Excimer lamp and light irradiation device

Abstract

The invention provides an excimer lamp which can be used for a longer period of time by reducing strain generated in a light-emitting tube through a structure which can be implemented more simply. The excimer lamp is provided with: a light-emitting tube which extends in a first direction, includes a first region and a second region having a thicker tube wall than the first region in a first cross-section when cut in a plane orthogonal to the first direction, has recesses and projections formed on an outer wall surface by the first region and the second region, and exhibits light transmittance to ultraviolet light; a pair of electrodes facing each other across the tube wall of the light-emitting tube in the radial direction of the light-emitting tube; and a light extraction unit for extracting the ultraviolet light generated in the light-emitting tube to the outside of the light-emitting tube.

Description

Technical Field

[0001] This invention relates to excimer lamps and light irradiation devices. Background Technology

[0002] Traditionally, ultraviolet light has been used in the manufacture of semiconductors and liquid crystal panels, as well as in the generation of ozone for air purification. For example, the excimer lamp described in Patent Document 1 is used as a light source emitting ultraviolet light. Patent Document 1 discloses an excimer lamp in which a reflective film is formed on the inner wall surface of the light-emitting tube in order to efficiently irradiate the target object with ultraviolet light emitted from the light-emitting tube.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent No. 5633354 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] In recent years, there has been a demand for high-output excimer lamps in industrial light irradiation devices used in the manufacture of semiconductors or liquid crystal panels. Therefore, the inventors have conducted research on increasing the output of excimer lamps based on the light irradiation device described in Patent Document 1, and have discovered the following problems. The following description refers to the accompanying drawings.

[0008] Figure 19A This is a schematic diagram showing the structure of a conventional excimer lamp 100 when viewed in the Y direction. Figure 19B It is Figure 19A A schematic diagram of the excimer lamp 100 as viewed in the Z direction. (See diagram for reference.) Figure 19A as well as Figure 19B As shown, it includes a light-emitting tube 101, a pair of electrodes 102 disposed opposite to each other on the outer wall surface 101a of the light-emitting tube 101, and a reflective film 103 disposed on the inner wall surface 101b of the light-emitting tube 101.

[0009] In the following explanation, such as Figure 19A As shown, the direction in which the light-emitting tube 101 of the excimer lamp 100 extends (the tube axis direction) is designated as the X direction, the direction in which the electrode 102 is positioned is designated as the Z direction, and the direction orthogonal to both the X and Z directions is designated as the Y direction. Furthermore, when representing directions, if positive or negative orientations are distinguished, they are marked with positive and negative symbols, such as "+Z direction" and "-Z direction". If the orientation is not distinguished as positive or negative, it is simply recorded as "Z direction".

[0010] The light-emitting diode 101 is made of a material that transmits ultraviolet light (e.g., silica glass), and a light-emitting space 101c is formed on its inner side, which encapsulates the light-emitting gas G1. The electrode 102 is as follows... Figure 19B The structure is mesh-like, allowing ultraviolet light emitted from the light-emitting tube 101 to be extracted to the outside of the tube 101. Additionally, in Figure 19B Only the electrode 102 on the +Z side is shown in the figure, but the electrode 102 on the -Z side has the same shape as the electrode 102 on the +Z side.

[0011] The excimer lamp 100 generates ultraviolet light within the light-emitting space 101c by applying a voltage between a pair of electrodes 102, and the ultraviolet light is emitted outward from the mesh of the electrodes 102. The type and combination of luminescent gas G1 sealed within the light-emitting space 101c are selected according to the wavelength of the emitted ultraviolet light.

[0012] Ultraviolet light below 200 nm, used in the manufacture of semiconductors or liquid crystal panels, can break the Si-O bonds in the silica glass that forms the material of the light-emitting diode 101. Therefore, when the excimer lamp 100 is lit, the bonds in the silica glass constituting the light-emitting diode 101 are sequentially broken due to the ultraviolet light emitted from the light-emitting space 101c, and the bond angle between Si and O changes. As a result, strain is generated, and stress is generated on the inner wall surface 101b in a tensile manner towards each end side in the X direction.

[0013] When the excimer lamp 100 is lit, the wall of the light-emitting tube 101 on the light-emitting surface 104 side (-Z side) is always exposed to ultraviolet light emitted from the light-emitting space 101c. On the other hand, the wall of the light-emitting tube 101 on the side opposite to the light-emitting surface 104 (+Z side) is almost not exposed to ultraviolet light because the ultraviolet light emitted from the light-emitting tube 101 is reflected by the reflective film 103 formed on the inner wall surface 101b in a manner toward the light-emitting surface 104 side. In this -Z side wall, strain caused by ultraviolet light irradiation is generated, while in the +Z side wall, no strain caused by ultraviolet light irradiation is generated, thereby creating a deformation in the light-emitting tube as a whole that protrudes toward the +Z side.

[0014] Figure 20 This is an attached diagram showing the excimer lamp 100, deformed by ultraviolet light, as observed in the Y direction. The light-emitting tube 101 undergoes the aforementioned deformation due to ultraviolet light emitted from the light-emitting space 101c, as... Figure 20 As shown, with the deformation of the -Z sidewall, the entire structure deforms in a manner that bulges towards the +Z side. If the light-emitting tube 101 deforms, the distance between the light-emitting surface 104 and the irradiated area will vary depending on its position, resulting in uneven irradiation. Furthermore, to make the changes easier to understand, Figure 20 The excimer lamp 100 exhibits greater deformation compared to the actual lamp.

[0015] The excimer lamp disclosed in the aforementioned patent document 1 has a pre-bent light-emitting tube to prevent uneven ultraviolet light irradiation and damage to the light-emitting tube 101 caused by deformation of the light-emitting tube, thereby making the wall surface of the light-emitting tube nearly flat by generating strain caused by ultraviolet light irradiation.

[0016] However, accurately predicting the degree of strain caused by ultraviolet light irradiation is difficult, and high-level processing technology is required in order to bend the LED at the desired curvature during the manufacturing process.

[0017] Furthermore, the above description was based on an excimer lamp 100 equipped with a reflective film 103. However, in excimer lamps without a reflective film 103, deformation of the light-emitting tube 101 due to ultraviolet light irradiation may also occur. That is, the deformation pattern in the light-emitting tube 101 differs depending on whether the reflective film 103 is provided or not, but in both cases, deformation caused by ultraviolet light irradiation occurs in the light-emitting tube 101. Therefore, the problem of uneven irradiation may also occur in excimer lamps without a reflective film 103.

[0018] Furthermore, the aforementioned issues also present the following situations: when a reflective component is provided on the outside of the light-emitting tube 101, or when a cooling mechanism is provided, the direction and part of the deformation of the light-emitting tube 101 vary depending on the structure of each device.

[0019] In view of the above-mentioned problems, the present invention aims to provide an excimer lamp and light irradiation device that can reduce strain generated in the light-emitting tube through a structure that can be implemented more easily and can be used for a longer period of time.

[0020] Technical solutions for solving the problem

[0021] The excimer lamp of the present invention is characterized by comprising: The light-emitting tube extends along a first direction and, in a first cross-section cut by a plane orthogonal to the first direction, includes a first region and a second region whose tube wall is thicker than the first region, exhibiting light transmittance to ultraviolet light. A pair of electrodes are positioned opposite each other radially across the wall of the light-emitting diode; and The light extraction section is used to extract the ultraviolet light generated inside the light-emitting tube to the outside of the light-emitting tube.

[0022] In the first cross-section of the light-emitting tube, a first region with a thick tube wall and a second region with a thin tube wall coexist, thereby increasing the strength against deformations such as tube axis bending and suppressing strain caused by ultraviolet light irradiation.

[0023] Alternatively, in the aforementioned excimer lamps, The aforementioned light-emitting tube has irregularities formed on its outer wall surface through the aforementioned first region and the aforementioned second region in the aforementioned first cross-section.

[0024] Furthermore, it could also be that, in the aforementioned excimer lamps, The first cross-section of the light-emitting tube is rectangular in shape, and the light extraction portion is formed on at least one of the wall surfaces of the light-emitting tube along different planes.

[0025] Furthermore, it could also be that, in the aforementioned excimer lamps, The light extraction section is formed with either the first region or the second region.

[0026] Alternatively, it could be any of the excimer lamps mentioned above. A reflective film is formed on the wall surface of the light-emitting tube that is different from the light extraction part.

[0027] The second area can be manufactured simply and stably by adjusting the mold for making the light-emitting tube, melting a portion of the tube wall, and cutting. Furthermore, this method of manufacturing light-emitting tubes is just one example; other methods can also be used.

[0028] As described above, the strain generated in the light-emitting tube due to ultraviolet light irradiation is caused by the difference in expansion between the inner wall side, which is significantly affected by the breaking of Si-O bonds, and the outer wall side, which is less likely to occur due to the breaking of Si-O bonds.

[0029] This invention, from the viewpoint of further improving the strength of the light-emitting tube as a whole, in response to bending, external impact, and force accompanying the expansion of the inner wall surface, forms an uneven shape on at least the outer wall surface. However, this does not preclude forming an uneven shape on the inner wall surface.

[0030] As mentioned above, the strain in the light-emitting diode caused by ultraviolet light irradiation is due to the breaking of the Si-O bonds in the silica glass. However, it is known that the Si-O bonds broken by ultraviolet light irradiation can recombine through the repair effect of the OH groups contained in the silica glass. Furthermore, this repair effect is more significant as the temperature of the silica glass increases and the atomic movement within it becomes more active. That is, the higher the temperature of the light-emitting diode, the more significant the repair effect of the OH groups, and the more moderate the strain caused by the breaking of Si and O bonds.

[0031] Light-emitting diodes with thin-walled regions have a smaller heat capacity compared to those without, resulting in a faster temperature rise immediately after being turned on. Therefore, light-emitting diodes with thin-walled regions reach a high temperature immediately upon activation. In other words, compared to conventional light-emitting diodes, this structure begins to repair strain earlier than before, even when strain occurs due to ultraviolet light irradiation, thus more easily maintaining the state before deformation. For example, if the excimer lamp has a relatively long off-time (the time from lamp extinguishing to re-activation), and the light-emitting diode has thin-walled regions, repair strain will begin to occur earlier after re-activation.

[0032] A portion of the light-emitting tube with thin walls can be manufactured, for example, by melting and cutting a portion of the light-emitting tube that is manufactured in the conventional way. However, in this case, the portion whose wall is thinned by melting and cutting corresponds to the first region, and the portion that is not processed corresponds to the second region.

[0033] The light-emitting diode with the above-described structure extends in a first direction, forming a first region and a second region in a first cross-section. By forming the first region and the second region, the light-emitting diode with the above-described structure exhibits increased resistance to deformation caused by bending relative to the first direction. Therefore, compared to conventional light-emitting diodes, the light-emitting diode with the above-described structure suppresses deformation caused by ultraviolet light irradiation.

[0034] Furthermore, compared to LEDs with thinner wall areas, LEDs with thicker wall areas accumulate more heat, thus improving heat preservation. Therefore, LEDs with thicker wall areas maintain a higher temperature even after being turned off, and the aforementioned restorative effect lasts longer. In other words, compared to LEDs with conventional structures, this structure easily returns to its pre-strain state even after strain caused by ultraviolet light irradiation. For example, in situations where the excimer lamp's pause time is short and the lamp is repeatedly turned on and off within a short period, LEDs with thicker wall areas maintain their heat preservation effect and are less prone to strain.

[0035] As described above, the light-emitting tubes with uneven surfaces formed on the outer wall by the first and second regions can easily exert their strain-restoring effect even when the excimer lamp has a relatively long rest time or a short rest time with repeated lighting and extinguishing actions in a short period of time.

[0036] Furthermore, the difference between the thickness of the thinnest part of the tube wall and the thickness of the thickest part of the tube wall, based on the thickness of the thickest part of the tube wall, is preferably 3% or more, more preferably 5% or more, and even more preferably 10% or more. In addition, it is not necessary for the thinnest part of the tube wall to be the first region and the thickest part of the tube wall to be the second region.

[0037] Some thick-walled light-emitting tubes can be manufactured, for example, by flowing molten glass into a mold that can make light-emitting tubes of a specified shape. However, in this case, the relatively thin-walled part corresponds to the first region, and the relatively thick-walled part corresponds to the second region.

[0038] Furthermore, the relationship between the first and second regions mentioned above is not classified according to the shape or absolute thickness before and after processing, but rather according to the relative thickness formed on the tube wall of the manufactured light-emitting tube.

[0039] Alternatively, in the aforementioned excimer lamps, When observing the first cross-section, the first region is formed in the center of the wall where the light extraction part is formed, and the second region is formed near the boundary between the reflective film and the light extraction part.

[0040] In this specification, "near the boundary" is intended to include the area from the boundary between the reflective film and the light extraction part to a distance equivalent to the average thickness of the entire light-emitting tube.

[0041] Alternatively, in the aforementioned excimer lamps, When observing the first cross section, the second region is formed in the center of the wall where the light extraction part is formed, and the first region is formed near the boundary between the reflective film and the light extraction part.

[0042] By making or processing the wall of the light-emitting tube in the central part of the wall where the light extraction section is formed thicker than other parts, when the first and second regions are formed, the amount of ultraviolet light irradiation is greater, which can improve the heat preservation effect of the light extraction section and make it easier to reach higher temperatures. That is, the light-emitting tube with the above structure can achieve a greater effect of the above-mentioned repair function for a longer period of time in the part that is relatively prone to strain, thus further reducing the overall strain of the light-emitting tube.

[0043] Furthermore, the light extraction section experiences more significant strain due to the exposure to ultraviolet light, while the area with the reflective film receives less ultraviolet light and therefore does not experience the same level of strain as the light extraction section. Consequently, the area near the boundary between the reflective film and the light extraction section becomes the boundary between a strain-prone region and a region where strain is difficult to generate, making it prone to localized, strong stress and damage.

[0044] By making or processing the reflective film of the light-emitting diode wall thinner near the boundary of the light extraction section, thus forming a first region and a second region, the heating rate of the portion subjected to localized strong stress can be increased. That is, in the portion of the light-emitting diode with the above-described structure subjected to localized strong stress, the aforementioned repair effect manifests earlier, thereby suppressing damage caused, especially by strain generated immediately after lighting.

[0045] Furthermore, as described above, by making or processing the tube wall of the light-emitting tube at the middle position of the end of the reflective film thinner, in the case of forming the first region and the second region, damage caused by strain, especially that generated after the initial lighting, can be suppressed in the part that is relatively prone to strain.

[0046] Furthermore, by making or processing the reflective film of the tube wall of the light-emitting tube thicker near the boundary of the light extraction part, thus forming a first region and a second region, the above-mentioned repair effect can be obtained for a longer period of time in the region that is prone to strong local stress, so the load generated in this region of the light-emitting tube can be further reduced.

[0047] Alternatively, in the aforementioned excimer lamps, When observing the first cross section, the wall surface of the light-emitting tube opposite to the light extraction part includes a third region and a fourth region whose tube wall is thicker than the third region, and an unevenness formed by the third region and the fourth region is formed on the outer wall surface.

[0048] By configuring the structure as described above, the aforementioned unevenness is formed on multiple wall surfaces, thereby further improving the strength of the light-emitting tube relative to strain.

[0049] Furthermore, it could also be that, in the aforementioned excimer lamps, When observing the first cross-section, the wall surface of the light-emitting tube opposite the light extraction part has the third region formed in the center and the fourth region formed at both ends.

[0050] Alternatively, it could be any of the excimer lamps mentioned above. When observing the first cross-section, the fourth region is formed in the central part of the wall surface of the light-emitting tube opposite to the light extraction part, and the third region is formed at both ends.

[0051] According to the above structure, the light-emitting tube can reduce the strain caused by ultraviolet light irradiation and improve the strength of the part in contact with the limiting body set up to reduce the deformation caused by ultraviolet light irradiation, as described later.

[0052] Alternatively, the above-mentioned excimer lamp can be configured as follows: The thickness of at least a portion of the tube wall of the aforementioned light-emitting tube gradually changes.

[0053] In this specification, "gradual change in thickness" means that the thickness increases in stages multiple times from the part with the smallest thickness to the part with the largest thickness, or the thickness increases continuously and monotonically.

[0054] Alternatively, the excimer lamp may include a reflective component that reflects ultraviolet light traveling in a direction different from the light extraction section toward the light extraction section. The aforementioned light-emitting tube is asymmetrical with respect to its tube axis by the shape of the tube wall on the side containing the light extraction portion, which includes the second region, and the shape of the tube wall on the side opposite to the light extraction portion, which includes the first region. When observing the first cross-section of the light-emitting tube, the light extraction portion includes the first part with the thickest tube wall in the circumferential direction.

[0055] Compared to a light-emitting tube with a uniform thickness but no wall thickness, a region with a thicker wall area in this structure stores more heat, thus improving its heat preservation effect. Therefore, the light-emitting tube with the thicker wall area maintains a higher temperature for a longer period after being turned off, and the aforementioned restorative effect lasts for an extended time. In other words, compared to conventional light-emitting tubes, this structure easily returns to its pre-strain state even after strain is caused by ultraviolet light irradiation.

[0056] For example, when the excimer lamp has a short rest time (the time from when the lamp is turned off to when it is turned on again) and is repeatedly turned on and off before the temperature of the light-emitting tube returns to room temperature, the heat preservation effect is sustained in the light-emitting tube in a part of the tube with a thick tube wall, making it difficult to generate strain.

[0057] Furthermore, to achieve better heat preservation, it is considered to thicken the overall wall of the LED tube. However, if the overall wall of the LED tube is thickened, it would result in an unnecessary increase in the size of the excimer lamp itself and also increase manufacturing costs.

[0058] Furthermore, since the reflector side of the excimer lamp is located on the side opposite to the workpiece, it is relatively easy to install a heater, etc. However, it is difficult to install a heater on the light extraction side of the excimer lamp due to concerns about obstructing the travel of ultraviolet light toward the workpiece and causing thermal damage to the workpiece. Therefore, compared with the wall surface of the reflector side, the wall surface of the light extraction side of the light-emitting tube is less likely to promote the aforementioned repair effect.

[0059] By adopting the above structure, there is no need to set up additional heaters, etc., and the repair effect of the wall surface on the light emitting surface of the light-emitting tube can be improved by increasing the minimum required size.

[0060] Furthermore, the way stress is applied differs depending on the thickness of the tube wall when strain occurs in the light-emitting tube. Therefore, if there is a section where the tube wall thickness changes drastically, its boundary is prone to becoming the starting point for cracks, etc.

[0061] Therefore, compared to the past, the strain generated in the light-emitting tube is reduced, enabling the excimer lamp to be used for a longer period of time.

[0062] According to the above structure, the part of the light-emitting tube where the stress caused by strain changes drastically is mitigated, thus making it less likely for the light-emitting tube to break.

[0063] Alternatively, in the aforementioned excimer lamps, The first cross-section of the aforementioned light-emitting tube is rectangular in shape, and the light extraction portion is formed on one of the walls of the aforementioned light-emitting tube along different planes.

[0064] Furthermore, it could also be that, in the aforementioned excimer lamps, The wall thickness of the aforementioned light extraction section is approximately the same.

[0065] In this specification, "approximately the same thickness" means that the error relative to the average thickness of the pipe wall in the first cross section is within ±3%.

[0066] Based on the above structure, the overall heat preservation effect of the light extraction section is improved, so in the light extraction section that is irradiated with more ultraviolet light, the above-mentioned repair effect can be obtained.

[0067] Alternatively, it could be any of the excimer lamps mentioned above. The aforementioned reflective component is a reflective film formed on the inner wall surface of the aforementioned light-emitting tube.

[0068] Furthermore, it could also be that, in the aforementioned excimer lamps, The light extraction section is formed such that, in the circumferential direction when observing the first cross-section, the area near the end of the reflective film is thicker than the central portion.

[0069] The light extraction section experiences more significant strain due to the exposure to ultraviolet light, while the area with the reflective film receives less ultraviolet light and therefore does not experience the same level of strain as the light extraction section. The areas where strain occurs are prone to causing changes in the tube wall shape. Consequently, the area near the end of the reflective film becomes the boundary between the strain-prone and strain-free areas, making it susceptible to localized, strong stress and breakage.

[0070] Furthermore, when the wall of the light-emitting tube, which corresponds to the light extraction section, is manufactured or processed such that the reflective film is thicker near the ends than in the center, the aforementioned repair effect can be achieved more effectively over a longer period in areas where strong local stress is easily applied. Therefore, the load generated in this area of ​​the light-emitting tube can be further reduced.

[0071] For example, if the first cross-section is flat, the area near the end of the reflective film becomes the boundary between the region where strain is generated and the region where strain is difficult to generate. Therefore, it is easy to apply stronger local stress, making it a potential starting point for damage. In particular, when the excimer lamp output is high, a difference in strain is easily generated, and localized loads at the boundary can become problematic. Therefore, from the viewpoint of strengthening the load resistance at the boundary between the region where the excimer lamp output is high and the region where strain is easily generated and the region where strain is difficult to generate, it is preferable that the structure near the end of the reflective film is thicker than the central portion. Furthermore, by forming a region with a thicker tube wall, the thermal insulation effect can be improved.

[0072] Furthermore, in the case of the above structure, regarding the light extraction section, the difference between the thickness of the thinnest part of the tube wall and the thickness of the thickest part of the tube wall is preferably 3% or more, more preferably 5% or more, and even more preferably 10% or more, based on the thickness of the thickest part of the tube wall.

[0073] Alternatively, it could be any of the excimer lamps mentioned above. The light extraction section is formed such that, in the circumferential direction when observing the first cross-section, the central portion is thicker than the area near the end of the reflective film.

[0074] When the tube wall is manufactured or processed such that the central portion of the light extraction section is thicker than the area near the end of the reflective film in the circumferential direction when observing the first cross-section, more heat is stored in the light-emitting tube. This improves the heat preservation effect of the central portion of the light extraction section, and the central portion of the light extraction section can easily reach a higher temperature. In other words, the light-emitting tube with the above structure can achieve a greater degree of repair effect over a longer period in the parts that are relatively prone to strain. Therefore, the overall strain of the light-emitting tube can be further reduced.

[0075] Furthermore, the excimer lamp contains a luminescent gas including xenon (Xe) within its light-emitting tube, creating a negative pressure inside. For example, if the first cross-section is flat, the stress in the central portion of the light extraction section tends to be high due to the negative pressure (making it easier to apply a load to the central portion of the light extraction section). While the degree of negative pressure within the light-emitting tube is reduced when the excimer lamp output is high, the load on the central portion of the light extraction section is relatively large when the excimer lamp output is low. Therefore, from the viewpoint of enhancing the load resistance of the central portion of the light extraction section, it is considered to improve the heat insulation effect of the light-emitting tube during illumination by making the area near the end of the reflective film thicker than the central portion of the light extraction section, thereby promoting the aforementioned repair effect at the start of illumination and further reducing the overall strain of the light-emitting tube.

[0076] Furthermore, in the case of the above structure, regarding the light extraction section, the difference between the thickness of the thinnest part of the tube wall and the thickness of the thickest part of the tube wall is preferably 3% or more, more preferably 5% or more, and even more preferably 10% or more, based on the thickness of the thickest part of the tube wall.

[0077] Furthermore, according to the above structure, the light-emitting diode has unevenness accompanied by changes in thickness, thus increasing its resistance to deformation relative to the first direction caused by strain due to ultraviolet light irradiation. Therefore, compared with conventional light-emitting diodes, the light-emitting diode with the above structure suppresses deformation caused by ultraviolet light irradiation.

[0078] Alternatively, in the aforementioned excimer lamps, The first cross-section of the aforementioned light-emitting tube is circular in shape.

[0079] Alternatively, the excimer lamp may include a reflective component that reflects ultraviolet light traveling in a direction different from the light extraction section toward the light extraction section. The aforementioned light-emitting tube is asymmetrical with respect to its tube axis by the shape of the tube wall on the side containing the first region (the side opposite to the light-extracting portion) and the shape of the tube wall containing the second region (the side opposite to the light-extracting portion). When the light extraction section is observed in the first cross-section of the light-emitting tube, it includes the second part with the thinnest tube wall in the circumferential direction.

[0080] The light-emitting diode with a thin-walled region has a smaller heat capacity compared to one without, resulting in a faster temperature rise after initial illumination. Therefore, the light-emitting diode with the thin-walled region reaches a high temperature immediately upon illumination. In other words, compared to conventional light-emitting diodes, this structure begins to repair strain earlier than before, even when strain occurs due to ultraviolet light irradiation, thus more easily maintaining the state before strain occurred.

[0081] For example, in cases where the excimer lamp has a long rest period (the time from when the lamp is turned off to when it is turned on again) and the process of repeatedly turning the lamp on again after the temperature of the light-emitting tube returns to room temperature is repeated, if the light-emitting tube is applied to a region where the tube wall is thin, the light-emitting tube will immediately become hot after being turned on again. This allows the repair strain to begin earlier than expected after the lamp is turned on again, making it easier to maintain the state before the deformation occurred.

[0082] Furthermore, to further accelerate the heating rate, it was considered to thin the overall wall of the LED tube. However, if the overall wall of the LED tube is thinned, the intensity of the excimer lamp itself will decrease.

[0083] Furthermore, since the reflector side of the excimer lamp is located on the side opposite to the workpiece, it is relatively easy to install a heater, etc. However, it is difficult to install a heater on the light extraction side of the excimer lamp due to concerns about obstructing the travel of ultraviolet light toward the workpiece and causing thermal damage to the workpiece. Therefore, compared with the wall surface of the reflector side, the wall surface of the light extraction side of the light-emitting tube is less likely to promote the aforementioned repair effect.

[0084] By adopting the above structure, there is no need to set up additional heaters, etc., and the repair effect of the wall surface on the light emitting surface of the light-emitting tube can be improved while limiting the intensity reduction of the light-emitting tube to the minimum required.

[0085] Furthermore, the way stress is applied differs depending on the thickness of the tube wall when strain occurs in the light-emitting tube. Therefore, if there is a section where the tube wall thickness changes drastically, its boundary is prone to becoming the starting point for cracks, etc.

[0086] Therefore, compared to the past, the strain generated in the light-emitting tube is reduced, enabling the excimer lamp to be used for a longer period of time.

[0087] According to the above structure, the part of the light-emitting tube where the stress caused by strain changes drastically is mitigated, thus making it less likely for the light-emitting tube to break.

[0088] Alternatively, in the aforementioned excimer lamps, The first cross-section of the aforementioned light-emitting tube is rectangular in shape, and the light extraction portion is formed on one of the walls of the aforementioned light-emitting tube along different planes.

[0089] Furthermore, it could also be that, in the aforementioned excimer lamps, The wall thickness of the aforementioned light extraction section is approximately the same.

[0090] Based on the above structure, the overall heating rate of the light extraction section is increased, so in the light extraction section that is irradiated with more ultraviolet light, the above-mentioned repair effect can be obtained earlier after the light is first turned on.

[0091] Alternatively, it could be any of the excimer lamps mentioned above. The aforementioned reflective component is a reflective film formed on the inner wall surface of the aforementioned light-emitting tube.

[0092] Furthermore, it could also be that, in the aforementioned excimer lamps, The light extraction section is formed such that, in the circumferential direction when observing the first cross-section, the area near the end of the reflective film is thinner than the central portion.

[0093] The light extraction section experiences more significant strain due to the exposure to ultraviolet light, while the area with the reflective film receives less ultraviolet light and therefore does not experience the same level of strain as the light extraction section. Consequently, the area near the end of the reflective film becomes the boundary between the strain-prone and strain-resistant regions, making it prone to localized, strong stress and damage.

[0094] Furthermore, when the wall of the light-emitting tube, corresponding to the light extraction section, is manufactured or processed such that it is thinner near the end of the reflective film than in the center, the aforementioned repair effect is achieved earlier in areas where strong localized stress is easily applied, even before the tube is initially lit. Therefore, the load generated in this area of ​​the light-emitting tube can be further reduced.

[0095] From the perspective of enhancing the load resistance of the central part of the light extraction section, it is also considered that by making the area near the end of the reflective film thinner than the central part of the light extraction section, the heating rate of the light-emitting tube when lit can be increased, so that the above-mentioned repair effect can be achieved earlier after the initial lighting, thereby further reducing the overall strain of the light-emitting tube.

[0096] Furthermore, in the case of the above structure, regarding the light extraction section, the difference between the thickness of the thinnest part of the tube wall and the thickness of the thickest part of the tube wall is preferably 3% or more, more preferably 5% or more, and even more preferably 10% or more, based on the thickness of the thickest part of the tube wall.

[0097] Alternatively, it could be any of the excimer lamps mentioned above. The light extraction section is formed such that, in the circumferential direction when observing the first cross-section, the central portion is thinner than the area near the end of the reflective film.

[0098] When the tube wall is manufactured or processed such that the central portion of the light extraction section in the circumferential direction is thinner than the area near the end of the reflective film when observing the first cross-section, the heating rate of the central portion of the light extraction section, which receives a higher amount of ultraviolet light, can be increased, and the central portion of the light extraction section can more easily reach a higher temperature. That is, in the portion of the light-emitting tube that is relatively prone to strain, the aforementioned repair effect can be achieved earlier after initial illumination. Therefore, the overall strain of the light-emitting tube can be further reduced.

[0099] Furthermore, from the viewpoint of enhancing the load resistance at the boundary between areas with high output of the collimator lamp and areas prone to strain and areas difficult to strain, it is preferable to form a structure in which the reflective film is not thin near the ends, but rather thinner in the central part than near the ends. This enhances the load resistance near the ends and improves the heating effect of the light-emitting tube during illumination, allowing the aforementioned repair effect to be achieved earlier after initial illumination, and further reducing the overall strain of the light-emitting tube.

[0100] Furthermore, in the case of the above structure, regarding the light extraction section, the difference between the thickness of the thinnest part of the tube wall and the thickness of the thickest part of the tube wall is preferably 3% or more, more preferably 5% or more, and even more preferably 10% or more, based on the thickness of the thickest part of the tube wall.

[0101] Furthermore, according to the above structure, the light-emitting diode has unevenness accompanied by changes in thickness, thus increasing its resistance to deformation relative to the first direction caused by strain due to ultraviolet light irradiation. Therefore, compared with conventional light-emitting diodes, the light-emitting diode with the above structure suppresses deformation caused by ultraviolet light irradiation.

[0102] Alternatively, in the aforementioned excimer lamps, The first cross-section of the aforementioned light-emitting tube is circular in shape.

[0103] The light irradiation device of the present invention is characterized by comprising: The aforementioned excimer lamp; and The limiting body protrudes toward the tube wall of the light-emitting tube opposite to the light extraction part, and is arranged such that its top end is close to the tube wall.

[0104] In this specification, "close" is intended to refer to situations where the separation distance is less than 2 mm.

[0105] Invention Effects

[0106] According to the present invention, an excimer lamp and light irradiation device are realized with a structure that can be implemented more easily, reducing the strain generated in the light-emitting tube and enabling longer use. Attached Figure Description

[0107] Figure 1 This is a schematic cross-sectional view of one embodiment of the light irradiation device when viewed along the Y direction.

[0108] Figure 2 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the Y direction.

[0109] Figure 3 This is a schematic diagram of an excimer lamp according to one embodiment, viewed along the Z-direction.

[0110] Figure 4 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0111] Figure 5 It is an enlarged cross-sectional view of the periphery of the light irradiation device when viewed along the X direction.

[0112] Figure 6 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0113] Figure 7 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0114] Figure 8 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0115] Figure 9 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0116] Figure 10 It is an enlarged cross-sectional view of the periphery of the light irradiation device when viewed along the X direction.

[0117] Figure 11 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0118] Figure 12 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0119] Figure 13A This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the Y direction.

[0120] Figure 13B It is observed along the X direction. Figure 13A A schematic cross-sectional view of the excimer lamp.

[0121] Figure 14 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0122] Figure 15 It is an enlarged cross-sectional view of the periphery of the light irradiation device when viewed along the X direction.

[0123] Figure 16 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0124] Figure 17 This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the X-direction.

[0125] Figure 18A This is a schematic cross-sectional view of an excimer lamp according to one embodiment, viewed along the Y direction.

[0126] Figure 18B It is observed along the X direction. Figure 18A A schematic cross-sectional view of the excimer lamp.

[0127] Figure 19A This is a schematic diagram showing the structure of a conventional excimer lamp when viewed along the Y-direction.

[0128] Figure 19B It is observed along the Z direction. Figure 19A A schematic diagram of the excimer lamp.

[0129] Figure 20 This is a diagram showing the excimer lamp deformed by ultraviolet light when viewed along the Y direction. Detailed Implementation

[0130] The excimer lamp and light irradiation device of the present invention will now be described with reference to the accompanying drawings. Furthermore, all the following drawings are schematic illustrations, and the dimensions and numbers shown in the drawings may not necessarily correspond to the actual dimensions and numbers.

[0131] [First Implementation Method]

[0132] Figure 1 This is a schematic cross-sectional view of the first embodiment of the light irradiation device 1 as viewed along the Y direction. Figure 1 As shown, the light irradiation device 1 of the first embodiment includes an excimer lamp 2, a limiting body 3, and a conveying mechanism 4 for carrying the irradiated object W1.

[0133] First, the structure of the desmolecular lamp 2 will be explained. Figure 2 This is a schematic cross-sectional view of the excimer lamp 2 in the first embodiment when viewed along the Y direction. Figure 3 This is a schematic diagram of the excimer lamp 2 in the first embodiment when viewed along the Z-direction. Figure 4 This is a schematic cross-sectional view of the excimer lamp 2 in one embodiment, viewed along the X-direction. For example... Figure 2 and Figure 4As shown, the excimer lamp 2 includes a light-emitting tube 10, a pair of electrodes (11, 12), a reflective film 13, and a light extraction section 14.

[0134] In the following explanation, such as Figure 2 As shown, the direction in which the excimer lamp 2 extends (the tube axis direction) is designated as the X direction (first direction), the direction in which the pair of electrodes (11, 12) face each other is designated as the Z direction, and the direction orthogonal to both the X and Z directions is designated as the Y direction (second direction). Furthermore, when representing directions, if positive or negative orientations are distinguished, they are marked with positive and negative symbols, such as "+Z direction" and "-Z direction". If the orientation is not distinguished by positive or negative orientations, it is simply recorded as "Z direction".

[0135] The light-emitting diode 10 is formed of a material (e.g., silica glass) that is transparent to ultraviolet light L1, such as... Figure 2 As shown, extending along the X direction, it is rectangular when viewed in cross-section (first cross-section) cut by the YZ plane. Furthermore, the light-emitting tube 10 has a light-emitting space 10c inside, which encloses the light-emitting gas G1.

[0136] In the first embodiment, the excimer lamp 2 emits ultraviolet light L1 with a peak wavelength of 172 nm by sealing a luminescent gas G1 containing xenon (Xe) within the luminescent space 10c of the light-emitting tube 10. Furthermore, this structure is merely an example, and the type of luminescent gas G1 sealed within the light-emitting tube 10 can be arbitrarily selected according to the intended use of the light irradiation device 1, i.e., the wavelength of the ultraviolet light L1 to be emitted.

[0137] like Figure 4 As shown, in the first embodiment, when the first cross-section is observed, the light-emitting tube 10 has a first region 10p and a second region 10q formed on the tube wall on the -Z side. In addition, a third region 10r and a fourth region 10s formed on the tube wall on the +Z side are also present.

[0138] In the first embodiment, a second region 10q is formed at the middle position C1 of the end 13a of the reflective film 13 in the circumferential direction of the first cross-section of the light-emitting tube 10, and a first region 10p is formed near the boundary 10d between the reflective film 13 and the light extraction part 14. Furthermore, in the circumferential direction of the first cross-section of the light-emitting tube 10, a fourth region 10s is formed in the central part of the wall surface on the +Z side, and a third region 10r is formed at both ends.

[0139] Furthermore, in the first embodiment, the second region 10q and the fourth region 10s are as follows: Figure 4 As shown, the tube wall is formed to be thicker than the first region 10p and the third region 10r, and is formed to have a gradually changing thickness in the circumferential direction of the light-emitting tube 10.

[0140] Electrodes (11, 12) are mesh-like metal films formed on the outer wall surface 10a of the light-emitting tube 10, arranged radially opposite each other in the Z direction across the light-emitting tube 10. They are connected to a power supply device (not shown) and are subjected to a voltage required for lighting. The method of applying the voltage is arbitrary, but in the first embodiment, ultraviolet light L1 is generated in the light-emitting space 10c by periodically applying a pulsed voltage of a desired level between the electrodes (11, 12).

[0141] The electrodes (11, 12) are, for example, a composite of metal wires woven into a mesh or a metal film formed by vapor deposition of metal material or application of metal paste on the outer wall surface 10a of the light-emitting tube 10 where a mask has been applied. Furthermore, the electrode 11 formed on the outer wall surface 10a of the tube wall where the reflective film 13 is formed does not need to be a mesh; it can be a partially or entirely flat electrode. Additionally, materials constituting the electrodes (11, 12) include, for example, gold, silver, copper, platinum, etc.

[0142] Furthermore, one of the electrodes (11, 12) may also be disposed inside the light-emitting tube 10. In addition, being disposed inside the light-emitting tube 10 here also includes the case where one electrode is disposed inside the light-emitting space 10c, or the case where, in a light-emitting tube having an inner tube wall and an outer tube wall and having a light-emitting space 10c formed in a cylindrical manner in the area sandwiched between the inner tube wall and the outer tube wall, one electrode is disposed inside the inner tube wall.

[0143] The reflective film 13 is formed on the inner wall surface 10b of the tube wall on the +Z side of the light-emitting tube 10 and on the inner wall surface 10b opposite to it in the Y direction. For example... Figure 4 As shown, the reflective film 13 reflects the ultraviolet light L1 generated in the light-emitting space 10c and traveling in a direction different from the light extraction section 14 in such a way that it travels toward the light extraction section 14.

[0144] The reflective film 13 may be, for example, a sintered film of metal oxide formed by coating a suspension containing particulate silicon dioxide (SiO2), aluminum oxide (Al2O3), etc., and then firing it.

[0145] Alternatively, the reflective film 13 can be formed on the outer wall surface 10a of the light-emitting tube 10, or it can be configured as a reflective component that is not equipped with the reflective film 13 but is provided as another component. In addition, if no special measures are required for the ultraviolet light L1 emitted in a direction different from that of the irradiated object W1, the reflective film and reflective component may not be provided.

[0146] The light extraction section 14 is a part of the light-emitting tube 10 formed by the tube wall on the -Z side of the light-emitting tube 10, used to extract the ultraviolet light L1 generated within the light-emitting space 10c to the outside of the light-emitting tube 10. Furthermore, as... Figure 3As shown, the light extraction section 14 in the first embodiment is provided with a mesh electrode 12. Therefore, the ultraviolet light L1 generated in the light emission space 10c of the light emission tube 10 is emitted to the outside of the light emission tube 10 through the mesh of the light extraction section 14 and the electrode 12.

[0147] Figure 5 This is an enlarged cross-sectional view of the periphery of the limiting body 3 of the light irradiation device 1 when viewed along the X-direction. For example... Figure 5 As shown, the limiting body 3 protrudes close to the light-emitting tube 10. Furthermore, a roller 3a is provided at the top end, and the roller 3a is arranged close to the fourth region 10s formed on the tube wall on the +Z side. The roller 3a generates… Figure 10 Under strain conditions as shown, when in contact with the light-emitting tube 10, the distance between the light extraction section 14 and the object to be irradiated W1 varies depending on the position, thus suppressing uneven irradiation in the object to be irradiated W1. Furthermore, by configuring the second region 10q or the fourth region 10s, which has a thicker tube wall, close to the limiting body 3, the stress load resistance when in contact with the limiting body 3 is improved, and damage to the light-emitting tube 10 is further suppressed.

[0148] In the light irradiation device 1 of the first embodiment, multiple limiting bodies 3 may be provided in one light irradiation device 1, and the top end of the roller 3a may have two or more strands. According to this structure, the excimer lamp 2, which generates strain, is supported by multiple points. Therefore, compared with the case where it is supported by a single point, the force applied to the light-emitting tube 10 is dispersed in this structure of the light irradiation device 1, thus suppressing the breakage of the light-emitting tube 10.

[0149] Compared to conventional light-emitting tubes, the light-emitting tube 10 of the light irradiation device 1 with the above-described structure exhibits improved strength against deformation due to bending in the X direction due to the uneven shape formed by the presence of the first region 10p and the second region 10q. Therefore, the light irradiation device 1 with the above-described structure suppresses damage to the light-emitting tube 10 compared to existing structures, and thus can be used for a longer period of time.

[0150] Furthermore, the excimer lamp 2 provided in the light irradiation device 1 according to the first embodiment can improve the heat preservation effect of the light extraction section 14, which receives a relatively large amount of ultraviolet light L1. That is, the light-emitting tube 10 with the above-described structure is a structure that relatively improves the repair effect in parts that are relatively prone to strain, so the overall strain of the light-emitting tube can be further reduced.

[0151] In addition, such as Figure 4 As shown, the light-emitting tube 10 of the first embodiment has a first region 10p and a second region 10q whose tube wall is thicker than the first region 10p. However, other regions with different thicknesses than the first region 10p and the second region 10q may also be formed in the tube wall.

[0152] In addition, the second region 10q only needs to be formed with a wall thickness greater than that of the first region 10p; it is not necessary to form it as described above. Figure 4 As shown, both the inner and outer sides of the light-emitting tube 10 are convex. For example, the second region 10q can also be a shape where the inner wall surface 10b is flat and only the outer wall surface 10a is convex.

[0153] Furthermore, these points are also present in the third region 10r and the fourth region 10s in the pipe wall on the +Z side. In the first embodiment, the shape and positional relationship of the first region 10p and the second region 10q are illustrated as being the same as that of the third region 10r and the fourth region 10s in the Y direction, but their shape and positional relationship may not be consistent.

[0154] [Second Implementation]

[0155] The structure of the second embodiment of the light irradiation device of the present invention will be described focusing on the parts that differ from those of the first embodiment.

[0156] Figure 6 This is a schematic cross-sectional view of the excimer lamp 2 in the second embodiment when viewed along the X-direction. (Example) Figure 6 As shown, in the second embodiment, when observing the first cross-section, the light-emitting tube 10 has a first region 10p and a second region 10q formed on the tube walls facing each other in the Z direction. Furthermore, in the second embodiment, regarding the circumferential direction of the first cross-section of the light-emitting tube 10, the first region 10p is formed at the middle position C1 of the end 13a of the reflective film 13, and the second region 10q is formed near the boundary 10d between the reflective film 13 and the light extraction portion 14.

[0157] Furthermore, in the second embodiment, the second region 10q and the fourth region 10s have thicker tube walls than the first region 10p and the third region 10s due to the convex portion formed on the outer wall surface 10a of the light-emitting tube 10.

[0158] The excimer lamp 2 provided in the light irradiation device 1 according to the second embodiment can improve the heat preservation effect near the boundary 10d between the reflective film 13 and the light extraction part 14. That is, the light-emitting tube 10 with the above structure can obtain the above-mentioned repair effect for a longer time with a higher effect near the boundary 10d where strong stress is easily applied locally, so the load generated near the boundary 10d of the light-emitting tube 10 is further reduced.

[0159] [Third Implementation Method]

[0160] The structure of the third embodiment of the light irradiation device of the present invention will be described focusing on the parts that are different from those of the first and second embodiments.

[0161] Figure 7 This is a schematic cross-sectional view of the excimer lamp 2 of the third embodiment when viewed along the X-direction. (Example) Figure 7 As shown, in the third embodiment, the light-emitting tube 10 forms a first region 10p and a second region 10q whose tube wall is thicker than the first region 10p by cutting a portion of the tube wall on the -Z side.

[0162] According to the excimer lamp 2 of the light irradiation device 1 of the third embodiment, the amount of ultraviolet light L1 is relatively large, which can increase the heating rate of the light extraction section 14. That is, the light-emitting tube 10 of the above structure particularly suppresses the damage caused by the strain caused by the ultraviolet light L1 irradiation that occurs after the initial lighting.

[0163] [Fourth Implementation Method]

[0164] The structure of the fourth embodiment of the light irradiation device of the present invention will be described focusing on the parts that differ from the first, second, and third embodiments.

[0165] Figure 8 This is a schematic cross-sectional view of the excimer lamp 2 of the fourth embodiment viewed along the X direction. (Example) Figure 8 As shown, in the fourth embodiment, the light-emitting tube 10 forms a first region 10p and a second region 10q whose tube wall is thicker than the first region 10p by cutting a portion of the tube wall on the -Z side.

[0166] The excimer lamp 2 included in the light irradiation device 1 according to the fourth embodiment can increase the heating rate near the boundary 10d between the reflective film 13 and the light extraction section 14, where strong local stress is applied. That is, the light-emitting tube 10 with the above-described structure exhibits the aforementioned repair effect near the boundary 10d where strong local stress is applied earlier, thus particularly suppressing damage caused by strain generated after initial lighting.

[0167] [Fifth Implementation]

[0168] The structure of the fifth embodiment of the light irradiation device of the present invention will be described focusing on the parts that differ from the first to fourth embodiments.

[0169] Figure 9 This is a schematic cross-sectional view of the excimer lamp 2 of the fifth embodiment viewed along the X direction. (Example) Figure 9As shown, in the fifth embodiment, the light extraction section 14 is formed of a tube wall that is thicker than the tube wall on which the reflective film 13 is provided on the inner wall surface 10b and is formed with approximately the same thickness. That is, in this embodiment, the light extraction section 14 substantially corresponds to the thickest first portion 14a of the tube wall. The difference between the thickness of the light extraction section 14 and the thickness of the tube wall other than the light extraction section 14 is preferably 3% or more, more preferably 5% or more, and even more preferably 10% or more relative to the thickness of the tube wall other than the light extraction section 14. Furthermore, in the fifth embodiment, the tube wall on the relatively thin +Z side corresponds to the first region 10p, and the tube wall on the relatively thick -Z side constituting the light extraction section 14 corresponds to the second region 10q.

[0170] Furthermore, in this embodiment, the light-emitting tube 10 is configured such that the thickness of the light extraction portion 14 is 3.0 mm, and the thickness of the tube wall outside the light extraction portion 14 is 2.5 mm (i.e., the difference between the thickness of the light extraction portion 14 and the thickness of the tube wall outside the light extraction portion 14 is 20%). That is, in this embodiment, the light-emitting tube 10 is configured such that, when viewed from the tube axis Ax, the shape of the tube wall on the side of the light extraction portion 14 (-Z side) and the tube wall on the side opposite to the light extraction portion 14 (+Z side) are asymmetrical. The thickness of the tube wall of the light extraction portion 14 does not need to be substantially the same as the other wall surfaces, as long as it is made thicker.

[0171] Furthermore, such as Figure 9 As shown, at both ends of the light extraction section 14 in the Y direction, near the end 13a of the reflective film 13, a displacement region 20p (the part surrounded by the dotted line) is formed where the thickness of the tube wall of the light-emitting tube 10 gradually changes.

[0172] Figure 10 This is an enlarged cross-sectional view of the periphery of the limiting body 3 of the light irradiation device 1 when viewed along the X-direction. For example... Figure 10 As shown, the limiting body 3 protrudes close to the light-emitting tube 10. Furthermore, a roller 3a is provided at the top end, and the roller 3a is arranged close to the tube wall on the +Z side. The roller 3a generates… Figure 20 Under the strain conditions shown, contact with the light-emitting diode 10 limits further increase in strain and suppresses damage to the light-emitting diode 10.

[0173] In the light irradiation device 1 of this embodiment, multiple limiting bodies 3 may be provided in one light irradiation device 1, and the top end of the roller 3a may have two or more strands. According to this structure, the excimer lamp 2, which generates strain, is supported by multiple points. Therefore, compared with the case where it is supported by a single point, the force applied to the light-emitting tube 10 is dispersed in the light irradiation device 1 with this structure, thus suppressing the breakage of the light-emitting tube 10.

[0174] The excimer lamp 2 of the light irradiation device 1 with the above-described structure provides a higher amount of ultraviolet light L1, which improves the heat preservation effect of the light extraction section 14. In other words, the light-emitting tube 10 with the above-described structure improves the repair effect in areas prone to strain, thus further reducing the overall strain of the light-emitting tube.

[0175] [Sixth Implementation Method]

[0176] The structure of the sixth embodiment of the light irradiation device of the present invention will be described focusing on the parts that are different from those of the first to fifth embodiments.

[0177] Figure 11 This is a schematic cross-sectional view of the excimer lamp 2 of the sixth embodiment viewed along the X direction. (Example) Figure 11 As shown, the light extraction portion 14 of the excimer lamp 2 can also be formed such that, in the circumferential direction when observing the first cross-section, the portion near the end 13a of the reflective film 13 is thicker than the central portion. That is, the first portion 14a can also be formed at both ends in the Y direction of the wall surface on the -Z side. Furthermore, as... Figure 11 As shown, a displacement region 20p is formed where the thickness of the tube wall of the light-emitting tube 10 gradually changes. Furthermore, in the sixth embodiment, similar to the fifth embodiment, the tube wall on the +Z side, which is relatively thin, corresponds to the first region 10p, and the tube wall on the -Z side, which is relatively thick, which constitutes the light extraction section 14, corresponds to the second region 10q.

[0178] Regarding the wall of the light extraction section 14 corresponding to the light-emitting tube 10, if it is manufactured or processed such that it is thicker near the end 13a of the reflective film 13 than in the center, the aforementioned repair effect can be achieved more effectively over a longer period of time in areas where localized stress is easily applied. Therefore, the load generated in this area of ​​the light-emitting tube 10 can be further reduced.

[0179] Figure 12 Is with Figure 11 A schematic cross-sectional view of the excimer lamp 2 of the sixth embodiment viewed along the X-direction. (e.g.) Figure 12 As shown, the light extraction section 14 of the excimer lamp 2 can also be formed such that, in the circumferential direction when observing the first cross-section, the central portion is thicker than the area near the end 13a of the reflective film 13. Furthermore, as... Figure 12 As shown, a displacement region 20p is formed in which the thickness of the tube wall of the light-emitting tube 10 gradually changes.

[0180] When the tube wall of the central portion of the light extraction section is thicker than that near the end 13a of the reflective film 13 in the circumferential direction when observing the first cross-section, the amount of ultraviolet light L1 irradiated by the light-emitting tube 10 is greater, which can improve the heat preservation effect of the central portion of the light extraction section 14, and the central portion of the light extraction section 14 can easily reach a higher temperature. That is, the light-emitting tube 10 with the above structure can achieve a greater effect of the above-mentioned repair function over a long period of time in the part that is relatively prone to strain. Therefore, the overall strain of the light-emitting tube 10 can be further reduced.

[0181] Regarding the light extraction section 14, based on the thickness of the thickest part of the tube wall, the difference between the thickness of the thinnest part of the tube wall and the thickness of the thickest part of the tube wall is preferably 3% or more, more preferably 5% or more, and even more preferably 10% or more.

[0182] [Seventh Implementation Method]

[0183] The structure of the seventh embodiment of the light irradiation device of the present invention will be described focusing on the parts that differ from the first to sixth embodiments.

[0184] Figure 13A This is a schematic cross-sectional view of the excimer lamp 2 of the seventh embodiment when viewed along the Y direction. Figure 13B It is observed along the X direction. Figure 13A A cross-sectional view of the excimer lamp at time 2. Additionally, in Figure 13A In the illustration, for ease of showing the shape of the excimer lamp 2, the state with the reflective component 31 removed is shown. Figure 13A and Figure 13B As shown, the excimer lamp 2 can also be a type of lamp called a double tube shape, which has a light-emitting tube 30 consisting of an outer tube 30a and an inner tube 30b, with one electrode 11 disposed on the inner wall surface of the inner tube 30b and the other electrode 12 disposed on the outer wall surface of the outer tube 30a, so that the pair of electrodes (11, 12) are opposite each other in the radial direction of the outer tube 30a corresponding to the light-emitting tube.

[0185] like Figure 13B As shown, the outer wall surface 30c and inner wall surface 30d of the outer tube 30a of the excimer lamp 2 in this embodiment are eccentric. Furthermore, in Figure 13B For illustrative purposes, the diagram illustrates the extreme eccentricity between the outer wall surface 30c and the inner wall surface 30d of the outer tube 30a.

[0186] like Figure 13BAs shown, the excimer lamp 2 of this embodiment is provided with a reflective member 31 disposed close to the +Z side of the outer tube 30a. The reflective member 31 has a reflective surface 31a that reflects ultraviolet light L1 generated in the space between the outer tube 30a and the inner tube 30b and traveling towards the +Z side towards the -Z side. The reflective member 31 is, for example, a component made by bending an aluminum plate or a PTFE plate. Alternatively, the reflective member 31 may also be provided for making Figure 10 The hole through which the limiting body 3 is inserted is shown.

[0187] In this shape, the wall surface on the -Z side of the outer tube 30a, where the reflective component 31 is not disposed, constitutes the light extraction part 14. Furthermore, the first part 14a in this structure is the wall surface located on the -Z side when viewed from the tube axis.

[0188] In this embodiment, the wall thickness of the outer tube 30a is varied by eccentrically positioning the outer wall surface 30c and the inner wall surface 30d, thus making the entire outer tube 30a a displacement region. However, the structure for varying the wall thickness is not limited to this. For example, the outer tube 30a can also be configured such that after the outer wall surface 30c and the inner wall surface 30d are fabricated in a concentric circle, the thickness is varied by grinding, cutting, deforming, or adding the same material to the outer wall surface 30c. Furthermore, in the seventh embodiment, in this displacement region, the wall is relatively thin, with the wall located on the +Z side relative to the tube axis Ax corresponding to the first region 10p, while the wall constituting the light extraction section 14 is relatively thick, with the wall located on the -Z side relative to the tube axis Ax corresponding to the second region 10q.

[0189] [Eighth Implementation Method]

[0190] The structure of the eighth embodiment of the light irradiation device of the present invention will be described focusing on the parts that are different from those of the first to seventh embodiments.

[0191] Figure 14 This is a schematic cross-sectional view of the excimer lamp 2 of the eighth embodiment viewed along the X direction. (Example) Figure 14 As shown, in the eighth embodiment, the light extraction section 14 is formed of a tube wall that is thinner than the tube wall to which the reflective film 13 is provided on the inner wall surface 10b and is formed to approximately the same thickness. That is, in this embodiment, the light extraction section 14 substantially corresponds to the thinnest second portion 14b of the tube wall. The difference between the thickness of the light extraction section 14 and the thickness of the tube wall other than the light extraction section 14 is preferably 3% or more, more preferably 5% or more, and even more preferably 10% or more relative to the thickness of the tube wall other than the light extraction section 14. Furthermore, in the eighth embodiment, the tube wall on the relatively thick +Z side corresponds to the second region 10q, and the tube wall on the relatively thin -Z side constituting the light extraction section 14 corresponds to the first region 10p.

[0192] Furthermore, in the eighth embodiment, the light-emitting tube 10 is configured such that the thickness of the light extraction portion 14 is 2.0 mm, and the thickness of the tube wall other than the light extraction portion 14 is 2.5 mm (i.e., the difference between the thickness of the light extraction portion 14 and the thickness of the tube wall other than the light extraction portion 14 is 20%). That is, in this embodiment, the light-emitting tube 10 is configured such that, when viewed from the tube axis Ax, the shape of the tube wall on the side of the light extraction portion 14 (-Z side) and the tube wall on the side opposite to the light extraction portion 14 (+Z side) are asymmetrical. The thickness of the tube wall of the light extraction portion 14 does not need to be substantially the same as the other wall surfaces, as long as it is made thinner overall.

[0193] Furthermore, such as Figure 14 As shown, at both ends of the light extraction section 14 in the Y direction, near the end 13a of the reflective film 13, a displacement region 40p (the part surrounded by the dotted line) is formed where the thickness of the tube wall of the light-emitting tube 10 gradually changes.

[0194] Figure 15 This is an enlarged cross-sectional view of the periphery of the limiting body 3 of the light irradiation device 1 when viewed along the X-direction. For example... Figure 15 As shown, the limiting body 3 protrudes close to the light-emitting tube 10. Furthermore, a roller 3a is provided at the top end, and the roller 3a is arranged close to the tube wall on the +Z side. The roller 3a generates… Figure 20 Under the strain conditions shown, contact with the light-emitting diode 10 limits further increase in strain and suppresses damage to the light-emitting diode 10.

[0195] In the light irradiation device 1 of this embodiment, multiple limiting bodies 3 may be provided in one light irradiation device 1, and the top end of the roller 3a may have two or more strands. According to this structure, the excimer lamp 2, which generates strain, is supported by multiple points. Therefore, compared with the case where it is supported by a single point, the force applied to the light-emitting tube 10 is dispersed in the light irradiation device 1 with this structure, thus suppressing the breakage of the light-emitting tube 10.

[0196] The excimer lamp 2 of the light irradiation device 1 with the above-described structure provides a higher irradiation dose of ultraviolet light L1, which can increase the heating rate of the light extraction section 14. That is, the light-emitting tube 10 with the above-described structure is a structure that achieves the above-described repair effect earlier after initial lighting in a part that is relatively prone to strain, thus further reducing the overall deformation of the light-emitting tube.

[0197] [Ninth Implementation Method]

[0198] The structure of the ninth embodiment of the light irradiation device of the present invention will be described focusing on the parts that differ from the first to eighth embodiments.

[0199] Figure 16This is a schematic cross-sectional view of the excimer lamp 2 of the ninth embodiment viewed along the X direction. (Example) Figure 16 As shown, the light extraction portion 14 of the excimer lamp 2 can also be formed such that, in the circumferential direction when observing the first cross-section, the area near the end 13a of the reflective film 13 is thinner than the central portion. That is, the second portion 14b can also be formed at both ends in the Y direction of the wall surface on the -Z side. Furthermore, as... Figure 16 As shown, a displacement region 40p is formed where the thickness of the tube wall of the light-emitting tube 10 gradually changes. Furthermore, in the ninth embodiment, similar to the eighth embodiment, the tube wall on the +Z side, which is relatively thick, corresponds to the second region 10q, and the tube wall on the -Z side, which constitutes the light extraction section 14, which is relatively thin, corresponds to the first region 10p.

[0200] In the circumferential direction when observing the first cross-section, the light-emitting tube 10 with the above-described structure can achieve the aforementioned repair effect earlier in areas where strong local stress is easily applied after initial illumination. Therefore, the load generated in this area of ​​the light-emitting tube 10 can be further reduced.

[0201] Figure 17 It is observed along the X direction and Figure 16 A schematic cross-sectional view of the excimer lamp 2 in different ninth embodiments. (e.g.) Figure 17 As shown, the light extraction section 14 of the excimer lamp 2 can also be formed such that, in the circumferential direction when observing the first cross-section, the central portion is thinner than the area near the end 13a of the reflective film 13. Furthermore, as... Figure 17 As shown, a displacement region 40p is formed in which the thickness of the tube wall of the light-emitting tube 10 gradually changes.

[0202] Regarding the tube wall of the light-emitting diode 10 corresponding to the light extraction section 14, when it is manufactured or processed such that the central portion of the reflective film 13 is thinner than the area near the end 13a, the amount of ultraviolet light L1 irradiated by the light-emitting diode 10 is greater, which can increase the heating rate of the central portion of the light extraction section 14. That is, the light-emitting diode 10 with the above-described structure can achieve the aforementioned repair effect earlier in the portion that is relatively prone to strain after initial lighting. Therefore, the overall strain of the light-emitting diode 10 can be further reduced.

[0203] Regarding the light extraction section 14, based on the thickness of the thickest part of the tube wall, the difference between the thickness of the thinnest part of the tube wall and the thickness of the thickest part of the tube wall is preferably 3% or more, more preferably 5% or more, and even more preferably 10% or more.

[0204] [Tenth Implementation Method]

[0205] The structure of the tenth embodiment of the light irradiation device of the present invention will be described focusing on the parts that are different from those of the first to ninth embodiments.

[0206] Figure 19A This is a schematic cross-sectional view of the excimer lamp 2 of the tenth embodiment when viewed along the Y direction. Figure 19B It is observed along the X direction. Figure 19A A cross-sectional view of the excimer lamp at time 2. Additionally, in Figure 19A In the illustration, for ease of showing the shape of the excimer lamp 2, the state with the reflective component 51 removed is shown. Figure 19A and Figure 19B As shown, the excimer lamp 2 can also be a type of lamp called a double tube shape, which has a light-emitting tube 50 consisting of an outer tube 50a and an inner tube 50b, with one electrode 11 disposed on the inner wall surface of the inner tube 50b and the other electrode 12 disposed on the outer wall surface of the outer tube 50a, so that the pair of electrodes (11, 12) are opposite each other in the radial direction of the outer tube 50a corresponding to the light-emitting tube.

[0207] like Figure 19B As shown, in this embodiment, the outer wall surface 50c and the inner wall surface 50d of the outer tube 50a of the excimer lamp 2 are eccentric. Furthermore, in Figure 19B For illustration, the diagram shows the extreme eccentricity between the outer wall surface 50c and the inner wall surface 50d of the outer tube 50a.

[0208] like Figure 19B As shown, the excimer lamp 2 of this embodiment is provided with a reflective member 51 disposed close to the +Z side of the outer tube 50a. The reflective member 51 has a reflective surface 51a, which reflects ultraviolet light L1 generated in the space between the outer tube 50a and the inner tube 50b and traveling towards the +Z side towards the -Z side. The reflective member 51 is, for example, a component made by bending an aluminum plate or a PTFE plate. Alternatively, the reflective member 51 may be provided for... Figure 15 The hole through which the limiting body 3 is inserted is shown.

[0209] In this shape, the wall surface on the -Z side of the outer tube 50a, where the thinnest part of the tube wall is not equipped with a reflective component 51, constitutes the light extraction part 14. Furthermore, the second part 14b in this structure is the wall surface located on the -Z side when viewed from the tube axis.

[0210] In this embodiment, the thickness of the tube wall is varied by eccentrically positioning the outer wall surface 50c of the outer tube 50a with the inner wall surface 50d. That is, the entire outer tube 50a becomes a displacement region. However, the structure for varying the tube wall thickness is not limited to this. For example, the outer tube 50a can also be configured such that after the outer wall surface 50c and the inner wall surface 50d are concentric circles, the thickness is varied by grinding, cutting, deforming, or adding the same material to the outer wall surface 50c. Furthermore, in the tenth embodiment, in this displacement region, the relatively thicker tube wall located on the +Z side relative to the tube axis Ax corresponds to the second region 10q, and the relatively thinner tube wall constituting the light extraction section 14 located on the -Z side relative to the tube axis Ax corresponds to the first region 10p.

[0211] [Other Implementation Methods]

[0212] Other implementation methods will be described below.

[0213] <1> In the above embodiments, a structure of a light-emitting tube 10 having a first cross-section that is rectangular is described. However, the shape of the first cross-section of the light-emitting tube 10 may not be rectangular. For example, it may be any structure such as a circle, an oblong shape, an ellipse, or a polygon.

[0214] <2> The structures of the light irradiation device 1 and the excimer lamp 2 described above are merely examples, and the present invention is not limited to the structures shown in the figures.

[0215] Explanation of icon numbers

[0216] 1: Light irradiation device; 2: Excimer lamp; 3: Restricted body; 3a: Roller; 4: Conveying mechanism; 10: Light-emitting diode (LED); 10a: Outer wall surface; 10b: Inner wall surface; 10c: Luminous space; 10d: Boundary; 10p: First area; 10q: Second region; 10r: Third region; 10s: Fourth region; 11, 12: Electrodes; 13: Reflective film; 13a: End; 14: Light extraction section; 14a: Part 1; 14b: Part Two; 20p: Displacement region; 30: Light-emitting diode; 30a: Outer tube; 30b: Inner tube; 30c: Outer wall surface; 30d: Inner wall surface; 31: Reflective component; 31a: Reflecting surface; 40p: Displacement region; 50: Light-emitting diode; 50a: Outer tube; 50b: Inner tube; 50c: outer wall surface; 50d: inner wall surface; 51: Reflective component; 51a: Reflecting surface; 100: Excimer lamp; 101: Light-emitting diode; 101a: Outer wall surface; 101b: Inner wall surface; 101c: Luminous space; 102: Electrode; 103: Reflective film; 104: Light exit surface; Ax: Tube shaft; G1: Luminescent gas; L1: Ultraviolet light; W1: The object being irradiated.

Claims

1. An excimer lamp, characterized by comprising: Possessing: a light emitting tube extending in a first direction, in a first cross section when cut in a plane orthogonal to the first direction, containing a first region and a second region whose tube wall is thicker than the first region, exhibiting light transmissivity to ultraviolet light; a pair of electrodes, in a radial direction of the light emitting tube, opposed across the tube wall of the light emitting tube; and a light extraction portion for extracting ultraviolet light generated inside the light emitting tube to the outside of the light emitting tube.

2. The excimer lamp according to claim 1, wherein the light emitting tube in the first cross section has a concavo-convex formed on an outer wall surface by the first region and the second region.

3. The excimer lamp according to claim 2, wherein the first cross section of the light emitting tube is rectangular in shape, and the light extraction portion is formed in at least one of the wall surfaces of the light emitting tube along different planes respectively.

4. The excimer lamp according to claim 3, wherein either of the first region and the second region is formed in the light extraction portion.

5. The excimer lamp according to claim 3, wherein a reflective film is formed in a wall surface of the light emitting tube different from the light extraction portion.

6. The excimer lamp according to claim 5, wherein when the first cross section is observed, the first region is formed in a central portion of the wall surface in which the light extraction portion is formed, and the second region is formed in a vicinity of a boundary between the reflective film and the light extraction portion.

7. The excimer lamp according to claim 5, wherein when the first cross section is observed, the second region is formed in a central portion of the wall surface in which the light extraction portion is formed, and the first region is formed in a vicinity of a boundary between the reflective film and the light extraction portion.

8. The excimer lamp according to claim 3, wherein when the first cross section is observed, a wall surface of the light emitting tube opposite to the light extraction portion contains a third region and a fourth region whose tube wall is thicker than the third region, and a concavo-convex formed by the third region and the fourth region is formed on an outer wall surface.

9. The excimer lamp according to claim 8, wherein when the first cross section is observed, in the wall surface of the light emitting tube opposite to the light extraction portion, the third region is formed in a central portion, and the fourth region is formed in both end portions.

10. The excimer lamp according to claim 8, wherein when the first cross section is observed, in the wall surface of the light emitting tube opposite to the light extraction portion, the fourth region is formed in a central portion, and the third region is formed in both end portions.

11. The excimer lamp according to claim 2, wherein when the first cross section is observed, the thickness of at least a portion of the tube wall of the light emitting tube gradually changes.

12. The excimer lamp according to claim 1, wherein the excimer lamp possesses a reflective member that reflects ultraviolet light traveling in a direction different from the light extraction portion to the side of the light extraction portion, The light emitting tube is formed to be asymmetric with respect to a tube axis by a shape of a tube wall on the light extraction portion side including the second region and a shape of a tube wall on a side opposite to the light extraction portion including the first region, The light extraction portion includes a first portion where a tube wall is thickest in a circumferential direction when the first cross section of the light emitting tube is observed.

13. The excimer lamp according to claim 12, wherein The first cross section of the light emitting tube is rectangular in shape, and the light extraction portion is formed in one of wall surfaces of the light emitting tube along different planes, respectively.

14. The excimer lamp according to claim 13, wherein The thickness of the wall surface of the light extraction portion is substantially the same.

15. The excimer lamp according to claim 13, wherein The reflection member is a reflection film formed on an inner wall surface of the light emitting tube.

16. The excimer lamp according to claim 15, wherein The light extraction portion is formed to be thicker in a circumferential direction when the first cross section is observed, in a vicinity of an end portion of the reflection film than in a central portion.

17. The excimer lamp according to claim 15, wherein The light extraction portion is formed to be thicker in a circumferential direction when the first cross section is observed, in a central portion than in a vicinity of an end portion of the reflection film.

18. The excimer lamp according to claim 12, wherein The first cross section of the light emitting tube is circular in shape.

19. The excimer lamp according to claim 1, wherein The excimer lamp is provided with a reflection member that reflects ultraviolet light traveling toward a direction different from the light extraction portion toward the light extraction portion side, The light emitting tube is formed to be asymmetric with respect to a tube axis by a shape of a tube wall on the light extraction portion side including the first region and a shape of a tube wall on a side opposite to the light extraction portion including the second region, The light extraction portion includes a second portion where a tube wall is thinnest in a circumferential direction when the first cross section of the light emitting tube is observed.

20. The excimer lamp according to claim 19, wherein The first cross section of the light emitting tube is rectangular in shape, and the light extraction portion is formed in one of wall surfaces of the light emitting tube along different planes, respectively.

21. The excimer lamp according to claim 20, wherein The thickness of the wall surface of the light extraction portion is substantially the same.

22. The excimer lamp according to claim 20, wherein The reflection member is a reflection film formed on an inner wall surface of the light emitting tube.

23. The excimer lamp according to claim 22, wherein The light extraction portion is formed to be thinner in a circumferential direction when the first cross section is observed, in a vicinity of an end portion of the reflection film than in a central portion.

24. The excimer lamp according to claim 22, wherein The light extraction portion is formed to be thinner in a circumferential direction when the first cross section is observed, in a central portion than in a vicinity of an end portion of the reflection film.

25. The excimer lamp according to claim 19, wherein The first cross section of the light emitting tube is circular in shape.

26. An optical irradiation device, characterized by comprising: provided with: The excimer lamp as claimed in any one of claims 1 to 25; and A restriction body protrudes toward a wall of the light emitting tube on a side opposite to the light extraction portion, and is disposed so that a tip end portion thereof is close to the wall.

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