Air supply module and memory unit test system

Abstract

The invention discloses an air supply module and a memory unit testing system, and relates to the technical field of memory unit testing, and the air supply module comprises an overflowing structure and an air supply cover. And the overflowing structure is provided with an air inlet duct, and an air inlet and an air inlet passing opening which are respectively communicated with the air inlet duct. The air supply cover is provided with a cover opening, an air supply channel and an air supply port, the edge of the cover opening covers the test area, the air supply port is communicated with the air inlet through the air supply channel, air blown out of the air supply port flows to the memory units through the cover opening, and each memory unit is at least subjected to the blowing action of one air supply port. According to the technical scheme provided by the invention, the temperature test precision of the memory unit test equipment can be improved, and the operation energy consumption of the memory unit test equipment is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of memory unit testing, in particular to a gas feeding module and a memory unit testing system. BACKGROUND

[0002] In the related art, a memory unit testing system includes a test bench, a tester, a gas feeding module and a heater. The tester has a test area for installing a plurality of memory units, and the test area is exposed on a test bench surface of the test bench. The gas feeding module includes an air inlet and a heating cavity respectively connected to an air inlet duct, and the cavity wall of the heating cavity covers the upper side of the test area. After being heated by the heater to a preset temperature, high-temperature gas is blown into the heating cavity through the air inlet duct to heat the space in the heating cavity as a whole, and then the memory units in the heating cavity are heated to a test temperature, thereby realizing high-temperature testing of the plurality of memory units.

[0003] However, this heating method is prone to uneven temperature distribution in the heating cavity, resulting in a large difference in the heat received by different memory units, and thus the precision of high-temperature testing is not high. In addition, the memory unit testing system also has the problem of high energy consumption. SUMMARY

[0004] The main purpose of the present application is to provide a gas feeding module and a memory unit testing system, which aims to solve at least one of the above problems.

[0005] To achieve the above purpose, the gas feeding module according to the present application is applied to a memory unit testing system, which includes a test bench and a tester. The tester has a test area for installing a plurality of memory units, and the test area is exposed on a test bench surface of the test bench. The gas feeding module includes: an overflow structure, an air inlet duct, an air inlet and an air inlet overflow port respectively connected to the air inlet duct; and a gas supply cover provided with a cover opening, a gas supply channel and a gas supply port. The edge of the cover opening is covered on the test area, the gas supply port is connected to the air inlet overflow port through the gas supply channel, and the gas blown out of the gas supply port flows to the memory units through the cover opening. Each memory unit is at least subjected to the blowing action of the gas supply port.

[0006] In an embodiment, the gas supply cover includes a cover body and a gas supply member. The gas supply channel and the gas supply port are provided in the gas supply member, the cover opening is provided in the cover body, the gas supply member is provided in the cover body and is spaced apart from the edge of the cover opening, and the end surface of the gas supply member close to the cover opening and the inner wall surface of the cover body together enclose an energy storage space.

[0007] In one embodiment, the memory unit is configured as a memory stick, the test area is provided with a memory slot for mounting the memory stick, the air supply member is provided with an air supply port in the form of a slit hole, and the long axis of the air supply port extends along the length direction of the memory slot.

[0008] In one embodiment, the memory unit is configured as a memory stick, the test area is provided with a memory slot for mounting the memory stick, the air supply member is provided with an air supply port in the form of a slit hole, and the long axis of the air supply port extends along the length direction of the memory slot.

[0009] In one embodiment, the long axis of the air supply port extends along a first direction, a plurality of the air supply ports are spaced apart along a second direction and arranged on opposite sides of the air inlet port, the second direction intersects the first direction, the air supply channel includes an air inlet section and two air supply sections, the air inlet section extends along the second direction and is connected between the two air supply sections, the air inlet port is connected to the air inlet section, and the air supply port is connected to the air supply section.

[0010] In one embodiment, the air supply member is provided with two rows of the air nozzles arranged on both sides of the air supply port along a first direction, a plurality of the air nozzles in the same row are spaced apart along a second direction, the second direction intersects the first direction, the air supply channel includes an air inlet section and two air supply sections, the air inlet section extends along the first direction and is connected between the two air supply sections, the air inlet port is connected to the air inlet section, and the air supply port is connected to the air supply section.

[0011] In one embodiment, the cover port edge is provided with a first protruding rib and a first elastic member, the test bench includes a sealing jig and a second elastic member, the outer periphery of the sealing jig is provided with a second protruding rib, the second protruding rib is arranged around the outer periphery of the second elastic member, the first protruding rib abuts against the second elastic member, and the second protruding rib abuts against the second elastic member.

[0012] In one embodiment, the air supply module further includes a temperature sensor and a transmission wire, the temperature sensor is exposed in the energy storage space, the lower end of the transmission wire is connected to the temperature sensor, and the upper end of the transmission wire penetrates out of the cover body and is exposed outside.

[0013] In an embodiment, the air supply cover further comprises a return air member, the return air member is further provided with a return air passage and at least two return air openings respectively communicating with the return air passage, the return air openings communicate with the energy storage space, the flow structure is further provided with an air outlet air duct, an air outlet passage and an air outlet opening, the air outlet air duct is communicated between the air outlet passage and the air outlet opening, the air outlet passage communicates with the return air opening, and the air outlet air duct and the air inlet air duct are arranged in the same installation space.

[0014] In an embodiment, the air supply member comprises a first base plate and a first cover, the first base plate is connected to the inner wall surface of the cover body, the first cover is arranged on the lower plate surface of the first base plate, and the air supply passage is formed between the first cover and the first base plate; the return air member comprises a second base plate and a second cover, the second cover is arranged on the upper plate surface of the second base plate, and the return air passage is formed between the second cover and the second base plate; the first base plate and the second base plate are configured as the same structure and are provided with the return air openings, and the outer wall surface of the second cover and the inner wall surface of the cover body are spaced to form a heat insulation space, and the heat insulation space is filled with gas.

[0015] In an embodiment, the first cover is arranged spaced apart from the inner wall surface of the cover body, the air supply cover further comprises an inner heat insulation member arranged on the inner wall surface of the energy storage space, and part of the inner heat insulation member is filled in the space between the first cover and the cover body.

[0016] In an embodiment, the air supply cover further comprises a cover shell and an outer heat insulation member, the cover shell covers the outside of the cover body, and the outer heat insulation member is filled in the space between the cover shell and the cover body.

[0017] In an embodiment, the air supply module further comprises a heating structure, the heating structure is arranged in the air inlet air duct and / or the air outlet air duct to heat the gas in the air inlet air duct and / or the air outlet air duct.

[0018] The application further provides an internal memory unit test system, comprising: a test table, the test table is provided with a first moving module and a second moving module on the test table surface of the test table; a test instrument, having a test area for installing a plurality of internal memory units, the test area is exposed on the test table surface of the test table, a gas source machine, provided with a refrigeration structure, a drying structure and a gas guide pipe, and used for providing dry cold air or normal temperature gas; The aforementioned air supply module is installed on the moving module to be able to move relative to the test area, the air inlet of the air supply module is communicated with the air guide pipe, and the gas output by the gas source machine flows into the air inlet through the air guide pipe. The air supply module further comprises a heating structure arranged in the air inlet air duct, and the heating structure can heat the gas in the air inlet air duct.

[0019] In an embodiment, the gas source machine further comprises a gas source main pipe, a first gas source branch pipe, a second gas source branch pipe, and a control valve for controlling the gas source main pipe to selectively conduct the first gas source branch pipe and the second gas source branch pipe. The first gas source branch pipe is communicated between the gas outlet end of the gas source main pipe and the gas inlet end of the drying structure. The second gas source branch pipe is communicated between the gas outlet end of the gas source main pipe and the gas inlet end of the refrigeration structure. The gas outlet end of the refrigeration structure is communicated with the gas inlet end of the drying structure. The gas outlet end of the drying structure is communicated with the air inlet end of the air guide pipe.

[0020] In an embodiment, the control valve comprises a first reversing valve and a second reversing valve. The first reversing valve is arranged in the first gas source branch pipe. The second reversing valve is arranged in the second gas source branch pipe.

[0021] In an embodiment, the gas source machine further comprises a recovery main pipe, a first recovery branch pipe, a second recovery branch pipe, and a circulating fan. The circulating fan is communicated between the air inlet end of the recovery main pipe and the air outlet of the air supply module, and is used to promote the flow of air from the air outlet to the recovery main pipe. The air outlet end of the recovery main pipe is communicated with the air inlet end of the first recovery branch pipe and the air inlet end of the second recovery branch pipe. The control valve is further used to control the recovery main pipe to selectively conduct the first recovery branch pipe and the second recovery branch pipe. The air outlet end of the first recovery branch pipe is communicated with the gas inlet end of the drying structure. The air outlet end of the second recovery branch pipe is communicated with the gas inlet end of the refrigeration structure.

[0022] In an embodiment, the control valve comprises a third reversing valve and a fourth reversing valve. The third reversing valve is arranged in the first recovery branch pipe. The fourth reversing valve is arranged in the second recovery branch pipe.

[0023] In an embodiment, the air supply module further comprises an air exhaust valve, a first one-way valve, and an air outlet reversing valve. The air exhaust valve is arranged on the cover wall of the air supply cover and is communicated between the inside and outside of the air supply cover. The air exhaust valve is configured to be opened in the emptying state and closed in the internal circulation state. The first one-way valve is arranged in the air inlet air duct and is used to limit the flow of air from the air inlet port to the air inlet. The air outlet reversing valve is arranged in the air outlet air duct of the air supply module and is configured to be closed in the cover lifting state and the emptying state, and is opened in the internal circulation state.

[0024] In an embodiment, the air source machine further comprises a converging branch pipe, a converging main pipe, a filtering structure, a second one-way valve, a third one-way valve and a fourth one-way valve, the converging branch pipe has an air inlet end connected to the air outlet end of the refrigeration structure, the air outlet end of the converging branch pipe, the air outlet end of the first recovery branch pipe and the air outlet end of the first air source branch pipe are all connected to the converging main pipe, and the converging main pipe is connected to the air inlet end of the filtering structure, the air outlet end of the filtering structure is connected to the air inlet end of the drying structure, the second one-way valve is arranged in the first recovery branch pipe and used to limit the air flow from the converging main pipe to the first recovery branch pipe, the third one-way valve is arranged in the converging branch pipe and used to limit the air flow from the converging main pipe to the refrigeration structure, and the fourth one-way valve is arranged in the first air source branch pipe and used to limit the air flow from the converging main pipe to the first air source branch pipe.

[0025] In an embodiment, the air supply cover is provided with an energy storage space and a heat insulation space, the heat insulation space is arranged around the outer circumferential side and the upper side of the energy storage space, the heat insulation space has opposite first and second sides, the energy storage space is connected to the first side of the heat insulation space, the air supply channel and the air outlet duct respectively, and the air exhaust valve is connected to the second side of the heat insulation space.

[0026] In an embodiment, the recovery main pipe comprises a recovery branch pipe, a heat dissipation branch pipe, a bypass branch pipe and a recovery converging pipe, the air inlet end of the recovery branch pipe is connected to the circulating fan, the air outlet end of the recovery branch pipe is selectively connected to the air inlet end of the heat dissipation branch pipe and the air inlet end of the bypass branch pipe under the adjustment of the control valve, the air outlet end of the heat dissipation branch pipe and the air outlet end of the bypass branch pipe are both connected to the air inlet end of the recovery converging pipe, the air outlet end of the recovery converging pipe is connected to the air inlet end of the first recovery branch pipe and the air inlet end of the second recovery branch pipe, and the heat dissipation branch pipe is provided with a radiator.

[0027] In an embodiment, the control valve comprises a heat dissipation reversing valve and a bypass reversing valve, the heat dissipation reversing valve is arranged in the heat dissipation branch pipe, and the bypass reversing valve is arranged in the bypass branch pipe.

[0028] In an embodiment, the air source machine further comprises a seventh one-way valve and an eighth one-way valve, the seventh one-way valve is arranged at the air outlet end of the heat dissipation branch pipe and used to limit the air flow from the recovery converging pipe to the heat dissipation branch pipe, and the eighth one-way valve is arranged at the air outlet end of the bypass branch pipe and used to limit the air flow from the recovery converging pipe to the bypass branch pipe.

[0029] The technical scheme of the present application adopts the form of the air supply channel and the plurality of air supply ports, and at least one air supply port is arranged corresponding to each memory unit, so that the test gas (for example, high-temperature gas) from the air inlet duct can be distributed to different air supply ports through the air supply channel and blow gas for each memory unit, thereby reducing the difference in heat received by different memory units, and even reaching the degree of substantially zero difference. In this way, the temperature test precision of the memory unit test equipment can be improved. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor based on the drawings shown.

[0031] Figure 1 Structure schematic view of an embodiment of the air supply module provided by the present application; Figure 2 Structure schematic view of an embodiment of the test system provided by the present application in a state; Figure 3 Structure schematic view of another state of the embodiment shown in Figure 2 Structure schematic view of another state of the embodiment shown in Figure 4 Figure 3 Partial sectional view of the structure shown in Figure 5 Enlarged view of part A in Figure 4 Another partial sectional view of the structure shown in Figure 6 Figure 3 Still another partial sectional view of the structure shown in Figure 7 Still another partial sectional view of the structure shown in Figure 3 Exploded view of the embodiment shown in Figure 8 Figure 1 Structure schematic view of the first cover body in Figure 9 Structure schematic view of the first cover body in Figure 8 Structure schematic view of the first cover body in Figure 10 Figure 9 Exploded view of the structure shown in Figure 11 Structure schematic view of the first cover body in Figure 10 Partial structure schematic view of another embodiment of the test system provided by the present application; Figure 12 Partial structure schematic view of another embodiment of the test system provided by the present application; Figure 13 ​​​​Structure diagram of another embodiment of the air feeding module provided by the present application; Figure 14 Structure diagram of the first cover body in the embodiment shown in Figure 13 Figure 15 Structure diagram of the first cover body in the embodiment shown in Figure 14 Figure 16 Structure diagram of the first cover body in the embodiment shown in Figure 13 Figure 17 Structure diagram of the first cover body in the embodiment shown in Figure 13 Figure 18 Structure diagram of another embodiment of the test system provided by the present application; Figure 19 Structure diagram of the first cover body in the embodiment shown in Figure 18 Figure 20 Structure diagram of the first cover body in the embodiment shown in Figure 18 Figure 21 Structure diagram of the first cover body in the embodiment shown in Figure 18 Figure 22 Structure diagram of the first cover body in the embodiment shown in Figure 18 Figure 23 Structure diagram of another embodiment of the test system provided by the present application; Figure 24 Structure diagram of the first cover body in the embodiment shown in Figure 23 Figure 25 Structure diagram of the first cover body in the embodiment shown in Figure 23 Figure 26 Structure diagram of the first cover body in the embodiment shown in Figure 23

[0032] Structure diagram of the first cover body in the embodiment shown in ​​​​​​​​​​​100, air supply module; 200, flow structure; 201, air inlet duct; 202, air inlet; 203, air inlet passage; 204, air outlet duct; 205, air outlet; 206, air outlet passage; 210, protective shell; 211, coaming; 212, top cover; 213, bottom cover; 214, first top through hole; 215, second top through hole; 216, first bottom through hole; 217, second bottom through hole; 220, main air inlet pipe; 230, auxiliary air inlet pipe; 240, main air outlet pipe; 250, auxiliary air outlet pipe; 260, heating structure; 300, air supply cover; 301, cover opening; 302, air supply channel; 303, air supply opening; 304, energy storage space; 305, air inlet section; 306, air supply section; 307, heat insulation space; 310, cover body; 311, first protruding rib; 312, first cover body through hole; 313, second cover body through hole; 320, air supply member; 321, first base plate; 322, first cover body; 323, air inlet mounting hole; 324, air nozzle; 330, air return member; 331, air return channel; 332, air return opening; 333, second cover body; 334, air outlet mounting hole; 340, temperature sensor; 341, transmission wire; 350, first elastic member; 361, inner heat insulation member; 362, outer heat insulation member; 363, cover shell; 371, exhaust valve; 372, first one-way valve; 373, air outlet reversing valve; 400, test bench; 401, test bench surface; 410, sealing jig; 411, second protruding rib; 420, second elastic member; 430, movement module; 431, horizontal movement module; 432, guide rail; 433, gantry; 434, lifting module; 440, mounting jig; 500, tester; 501, test area; 502, memory slot; 503, mounting position; 504, memory unit; 600, air source machine; 611, air source main pipe; 612, first air source branch pipe; 613, second air source branch pipe; 614, recovery main pipe; 615, first recovery branch pipe; 616, second recovery branch pipe; 617, confluence branch pipe; 618, confluence main pipe; 619, air guide pipe; 621, first reversing valve; 622, second reversing valve; 623, third reversing valve; 624, fourth reversing valve; 625, second one-way valve; 626, third one-way valve; 627, fourth one-way valve; 628, fifth one-way valve; 629, sixth one-way valve; 631, refrigeration structure; 632, drying structure; 633, filtration structure; 634, circulating fan; 641, recovery shunt pipe; 642, heat dissipation branch pipe; 643, bypass branch pipe; 644, recovery confluence pipe; 645, heat dissipation reversing valve; 646, bypass reversing valve; 647, seventh one-way valve; 648, eighth one-way valve; 649, radiator.

[0033] The objectives, functional characteristics and advantages of the present application will be further described with reference to the embodiments in combination with the accompanying drawings. DETAILED DESCRIPTION

[0034] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0035] It should be noted that if the embodiments of the present application involve directionality indication (such as up, down, left, right, front, back, etc.), the directionality indication is only used to explain the relative position relationship, movement condition, etc. between components in a certain posture, and if the certain posture changes, the directionality indication also changes accordingly.

[0036] In addition, if the embodiments of the present application involve the description of “first”, “second” and the like, the description of “first”, “second” and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by “first”, “second” can explicitly or implicitly include at least one of the features. In addition, “and / or” or “and / or” appearing throughout the text means that the three parallel schemes include A scheme, or B scheme, or A and B schemes are satisfied at the same time. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the fact that a person of ordinary skill in the art can realize it, and when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, nor is it within the protection scope claimed by the present application.

[0037] In the related art, the memory unit test system includes a test table, a tester, a gas feeding module and a heater. The tester has a test area for installing a plurality of memory units, and the test area is exposed on the test table surface of the test table. The gas feeding module includes an air inlet and a heating cavity respectively communicating with the air inlet and the air inlet, and the cavity wall of the heating cavity covers the upper side of the test area. After being heated by the heater to a preset temperature, the high-temperature gas is blown to the heating cavity through the air inlet to heat the space in the heating cavity as a whole, and then the memory units located in the heating cavity are heated to the test temperature, thereby realizing the high-temperature test of the plurality of memory units.

[0038] However, this heating method is prone to the problem of large difference in heat received by different memory units due to uneven temperature distribution in the heating cavity, thereby resulting in low precision of high-temperature test.

[0039] In view of this, the application provides a gas supply module 100 applied to a memory unit test system, which can improve the temperature test accuracy of the memory unit test equipment.

[0040] Please refer to Figure 1 , Figure 4 and Figure 5 In an embodiment of the application, the gas supply module 100 includes an overcurrent structure 200 and a gas supply cover 300. The overcurrent structure 200 is provided with an air inlet duct 201, an air inlet 202 and an air inlet passage 203 respectively communicating with the air inlet duct 201. The gas supply cover 300 is provided with a cover opening 301, a gas supply channel 302 and a gas supply opening 303. The edge of the cover opening 301 is covered on the test area 501. The gas supply opening 303 is connected with the air inlet passage 203 through the gas supply channel 302. The gas blown out of the gas supply opening 303 flows to the memory unit through the cover opening 301. Each memory unit is at least subjected to the blowing action of one gas supply opening 303.

[0041] The technical solution of the application adopts the form of the gas supply channel 302 and the plurality of gas supply openings 303, and at least one gas supply opening 303 is provided for each memory unit, so that the test gas (such as high-temperature gas) from the air inlet duct 201 can be distributed to different gas supply openings 303 through the gas supply channel 302, and the blowing action is performed for each memory unit, so that the difference in heat received by different memory units is reduced, and even reaches the level of basically zero difference. In this way, the temperature test accuracy of the memory unit test equipment can be improved.

[0042] It should be noted that the gas supply module 100 of the application includes but is not limited to application in high-temperature test scenarios, low-temperature test scenarios and normal-temperature test scenarios. In the high-temperature test scenario, the high-temperature gas blown from the gas supply opening 303 to the memory unit can simulate the state of the memory unit in the actual high-temperature working environment. Through this accurate high-temperature gas delivery method, the performance of the memory unit under high-temperature conditions can be more truly detected, including various indicators such as its stability, accuracy of data storage and reading, etc. At the same time, since the gas supply opening 303 performs blowing action for each memory unit, the consistency of the high-temperature environment of each memory unit is ensured, further improving the reliability and accuracy of the test results, and providing strong data support for the application of the memory unit in the high-temperature environment.

[0043] Similarly, in the low-temperature test scenario, the gas blown by the self-supplying air port 303 to the memory unit is low-temperature gas, which can simulate a low-temperature environment to accurately test the performance of the memory unit under low-temperature conditions and ensure that the memory unit can also stably operate in a low-temperature environment. In the normal-temperature test scenario, the gas blown by the self-supplying air port 303 to the memory unit is normal-temperature gas, which is used to test the performance of the memory unit under normal-temperature conditions and meet the demand for performance evaluation of the memory unit in daily use.

[0044] Secondly, each memory unit can be blown by a single self-supplying air port 303 or two or more self-supplying air ports 303. In addition, part of the memory units can be blown by a single self-supplying air port 303, and the other part of the memory units can be blown by two or more self-supplying air ports 303.

[0045] In addition, the types of the memory units include but are not limited to memory particles and memory sticks. When the type of the memory unit is a memory stick, the test area 501 is provided with a memory slot 502 for mounting the memory stick, as shown in Figure 2 When the type of the memory unit is a memory particle, the test area 501 is provided with a mounting position 503 for mounting the memory particle, as shown in Figure 11

[0046] Please refer to Figure 2 and Figure 3 Specifically, in some embodiments, the memory unit test system includes a test bench 400 and a tester 500, the tester 500 has a test area 501 for mounting a plurality of memory units, and the test area 501 is exposed on the surface of the test bench 400. The test bench 400 includes a mounting jig 440 and a sealing jig 410, the mounting jig 440 is mounted on the surface of the test bench 400, the sealing jig 410 is mounted on the upper surface of the mounting jig 440, and the mounting jig 440 and the sealing jig 410 are both provided with a through hole for exposing the test area 501 to the outside.

[0047] Optionally, in some embodiments, the memory unit test system further includes a gas source machine, which is provided with a refrigeration structure, a drying structure and a gas guide pipe and is used to provide dry cold gas or normal-temperature gas. The gas inlet 202 of the air supply module 100 is communicated with the gas guide pipe, and the gas output by the gas source machine flows into the gas inlet 202 through the gas guide pipe. The air supply module 100 further includes a heating structure arranged in the air inlet duct 201, which can heat the gas in the air inlet duct 201.

[0048] ​For example, in an embodiment, the memory unit test system supports high-temperature test, normal-temperature test and low-temperature test. Among them, the refrigeration structure can be a common refrigerator composed of components such as compressor, evaporator and condenser. The drying structure can be a common dryer composed of components such as molecular sieve, desiccant filling layer and air flow distribution device. The molecular sieve can effectively adsorb moisture in the gas, the desiccant filling layer further enhances the drying effect, and the air flow distribution device ensures that the gas passes through the drying structure uniformly, thereby achieving the purpose of efficiently drying the gas. For the convenience of writing, the following will take the refrigeration structure as the refrigerator and the drying structure as the dryer as an example to explain and describe.

[0049] In an embodiment, the air source machine further comprises an air source interface, a first branch, a second branch, an electromagnetic reversing valve and an air filter. The air source interface is used to communicate with the compressed air source (which can be a compressed air source for centralized air supply in a production workshop) to receive air from the compressed air source. The electromagnetic reversing valve has an air inlet end communicating with the air source interface, two air outlet ends respectively communicating with the air inlet end of the first branch and the air inlet end of the second branch, and can selectively conduct the first branch or the second branch. The air outlet end of the first branch and the air outlet end of the second branch are both connected to the air inlet end of the air filter, and the air outlet end of the air filter is connected to the air guide pipe through the dryer. The refrigerator is connected to the second branch.

[0050] The memory unit test system automatically switches the air path according to the test mode (high temperature / low temperature / normal temperature). Three specific scenarios can be referred to in the following.

[0051] In the high-temperature test mode: the electromagnetic reversing valve conducts the first branch, the compressed air enters the air filter through the electromagnetic reversing valve and the first branch, and then flows into the dryer for dehumidification treatment. The dried gas is input into the air inlet duct 201 of the air supply module 100 through the air guide pipe, and is heated by the heating structure of the air inlet duct 201 until the temperature rises to the preset temperature. Finally, the high-temperature dry gas is uniformly blown to the surface of the memory unit through the air supply port 303 to realize targeted heating of the memory unit.

[0052] In the low-temperature test mode: the electromagnetic reversing valve conducts the second branch, the compressed air enters the refrigerator through the electromagnetic reversing valve and the second branch, and is cooled by the refrigeration effect of the refrigerator, and then passes through the air filter and the dryer in turn. The treated dry cold air is input into the air inlet duct 201 of the air supply module 100 through the air guide pipe, and is heated by the heating structure of the air inlet duct 201 (or not heated by the heating structure, i.e. the heating structure does not work) to adjust the temperature of the dry cold air and make it reach the preset temperature. Finally, the low-temperature dry gas is uniformly blown to the surface of the memory unit through the air supply port 303.

[0053] In the normal temperature test mode, the electromagnetic reversing valve is turned on to the second branch, and the compressed air enters the refrigerator through the electromagnetic reversing valve and the second branch, but is not affected by the refrigeration of the refrigerator (the refrigerator is not working), and then passes through the air filter and the dryer in turn. The treated normal temperature dry gas enters the air inlet duct 201 of the air supply module 100 through the air guide pipe, but is not affected by the heating of the heating structure (i.e. the heating structure is not working). Finally, the normal temperature dry gas is evenly blown to the surface of the memory unit through the air supply port 303.

[0054] Of course, the working mode and application scenario of the memory unit test system in the present application are not limited to the above, and the present application does not make specific limitations thereto.

[0055] Optionally, in some embodiments, the air supply module 100 further comprises a heating structure arranged in the air inlet duct 201 and / or the air outlet duct 204 to heat the gas in the air inlet duct 201 and / or the air outlet duct 204.

[0056] The specific structure and arrangement of the heating structure can be various, and the present application does not make specific limitations thereto. For example, in some embodiments, the heating structure can be a heating coil pipe which is attached to the outer wall surface of the air inlet duct 201. In this way, the external form of the heating coil pipe can avoid interference with the flow of the air in the air inlet duct 201, and can improve the heating efficiency.

[0057] It should be noted that the outer wall surfaces of the air inlet duct 201 and the air outlet duct 204 can be both surrounded by the heating coil pipe, or only the outer wall surface of the air inlet duct 201 or the air outlet duct 204 can be surrounded by the heating coil pipe. In the high temperature test mode, only the heating coil pipe on the air inlet duct 201 can work, and the heating coil pipe on the air outlet duct 204 does not work. In the low temperature test mode, whether the heating coil pipe on the air inlet duct 201 works or not, the heating coil pipe on the air outlet duct 204 can work to reduce the risk of condensate water appearing on the inner wall or edge of the air outlet 205, thereby avoiding the problem that the condensate water flows into the inside of the air supply module 100 along the air outlet duct 204, causing the internal components to be eroded or causing the test result to be inaccurate.

[0058] Please refer to Figure 4 and Figure 5Optionally, in some embodiments, the air supply cover 300 comprises a cover body 310 and an air supply member 320, the air supply passage 302 and the air supply port 303 are both arranged on the air supply member 320, the cover port 301 is arranged on the cover body 310, the air supply member 320 is arranged in the cover body 310 and is arranged spaced apart from the edge of the cover port 301, and the end face of the air supply member 320 close to the cover port 301 and the inner wall surface of the cover body 310 jointly enclose the energy storage space 304. In the high-temperature test or low-temperature test mode, the energy storage space 304 can achieve a certain degree of heat storage or cold storage effect. Optionally, please refer to Figure 5 and Figure 10 The cover body 310 is composed of four side plates and a top plate. In this way, by arranging the energy storage space 304, it is not only beneficial to maintain the temperature stability of the memory unit periphery, but also can reduce the energy consumption of the equipment operation.

[0059] Please refer to Figure 1 and Figure 2 Optionally, in some embodiments, the type of the memory unit is configured as a memory riser, the test area 501 is provided with a memory slot 502 for installing the memory riser, the air supply member 320 is provided with an air supply port 303 arranged in the form of a slit hole, and the long axis of the air supply port 303 extends along the length direction of the memory slot 502. In this way, the slit hole-shaped air supply port 303 can blow air to different areas of the memory riser in the length direction at the same time, so that the heat received by different areas of the memory riser is as same as possible, thereby improving the test accuracy. Further, there can be two air supply ports 303 corresponding to one memory slot 502, and the two air supply ports 303 are distributed along the length direction of the memory slot 502.

[0060] Please refer to Figure 5 In an embodiment, the tester 500 is distributed with four memory slots 502 along the left-right direction, and the air supply port 303 is provided with eight air supply ports in total, every two air supply ports 303 form a group responsible for blowing air to one memory slot 502, four groups of air supply ports 303 are distributed along the left-right direction, and the two air supply ports 303 in the same group are distributed along the front-back direction.

[0061] Please refer to Figure 9 and Figure 11Optionally, in some embodiments, the long axis of the air supply port 303 extends along a first direction (i.e. the front-rear direction shown in the figure), the plurality of air supply ports 303 are spaced apart along a second direction (i.e. the left-right direction shown in the figure) and are arranged on opposite sides of the air inlet port 203, the second direction intersects the first direction, the air supply passage 302 comprises an air inlet section 305 and two air supply sections 306, the air inlet section 305 extends along the second direction and is connected between the two air supply sections 306, the air inlet port 203 is connected to the air inlet section 305, and the air supply port 303 is connected to the air supply section 306. That is, the air inlet section 305 and the two air supply sections 306 together form a generally H-shaped structure. In this way, by using the air inlet section 305 to distribute the airflow to the air supply sections 306 on both sides, and then using the air supply sections 306 to distribute the airflow to the different air supply ports 303 thereon, the airflow that each air supply port 303 can distribute is made as consistent as possible.

[0062] Optionally, in other embodiments, the memory units are configured as memory particles, the test area 501 is provided with mounting positions 503 for mounting the memory particles, the air supply member 320 is provided with a plurality of air nozzles 324, the air supply port 303 is arranged at the air nozzle 324, and one air nozzle 324 corresponds to one memory particle. In this way, each memory particle (memory chip) can be subjected to the blowing action of one air nozzle 324, so that the heat received by different memory particles is made as consistent as possible.

[0063] Referring to Figure 12 and Figure 13 In another embodiment, the tester 500 is provided with a total of sixteen mounting positions 503, wherein four mounting positions 503 form a group, and four groups of mounting positions 503 are arranged in a rectangular array; the four mounting positions 503 in the same group are distributed along the left-right direction. The air nozzles 324 are a total of sixteen and are arranged corresponding to the distribution positions of the mounting positions 503, so that each air nozzle 324 is responsible for blowing the memory particles on one mounting position 503.

[0064] Referring to Figures 13 to 16 Optionally, in other embodiments, the air supply member 320 is provided with two rows of air nozzles 324 arranged on both sides of the air supply port 303 along a first direction (i.e. the front-rear direction shown in the figure), the plurality of air nozzles 324 in the same row are spaced apart along a second direction (i.e. the left-right direction shown in the figure), the second direction intersects the first direction, the air supply passage 302 comprises an air inlet section 305 and two air supply sections 306, the air inlet section 305 extends along the first direction and is connected between the two air supply sections 306, the air inlet port 203 is connected to the air inlet section 305, and the air supply port 303 is connected to the air supply section 306. In this way, by using the air inlet section 305 to distribute the airflow to the air supply sections 306 on both sides, and then using the air supply sections 306 to distribute the airflow to the different air supply ports 303 thereon, the airflow that each air supply port 303 can distribute is made as consistent as possible.

[0065] Referring to Figure 5 Optionally, in some embodiments, the edge of the cover opening 301 is provided with a first protruding rib 311 and a first elastic member 350, and the test table 400 comprises a sealing jig 410 and a second elastic member 420, the outer periphery of the sealing jig 410 is provided with a second protruding rib 411 which is arranged around the outer periphery of the second elastic member 420, the first protruding rib 311 abuts on the second elastic member 420 (first sealing), and the second protruding rib 411 abuts on the second elastic member 420 (second sealing). In the drawings, the first protruding rib 311 and the second elastic member 420 have overlapping parts, and the second protruding rib 411 also has overlapping parts with the second elastic member 420, which is used to indicate that there is a certain amount of interference between the two components (for example, the first protruding rib 311 and the second elastic member 420) to improve the sealing effect. In this way, by arranging two seals between the edge of the cover opening 301 of the gas supply cover 300 and the sealing jig 410, the uncontrolled overflow of test gas and heat can be effectively avoided, thereby reducing the operating energy consumption of the equipment.

[0066] Optionally, the materials of the first elastic member 350 and the second elastic member 420 can be silicone, rubber or other materials with elastic deformation capability, which are not limited in the present application.

[0067] Referring to Figure 5 Optionally, in some embodiments, the gas supply module 100 further comprises a temperature sensor 340 and a transmission wire 341, the temperature sensor 340 is exposed in the energy storage space 304, the lower end of the transmission wire 341 is connected to the temperature sensor 340, and the upper end of the transmission wire 341 penetrates out of the cover body 310 and is exposed outside. The transmission wire 341 is used in communication connection with the gas source machine, so as to adjust the working parameters of the gas source machine by means of the signals collected by the temperature sensor 340. In this way, the actual temperature in the energy storage space 304 is monitored in real time by using the temperature sensor 340, and is used as the basis for adjusting the working of the gas source machine, which can make the test results more accurate and reliable.

[0068] Referring to Figures 6 to 8 , Figure 17 Optionally, in some embodiments, the gas supply cover 300 further comprises a gas return member 330, the gas return member 330 is also provided with a gas return channel 331 and at least two gas return openings 332 which respectively communicate with the gas return channel 331, the gas return opening 332 communicates with the energy storage space 304, the flow structure 200 is also provided with an air outlet air duct 204, an air outlet passing opening 206 and an air outlet opening 205, the air outlet air duct 204 is communicated between the air outlet passing opening 206 and the air outlet opening 205, the air outlet passing opening 206 communicates with the gas return opening 332, and the air outlet air duct 204 and the air inlet air duct 201 are arranged in the same installation space.

[0069] Specifically, taking the high-temperature test mode as an example, the airflow has a high temperature when flowing through the air inlet duct 201, and then the heat is absorbed by the internal storage unit and other components when flowing through the energy storage space 304. The airflow with a decreased temperature is orderly guided to the outside of the air supply module 100 through the air return member 330 and the air return channel 331. Since the airflow flowing through the air return channel 331 still has a certain amount of heat (the temperature of the airflow is higher than the room temperature), the guided airflow can use the residual heat to heat the air in the installation space, so that the ambient environment (i.e. the installation space) of the air inlet duct 201 is higher than the room temperature, thereby reducing the degree of heat exchange between the air inlet duct 201 and the air in the installation space, so that the airflow can retain more heat to flow into the air supply member 320 from the air inlet duct 201.

[0070] In this way, by using the air return member 330 and the air outlet duct 204 to controllably guide the air in the energy storage space 304 to the outside of the air supply module 100, the residual heat of the guided airflow can be reused under the premise of maintaining the effective and stable temperature field of the energy storage space 304, thereby reducing the operating energy consumption of the device and achieving the purposes of energy saving and environmental protection.

[0071] Please refer to Figure 8 and Figure 10 , wherein the air inlet duct 201 is provided with one, and the air outlet duct 204 is provided with two, the air outlet duct 204 is distributed on the left and right sides of the air inlet duct 201, and is arranged adjacent to the air inlet duct 201, and the diameter of the air outlet duct 204 is smaller than that of the air inlet duct 201. The cover body 310 is provided with a first cover body through hole 312 and two second cover body through holes 313, the first cover body through hole 312 is provided for the air inlet duct 201 to pass through, and the second cover body through hole 313 is provided for the air outlet duct 204 to pass through. In this way, the two air outlet ducts 204 simultaneously exchange heat with the air in the installation space, which can improve the utilization degree of the heat of the guided airflow. Of course, in other embodiments, the number of air inlet ducts 201 and air outlet ducts 204 can also be other values.

[0072] Please refer to Figure 5 and Figure 10Optionally, in some embodiments, the air supply member 320 comprises a first base plate 321 connected to the inner wall surface of the cover body 310 and a first cover 322 covering the lower plate surface of the first base plate 321, and the air supply passage 302 is formed between the first cover 322 and the first base plate 321; the air return member 330 comprises a second base plate and a second cover 333 covering the upper plate surface of the second base plate, and the air return passage 331 is formed between the second cover 333 and the second base plate; the first base plate 321 and the second base plate are configured in the same structure and are provided with the air return port 332. That is, the air supply member 320 and the air return member 330 share the same base plate (i.e., the first base plate 321), which can simplify the structure and reduce the manufacturing cost.

[0073] Referring to Figure 10 In the embodiment, the eight air return ports 332 are distributed along the left-right direction on the front side of the first base plate 321, and the other four air return ports 332 are distributed along the left-right direction on the rear side of the first base plate 321.

[0074] Referring to Figure 5 and Figure 7 Optionally, in some embodiments, the outer wall surface of the second cover 333 is spaced apart from the inner wall surface of the cover body 310 to form a heat insulation space 307, and the heat insulation space 307 is filled with gas. In this way, by arranging the heat insulation space 307 above and around the air return member 330, the air in the heat insulation space 307 can play a certain heat insulation effect, which can reduce the heat conduction of the air supply member 320 and the air return member 330 to the cover body 310 and the loss, thereby reducing the operating energy consumption of the equipment. Moreover, no additional heat insulation material needs to be installed in the heat insulation space 307, which is conducive to reducing the manufacturing cost of the equipment. Of course, in other embodiments, the heat insulation space 307 can be filled with heat insulation materials such as heat insulation cotton.

[0075] In order to further reduce the heat overflow in the air supply member 320 and the energy storage space 304, referring to Figure 5 and Figure 7 Optionally, in some embodiments, the first cover 322 is spaced apart from the inner wall surface of the cover body 310, and the air supply cover 300 further comprises an inner heat insulation member 361 arranged on the inner wall surface of the energy storage space 304, and part of the inner heat insulation member 361 is filled in the space between the first cover 322 and the cover body 310. In this way, the inner heat insulation member 361 can reduce the heat conduction from the air supply member 320 to the cover body 310 and the heat transfer from the energy storage space 304 to the cover body 310 and the loss, thereby reducing the operating energy consumption of the equipment.

[0076] Referring to Figure 5 and Figure 7Optionally, in some embodiments, the air supply cover 300 further comprises a cover shell 363 covering outside of the cover body 310 and an outer thermal insulation 362 filled in the space between the cover shell 363 and the cover body 310. In this way, the inner thermal insulation 361 plays a first heavy thermal insulation role and the outer thermal insulation 362 plays a second heavy thermal insulation role, so as to further reduce the heat overflow degree in the air supply member 320 and the energy storage space 304 and reduce the operation energy consumption of the device. In addition, the cover shell 363 can also play a protection role.

[0077] Please refer to Figure 5 , Figure 6 , Figure 8 and Figure 10 , specifically, the flow structure 200 comprises a protective shell 210, an air inlet main pipe 220, an air inlet auxiliary pipe 230, two air outlet main pipes 240 and two air outlet auxiliary pipes 250. The protective shell 210 comprises a coaming 211, a top cover 212 and a bottom cover 213. The top cover 212 is installed at the upper end of the coaming 211, and the bottom cover 213 is installed at the lower end of the coaming 211. The top cover 212 is provided with a first top through hole 214 and two second top through holes 215, and the bottom cover 213 is provided with a first bottom through hole 216 and two second bottom through holes 217.

[0078] Please refer to Figure 5 , Figure 6 , Figure 8 and Figure 10 , the air inlet main pipe 220 and the two air outlet main pipes 240 are arranged in the coaming 211, and the two air outlet main pipes 240 are arranged on the left and right sides of the air inlet main pipe 220. It can be understood that the internal space of the protective shell 210 is the mounting space mentioned above. The upper pipe port of the air inlet main pipe 220 is communicated with the first top through hole 214, the upper end of the air inlet auxiliary pipe 230 extends into the first bottom through hole 216, and the upper pipe port of the air inlet auxiliary pipe 230 is communicated with the lower pipe port of the air inlet main pipe 220. The first base plate 321 is provided with an air inlet mounting hole 323, the lower end of the air inlet auxiliary pipe 230 passes through the first cover body through hole 312 and the second cover body 333 of the cover body 310, and is inserted and mounted in the air inlet mounting hole 323 of the first base plate 321, so that the lower pipe port of the air inlet auxiliary pipe 230 can be communicated with the air supply channel 302. The air inlet air duct 201 is formed on the first top through hole 214, the air inlet main pipe 220 and the air inlet auxiliary pipe 230, and the top through hole is configured as an air inlet port 202. The lower pipe port of the air inlet auxiliary pipe 230 is configured as an air inlet through port 203.

[0079] Please refer to Figure 5 , Figure 6 , Figure 8 and Figure 10The upper end of the air outlet main pipe 240 penetrates the second top through hole 215, the upper pipe opening of the air outlet main pipe 240 is exposed above the protective shell 210, the lower pipe opening of the air outlet main pipe 240 is communicated with the upper pipe opening of the air outlet auxiliary pipe 250 through the second bottom through hole 217 and the second cover through hole 313, and the upper end of the air outlet auxiliary pipe 250 is inserted and arranged in the second cover through hole 313. The second cover 333 is provided with an air outlet mounting hole 334, the lower end of the air outlet auxiliary pipe 250 penetrates the second cover through hole 313 of the cover body 310 and is inserted and arranged in the air outlet mounting hole 334, so that the lower pipe opening of the air outlet auxiliary pipe 250 can be communicated with the air return channel 331. The air outlet air duct 204 is formed on the air outlet main pipe 240, the second bottom through hole 217 and the air outlet auxiliary pipe 250, and the upper pipe opening of the air outlet main pipe 240 is configured as an air outlet 205, and the lower pipe opening of the air outlet auxiliary pipe 250 is configured as an air return port.

[0080] Of course, in other embodiments, the overflow structure 200 can also adopt other structural forms as long as the functions and effects of the present application can be achieved, and the present application does not make specific limitations hereon.

[0081] It is worth mentioning that in the embodiment provided with the heating coil, the heating coil can be arranged on the outer circumferential surface of the air inlet main pipe 220 and the air outlet main pipe 240.

[0082] Please refer to Figure 2 and Figure 3 , the present application also provides a memory unit test system, which comprises a test bench 400, a test instrument 500, a gas source machine and a memory unit test system, and the specific structure of the memory unit test system is referred to the above-mentioned embodiments. Since the present memory unit test system adopts all the technical solutions of the above-mentioned embodiments, it at least has all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be repeated here.

[0083] Please refer to Figure 2 and Figure 3 , wherein the test bench 400 is provided with a moving module 430 on the test bench surface 401, the test instrument 500 is provided with a test area 501 for mounting a plurality of memory units, the test area 501 is exposed on the test bench surface 401 of the test bench 400, the gas source machine is provided with a refrigeration structure, a drying structure and a gas guide pipe and is used for providing dry cold gas or normal temperature gas. The air feeding module 100 is mounted on the moving module 430 and can move relative to the test area 501, the air inlet 202 of the air feeding module 100 is communicated with the gas guide pipe, and the gas output by the gas source machine flows into the air inlet 202 through the gas guide pipe. The air feeding module 100 further comprises a heating structure arranged in the air inlet air duct 201, and the heating structure can heat the gas in the air inlet air duct 201.

[0084] Please refer to Figure 2 , Figure 3 andFigure 5 Optionally, in some embodiments, the test bench 400 further comprises a mounting jig 440 arranged on the surface of the test bench 400, and the sealing jig 410 is mounted on the upper surface of the mounting jig 440. The moving module 430 comprises a transverse moving module 431 and a lifting module 434. The transverse moving module 431 comprises two guide rails 432 extending along a first direction, a gantry 433 arranged across the two guide rails 432, and a first driving member for driving the gantry 433 to move. The two guide rails 432 are arranged on the left and right sides of the mounting jig 440, and the gantry 433 is capable of moving along the first direction. The lifting module 434 is mounted on the gantry 433 and comprises a second driving member and a mounting seat. The protective shell 210 of the gas supply module 100 is mounted on the mounting seat and is capable of lifting movement under the driving of the second driving member.

[0085] Referring to FIG. 1, Figure 2 and Figure 3 , Figure 2 the gas supply module 100 is arranged above the front side of the sealing jig 410, so that the sealing jig 410 is exposed as a whole, facilitating the disassembly and replacement of the memory unit. Figure 3 The gas supply module 100 is arranged above the sealing jig 410 and is in sealing cooperation with the sealing jig 410.

[0086] Referring to FIG. 1, Figure 18 On the basis of the structure of the foregoing embodiments, optionally, in some other embodiments, the gas source machine 600 further comprises a gas source main pipe 611, a first gas source branch pipe 612, a second gas source branch pipe 613, and a control valve for controlling the gas source main pipe 611 to selectively conduct the first gas source branch pipe 612 and the second gas source branch pipe 613. The first gas source branch pipe 612 is connected between the gas outlet end of the gas source main pipe 611 and the gas inlet end of the drying structure 632. The second gas source branch pipe 613 is connected between the gas outlet end of the gas source main pipe 611 and the gas inlet end of the refrigeration structure 631. The gas outlet end of the refrigeration structure 631 is connected to the gas inlet end of the drying structure 632, and the gas outlet end of the drying structure 632 is connected to the gas inlet end of the gas guide pipe 619.

[0087] Specifically, in the high-temperature and normal-temperature test modes, the gas in the gas source main pipe 611 can directly flow to the drying structure 632 and the gas guide pipe 619 through the first gas source branch pipe 612. In the low-temperature test mode, the gas in the gas source main pipe 611 can first flow into the refrigeration structure 631 through the second gas source branch pipe 613, and then flow to the drying structure 632 and the gas guide pipe 619 after being cooled by the refrigeration of the refrigeration structure 631. In this way, by cooperation of the control valve and the two gas source branch pipes, multiple test modes of the memory unit test system are realized, and the structure is simple and easy to realize.

[0088] It should be noted that, Figure 18The internal structure of the air feeding module 100 shown is simplified and schematic. In actual applications, the internal structure of the air feeding module 100 can refer to the specific structure of the foregoing embodiments, including but not limited to the air supply member 320 and the air return member 330, etc.

[0089] Please refer to Figure 18 Optionally, in yet some embodiments, the control valve includes a first reversing valve 621 and a second reversing valve 622, the first reversing valve 621 is arranged at the first gas source branch pipe 612, and the second reversing valve 622 is arranged at the second gas source branch pipe 613. That is, a reversing valve that works independently is arranged on each gas source branch pipe, and the opening of the reversing valve can make the corresponding gas source branch pipe conductive, and the closing of the reversing valve can make the corresponding gas source branch pipe cut off. In this way, the structure is simple and easy to implement. Of course, in other embodiments, the control valve can also be in the form of a two-position three-way electromagnetic valve.

[0090] It should be noted that the gas used by the memory unit test system in the present application can have multiple options, for example, it can be air or inert gas. Among them, inert gas includes but is not limited to helium and nitrogen, and it can be either one of the two or a mixture of the two.

[0091] For example, in yet some embodiments, the gas source machine 600 further includes a gas source supply structure (not shown in the drawings), which is communicated at the air inlet end of the gas source main pipe 611 and can deliver inert gas to the air feeding module 100, the inert gas including helium and / or nitrogen. Among them, the gas source supply structure can be a device that can directly prepare inert gas, or a storage tank filled with high-pressure inert gas.

[0092] Taking the mixed gas of helium and nitrogen as an example, on the one hand, the use of helium can improve the accuracy and efficiency of the test. The use of helium can accelerate heat balance and heat transfer due to its inertness and rapid heat conduction characteristics, so that the memory unit 504 can quickly reach a stable working temperature during the test process, reducing the test error caused by temperature fluctuations. On the other hand, the use of nitrogen can reduce the probability of fire during the test process and improve the safety of the equipment.

[0093] It can be understood that in the embodiment using air, since air is easy to obtain, the air feeding module 100 can adopt a single-in single-out gas flow mode. That is, after the air flows through the gas source machine 600 and the air feeding module 100 and flows out of the air outlet 205 of the air feeding module 100, it can not be recycled.

[0094] In the embodiment using inert gas, since the inert gas has a high acquisition cost, the air supply module 100 can adopt a recycling gas flow mode. That is, after the inert gas flows through the air source machine 600 and the air supply module 100 and flows out of the air outlet 205 of the air supply module 100, the inert gas can be recycled and recycled between the air source machine 600 and the air supply module 100. To achieve the recycling of the inert gas, the heat carried by the inert gas can also be fully utilized, thereby reducing the operating energy consumption of the memory cell test system and facilitating the realization of energy saving and environmental protection.

[0095] As to how to realize the circulation of the gas between the air source machine 600 and the air supply module 100, the recycling pipeline and the circulating fan 634 can be added on the basis of the structure of the foregoing embodiment.

[0096] For example, please refer to Figure 18 In still other embodiments, the air source machine 600 further includes a recycling main pipe 614, a first recycling branch pipe 615, a second recycling branch pipe 616, and a circulating fan 634. The circulating fan 634 is connected between the air inlet end of the recycling main pipe 614 and the air outlet 205 and is used to promote the flow of the gas from the air outlet 205 to the recycling main pipe 614. The air outlet end of the recycling main pipe 614 is connected to the air inlet end of the first recycling branch pipe 615 and the air inlet end of the second recycling branch pipe 616. The control valve is further used to control the recycling main pipe 614 to selectively connect the first recycling branch pipe 615 and the second recycling branch pipe 616. The air outlet end of the first recycling branch pipe 615 is connected to the air inlet end of the drying structure 632, and the air outlet end of the second recycling branch pipe 616 is connected to the air inlet end of the refrigeration structure 631.

[0097] In this way, the recycling main pipe 614, the first recycling branch pipe 615, the second recycling branch pipe 616, and the circulating fan 634 can jointly build a gas circulation loop between the air supply module 100 and the air source machine 600, which is simple in structure and easy to implement.

[0098] Please refer to Figure 18 Optionally, in still other embodiments, the control valve includes a third switching valve 623 and a fourth switching valve 624. The third switching valve 623 is arranged in the first recycling branch pipe 615, and the fourth switching valve 624 is arranged in the second recycling branch pipe 616. That is, a switching valve that works independently is arranged on each recycling branch pipe. The opening of the switching valve can make the corresponding recycling branch pipe conductive, and the closing of the switching valve can make the corresponding recycling branch pipe cut off. In this way, the structure is simple and easy to implement.

[0099] It can be understood that when the gas supply module 100 is in the closed state (i.e., its sealing cover is closed on the test bench 400), because the gas in the circulation loop has a certain positive pressure, it is difficult for external air to enter the circulation loop. However, when the gas supply module 100 is in the open state (as shown in Figure 2 , if not intervened, external air will enter the inside of the gas supply module 100 and the gas source machine 600 through the cover opening 301 of the gas supply cover 300, resulting in that after the circulation loop is re-established next time, there is a lot of air mixed in the circulation loop, which is not conducive to the advantages of inert gas.

[0100] Therefore, in order to reduce the degree of external air entering the inside of the gas supply module 100 and the gas source machine 600 when the gas supply module 100 is in the open state (as shown in Figure 2 , optionally, in some embodiments, the gas supply module 100 further comprises an exhaust valve 371, a first one-way valve 372 and an exhaust valve 373. The exhaust valve 371 is arranged on the cover wall of the gas supply cover 300 and communicates between the inside and outside of the gas supply cover 300, and is configured to be opened in the emptying state and closed in the internal circulation state. The first one-way valve 372 is arranged in the air inlet duct 201 and is used to limit the flow of gas from the air inlet opening 203 to the air inlet 202. The exhaust valve 373 is arranged in the air outlet duct 204 and is configured to be closed in the open cover state and the emptying state, and to be opened in the internal circulation state.

[0101] Please refer to Figures 19 to 22 , the dashed line with an arrow in the figure is used to represent the flow direction of the gas.

[0102] Among them, Figure 19 , as shown in the figure, the gas supply module 100 is in the open state, because the exhaust valve 373 is closed, the air outlet duct 204 is cut off, and the first one-way valve 372 is arranged at the air inlet duct 201, therefore, even if the external air enters the inside of the gas supply cover 300, it cannot continue to invade the inside of the air inlet duct 201, the air outlet duct 204 and the gas source machine 600. At this time, the exhaust valve 371 can be opened or closed.

[0103] Figure 20 , as shown in the figure, the gas supply module 100 is in the closed state, and the internal memory unit test system is in the emptying state, that is, after the gas supply module 100 is re-opened, the first stage of the inert gas supplied by the gas source machine 600 to the gas supply module 100, the air in the gas supply module 100 is expelled by the inert gas. In Figure 20In the shown scenario, since the exhaust valve 371 is open and the outlet reversing valve 373 is closed, the inert gas flowing from the inlet air duct 201 will carry the residual air in the supply hood 300 and flow to the exhaust valve 371, and finally flow out to the outside of the supply hood 300 through the exhaust valve 371. At this time, the first gas source branch can be used to directly deliver inert gas to the gas supply module 100, avoiding the refrigeration structure 631, so that the inert gas has higher positive pressure and more kinetic energy when it flows to the supply hood 300, thereby improving its air expelling effect.

[0104] Figure 21 The shown gas supply module 100 is in the closed state, and the internal memory unit test system is in the low-temperature test mode. At this time, the exhaust valve 371 is closed, the outlet reversing valve 373 is open, the third reversing valve 623 is closed, the fourth reversing valve 624 is open, and the circulating fan 634 is working to build a circulating loop between the gas source machine 600 and the gas supply module. Specifically, the inert gas can start from the refrigeration structure 631, flow through the manifold branch pipe 617, the manifold main pipe 618, the filter structure 633, the drying structure 632, the gas guide pipe 619, the inlet air duct 201, the inside of the supply hood 300, the outlet air duct 204, the recovery main pipe 614, and the second recovery branch pipe 616, and finally flow back to the refrigeration structure 631 for the next circulation flow. In this circulation flow, the inert gas continuously flows through the internal memory unit 504 inside the supply hood 300 and cools the internal memory unit 504.

[0105] Figure 22 The shown gas supply module 100 is in the closed state, and the internal memory unit test system is in the low-temperature test mode. At this time, the exhaust valve 371 is closed, the outlet reversing valve 373 is open, the third reversing valve 623 is closed, the fourth reversing valve 624 is open, and the circulating fan 634 is working to build a circulating loop between the gas source machine 600 and the gas supply module. Specifically, the inert gas can start from the refrigeration structure 631, flow through the manifold branch pipe 617, the manifold main pipe 618, the filter structure 633, the drying structure 632, the gas guide pipe 619, the inlet air duct 201, the inside of the supply hood 300, the outlet air duct 204, the recovery main pipe 614, and the second recovery branch pipe 616, and finally flow back to the refrigeration structure 631 for the next circulation flow. In this circulation flow, the inert gas continuously flows through the internal memory unit 504 inside the supply hood 300 and cools the internal memory unit 504.

[0106] Optionally, in yet some embodiments, the air source machine 600 further comprises a converging branch pipe 617, a converging main pipe 618, a filtering structure 633, a second one-way valve 625, a third one-way valve 626 and a fourth one-way valve 627, the converging branch pipe 617 has an air inlet end connected to an air outlet end of the refrigeration structure 631, the converging branch pipe 617, the air outlet end of the first recovery branch pipe 615 and the air outlet end of the first air source branch pipe 612 are all connected to the converging main pipe 618, and the converging main pipe 618 is connected to an air inlet end of the filtering structure 633, and an air outlet end of the filtering structure 633 is connected to an air inlet end of the drying structure 632; the second one-way valve 625 is arranged in the first recovery branch pipe 615 and is used to limit the air flow from the converging main pipe 618 to the first recovery branch pipe 615; the third one-way valve 626 is arranged in the converging branch pipe 617 and is used to limit the air flow from the converging main pipe 618 to the refrigeration structure 631; and the fourth one-way valve 627 is arranged in the first air source branch pipe 612 and is used to limit the air flow from the converging main pipe 618 to the first air source branch pipe 612. In this way, by arranging the second one-way valve 625, the third one-way valve 626 and the fourth one-way valve 627, when the memory unit test system is switched between different temperature test modes, the air flow can circulate in a better path, avoiding backflow and accumulation in some areas of the pipeline.

[0107] In order to make the air flow circulate better, further, the air source machine 600 further comprises a fifth one-way valve 628 and a sixth one-way valve 629, the fifth one-way valve 628 is arranged in the second recovery branch pipe 616 and is used to limit the air flow from the refrigeration structure 631 to the second recovery branch pipe 616; and the sixth one-way valve 629 is arranged in the second air source branch pipe 613 and is used to limit the air flow from the refrigeration structure 631 to the second air source branch pipe 613.

[0108] Please refer to Figures 23 to 25 In still some embodiments, the air supply cover 300 is provided with an energy storage space 304 and a heat insulation space 307, the heat insulation space 307 is arranged around the outer circumferential side and the upper side of the energy storage space 304, the heat insulation space 307 has opposite first and second sides, the energy storage space 304 is connected to the first side of the heat insulation space 307, the air supply channel 302 and the air outlet duct 204 respectively, and the exhaust valve 371 is connected to the second side of the heat insulation space 307.

[0109] The structure of the heat insulation space 307 and the energy storage space 304 can refer to the solutions of the previous embodiments, or other solutions can be used, as long as the heat insulation space 307 is arranged around the outside of the energy storage space 304 to achieve the effect of heat insulation and temperature field distribution of the energy storage space 304.

[0110] It can be understood that the structure of the heat insulation space 307 and the energy storage space 304 is not limited to be applied to Figure 23The embodiment shown can also be applicable to Figure 18 The embodiment shown can also be applicable to

[0111] Specifically, Figure 24 The air supply module 100 shown is in the closed state, and the memory unit 504 test system is in the emptying state, that is, after the air supply module 100 is reopened, the first stage of the inert gas delivered by the air source machine 600 to the air supply module 100, the air in the air supply module 100 is continuously expelled by the inert gas. In Figure 24 In the scenario shown, because the exhaust valve 371 is open, the heat dissipation reversing valve 645 and the bypass reversing valve 646 are both closed, so the inert gas flowing from the air inlet duct 201 will carry the residual air in the energy storage space 304 and flow to the first side of the heat insulation space 307. Then it flows into the heat insulation space 307, and then flows through the heat insulation space 307 to the exhaust valve 371, and finally flows out to the outside of the air supply cover 300 through the exhaust valve 371.

[0112] Figure 25 The air supply module 100 shown is in the closed state, and the memory unit 504 test system is in the high-temperature test mode, at which time the exhaust valve 371 is closed, the air outlet reversing valve 373 is open, the third reversing valve 623 is open, the fourth reversing valve 624 is closed, and the heating structure 260 and the circulating fan 634 are both working, so as to build a circulating loop between the air source machine 600 and the air supply module. Specifically, the inert gas can start from the manifold 618, flow through the filter structure 633, the drying structure 632, the air guide pipe 619, the air inlet duct 201, the energy storage space 304, the air outlet duct 204, the recovery manifold 614, and the first recovery branch pipe 615, and finally flow back to the manifold 618 for the next circulation. In this circulating flow, the inert gas continuously flows through the memory unit 504 inside the air supply cover 300, and heats the memory unit 504.

[0113] In the process of switching the test system from Figure 24 The state shown is switched to Figure 25 In the process of switching the test system from

[0114] It can be understood that in the process of switching the test system from Figure 24 The state shown is switched to Figure 25In the process of the state shown, before the exhaust valve 371 switches to the closed state, high-temperature gas can also be continuously input to the storage space 304 for a period of time, so that the high-temperature gas can fill the heat insulation space 307, and then the exhaust valve 371 is closed. Then, after the test system enters the state shown in the subsequent process Figure 25 At the state shown, the high-temperature gas filled in the heat insulation space 307 can have a better heat insulation effect.

[0115] Please refer to Figure 25 and Figure 26 Optionally, in still other embodiments, the recovery main pipe 614 includes a recovery branch pipe 641, a heat dissipation branch pipe 642, a bypass branch pipe 643, and a recovery collecting pipe 644, the air inlet end of the recovery branch pipe 641 is communicated with the circulating fan 634, the air outlet end of the recovery branch pipe 641 can be communicated with the air inlet end of the heat dissipation branch pipe 642 and the air inlet end of the bypass branch pipe 643 under the adjustment of the control valve, the air outlet end of the heat dissipation branch pipe 642 and the air outlet end of the bypass branch pipe 643 are both communicated with the air inlet end of the recovery collecting pipe 644, the air outlet end of the recovery collecting pipe 644 is communicated with the air inlet end of the first recovery branch pipe 615 and the air inlet end of the second recovery branch pipe 616, and the heat dissipation branch pipe 642 is provided with a radiator 649.

[0116] It can be understood that, compared with the embodiment shown in Figure 18 , the main difference between the embodiment shown in Figure 25 and Figure 26 is that the heat dissipation branch pipe 642 and the radiator 649 thereon are additionally provided.

[0117] Please refer to Figure 25 and Figure 26 Optionally, in still other embodiments, the control valve includes a heat dissipation reversing valve 645 and a bypass reversing valve 646, the heat dissipation reversing valve 645 is arranged in the heat dissipation branch pipe 642, and the bypass reversing valve 646 is arranged in the bypass branch pipe 643.

[0118] Figure 25The air supply module 100 is shown in the closed state, and the memory unit 504 test system is in the high-temperature test mode. At this time, the exhaust valve 371 is closed, the heat dissipation reversing valve 645 is closed and the bypass reversing valve 646 is opened, the third reversing valve 623 is opened, the fourth reversing valve 624 is closed, the heating structure 260 and the circulating fan 634 are all working, so as to build a circulating loop between the air source machine 600 and the air supply module. Specifically, the inert gas can start from the manifold 618, flow through the filter structure 633, the drying structure 632, the air guide pipe 619, the air inlet duct 201, the energy storage space 304, the air outlet duct 204, the recovery branch pipe 641, the bypass branch pipe 643, the recovery manifold 644, the first recovery branch pipe 615, and finally flow back to the manifold 618 for the next circulating flow. In this circulating flow, the inert gas continuously flows through the memory unit 504 inside the air supply cover 300 and heats the memory unit 504.

[0119] Figure 26 The air supply module 100 is shown in the closed state, and the memory unit 504 test system is in the high-temperature test mode. At this time, the exhaust valve 371 is closed, the heat dissipation reversing valve 645 is closed and the bypass reversing valve 646 is opened, the third reversing valve 623 is opened, the fourth reversing valve 624 is closed, the heating structure 260 and the circulating fan 634 are all working, so as to build a circulating loop between the air source machine 600 and the air supply module. Specifically, the inert gas can start from the manifold 618, flow through the filter structure 633, the drying structure 632, the air guide pipe 619, the air inlet duct 201, the energy storage space 304, the air outlet duct 204, the recovery branch pipe 641, the bypass branch pipe 643, the recovery manifold 644, the first recovery branch pipe 615, and finally flow back to the manifold 618 for the next circulating flow. In this circulating flow, the inert gas continuously flows through the memory unit 504 inside the air supply cover 300 and heats the memory unit 504.

[0120] Please refer to Figure 23 , in order to make the air flow better circulating flow, further, the air source machine 600 further comprises a seventh one-way valve 647 and an eighth one-way valve 648, the seventh one-way valve 647 is arranged at the air outlet end of the heat dissipation branch pipe 642 and is used for limiting the air flow from the recovery manifold 644 to the heat dissipation branch pipe 642; the eighth one-way valve 648 is arranged at the air outlet end of the bypass branch pipe 643 and is used for limiting the air flow from the recovery manifold 644 to the bypass branch pipe 643.

[0121] The above only describes the exemplary embodiments of the present application, and does not limit the patent scope of the present application, and any equivalent structural transformation made under the technical concept of the present application, or direct / indirect application in other related technical fields is included in the patent protection scope of the present application.

Claims

1. An air supply module, applied in a memory cell testing system, characterized in that, The memory cell testing system includes a test bench and a tester. The tester has a test area for mounting multiple memory cells, the test area being exposed on the test bench surface. The air supply module includes: The flow structure includes an air intake duct and an air intake port and an air intake outlet respectively connected to the air intake duct; and An air supply hood is provided with a hood opening, an air supply channel, and an air supply port. The edge of the hood opening covers the test area. The air supply port is connected to the air inlet through the air supply channel. The gas blown out by the air supply port flows through the hood opening to the memory unit. Each memory unit is subjected to the blowing action of at least one of the air supply ports.

2. The air delivery module as described in claim 1, characterized in that, The air supply hood includes a hood body and an air supply component. The air supply channel and the air supply port are both located in the air supply component. The hood opening is located in the hood body. The air supply component is located inside the hood body and is spaced apart from the edge of the hood opening. The end face of the air supply component near the hood opening and the inner wall surface of the hood body together enclose an energy storage space.

3. The air delivery module as described in claim 2, characterized in that, The memory unit is configured as a memory module, the test area is provided with a memory slot for installing the memory module, and the air supply component has an air supply port that is configured as a slit, and the long axis of the air supply port extends along the length direction of the memory slot. Alternatively, the memory unit may be configured as a memory chip, the test area may have an installation position for installing the memory chip, the air supply unit may have multiple air nozzles, the air supply port may be located at the air nozzle, and one air nozzle may correspond to one memory chip.

4. The air delivery module as described in claim 3, characterized in that, The long axis of the air supply port extends along a first direction, and multiple air supply ports are distributed at intervals along a second direction and are respectively located on opposite sides of the air inlet. The second direction intersects with the first direction. The air supply channel includes an air inlet section and two air supply sections. The air inlet section extends along the second direction and connects between the two air supply sections. The air inlet is connected to the air inlet section, and the air supply port is connected to the air supply section. Alternatively, the air supply component may have two rows of air nozzles distributed along a first direction on both sides of the air supply port, and multiple air nozzles in the same row may be distributed at intervals along a second direction, the second direction being intersected by the first direction. The air supply channel may include an air inlet section and two air supply sections, the air inlet section extending along the first direction and connecting between the two air supply sections, the air inlet port connecting to the air inlet section, and the air supply port connecting to the air supply section.

5. The air delivery module as described in claim 2, characterized in that, The edge of the cover opening is provided with a first rib and a first elastic element. The test bench includes a sealing fixture and a second elastic element. The outer periphery of the sealing fixture is provided with a second rib. The second rib is arranged around the outer periphery of the second elastic element. The first rib abuts against the second elastic element. The second rib abuts against the second elastic element. And / or, the air delivery module further includes a temperature sensor and a transmission wire, the temperature sensor being exposed within the energy storage space, the lower end of the transmission wire being connected to the temperature sensor, and the upper end of the transmission wire extending out of the cover body and exposed to the outside.

6. The air delivery module as described in claim 2, characterized in that, The air supply hood also includes an air return component, which is provided with an air return channel and at least two air return ports respectively connected to the air return channel. The air return ports are connected to the energy storage space. The flow structure is also provided with an air outlet duct, an air outlet passage, and an air outlet. The air outlet duct is connected between the air outlet passage and the air outlet. The air outlet passage is connected to the air return port. The air outlet duct and the air inlet duct are arranged in the same installation space.

7. The air delivery module as described in claim 6, characterized in that, The gas supply component includes a first substrate and a first cover. The first substrate is connected to the inner wall surface of the cover body, and the first cover is disposed on the lower plate surface of the first substrate. The gas supply channel is formed between the first cover and the first substrate. The gas return component includes a second substrate and a second cover. The second cover is disposed on the upper plate surface of the second substrate, and the gas return channel is formed between the second cover and the second substrate. The first substrate and the second substrate are configured with the same structure and have the gas return port. The outer wall surface of the second cover and the inner wall surface of the cover body are spaced apart to form a heat insulation space, and the heat insulation space is filled with gas.

8. The air delivery module as described in claim 7, characterized in that, The first cover and the inner wall of the cover body are spaced apart. The air supply cover also includes an inner heat insulation component disposed on the inner wall of the energy storage space. Part of the inner heat insulation component fills the gap between the first cover and the cover body. And / or, the gas supply hood further includes a hood housing and an external heat insulation element, the hood housing covering the outside of the hood body, and the external heat insulation element filling the gap between the hood housing and the hood body.

9. The air delivery module as described in claim 6, characterized in that, The gas delivery module further includes a heating structure, which is disposed in the air inlet duct and / or the air outlet duct to heat the gas in the air inlet duct and / or the air outlet duct.

10. A memory unit testing system, characterized in that, include: A test bench, wherein a moving module is provided on the test bench surface; The tester has a test area for mounting multiple memory cells, the test area being exposed on the test platform of the test bench. The gas source unit is equipped with a refrigeration structure, a drying structure, and a gas delivery pipe, and is used to provide dried cold air or room temperature gas. The gas delivery module as described in any one of claims 1 to 9 is mounted on the mobile module so as to be movable relative to the test area. The gas inlet of the gas delivery module is connected to the gas guide pipe. The gas output by the gas source machine flows into the gas inlet through the gas guide pipe. The gas delivery module further includes a heating structure disposed in the air intake duct, which is capable of heating the gas in the air intake duct.

11. The memory cell testing system as described in claim 10, characterized in that, The gas source unit also includes a main gas source pipe, a first gas source branch pipe, a second gas source branch pipe, and a control valve. The control valve is used to control the main gas source pipe to selectively connect to the first gas source branch pipe and the second gas source branch pipe. The first gas source branch pipe is connected between the outlet end of the main gas source pipe and the inlet end of the drying structure. The second gas source branch pipe is connected between the outlet end of the main gas source pipe and the inlet end of the refrigeration structure. The outlet end of the refrigeration structure is connected to the inlet end of the drying structure. The outlet end of the drying structure is connected to the inlet end of the gas guide pipe.

12. The memory cell testing system as described in claim 11, characterized in that, The control valve includes a first reversing valve and a second reversing valve. The first reversing valve is located on the first gas source branch pipe, and the second reversing valve is located on the second gas source branch pipe.

13. The memory cell testing system as described in claim 11, characterized in that, The air source unit also includes a main recovery pipe, a first recovery branch pipe, a second recovery branch pipe, and a circulating fan. The circulating fan is connected between the air inlet of the main recovery pipe and the air outlet of the air delivery module, and is used to promote airflow from the air outlet to the main recovery pipe. The air outlet of the main recovery pipe is connected to the air inlet of the first recovery branch pipe and the air inlet of the second recovery branch pipe. The control valve is also used to control the main recovery pipe to selectively connect the first recovery branch pipe and the second recovery branch pipe. The air outlet of the first recovery branch pipe is connected to the air inlet of the drying structure, and the air outlet of the second recovery branch pipe is connected to the air inlet of the refrigeration structure.

14. The memory cell testing system as described in claim 13, characterized in that, The control valve includes a third reversing valve and a fourth reversing valve. The third reversing valve is located in the first recovery branch pipe, and the fourth reversing valve is located in the second recovery branch pipe.

15. The memory cell testing system as described in claim 13, characterized in that, The air supply module further includes an exhaust valve, a first one-way valve, and an exhaust reversing valve. The exhaust valve is located on the wall of the air supply hood and connects the inner and outer sides of the air supply hood. It is configured to open in the venting state and close in the internal circulation state. The first one-way valve is located in the air intake duct and is used to restrict airflow from the air intake port to the air inlet. The exhaust reversing valve is located in the exhaust duct of the air supply module and is configured to close in the hood-opening state and the venting state, and open in the internal circulation state.

16. The memory cell testing system as described in claim 15, characterized in that, The gas source unit further includes a manifold branch pipe, a manifold main pipe, a filter structure, a second one-way valve, a third one-way valve, and a fourth one-way valve. The inlet end of the manifold branch pipe is connected to the outlet end of the refrigeration structure. The outlet ends of the manifold branch pipe, the first recovery branch pipe, and the first gas source branch pipe are all connected to the manifold main pipe and connected to the inlet end of the filter structure through the manifold main pipe. The outlet end of the filter structure is connected to the inlet end of the drying structure. The second one-way valve is located on the first recovery branch pipe and is used to restrict airflow from the manifold main pipe to the first recovery branch pipe. The third one-way valve is located on the manifold branch pipe and is used to restrict airflow from the manifold main pipe to the refrigeration structure. The fourth one-way valve is located on the first gas source branch pipe and is used to restrict airflow from the manifold main pipe to the first gas source branch pipe. And / or, the gas supply hood is provided with an energy storage space and a heat insulation space, the heat insulation space is arranged around and above the outer periphery of the energy storage space, the heat insulation space has a first side and a second side opposite to each other, the energy storage space is connected to the first side of the heat insulation space, the gas supply channel and the gas outlet duct respectively, and the exhaust valve is connected to the second side of the heat insulation space.

17. The memory cell testing system as described in claim 13, characterized in that, The recovery main pipe includes a recovery branch pipe, a heat dissipation branch pipe, a bypass branch pipe, and a recovery manifold. The air inlet of the recovery branch pipe is connected to the circulating fan. The air outlet of the recovery branch pipe can be selectively connected to the air inlet of the heat dissipation branch pipe or the air inlet of the bypass branch pipe under the adjustment of the control valve. The air outlets of the heat dissipation branch pipe and the bypass branch pipe are both connected to the air inlet of the recovery manifold. The air outlet of the recovery manifold is connected to the air inlet of the first recovery branch pipe and the air inlet of the second recovery branch pipe. The heat dissipation branch pipe is equipped with a radiator.

18. The memory cell testing system as described in claim 17, characterized in that, The control valve includes a heat dissipation reversing valve and a bypass reversing valve. The heat dissipation reversing valve is located in the heat dissipation branch pipe, and the bypass reversing valve is located in the bypass branch pipe. And / or, the air source unit further includes a seventh check valve and an eighth check valve. The seventh check valve is located at the outlet end of the heat dissipation branch pipe and is used to restrict airflow from the recovery manifold to the heat dissipation branch pipe. The eighth check valve is located at the outlet end of the bypass branch pipe and is used to restrict airflow from the recovery manifold to the bypass branch pipe.

19. The memory cell testing system as described in any one of claims 11 to 18, characterized in that, The gas source unit also includes a gas supply structure, which is connected to the inlet end of the gas source main pipe and can supply inert gas to the gas delivery module. The inert gas includes helium and / or nitrogen.

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