Automatic curing tunnel furnace
The design of the automatic curing tunnel oven enables efficient and automated loading and unloading of integrated circuit packaging and thermal curing of multiple tunnel ovens, solving the problems of low efficiency and high energy consumption of manual loading and unloading, and meeting the needs of large-scale production.
Patent Information
- Application Number
- CN202511646205.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-11
- Publication Date
- 2026-02-13
AI Technical Summary
In the current integrated circuit packaging and curing process, manual loading and unloading is inefficient and energy-intensive, making it difficult to meet the needs of large-scale production.
The automatic curing tunnel oven is adopted, which includes at least two tunnel oven bodies, a feeding double-speed chain and a discharging double-speed chain. Combined with a robot and controller, it realizes automatic loading and unloading. The multi-tunnel oven body design improves thermosetting efficiency and energy saving.
It achieves stable and reliable curing of large batches of products, improves curing efficiency, reduces manpower consumption, enhances operational efficiency, and can adapt to the thermosetting requirements of different products.
Smart Images
Figure CN121520848A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the technical field of post-packaging curing of integrated circuits, specifically to an automated curing tunnel oven. Background Technology
[0002] In existing technologies, integrated circuits are cured in ovens after packaging. Loading and unloading require manual handling, resulting in high labor costs and reduced efficiency. Furthermore, ovens are energy-intensive and unsuitable for mass production. With the large-scale mass production of integrated circuits, existing oven curing structures can no longer meet the demands of production lines. Therefore, there is an urgent need to develop thermosetting equipment that can adapt to the needs of large-scale production. Summary of the Invention
[0003] To address the aforementioned issues, this invention provides an automated curing tunnel oven, which enables stable and reliable curing operations for large-volume products, improves curing efficiency, and ensures good product appearance consistency.
[0004] An automatic curing tunnel oven, characterized in that it comprises: At least two tunnel furnace bodies; A high-speed feeding chain, which includes a feeding conveyor track; And a high-speed feeding chain, which includes a feeding conveyor track; Each tunnel furnace body includes a tunnel furnace shell, a tunnel furnace circulation track, a feeding assembly, and a discharging assembly. The tunnel furnace circulation track is provided with a feeding arrangement unit protruding outward at the front end of the tunnel furnace shell, and a discharging arrangement unit is provided with a discharging arrangement unit protruding outward at the rear end of the tunnel furnace shell. A feeding assembly is provided on the upper part of the feeding arrangement unit, and a discharging assembly is provided on the upper part of the discharging arrangement unit. All the tunnel furnace bodies are arranged sequentially and at intervals according to the layout of the workshop to form tunnel furnace body channels. There is a buffer interval between the unloading arrangement unit of the front tunnel furnace body and the loading arrangement unit of the adjacent tunnel furnace body. A feeding double-speed chain is provided on one side of the tunnel furnace body channel in the width direction, and a discharging double-speed chain is provided on the other side of the tunnel furnace body channel in the width direction. The feeding conveyor track covers the feeding arrangement unit of each tunnel furnace body in the length direction, and the discharging conveyor track covers the discharging arrangement unit of each tunnel furnace body in the length direction. The discharging conveyor track connects the products to the rear work station.
[0005] Its further features are: The tunnel furnace circulation track of each group of tunnel furnace bodies has 8-16 channels in the width direction, which makes the thermosetting efficiency high. Each tunnel furnace body is composed of several sets of heating furnaces spliced together in sequence. Each set of heating furnaces is equipped with a heating device. The top of each set of heating furnaces is also equipped with an exhaust port, a blower, and a cooling fan. The heating furnaces are arranged reasonably according to the thermosetting temperature and time of the product, and are arranged in coordination with the travel speed of the tunnel furnace's circulating track to ensure reliable and stable thermosetting of the product. The feeding assembly includes a first lateral translation module and a feeding robot. The first lateral translation module drives the feeding robot to transfer the products on the feeding conveyor track to the tunnel furnace circulation track position corresponding to the feeding arrangement unit. The unloading assembly includes a second lateral translation module and an unloading robot. The second lateral translation module drives the unloading robot to transfer the products on the tunnel furnace circulation track located at the corresponding position of the unloading arrangement unit to the unloading conveyor track. The feeding and unloading double-speed chains each include double-speed chain fixing mechanisms at both ends, several double-speed chain tensioning mechanisms, double-speed chains, and a double-speed chain translation stepper motor. The feeding and unloading conveyor tracks are sleeved on the outer periphery of the double-speed chains. Each tunnel furnace body also has a first controller, which is connected to the lower end of the tunnel furnace circulation track corresponding to the feeding unit. The feeding robot and the unloading robot are connected to a second controller for controlling the automatic operation of the robot. The second controller is connected to the first controller. The discharge port of each tunnel furnace body is equipped with a sensor for monitoring the product output position. The sensor is connected to the second controller. The first controller controls the travel speed of the tunnel furnace circulation track, and the second controller controls the feeding and unloading speed and position of the feeding robot and the unloading robot, respectively. Both the loading and unloading robotic arms are equipped with up and down stepper motors, rotary cylinders, and clamping cylinders.
[0006] After adopting the above technical solution, the loading and unloading of each tunnel furnace body is automatically carried out by the loading and unloading double-speed chain, loading component and unloading component on the side of the tunnel furnace body channel, which frees up some labor input, reduces the consumption of manual handling in and out of the oven, and improves the operation efficiency. At the same time, the structural design of multiple tunnel furnace bodies can realize large-scale thermosetting operations, which is more energy-efficient than ovens, and can also bake different products separately as needed, making it more practical. Attached Figure Description
[0007] Figure 1 This is a top view structural diagram of the present invention; Figure 2 This is an enlarged schematic diagram of the feeding speed-multiplying chain or the unloading speed-multiplying chain of the present invention; Figure 3 This is an enlarged schematic diagram of the assembly of the feeding arrangement unit and feeding assembly of the present invention; Figure 4 This is an enlarged assembly diagram of the feeding arrangement unit and feeding assembly of the present invention; The names corresponding to the markings in the diagram are as follows: 1. Tunnel furnace body channel; 2. Double speed chain fixing mechanism; 3. Several double speed chain tensioning mechanisms; 4. Double speed chain; 5. Double speed chain translation stepper motor; The components include: tunnel furnace body 10, feeding double-speed chain 20, feeding conveyor track 21, unloading double-speed chain 30, unloading conveyor track 31, tunnel furnace shell 40, tunnel furnace circulation track 50, feeding assembly 60, first lateral translation module 61, feeding robot 62, unloading assembly 70, second lateral translation module 71, unloading robot 72, feeding arrangement unit 80, unloading arrangement unit 90, buffer interval 100, heating furnace 110, exhaust port 111, and blower / cooling fan 112. Detailed Implementation
[0008] Automatic curing tunnel oven, see Figures 1-4 It includes at least two tunnel furnace bodies 10, a feeding double-speed chain 20, and a discharging double-speed chain 30; The feeding double-speed chain 20 includes a feeding conveyor track 21; the unloading double-speed chain 30 includes an unloading conveyor track 31. Each tunnel furnace body 10 includes a tunnel furnace shell 40, a tunnel furnace circulation track 50, a feeding assembly 60, and a discharging assembly 70. The tunnel furnace circulation track 50 is provided with a feeding arrangement unit 80 protruding outward at the front end of the tunnel furnace shell 40, and a discharging arrangement unit 90 is provided with a discharging arrangement unit 90 protruding outward at the rear end of the tunnel furnace shell 40. The feeding assembly 60 is provided on the upper part of the feeding arrangement unit 80, and the discharging assembly 70 is provided on the upper part of the discharging arrangement unit 90.
[0009] In a specific embodiment, two tunnel furnace bodies 10 are set up in the workshop. The two tunnel furnace bodies 10 are arranged in sequence at intervals to form a tunnel furnace body channel 1. A buffer interval 100 is left between the unloading arrangement unit 90 of the front tunnel furnace body 10 and the loading arrangement unit 80 of the adjacent tunnel furnace body 10. A feeding double-speed chain 20 is provided on one side of the tunnel furnace body channel 1 in the width direction, and a discharging double-speed chain 30 is provided on the other side of the tunnel furnace body channel 1 in the width direction. The feeding conveyor track 21 covers the feeding arrangement unit 80 of each tunnel furnace body 10 in the length direction, and the discharging conveyor track 31 covers the discharging arrangement unit 90 of each tunnel furnace body 10 in the length direction, and the discharging conveyor track 31 connects the product to the rear work station.
[0010] In a specific embodiment, the width of the tunnel furnace circulation track of each tunnel furnace body 10 is 8-16 channels, which results in high thermosetting efficiency.
[0011] In a specific embodiment, each tunnel furnace body 10 is composed of several sets of heating furnaces 110 sequentially spliced together. Each set of heating furnaces 110 is equipped with a heating device. Each set of heating furnaces 110 is also equipped with an exhaust port 111 and a blower cooling fan 112 on its top. The heating furnaces 110 are arranged reasonably according to the thermosetting temperature and time of the product, and are arranged in coordination with the travel speed of the tunnel furnace circulation track 50 to ensure reliable and stable thermosetting of the product. The feeding assembly 60 includes a first lateral translation module 61 and a feeding robot 62. The first lateral translation module 61 drives the feeding robot 62 to transfer the products on the feeding conveyor track 21 to the three-dimensional position of the tunnel furnace circulation track 50 corresponding to the position of the feeding arrangement unit 80. The unloading assembly 70 includes a second lateral translation module 71 and an unloading robot 72. The second lateral translation module 71 drives the unloading robot 72 to transfer the products on the tunnel furnace circulation track 50 located at the corresponding position of the unloading arrangement unit 90 to the unloading conveyor track 31. The feeding double-speed chain 20 and the unloading double-speed chain 30 both include double-speed chain fixing mechanisms 2 at both ends, several double-speed chain tensioning mechanisms 3, double-speed chains 4, and a double-speed chain translation stepper motor 5. The feeding conveyor track 21 and the unloading conveyor track 31 are set around the outer periphery of the double-speed chains 4. Each tunnel furnace body 10 also has a first controller, which is connected to the lower end of the tunnel furnace circulation track 50 corresponding to the feeding arrangement unit 80. The feeding robot 62 and the unloading robot 72 are connected to a second controller for controlling the automatic operation of the robot. The second controller is connected to the first controller. The discharge port of each tunnel furnace body 10 is equipped with a sensor for monitoring the product output position. The sensor is connected to the second controller. The first controller controls the travel speed of the tunnel furnace circulation track 50. The second controller controls the feeding and unloading speed and position of the feeding robot 62 and the unloading robot 72 respectively (the first controller and the second controller are not shown, which belong to the conventional technology of inductive control or linkage control).
[0012] In practice, both the loading robot 62 and the unloading robot 72 are equipped with up and down stepper motors, rotary cylinders, and clamping cylinders, which facilitates reliable clamping and transfer of products.
[0013] It automatically loads and unloads each tunnel furnace body through a double-speed feeding chain, a double-speed unloading chain, a feeding component, and an unloading component on the side of the tunnel furnace body, freeing up some labor input, reducing the consumption of manual handling when entering and leaving the oven, and improving operating efficiency; at the same time, the structure design of multiple tunnel furnace bodies can realize large-scale thermosetting operations, which is more energy-efficient than ovens, and can also bake different products separately as needed, making it more practical.
[0014] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
[0015] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. An automatic curing tunnel oven, characterized in that, It includes: At least two tunnel furnace bodies; A high-speed feeding chain, which includes a feeding conveyor track; And a high-speed feeding chain, which includes a feeding conveyor track; Each tunnel furnace body includes a tunnel furnace shell, a tunnel furnace circulation track, a feeding assembly, and a discharging assembly. The tunnel furnace circulation track is provided with a feeding arrangement unit protruding outward at the front end of the tunnel furnace shell, and a discharging arrangement unit is provided with a discharging arrangement unit protruding outward at the rear end of the tunnel furnace shell. A feeding assembly is provided on the upper part of the feeding arrangement unit, and a discharging assembly is provided on the upper part of the discharging arrangement unit. All the tunnel furnace bodies are arranged sequentially and at intervals according to the layout of the workshop to form tunnel furnace body channels. There is a buffer interval between the unloading arrangement unit of the front tunnel furnace body and the loading arrangement unit of the adjacent tunnel furnace body. A feeding double-speed chain is provided on one side of the tunnel furnace body channel in the width direction, and a discharging double-speed chain is provided on the other side of the tunnel furnace body channel in the width direction. The feeding conveyor track covers the feeding arrangement unit of each tunnel furnace body in the length direction, and the discharging conveyor track covers the discharging arrangement unit of each tunnel furnace body in the length direction. The discharging conveyor track connects the products to the rear work station.
2. The automatic curing tunnel oven according to claim 1, characterized in that: The width of the tunnel furnace circulation track of each group of tunnel furnace bodies is 8-16 channels.
3. The automatic curing tunnel oven according to claim 1, characterized in that: Each tunnel furnace body is composed of several sets of heating furnaces spliced together in sequence. Each set of heating furnaces is equipped with a heating device, and each set of heating furnaces is also equipped with an exhaust port, a blower, and a cooling fan at the top.
4. The automatic curing tunnel oven according to claim 1, characterized in that: The feeding assembly includes a first lateral translation module and a feeding robot. The first lateral translation module drives the feeding robot to transfer the products on the feeding conveyor track to the corresponding position of the tunnel furnace circulation track in the feeding arrangement unit.
5. The automatic curing tunnel oven according to claim 4, characterized in that: The unloading assembly includes a second lateral translation module and an unloading robot. The second lateral translation module drives the unloading robot to transfer the products located on the tunnel furnace circulation track at the position corresponding to the unloading arrangement unit to the unloading conveyor track.
6. The automatic curing tunnel oven according to claim 1, characterized in that: The feeding and unloading double-speed chains each include double-speed chain fixing mechanisms at both ends, several double-speed chain tensioning mechanisms, double-speed chains, and a double-speed chain translation stepper motor. The feeding and unloading conveyor tracks are sleeved on the outer periphery of the double-speed chains.
7. The automatic curing tunnel oven according to claim 5, characterized in that: Each tunnel furnace body also has a first controller, which is connected to the lower end of the tunnel furnace circulation track corresponding to the feeding unit. The feeding robot and the unloading robot are connected to a second controller for controlling the automatic operation of the robot. The second controller is connected to the first controller. The discharge port of each tunnel furnace body is equipped with a sensor for monitoring the product output position. The sensor is connected to the second controller. The first controller controls the travel speed of the tunnel furnace circulation track, and the second controller controls the feeding and unloading speed and position of the feeding robot and the unloading robot, respectively.
8. The automatic curing tunnel oven according to claim 5, characterized in that: Both the loading and unloading robotic arms are equipped with up and down stepper motors, rotary cylinders, and clamping cylinders.