Vacuum exhaust device for hemispherical resonator gyroscope
By integrating a vacuum exhaust device that combines temperature-controlled heating, getter activation, and Q-value testing, the problem of reduced vacuum in hemispherical resonant gyroscopes was solved, achieving a highly efficient exhaust process and improving production efficiency and gyroscope stability.
Patent Information
- Application Number
- CN202511444708.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-10
- Publication Date
- 2026-02-03
AI Technical Summary
Existing vacuum exhaust devices for hemispherical resonant gyroscopes cannot effectively remove moisture from inside the head, resulting in a decrease in vacuum level. Furthermore, the exhaust process cannot be monitored and controlled in real time, affecting the accuracy and lifespan of the gyroscope.
A vacuum exhaust device integrating temperature-controlled heating, getter activation, and Q-value testing functions was designed, including a vacuum system, a temperature-controlled heating device, a getter activation device, and a hemispherical resonator gyroscope Q-value testing device. The exhaust process is optimized by heating the exhaust, activating the getter, and monitoring the Q-value in real time.
It improves the production efficiency of hemispherical resonant gyroscopes, stabilizes performance output, extends service life, and simplifies the exhaust process.
Smart Images
Figure CN121453089A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of hemispherical resonant gyroscope manufacturing technology, and particularly relates to a vacuum exhaust device for hemispherical resonant gyroscopes. Background Technology
[0002] A multi-station ultra-high vacuum exhaust station is an auxiliary device used for high-vacuum exhaust of multi-station workpieces or chambers. It is widely used in the field of ultra-high vacuum exhaust. Ultra-high vacuum exhaust stations are used for vacuum exhaust of electro-vacuum devices and special lamp devices. They are widely used in industries such as electron tubes, traveling wave tubes, laser tubes, microwave tubes, and lamp manufacturing for exhaust, baking, decomposition activation, and sealing. Vacuum exhaust stations are available in vertical, single-head, and multi-head configurations.
[0003] The hemispherical resonant gyroscope is a new type of solid-state gyroscope based on the Coriolis effect to measure the rotation angle / angular velocity of a carrier. It features high precision, small size, simple structure (only 2-3 core components), no easily worn parts, long life, high reliability, and strong overload resistance.
[0004] In a hemispherical resonant gyroscope, the resonator needs to operate in a vacuum environment. When the vacuum level is poor, the air damping during the resonator's vibration increases, increasing energy loss and reducing the quality factor. When the vacuum level is below 10 Pa, the resonator vibrates for only a few seconds; with further reductions, it cannot maintain vibration. This is a significant cause of gyroscope failure. Therefore, sealing the dial indicator, venting, and degassing are crucial technologies in the development of hemispherical resonant gyroscopes. Thus, a vacuum venting platform needs to be designed to perform high-vacuum venting for the hemispherical resonant gyroscope, improving and maintaining the internal vacuum level of the dial indicator to ensure the accuracy and lifespan of the hemispherical resonant gyroscope.
[0005] Currently, vacuum exhaust devices used in hemispherical resonant gyroscopes do not have heating and temperature control devices. During the exhaust process, they cannot completely remove all the water vapor adsorbed inside the meter head, resulting in residual water vapor remaining inside the meter head after sealing. This makes it impossible to maintain a high vacuum environment inside the meter head for a long time.
[0006] Currently, vacuum exhaust devices used in hemispherical resonant gyroscopes do not have a getter activation device. After the meter head breaks, the trace amount of gas that seeps in from the meter head accumulates inside the meter, reducing the vacuum level inside the meter and causing the gyroscope to fail.
[0007] Currently, vacuum exhaust devices used in hemispherical resonator gyroscopes do not have a Q-value testing device for hemispherical resonator gyroscopes. During the exhaust process, the vacuum level inside the meter head cannot be clearly obtained, so the exhaust time of the meter head cannot be determined. A long exhaust time reduces the production efficiency of the gyroscope, while a short exhaust time results in a low vacuum level inside the meter head, making it impossible to maintain a high vacuum for a long time. Summary of the Invention
[0008] The technical problem solved by this invention is to overcome the shortcomings of the prior art and provide a vacuum exhaust device for hemispherical resonant gyroscopes, which combines the functions of gyroscope head heating, exhaust, annealing, getter activation, and hemispherical resonant gyroscope Q-value testing, thereby improving the production efficiency of hemispherical resonant gyroscopes, stabilizing the performance output of hemispherical resonant gyroscopes, and extending the working life of hemispherical resonant gyroscopes.
[0009] The objective of this invention is achieved through the following technical solution: a vacuum exhaust device for a hemispherical resonator gyroscope, comprising: a vacuum system, a temperature-controlled heating device, a getter activation device, and a hemispherical resonator gyroscope Q-value testing device; wherein, the vacuum system is connected to the hemispherical resonator gyroscope head, and the vacuum system is used to exhaust and evacuate the hemispherical resonator gyroscope head; the temperature-controlled heating device is installed on the hemispherical resonator gyroscope head, and the temperature-controlled heating device is used to heat the hemispherical resonator gyroscope head; the hemispherical resonator gyroscope Q-value testing device is connected to the hemispherical resonator gyroscope head, and the hemispherical resonator gyroscope Q-value testing device is used to measure and record the Q-value of the hemispherical resonator gyroscope head; the getter activation device is connected to the hemispherical resonator gyroscope Q-value testing device, and the getter activation device is connected to the getter inside the hemispherical resonator gyroscope head, and the getter activation device is used to activate the getter.
[0010] In the aforementioned hemispherical resonator gyroscope vacuum exhaust device, when the Q values measured by the hemispherical resonator gyroscope Q value testing device are all equal within a preset time, the hemispherical resonator gyroscope Q value testing device transmits an activation command to the getter activation device; after receiving the activation command, the getter activation device activates the getter according to the activation command.
[0011] In the aforementioned hemispherical resonant gyroscope vacuum exhaust device, the vacuum system includes a vacuum pump group, a main vacuum pipeline, multiple branch vacuum pipelines, multiple vacuum valves, and a vacuum gauge group; wherein, one end of the main vacuum pipeline is connected to the vacuum pump group through a vacuum valve, and each branch port of the other end of the main vacuum pipeline is connected to the corresponding branch vacuum pipeline through a vacuum valve; the vacuum gauge group is connected to the main vacuum pipeline.
[0012] In the aforementioned hemispherical resonant gyroscope vacuum exhaust device, the temperature control heating device includes a temperature control system, a heating element, a platinum resistance thermometer, a heating fixture, and a first DC power supply; wherein, the heating fixture is mounted on the flange of the hemispherical resonant gyroscope head; the platinum resistance thermometer is disposed on the outer surface of the heating fixture; the heating element is wound around the outer surface of the heating fixture; the heating element is connected to the first DC power supply, and the temperature control system is connected to both the first DC power supply and the platinum resistance thermometer.
[0013] In the above-mentioned hemispherical resonant gyroscope vacuum exhaust device, the first DC power supply powers the heating element, and the heating element heats up at a rate of 2℃ / min; the platinum resistance thermometer measures the temperature of the heating fixture in real time and transmits the real-time measured temperature to the temperature control system; when the temperature control system determines that the real-time measured temperature has reached the set temperature, the temperature control system controls the first DC power supply to maintain the current power supply.
[0014] In the aforementioned vacuum exhaust device for hemispherical resonant gyroscopes, the hemispherical resonant gyroscope Q-value testing device includes a second DC regulated power supply, a hemispherical resonant gyroscope Q-value testing system, and a test cable; wherein, the hemispherical resonant gyroscope Q-value testing system is connected to the second DC regulated power supply; the hemispherical resonant gyroscope Q-value testing system is connected to the terminals of the hemispherical resonant gyroscope meter via the test cable.
[0015] In the aforementioned hemispherical resonator gyroscope vacuum exhaust device, the getter activation device includes a connecting cable, a second DC regulated power supply, and a getter activation controller; wherein, the second DC regulated power supply is connected to the getter inside the hemispherical resonator gyroscope head via the connecting cable; the second DC regulated power supply is connected to the getter activation controller; the getter activation controller is connected to both the hemispherical resonator gyroscope Q-value testing system and the second DC regulated power supply.
[0016] In the aforementioned hemispherical resonator gyroscope vacuum exhaust device, when the Q values measured by the hemispherical resonator gyroscope Q value testing system are all equal within a preset time, the hemispherical resonator gyroscope Q value testing system transmits an activation command to the getter activation controller; the getter activation controller receives the activation command, and the getter activation controller controls the second DC regulated power supply to energize the connecting cable to activate the getter according to the activation command.
[0017] In the aforementioned hemispherical resonant gyroscope vacuum exhaust device, the getter activation controller controls the second DC regulated power supply to energize the connecting cable according to the activation command to activate the getter. Specifically, the steps include: after receiving the activation command, the second DC regulated power supply starts working, sets the initial current, maintains the initial current for a preset time, and then gradually increases the current and duration according to the preset getter activation conditions to finally complete the getter activation work.
[0018] In the aforementioned hemispherical resonant gyroscope vacuum exhaust device, the vacuum pump group includes a dry pump and a molecular pump; wherein, the dry pump evacuates the vacuum pipeline and the inside of the gyroscope head to a low vacuum environment, and the molecular pump evacuates the vacuum pipeline and the inside of the gyroscope head to a high vacuum environment; the vacuum gauge group includes a vacuum ionization gauge and a vacuum resistance gauge; wherein, the vacuum ionization gauge is used to test the vacuum degree of the main vacuum pipeline, with a test range of 1E-1Pa to 1E-7Pa; the vacuum resistance gauge is used to test the vacuum degree of the main vacuum pipeline, with a test range of 1E5Pa to 1E-1Pa.
[0019] Compared with the prior art, the present invention has the following advantages: (1) The vacuum pipe arrangement of the vacuum exhaust device of the present invention is simple, and the vacuum pump group is directly connected to the gyroscope head for exhaust, which reduces the exhaust time. During the exhaust process, the head is slowly heated and then kept heated for a long time, which can not only accelerate the exhaust of gases such as water vapor inside the head, but also anneal the head components, thus stabilizing the gyroscope output performance. During the exhaust process, the performance parameters such as the Q value of the gyroscope head during the exhaust stage and the getter activation stage can be monitored in real time. The exhaust time can be determined by the change law of the gyroscope Q value parameter, and the gyroscope performance output under high temperature environment can also be obtained. (2) The present invention solves the problem of integrating heating and exhaust, activation of getter in the meter head, and meter head Q value testing into one in the vacuum exhaust stage of hemispherical resonant gyroscope, thereby optimizing the vacuum exhaust process of hemispherical resonant gyroscope and improving production efficiency. Attached Figure Description
[0020] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings: Figure 1 This is a schematic diagram of the vacuum exhaust device for a hemispherical resonant gyroscope provided in an embodiment of the present invention. Detailed Implementation
[0021] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the disclosure to those skilled in the art. It should be noted that, unless otherwise specified, the embodiments and features described herein can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.
[0022] Figure 1This is a schematic diagram of the vacuum exhaust device for a hemispherical resonant gyroscope provided in an embodiment of the present invention. Figure 1 As shown, the hemispherical resonator gyroscope vacuum exhaust device includes: a vacuum system, a temperature-controlled heating device, a getter activation device, and a hemispherical resonator gyroscope Q-value testing device. The vacuum system is connected to the hemispherical resonator gyroscope head and is used to evacuate the hemispherical resonator gyroscope head. The temperature-controlled heating device is installed on the hemispherical resonator gyroscope head and is used to heat the hemispherical resonator gyroscope head. The hemispherical resonator gyroscope Q-value testing device is connected to the hemispherical resonator gyroscope head and is used to measure and record the Q-value of the hemispherical resonator gyroscope head. The getter activation device is connected to the hemispherical resonator gyroscope Q-value testing device and is connected to the getter inside the hemispherical resonator gyroscope head, and is used to activate the getter.
[0023] When the Q values measured by the hemispherical resonator gyroscope Q value testing device are all equal within a preset time, the hemispherical resonator gyroscope Q value testing device transmits an activation command to the getter activation device; after receiving the activation command, the getter activation device activates the getter according to the activation command.
[0024] The vacuum system includes a vacuum pump assembly, a main vacuum pipeline 2, multiple branch vacuum pipelines 3, multiple vacuum valves 4, and a vacuum gauge assembly; among which, One end of the main vacuum pipe 2 is connected to the vacuum pump unit through a vacuum valve 4, and each branch port of the other end of the main vacuum pipe 2 is connected to the corresponding branch vacuum pipe 3 through a vacuum valve. It should be understood that the other end of the main vacuum pipe 2 includes multiple branch ports.
[0025] The vacuum gauge set is connected to the main vacuum pipeline. The vacuum gauge set can measure the changes in the vacuum level of the main vacuum pipeline in real time, and its test range is 1E-5Pa to 1E-7Pa.
[0026] The temperature-controlled heating device includes a temperature control system 6, a heating element, a platinum resistance thermometer, a heating fixture, and a first DC power supply; wherein, the heating fixture is mounted on the flange of the hemispherical resonant gyroscope; the platinum resistance thermometer is disposed on the outer surface of the heating fixture; the heating element is wound around the outer surface of the heating fixture; the heating element is connected to the first DC power supply, and the temperature control system 6 is connected to both the first DC power supply and the platinum resistance thermometer.
[0027] The first DC power supply powers the heating element, which heats up at a rate of 2℃ / min. The platinum resistance thermometer measures the temperature of the heating fixture in real time and transmits the measured temperature to the temperature control system 6. When the temperature control system 6 determines that the measured temperature has reached the set temperature, it controls the first DC power supply to maintain the current current.
[0028] The hemispherical resonant gyroscope Q-value testing device includes a second DC regulated power supply 111, a hemispherical resonant gyroscope Q-value testing system 13, and test cables; wherein, the hemispherical resonant gyroscope Q-value testing system 13 is connected to the second DC regulated power supply 111; the hemispherical resonant gyroscope Q-value testing system 13 is connected to the terminals of the hemispherical resonant gyroscope meter through the test cables.
[0029] The getter activation device includes a connecting cable, a second DC regulated power supply 112, and a getter activation controller 12; wherein, the second DC regulated power supply 112 is connected to the getter inside the hemispherical resonant gyroscope head via the connecting cable; the second DC regulated power supply 112 is connected to the getter activation controller 12; the getter activation controller 12 is connected to the hemispherical resonant gyroscope Q-value testing system 13 and the second DC regulated power supply 112 respectively.
[0030] When the Q values measured by the hemispherical resonant gyroscope Q value testing system 13 are all equal within a preset time, the hemispherical resonant gyroscope Q value testing system 13 transmits an activation command to the getter activation controller 12; after receiving the activation command, the getter activation controller 12 controls the second DC regulated power supply 112 to energize the connecting cable to activate the getter according to the activation command.
[0031] The getter activation controller 12 controls the second DC regulated power supply 112 to energize the connecting cable according to the activation command to activate the getter. The specific steps include the following: After the Q value of the hemispherical resonant gyroscope stabilizes, turn off the heating system, connect the DC power supply to the lead pin of the getter built into the gyroscope head using the getter activation cable, turn on the power, set the initial current, maintain the initial current for a preset time, and then gradually increase the current and duration according to the preset getter activation process to finally complete the getter activation work.
[0032] The temperature control system 6 is integrated in the control cabinet. The heating element 7 is a polyimide heating element, which is fixed to the hemispherical resonant gyroscope head by the heating fixture 8.
[0033] The vacuum pump unit consists of a dry pump 15 and a molecular pump. The function of the dry pump 15 is to evacuate the vacuum pipe and the inside of the gyroscope to a low vacuum environment, while the function of the molecular pump is to evacuate the vacuum pipe and the inside of the gyroscope to a high vacuum environment.
[0034] Each branch vacuum pipe 3 can be independently controlled by vacuum valve 4, which is an all-metal valve with a leakage rate better than 5E-13Pam. 3 / s.
[0035] The vacuum gauge set consists of a vacuum ionization gauge 17 and a vacuum resistance gauge 18, with a testing range of 1E5Pa to 1E-7Pa. Specifically, the vacuum ionization gauge 17 is used to test the vacuum level of the main vacuum pipeline, with a testing range of 1E-1Pa to 1E-7Pa, while the vacuum resistance gauge 18 is used to test the vacuum level of the main vacuum pipeline, with a testing range of 1E5Pa to 1E-1Pa.
[0036] The temperature-controlled heating device can heat the hemispherical resonant gyroscope head from room temperature to 200℃, and can control the heating rate of the heating element, with a minimum heating rate of 2℃ / min. The heating fixture is mounted on the gyroscope head with screws, and the heating element is attached to the heating fixture using high-temperature tape. A temperature-measuring platinum resistance thermometer is inserted between the heating element and the heating fixture.
[0037] Connect cable 10 to the meter terminal block, set the getter activation process parameters, and automatically complete the getter activation process after turning on the DC regulated power supply.
[0038] The hemispherical resonant gyroscope Q-value testing system 13 is connected to the gyroscope head via a test cable. The hemispherical resonant gyroscope Q-value testing device can monitor the Q-value of the hemispherical resonant gyroscope in real time. The Q-value of the hemispherical resonant gyroscope is related to the vacuum level inside the head, and the Q-value of the head can reflect the vacuum level inside the head, thereby determining the total venting time.
[0039] The vacuum exhaust device should be used according to the following steps: Step 1: Connect the hemispherical resonant gyroscope head that needs to be vented to the branch vacuum pipe 3 using a metal clamp, and open the vacuum valve 4 on the vacuum pump unit connected to the branch vacuum pipe 3. Turn on the dry pump 15 to vent and evacuate the gyroscope head. After the vacuum gauge on the branch vacuum pipe 3 shows a vacuum level of <5Pa, start the molecular pump to vent and evacuate the vacuum. Step 2: Connect the Q value test cable to the meter terminal block, monitor and record the Q value of the gyroscope meter daily; Step 3: Install the heating fixture onto the flange of the hemispherical resonant gyroscope head using screws, wrap the polyimide heating element around the heating fixture, attach the platinum resistance thermometer to the heating fixture, and start the temperature control system 6 to heat the heating element at a rate of 2℃ / min until the temperature reaches the set temperature. Step 4: After the Q value stabilizes, turn off the temperature control system 6 the next day and allow the gyroscope head to cool naturally to room temperature. Turn on the DC regulated power supply 11 connected to the getter cable to activate the getter. After the getter is activated, disconnect the head from the branch pipe to complete the exhaust and vacuuming process of the hemispherical resonant gyroscope head.
[0040] In this embodiment, the vacuum pipeline is short and simply arranged, and the vacuum pump unit directly connects to the gyroscope head for exhaust, reducing the exhaust time. During the exhaust process, the head is slowly heated and maintained at this temperature for an extended period. This not only accelerates the removal of gases such as water vapor from inside the head but also anneales the head components, stabilizing the gyroscope's output performance. During the exhaust process, performance parameters such as the gyroscope head's Q-value can be monitored in real time during the exhaust phase and the getter activation phase. This allows for the determination of exhaust time based on the changes in the gyroscope's Q-value, and also provides information on the gyroscope's performance output under high-temperature conditions.
[0041] This embodiment solves the problem of integrating heating and exhaust, getter activation in the meter head, and meter Q-value testing into one process during the vacuum exhaust stage of a hemispherical resonant gyroscope, thereby optimizing the vacuum exhaust process of the hemispherical resonant gyroscope and improving production efficiency.
[0042] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make possible changes and modifications to the technical solutions of the present invention by utilizing the methods and techniques disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall fall within the protection scope of the technical solutions of the present invention.
Claims
1. A vacuum exhaust device for a hemispherical resonant gyroscope, characterized in that... include: Vacuum system, temperature control heating device, getter activation device, and hemispherical resonator gyroscope Q-value testing device; among which, The vacuum system is connected to the hemispherical resonant gyroscope head, and the vacuum system is used to exhaust and evacuate the hemispherical resonant gyroscope head; The temperature-controlled heating device is installed on the hemispherical resonant gyroscope head, and the temperature-controlled heating device is used to heat the hemispherical resonant gyroscope head; The hemispherical resonant gyroscope Q-value testing device is connected to the hemispherical resonant gyroscope meter head, and the hemispherical resonant gyroscope Q-value testing device is used to measure and record the Q-value of the hemispherical resonant gyroscope meter head; The getter activation device is connected to the hemispherical resonant gyroscope Q-value testing device, and the getter activation device is connected to the getter inside the hemispherical resonant gyroscope head. The getter activation device is used to activate the getter.
2. The vacuum exhaust device for a hemispherical resonant gyroscope according to claim 1, characterized in that: When the Q values measured by the hemispherical resonant gyroscope Q value testing device are all equal within a preset time, the hemispherical resonant gyroscope Q value testing device transmits an activation command to the getter activation device. After receiving an activation command, the getter activation device activates the getter according to the activation command.
3. The vacuum exhaust device for a hemispherical resonant gyroscope according to claim 1, characterized in that: The vacuum system includes a vacuum pump assembly, a main vacuum pipeline (2), multiple branch vacuum pipelines (3), multiple vacuum valves (4), and a vacuum gauge assembly; wherein, One end of the main vacuum pipe (2) is connected to the vacuum pump group through a vacuum valve (4), and each branch port of the other end of the main vacuum pipe (2) is connected to the corresponding branch vacuum pipe (3) through a vacuum valve. The vacuum gauge assembly is connected to the main vacuum pipeline (2).
4. The vacuum exhaust device for a hemispherical resonant gyroscope according to claim 1, characterized in that: The temperature-controlled heating device includes a temperature control system (6), heating elements, a platinum resistance thermometer, heating fixtures, and a first DC power supply; wherein... The heating fixture is installed on the flange of the hemispherical resonant gyroscope head; The platinum resistance thermometer is disposed on the outer surface of the heating fixture; The heating element is wound around the outer surface of the heating fixture; The heating element is connected to the first DC power supply, and the temperature control system (6) is connected to the first DC power supply and the platinum resistance thermometer respectively.
5. The vacuum exhaust device for a hemispherical resonant gyroscope according to claim 4, characterized in that: The first DC power supply powers the heating element, and the heating element heats up at a rate of 2°C / min; The platinum resistance thermometer measures the temperature of the heating fixture in real time and transmits the real-time measured temperature to the temperature control system (6). When the temperature control system (6) determines that the temperature measured in real time has reached the set temperature, the temperature control system (6) controls the first DC power supply to maintain the current power supply current.
6. The vacuum exhaust device for a hemispherical resonant gyroscope according to claim 1, characterized in that: The hemispherical resonant gyroscope Q-value testing device includes a second DC regulated power supply (111), a hemispherical resonant gyroscope Q-value testing system (13), and test cables; wherein, The hemispherical resonant gyroscope Q-value testing system (13) is connected to the second DC regulated power supply (111); The hemispherical resonant gyroscope Q-value testing system (13) is connected to the terminals of the hemispherical resonant gyroscope meter via the test cable.
7. The vacuum exhaust device for a hemispherical resonant gyroscope according to claim 6, characterized in that: The getter activation device includes a connecting cable, a second DC regulated power supply (112), and a getter activation controller (12); wherein, The second DC regulated power supply (112) is connected to the getter inside the hemispherical resonant gyroscope head via a connecting cable; The second DC regulated power supply (112) is connected to the getter activation controller (12); The getter activation controller (12) is connected to the hemispherical resonant gyroscope Q-value testing system (13) and the second DC regulated power supply (112), respectively.
8. The vacuum exhaust device for a hemispherical resonant gyroscope according to claim 7, characterized in that: When the Q values measured by the hemispherical resonant gyroscope Q value testing system (13) are all equal within a preset time, the hemispherical resonant gyroscope Q value testing system (13) transmits an activation command to the getter activation controller (12). The getter activation controller (12) receives an activation command and controls the second DC regulated power supply (112) to energize the connecting cable to activate the getter according to the activation command.
9. The vacuum exhaust device for a hemispherical resonant gyroscope according to claim 8, characterized in that: The getter activation controller (12) controls the second DC regulated power supply (112) to energize the connecting cable according to the activation command to activate the getter. The specific steps include the following: After receiving the activation command, the second DC regulated power supply (112) starts working, sets the initial current, maintains the initial current for a preset time, and then gradually increases the current and duration according to the preset getter activation conditions, and finally completes the getter activation work.
10. The vacuum exhaust device for a hemispherical resonant gyroscope according to claim 3, characterized in that: The vacuum pump assembly includes a dry pump and a molecular pump; wherein, the dry pump evacuates the vacuum pipeline and the inside of the gyroscope head to a low vacuum environment, and the molecular pump evacuates the vacuum pipeline and the inside of the gyroscope head to a high vacuum environment. The vacuum gauge set includes a vacuum ionization gauge and a vacuum resistance gauge; wherein, the vacuum ionization gauge is used to test the vacuum level of the main vacuum pipeline, with a test range of 1E-1Pa to 1E-7Pa; the vacuum resistance gauge is used to test the vacuum level of the main vacuum pipeline, with a test range of 1E5Pa to 1E-1Pa.