Magnetically-driven vacuum sealing compound pendulum motion type target and implementation method

Abstract

The invention belongs to the technical field of ray devices for particle beam targeting. A magnetically-driven vacuum-sealed compound pendulum motion type target comprises a vacuum cavity body. The bearing rotating unit is arranged in the vacuum cavity main body and is connected with the target body unit; the electromagnet driving unit comprises an electromagnet, a gauss meter Hall probe, a permanent magnet, a control circuit board and a plurality of auxiliary magnets, the electromagnet is arranged outside the vacuum cavity main body, the permanent magnet is arranged on the outer side of the bearing rotating unit, the auxiliary magnets are arranged on the outer side of the vacuum cavity main body, and the permanent magnet and the auxiliary magnets correspond to the electromagnet at a specific angle. The gauss meter Hall probe is arranged on the outer side of the vacuum cavity body and used for measuring the magnetic field intensity between the electromagnet and the permanent magnet and the magnetic field intensity between the electromagnet and the auxiliary magnet and sending Hall voltage signals to the control circuit board, the control circuit board monitors the Hall voltage signals, and when the Hall voltage signals reach the maximum value, the gauss meter Hall probe is started. The control circuit board sends a pulse electric signal to the electromagnet to adjust the electromagnet electrode.

Description

Technical Field

[0001] This application belongs to the technical field of radiation devices for particle beam target shooting, and particularly relates to a magnetically driven vacuum-sealed compound pendulum motion target and its implementation method. Background Technology

[0002] In the field of particle beam targeting technology, neutron generators produce neutrons by accelerating charged particles to bombard specific target materials, triggering nuclear reactions. Their applications cover several important areas, including boron neutron capture therapy (BNCT), fusion reactor materials research, compositional analysis, and irradiation experiments. Common types of nuclear reactions include proton bombardment of lithium targets. 7 Li(p,n), proton bombardment of beryllium target 9 Be(p,n) and deuterium ion bombardment of a beryllium target 9 Be(d,n) and deuterium ions bombard a carbon target 13 Methods include bombarding deuterium-containing targets (D(d,n)) with C(d,n) ions and bombarding tritium-containing targets (T(d,n)) with deuterium ions. However, high-power beams generate a large amount of heat when bombarding targets. If the target surface temperature is too high (for example, it needs to be controlled below 200°C in a deuterium-deuterium neutron generator), it will lead to degradation or even failure of the target material.

[0003] To effectively dissipate heat, existing technologies mostly employ a rotating target structure, dispersing the heat load by moving the beam spot across the target surface. Currently published patents (such as CN119031562A and CN119364627A) generally rely on magnetohydrodynamic (MHD) sealing technology to achieve dynamic sealing of the internal and external shafts of the vacuum chamber, using a motor as the drive source. However, this approach has significant limitations: the stability of MHD seals is significantly affected by temperature; at high temperatures, the sealing performance deteriorates, easily leading to vacuum leakage and subsequently system failure. Furthermore, MHD sealing components are expensive, and the motor drive mechanism is bulky, hindering the miniaturization and integration of equipment.

[0004] Therefore, there is an urgent need to develop a magnetically driven vacuum-sealed compound pendulum motion target and its implementation method to break through the bottleneck of existing technologies. Summary of the Invention

[0005] Therefore, it is necessary to provide a magnetically driven vacuum-sealed compound pendulum motion target and its implementation method to address the above-mentioned technical problems.

[0006] In a first aspect, this application provides a magnetically driven vacuum-sealed compound pendulum motion target, comprising: The vacuum chamber body is used to provide a vacuum environment for the particle beam to impact the target unit; A bearing rotation unit is disposed inside the vacuum chamber body and connected to the target unit, used to adjust the target unit so that the particle beam impacts different positions of the target unit; An electromagnet driving unit includes an electromagnet, a gaussmeter Hall probe, a permanent magnet, a control circuit board, and auxiliary magnets. The electromagnet is arranged outside the vacuum chamber body, the permanent magnet is arranged outside the bearing rotation unit, and multiple auxiliary magnets are arranged outside the vacuum chamber body. Each permanent magnet and auxiliary magnet corresponds to the electromagnet at a specific angle. The gaussmeter Hall probe, arranged outside the vacuum chamber body, measures the magnetic field strength between the electromagnet and the permanent magnet, and between the electromagnet and the auxiliary magnets, and sends the Hall voltage signal to the control circuit board. The control circuit board monitors the Hall voltage signal. When the Hall voltage signal reaches its maximum value, the control circuit board sends a pulse electrical signal to the electromagnet to adjust the electromagnet electrodes.

[0007] In some possible implementations, the vacuum chamber body includes a vacuum chamber unit, which comprises: A beam conduit is used to connect to the device that generates the particle beam and to provide a path for the particle beam to travel. The target chamber is connected to the beam conduit; A target chamber sealing flange is connected to the side of the target chamber away from the beam pipe, wherein the beam pipe, the target chamber, and the target chamber sealing flange constitute a vacuum chamber.

[0008] In some implementable embodiments, the bearing rotation unit includes: The first connecting flange of the bearing is connected to the inner wall of the target chamber; The bearing is mounted on the first connecting flange of the bearing; The second bearing connecting flange is rotatably connected to the first bearing connecting flange via the bearing. The side of the second bearing connecting flange closest to the target chamber sealing flange is connected to the target unit. The second connecting flange of the bearing rotates relative to the first connecting flange of the bearing, causing the target unit to rotate so that the particle beam impacts different positions of the target unit.

[0009] In some implementable embodiments, the target unit includes: The target substrate is connected to the second connecting flange of the bearing, and a cooling medium channel is arranged inside the target substrate; The target sheet is laid on the target substrate, on one side close to the beam channel.

[0010] In some possible implementations, the vacuum chamber body includes a cooling unit, the cooling unit comprising: The cooling medium inlet is located on the circumferential wall of the target chamber; The cooling medium outlet is located on the circumferential wall of the target chamber; A cooling medium transfer hose includes a cooling medium inlet hose and a cooling medium outlet hose. The cooling medium inlet hose is connected to the cooling medium inlet and the inlet of the cooling medium channel, respectively. The cooling medium outlet hose is connected to the cooling medium outlet and the outlet of the cooling medium channel, respectively.

[0011] In some possible implementations, the cooling medium transfer hose is a metal hose.

[0012] In some implementable embodiments, the electromagnet drive unit further includes: The support frame has a "U" shaped structure with an opening at the top. The electromagnet is installed on the bottom inner wall of the support frame, and auxiliary magnets are installed on the side inner walls of the support frame, with the two auxiliary magnets arranged opposite each other.

[0013] In some feasible embodiments, the auxiliary magnet is an electromagnet or a permanent magnet.

[0014] In some feasible embodiments, the beam conduit and the target chamber, as well as the target chamber and the target chamber sealing flange, are sealed with O-rings.

[0015] Secondly, this application provides a method for a magnetically driven vacuum-sealed compound pendulum motion target, applied to the aforementioned magnetically driven vacuum-sealed compound pendulum motion target, the method comprising: The electromagnet and the auxiliary magnet are arranged perpendicularly to each other; The electromagnet and the auxiliary magnet have the same magnetic polarity on the side adjacent to the permanent magnet; When the electromagnet operates through a pulsed electrical signal, the permanent magnet begins to move in a circular motion to one side under the action of repulsive force. When the permanent magnet reaches the position of the auxiliary magnet, the auxiliary magnet generates a repulsive force on the permanent magnet. Under the combined action of the repulsive force and the permanent magnet's own weight, the permanent magnet moves downward in a circular motion. The control circuit board monitors the Hall voltage signal; When the permanent magnet is directly opposite the Hall probe of the Gaussian meter, the magnetic field magnetic induction intensity value measured by the Hall probe of the Gaussian meter is the largest, and the Hall voltage signal formed is the largest. When the control circuit board detects that the Hall voltage signal is at its maximum, it sends a pulse electrical signal to the electromagnet. The electromagnet generates a magnetic field that acts on the permanent magnet, generating a repulsive force on the permanent magnet. Under the combined action of repulsive force and its own inertia, the permanent magnet continues to move in a circumferential direction, forming a cyclic reciprocating motion of the permanent magnet; When the permanent magnet reciprocates, the motion of the permanent magnet is transmitted to the target unit through the bearing rotation unit, so that the target unit reciprocates accordingly.

[0016] Beneficial Effects: A magnetically driven vacuum-sealed compound pendulum motion target includes: a vacuum chamber body for providing a vacuum environment for particle beam impact on a target unit; a bearing rotation unit disposed within the vacuum chamber body and connected to the target unit for adjusting the target unit so that the particle beam impacts different positions on the target unit; an electromagnet driving unit including an electromagnet, a gaussmeter Hall probe, a permanent magnet, a control circuit board, and auxiliary magnets, wherein the electromagnet is arranged outside the vacuum chamber body, the permanent magnet is arranged outside the bearing rotation unit, and multiple auxiliary magnets are arranged outside the vacuum chamber body, with each permanent magnet and auxiliary magnet corresponding to the electromagnet at a specific angle; and a gaussmeter Hall probe arranged outside the vacuum chamber body for measuring the magnetic field strength between the electromagnet and the permanent magnet, and between the electromagnet and the auxiliary magnet, and sending Hall voltage signals to the control circuit board. The control circuit board monitors the Hall voltage signals, and when the Hall voltage signal reaches its maximum value, the control circuit board sends a pulse electrical signal to the electromagnet to adjust the electromagnet electrodes. The above structure eliminates the rigid connection between the electromagnet drive unit and the vacuum chamber body, enabling the pendulum-like rotation of the target plate installed inside the vacuum chamber. This avoids the vacuum chamber vacuum level degradation caused by temperature changes in magnetohydrodynamic vacuum sealing technology. Furthermore, this application allows the particle beam spot bombarding the target plate to act at different positions on the target plate periodically over time, achieving heat dispersion within the target plate, reducing cooling pressure, and extending the target plate's service life. Attached Figure Description

[0017] The accompanying drawings, which form part of this application, are used to provide a further understanding of the application and to make other features, objects, and advantages of the application more apparent. The illustrative embodiments and descriptions of this application are used to explain the application and do not constitute an undue limitation of the application. In the drawings: Figure 1 This is a schematic diagram of the front structure of a magnetically driven vacuum-sealed compound pendulum motion target in one embodiment. Figure 2 This is a side view of a magnetically driven vacuum-sealed compound pendulum motion target in one embodiment.

[0018] Figure label: 1. Particle beam; 2. Beam conduit; 3. Target chamber; 4. Cooling medium inlet; 5. Sealing O-ring; 6. Target chamber sealing flange; 7. Support frame; 8. Electromagnet; 9. Gaussmeter Hall probe; 10. Bearing first connecting flange; 11. Bearing; 12. Bearing second connecting flange; 13. Cooling medium inlet hose; 14. Target substrate; 15. Target plate; 16. Target plate center; 17. Beam spot center; 18. Permanent magnet; 19. Particle beam axis; 20. Bearing axis; 21. Beam spot; 22. Beam spot scanning area in the target plate; 23. Control circuit board; 24. First auxiliary magnet; 25. Second auxiliary magnet; 26. Cooling medium outlet; 27. Cooling medium outlet hose. Detailed Implementation

[0019] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0020] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0021] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0022] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0023] Furthermore, the terms "installation," "setup," "equipped with," "connection," "linked," and "socketing" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0024] like Figure 1 and Figure 2 As shown, in a first aspect, this application provides a magnetically driven vacuum-sealed compound pendulum motion target, including a vacuum chamber body, a bearing rotation unit, a target body unit, and an electromagnet drive unit.

[0025] The vacuum chamber body is used to provide a vacuum environment for the particle beam 1 to impact the target unit.

[0026] The vacuum chamber is the basic structure of the entire device. Its main function is to provide a stable vacuum environment for the particle beam 1 to impact the target unit, ensuring that nuclear reactions (such as neutron production) take place under contamination-free conditions.

[0027] Specifically, the vacuum chamber body includes a vacuum chamber unit, which includes a beam pipe 2, a target chamber 3, and a target chamber sealing flange 6.

[0028] The beam pipe 2 is used to connect to the device that generates the particle beam 1 and to provide a path for the particle beam 1 to travel; the target chamber 3 is connected to the beam pipe 2; and the target chamber sealing flange 6 is connected to the side of the target chamber 3 away from the beam pipe 2. The beam pipe 2, the target chamber 3 and the target chamber sealing flange 6 together form a vacuum chamber.

[0029] It should be noted that the main function of the vacuum chamber unit is to construct a sealed vacuum chamber to ensure that the particle beam 1 (such as protons or deuterium ions) is not disturbed by external gas molecules when it impacts the target sheet 15, thereby improving the efficiency and stability of nuclear reactions (such as neutron production).

[0030] Furthermore, beam pipe 2 serves as the inlet channel for particle beam 1, and is directly connected to external equipment (such as an accelerator or ion source). Its interior is typically designed as a smooth straight tube or a slightly curved structure to reduce beam scattering and energy loss. For materials, stainless steel or aluminum alloy can be used to balance vacuum compatibility and mechanical strength.

[0031] The target chamber 3 is the main part of the vacuum chamber, seamlessly connected to the beam pipe 2, and houses the target unit (including the target substrate 14 and the target plate 15). The design of the target chamber 3 must consider the spatial layout to ensure that the target plate 15 can perform pendulum motion without obstruction. The geometry of the target chamber 3 (such as cylindrical or spherical) is optimized to minimize the vacuum volume, improve pumping efficiency, and integrate cooling unit interfaces (such as cooling medium inlet 4 / outlet) for thermal management.

[0032] The target chamber sealing flange 6 is located at the end of the target chamber 3 furthest from the beam pipe 2. The target chamber sealing flange 6 is connected to the target chamber 3 via a static seal (such as an O-ring 5), forming a detachable vacuum sealing interface. This design facilitates maintenance and target material replacement. The O-ring 5 is made of a high-temperature resistant, aging-resistant elastic material (such as fluororubber) to ensure that the vacuum level is maintained under temperature fluctuations, avoiding the risk of leakage due to thermal expansion of the magnetohydrodynamic seal. Additionally, the beam pipe 2 and the target chamber 3 are also sealed via an O-ring 5.

[0033] These components are assembled by bolts or welding to form a rigid structure. The vacuum chamber formed by the beam pipe 2, target chamber 3, and target chamber sealing flange 6 needs to be evacuated to a high vacuum state before operation to prevent gas molecules from scattering the beam or triggering unnecessary chemical reactions.

[0034] The bearing rotation unit is disposed inside the vacuum chamber body and connected to the target unit, and is used to adjust the target unit so that the particle beam 1 impacts different positions of the target unit.

[0035] It should be noted that the bearing rotation unit includes a first bearing connecting flange 10, a bearing 11, and a second bearing connecting flange 12.

[0036] The bearing first connecting flange 10 is connected to the inner wall of the target chamber 3; the bearing 11 is disposed on the bearing first connecting flange 10; the bearing second connecting flange 12 is rotatably connected to the bearing first connecting flange 10 through the bearing 11, and the side of the bearing second connecting flange 12 near the target chamber sealing flange 6 is connected to the target unit.

[0037] The second connecting flange 12 of the bearing rotates relative to the first connecting flange 10 of the bearing, thereby driving the target unit to rotate so that the particle beam 1 impacts different positions of the target unit.

[0038] It should also be noted that the first bearing connecting flange 10 serves as a static foundation frame, and is rigidly connected to the inner wall of the target chamber 3 via bolts or welding. The bearing 11 can simultaneously withstand radial and axial loads. The inner ring of the bearing 11 is fixed to the first connecting flange, and the outer ring is connected to the second connecting flange, converting the reciprocating oscillation of the permanent magnet 18 into the periodic deflection of the target. The bearing 11 can use a special lubricant (such as vacuum grease) or a self-lubricating material to avoid contamination of the cavity due to volatilization in a vacuum environment, while ensuring a low coefficient of friction and a long service life. The second bearing connecting flange 12 can be rotatably connected to the first connecting flange through the bearing 11, and its side near the target chamber sealing flange 6 is rigidly fixed to the target unit (target substrate 14). When the permanent magnet 18 driving unit induces oscillation, the second connecting flange transmits torque to the target, causing the target piece 15 to deflect.

[0039] Furthermore, the permanent magnet 18 oscillates under the repulsive force of the electromagnet 8 and the auxiliary magnet, transferring kinetic energy to the outer ring of the bearing 11 through magnetic coupling. The bearing 11 filters the multi-directional motion of the permanent magnet 18 into oscillation within a single plane, causing the second connecting flange 12 of the bearing to deflect accordingly. The target unit is fixed to the second connecting flange and undergoes a compound oscillation motion with it, causing the particle beam spot 21 to periodically scan the target unit.

[0040] The electromagnet 8 driving unit includes an electromagnet 8, a gaussmeter Hall probe 9, a permanent magnet 18, a control circuit board 23, and auxiliary magnets. The electromagnet 8 is arranged outside the vacuum chamber body, the permanent magnet 18 is arranged outside the bearing rotation unit, and there are multiple auxiliary magnets arranged outside the vacuum chamber body. The permanent magnet 18 and the auxiliary magnets correspond to the electromagnet 8 at a specific angle. The gaussmeter Hall probe 9 is arranged outside the vacuum chamber body and is used to measure the magnetic field strength between the electromagnet 8 and the permanent magnet 18, and between the electromagnet 8 and the auxiliary magnets, and to send the Hall voltage signal to the control circuit board 23.

[0041] The control circuit board 23 monitors the Hall voltage signal. When the Hall voltage signal reaches its maximum value, the control circuit board 23 sends a pulse electrical signal to the electromagnet 8 to adjust the electrodes of the electromagnet 8.

[0042] It should be noted that the electromagnet 8 driving unit also includes a support frame 7. The support frame 7 has a "U" shaped structure with an opening at the top. The electromagnet 8 is disposed on the bottom inner wall of the support frame 7, and auxiliary magnets are disposed on the inner walls of the two side sides of the support frame 7, including a first auxiliary magnet 24 and a second auxiliary magnet 25, which are disposed opposite to each other.

[0043] Electromagnet 8 is the core driving source, located directly below the outside of the vacuum chamber body. It operates through pulsed electrical signals and can be made of soft magnetic materials.

[0044] The permanent magnet 18 serves as the motion transmission medium and is fixedly mounted on the outside of the bearing rotating unit, moving together with the bearing 11. It can be made of high-performance permanent magnet materials such as neodymium iron boron to maintain a strong and stable magnetic field. In addition, the permanent magnet 18 maintains a specific gap (e.g., a gap of 5-10 mm) with the electromagnet 8 and the auxiliary magnet.

[0045] The auxiliary magnet is a motion trajectory controller, preferably two, arranged symmetrically on the outside of the vacuum chamber body. It can be a permanent magnet 18 or an electromagnet 8, which can be flexibly selected according to the requirements. It is placed perpendicular to the electromagnet 8 to form a 90° spatial angle.

[0046] The Gaussian Hall probe 9 is a position sensor installed at a key detection point on the motion trajectory of the permanent magnet 18. It measures the change in magnetic field strength in real time and converts the magnetic field signal into a Hall voltage signal for output.

[0047] The control circuit board 23 is a conventional circuit board that integrates signal processing, logic judgment and power drive functions. It uses a microprocessor to analyze Hall voltage signals in real time and can programmatically adjust pulse parameters to adapt to different motion frequency requirements.

[0048] The operation of the electromagnet 8 drive unit is based on the principle of magnetic pole repulsion and closed-loop feedback control. The specific process is as follows: In the initial state setting, the electromagnet 8 and the adjacent permanent magnet 18 of the auxiliary magnet have the same magnetic polarity on one side, and the control circuit board 23 is in standby monitoring state.

[0049] The process of motion cycle: During the startup phase, the control circuit board 23 sends the first pulse signal to the electromagnet 8, which instantly generates a strong magnetic field. Due to the repulsion between like poles, the permanent magnet 18 experiences a repulsive force to the upper right and begins to move in a circular motion.

[0050] During the trajectory control phase, when the permanent magnet 18 moves into the auxiliary magnet region, the auxiliary magnet generates an additional repulsive force. Under the combined action of the repulsive force and gravity, the permanent magnet 18 changes its direction of motion and deflects to the lower right.

[0051] During the position detection phase, the permanent magnet 18 continues to move. When it is directly aligned with the gaussmeter Hall probe 9, the magnetic field induction intensity reaches its peak. The Hall probe outputs the maximum Hall voltage signal (typically 2-5V), at which point the control circuit board 23 detects the signal extreme value.

[0052] During the power replenishment phase, upon detecting a peak signal, the control circuit board 23 immediately sends a new pulse electrical signal to the electromagnet 8. The pulse width and intensity are precisely calculated or determined through multiple experiments to ensure that just the right amount of repulsive force is provided. During the inertial motion phase, under the repulsive force of the electromagnet 8 and its own inertia, the permanent magnet 18 continues to move to the upper left, completing half a motion cycle. This process is then repeated under the influence of the auxiliary magnet on the other side.

[0053] In one embodiment, the target unit includes a target substrate 14 and a target sheet 15.

[0054] The target substrate 14 is connected to the second connecting flange 12 of the bearing, and a cooling medium channel is arranged inside the target substrate 14; the target plate 15 is laid on the target substrate 14, close to the side of the beam pipe 2.

[0055] It should be noted that the target unit directly undertakes the important tasks of bombarding the particle beam and generating nuclear reactions.

[0056] The target substrate 14 can be made of a high thermal conductivity metal material (such as oxygen-free copper or aluminum alloy), with a thickness of typically 5-10 mm, balancing mechanical strength and thermal conductivity efficiency. It is fixed to the bearing's second connecting flange 12 by bolts or welding to ensure a stable connection during the pendulum motion.

[0057] Cooling medium channels are provided within the target substrate 14, and the cooling medium channels form a serpentine or spiral path inside the target substrate 14 to maximize the heat exchange area.

[0058] The target 15 is the direct contact surface of the particle beam 1 and can be bonded to the surface of the target substrate 14 by vacuum brazing, sputtering, or electroplating to ensure minimal interfacial thermal resistance. The choice of target material depends on the type of neutron generation reaction, and this application does not limit it.

[0059] like Figure 1 As shown, for example, the target center 16 of the target plate 15 is not coaxial with the beam channel 2. When the particle beam 1 bombards the target plate 15, a beam spot center 17 is formed on the target plate 15. Figure 1 The right side of the middle section shows the beam spot scanning area 22 in the target sheet. Using the particle beam axis 19 and bearing axis 20 in the left figure, the beam spot scanning area 22 in the target sheet on the left and right sides are correlated. On the right side, the beam spot 21 formed by the particle beam 1 on the target sheet 15 can be observed.

[0060] In one embodiment, the vacuum chamber body includes a cooling unit, the cooling unit comprising: Cooling medium inlet 4 is located on the circumferential wall of the target chamber 3; Cooling medium outlet 26 is located on the circumferential wall of the target chamber 3; The cooling medium transfer hose includes a cooling medium inlet hose 13 and a cooling medium outlet hose 27. The cooling medium inlet hose 13 is connected to both the cooling medium inlet 4 and the inlet of the cooling medium channel. The cooling medium outlet hose 27 is connected to both the cooling medium outlet 26 and the outlet of the cooling medium channel. Preferably, the cooling medium transfer hose is a metal hose.

[0061] It should be noted that the main function of the cooling unit is to dissipate the heat generated on the surface of the target plate 15 in a timely manner through forced circulation of the cooling medium, ensuring that the temperature of the target plate 15 is always maintained within a safe operating range (usually below 200°C). A closed-loop design, combined with the motion characteristics of the target unit, achieves efficient heat dissipation.

[0062] The cooling medium inlet 4 and outlet serve as the inlet and outlet for heat exchange. The cooling medium transfer hose can adopt a multi-layer metal corrugated pipe structure with a polytetrafluoroethylene coating to prevent cooling medium contamination. The cooling medium transfer hose has a margin within the target chamber 3 to allow the target to freely perform compound swing motion.

[0063] Secondly, this application provides a method for a magnetically driven vacuum-sealed compound pendulum motion target, applied to the aforementioned magnetically driven vacuum-sealed compound pendulum motion target, the method comprising: The electromagnet and the auxiliary magnet are arranged perpendicularly to each other; The electromagnet and the auxiliary magnet have the same magnetic polarity on the side adjacent to the permanent magnet; When the electromagnet operates through a pulsed electrical signal, the permanent magnet begins to move in a circular motion to one side under the action of repulsive force. When the permanent magnet reaches the position of the auxiliary magnet, the auxiliary magnet generates a repulsive force on the permanent magnet. Under the combined action of the repulsive force and the permanent magnet's own weight, the permanent magnet moves downward in a circular motion. The control circuit board monitors the Hall voltage signal; When the permanent magnet is directly opposite the Hall probe of the Gaussian meter, the magnetic field magnetic induction intensity value measured by the Hall probe of the Gaussian meter is the largest, and the Hall voltage signal formed is the largest. When the control circuit board detects that the Hall voltage signal is at its maximum, it sends a pulse electrical signal to the electromagnet. The electromagnet generates a magnetic field that acts on the permanent magnet, generating a repulsive force on the permanent magnet. Under the combined action of repulsive force and its own inertia, the permanent magnet continues to move in a circumferential direction, forming a cyclic reciprocating motion of the permanent magnet; When the permanent magnet reciprocates, the motion of the permanent magnet is transmitted to the target unit through the bearing rotation unit, so that the target unit reciprocates accordingly.

[0064] It should be noted that for a detailed description of a magnetically driven vacuum-sealed compound pendulum motion target method, please refer to the description of a magnetically driven vacuum-sealed compound pendulum motion target, which will not be repeated here.

[0065] It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions, and although a logical order is shown in the flowchart, in some cases the steps shown or described may be executed in a different order than that shown here.

[0066] Obviously, those skilled in the art should understand that the various units or steps of this application described above can be implemented using general-purpose computing devices. They can be centralized on a single computing device or distributed across a network of multiple computing devices. Optionally, they can be implemented using computer-executable program code, thereby storing them in a storage device for execution by a computing device, or fabricating them separately as individual integrated circuit modules, or fabricating multiple modules or steps into a single integrated circuit module. Thus, this application is not limited to any particular combination of hardware and software.

[0067] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A magnetically driven vacuum-sealed compound pendulum motion target, characterized in that, include: The vacuum chamber body is used to provide a vacuum environment for the particle beam to impact the target unit; A bearing rotation unit is disposed inside the vacuum chamber body and connected to the target unit, used to adjust the target unit so that the particle beam impacts different positions of the target unit; An electromagnet driving unit includes an electromagnet, a gaussmeter Hall probe, a permanent magnet, a control circuit board, and auxiliary magnets. The electromagnet is arranged outside the vacuum chamber body, the permanent magnet is arranged outside the bearing rotation unit, and multiple auxiliary magnets are arranged outside the vacuum chamber body. Each permanent magnet and auxiliary magnet corresponds to the electromagnet at a specific angle. The gaussmeter Hall probe, arranged outside the vacuum chamber body, measures the magnetic field strength between the electromagnet and the permanent magnet, and between the electromagnet and the auxiliary magnets, and sends the Hall voltage signal to the control circuit board. The control circuit board monitors the Hall voltage signal. When the Hall voltage signal reaches its maximum value, the control circuit board sends a pulse electrical signal to the electromagnet to adjust the electromagnet electrodes.

2. The magnetically driven vacuum-sealed compound pendulum motion target according to claim 1, characterized in that, The vacuum chamber body includes a vacuum chamber unit, which comprises: A beam conduit is used to connect to the device that generates the particle beam and to provide a path for the particle beam to travel. The target chamber is connected to the beam conduit; A target chamber sealing flange is connected to the side of the target chamber away from the beam pipe, wherein the beam pipe, the target chamber, and the target chamber sealing flange constitute a vacuum chamber.

3. The magnetically driven vacuum-sealed compound pendulum motion target according to claim 2, characterized in that, The bearing rotation unit includes: The bearing's first connecting flange is connected to the inner wall of the target chamber; The bearing is mounted on the first connecting flange of the bearing; The second bearing connecting flange is rotatably connected to the first bearing connecting flange via the bearing. The side of the second bearing connecting flange closest to the target chamber sealing flange is connected to the target unit. The second connecting flange of the bearing rotates relative to the first connecting flange of the bearing, causing the target unit to rotate so that the particle beam impacts different positions of the target unit.

4. The magnetically driven vacuum-sealed compound pendulum motion target according to claim 3, characterized in that, The target unit includes: The target substrate is connected to the second connecting flange of the bearing, and a cooling medium channel is arranged inside the target substrate; The target sheet is laid on the target substrate, on one side close to the beam channel.

5. The magnetically driven vacuum-sealed compound pendulum motion target according to claim 2, characterized in that, The vacuum chamber body includes a cooling unit, which comprises: The cooling medium inlet is located on the circumferential wall of the target chamber; The cooling medium outlet is located on the circumferential wall of the target chamber; A cooling medium transfer hose includes a cooling medium inlet hose and a cooling medium outlet hose. The cooling medium inlet hose is connected to the cooling medium inlet and the inlet of the cooling medium channel, respectively. The cooling medium outlet hose is connected to the cooling medium outlet and the outlet of the cooling medium channel, respectively.

6. The magnetically driven vacuum-sealed compound pendulum motion target according to claim 5, characterized in that, The cooling medium transfer hose is a metal hose.

7. The magnetically driven vacuum-sealed compound pendulum motion target according to claim 1, characterized in that, The electromagnet drive unit also includes: The support frame has a "U" shaped structure with an opening at the top. The electromagnet is installed on the bottom inner wall of the support frame, and auxiliary magnets are installed on the side inner walls of the support frame, with the two auxiliary magnets arranged opposite each other.

8. The magnetically driven vacuum-sealed compound pendulum motion target according to claim 1, characterized in that, The auxiliary magnet is an electromagnet or a permanent magnet.

9. The magnetically driven vacuum-sealed compound pendulum motion target according to claim 2, characterized in that, The beam pipe and the target chamber, as well as the target chamber and the target chamber sealing flange, are sealed with O-rings.

10. A method for realizing a magnetically driven vacuum-sealed compound pendulum motion target, characterized in that, The method, applied to the magnetically driven vacuum-sealed compound pendulum motion target according to any one of claims 1-9, comprises: The electromagnet and the auxiliary magnet are arranged perpendicularly to each other; The electromagnet and the auxiliary magnet have the same magnetic polarity on the side adjacent to the permanent magnet; When the electromagnet operates through a pulsed electrical signal, the permanent magnet begins to move in a circular motion to one side under the action of repulsive force; When the permanent magnet reaches the position of the auxiliary magnet, the auxiliary magnet generates a repulsive force on the permanent magnet. Under the combined action of the repulsive force and the permanent magnet's own weight, the permanent magnet moves downward in a circular motion. The control circuit board monitors the Hall voltage signal; When the permanent magnet is directly opposite the Hall probe of the Gaussian meter, the magnetic field magnetic induction intensity value measured by the Hall probe of the Gaussian meter is the largest, and the Hall voltage signal formed is the largest. When the control circuit board detects that the Hall voltage signal is at its maximum, it sends a pulse electrical signal to the electromagnet. The electromagnet generates a magnetic field that acts on the permanent magnet, generating a repulsive force on the permanent magnet. Under the combined action of repulsive force and its own inertia, the permanent magnet continues to move in a circumferential direction, forming a cyclic reciprocating motion of the permanent magnet; When the permanent magnet reciprocates, the motion of the permanent magnet is transmitted to the target unit through the bearing rotation unit, so that the target unit reciprocates accordingly.

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