Multi-circle seed crystal differential lifting device and method for enabling multi-circle seed crystal differential lifting

Abstract

The invention provides a multi-circle seed crystal differential lifting device and a method for differential lifting of multi-circle seed crystals. The device comprises a seed crystal clamping mechanism which is provided with a plurality of circles of chucks for clamping the seed crystal; the at least one lifting mechanism is connected with the at least one circle of chuck of the seed crystal clamping mechanism so as to drive the at least one circle of chuck to do lifting motion; and the control device is used for controlling the speed of the at least one lifting mechanism based on the diameter change obtained by the diameter of at least one crystal bar in the crystal bars generated by each circle of seed crystal clamped by the seed crystal clamping mechanism. According to the multi-circle seed crystal differential lifting device and the method for enabling the multi-circle seed crystal differential lifting, differential motion of the lifting speed is achieved in the mode that different circles of seed crystals generate relative motion, and then the purpose that the diameter of a drawn crystal bar meets the use requirement is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of artificial crystal preparation, in particular to a multi-coil seed crystal differential lifting device and a method for differentially lifting a multi-coil seed crystal. BACKGROUND

[0002] It is known that in the field of artificial crystal preparation, how to control the diameter of the drawn crystal rod to meet the use requirements is one of the key technologies. Taking the preparation of multi / single crystal silicon as an example, the columnar silicon rod with a diameter of 8mm-12mm is used in large quantities in the entire production process. In actual production process, it is found that the processing of the excess material, the silicon rod accidentally broken, and the broken material generated in the cutting and crushing process of the multi / single crystal silicon production enterprise is very cumbersome. Many enterprises directly discard the above-mentioned broken material or store it in the warehouse for a long time in order to save trouble. Some enterprises recycle the above-mentioned broken material, draw it into a silicon rod through a direct-lifting furnace, and then cut the silicon rod into a plurality of columnar silicon rods with a size of 8mm*8mm or 10mm*10mm through a multi-wire cutting machine. Such processing not only increases the production cost of the columnar silicon rod, but also increases the introduction of impurities in the cutting process, which not only reduces the product quality, but also causes great resource waste. Therefore, how to recycle the broken silicon material has become a long-term technical demand of the technical personnel in the field.

[0003] In order to solve the above technical problems, the technical personnel in the field put the broken silicon material into a crucible, and after the silicon material in the crucible is melted into a molten liquid, the upper shaft drives the seed crystal clamping device to descend. When the lower end of the seed crystal clamped by the seed crystal clamping device contacts and melts the molten liquid, the upper shaft drives the seed crystal clamping device to ascend. After the molten liquid ascends with the seed crystal, it gradually begins to condense as the temperature decreases. At this time, the new columnar crystal rod formed is the required silicon core. In the drawing of the crystal rod, the diameter of the drawn crystal rod is related to the drawing speed of the crystal rod and the temperature at the crystallization position, that is, the higher the temperature at the crystallization position, the smaller the diameter of the crystal rod under the condition that the drawing speed is unchanged, the lower the temperature at the crystallization position, the greater the viscosity of the molten liquid, and the stronger the ability of the molten liquid to follow the seed crystal. Therefore, under the condition that the drawing speed is unchanged, the larger the diameter of the crystal rod.

[0004] In the actual drawing process, since the heater is arranged at the periphery of the crucible, the temperature of the melt in the crucible decreases from outside to inside, that is, the temperature at the center of the crucible is the lowest, and the temperature is higher and higher as going outward (the temperature is higher and higher as going closer to the heater). In order to realize drawing of more numbers of crystal rods at the same time, at least two circles of chucking heads are often arranged on the seed crystal clamping device above the crucible, and then one seed crystal is clamped on each chucking head. At this time, the temperatures at the crystallization positions of the seed crystals in the inner and outer circles are different when the crystal rods are drawn (because the temperature of the melt in the crucible decreases from outside to inside). When the seed crystal chucking head with the existing structure is used to draw the crystal rods, especially when the multiple circles of chucking heads are arranged on the seed crystal chucking head with the existing structure, the temperatures at the crystallization positions of the seed crystals clamped on each circle of chucking heads are different, and then the diameters of the crystal rods drawn by each circle of chucking heads are different at the same drawing speed of the crystal rods. SUMMARY

[0005] In order to solve the above problems, the application provides a multi-circle seed crystal differential lifting device for drawing artificial crystal and a method for lifting the multi-circle seed crystal of an artificial crystal furnace, which can independently adjust the lifting speed of the seed crystals in the inner and outer circles of the seed crystal clamping device.

[0006] In order to achieve the above purpose, the application provides a multi-circle seed crystal differential lifting device for drawing artificial crystal, which comprises a seed crystal clamping mechanism with multiple circles of chucking heads for clamping seed crystals, at least one lifting mechanism connected with at least one circle of chucking heads of the seed crystal clamping mechanism to drive the at least one circle of chucking heads to perform lifting movement, and a control device for controlling the speed of the at least one lifting mechanism based on the diameter change of at least one crystal rod obtained from the diameters of the crystal rods generated by each circle of seed crystals clamped by the seed crystal clamping mechanism.

[0007] Further, the multi-circle seed crystal differential lifting device further comprises a rotating mechanism for driving each chucking head of the multiple circles of chucking heads to rotate.

[0008] Further, the seed crystal clamping mechanism further comprises an upper chucking head main body cover and a lower chucking head main body cover, and a cavity is formed between the upper chucking head main body cover and the lower chucking head main body cover.

[0009] Further, the rotating mechanism comprises an inner circle rotating shaft and an outer circle rotating shaft located at the outer edge of the inner circle rotating shaft, and the lifting mechanism comprises a lifting plate connected with at least one of the inner circle rotating shaft and the outer circle rotating shaft, and the lifting plate is used to drive at least one circle of rotating shafts of the inner circle rotating shaft and the outer circle rotating shaft to perform lifting movement.

[0010] Further, the lifting mechanism further comprises a lifting motor for providing a power source, a lifting screw connected with the lifting motor, and a lifting nut sleeved on the outer edge surface of the lifting screw and connected with the lifting plate.

[0011] Further, the lifting mechanism comprises a winding wheel mechanism connected with the lifting plate.

[0012] Further, the lifting mechanism further comprises a guide column arranged at the upper end of the upper cover of the chuck body and a support top plate arranged at the upper end of the guide column, wherein the lifting plate is arranged between the support top plate and the upper cover of the chuck body and is provided with a guide hole through which the guide column passes.

[0013] Further, the seed crystal clamping mechanism comprises a hollow outer ring chuck body and a hollow inner ring chuck body arranged in the middle inner hole of the outer ring chuck body, the outer ring chuck body is provided with an outer ring chuck for clamping the seed crystal, the inner ring chuck body is provided with an inner ring chuck for clamping the seed crystal, and the outer ring chuck body and the inner ring chuck body are arranged to be capable of relative lifting movement.

[0014] Further, the first rotating device of the rotating mechanism drives the outer ring chuck to rotate, and the second rotating device of the rotating mechanism drives the inner ring chuck to rotate.

[0015] Further, the lifting mechanism comprises a first lifting device connected with the inner ring chuck body and driving the inner ring chuck to lift, and a second lifting device connected with the outer ring chuck body and driving the outer ring chuck to lift up and down.

[0016] Further, the outer ring chuck body is arranged in a hollow circular structure, a circle of first rotating shaft through holes are arranged on the outer ring chuck body, a first rotating shaft is arranged in each first rotating shaft through hole, one of the first rotating shafts is connected with the power source, an outer ring gear is arranged on the outer edge surface of the first rotating shaft, and adjacent outer ring gears mesh with each other.

[0017] Further, the inner ring chuck body is arranged in a hollow circular structure, a middle rotating shaft through hole is arranged in the middle of the inner ring chuck body, and a circle of second rotating shaft through holes are arranged on the periphery of the middle rotating shaft through hole, a driving shaft connected with the power source is arranged in the middle rotating shaft through hole, a second rotating shaft is arranged in each second rotating shaft through hole, a driving gear is arranged on the outer edge surface of the driving shaft, a driven gear is respectively arranged on the outer edge surface of each second rotating shaft, and each driven gear meshes with the driving gear.

[0018] Further, the inner ring chuck body is arranged in a hollow circular structure, a circle of third rotating shaft through holes are arranged in the inner ring chuck body, a third rotating shaft is arranged in each third rotating shaft through hole, one of the third rotating shafts is connected with the power source, an inner ring gear is arranged on the outer edge surface of the third rotating shaft, and adjacent inner ring gears mesh with each other.

[0019] Further, the lifting mechanism comprises a nut arranged on the lifting plate and a rotating cylinder connected with the nut through the threads arranged on the outer edge surface, and the rotating cylinder is connected with the power source.

[0020] Furthermore, the lifting mechanism also includes: a guide column, configured to be received in a guide hole of the lifting plate; and a supporting top plate, disposed at the upper end of the guide column and located above the rotating cylinder.

[0021] Furthermore, the first lifting device includes: an inner ring chuck body lifting shaft, the first end of which is connected to the inner ring chuck body; a first lifting plate, which is connected to the second end of the inner ring chuck body lifting shaft; a first lifting nut, which is connected to the first lifting plate; and a first lifting screw, which is sleeved on the first lifting screw and moves along the first lifting screw, the first lifting screw being connected to a first power source.

[0022] Furthermore, the second lifting device includes: an outer ring chuck body lifting shaft, the first end of which is connected to the outer ring chuck body; a second lifting plate, which is connected to the second end of the outer ring chuck body lifting shaft; a second lifting nut, which is connected to the second lifting plate; and a second lifting screw, the second lifting nut being sleeved on the second lifting screw and moving along the second lifting screw, the second lifting screw being connected to a second power source.

[0023] Furthermore, the outer ring chuck main body lifting shaft has a hollow structure, the inner ring chuck main body lifting shaft is set in the inner hole of the outer ring chuck main body lifting shaft, and the first part of the inner ring chuck main body lifting shaft passes through the outer ring chuck main body lifting shaft and is located in the hollow structure of the outer ring chuck main body lifting shaft, while the second part of the inner ring chuck main body lifting shaft is located above the outer ring chuck main body lifting shaft.

[0024] According to another aspect of this application, an artificial crystal furnace for pulling artificial crystals is provided, the artificial crystal furnace including the above-described multi-ring seed crystal differential lifting device.

[0025] According to another aspect of this application, a method for differentially raising and lowering multiple seed crystals in an artificial crystal furnace is provided, characterized in that the method includes: measuring the diameter of at least one crystal rod of each ring of crystal rods generated by the multiple seed crystals, and determining whether the diameter has changed; and adjusting the raising and lowering speed of at least one raising mechanism according to the measured change in the diameter of at least one crystal rod in each ring of crystal rods, wherein the raising and lowering mechanism is connected to at least one seed crystal clamping mechanism that clamps one of the multiple seed crystals to drive the seed crystal clamping mechanism to perform raising and lowering movements.

[0026] According to another aspect of this application, a computer device is provided, including a memory and a processor, wherein the memory stores a computer program that can be run on the processor, and the processor executes the computer program to implement the steps of the above-described method for differentially raising and lowering multiple seed crystals in an artificial crystal furnace.

[0027] According to another aspect of this application, a computer-readable storage medium is provided, on which a computer program is stored, which, when executed by a processor, implements the steps of the method for differentially raising and lowering multiple seed crystals in an artificial crystal furnace as described above.

[0028] The multi-ring seed crystal differential lifting device and method of this application achieve differential lifting speed by causing relative motion between seed crystals of different rings, thereby achieving the purpose of ensuring that the diameter of the pulled crystal rod meets the usage requirements. Attached Figure Description

[0029] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0030] Figure 1 This is a schematic diagram of the structure of an artificial crystal pulling device according to an embodiment of the present invention;

[0031] Figure 2 This is a schematic diagram of the main structure of the multi-ring seed crystal differential lifting device according to the first embodiment of the present invention;

[0032] Figure 3 yes Figure 2 A top-view structural diagram;

[0033] Figure 4 It is along Figure 2 A schematic diagram of the cross-sectional structure cut by line AA;

[0034] Figure 5 It is along Figure 3 A schematic diagram of the cross-sectional structure taken by line BB;

[0035] Figure 6 This is a schematic diagram of the structure of the multi-ring seed crystal differential lifting device according to the second embodiment of the present invention;

[0036] Figure 7 This is a perspective view of the upper shaft lifting mechanism according to the second embodiment of the present invention;

[0037] Figure 8 This is a schematic diagram of the upper shaft lifting mechanism according to the second embodiment of the present invention;

[0038] Figure 9 This is a schematic diagram of the structure of the multi-ring seed crystal differential lifting device according to the third embodiment of the present invention;

[0039] Figure 10 It is along Figure 9 A schematic diagram of the cross-sectional structure cut by line CC;

[0040] Figure 11yes Figure 9 A schematic diagram of the right-side view structure;

[0041] Figure 12 yes Figure 9 A top-view structural diagram;

[0042] Figure 13 This is a schematic diagram of the structure of the multi-ring seed crystal differential lifting device according to the fourth embodiment of the present invention. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0044] According to this application, a multi-turn seed crystal differential lifting device for pulling artificial crystals is provided. The device includes: a seed crystal clamping mechanism having a multi-turn chuck for clamping seed crystals; at least one lifting mechanism connected to at least one turn of the chuck of the seed crystal clamping mechanism to drive the at least one turn of the chuck to perform lifting and lowering movements; and a control device for controlling the speed of the at least one lifting mechanism based on the diameter change obtained from the diameter of at least one crystal rod generated by each turn of seed crystals clamped by the seed crystal clamping mechanism.

[0045] The multi-ring seed crystal differential lifting device according to this application achieves differential lifting speed by causing relative motion between seed crystals of different rings, thereby ensuring that the diameter of the pulled crystal rod meets the usage requirements.

[0046] Figure 1 A schematic diagram of the structure of an artificial crystal pulling apparatus or an artificial crystal furnace according to an embodiment of the present invention is shown.

[0047] like Figure 1 As shown, this artificial crystal furnace can simultaneously pull multiple crystal rods. The artificial crystal furnace includes a secondary furnace chamber 1, a crystal cooling mechanism 8 with multiple pulling holes, a crystal cooling mechanism lifting device 2 for lifting the crystal cooling mechanism 8, a differential lifting device 3, crystal rods 4, lifting arms 5, valves 6, a diameter measuring instrument 7, a furnace cover 9, a main furnace chamber 10, a heater 11, molten metal 12, a crucible 13, and a control device.

[0048] A furnace cover 9 is positioned above the main furnace chamber 10, and a valve 6 is located above the furnace cover 9. An auxiliary furnace chamber 1 is positioned above the valve 6, and a crystal cooling mechanism lifting device 2 is installed on the auxiliary furnace chamber 1 for raising and lowering the crystal cooling mechanism 8. The crystal cooling mechanism lifting device 2 drives a lifting arm 5 to move up and down. The lifting arm 5 is connected to the crystal cooling mechanism 8. The lifting arm 5 can move the crystal cooling mechanism 8 up and down between the auxiliary furnace chamber 1 and the main furnace chamber 10. Below the crystal cooling mechanism 8, a crucible 13 is located inside the main furnace chamber 10. A heater 11 is located around the crucible 13. The upper shaft lifting device of the artificial crystal is connected to a differential lifting device 3 and drives the differential lifting device 3 to move up and down.

[0049] The diameter measuring instrument 7 can measure the diameter of at least one newly drawn crystal rod 4 on the outer or inner ring in real time during the drawing process. The control device can obtain the corresponding diameter change based on a comparison between the diameter of at least one crystal rod obtained by the diameter measuring instrument 7 and a parameter value, or based on a comparison of the diameters of at least one crystal rod at different positions measured by the diameter measuring instrument 7, and control the differential lifting device 3 through this diameter change. The differential lifting device 3, according to instructions from the control device, lifts or lowers the drawn crystal rods at different speeds in different rings, thereby obtaining crystal rods with the required diameter.

[0050] Below, for reference Figures 2 to 5 This application describes a differential lifting device according to a first embodiment.

[0051] As shown in the figure, the differential lifting device includes a seed crystal clamping device, a rotating mechanism, and a lifting mechanism. The seed crystal clamping device is used to clamp the seed crystal, the rotating mechanism is used to drive the clamped seed crystal to rotate, and the lifting mechanism is used to drive at least a part of the seed crystal clamping device to move up and down.

[0052] The seed crystal clamping device includes a chuck body upper cover 309, a chuck body lower cover 310, and a chuck 313. The chuck body upper cover 309 is provided above the chuck body lower cover 310, and the cavity between the chuck body lower cover 310 and the chuck body upper cover 309 forms a mounting cavity for accommodating the rotating mechanism.

[0053] The lower cover 310 of the chuck body has multiple through holes extending to the bottom of the lower cover 310. The rotating shafts in the rotating mechanism are respectively disposed within each through hole, and rotating wheels are provided on the outer edge of each rotating shaft. The rotating wheels are connected to each other and transmit power. Preferably, the rotating wheels are either gears or friction wheels. More preferably, the alternative structure to gears or friction wheels is a combination of a sprocket and a sprocket.

[0054] A chuck 313 is provided at the lower end of each rotating shaft. According to one embodiment of this application, the upper end of one of the rotating shafts is connected to a rotational power source as a drive shaft.

[0055] The following explanation uses the example of a rotating device with two rings of rotating shaft perforations. However, the number of rotating shaft perforations is not limited to this.

[0056] When the rotating shaft is perforated in two circles, the rotating mechanism includes an outer rotating shaft 311, a chuck 313, a rotary motor 314, a drive gear 317, an inner driven gear 318, an outer driven gear 319, an inner driven gear fixed shaft 320, and a drive gear drive shaft 321.

[0057] Multiple rotating shaft through holes are provided on the lower cover 310 of the chuck body. According to a preferred embodiment of this application, the multiple rotating shaft through holes are configured as follows: a central rotating shaft through hole is provided in the middle, and multiple rotating shaft through holes extending to the bottom of the lower cover 310 of the chuck body are provided around the central rotating shaft through hole.

[0058] A drive gear 321 is disposed within a central rotating shaft through hole. A drive gear 317 is fitted onto the outer edge of the drive gear 321. Outer rotating shafts 311 are disposed within outer rotating shaft through holes, and inner driven gear fixed shafts 320 are disposed within inner rotating shaft through holes. Outer driven gears 319 are fitted onto the outer edge of each outer rotating shaft 311, and inner driven gears 318 are fitted onto the outer edge of each inner driven gear fixed shaft 320. The outer driven gears 319 mesh with the inner driven gears 318, and the inner driven gears 318 mesh with the drive gear 317. A rotary motor 314 is connected to the upper end of the drive gear drive shaft 321. According to a preferred embodiment of this application, a rotary reducer 315 may be disposed between the drive gear drive shaft 321 and the rotary motor 314.

[0059] A chuck 313 (hereinafter referred to as the inner ring chuck or the outer ring chuck, respectively) is provided at the lower end of the inner ring driven gear fixed shaft 320 and the outer ring rotating shaft 311. According to a preferred embodiment of this application, a slag collection box 312 can be provided on the outer edge surface of the inner ring driven gear fixed shaft 320 and the outer ring rotating shaft 311 above the chuck 313. For example, the structure and function of the slag collection box 312 can be found in Chinese Patent No. 202222778062.8, filed on October 21, 2022, with publication number CN218262826U, entitled "A Slag Collection Device for Seed Crystal Chucks Used for Simultaneous Pulling of Multiple Crystals".

[0060] According to this application, the lifting mechanism includes a guide plate 301, a support sleeve 302, a lifting motor 303, a lifting reducer 304, a support top plate 305, a guide column 306, a lifting screw 307, a lifting plate 308, and a lifting nut 316.

[0061] A support sleeve 302 is provided on the upper cover 309 of the chuck body. According to one embodiment of this application, a transition mounting seat 322 can be provided between the support sleeve 302 and the upper cover 309 of the chuck body. By providing the transition mounting seat 322, installation space can be reserved for the rotary reducer 315.

[0062] The support sleeve 302 is sleeved around the rotary motor 314, and a guide plate 301 for guiding is provided at the upper end of the support sleeve 302. The two ends of the guide plate 301 are respectively connected to the guide steel wires inside the furnace, and an upper shaft connecting seat 337 is provided on the upper part of the guide plate 301.

[0063] At least two guide posts 306 are provided on the upper cover 309 of the chuck body. A support top plate 305 is provided at the upper end of the guide posts 306. A lifting plate 308 is provided between the support top plate 305 and the upper cover 309 of the chuck body. At least two guide holes are provided on the lifting plate 308, and the guide holes are respectively fitted onto the guide posts 306.

[0064] The lifting mechanism includes at least one lifting plate 308. The lifting plate 308 can be located above the upper cover 309 of the chuck body or below the lower cover 310 of the chuck body. Each lifting plate 308 is connected to a rotating shaft and a lifting power source, which drives the lifting plate 308 to move up and down.

[0065] At least one lifting screw 307 is provided between the supporting top plate 305 and the upper cover 309 of the clamp body. A lifting nut 316 is sleeved on the outer edge of the lifting screw 307, and the lifting nut 316 is connected to the lifting plate 308. When the lifting screw 307 rotates, since the lifting screw 307 only rotates and does not rise or fall, the lifting nut 316 moves up and down, thereby driving the lifting plate 308 to move up and down. The upper end of the lifting screw 307 is connected to a lifting motor 303, which is located on the top of the supporting top plate 305. According to one embodiment of this application, a lifting reducer 304 can be provided between the lifting screw 307 and the lifting motor 303.

[0066] According to another embodiment of this application, the structures of the lifting motor 303, lifting reducer 304, lifting screw 307, and lifting nut 316 in the above example can be replaced with a winding wheel mechanism. The winding wheel mechanism is fixed on the top support plate 305, and the flexible shaft in the winding wheel mechanism passes through the top support plate 305 and connects to the lifting plate 308. Preferably, the specific structure of the winding wheel mechanism can be found in Chinese Invention Patent No. 201720169053.5, filed on February 24, 2017, with publication number CN206494981U, entitled "A Lifting Mechanism in an Upper Shaft Lifting Device for an Artificial Crystal Furnace".

[0067] To improve the stability of lifting, whether you choose the lifting motor 303, lifting reducer 304, lifting screw 307, and lifting nut 316, or the roller mechanism, it is best to set up two sets of these lifting devices, and the two sets should be set symmetrically, or you can set up three or more sets.

[0068] According to this embodiment of the application, the upper shaft lifting device drives the differential lifting device 3 to lift and lower. The diameter measuring instrument 7 detects the diameter of at least one newly pulled crystal rod 4 on the outer or inner ring in real time. When a change in the diameter of the crystal rod 4 is detected, the lifting motor 303 in the lifting mechanism of the differential lifting device 3 is activated, and the lifting motor 303 drives the lifting plate 308 to move upward or downward. The lifting plate 308 drives the inner ring driven gear fixing shaft 320 of the inner ring or the outer ring rotating shaft 311 of the outer ring to move upward or downward, so that the inner ring driven gear fixing shaft 320 of the inner ring and the outer ring rotating shaft 311 of the outer ring generate relative movement, thereby realizing the differential lifting and lowering of the inner ring chuck and the outer ring chuck. When the inner ring driven gear fixing shaft 320 or the outer ring rotating shaft 311 of the outer ring moves upward or downward, the gears do not move up and down along the inner ring driven gear fixing shaft 320 or the outer ring rotating shaft 311 of the outer ring, and the gears are in a meshing state to ensure normal power transmission.

[0069] Taking the lifting and lowering of the outer ring rotating shaft 311 in the first embodiment as an example, the specific structure of the outer ring driven gear 319 not moving up and down along the outer ring rotating shaft 311, while the outer ring rotating shaft 311 can move up and down, is explained.

[0070] The outer ring driven gear 319 has outwardly extending fixed shafts at its upper and lower ends, respectively. Rotary bearings are then installed on the outer edges of these fixed shafts. The outer edges of these bearings are respectively located within the upper cover 309 and the lower cover 310 of the chuck body (specifically as follows). Figure 4 (As shown). This ensures the rotation of the outer ring driven gear 319. The outer ring driven gear 319 is connected to the outer ring rotating shaft 311 by a key, and the outer ring rotating shaft 311 transmits power to the outer ring driven gear 319 by the key.

[0071] To prevent the outer ring driven gear 319 from moving up and down along the outer ring rotating shaft 311, while allowing the outer ring rotating shaft 311 to move up and down, a long key is provided on the outer edge surface of the outer ring rotating shaft 311. This long key is accommodated in the keyway of the outer ring driven gear 319. This ensures that when the outer ring rotating shaft 311 moves up and down within the hole in the middle of the outer ring driven gear 319, the outer ring rotating shaft 311 is always engaged with the outer ring driven gear 319, thus ensuring that rotational power is always transmitted to the outer ring driven gear 319.

[0072] The structure according to the first embodiment enables differential lifting of the inner and outer chucks.

[0073] Below, for reference Figures 6 to 8 This application describes a differential lifting device according to a second embodiment of the present application.

[0074] The difference between the differential lifting device of this embodiment and the differential lifting device of the first embodiment is that: the seed crystal clamping device of the first embodiment is an integral structure, while the seed crystal clamping device of this embodiment is a separate structure including the inner and outer ring chuck bodies; in the second embodiment, the inner ring chuck of the inner ring chuck body and the outer ring chuck body are rotated separately by mutually independent rotating mechanisms (e.g., a first rotating mechanism and a second rotating mechanism), and the inner ring chuck of the inner ring chuck body and the outer ring chuck body are rotated separately by mutually independent lifting mechanisms (e.g., such as...). Figure 7 Alternatively, the upper shaft lifting mechanism 349 shown in Figure 8 can be used to lift the inner ring chuck body and the outer ring chuck body respectively. In the first embodiment, the differential lifting device is driven by the upper shaft lifting device, and the lifting mechanism of the differential lifting device is used to adjust the lifting speed of the inner ring chuck and the outer ring chuck.

[0075] In other words, in the first embodiment, the lifting speed of the inner and outer chucks is adjusted by the lifting mechanism of the differential lifting device, which is driven by the upper shaft lifting device. In the second embodiment, the differential lifting device adjusts the lifting speed of the inner and outer chuck bodies separately by setting independent lifting mechanisms.

[0076] Specifically, as shown in the figure, the seed crystal clamping device includes an inner chuck body 323 and an outer chuck body 324. Each of the inner chuck body 323 and the outer chuck body 324 is equipped with a rotating mechanism, meaning they are independent rotating mechanisms.

[0077] The inner chuck body 323 and the outer chuck body 324 are each connected to an upper shaft or flexible shaft (e.g., Figure 6 The two shafts shown at the top, Figure 7 The two shafts shown at the bottom. Figure 8 (One shaft is shown at the bottom). Each upper shaft of the inner ring chuck body 323 and the outer ring chuck body 324 is connected to an upper shaft lifting mechanism 349, as shown in the figure. Figure 7 or Figure 8 The lower shaft connection of the upper shaft lifting mechanism 349 in the middle Figure 6 The upper shaft shown in the figure allows the inner ring chuck body 323 and the outer ring chuck body 324 to rise and fall respectively under the drive of their respective upper shaft lifting mechanisms 349.

[0078] According to one embodiment of this application, an upper shaft lifting mechanism 349 (i.e., a lifting mechanism) is disposed above the auxiliary furnace chamber 1, and the upper shaft passes through the upper top plate of the auxiliary furnace chamber 1 and extends into the furnace body. Differential lifting of the inner ring chuck body 323 and the outer ring chuck body 324 is achieved by controlling the lifting speed of each set of upper shaft lifting mechanisms 349. Preferably, the upper shaft lifting mechanism can be the upper shaft lifting device described in Chinese invention patent No. 201720169053.5 (application date: February 24, 2017; publication number: CN206494981U; patent title: An Upper Shaft Lifting Device for an Artificial Crystal Furnace).

[0079] like Figure 6 As shown, it also illustrates a specific embodiment of the inner ring chuck body 323.

[0080] The inner ring chuck body 323 is a hollow circular structure with a hollow structure formed therein. A central rotating shaft through hole is provided in the center of the inner ring chuck body 323, and a ring of rotating shaft through holes is provided around the central rotating shaft through hole. An inner ring chuck drive gear drive shaft 333 is disposed within the central rotating shaft through hole, and an inner ring chuck drive gear 332 is sleeved on the outer edge surface of the inner ring chuck drive gear drive shaft 333. The inner ring chuck drive gear 332 is connected to the inner ring chuck drive gear drive shaft 333 via a key.

[0081] Furthermore, an inner ring chuck driven gear mounting shaft 329 is provided in each rotating shaft through hole, and an inner ring chuck driven gear 331 is sleeved on the outer edge surface of each inner ring chuck driven gear mounting shaft 329. The inner ring chuck driven gear 331 and the inner ring chuck driven gear mounting shaft 329 are connected by a key, and each inner ring chuck driven gear 331 meshes with the inner ring chuck driving gear 332.

[0082] The upper end of the inner ring chuck drive shaft 333 extends upward beyond the upper surface of the inner ring chuck body 323. The upper end of the inner ring chuck drive shaft 333 is connected to a rotary motor 314, which transmits rotational power to the connected inner ring chuck drive shaft 333. The inner ring chuck drive shaft 333 transmits power to the inner ring chuck drive gear 332 via a flat key. The inner ring chuck drive gear 332 then transmits power to the inner ring chuck driven gear 331, thereby enabling the rotation of all inner ring chuck driven gears 331.

[0083] An inner ring chuck 313 is provided at the lower end of each inner ring chuck driven gear mounting shaft 329, and each inner ring chuck 313 clamps a seed crystal. Then, the inner ring chuck driven gear mounting shaft 329 drives the inner ring chuck 313 to rotate.

[0084] Preferably, in order to ensure the smooth rotation of the inner ring chuck driven gear 331, bearings 327 can be provided at the upper and lower ends of the inner ring chuck driven gear mounting shaft 329 respectively.

[0085] According to another specific embodiment of this application, the inner ring chuck body 323 can also be configured as follows.

[0086] The inner ring chuck body 323 is a hollow circular structure with a hollow structure formed therein. A ring of rotating shaft through holes is provided in the middle of the inner ring chuck body 323, and an inner ring chuck driven gear mounting shaft 329 is respectively installed in each rotating shaft through hole. An inner ring chuck driven gear 331 is sleeved on the outer edge surface of each inner ring chuck driven gear mounting shaft 329. The inner ring chuck driven gear 331 and the inner ring chuck driven gear mounting shaft 329 are connected by a key. The inner ring chuck driven gear 331 mesh in pairs. The upper end of one of the inner ring chuck driven gear mounting shafts 329 extends upward beyond the top of the inner ring chuck body 323, and the upper end of the inner ring chuck driven gear mounting shaft 329 is connected to a rotary motor 314, thus the inner ring chuck driven gear mounting shaft 329 serves as a drive shaft. The rotary motor 314 rotates and transmits rotational power to the inner ring chuck driven gear mounting shaft 329 connected to it. The inner ring chuck driven gear mounting shaft 329 transmits power to the inner ring chuck driven gear 331 through a flat key. The inner ring chuck driven gear 331 transmits power one by one to the inner ring chuck driven gear 331 that meshes with it, thereby realizing the rotation of all the inner ring chuck driven gears 331.

[0087] An inner ring chuck 313 is provided at the lower end of each inner ring chuck driven gear mounting shaft 329, and the inner ring chuck 313 clamps a seed crystal respectively. Preferably, in order to ensure the smooth rotation of the inner ring chuck driven gear 331, bearings 327 can be provided at the upper and lower ends of the inner ring chuck driven gear mounting shaft 329 respectively.

[0088] like Figure 6 As shown, it illustrates a specific embodiment of the outer ring chuck body 324.

[0089] The outer ring chuck body 324 is a hollow annular structure with a hollow structure formed therein, and the inner ring chuck body 323 is disposed in the inner hole in the middle of the outer ring chuck body 324. The outer ring chuck body 324 and the inner ring chuck body 323 can generate relative movement.

[0090] A ring of rotating shaft through holes is provided in the middle of the outer ring chuck body 324. An outer ring chuck drive gear drive shaft 328 is installed in one of the rotating shaft through holes, and outer ring chuck driven gear mounting shafts 325 are installed in the remaining rotating shaft through holes. An outer ring chuck drive gear 330 is sleeved on the outer edge surface of the outer ring chuck drive gear drive shaft 328, and an outer ring chuck driven gear 326 is sleeved on the outer edge surface of each outer ring chuck driven gear mounting shaft 325. The outer ring chuck drive gear 330 meshes with its adjacent outer ring chuck driven gear 326, and the outer ring chuck driven gear 326 transmits rotational power through meshing with its adjacent outer ring chuck driven gear 326.

[0091] The upper end of the outer ring chuck drive shaft 328 extends upward beyond the outer ring chuck body 324. The upper end of the outer ring chuck drive shaft 328 is connected to a rotary motor 314. The rotary motor 314 rotates, thereby transmitting rotational power to the outer ring chuck drive shaft 328 connected to it. The outer ring chuck drive shaft 328 transmits power to the outer ring chuck drive gear 330 through a flat key. The outer ring chuck drive gear 330 transmits power to the outer ring chuck driven gear 326 meshing with it, thereby realizing the rotation of all outer ring chuck driven gears 326.

[0092] Outer ring chucks 313 are respectively provided at the lower end of the outer ring chuck drive gear drive shaft 328 and each outer ring chuck driven gear mounting shaft 325, and each outer ring chuck 313 clamps a seed crystal. Then, the outer ring chuck drive gear drive shaft 328 and each outer ring chuck driven gear mounting shaft 325 drive the outer ring chuck 313 to rotate.

[0093] Preferably, in order to ensure smooth rotation, bearings 327 can be provided at the upper and lower ends of the outer ring chuck drive gear drive shaft 328 and the outer ring chuck driven gear mounting shaft 325, respectively.

[0094] According to this embodiment, the diameter measuring instrument 7 detects the diameter of at least one newly pulled crystal rod 4 on the outer or inner ring in real time. When a change in the diameter of the crystal rod 4 is detected, the pulling speed of the two sets of upper shaft lifting mechanisms is controlled to make the pulling speeds of the two sets of upper shaft lifting mechanisms different, thereby causing relative movement between the inner ring chuck body 323 and the outer ring chuck body 324. By using different lifting speeds between the inner ring chuck body 323 and the outer ring chuck body 324, differential lifting of the inner ring chuck body 323 and the outer ring chuck body 324 is achieved, thereby ensuring that the diameters of the crystal rods pulled by the inner and outer rings meet the requirements.

[0095] Below, for reference Figures 10 to 12 This application describes a differential lifting device according to a third embodiment.

[0096] The differential lifting device according to this embodiment differs from the differential lifting device of the first embodiment in that the specific structure of the lifting mechanism is different. The seed crystal clamping device and rotating mechanism, which are the same as those in the first embodiment, are omitted in the following description.

[0097] The lifting structure according to this embodiment includes a lifting motor 303, a lifting reducer 304, a supporting top plate 305, a guide column 306, a lifting plate 308, a guide wheel mounting seat 334, a guide wheel 335, a rotating cylinder 336, an upper shaft connecting seat 337, a nut 338, and a connecting cylinder 339.

[0098] A connecting cylinder 339 is sleeved around the rotary motor 314. A rotating cylinder 336 is sleeved around the connecting cylinder 339. The outer edge of the rotating cylinder 336 is provided with external threads. At least two guide posts 306 are provided on the top cover 309 of the chuck body. A support plate 305 is provided at the upper end of the guide posts 306, and the support plate 305 is located above the rotating cylinder 336. Guide wheel mounting seats 334 are provided at both ends of the support plate 305. A guide wheel 335 is provided in each guide wheel mounting seat 334, and each guide wheel 335 is connected to a guide wire rope inside the furnace.

[0099] The upper end of the rotating cylinder 336 is provided with a rotating connecting shaft, which is connected to a lifting motor 303 mounted on the supporting top plate 305. Preferably, a lifting reducer 304 is provided between the rotating connecting shaft and the lifting motor 303.

[0100] A lifting plate 308, which can be raised and lowered, is provided between the supporting top plate 305 and the upper cover 309 of the chuck body. The lifting plate 308 has at least two guide holes, in which guide posts 306 are accommodated. A nut 338 is provided on the lifting plate 308, and the nut 338 is threaded to the external thread on the outer edge of the rotating cylinder 336. The lifting plate 308 is connected to an outer ring rotating shaft 311 or an inner ring driven gear fixed shaft 320, and the lifting plate 308 drives the outer ring rotating shaft 311 or the inner ring driven gear fixed shaft 320 to achieve raising and lowering.

[0101] Preferably, the lifting motor 303, lifting reducer 304, support top plate 305, guide column 306, lifting plate 308, guide wheel mounting seat 334, guide wheel 335, rotating cylinder 336, upper shaft connecting seat 337, nut 338 and connecting cylinder 339 can be arranged above the upper cover 309 of the chuck body or below the lower cover 310 of the chuck body.

[0102] Below, for reference Figure 13 This application describes a differential lifting device according to a fourth embodiment.

[0103] The differential lifting device according to this embodiment differs from the differential lifting device of the second embodiment in that the specific structure of the lifting mechanism is different. The seed crystal clamping device and rotating mechanism, which are the same as those in the second embodiment, are omitted in the following description.

[0104] Similar to the structure according to the third embodiment, the seed crystal clamping device includes an inner ring chuck body 323 and an outer ring chuck body 324. The inner ring chuck body 323 and the outer ring chuck body 324 are each equipped with a set of rotating mechanisms, meaning they are independent rotating mechanisms. The inner ring chuck body 323 and the outer ring chuck body 324 are each connected to a lifting mechanism, meaning there are two sets of lifting mechanisms (i.e., a first lifting device and a second lifting device). The two sets of lifting mechanisms are respectively connected to the inner ring chuck body 323 and the outer ring chuck body 324, and the specific structure of the lifting mechanisms is as follows... Figure 12 As shown.

[0105] The first lifting device includes a lifting motor 303, a lifting reducer 304, a lifting screw 307, a lifting plate 308, a lifting nut 316, and an inner ring chuck main body lifting shaft 340.

[0106] The lifting reducer 304 is installed on top of the auxiliary furnace chamber 1. The lifting reducer 304 is connected to the lifting motor 303. The power output shaft of the lifting reducer 304 is connected to the lifting screw 307. A lifting nut 316 that moves up and down is sleeved on the outer edge of the lifting screw 307. During operation, the lifting screw 307 only rotates without moving up and down, while the lifting nut 316 moves up and down. The lifting nut 316 is connected to the lifting plate 308. The end of the lifting plate 308 is connected to the upper end of the inner ring chuck body lifting shaft 340, and the lower end of the inner ring chuck body lifting shaft 340 is connected to the upper part of the inner ring chuck body 323, driving the inner ring chuck body 323 to move up and down.

[0107] The second lifting device includes a lifting motor 303, a lifting reducer 304, a lifting screw 307, a lifting plate 308, a lifting nut 316, and an outer ring chuck main body lifting shaft 341.

[0108] The lifting reducer 304 is installed on top of the auxiliary furnace chamber 1. The lifting reducer 304 is connected to the lifting motor 303. The power output shaft of the lifting reducer 304 is connected to the lifting screw 307. A lifting nut 316 that moves up and down is sleeved on the outer edge of the lifting screw 307. During operation, the lifting screw 307 only rotates without moving up and down, while the lifting nut 316 moves up and down. The lifting nut 316 is connected to the lifting plate 308. The end of the lifting plate 308 is connected to the upper end of the lifting shaft 341 of the outer ring chuck body, and the lower end of the lifting shaft 341 of the outer ring chuck body is connected to the upper part of the outer ring chuck body 324, driving the outer ring chuck body 324 to move up and down.

[0109] Therefore, by controlling the lifting speeds of the first lifting device and the second lifting device respectively, a speed difference is generated between the two lifting mechanisms, thereby achieving differential lifting of the inner ring chuck body 323 and the outer ring chuck body 324.

[0110] Preferably, the outer ring chuck main body lifting shaft 341 has a hollow structure, and the inner ring chuck main body lifting shaft 340 is disposed in the inner hole in the middle of the outer ring chuck main body lifting shaft 341. The two can be arranged concentrically or eccentrically, and the form is not limited. The upper end (or the first part) of the inner ring chuck main body lifting shaft 340 passes through the upper end of the outer ring chuck main body lifting shaft 341 and is located in the hollow structure of the outer ring chuck main body lifting shaft 341, and the inner ring chuck main body lifting shaft 340 is located above the outer ring chuck main body lifting shaft 341.

[0111] Preferably, a cooling device can be provided to cool the inner ring chuck body lifting shaft 340 and the outer ring chuck body lifting shaft 341.

[0112] For example, according to one embodiment of this application, a first cooling medium channel 345 can be provided on the inner ring chuck body lifting shaft 340, and a cooling medium inlet 348 and a cooling medium diversion hole 343 communicating with the first cooling medium channel 345 are respectively provided on the outer edge surface of the inner ring chuck body lifting shaft 340. A second cooling medium channel 344 is formed through the gap between the inner ring chuck body lifting shaft 340 and the outer ring chuck body lifting shaft 341. The second cooling medium channel 344 is connected to the first cooling medium channel 345 through the cooling medium diversion hole 343. A cooling medium outlet 346 communicating with the second cooling medium channel 344 is provided on the outer edge surface of the outer ring chuck body lifting shaft 341.

[0113] Preferably, in order to ensure the sealing of the second channel 344 for the cooling medium, an upper sealing shaft seal 347 and a lower sealing shaft seal 342 are respectively fitted onto the upper and lower ends of the outer edge surface of the inner ring chuck body lifting shaft 340. The outer edge surfaces of the upper sealing shaft seal 347 and the lower sealing shaft seal 342 are in contact with the inner edge surface of the outer ring chuck body lifting shaft 341.

[0114] According to this application, the lifting mechanism for raising and lowering the crystal rod held by the chuck is not limited to the structure described above; any structure capable of raising and lowering the crystal rod held by the chuck is applicable. Furthermore, according to this application, the lifting structure can be positioned above or below the seed crystal holding device.

[0115] The process of drawing crystal rods using the artificial crystal drawing apparatus or artificial crystal furnace of this application will be described below.

[0116] The raw material is placed into crucible 13 in the crystal growth furnace, and the power is turned on, so heater 11 heats crucible 13. After heater 11 melts the silicon material in crucible 13 into molten liquid 12, the upper shaft lifting device drives the differential lifting device 3 to descend. The lower end of the seed crystal clamped on the differential lifting device 3 passes through the pulling hole on the crystal cooling mechanism 8 and comes into contact with the molten liquid 12 in crucible 13. After the lower end of the seed crystal melts and fuses with the molten liquid 12, the differential lifting device 3 is slowly raised, and the seed crystal is slowly raised by the differential lifting device 3. At this time, the molten liquid rises with the seed crystal. As the molten liquid moves upward with the seed crystal and passes through the crystal pulling hole on the crystal cooling mechanism 8, it will gradually begin to crystallize as the temperature decreases.

[0117] During the drawing process, the diameter measuring instrument 7 detects the diameter of at least one newly drawn crystal rod 4 on the outer or inner ring in real time. When a change in the diameter of the crystal rod 4 is detected, the control device controls the lifting mechanism in the differential lifting device 3 to cause relative movement between the inner and outer ring clamps (e.g., the inner ring clamp and outer ring clamp in the first and third embodiments, and the inner ring clamp and outer ring clamp of the inner ring clamp body in the second and fourth embodiments), thereby realizing the speed difference of the rise of the inner and outer ring seed crystals.

[0118] At this time, the molten liquid 12 rises with the seed crystal to form a new set of columnar crystals. The differential lifting device 3 drives the seed crystal to rise slowly, and the finished columnar crystal of the required length can be formed.

[0119] According to this application, the diameter of the crystal rod can be measured by the diameter measuring instrument 7 or by the operator's visual inspection. When the operator visually observes the change in the diameter of the crystal rod, the operator can manually input the rising or falling speed of the lifting mechanism to adjust the diameter of the crystal rod.

[0120] According to this application, the difference in pulling speed between the inner and outer seed crystals is achieved by causing relative motion between the inner and outer seed crystals, thereby ensuring that the diameter of the pulled crystal rod meets the requirements for use.

[0121] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A multi-ring seed crystal differential lifting device for pulling artificial crystals, characterized in that, The multi-ring seed crystal differential lifting device includes: A seed crystal clamping mechanism, wherein the seed crystal clamping mechanism has a multi-turn chuck for clamping the seed crystal; At least one lifting mechanism, said lifting mechanism being connected to at least one ring of chucks of the seed crystal clamping mechanism, to drive said at least one ring of chucks to perform lifting and lowering movements; and The control device controls the speed of the at least one lifting mechanism based on the diameter change obtained from the diameter of at least one of the crystal rods generated by each ring of seed crystals held by the seed crystal clamping mechanism.

2. The multi-ring seed crystal differential lifting device according to claim 1, characterized in that, The multi-turn seed crystal differential lifting device further includes a rotating mechanism, which is used to drive each chuck of the multi-turn chuck to rotate.

3. The multi-ring seed crystal differential lifting device according to claim 2, characterized in that, The seed crystal clamping mechanism further includes an upper cover of the clamping body and a lower cover of the clamping body, with a cavity formed between the upper cover of the clamping body and the lower cover of the clamping body.

4. The multi-ring seed crystal differential lifting device according to claim 3, characterized in that, The rotating mechanism includes an inner rotating shaft and an outer rotating shaft located at the outer edge of the inner rotating shaft. The lifting mechanism includes a lifting plate connected to at least one of the inner rotating shaft and the outer rotating shaft. The lifting plate is used to drive at least one of the inner rotating shaft and the outer rotating shaft to perform lifting and lowering movements.

5. The multi-ring seed crystal differential lifting device according to claim 4, characterized in that, The lifting mechanism also includes a lifting motor that provides a power source, a lifting screw connected to the lifting motor, and a lifting nut that is sleeved on the outer edge of the lifting screw and connected to the lifting plate.

6. The multi-ring seed crystal differential lifting device according to claim 4, characterized in that, The lifting mechanism includes a roller mechanism connected to the lifting plate.

7. The multi-ring seed crystal differential lifting device according to claim 5 or 6, characterized in that, The lifting mechanism further includes: a guide post disposed at the upper end of the upper cover of the chuck body; and a support top plate disposed at the upper end of the guide post, wherein the lifting plate is disposed between the support top plate and the upper cover of the chuck body, and is provided with a guide hole for the guide post to pass through.

8. The multi-ring seed crystal differential lifting device according to claim 2, characterized in that, The seed crystal clamping mechanism includes a hollow outer ring chuck body and a hollow inner ring chuck body disposed in the middle inner hole of the outer ring chuck body. The outer ring chuck body is provided with an outer ring chuck for clamping the seed crystal, and the inner ring chuck body is provided with an inner ring chuck for clamping the seed crystal. The outer ring chuck body and the inner ring chuck body are configured to be able to perform relative lifting and lowering movements.

9. The multi-ring seed crystal differential lifting device according to claim 8, characterized in that, The first rotating device of the rotating mechanism drives the outer ring chuck to rotate, and the second rotating device of the rotating mechanism drives the inner ring chuck to rotate.

10. The multi-ring seed crystal differential lifting device according to claim 8 or 9, characterized in that, The lifting mechanism includes a first lifting device connected to the inner ring chuck body and driving the inner ring chuck to rise and fall, and a second lifting device connected to the outer ring chuck body and driving the outer ring chuck to rise and fall.

11. The multi-ring seed crystal differential lifting device according to claim 8 or 9, characterized in that, The outer ring chuck body is configured as a hollow circular structure. A first rotating shaft through hole is provided on the outer ring chuck body. A first rotating shaft is provided in each of the first rotating shaft through holes. One of the first rotating shafts is connected to a power source. An outer ring gear is provided on the outer edge surface of the first rotating shaft. Adjacent outer ring gears mesh with each other.

12. The multi-ring seed crystal differential lifting device according to claim 8 or 9, characterized in that, The inner ring chuck body is configured as a hollow circular structure. A central rotating shaft through hole is provided in the middle of the inner ring chuck body, and a ring of second rotating shaft through holes is provided around the central rotating shaft through hole. A drive shaft connected to a power source is provided in the central rotating shaft through hole. A second rotating shaft is provided in each of the second rotating shaft through holes. A drive gear is provided on the outer edge surface of the drive shaft, and a driven gear is provided on the outer edge surface of the second rotating shaft. Each driven gear meshes with the drive gear.

13. The multi-ring seed crystal differential lifting device according to claim 8 or 9, characterized in that, The inner ring chuck body is configured as a hollow circular structure. A ring of third rotating shaft through holes is provided in the inner ring chuck body. A third rotating shaft is provided in each of the third rotating shaft through holes. One of the third rotating shafts is connected to a power source. An inner ring gear is provided on the outer edge surface of the third rotating shaft. Adjacent inner ring gears mesh with each other.

14. The multi-ring seed crystal differential lifting device according to claim 4, characterized in that, The lifting mechanism includes: a nut disposed on the lifting plate; and a rotating cylinder connected to the nut via a thread on its outer edge surface, and the rotating cylinder is connected to a power source.

15. The multi-ring seed crystal differential lifting device according to claim 14, characterized in that, The lifting mechanism further includes: a guide column, which is configured to be accommodated in a guide hole of the lifting plate; and a supporting top plate, which is disposed at the upper end of the guide column and located above the rotating cylinder.

16. The multi-ring seed crystal differential lifting device according to claim 10, characterized in that, The first lifting device includes: an inner ring chuck body lifting shaft, the first end of which is connected to the inner ring chuck body; a first lifting plate, the first lifting plate being connected to the second end of the inner ring chuck body lifting shaft; a first lifting nut, which is connected to the first lifting plate; and a first lifting screw, the first lifting nut being sleeved on the first lifting screw and moving along the first lifting screw, the first lifting screw being connected to a first power source.

17. The multi-ring seed crystal differential lifting device according to claim 16, characterized in that, The second lifting device includes: an outer ring chuck body lifting shaft, the first end of which is connected to the outer ring chuck body; a second lifting plate, which is connected to the second end of the outer ring chuck body lifting shaft; a second lifting nut, which is connected to the second lifting plate; and a second lifting screw, the second lifting nut being sleeved on the second lifting screw and moving along the second lifting screw, the second lifting screw being connected to a second power source.

18. The multi-ring seed crystal differential lifting device according to claim 17, characterized in that, The outer ring chuck body lifting shaft has a hollow structure, the inner ring chuck body lifting shaft is disposed in the inner hole of the outer ring chuck body lifting shaft, and the first part of the inner ring chuck body lifting shaft passes through the outer ring chuck body lifting shaft and is located in the hollow structure of the outer ring chuck body lifting shaft, and the second part of the inner ring chuck body lifting shaft is located above the outer ring chuck body lifting shaft.

19. An artificial crystal furnace for pulling artificial crystals, the artificial crystal furnace comprising a multi-ring seed crystal differential lifting device according to any one of claims 1 to 18.

20. A method for differentially raising and lowering multiple seed crystals in an artificial crystal furnace, characterized in that, The method includes: Measure the diameter of at least one crystal rod in each ring of crystal rods generated by multiple seed crystals, and determine whether the diameter has changed; and The lifting speed of at least one lifting mechanism is adjusted according to the measured diameter change of at least one of the crystal rods in each ring, wherein the lifting mechanism is connected to at least one seed crystal clamping mechanism that clamps one of the multiple rings of seed crystals to drive the seed crystal clamping mechanism to perform lifting and lowering movements.

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