Manufacturing method of display panel, mask plate and display panel

Abstract

The application discloses a manufacturing method of a display panel, a mask and the display panel. The manufacturing method of the display panel comprises the following steps: emitting a plurality of red aero-gel particles with a first electric property, a plurality of green aero-gel particles with the first electric property and a plurality of blue aero-gel particles with the first electric property into a plurality of first containing spaces, a plurality of second containing spaces and a plurality of third containing spaces of a mask respectively; opening outlet switches of the first containing spaces, the second containing spaces and the third containing spaces, starting an inert gas flow, forming a red light-emitting layer in a plurality of first opening areas, forming a green light-emitting layer in a plurality of second opening areas, and forming a blue light-emitting layer in a plurality of third opening areas; the charged aero-gel particles are formed by wrapping the light-emitting particles with the charged aero-gel, and the charged aero-gel particles with different colors are selectively allowed to pass through the mask, so that the process of the patterned light-emitting material is realized, the cost is saved, and the product quality is improved.

Description

Technical Field

[0001] This application relates to the field of display technology, and in particular to a display panel, a method for manufacturing the same, a photomask, and the display panel. Background Technology

[0002] In OLED (Organic Light-Emitting Diode) devices, the organic light-emitting unit (OLED) is the core component, which needs to be formed through a vapor deposition process. Different colored OLEDs require separate vapor deposition steps due to differences in materials, formation location, and size. Generally, the luminescent material of the OLED needs to be deposited using a photomask. The photomask is placed close to the substrate, and channels are created on the photomask to allow the luminescent material to pass through. Areas on the photomask without channels prevent the luminescent material from passing through, thus forming a patterned luminescent material.

[0003] One method involves moving a photomask to form light-emitting units of different colors, which can easily lead to misalignment defects. Furthermore, creating separate photomasks for each color of light-emitting unit is costly and requires photomask replacement, also resulting in misalignment defects. Summary of the Invention

[0004] The purpose of this application is to provide a method for manufacturing a display panel, a photomask, and a display panel. The method utilizes electrically charged gel to encapsulate light-emitting particles to form electrically charged gel particles. By controlling the electrically charged gel particles to selectively pass through the photomask through an external electric field, a patterned light-emitting material manufacturing process can be achieved, saving costs and improving product quality.

[0005] This application discloses a method for manufacturing a display panel, including the following steps:

[0006] Provide a substrate;

[0007] Multiple red luminescent material particles are combined with an aerogel polymer precursor to form multiple red aerogel particles with a first charge; multiple green luminescent material particles are combined with an aerogel polymer precursor to form multiple green aerogel particles with a first charge; and multiple blue luminescent material particles are combined with an aerogel polymer precursor to form multiple blue aerogel particles with a first charge.

[0008] Multiple red aerogel particles with a first charge, multiple green aerogel particles with a first charge, and multiple blue aerogel particles with a first charge are respectively launched into multiple first containment spaces, multiple second containment spaces, and multiple third containment spaces of the mask.

[0009] Open the outlet switches of the first, second, and third containment spaces, activate the inert airflow, and after multiple red aerogel particles with a first electrical charge undergo physical changes, release multiple red luminescent particles from the outlet of the first containment space; after multiple green aerogel particles with a first electrical charge undergo physical changes, release multiple green luminescent particles from the outlet of the second containment space; and after multiple blue aerogel particles with a first electrical charge undergo physical changes, release multiple blue luminescent particles from the outlet of the third containment space.

[0010] A red light-emitting layer is formed in a plurality of first opening regions of the substrate, a green light-emitting layer is formed in a plurality of second opening regions of the substrate, and a blue light-emitting layer is formed in a plurality of third opening regions of the substrate.

[0011] The photomask is provided with multiple first accommodating spaces, multiple second accommodating spaces and multiple third accommodating spaces. The first accommodating spaces are provided corresponding to the first opening area, the second accommodating spaces are provided corresponding to the second opening area, and the third accommodating spaces are provided corresponding to the third opening area.

[0012] Optionally, the step of launching multiple red aerogel particles with a first electrical charge, multiple green aerogel particles with a first electrical charge, and multiple blue aerogel particles with a first electrical charge into multiple first accommodating spaces, multiple second accommodating spaces, and multiple third accommodating spaces of the mask respectively includes:

[0013] A first electric field is applied to the second and third containment spaces, and multiple red aerogel particles with the first electric field are emitted into the multiple first containment spaces inside the mask.

[0014] A first electric field is applied to the first and third containment spaces, and multiple green aerogel particles with the first electric field are emitted into multiple second containment spaces inside the mask.

[0015] A first electric field is applied to the first and second containment spaces, and a plurality of blue aerogel particles with the first electric field are emitted into a plurality of third containment spaces inside the mask.

[0016] Optionally, a first electrode and a second electrode are disposed in the first accommodating space, the first electrode being disposed on the entrance side of the first accommodating space, and the second electrode being disposed within the first accommodating space;

[0017] A third electrode and a fourth electrode are provided in the second accommodating space. The third electrode is located on the entrance side of the second accommodating space, and the fourth electrode is located inside the second accommodating space.

[0018] A fifth electrode and a sixth electrode are provided in the third accommodating space. The fifth electrode is located on the entrance side of the third accommodating space, and the sixth electrode is located inside the third accommodating space.

[0019] The step of applying a first electric field to the second and third containment spaces, and emitting a plurality of red aerogel particles with the first electric charge into the plurality of first containment spaces inside the mask, includes:

[0020] A first electrical voltage is applied to the third electrode and the fifth electrode to form a first electrical electric field in the second accommodating space and the third accommodating space respectively, so as to prevent the red aerogel particles with the first electrical charge from entering.

[0021] A second electrical voltage is applied to the second electrode, and a ground voltage is applied to the first electrode. A plurality of red aerogel particles with a first electrical charge are emitted into a plurality of the first containment spaces and adsorbed by the second electrode.

[0022] The step of applying a first electric field to the first and third containment spaces, and emitting multiple green aerogel particles with the first electric charge into multiple second containment spaces inside the mask, includes:

[0023] A first electrical voltage is applied to the first electrode and the fifth electrode to form a first electrical electric field in the first accommodating space and the third accommodating space respectively, so as to prevent the green aerogel particles with the first electrical charge from entering.

[0024] A second electrical voltage is applied to the fourth electrode, and a ground voltage is applied to the third electrode. A plurality of green aerogel particles with a first electrical charge are emitted into a plurality of second containment spaces and adsorbed by the fourth electrode.

[0025] The step of applying a first electric field to the first and second containment spaces, and emitting multiple blue aerogel particles with the first electric field into multiple third containment spaces inside the mask, includes:

[0026] A first electrical voltage is applied to the first electrode and the third electrode to form a first electrical electric field in the first accommodating space and the second accommodating space respectively, so as to prevent the blue aerogel particles with the first electrical charge from entering.

[0027] A second electrical voltage is applied to the sixth electrode, and a ground voltage is applied to the fifth electrode. A plurality of blue aerogel particles with a first electrical charge are emitted into a plurality of the third containment spaces and adsorbed by the sixth electrode.

[0028] Optionally, the step of opening the outlet switches of the first, second, and third containment spaces, activating the inert airflow, and releasing multiple red luminescent particles from the outlet of the first containment space after multiple red aerogel particles with a first electrical charge undergo a physical change, releasing multiple green luminescent particles from the outlet of the second containment space after multiple green aerogel particles with a first electrical charge undergo a physical change, and releasing multiple blue luminescent particles from the outlet of the third containment space after multiple blue aerogel particles with a first electrical charge undergo a physical change includes:

[0029] The photomask is subjected to high-frequency mechanical wave processing to cause physical changes in multiple red aerogel particles with a first electrical charge, multiple green aerogel particles with a first electrical charge, and multiple blue aerogel particles with a first electrical charge.

[0030] Open the outlet switches of the first, second, and third containment spaces to activate the inert airflow;

[0031] Multiple red luminescent particles are emitted from the outlet of the first accommodating space toward the substrate, multiple green luminescent particles are emitted from the outlet of the second accommodating space toward the substrate, and multiple blue luminescent particles are emitted from the outlet of the third accommodating space toward the substrate.

[0032] Optionally, after providing a substrate, the method further includes the step of:

[0033] Multiple common-layer aerogel particles with a first charge are formed by combining common-layer particles with aerogel polymer precursors.

[0034] The common layer aerogel particles with the first charge are respectively emitted into multiple first containment spaces, multiple second containment spaces, and multiple third containment spaces of the mask;

[0035] Open the outlet switches of the first, second, and third containment spaces, activate the inert airflow, and after multiple common layer aerogel particles with the first charge undergo physical changes, release multiple common layer particles from the outlets of the first, second, and third containment spaces.

[0036] A common layer is formed in the first opening region, the second opening region, and the third opening region of the substrate.

[0037] The red light-emitting layer, the green light-emitting layer, and the blue light-emitting layer are respectively disposed on the side of the common layer away from the substrate.

[0038] Optionally, after providing a substrate, the method further includes the step of:

[0039] Multiple common-layer aerogel particles with a second charge are formed by combining common-layer particles with aerogel polymer precursors.

[0040] The step of launching multiple red aerogel particles with a first electrical charge, multiple green aerogel particles with a first electrical charge, and multiple blue aerogel particles with a first electrical charge into multiple first accommodating spaces, multiple second accommodating spaces, and multiple third accommodating spaces of a mask includes the following steps:

[0041] Multiple common-layer aerogel particles with a second charge are emitted into multiple first-enclosure spaces, multiple second-enclosure spaces, and multiple third-enclosure spaces within a mask, and are attracted to a seventh electrode with a first charge.

[0042] Multiple red aerogel particles with a first charge, multiple green aerogel particles with a first charge, and multiple blue aerogel particles with a first charge are respectively launched into multiple first containment spaces, multiple second containment spaces, and multiple third containment spaces of the mask.

[0043] The step of opening the outlet switches of the first, second, and third containment spaces, activating the inert airflow, and releasing multiple red luminescent particles from the outlet of the first containment space after multiple red aerogel particles with a first electrical charge undergo a physical change, releasing multiple green luminescent particles from the outlet of the second containment space after multiple green aerogel particles with a first electrical charge undergo a physical change, and releasing multiple blue luminescent particles from the outlet of the third containment space after multiple blue aerogel particles with a first electrical charge undergo a physical change, further includes:

[0044] After opening the outlet switches of the first, second, and third accommodating spaces and applying a grounding voltage to the seventh electrode, the inert gas flow is turned on. Multiple common layer aerogel particles with the second charge undergo physical changes and release multiple common layer particles, forming a common layer in multiple opening areas of the substrate.

[0045] After applying grounding voltage to the second, fourth, and sixth electrodes respectively, the inert airflow is activated. Multiple red aerogel particles with the first charge undergo physical changes and release multiple red luminescent particles from the outlet of the first containment space; multiple green aerogel particles with the first charge undergo physical changes and release multiple green luminescent particles from the outlet of the second containment space; and multiple blue aerogel particles with the first charge undergo physical changes and release multiple blue luminescent particles from the outlet of the third containment space.

[0046] The first, second, and third accommodating spaces are each provided with a seventh electrode; the red, green, and blue light-emitting layers are respectively disposed on the side of the common layer away from the substrate; the first electrical charge is positive and the second electrical charge is negative.

[0047] This application also discloses a photomask for the above-described method of manufacturing a display panel. The photomask includes a photomask body, a plurality of first receiving spaces, a plurality of second receiving spaces, and a plurality of third receiving spaces disposed on the photomask body. A first electrode and a second electrode are disposed in the first receiving space, with the first electrode disposed at the entrance side of the first receiving space and the second electrode disposed within the first receiving space. A third electrode and a fourth electrode are disposed in the second receiving space, with the third electrode disposed at the entrance side of the second receiving space and the fourth electrode disposed within the second receiving space. A fifth electrode and a sixth electrode are disposed in the third receiving space, with the fifth electrode disposed at the entrance side of the third receiving space and the sixth electrode disposed within the third receiving space. A seventh electrode is disposed in each of the first, second, and third receiving spaces, with a plurality of seventh electrodes disposed at the exit side of the first, second, and third receiving spaces, respectively.

[0048] Optionally, the mask further includes multiple exit switches, which are respectively disposed on the exit side of the first accommodating space, the exit side of the second accommodating space, and the exit side of the third accommodating space; the multiple exit switches are used to open or close simultaneously under voltage control; each exit switch includes a deformation structure, which is used to switch between a first state and a second state under voltage control; in the first state, the deformation structure has an opening, and the multiple exit switches are simultaneously in the open state; in the second state, the deformation structure has the opening closed, and the multiple exit switches are simultaneously in the closed state.

[0049] This application discloses a display panel formed using the aforementioned display panel manufacturing method. The display panel includes a substrate, a pixel definition layer disposed on the substrate, and a plurality of light-emitting units. The pixel definition layer has a plurality of openings to form a plurality of opening regions. The plurality of light-emitting units are respectively disposed within the plurality of opening regions, and adjacent light-emitting units are separated by the pixel definition layer. Each light-emitting unit includes a bottom electrode, a common layer, a light-emitting layer, and a top electrode. The light-emitting layer is disposed between the common layer and the top electrode, and the common layer is disposed between the bottom electrode and the light-emitting layer.

[0050] Optionally, the bottom electrode has an arc surface on the side away from the substrate, and the thickness of the bottom electrode gradually increases from the center line of the bottom electrode to the surrounding area; wherein, the bottom electrode includes a reflective metal layer and a transparent electrode layer, the transparent electrode layer is disposed on the side of the reflective metal layer away from the substrate, and the thickness of the transparent electrode layer gradually increases from the center line of the bottom electrode to the surrounding area.

[0051] In this application, electrically charged gel particles are formed by encapsulating luminescent particles with charged gel, thus imbuing each luminescent particle with electrical properties. An external electric field is used to selectively guide the charged gel particles of different colors into multiple containment spaces of a photomask. For example, red aerogel particles with a first electrical charge enter the first containment space, green aerogel particles with a first electrical charge enter the second containment space, and blue aerogel particles with a first electrical charge enter the third containment space. Subsequently, through the same process, the aerogel particles of different colors in different containment spaces undergo physical changes, releasing luminescent particles of corresponding colors, thereby forming red, green, and blue luminescent layers in different opening areas. This achieves the formation of luminescent layers of different colors through the same process without altering the photomask. This application realizes the process of fabricating patterned luminescent materials by controlling the containment spaces at different locations to allow different luminescent particles to pass through without moving the photomask. In contrast, this application eliminates the need for multiple photomasks to accommodate light-emitting units in different positions, thus saving the cost of manufacturing three photomasks and reducing the overall production cost of the display panel, thereby enhancing product competitiveness. Furthermore, it eliminates the need to move the same photomask multiple times to manufacture light-emitting units in different locations. This avoids multiple photomask movements, saving alignment steps, reducing the possibility of misalignment, and improving the quality of the display panel. Attached Figure Description

[0052] The accompanying drawings, which form part of the specification, are used to provide a further understanding of the embodiments of this application and illustrate the implementation methods of this application, together with the textual description, to explain the principles of this application. Obviously, the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any creative effort. In the drawings:

[0053] Figure 1 This is a schematic diagram illustrating the steps of a method for manufacturing a display panel according to the first embodiment of this application;

[0054] Figure 2 This is a schematic diagram of a photomask used in this application;

[0055] Figure 3This is a schematic diagram illustrating the steps of a method for manufacturing a display panel according to the second embodiment of this application;

[0056] Figure 4 This is a schematic diagram of the manufacturing process of the display panel according to the second embodiment of this application;

[0057] Figure 5 This is a schematic diagram of the deformation structure of the photomask in this application;

[0058] Figure 6 This is a schematic diagram illustrating the steps of a method for manufacturing a display panel according to the third embodiment of this application;

[0059] Figure 7 This is a process schematic diagram of another display panel according to the third embodiment of this application;

[0060] Figure 8 This is a schematic diagram of the display panel of this application.

[0061] Wherein, 100 is a display panel; 110 is a substrate; 111 is a pixel definition layer; 111a is a first opening area; 111b is a second opening area; 111c is a third opening area; 120R is a red light-emitting unit; 120G is a green light-emitting unit; 120B is a blue light-emitting unit; 121 is a bottom electrode; 1211 is a transparent electrode layer; 1212 is a reflective metal layer; 122 is a common layer; 123R is a red light-emitting layer; 123G is a green light-emitting layer; 12 3B, Blue light-emitting layer; 124, Top electrode; 200, Mask; 210, Mask body; 211, Inlet; 212, Outlet; 220, First accommodating space; 221, First electrode; 222, Second electrode; 230, Second accommodating space; 231, Third electrode; 232, Fourth electrode; 240, Third accommodating space; 241, Fifth electrode; 242, Sixth electrode; 250, Seventh electrode; 260, Outlet switch; 261, Deformation structure. Detailed Implementation

[0062] It should be understood that the terminology, specific structural and functional details used herein are merely for describing particular embodiments and are representative. However, this application may be implemented in many alternative forms and should not be construed as being limited to the embodiments set forth herein.

[0063] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating relative importance or implying the number of technical features indicated. Therefore, unless otherwise stated, a feature specified as "first" or "second" may explicitly or implicitly include one or more of that feature; "multiple" means two or more. Furthermore, terms such as "upper," "lower," "left," "right," "vertical," and "horizontal," indicating orientation or positional relationships, are based on the orientation or relative positional relationships shown in the accompanying drawings and are only for the purpose of simplifying the description of this application, not indicating that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this application. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0064] The present application will now be described in detail with reference to the accompanying drawings and optional embodiments.

[0065] Figure 1 This is a schematic diagram illustrating the steps of a method for manufacturing a display panel according to the first embodiment of this application. See also... Figure 1 As shown, this application discloses a method for manufacturing a display panel, including the following steps:

[0066] S10: Provides a substrate;

[0067] S20: Multiple red luminescent material particles are combined with an aerogel polymer precursor to form multiple red aerogel particles with a first charge; multiple green luminescent material particles are combined with an aerogel polymer precursor to form multiple green aerogel particles with a first charge; and multiple blue luminescent material particles are combined with an aerogel polymer precursor to form multiple blue aerogel particles with a first charge.

[0068] S30: Multiple red aerogel particles with a first charge, multiple green aerogel particles with a first charge, and multiple blue aerogel particles with a first charge are respectively launched into multiple first containment spaces, multiple second containment spaces, and multiple third containment spaces of the mask.

[0069] S40: Open the outlet switches of the first, second, and third containment spaces, activate the inert airflow, and after multiple red aerogel particles with a first charge undergo physical changes, release multiple red luminescent particles from the outlet of the first containment space; after multiple green aerogel particles with a first charge undergo physical changes, release multiple green luminescent particles from the outlet of the second containment space; and after multiple blue aerogel particles with a first charge undergo physical changes, release multiple blue luminescent particles from the outlet of the third containment space.

[0070] S50: A red light-emitting layer is formed in a plurality of first opening regions of the substrate, a green light-emitting layer is formed in a plurality of second opening regions of the substrate, and a blue light-emitting layer is formed in a plurality of third opening regions of the substrate.

[0071] In this application, electrically charged gel particles are formed by encapsulating luminescent particles with charged gel, thus imbuing each luminescent particle with electrical properties. An external electric field is used to selectively guide the charged gel particles of different colors into multiple containment spaces of a photomask. For example, red aerogel particles with a first electrical charge enter the first containment space, green aerogel particles with a first electrical charge enter the second containment space, and blue aerogel particles with a first electrical charge enter the third containment space. Subsequently, through the same process, the aerogel particles of different colors in different containment spaces undergo physical changes, releasing luminescent particles of corresponding colors, thereby forming red, green, and blue luminescent layers in different opening areas. This achieves the formation of luminescent layers of different colors through the same process without altering the photomask. This application realizes the process of fabricating patterned luminescent materials by controlling the containment spaces at different locations to allow different luminescent particles to pass through without moving the photomask. In contrast, this application eliminates the need for multiple photomasks to accommodate light-emitting units in different positions, thus saving the cost of manufacturing three photomasks and reducing the overall production cost of the display panel, thereby enhancing product competitiveness. Furthermore, it eliminates the need to move the same photomask multiple times to manufacture light-emitting units in different locations. This avoids multiple photomask movements, saving alignment steps, reducing the possibility of misalignment, and improving the quality of the display panel.

[0072] The substrate has a first opening region, a second opening region, and a third opening region, with different colored sub-pixels formed in different opening regions. In this embodiment, a red sub-pixel is formed in the first opening region, a green sub-pixel is formed in the second opening region, and a blue sub-pixel is formed in the third opening region.

[0073] In step S20, electrically charged gel materials are used to encapsulate light-emitting particles of different colors in stages, thereby forming red, green, and blue electrically charged gel particles, respectively. The three types of electrically charged gel particles are stored in different evaporation sources. In subsequent processes, the electrically charged gel particles of different colors are sprayed onto a photomask and a substrate, respectively. The charge of the different colored electrically charged gel particles can be controlled. In this embodiment, red, green, and blue electrically charged aerogel particles with a first charge are used as examples for illustration.

[0074] Specifically, aerogels are nanoscale porous solid materials formed by replacing the liquid phase in a gel with gas through a specific drying process using the molten gel method. By selecting specific raw materials or introducing charged functional groups during / after synthesis, the charge properties of aerogels can be precisely controlled, thereby achieving positive or negative charge properties.

[0075] The electrical properties of aerogels primarily stem from their large specific surface area and surface chemical properties. The generation of charge occurs in several ways. First, intrinsic charge: aerogel materials, such as silica, ionize or adsorb ions in solution, thus becoming charged. For example, the numerous silanol groups (-Si-OH) on the surface of silica aerogel dissociate in water according to pH, generating a negative charge (-Si-O-). Second, functionalization modification: chemically grafting or introducing functional groups or molecules with permanent charges onto the aerogel's backbone network gives it a stable charge. For example, introducing quaternary ammonium groups (-N+R3) and amino groups (-NH2, which protonates to -NH3+ under acidic conditions) makes the aerogel positively charged. Introducing sulfonic acid groups (-SO3-) and carboxyl groups (-COOH, which ionizes to -COO-) makes the aerogel negatively charged. Third, composite materials formed by combining aerogels with inherently charged materials. For example, it can be combined with charged polymers, including negatively charged sodium polystyrene sulfonate (PSS) and positively charged polydiallyldimethylammonium chloride (PDADMAC) and other polyelectrolytes. It can also be combined with charged nanomaterials, such as graphene oxide, which has numerous carboxyl and hydroxyl groups on its surface and is negatively charged.

[0076] Taking the preparation of positively charged aerogels as an example, the main goal is to introduce positively charged groups. For example, in amino-modified silica aerogels, during the molten gelation process, amino-containing silane precursors (such as APTES: 3-aminopropyltriethoxysilane) are co-hydrolyzed and condensed with tetraethyl orthosilicate (TEOS). The resulting gel network contains a large number of -NH2 groups. In an acidic environment, these amino groups protonate (-NH3+), thus making the entire aerogel positively charged. Another example is quaternization modification: through subsequent chemical reactions, the amino groups in the gel are further quaternized to generate permanently positively charged quaternary ammonium salt groups (-N+R3), whose charge is unaffected by pH. Another example is polymer-based aerogels: aerogels are prepared directly using positively charged polymers (such as chitosan, whose amino groups are positively charged under acidic conditions) as raw materials. For example, composite magnetic positively charged gels: For example, Fe3O4 nanoparticles (which can be positively modified) are combined with positively charged polymers to prepare aerogels that are both positively charged and magnetic.

[0077] Taking the preparation of negatively charged aerogels as an example, the main goal is to introduce negatively charged groups. For instance, sulfonic acid-modified SiO2 aerogels are synthesized using silane coupling agents containing sulfonic acid groups. Carboxyl-modified SiO2 aerogels are synthesized using silane coupling agents containing carboxyl groups (such as carboxyethylsilane triol). Graphene oxide (GO) aerogels are another example; graphene oxide (GO) itself contains a large number of negatively charged groups (-COOH, -OH), and the aerogels assembled from it naturally possess strong negative charge. Cellulose nanofiber (CNF) aerogels are another example; cellulose nanofibers (CNF) contain carboxyl groups on their surface, and the aerogels prepared from them are also negatively charged. Finally, polymer-based aerogels are prepared using negatively charged polymers, such as sodium alginate (containing -COO-).

[0078] Specifically, by utilizing a reversible gel network, aerogels can encapsulate luminescent particles during formation and achieve controlled release under specific conditions. This encapsulation can be achieved through co-gelation, gelation, or supercritical drying. Co-gelation involves directly dispersing target solute particles in the aerogel precursor, such as dispersing drug powder or nanocatalysts in a silicon source (e.g., TEOS), cellulose solution, or polymer solution. Gelation involves adjusting temperature, pH, or adding a crosslinking agent to gel the sol system. During the formation of the three-dimensional network, solute particles are physically trapped in the network voids or structure. Supercritical drying involves subsequent supercritical drying (to avoid pore structure collapse) to obtain a composite aerogel encapsulating solute particles.

[0079] This application utilizes multiple vapor deposition processes to project luminescent particles of different colors into containment spaces at different locations. Specifically, step S30 includes:

[0080] S310: Apply a first electric field to the second and third containment spaces, and emit multiple red aerogel particles with the first electric field into multiple first containment spaces inside the mask.

[0081] S320: A first electric field is applied to the first and third containment spaces, and a plurality of green aerogel particles with the first electric field are emitted into a plurality of second containment spaces inside the mask.

[0082] S330: Apply a first electric field to the first and second containment spaces, and emit multiple blue aerogel particles with the first electric field into multiple third containment spaces inside the mask.

[0083] The photomask is provided with multiple first accommodating spaces, multiple second accommodating spaces and multiple third accommodating spaces. The first accommodating spaces are provided corresponding to the first opening area, the second accommodating spaces are provided corresponding to the second opening area, and the third accommodating spaces are provided corresponding to the third opening area.

[0084] In this embodiment, the deposition process is performed in three stages by adjusting the three deposition sources. Furthermore, by adjusting the electric fields within the first, second, and third containment spaces, aerogel particles of different colors carrying a first electrical charge are directed to different locations within the containment spaces. Through the principle of electric field repulsion, red aerogel particles carrying a first electrical charge cannot enter the second and third containment spaces, green aerogel particles carrying a first electrical charge cannot enter the first and third containment spaces, and blue aerogel particles carrying a first electrical charge cannot enter the first and second containment spaces.

[0085] It is understood that the emission order of the red, green, and blue aerogel particles with the first electrical charge can be selected according to actual circumstances, and this application does not limit the emission order of these particles. This application uses an example where the first electrical charge is positive and the second electrical charge is negative.

[0086] In step S40, this embodiment employs a physical collapse method to induce physical changes in the aerogel particles. Specifically, high-frequency mechanical waves such as ultrasound are used to cause the red, electrically charged aerogel particles to physically collapse, releasing multiple red luminescent particles. This process is called physical disintegration, which uses the mechanical force generated by ultrasound to destroy the aerogel's network structure, causing the luminescent particles to be released. Alternatively, the aerogel network structure can be destroyed by heating to melt the polymer chains or by causing them to move.

[0087] Figure 2 This is a schematic diagram of a photomask used in this application; see [link / reference]. Figure 2As shown, this application also discloses a photomask 200 used in a method for manufacturing a display panel. The photomask 200 includes a photomask body 210, a plurality of first receiving spaces 220, a plurality of second receiving spaces 230, and a plurality of third receiving spaces 240 disposed on the photomask body 210. A first electrode 221 and a second electrode 222 are disposed within each of the first receiving spaces 220, with the first electrode 221 disposed at the entrance 211 side of the first receiving space 220 and the second electrode 222 disposed within the first receiving space 220. A third electrode 231 and a fourth electrode 232 are disposed within each of the second receiving spaces 230, with the third electrode 231 disposed at the entrance 211 side of the second receiving space 230 and the fourth electrode 232 disposed within the second receiving space 230. A fifth electrode 241 and a sixth electrode 242 are disposed within each of the third receiving spaces 240, with the fifth electrode 241 disposed at the entrance 211 side of the third receiving space 240 and the sixth electrode 242 disposed within the third receiving space 240.

[0088] Figure 3 This is a schematic diagram illustrating the steps of a method for manufacturing a display panel according to the second embodiment of this application. Figure 4 This is a schematic diagram of the manufacturing process of the display panel according to the second embodiment of this application. See also: Figures 3 to 4 As shown, this embodiment achieves the application of an electric field by setting electrodes within the accommodating space. In the method for manufacturing the display panel according to the above embodiment, step S310 includes:

[0089] S311: Apply a first electrical voltage to the third electrode and the fifth electrode to form a first electrical electric field in the second accommodating space and the third accommodating space respectively to prevent the red aerogel particles with the first electrical charge from entering;

[0090] S312: A second electrical voltage is applied to the second electrode, and a ground voltage is applied to the first electrode. A plurality of red aerogel particles with a first electrical charge are emitted into a plurality of the first containment spaces and adsorbed by the second electrode.

[0091] The steps in S320 include:

[0092] S321: Apply a first electrical voltage to the first electrode and the fifth electrode to form a first electrical electric field in the first accommodating space and the third accommodating space respectively to prevent the green aerogel particles with the first electrical charge from entering;

[0093] S322: A second electrical voltage is applied to the fourth electrode, and a ground voltage is applied to the third electrode. A plurality of green aerogel particles with a first electrical charge are emitted into a plurality of second containment spaces and adsorbed by the fourth electrode.

[0094] The steps in S330 include:

[0095] S331: Apply a first electrical voltage to the first electrode and the third electrode to form a first electrical electric field in the first accommodating space and the second accommodating space respectively to prevent the blue aerogel particles with the first electrical charge from entering;

[0096] S332: A second electrical voltage is applied to the sixth electrode, and a ground voltage is applied to the fifth electrode. A plurality of blue aerogel particles with a first electrical charge are emitted into a plurality of the third containment spaces and adsorbed by the sixth electrode.

[0097] In this embodiment, taking the first accommodating space as an example, a first electrode and a second electrode are disposed within the first accommodating space. The function of the first electrode is to apply an electric field of the same charge when vapor-depositing aerogel particles of other colors, thereby resisting the entry of charged aerogel particles of other colors. The function of the second electrode is to apply an electric field of opposite charge, so that when red aerogel particles with the first charge enter the first accommodating space, they are adsorbed by the second electrode, thereby causing the red aerogel particles with the first charge to be arranged in an orderly manner within the first accommodating space.

[0098] Taking the first accommodating space as an example, the first accommodating space includes an inlet and an outlet. The inlet is located on the side of the mask body near the evaporation source, and the outlet is located on the side of the mask body near the substrate. The accommodating space of this application can be increased in the thickness direction, thereby increasing the amount of aerogel particles that the accommodating space can accommodate. That is, by increasing the thickness of the mask, the storage of aerogel particles can be achieved.

[0099] Figure 5 This is a schematic diagram of the deformation structure of the photomask in this application. See [link / reference]. Figure 5 As shown, specifically, the mask also includes a plurality of outlet switches 260, which are respectively disposed on the outlet 212 side of the first accommodating space 220, the outlet 212 side of the second accommodating space 230, and the outlet 212 side of the third accommodating space 240; the plurality of outlet switches 260 are used to open or close simultaneously under voltage control; each outlet switch 260 includes a deformation structure 261, which is used to switch between a first state and a second state under voltage control; the deformation structure 261 has an opening in the first state, and the plurality of outlet switches are simultaneously in the open state; the deformation structure 261 closes its opening in the second state, and the plurality of outlet switches are simultaneously in the closed state.

[0100] In this embodiment, piezoelectric ceramic materials can be used to form the corresponding deformation structure. The mechanism of the piezoelectric effect of piezoelectric ceramic materials is that piezoelectric crystals have low symmetry. When deformed by external force, the relative displacement of positive and negative ions in the unit cell causes the centers of positive and negative charges to no longer coincide, resulting in macroscopic polarization of the crystal. The surface charge density of the crystal surface is equal to the projection of the polarization intensity onto the surface normal direction. Therefore, when a piezoelectric ceramic material is deformed under pressure, opposite charges appear on both ends. Conversely, when a piezoelectric material is polarized in an electric field, the displacement of the charge centers causes the material to deform.

[0101] Specifically, at each exit of the first, second, and third accommodating spaces, a deformation structure formed of piezoelectric ceramic material is provided, which can deform under an electric field. The deformation structure is used to switch between a first state and a second state under voltage control. In the first state, the deformation structure has an opening, and multiple exit switches are simultaneously in the open state. In the second state, the deformation structure has a closed opening, and multiple exit switches are simultaneously in the closed state.

[0102] The steps in S40 include:

[0103] S411: The mask is subjected to high-frequency mechanical wave processing to cause physical changes in multiple red aerogel particles with a first electrical charge, multiple green aerogel particles with a first electrical charge, and multiple blue aerogel particles with a first electrical charge; wherein, the high-frequency mechanical wave can be ultrasound or the like.

[0104] S412: Open the outlet switches of the first, second, and third containment spaces to activate the inert airflow;

[0105] S413: Multiple red light-emitting particles are emitted from the outlet of the first accommodating space toward the substrate, multiple green light-emitting particles are emitted from the outlet of the second accommodating space toward the substrate, and multiple blue light-emitting particles are emitted from the outlet of the third accommodating space toward the substrate.

[0106] In this embodiment, by simultaneously treating charged gel particles of different colors with ultrasound, red, green, and blue luminescent particles are released from the aerogel. During inert gas purging, these particles are emitted onto the substrate, forming a red luminescent layer in the first opening region, a green luminescent layer in the second opening region, and a blue luminescent layer in the third opening region. This embodiment reduces the need for three separate steps of forming the red, green, and blue luminescent layers by simultaneously releasing luminescent particles of different colors.

[0107] Figure 6 This is a schematic diagram illustrating the steps of a method for manufacturing a display panel according to the third embodiment of this application. See also... Figure 6 As shown, in this embodiment, based on the above, a common layer can also be formed using the above-mentioned photomask. This common layer is disposed below the light-emitting layer and is formed before the light-emitting layer process.

[0108] Specifically, steps following S10 include:

[0109] S101: Form multiple common-layer aerogel particles with a first charge by combining common-layer particles with an aerogel polymer precursor.

[0110] S102: The common layer aerogel particles with the first charge are respectively emitted into the multiple first containment spaces, multiple second containment spaces and multiple third containment spaces of the mask;

[0111] S103: Open the outlet switches of the first, second, and third containment spaces, start the inert airflow, and release multiple common layer aerogel particles with the first charge from the outlets of the first, second, and third containment spaces after undergoing physical changes.

[0112] S104: A common layer is formed in the first opening region, the second opening region, and the third opening region of the substrate; wherein the red light-emitting layer, the green light-emitting layer, and the blue light-emitting layer are respectively disposed on the side of the common layer away from the substrate.

[0113] In this embodiment, by directly forming the common layer and the light-emitting layer using a photomask, alignment problems that occur during photomask replacement are avoided. In contrast, when the common layer and the light-emitting layer are in direct contact, and there is a film layer connection between two adjacent light-emitting units in the common layer, the adjacent light-emitting units will be affected and passively emit light, making it impossible to control the light-emitting units independently. However, the photomask for the common layer and the photomask for the light-emitting layer are usually not shared, resulting in high costs for designing a separate photomask for the common layer. This embodiment utilizes the photomask for forming the light-emitting layer to simultaneously form the common layer, thereby saving process costs and photomask costs.

[0114] Figure 7 This is a schematic diagram of the manufacturing process of another display panel according to the third embodiment of this application. See figure. Figure 2 , Figure 5 and Figure 7 As shown, this application makes further improvements to the photomask based on the above embodiments.

[0115] Based on the aforementioned mask design, a seventh electrode 250 is provided in the first accommodating space 220, the second accommodating space 230, and the third accommodating space 240, respectively. The plurality of seventh electrodes 250 are respectively located on the outlet 212 side of the first accommodating space 220, the outlet 212 side of the second accommodating space 230, and the outlet 212 side of the third accommodating space 240.

[0116] Taking the first receiving space as an example, the seventh electrode is disposed on the side of the first electrode near the outlet of the first receiving space. In one embodiment, the seventh electrode is not designed parallel to the first electrode or the second electrode, but rather at an angle. Specifically, at the outlet position, two seventh electrodes are disposed, one on each side of the first receiving space, with a gap between them that gradually narrows from the inlet to the outlet of the first receiving space. Correspondingly, two first electrodes and two second electrodes are disposed, each located at the inlet of the first receiving space, with a gap between the two first electrodes and a gap between the two second electrodes, allowing charged aerogel particles to pass through. Specifically, the first electrode is disposed on the side of the second electrode near the vapor deposition source. Of course, this embodiment only uses the first receiving space as an example; the second and third receiving spaces can also adopt the same design, which will not be elaborated here.

[0117] Using the aforementioned photomask, the first accommodating space will be used as an example for explanation. The corresponding display panel manufacturing method can also involve sequentially emitting common-layer aerogel particles and first-charged aerogel particles into the first accommodating space, so that the common-layer aerogel particles and the first-charged aerogel particles coexist within the first accommodating space.

[0118] Specifically, step S10 is followed by the following steps:

[0119] S111: Form multiple common-layer aerogel particles with a second charge by combining common-layer particles with aerogel polymer precursors;

[0120] S112: The step of launching multiple red aerogel particles with a first electrical charge, multiple green aerogel particles with a first electrical charge, and multiple blue aerogel particles with a first electrical charge into multiple first accommodating spaces, multiple second accommodating spaces, and multiple third accommodating spaces of the mask includes the following steps:

[0121] S113: Multiple common-layer aerogel particles with a second charge are emitted into multiple first-accommodating spaces, multiple second-accommodating spaces, and multiple third-accommodating spaces within the mask, and are attracted to the seventh electrode with a first charge.

[0122] S114: A plurality of red aerogel particles with a first charge, a plurality of green aerogel particles with a first charge, and a plurality of blue aerogel particles with a first charge are respectively launched into a plurality of first containment spaces, a plurality of second containment spaces, and a plurality of third containment spaces of the mask.

[0123] The steps in S40 also include:

[0124] S421: Open the outlet switches of the first, second, and third accommodating spaces, apply a grounding voltage to the seventh electrode, and start the inert gas flow. After multiple common layer aerogel particles with the second charge undergo physical changes, multiple common layer particles are released, forming a common layer in multiple opening areas of the substrate.

[0125] S422: After applying grounding voltage to the second, fourth, and sixth electrodes respectively, the inert airflow is turned on. After multiple red aerogel particles with the first charge undergo physical changes, multiple red luminescent particles are released from the outlet of the first containment space; after multiple green aerogel particles with the first charge undergo physical changes, multiple green luminescent particles are released from the outlet of the second containment space; and after multiple blue aerogel particles with the first charge undergo physical changes, multiple blue luminescent particles are released from the outlet of the third containment space.

[0126] The first, second, and third accommodating spaces are each provided with a seventh electrode; the red, green, and blue light-emitting layers are respectively disposed on the side of the common layer away from the substrate.

[0127] In this embodiment, step S422 involves performing steps S411 to S413 as described above, thereby achieving the deposition of light-emitting particles. By controlling the charge of the electrodes in the containment spaces at different locations, common layer aerogel particles and charged aerogel particles of different colors are ejected into the containment spaces at different locations. Through inert gas purging, the common layer particles and light-emitting particles are ejected from the mask, forming a common layer and a light-emitting layer at corresponding positions on the substrate.

[0128] It is understandable that the process of releasing multiple red luminescent particles by physically collapsing the red aerogel particles with the first electrical charge using ultrasound in this embodiment can also be performed during the film formation stage. That is, after the common layer aerogel particles are emitted from the mask, the aerogel is removed during the film formation process on the substrate. In other words, this embodiment can achieve simultaneous film formation of the common layer and the luminescent layer through a single aerogel collapse step. Of course, the aerogel particles encapsulating the common layer material and the aerogel particles encapsulating the luminescent layer material can be subjected to the same electrical charge or different electrical charges, and the electric fields on the first to seventh electrodes can be reasonably set to achieve single-step film formation or step-by-step film formation processes.

[0129] Figure 8 This is a schematic diagram of the display panel of this application; see below. Figure 8 As shown, this application also discloses a display panel, the display panel 100 of which can be formed using the display panel manufacturing method in any of the above embodiments. The display panel 100 includes a substrate 110, a pixel definition layer 111 disposed on the substrate 110, and a plurality of light-emitting units, the plurality of light-emitting units including a plurality of red light-emitting units 120R, a plurality of green light-emitting units 120G, and a plurality of blue light-emitting units 120B; the pixel definition layer 111 is provided with a plurality of openings to form a plurality of opening regions, the plurality of opening regions including a plurality of first opening regions 111a, a plurality of second opening regions 111b, and a plurality of third opening regions 111c; the plurality of light-emitting units are respectively disposed in the plurality of opening regions, and adjacent light-emitting units are separated by the pixel definition layer 111; wherein, the light-emitting unit includes a bottom electrode 121, a common layer 122, a light-emitting layer, and a top electrode 124, the light-emitting layer being disposed between the common layer 122 and the top electrode 124, and the common layer 122 being disposed between the bottom electrode 121 and the light-emitting layer.

[0130] The light-emitting layer includes a red light-emitting layer 123R, a green light-emitting layer 123G, and a blue light-emitting layer 123B. The red light-emitting unit 120R is located in the first opening region 111a, the green light-emitting unit 120G is located in the second opening region 111b, and the blue light-emitting unit 120B is located in the third opening region 111c.

[0131] Specifically, the bottom electrode 121 has an arc surface on the side away from the substrate 110, and the thickness of the bottom electrode 121 gradually increases from the center line of the bottom electrode 121 to the surrounding area.

[0132] Because of the aforementioned photomask and corresponding display panel fabrication method, during the emission of light-emitting particles from the photomask, the concentration of light-emitting particles emitted from the outlet of the containment space is relatively low at the edges due to the presence of electrodes within the containment space. By gradually decreasing the thickness of the bottom electrode from both sides towards the center, when forming the light-emitting portion, the thickness of the light-emitting portion contained at the edge is smaller when the side of the light-emitting portion away from the substrate is flat, while the thickness of the light-emitting portion contained at the center is larger. This adapts to a method for fabricating a display panel using this photomask.

[0133] The bottom electrode 121 includes a reflective metal layer 1212 and a transparent electrode layer 1211. The transparent electrode layer 1211 is disposed on the side of the reflective metal layer 1212 away from the substrate 110. The thickness of the transparent electrode layer 1211 gradually increases from the centerline of the bottom electrode 121 outwards. The bottom electrode generally adopts a structure of two transparent electrode layers sandwiching a reflective metal layer. The transparent electrode layer mentioned above refers to the film layer of the reflective metal layer near the light-emitting layer.

[0134] Because electrodes are located on both sides of each accommodating space in the photomask, the film thickness at the center of each opening area is greater than that at the edges during the evaporation process. Therefore, by processing the surface of the transparent electrode layer in the bottom electrode to create a surface structure with a central depression and raised edges on the side facing the light-emitting part, the transparent electrode layer has a surface that matches the light-emitting part, making the side of the light-emitting part away from the substrate smoother. This avoids problems such as light scattering loss caused by an uneven film layer on the light-emitting part. It also avoids problems such as unreliable packaging and leakage caused by an uneven film layer on the light-emitting part.

[0135] It should be noted that the inventive concept of this application can form many embodiments, but due to the limited space of the application documents, they cannot all be listed. Therefore, without conflict, the embodiments described above or the technical features can be arbitrarily combined to form new embodiments. After the embodiments or technical features are combined, the original technical effect will be enhanced.

[0136] The above description, in conjunction with specific optional embodiments, provides a further detailed explanation of this application and should not be construed as limiting the specific implementation of this application to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of this application, and all such modifications or substitutions should be considered within the scope of protection of this application.

Claims

1. A method for manufacturing a display panel, characterized in that, Including the following steps: Provide a substrate; Multiple red luminescent material particles are combined with an aerogel polymer precursor to form multiple red aerogel particles with a first charge; multiple green luminescent material particles are combined with an aerogel polymer precursor to form multiple green aerogel particles with a first charge; and multiple blue luminescent material particles are combined with an aerogel polymer precursor to form multiple blue aerogel particles with a first charge. Multiple red aerogel particles with a first charge, multiple green aerogel particles with a first charge, and multiple blue aerogel particles with a first charge are respectively launched into multiple first containment spaces, multiple second containment spaces, and multiple third containment spaces of the mask. Open the outlet switches of the first, second, and third containment spaces, activate the inert airflow, and after multiple red aerogel particles with a first electrical charge undergo physical changes, release multiple red luminescent particles from the outlet of the first containment space; after multiple green aerogel particles with a first electrical charge undergo physical changes, release multiple green luminescent particles from the outlet of the second containment space; and after multiple blue aerogel particles with a first electrical charge undergo physical changes, release multiple blue luminescent particles from the outlet of the third containment space. A red light-emitting layer is formed in a plurality of first opening regions of the substrate, a green light-emitting layer is formed in a plurality of second opening regions of the substrate, and a blue light-emitting layer is formed in a plurality of third opening regions of the substrate. The photomask is provided with multiple first accommodating spaces, multiple second accommodating spaces and multiple third accommodating spaces. The first accommodating spaces are provided corresponding to the first opening area, the second accommodating spaces are provided corresponding to the second opening area, and the third accommodating spaces are provided corresponding to the third opening area. The step of launching multiple red aerogel particles with a first electrical charge, multiple green aerogel particles with a first electrical charge, and multiple blue aerogel particles with a first electrical charge into multiple first accommodating spaces, multiple second accommodating spaces, and multiple third accommodating spaces of the mask includes: A first electric field is applied to the second and third containment spaces, and multiple red aerogel particles with the first electric field are emitted into the multiple first containment spaces inside the mask. A first electric field is applied to the first and third containment spaces, and multiple green aerogel particles with the first electric field are emitted into multiple second containment spaces inside the mask. A first electric field is applied to the first and second containment spaces, and a plurality of blue aerogel particles with the first electric field are emitted into a plurality of third containment spaces inside the mask.

2. The method for manufacturing a display panel according to claim 1, characterized in that, A first electrode and a second electrode are disposed within the first accommodating space. The first electrode is disposed on the entrance side of the first accommodating space, and the second electrode is disposed within the first accommodating space. A third electrode and a fourth electrode are provided in the second accommodating space. The third electrode is located on the entrance side of the second accommodating space, and the fourth electrode is located inside the second accommodating space. A fifth electrode and a sixth electrode are provided in the third accommodating space. The fifth electrode is located on the entrance side of the third accommodating space, and the sixth electrode is located inside the third accommodating space. The step of applying a first electric field to the second and third containment spaces, and emitting a plurality of red aerogel particles with the first electric charge into the plurality of first containment spaces inside the mask, includes: A first electrical voltage is applied to the third electrode and the fifth electrode to form a first electrical electric field in the second accommodating space and the third accommodating space, respectively, to prevent the red aerogel particles with the first electrical charge from entering. A second electrical voltage is applied to the second electrode, and a ground voltage is applied to the first electrode. A plurality of red aerogel particles with a first electrical charge are emitted into a plurality of the first containment spaces and adsorbed by the second electrode. The step of applying a first electric field to the first and third containment spaces, and emitting a plurality of green aerogel particles with the first electric charge into a plurality of second containment spaces inside the mask, includes: A first electrical voltage is applied to the first electrode and the fifth electrode to form a first electrical electric field in the first accommodating space and the third accommodating space, respectively, to prevent the green aerogel particles with the first electrical charge from entering. A second electrical voltage is applied to the fourth electrode, and a ground voltage is applied to the third electrode. A plurality of green aerogel particles with a first electrical charge are emitted into a plurality of second containment spaces and adsorbed by the fourth electrode. The step of applying a first electric field to the first and second containment spaces, and emitting a plurality of blue aerogel particles with the first electric charge into a plurality of third containment spaces inside the mask, includes: A first electrical voltage is applied to the first electrode and the third electrode to form a first electrical electric field in the first accommodating space and the second accommodating space respectively, so as to prevent the blue aerogel particles with the first electrical charge from entering. A second electrical voltage is applied to the sixth electrode, and a ground voltage is applied to the fifth electrode. A plurality of blue aerogel particles with a first electrical charge are emitted into a plurality of the third containment spaces and adsorbed by the sixth electrode.

3. The method for manufacturing a display panel according to claim 2, characterized in that, The steps of opening the outlet switches of the first, second, and third containment spaces, activating the inert airflow, and releasing multiple red luminescent particles from the outlet of the first containment space after multiple red aerogel particles with a first electrical charge undergo physical changes, releasing multiple green luminescent particles from the outlet of the second containment space after multiple green aerogel particles with a first electrical charge undergo physical changes, and releasing multiple blue luminescent particles from the outlet of the third containment space after multiple blue aerogel particles with a first electrical charge undergo physical changes include: The photomask is subjected to high-frequency mechanical wave processing to cause physical changes in multiple red aerogel particles with a first electrical charge, multiple green aerogel particles with a first electrical charge, and multiple blue aerogel particles with a first electrical charge. Open the outlet switches of the first, second, and third containment spaces to activate the inert airflow; Multiple red luminescent particles are emitted from the outlet of the first accommodating space toward the substrate, multiple green luminescent particles are emitted from the outlet of the second accommodating space toward the substrate, and multiple blue luminescent particles are emitted from the outlet of the third accommodating space toward the substrate.

4. The method for manufacturing a display panel according to claim 1, characterized in that, The step of providing a substrate further includes: Multiple common-layer aerogel particles with a first charge are formed by combining common-layer particles with aerogel polymer precursors. The common layer aerogel particles with the first charge are respectively emitted into multiple first containment spaces, multiple second containment spaces, and multiple third containment spaces of the mask; Open the outlet switches of the first, second, and third containment spaces, activate the inert airflow, and after multiple common layer aerogel particles with the first charge undergo physical changes, release multiple common layer particles from the outlets of the first, second, and third containment spaces. A common layer is formed in the first opening region, the second opening region, and the third opening region of the substrate. The red light-emitting layer, the green light-emitting layer, and the blue light-emitting layer are respectively disposed on the side of the common layer away from the substrate.

5. The method for manufacturing a display panel according to claim 2, characterized in that, The step of providing a substrate further includes: Multiple common-layer aerogel particles with a second charge are formed by combining common-layer particles with aerogel polymer precursors. The step of launching multiple red aerogel particles with a first electrical charge, multiple green aerogel particles with a first electrical charge, and multiple blue aerogel particles with a first electrical charge into multiple first accommodating spaces, multiple second accommodating spaces, and multiple third accommodating spaces of a mask includes the following steps: Multiple common-layer aerogel particles with a second charge are emitted into multiple first-enclosure spaces, multiple second-enclosure spaces, and multiple third-enclosure spaces within a mask, and are attracted to a seventh electrode with a first charge. Multiple red aerogel particles with a first charge, multiple green aerogel particles with a first charge, and multiple blue aerogel particles with a first charge are respectively launched into multiple first containment spaces, multiple second containment spaces, and multiple third containment spaces of the mask. The step of opening the outlet switches of the first, second, and third containment spaces, activating the inert airflow, and releasing multiple red luminescent particles from the outlet of the first containment space after multiple red aerogel particles with a first electrical charge undergo a physical change, releasing multiple green luminescent particles from the outlet of the second containment space after multiple green aerogel particles with a first electrical charge undergo a physical change, and releasing multiple blue luminescent particles from the outlet of the third containment space after multiple blue aerogel particles with a first electrical charge undergo a physical change, further includes: After opening the outlet switches of the first, second, and third accommodating spaces and applying a grounding voltage to the seventh electrode, the inert gas flow is turned on. Multiple common layer aerogel particles with the second charge undergo physical changes and release multiple common layer particles, forming a common layer in multiple opening areas of the substrate. After applying grounding voltage to the second, fourth, and sixth electrodes respectively, the inert airflow is activated. Multiple red aerogel particles with the first charge undergo physical changes and release multiple red luminescent particles from the outlet of the first containment space; multiple green aerogel particles with the first charge undergo physical changes and release multiple green luminescent particles from the outlet of the second containment space; and multiple blue aerogel particles with the first charge undergo physical changes and release multiple blue luminescent particles from the outlet of the third containment space. The first accommodating space, the second accommodating space, and the third accommodating space are each provided with a seventh electrode; the red light-emitting layer, the green light-emitting layer, and the blue light-emitting layer are respectively disposed on the side of the common layer away from the substrate. The first electrical property is positive, and the second electrical property is negative.

6. A photomask, characterized in that, The method for manufacturing a display panel as described in any one of claims 1 to 5, wherein the mask comprises a mask body, a plurality of first receiving spaces, a plurality of second receiving spaces, and a plurality of third receiving spaces disposed on the mask body; A first electrode and a second electrode are disposed within the first accommodating space. The first electrode is disposed on the entrance side of the first accommodating space, and the second electrode is disposed within the first accommodating space. A third electrode and a fourth electrode are provided in the second accommodating space. The third electrode is located on the entrance side of the second accommodating space, and the fourth electrode is located inside the second accommodating space. A fifth electrode and a sixth electrode are provided in the third accommodating space. The fifth electrode is located on the entrance side of the third accommodating space, and the sixth electrode is located inside the third accommodating space. A seventh electrode is provided in the first accommodating space, the second accommodating space and the third accommodating space respectively, and a plurality of the seventh electrodes are respectively provided on the outlet side of the first accommodating space, the outlet side of the second accommodating space and the outlet side of the third accommodating space.

7. The photomask according to claim 6, characterized in that, The mask also includes multiple exit switches, which are respectively disposed on the exit side of the first accommodating space, the exit side of the second accommodating space, and the exit side of the third accommodating space; Multiple output switches are used to open or close simultaneously under voltage control; The output switch includes a deformation structure, which is used to switch between a first state and a second state under voltage control. The deformation structure has an opening in the first state, and multiple output switches are simultaneously in the open state. The deformable structure is closed in the second state, and multiple outlet switches are simultaneously in the closed state.

8. A display panel, characterized in that, The display panel is formed by the manufacturing method of the display panel as described in any one of claims 1-5. The display panel includes a substrate, a pixel definition layer disposed on the substrate, and a plurality of light-emitting units. The pixel definition layer is provided with a plurality of openings to form a plurality of opening regions. The plurality of light-emitting units are respectively disposed in the plurality of opening regions, and two adjacent light-emitting units are separated by the pixel definition layer. The light-emitting unit includes a bottom electrode, a common layer, a light-emitting layer, and a top electrode. The light-emitting layer is disposed between the common layer and the top electrode, and the common layer is disposed between the bottom electrode and the light-emitting layer.

9. The display panel according to claim 8, characterized in that, The bottom electrode has an arc surface on the side away from the substrate, and the thickness of the bottom electrode gradually increases from the center line of the bottom electrode outwards. The bottom electrode includes a reflective metal layer and a transparent electrode layer. The transparent electrode layer is disposed on the side of the reflective metal layer away from the substrate. The thickness of the transparent electrode layer gradually increases from the center line of the bottom electrode outwards.

Images