A semiconductor device, a pulse radio frequency power supply and a control method thereof

Abstract

This invention discloses a semiconductor device, a pulsed radio frequency (RF) power supply, and a control method thereof. The pulsed RF power supply includes a signal generation module, an adjustment module, a power amplification module, a directional coupling module, a power detection module, and a control module. The adjustment module outputs an adjustment RF signal to the RF input terminal of the power amplification module based on a reference RF signal output from the signal generation module and a first bias voltage value output from the control module. The power detection module receives a positive pulse power signal output from the directional coupling module and converts the positive pulse power signal into a first square wave signal, filtering out AC signals from the first square wave signal to generate a first DC signal. The control module sends a first bias voltage value to the power amplification module based on the first DC signal. This invention provides a semiconductor device, a pulsed RF power supply, and a control method thereof, which are simple in structure, low in cost, and highly reliable.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to a semiconductor device, a pulsed radio frequency power supply, and a control method thereof. Background Technology

[0002] Pulsed radio frequency power supplies are increasingly widely used in semiconductor processes, materials processing and other fields. By rapidly switching the radio frequency output, they can effectively control process temperature, reduce charge accumulation, and bring about excellent process results.

[0003] However, accurate detection and stable control of the power of pulsed radio frequency signals has always been a technical challenge in the industry.

[0004] Currently, some pulse RF power supplies have built-in high-precision sampling units. These high-precision sampling units are complex to design and expensive, which increases the cost of pulse RF power supplies. In addition, the sampling data is limited, real-time sampling is not possible, and stability is low. Summary of the Invention

[0005] This invention provides a semiconductor device, a pulsed radio frequency power supply, and a control method thereof, which are simple in structure, low in cost, and highly reliable.

[0006] According to one aspect of the present invention, a pulsed radio frequency power supply is provided, the pulsed radio frequency power supply including a signal generation module, an adjustment module, a power amplification module, a directional coupling module, a power detection module and a control module;

[0007] The signal generation module, the adjustment module, the power amplification module, and the directional coupling module are electrically connected in sequence; the adjustment module is used to output an adjustment RF signal to the RF input terminal of the power amplification module according to the reference RF signal output by the signal generation module and the first bias voltage value output by the control module.

[0008] The power detection module is used to receive the positive pulse power signal output by the directional coupling module, and is also used to convert the positive pulse power signal into a first square wave signal, and filter out the AC signal in the first square wave signal to generate a first DC signal; wherein, the first DC signal represents the average power of the positive pulse power signal;

[0009] The control module is used to send a first bias value to the power amplifier module based on the first DC signal.

[0010] Optionally, the power detection module is further configured to receive the reverse pulse power signal output by the directional coupling module, and to convert the reverse pulse power signal into a second square wave signal, and filter out the AC signal in the second square wave signal to generate a second DC signal; wherein, the second DC signal represents the average power of the reverse pulse power signal;

[0011] The control module is also used to control the power supply voltage of the power supply terminal of the power amplifier module according to the second DC signal.

[0012] Optionally, the power detection module includes a forward power detection submodule and a reverse power detection submodule;

[0013] The forward power detection submodule includes a first detection unit and a first filtering unit;

[0014] The first detection unit is used to convert the positive pulse power signal into a first square wave signal;

[0015] The first filtering unit is used to filter out the AC signal in the first square wave signal to generate the first DC signal, and send the first DC signal to the control module;

[0016] The reverse power detection submodule includes a second detection unit and a second filtering unit.

[0017] The second detection unit is used to convert the reverse pulse power signal into the second square wave signal;

[0018] The second filtering unit is used to filter out the AC signal in the second square wave signal to generate the second DC signal, and send the second DC signal to the control module.

[0019] Optionally, the first filtering unit includes a first resistor, a second resistor, a first capacitor, a second capacitor, a first operational amplifier, a third resistor, and a fourth resistor;

[0020] The first end of the first resistor is electrically connected to the output end of the first detector unit, and the second end of the first resistor is electrically connected to the first end of the second resistor.

[0021] The first end of the second resistor is electrically connected to the first end of the first capacitor, and the second end of the second resistor is electrically connected to the non-inverting input terminal of the first operational amplifier.

[0022] The second terminal of the first capacitor is electrically connected to the output terminal of the first operational amplifier;

[0023] The first terminal of the second capacitor is electrically connected to the non-inverting input terminal of the first operational amplifier, and the second terminal of the second capacitor is grounded.

[0024] The first end of the third resistor is electrically connected to the inverting input of the first operational amplifier, and the second end of the third resistor is grounded.

[0025] The first end of the fourth resistor is electrically connected to the inverting input terminal of the first operational amplifier, and the second end of the fourth resistor is electrically connected to the output terminal of the first operational amplifier.

[0026] The output terminal of the first operational amplifier is electrically connected to the control module.

[0027] Optionally, the first filtering unit includes a first adjustable resistor unit, a second adjustable resistor unit, a first adjustable capacitor unit, a second adjustable capacitor unit, a second operational amplifier, a fifth resistor, and a sixth resistor;

[0028] The first end of the first adjustable resistor unit is electrically connected to the output end of the first detector unit, and the second end of the first adjustable resistor unit is electrically connected to the first end of the second adjustable resistor unit.

[0029] The first end of the second adjustable resistor unit is electrically connected to the first end of the first adjustable capacitor unit, and the second end of the second adjustable resistor unit is electrically connected to the non-inverting input of the second operational amplifier.

[0030] The second terminal of the first adjustable capacitor unit is electrically connected to the output terminal of the second operational amplifier.

[0031] The first terminal of the second adjustable capacitor unit is electrically connected to the non-inverting input terminal of the second operational amplifier, and the second terminal of the second adjustable capacitor unit is grounded.

[0032] The first end of the fifth resistor is electrically connected to the inverting input of the second operational amplifier, and the second end of the fifth resistor is grounded.

[0033] The first end of the sixth resistor is electrically connected to the inverting input terminal of the second operational amplifier, and the second end of the sixth resistor is electrically connected to the output terminal of the second operational amplifier.

[0034] The output of the second operational amplifier is electrically connected to the control module;

[0035] The control module is also used to control the resistance value of the first adjustable resistor unit, the resistance value of the second adjustable resistor unit, the capacitance value output by the first adjustable capacitor unit, and the capacitance value output by the second adjustable capacitor unit according to the operating frequency output by the pulse radio frequency power supply.

[0036] Optionally, the first adjustable capacitor unit includes at least two third capacitors with different capacitance values ​​and a first switch corresponding to each of the third capacitors.

[0037] The second adjustable capacitor unit includes at least two fourth capacitors with different capacitance values ​​and a second switch corresponding to each of the fourth capacitors.

[0038] The control module is used to control the first switch corresponding to the third capacitor and the second switch corresponding to the fourth capacitor to turn on according to the operating frequency of the pulse radio frequency power supply output.

[0039] Optionally, the control module is further configured to determine the power value corresponding to the highest point in the positive pulse power signal based on the first duty cycle of the first DC signal and the first square wave signal, and to determine the power value corresponding to the highest point in the reverse pulse power signal based on the second duty cycle of the second DC signal and the second square wave signal.

[0040] Optionally, the control module includes a first control submodule, a second control submodule, and a threshold setting submodule;

[0041] The threshold setting submodule is used to receive the first target power average value;

[0042] The first control submodule includes a seventh resistor, an eighth resistor, a third operational amplifier, a ninth resistor, and a fifth capacitor;

[0043] The first end of the seventh resistor is electrically connected to the threshold setting submodule, and the second end of the seventh resistor is electrically connected to the non-inverting input of the third operational amplifier.

[0044] The first end of the eighth resistor is electrically connected to the output terminal of the first operational amplifier, and the second end of the eighth resistor is electrically connected to the inverting input terminal of the third operational amplifier.

[0045] The first end of the ninth resistor is electrically connected to the inverting input terminal of the third operational amplifier, and the second end of the ninth resistor is electrically connected to the output terminal of the third operational amplifier.

[0046] The first terminal of the fifth capacitor is electrically connected to the inverting input terminal of the third operational amplifier, and the second terminal of the fifth capacitor is electrically connected to the output terminal of the third operational amplifier.

[0047] The output terminal of the third operational amplifier is electrically connected to the control terminal of the adjustment module.

[0048] According to another aspect of the present invention, a control method for a pulsed radio frequency power supply is provided, the control method being applied to a pulsed radio frequency power supply provided in any embodiment of the present invention;

[0049] The control method includes:

[0050] The adjustment module outputs an adjustment radio frequency signal to the radio frequency input terminal of the power amplifier module based on the reference radio frequency signal output by the signal generation module and the first bias voltage value output by the control module.

[0051] The power detection module receives the positive pulse power signal output by the directional coupling module, converts the positive pulse power signal into a first square wave signal, and filters out the AC signal in the first square wave signal to generate a first DC signal; wherein, the first DC signal represents the average power of the positive pulse power signal;

[0052] The control module sends a first bias value to the adjustment module based on the first DC signal, and then returns to the step whereby the adjustment module outputs an adjustment RF signal to the RF input terminal of the power amplifier module based on the reference RF signal output by the signal generation module and the first bias value output by the control module.

[0053] According to another aspect of the present invention, a semiconductor device is provided, the semiconductor device including the pulsed radio frequency power supply provided in any embodiment of the present invention.

[0054] This invention provides a pulsed radio frequency (RF) power supply with a built-in power detection module that can detect the power value of the positive pulsed power signal output by a power amplifier module. Furthermore, the power detection module can convert the positive pulsed power signal into a first square wave signal, and then convert the first square wave signal into a first DC signal. By acquiring the first DC signal, the actual positive power can be determined. It can also use the first DC signal as feedback to control the first bias voltage value input to the adjustment module, thereby adjusting the actual positive power output by the power amplifier module. Since the first DC signal is a continuous level signal without abrupt low or high levels, the power detection module in this invention does not need to identify abrupt low or high levels, thus reducing power consumption and improving reliability. Moreover, the power detection module only needs a detector and a filter to convert the positive pulsed power signal into a first DC signal, resulting in a simple structure and low cost. In summary, the pulsed RF power supply provided by this invention has a simple structure, low cost, and high reliability.

[0055] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0056] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0057] Figure 1 This is a waveform diagram of a pulsed radio frequency power supply output;

[0058] Figure 2 This is a schematic diagram of a pulse radio frequency power supply according to an embodiment of the present invention;

[0059] Figure 3 This is a schematic diagram illustrating the interrelationships between various waveforms provided in the embodiments of the present invention;

[0060] Figure 4 This is a schematic diagram of the structure of another pulse radio frequency power supply provided according to an embodiment of the present invention;

[0061] Figure 5 This is a schematic diagram of the structure of another pulse radio frequency power supply provided according to an embodiment of the present invention;

[0062] Figure 6 This is a schematic diagram of the structure of another pulse radio frequency power supply provided according to an embodiment of the present invention;

[0063] Figure 7 This is a schematic diagram of the structure of another pulse radio frequency power supply provided according to an embodiment of the present invention;

[0064] Figure 8 This is a schematic flowchart of a pulse radio frequency power supply control method provided by an embodiment of the present invention. Detailed Implementation

[0065] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0066] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0067] Figure 1 This is a waveform diagram of a pulsed radio frequency power supply output. (Reference) Figure 1 This wave consists of a pulse wave P1 and a low-level pulse P2. Existing power detection modules typically acquire data every 100μs when detecting this type of pulse wave, resulting in only multiple discrete points. Power calculations based on these discrete points lead to large fluctuations and low accuracy in the obtained power values. Furthermore, during the acquisition process, it is necessary to identify the low-level pulse P2. After identifying the low-level pulse P2, the power value corresponding to the preceding pulse wave P1 needs to be output. The multiple identifications of the low-level pulse P2 increase the power consumption of existing power detection modules and reduce the stability of power acquisition.

[0068] This embodiment provides a pulsed radio frequency power supply, which can solve the problems of high acquisition cost, high acquisition power consumption and poor acquisition stability of existing pulsed radio frequency power supplies. Figure 2 This is a schematic diagram of a pulsed radio frequency power supply according to an embodiment of the present invention. (Refer to...) Figure 2 The pulsed radio frequency power supply 100 provided in this embodiment includes a signal generation module 110, an adjustment module 120, a power amplification module 130, a directional coupling module 140, a power detection module 150, and a control module 160. The signal generation module 110, adjustment module 120, power amplification module 130, and directional coupling module 140 are electrically connected in sequence. The adjustment module 120 is used to output an adjustment radio frequency signal to the radio frequency input terminal of the power amplification module 130 according to the reference radio frequency signal output by the signal generation module 110 and the first bias voltage value output by the control module 160. The power detection module 150 is used to receive the positive pulse power signal output by the directional coupling module 140, and is also used to convert the positive pulse power signal into a first square wave signal, and filter out the AC signal in the first square wave signal to generate a first DC signal, wherein the first DC signal represents the average power of the positive pulse power signal. The control module 160 is used to send a first bias voltage value to the power amplification module 130 according to the first DC signal.

[0069] Specifically, the power detection module 150 is electrically connected to the directional coupling module 140, the control module 160 is electrically connected to the power supply terminal of the power amplification module 130 and the adjustment module 120, and the directional coupling module 140 is also electrically connected to a load, which can be a plasma reaction chamber. The directional coupling module 140 can be a directional coupler. The adjustment module 120 can adjust the amplitude of the reference RF signal according to the first bias value and then output an adjusted RF signal to the power amplification module 130. The power amplification module 130 amplifies the power of the adjusted RF signal and outputs the actual forward power. The actual forward power can be limited by the directional coupling module 140 to generate a forward pulse power signal. The first bias value can control the actual forward power output by the power amplification module 130.

[0070] Figure 3 This is a schematic diagram illustrating the interrelationships between various waveforms provided in the embodiments of the present invention. (Refer to...) Figure 3 After receiving the positive pulse power signal S1 from the directional coupling module 140, the power detection module 150 generates a first square wave signal S2 corresponding to the positive pulse power signal S1. A high level in the first square wave signal S2 corresponds to a non-zero pulse wave in the positive pulse power signal S1, and a low level in the first square wave signal S2 corresponds to a zero wave in the positive pulse power signal S1. The first square wave signal S2 includes signals with output values ​​greater than 0 and signals with output values ​​of 0. The first square wave signal S2 is typically composed of an AC signal S3 and a first DC signal S4. After generating the first square wave signal S2, the power detection module 150 filters out the AC signal S3 from the first square wave signal S2, leaving the first DC signal S4. The first DC signal S4 represents the average power of the positive pulse power signal S1. The control module 160 can adjust the first bias voltage value according to the first DC signal S4 and the first target power average value, so that the positive pulse power signal finally output by the power amplification module 130 meets the preset requirements. The control module 160 can also determine the power value corresponding to the highest point in the positive pulse power signal S1 based on the duty cycle of the first DC signal S4 and the first square wave signal S2, and adjust the first bias voltage value based on the power value and the preset positive power threshold.

[0071] This embodiment provides a pulsed radio frequency (RF) power supply with a built-in power detection module that can detect the power value of the positive pulsed power signal output by the power amplifier module. Furthermore, the power detection module can convert the positive pulsed power signal into a first square wave signal, and then convert the first square wave signal into a first DC signal. By acquiring the first DC signal, the actual positive power can be determined. It can also use the first DC signal as feedback to control the first bias voltage value input to the adjustment module, thereby adjusting the actual positive power output by the power amplifier module. Since the first DC signal is a continuous level signal without abrupt low or high levels, the power detection module in this embodiment does not need to identify abrupt low or high levels, thus reducing power consumption and improving reliability. Moreover, the power detection module only needs a detector and a filter to convert the positive pulsed power signal into a first DC signal, resulting in a simple structure and low cost. In summary, the pulsed RF power supply provided in this embodiment is simple in structure, low in cost, and highly reliable.

[0072] Optional, continue to refer to Figure 2 The power detection module 150 provided in this embodiment is also used to receive the reverse pulse power signal output by the directional coupling module 140, and to convert the reverse pulse power signal into a second square wave signal, and to filter out the AC signal in the second square wave signal to generate a second DC signal; wherein, the second DC signal represents the average power of the reverse pulse power signal; the control module 160 is also used to control the power supply voltage of the power supply terminal of the power amplification module 130 according to the second DC signal.

[0073] Specifically, the directional coupling module 140 is also used to receive the actual reverse power reflected back from the load. The directional coupling module 140 limits the actual reverse power and generates a reverse pulse power signal to the power detection module 150. At this time, the power detection module 150 processes the reverse pulse power signal in a manner that is basically the same as the way it processes the forward pulse power signal.

[0074] The control module 160 can also control the supply voltage based on the average value of the second DC signal and the second target power. The control module 160 can also determine the power value corresponding to the highest point in the reverse pulse power signal based on the duty cycle of the second DC signal and the second square wave signal, and adjust the supply voltage based on the power value and the preset reverse power threshold.

[0075] The supply voltage at the power supply terminal of the power amplifier module 130 can determine the actual forward power output of the power amplifier module 130. For example, when the second DC signal is less than or equal to the second target power average value, the control module 160 inputs the maximum DC voltage to the power supply terminal of the power amplifier module 130 so that the power amplifier module 130 outputs the maximum power as much as possible; when the second DC signal is greater than the second target power average value, the control module 160 inputs a voltage less than the maximum DC voltage to the power supply terminal of the power amplifier module 130 so that the actual forward power output of the power amplifier module 130 is less than the full power.

[0076] The pulsed radio frequency power supply provided in this embodiment can detect both the power value corresponding to the actual forward power and the power value corresponding to the actual reverse power.

[0077] Optional, Figure 4 This is a schematic diagram of another pulsed radio frequency power supply provided according to an embodiment of the present invention, with reference to... Figure 4 The power detection module 150 includes a forward power detection submodule 151 and a reverse power detection submodule 152. The forward power detection submodule 151 includes a first detection unit 1511 and a first filtering unit 1512. The first detection unit 1511 is used to convert the forward pulse power signal into a first square wave signal. The first filtering unit 1512 is used to filter out the AC signal in the first square wave signal to generate a first DC signal and send the first DC signal to the control module 160. The reverse power detection submodule 152 includes a second detection unit 1521 and a second filtering unit 1522. The second detection unit 1521 is used to convert the reverse pulse power signal into a second square wave signal. The second filtering unit 1522 is used to filter out the AC signal in the second square wave signal to generate a second DC signal and send the second DC signal to the control module 160.

[0078] Specifically, the input terminal of the first detection unit 1511 is electrically connected to the directional coupling module 140, and the output terminal of the first detection unit 1511 is electrically connected to the first filter unit 1512. The input terminal of the second detection unit 1521 is electrically connected to the directional coupling module 140, and the output terminal of the second detection unit 1521 is electrically connected to the second filter unit 1522.

[0079] This embodiment divides the functions of the power detection module 150, clarifying the structure and function of the forward power detection submodule 151 and the reverse power detection submodule 152. The forward power detection submodule 151 and the reverse power detection submodule 152 can work simultaneously and independently without affecting each other, thus improving the reliability of the power detection module 150.

[0080] In this embodiment, both the forward power detection submodule 151 and the reverse power detection submodule 152 include a detection unit and a filtering unit. The structure is simple and the power detection function can be realized without the need for a costly microcontroller.

[0081] Optional, Figure 5 This is a schematic diagram of another pulsed radio frequency power supply provided according to an embodiment of the present invention, with reference to... Figure 5 The first filter unit 1512 includes a first resistor R1, a second resistor R2, a first capacitor C1, a second capacitor C2, a first operational amplifier 101, a third resistor R3, and a fourth resistor R4. The first terminal of the first resistor R1 is electrically connected to the output terminal of the first detector unit 1511, and the second terminal of the first resistor R1 is electrically connected to the first terminal of the second resistor R2. The first terminal of the second resistor R2 is electrically connected to the first terminal of the first capacitor C1, and the second terminal of the second resistor R2 is electrically connected to the non-inverting input terminal of the first operational amplifier 101. The second terminal of the first capacitor C1 is electrically connected to the first... The output terminal of operational amplifier 101 is electrically connected; the first terminal of the second capacitor C2 is electrically connected to the non-inverting input terminal of the first operational amplifier 101, and the second terminal of the second capacitor C2 is grounded; the first terminal of the third resistor R3 is electrically connected to the inverting input terminal of the first operational amplifier 101, and the second terminal of the third resistor R3 is grounded; the first terminal of the fourth resistor R4 is electrically connected to the inverting input terminal of the first operational amplifier 101, and the second terminal of the fourth resistor R4 is electrically connected to the output terminal of the first operational amplifier 101; the output terminal of the first operational amplifier 101 is electrically connected to the control module 160.

[0082] Specifically, in this embodiment, the first filtering unit 1512 can filter out the AC signal in the first square wave signal to generate a first DC signal, and input the first DC signal to the control module 160. The first filtering unit 1512 has fewer components and a simpler structure, which can reduce the size and cost of the pulse RF power supply.

[0083] In this embodiment, the resistance values ​​of the first resistor R1, the second resistor R2, the capacitance values ​​of the first capacitor C1 and the second capacitor C2 can be determined according to the operating frequency of the pulse RF power supply output.

[0084] Optional, Figure 6 This is a schematic diagram of another pulsed radio frequency power supply provided according to an embodiment of the present invention, with reference to... Figure 6The first filter unit 1512 includes a first adjustable resistor unit 102, a second adjustable resistor unit 103, a first adjustable capacitor unit 104, a second adjustable capacitor unit 105, a second operational amplifier 106, a fifth resistor R5, and a sixth resistor R6. The first terminal of the first adjustable resistor unit 102 is electrically connected to the output terminal of the first detector unit 1511, and the second terminal of the first adjustable resistor unit 102 is electrically connected to the first terminal of the second adjustable resistor unit 103. The first terminal of the second adjustable resistor unit 103 is electrically connected to the first terminal of the first adjustable capacitor unit 104, and the second terminal of the second adjustable resistor unit 103 is electrically connected to the non-inverting input terminal of the second operational amplifier 106. The second terminal of the first adjustable capacitor unit 104 is electrically connected to the output terminal of the second operational amplifier 106. The second adjustable capacitor unit 105... The first terminal of resistor R5 is electrically connected to the non-inverting input terminal of the second operational amplifier 106, and the second terminal of the second adjustable capacitor unit 105 is grounded; the first terminal of the fifth resistor R5 is electrically connected to the inverting input terminal of the second operational amplifier 106, and the second terminal of the fifth resistor R5 is grounded; the first terminal of the sixth resistor R6 is electrically connected to the inverting input terminal of the second operational amplifier 106, and the second terminal of the sixth resistor R6 is electrically connected to the output terminal of the second operational amplifier 106; the output terminal of the second operational amplifier 106 is electrically connected to the control module 160; the control module 160 is also used to control the resistance value of the first adjustable resistor unit 102, the resistance value of the second adjustable resistor unit 103, the capacitance value output by the first adjustable capacitor unit 104, and the capacitance value output by the second adjustable capacitor unit 105 according to the operating frequency of the pulse RF power supply output.

[0085] Specifically, both the first adjustable resistor unit 102 and the second adjustable resistor unit 103 can be digital potentiometers. The first adjustable capacitor unit 104 may include a first adjustable capacitor, and the second adjustable capacitor unit may include a second adjustable capacitor.

[0086] The pulsed radio frequency power supply provided in this embodiment can output various different operating frequencies. For example, the operating frequencies can be 13.56MHz, 2KHz, 10KHz, etc. The resistor and capacitor values ​​in the first filter unit 1512 correspond to different operating frequencies output by the pulsed radio frequency power supply. In this embodiment, the resistors of the first adjustable resistor unit 102, the second adjustable resistor unit 103, the capacitors output by the first adjustable capacitor unit 104, and the capacitors output by the second adjustable capacitor unit 105 are all adjustable. This allows for the accurate determination of the first DC signal and the second DC signal even after the operating frequency of the pulsed radio frequency power supply changes.

[0087] Optional, continue to refer to Figure 6The first adjustable capacitor unit 104 includes at least two third capacitors C3 with different capacitance values ​​and a first switch corresponding to each third capacitor C3; the second adjustable capacitor unit 105 includes at least two fourth capacitors C4 with different capacitance values ​​and a second switch corresponding to each fourth capacitor C4; the control module 160 is used to control the first switch corresponding to the corresponding third capacitor C3 and the second switch corresponding to the corresponding fourth capacitor C4 to be turned on according to the working frequency of the pulse radio frequency power supply output.

[0088] Specifically, the third capacitors C3 and C4 are connected in parallel. The number of third capacitors C3 and the number of fourth capacitors C4 can be the same as the number of operating frequencies that the pulse RF power supply can output. For example, the number of third capacitors C3 can be 2, 3, 4, or 5, etc. When there are two third capacitors C3 and two fourth capacitors C4, each first switch can be integrated into a single-pole double-throw switch, and each second switch can be integrated into another single-pole double-throw switch.

[0089] Each third capacitor C3 is connected in series with its corresponding first switch, and each fourth capacitor C4 is connected in series with its corresponding second switch.

[0090] The control module 160 can control the first switch corresponding to one of the third capacitors C3 in the first adjustable capacitor unit 104 to be turned on and the first switch corresponding to the remaining third capacitors in the first adjustable capacitor unit 104 to be turned off according to the working frequency of the pulse radio frequency power supply output. At the same time, it controls the second switch corresponding to one of the fourth capacitors C4 in the second adjustable capacitor unit 105 to be turned on and the second switch corresponding to the remaining fourth capacitors in the second adjustable capacitor unit 105 to be turned off.

[0091] Optional, continue to refer to Figure 6 The control module 160 is also used to determine the power value corresponding to the highest point in the positive pulse power signal based on the first duty cycle of the first DC signal and the first square wave signal, and to determine the power value corresponding to the highest point in the reverse pulse power signal based on the second duty cycle of the second DC signal and the second square wave signal.

[0092] Specifically, the first duty cycle is the percentage of high level in the first square wave signal S2, and the second duty cycle is the percentage of high level in the second square wave signal. The percentages of high level in the first square wave signal S2 and the percentages of high level in the second square wave signal can be known, meaning the control module 160 can obtain both the first and second duty cycles. The power value corresponding to the highest point in the forward pulse power signal is the peak power of the forward pulse power signal, and the power value corresponding to the highest point in the reverse pulse power signal is the peak power of the reverse pulse power signal.

[0093] The control module 160 can first convert the first DC signal into a digital signal, that is, convert the analog first DC signal into a specific power value. Based on the first duty cycle of the first DC signal and the first square wave signal, the power value corresponding to the highest point of the pulse signal in the positive pulse power signal is determined. For example, when the digital signal corresponding to the first DC signal is 5W and the first duty cycle is 50%, the power value corresponding to the highest point of the pulse signal in the positive pulse power signal can be determined to be 10W. When the digital signal corresponding to the first DC signal is 0.5W and the first duty cycle is 10%, the power value corresponding to the highest point of the pulse signal in the positive pulse power signal can be determined to be 5W.

[0094] This embodiment can replace the currently expensive high-precision sampling unit with simple analog and digital circuits. It can be seen that the pulse radio frequency power supply provided in this embodiment is low in cost and has high sampling reliability.

[0095] Optional, Figure 7 This is a schematic diagram of another pulsed radio frequency power supply provided according to an embodiment of the present invention, with reference to... Figure 7 The control module includes a first control submodule 161, a second control submodule 162, and a threshold setting submodule 163. The threshold setting submodule 163 is used to receive the first target power average value. The first control submodule 161 includes a seventh resistor R7, an eighth resistor R8, a third operational amplifier 201, a ninth resistor R9, and a fifth capacitor C5. The first terminal of the seventh resistor R7 is electrically connected to the threshold setting submodule 163, and the second terminal of the seventh resistor R7 is electrically connected to the non-inverting input terminal of the third operational amplifier 201. The first terminal of the eighth resistor R8 is electrically connected to the first operational amplifier 201. The output terminal of 01 is electrically connected; the second terminal of the eighth resistor R8 is electrically connected to the inverting input terminal of the third operational amplifier 201; the first terminal of the ninth resistor R9 is electrically connected to the inverting input terminal of the third operational amplifier 201, and the second terminal of the ninth resistor R9 is electrically connected to the output terminal of the third operational amplifier 201; the first terminal of the fifth capacitor C5 is electrically connected to the inverting input terminal of the third operational amplifier 201, and the second terminal of the fifth capacitor C5 is electrically connected to the output terminal of the third operational amplifier 201; the output terminal of the third operational amplifier 201 is electrically connected to the control terminal of the adjustment module 120.

[0096] Specifically, the second control submodule 162 is used to control the power supply voltage of the power supply terminal of the power amplifier module 130 according to the second DC signal.

[0097] The first target power average value can be set by the user. The threshold setting submodule 163 can be a unit that receives input information, such as a keyboard unit or a touch screen display panel unit.

[0098] The first control submodule 161 is a proportional-integral circuit, which can realize rapid control of the first bias voltage value, avoid power sudden change, and thus accurately control the actual forward power, and then accurately control the actual reverse power.

[0099] The first control submodule 161 in this embodiment is composed of analog circuits, which has a simple structure and low cost, and can reduce the manufacturing cost of pulse radio frequency power supplies.

[0100] Optional, continue to refer to Figure 7 The adjustment module 120 includes a voltage-controlled attenuator 121; the control terminal of the voltage-controlled attenuator 121 receives a first bias value, the RF input terminal of the voltage-controlled attenuator 121 receives a reference RF signal, and the output terminal of the voltage-controlled attenuator 121 outputs an adjustment RF signal controlled by the first bias value.

[0101] Specifically, the voltage-controlled attenuator 121 can adjust the amplitude of the reference RF signal according to the first bias value. Including the voltage-controlled attenuator 121 in the adjustment module 120 can reduce the cost of the adjustment module 120.

[0102] This embodiment also provides a control method for a pulsed radio frequency power supply, which can be applied to any pulsed radio frequency power supply provided in any embodiment of the present invention. Figure 8 This is a flowchart illustrating a control method for a pulsed radio frequency power supply according to an embodiment of the present invention. (Refer to...) Figure 8 The pulse radio frequency power supply control method provided in this embodiment includes the following steps:

[0103] S110: The adjustment module outputs an adjustment RF signal to the RF input terminal of the power amplifier module based on the reference RF signal output by the signal generation module and the first bias voltage value output by the control module.

[0104] S120 The power detection module receives the positive pulse power signal output by the directional coupling module, converts the positive pulse power signal into a first square wave signal, and filters out the AC signal in the first square wave signal to generate a first DC signal.

[0105] S130, The control module sends a first bias value to the adjustment module based on the first DC signal.

[0106] After completing step S130, you can return to step S110.

[0107] The control method for the pulsed radio frequency power supply provided in the embodiments of the present invention has the same technical effect as the pulsed radio frequency power supply provided in any embodiment of the present invention. For details not described in the control method for the pulsed radio frequency power supply provided in the embodiments of the present invention, please refer to the content of the pulsed radio frequency power supply provided in any embodiment of the present invention.

[0108] This embodiment also provides a semiconductor device, which includes the pulsed radio frequency power supply provided in any embodiment of the present invention.

[0109] Specifically, the semiconductor device provided in this embodiment is used to generate plasma, and also includes a plasma reaction chamber and an impedance matching module. The pulsed radio frequency power supply, the impedance matching module and the plasma reaction chamber are electrically connected in sequence.

[0110] This embodiment provides a semiconductor device that includes the pulsed radio frequency power supply provided in any embodiment of the present invention. The beneficial effects of the semiconductor device provided in this embodiment, including the pulsed radio frequency power supply provided in any embodiment of the present invention, will not be elaborated further here.

[0111] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0112] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A pulsed radio frequency power supply, characterized in that, It includes a signal generation module, an adjustment module, a power amplification module, a directional coupling module, a power detection module, and a control module; The signal generation module, the adjustment module, the power amplification module, and the directional coupling module are electrically connected in sequence; the adjustment module is used to output an adjustment RF signal to the RF input terminal of the power amplification module according to the reference RF signal output by the signal generation module and the first bias voltage value output by the control module. The power detection module is used to receive the positive pulse power signal output by the directional coupling module, and is also used to convert the positive pulse power signal into a first square wave signal, and filter out the AC signal in the first square wave signal to generate a first DC signal; wherein, the first DC signal represents the average power of the positive pulse power signal; The control module is used to send a first bias value to the power amplifier module according to the first DC signal; The power detection module is also used to receive the reverse pulse power signal output by the directional coupling module, and to convert the reverse pulse power signal into a second square wave signal, and to filter out the AC signal in the second square wave signal to generate a second DC signal; wherein, the second DC signal represents the average power of the reverse pulse power signal; The control module is also used to control the power supply voltage of the power supply terminal of the power amplifier module according to the second DC signal; The power detection module includes a forward power detection submodule and a reverse power detection submodule; The forward power detection submodule includes a first detection unit and a first filtering unit; The first detection unit is used to convert the positive pulse power signal into a first square wave signal; The first filtering unit is used to filter out the AC signal in the first square wave signal to generate the first DC signal, and send the first DC signal to the control module; The reverse power detection submodule includes a second detection unit and a second filtering unit; The second detection unit is used to convert the reverse pulse power signal into the second square wave signal; The second filtering unit is used to filter out the AC signal in the second square wave signal to generate the second DC signal, and send the second DC signal to the control module.

2. The pulsed radio frequency power supply according to claim 1, characterized in that, The first filter unit includes a first resistor, a second resistor, a first capacitor, a second capacitor, a first operational amplifier, a third resistor, and a fourth resistor; The first end of the first resistor is electrically connected to the output end of the first detector unit, and the second end of the first resistor is electrically connected to the first end of the second resistor. The first end of the second resistor is electrically connected to the first end of the first capacitor, and the second end of the second resistor is electrically connected to the non-inverting input terminal of the first operational amplifier. The second terminal of the first capacitor is electrically connected to the output terminal of the first operational amplifier; The first terminal of the second capacitor is electrically connected to the non-inverting input terminal of the first operational amplifier, and the second terminal of the second capacitor is grounded. The first end of the third resistor is electrically connected to the inverting input of the first operational amplifier, and the second end of the third resistor is grounded. The first end of the fourth resistor is electrically connected to the inverting input terminal of the first operational amplifier, and the second end of the fourth resistor is electrically connected to the output terminal of the first operational amplifier. The output terminal of the first operational amplifier is electrically connected to the control module.

3. The pulsed radio frequency power supply according to claim 1, characterized in that, The first filtering unit includes a first adjustable resistor unit, a second adjustable resistor unit, a first adjustable capacitor unit, a second adjustable capacitor unit, a second operational amplifier, a fifth resistor, and a sixth resistor; The first end of the first adjustable resistor unit is electrically connected to the output end of the first detector unit, and the second end of the first adjustable resistor unit is electrically connected to the first end of the second adjustable resistor unit. The first end of the second adjustable resistor unit is electrically connected to the first end of the first adjustable capacitor unit, and the second end of the second adjustable resistor unit is electrically connected to the non-inverting input of the second operational amplifier. The second terminal of the first adjustable capacitor unit is electrically connected to the output terminal of the second operational amplifier. The first terminal of the second adjustable capacitor unit is electrically connected to the non-inverting input terminal of the second operational amplifier, and the second terminal of the second adjustable capacitor unit is grounded. The first end of the fifth resistor is electrically connected to the inverting input of the second operational amplifier, and the second end of the fifth resistor is grounded. The first end of the sixth resistor is electrically connected to the inverting input terminal of the second operational amplifier, and the second end of the sixth resistor is electrically connected to the output terminal of the second operational amplifier. The output of the second operational amplifier is electrically connected to the control module; The control module is also used to control the resistance value of the first adjustable resistor unit, the resistance value of the second adjustable resistor unit, the capacitance value output by the first adjustable capacitor unit, and the capacitance value output by the second adjustable capacitor unit according to the operating frequency output by the pulse radio frequency power supply.

4. The pulsed radio frequency power supply according to claim 3, characterized in that, The first adjustable capacitor unit includes at least two third capacitors with different capacitance values ​​and a first switch corresponding to each of the third capacitors. The second adjustable capacitor unit includes at least two fourth capacitors with different capacitance values ​​and a second switch corresponding to each of the fourth capacitors. The control module is used to control the first switch corresponding to the third capacitor and the second switch corresponding to the fourth capacitor to turn on according to the operating frequency of the pulse radio frequency power supply output.

5. The pulsed radio frequency power supply according to claim 1, characterized in that, The control module is further configured to determine the power value corresponding to the highest point in the positive pulse power signal based on the first duty cycle of the first DC signal and the first square wave signal, and to determine the power value corresponding to the highest point in the reverse pulse power signal based on the second duty cycle of the second DC signal and the second square wave signal.

6. The pulsed radio frequency power supply according to claim 2, characterized in that, The control module includes a first control submodule, a second control submodule, and a threshold setting submodule; The threshold setting submodule is used to receive the first target power average value; The first control submodule includes a seventh resistor, an eighth resistor, a third operational amplifier, a ninth resistor, and a fifth capacitor; The first end of the seventh resistor is electrically connected to the threshold setting submodule, and the second end of the seventh resistor is electrically connected to the non-inverting input of the third operational amplifier. The first end of the eighth resistor is electrically connected to the output terminal of the first operational amplifier, and the second end of the eighth resistor is electrically connected to the inverting input terminal of the third operational amplifier. The first end of the ninth resistor is electrically connected to the inverting input terminal of the third operational amplifier, and the second end of the ninth resistor is electrically connected to the output terminal of the third operational amplifier. The first terminal of the fifth capacitor is electrically connected to the inverting input terminal of the third operational amplifier, and the second terminal of the fifth capacitor is electrically connected to the output terminal of the third operational amplifier. The output terminal of the third operational amplifier is electrically connected to the control terminal of the adjustment module.

7. A control method for a pulsed radio frequency power supply, characterized in that, The control method is applied to the pulse radio frequency power supply according to any one of claims 1-6; The control method includes: The adjustment module outputs an adjustment radio frequency signal to the radio frequency input terminal of the power amplifier module based on the reference radio frequency signal output by the signal generation module and the first bias voltage value output by the control module. The power detection module receives the positive pulse power signal output by the directional coupling module, converts the positive pulse power signal into a first square wave signal, and filters out the AC signal in the first square wave signal to generate a first DC signal; wherein, the first DC signal represents the average power of the positive pulse power signal; The control module sends a first bias value to the adjustment module based on the first DC signal, and then returns to the step whereby the adjustment module outputs an adjustment RF signal to the RF input terminal of the power amplifier module based on the reference RF signal output by the signal generation module and the first bias value output by the control module.

8. A semiconductor device, characterized in that, Includes the pulsed radio frequency power supply as described in any one of claims 1-6.

Images