Arrangement comprising electroceramic component
By employing a thermally conductive metal shell section and a sleeve-shaped design that does not conduct materials in the piezoelectric transformer, combined with castable refractory and a negative pressure chamber, the parasitic discharge and high-voltage electric field problems of the piezoelectric transformer are solved, thereby improving the stability and lifespan of the device.
Patent Information
- Application Number
- CN202511763246.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2019-08-27
- Filing Date
- 2020-08-11
- Publication Date
- 2026-02-24
AI Technical Summary
Existing piezoelectric transformers are prone to component damage due to parasitic discharge during use, and the electric field strength in the high-voltage area affects the stability and reliability of the device.
The design employs a sleeve-shaped shell section with different materials. The first section uses a thermally conductive metal material to surround the low-pressure area, while the second section uses a non-conductive material to surround the high-pressure area. Parasitic discharge and mechanical load are reduced through castable material and negative pressure chamber.
It effectively dissipates heat, avoids the influence of electric fields in high-voltage areas, extends the service life and reliability of electro-ceramic components, reduces mechanical load, and reduces the frequency and range of plasma ignition.
Smart Images
Figure CN121568522A_ABST
Abstract
Description
[0001] This application is a divisional application. The original application was filed on August 11, 2020, with application number 202080060329.0 and invention title "Device having an electroceramic component". Technical Field
[0002] This invention relates to an apparatus incorporating an electroceramic component. The electroceramic component may particularly relate to a piezoelectric transformer. Background Technology
[0003] Piezoelectric transformers can be used to generate plasma. Here, a low input voltage is transformed into a high voltage. The surrounding air is ionized by the high electric field, thus generating plasma. One problem here is parasitic discharge, which can be caused, for example, by conductive objects near the piezoelectric ceramic and may lead to damage to the component. Summary of the Invention
[0004] The objective of this invention is to describe an improved apparatus. This objective is achieved by the apparatus according to claim 1.
[0005] A device is proposed having an electroceramic component with a first region and a second region. The device has a castable that at least partially surrounds the electroceramic component. The device has a sleeve-shaped housing that at least partially surrounds the castable. The housing has a first housing section and a second housing section. The first housing section surrounds the castable in the first region of the electroceramic component and has a material with higher thermal conductivity than the material of the second housing section. The second housing section surrounds the castable in the second region of the electroceramic component and has a non-conductive material. The material of the first housing section has good thermal conductivity. The material of the first housing section can be a metallic material.
[0006] The first and second regions of the electroceramic component can impose different requirements on the housing. The first region can particularly relate to a low-pressure area, and the second region can particularly relate to a high-pressure area. Correspondingly, in the first region, the use of a housing section made of metallic material can be advantageous because metallic materials have high robustness for further processing and high thermal conductivity. The heat generated in the first region of the electroceramic component can thus be effectively dissipated through the first housing section. Further contact connections and mechanical connections with other components can also be easily achieved through the first housing section made of metallic material. The metallic material can, for example, be aluminum.
[0007] In the second housing section surrounding the second region of the component, it is advantageous to use a non-conductive material because a non-conductive material does not negatively affect the electric field forcibly generated in the high-voltage region. When the second housing section is made of a non-conductive material, plasma ignition between the electroceramic component and the second housing section is also avoided.
[0008] The components of the electroceramic can involve piezoelectric transformers, which are preferably used for the ionization of process gases and for the generation of plasma.
[0009] The castable can be a non-conductive material, such as silicone. The castable can surround the electroceramic component in such a way that parasitic discharges at the sides of the component are prevented. The castable can be a soft, gel-like substance. The electroceramic component can be cast into the castable such that the castable does not, or at least only slightly, reduce the vibration of the electroceramic component because the castable is highly elastic. Correspondingly, the efficiency of the component is not significantly degraded by the castable.
[0010] The non-conductive material used to manufacture the second housing section can be plastic, Teflon, glass, or ceramic. These materials offer the advantage that they do not significantly affect the electric field that can occur in the second region of the electroceramic component. Correspondingly, the operation of the electroceramic component is not affected by the housing. The sleeve-shaped housing can have a flat surface on the outer side facing away from the electroceramic component.
[0011] The shell material in the first shell section has good thermal conductivity. This material can be a metal, a metal alloy, a plastic with good thermal conductivity, or a ceramic. For example, the material can be copper, aluminum, or iron.
[0012] The component of the electroceramic can protrude from the castable. For example, the component can protrude from the castable by a length between 0.5 mm and 5 mm, and preferably by a length between 1 mm and 3 mm. Here, the second region of the component, particularly the output-side end, can protrude from the castable. Plasma ignition may occur at this end. Since this end is not covered by the castable, plasma ignition is not affected by the castable. Alternatively, it is also possible to completely cover the electroceramic component with the castable.
[0013] The castable refractory can cover the end side of the electroceramic component facing away from the first region in the second region. In some embodiments, the castable refractory can be thinner on the end side than on the lateral surface of the electroceramic component. Plasma ignition can then be performed through the castable refractory by means of a dielectric barrier discharge.
[0014] The device may also have a negative pressure chamber. The negative pressure chamber can seal the processing chamber, in which the device is arranged, relative to the surrounding environment, wherein a pressure or vacuum lower than atmospheric pressure exists within the processing chamber. This pressure reduction reduces the ignition field strength of the device. Here, such a field strength can be called the ignition field strength, i.e., the plasma ignition achieved from this field strength. Plasma ignition occurring at a lower field strength results in a smaller mechanical load on the electroceramic components. Correspondingly, the reliability and service life of the electroceramic components can be extended by using a negative pressure chamber, as damage to the electroceramic components due to the mechanical load occurs less frequently. Furthermore, the plasma characteristics change during plasma ignition in a negative pressure chamber compared to plasma ignition at atmospheric pressure. Instead of point-like plasma ignition at the corner of the output side, the plasma can be fully ignited on the output side.
[0015] The device may also have a contact line through which the electroceramic components are electrically connected. The contact line may have at least one bend. Here, the curve of the contact line can be referred to as the bend, in which the contact line deviates from a straight line. The contact line can be shape-stable, thus maintaining the bend in the absence of external force. The electroceramic components can be connected via the contact line to further contact connection structures, such as control circuitry on a circuit board.
[0016] The device may have a cover attached to the end of the first housing section facing away from the second housing section. The cover may be manufactured by casting. The material of the cover may be different from that of the casting material and, in particular, harder than the casting material.
[0017] The at least one bend in the contact wire can be arranged inside the cover, wherein the contact wire extends through the cover. The contact wire can thus be secured in the cover such that longitudinal movement of the contact wire is prevented by the cover. Tensile forces acting on the contact wire can be absorbed by the cover, thus providing tensile release that protects the electroceramic components from tensile stress.
[0018] The device may have an area filled with a soft castable between the cap and the electroceramic component. This mechanically decouples the electroceramic component from the cap and reduces the damping of the oscillating electroceramic component.
[0019] The device may also have an encapsulation structure that includes a second region of the electroceramic component. This encapsulation structure encapsulates the second region of the electroceramic component. Material detached from the electroceramic component during plasma ignition cannot leave the encapsulation structure and deposits on the inner side of the encapsulation structure. The encapsulation structure thus prevents contamination of the plasma-treated surface by the material. The material of the electroceramic component may, in particular, involve lead-containing materials.
[0020] The encapsulation structure can act as a dielectric barrier. Primary plasma ignition occurs between the end side of the electro-ceramic component and the inner side of the encapsulation structure, and plasma ignition occurs on the outer side of the encapsulation structure through dielectric barrier discharge.
[0021] The encapsulation structure can be filled with a process gas. The process gas can, for example, involve a rare gas or air. The encapsulation structure can optionally or supplementarily have a pressure reduced compared to atmospheric pressure, or a vacuum can exist within the encapsulation structure. The ignition field strength for primary plasma ignition is reduced due to the reduced pressure or vacuum within the encapsulation structure. This reduces the mechanical load on the electroceramic component and can improve its service life and reliability.
[0022] The device may have a connector for electrical contact connection, wherein the connector is designed to be detachably secured by means of a bayonet connection, clamp connection, or plug connection. Components for further contact connection, such as those for the aforementioned contact wire, can be connected via the connector. The contact connection structures described herein, in the form of bayonet connection, clamp connection, or plug connection, are detachable, thus allowing for easy replacement of the device.
[0023] The device may have a spring element arranged such that it applies a force that helps to separate further contact connections. Correspondingly, the spring element can simplify the separation of contact connections.
[0024] The components of electroceramics can involve piezoelectric transformers.
[0025] According to another aspect, the present invention relates to a plasma generator having the aforementioned apparatus, wherein the electroceramic components are designed to generate non-thermal atmospheric pressure plasma. The apparatus can also be used as an ion generator or an ozone generator. Attached Figure Description
[0026] Preferred embodiments are described below with reference to the accompanying drawings. Wherein: Figure 1 The components of the electroceramic are shown; Figure 2 An apparatus is shown that has in Figure 1The components of the electroceramic shown in the figure; Figure 3 A second embodiment of the device is shown; Figure 4 A third embodiment of the device is shown; Figure 5 A fourth embodiment of the device is shown; Figure 6 The device is shown in a perspective view; Figure 7 The device and connecting parts are shown in the inserted state; Figure 8 The device and connecting parts are shown in their unconnected state. Detailed Implementation
[0027] Figure 1 The component 1 of the electroceramic is shown. The component 1 of the electroceramic relates to a piezoelectric transformer. The piezoelectric transformer can be used, in particular, as a plasma generator for producing non-thermal atmospheric pressure plasma.
[0028] A piezoelectric transformer is a type of resonant transformer that is based on the piezoelectric phenomenon and, unlike traditional magnetic transformers, is an electromechanical system. An example of a piezoelectric transformer is the Rosen-type transformer.
[0029] The electroceramic component 1 has a first region 2, also known as an input region or low-voltage region, and a second region 3, also known as an output region or high-voltage region, wherein the second region 3 is connected to the first region 2 along the longitudinal direction z. In the first region 2, the piezoelectric transformer 1 has an electrode 4 to which an alternating current voltage can be applied. The electrode 4 extends along the longitudinal direction z of the piezoelectric transformer 1. The electrode 4 is alternately stacked with piezoelectric material 5 along a stacking direction x perpendicular to the longitudinal direction z. The piezoelectric material 5 is polarized here along the stacking direction x.
[0030] Electrode 4 is arranged inside the piezoelectric transformer 1 and is also referred to as the internal electrode. The piezoelectric transformer 1 has a first side 6 and a second side 7 opposite to the first side 6. A first external electrode 8 is arranged on the first side 6. A second external electrode (not shown) is arranged on the second side 7. The built-in electrode 4 is alternately electrically connected to either the first external electrode 8 or the second external electrode along the stacking direction x.
[0031] The first region 2 can be manipulated by applying a small alternating voltage between electrodes 4. Based on the piezoelectric effect, the alternating voltage applied to the input side is first converted into mechanical oscillation. The frequency of the mechanical oscillation depends fundamentally on the geometry of the electroceramic component 1 and the mechanical structure.
[0032] The second region 3 has a piezoelectric material 9 and no built-in electrodes. The piezoelectric material 9 in the second region 3 is longitudinally z-polarized. The piezoelectric material 9 in the second region 3 can be the same material as the piezoelectric material 5 in the first region 2, wherein the piezoelectric materials 5 and 9 can be different in terms of their polarization directions. In the second region 3, the piezoelectric material 9 forms a single, monolithic layer that is completely longitudinally z-polarized. Here, the piezoelectric material 9 in the second region 3 has only one polarization direction.
[0033] If an alternating voltage is applied to electrode 4 in the first region 2, a mechanical wave is formed within the piezoelectric materials 5 and 9. This mechanical wave generates an output voltage in the output region 3 through the piezoelectric effect. The second region 3 has an output-side end 10. Therefore, a voltage is generated in the second region 3 between the end 10 and the end of electrode 4 in the first region 2. Here, a high voltage is generated at the output-side end 10. A high potential difference is also generated between the output-side end 10 and the surrounding environment of the electroceramic component 1, which is sufficient to generate a strong electric field that ionizes the process gas.
[0034] The electroceramic component 1 generates a high electric field in this way, which can ionize a gas or liquid through electrical excitation. Here, the atoms or molecules of the corresponding gas or liquid are ionized and plasma is formed. Ionization always occurs when the electric field strength at the surface of the electroceramic component 1 exceeds the ignition field strength of the plasma. Here, the field strength required to ionize atoms or molecules is called the ignition field strength of the plasma.
[0035] Figure 2 An apparatus is shown that has in Figure 1 The diagram shows an electroceramic component 1. The electroceramic component 1 is arranged in a castable 11, which largely surrounds the sides of the component 1. The electroceramic component 1 is arranged in a first region 2 and protrudes from the castable 11 at a first end 12 facing away from the second region 3. The electroceramic component 1 is arranged in a second region 3 and protrudes from the castable 11 at a second end 13 facing away from the first region 2. In an alternative embodiment, the first end 12 and / or the second end 13 of the electroceramic component 1 may also be covered by the castable 11.
[0036] The castable 11 has a non-conductive material. The castable 11 has a soft, gel-like material. The castable 11 may, for example, have silicone or be made of silicone.
[0037] The castable 11 is used to prevent parasitic discharge on the side of the electro-ceramic component 1 in such a way that the side is isolated from the surrounding environment by means of the castable 11. Furthermore, a contact wire 14 is also cast in the castable 11, through which the electro-ceramic component 1 can be electrically connected via the contact wire.
[0038] The device also has a housing 15 that surrounds the castable refractory 11. Figure 2 In the illustrated embodiment, the electroceramic component 1 and the castable 11 are embedded together in the housing 15 such that the first end 12 and the second end 13 of the electroceramic component 1 protrude from the housing 15. In an alternative embodiment, only one of the two ends 12, 13 may protrude from the housing 15, or the housing 15 may be flush with both ends 12, 13.
[0039] Alternatively, the housing 15 may protrude beyond the electric ceramic component 1. The housing 15 may protrude beyond the electric ceramic component 1, for example, in the first region 2, i.e., in the low-voltage region. Here, the housing 15 may form a lateral edge of the cover 17.
[0040] The housing 15 is sleeve-shaped. The housing 15 has a cylindrical opening that extends through it. The cylindrical opening is sized such that it accommodates the electroceramic component 1 and the castable refractory 11 surrounding the component, with the castable refractory 11 adhering tightly to the inner side of the housing 15. The cylindrical inner profile of the housing 15 is not mandatory. Housings with rectangular, square, or elliptical cross-sections and / or rectangular, square, or elliptical openings are also possible.
[0041] The housing 15 has a first housing section 15a and a second housing section 15b. The two housing sections 15a and 15b are made of different materials. The first housing section 15a surrounds the castable 11 in a first region 2 of the component 1 that surrounds the electric ceramic. The second housing section 15b surrounds the castable 11 in a second region 3 of the component 1 that surrounds the electric ceramic.
[0042] The housing 15 is designed to protect and mechanically stabilize the castable 11. By selecting different materials for the first and second housing sections 15a and 15b, the housing sections 15a and 15b can be well adapted to different requirements in the first and second regions 2 and 3 of the electroceramic component 1.
[0043] The first housing region 15a is made of a material with high thermal conductivity. The material of the first housing region 15 can be a metal, a metal alloy, a plastic with good thermal conductivity, or a ceramic. The housing 15 in the first housing region 15a can in particular be made of aluminum or aluminum. In the first region 2 of the electroceramic component 1, heat may be generated due to ohmic losses and mechanical vibrations. Metals have high thermal conductivity and are therefore well-suited for dissipating the heat generated in the first region 2 of the electroceramic component 1. Furthermore, metals have high robustness, which allows for uncomplicated further processing and contact connection of the first housing section 15a.
[0044] The second housing section 15b is made of a non-conductive material. The second housing section 15b can be made of, for example, plastic, Teflon, glass, or ceramic. A high electric field strength can be generated in the second region 3 of the electroceramic component 1. Because the second housing section 15b is made of a non-conductive material, it does not affect the generated electric field. If the second housing section 15b were made of a conductive material, undesirable plasma ignition from the component 1 to the second housing section 15b could occur. This plasma ignition does not occur in the second housing section 15b, which is made of a non-conductive material.
[0045] The device also has two of the aforementioned contact lines 14, wherein each of the contact lines 14 is fixed to one of the outer electrodes of the outer electrode 8 of the electroceramic component 1. Each of the contact lines 14 can be brazed to one of the outer electrodes of the outer electrode 8, respectively.
[0046] Contact line 14 enables further contact connection of the device. The electroceramic component 1 can, for example, be electrically connected to the control circuitry via contact line 14.
[0047] Figure 3 A second embodiment of the device is shown. Compared to the first embodiment, the housing 15 changes in shape in the first housing section 15a. In cross-section, the housing 15 is square in the first housing section 15a. Here, the first housing section 15a has a flat surface, thus facilitating installation on a flat heat exchanger.
[0048] exist Figure 3 In the second embodiment shown, the contact line 14 further has two bends 16a and 16b. The contact line 14 extends straight within the castable 11. In the region where the contact line 14 emerges from the castable 11, the contact line has a first bend 16a. In the first bend 16a, the orientation of the contact line 14 changes by approximately 30°. Furthermore, the contact line 14 also has a second bend 16b, which is oriented in the opposite direction and is also a bend of approximately 30°.
[0049] In a second embodiment, the electroceramic component 1 also protrudes beyond the castable 11 and the housing 15 at both ends 12, 13. The electroceramic component 1 may, for example, extend beyond the housing 15 by 0.5 mm to 5 mm at one or both ends 12, 13. In other embodiments, the electroceramic component 1 may be completely encapsulated within the castable 11. The thermal conductivity of the castable 11 is lower than that of the metallic first housing section 15a. The housing 15 is therefore designed such that the electroceramic component is surrounded only by a thin layer of castable 11. The housing 15 has circular openings within the first and second housing sections 15a, 15b. The diameter of these circular openings is chosen such that the electroceramic component 1 and the castable 11 can be arranged within these openings without the layer of castable 11 becoming excessively thick.
[0050] The second housing section 15b on the high-voltage side can be made of, for example, Teflon.
[0051] Figure 4 A third embodiment of the device is shown, which has Figure 1 Component 1 of the electroceramic.
[0052] exist Figure 4 The device shown is based on Figure 3 The device shown in the figure has a cover 17 added at the first end 12 of the first housing section 15a. The cover 17 is produced by a casting method. The cover 17 is made of a material harder than the material of the casting 11. The cover 17 can be made of epoxy resin, for example. The cover 17 specifically surrounds the two bends 16a, 16b of the two contact wires 14. The contact wires 14 are thus additionally mechanically secured. The device achieves tension release through the cover 17. The tension acting on the two contact wires 14 is absorbed in the cover 17 and does not act on the brazing part where the contact wires 14 are connected to the outer electrode 8 of the electroceramic component 1. Correspondingly, the component 1 is protected from damage due to tension. Additionally, the adhesion of the contact wires 14 within the casting 11 also contributes to the mechanical stability of the device.
[0053] In a third embodiment, the device is also arranged in a negative pressure chamber 18. Figure 4 In this context, the negative pressure chamber 18 is defined by its side wall 19. A pressure exists within the negative pressure chamber 18 that is lower than the pressure in the surrounding environment, i.e., atmospheric pressure. A vacuum may also exist within the negative pressure chamber 18. A processing chamber, which is used to process non-thermal atmospheric pressure plasma generated by the electroceramic component 1, is located within the negative pressure chamber 18.
[0054] In the negative pressure chamber 18, the ignition voltage of the piezoelectric transformer decreases, thus plasma ignition can be achieved even with relatively low voltages in both the input and output regions. The Paschen curve can be extracted from the relationship between the current pressure and the corresponding ignition voltage. Plasma ignition at lower voltages results in a smaller mechanical load on the electroceramic component 1. Correspondingly, the service life of component 1 can be extended due to its use in the negative pressure chamber 18. This improves the reliability of the device.
[0055] Another advantage of reducing the ignition voltage under negative pressure is that the plasma can be ignited not only at the corner of the electroceramic component 1, but also planarly across the entire end 10 on the output side. Therefore, a plasma cloud is now generated instead of point-like or bundle-like plasma ignition.
[0056] Figure 5 A fourth embodiment of the device is shown. This fourth embodiment is based on... Figure 4 The third embodiment shown in the figure includes an additional encapsulation structure 20 that surrounds the second region 3 of the electroceramic component 1. Air or process gas is contained within the encapsulation structure 20. Plasma ignition is achieved by blocking discharge through the use of the encapsulation structure 20, which acts as a dielectric barrier. Here, as in... Figure 5 As explained in the text, a primary plasma discharge 22 occurs between the output end 10 of the electro-ceramic component 1 and the inner wall of the encapsulation structure 20, and thus a plasma ignition 21 occurs in front of the encapsulation structure via a dielectric barrier discharge.
[0057] The use of encapsulation structure 20 prevents contamination of the area to be treated. During plasma discharge, material particles can detach from the electroceramic component 1. The material of the electroceramic component 1 may be lead-containing. By using encapsulation structure 20, it is ensured that this lead-containing material will not deposit on the surface to be treated. This material deposition must be avoided, especially when the device is used for medical or cosmetic purposes. The material is now deposited on the inner wall of encapsulation structure 20. Furthermore, encapsulation structure 20 facilitates the cleaning of the device. Encapsulation structure 20 can be designed from non-conductive materials, such as glass or alumina, or from conductive materials, such as high-quality steel or aluminum. In the second case, encapsulation structure 20 must be isolated relative to the first housing section 15a.
[0058] The advantage of using dielectric barrier discharge in medical or cosmetic applications compared to direct plasma ignition is that the tissue to be treated is subjected to a less intense load.
[0059] In another embodiment, the gas chamber 23 in the encapsulation structure 20 can be filled with a process gas, which may be a rare gas such as argon (Ar), helium (He), or neon (Ne). The gas chamber 23 may alternatively or supplementarily have a reduced pressure or even a vacuum. The reduced pressure can lower the ignition voltage. The area of the primary plasma discharge increases due to the negative pressure. The area of the dielectric barrier discharge also increases. The negative pressure in the gas chamber 23 of the encapsulation structure 20 can be combined with the negative pressure in the negative pressure chamber 18 in which the device is arranged.
[0060] Figure 6 The device is shown in a perspective view. Figure 6 In the illustrated device, a groove 24 is provided in the housing 15, which allows the housing 15 to be connected to the connecting fitting via a bayonet connection. When the housing 15 is connected to the connecting fitting, the contact wire 14 is connected to the electrical contacts of the connecting fitting, thereby creating further contact connection of the electroceramic component 1.
[0061] The device also includes a spring element 25, specifically a spring pin, which is fitted onto the contact wire 14. The spring pin can be pre-tightened when the housing 15 is connected to the connecting mating part and facilitates disengagement when the bayonet connection is opened.
[0062] Correspondingly, the device can be easily connected to a further contact connection structure. This enables the replacement of the device.
[0063] As Figure 6 The illustrated alternative bayonet-type connection allows the device to connect with a connecting mating component via a plug connection. Figure 7 In this process, the connecting fitting is inserted into the device and Figure 8 The device and its connecting parts are shown in their disconnected state. The plug connection is a detachable connection that allows the end consumer to replace the device.
[0064] As an alternative to bayonet or plug connections, other mechanically detachable connections, such as clamping contacts, can also be used.
[0065] List of reference numerals 1. Components of electroceramics 2. First Area 3 Second Area 4 electrodes 5. Piezoelectric materials 6 First side view 7 Second side view 8 External Electrode 9. Piezoelectric materials 10 Output side terminal 11 Castable Refractory 12 First end 13 Second end 14 Contact wire 15. Housing 15a First Shell Section 15b Second Shell Section 16a First Bend 16b Second bend 17 Cover 18 Negative Pressure Chamber 19 Sidewalls 20 Package Structure 21. Plasma ignition via barrier discharge 22. Primary plasma discharge 23 Gas Chamber 24 Grooves 25 Spring elements x Stacking direction z (vertical direction)
Claims
1. An apparatus having: The component (1) of the electro-ceramic has a first region (2) and a second region (3). Castable refractory (11), which at least partially surrounds the component (1) of the electroceramic, and A sleeve-shaped shell (15) that at least partially surrounds the castable (11), wherein, The housing (15) has a material in a first housing section (15a) of the castable (11) in a first region surrounding the component (1) of the electric ceramic, the thermal conductivity of which is greater than that of the material in a second housing section (15b) of the housing (15), and wherein the housing (15) has a non-conductive material in a second housing section (15b) of the castable (11) in a second region surrounding the component (1) of the electric ceramic. The first region (2) of the component (1) of the electro-ceramic is a low-voltage region, and the second region (3) of the component (1) of the electro-ceramic is a high-voltage region.
2. The apparatus according to claim 1, wherein, The non-conductive materials include plastics, Teflon, glass, or ceramics.
3. The apparatus according to claim 1 or 2, wherein, The sleeve-shaped housing (15) has a flat surface on the outer side facing away from the electroceramic component (1).
4. The apparatus according to claim 1 or 2, wherein, The material of the housing (15) in the first housing section (15a) is metal, metal alloy, thermally conductive plastic or ceramic.
5. The apparatus according to claim 1 or 2, wherein, The component (1) of the electroceramic protrudes from the castable (11).
6. The apparatus according to claim 1 or 2, wherein, The casting material (11) covers the end side (10) of the component (1) of the electro-ceramic in the second region (3), the end side pointing away from the first region (2), wherein the casting material (11) is thinner on the end side (10) than on the lateral surface of the component (1) of the electro-ceramic.
7. The apparatus according to claim 1 or 2, comprising a negative pressure chamber (18) that seals the processing chamber in which the apparatus is disposed relative to the surrounding environment of the apparatus, wherein, The processing chamber contains a pressure or vacuum that has been reduced relative to atmospheric pressure.
8. The device according to claim 1 or 2, having a contact line (14) through which the component (1) of the electroceramic is electrically connected, wherein, The contact line (14) has at least one bend (16a, 16b).
9. The device according to claim 1 or 2, having a cover (17) attached to the end of the first housing section (15a) opposite to the end of the second housing section (15b).
10. The apparatus according to claim 9, wherein, The casting material (11) covers the end side (12) of the component (1) of the electro-ceramic in the first region (2), which faces away from the second region (3), and the component (1) of the electro-ceramic is mechanically decoupled from the cover (17).
11. The apparatus according to claim 10, wherein, The contact line (14) extends through the cover (17) and at least one bend (16a, 16b) of the contact line (14) is arranged inside the cover (17).
12. The apparatus according to claim 10, wherein, The cover (17) has a material that is harder than the castable (11).
13. The device according to claim 1 or 2, having an encapsulation structure (20) that surrounds a second region (3) of the component (1) of the electroceramic.
14. The apparatus according to claim 13, wherein, The encapsulation structure (20) is filled with process gas, and / or Within the encapsulation structure (20), the pressure is reduced relative to atmospheric pressure, or a vacuum exists within the encapsulation structure (20).
15. The device according to claim 1 or 2, further comprising a connector for electrical contact connection of the device, wherein, The connector is designed to be secured in a detachable manner by means of a bayonet connection, clamp connection, or plug connection.
16. The device according to claim 15, having a spring element (25) arranged such that the spring element applies a force that helps to separate the further contact connection.
17. The apparatus according to claim 1 or 2, wherein, The component (1) of the electro-ceramic is a piezoelectric transformer.
18. A plasma generator having the apparatus according to claim 1 or 2, wherein, The component (1) of the electroceramic is designed to generate non-thermal atmospheric pressure plasma.
19. An apparatus having: The component (1) of the electro-ceramic has a first region (2) and a second region (3). Castable refractory (11), which at least partially surrounds the component (1) of the electroceramic, and A sleeve-shaped shell (15) that at least partially surrounds the castable (11), wherein, The housing (15) has a material in a first housing section (15a) of the castable (11) in a first region surrounding the component (1) of the electric ceramic, the thermal conductivity of which is greater than that of the material in a second housing section (15b) of the housing (15), and wherein the housing (15) has a non-conductive material in a second housing section (15b) of the castable (11) in a second region surrounding the component (1) of the electric ceramic. The casting material (11) covers the end side (10) of the component (1) of the electro-ceramic in the second region (3), the end side pointing away from the first region (2), wherein the casting material (11) is thinner on the end side (10) than on the lateral surface of the component (1) of the electro-ceramic.
20. An apparatus having: The component (1) of the electro-ceramic has a first region (2) and a second region (3). A castable (11) that at least partially surrounds the component (1) of the electroceramic. A sleeve-shaped shell (15) that at least partially surrounds the castable (11), and A negative pressure chamber (18) is used to seal the processing chamber containing the device from the surrounding environment of the device. The processing chamber contains a pressure or vacuum that has been reduced relative to atmospheric pressure. The housing (15) has a material in the first housing section (15a) of the castable (11) surrounding the component (1) of the electric ceramic, the thermal conductivity of which is greater than that of the material in the second housing section (15b) of the housing (15), and the housing (15) has a non-conductive material in the second housing section (15b) of the castable (11) surrounding the component (1) of the electric ceramic. The device also includes a negative pressure chamber (18) that seals the processing chamber in which the device is arranged relative to the surrounding environment of the device, wherein there is a pressure or vacuum in the processing chamber that has been reduced relative to atmospheric pressure.
21. An apparatus having: The component (1) of the electro-ceramic has a first region (2) and a second region (3). A castable (11) that at least partially surrounds the component (1) of the electroceramic. A sleeve-shaped shell (15) that at least partially surrounds the castable (11), and Cover (17), which is attached to the end of the first housing section (15a) opposite to the end of the second housing section (15b). in, The housing (15) has a material in a first housing section (15a) of the castable (11) in a first region surrounding the component (1) of the electric ceramic, the thermal conductivity of which is greater than that of the material in a second housing section (15b) of the housing (15), and wherein the housing (15) has a non-conductive material in a second housing section (15b) of the castable (11) in a second region surrounding the component (1) of the electric ceramic. The device also has a cover (17) attached to the end of the first housing section (15a) opposite to the end of the second housing section (15b).
22. An apparatus having: The component (1) of the electro-ceramic has a first region (2) and a second region (3). A castable (11) that at least partially surrounds the component (1) of the electroceramic. A sleeve-shaped shell (15) that at least partially surrounds the castable (11), and The encapsulation structure (20) surrounds the second region (3) of the component (1) of the electroceramic. in, The housing (15) has a material in a first housing section (15a) of the castable (11) in a first region surrounding the component (1) of the electric ceramic, the thermal conductivity of which is greater than that of the material in a second housing section (15b) of the housing (15), and wherein the housing (15) has a non-conductive material in a second housing section (15b) of the castable (11) in a second region surrounding the component (1) of the electric ceramic. The device also has an encapsulation structure (20) that surrounds a second region (3) of the component (1) of the electroceramic.