High-temperature irradiation resistant insulation support for large-area ion source extraction system

Abstract

The invention relates to the technical field of irradiation protection of ion source extraction systems, and provides a high-temperature-resistant irradiation insulation support for a large-area ion source extraction system. According to the insulating bracket, the plasma electrode insulator and the suppression electrode insulator of the insulating bracket are constructed by using the aluminum oxide ceramic material, so that the insulating bracket can utilize excellent high-temperature stability and excellent radiation damage resistance of the aluminum oxide ceramic material; while ensuring that the extraction system can extract a large-area, high-flow and strong ion beam, the extraction system has the functions of voltage resistance, insulation, vacuum sealing and high-temperature irradiation resistance. The structure is convenient to install and maintain and high in stability, and reliable operation of the three-electrode insulation support of the large-area ion extraction system in a high-temperature irradiation environment can be ensured.

Description

Technical Field

[0001] This application relates to the field of radiation protection technology for ion source extraction systems, and in particular to a high-temperature irradiation resistant insulating bracket for large-area ion source extraction systems. Background Technology

[0002] In the field of magnetic confinement fusion, neutral beam injection technology, with its efficient plasma heating and current-driven characteristics, has become one of the mainstream auxiliary heating methods in magnetic confinement fusion devices. Neutral beam injection heating involves pre-accelerating ions to high-energy levels significantly higher than the average energy of electrons and ions in tokamak plasma, then transforming them into neutral particles to form a neutral beam, which is injected into the plasma, effectively heating it. The ion source, as the core component of the neutral beam injection system, undertakes the core functions of plasma generation and ion acceleration, capable of extracting a large-area, high-current ion beam. The operating characteristics of the ion source have a decisive influence on the overall performance of the neutral beam injection system. With the deepening research in the field of nuclear fusion, the operating parameters of large-scale fusion devices are continuously optimized, requiring neutral beam injection systems to meet higher technical standards.

[0003] In neutral beam injection experiments such as those based on deuterium-tritium reactions, while generating higher power and longer pulsed neutral beams, the increased extraction energy places higher demands on the insulation support of the extraction system for radiation protection.

[0004] 1) The insulating support will generate extremely high temperatures when subjected to ionization impact from a high-energy ion beam, requiring the use of high-temperature resistant and sputter-resistant insulating materials.

[0005] 2) The high-temperature irradiation generated by the ion source heating is carried out in a vacuum environment, so the insulating support needs to maintain vacuum conditions to ensure sealing.

[0006] 3) The insulator is at a high potential, so it is necessary to ensure sufficient withstand voltage to prevent the insulating support from being broken down.

[0007] 4) The insulator and the supporting flange need to be bolted together to meet the mechanical performance requirements of the lead-out system structure.

[0008] How to design the insulating support of the lead-out system to meet the above requirements for high temperature resistance, sputter resistance, sufficient sealing, and sufficient pressure resistance and mechanical properties is a technical problem that needs to be solved. Summary of the Invention

[0009] In view of this, embodiments of this application provide a high-temperature irradiation-resistant insulating bracket for a large-area ion source extraction system, in order to solve the problem that the insulating bracket of the extraction system in the prior art is difficult to provide sufficient high-temperature resistance, sputtering resistance and sealing performance when generating higher power and longer pulsed neutral beams, and is difficult to meet the mechanical and electrical performance requirements in this scenario.

[0010] In a first aspect of this application, a high-temperature irradiation-resistant insulating bracket for a large-area ion source extraction system is provided. The large-area ion source extraction system is a large-area ion source three-electrode extraction system, and the ion source is a deuterium-tritium ion source.

[0011] The insulating support includes: plasma electrode flange 1, plasma electrode insulator 2, suppression electrode flange 3, suppression electrode insulator 4, and ground electrode flange 5;

[0012] Among them, plasma electrode flange 1, plasma electrode insulator 2, suppression electrode flange 3, suppression electrode insulator 4 and ground electrode flange 5 are connected in sequence from top to bottom, and ground electrode flange 5 is connected to the large-area ion source three-electrode extraction system.

[0013] The plasma electrode insulator 2 and the suppression electrode insulator 4 are made of alumina ceramic material.

[0014] In some embodiments, the plasma electrode flange 1 is a hollow rectangular structure, with symmetrical plasma electrode flange cooling water pipes 101 on both sides of the long side, which are connected to the plasma electrode flange cooling water interface 102 on the short side to form a closed cooling loop.

[0015] The plasma electrode flange 1 has a plasma electrode flange sealing groove 103 on its back. The plasma electrode flange sealing groove 103 is used to place a sealing ring to ensure the sealing of the insulating support. The plasma electrode flange 1 is fastened to the plasma electrode insulator 2 by bolts.

[0016] In some embodiments, the plasma electrode insulator 2 adopts a box-type structure design;

[0017] The upper part of the plasma electrode insulator 2 is connected to the plasma electrode flange 1, and the lower part is connected to the suppression electrode flange 3.

[0018] The plasma electrode insulator 2 has N countersunk threaded holes 201 on its upper and lower end faces, and each countersunk threaded hole 201 is pre-embedded with a wire thread insert 202 to improve the durability of the thread and the reliability of the connection; N is a positive integer.

[0019] In some embodiments, the suppression electrode flange 3 is a hollow rectangular structure, with symmetrical suppression electrode flange cooling water pipes 301 on both sides of the long side. The suppression electrode flange cooling water pipes 301 are connected to the suppression electrode flange cooling water interfaces 302 on both sides of the short side to form a closed cooling loop.

[0020] The upper and lower surfaces of the suppression electrode flange 3 are respectively provided with rectangular grooves, wherein the upper rectangular groove is connected to the plasma electrode insulator 2 and the lower rectangular groove is connected to the suppression electrode insulator 4; the inner side of the rectangular groove is machined with a suppression electrode flange sealing groove 303, which is used to place a sealing ring to ensure the sealing of the insulation support.

[0021] In some embodiments, the suppression electrode flange 3 is connected to the plasma electrode insulator 2 by bolts disposed in the suppression electrode flange sealing groove 303 inside the rectangular groove on the upper surface;

[0022] The suppression electrode flange 3, the suppression electrode insulator 4, and the ground electrode flange 5 are sequentially stacked and fixed by bolts set in the suppression electrode flange sealing groove 303 inside the rectangular groove on the lower surface.

[0023] In some embodiments, the suppression electrode insulator 4 has threaded through holes around its perimeter and is connected to the suppression electrode flange 3 and the ground electrode flange 5 through the threaded through holes.

[0024] In some embodiments, symmetrical cooling water pipes 501 are distributed on both sides of the long side of the ground electrode flange 5, and are connected to the cooling water interfaces 502 on both sides of the short side of the ground electrode flange to form a closed cooling loop.

[0025] The upper part of the ground electrode flange 5 is provided with a ground electrode flange sealing groove 503, which is used to place a sealing ring to ensure the sealing performance of the insulating support.

[0026] The ground electrode flange 5 also includes a fixing threaded hole, which is used to install the insulating bracket on the large-area ion source three-electrode extraction system.

[0027] In some embodiments, the depth of the countersunk threaded hole 201 of the main insulator is 18 mm, and the depth of the threaded through hole is 34 mm.

[0028] In some embodiments, the plasma electrode flange cooling water pipe 101, the suppression electrode flange cooling water pipe 301, and the ground electrode flange cooling water pipe 501 are all columnar channels;

[0029] The plasma electrode flange cooling water pipe (101) is cross-connected to the long side and short side of the plasma electrode flange (1). The plasma electrode flange cooling water pipe (101) is provided with multiple plasma electrode flange branch cooling water pipes on the long side of the plasma electrode flange (1). The plasma electrode flange cooling water interface (102) includes a pair of plasma electrode flange cooling water inlets and a pair of plasma electrode flange cooling water outlets located on the short side of the plasma electrode flange (1). Water flows in from the plasma electrode flange cooling water inlets, passes through the plasma electrode flange cooling water pipe (101) and multiple plasma electrode flange branch cooling water pipes, and then flows out from the plasma electrode flange cooling water outlets, forming a plasma electrode flange cooling circuit.

[0030] The suppression electrode flange cooling water pipe (301) is cross-connected to the long side and short side of the suppression electrode flange (3). The suppression electrode flange cooling water pipe (301) is provided with multiple suppression electrode flange branch cooling water pipes on the long side of the suppression electrode flange (3). The suppression electrode flange cooling water interface (302) includes a pair of suppression electrode flange cooling water inlets and a pair of suppression electrode flange cooling water outlets located on the short side of the suppression electrode flange (3). Water flows in from the suppression electrode flange cooling water inlets, passes through the suppression electrode flange cooling water pipe (301) and multiple suppression electrode flange branch cooling water pipes, and then flows out from the suppression electrode flange cooling water outlets, forming a closed cooling circuit for the suppression electrode flange.

[0031] The ground electrode flange cooling water pipe (501) is cross-connected to the long side and short side of the ground electrode flange (5). The ground electrode flange cooling water pipe (501) is provided with multiple ground electrode flange branch cooling water pipes (504) on the long side of the ground electrode flange (5). The ground electrode flange cooling water interface (502) includes a pair of ground electrode flange cooling water inlets (5021) and a pair of ground electrode flange cooling water outlets (5022) located on the short side of the ground electrode flange (5). Water flows in from the ground electrode flange cooling water inlet (5021), flows through the ground electrode flange cooling water pipe (501) and multiple ground electrode flange branch cooling water pipes, and flows out from the ground electrode flange cooling water outlet (5022) to form a ground electrode flange cooling circuit.

[0032] In some embodiments, the inner diameter of each cooling water pipe is larger than the inner diameter of each cooling water inlet.

[0033] The beneficial effects of this application embodiment compared to the prior art are as follows: By utilizing alumina ceramic material to construct the plasma electrode insulator and suppression electrode insulator of the insulating support, the insulating support can leverage the excellent high-temperature stability and outstanding radiation damage resistance of alumina ceramic material. This ensures that the extraction system can extract large-area, high-current ion beams while also providing pressure-resistant insulation, vacuum sealing, and high-temperature radiation resistance. This structure is easy to install and maintain, and has high stability, ensuring reliable operation of the three-electrode insulating support for the large-area ion extraction system under high-temperature irradiation environments. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the structure of a high-temperature irradiation-resistant insulating support for a large-area ion source extraction system provided in an embodiment of this application.

[0036] Figure 2 This is a schematic diagram of the water pipe distribution of a high-temperature irradiation-resistant insulating support for a large-area ion source extraction system provided in an embodiment of this application.

[0037] Figure 3 This is a schematic diagram of the water pipe distribution in the ground electrode flange provided in the embodiment of this application.

[0038] In the diagram, 1-Plasma electrode flange; 2-Plasma electrode insulator; 3-Suppression electrode flange; 4-Suppression electrode insulator; 5-Ground electrode flange; 101-Plasma electrode flange cooling water pipe; 102-Plasma electrode flange cooling water interface; 103-Plasma electrode flange sealing groove; 201-Main insulator countersunk threaded hole; 202-Wire threaded sleeve; 301-Suppression electrode flange cooling water pipe; 302-Suppression electrode flange cooling water interface; 303-Suppression electrode flange sealing groove; 501-Ground electrode flange cooling water pipe; 502-Ground electrode flange cooling water interface; 5021-Ground electrode flange cooling water inlet; 5022-Ground electrode flange cooling water outlet; 503-Ground electrode flange sealing groove; 504-Ground electrode flange branch cooling water pipe. Detailed Implementation

[0039] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application may also be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, apparatuses, circuits, and methods have been omitted so as not to obscure the description of this application with unnecessary detail.

[0040] The high-temperature irradiation-resistant insulating bracket for a large-area ion source extraction system according to embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0041] Figure 1 This is a schematic diagram of the high-temperature irradiation-resistant insulating support for a large-area ion source extraction system provided in an embodiment of this application. Figure 1 As shown, the insulating support includes: a plasma electrode flange 1, a plasma electrode insulator 2, a suppression electrode flange 3, a suppression electrode insulator 4, and a ground electrode flange 5. The plasma electrode flange 1, plasma electrode insulator 2, suppression electrode flange 3, suppression electrode insulator 4, and ground electrode flange 5 are connected sequentially from top to bottom, and the ground electrode flange 5 is connected to the large-area ion source three-electrode extraction system.

[0042] Furthermore, the plasma electrode insulator 2 and the suppression electrode insulator 4 are made of alumina ceramic material.

[0043] In related technologies, the ion sources for ion extraction systems are mostly hydrogen or helium, which are non-radioactive and do not generate a high-temperature irradiation environment during ion implantation. Therefore, the insulating supports of existing ion extraction systems are not designed and manufactured with high-temperature irradiation resistance in mind.

[0044] However, with the development of nuclear fusion technology, extraction systems using deuterium and tritium as ion sources are about to be put into use. At this time, how to design an insulating support that can adapt to the high-temperature irradiation environment brought about by the injection of deuterium and tritium ion sources is a new requirement under the new application scenario.

[0045] In view of this, the plasma electrode insulator 2 and the suppression electrode insulator 4 in the insulating support are configured to be made of alumina ceramic material, and the high temperature stability and radiation damage resistance of alumina ceramic material are used to endow the insulating support with high temperature radiation resistance.

[0046] In some embodiments of this application, the plasma electrode flange 1 is a hollow rectangular structure, with symmetrical plasma electrode flange cooling water pipes 101 on both sides of the long side, which are connected to the plasma electrode flange cooling water interface 102 on the short side to form a closed cooling loop.

[0047] The plasma electrode flange 1 has a plasma electrode flange sealing groove 103 on its back. The plasma electrode flange sealing groove 103 is used to place a sealing ring to ensure the sealing of the insulating support. The plasma electrode flange 1 is fastened to the plasma electrode insulator 2 by bolts. The back of the plasma electrode flange 1 can be the bottom surface of the plasma electrode flange 1, that is, the contact surface between the plasma electrode flange 1 and the plasma electrode insulator 2.

[0048] In some embodiments of this application, the plasma electrode insulator 2 adopts a box-type structure design. The upper part of the plasma electrode insulator 2 is connected to the plasma electrode flange 1, and the lower part is connected to the suppression electrode flange 3.

[0049] The plasma electrode insulator 2 has N countersunk threaded holes 201 on its upper and lower end faces, and each countersunk threaded hole 201 is pre-embedded with a wire thread insert 202 to improve the durability of the thread and the reliability of the connection; N is a positive integer.

[0050] In some embodiments of this application, the suppression electrode flange 3 is a hollow rectangular structure, with symmetrical suppression electrode flange cooling water pipes 301 on both sides of the long side. The suppression electrode flange cooling water pipes 301 are connected to the suppression electrode flange cooling water interfaces 302 on both sides of the short side to form a closed cooling circuit.

[0051] The upper and lower surfaces of the suppression electrode flange 3 are respectively provided with rectangular grooves, wherein the upper rectangular groove is connected to the plasma electrode insulator 2 and the lower rectangular groove is connected to the suppression electrode insulator 4; the inner side of the rectangular groove is machined with a suppression electrode flange sealing groove 303, which is used to place a sealing ring to ensure the sealing of the insulation support.

[0052] By adopting the technical solution provided in the embodiments of this application, by setting multiple sealing grooves and placing sealing rings in the sealing grooves, better sealing performance is provided for the insulating support, enabling it to better adapt to the new application scenario of deuterium-tritium ion source extraction system.

[0053] In some embodiments of this application, the suppression electrode flange 3 is connected to the plasma electrode insulator 2 by bolts disposed in the suppression electrode flange sealing groove 303 inside the rectangular groove on the upper surface.

[0054] The suppression electrode flange 3, the suppression electrode insulator 4, and the ground electrode flange 5 are sequentially stacked and fixed by bolts set in the suppression electrode flange sealing groove 303 inside the rectangular groove on the lower surface.

[0055] In some embodiments of this application, the suppression electrode insulator 4 has threaded through holes around its perimeter and is connected to the suppression electrode flange 3 and the ground electrode flange 5 through the threaded through holes.

[0056] Using the technical solution provided in the embodiments of this application, the plasma electrode insulator 2 and the suppression electrode insulator 4 made of alumina ceramic are connected to other components through high-strength fasteners such as bolts and threaded through holes, which further improves the stability of the insulating support.

[0057] In some embodiments of this application, symmetrical cooling water pipes 501 are distributed on both sides of the long side of the ground electrode flange 5, and are connected to the cooling water interfaces 502 on both sides of the short side of the ground electrode flange to form a closed cooling circuit.

[0058] The upper part of the ground electrode flange 5 is provided with a ground electrode flange sealing groove 503, which is used to place a sealing ring to ensure the sealing performance of the insulating support.

[0059] The ground electrode flange 5 also includes a fixing threaded hole, which is used to install the insulating bracket on the large-area ion source three-electrode extraction system.

[0060] In some embodiments of this application, 32 M8 stainless steel bolts can be used to fasten the plasma electrode flange 1 to the plasma electrode insulator 2, and a sealing groove 103 is opened on the contact surface between the plasma electrode flange 1 and the plasma electrode insulator 2 to ensure the sealing of the structure.

[0061] Simultaneously, sealing grooves 303 can be formed in the rectangular grooves on the upper and lower surfaces of the suppression electrode flange 3. The upper surface of the suppression electrode flange 3 is fixedly connected to the plasma electrode insulator 2 using 32 M8 stainless steel bolts. On the lower surface of the suppression electrode flange 3, the suppression electrode flange 3, the suppression electrode insulator 4, and the ground electrode flange 5 are sequentially stacked and fixed using 36 M10 stainless steel bolts to ensure the mechanical strength of the overall structure. 36 M10 threaded holes are formed around the ground electrode flange 5 for installation on the ion source device.

[0062] The plasma electrode insulator 2 can be provided with a countersunk threaded hole 201 with a depth of 18mm in the circumference of the upper and lower surfaces, and a wire threaded sleeve 202 adapted to its thread can be pre-embedded; the suppression electrode insulator 4 has a threaded through hole with a depth of 34mm in the circumference.

[0063] Figure 2 This is a schematic diagram of the water pipe distribution of a high-temperature irradiation-resistant insulating support for a large-area ion source extraction system provided in an embodiment of this application. Figure 2 As shown, the plasma electrode flange cooling water pipe 101, the suppression electrode flange cooling water pipe 301, and the ground electrode flange cooling water pipe 501 are all columnar channels.

[0064] Specifically, the plasma electrode flange cooling water pipe 101 is cross-connected to the long and short sides of the plasma electrode flange 1, forming a closed cooling loop with the plasma electrode flange cooling water interface 102; the suppression electrode flange cooling water pipe 301 is cross-connected to the long and short sides of the suppression electrode flange 3, forming a closed cooling loop with the suppression electrode flange cooling water interface 302; and the ground electrode flange cooling water pipe 501 is cross-connected to the long and short sides of the ground electrode flange 5, forming a closed cooling loop with the ground electrode flange cooling water interface 502. Furthermore, the inner diameter of each cooling water pipe is larger than the inner diameter of each cooling water interface.

[0065] In other words, cooling water circuits can be installed on the plasma electrode flange 1, the suppression electrode flange 3, and the ground electrode flange 5. The four pairs of main cooling water pipes on each support flange are symmetrically distributed, and each cooling water pipe is a cylindrical channel with an inner diameter of 17 mm. The main cooling water pipes are connected at a cross intersection on the long and short sides of the support flange, ultimately flowing to their respective cooling water inlets to form a cooling loop. The inner diameter of each cooling water inlet is 11 mm.

[0066] In some embodiments of this application, the plasma electrode insulator 2 and the suppression electrode insulator 4 can be made of alumina ceramic material. This utilizes the excellent high-temperature stability and outstanding radiation resistance of alumina ceramic material to ensure that the extraction system can extract a large-area, high-current ion beam while also providing pressure-resistant insulation, vacuum sealing, and high-temperature radiation resistance.

[0067] Furthermore, to improve water cooling efficiency, the water cooling pipeline can be designed with a flow divider, and the cooling water interface can be divided into an inlet and an outlet, thereby increasing the coverage area of ​​the water cooling pipeline and improving the water flow efficiency.

[0068] Figure 3 This is a schematic diagram of the water pipe distribution in the ground electrode flange provided in an embodiment of this application. For example... Figure 3 As shown, symmetrical cooling water pipes 501 are provided in the ground electrode flange 5. These cooling water pipes 501 are cross-connected at the junction of the long and short sides of the ground electrode flange 5. That is, four pairs of cooling water pipes 501 can be provided at the four corners of the ground electrode flange 5. Each pair of cooling water pipes 501 includes a pipe arranged along the long side and a pipe arranged along the short side, which are cross-connected.

[0069] A cooling water inlet 5021 and a cooling water outlet 5022 can be provided on each short side of the ground electrode flange 5. Multiple ground electrode flange branch cooling water pipes 504 can also be provided around the ground electrode flange cooling water pipe 501 on the long side of the ground electrode flange 5. The inner diameter of these branch cooling water pipes 504 can be smaller than the inner diameter of the ground electrode flange cooling water pipe 501.

[0070] Cooling water flows in from the cooling water inlet 5021 on the short side of the ground electrode flange 5, and enters the cross passage of the cooling water pipe 501. It is then diverted by several pairs of small cooling water pipes 504 to cool the ground electrode. The water then flows from the internal passage of the ground electrode to the cooling water pipe on the long side, and finally exits from the cooling water outlet 5022, thus completing the circulation of cooling water within the ground electrode flange.

[0071] The distribution of water pipes in plasma electrode flange 1 and suppression electrode flange 3 is similar to that in local electrode flanges, and will not be described again here.

[0072] All of the above-mentioned optional technical solutions can be combined in any way to form the optional embodiments of this application, and will not be described in detail here.

[0073] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A high-temperature irradiation-resistant insulating support for a large-area ion source extraction system, characterized in that, The large-area ion source extraction system is a large-area ion source three-electrode extraction system, and the ion source is a deuterium-tritium ion source; The insulating support includes: a plasma electrode flange (1), a plasma electrode insulator (2), a suppression electrode flange (3), a suppression electrode insulator (4), and a ground electrode flange (5). The plasma electrode flange (1), plasma electrode insulator (2), suppression electrode flange (3), suppression electrode insulator (4) and ground electrode flange (5) are connected sequentially from top to bottom, and the ground electrode flange (5) is connected to the large-area ion source three-electrode extraction system; The plasma electrode insulator (2) and the suppression electrode insulator (4) are made of alumina ceramic material.

2. The insulating bracket according to claim 1, characterized in that, The plasma electrode flange (1) is a hollow rectangular structure. Symmetrical plasma electrode flange cooling water pipes (101) are provided on both sides of the long side and connected to the plasma electrode flange cooling water interface (102) on the short side to form a closed cooling circuit. The plasma electrode flange (1) is provided with a plasma electrode flange sealing groove (103) on the back. The plasma electrode flange sealing groove (103) is used to place a sealing ring to ensure the sealing of the insulating bracket. The plasma electrode flange (1) is fastened to the plasma electrode insulator (2) by bolts.

3. The insulating bracket according to claim 1, characterized in that, The plasma electrode insulator (2) adopts a box-type structure design; The upper part of the plasma electrode insulator (2) is connected to the plasma electrode flange (1), and the lower part is connected to the suppression electrode flange (3). The plasma electrode insulator (2) has N countersunk threaded holes (201) on its upper and lower end faces respectively. Each countersunk threaded hole (201) is pre-embedded with a wire thread sleeve (202) to improve the durability of the thread and the reliability of the connection. N is a positive integer.

4. The insulating bracket according to claim 2, characterized in that, The suppression electrode flange (3) is a hollow rectangular structure with symmetrical suppression electrode flange cooling water pipes (301) on both sides of the long side. The suppression electrode flange cooling water pipes (301) are connected to the suppression electrode flange cooling water interfaces (302) on both sides of the short side to form a closed cooling circuit. The upper and lower surfaces of the suppression electrode flange (3) are respectively provided with rectangular grooves, wherein the upper rectangular groove is connected to the plasma electrode insulator (2) and the lower rectangular groove is connected to the suppression electrode insulator (4); the inner side of the rectangular groove is provided with a suppression electrode flange sealing groove (303), which is used to place a sealing ring to ensure the sealing of the insulating support.

5. The insulating bracket according to claim 4, characterized in that, The suppression electrode flange (3) is connected to the plasma electrode insulator (2) by bolts provided in the suppression electrode flange sealing groove (303) inside the rectangular groove on the upper surface; The suppression electrode flange (3) is fixed by bolts in the suppression electrode flange sealing groove (303) inside the rectangular groove on the lower surface, which sequentially stack and fix the suppression electrode flange (3), the suppression electrode insulator (4) and the ground electrode flange (5).

6. The insulating bracket according to claim 3, characterized in that, The suppression electrode insulator (4) has threaded through holes all around its body, and is connected to the suppression electrode flange (3) and the ground electrode flange (5) through the threaded through holes.

7. The insulating bracket according to claim 4, characterized in that, The ground electrode flange (5) has symmetrical ground electrode flange cooling water pipes (501) distributed on both sides of its long side, and is connected to the ground electrode flange cooling water interface (502) on both sides of its short side to form a closed cooling circuit. The ground electrode flange (5) is provided with a ground electrode flange sealing groove (503) on the upper part. The ground electrode flange sealing groove (503) is used to place a sealing ring to ensure the sealing performance of the insulating bracket. The ground electrode flange (5) also includes a fixing threaded hole, which is used to install the insulating bracket on the large-area ion source three-electrode extraction system.

8. The insulating bracket according to claim 6, characterized in that, The depth of the countersunk threaded hole (201) of the main insulator is 18 mm, and the depth of the threaded through hole is 34 mm.

9. The insulating bracket according to claim 7, characterized in that, The plasma electrode flange cooling water pipe (101), the suppression electrode flange cooling water pipe (301), and the ground electrode flange cooling water pipe (501) are all columnar channels; The plasma electrode flange cooling water pipe (101) is cross-connected to the long side and short side of the plasma electrode flange (1). The plasma electrode flange cooling water pipe (101) is provided with multiple plasma electrode flange branch cooling water pipes on the long side of the plasma electrode flange (1). The plasma electrode flange cooling water interface (102) includes a pair of plasma electrode flange cooling water inlets and a pair of plasma electrode flange cooling water outlets located on the short side of the plasma electrode flange (1). Water flows in from the plasma electrode flange cooling water inlets, passes through the plasma electrode flange cooling water pipe (101) and the multiple plasma electrode flange branch cooling water pipes, and then flows out from the plasma electrode flange cooling water outlets, forming a plasma electrode flange cooling circuit. The suppression electrode flange cooling water pipe (301) is cross-connected to the long side and short side of the suppression electrode flange (3). The suppression electrode flange cooling water pipe (301) is provided with multiple suppression electrode flange branch cooling water pipes on the long side of the suppression electrode flange (3). The suppression electrode flange cooling water interface (302) includes a pair of suppression electrode flange cooling water inlets and a pair of suppression electrode flange cooling water outlets located on the short side of the suppression electrode flange (3). Water flows in from the suppression electrode flange cooling water inlets, passes through the suppression electrode flange cooling water pipe (301) and the multiple suppression electrode flange branch cooling water pipes, and then flows out from the suppression electrode flange cooling water outlets, forming a closed cooling circuit for the suppression electrode flange. The ground electrode flange cooling water pipe (501) is cross-connected to the long side and short side of the ground electrode flange (5). The ground electrode flange cooling water pipe (501) is provided with multiple ground electrode flange branch cooling water pipes (504) on the long side of the ground electrode flange (5). The ground electrode flange cooling water interface (502) includes a pair of ground electrode flange cooling water inlets (5021) and a pair of ground electrode flange cooling water outlets (5022) located on the short side of the ground electrode flange (5). Water flows in from the ground electrode flange cooling water inlets (5021), flows through the ground electrode flange cooling water pipe (501) and the multiple ground electrode flange branch cooling water pipes, and flows out from the ground electrode flange cooling water outlets (5022) to form a ground electrode flange cooling circuit.

10. The insulating bracket according to claim 9, characterized in that, The inner diameter of each cooling water pipe is larger than the inner diameter of each cooling water interface.

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