High-precision horizontal deflection mirror clamping and adjusting mechanism

Abstract

The invention discloses a high-precision horizontal deflection mirror clamping and adjusting mechanism which comprises a reflector body, a mirror base and a bottom plate, the reflector body is installed on the mirror base through a mirror body clamping assembly, and gravity deformation of the reflector body is compensated through a mirror surface compensation assembly; the mirror base is installed on the bottom plate through the flexible connecting rod assembly and is controlled by the piezoelectric driving assembly to rotate, and the rotation angle is measured through the angle measuring assembly. According to the high-precision horizontal deflection mirror clamping and adjusting mechanism, clamping and thermal deformation of a mirror body of a reflecting mirror can be effectively avoided, high-precision and high-stability angle posture adjusting performance is achieved, and reflecting mirror clamping deformation smaller than 100 nrad, reflecting mirror rotating angle posture adjusting with the resolution smaller than 70 nrad and first-order modal stability higher than 200 Hz can be achieved.

Description

Technical Field

[0001] This invention relates to the field of synchrotron radiation technology, and in particular to a high-precision horizontal deflection mirror clamping and adjustment mechanism. Background Technology

[0002] With the development of fourth-generation diffraction-limited synchrotron radiation sources, extremely high requirements have been placed on the surface shape and stability of the mirrors used in synchrotron radiation sources to ensure the advantages of high brightness, high coherence, and high spatial energy resolution during synchrotron radiation light transmission.

[0003] To ensure the transmission efficiency of synchrotron radiation, the mounting and adjustment mechanisms of the mirrors in a synchrotron radiation source are generally operated under a vacuum of 6 × 10⁻⁶. -8 The mirror is housed in an ultra-high vacuum chamber with a pressure of Pa. In actual operation, the mirror needs to maintain a surface accuracy of several hundred nrad under complex conditions such as clamping, gravity, and thermal deformation. At the same time, it needs to remain stable under the disturbance of various vibration sources (high first-order mode) and achieve precise optical attitude adjustment on the order of tens of nrad. Therefore, the clamping and adjustment mechanism of the mirror must be able to meet the above-mentioned stringent requirements for the mirror.

[0004] While existing horizontal deflector clamping and adjustment mechanisms can fine-tune the clamping of the reflector, their surface accuracy, stability, and adjustment precision often fail to meet requirements under complex working conditions. Summary of the Invention

[0005] Based on the technical problems existing in the background art, the present invention proposes a high-precision horizontal deflection mirror clamping and adjustment mechanism.

[0006] The present invention proposes a high-precision horizontal deflection mirror clamping and adjustment mechanism, comprising a mirror body, a mirror base and a base plate. The mirror body is mounted on the mirror base by a mirror body clamping assembly and its deformation under gravity is compensated by a mirror surface compensation assembly. The mirror base is mounted on the base plate by a flexible connecting rod assembly and its rotation is controlled by a piezoelectric drive assembly, and the rotation angle is measured by an angle measuring assembly.

[0007] Preferably, the mirror body clamping assembly has three components, each including a clamping screw, a disc spring, a clamping washer, and a ball-head hinge washer. The upper surface of the mirror base has three identical hinge holes, each housing a first, second, and third flexible hinge structure. The ball-head hinge washers of the three mirror body clamping assemblies are respectively installed in the first, second, and third flexible hinge structures of the three hinge holes and fixed to the mirror base by hinge fixing screws. The mirror body has three screw holes corresponding to the positions of the three hinge holes. The clamping screw passes through the screw holes of the disc spring, the clamping washer, and the mirror body in sequence and is screwed into the ball-head hinge washer by threaded engagement, thereby pressing the mirror body onto the three ball-head hinge washers.

[0008] Preferably, the screw hole on the bottom end face of the reflector body is chamfered and makes line contact with the ball joint hinge washer. The ball joint hinge washer has elastic deformation properties, giving it the freedom to rotate around the u-axis. Flexible hinge structure one, flexible hinge structure two, and flexible hinge structure three all have the freedom to move along the u-axis and rotate around the w-axis. The two cooperate with each other, and the three sets of identical structures on the mirror base are arranged at a 60° angle to support the reflector body. This achieves kinematic support and clamping of the reflector body to reduce the influence of clamping stress and thermal stress on the reflector surface shape under actual working conditions.

[0009] Preferably, the ball-head hinge washer consists of a ball head at the top, a hinge segment in the middle, and a tubular fixing segment at the bottom. A threaded central hole is provided in the center of the ball head, hinge segment, and tubular fixing segment. The hinge segment of the ball-head hinge washer has elastic deformation properties, allowing the ball-head hinge washer to have a degree of freedom to rotate around the u-axis. Flexible hinge structure one, flexible hinge structure two, and flexible hinge structure three all consist of a long, thin-plate hinge and a tubular hinge base. The hinge base is suspended in the center of the hinge hole. Two symmetrical thin-plate hinges are provided, with one end fixed to the outer wall of the hinge base and the other end fixedly connected to the wall of the hinge hole. The thin-plate hinge, through flexible deformation, allows the tubular hinge base to have a degree of freedom to move along the u-axis and rotate around the w-axis and its own axis.

[0010] Preferably, the tubular fixing section of the ball-head hinge washer is inserted from top to bottom into the central hole of the hinge base, thereby achieving a tight fit between the ball-head hinge washer and the first, second, or third flexible hinge structure. The hinge fixing screw is inserted from bottom to top through the hinge hole, and its upper end is fixed in the central hole of the washer in the tubular fixing section by a threaded engagement. The lower end of the clamping screw is screwed into the central hole of the ball head of the ball-head hinge washer by a threaded engagement. The chamfer on the bottom end face of the reflector body makes line contact with the ball head on the ball-head hinge washer.

[0011] Preferably, the mirror mount is provided with a plurality of compensation component mounting holes, and a plurality of mirror compensation components are provided and respectively installed in the plurality of compensation component mounting holes; each mirror compensation component includes a mirror compensation post, a spring, a compression pad and a fine adjustment screw, and the upper end of the fine adjustment screw is installed at the lower end of the compensation component mounting hole by means of thread engagement; the mirror compensation post, the spring and the compression pad are installed sequentially from top to bottom in the compensation component mounting hole above the fine adjustment screw, and the upper end of the mirror compensation post protrudes from the compensation component mounting hole under the action of the spring and abuts against the lower end face of the reflector body.

[0012] Preferably, the flexible linkage assembly includes a vertical flexible hinge one, a vertical flexible hinge two, a vertical flexible hinge three, and two linkage limiting assemblies; the mirror base and the base plate are each provided with three corresponding flexible hinge mounting holes, the vertical flexible hinge one, vertical flexible hinge two, and vertical flexible hinge three are vertically arranged and their upper and lower ends are respectively installed in the three flexible hinge mounting holes of the mirror base and the base plate; the two linkage limiting assemblies are respectively connected to and fixedly installed on the base plate on both sides of the mirror base of the vertical flexible hinge one, vertical flexible hinge two, or vertical flexible hinge three; each linkage limiting assembly includes a horizontal flexible connecting rod, a connecting rod pressure block, and a connecting rod fixing seat, the connecting rod fixing seat is fixedly installed on the base plate, the front end of the horizontal flexible connecting rod is fixed to the side end face of the mirror base, and its rear end is fixed to the connecting rod fixing seat by the connecting rod pressure block.

[0013] Preferably, the vertical installation of the vertical flexible hinge one, vertical flexible hinge two, and vertical flexible hinge three in the flexible hinge mounting holes of the mirror base and the base plate is assisted by an auxiliary installation component. The auxiliary installation component can achieve precise positioning of the mirror base and the base plate. The auxiliary installation component consists of auxiliary installation component one, auxiliary installation component two, and auxiliary installation component three, all of which are rod-shaped structures with ends. The mirror base is provided with three auxiliary component mounting holes. The front ends of auxiliary installation component one, auxiliary installation component two, and auxiliary installation component three are respectively provided through the three auxiliary component mounting holes on the mirror base from top to bottom, and their rear ends are fixed to the upper surface of the mirror base by screws. Their front ends are all exposed to the lower surface of the mirror base and are correspondingly embedded in the positioning holes provided in the base plate.

[0014] Preferably, the piezoelectric drive assembly includes a piezoelectric screw, a drive mounting base, and a preload spring. The drive mounting base is mounted on a base plate on the outer side of one end of the mirror mount. The piezoelectric screw is installed in a screw hole in the drive mounting base via a threaded connection, and the front end of the piezoelectric screw abuts against the outer side of one end of the mirror mount. The preload spring is located on one side of the piezoelectric screw, with one end fixed to the mirror mount and the other end fixed to the drive mounting base.

[0015] Preferably, the angle measuring component includes a grating encoder, an encoder mounting base, a grating ruler, and a grating ruler clamping plate. The grating ruler is fixedly mounted on the outer side of the other end of the mirror mount via the grating ruler clamping plate. The grating encoder is mounted on the base plate on the outer side of the other end of the mirror mount via the encoder mounting base, and the positions of the grating encoder and the grating ruler correspond.

[0016] Preferably, the two link limiting components are symmetrically arranged, and the axial extensions of the horizontal flexible links of the two link limiting components intersect at a point.

[0017] Preferably, the angle measuring components are provided in two symmetrical configurations.

[0018] The beneficial effects of this invention are as follows:

[0019] This invention discloses a high-precision horizontal deflection mirror clamping and adjustment mechanism. The mirror body is mounted on a mirror base via a mirror body clamping assembly, and its gravitational deformation is compensated by a mirror surface compensation assembly. The mirror base is mounted on a base plate via a flexible connecting rod assembly and rotated by a piezoelectric drive assembly. The rotation angle is measured by an angle measuring assembly. This mechanism effectively avoids clamping and thermal deformation of the mirror body and has high-precision and high-stability angle and attitude adjustment performance. It can achieve mirror clamping deformation of less than 100 nrad, mirror rotation attitude adjustment with a resolution of less than 70 nrad, and first-order modal stability of more than 200 Hz. Attached Figure Description

[0020] Figure 1 : A schematic diagram of the structure of the present invention;

[0021] Figure 2 Schematic diagram of the installation and adjustment structure of the mirror mount on the base plate of the present invention. Figure 1 ;

[0022] Figure 3 Schematic diagram of the installation and adjustment structure of the mirror mount on the base plate of the present invention. Figure 2 ;

[0023] Figure 4 : Schematic diagram of the ball-head hinge washer structure of the present invention;

[0024] Figure 5 : A schematic diagram of the flexible hinge structure one, flexible hinge structure two, or flexible hinge structure three of the present invention;

[0025] Figure 6 : A schematic diagram of the mounting and rotation angle measurement of the reflector body and the optimization of the connecting rod of the present invention;

[0026] Figure 7 : Figure 6 Sectional view along the AA direction;

[0027] Figure 8 : A schematic diagram of the structure of the mirror body of the present invention;

[0028] Figure 9 Figure 1 shows the simulation optimization results of the support point position of the mirror body of the present invention.

[0029] Figure 10 : The simulation optimization results of the two-dimensional parameters of the connecting rod position in this invention;

[0030] Figure 11 Photograph of the high-precision horizontal deflection mirror clamping and adjustment mechanism of the present invention;

[0031] Figure 12 Figure 1: Actual measurement results of the rotation angle of the high-precision horizontal deflection mirror clamping and adjustment mechanism of the present invention;

[0032] Figure 13 Photographs of the first-order actual modal measurement of the high-precision horizontal deflection mirror clamping and adjustment mechanism of the present invention;

[0033] Figure 14 Figure 1 shows the actual measurement results of the first-order actual mode of the high-precision horizontal deflection mirror clamping and adjustment mechanism of the present invention. Detailed Implementation

[0034] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0035] Example 1:

[0036] Reference Figure 1 , Figure 2 The present invention proposes a high-precision horizontal deflection mirror clamping and adjustment mechanism, including a mirror body 1, a mirror base 3 and a base plate 6. The mirror body 1 is mounted on the mirror base 3 by a mirror body clamping assembly 2 and its deformation under gravity is compensated by a mirror surface compensation assembly 5. The mirror base 3 is mounted on the base plate 6 by a flexible connecting rod assembly 7 and rotated by a piezoelectric drive assembly 4. The rotation angle is measured by an angle measuring assembly 8.

[0037] The present invention provides a high-precision horizontal deflection mirror clamping and adjustment mechanism, which can effectively avoid clamping and thermal deformation of the mirror body and has high precision and high stability angle and attitude adjustment performance. It can achieve mirror clamping deformation of less than 100 nrad, mirror rotation angle and attitude adjustment of less than 70 nrad resolution, and first-order mode stability of more than 200 Hz.

[0038] Example 2:

[0039] Reference Figure 1 , Figure 2 , Figure 3 The present invention proposes a high-precision horizontal deflection mirror clamping and adjustment mechanism, including a mirror body 1, a mirror base 3 and a base plate 6. The mirror body 1 is mounted on the mirror base 3 by a mirror body clamping assembly 2 and its deformation under gravity is compensated by a mirror surface compensation assembly 5. The mirror base 3 is mounted on the base plate 6 by a flexible connecting rod assembly 7 and rotated by a piezoelectric drive assembly 4. The rotation angle is measured by an angle measuring assembly 8.

[0040] The flexible linkage assembly 7 includes a vertical flexible hinge 1 701, a vertical flexible hinge 2 702, a vertical flexible hinge 3 703, and two linkage limiting assemblies. Both the mirror mount 3 and the base plate 6 have three corresponding flexible hinge mounting holes. The vertical flexible hinges 1 701, 2 702, and 3 703 are vertically arranged, with their upper and lower ends respectively installed in the three flexible hinge mounting holes on the mirror mount 3 and the base plate 6. The two linkage limiting assemblies are connected to and fixedly installed on the base plate 6 on both sides of the mirror mount 3 of the vertical flexible hinge 1 701, 2 702, or 3 703. Each link limiting assembly includes a horizontal flexible link 704, a link clamping block 705, and a link fixing seat 706. The link fixing seat 706 is fixedly mounted on the base plate 6. The front end of the horizontal flexible link 704 is fixed to the side end face of the mirror base 3, and its rear end is fixed to the link fixing seat 706 through the link clamping block 705. The two link limiting assemblies are symmetrically arranged, and the axial extensions of the horizontal flexible links 704 of the two link limiting assemblies intersect at a point (i.e., the rotation center 105).

[0041] The vertical installation of the vertical flexible hinges 701, 702, and 703 in the flexible hinge mounting holes of the mirror base 3 and the base plate 6 is assisted by the auxiliary mounting assembly 9, which enables precise positioning of the mirror base 3 and the base plate 6. The auxiliary mounting assembly 9 consists of auxiliary mounting component 901, auxiliary mounting component 902, and auxiliary mounting component 903, all of which are rod-shaped structures with ends. The mirror base 3 has three auxiliary mounting holes. The front ends of auxiliary mounting components 901, 902, and 903 are respectively inserted into the three auxiliary mounting holes on the mirror base 3 from top to bottom, and their rear ends are fixed to the upper surface of the mirror base 3 with screws. Their front ends protrude to the lower surface of the mirror base 3 and are correspondingly embedded in the positioning holes of the base plate 6.

[0042] Vertical flexible hinge 1 701, vertical flexible hinge 2 702, vertical flexible hinge 3 703 and horizontal flexible link 704 are all flexible links. They have a certain elasticity in the radial direction, which allows them to bend; however, they have no elasticity in the axial direction and no significant extension or contraction capacity.

[0043] The mirror mount 3 is mounted on the base plate 6 via the flexible connecting rod assembly 7, and requires the assistance of the auxiliary mounting assembly 9 for installation. The specific installation steps are as follows:

[0044] (1) Insert the three vertical flexible hinges 1 701, 2 vertical flexible hinges 702 and 3 vertical flexible hinges 703 into the three flexible hinge mounting holes corresponding to the base plate 6 in advance.

[0045] (2) The front ends of auxiliary mounting parts 901, 902 and 903 are respectively inserted through the three auxiliary mounting holes on the mirror base 3 from top to bottom, and their rear ends are fixed to the upper surface of the mirror base 3 by screws. Their front ends are exposed to the lower surface of the mirror base 3 and are correspondingly embedded in the positioning holes of the base plate 6 to achieve precise positioning between the mirror base 3 and the base plate 6.

[0046] (3) Push the three vertical flexible hinges 1 701, 2 vertical flexible hinges 702 and 3 vertical flexible hinges 703 upward into the three flexible hinge mounting holes corresponding to the mirror base 3, and lock the "C" shaped pressure groove at the flexible hinge mounting hole to lock the vertical flexible hinges 1 701, 2 vertical flexible hinges 702 and 3 vertical flexible hinges 703.

[0047] (4) Remove auxiliary mounting parts 1 901, 2 902 and 3 903. At this time, the mirror base 3 is supported on the base plate 6 by vertical flexible hinge 1 701, 2 702 and 3 703. At the same time, the three degrees of freedom of the mirror base 3, such as moving along the Z axis and rotating around the X and Y axes (Yaw, Roll), are constrained by the flexible linkage assembly 7.

[0048] (5) Based on the above implementation steps, two horizontal flexible connecting rods 704 are respectively installed into the semi-circular grooves of the two connecting rod fixing seats 706 and pressed by the connecting rod pressure block 705 to obtain two sets of connecting rod limiting assemblies with the same structure; the other end of the horizontal flexible connecting rod 704 in the above two connecting rod limiting assemblies is inserted into the corresponding hole on the side end face of the mirror base 3 and locked. The two horizontal flexible connecting rods 704 of the two sets of identical connecting rod limiting assemblies are at a certain angle, and their axial extension lines intersect at a point. Therefore, the mirror base 3 is constrained by the horizontal flexible connecting rod 704 along the X-axis and Y-axis. Thus, the mirror base 3 only retains the degree of freedom of rotation (Pitch) around the Z-axis.

[0049] Example 3:

[0050] Reference Figure 1 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7This invention proposes a high-precision horizontal deflection mirror clamping and adjustment mechanism, comprising a mirror body 1, a mirror base 3, and a base plate 6. The mirror body 1 is mounted on the mirror base 3 via a mirror body clamping assembly 2, and its deformation under gravity is compensated by a mirror surface compensation assembly 5. The mirror base 3 is mounted on the base plate 6 via a flexible connecting rod assembly 7 and rotated under the control of a piezoelectric drive assembly 4, with the rotation angle measured by an angle measuring assembly 8.

[0051] like Figure 3 , Figure 7 As shown, the lens mounting assembly 2 has three components, each including a mounting screw 201, a disc spring 202, a mounting washer 203, and a ball joint hinge washer 204. The upper surface of the lens base 3 has three identical hinge holes, each housing a first flexible hinge structure 301, a second flexible hinge structure 302, and a third flexible hinge structure 303, all identical in structure. The ball joint hinge washers 204 of the three lens mounting assemblies 2 are respectively installed in the first flexible hinge structure 301, the second flexible hinge structure 302, and the third flexible hinge structure 303 within the three hinge holes and are fixed to the lens base 3 by hinge fixing screws. The mirror body 1 is provided with three screw holes corresponding to the positions of the three hinge holes. The clamping screw 201 passes through the disc spring 202, the clamping washer 203 and the screw hole of the mirror body 1 in sequence and is screwed into the ball joint hinge washer 204 by means of thread engagement, thereby pressing the mirror body 1 onto the three ball joint hinge washers 204.

[0052] The screw hole on the bottom end face of the reflector body 1 is chamfered and makes line contact with the ball joint hinge washer 204. The ball joint hinge washer 204 has elastic deformation properties, giving it the freedom to rotate around the u-axis. Flexible hinge structure one 301, flexible hinge structure two 302, and flexible hinge structure three 303 all have the freedom to move along the u-axis and rotate around the w-axis. The two structures cooperate with each other, and the three sets of identical structures on the mirror base 3 are arranged at a 60° angle to support the reflector body 1. This achieves kinematic support and clamping of the reflector body 1, reducing the influence of clamping stress and thermal stress on the surface shape of the reflector under actual working conditions.

[0053] like Figure 4 , Figure 5 , Figure 7As shown, the ball joint hinge washer 204 consists of a ball joint 204-1 at the upper end, a hinge segment 204-3 in the middle, and a tubular fixing segment 204-4 at the bottom. A threaded washer center hole 204-2 is provided in the center of the ball joint 204-1, the hinge segment 204-3, and the tubular fixing segment 204-4. The hinge segment 204-3 of the ball joint hinge washer 204 has elastic deformation properties, which gives the ball joint hinge washer 204 a degree of freedom to rotate around the u-axis. Flexible hinge structure 1 301, flexible hinge structure 2 302, and flexible hinge structure 303 are all composed of a long strip-shaped thin hinge 302-1 and a tubular hinge base 302-2. The hinge base 302-2 is suspended in the center of the hinge hole. Two symmetrical thin hinges 302-1 are provided, with one end fixed to the outer wall of the hinge base 302-2 and the other end fixedly connected to the wall of the hinge hole. Through flexible deformation, the thin hinge 302-1 can give the tubular hinge base 302-2 the freedom to move along the u-axis and rotate around the w-axis and its own axis. To increase the deformation capacity of the thin hinge 302-1, the length of the thin hinge 302-1 can be increased. However, the diameter of the hinge hole cannot be too large. Therefore, two elongated grooves can be symmetrically arranged on the wall of the hinge hole. Then, one end of the thin hinge 302-1 is fixed to the outer wall of the hinge base 302-2, and the other end is fixedly connected to the bottom of the elongated groove.

[0054] The tubular fixing section 204-4 of the ball joint hinge washer 204 is inserted from top to bottom into the central hole 302-3 of the hinge base 302-2, so as to achieve the tight fit between the ball joint hinge washer 204 and the flexible hinge structure 1 301, flexible hinge structure 2 302 or flexible hinge structure 303; the hinge fixing screw is inserted from bottom to top into the hinge hole, and its upper end is fixed in the washer central hole 204-2 of the tubular fixing section 204-4 by thread engagement; the lower end of the clamping screw 201 is screwed into the washer central hole 204-2 of the ball head 204-1 of the ball joint hinge washer 204 by thread engagement; the chamfer on the bottom end face of the reflector body 1 makes line contact with the ball head 204-1 on the ball joint hinge washer 204.

[0055] The mirror body 1 is pressed into the threaded holes 204-2 of the three ball-head hinge washers 204 on the upper end face of the mirror base 3. The preload of the mirror body 1 is adjusted by controlling the compression of several disc springs 202 by controlling the depth of the screwing in.

[0056] See Figure 7The mirror mount 3 has several compensation component mounting holes, and several mirror compensation components 5 are provided and installed in the respective compensation component mounting holes. Each mirror compensation component 5 includes a mirror compensation post 501, a spring 502, a compression pad 503, and a fine-tuning screw 504. The upper end of the fine-tuning screw 504 is installed at the lower end of the compensation component mounting hole by means of a threaded engagement. The lower end of the compensation component mounting hole is provided with a fine-tuning internal thread, and the upper end of the fine-tuning screw 504 is also provided with a fine-tuning internal thread. The mirror compensation post 501, spring 502, and compression pad 503 are installed sequentially from top to bottom in the compensation component mounting hole above the fine-tuning screw 504, and the upper end of the mirror compensation post 501 protrudes from the compensation component mounting hole under the action of the spring 502 and abuts against the lower end face of the reflector body 1.

[0057] To reduce the influence of gravity on the surface shape of the mirror body 1, surface shape gravity compensation is performed along the length of the mirror body 1. The specific steps are as follows:

[0058] (1) The upper end of the fine adjustment screw 504 is installed at the lower end of the compensation component mounting hole of the mirror mount 3 by means of thread engagement, and the lower end of the fine adjustment screw 504 does not contact the base plate 6.

[0059] (2) Rotate the fine adjustment screw 504 and push the compression pad 503 to convert the screwing motion of the fine adjustment screw 504 into a translational motion along the axial direction.

[0060] (3) The spring 502 between the compression pad 503 and the mirror compensation column 501 generates a compensation force. The top of the mirror compensation column 501 rests on the bottom front side of the reflector body 1, thereby compensating for the deformation of the reflector body 1 under gravity. The position and number of mirror compensation components 5 are flexibly determined according to the length of the reflector body 1.

[0061] The mirror compensation component 5 enables the final clamping surface shape error of the reflector body 1 to be controlled within 100 nrad (rms).

[0062] Example 4:

[0063] Reference Figure 1-14 The present invention proposes a high-precision horizontal deflection mirror clamping and adjustment mechanism, including a mirror body 1, a mirror base 3 and a base plate 6. The mirror body 1 is mounted on the mirror base 3 by a mirror body clamping assembly 2 and its deformation under gravity is compensated by a mirror surface compensation assembly 5. The mirror base 3 is mounted on the base plate 6 by a flexible connecting rod assembly 7 and rotated by a piezoelectric drive assembly 4. The rotation angle is measured by an angle measuring assembly 8.

[0064] The flexible linkage assembly 7 includes a vertical flexible hinge 1 701, a vertical flexible hinge 2 702, a vertical flexible hinge 3 703, and two linkage limiting assemblies. Both the mirror mount 3 and the base plate 6 have three corresponding flexible hinge mounting holes. The vertical flexible hinges 1 701, 2 702, and 3 703 are vertically arranged, with their upper and lower ends respectively installed in the three flexible hinge mounting holes on the mirror mount 3 and the base plate 6. The two linkage limiting assemblies are connected to and fixedly installed on the base plate 6 on both sides of the mirror mount 3 of the vertical flexible hinge 1 701, 2 702, or 3 703. Each link limiting assembly includes a horizontal flexible link 704, a link clamping block 705, and a link fixing seat 706. The link fixing seat 706 is fixedly mounted on the base plate 6. The front end of the horizontal flexible link 704 is fixed to the side end face of the mirror base 3, and its rear end is fixed to the link fixing seat 706 through the link clamping block 705. The two link limiting assemblies are symmetrically arranged, and the axial extensions of the horizontal flexible links 704 of the two link limiting assemblies intersect at a point (i.e., the rotation center 105).

[0065] The vertical installation of the vertical flexible hinges 701, 702, and 703 in the flexible hinge mounting holes of the mirror base 3 and the base plate 6 is assisted by the auxiliary mounting assembly 9, which enables precise positioning of the mirror base 3 and the base plate 6. The auxiliary mounting assembly 9 consists of auxiliary mounting component 901, auxiliary mounting component 902, and auxiliary mounting component 903, all of which are rod-shaped structures with ends. The mirror base 3 has three auxiliary mounting holes. The front ends of auxiliary mounting components 901, 902, and 903 are respectively inserted into the three auxiliary mounting holes on the mirror base 3 from top to bottom, and their rear ends are fixed to the upper surface of the mirror base 3 with screws. Their front ends protrude to the lower surface of the mirror base 3 and are correspondingly embedded in the positioning holes of the base plate 6.

[0066] The piezoelectric drive assembly 4 includes a piezoelectric screw 401, a drive mounting base 402, and a preload spring 403. The drive mounting base 402 is mounted on the base plate 6 on the outer side of one end of the mirror base 3. The piezoelectric screw 401 is installed in the screw hole of the drive mounting base 402 by means of thread engagement, and the front end of the piezoelectric screw 401 abuts against the outer side of one end of the mirror base 3. The preload spring 403 is located on one side of the piezoelectric screw 401, with one end fixed to the mirror base 3 and the other end fixed to the drive mounting base 402.

[0067] The output end (front end) of the piezoelectric screw 401 makes point contact with the outer surface of one end of the mirror mount 3. To ensure tight contact with the mirror mount 3, a preload force is provided by a preload spring 403. The mirror mount 3, except for its rotation (pitch) around the Z-axis, has its other degrees of freedom constrained by the flexible linkage assembly 7. Furthermore, the rotation center 105 is constrained to be on the same plane as the optical surface 104 of the mirror body 1. Therefore, when the output end of the piezoelectric screw 401 outputs forward displacement, under the influence of point contact and degree-of-freedom constraints, the mirror mount 3 can be considered as a sinusoidal arm rotating around the rotation center 105, generating an angular displacement. Taking a 400mm mirror body 1 and its matching mirror mount 3 as an example, the minimum step length of the piezoelectric screw 401 is 23nm, and the sinusoidal arm of the mirror mount 3 is 310mm. Therefore, the minimum angular displacement generated is 75nrad.

[0068] Two symmetrical angle measuring components 8 are arranged on the other side of the mirror mount 3 to accurately measure the rotation angle of the mirror mount 3. The angle measuring component 8 includes a grating encoder 801, an encoder mounting base 802, a grating ruler 803, and a grating ruler clamping plate 804. The grating ruler 803 is perpendicular to the line connecting to the rotation center 105 of the mirror mount and is fixedly mounted on the outer surface of the other end of the mirror mount 3 through the grating ruler clamping plate 804. The grating encoder 801 is mounted on the base plate 6 on the outer side of the other end of the mirror mount 3 through the encoder mounting base 802, and the positions of the grating encoder 801 and the grating ruler 803 correspond. The relative movement of the grating ruler 803 can be measured by the grating encoder 801, and the rotation angle of the mirror mount 3 can be obtained by sine conversion.

[0069] The present invention produces a prototype of a high-precision horizontal deflection mirror clamping and adjustment mechanism, such as... Figure 9 As shown. The prototype is fixed on an air-bearing optical platform to isolate it from external vibrations. The mirror mount 3 is driven to rotate around the rotation center 105 via a piezoelectric screw 401, and the rotation angle of the mirror mount 3 is measured. The measurement results are shown in [reference needed]. Figure 10 As shown, the prototype can produce an angular displacement of less than 70 nrad.

[0070] Example 5:

[0071] Reference Figure 1-14 The present invention proposes a high-precision horizontal deflection mirror clamping and adjustment mechanism, including a mirror body 1, a mirror base 3 and a base plate 6. The mirror body 1 is mounted on the mirror base 3 by a mirror body clamping assembly 2 and its deformation under gravity is compensated by a mirror surface compensation assembly 5. The mirror base 3 is mounted on the base plate 6 by a flexible connecting rod assembly 7 and rotated by a piezoelectric drive assembly 4. The rotation angle is measured by an angle measuring assembly 8.

[0072] like Figure 3 , Figure 7As shown, the lens mounting assembly 2 has three components, each including a mounting screw 201, a disc spring 202, a mounting washer 203, and a ball joint hinge washer 204. The upper surface of the lens base 3 has three identical hinge holes, each housing a first flexible hinge structure 301, a second flexible hinge structure 302, and a third flexible hinge structure 303, all identical in structure. The ball joint hinge washers 204 of the three lens mounting assemblies 2 are respectively installed in the first flexible hinge structure 301, the second flexible hinge structure 302, and the third flexible hinge structure 303 within the three hinge holes and are fixed to the lens base 3 by hinge fixing screws. The mirror body 1 is provided with three screw holes corresponding to the positions of the three hinge holes. The clamping screw 201 passes through the disc spring 202, the clamping washer 203 and the screw hole of the mirror body 1 in sequence and is screwed into the ball joint hinge washer 204 by means of thread engagement, thereby pressing the mirror body 1 onto the three ball joint hinge washers 204.

[0073] The screw hole on the bottom end face of the reflector body 1 is chamfered and makes line contact with the ball joint hinge washer 204. The ball joint hinge washer 204 has elastic deformation properties, giving it the freedom to rotate around the u-axis. Flexible hinge structure one 301, flexible hinge structure two 302, and flexible hinge structure three 303 all have the freedom to move along the u-axis and rotate around the w-axis. The two structures cooperate with each other, and the three sets of identical structures on the mirror base 3 are arranged at a 60° angle to support the reflector body 1. This achieves kinematic support and clamping of the reflector body 1, reducing the influence of clamping stress and thermal stress on the surface shape of the reflector under actual working conditions.

[0074] like Figure 4 , Figure 5 , Figure 7 As shown, the ball joint hinge washer 204 consists of a ball joint 204-1 at the upper end, a hinge segment 204-3 in the middle, and a tubular fixing segment 204-4 at the bottom. A threaded washer center hole 204-2 is provided in the center of the ball joint 204-1, the hinge segment 204-3, and the tubular fixing segment 204-4. The hinge segment 204-3 of the ball joint hinge washer 204 has elastic deformation properties, which gives the ball joint hinge washer 204 a degree of freedom to rotate around the u-axis. Flexible hinge structure 1 301, flexible hinge structure 2 302, and flexible hinge structure 303 are all composed of a long strip-shaped thin hinge 302-1 and a tubular hinge base 302-2. The hinge base 302-2 is suspended in the center of the hinge hole. Two symmetrical thin hinges 302-1 are provided, with one end fixed to the outer wall of the hinge base 302-2 and the other end fixedly connected to the wall of the hinge hole. Through flexible deformation, the thin hinge 302-1 can give the tubular hinge base 302-2 the freedom to move along the u-axis and rotate around the w-axis and its own axis.

[0075] The tubular fixing section 204-4 of the ball joint hinge washer 204 is inserted from top to bottom into the central hole 302-3 of the hinge base 302-2, so as to achieve the tight fit between the ball joint hinge washer 204 and the flexible hinge structure 1 301, flexible hinge structure 2 302 or flexible hinge structure 303; the hinge fixing screw is inserted from bottom to top into the hinge hole, and its upper end is fixed in the washer central hole 204-2 of the tubular fixing section 204-4 by thread engagement; the lower end of the clamping screw 201 is screwed into the washer central hole 204-2 of the ball head 204-1 of the ball joint hinge washer 204 by thread engagement; the chamfer on the bottom end face of the reflector body 1 makes line contact with the ball head 204-1 on the ball joint hinge washer 204.

[0076] See Figure 7 The mirror mount 3 has several compensation component mounting holes, and several mirror compensation components 5 are provided and installed in the respective compensation component mounting holes. Each mirror compensation component 5 includes a mirror compensation post 501, a spring 502, a compression pad 503, and a fine-tuning screw 504. The upper end of the fine-tuning screw 504 is installed at the lower end of the compensation component mounting hole by means of a threaded engagement. The lower end of the compensation component mounting hole is provided with a fine-tuning internal thread, and the upper end of the fine-tuning screw 504 is also provided with a fine-tuning internal thread. The mirror compensation post 501, spring 502, and compression pad 503 are installed sequentially from top to bottom in the compensation component mounting hole above the fine-tuning screw 504, and the upper end of the mirror compensation post 501 protrudes from the compensation component mounting hole under the action of the spring 502 and abuts against the lower end face of the reflector body 1.

[0077] The flexible linkage assembly 7 includes a vertical flexible hinge 1 701, a vertical flexible hinge 2 702, a vertical flexible hinge 3 703, and two linkage limiting assemblies. Both the mirror mount 3 and the base plate 6 have three corresponding flexible hinge mounting holes. The vertical flexible hinges 1 701, 2 702, and 3 703 are vertically arranged, with their upper and lower ends respectively installed in the three flexible hinge mounting holes on the mirror mount 3 and the base plate 6. The two linkage limiting assemblies are connected to and fixedly installed on the base plate 6 on both sides of the mirror mount 3 of the vertical flexible hinge 1 701, 2 702, or 3 703. Each link limiting assembly includes a horizontal flexible link 704, a link clamping block 705, and a link fixing seat 706. The link fixing seat 706 is fixedly mounted on the base plate 6. The front end of the horizontal flexible link 704 is fixed to the side end face of the mirror base 3, and its rear end is fixed to the link fixing seat 706 through the link clamping block 705. The two link limiting assemblies are symmetrically arranged, and the axial extensions of the horizontal flexible links 704 of the two link limiting assemblies intersect at a point (i.e., the rotation center 105).

[0078] The vertical installation of the vertical flexible hinges 701, 702, and 703 in the flexible hinge mounting holes of the mirror base 3 and the base plate 6 is assisted by the auxiliary mounting assembly 9, which enables precise positioning of the mirror base 3 and the base plate 6. The auxiliary mounting assembly 9 consists of auxiliary mounting component 901, auxiliary mounting component 902, and auxiliary mounting component 903, all of which are rod-shaped structures with ends. The mirror base 3 has three auxiliary mounting holes. The front ends of auxiliary mounting components 901, 902, and 903 are respectively inserted into the three auxiliary mounting holes on the mirror base 3 from top to bottom, and their rear ends are fixed to the upper surface of the mirror base 3 with screws. Their front ends protrude to the lower surface of the mirror base 3 and are correspondingly embedded in the positioning holes of the base plate 6.

[0079] The piezoelectric drive assembly 4 includes a piezoelectric screw 401, a drive mounting base 402, and a preload spring 403. The drive mounting base 402 is mounted on the base plate 6 on the outer side of one end of the mirror base 3. The piezoelectric screw 401 is installed in the screw hole of the drive mounting base 402 by means of thread engagement, and the front end of the piezoelectric screw 401 abuts against the outer side of one end of the mirror base 3. The preload spring 403 is located on one side of the piezoelectric screw 401, with one end fixed to the mirror base 3 and the other end fixed to the drive mounting base 402.

[0080] Two symmetrical angle measuring components 8 are arranged on the other side of the mirror mount 3 to accurately measure the rotation angle of the mirror mount 3. The angle measuring component 8 includes a grating encoder 801, an encoder mounting base 802, a grating ruler 803, and a grating ruler clamping plate 804. The grating ruler 803 is perpendicular to the line connecting to the rotation center 105 of the mirror mount and is fixedly mounted on the outer surface of the other end of the mirror mount 3 through the grating ruler clamping plate 804. The grating encoder 801 is mounted on the base plate 6 on the outer side of the other end of the mirror mount 3 through the encoder mounting base 802, and the positions of the grating encoder 801 and the grating ruler 803 correspond. The relative movement of the grating ruler 803 can be measured by the grating encoder 801, and the rotation angle of the mirror mount 3 can be obtained by sine conversion.

[0081] like Figure 1 , Figure 8 As shown, the reflector body 1 adopts a three-point support structure, that is, it is mounted on the mirror base 3 through three mirror body clamping assemblies 2. The mirror base 3 has three hinge holes: a central through hole 102 and two side through holes 101 and 103 located on either side of the central through hole 102. The position of the central through hole 102 is relatively fixed. The surface shape of the optical surface 104 of the reflector body 1 is mainly affected by the spacing between the two side through holes 101 and 103 on the rear side of the reflector body 1. Based on the optimization principle of minimizing the gravitational deformation of the optical surface 104, the spacing L between the two support points (i.e., side through holes 101 and 103) on the rear side of the mirror body is optimized using finite element simulation. Figure 6 Taking the 400mm reflector body 1 as an example, see Figure 7 The optimization step size was set to 50mm, and simulation results showed that the gravitational deformation was minimal when L=350mm. In actual use, the spacing L varies with the mirror length.

[0082] like Figure 6 and Figure 10 As shown, to maximize the first-order natural modes of the mechanism, with the first-order natural modes as the objective, a two-dimensional traversal of two parameters that significantly affect the first-order natural modes is performed using finite element simulation: the angle θ between the two horizontal flexible links 704 and the eccentricity e of the rotation center 105 from the centerline of the reflector 1. Figure 4 Taking the structure shown as an example, the traversal results show that when θ=100° and e=80mm, the first-order natural mode of the mechanism is the highest, around 210Hz.

[0083] like Figure 13 As shown, based on the high-precision horizontal deflection mirror clamping and adjustment mechanism of the present invention, first-order actual modal measurement is performed by excitation method, the vibration sensor data is processed, and the final test results are shown in [reference]. Figure 14 The first resonance peak, or first-order natural frequency point, of the high-precision horizontal deflection mirror clamping and adjustment mechanism is located at 210Hz, which is consistent with the optimization results.

[0084] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A high-precision horizontal deflection mirror clamping and adjustment mechanism, characterized in that, It comprises a mirror body (1), a mirror seat (3) and a bottom plate (6), the mirror body (1) is installed on the mirror seat (3) through a mirror body clamping assembly (2) and is compensated for gravity deformation through a mirror surface compensation assembly (5); the mirror seat (3) is installed on the bottom plate (6) through a flexible connecting rod assembly (7) and is controlled to rotate through a piezoelectric drive assembly (4), and the rotation angle is measured through an angle measuring assembly (8).

2. The high-precision horizontal deflection mirror clamp adjustment mechanism according to claim 1, wherein The mirror body clamping assembly (2) is provided with three and comprises a clamping screw (201), a disc spring (202), a clamping gasket (203) and a ball head hinge gasket (204), the mirror seat (3) is provided with three hinge holes of the same structure on the upper end face and is respectively provided with flexible hinge structure one (301), flexible hinge structure two (302) and flexible hinge structure three (303) of the same structure, the ball head hinge gaskets (204) of the three mirror body clamping assemblies (2) are respectively installed in the flexible hinge structure one (301), the flexible hinge structure two (302) and the flexible hinge structure three (303) of the three hinge holes and are fixed with the mirror seat (3) through hinge fixing screws, the mirror body (1) is provided with three screw holes corresponding to the positions of the three hinge holes, the clamping screw (201) penetrates the disc spring (202), the clamping gasket (203) and the screw hole of the mirror body (1) in sequence and is screwed into the ball head hinge gasket (204) through threaded cooperation, so as to press the mirror body (1) tightly on the three ball head hinge gaskets (204).

3. The high-precision horizontal deflection mirror clamp adjustment mechanism according to claim 2, wherein The screw hole of the bottom end face of the mirror body (1) is provided with a chamfer and realizes linear contact with the ball head hinge gasket (204), the ball head hinge gasket (204) has elastic deformation performance, so that the ball head hinge gasket (204) has the freedom of rotating around the u-axis; the flexible hinge structure one (301), the flexible hinge structure two (302) and the flexible hinge structure three (303) all have the freedom of moving along the u-axis and rotating around the w-axis, and they are matched with each other and the three groups of structures of the same structure on the mirror seat (3) are arranged at an angle of 60°, which jointly support the mirror body (1) and realize the kinematic support clamping of the mirror body (1) to reduce the influence of clamping stress and thermal stress under actual working conditions on the mirror surface shape.

4. The high-precision horizontal deflection mirror clamp adjustment mechanism according to claim 3, wherein The ball head hinge gasket (204) is composed of a ball head (204-1) at the upper end, a hinge segment (204-3) in the middle and a tubular fixed segment (204-4) at the bottom, the ball head (204-1), the hinge segment (204-3) and the tubular fixed segment (204-4) are provided with a gasket center hole (204-2) with threads in the center, the hinge segment (204-3) of the ball head hinge gasket (204) has elastic deformation performance, so that the ball head hinge gasket (204) has the freedom of rotating around the u-axis; The flexible hinge structure one (301), the flexible hinge structure two (302) and the flexible hinge structure three (303) are all composed of a long strip-shaped sheet hinge (302-1) and a tubular hinge base (302-2) suspended in the center of the hinge hole, the sheet hinge (302-1) is provided with two symmetrical ones, one end of which is fixed on the outer wall of the hinge base (302-2), and the other end is fixedly connected to the hole wall of the hinge hole, the sheet hinge (302-1) can make the tubular hinge base (302-2) have the freedom of moving along the u-axis direction and rotating around the w-axis and its own axis through flexible deformation; The tubular fixed segment (204-4) of the ball head hinge gasket (204) is inserted into the base center hole (302-3) provided in the center of the hinge base (302-2) from top to bottom, so as to realize the compression and close fit of the ball head hinge gasket (204) with the flexible hinge structure one (301), the flexible hinge structure two (302) or the flexible hinge structure three (303); The hinge fixing screw is arranged in the hinge hole from bottom to top, and the upper end thereof is fixed in the gasket center hole (204-2) of the tubular fixed segment (204-4) through threaded cooperation, the lower end of the clamping screw (201) is screwed into the gasket center hole (204-2) of the ball head (204-1) of the ball head hinge gasket (204) through threaded cooperation, and the chamfer provided on the bottom end surface of the mirror body (1) realizes linear contact with the ball head (204-1) provided on the ball head hinge gasket (204).

5. The high precision horizontal deflection yoke clamp adjustment mechanism of claim 1 wherein, The mirror seat (3) is provided with a plurality of compensation assembly mounting holes, and the mirror surface compensation assemblies (5) are provided with a plurality of ones and are respectively mounted in the plurality of compensation assembly mounting holes; the mirror surface compensation assemblies (5) all include a mirror surface compensation column (501), a spring (502), a extrusion pad (503) and a fine adjustment screw (504), the upper end of the fine adjustment screw (504) is mounted in the lower end of the compensation assembly mounting hole through threaded cooperation; the mirror surface compensation column (501), the spring (502) and the extrusion pad (503) are sequentially mounted in the compensation assembly mounting hole above the fine adjustment screw (504) from top to bottom, and the upper end of the mirror surface compensation column (501) is exposed from the compensation assembly mounting hole under the action of the spring (502) and abuts against the lower end surface of the mirror body (1).

6. The high precision horizontal deflection yoke clamp adjustment mechanism of claim 1, wherein, The flexible linkage assembly (7) comprises vertical flexible hinge one (701), vertical flexible hinge two (702), vertical flexible hinge three (703) and two linkage limiting assemblies; The mirror seat (3) and the bottom plate (6) are each provided with three position corresponding flexible hinge mounting holes, the vertical flexible hinge one (701), the vertical flexible hinge two (702) and the vertical flexible hinge three (703) are vertically arranged and the upper and lower ends thereof are respectively installed in the three flexible hinge mounting holes of the mirror seat (3) and the bottom plate (6); Two linkage limiting assemblies are respectively connected with the mirror seat (3) on the two sides of the vertical flexible hinge one (701), the vertical flexible hinge two (702) or the vertical flexible hinge three (703) and are fixedly installed on the bottom plate (6); The linkage limiting assembly comprises a horizontal flexible linkage (704), a linkage pressing block (705) and a linkage fixing seat (706), the linkage fixing seat (706) is fixedly installed on the bottom plate (6), the horizontal flexible linkage (704) is fixed on the side end face of the mirror seat (3) at the front end thereof, and the rear end thereof is fixed on the linkage fixing seat (706) through the linkage pressing block (705); Two linkage limiting assemblies are symmetrically arranged, and the axial extension lines of the horizontal flexible linkages (704) of the two linkage limiting assemblies intersect at a point.

7. A high precision horizontal deflection mirror clamp adjustment mechanism as claimed in claim 6, wherein The vertical installation of the vertical flexible hinge one (701), the vertical flexible hinge two (702) and the vertical flexible hinge three (703) in the flexible hinge mounting holes of the mirror seat (3) and the bottom plate (6) is assisted by an auxiliary installation assembly (9), the auxiliary installation assembly (9) can realize the accurate positioning of the mirror seat (3) and the bottom plate (6); The auxiliary installation assembly (9) comprises an auxiliary installation piece one (901), an auxiliary installation piece two (902) and an auxiliary installation piece three (903) and is in the form of a rod with an end; The mirror seat (3) is provided with three auxiliary piece mounting holes, the front ends of the auxiliary installation piece one (901), the auxiliary installation piece two (902) and the auxiliary installation piece three (903) are respectively arranged in the three auxiliary piece mounting holes on the mirror seat (3) from top to bottom, and the rear ends thereof are fixed on the upper surface of the mirror seat (3) by screws, and the front ends thereof are exposed to the lower surface of the mirror seat (3) and embedded in the positioning holes provided on the bottom plate (6).

8. The high precision horizontal deflection mirror clamp adjustment mechanism of claim 6 wherein, The piezoelectric driving assembly (4) comprises a piezoelectric screw (401), a driving fixing seat (402) and a pre-tightening spring (403), the driving fixing seat (402) is installed on the bottom plate (6) outside one end of the mirror seat (3), the piezoelectric screw (401) is installed in the screw hole provided on the driving fixing seat (402) in a threaded cooperation mode, the front end of the piezoelectric screw (401) abuts against the outer side surface of one end of the mirror seat (3), and the pre-tightening spring (403) is arranged on one side of the piezoelectric screw (401) and one end thereof is fixed on the mirror seat (3) and the other end thereof is fixed on the driving fixing seat (402).

9. A high precision horizontal deflection mirror clamp adjustment mechanism as claimed in claim 8, wherein The angle measuring assembly (8) comprises a grating encoder (801), an encoder fixing base (802), a grating ruler (803) and a grating ruler pressing sheet (804), the grating ruler (803) is fixedly installed on the outer side of the other end of the mirror seat (3) through the grating ruler pressing sheet (804), the grating encoder (801) is installed on the bottom plate (6) of the outer side of the other end of the mirror seat (3) through the encoder fixing base (802), and the grating encoder (801) corresponds to the position of the grating ruler (803).

10. The high precision horizontal deflection mirror clamp adjustment mechanism of claim 9, wherein, The angle measuring assembly (8) is provided with two symmetrical ones.

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