Control device and substrate processing system including the same

Abstract

The invention provides a control apparatus for determining a printing start point using a plurality of camera sensors and a substrate processing system including the same. The substrate processing system includes: a stage that supports a substrate; an ink jet head module which jets the processing liquid to the substrate and performs pattern printing on the substrate; a gantry module that moves the inkjet head module on the substrate; and a control device determining a printing start point for pattern printing, the control device determining the printing start point using a first camera sensor and a second camera sensor, the first camera sensor and the second camera sensor having different magnification values or viewing angles.

Description

[0001] Cross-reference to related applications

[0002] This application claims priority and benefit to Korean Patent Application No. 10-2024-0107313, filed with the Korean Intellectual Property Office on August 12, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present invention relates to a control device for pattern printing processes on substrates and a substrate processing system including the control device. Background Technology

[0004] When printing patterns on a substrate, marks can be used to determine the starting point for printing. These marks can be pre-formed on the substrate. Therefore, in order to correctly print the pattern on the substrate, the position of the marks must be accurately identified.

[0005] The location of the markings can be obtained using a camera sensor. However, if a low-resolution camera is used, the printing starting point may be inaccurate due to reduced accuracy. Furthermore, when using a high-resolution camera, the narrower field of view (FOV) may result in a significant amount of time spent detecting the markings on the substrate. Summary of the Invention

[0006] Technical issues

[0007] The technical problem to be solved by the present invention is to provide a control device and a substrate processing system including the control device, wherein the control device uses multiple camera sensors with different magnifications to determine the printing start point.

[0008] The technical problems of this invention are not limited to those mentioned above, and those skilled in the art will clearly understand other technical problems not mentioned from the following description.

[0009] Problem-solving methods

[0010] To address the aforementioned technical challenge, this invention provides a substrate processing system, comprising: a stage for supporting a substrate; an inkjet head module for spraying processing liquid onto the substrate to print a pattern on the substrate; a gantry module for moving the inkjet head module on the substrate; and a control device for determining a printing start point for the pattern printing. The control device determines the printing start point using a first camera sensor and a second camera sensor, wherein the first camera sensor and the second camera sensor have different magnification values ​​or viewing angles.

[0011] To achieve the aforementioned technical problem, one aspect of the control device includes: a first detection unit for acquiring the position of a mark formed on the substrate; a first comparison unit for comparing the position of the mark with a first standard value; a first offset calculation unit for calculating a first offset based on the comparison result between the position of the mark and the first standard value; a second detection unit for acquiring the position of the mark using a second camera sensor; a second comparison unit for comparing the position of the mark with a second standard value; a second offset calculation unit for calculating a second offset based on the comparison result between the position of the mark and the second standard value; and a printing start point determination unit for determining the printing start point based on the first offset and the second offset, wherein the first camera sensor and the second camera sensor have different magnification values ​​or viewing angles.

[0012] To address the aforementioned technical challenge, this invention provides a substrate processing system, comprising: a stage for supporting a substrate; an inkjet head module for spraying processing liquid onto the substrate to print a pattern on the substrate; a gantry module for moving the inkjet head module on the substrate; and a control device for determining a printing start point for printing the pattern. The control device includes: a first detection unit for acquiring the position of a mark formed on the substrate; a first comparison unit for comparing the position of the mark with a first standard value; a first offset calculation unit for calculating a first offset based on the comparison result between the position of the mark and the first standard value; a second detection unit for acquiring the position of the mark using a second camera sensor; a second comparison unit for comparing the position of the mark with a second standard value; a second offset calculation unit for calculating a second offset based on the comparison result between the position of the mark and the second standard value; and a printing start point determination unit for determining the printing start point based on the first offset and the second offset. The first camera sensor is used before the second camera sensor and has a lower magnification value or a wider viewing angle than the second camera sensor.

[0013] Specific details of other embodiments are included in the detailed description and accompanying drawings. Attached Figure Description

[0014] Figure 1 This is a plan view illustrating the internal structure of a substrate processing apparatus for some embodiments of the present invention.

[0015] Figure 2 This is an example diagram illustrating the internal structure of the inkjet head module that constitutes some embodiments of the present invention.

[0016] Figure 3 This is a conceptual diagram illustrating a substrate processing system for some embodiments of the present invention.

[0017] Figure 4 This is a first example diagram illustrating the internal modules of a control device for explaining some embodiments of the present invention.

[0018] Figure 5 This is an example diagram illustrating the function of the first offset calculation unit of the control device constituting some embodiments of the present invention.

[0019] Figure 6 This is a first example diagram illustrating a first camera sensor and a second camera sensor for explaining some embodiments of the present invention.

[0020] Figure 7 This is a second example diagram illustrating a first camera sensor and a second camera sensor for explaining some embodiments of the present invention.

[0021] Figure 8 This is a third example diagram illustrating a first camera sensor and a second camera sensor for some embodiments of the present invention.

[0022] Figure 9 This is an example diagram illustrating the function of the second offset calculation unit of the control device constituting some embodiments of the present invention.

[0023] Figure 10 This is an example diagram illustrating the function of the printing start point determination unit, which constitutes some embodiments of the control device of the present invention.

[0024] Figure 11 This is a second example diagram illustrating the internal modules of a control device for explaining some embodiments of the present invention.

[0025] Figure 12 This is a third example diagram illustrating the internal modules of a control device for explaining some embodiments of the present invention.

[0026] Figure 13 Example diagrams illustrating first and second markings for illustrating some embodiments of the present invention.

[0027] Figure 14 This is a first example diagram illustrating the function of the tilt determination unit of the control device constituting some embodiments of the present invention.

[0028] Figure 15 This is a second example diagram illustrating the function of the tilt determination unit of the control device constituting some embodiments of the present invention.

[0029] Figure 16 The flowchart is provided to illustrate step by step the automatic operation process of some embodiments of the present invention. Detailed Implementation

[0030] Embodiments of the present invention will now be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used for the same parts, and repeated descriptions thereof are omitted.

[0031] The control device can use multiple camera sensors with different magnifications to determine the printing start point. The control device can be configured within the substrate processing system. The substrate processing system will be described first, followed by the control device.

[0032] Figure 1 This is a plan view illustrating the internal structure of a substrate processing apparatus for explaining some embodiments of the present invention. (Refer to...) Figure 1 The substrate processing apparatus 100 can be configured to include a process processing module 110, a maintenance module 120, a gantry module 130, an inkjet head module 140, and a processing liquid supply module 150.

[0033] The first direction D1 and the second direction D2 can form a two-dimensional plane. One of the first direction D1 and the second direction D2 can be the X-axis, and the other can be the Y-axis. Alternatively, one of the first direction D1 and the second direction D2 can be a left-right direction, and the other can be a front-back direction. The third direction D3 can form a three-dimensional solid with the first direction D1 and the second direction D2. The third direction D3 is perpendicular to the plane formed by the first direction D1 and the second direction D2. The third direction D3 can be the Z-axis. Alternatively, the third direction D3 can be the up-down direction.

[0034] The substrate processing apparatus 100 can process a substrate G used for manufacturing a display device. For example, the substrate processing apparatus 100 can process substrate G used for manufacturing LCD panels, LED panels, organic EL components, etc. The substrate processing apparatus 100 can spray substrate processing liquid onto the substrate G using an inkjet head module 140. The substrate processing apparatus 100 is capable of pattern printing on the substrate G. For example, the substrate processing apparatus 100 can be provided as an inkjet printing device. For example, the substrate G can be provided as transparent glass.

[0035] Substrate processing liquid refers to the liquid used for printing substrate G. The substrate processing apparatus 100 can use ink as the substrate processing liquid. For example, the substrate processing liquid can be quantum dot ink containing ultrafine semiconductor particles.

[0036] The substrate processing apparatus 100 can use inks of various colors to perform pixel printing on the substrate G and form a color filter CF on the substrate G. The substrate processing apparatus 100 can be provided as a circulation device to prevent the nozzles in the inkjet head module 140 from being clogged by the substrate processing liquid. The circulation device can circulate the substrate processing liquid between the inkjet head module 140 and the processing liquid supply module 150.

[0037] The process module 110 can support the substrate G while processing it with a substrate processing solution. The process module 110 can employ either a contact method or a non-contact method to support the substrate G. When supporting the substrate G in a contact manner, the process module 110 can cause the substrate G to adhere to a chuck. When supporting the substrate G in a non-contact manner, the process module 110 can eject air onto the bottom surface of the substrate G, causing it to levitate in the air. The process module 110 can move the substrate G while supporting it.

[0038] For example, the process module 110 may be configured to include a first stage 111 and an air hole 112. The first stage 111 may be provided for mounting the substrate G on its upper part. The first stage 111 may include a printing zone disposed thereon.

[0039] The vent 112 can be formed by penetrating the first stage 111 in the third direction D3, and multiple vents 112 can be provided in the first stage 111. The vent 112 can spray air above the first stage 111. The vent 112 can suspend the substrate G placed on the first stage 111 in the air.

[0040] Although Figure 1 Although not shown, the process module 110 may further include a clamping part and a first guide rail. When the substrate G moves along the length direction D1 of the first stage 111, the clamping part can clamp the substrate G to prevent the substrate G from detaching from the first stage 111. The clamping part can move along the first guide rail together with the substrate G while clamping the substrate G. For example, the first guide rail may be provided as a linear motion (LM) guiding system.

[0041] The maintenance module 120 can inspect the droplets ejected by the inkjet head module 140. The maintenance module 120 can check whether the droplets have landed on the substrate G, the landing point, area, or volume of the droplets on the substrate G, and the movement speed of the droplets on the substrate G. The maintenance module 120 can provide the inspection results to the control device, which will be described later.

[0042] For example, the maintenance module 120 may be configured to include a second stage 121, a measurement module 122, and a vision module 123. The second stage 121 may be placed parallel to the first stage 111. The second stage 121 may include a maintenance zone disposed thereon. The second stage 121 may be provided with the same size as the first stage 111, but this embodiment is not limited thereto.

[0043] The measurement module 122 may include a dummy substrate (stacked substrate) capable of spraying substrate processing liquid. F. The dummy substrate F is a film-like substrate that can be used to inspect droplets. For example, the measurement module 122 can be provided as a JOF (Jetting On Film) module. The measurement module 122 may include a calibration board, which includes alignment marks, scales, etc., for measuring the droplet's landing point.

[0044] When the substrate processing liquid is sprayed onto the dummy substrate F, the vision module 123 can acquire an image including the droplet. The vision module 123 can acquire the image in real time. The vision module 123 may include at least one type of camera, such as a line scan camera or an area scan camera. For example, the vision module 123 may be provided as an NJI (Nozzle Jetting Inspection) module.

[0045] The vision module 123 can acquire images of the dummy substrate F used for inspection on the maintenance module 120, but is not limited to this; it can also acquire images of the substrate G used for product manufacturing on the process module 110. The vision module 123 can be mounted on the bottom or side of the gantry module 130. However, it is not limited to this; the vision module 123 can also be mounted on the front or side of the inkjet head module 140. The vision module 123 can be equipped with zoom functionality to accurately measure target points and is configured to rotate.

[0046] Although Figure 1 Although not shown, the maintenance module 120 may include a second guide rail. The second guide rail provides a movement path for the measurement module 122. The second guide rail may be provided such that the measurement module 122 moves along the length direction D1 of the second stage 121. The second guide rail may also be provided such that the measurement module 122 moves along the width direction D2 of the second stage 121. For example, the second guide rail may be provided as an LM guide rail system.

[0047] The gantry module 130 can support the inkjet head module 140. The gantry module 130 can be configured on the first stage 111 and the second stage 121 so that the inkjet head module 140 can spray substrate processing liquid onto the substrates G and F.

[0048] The gantry module 130 can be positioned on the first platform 111 and the second platform 121, with the width direction D2 of the first platform 111 and the second platform 121 as the length direction. The gantry module 130 can move along a pair of third guide rails 160a and 160b in the length direction D1 of the first platform 111 and the second platform 121. The pair of third guide rails 160a and 160b can be respectively provided on the outer side of the first platform 111 and the second platform 121, and can be formed along the length direction D1 of the first platform 111 and the second platform 121. For example, the pair of third guide rails 160a and 160b can be provided as an LM guiding system.

[0049] Although Figure 1 Although not shown, the substrate processing apparatus 100 may also include a gantry moving unit. The gantry moving unit can guide the gantry module 130 to slide along a pair of third guide rails 160a, 160b.

[0050] The inkjet head module 140 can spray the substrate processing liquid onto the substrate G in the form of droplets. The inkjet head module 140 can be disposed on the side or bottom surface of the gantry module 130.

[0051] The inkjet head module 140 is movable along the length direction D2 of the gantry module 130 to spray the substrate processing liquid onto a desired location on the substrate G. The inkjet head module 140 is also movable along the height direction D3 of the gantry module 130 and can rotate clockwise or counterclockwise. The inkjet head module 140 can also be fixed to the gantry module 130. In this case, the gantry module 130 can be provided to be movable on the substrate G.

[0052] refer to Figure 2 The inkjet head module 140 can be configured to include a head pack 210, a head base 220, and a head frame 230. Figure 2 This is an example diagram illustrating the internal structure of the inkjet head module, which constitutes some embodiments of the substrate processing apparatus of the present invention. The following description refers to... Figure 1 and Figure 2 .

[0053] The printhead assembly 210 performs pixel printing on the substrate G by assembling multiple nozzles of each printhead. The printhead assembly may include multiple printheads 210a, 210b, 210c, ..., 210n. Each printhead 210a, 210b, 210c, ..., 210n may include multiple nozzles and can spray a substrate processing liquid of a specific color onto the substrate G. For example, the first printhead 210a can spray red ink onto the substrate G, the second printhead 210b can spray green ink onto the substrate G, and the third printhead 210c can spray blue ink onto the substrate G. The number of printheads 210a, 210b, 210c, ..., 210n in the printhead assembly 210 can be varied to adjust the resolution of the image formed on the substrate G by pixel printing.

[0054] The nozzle assembly 210 can be disposed within the nozzle base 220. Each nozzle 210a, 210b, 210c, ..., 210n can expose the nozzle to the bottom surface of the nozzle base 220 to spray substrate treatment liquid.

[0055] The nozzle holder 230 allows the nozzle base 220 to be fixed to the gantry module 130. The treatment fluid supply module 150 can be disposed within the nozzle holder 230. The nozzle holder 230 can be positioned above the nozzle base 220.

[0056] although Figure 1 and Figure 2 Not shown, but multiple inkjet head modules 140 may also be provided. In this case, each inkjet head module includes a printhead and can spray substrate processing liquid of different colors. Multiple inkjet head modules may be arranged in a row along the length direction D2 of the gantry module 130. Multiple inkjet head modules can operate independently.

[0057] The processing fluid supply module 150 may include a reservoir for supplying substrate processing fluid to the inkjet head module 140. For example, the processing fluid supply module 150 may be configured to include a tank 151 and a pressure control module 152.

[0058] The storage tank 151 stores substrate processing fluid and can supply the substrate processing fluid to the nozzles in each printhead 210a, 210b, 210c, ..., 210n. The pressure control module 152 can adjust the internal pressure of the storage tank 151. The pressure control module 152 can control the meniscus of each nozzle, and the storage tank 151 can supply an appropriate amount of substrate processing fluid to the inkjet head module 140 based on the pressure provided by the pressure control module 152.

[0059] The processing fluid supply module 150 can be combined with the inkjet head module 140 into an integrated module. For example, the inkjet head module 140 and the processing fluid supply module 150 can be configured in front of the gantry module 130, and the processing fluid supply module 150 can be configured at a higher level than the printhead base 220, which includes multiple printheads 210a, 210b, 210c, ..., 210n. However, it is not limited to this; the processing fluid supply module 150 can also be composed of the inkjet head module 140 and a separate module. For example, the inkjet head module 140 and the processing fluid supply module 150 can be configured in front of and behind the gantry module 130, respectively.

[0060] The substrate processing apparatus 100 can be provided as a piezoelectric-based inkjet printing system. In this case, the inkjet head module 140 may further include piezoelectric elements, nozzle plates, etc. A nozzle plate is provided on the bottom surface of the printhead base 220, and multiple nozzles can be provided below the nozzle plate in multiple rows and columns at certain intervals. Multiple piezoelectric elements can be provided. The number of piezoelectric elements can correspond to the number of nozzles in the printhead base 220. The inkjet head module 140 can supply substrate processing liquid to the substrate G in droplet form according to the voltage applied to the piezoelectric elements. The inkjet head module 140 can independently control the amount of substrate processing liquid ejected from each nozzle according to the voltage applied to the piezoelectric elements.

[0061] The substrate processing apparatus 100 can also be provided as an EHD (Electro HydroDynamic) based inkjet printing system. When the substrate processing liquid is exposed to a strong local electric field, electrostatic forces act on the substrate processing liquid, causing it to become charged. Based on the electrostatic attraction caused by the charges injected into the substrate processing liquid, the substrate processing liquid can be sprayed onto the substrate G. The substrate processing apparatus 100 provides the substrate processing liquid in the form of a Taylor cone according to the voltage (pulse DC voltage) difference between the inkjet head module 140 and the substrate G, and the substrate processing liquid can be sprayed onto the substrate G simultaneously from the nozzle to form a printed line.

[0062] Figure 3 This is a conceptual diagram illustrating a substrate processing system for some embodiments of the present invention. The substrate processing system 300 may be configured to include a substrate processing apparatus 100, a processing liquid storage device 310, and a control device 400. Although Figure 3 The inkjet head module 140 and the processing liquid supply module 150 are shown as being included in the substrate processing system 300, but this is merely an example, and the substrate processing system 300 may be configured to include a reference. Figure 1 All components of the substrate processing apparatus 100 described below. Figure 1 and Figure 2The cases are compared, and the descriptions of the repeated parts are omitted, while only the different parts are described.

[0063] The processing fluid storage device 310 can periodically supply substrate processing fluid to the processing fluid supply module 150. The processing fluid storage device 310 can be installed outside the substrate processing apparatus 100 and can be connected to the processing fluid supply module 150 via pipes or the like.

[0064] The control device 400 can control the overall operation of each module constituting the substrate processing apparatus 100, such as the process processing module 110, maintenance module 120, gantry module 130, inkjet head module 140, and processing fluid supply module 150. For example, the control device 400 can correct the spraying position of the substrate processing fluid from each nozzle in the inkjet head module 140 based on the inspection results of the droplets D. Alternatively, the control device 400 can clean a defective nozzle that is not spraying substrate processing fluid among multiple nozzles. In addition, the control device 400 can control the overall operation of the processing fluid storage device 310.

[0065] The control device 400 may include: a processor for controlling the components constituting the substrate processing system 300; a network for communicating with the components via wired or wireless communication; one or more instructions related to controlling the function or operation of the components; and a storage device for storing processing schemes, including instructions, and various data. The control device 400 may also include a user interface, which includes input devices for operators to perform command input operations to manage the substrate processing system 300, and output devices for visualizing and displaying the operating status of the substrate processing system 300. The control device 400 may be provided as a computing device for data processing and analysis, command transmission, etc.

[0066] Instructions may be provided in the form of a computer program or application. A computer program consists of one or more instructions and can therefore be stored on a computer-readable storage medium. Instructions may include compiler-generated code, interpreter-executable code, etc. Storage devices may be provided by one or more storage media selected from flash memory, HDD, SSD, card-type memory, RAM, SRAM, ROM, EEPROM, PROM, magnetic storage, magnetic disk, and optical disk.

[0067] The control device 400 can determine the printing start point on the substrate G using multiple camera sensors with different magnifications. For example, the control device 400 can use a first camera sensor and a second camera sensor with different magnifications to determine the printing start point. Once the printing start point is determined, the control device 400 can control the entire pattern printing process based on the printing start point.

[0068] Figure 4This is a first example diagram illustrating the internal modules of a control device for explaining some embodiments of the present invention. (Refer to...) Figure 4 The control device 400 may be configured to include a first detection unit 410, a first comparison unit 420, a first offset calculation unit 430, a second detection unit 440, a second comparison unit 450, a second offset calculation unit 460, and a printing start point determination unit 470.

[0069] To determine the printing start point, the control device 400 may be provided as a computing device. Alternatively, the control device 400 may be provided as a processor mounted on the computing device. For example, the control device 400 may be provided as an MPU (Micro Processor Unit). Alternatively, the control device 400 may be provided as a computer program stored in the processor.

[0070] The first detection unit 410, the first comparison unit 420, the first offset calculation unit 430, the second detection unit 440, the second comparison unit 450, the second offset calculation unit 460, and the print start point determination unit 470 can each be configured as a processor that independently performs a specific function, enabling the control device 400 to determine the print start point. Alternatively, the first detection unit 410, the first comparison unit 420, the first offset calculation unit 430, the second detection unit 440, the second comparison unit 450, the second offset calculation unit 460, and the print start point determination unit 470 can all be provided as computer programs. Alternatively, the first detection unit 410, the first comparison unit 420, the first offset calculation unit 430, the second detection unit 440, the second comparison unit 450, the second offset calculation unit 460, and the print start point determination unit 470 can all be provided as instructions constituting a computer program.

[0071] The first detection unit 410 can detect a mark on the substrate G and obtain the position of the mark. The first detection unit 410 can obtain the position of the mark based on an image obtained by capturing the substrate G. The first detection unit 410 can use a first camera sensor to obtain the position of the mark. The position of the mark can be defined using two-dimensional coordinates. The first detection unit 410 can obtain the position of the mark in the form of two-dimensional coordinates (X1, Y1).

[0072] The first comparison unit 420 can compare the position of the marker with a standard value. The standard value can be defined by the first camera sensor. For example, the standard value can be the center point of the field of view (FOV) of the first camera sensor. The first comparison unit 420 can determine whether the position of the marker matches the standard value based on the comparison result.

[0073] The position of the marker and the standard value can be defined as two-dimensional coordinates. The position of the marker can be defined as (X1, Y1), and the standard value can be defined as (X2, Y2). The first comparison unit 420 can compare the X-axis coordinate value and the Y-axis coordinate value to determine whether the position of the marker matches the standard value. When the position of the marker X1 does not match the standard value X2 (X1 ≠ X2), the first comparison unit 420 can determine that the position of the marker does not match the standard value. When the position of the marker Y1 does not match the standard value Y2 (Y1 ≠ Y2), the first comparison unit 420 can determine that the position of the marker does not match the standard value. When the position of the marker X1 matches the standard value X2 (X1 = X2) and the position of the marker Y1 matches the standard value Y2 (Y1 = Y2), the first comparison unit 420 can determine that the position of the marker matches the standard value.

[0074] The first offset calculation unit 430 can calculate the error between the position of the mark and the standard value. The first offset calculation unit 430 can obtain the error between the position of the mark and the standard value as the first offset.

[0075] The first offset calculation unit 430 may calculate the error based on the judgment result of the first comparison unit 420, or it may not calculate the error. When the first comparison unit 420 determines that the position of the mark matches the standard value, the first offset calculation unit 430 may not calculate the error. When the first comparison unit 420 determines that the position of the mark does not match the standard value, the first offset calculation unit 430 may calculate the error.

[0076] The first offset can be defined as a physical quantity. The first offset can be defined as a scalar or a vector. Figure 5 This is an example diagram illustrating the function of the first offset calculation unit of the control device constituting some embodiments of the present invention. (Refer to...) Figure 5 The center point of marker M within the FOV of the first camera sensor can be defined as C1. The coordinates of C1 can be (X1, Y1). Furthermore, the center point of the FOV of the first camera sensor can be defined as C2. The coordinates of C2 can be (X2, Y2).

[0077] When the error between the position of marker M and the standard value is calculated as a scalar, the first offset calculation unit 430 can calculate the deviation between the center point of marker M and the center point of the FOV of the first camera sensor. The first offset calculation unit 430 can calculate (X1-X2, Y1-Y2) as the error between the position of marker M and the standard value.

[0078] When the error between the position of marker M and the standard value is calculated as a vector, the first offset calculation unit 430 can obtain the vector connecting C1 and C2. The first offset calculation unit 430 can use the root value of (X1-X2)+(Y1-Y2) as the size component and the value with C1 as the starting point and C2 as the ending point as the direction component to calculate the error between the position of marker M and the standard value. Alternatively, the first offset calculation unit 430 can use the root value of (X1-X2)+(Y1-Y2) as the size component and the value with C2 as the starting point and C1 as the ending point as the direction component to calculate the error between the position of marker M and the standard value.

[0079] refer to Figure 4 Let me explain this again.

[0080] The second detection unit 440 can detect the mark M on the substrate G and obtain the position of the mark M. The second detection unit 440 can obtain the position of the mark M based on an image obtained by capturing the substrate G. The second detection unit 440 can obtain the position of the mark M using a second camera sensor. The position of the mark M can be defined using two-dimensional coordinates. The second detection unit 440 can obtain the position of the mark M in the form of two-dimensional coordinates (X3, Y3).

[0081] Similar to the second detection unit 440, the first detection unit 410 can acquire the position of the mark M on the substrate G. The second detection unit 440 can follow the first detection unit 410 to acquire the position of the mark M. When the first comparison unit 420 determines that the position of the mark M matches the standard value, the second detection unit 440 can acquire the position of the mark M. When the first offset calculation unit 430 calculates the error between the position of the mark M and the standard value, the second detection unit 440 can acquire the position of the mark M.

[0082] The first detection unit 410 can acquire the position of the marker M using a first camera sensor, and the second detection unit 440 can acquire the position of the marker M using a second camera sensor. The first and second camera sensors can have different resolutions. The first camera sensor can be a camera sensor with a resolution lower than a standard value, and the second camera sensor can be a camera sensor with a resolution higher than a standard value. For example, the first camera sensor can be a low-resolution camera sensor, while the second camera sensor can be a high-resolution camera sensor. Alternatively, the first and second camera sensors can have different magnification values. The first camera sensor can be a camera sensor with a magnification value lower than a standard value, while the second camera sensor can be a camera sensor with a magnification value higher than a standard value. For example, the first camera sensor can be a low-magnification camera sensor, while the second camera sensor can be a high-magnification camera sensor. Alternatively, the first and second camera sensors can have different field of view (FOV). The first camera sensor can be a camera sensor with a field of view higher than a standard value, and the second camera sensor can be a camera sensor with a field of view lower than a standard value. For example, the first camera sensor can be a camera sensor providing a wide field of view, while the second camera sensor can be a camera sensor providing a narrow field of view.

[0083] The first and second camera sensors can be provided as separate camera modules. (Reference) Figure 6 The first camera sensor 510 and the second camera sensor 520 can be arranged side by side on the substrate G in the same orientation. The first point P1 on the substrate G that the first camera sensor 510 is looking at can be different from the second point P2 on the substrate G that the second camera sensor 520 is looking at. Figure 6 A first example diagram illustrating a first camera sensor and a second camera sensor in some embodiments of the present invention.

[0084] refer to Figure 7 The first camera sensor 510 and the second camera sensor 520 can be provided as separate camera modules, but the first point P1 on the substrate G that the first camera sensor 510 is looking at can be the same as the second point P2 on the substrate G that the second camera sensor 520 is looking at. In this case, the first camera sensor 510 and the second camera sensor 520 can be arranged on the substrate G at different orientation intervals. Figure 7 A second example diagram illustrating the first camera sensor and the second camera sensor of some embodiments of the present invention.

[0085] The first camera sensor 510 and the second camera sensor 520 can also be provided as an integrated camera module. (Reference) Figure 8 The first camera sensor 510 and the second camera sensor 520 can capture images of the substrate G through the same optical path 530. The first point P1 on the substrate G viewed by the first camera sensor 510 can be the same as the second point P2 on the substrate G viewed by the second camera sensor 520. Figure 8 A third example diagram is provided to illustrate the first camera sensor and the second camera sensor in some embodiments of the present invention.

[0086] If the viewpoints of the first camera sensor 510 and the second camera sensor 520 are different, the marker M may not be detected within the field of view (FOV) of the second camera sensor 520. (Reference) Figure 6 For example, the first camera sensor 510 and the second camera sensor 520 have different viewpoints due to their arrangement, and there may be a distance difference between the FOV of the first camera sensor 510 and the FOV of the second camera sensor 520. Alternatively, the resolution, magnification, FOV range, etc., of the first camera sensor 510 and the second camera sensor 520 may be different, which may also cause a distance difference between the FOV of the first camera sensor 510 and the FOV of the second camera sensor 520. The fourth offset may be the deviation between the center point of the FOV of the first camera sensor 510 and the center point of the FOV of the second camera sensor 520. The second detection unit 440 can use the fourth offset to adjust the center point of the FOV of the second camera sensor 520.

[0087] The first camera sensor 510 and the second camera sensor 520 can be integrated into the vision module 123. However, this is not a limitation; the first camera sensor 510 and the second camera sensor 520 can also be integrated separately from the vision module 123. When the first camera sensor 510 and the second camera sensor 520 are provided as an integrated camera module, they can be integrated together within the vision module 123 or integrated together within a single housing separate from the vision module 123. When the first camera sensor 510 and the second camera sensor 520 are provided as separate camera modules, one of them can be integrated into the vision module 123, while the other can be integrated separately from the vision module 123. However, this embodiment is not necessarily limited to these limitations.

[0088] The second detection unit 440 can take into account a first offset when acquiring the position of the mark M. The second detection unit 440 can adjust the FOV center point of the second camera sensor 520 using the first offset, and acquire the position of the mark M based on the adjusted FOV center point. The second camera sensor 520 can have a higher resolution, higher magnification, or narrower field of view than the first camera sensor 510. If the first offset is not considered, the second detection unit 440 may not be able to detect the mark M on the substrate G. This problem can be solved by using the first offset to adjust the FOV center point of the second camera sensor 520.

[0089] refer to Figure 4 Let me explain this again.

[0090] The second comparison unit 450 compares the position of the marker with a standard value. The position of the marker can be a value acquired by the second detection unit 440. The standard value can be a value defined by the second camera sensor 520. For example, the standard value can be the center point of the field of view (FOV) of the second camera sensor 520. The second comparison unit 450 determines whether the position of the marker matches the standard value based on the comparison result. The determination method of the second comparison unit 450 can be the same as the determination method of the first comparison unit 420.

[0091] The second offset calculation unit 460 can calculate the error between the mark's position and a standard value. The second offset calculation unit 460 can use the value obtained by the second detection unit 440 as the mark's position. (Reference) Figure 9 The value obtained by the second detection unit 440 can be the center point C3 of the mark M within the FOV of the second camera sensor 520. Alternatively, the second offset calculation unit 460 can use the center point C4 of the FOV of the second camera sensor 520 as a standard value. The second offset calculation unit 460 can obtain the error between the mark's position and the standard value as the second offset. The coordinates of C3 can be (X3, Y3), and the coordinates of C4 can be (X4, Y4). The second offset calculation unit 460 can obtain (X3-X4, Y3-Y4) as the second offset. Figure 9 This is an example diagram illustrating the function of the second offset calculation unit of the control device constituting some embodiments of the present invention.

[0092] The second offset calculation unit 460 may calculate the error based on the judgment result of the second comparison unit 450, or it may not calculate the error. When the second comparison unit 450 determines that the position of the mark matches the standard value, the second offset calculation unit 460 may not calculate the error. When the second comparison unit 450 determines that the position of the mark does not match the standard value, the second offset calculation unit 460 may calculate the error.

[0093] Similar to the first offset, the second offset can be defined as a scalar or a vector. When the error between the position of the marker M and the standard value is calculated as a scalar or a vector, the second offset calculation unit 460 can calculate the error in the same way as the first offset calculation unit 430.

[0094] The print start point determination unit 470 can determine the print start point on the substrate G. The print start point determination unit 470 can determine the print start point based on at least one offset selected from a first offset and a second offset. Alternatively, the print start point determination unit 470 can determine the print start point without considering the first offset and the second offset.

[0095] The first comparison unit 420 compares the position of the marker M with a standard value and determines whether the position of the marker M matches the standard value. Here, the position of the marker M is the value obtained by the first detection unit 410, and the standard value can be the center point of the field of view (FOV) of the first camera sensor 510. The second comparison unit 450 can also compare the position of the marker M with the standard value to determine whether the position of the marker M matches the standard value. Here, the position of the marker M can be the value obtained by the second detection unit 440, and the standard value can be the center point of the FOV of the second camera sensor 520. To distinguish between the two, the position of the marker M compared by the first comparison unit 420 and the standard value are defined as the first position and the first standard value of the marker M, respectively, and the position of the marker M compared by the second comparison unit 450 are defined as the second position and the second standard value of the marker M, respectively.

[0096] When the first position of marker M matches the first standard value, the first offset calculation unit 430 may not calculate the first offset. When the second position of marker M matches the second standard value, the second offset calculation unit 460 may not calculate the second offset. The print start point determination unit 470 may determine the print start point without considering the first and second offsets. The center point of the first camera sensor 510 and the center point of the second camera sensor 520 may coincide with the center point of marker M. The print start point determination unit 470 may determine the center point of the first camera sensor 510 as the print start point. Alternatively, the print start point determination unit 470 may determine the center point of the second camera sensor 520 as the print start point.

[0097] When the first position of marker M does not match the first standard value, the first offset calculation unit 430 can calculate the first offset. When the second position of marker M matches the second standard value, the second offset calculation unit 460 may not calculate the second offset. The print start point determination unit 470 can determine the print start point based on the first offset. The print start point determination unit 470 can determine the print start point by reflecting the first offset onto the center point of the first camera sensor 510. When the second detection unit 440 considers the first offset to obtain the position of marker M, the print start point determination unit 470 can determine the center point of the second camera sensor 520 as the print start point.

[0098] When the first position of marker M matches the first standard value, the first offset calculation unit 430 may not calculate the first offset. When the second position of marker M does not match the second standard value, the second offset calculation unit 460 may calculate the second offset. The print start point determination unit 470 may determine the print start point based on the second offset. The print start point determination unit 470 may determine the print start point by reflecting the second offset onto the center point of the first camera sensor 510. Alternatively, the print start point determination unit 470 may determine the print start point by reflecting the second offset onto the center point of the second camera sensor 520.

[0099] When the first position of marker M does not match the first standard value, the first offset calculation unit 430 can calculate the first offset. When the second position of marker M does not match the second standard value, the second offset calculation unit 460 can calculate the second offset. The printing start point determination unit 470 can determine the printing start point based on the first offset and the second offset. The printing start point determination unit 470 can determine the printing start point by sequentially reflecting the first offset and the second offset onto the center point of the first camera sensor 510. When the second detection unit 440 obtains the position of marker M by considering the first offset, the printing start point determination unit 470 can determine the printing start point by reflecting the second offset onto the center point of the second camera sensor 520.

[0100] The control device 400 can use the marker M to determine the printing start point. (Reference) Figure 10 The printing start point determination unit 470 can determine the point where the mark M is located, i.e., point MP1 530, as the printing start point. Point MP1 can be the center point of mark M. However, it is not limited to this; the printing start point determination unit 470 can also determine a point at a certain distance from mark M, i.e., point MP2 540, as the printing start point.

[0101] MP2 point 540 can be a point within the printing areas 550a, 550b, 550c, and 550d where patterns are printed on the substrate G. The printing start point determination unit 470 can determine the printing start point by further reflecting a third offset. The third offset can be the deviation between MP1 point 530 and MP2 point 540. The coordinates of MP1 point 530 can be defined as (X5, Y5), and the coordinates of MP2 point 540 can be defined as (X6, Y6). The third offset can be (X5-X6, Y5-Y6). Figure 10 This is an example diagram illustrating the function of the printing start point determination unit, which constitutes some embodiments of the control device of the present invention.

[0102] It can save the print start point. Although Figure 4 Although not shown, the control device 400 may also include a storage unit. When the print start point determination unit 470 determines a print start point, the storage unit can store the print start point. The stored print start point can be used for pattern printing on other substrates. For example, after the control device 400 determines the print start point of the first substrate and performs pattern printing, the previously stored print start point can be used when determining the print start point of the second substrate. The second substrate may be a substrate of the same type as the first substrate. The second substrate may be a substrate of the same size as the first substrate.

[0103] When the printing start point of the second substrate is determined using the previously stored printing start point, the first detection unit 410, the first comparison unit 420, and the first offset calculation unit 430 may not need to operate. Only the second detection unit 440, the second comparison unit 450, the second offset calculation unit 460, and the printing start point determination unit 470 can operate. The second camera sensor 520 can adjust the FOV center point using the printing start point read from the storage unit. When adjusting the FOV center point of the second camera sensor 520, the second detection unit 440 can use the second camera sensor 520 to detect a mark on the second substrate and obtain the position coordinates of that mark.

[0104] The process of determining the printing start point can be performed while the substrate G is positioned on the first stage 111. The control device 400 can position the substrate G on the first stage 111 and determine the printing start point.

[0105] The process module 110 can perform pattern printing on the substrate G located on the first stage 111. The process of determining the printing start point and the process of printing the pattern on the substrate G can be performed continuously after the substrate G is placed on the first stage 111.

[0106] After controlling a series of processes to determine the printing start point of the substrate G, the control device 400 can also control a series of processes to print patterns on the substrate G. Figure 11This is a second example diagram illustrating the internal modules of a control device for explaining some embodiments of the present invention. (Refer to...) Figure 11 The control device 400 may further include a process management unit 610, a message generation unit 620, and a communication unit 630. The control device 400 may be configured to include a first detection unit 410, a first comparison unit 420, a first offset calculation unit 430, a second detection unit 440, a second comparison unit 450, a second offset calculation unit 460, a print start point determination unit 470, a process management unit 610, a message generation unit 620, a communication unit 630, and a main control unit 640.

[0107] The process management unit 610 can initiate an automatic run process. The automatic run process is a process in which the equipment runs automatically, sequentially executing the process of determining the printing start point and the process of printing a pattern on the substrate G. When the automatic run process begins, the first detection unit 410 can detect the mark M on the substrate G and obtain the position coordinates of the mark M.

[0108] Errors may occur during the automated operation process. For example, the first camera sensor 510 may fail to recognize the mark M on the substrate G, and the first detection unit 410 may fail to obtain the position coordinates of the mark M. Alternatively, the second camera sensor 520 may fail to recognize the mark M on the substrate G, and the second detection unit 440 may fail to obtain the position coordinates of the mark M. In this case, the process management unit 610 may stop the automated operation process. When the cause of the stoppage is resolved, the process management unit 610 may rerun the automated operation process.

[0109] The message generation unit 620 can generate a message to be provided to the substrate processing apparatus 100. The message generated by the message generation unit 620 may include information about the printing start point. When the substrate processing apparatus 100 receives a message from the message generation unit 620, it can perform pattern printing on the substrate G.

[0110] The message generation unit 620 can generate messages to be provided to the administrator terminal that the administrator has connected to or carried. The messages generated by the message generation unit 620 may include the fact that the automatic operation process has stopped. The administrator can verify this fact and take appropriate measures to restart the automatic operation process.

[0111] The communication unit 630 can send and receive data between the control device 400 and the board processing device 100. The communication unit 630 can also send and receive data between the control device 400 and the administrator terminal. The communication unit 630 can send messages generated by the message generation unit 620 to the board processing device 100 or the administrator terminal.

[0112] The main control unit 640 can control the overall operation of each component constituting the control device 400. The main control unit 640 can control the overall operation of the first detection unit 410, the first comparison unit 420, the first offset calculation unit 430, the second detection unit 440, the second comparison unit 450, the second offset calculation unit 460, the print start point determination unit 470, the process management unit 610, the message generation unit 620, and the communication unit 630. The main control unit 640 can also control the overall operation of the substrate processing apparatus 100. The substrate processing apparatus 100 can perform pattern printing on the substrate G according to the control of the main control unit 640.

[0113] The main control unit 640 can be provided as a processor to control the overall operation. For example, the main control unit 640 can be provided as a CPU (Central Processing Unit). Although Figure 11 Although not shown in the diagram, the main control unit 640 can be connected one-to-one with the first detection unit 410, the first comparison unit 420, the first offset calculation unit 430, the second detection unit 440, the second comparison unit 450, the second offset calculation unit 460, the printing start point determination unit 470, and the substrate processing device 100.

[0114] Figure 12 This is a third example diagram illustrating the internal modules of a control device used to explain some embodiments of the present invention. (See reference...) Figure 12 The control device 400 may further include a tilt determination unit 650, a tilt angle calculation unit 660, and an attitude adjustment unit 670. The control device 400 may be configured to include a first detection unit 410, a first comparison unit 420, a first offset calculation unit 430, a second detection unit 440, a second comparison unit 450, a second offset calculation unit 460, a print start point determination unit 470, a process management unit 610, a message generation unit 620, a communication unit 630, a tilt determination unit 650, a tilt angle calculation unit 660, an attitude adjustment unit 670, and a main control unit 640.

[0115] The tilt determination unit 650 can determine whether the substrate G is tilted on the first stage 111. The tilt determination unit 650 can determine whether the substrate G is tilted relative to a standard position. The tilt determination unit 650 can use multiple marks to determine whether the substrate G is tilted. For example, the tilt determination unit 650 can use a first mark and a second mark to determine whether the substrate G is tilted. The first mark and the second mark can be formed on the substrate G.

[0116] refer to Figure 13The first marker MA1 and the second marker MA2 may be adjacent to the edge portion on the substrate G. The substrate G may include multiple vertices. For example, the substrate G may include four vertices VT1, VT2, VT3, and VT4, namely a first vertex VT1, a second vertex VT2, a third vertex VT3, and a fourth vertex VT4.

[0117] The first mark MA1 and the second mark MA2 can be adjacent to each other on the substrate G. For example, both the first mark MA1 and the second mark MA2 can be adjacent to the first vertex VT1. However, in this case, the tilt determination unit 650 may not be able to detect slight deformation of the substrate G.

[0118] Preferably, the first marker MA1 and the second marker MA2 are spaced apart on the substrate G. The first marker MA1 and the second marker MA2 may be adjacent to different vertices. For example, the first marker MA1 may be adjacent to the first vertex VT1, and the second marker MA2 may be adjacent to the third vertex VT3. Alternatively, the first marker MA1 may be adjacent to any vertex, and the second marker MA2 may be adjacent to any edge connecting the two different vertices. Figure 13 Example diagrams illustrating first and second markings for illustrating some embodiments of the present invention.

[0119] Figure 14 The example illustrates a standard position where substrate G is positioned on the first stage 111. When substrate G is positioned in the standard position, the distance difference between one side of substrate G and one side of the first stage 111 can remain constant. For example, the distance difference GP1 between one side of substrate G and one side of the first stage 111 at a first point can be equal to the distance difference GP2 between one side of substrate G and one side of the first stage 111 at a second point (GP1 = GP2).

[0120] At this time, even if the printing start point is determined using a single mark M, the substrate processing apparatus 100 can normally perform pattern printing at the desired position on the substrate G. The tilt determination unit 650, tilt angle calculation unit 660, and attitude adjustment unit 670 may not be operated. The control device 400 may not include the tilt determination unit 650, tilt angle calculation unit 660, and attitude adjustment unit 670. Figure 14 This is a first example diagram illustrating the function of the tilt determination unit of the control device constituting some embodiments of the present invention.

[0121] Figure 15The example illustrates a case where substrate G is not positioned in the standard position on the first stage 111. When substrate G is not positioned in the standard position, it may be tilted at an angle θ relative to the standard position. The distance difference between one side of substrate G and one side of the first stage 111 may not be constant. For example, the distance difference GP1 between one side of substrate G and one side of the first stage 111 at a first point may be different from the distance difference GP2 between one side of substrate G and one side of the first stage 111 at a second point (GP1 ≠ GP2). Figure 15 This is a second example diagram illustrating the function of the tilt determination unit of the control device constituting some embodiments of the present invention.

[0122] When the distance difference GP1 at the first point is the same as the distance difference GP2 at the second point, the tilt determination unit 650 can determine that the substrate G is not tilted on the first stage 111. The tilt determination unit 650 can also determine that the substrate G is placed in the standard position. When the distance difference GP1 at the first point is different from the distance difference GP2 at the second point, the tilt determination unit 650 can determine that the substrate G is tilted on the first stage 111. The tilt determination unit 650 can also determine that the substrate G is not placed in the standard position.

[0123] Meanwhile, the tilt determination unit 650 can also determine whether the substrate G is tilted using multiple vertices. For example, the tilt determination unit 650 can use the position coordinates of the first vertex VT1 and the position coordinates of the third vertex VT3 to determine whether the substrate G is tilted. The position coordinates of the first vertex VT1 and the third vertex VT3 can be obtained by the first camera sensor 510 or the second camera sensor 520.

[0124] Refer again Figure 12 Please provide an explanation.

[0125] The tilt angle calculation unit 660 can calculate the tilt angle θ. The tilt angle calculation unit 660 can use an attitude measurement sensor to measure the attitude of the substrate G. For example, the tilt angle calculation unit 660 can use a gyroscope sensor to measure the attitude of the substrate G. The tilt angle calculation unit 660 can compare the measured attitude with a standard attitude. The tilt angle calculation unit 660 can calculate the tilt angle θ based on the comparison result.

[0126] The tilt angle calculation unit 660 can also use a camera sensor to measure the four vertices VT1, VT2, VT3, and VT4 of the substrate G. When the substrate G is placed in a standard position, the position coordinates of the four vertices VT1, VT2, VT3, and VT4 can be predetermined. From the image acquired using the camera sensor, the position coordinates of the four vertices VT1, VT2, VT3, and VT4 on the substrate G can be obtained. The tilt angle calculation unit 660 can calculate the tilt angle θ by comparing the position coordinates of the two categories.

[0127] The tilt angle calculation unit 660 can also use a camera sensor to measure the first mark MA1 and the second mark MA2. When the substrate G is placed in a standard position, the position coordinates of the first mark MA1 and the second mark MA2 can be predetermined. From the image acquired using the camera sensor, the position coordinates of the first mark MA1 and the second mark MA2 on the substrate G can be obtained. The tilt angle calculation unit 660 can calculate the tilt angle θ by comparing the position coordinates of the two categories.

[0128] The attitude adjustment unit 670 can adjust the attitude of the substrate G based on the tilt angle θ calculated by the tilt angle calculation unit 660. The attitude adjustment unit 670 can adjust the attitude of the substrate G so that the substrate G can be placed in a standard position. Gripper clamping parts can be arranged on both sides of the first stage 111. The clamping parts can clamp the substrate G from both sides. The attitude adjustment unit 670 can use the clamping parts to adjust the attitude of the substrate G.

[0129] Meanwhile, when the first mark MA1 and the second mark MA2 are formed on the substrate G, the process of determining the printing start point can utilize either the first mark MA1 or the second mark MA2.

[0130] The automatic operation process will be explained next. Figure 16 The flowchart illustrates step-by-step the automatic operation process of some embodiments of the present invention. The automatic operation process can be executed by the control device 400.

[0131] The process management unit 610 initiates the automatic operation process S705. When the automatic operation process starts, the first detection unit 410 uses the first camera sensor 510 to detect the mark M on the substrate G and obtain the first position of the mark M S710.

[0132] Subsequently, the first comparison unit 420 compares the first position of the marker M with the first standard value (S715). The first position of the marker M can be a value obtained by the first detection unit 410. The first standard value can be the center point of the field of view (FOV) of the first camera sensor 510. The first comparison unit 420 can determine whether the first position of the marker M matches the first standard value.

[0133] When it is determined that the first position of the marker M does not match the first standard value, the first offset calculation unit 430 calculates the error between the first position of the marker M and the first standard value. The first offset calculation unit 430 calculates the first offset S720.

[0134] When it is determined that the first position of the mark M matches the first standard value, the second detection unit 440 uses the second camera sensor 520 to detect the mark M on the substrate G and obtain the second position S725 of the mark M. Alternatively, when the first offset is calculated, the second detection unit 440 uses the second camera sensor 520 to detect the mark M on the substrate G and obtain the second position S725 of the mark M.

[0135] Subsequently, the second comparison unit 450 compares the second position of the marker M with the second standard value (S730). The second position of the marker M can be a value obtained by the second detection unit 440. The second standard value can be the center point of the field of view (FOV) of the second camera sensor 520. The second comparison unit 450 can determine whether the second position of the marker M matches the second standard value.

[0136] When it is determined that the second position of the mark M does not match the second standard value, the second offset calculation unit 460 calculates the error between the second position of the mark M and the second standard value. The second offset calculation unit 460 calculates the second offset S735.

[0137] Subsequently, the print start point determination unit 470 determines the print start point S740 on the substrate G. The print start point determination unit 470 can determine the center point of the field of view (FOV) of the first camera sensor 510 as the print start point. Alternatively, the print start point determination unit 470 can determine the center point of the FOV of the second camera sensor 520 as the print start point. When it is determined that the first position of the mark M matches the first standard value, and it is determined that the second position of the mark M matches the second standard value, the print start point determination unit 470 can determine the print start point as described above.

[0138] The printing start point determination unit 470 can determine the printing start point by reflecting the first offset to the FOV center point of the first camera sensor 510. Alternatively, the printing start point determination unit 470 can determine the FOV center point of the second camera sensor 520 as the printing start point. The first offset can be pre-reflected in the FOV center point of the second camera sensor 520. When it is determined that the first position of the mark M does not match the first standard value, and it is determined that the second position of the mark M matches the second standard value, the printing start point determination unit 470 can determine the printing start point as described above.

[0139] The print start point determination unit 470 can determine the print start point by reflecting the second offset to the FOV center point of the second camera sensor 520. The FOV center point of the second camera sensor 520 can be equivalent to the FOV center point of the first camera sensor 510. When it is determined that the first position of the mark M matches the first standard value, and it is determined that the second position of the mark M does not match the second standard value, the print start point determination unit 470 can determine the print start point as described above.

[0140] The printing start point determination unit 470 can determine the printing start point by reflecting the second offset to the FOV center point of the second camera sensor 520. The first offset can be reflected in advance to the FOV center point of the second camera sensor 520. When it is determined that the first position of the mark M does not match the first standard value, and it is determined that the second position of the mark M does not match the second standard value, the printing start point determination unit 470 can determine the printing start point as described above.

[0141] The print start point determination unit 470 can determine the print start point by reflecting the first offset and the second offset onto the FOV center point of the second camera sensor 520. The first offset may not be reflected onto the FOV center point of the second camera sensor 520. When it is determined that the first position of the mark M does not match the first standard value, and it is determined that the second position of the mark M does not match the second standard value, the print start point determination unit 470 can determine the print start point as described above.

[0142] Once the printing start point is determined, the substrate processing apparatus 100 performs pattern printing S745 on the substrate G. The substrate processing apparatus 100 can print patterns at desired locations on the substrate G. According to the present invention, print reproducibility can be improved.

[0143] Although embodiments of the invention have been described with reference to the accompanying drawings, the invention is not limited to these embodiments, but can be implemented in various different forms. Those skilled in the art will understand that the invention can be implemented in other specific forms without altering the technical concept or essential characteristics of the invention. Therefore, it should be understood that the embodiments described are exemplary in all respects and not restrictive.

[0144] [Explanation of Labels in the Attached Image]

[0145] 100: Substrate processing apparatus; 110: Processing module

[0146] 111: First platform; 120: Maintenance module

[0147] 130: Gantry module; 140: Inkjet head module

[0148] 150: Processing fluid supply module; 300: Substrate processing system

[0149] 310: Processing fluid storage device; 400: Control device

[0150] 410: First Inspection Department; 420: First Comparison Department

[0151] 430: First offset calculation unit; 440: Second detection unit

[0152] 450: Second Comparison Unit; 460: Second Offset Calculation Unit

[0153] 470: Printing start point determination unit; 510: First camera sensor

[0154] 520: Second camera sensor; 610: Process Management Department

[0155] 620: Message Generation Department; 630: Communications Department

[0156] 640: Main control unit; 650: Tilt detection unit

[0157] 660: Tilt angle calculation unit; 670: Attitude adjustment unit

Claims

1. A substrate processing system, the system comprising: A stage that supports a substrate; The inkjet head module sprays the processing liquid onto the substrate to print a pattern on the substrate; A gantry module that moves the inkjet head module on the substrate; as well as A control device that determines the printing start point for printing the pattern. The control device uses a first camera sensor and a second camera sensor to determine the printing start point. The first camera sensor and the second camera sensor have different magnification values ​​or different viewing angles.

2. The substrate processing system according to claim 1, wherein, The second camera sensor has a higher magnification or a narrower field of view than the first camera sensor.

3. The substrate processing system according to claim 2, wherein, The first camera sensor is used before the second camera sensor.

4. The substrate processing system according to claim 1, wherein, The control device uses the markings formed on the substrate to determine the printing start point.

5. The substrate processing system according to claim 1, wherein, The control device includes: The first detection unit acquires the position of the mark formed on the substrate; A first comparison unit compares the position of the mark with a first standard value; The first offset calculation unit calculates the first offset based on the comparison result between the position of the mark and the first standard value; The second detection unit acquires the position of the mark; The second comparison unit compares the position of the mark with a second standard value; The second offset calculation unit calculates the second offset based on a comparison between the position of the marker and the second standard value; and The printing start point determination unit determines the printing start point based on the first offset and the second offset.

6. The substrate processing system according to claim 5, wherein, When the position of the marker does not match the first standard value, the first offset calculation unit calculates the first offset. The first offset is the error between the position of the mark and the first standard value.

7. The substrate processing system according to claim 6, wherein, The first standard value is the center point of the field of view of the first camera sensor.

8. The substrate processing system according to claim 5, wherein, The first detection unit uses the first camera sensor to obtain the position of the mark, and the second detection unit uses the second camera sensor to obtain the position of the mark.

9. The substrate processing system according to claim 8, wherein, The second detection unit uses the first offset to adjust the viewing angle of the second camera sensor.

10. The substrate processing system according to claim 8, wherein, The second detection unit uses a fourth offset to adjust the viewing angle of the second camera sensor.

11. The substrate processing system according to claim 10, wherein, When the viewing angles of the first camera sensor and the second camera sensor are different, the second detection unit uses the fourth offset to adjust the viewing angle of the second camera sensor. The fourth offset is the deviation between the viewing angle of the first camera sensor and the viewing angle of the second camera sensor.

12. The substrate processing system according to claim 5, wherein, When the position of the marker does not match the second standard value, the second offset calculation unit calculates the second offset. The second offset is the error between the position of the mark and the second standard value.

13. The substrate processing system according to claim 12, wherein, The second standard value is the center point of the field of view of the second camera sensor.

14. The substrate processing system according to claim 1, wherein, The control device reuses the printing start point obtained from the first substrate on the second substrate.

15. The substrate processing system according to claim 14, wherein, When determining the printing start point of the second substrate, the control device utilizes the second camera sensor instead of the first camera sensor.

16. The substrate processing system according to claim 1, wherein, The control device determines whether the substrate is tilted on the platform compared to a standard position.

17. The substrate processing system according to claim 16, wherein, The control device calculates the tilt angle of the substrate and adjusts the orientation of the substrate to the standard position.

18. A control device, the control device comprising: The first detection unit acquires the position of the mark formed on the substrate; A first comparison unit compares the position of the mark with a first standard value; The first offset calculation unit calculates the first offset based on the comparison result between the position of the mark and the first standard value; The second detection unit uses a second camera sensor to obtain the position of the mark; The second comparison unit compares the position of the mark with a second standard value; The second offset calculation unit calculates the second offset based on the comparison result between the position of the mark and the second standard value; as well as The print start point determination unit determines the print start point based on the first offset and the second offset. The first camera sensor and the second camera sensor have different magnification values ​​or different viewing angles.

19. The control device according to claim 18, wherein, The control device prints a pattern on the substrate based on the printing start point.

20. A substrate processing system, the system comprising: A stage that supports a substrate; The inkjet head module sprays the processing liquid onto the substrate to print a pattern on the substrate; A gantry module that moves the inkjet head module on the substrate; as well as A control device that determines the printing start point for printing the pattern. The control device includes: The first detection unit acquires the position of the mark formed on the substrate; A first comparison unit compares the position of the mark with a first standard value; The first offset calculation unit calculates the first offset based on the comparison result between the position of the mark and the first standard value; The second detection unit uses a second camera sensor to obtain the position of the mark; The second comparison unit compares the position of the mark with a second standard value; The second offset calculation unit calculates the second offset based on a comparison between the position of the marker and the second standard value; and The print start point determination unit determines the print start point based on the first offset and the second offset. The first camera sensor is used before the second camera sensor and has a lower magnification or a wider field of view than the second camera sensor.

Images