction movement structure comprises a second sliding rail and a second sliding support plate; the second sliding rail is arranged on the second sliding support plate and extends in the second direction; the second sliding support plate is slidably connected to the second sliding rail, and the mounting bracket is arranged on the second sliding support plate; the third direction movement structure comprises a telescopic adjusting assembly and a mounting support plate connected to the telescopic adjusting assembly; the rotation adjusting structure is rotatably arranged on the mounting support plate.

4. The wire web deviation measurement system of claim 3, wherein, The mounting support plate is provided with an axle seat, the rotation adjusting structure comprises a rotation joint pivotally connected to the axle seat, the shooting module and the laser range finder are arranged on two adjacent sides of the rotation joint, and the shooting module and the laser range finder are at an angle of 90 degrees.

5. A wire mesh deviation measurement method applied to the wire mesh deviation measurement system according to any one of claims 1 to 4, characterized by, The line net deviation measurement system is calibrated, a test origin is set, and initial parameters of the detection module at the test origin are obtained; wherein the initial parameters comprise a first distance between the laser range finder and the line net when the laser range finder is at an initial position at the test origin and a second distance between the shooting module and the line net when the shooting module is at a clear focus point at the test origin, which are measured by the laser range finder. ​ The multi-axis adjusting mechanism is controlled to move along the extension direction of the target line net area, and the photographing module and the laser range finder perform data collection, and the deviated line net is identified and the deviation parameter is determined according to the collected data.

6. The line-of-sight deviation measurement method according to claim 5, wherein The control of the multi-axis adjusting mechanism moving along the extension direction of the target line net area comprises: In the first direction, the first direction motion auxiliary recording function is started, the multi-axis adjusting mechanism is controlled to move along the extension direction of the line net area with the test origin as the starting point, and the reference auxiliary line is generated according to the movement; The multi-axis adjusting mechanism is controlled to move to the reference point of the line net area, and the reference point is taken as the starting point to move along the extension direction of the line net area for row-by-row scanning, and the photographing module and the laser range finder perform data collection in the row-by-row scanning, and the deviated line net is identified and the deviation parameter is determined according to the collected data.

7. The line-of-sight deviation measurement method according to claim 5, wherein The control of the photographing module and the laser range finder performing data collection, identifying the deviated line net and determining the deviation parameter according to the collected data comprises: The photographing module is controlled to collect image data at a preset frequency, and an abnormal point is determined according to the focus and clarity changes of the real-time photographed image of the photographing module for the target line net area; The third distance between the photographing module and the line net when the photographing module is at the focus and clarity point is measured by the laser range finder, and the image data collected by the photographing module is analyzed to determine the offset angle of the deviated line net and the average distance between adjacent line nets.

8. The line-of-sight deviation measurement method according to claim 7, wherein The third distance between the photographing module and the line net when the photographing module is at the focus and clarity point is measured by the laser range finder, and the image data collected by the photographing module is analyzed to determine the offset angle of the deviated line net and the average distance between adjacent line nets. The position of the abnormal point is marked; The multi-axis adjusting mechanism is controlled to move vertically at the position of the abnormal point, and the laser range finder is controlled to measure the third distance between the photographing module and the line net when the photographing module is at the focus and clarity point; The image data collected by the photographing module is analyzed, the trajectory of the deviated line net is determined from the image data, the offset angle of the trajectory relative to the reference auxiliary line is determined, and the average distance between the deviated line net and the adjacent line net is calculated.

9. The line-of-sight deviation measurement method according to claim 8, wherein Further comprising: According to the offset angle of the deviated line net, the average distance and the third distance, the angle-distance coupling coefficient is calculated; Based on the angle-distance coupling coefficient, the deviated line net to be corrected is determined.

10. The wire web deviation measurement method according to any one of claims 5 to 9, characterized in that, The photographing module is a narrow field of view high magnification camera, and the laser range finder is a non-pulsed laser range finder; the control of the photographing module and the laser range finder performing data collection, identifying the deviated line net and determining the deviation parameter according to the collected data comprises: The narrow field of view high magnification camera is controlled to collect line net area images of the target line net area, and the line net area images contain imaging of three line nets; When it is determined that the preset measurement point is reached according to the line net area image, the non-pulsed laser range finder is controlled to start ranging to obtain ranging data; According to the analysis of the line net area image and the ranging data, deviation from the line net is identified and deviation parameters are determined.

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