Polarization-insensitive optical switch, optical switch scanning array and scanning device
By combining a polarization-insensitive optical switch and an optical switch scanning array with a mechanical scanning system, the problems of large size and high cost of FMCW lidar have been solved, achieving low-cost, highly integrated, and low-power lidar scanning.
Patent Information
- Application Number
- CN202511433783.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-09
- Publication Date
- 2026-02-17
AI Technical Summary
Existing FMCW lidar has a large two-dimensional mechanical scanning volume and high cost, and its optical phased array control is complex and has high losses, making it difficult to support the further expansion and extension of lidar.
A polarization-insensitive optical switch and optical switch scanning array are used to achieve polarization-insensitive control of the optical signal through a single-layer waveguide structure and a thermo-optical phase shifter, and a two-dimensional scanning is achieved by combining it with a mechanical scanning system.
It achieves high integration, low cost and low power consumption of lidar, while taking into account small size and excellent scanning performance.
Smart Images
Figure CN121547041A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of laser scanning, in particular to a polarization-insensitive optical switch, an optical switch scanning array and a scanning device. BACKGROUND
[0002] Laser radar is a radar system for detecting the position, speed and other characteristic quantities of a target by emitting a laser beam. In recent years, FMCW laser radar measures the frequency difference (beat frequency) between the reflected signal and the emitted signal by emitting a continuous wave with a linearly varying frequency, and the system can accurately calculate the distance and directly solve the relative speed, having the advantages of complete anti-interference, direct speed measurement, strong environmental adaptability, high safety threshold, etc.
[0003] The beam scanning method of the traditional FMCW laser radar mainly adopts two-dimensional mechanical scanning, that is, one-dimensional rotating mirror and one-dimensional galvanometer scanning. This scanning method is mature and reliable, but has the problems of large volume and high cost. Another way is to use silicon optical integration technology to realize the scanning function of laser radar, which has the advantages of low cost, high yield and high integration. One typical scheme is to use a silicon-based optical phased array chip to realize the solid-state scanning function of laser radar. However, the optical phased array technology still has core technical bottlenecks such as extremely complex control, huge transmission loss and difficulty in expanding the receiving aperture, so it cannot support the further expansion and extension of the laser radar application field in the future for a long time.
[0004] Therefore, it is necessary to propose a balanced way that takes into account the advantages of high integration and mature technology. SUMMARY
[0005] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a polarization-insensitive optical switch, an optical switch scanning array and a scanning device, which solves the problems of large volume of two-dimensional mechanical scanning and complex control, high cost and large loss of optical phased array.
[0006] According to the single-layer waveguide polarization-insensitive optical switch of the first aspect of the embodiment of the present application, the single-layer waveguide polarization-insensitive optical switch comprises: The two polarization-insensitive couplers, the first phase-shifting module and the second phase-shifting module, the first coupler is provided with an input channel, the light beam is divided into two beams with the same intensity after passing through the first coupler, and then output to the second coupler after passing through the first phase-shifting module and the second phase-shifting module, respectively, the second coupler is provided with a first output channel and a second output channel, and the second coupler outputs the combined light to the first output channel or the second output channel according to the phase difference between the two beams of light; The first phase shifting module and the second phase shifting module have the same structure, both including a phase shifter and two polarization beam splitters. The beam is split into TM0 light and TE0 light by the first polarization beam splitter. The TM0 light and the TE0 light pass through the phase shifter and are then combined by the second polarization beam splitter placed in the opposite direction.
[0007] According to some embodiments of the present invention, the phase shifter includes a TE phase shifter and a TM phase shifter, wherein the TE phase shifter and the TM phase shifter in the first phase shifting module cause the TM0 light and the TE0 light to produce the same phase shift, and the TE phase shifter and the TM phase shifter in the second phase shifting module do not perform phase shift on the TM0 light and the TE0 light.
[0008] According to some embodiments of the present invention, the phase shifter is a thermo-optical phase shifter.
[0009] According to some embodiments of the present invention, the TE phase shifter is provided with a first waveguide assembly passing through a first heating region, and the TM phase shifter is provided with a second waveguide assembly passing through a second heating region.
[0010] According to some embodiments of the present invention, the width of the heater disposed in the first heating region is equal to the width of the heater disposed in the second heating region, and the total length of the second heating region is N times the total length of the first heating region, where N is a positive integer.
[0011] According to some embodiments of the present invention, the first heating assembly includes a heater disposed in the first heating region, and the second heating assembly includes N heaters arranged sequentially along the length direction of the second heating region, wherein each of the heaters in the first heating assembly and the second heating assembly is connected in parallel.
[0012] According to a second aspect of the present invention, an optical switch scanning array includes a plurality of the above-described optical switches.
[0013] According to some embodiments of the present invention, the optical switch scanning array includes multiple optical switch layers, each of the multiple optical switch layers including multiple optical switches, wherein the first output channel and the second output channel of the optical switch in the upper layer are respectively connected to the input channels of two optical switches in the lower layer.
[0014] According to a third aspect of the present invention, a scanning device includes the above-described optical switch scanning array, wherein the optical switch scanning array is used to control the emitted light signal to pass through the first channel or the second channel of a plurality of optical switches and finally output, thereby changing the emission direction of the emitted light signal to achieve scanning.
[0015] According to some embodiments of the present invention, the scanning device further includes a mechanical scanning system, which is used to change the emission direction of the emitted light signal for scanning, and the scanning direction of the mechanical scanning system is perpendicular to the scanning direction of the optical switch scanning array.
[0016] The polarization-insensitive optical switch, optical switch scanning array, and scanning device according to embodiments of the present invention have at least the following beneficial effects: This invention designs a polarization-insensitive optical switch. By changing the phase difference between the TMO and TEO light passing through the first phase-shifting module and the TMO and TEO light passing through the second phase-shifting module through a first phase-shifting module, the optical signal is controlled to be output from different channels after passing through a polarization-insensitive coupler. It has the advantages of low cost, simple process, and low power consumption. The polarization-insensitive optical switches are interconnected to form an array. The optical signal passes through multiple polarization-insensitive optical switches in sequence and is output from one of the multiple channels. By controlling the optical signal to pass through multiple channels in sequence, an optical switch scanning array is realized. Since the optical switch array is polarization-insensitive, the part of the echo light signal with inconsistent polarization state after the emitted optical signal is emitted to the target can also return along the emission path. Therefore, it can be applied to lidar. Combined with a mature mechanical scanning system, a small-sized, low-cost, and high-performance lidar scanning device can be realized.
[0017] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. Attached Figure Description
[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 A schematic diagram of an embodiment of the polarization-insensitive optical switch provided by the present invention; Figure 2 A schematic diagram of the phase shifter, which is a polarization-insensitive optical switch provided by the present invention; Figure 3 A schematic diagram of an embodiment of the optical switch scanning array provided by the present invention; Figure 4 This is a schematic diagram of the optical signal propagation path of an embodiment of the optical switch scanning array provided by the present invention.
[0019] Icon labels: Optical switch 100; Input channel 101; First output channel 102; Second output channel 103; Coupler 110; First phase shifting module 120; Second phase shifting module 130; Polarization beam splitter 131; Phase shifter 132; TE phase shifter 140; first waveguide assembly 141; first heating assembly 142; TM phase shifter 150; second waveguide assembly 151; second heating assembly 152; heater 160. Detailed Implementation
[0020] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.
[0021] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings and are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.
[0022] In the description of this invention, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features or their sequential relationship.
[0023] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.
[0024] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are some embodiments of the present invention, not all embodiments.
[0025] LiDAR is a radar system that uses laser beams to detect the position, velocity, and other characteristics of targets. In recent years, FMCW lidar has been developed, which measures the frequency difference (beat frequency) between the reflected and transmitted signals by emitting a continuous wave with a linearly varying frequency. The system can accurately calculate the distance and directly solve the relative velocity, and has advantages such as complete anti-interference, direct velocity measurement, strong environmental adaptability, and high safety threshold.
[0026] Traditional FMCW lidar primarily employs two-dimensional mechanical scanning, which involves scanning with a one-dimensional rotating mirror and a one-dimensional galvanometer. While this scanning method is technically mature and reliable, it suffers from issues such as large size and high cost. Another approach is to utilize silicon photonics integration technology to achieve lidar scanning functionality, offering advantages such as low cost, high yield, and high integration. A typical solution involves using silicon-based optical phased array chips to implement solid-state scanning for lidar. However, optical phased array technology currently faces core technological bottlenecks, including exceptionally complex control, significant transmission losses, and difficulty in expanding the receiver aperture. Therefore, it cannot support the further expansion and extension of lidar applications for a considerable period of time.
[0027] Therefore, a balanced approach is needed that takes into account both the advantages of high integration and technological maturity.
[0028] To address the aforementioned issues, this invention proposes a polarization-insensitive optical switch 100, an optical switch scanning array, and a scanning device, which effectively solves the problems of large size and high cost of existing two-dimensional mechanical scanning used in lidar, and the complex control, high cost, and high loss of existing optical phased arrays.
[0029] refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 The polarization-insensitive optical switch 100 of the present invention is implemented in the following embodiments: The polarization-insensitive optical switch 100 of this embodiment includes two polarization-insensitive couplers 110, a first phase-shifting module 120, and a second phase-shifting module 130.
[0030] Among them, reference Figure 1 and Figure 3 As shown, two polarization-insensitive couplers 110 are disposed at both ends of the first phase-shifting module 120 and the second phase-shifting module 130. The couplers 110 are implemented based on the existing single-layer waveguide structure, such as the thermally adiabatic coupler 110. The first coupler 110 is provided with an input channel 101. After the light beam is split into two identical beams by the first coupler 110, it passes through the first phase-shifting module 120 and the second phase-shifting module 130 respectively and is then output to the second coupler 110. The second coupler 110 is provided with a first output channel 102 and a second output channel 103. The second coupler 110 outputs the combined light to the first output channel 102 or the second output channel 103 according to the phase difference between the two beams.
[0031] Specifically, the first phase shifting module 120 and the second phase shifting module 130 have the same structure, both including a phase shifter 132 and two polarization beam splitters 131. The two polarization beam splitters 131 are located at both ends of the phase shifter 132. The polarization beam splitter 131 is a polarization-insensitive device and is implemented using an existing single-layer waveguide structure. The polarization beam splitter 131 is used to split the beam into TEO light and TMO light with different polarization states. The phase shifter 132 includes a TM phase shifter 150 and a TE phase shifter. The TM phase shifter 150 and the TE phase shifter are used to perform the same phase shift on the TEO light and the TEO light, respectively.
[0032] In the first phase-shifting module 120, the phase shifter 132 performs the same phase shift on the TM0 light and the TE0 light, while the phase shifter 132 in the second phase-shifting module 130 does not perform phase shift on the TM0 light and the TE0 light. The TE0 light and the TM0 light after passing through the phase shifter 132 in the two modules pass through the polarization beam splitter 131 again to complete the combination. The two optical paths obtained after combination enter the coupler 110. The coupler 110 selects the output channel of the combined optical path according to the phase difference between the two optical paths, so that the polarization-insensitive optical switch 100 can control the selection of the output channel of the optical path according to the driving power.
[0033] Regarding the modulation process of the optical path in the polarization-insensitive optical switch 100, when one beam of light enters the coupler 110, it is split into two beams of equal intensity, which enter the upper and lower beams respectively, and then enter the first phase shifting module 120 and the second phase shifting module 130. Due to the characteristics of the coupler 110, the lower beam and the upper beam will have a phase difference of +90°. If the phase shifter 132 does not modulate these two beams, the lower beam and the upper beam will still have a phase difference of +90° when they enter the subsequent coupler 110. According to the characteristics of the coupler 110, the combined beam exits from the first output channel 102. By applying a certain power to the phase shifter, the phase shifter causes the upper beam to have a phase shift of +180°. At this time, the phase difference between the lower beam and the upper beam changes from +90° to -90°. Then, these two beams enter the coupler 110 and exit from the second output channel 103. The optical principle is the same for both TE0 and TM0.
[0034] Through the above modulation process, it can be seen that the optical switch 100 in this embodiment can adjust the output channel position of the beam by changing the driving power applied to the phase shifter, thereby achieving precise control of the state switching of the optical switch 100. Since the coupler 110, polarization beam splitter 131 and phase shifter are polarization insensitive, the optical switch 100 also has polarization insensitive characteristics. Both TE0 light and TM0 light can be input from the input channel 101 and output from the first output channel 102 or the second output channel 103. They can also be input from the first output channel 102 or the second output channel 103 and output from the input channel 101. The forward output and echo feedback of the optical signal can be carried out smoothly.
[0035] Specifically, regarding the specific structure of the phase shifter 132, the phase shifter 132 in this embodiment of the invention is a thermo-optical phase shifter. The thermo-optical phase shifter is based on the thermo-optical effect and adjusts its refractive index by changing the temperature of the optical waveguide, thereby realizing the control of the phase of the optical signal. It has the advantages of simple process, low cost, good compatibility and high reliability. In some other embodiments, other optical phase shifters can also be used for modulation, such as electro-optical phase shifters, as long as the phase shifting requirements are met.
[0036] Reference Figure 2 As shown, the TE phase shifter is provided with a first waveguide assembly and a first heating assembly 142. The first heating assembly 142 is used to heat the first waveguide assembly, and the heating range of the first heating assembly 142 covers the first heating area. The TM phase shifter 150 is provided with a second waveguide assembly 151 and a second heating assembly 152. The second heating assembly 152 is used to heat the second waveguide assembly 151, and the second heating range of the second heating assembly 152 covers the second heating area. By designing the specific parameters of the first waveguide assembly, the first heating area, the second waveguide assembly 151, and the second heating assembly 152, the TE phase shifter and the TM phase shifter 150 can perform the same phase shift on the TE0 light and the TM0 light, respectively.
[0037] In this embodiment, the width of the first heating region and the width of the second heating region are equal, and the total length of the second heating region is N times the area of the first heating region, where N is a positive integer. The first heating component 142 includes a heater 160 disposed in the first heating region, and the second heating component 152 includes N heaters 160 arranged sequentially along the length direction of the second heating region. The heaters 160 in the first heating component 142 and the second heating component 152 are connected in parallel, so that the heating power of each heater 160 is the same. Only by changing the driving voltage across each heater 160, the same adjustment can be made to multiple heaters 160 at the same time, and the number of electrodes can be effectively reduced, thereby improving the performance of the optical switch 100.
[0038] Furthermore, for the optical switch 100, the driving power required for the optical switch 100 to switch between different output channels, that is, the driving power that causes a 180° phase shift, is called P (π). The driving power that causes a unit phase shift is P. Under normal single-mode waveguide width, the ratio of P of the TE phase shifter to P of the TM phase shifter 150 is close to 2. Therefore, the total length of the second heating region is set to be twice the area of the first heating region. The second heating component 152 includes two heaters 160.
[0039] Reference Figure 2 As shown, the first waveguide component is a long strip single-layer waveguide that passes through a first heating region with a length of L1 and a width of W2. The second waveguide component 151 is also a single-layer waveguide that passes through a second heating region with a total length of 2L1 and a width of W1. The second heating region is divided into two identical parts. The second waveguide component 151 includes a long strip single-layer waveguide that passes through the two identical parts and a bent single-layer waveguide for connection. In this embodiment, the width of the heater 160 is taken as the minimum process dimension of 3μm. The value of P(π) is optimized by reducing the width of the heater 160.
[0040] Furthermore, through simulation, a set of W1 and W2 was found such that the P of the TE phase shifter is twice the P of the TM phase shifter 150. Since the length of the second heating region is twice the length of the first heating region, the TE phase shifter and the TM phase shifter 150 achieve the same phase shift under the same driving power. That is, the P (π) of the TE phase shifter and the TM phase shifter 150 are the same, which satisfies the polarization insensitive operation requirement.
[0041] This invention proposes a polarization-insensitive optical switch 100, which only requires a single-layer waveguide to overcome the disadvantages of traditional polarization-insensitive optical switches 100 that require multi-step etching processes to achieve double-layer waveguides, resulting in complex processes and high costs. Furthermore, it uses a strip waveguide of a common width, which can meet the functional requirements of low loss.
[0042] Based on the polarization-insensitive optical switch 100, the present invention also proposes an optical switch scanning array, including multiple polarization-insensitive optical switches 100 as described above.
[0043] Specifically, refer to Figure 3As shown, the optical switch scanning array includes multiple optical switch layers composed of multiple optical switches 100. The first output channel 102 and the second output channel 103 of the upper layer optical switch 100 are respectively connected to the input channels 101 of the two optical switches 100 in the lower layer. By switching the state of each optical switch 100, the optical signal can be output from the first output channel 102 or the second output channel 103 after passing through the optical switch 100 and enter the next optical switch 100. After passing through multiple optical switch layers, the optical signal can be output from any one of the multiple first output channels 102 and multiple second output channels 103, thereby changing the output direction of the optical signal. The optical signal can be output from each output channel in sequence to complete a scan in one dimension. The optical switch scanning array is an all-solid-state structure with the advantages of simple structure, low cost, reliable performance and small size. Since the optical switches 100 that make up the optical switch scanning array are polarization insensitive, the optical switch scanning array also has the characteristic of polarization insensitivity.
[0044] by Figure 3 For example, Figure 3 A schematic diagram of a 1×8 optical switch scanning array is provided. The first layer has one optical switch 100, the second layer has two optical switches 100, and the third layer has four optical switches 100. The light signal incident from the input channel 101 of the optical switch 100 in the first layer passes through the second and third optical switch layers and is output from any one of the eight output channels of the four optical switches 100, thereby changing the output angle of the light signal to achieve scanning. In some other embodiments, the number of optical switch layers and the number of optical switches 100 in the optical switch scanning array can be adjusted according to the actual scanning accuracy requirements.
[0045] Furthermore, referring to Figure 4 As shown, the present invention also proposes a scanning device for lidar scanning. The scanning device includes the aforementioned optical switch scanning array. The optical switch scanning array is used to control the emitted light signal to pass through the first or second channel of multiple optical switches 100 and finally output it, thereby changing the emission direction of the emitted light signal to achieve scanning. A large-scale thermo-optical switch 100 array is used to achieve solid-state scanning in one direction.
[0046] In this embodiment, the scanning device also includes a mechanical scanning system. The mechanical scanning system is used to further change the emission direction of the emitted light signal for scanning. The mechanical scanning system achieves scanning through a galvanometer or a rotating mirror. The scanning direction of the mechanical scanning system is set perpendicular to the scanning direction of the optical switch scanning array. Thus, the two systems work together to allow the emission direction of the emitted light signal to change freely on the two-dimensional plane, thereby achieving two-dimensional scanning.
[0047] The scanning device in this embodiment also includes a polarization separation and beam combining module and a transceiver array module. After the frequency-modulated transmitted light signal of the lidar is set to TEO mode, it is transmitted as light directly from the through end of the polarization separation and beam combining module into the optical switch scanning array. The light is then output through a first output channel 102 or a second output channel 103. The output transmitted light signal enters the transceiver array module and is transmitted into free space. It then enters the mechanical scanning system and is transmitted to the scanning target.
[0048] The emitted light signal is reflected off the target as an echo signal. Due to the reciprocity of light, the echo signal propagates back along the emission direction and passes through the mechanical scanning system and transceiver array module before entering the optical switch scanning array. Due to the depolarization effect, the echo signal has not only the TEO mode consistent with the polarization state of the emitted light signal, but also the TMO mode. Since each optical switch 100 in the optical switch scanning array has polarization insensitivity, both the TEO and TMO light in the echo signal can return to the polarization separation and beam combining module through the optical switch scanning array, completing one round trip of the lidar signal. By successively changing the emission direction of the emitted light signal through the mechanical scanning system and the optical switch scanning array, lidar scanning can be achieved.
[0049] In summary, this invention proposes a one-dimensional solid-state scanning method based on an optical switch scanning array. It employs a large-scale array of thermo-optical switches 100 to achieve solid-state scanning in one dimension, using switch switching to control the emission angle. The scanning direction perpendicular to the optical switch scanning array utilizes a mature mechanical scanning method, thus overcoming the shortcomings of low performance of optical phased array technology alone and the large size of mechanical scanning alone. Furthermore, this invention proposes a polarization-insensitive optical switch 100 for the optical switch scanning array, which only requires a single-layer waveguide to achieve polarization insensitivity. This method is characterized by simple manufacturing and low cost, meeting the ever-increasing cost requirements of lidar.
[0050] It should be understood that various parts of the present invention can be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, multiple steps or methods can be implemented in software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, it can be implemented using any one or a combination of the following techniques known in the art: discrete logic circuits having logic gates for implementing logical functions on data signals, application-specific integrated circuits (ASICs) having suitable combinational logic gates, programmable gate arrays (PGAs), field-programmable gate arrays (FPGAs), etc.
[0051] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0052] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the knowledge area possessed by those skilled in the art without departing from the spirit of the present invention.
Claims
1. A polarization-insensitive optical switch, characterized in that, include: The system comprises two polarization-insensitive couplers, a first phase-shifting module, and a second phase-shifting module. The first coupler has an input channel. After the light beam is split into two beams of equal intensity by the first coupler, it passes through the first phase-shifting module and the second phase-shifting module respectively before being output to the second coupler. The second coupler has a first output channel and a second output channel. The second coupler outputs the combined light to the first output channel or the second output channel according to the phase difference between the two beams. The first phase shifting module and the second phase shifting module have the same structure, both including a phase shifter and two polarization beam splitters. The beam is split into TM0 light and TE0 light by the first polarization beam splitter. The TM0 light and the TE0 light pass through the phase shifter and are then combined by the second polarization beam splitter placed in the opposite direction.
2. The optical switch according to claim 1, characterized in that: The phase shifter includes a TE phase shifter and a TM phase shifter. The TE phase shifter and the TM phase shifter in the first phase shifting module produce the same phase shift for the TM0 light and the TE0 light. The TE phase shifter and the TM phase shifter in the second phase shifting module do not perform phase shift for the TM0 light and the TE0 light.
3. The optical switch according to claim 2, characterized in that: The phase shifter is a thermo-optical phase shifter.
4. The switch according to claim 3, characterized in that: The TE phase shifter is provided with a first waveguide assembly, which passes through a first heating region. The TM phase shifter is provided with a second waveguide assembly, which passes through a second heating region.
5. The optical switch according to claim 4, characterized in that: The width of the heater in the first heating area is equal to the width of the heater in the second heating area, and the total length of the second heating area is N times the total length of the first heating area, where N is a positive integer.
6. The optical switch according to claim 5, characterized in that: The first heating component includes a heater disposed in the first heating region, and the second heating component includes N heaters arranged sequentially along the length of the second heating region, with each heater in the first heating component and the second heating component connected in parallel.
7. An optical switch scanning array, characterized in that, It includes multiple optical switches as described in claims 1 to 8.
8. The optical switch scanning array according to claim 7, characterized in that: The optical switch scanning array includes multiple optical switch layers, each of which includes multiple optical switches. The first output channel and the second output channel of the optical switch in the upper layer are respectively connected to the input channels of two optical switches in the lower layer.
9. A scanning device, characterized in that, include: As described in claim 9, the optical switch scanning array is used to control the emitted optical signal to pass through the first or second channel of the multiple optical switches and finally output, thereby changing the emission direction of the emitted optical signal to achieve scanning.
10. The scanning device according to claim 9, characterized in that: It also includes a mechanical scanning system, which is used to change the emission direction of the emitted light signal for scanning. The scanning direction of the mechanical scanning system is set perpendicular to the scanning direction of the optical switch scanning array.