Method for testing opening and closing response time of pneumatic valve for semiconductor

Abstract

The invention discloses a method for testing the opening and closing response time of a pneumatic valve for a semiconductor. The method comprises the following steps: S1, establishing a vacuum test environment and a detection system; s2, testing the detection system; s3, automatic detection parameters are set; s4, automatic detection is carried out, and a detection result is generated; by constructing a high-precision detection environment, fine measurement of the action time of the valve is realized; the actual working scene of the valve is restored under the high-vacuum condition, so that the authenticity of a test result is ensured; by developing an automatic cycle detection mode, high-frequency action test and control signal delay simulation are supported; and by designing a detection framework compatible with various valve types, the applicability of the system is improved.

Description

Technical Field

[0001] This invention belongs to the field of pneumatic valve performance testing technology, and more specifically, it is a method for testing the opening and closing response time of a semiconductor pneumatic valve. Background Technology

[0002] In semiconductor manufacturing, pneumatic valves, as crucial components for controlling gas and vacuum environments, require accurate testing of their opening and closing response times. Current industry methods for detecting pneumatic valve response times suffer from several shortcomings: traditional methods, such as PLC timing systems, rely on manual trigger signals, are affected by system scan cycles, making high-precision time measurement difficult, and manual operation easily introduces errors, failing to provide accurate timeline records for the test data; while optical detection methods attempt to measure valve displacement using laser probes, the optical path calibration process is complex, and under the influence of vibrations in actual production environments, test stability is difficult to guarantee, especially for types like diaphragm valves without visible moving parts, where testing is even more challenging. Furthermore, most existing tests are conducted under normal pressure, which differs from the high-vacuum conditions actually operating in semiconductor equipment, resulting in test results that do not accurately reflect the valve's performance in real-world environments. Simultaneously, the automation level of the detection systems is low, lacking automatic cyclic testing functions and the ability to simulate control signal delays, and unable to accurately record time points during the testing process, making it difficult to meet the testing requirements for high-frequency valve movements or interactions with other components in semiconductor processes. Summary of the Invention

[0003] Purpose of the invention: To overcome the shortcomings of existing technologies, this invention provides a method for testing the opening and closing response time of pneumatic valves for semiconductor applications. By constructing a high-precision testing environment, it achieves precise measurement of valve action time; by recreating the actual working scenario of the valve under high vacuum conditions, it ensures the authenticity of the test results; by developing an automated cyclic testing mode, it supports high-frequency action testing and control signal delay simulation; and by designing a testing architecture compatible with multiple valve types, it improves the applicability of the system.

[0004] Technical solution: To achieve the above objective, the present invention provides a method for testing the opening and closing response time of a pneumatic valve for semiconductor applications, comprising the following steps:

[0005] Step S1: Establish the vacuum testing environment and detection system;

[0006] Step S2: Test the detection system;

[0007] Step S3: Set the automated detection parameters;

[0008] Step S4: Perform automated detection and generate detection results.

[0009] Furthermore, step S1 includes:

[0010] Step S1.1: Place the valve to be tested in the vacuum testing chamber;

[0011] Step S1.2: Install a valve position sensor on the valve plate of the valve to be tested;

[0012] Step S1.3: Set up a signal acquisition device corresponding to the valve position sensor;

[0013] Step S1.4: Set up a solenoid valve corresponding to the valve under test, and connect the air inlet of the valve under test and the air outlet of the solenoid valve through an air pipeline;

[0014] Step S1.5: Set a relay corresponding to the solenoid valve, and electrically connect the input terminal of the solenoid valve and the output terminal of the relay in series with a wire, and connect the relay to the signal acquisition device;

[0015] Step S1.6: Set a relay delay device corresponding to the relay, and electrically connect the input terminal and the output terminal of the relay in series with a wire;

[0016] Step S1.7: Manually test the start button and automatically test the start button by connecting the wires in parallel;

[0017] Step S1.8: Adjust the vacuum level in the vacuum detection chamber.

[0018] Furthermore, step S2 includes:

[0019] Step S2.1: Preset the limit response time Δt0 for the valve under test to complete one full opening and closing;

[0020] Step S2.2: The operator triggers the manual detection start button;

[0021] Step S2.3: The relay delay device sends a trigger signal to the relay. The data acquisition unit starts timing the instant the relay receives the trigger signal.

[0022] Step S2.4: The relay controls the solenoid valve to change from the initial state to the connected state;

[0023] Step S2.5: Based on step S2.4, the solenoid valve controls the valve under test to change from the initial state to the fully open state;

[0024] Step S2.6: When the valve plate of the valve under test moves to the fully open position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as the timestamp T1;

[0025] Step S2.7: The relay delay sends a disconnect signal to the relay;

[0026] Step S2.8: The relay controls the solenoid valve to change from the connected state to the closed state;

[0027] Step S2.9: Based on step S2.8, the solenoid valve controls the valve under test to change from a fully open state to a fully closed state;

[0028] Step S2.10: When the valve plate of the valve under test moves to the fully closed position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as the timestamp T2;

[0029] Step S2.11: Calculate the actual response time ΔT of the valve under test for one complete opening and closing using T1 and T2;

[0030] Step S2.12: Determine whether the actual response ΔT is not greater than the limit response time Δt0. If yes, the system setup is complete, and ΔT is output. Otherwise, proceed to step S2.13.

[0031] Step S2.13: Record the signal waveform output by the valve position sensor during this test as the failure waveform and store it in the database. Then, repair the valve under test and replace the parts of the valve under test. Then, put the valve under test with the replaced parts back into the vacuum chamber and execute steps S2.2 to S2.12 again until the actual response ΔT is not greater than the limit response time Δt0, and output ΔT.

[0032] Furthermore, step S3 includes:

[0033] Step S3.1: Set the delay time T0 and the number of cycles N1 of the relay delay unit;

[0034] Step S3.2: Set the sampler sampling frequency S;

[0035] Step S3.3: Set the number of automatic detection cycles N2, where N1 = N2;

[0036] Step S3.4: Preset the standard response time Δt1 for the valve to be tested to complete one full opening and closing.

[0037] Furthermore, step S4 includes:

[0038] Step S4.1: The operator triggers the automatic detection start button;

[0039] Step S4.2: The relay delay device sends a trigger signal to the relay. The data acquisition unit starts timing the instant the relay receives the trigger signal.

[0040] Step S4.3: The relay controls the solenoid valve to change from the initial state to the connected state;

[0041] Step S4.4: Based on step S4.3, the solenoid valve controls the valve under test to change from the initial state to the fully open state;

[0042] Step S4.5: When the valve plate of the valve under test moves to the fully open position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as the timestamp T1;

[0043] Step S4.6: The relay delay sends a disconnect signal to the relay;

[0044] Step S4.7: The relay controls the solenoid valve to change from the connected state to the closed state;

[0045] Step S4.8: Based on step S4.7, the solenoid valve controls the valve under test to change from a fully open state to a fully closed state;

[0046] Step S4.9: When the valve plate of the valve under test moves to the fully closed position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as timestamp T2;

[0047] Step S4.10: Calculate the actual response time ΔT of the valve under test for one complete opening and closing using T1 and T2;

[0048] Step S4.11: Determine whether the actual response ΔT is not greater than the standard response time Δt1. If yes, proceed to the next test; otherwise, proceed to step S4.12.

[0049] Step S4.12: Record the signal waveform output by the valve position sensor during this test as the failure waveform and store it in the database. Then, repair the valve under test and replace the parts of the valve under test. Then, put the valve under test with the replaced parts back into the vacuum chamber for the next test.

[0050] Step S4.13: After completing the preset number of automatic detection cycles N2, process all ΔT values ​​generated in step S4.11, calculate and output the average value. and standard deviation .

[0051] Furthermore, the vacuum detection chamber is also equipped with a vacuum sensor, which can monitor the vacuum level inside the chamber in real time.

[0052] Furthermore, the valve position sensor is a contact-type micro switch.

[0053] Furthermore, the signal acquisition unit includes a signal amplification module, a filtering module, and a data processing unit. The signal amplification module can amplify the weak signal output by the valve position sensor, the filtering module can generate a filter based on the amplified signal, and the data processing unit can receive and calculate the amplified and filtered signal.

[0054] Beneficial Effects: Compared with existing technologies, the method for testing the opening and closing response time of pneumatic valves for semiconductors, as described in this invention, has the following beneficial effects: By simulating a high-vacuum environment, the test results more closely reflect the valve's working performance in actual semiconductor equipment; the automatic cyclic detection function supports multiple tests on the valve, facilitating statistical analysis of the valve's response time distribution, while the grouped cyclic method avoids damage to the valve caused by continuous testing; the application of timestamp technology provides a temporal basis for the data, aiding in fault analysis and tracing, and improving the accuracy and traceability of the test results. Furthermore, this method is compatible with various types of pneumatic valves, adapting to the testing needs of different valves in semiconductor manufacturing, and through failure waveform storage and analysis, it provides a reference for valve maintenance and fault early warning, helping to extend the valve's maintenance cycle and reduce unplanned equipment downtime. Attached Figure Description

[0055] Figure 1 This is a flowchart of the detection process of the present invention. Detailed Implementation

[0056] The invention will now be further described with reference to the accompanying drawings.

[0057] like Figure 1 As shown, a method for testing the opening and closing response time of a pneumatic valve for semiconductor applications includes the following steps:

[0058] Step S1: Establish the vacuum testing environment and detection system;

[0059] Step S2: Test the detection system;

[0060] Step S3: Set the automated detection parameters;

[0061] Step S4: Perform automated detection and generate detection results.

[0062] More specifically, step S1 includes:

[0063] Step S1.1: Place the valve to be tested in the vacuum testing chamber; the vacuum testing chamber is a sealed box made of high-strength, high-sealing aluminum alloy, and the vacuum testing chamber is equipped with multiple valve joints, and the types of valve joints are different. The valve to be tested is a pneumatic valve for semiconductor equipment, including diaphragm valves, gate valves, swing valves, angle valves, transmission valves, etc. The operator installs the valve to be tested on its corresponding valve joint according to the different valve types.

[0064] Step S1.2: Set a valve position sensor in the vacuum detection chamber corresponding to the valve to be tested; the valve position sensor is a contact-type micro switch, and the valve position sensor is set at the end of the movable end of the valve plate of the valve to be tested; here, the movable end of the valve plate refers to the end that is in contact with the lower wall of the valve body in the closed state; the use of a contact-type micro switch can ensure that the valve position sensor only emits a signal when the valve plate of the valve to be tested is in contact with the upper or lower wall of the valve body, and since this signal is generated by the valve body contacting and squeezing the contact-type micro switch during the movement of the valve plate, the influence of the unavoidable vibration generated by the valve body during the opening or closing process on the detection result can be completely avoided.

[0065] Step S1.3: Set up a signal acquisition device corresponding to the valve position sensor; the signal acquisition device is a high-speed data acquisition card with a sampling rate ≥100kHz, capable of recording the moment of position sensor signal transition; the signal acquisition device includes a signal amplification module, a filtering module, a timestamp module, and a data processing unit; the signal amplification module amplifies the weak voltage signal output by the valve position sensor through an amplification circuit, and the amplification factor can be adjusted according to the output characteristics of the valve position sensor to ensure that the amplified signal strength meets the requirements of subsequent processing; the filtering module processes the amplified signal, effectively filtering out high-frequency noise and low-frequency drift, retaining the effective signal components related to valve position changes in the amplified signal, making the signal waveform smoother and more stable; the data processing unit can acquire and process the amplified and filtered signal in real time, converting the analog signal into a digital signal; the timestamp module provides a complete timeline, thereby providing a time basis for each acquired data, facilitating subsequent fault analysis and fault location.

[0066] Furthermore, before the test begins, the time interval between two adjacent test data points during normal testing can be used as a reference value. For example, during normal testing, if the data acquisition device collects the first signal A at 3 seconds after the test begins and the second signal B at 9 seconds, then the interval between signal A and signal B is 6 seconds. If the valve under test is qualified, the time point at which the data acquisition device collects the third signal C should be 15 seconds on the timeline. If the data acquisition device collects the third signal C after 15 seconds, the valve under test is directly determined to be unqualified, and the test is stopped. If the data acquisition device has already collected the third signal C before 15 seconds, the test continues.

[0067] The reason for this is that the valve's response time can be slightly less than the set standard time, but it must never exceed the set time. Furthermore, after the valve under test completes the entire testing process, the quality of the valve under test will be further determined based on the data. If the time interval between several adjacent test data points differs too much, the valve under test will also be deemed unqualified.

[0068] Step S1.4: Install a solenoid valve corresponding to the valve under test, and connect the gas inlet of the valve under test and the gas outlet of the solenoid valve through a gas pipeline; the gas pipeline uses PU gas tubing, and the pipeline connection uses a sealed threaded connection to ensure the airtightness and reliability of the gas pipeline and avoid gas leakage from affecting the test results; the solenoid valve is selected as a high-response pneumatic valve with a response time ≤5ms, which can quickly switch the on / off state according to the control signal, providing a stable gas source control for the valve under test, thereby reducing system errors;

[0069] Step S1.5: Set a relay corresponding to the solenoid valve, and electrically connect the input terminal of the solenoid valve and the output terminal of the relay in series with a wire; and the relay is connected to the signal acquisition device.

[0070] Step S1.6: Set a relay delay device corresponding to the relay, and electrically connect the input terminal and the output terminal of the relay in series with a wire; the delay parameter setting range of the relay delay device is 0.001s~10.000s, in 0.001s increments;

[0071] Step S1.7: Connect the manual test start button and the automatic test start button in parallel via wires; both the manual test start button and the automatic test start button are located on the operation panel of the test system, and the operator can select manual or automatic test mode according to the test requirements. The manual test mode is used for system debugging and initial testing, and the automatic test mode is used for batch testing and automated testing;

[0072] Step S1.8: Adjust the vacuum level in the vacuum detection chamber; the vacuum detection chamber is also equipped with a vacuum sensor, which monitors the vacuum level in the chamber in real time and transmits the data to the detection system. In addition, the vacuum detection chamber is also equipped with a vacuum generator. When the vacuum level fluctuates, the vacuum generator can adjust the vacuum level in the vacuum detection chamber according to the detection results of the vacuum sensor to ensure that the vacuum level remains stable at the preset value during the test.

[0073] More specifically, step S2 includes:

[0074] Step S2.1: Preset the limit response time Δt0 for the valve under test to complete one full opening and closing; the limit response time Δt0 is determined according to the basic requirements of the semiconductor manufacturing process for pneumatic valves and the valve design parameters, and is used to verify the reliability of the valve under test under the limit delay parameter.

[0075] Step S2.2: The operator triggers the manual test start button to enter the manual test process. The manual test process is generally used for the inspection process after the testing device is overhauled, the debugging process when the testing device is installed, and the testing process of the first valve to be tested among the new model of valves to be tested.

[0076] Step S2.3: The relay delay device sends a trigger signal to the relay; the data acquisition unit starts timing the instant the relay receives the trigger signal;

[0077] Step S2.4: After receiving the trigger signal, the relay controls the solenoid valve to change from the initial state to the connected state; at this time, the solenoid valve opens, and the air source supplies air to the valve under test through the air pipeline;

[0078] Step S2.5: Based on step S2.4, the moving parts of the valve under test begin to move under the action of gas pressure until they reach the fully open position; that is, the solenoid valve controls the valve under test to change from the initial state to the fully open state.

[0079] Step S2.6: When the valve plate of the valve under test moves to the fully open position, the valve position sensor sends a signal, the signal collector collects the signal sent by the valve position sensor, and records this moment as the timestamp T1.

[0080] Step S2.7: The relay delay device sends a disconnect signal to the relay;

[0081] Step S2.8: The relay controls the solenoid valve to change from the connected state to the closed state; cut off the air supply path to the valve under test.

[0082] Step S2.9: Based on step S2.8, the solenoid valve controls the valve under test to change from a fully open state to a fully closed state; since the gas pressure effect on the moving part of the valve under test is completely eliminated when the solenoid valve is closed, the moving part of the valve under test moves in the opposite direction under the action of the return spring or its own structure until it returns to the initial closed position.

[0083] Step S2.10: When the valve plate of the valve under test moves to the fully closed position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as the timestamp T2;

[0084] Step S2.11: The signal acquisition device acquires the data T1 output in step S2.6 and the data T2 output in step S2.10. To further enhance the accuracy of the data, a synchronization clock module can be integrated into the signal acquisition device. This not only improves the accuracy and convenience of subsequent data processing, but also enables data traceability, facilitating fault point tracing and analysis when data anomalies occur.

[0085] Step S2.12: Calculate the actual response time ΔT of the valve under test for one complete opening and closing cycle using T1 and T2; ;

[0086] Step S2.13: Determine whether the actual response ΔT is not greater than the limit response time Δt0. If yes, the system setup is complete, and ΔT is output. Otherwise, proceed to step S2.14.

[0087] Step S2.14: Record the signal waveform output by the valve position sensor during this test as the failure waveform and store it in the database. Then, repair the valve under test and replace the parts of the valve under test. Then, put the valve under test with the replaced parts back into the vacuum chamber and execute steps S2.2 to S2.12 again until the actual response ΔT is not greater than the limit response time Δt0, and output ΔT.

[0088] If, after executing steps S2.2 to S2.13 again, the test result is still that the actual response ΔT is greater than the limit response time Δt0, then other components are replaced again, and steps S2.2 to S2.13 are executed a third time until the actual response ΔT is not greater than the limit response time Δt0. When the test is passed, the last replaced component is the damaged or unqualified component, and the corresponding failure waveform is added and stored in the database for subsequent maintenance work during actual use.

[0089] More specifically, T1, T2 and ΔT are explained here in a hypothetical manner. First, it needs to be clarified that the definition of a timestamp is the total number of seconds from one moment to another. Of course, seconds are just a unit of time, and it is not that only seconds can be used as the unit of time nodes in a timestamp.

[0090] Assuming this is the first time the detection system is performing a detection operation, the timestamp module in the data collector will not have any recorded data at this time, and the unit of time node in the timestamp will be s (seconds).

[0091] When the relay delay sends a trigger signal to the relay, and the time stamp module of the data collector starts timing the instant the relay receives the trigger signal, this instant is the initial time, and the initial time is the time node of 0 seconds.

[0092] As the detection process progresses, when the valve plate of the valve under test moves from the initial position to the fully open position, the valve position sensor sends a signal. The signal acquisition unit collects the signal sent by the valve position sensor and records this moment as a timestamp T1. T1 represents all the seconds from the initial moment to this moment. If we assume that T1 is 3s, then T1 includes four time nodes: 0s, 1s, 2s, and 3s. This means that in the first detection process of the detection system, the total time required for the valve plate of the valve under test to move from the initial position to the fully open position is 3s.

[0093] When the valve plate of the valve under test moves to the fully closed position, the valve position sensor sends a signal. The signal acquisition unit collects the signal sent by the valve position sensor and records this moment as timestamp T2. T2 represents the total number of seconds from the initial moment to this moment. If we assume T1 is 9s, then T2 includes ten time nodes: 0s, 1s, 2s, 3s, 4s, 5s, 6s, 7s, 8s, and 9s. This means that in the first detection process of the detection system, the total time required for the valve plate of the valve under test to move from the initial position to the fully open position and then to the fully closed position is 9s. However, it should be noted that the ten time nodes of T2 include four time nodes of T1. That is to say, T2 can be regarded as a set of several time nodes, while T1 can be regarded as a proper subset of T2.

[0094] Since T1 corresponds to the fully open state of the valve under test, and T2 corresponds to the fully open state of the valve under test, the time required for the valve under test to close once (i.e., the valve plate of the valve under test moves from the fully open position to the fully closed position) can be represented by the number of time nodes in the complement set of set T2 relative to set T1; that is, the ten time nodes of T2 minus the four time nodes of T1 will leave six time nodes, which means that the total time ΔT required for the valve plate of the valve under test to move from the fully open position to the fully closed position (i.e., one complete opening and closing) during the first detection process of the detection system is 6s.

[0095] The advantages of this method are that it eliminates the need for the valve plate of the valve under test to be in a fully open or fully closed position before the test begins, reducing the difficulty of testing. More importantly, it can largely avoid unavoidable errors caused by the structure of the valve under test, ensuring the accuracy of the test results. In addition, this method facilitates the establishment of databases, the accuracy of product sampling and re-inspection, and product traceability.

[0096] More specifically, step S3 includes:

[0097] Step S3.1: Set the delay time T0 and the number of cycles N1 of the relay delay unit;

[0098] Step S3.2: Set the sampler sampling frequency S; the selection of the sampling frequency S is determined based on the valve's opening and closing speed and the required testing accuracy; for valves with faster opening and closing speeds, a higher sampling frequency is used; for valves with slower opening and closing speeds, the sampling frequency can be appropriately reduced, but not lower than the minimum frequency that can accurately reflect changes in valve position.

[0099] Step S3.3: Set the number of automatic detection cycles N2; the value range of N2 is 0-99999, and N2≤N1 is set to ensure that a stable current is provided to the solenoid valve in each detection process, thereby providing a stable airflow to the valve under test; if the number of cycles is small, it is preferable that N2=N1; if the number of cycles is large, the entire number of cycles can be divided into several cycle groups, and the cycle test in each cycle group is set to N2, in which case N2<N1 is set; after each cycle group is completed, the detection system will enter a short standby state, and then enter the detection work of the next cycle group, thereby avoiding damage to the valve under test caused by continuous large-scale detection.

[0100] Step S3.4; preset the standard response time Δt1 for the valve to be tested to complete one opening and closing; the standard response time Δt1 is determined according to the requirements of the semiconductor manufacturing process for the valve.

[0101] More specifically, step S4 includes:

[0102] Step S4.1: The operator triggers the automatic detection start button to enter the automatic detection process;

[0103] Step S4.2: The relay delay device sends a trigger signal to the relay; the data acquisition unit starts timing the instant the relay receives the trigger signal;

[0104] Step S4.3: After receiving the trigger signal, the relay controls the solenoid valve to change from the initial state to the connected state; at this time, the solenoid valve opens, and the air source supplies air to the valve under test through the air pipeline;

[0105] Step S4.4: Based on step S4.3, the moving parts of the valve under test begin to move under the action of gas pressure until they reach the fully open position; that is, the solenoid valve controls the valve under test to change from the initial state to the fully open state.

[0106] Step S4.5: When the valve plate of the valve under test moves to the fully open position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as the timestamp T1;

[0107] Step S4.6: The relay delay device sends a disconnect signal to the relay;

[0108] Step S4.7: The relay controls the solenoid valve to change from the connected state to the closed state; cut off the air supply path to the valve under test.

[0109] Step S4.8: Based on step S4.7, the solenoid valve controls the valve under test to change from a fully open state to a fully closed state; since the gas pressure effect on the moving part of the valve under test is completely eliminated when the solenoid valve is closed, the moving part of the valve under test moves in the opposite direction under the action of the return spring or its own structure until it returns to the initial closed position.

[0110] Step S4.9: When the valve plate of the valve under test moves to the fully closed position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as timestamp T2;

[0111] Step S4.10: Calculate the actual response time ΔT of the valve under test for one complete opening and closing using T1 and T2; where ΔT = |T2 - T1|.

[0112] Step S4.11: Determine whether the actual response ΔT is not greater than the standard response time Δt1. If yes, proceed to the next test; otherwise, proceed to step S4.12.

[0113] Step S4.12: When the detection system detects that the actual response time ΔT exceeds the standard response time Δt1, it automatically triggers a shutdown alarm and cuts off the solenoid valve air supply circuit. The signal waveform output by the valve position sensor during this detection process is recorded as a failure waveform and stored in the database, recording relevant detection parameters and time information. Subsequently, the staff repairs the valve under test and replaces its parts. Then, the valve under test with the replaced parts is put back into the vacuum chamber for the next test.

[0114] If, after replacing the parts, the test result still shows that the actual response ΔT is greater than the standard response time Δt1, then other parts are replaced again, and a new test is performed until the actual response ΔT is no greater than the standard response time Δt1. Once the test is passed, the last replaced part is considered the damaged or unqualified part, and the corresponding failure waveform is added to the database for easy maintenance during subsequent use.

[0115] Step S4.13: After completing the preset number of automatic detection cycles N2, process all ΔT values ​​generated in step S4.11, calculate and output the average value. and standard deviation ,average value It reflects the average opening and closing response time of the valve in multiple tests; standard deviation This is used to measure the dispersion of data; the smaller the standard deviation, the more stable the valve's opening and closing response time. Additionally, the coefficient of variation (Cv) can be calculated simultaneously as needed. The coefficient of variation can eliminate the influence of the mean on the degree of dispersion, and more objectively reflect the fluctuation of the data; finally, the mean... Standard deviation The raw data of the test results, including the coefficient of variation (Cv) and all test results, are organized to generate and output a test report.

[0116] It is important to emphasize that if the actual response time ΔT of the valve under test is not greater than the standard response time Δt1 throughout the entire process from the start of the test to the completion of the test, the data acquisition unit will not interrupt the timing after starting the timing in step S4.2. However, if the actual response time ΔT of the valve under test is greater than the standard response time Δt1 in any of the N2 automatic test cycles from the start of the test to the completion of the test, the data acquisition unit needs to pause the timing after the test system is shut down, and restart the timing in step S4.2 during the first test process after the operator puts the valve under test with the replaced parts back into the vacuum chamber.

[0117] The above are the preferred embodiments described in this invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this invention, and these improvements and modifications should also be considered within the scope of protection of this invention.

Claims

1. A method for testing the opening and closing response time of a pneumatic valve for semiconductor applications, characterized in that: Includes the following steps: Step S1: Establish the vacuum testing environment and detection system; Step S2: Test the detection system; Step S3: Set the automated detection parameters; Step S4: Perform automated detection and generate detection results.

2. The method for testing the opening and closing response time of a pneumatic valve for semiconductors according to claim 1, characterized in that: Step S1 includes: Step S1.1: Place the valve to be tested in the vacuum testing chamber; Step S1.2: Install a valve position sensor on the valve plate of the valve to be tested; Step S1.3: Set up a signal acquisition device corresponding to the valve position sensor; Step S1.4: Set up a solenoid valve corresponding to the valve under test, and connect the air inlet of the valve under test and the air outlet of the solenoid valve through an air pipeline; Step S1.5: Set a relay corresponding to the solenoid valve, and electrically connect the input terminal of the solenoid valve and the output terminal of the relay in series with a wire, and connect the relay to the signal acquisition device; Step S1.6: Set a relay delay device corresponding to the relay, and electrically connect the input terminal and the output terminal of the relay in series with a wire; Step S1.7: Manually test the start button and automatically test the start button by connecting the wires in parallel; Step S1.8: Adjust the vacuum level in the vacuum detection chamber.

3. The method for testing the opening and closing response time of a pneumatic valve for semiconductors according to claim 1, characterized in that: Step S2 includes: Step S2.1: Preset the limit response time Δt0 for the valve under test to complete one full opening and closing; Step S2.2: The operator triggers the manual detection start button; Step S2.3: The relay delay device sends a trigger signal to the relay. The data acquisition unit starts timing the instant the relay receives the trigger signal. Step S2.4: The relay controls the solenoid valve to change from the initial state to the connected state; Step S2.5: Based on step S2.4, the solenoid valve controls the valve under test to change from the initial state to the fully open state; Step S2.6: When the valve plate of the valve under test moves to the fully open position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as the timestamp T1; Step S2.7: The relay delay sends a disconnect signal to the relay; Step S2.8: The relay controls the solenoid valve to change from the connected state to the closed state; Step S2.9: Based on step S2.8, the solenoid valve controls the valve under test to change from a fully open state to a fully closed state; Step S2.10: When the valve plate of the valve under test moves to the fully closed position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as the timestamp T2; Step S2.11: Calculate the actual response time ΔT of the valve under test for one complete opening and closing using T1 and T2; Step S2.12: Determine whether the actual response ΔT is not greater than the limit response time Δt0. If yes, the system setup is complete, and ΔT is output. Otherwise, proceed to step S2.

13. Step S2.13: Record the signal waveform output by the valve position sensor during this test as the failure waveform and store it in the database. Then, repair the valve under test and replace the parts of the valve under test. Then, put the valve under test with the replaced parts back into the vacuum chamber and execute steps S2.2 to S2.12 again until the actual response ΔT is not greater than the limit response time Δt0, and output ΔT.

4. The method for testing the opening and closing response time of a pneumatic valve for semiconductors according to claim 1, characterized in that: Step S3 includes: Step S3.1: Set the delay time T0 and the number of cycles N1 of the relay delay unit; Step S3.2: Set the sampler sampling frequency S; Step S3.3: Set the number of automatic detection cycles N2, where N1 = N2; Step S3.4: Preset the standard response time Δt1 for the valve to be tested to complete one full opening and closing.

5. The method for testing the opening and closing response time of a pneumatic valve for semiconductors according to claim 1, characterized in that: Step S4 includes: Step S4.1: The operator triggers the automatic detection start button; Step S4.2: The relay delay device sends a trigger signal to the relay. The data acquisition unit starts timing the instant the relay receives the trigger signal. Step S4.3: The relay controls the solenoid valve to change from the initial state to the connected state; Step S4.4: Based on step S4.3, the solenoid valve controls the valve under test to change from the initial state to the fully open state; Step S4.5: When the valve plate of the valve under test moves to the fully open position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as the timestamp T1; Step S4.6: The relay delay sends a disconnect signal to the relay; Step S4.7: The relay controls the solenoid valve to change from the connected state to the closed state; Step S4.8: Based on step S4.7, the solenoid valve controls the valve under test to change from a fully open state to a fully closed state; Step S4.9: When the valve plate of the valve under test moves to the fully closed position, the valve position sensor sends a signal, the signal acquisition device collects the signal sent by the valve position sensor, and records this moment as timestamp T2; Step S4.10: Calculate the actual response time ΔT of the valve under test for one complete opening and closing using T1 and T2; Step S4.11: Determine whether the actual response ΔT is not greater than the standard response time Δt1. If yes, proceed to the next test; otherwise, proceed to step S4.

12. Step S4.12: Record the signal waveform output by the valve position sensor during this test as the failure waveform and store it in the database. Then, repair the valve under test and replace the parts of the valve under test. Then, put the valve under test with the replaced parts back into the vacuum chamber for the next test. Step S4.13: After completing the preset number of automatic detection cycles N2, process all ΔT values ​​generated in step S4.11, calculate and output the average value. and standard deviation .

6. The method for testing the opening and closing response time of a pneumatic valve for semiconductors according to claim 2, characterized in that: The vacuum detection chamber is also equipped with a vacuum sensor, which can monitor the vacuum level inside the chamber in real time.

7. The method for testing the opening and closing response time of a pneumatic valve for semiconductors according to claim 2, characterized in that: The valve position sensor is a contact-type micro switch.

8. The method for testing the opening and closing response time of a pneumatic valve for semiconductors according to claim 2, characterized in that: The signal acquisition unit includes a signal amplification module, a filtering module, and a data processing unit. The signal amplification module can amplify the weak signal output by the valve position sensor. The filtering module can generate a filter based on the amplified signal. The data processing unit can receive and calculate the amplified and filtered signal.

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