An apparatus for preparing electron microscopy samples and its preparation process

Abstract

This invention provides an electron microscope sample preparation device and its preparation process, belonging to the field of electron microscope sample preparation technology. It includes a base placed on the ground, a guide rail fixed to the top of the base, a support base fixed to the top of the guide rail's carrying slider, a robotic arm mounted on the top of the support base, and an electrically driven guide rail horizontally fixed at the center of the base's top. The support base is fixed to the top of the carrying slider sliding on the guide rail. The carrying slider on the guide rail causes the support base to move the robotic arm sequentially to various processing locations. The robotic arm has multiple rotating connections, allowing for a wider range of angle adjustments at its gripping end. A displacement component is provided on the support base, and the bottom of the robotic arm is positioned at the mover end of the displacement component via a circumferential adjustment component. The displacement component moves the sample along the feed lines on both sides of the guide rail, ensuring that the robotic arm moves the sample to the corresponding processing area.

Description

Technical Field

[0001] This invention relates to the field of electron microscope sample preparation technology, specifically to an electron microscope sample preparation apparatus and its preparation process. Background Technology

[0002] Electron microscopes play a crucial role in materials science, biology, nanotechnology, and other fields due to their ultra-high resolution. Electron microscope samples are important components for electron microscope observation, so sample preparation is a critical step before electron microscope observation, and its quality directly determines the accuracy of the observation results.

[0003] Related technology 1 (announcement number: CN104422604B) discloses a method for preparing electron microscope samples. The disclosed technical solution can ensure that the structure of electron microscope samples containing low-k materials does not change during the preparation process, accurately obtain the true morphological characteristics of low-k materials in small-size processes, and thus obtain more accurate detection data. At the same time, the method improves work efficiency and the success rate of electron microscope sample preparation, and saves costs.

[0004] Related Technology 2 (Announcement No.: CN120232694A) discloses a device for preparing electron microscope thin section samples. The disclosed technical solution is as follows: by integrating the cutting unit and the polishing unit, and setting the feeding unit through the cutting unit and the polishing unit, the feeding, cutting and polishing of the sample can be completed sequentially with one device, without the need to transfer the sample between different devices, which improves the sample processing efficiency and the sample processing quality. Moreover, in the whole preparation device, the feeding unit, cutting unit and polishing unit are connected and coordinated, and can work synchronously, realizing the continuous production and processing of electron microscope thin section samples.

[0005] The above-disclosed technical solutions have the following problems: the transfer of samples between different devices requires manual operation, which is not only inefficient, but also prone to sample damage or poor preparation consistency due to operation errors (such as clamping position deviation or excessive transfer time), especially for nanoscale and brittle samples.

[0006] The cooling water used in processes such as polishing is mostly discharged once and not recycled. Furthermore, the filter devices are prone to clogging and require frequent replacement of filter media.

[0007] During the preparation process, the lack of an orderly positioning and fixing mechanism for sample temporary storage and preservation can easily lead to confusion, loss or secondary contamination, affecting the traceability of subsequent observations.

[0008] To address the above problems, this invention provides a novel apparatus and process for preparing electron microscope samples.

[0009] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background section of this application, and therefore may include prior art information that does not constitute prior art information known to those skilled in the art. Summary of the Invention

[0010] This invention aims to solve at least one of the technical problems existing in the prior art or related technologies. To address the problem of e-sports sample preparation in the prior art, this invention provides an electron microscopy sample preparation device and its preparation process, employing an automated integrated structure combined with a high-precision preparation process to ensure the quality of e-sports samples. The specific technical solution is as follows:

[0011] An electron microscope sample preparation apparatus includes a base placed on the ground, a guide rail fixed to the top of the base, a support base fixed to the top of the guide rail's bearing slider, a robot arm disposed on the top of the support base, a displacement component disposed on the support base, and the bottom of the robot arm disposed at the moving end of the displacement component via a circumferential adjustment component.

[0012] The top of the base is sequentially fixed with a hot melt inserter, a sample polishing machine, an electrolytic polishing machine, a temporary storage rack, and a storage rack distributed on both sides of the guide rail.

[0013] The inner cavity of the hot melt inserting machine is provided with a lifting component. The lifting end of the lifting component is fixedly connected to a concave heating seat that penetrates the top of the hot melt inserting machine. Above the concave heating seat is a cylinder fixed to the top of the hot melt inserting machine. The movable end of the cylinder is fixedly connected to a pressure cap that is compatible with the concave heating seat.

[0014] The top of the sample preparation and polishing machine is rotatably equipped with grinding discs of different mesh sizes, and all the grinding discs rotate synchronously through a linkage component. A water collection hopper embedded in the top of the sample preparation and polishing machine is sleeved on the outside of the grinding discs. A water pipe extending above the grinding discs is provided on the top of the sample preparation and polishing machine, and a circulation filter assembly for connecting the water collection hopper and the water pipe is provided in the inner cavity of the sample preparation and polishing machine.

[0015] The top of the electrolytic polishing machine is provided with an alcohol storage tank, and the top of the electrolytic polishing machine is provided with a low-temperature constant temperature bath connected to the alcohol storage tank. The top of the electrolytic polishing machine is also provided with an electrolytic power supply for energizing the sample.

[0016] In the above technical solution, the circulating filtration assembly includes a water filter box fixed in the inner cavity of the sample preparation and polishing machine. The bottom of the water collection hopper is fixedly connected to a water guide groove located below the water outlet, and the bottom of the water guide groove extends to the inner cavity of the water filter box. The inner cavity of the water filter box is rotatably provided with a butterfly-shaped water filter bag that fits against the inner wall, and the side wall of the water filter box is provided with a swing assembly that drives the butterfly-shaped water filter bag to swing back and forth.

[0017] The side wall of the water filter tank is fixedly equipped with a spray pipe with a nozzle extending into the inner cavity, and the nozzle of the spray pipe sprays water toward the butterfly-shaped water filter bag. Both the spray pipe and the water pipe introduce water filtered by the butterfly-shaped water filter bag through a water pump fixed on the sample preparation and polishing machine.

[0018] The oscillating assembly includes an active component rotatably mounted on the outer wall of the filter tank. The free end of the active component is rotatably connected to a transmission frame. Both ends of the butterfly-shaped filter bag are provided with rotating shafts extending out of the filter tank. The end of the transmission frame away from the active component is sleeved on the outer wall of the rotating shaft. The outer wall of the filter tank is symmetrically provided with point-touch drive components located on both sides of the transmission frame. The point-touch drive components are used to drive the water pump of the nozzle to work.

[0019] The point-touch drive component includes an outer cylinder fixed to the outer wall of the water filter tank, a fixed contact that is electrically connected to the water pump of the spray pipe fixedly installed on the inner wall of the outer cylinder, an inner cylinder that is slid into the side wall of the outer cylinder and is located on the swing path of the transmission frame, a moving contact that is fixed to the inner end of the inner cylinder and is opposite to the fixed contact, and the inner wall of the inner cylinder and the outer cylinder are connected by an elastic element.

[0020] The inner wall of the alcohol storage tank is fitted with a reagent cylinder, and a clamp is provided above the reagent cylinder. The top of the electrolytic polishing machine is fixed with a support column, and a linkage frame is sleeved on the outer wall of the support column. Both the linkage frame and the support column are provided with disassembly and assembly parts for fixing the clamp.

[0021] The bottom of the linkage frame is hinged to one end of the folding frame, the top of the electrolytic polishing machine is provided with a movable shaft, and the other end of the folding frame is sleeved on the outer wall of the movable shaft. The outer wall of the movable shaft is sleeved with a transmission gear, and the top of the electrolytic polishing machine is slidably provided with an active rack that meshes with the transmission gear.

[0022] The temporary storage rack includes a fixed base fixed to the top of the base, a transfer plate rotatably connected to the top of the fixed base, clamps for clamping samples are evenly arranged around the top of the transfer plate, and a braking component for positioning is provided at the bottom of the transfer plate.

[0023] The braking component includes a stud fixed to the bottom of the shifting disc, an eccentric brake disc threaded to the outer wall of the stud, a universal joint fixedly mounted on the outer wall of the eccentric brake disc, a spherical component embedded in the inner cavity of the universal joint, a threaded rod fixedly mounted on the outer wall of the spherical component, a sleeve threaded to the outer wall of the threaded rod, and a telescopic rod fixedly mounted at the bottom of the shifting disc, with the movable end of the telescopic rod rotatably connected to the sleeve.

[0024] The storage rack includes a support frame fixed to the top of the base. A guide frame is fixed to the top of the support frame, and a cross-shaped guide groove is opened on the guide frame, penetrating the inner cavity. An upper support shaft and a lower support shaft are slidably arranged in the inner cavity of the cross-shaped guide groove. The upper support shaft and the lower support shaft are linked by a hinged movable frame. A storage box is fixed between the two upper support shafts and between the two lower support shafts. A shift gear is provided in the middle of the outer wall of the movable frame. A drive gear that meshes with the shift gear is rotatably arranged on the top of the support frame.

[0025] The circumferential adjustment component includes a steering support that is slidably disposed on the top of the support base, and the manipulator is rotatably disposed on the top of the steering support;

[0026] The displacement assembly includes a lead screw rotatably disposed in the inner cavity of the support base. A movable seat is threadedly connected to the outer wall of the lead screw. A guide block fixedly connected to the bottom of the steering support is fixedly installed on the side wall of the movable seat. A guide groove is provided on the top of the support base, and the guide block is slidably disposed inside the guide groove.

[0027] The lifting component includes a rotating shaft rotatably disposed in the inner cavity of the hot melt inserting machine. A lifting cylinder is threadedly connected to the upper part of the outer wall of the rotating shaft, and the concave heating seat is fixed to the top of the lifting cylinder. A transmission bevel gear is sleeved on the lower part of the outer wall of the rotating shaft, and an active bevel gear that meshes with the transmission bevel gear is rotatably disposed in the inner cavity of the hot melt inserting machine.

[0028] A fabrication process for an electron microscope sample preparation apparatus includes:

[0029] S1: The bottom sample of the insert is held by a robot arm, and then the concave heating seat is moved to the top of the hot melt insert machine by the lifting component. The insert is placed on the heater at the bottom of the inner wall of the concave heating seat. Then, the sample held by the robot arm is placed inside the concave heating seat by the circumferential adjustment component and the displacement component, so that the bottom sample fits the insert. The insert is embedded in the bottom sample by the heating of the heater.

[0030] S2: The robot arm clamps the cored sample onto the grinding disc by adjusting the circumferential adjustment component and the displacement component. After selecting the grinding disc with the corresponding mesh size, the robot arm places the sample on one side of the cored sample onto the grinding disc for polishing and drips water through the water pipe.

[0031] S3: After initial polishing, a coating is formed on one side of the sample core. Then, the circumferential adjustment component and displacement component enable the robot to move the clamped core sample to the fixture. The clamp fixes the core sample. Then, the disassembly component fixes the corresponding fixture to the linkage frame. After that, the electric push rod drives the active rack to move, which causes the transmission gear meshing with the active rack to drive the movable shaft to rotate. The movable shaft drives the folding frame to fold and change. The folding frame drives the core sample on the fixture to enter the reagent cylinder in the alcohol storage tank through the linkage frame. The coating on the sample surface is electrolyzed by the reagent in the low temperature environment.

[0032] S4: Rotate the transposition plate to rotate the corresponding clamp to the adjacent position and lock it through the braking component. Then, after the folding frame is stretched open, the electrolyzed sample is transferred to the robot arm. The sample held by the robot arm is placed on the corresponding clamp through the circumferential adjustment component and the displacement component.

[0033] S5: When the temporary storage rack has enough core samples, the robot arm moves the core samples to the corresponding area of ​​the storage rack through the circumferential adjustment component and the displacement component. The robot arm then places the core samples into each storage cavity of the storage box and covers them with caps.

[0034] Compared with the prior art, the beneficial effects of the present invention are: the preparation apparatus and preparation process for the electron microscope sample:

[0035] 1. By leveraging the synergistic effect of guide rails, displacement components, and robotic arms, automatic transfer of samples between equipment such as hot melt core inserters, polishing machines, and electrolytic polishing machines is achieved without manual intervention, significantly reducing process connection time. Precise control of circumferential adjustment components and displacement components ensures the positioning accuracy of samples in each device, avoiding clamping offsets and angular deviations caused by manual operation, and ensuring the consistency of batch sample preparation.

[0036] 2. The circulating filtration component of the sample preparation and polishing machine realizes the closed-loop circulation of cooling water, avoiding the overflow of sewage and contamination of the sample. The low-temperature constant temperature bath of the electrolytic polishing machine works in conjunction with the alcohol storage tank to maintain a low-temperature electrolysis environment, preventing sample surface oxidation or structural deformation. At the same time, the swing-type butterfly filter bag of the circulating filtration component is linked with the point-touch drive component to automatically clean the filter holes to avoid clogging and reduce the frequency of equipment maintenance.

[0037] 3. The sample preparation and polishing machine is equipped with multi-mesh grinding discs, which can rotate synchronously through linkage components. It can quickly switch between coarse grinding and fine grinding processes according to the sample material (such as metal and ceramic) without changing equipment. The butterfly-shaped filter bag design of the circulating filter component improves water filtration efficiency and is suitable for polishing needs of different particle sizes.

[0038] IV. The design of the transposition plate and braking component of the temporary storage rack enables orderly temporary storage and rapid retrieval of samples, and the clamp positioning avoids sample collision damage; the cross guide groove and movable frame linkage structure of the storage rack can flexibly adjust the position of the storage box, classify and store different batches of samples, and facilitate traceability.

[0039] Fifth, through automated integration and multi-functional adaptation management, the efficiency, accuracy and reliability of electron microscopy sample preparation have been significantly improved, providing stable samples for high-quality electron microscopy observation. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the structure of an electron microscope sample preparation apparatus according to the present invention;

[0041] Figure 2 This is a schematic diagram of the structure of the robotic arm and guide rail of the present invention;

[0042] Figure 3 This is an exploded view of the support base portion of the present invention;

[0043] Figure 4 This is a schematic diagram of the hot-melt inserter part of the present invention;

[0044] Figure 5 This is a structural cross-sectional view of the hot-melt inserter part of the present invention;

[0045] Figure 6 This is a schematic diagram of the sample preparation and polishing machine part of the present invention;

[0046] Figure 7 This is a schematic diagram of the internal structure of the sample preparation and polishing machine of the present invention. Figure I ;

[0047] Figure 8 This is a schematic diagram of the internal structure of the sample preparation and polishing machine of the present invention. Figure II ;

[0048] Figure 9 This is an exploded view of the internal structure of the sample preparation and polishing machine of the present invention;

[0049] Figure 10 This is a schematic diagram of the butterfly-shaped filter bag portion of the present invention;

[0050] Figure 11 This is a schematic diagram of the electrolytic polishing machine part of the present invention. Figure I ;

[0051] Figure 12 This is a schematic diagram of the electrolytic polishing machine part of the present invention. Figure II ;

[0052] Figure 13 This is a schematic diagram of the temporary storage rack portion of the present invention;

[0053] Figure 14 This is a schematic diagram of the bottom structure of the temporary storage rack of the present invention;

[0054] Figure 15 This is a schematic diagram of the storage rack portion of the present invention;

[0055] Figure 16 This is an exploded view of the storage rack portion of the present invention;

[0056] Figure 17 for Figure 9 Enlarged view of a portion at point A;

[0057] Figure 18 for Figure 12 A magnified view of section B;

[0058] in, Figures 1 to 18The correspondence between the reference numerals and component names in the attached drawings is as follows: 1-Base, 2-Guide rail, 3-Support seat, 4-Mechanical arm, 5-Displacement component, 51-Screw, 52-Moving seat, 53-Guide block, 54-Guide groove, 6-Circumferential adjustment component, 61-Steering support, 62-Gear ring, 63-Drive gear, 7-Circulating filter component, 71-Water filter box, 72-Water guide groove, 73-Butterfly-shaped filter bag, 74-Spray nozzle, 75-Swing component, 751-Active component, 752-Transmission frame, 753- Rotating shaft, 76-Point contact drive component, 761-Outer cylinder, 762-Fixed contact, 763-Inner cylinder, 764-Moving contact, 765-Elastic element, 11-Hot melt inserting machine, 112-Lifting component, 1121-Rotating shaft, 1122-Lifting cylinder, 1123-Transmission bevel gear, 1124-Drive bevel gear, 113-Concave heating seat, 114-Cylinder, 115-Heater, 116-Pressure cap, 12-Sample polishing machine, 121-Grinding disc, 122-Linkage component, 1221- Main gear, 1222-Support shaft, 1223-Sealing seat, 1224-Divider gear, 123-Water collection hopper, 124-Water pipe, 13-Electrolytic polishing machine, 131-Alcohol storage tank, 132-Low temperature constant temperature bath, 133-Electrolytic power supply, 134-Reagent cylinder, 135-Clamp, 136-Support column, 137-Linkage frame, 138-Folding frame, 139-Modible shaft, 1390-Transmission gear, 1391-Driving rack, 1392-Disassembly / assembly parts, 14-Temporary storage rack, 141-Fixed 142-Transposition plate, 143-Clamp, 144-Brake component, 1441-Stud, 1442-Eccentric brake disc, 1443-Universal seat, 1444-Spherical part, 1445-Threaded rod, 1446-Sleeve, 1447-Telescopic rod, 15-Storage rack, 151-Support base frame, 152-Guide frame, 153-Cross guide groove, 154-Upper support shaft, 155-Lower support shaft, 156-Moveable frame, 157-Storage box, 158-Transposition gear, 159-Drive gear. Detailed Implementation

[0059] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0060] The following are specific implementation cases and appendices. Figure 1 -Appendix Figure 18 The present invention will be further described, but the present invention is not limited to these embodiments.

[0061] See attached document Figure 1 To be continued Figure 3 The diagram shows an electron microscope sample preparation apparatus, comprising a base 1 placed on the ground, a guide rail 2 fixed to the top of the base 1, a support base 3 fixedly connected to the top of the bearing slider of the guide rail 2, and a robot arm 4 mounted on the top of the support base 3. An electrically powered guide rail 2 is horizontally fixed at the center of the top of the base 1, and the support base 3 is fixedly mounted on the top of the bearing slider sliding on the guide rail 2. The support base 3 drives the robot arm 4 to move sequentially to various locations for processing via the bearing slider on the guide rail 2. Multiple rotatable connections on the robot arm 4 allow for a wider range of angle adjustment at its gripping end. A displacement component 5 is mounted on the support base 3, and the bottom of the robot arm 4 is positioned at the moving end of the displacement component 5 via a circumferential adjustment component 6.

[0062] With the above structure, the machine feed movement on both sides of the guide rail 2 is carried by the displacement component 5, which ensures that the robot arm 4 moves the sample to the corresponding processing area. The circumferential adjustment component 6 enables the robot arm 4 to adjust the circumferential direction of the sample being held and rotate it to the corresponding processing step.

[0063] The top of the base 1 is fixed with a hot melt inserter 11, a sample polishing machine 12, an electrolytic polishing machine 13, a temporary storage rack 14, and a storage rack 15, which are distributed on both sides of the guide rail 2.

[0064] See attached document Figure 4 and attached Figure 5 As shown: The inner cavity of the hot melt inserting machine 11 is provided with a lifting component 112. The lifting end of the lifting component 112 is fixedly connected to a concave heating seat 113 that penetrates the top of the hot melt inserting machine 11. Above the concave heating seat 113, a cylinder 114 is fixed to the top of the hot melt inserting machine 11. The movable end of the cylinder 114 is fixedly connected to a pressure cap 116 that is compatible with the concave heating seat 113.

[0065] The top frame is fixed to the top of the hot melt inserting machine 11 by two columns. The cylinder end of the cylinder 114 is vertically fixed to the bottom of the top frame. The movable end of the cylinder 114 is fixedly installed with the pressure cap 116. The concave heating seat 113 moves up and down in the inner cavity of the hot melt inserting machine 11 along with the lifting component 112. A through hole corresponding to the concave heating seat 113 is opened on the top of the hot melt inserting machine 11. The concave heating seat 113 is driven up and down by the lifting component 112 driven by the side handwheel.

[0066] Using the above structure, a heater 115 is fixedly installed on the bottom of the inner wall of the concave heating seat 113, and the concave heating seat 113 is made of heat-insulating material. After the bottom sample is moved to the core embedded on the inner wall of the concave heating seat 113, the cylinder 114 drives the pressure cap 116 to press on the bottom sample, ensuring the stability of the core embedding process.

[0067] See attached document Figure 6 To be continued Figure 10As shown: The top of the sample preparation and polishing machine 12 is rotatably equipped with grinding discs 121 of different mesh sizes, and all grinding discs 121 rotate synchronously through a linkage component 122. A water collection hopper 123 embedded in the top of the sample preparation and polishing machine 12 is sleeved on the outside of the grinding discs 121. A water pipe 124 extending above the grinding discs 121 is provided on the top of the sample preparation and polishing machine 12, and a circulation filter assembly 7 for connecting the water collection hopper 123 and the water pipe 124 is provided in the inner cavity of the sample preparation and polishing machine 12.

[0068] The linkage component 122 includes a motor fixed to the bottom of the inner cavity of the sample polishing machine 12. The motor is connected to a power source via a wire. The main gear 1221 is fixedly sleeved on the outer wall of the motor output shaft through a central mounting hole. One end of the support shaft 1222 is fixedly installed on the bottom of each of the two grinding discs 121. The other end of the support shaft 1222 rotates at the bottom of the inner wall of the sample polishing machine 12. The support shaft 1222 passes through the water outlet at the bottom of the water collection hopper 123. The support shaft 1222 passes through the inner cavity of the water guide groove 72 from top to bottom. A sealing seat 1223 is embedded in the through hole of the water guide groove 72 and sleeved on the outer wall of the support shaft 1222. A split gear 1224 that meshes with the main gear 1221 is fixedly sleeved on the outer wall of the two support shafts 1222.

[0069] With the above structure, the water falling from the grinding disc 121 is filtered through the circulating filter component 7, so that the water can be recycled.

[0070] See attached document Figure 11 and attached Figure 12 As shown: The top of the electropolishing machine 13 is equipped with an alcohol storage tank 131, and a low-temperature constant temperature bath 132 connected to the alcohol storage tank 131 is provided on the top of the electropolishing machine 13. An electrolytic power supply 133 for supplying electricity to the sample is also provided on the top of the electropolishing machine 13. Alcohol has a low freezing point, and the electropolishing process of the sample needs to be carried out in a low-temperature environment. Therefore, alcohol is chosen as the base liquid to ensure the effectiveness of electrolysis in a low-temperature environment.

[0071] With the above structure, the electrolytic power supply 133 is connected to the power clamp through one of the connecting wires. The power clamp holds the sample. The electrolytic power supply 133 is connected to the storage battery through another connecting wire. The storage battery is placed in the placement cylinder fixed on the electrolytic polishing machine 13, thereby connecting the sample to the power supply.

[0072] See attached document Figure 8 To be continued Figure 10 and appendix Figure 17As shown: The circulating filtration assembly 7 includes a water filter box 71 fixed in the inner cavity of the sample polishing machine 12. The interior of the water filter box 71 is filled with a filter layer, which is located below the butterfly-shaped water filter bag 73. The bottom of the water collecting hopper 123 is fixedly connected to a water guide groove 72 located below the water outlet, and the bottom of the water guide groove 72 extends to the inner cavity of the water filter box 71. The inner cavity of the water filter box 71 is rotatably equipped with a butterfly-shaped water filter bag 73 that fits against the inner wall, and the side wall of the water filter box 71 is equipped with a swing assembly 75 that drives the butterfly-shaped water filter bag 73 to swing back and forth.

[0073] The butterfly-shaped filter bag 73 is composed of a horizontally aligned straight filter screen and two curved filter screens fixed together. The two curved filter screens are symmetrically fixed on both sides of the straight filter screen, with the two curved filter screens fixed to the same center on both sides of the straight filter screen. The curved filter screens on both sides create a narrow, curved, large space on the upper and lower sides of the straight filter screen. The swinging component 75 causes the butterfly-shaped filter bag 73 to swing left and right, ensuring that the filter holes on the butterfly-shaped filter bag 73 filter evenly.

[0074] A nozzle 74 is fixedly installed on the side wall of the water filter tank 71, with the nozzle extending into the inner cavity. The nozzle of the nozzle 74 sprays water into the butterfly filter bag 73. Both the nozzle 74 and the water pipe 124 introduce water filtered by the butterfly filter bag 73 through a water pump fixed on the sample polishing machine 12.

[0075] With the above structure, two water pumps are fixedly installed on the side wall and top of the sample polishing machine 12. The water inlet of the two water pumps is embedded in the inner cavity of the water filter box 71 and located below the butterfly filter bag 73. The water pumps cause the nozzle on the spray pipe 74 to spray towards the filter hole of the butterfly filter bag 73, thus avoiding the filter hole from being blocked.

[0076] It is worth noting that the swing assembly 75 includes an active component 751 rotatably disposed on the outer wall of the filter tank 71. The free end of the active component 751 is rotatably connected to a transmission frame 752. Both ends of the butterfly-shaped filter bag 73 are provided with rotating shafts 753 extending out of the filter tank 71. The end of the transmission frame 752 away from the active component 751 is sleeved on the outer wall of the rotating shaft 753. The outer wall of the filter tank 71 is symmetrically provided with touch drive components 76 located on both sides of the transmission frame 752. The touch drive components 76 are used to drive the water pump of the nozzle 74 to work.

[0077] The motor is fixed to the outer wall of the water filter box 71 by a frame. One end of the driving component 751 is fixedly sleeved on the outer wall of the motor output shaft through the opening of the mounting hole. The motor is connected to an external power source through a wire. The shaft is installed in the middle of the transmission frame 752. The other end of the driving component 751 is movably sleeved on the outside of the shaft through the opening of the mounting hole, so that the other end of the transmission frame 752 is hinged to the middle of the driving component 751. Both ends of the butterfly-shaped water filter bag 73 are fixedly installed with one end of the rotating shaft 753 through the bracket. The other end of the rotating shaft 753 passes through the water filter box 71 and extends to the outside. The upper end of the transmission frame 752 is fixedly sleeved on the outer wall of the rotating shaft 753 located outside the water filter box 71 through the opening of the mounting hole.

[0078] On both sides of the swing path of the transmission frame 752, there are contact drive components 76 fixed to the outer wall of the filter tank 71. The output shaft of the motor drives the active component 751 to rotate, so that the active component 751 drives the rotating shaft 753 to swing left and right through the hinged transmission frame 752.

[0079] With the above structure, when the butterfly filter bag 73 swings to one side, the transmission frame 752 swings to contact the touch drive member 76 on one side. The force applied by the transmission frame 752 causes the touch drive member 76 to drive the water pump on the corresponding side. At this time, the nozzle on the spray pipe 74 sprays water onto the tilted butterfly filter bag 73. As the butterfly filter bag 73 swings back and forth, the water pump is triggered every time it swings to the corresponding side, thereby spraying water into the filter holes of the tilted butterfly filter bag 73, ensuring the smoothness of the filtration process.

[0080] In addition, the touch drive component 76 includes an outer cylinder 761 fixedly connected to the outer wall of the water filter tank 71, a fixed contact 762 that is electrically connected to the water pump of the spray pipe 74 fixedly installed on the inner wall of the outer cylinder 761, an inner cylinder 763 that is slid into the side wall of the outer cylinder 761 and is located on the swing path of the transmission frame 752, a moving contact 764 that is opposite to the fixed contact 762 is fixedly connected to the inner end of the inner cylinder 763, and the inner cylinder 763 and the inner wall of the outer cylinder 761 are connected by an elastic member 765.

[0081] Both the moving contact 764 and the fixed contact 762 are metallic conductors. The moving contact 764 is connected to an external power source through a wire. The elastic element 765 can be a spring. The outer cylinder 761 and the inner cylinder 763 form a telescopic element. The outer cylinder 761 slides against the outer wall of the inner cylinder 763.

[0082] With the above structure, when the butterfly filter bag 73 swings to one side, the transmission frame 752 applies a force to the inner cylinder 763 on the corresponding side, causing the inner cylinder 763 to drive the moving contact 764 to move towards the fixed contact 762. As the moving contact 764 contacts the fixed contact 762, the elastic element 765 is compressed and generates elastic force, causing the water pump on the corresponding side to be connected to the power supply and start working.

[0083] See attached document Figure 11 and attached Figure 12 As shown: A reagent cylinder 134 is clamped to the inner wall of the alcohol storage tank 131. A clamp 135 is installed above the reagent cylinder 134. A support column 136 is fixed to the top of the electrolytic polishing machine 13. A linkage frame 137 is sleeved on the outer wall of the support column 136. Both the linkage frame 137 and the support column 136 are equipped with disassembly / assembly parts 1392 for fixing the clamp 135. The disassembly / assembly part 1392 consists of a flange and bolts. The clamp 135 can be fixed to the support column 136 or the linkage frame 137 through the disassembly / assembly part 1392. The clamp 135 consists of two grippers and bolts. The bolt rotates on one of the grippers and is threadedly connected to the other gripper. Tightening the bolt causes the two grippers to fix the sample.

[0084] The bottom of the linkage frame 137 is hinged to one end of the folding frame 138. The top of the electrolytic polishing machine 13 is provided with a movable shaft 139, and the other end of the folding frame 138 is sleeved on the outer wall of the movable shaft 139. A transmission gear 1390 is sleeved on the outer wall of the movable shaft 139, and a drive rack 1391 that meshes with the transmission gear 1390 is slidably provided on the top of the electrolytic polishing machine 13. The folding frame 138 is composed of two hinged frames, and the top end of the folding frame 138 rotates at the bottom of the linkage frame 137 via a shaft.

[0085] With the above structure, the bottom end of the folding frame 138 is fixedly sleeved on the outer wall of the movable shaft 139 through the opening of the mounting hole, and the movable shaft 139 rotates on the top of the electrolytic polishing machine 13 through the frame. A slider is fixedly installed at the bottom of the active rack 1391, and a groove is opened on the top of the electrolytic polishing machine 13. The slider fits against the inner wall of the groove. Both the slider and the groove have a T-shaped cross section. An electric push rod is fixedly installed on the top of the electrolytic polishing machine 13. The movable end of the electric push rod is fixedly connected to the active rack 1391, and the transmission gear 1390 is fixedly sleeved on the outer wall of the movable shaft 139 through the central mounting hole.

[0086] See attached document Figure 13 and attached Figure 14 As shown: In addition, the temporary storage rack 14 includes a fixed base 141 fixed to the top of the base 1. The top of the fixed base 141 is rotatably connected to a transfer plate 142. The top of the transfer plate 142 is evenly provided with clamps 143 for clamping samples, and the bottom of the transfer plate 142 is provided with a braking component 144 for positioning.

[0087] The braking component 144 includes a stud 1441 fixed to the bottom of the shifting plate 142. The outer wall of the stud 1441 is threadedly connected to an eccentric brake disc 1442. A universal seat 1443 is fixedly installed on the outer wall of the eccentric brake disc 1442. A spherical component 1444 is embedded in the inner cavity of the universal seat 1443. A threaded rod 1445 is fixedly installed on the outer wall of the spherical component 1444. A sleeve 1446 is threadedly connected to the outer wall of the threaded rod 1445. A telescopic rod 1447 is fixedly installed at the bottom of the shifting plate 142, and the movable end of the telescopic rod 1447 is rotatably connected to the sleeve 1446.

[0088] The outer rod of the telescopic rod 1447 is vertically fixed to the bottom of the shifting disc 142. A shaft is mounted on the movable end of the telescopic rod 1447. One end of the sleeve 1446 is movably fitted onto the outside of the shaft through a mounting hole in the connector. The other end of the sleeve 1446 is threadedly connected to one end of the threaded rod 1445. The other end of the threaded rod 1445 is fixed to the outer wall of the spherical component 1444. The spherical component 1444 is movably embedded into the interior of the universal joint 1443, allowing it to rotate freely within the universal joint 1443. The universal joint 1443 is fixed to the outer wall of the eccentric brake disc 1442.

[0089] With the above structure, when the shifting disc 142 is brought to a stop, the threaded rod 1445 is turned, causing the sleeve 1446 to move on the outer wall of the threaded rod 1445. The force applied by the universal seat 1443 causes the eccentric brake disc 1442 to move on the outer wall of the stud 1441. At this time, the telescopic rod 1447 is stretched open with the sleeve 1446 and is engaged on the outer wall of the fixed seat 141 with the eccentric rotation of the eccentric brake disc 1442, thereby locking the position of the shifting disc 142.

[0090] The storage rack 15 includes a support frame 151 fixed to the top of the base 1. A guide frame 152 is fixed to the top of the support frame 151, and a cross guide groove 153 penetrating the inner cavity is provided on the guide frame 152. An upper support shaft 154 and a lower support shaft 155 are slidably arranged in the inner cavity of the cross guide groove 153. The upper support shaft 154 and the lower support shaft 155 are linked by a hinged movable frame 156. A storage box 157 is fixed between the two upper support shafts 154 and between the two lower support shafts 155. A shift gear 158 is provided in the middle of the outer wall of the movable frame 156. A drive gear 159 that meshes with the shift gear 158 is rotatably provided on the top of the support frame 151.

[0091] Two cross-shaped guide frames 152 are fixed parallel to each other on the top of the support base 151. A cross-shaped guide groove 153 is formed along the cross on each guide frame 152, penetrating the inner cavity of the guide frame 152. Two upper support shafts 154 are vertically fixed to both sides of the upper storage box 157, and two lower support shafts 155 are vertically fixed to both sides of the lower storage box 157. The upper and lower support shafts 154 and 155 on the same side are movably sleeved with the same movable frame 156. Mounting holes are formed at both ends of the movable frame 156, allowing the upper and lower support shafts 154 and 155 on the same side to rotate at their ends. Simultaneously, the upper and lower support shafts 154 and 155 penetrate the inner cavity of the cross-shaped guide groove 153. A shaft is vertically fixedly mounted in the middle of the movable frame 156, and a shift gear 158 is fixedly sleeved on the outer wall of this shaft through a central mounting hole.

[0092] With the above structure, the motor is fixed on the top of the support base 151 by a base. The drive gear 159 is fixedly sleeved on the outer wall of the motor output shaft through the mounting hole opened in the center. The motor is connected to an external power source through wires. After the output shaft of the motor drives the drive gear 159 to rotate, the shift gear 158 meshing with the drive gear 159 drives the movable frame 156 to rotate. As the movable frame 156 rotates, the upper support shaft 154 and the lower support shaft 155 slide in the cross guide groove 153 with the movable frame 156, so that the two storage boxes 157 are parallel and interchanged.

[0093] See attached document Figure 3 As shown: The circumferential adjustment component 6 includes a steering support 61 slidably mounted on top of the support base 3, and the robot arm 4 is rotatably mounted on top of the steering support 61. A gear ring 62 is sleeved on the outer wall of the base of the robot arm 4. The motor is fixed to the outer wall of the steering support 61 by a cover. The drive gear 63 is fixedly sleeved on the outer wall of the motor output shaft through a central mounting hole, and the drive gear 63 meshes with the gear ring 62. The motor is connected to an external power source via wires.

[0094] See attached document Figure 1 To be continued Figure 3 As shown: The displacement assembly 5 includes a lead screw 51 rotatably disposed within the cavity of the support base 3. A movable seat 52 is threadedly connected to the outer wall of the lead screw 51. A guide block 53, fixedly connected to the bottom of the steering support 61, is fixedly mounted on the side wall of the movable seat 52. A guide groove 54 is provided on the top of the support base 3, and the guide block 53 is slidably disposed inside the guide groove 54. A partition is provided within the cavity of the support base 3. The rotating lead screw 51 is mounted inside the partition via a fixing bracket. A motor is mounted on the fixing bracket, and the output shaft of the motor is fixedly connected to one end of the lead screw 51. The motor is connected to a power source via a wire.

[0095] With the above structure, the output shaft of the motor drives the lead screw 51 to rotate, so that the movable seat 52 connected to the outer wall of the lead screw 51 drives the guide block 53 to slide in the guide groove 54 on the top of the support seat 3. Through the sliding cooperation between the guide block 53 and the guide groove 54, the stability of the steering support 61 during movement is ensured.

[0096] See attached document Figure 5 As shown: Further, the lifting component 112 includes a rotating shaft 1121 rotatably disposed within the inner cavity of the hot-melt inserting machine 11. A lifting cylinder 1122 is threadedly connected to the upper part of the outer wall of the rotating shaft 1121, and a concave heating seat 113 is fixed to the top of the lifting cylinder 1122. A transmission bevel gear 1123 is sleeved on the lower part of the outer wall of the rotating shaft 1121. A drive bevel gear 1124, which meshes with the transmission bevel gear 1123, is rotatably disposed within the inner cavity of the hot-melt inserting machine 11. The shaft containing the drive bevel gear 1124 extends outside the hot-melt inserting machine 11, and a handwheel is fixedly installed at the end of the shaft located outside the hot-melt inserting machine 11.

[0097] A fabrication process for an electron microscope sample preparation apparatus includes:

[0098] S1: The bottom sample of the insert is held by the robot arm 4, and then the concave heating seat 113 is moved to the top of the hot melt insert machine 11 by the lifting component 112. The insert is placed on the heater 115 at the bottom of the inner wall of the concave heating seat 113. Then, the sample held by the robot arm 4 is placed inside the concave heating seat 113 by the circumferential adjustment component 6 and the displacement component 5, so that the bottom sample fits on the insert. The insert is embedded in the bottom sample by the heating of the heater 115.

[0099] S2: The circumferential adjustment component 6 and the displacement component 5 enable the robot arm 4 to clamp the core-embedded bottom sample onto the grinding disc 121. After selecting the grinding disc 121 with the corresponding mesh size, the robot arm 4 places the sample on one side of the core-embedded sample onto the grinding disc 121 for polishing and drips water through the water pipe 124.

[0100] S3: After initial polishing, a coating is formed on one side of the sample core. Then, the circumferential adjustment component 6 and the displacement component 5 are used to move the clamped core sample to the fixture 135 by the robot arm 4. The core sample is fixed by the clamp 135. Then, the corresponding fixture 135 is fixed on the linkage frame 137 by the disassembly component 1392. After that, the electric push rod drives the active rack 1391 to move, so that the transmission gear 1390 meshing with the active rack 1391 drives the movable shaft 139 to rotate. The movable shaft 139 drives the folding frame 138 to fold and change. The folding frame 138 drives the core sample on the fixture 135 to enter the reagent cylinder 134 in the alcohol storage tank 131 through the linkage frame 137. The coating on the sample surface is electrolyzed by the reagent in the low temperature environment.

[0101] S4: Rotate the transposition disk 142 to rotate the corresponding clamp 143 to the adjacent position and lock it through the braking component 144. Then, after the folding frame 138 is stretched open, the electrolyzed sample is transferred to the robot arm 4. The sample held by the robot arm 4 is placed on the corresponding clamp 143 through the circumferential adjustment component 6 and the displacement component 5.

[0102] S5: When the temporary storage rack 14 has enough core samples, the robot arm 4 moves the core samples to the corresponding area of ​​the storage rack 15 by means of the circumferential adjustment component 6 and the displacement component 5. The robot arm 4 places the core samples in each storage cavity of the storage box 157 and covers them with caps.

[0103] In the description of this invention, it should be understood that the terms "coaxial," "bottom," "one end," "top," "middle," "other end," "upper," "side," "top," "inner," "front," "center," "both ends," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0104] Furthermore, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include at least one of those features.

[0105] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "setting," "connection," "fixing," "screw connection," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0106] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An apparatus for preparing electron microscope samples, comprising a base (1) placed on the ground, a guide rail (2) fixed to the top of the base (1), a support seat (3) fixed to the top of the bearing slider of the guide rail (2), and a robotic arm (4) provided on the top of the support seat (3), characterized in that: The support base (3) is provided with a displacement assembly (5), and the bottom of the mechanical arm (4) is arranged at the moving end of the displacement assembly (5) through a circumferential adjusting member (6); The top of the base (1) is sequentially fixed with a hot-melt core embedding machine (11), a sample preparation polishing machine (12), an electrolytic polishing machine (13), a temporary storage rack (14) and a storage rack (15) distributed on both sides of the guide rail (2); The inner cavity of the hot-melt core embedding machine (11) is provided with a lifting member (112), the lifting end of the lifting member (112) is fixedly connected with a concave heating seat (113) penetrating through the top of the hot-melt core embedding machine (11), the top of the hot-melt core embedding machine (11) is provided with a gas cylinder (114) fixed thereon, and the movable end of the gas cylinder (114) is fixedly connected with a pressure top cap (116) matched with the concave heating seat (113); The top of the sample preparation polishing machine (12) is rotatably provided with grinding discs (121) with different mesh numbers, all the grinding discs (121) are synchronously rotated through linkage members (122), the outer part of the grinding disc (121) is sleeved with a water collecting hopper (123) embedded in the top of the sample preparation polishing machine (12), the top of the sample preparation polishing machine (12) is provided with a water pipe (124) extending above the grinding disc (121), and the inner cavity of the sample preparation polishing machine (12) is provided with a circulating filtering assembly (7) for connecting the water collecting hopper (123) and the water pipe (124); The top of the electrolytic polishing machine (13) is provided with an alcohol storage groove (131), the top of the electrolytic polishing machine (13) is provided with a low-temperature constant-temperature tank (132) in communication with the alcohol storage groove (131), and the top of the electrolytic polishing machine (13) is provided with an electrolytic power supply (133) for electrifying the sample; The preparation process of the electron microscope sample preparation device is as follows: S1: the bottom sample of the core is clamped by the mechanical arm (4), then the concave heating seat (113) is moved to the top of the hot-melt core embedding machine (11) through the lifting member (112), and the core is placed on the heater (115) at the bottom of the inner wall of the concave heating seat (113), then the sample clamped by the mechanical arm (4) is placed in the concave heating seat (113) through the circumferential adjusting member (6) and the displacement assembly (5), so that the bottom sample is attached to the core, and the core is embedded in the bottom sample through the heating of the heater (115); S2: the mechanical arm (4) clamps the completed bottom sample of the core on the grinding disc (121) through the circumferential adjusting member (6) and the displacement assembly (5), selects the grinding disc (121) with the corresponding mesh number, places the sample on one side of the core on the grinding disc (121) for polishing treatment through the mechanical arm (4), and drips water through the water pipe (124). S3: After the initial polishing process, a layer of film is formed on the side of the sample inlay. Then, through the circumferential adjustment member (6) and the displacement assembly (5), the mechanical hand (4) moves the clamped inlay sample to the clamp (135). The inlay sample is fixed by the clamping of the clamp (135). Then, the corresponding clamp (135) is fixed on the linkage frame (137) through the dismounting part (1392). After that, the driving rack (1391) is driven by the electric push rod to move, so that the transmission gear (1390) engaged with the driving rack (1391) drives the movable shaft (139) to rotate, so that the movable shaft (139) drives the folding frame (138) to fold and change, so that the inlay sample on the clamp (135) driven by the linkage frame (137) enters the inside of the reagent cylinder (134) in the alcohol storage tank (131), and the film on the surface of the sample is electrolyzed by the reagent in the low temperature environment; S4: Rotate the transposition disc (142), rotate the corresponding position of the clamp (143) to the adjacent position and lock it through the stop member (144), then stretch the folding frame (138) to transfer the electrolyzed sample to the mechanical hand (4), and place the sample clamped by the mechanical hand (4) on the corresponding clamp (143) through the circumferential adjustment member (6) and the displacement assembly (5); S5: When there are enough inlay samples in the temporary storage frame (14), the mechanical hand (4) moves the inlay sample to the corresponding area in the storage frame (15) through the circumferential adjustment member (6) and the displacement assembly (5), and places the inlay sample in each storage cavity of the storage box (157) and covers the cap.

2. The apparatus for preparing a sample for an electron microscope according to claim 1, wherein: The circulating filter assembly (7) comprises a water filter box (71) fixed in the inner cavity of the sample preparation polisher (12), the bottom of the water collecting bucket (123) is obliquely fixed with a water guide groove (72) located below the water outlet, and the slope bottom of the water guide groove (72) extends to the inner cavity of the water filter box (71). The inner cavity of the water filter box (71) is rotationally provided with a butterfly-shaped water filtering bag (73) attached to the inner wall, and the sidewall of the water filter box (71) is provided with a swing assembly (75) for driving the butterfly-shaped water filtering bag (73) to swing back and forth. The sidewall of the water filter box (71) is fixedly provided with a spray pipe (74) extending into the inner cavity, and the nozzle of the spray pipe (74) sprays towards the butterfly-shaped water filtering bag (73). The spray pipe (74) and the water pipe (124) are both introduced into the butterfly-shaped water filtering bag (73) after filtering by a water pump fixed on the sample preparation polisher (12).

3. The apparatus of claim 2, wherein: The swing assembly (75) comprises a driving part (751) rotatably arranged on the outer wall of the water filtering tank (71), the free end of the driving part (751) is rotatably connected with a transmission frame (752), both ends of the butterfly-shaped water filtering bag (73) are provided with rotating shafts (753) extending out of the water filtering tank (71), and the end of the transmission frame (752) away from the driving part (751) is sleeved on the outer wall of the rotating shaft (753), and the outer wall of the water filtering tank (71) is symmetrically provided with point contact driving members (76) located on both sides of the transmission frame (752), the point contact driving members (76) are used for driving the water pump of the spray pipe (74) to work.

4. The apparatus for preparing a sample for an electron microscope according to claim 3, wherein: The point contact driving member (76) comprises an outer cylinder (761) fixedly connected to the outer wall of the water filtering tank (71), the inner wall of the outer cylinder (761) is fixedly installed with a fixed contact (762) electrically connected with the water pump of the spray pipe (74), the side wall of the outer cylinder (761) is slidably provided with an inner cylinder (763) located on the swing route of the transmission frame (752), the inner end of the inner cylinder (763) is fixedly connected with a movable contact (764) opposite to the fixed contact (762), and the inner cylinder (763) and the inner wall of the outer cylinder (761) are connected through an elastic member (765).

5. The apparatus for preparing a sample for an electron microscope of claim 1, wherein: The inner wall of the alcohol storage tank (131) is clamped with a reagent cylinder (134), the upper portion of the reagent cylinder (134) is provided with a clamp (135), the top of the electrolytic polishing machine (13) is fixedly provided with a support column (136), the outer wall of the support column (136) is sleeved with a linkage frame (137), and the dismounting member (1392) for fixing the clamp (135) is arranged on the linkage frame (137) and the support column (136); The bottom of the linkage frame (137) is hingedly connected with one end of a folding frame (138), the top of the electrolytic polishing machine (13) is provided with a movable shaft (139), the other end of the folding frame (138) is sleeved on the outer wall of the movable shaft (139), the outer wall of the movable shaft (139) is sleeved with a transmission gear (1390), and the top of the electrolytic polishing machine (13) is slidably provided with a driving rack (1391) engaged with the transmission gear (1390).

6. The apparatus for preparing a sample for an electron microscope of claim 1, wherein: The temporary storage frame (14) comprises a fixed seat (141) fixedly arranged on the top of the base (1), the top of the fixed seat (141) is rotatably connected with a transposition disc (142), the top of the transposition disc (142) is uniformly provided with clamps (143) for clamping samples in the circumferential direction, and the bottom of the transposition disc (142) is provided with a stop member (144) for positioning. The stop member (144) comprises a stud (1441) fixed at the bottom of the transposition disc (142), the outer wall of the stud (1441) is threadedly connected with an eccentric brake disc (1442), the outer wall of the eccentric brake disc (1442) is fixedly installed with a universal seat (1443), the inner cavity of the universal seat (1443) is embedded with a spherical part (1444), the outer wall of the spherical part (1444) is fixedly installed with a threaded rod (1445), the outer wall of the threaded rod (1445) is threadedly connected with a sleeve (1446), the bottom of the transposition disc (142) is fixedly installed with a telescopic rod (1447), and the movable end of the telescopic rod (1447) is rotationally connected with the sleeve (1446).

7. The apparatus for preparing a sample for an electron microscope of claim 1, wherein: The storage rack (15) comprises a supporting base frame (151) fixed at the top of the base (1), the top of the supporting base frame (151) is fixedly connected with a guide frame (152), a cross-shaped guide groove (153) penetrating through the inner cavity is formed in the guide frame (152), the inner cavity of the cross-shaped guide groove (153) is slidably provided with upper supporting shafts (154) and lower supporting shafts (155) which are interlaced with each other, the upper supporting shafts (154) and the lower supporting shafts (155) are linked through a hinged movable frame (156), a storage box (157) is fixed between the two upper supporting shafts (154) and between the two lower supporting shafts (155), a transposition gear (158) is arranged in the middle of the outer wall of the movable frame (156), and the top of the supporting base frame (151) is rotationally provided with a driving gear (159) engaged with the transposition gear (158).

8. The apparatus for preparing a sample for an electron microscope of claim 1, wherein: The circumferential adjustment member (6) comprises a steering support (61) slidably arranged at the top of the supporting seat (3), and the mechanical hand (4) is rotationally arranged at the top of the steering support (61). The displacement assembly (5) comprises a lead screw (51) rotationally arranged in the inner cavity of the supporting seat (3), the outer wall of the lead screw (51) is threadedly connected with a moving seat (52), the side wall of the moving seat (52) is fixedly installed with a guide block (53) fixed to the bottom of the steering support (61), the top of the supporting seat (3) is provided with a guide groove (54), and the guide block (53) is slidably arranged in the inner part of the guide groove (54).

9. The apparatus for preparing a sample for an electron microscope of claim 1, wherein: The lifting member (112) comprises a rotating shaft (1121) rotationally arranged in the inner cavity of the hot melting core inserting machine (11), the outer wall of the rotating shaft (1121) is threadedly connected with a lifting cylinder (1122) at the upper part, the concave body heating seat (113) is fixed at the top end of the lifting cylinder (1122), the outer wall of the rotating shaft (1121) is sleeved with a transmission bevel gear (1123) at the lower part, and the inner cavity of the hot melting core inserting machine (11) is rotationally provided with a driving bevel gear (1124) engaged with the transmission bevel gear (1123).

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