Method, system and interface for configurable semiconductor serial production line control
By using dynamic configuration files and state transition mechanisms, the flexibility issue of equipment combination in semiconductor production line control is solved, enabling efficient and flexible operation of the production line and improving equipment utilization and production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 上海朋熙半导体股份有限公司
- Filing Date
- 2026-01-22
- Publication Date
- 2026-05-29
AI Technical Summary
Existing semiconductor production line control schemes lack flexibility, resulting in low equipment utilization and low production efficiency, and are unable to dynamically configure production line equipment combinations without modifying program code.
By dynamically defining device sequences, order, activation status, and roles through loading configuration files, listening for production events of the starting device, sending control commands only to activated devices, and monitoring product flow through a dynamic state transition mechanism, the logical flow of the production line is decoupled from its physical connections.
It improves production flexibility and equipment utilization, reduces development and maintenance costs, ensures production continuity and efficiency, and enhances the system's adaptability and flexibility.
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Figure CN121559998B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of advanced semiconductor packaging technology, and in particular relates to a method, system and interface for controlling a configurable semiconductor serial production line. Background Technology
[0002] In the field of advanced semiconductor packaging and surface mount technology (SMT), production lines typically consist of multiple devices (such as loaders, dispensing machines, pick-and-place machines, reflow soldering machines, inspection machines, and unloaders) connected in series via conveyors or robotic arms to form a complete automated production line. Traditional Equipment Automation Program (EAP) control schemes treat the entire production line as an indivisible whole, employing a rigid control model: products must flow from the starting device through all devices to the ending device to complete a work order report. This "all or nothing" model lacks flexibility. When some devices in the production line require maintenance, process debugging, or only need to execute a specific process, the entire production line must be shut down, making it impossible to utilize available equipment individually, severely impacting equipment utilization and production scheduling flexibility. Existing solutions, such as splitting EAP into multiple smaller EAPs and synchronizing their status through custom communication, or adapting to different device combinations by modifying the source code, all suffer from problems such as complex implementation, fragile synchronization logic, large development workload, high maintenance costs, and inability to quickly switch over. Therefore, the main problem with existing technologies is that they cannot dynamically and flexibly configure production line equipment combinations without modifying program code, resulting in low production flexibility and efficiency. Summary of the Invention
[0003] The technical problem this invention aims to solve is to address the shortcomings of the prior art by providing a method, system, interface, and medium for configurable semiconductor serial production line control. This effectively solves the problems of low equipment utilization and lack of flexibility caused by rigid control in traditional production lines. Specifically, by loading configuration files to dynamically define device sequences, order, activation status, and roles, the logical flow and physical connections are decoupled, allowing a single EAP program to adapt to various device combinations. By listening to the production events of the starting device and sending control commands only to the activated device, production is ensured to run only on the activated device, avoiding interference from inactive devices. Combined with a dynamic state transition mechanism, product flow is monitored and automatically transitions to the activated device, ensuring seamless flow. This improves production flexibility, continuity, and efficiency while reducing development and maintenance costs.
[0004] The first aspect of this invention discloses a method for controlling a configurable semiconductor serial production line, comprising the following steps:
[0005] The processor loads the configuration file from the storage device and defines the sequence of devices participating in this production on the production line, the order of the devices in the sequence, the activation status of each device, and the role of each device, wherein the role is a starting device, an ending device, or an intermediate processing device.
[0006] The production event of the starting device in the monitoring device sequence includes a workpiece arrival signal;
[0007] In response to a detected production event from the starting device, a job information request is sent to the manufacturing execution system, and an inbound operation is performed to initiate the production operation.
[0008] The manufacturing execution system sends production control commands to all enabled devices in the equipment sequence, the production control commands including start commands and recipe parameters.
[0009] For devices that are not enabled in the device sequence, skip the production events for that device node in the device sequence;
[0010] Listen for the production completion event of the equipment in the equipment sequence, and in response to the production completion event, send an outgoing request to the manufacturing execution system to end the production operation on the current equipment sequence;
[0011] The process includes a dynamic state transition step after sending production control instructions: the flow status of products in the equipment sequence is monitored by a state machine. When a product flows out of the equipment, the activation status of the subsequent equipment is checked. If the subsequent equipment is not activated, the state is automatically transitioned to the next activated equipment and the system waits for the product to flow in. The state transition is based on the order of the configuration file and the activation status definition.
[0012] The above method, before loading the configuration file, further includes the step of generating the configuration file using a graphical configuration method, wherein the graphical configuration method includes:
[0013] The graphical user interface includes an equipment library panel, a canvas area, and a configuration generation area, wherein the equipment library panel displays icons of all available equipment on the production line.
[0014] Drag and drop device icons from the device library onto the canvas area to define the order of the device sequence and the role of each device;
[0015] In the configuration generation area, a configuration file is automatically generated based on the device sequence defined on the canvas area. The configuration file includes device identifier, communication address, port number, enable status, and role fields.
[0016] The above method involves monitoring production events and sending production control commands through a unified device communication management module, which establishes and maintains communication connections with all physical devices on the production line.
[0017] The operation of the unified device communication management module includes:
[0018] The SECS / GEM protocol is used to establish a connection with each physical device and maintain a device connection pool that stores the communication status and parameters of each device.
[0019] It provides a unified interface for receiving instruction requests from the manufacturing execution system and routing production control instructions to designated enabled devices, while shielding the communication differences between underlying devices.
[0020] In the above method, the dynamic state transition step is implemented through a dynamic process executor, which is configured as follows:
[0021] Based on the device sequence and activation status parsed from the configuration file, a control logic sequence is dynamically generated.
[0022] When monitoring product flow, when a product flows out of the current device, the activation status of the subsequent device is checked: if the subsequent device is activated, the system waits for the product to flow in and triggers the corresponding production instruction; if the subsequent device is not activated, the system skips the device, jumps directly to the next activated device, and updates the status flag of the state machine.
[0023] The state transition logic is based on a predefined state machine template, which includes event handling rules and state transition conditions.
[0024] The above method, after sending a job information request to the manufacturing execution system, also includes a parameter verification step: verifying whether the recipe parameters and equipment control status of all enabled equipment in the equipment sequence meet preset conditions;
[0025] The parameter verification step includes:
[0026] Check whether the recipe parameters for each activated device match the job information issued by the Manufacturing Execution System;
[0027] Verify that the device control status is in a ready state;
[0028] If the verification fails, the sending of production control commands will be suspended, and an alarm message will be generated to notify the operator.
[0029] The above method skips the production events of that device node in the device sequence, including executing operation A and / or executing operation B.
[0030] Operation A: Ignore production events for the inactive device;
[0031] Operation B: Send a control command to the device in the disabled state to transmit the workpiece through;
[0032] For operation A: When a production event is generated by a device in an inactive state, the unified device communication management module ignores the event and does not perform any processing or response.
[0033] For Operation B: When a product flows through an inactive device, send a pass-through command to the device to allow the workpiece to pass directly without triggering a processing operation, while keeping the device communication connection active.
[0034] In the above method, the configuration file adopts XML or JSON format, wherein the definition of the device sequence includes:
[0035] The device identifier field is used to uniquely identify each physical device;
[0036] The sequence field is used to define the order of devices in the sequence;
[0037] Enable the status field, which is a boolean flag indicating whether the device is participating in this production run;
[0038] The role field is used to specify whether the device is a starting device, an ending device, or an intermediate processing device.
[0039] A second aspect of the present invention discloses a system for configurable semiconductor serial production line control, comprising:
[0040] The configuration file loading module is configured to load the configuration file from the storage device through the processor and define the sequence of equipment participating in this production on the production line, the order of the equipment in the sequence, the activation status of each equipment, and the role of each equipment, wherein the role is the starting equipment, the ending equipment, or the intermediate processing equipment.
[0041] The event listening module is configured to listen for production events of the starting device in the device sequence, the production events including workpiece arrival signals;
[0042] The job management module is configured to respond to production events detected by the starting equipment by sending job information requests to the manufacturing execution system and performing an accounting operation to carry out production operations.
[0043] The instruction distribution module is configured to send production control instructions to all enabled devices in the equipment sequence through the manufacturing execution system. The production control instructions include start commands and recipe parameters.
[0044] The device processing module is configured to skip the production events of a device node in the device sequence if the device is not in an enabled state. Skipping the production events of the device node includes performing operation A and / or performing operation B.
[0045] Operation A includes: ignoring production events of the inactive device;
[0046] Operation B includes: sending a control command to the device in the inactive state, instructing it to transmit the workpiece through;
[0047] The completion processing module is configured to listen for the production completion event of the device in the device sequence, and in response to the production completion event, send an invoice request to the manufacturing execution system to end the production operation on the current device sequence;
[0048] The state transition control module is configured to monitor the flow status of products in the equipment sequence through a state machine after sending production control instructions. When a product flows out of the equipment, it checks the activation status of the subsequent equipment. If the subsequent equipment is not activated, it automatically transitions to the next activated equipment and waits for the product to flow in. The state transition is based on the order and activation status definition in the configuration file.
[0049] A third aspect of the present invention discloses a graphical user interface (GUI) displayed on a display device for configurable semiconductor serial production line control, the GUI comprising:
[0050] The equipment library panel displays icons of all available physical equipment on the production line, which correspond to the actual equipment on the production line.
[0051] The canvas area interacts with the device library panel and is configured to allow users to drag and drop selected device icons from the device library panel to the canvas area to define the order of the device working sequence and the role of each device, wherein the role includes a starting device, an ending device, or an intermediate processing device.
[0052] A configuration generation area is connected to the canvas area and configured to automatically generate the configuration file described in the first aspect embodiment or the second aspect embodiment based on the device working sequence defined on the canvas area. The configuration file includes device identifier, device sequence, role field and enable status field, which are used for loading and execution by the configurable semiconductor serial production line control system.
[0053] The fourth aspect of the present invention discloses a computer-readable storage medium having a computer program stored thereon, the computer program being executed by a computer to perform the methods provided by the embodiments of the first aspect and / or any possible embodiments in combination with the embodiments of the first aspect.
[0054] Compared with existing technologies, this invention has the following advantages: Firstly, by dynamically defining device sequences, order, activation status, and roles through a processor-loaded configuration file, it decouples the production line's logical flow from its physical connections. This allows a single EAP program to adapt to various device combinations, responding quickly to engineering debugging, equipment maintenance, or special process requirements without modifying the program code, thus significantly improving production flexibility and resource utilization efficiency. Secondly, by monitoring production events of the starting device and sending control commands only to devices in the activated state, it ensures that the production process operates only on activated devices, avoiding interference from inactive devices. This allows other devices to continue operating even when some are shut down, overcoming the limitations of the traditional "all or nothing" model. Thirdly, the dynamic state transition mechanism monitors product flow through a state machine, automatically verifying the activation status of subsequent devices and transitioning to the next activated device. This ensures seamless product flow in the sequence, enhances system adaptability and continuity, and reduces the risk of production interruptions. These features collectively reduce development and maintenance costs and improve the flexibility of production scheduling and operational efficiency.
[0055] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description
[0056] Figure 1 This is a flowchart of the method in Embodiment 1 of the present invention.
[0057] Figure 2 This is a system data flow diagram of Embodiment 2 of the present invention. Detailed Implementation
[0058] Example 1
[0059] like Figure 1 As shown, a method for controlling a configurable semiconductor serial production line includes the following steps:
[0060] Load configuration file and define device sequence: Load configuration file from storage device via processor and define the sequence of devices participating in this production line, the order of devices in the device sequence, the activation status of each device, and the role of each device, where the role is start device, end device, or intermediate processing device;
[0061] Listen for production events of the starting device: Listen for production events of the starting device in the device sequence, including workpiece arrival signals;
[0062] Send a job information request to the Manufacturing Execution System and execute an invoice operation: In response to the detected production event of the starting equipment, send a job information request to the Manufacturing Execution System and execute an invoice operation to carry out the production operation;
[0063] Sending production control instructions to enabled devices: The manufacturing execution system sends production control instructions to all enabled devices in the device sequence, the production control instructions including start commands and recipe parameters;
[0064] Skip production events for disabled devices: For devices that are disabled in the device sequence, skip the production events for that device node in the device sequence;
[0065] Listen for the production completion event of the terminating equipment and send an accounting request: Listen for the production completion event of the terminating equipment in the equipment sequence, and in response to the production completion event, send an accounting request to the manufacturing execution system to terminate the production operation on the current equipment sequence;
[0066] After sending the production control command, a dynamic state transition step is also included: the flow status of the product in the equipment sequence is monitored by a state machine. When the product flows out of the equipment, the activation status of the subsequent equipment is checked. If the subsequent equipment is not activated, the state is automatically transitioned to the next activated equipment and waits for the product to flow in. The state transition is based on the order of the configuration file and the activation status definition.
[0067] During implementation, in the configuration file loading step, the processor reads the configuration file from a storage device such as a server hard drive. This configuration file, in XML or JSON format, contains device identifiers, sequence fields, activation status fields, and role fields. After parsing the configuration file, the processor builds a device sequence model in memory. For example, it defines the device sequence as LOADER as the starting device, SPR001 and SPI001 as intermediate processing devices, and UNLOADER as the ending device, setting the activation status of SPR001 and SPI001 to true, while setting the activation status of other devices, such as the dispensing machine, to false. By defining the device sequence and activation status using an external configuration file, dynamic configuration of the production line is achieved. This allows the same EAP program to flexibly adapt to different device combinations, responding to production changes without modifying the code. For example, in a scenario where only SPR001 and SPI001 are running, the administrator specifies that only these devices should be enabled through the configuration file. When the EAP system starts, the processor loads this configuration, focusing only on the devices in the sequence, thus quickly adapting to engineering debugging needs.
[0068] In the step of monitoring production events at the starting equipment, the event monitoring module establishes a SECS / GEM protocol connection with the equipment through the unified equipment communication management module, continuously monitoring the workpiece arrival signal of the starting equipment, such as the LOADER. Specifically, when a workpiece is detected by a sensor entering the LOADER, the LOADER sends a carrier ID signal to the EAP. The event monitoring module captures this signal and verifies whether it conforms to the starting equipment role defined in the configuration file. By only monitoring starting equipment events in the configured sequence, precise control of the production start point is achieved, avoiding interference from non-sequence equipment and improving the reliability of event processing. For example, in the scenario, after a workpiece is placed in the LOADER, the LOADER sends a signal, and the EAP immediately recognizes and triggers subsequent operations, ignoring other equipment events on the production line.
[0069] In the process of sending a job information request to the Manufacturing Execution System (MES) and executing the accounting operation, the Job Management module responds to the detected Start Equipment event by sending a request to the MES using the LOADER ID to obtain job information such as product formula and parameters. After the MES returns the data, the EAP executes the accounting operation, records the start of production in the system, and initializes material tracking. Through automated request and accounting processes, seamless integration with the MES is achieved, ensuring real-time synchronization and accuracy of production data. For example, in this scenario, the EAP requests job information using the LOADER's LOADER ID; upon successful processing, the information is accounted for, marking the start of the production job and laying the foundation for subsequent instruction issuance.
[0070] In the step of sending production control commands to enabled devices, the command distribution module sends start commands and recipe parameters to all enabled devices in the device sequence through the manufacturing execution system. For example, commands are sent only to enabled devices SPR001 and SPI001, skipping inactive devices. Command sending is based on the routing function of the unified device communication management module to ensure accurate delivery of commands. By selectively sending commands to enabled devices, on-demand allocation of production resources is achieved, reducing energy waste and equipment idleness, and improving production efficiency. For example, in one scenario, EAP sends start commands to both SPR001 and SPI001 simultaneously, and these two devices immediately begin processing, while inactive devices such as dispensing machines are not triggered.
[0071] In the step of skipping production events for inactive devices, the device processing module performs operations on inactive devices based on the activation status field in the configuration file: Operation A is to ignore the event, meaning that when an inactive device, such as a dispensing machine, generates a production event, the unified device communication management module directly discards the event; Operation B is to pass through the workpiece, meaning that a control command is sent to the inactive device, causing it to directly pass the workpiece without processing. By flexibly skipping events for inactive devices, the smooth operation of the production process is achieved, avoiding equipment conflicts and downtime issues. For example, in a scenario where the dispensing machine is not activated, when a workpiece flows through, EAP ignores its event or allows it to pass through, and the workpiece flows directly to SPR001, ensuring processing continuity.
[0072] In the step of listening for the completion event of the equipment and sending an payment request, the completion processing module monitors the workpiece output signal of the equipment such as the unloading device. When the event is triggered, it sends a payment request to the manufacturing execution system to confirm the completion of production and clear the inventory information. By uniformly processing the completion event, a complete closed loop of the production cycle is achieved, ensuring data traceability and work order accuracy. For example, in the scenario, after the workpiece arrives at the unloading device and is produced, the EAP requests payment, the manufacturing execution system updates the status, and the current operation ends.
[0073] In the dynamic state transition step, the state transition control module monitors the flow status of products in the equipment sequence through a state machine. When a product flows out of the current equipment, such as SPR001, it checks the enabled status of the subsequent equipment, such as SPI001. If the subsequent equipment is not enabled, it automatically transitions to the next enabled equipment, such as UNLOADER, and waits for the product to flow in. The state transition is based on the order and enabled status definition in the configuration file, and uses a predefined state machine template to handle the transition conditions. Through the dynamic state transition mechanism, adaptive process control is achieved, reducing manual intervention and waiting time, and improving the response speed and flexibility of the production line. For example, in the scenario, after a product flows out of SPR001, EAP checks the enabled status of SPI001; if SPI001 is not enabled (assuming it is skipped in the configuration), it directly transitions to the UNLOADER, avoiding unnecessary pauses on intermediate equipment.
[0074] In one embodiment, before loading the configuration file, the step further includes: generating the configuration file using a graphical configuration method, the graphical configuration method comprising:
[0075] The graphical user interface includes an equipment library panel, a canvas area, and a configuration generation area, wherein the equipment library panel displays icons of all available equipment on the production line.
[0076] Drag and drop device icons from the device library onto the canvas area to define the order of the device sequence and the role of each device;
[0077] In the configuration generation area, a configuration file is automatically generated based on the device sequence defined on the canvas area. The configuration file includes device identifier, communication address, port number, enable status, and role fields.
[0078] During implementation, the graphical user interface (GUI) is displayed on the screen, including a device library panel, a canvas area, and a configuration generation area. The device library panel lists icons of all available devices on the production line, such as LOADER, SPR001, SPI001, and UNLOADER. Users drag and drop device icons from the device library panel onto the canvas area to define the device sequence and the role of each device; for example, setting LOADER as the starting device, SPR001 and SPI001 as intermediate processing devices, and UNLOADER as the ending device. In the configuration generation area, the system automatically generates a configuration file based on the device sequence on the canvas. This file contains device identifiers, communication addresses, port numbers, enable / disable status, and role fields. This graphical configuration method enables intuitive, non-programming configuration, allowing production personnel to quickly define the production line without coding skills, significantly reducing configuration time and error rates. For example, in a scenario where only SPR001 and SPI001 are running, the administrator drags and drops device icons onto the canvas in the graphical interface, defines the sequence, and clicks the generate button. The system automatically creates an XML configuration file for the EAP system to load and use.
[0079] In one embodiment, monitoring production events and sending production control commands are performed through a unified device communication management module, which establishes and maintains communication connections with all physical devices on the production line.
[0080] The operation of the unified device communication management module includes:
[0081] The SECS / GEM protocol is used to establish a connection with each physical device and maintain a device connection pool that stores the communication status and parameters of each device.
[0082] It provides a unified interface for receiving instruction requests from the manufacturing execution system and routing production control instructions to designated enabled devices, while shielding the communication differences between underlying devices.
[0083] In implementation, the monitoring of production events and the sending of production control commands are performed through the unified device communication management module. This module establishes and maintains SECS / GEM protocol connections with all physical devices on the production line. For example, it creates communication sessions for LOADER, SPR001, SPI001, and UNLOADER, and maintains a device connection pool, storing the communication status and parameters of each device, such as IP address and port number. The unified device communication management module provides a unified interface for receiving command requests from the manufacturing execution system and routing production control commands to designated enabled devices. It also masks the communication differences between underlying devices; for example, different devices may use different versions of the SECS standard, but the module handles these differences through adapters. Through the unified device communication management module, centralized management of device connections and accurate command routing are achieved, improving system reliability and scalability while reducing the complexity of multiple connections. For example, in this scenario, the module maintains connections with all devices but only sends start commands to the enabled SPR001 and SPI001, ignoring disabled devices, ensuring efficient command execution.
[0084] In one embodiment, the dynamic state transition step is implemented through a dynamic process executor, which is configured as follows:
[0085] Based on the device sequence and activation status parsed from the configuration file, a control logic sequence is dynamically generated.
[0086] When monitoring product flow, when a product flows out of the current device, the activation status of the subsequent device is checked: if the subsequent device is activated, the system waits for the product to flow in and triggers the corresponding production instruction; if the subsequent device is not activated, the system skips the device, jumps directly to the next activated device, and updates the status flag of the state machine.
[0087] The state transition logic is based on a predefined state machine template, which includes event handling rules and state transition conditions.
[0088] During implementation, the dynamic process executor dynamically generates a control logic sequence based on the device sequence and activation status parsed from the configuration file. For example, it constructs a state machine model in memory, where each state corresponds to a node in the device sequence. When a product flows out of the current device, such as SPR001, the dynamic process executor checks the activation status of the subsequent device, such as SPI001. If SPI001 is activated, it waits for the product to flow in and triggers the corresponding production instruction. If SPI001 is not activated, it skips that device and directly jumps to the next activated device, such as UNLOADER, and updates the state machine's status flag. The state transition logic is based on a predefined state machine template, which includes event handling rules and state transition conditions, such as checking the activation status field when a product outflow event occurs. Through the dynamic process executor, adaptive process control is achieved, reducing manual intervention and waiting time, and improving the production line's response speed and flexibility. For example, in one scenario, after a product flows out of SPR001, the dynamic process executor detects that SPI001 is not activated and automatically jumps to the UNLOADER state, allowing the product to flow directly to the end device and avoiding process interruption.
[0089] In one embodiment, after sending a job information request to the manufacturing execution system, a parameter verification step is also included: verifying whether the recipe parameters and equipment control status of all enabled equipment in the equipment sequence meet preset conditions;
[0090] The parameter verification step includes:
[0091] Check whether the recipe parameters for each activated device match the job information issued by the Manufacturing Execution System;
[0092] Verify that the device control status is in a ready state;
[0093] If the verification fails, the sending of production control commands will be suspended, and an alarm message will be generated to notify the operator.
[0094] During implementation, this step verifies whether the recipe parameters and equipment control status of all enabled devices in the equipment sequence meet preset conditions. For example, it checks whether the recipe parameters of each enabled device, such as SPR001 and SPI001, match the job information issued by the Manufacturing Execution System (MES), and simultaneously verifies whether the equipment control status is ready. Parameter verification is performed through the verification module of the EAP system, which accesses the equipment parameter database and real-time status data. If verification fails, the sending of production control commands is paused, and an alarm message is generated to notify the operator, for example, by displaying a warning message through the GUI. Through the parameter verification step, the accuracy and consistency of production conditions are ensured, reducing production errors caused by parameter mismatches or equipment insecurity, and improving product quality and system stability. For example, in a scenario, after receiving job information from the MES, the EAP verifies the recipe parameters of SPR001 and SPI001. If the recipe version of SPR001 does not match, the start command is paused and an alarm is issued, waiting for the operator to make adjustments.
[0095] In one embodiment, skipping the production events of that device node in the device sequence, including performing operation A and / or performing operation B,
[0096] Operation A: Ignore production events for the inactive device;
[0097] Operation B: Send a control command to the device in the disabled state to transmit the workpiece through;
[0098] For operation A: When a production event is generated by a device in an inactive state, the unified device communication management module ignores the event and does not perform any processing or response.
[0099] For Operation B: When a product flows through an inactive device, send a pass-through command to the device to allow the workpiece to pass directly without triggering a processing operation, while keeping the device communication connection active.
[0100] In implementation, Operation A ignores production events from inactive devices. Specifically, when an inactive device, such as a dispensing machine, generates a production event, the unified device communication management module simply discards the event without any processing or response. Operation B sends a control command to an inactive device to allow the workpiece to pass through. Specifically, when a product flows through an inactive device, the EAP sends a pass-through command to that device, allowing the workpiece to pass directly without triggering processing operations, while maintaining an active device communication connection to ensure monitorability. By providing flexible options for Operations A and B, adaptation to different production scenarios is achieved. For example, the ignore operation is used during maintenance to avoid interference, while the pass-through operation is used during debugging to maintain smooth production line flow, improving the system's practicality and robustness. For instance, in a scenario where the dispensing machine is inactive, the EAP executes Operation A to ignore its event or executes Operation B to send a pass-through command, allowing the workpiece to seamlessly flow to SPR001, ensuring production continuity.
[0101] In one embodiment, the configuration file is in XML or JSON format, wherein the definition of the device sequence includes:
[0102] The device identifier field is used to uniquely identify each physical device;
[0103] The sequence field is used to define the order of devices in the sequence;
[0104] Enable the status field, which is a boolean flag indicating whether the device is participating in this production run;
[0105] The role field is used to specify whether the device is a starting device, an ending device, or an intermediate processing device.
[0106] During implementation, the structured fields of the configuration file include: a device identifier field to uniquely identify each physical device (e.g., device ID); a sequence field to define the device's order in a sequence (e.g., serial number); an enable / disable field, a boolean flag indicating whether the device is participating in this production run; and a role field to specify whether the device is the starting device, ending device, or intermediate processing device. For example, XML-formatted configuration files use tags such as... <deviceid> 、 <sequence> 、 <enabled>and <role>The processor organizes the data, reading these fields through a parser and mapping them to memory objects. By using standardized formats such as XML or JSON, the configuration information is structured and machine-readable, making configuration files easy to create, modify, and parse, reducing the difficulty of system integration and maintenance. For example, in this scenario, the configuration file is stored in XML format, which explicitly defines the LOADER order as 1, the enabled status as true, and the role as the starting device. The EAP system parses it quickly when loading, ensuring that the configuration takes effect accurately.
[0107] Example 2
[0108] like Figure 2 As shown, a system for configurable semiconductor serial production line control includes:
[0109] The configuration file loading module is configured to load the configuration file from the storage device through the processor and define the sequence of equipment participating in this production on the production line, the order of the equipment in the sequence, the activation status of each equipment, and the role of each equipment, wherein the role is the starting equipment, the ending equipment, or the intermediate processing equipment.
[0110] The event listening module is configured to listen for production events of the starting device in the device sequence, the production events including workpiece arrival signals;
[0111] The job management module is configured to respond to production events detected by the starting equipment by sending job information requests to the manufacturing execution system and performing an accounting operation to carry out production operations.
[0112] The instruction distribution module is configured to send production control instructions to all enabled devices in the equipment sequence through the manufacturing execution system. The production control instructions include start commands and recipe parameters.
[0113] The device processing module is configured to skip the production events of a device node in the device sequence if the device is not in an enabled state. Skipping the production events of the device node includes performing operation A and / or performing operation B.
[0114] Operation A includes: ignoring production events of the inactive device;
[0115] Operation B includes: sending a control command to the device in the inactive state, instructing it to transmit the workpiece through;
[0116] The completion processing module is configured to listen for the production completion event of the device in the device sequence, and in response to the production completion event, send an invoice request to the manufacturing execution system to end the production operation on the current device sequence;
[0117] The state transition control module is configured to monitor the flow status of products in the equipment sequence through a state machine after sending production control instructions. When a product flows out of the equipment, it checks the activation status of the subsequent equipment. If the subsequent equipment is not activated, it automatically transitions to the next activated equipment and waits for the product to flow in. The state transition is based on the order and activation status definition in the configuration file.
[0118] During implementation, the system is deployed on servers or industrial computers, executing the functions of each module through the processor and interacting with storage devices, manufacturing execution systems, and physical equipment on the production line. The core of the system lies in its modular design, enabling configurable control of the production line and overcoming the rigidity inherent in traditional EAP solutions. In scenarios where only SPR001 and SPI001 are running, the system dynamically manages the device sequence after loading the configuration file, ensuring a flexible and efficient production process.
[0119] In practice, the configuration file loading module loads the configuration file from a storage device such as a hard drive or cloud storage via the processor. This file is in XML or JSON format and includes device identifiers, sequence fields, activation status fields, and role fields. After parsing the configuration file, the module constructs a device sequence data structure in memory. For example, it defines the device sequence as LOADER as the starting device, SPR001 and SPI001 as intermediate processing devices, and UNLOADER as the ending device, setting the activation status of SPR001 and SPI001 to true, while setting the activation status of other devices, such as the dispensing machine, to false. The module uses standard parsing libraries such as the DOM parser to process the XML format, ensuring accurate mapping of data to system variables. Through the dynamic parsing function of the configuration file loading module, the externalization and standardization of production line definitions are achieved, allowing the system to adapt to different device combinations without code modification, improving configuration efficiency and flexibility. For example, in a scenario where the module loads the configuration file, the system only identifies devices in the sequence, ignoring inactive devices such as the dispensing machine, thus quickly responding to production adjustment needs.
[0120] The event monitoring module establishes a SECS / GEM protocol connection with the physical devices through the unified device communication management module, continuously monitoring production events of the starting device (LOADER) in the device sequence, such as workpiece arrival signals. The module uses an event-driven architecture; when the LOADER sensor detects a workpiece arrival, the device sends a carrier ID signal. The event monitoring module captures this signal and verifies whether it matches the starting device role defined in the configuration file. The module monitors events in real-time through polling or interrupt mechanisms to ensure low-latency response. Through precise event filtering by the event monitoring module, reliable triggering of the production start point is achieved, avoiding interference from non-sequence devices and improving the accuracy of the system's event processing. For example, in a scenario where a workpiece is placed in the LOADER, the module immediately identifies the workpiece arrival signal and triggers subsequent operation of the job management module, ignoring events from other devices.
[0121] The job management module responds to the start device event captured by the event listening module by sending a job information request to the manufacturing execution system (MES). The request includes the vehicle ID and product type. The module communicates with the MES using APIs such as REST or SOAP to obtain job details such as recipe parameters and control status. Upon receiving the response, the module performs an accounting operation, recording the production start time, material information, and work order status in the system database. Through the automated request and accounting process of the job management module, seamless data synchronization with the MES is achieved, ensuring the real-time nature and integrity of production information and reducing human intervention errors. For example, in one scenario, the module requests job information using the LOADER's vehicle ID; upon successful accounting, it accounts for the job, initializes the production job, and provides basic data for the instruction distribution module.
[0122] The instruction distribution module sends production control instructions, including start commands and recipe parameters, to all enabled devices in the equipment sequence through the manufacturing execution system. Based on the enabled status field in the configuration file, the module selectively routes instructions, for example, sending instructions only to enabled devices like SPR001 and SPI001, while skipping inactive devices. The instruction distribution module uses the interface of the unified device communication management module to encapsulate instructions in SECS / GEM message format, ensuring accurate delivery. Through on-demand instruction distribution, the module optimizes the allocation of production resources, reduces energy waste and equipment idle time, and improves production efficiency and response speed. For example, in one scenario, the module simultaneously sends start commands and recipe parameters to SPR001 and SPI001; these two devices immediately begin processing, while inactive devices such as the dispensing machine are not triggered.
[0123] The equipment processing module performs skip operations on devices in an inactive state within the equipment sequence: Operation A ignores production events from inactive devices. Specifically, when an inactive device, such as a dispensing machine, generates an event, the module discards the event through the unified equipment communication management module without any processing or response. Operation B transmits the workpiece directly, sending a control command to the inactive device to allow it to directly transmit the workpiece without processing, while maintaining an active equipment communication connection. The module dynamically selects either Operation A or Operation B based on the activation status field in the configuration file. For example, Operation A is used in maintenance scenarios, while Operation B is used in debugging scenarios. Through the flexible event handling of the equipment processing module, smooth operation of the production process is achieved, avoiding equipment conflicts and process interruptions, and enhancing the system's adaptability and reliability. For example, in a scenario where the dispensing machine is inactive, the module executes Operation A to ignore its event, or executes Operation B to send a transmission command, allowing the workpiece to flow directly to SPR001, ensuring processing continuity.
[0124] The completion processing module listens for production completion events, such as workpiece output signals, from the end-of-line device in the equipment sequence, including the unloading device. Using a similar listening mechanism to the event listening module, when the unloading sensor detects workpiece output, the module captures the event and sends an output request to the manufacturing execution system (MES). This request includes work order completion confirmation and output data. Upon successful output, the module clears the inventory information in the system and resets the production status. This unified output processing by the completion processing module achieves a complete closed-loop production cycle, ensuring data traceability and work order accuracy, and reducing the risk of data inconsistency. For example, in a scenario where a workpiece arrives at the unloading device and is output, the module sends an output request, the MES updates the work order status, and the current operation ends.
[0125] After the instruction distribution module sends production control instructions, the state transition control module monitors the flow status of products in the equipment sequence through a state machine. Based on the equipment sequence and activation status parsed from the configuration file, the module dynamically generates state transition logic. For example, when a product flows out of the current equipment, such as SPR001, the module checks the activation status of subsequent equipment, such as SPI001. If SPI001 is not activated, it automatically transitions to the next activated equipment, such as UNLOADER, and updates the state machine's status flag. The module uses a predefined state machine template, which includes event handling rules and state transition conditions, ensuring consistent transition logic. Through the dynamic state management of the state transition control module, adaptive process control is achieved, reducing waiting time and manual intervention, and improving the flexibility and throughput of the production line. For example, in one scenario, after a product flows out of SPR001, the module detects that SPI001 is not activated and directly transitions to the UNLOADER state, allowing the product to quickly flow to the final equipment and avoiding process delays.
[0126] In one embodiment, a graphical configuration module is further included, configured to generate the configuration file, the graphical configuration module comprising:
[0127] The display unit is configured to display a graphical user interface, which includes an equipment library panel, a canvas area, and a configuration generation area, wherein the equipment library panel displays icons of all available equipment on the production line.
[0128] The drag-and-drop operation unit is configured to place device icons from the device library onto the canvas area via drag-and-drop operations to define the order of the device sequence and the role of each device.
[0129] The configuration file generation unit is configured to automatically generate configuration files based on the device sequence defined on the canvas area. The configuration files include device identifier, communication address, port number, enable status, and role fields.
[0130] In one embodiment, a unified device communication management module is also included, configured to listen for production events and send production control instructions. The unified device communication management module establishes and maintains communication connections with all physical devices on the production line.
[0131] The unified device communication management module includes:
[0132] The communication connection unit is configured to establish a connection with each physical device using the SECS / GEM protocol and maintain a device connection pool, which stores the communication status and parameters of each device.
[0133] The instruction routing unit is configured to provide a unified interface for receiving instruction requests from the manufacturing execution system and routing production control instructions to designated enabled devices, while shielding the communication differences between underlying devices.
[0134] In one embodiment, the state transition control module includes a dynamic process executor configured as follows:
[0135] Based on the device sequence and activation status parsed from the configuration file, a control logic sequence is dynamically generated.
[0136] When monitoring product flow, when a product flows out of the current device, the activation status of the subsequent device is checked: if the subsequent device is activated, the system waits for the product to flow in and triggers the corresponding production instruction; if the subsequent device is not activated, the system skips the device, jumps directly to the next activated device, and updates the status flag of the state machine.
[0137] The state transition logic is based on a predefined state machine template, which includes event handling rules and state transition conditions.
[0138] In one embodiment, a parameter verification module is further included, configured to verify whether the recipe parameters and equipment control status of all enabled equipment in the equipment sequence meet preset conditions after sending a job information request to the manufacturing execution system.
[0139] The parameter verification module includes:
[0140] The recipe verification unit is configured to check whether the recipe parameters of each enabled device match the job information issued by the manufacturing execution system.
[0141] The status verification unit is configured to verify whether the device control status is in a ready state.
[0142] The alarm processing unit is configured to pause sending production control commands and generate alarm information to notify operators when verification fails.
[0143] In one embodiment, the device processing module is specifically configured as follows:
[0144] For operation A: When a production event is generated by a device in an inactive state, the unified device communication management module ignores the event and does not perform any processing or response.
[0145] For Operation B: When a product flows through an inactive device, send a pass-through command to the device to allow the workpiece to pass directly without triggering a processing operation, while keeping the device communication connection active.
[0146] In one embodiment, the configuration file is in XML or JSON format, wherein the definition of the device sequence includes:
[0147] The device identifier field is used to uniquely identify each physical device;
[0148] The sequence field is used to define the order of devices in the sequence;
[0149] Enable the status field, which is a boolean flag indicating whether the device is participating in this production run;
[0150] The role field is used to specify whether the device is a starting device, an ending device, or an intermediate processing device.
[0151] It should be noted that the system is applied to a production line in the semiconductor manufacturing field, wherein the production line includes serially connected physical devices, which are combinations of various types of loaders, dispensing machines, chip mounters, reflow ovens, inspection machines, and unloading machines.
[0152] The system for configurable semiconductor serial production line control provided in this embodiment has the same implementation principle and technical effects as the method embodiment in Embodiment 1. For the sake of brevity, any parts not mentioned in the system embodiment can be referred to the corresponding content in Embodiment 1.
[0153] Example 3
[0154] A graphical user interface, displayed on a display device, for configurable semiconductor serial production line control, characterized in that the graphical user interface comprises:
[0155] The equipment library panel displays icons of all available physical equipment on the production line, which correspond to the actual equipment on the production line.
[0156] The canvas area interacts with the device library panel and is configured to allow users to drag and drop selected device icons from the device library panel to the canvas area to define the order of the device working sequence and the role of each device, wherein the role includes a starting device, an ending device, or an intermediate processing device.
[0157] The configuration generation area is connected to the canvas area and configured to automatically generate the configuration file described in Embodiment 1 or Embodiment 2 based on the device working sequence defined on the canvas area. The configuration file includes device identifier, device sequence, role field and enable status field, which are used for loading and execution by the configurable semiconductor serial production line control system.
[0158] It should be noted that the overall implementation of the graphical user interface is based on web technologies or desktop applications, developed using HTML5, JavaScript, or similar frameworks. Interface elements such as panels and areas are laid out and styled using CSS. The interface is integrated with the backend system; when a user interacts with the system, the frontend sends a request to the server for configuration generation. In scenarios where only SPR001 and SPI001 are running, administrators can quickly define device sequences and generate configuration files for use by the EAP system through this interface.
[0159] In practice, the equipment library panel displays icons of all available physical equipment on the production line. These icons correspond to actual devices such as LOADER, SPR001, SPI001, and UNLOADER. The panel displays icons in a grid or list format, with each icon containing the device name and image. Data is dynamically loaded from the device database, for example, by retrieving the device list via API calls. Users can filter icons by scrolling or searching for quick access to the desired device. This intuitive display of the equipment library panel enables visual management of equipment resources, allowing users to easily identify and select devices, reducing manual input errors and time costs. For example, in a scenario where the panel displays all equipment icons on the production line, the administrator can locate the icons for LOADER, SPR001, SPI001, and UNLOADER, preparing for subsequent drag-and-drop operations.
[0160] The canvas area interacts with the device library panel, allowing users to drag and drop device icons from the panel onto the canvas. The canvas is an editable blank area that supports drag-and-drop functionality. After a user clicks on an icon in the device library and drags it onto the canvas, the icon becomes an arrangeable component. Users can adjust the icon order on the canvas, for example, placing the LOADER icon first, SPR001 and SPI001 icons in the middle, and the UNLOADER icon last. They can also set the role of each device through the right-click menu or the properties bar, such as designating the LOADER as the starting device, SPR001 and SPI001 as intermediate processing devices, and UNLOADER as the ending device. The canvas area uses event listeners to handle drag-and-drop actions, ensuring smooth operation. This interactive design of the canvas area enables an intuitive definition of the device sequence, allowing users to flexibly arrange device order and roles without coding, improving the convenience and accuracy of configuration. For example, in a scenario, the administrator drags the LOADER icon from the device library to the top of the canvas and sets it as the starting device. Then, the administrator drags the SPR001 and SPI001 icons in sequence to set them as intermediate processing devices. Finally, the administrator drags the UNLOADER icon to set it as the ending device, thus building a complete sequence of devices on the canvas.
[0161] The configuration generation area is connected to the canvas area, automatically generating configuration files based on the device work sequences defined on the canvas. Once the user completes the sequence definition on the canvas, clicking the "Generate" button in the configuration generation area triggers the configuration generation logic. This logic iterates through the device icons on the canvas, extracting the identifier, sequence, role, and enable / disable status fields for each device, and then formats them into an XML or JSON configuration file. For example, the configuration file contains device identifiers such as device ID, sequence fields such as serial number, role fields such as start device or end device, and enable / disable status fields such as boolean values true or false. The configuration generation area uses a template engine or serialization library to convert the data into a standard configuration file and provides download or save options. Through the automated generation function of the configuration generation area, rapid creation and standardization of configuration files are achieved, enabling production personnel to generate executable configurations with a single click, significantly reducing the complexity and error rate of manually writing configurations. For example, in a scenario, after the administrator defines a sequence on the canvas and clicks the generate button, the system automatically creates a configuration file. This file contains fields such as LOADER with the order 1, role as starting device, and enabled status as true, as well as similar fields for SPR001 and SPI001, and UNLOADER with the order 4 and role as ending device. This configuration file can be directly loaded and used by the EAP system.
[0162] Overall, the graphical user interface (GUI) enables visualization and automation of production line configuration through the collaborative work of three areas. By showcasing resources in the equipment library panel, defining interactive elements in the canvas area, and automatically generating configurations in the configuration generation area, even non-technical personnel can easily complete complex configurations, improving the flexibility and operational efficiency of the production line.
[0163] Example 4
[0164] A computer-readable storage medium having a computer program stored thereon, the computer program being executed by a computer to perform the method for configurable semiconductor serial production line control described in Embodiment 1 above.
[0165] The above description is merely a preferred embodiment of the present invention and does not constitute any limitation on the present invention. Any simple modifications, alterations, or equivalent structural changes made to the above embodiments based on the technical essence of the present invention shall still fall within the protection scope of the present invention.< / role> < / enabled> < / sequence> < / deviceid>
Claims
1. A method for controlling a configurable semiconductor serial production line, characterized in that, Includes the following steps: The processor loads the configuration file from the storage device and defines the sequence of devices participating in this production on the production line, the order of the devices in the sequence, the activation status of each device, and the role of each device, wherein the role is a starting device, an ending device, or an intermediate processing device. The production event of the starting device in the monitoring device sequence includes a workpiece arrival signal; In response to a detected production event from the starting device, a job information request is sent to the manufacturing execution system, and an inbound operation is performed to initiate the production operation. The manufacturing execution system sends production control commands to all enabled devices in the equipment sequence, the production control commands including start commands and recipe parameters. For devices that are not enabled in the device sequence, skip the production events for that device node in the device sequence; The event that skips the production of this device node includes executing operation A or executing operation B. Operation A: Ignore production events for the inactive device; Operation B: Send a control command to the device in the disabled state to transmit the workpiece through; For operation A: When a production event is generated by a device in an inactive state, the unified device communication management module ignores the event and does not perform any processing or response. For operation B: When the product flows through the inactive equipment, send a pass-through command to the equipment so that the workpiece can pass through directly without triggering the processing operation, while keeping the equipment communication connection active. Listen for the production completion event of the equipment in the equipment sequence, and in response to the production completion event, send an outgoing request to the manufacturing execution system to end the production operation on the current equipment sequence; The process includes a dynamic state transition step after sending production control instructions: the flow status of products in the equipment sequence is monitored by a state machine. When a product flows out of the equipment, the activation status of the subsequent equipment is checked. If the subsequent equipment is not activated, the state is automatically transitioned to the next activated equipment and the system waits for the product to flow in. The state transition is based on the order of the configuration file and the activation status definition.
2. The method according to claim 1, characterized in that, Before loading the configuration file, the process includes the step of generating the configuration file using a graphical configuration method, which includes: The graphical user interface includes an equipment library panel, a canvas area, and a configuration generation area, wherein the equipment library panel displays icons of all available equipment on the production line. Drag and drop device icons from the device library onto the canvas area to define the order of the device sequence and the role of each device; In the configuration generation area, a configuration file is automatically generated based on the device sequence defined on the canvas area. The configuration file includes device identifier, communication address, port number, enable status, and role fields.
3. The method according to claim 1, characterized in that, Monitoring production events and sending production control commands are performed through a unified device communication management module, which establishes and maintains communication connections with all physical devices on the production line. The operation of the unified device communication management module includes: The SECS / GEM protocol is used to establish a connection with each physical device and maintain a device connection pool that stores the communication status and parameters of each device. It provides a unified interface for receiving instruction requests from the manufacturing execution system and routing production control instructions to designated enabled devices, while shielding the communication differences between underlying devices.
4. The method according to claim 1, characterized in that, The dynamic state transition step is implemented through a dynamic process executor, which is configured as follows: Based on the device sequence and activation status parsed from the configuration file, a control logic sequence is dynamically generated. When monitoring product flow, when a product flows out of the current device, the activation status of the subsequent device is checked: if the subsequent device is activated, the system waits for the product to flow in and triggers the corresponding production instruction; if the subsequent device is not activated, the system skips the device, jumps directly to the next activated device, and updates the status flag of the state machine. The state transition logic is based on a predefined state machine template, which includes event handling rules and state transition conditions.
5. The method according to claim 1, characterized in that, After sending a job information request to the manufacturing execution system, a parameter verification step is also included: verifying whether the recipe parameters and equipment control status of all enabled equipment in the equipment sequence meet preset conditions; The parameter verification step includes: Check whether the recipe parameters for each activated device match the job information issued by the Manufacturing Execution System; Verify that the device control status is in a ready state; If the verification fails, the sending of production control commands will be suspended, and an alarm message will be generated to notify the operator.
6. The method according to claim 1, characterized in that, The configuration file is in XML or JSON format, and the device sequence definition includes: The device identifier field is used to uniquely identify each physical device; The sequence field is used to define the order of devices in the sequence; Enable the status field, which is a boolean flag indicating whether the device is participating in this production run; The role field is used to specify whether the device is a starting device, an ending device, or an intermediate processing device.
7. A system for configurable semiconductor serial production line control, characterized in that, include: The configuration file loading module is configured to load the configuration file from the storage device through the processor and define the sequence of equipment participating in this production on the production line, the order of the equipment in the sequence, the activation status of each equipment, and the role of each equipment, wherein the role is the starting equipment, the ending equipment, or the intermediate processing equipment. The event listening module is configured to listen for production events of the starting device in the device sequence, the production events including workpiece arrival signals; The job management module is configured to respond to production events detected by the starting equipment by sending job information requests to the manufacturing execution system and performing an accounting operation to carry out production operations. The instruction distribution module is configured to send production control instructions to all enabled devices in the equipment sequence through the manufacturing execution system. The production control instructions include start commands and recipe parameters. The device processing module is configured to skip the production event of a device node in the device sequence if the device is not in an enabled state. Specifically, the device processing module is configured to execute operation A or operation B to skip the production event of the device node. Operation A is: Ignore the production events of the inactive device; for Operation A, the device processing module is configured to: when the inactive device generates a production event, ignore the event through the unified device communication management module and do not perform any processing response; Operation B is: sending a control command to the device in the inactive state to make it pass through the workpiece; for operation B, the device processing module is configured to: when the product flows through the device in the inactive state, send a pass through command to the device so that the workpiece passes through directly without triggering the processing operation, while keeping the device communication connection active. The completion processing module is configured to listen for the production completion event of the device in the device sequence, and in response to the production completion event, send an invoice request to the manufacturing execution system to end the production operation on the current device sequence; The state transition control module is configured to monitor the flow status of products in the equipment sequence through a state machine after sending production control instructions. When a product flows out of the equipment, it checks the activation status of the subsequent equipment. If the subsequent equipment is not activated, it automatically transitions to the next activated equipment and waits for the product to flow in. The state transition is based on the order and activation status definition in the configuration file.
8. A graphical user interface displayed on a display device for configurable semiconductor serial production line control, characterized in that, The graphical user interface includes: The equipment library panel displays icons of all available physical equipment on the production line, which correspond to the actual equipment on the production line. The canvas area interacts with the device library panel and is configured to allow users to drag and drop selected device icons from the device library panel to the canvas area to define the order of the device working sequence and the role of each device, wherein the role includes a starting device, an ending device, or an intermediate processing device. A configuration generation area is connected to the canvas area and configured to automatically generate a configuration file in the method described in any one of claims 1-6 or in the system described in claim 7, based on the device working sequence defined on the canvas area. The configuration file includes a device identifier, device sequence, role field, and enable status field, and is used for loading and execution by the configurable semiconductor serial production line control system.
9. A computer-readable storage medium, characterized in that, It stores a computer program, which is executed by a computer to perform the method as described in any one of claims 1-6.