High-precision lifting rotating platform and operation method thereof

Abstract

The invention relates to the technical field of high-precision platform devices, in particular to a high-precision lifting rotating platform and an operation method thereof. A guide rail mounting block, a linear motor rotor, an air cylinder end fixing block, a hard limiting block, a first transverse crossed roller guide rail, a first reading head mounting block, a first housing mounting block, a second housing mounting block and a second reading head mounting block are fixed to the top end of the basic mounting plate, and one end of the air cylinder end fixing block is fixed to the tail of an air cylinder in a sleeving mode. A linear motor magnetic track is arranged on one side of the air cylinder, a linear motor rotor is arranged in a magnetic field track of the linear motor magnetic track, the bottom end of a wedge-shaped mounting plate is fixedly connected with a first transverse crossed roller guide rail through bolts, electric energy is directly converted into linear motion through a linear motor, and the error problem in a traditional mechanical transmission mode is solved; due to the fact that energy loss and mechanical abrasion of an intermediate transmission link do not exist, the linear motor can achieve quick response and accurate position control.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of high-precision platform devices, and particularly relates to a high-precision lifting and rotating platform and an operation method thereof. BACKGROUND

[0002] In the long development history of industrial production, traditional lifting and rotating platforms have long occupied an important position and provided basic displacement and angle adjustment functions for various production activities. However, with the rapid progress of industrial technology, the limitations of traditional lifting and rotating platforms in precision, stability, control mode and other aspects have become increasingly prominent, and it is gradually difficult to meet the stringent needs of modern industrial production.

[0003] In terms of precision, traditional lifting and rotating platforms often have large errors. The gaps in the mechanical structure, wear and tear, and limitations of the manufacturing process make it difficult for the platform to achieve high-precision positioning during lifting and rotation. In some semiconductor manufacturing processes that require extremely high precision, the positioning error of the traditional platform may cause the lithography pattern of the chip to deviate, thereby affecting the performance and yield of the chip, causing a large amount of resource waste and cost increase. In the manufacturing of precision optical instruments, the lack of precision of the traditional platform may cause the assembly position of the optical element to deviate, seriously affecting the imaging quality and resolution of the instrument.

[0004] In the prior art, the lifting and rotating platform is generally controlled by a combination of multiple motors, such as a cylinder or a motor for lifting, and a hollow shaft motor for rotating, while also requiring extremely high precision. Such a design requires not only to meet the assembly precision, but also to select the motor parameters under harsh conditions, and to occupy a large space, with a complex wire harness. The debugging and design costs are relatively high, and the maintenance cost is huge. SUMMARY

[0005] In view of the above-mentioned shortcomings of the prior art, the present application provides a high-precision lifting and rotating platform and an operation method thereof, which can effectively solve the problems in the prior art.

[0006] The application provides a high-precision lifting and rotating platform, which comprises a base mounting plate, the top end of the base mounting plate is fixed with a guide rail mounting block, a linear motor moving part, a cylinder end fixing block, a hard limit block, a transverse cross roller guide rail one, a reading head mounting block one, a cover mounting block one, a cover mounting block two and a reading head mounting block two, one end of the cylinder end fixing block is fixedly sleeved with the tail part of a cylinder, one side of the cylinder is provided with a linear motor magnetic track, and the linear motor moving part is arranged in the magnetic field track of the linear motor magnetic track, the middle part of the cylinder is fixedly connected with a cylinder locking block, the top end of the linear motor magnetic track is fixedly connected with a wedge-shaped mounting plate through bolts, the bottom end of the wedge-shaped mounting plate is fixedly connected with the transverse cross roller guide rail one through bolts, and grooves are arranged on the two sides of the wedge-shaped mounting plate, and first grating rulers are attached in the grooves, one side of the first grating ruler is provided with a reading head and a reading head mounting block two, the wedge-shaped mounting plate is arranged at the bottom of an installation main block, one side of the installation main block is fixedly connected with the top end of the cylinder locking block through bolts, the bottom end of the installation main block is provided with a transverse cross roller guide rail two, the outer sides of the two ends of the installation main block are fixedly connected with longitudinal cross roller guide rails and guide rail mounting blocks through bolts, a grating ruler patch block is fixed on the side wall of one end of the installation main block, the front end of the grating ruler patch block is fixedly connected with a second grating ruler through adhesion, the top end of the installation main block is fixedly connected with a pneumatic connecting plate, and the top end of the pneumatic connecting plate is fixedly connected with a pneumatic floating platform.

[0007] Further, a plurality of connecting hole grooves are formed in the middle part of the base mounting plate, and a plate structure is fixedly connected with the base mounting plate through bolts, the other end of the cylinder is fixedly connected with a cylinder limiting block, the bottom end of the cylinder limiting block is fixedly connected with the base mounting plate through bolts, the bottom end of the cylinder locking block is fixedly connected with the base mounting plate through bolts, and one side of the cylinder limiting block is provided with a reset fixing block.

[0008] Further, the bottom end of the wedge-shaped mounting plate is fixedly connected with the cylinder locking block through bolts, the guide rail mounting block is arranged on the inner side of the longitudinal cross roller guide rail, and the bottom ends of the reading head mounting block one and the cover mounting block one are fixedly provided with wire harness fixing blocks.

[0009] Further, the front end of the second grating ruler is provided with a reading head, the bottom end of the reading head is fixedly connected with the reading head mounting block two through bolts, and one side of the reading head is fixedly connected with the reading head mounting block one through bolts.

[0010] Further, the outer sides of the reading head mounting block one and the cover mounting block one are respectively fixed with a cover one and a cover two.

[0011] Further, the longitudinal section of the wedge-shaped mounting plate is H-shaped structure, and the flanges on both sides of the top end are inclined surface structure with one side high and one side low, and the bottom of the mounting body block is also integrally fixed with the rib of inclined surface structure, and the transverse cross roller guide is fixed between the two groups of inclined surface structures.

[0012] Further, the piston rod in the cylinder is fastened with the cylinder limiting block through the threaded connection mode.

[0013] Further, one side of the linear motor magnetic track is without surface, and the inside is hollow, the linear motor mover is inserted in the hollow structure, and the outside of the linear motor mover is fixedly connected with the mounting body block through the cylinder locking block.

[0014] Further, the guide rail mounting block is symmetrically provided with two groups, and the inside of each group of guide rail mounting blocks is provided with a groove and a mounting hole.

[0015] In the application, a high-precision lifting and rotating platform operation method is also introduced for realizing the high-precision lifting and rotating platform, Step one: detecting equipment, checking the cooperation state of the linear motor magnetic track and the linear motor mover, verifying the grating ruler system, and checking the pneumatic system; Step two: lifting operation, ①Powering the linear motor mover, setting the motion parameters through the control system, ②The linear motor mover is driven by electromagnetic effect in the magnetic track and moves along the horizontal direction, synchronously driving the wedge-shaped mounting plate to move horizontally, ③The horizontal movement of the wedge-shaped mounting plate is reduced by the cooperation of the top end inclined surface and the bottom inclined surface rib of the mounting body block, and is converted into the inclined movement of the mounting body block; ④The inclined movement of the mounting body block is limited to the vertical upward movement by the guide constraint of the longitudinal cross roller guide and the guide rail mounting block, ⑤The reading head reads the vertical and vertical data in the first grating ruler and the second grating ruler in real time, and feeds back to the control system to realize high-precision displacement control, ⑥When the mounting body block reaches the target height, the control system cuts off the power supply of the linear motor mover, and the platform stops moving, completing the lifting positioning; Step three: reset: ①After the operation is completed, the cylinder reset program is started, the cylinder piston rod is reversely pulled through the threaded connection with the cylinder limiting block, and the cylinder locking block and the connected mounting body block, wedge-shaped mounting plate and linear motor mover return to the initial position, during the reset process; ②The hard limiting block cooperates with the reset fixed block to ensure that the parts are accurately homed and avoid overtravel Compared with the prior art, the application can achieve the following beneficial effects: In the present application, in the high-precision lifting rotary platform, the linear motor as the core driving component is closely matched with the grating ruler system to realize high-precision displacement control together, and the positioning accuracy of the platform is significantly improved. The linear motor directly converts electrical energy into linear motion, eliminating the error problem in the traditional mechanical transmission mode. Since there is no energy loss and mechanical wear and tear of the intermediate transmission link, the linear motor can realize fast response and accurate position control. During high-speed motion, the linear motor can reach a high speed in a short time and stop accurately at the specified position, and the positioning accuracy can reach sub-micron or even nanometer level, providing a strong guarantee for the high-precision operation of the platform.

[0016] In the present device, the cross roller guide rail realizes linear motion by vertically crossing the cylindrical rollers at 90 degrees between the upper and lower guide rails. This unique arrangement enables the guide rail to withstand loads and torques from multiple directions. When the platform carries a large load, the cross roller guide rail can evenly distribute the load to avoid deformation and damage caused by excessive local stress, ensuring stable operation of the platform under heavy load. In industrial automated production lines, when the platform needs to carry heavy workpieces for processing or transportation, the high load-carrying capacity and stability of the cross roller guide rail can ensure the normal operation of the platform, improving production efficiency and product quality. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0018] Figure 1 The structural schematic diagram of the present application; Figure 2 The structural explosion diagram of the present application; Figure 3 The structure split diagram (side view) in the present application; Figure 4 The structure split diagram (front view) in the present application; Figure 5 The structure split diagram (front view) in the present application;

[0019] The labels in the figure respectively represent: 1, base mounting plate; 2, guide rail mounting block; 3, longitudinal cross roller guide rail; 4, linear motor magnetic rail; 5, linear motor moving part; 6, cylinder end fixed block; 7, cylinder; 8, cylinder limiting block; 9, first grating ruler; 10, hard limiting block; 11, wedge-shaped mounting plate; 12, transverse cross roller guide rail one; 13, reading head mounting block one; 14, reading head; 15, second grating ruler; 16, grating ruler patch block; 17, wire harness fixed block; 18, cover mounting block one; 19, cover mounting block two; 20, mounting main body block; 21, pneumatic connecting plate; 22, pneumatic floating platform; 23, cover one; 24, cover two; 25, reading head mounting block two; 26, reset fixed block; 27, cylinder locking block; 28, transverse cross roller guide rail two. DETAILED DESCRIPTION

[0020] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0021] The present application will be further described below with reference to the embodiments.

[0022] Embodiment one: a high-precision lifting and rotating platform, referring to the drawings Figure 1 - the drawings Figure 5, including the base installation plate 1, the top end of the base installation plate 1 is fixed with the guide rail mounting block 2, the linear motor moving part 5, the cylinder end fixed block 6, the hard limit block 10, the transverse cross roller guide rail one 12, the reading head mounting block one 13, the shell mounting block one 18, the shell mounting block two 19 and the reading head mounting block two 25, one end of the cylinder end fixed block 6 is fixed with the tail part of the cylinder 7, one side of the cylinder 7 is provided with the linear motor magnetic track 4, and the linear motor magnetic track 4 is provided with the linear motor moving part 5 in the magnetic field track of the linear motor magnetic track 4, the middle part of the cylinder 7 is fixedly connected with the cylinder locking block 27, the top end of the linear motor magnetic track 4 is fixedly connected with the wedge-shaped installation plate 11 through bolts, the bottom end of the wedge-shaped installation plate 11 is fixedly connected with the transverse cross roller guide rail one 12 through bolts, and slots are clamped on both sides of the wedge-shaped installation plate 11, and the first grating ruler 9 is attached in the slots, one side of the first grating ruler 9 is provided with the reading head 14 and the reading head mounting block two 25, the guide rail mounting block 2 is symmetrically provided with two groups, and the inner side of each group of guide rail mounting blocks 2 is provided with a slot and a mounting hole position; the first grating ruler 9 is attached in the slot of the wedge-shaped installation plate 11, the second grating ruler 15 is fixed on one end of the side wall of the installation main block 20 through the grating ruler patch block 16, the reading head 14 cooperates with the grating ruler closely, can capture the position change information of the platform in the movement process in real time and accurately, and rapidly feeds back these information to the control system in the form of electrical signal.

[0023] One side of the linear motor magnetic track 4 is faceless, and the inside is hollow, one side of the linear motor moving part 5 is inserted into the hollow structure, and the outside of the linear motor moving part 5 is fixedly connected with the installation main block 20 through the cylinder locking block 27; the front end of the second grating ruler 15 is provided with the reading head 14, the bottom end of the reading head 14 is fixedly connected with the reading head mounting block two 25 through bolts, and one side of the reading head 14 is fixedly connected with the reading head mounting block one 13 through bolts; the outside of the reading head mounting block one 13 and the shell mounting block one 18 is fixedly connected with the shell one 23 and the shell two 24 respectively; In the motion guide layer, the platform adopts the multi-dimensional guide rail combination of the transverse cross roller guide rail one 121, two and the longitudinal cross roller guide rail 3, the transverse cross roller guide rail one 12 connects the wedge-shaped installation plate 11 and the base installation plate 1, the transverse cross roller guide rail two 28 is fixed between the inclined surface structure of the wedge-shaped installation plate 11 and the installation main block 20, and the longitudinal cross roller guide rail 3 is fixed through the symmetrically arranged guide rail mounting blocks 2, the slot and the mounting hole position pre-set in the inner side of the guide rail mounting block 2 further improve the accuracy of the guide rail assembly. The structural characteristics of the cross roller guide rail make it have a very small friction coefficient and high rigidity, effectively reducing the guiding error in the movement process.

[0024] Meanwhile, the "H-shaped" longitudinal section design of the wedge-shaped mounting plate 11 and the slope structure of the flanges on both sides of the top end precisely match the slope ribs on the bottom of the mounting body block 20, and the nested driving structure of the linear motor mover 5 and the hollow linear motor magnetic track 4, realizing the precise matching of power transmission and motion guidance, greatly improving the positioning accuracy of the platform and meeting the positioning requirements of micron-level precision operations.

[0025] The wedge-shaped mounting plate 11 is arranged at the bottom of the mounting body block 20, one side of the mounting body block 20 is fixedly connected with the top end of the cylinder locking block 27 through bolts, the bottom end of the mounting body block 20 is provided with a transversely-crossed roller guide rail two 28, the outer sides of both ends of the mounting body block 20 are fixedly connected with the longitudinally-crossed roller guide rail 3 and the guide rail mounting block 2 through bolts, and the one side wall of one end of the mounting body block 20 is fixedly provided with a grating scale patch block 16, the front end of the grating scale patch block 16 is fixedly connected with the second grating scale 15 through adhesion, the top end of the mounting body block 20 is fixedly connected with the pneumatic connecting plate 21, and the top end of the pneumatic connecting plate 21 is fixedly connected with the pneumatic floating platform 22; the slope matching structure of the wedge-shaped mounting plate 11 and the mounting body block 20 converts the transverse motion and the longitudinal motion into lifting motion, and the combined design of the pneumatic connecting plate 21 and the pneumatic floating platform 22 provides a basis for rotary motion, so that the platform can realize flexible adjustment of lifting, rotation and combined motion according to operation requirements. At the same time, the symmetrical structure design of the platform (such as the two symmetrically arranged guide rail mounting blocks 2) ensures the force balance in the motion process, reduces the motion jamming phenomenon, and improves the motion efficiency; the real-time detection feedback of the reading head 14 and the grating scale can quickly adjust the power output parameters, realize the precise regulation and control of the motion state, avoid the time-consuming invalid motion, further improve the overall operation efficiency, and is suitable for batch precision machining, multi-station detection and other efficient operation scenes.

[0026] In the structural design of the platform, the convenience of assembly and maintenance is fully considered, which effectively reduces the installation and debugging cost and the later maintenance cost of the equipment. In terms of assembly, all components are designed in a modular manner, and the core components such as the base mounting plate 1, the guide rail mounting block 2 and the wedge-shaped mounting plate 11 are provided with standardized mounting hole positions and groove bodies, such as the groove bodies and mounting hole positions on the inner side of the guide rail mounting block 2 and the groove bodies on both sides of the wedge-shaped mounting plate 11, so that the component assembly does not need additional processing and can be accurately fixed by bolts, greatly shortening the installation and debugging period.

[0027] Multiple sets of connection holes are pre-drilled in the middle of the base mounting plate 1. The structure on the plate is connected and fixed to the base mounting plate 1 by bolts. The piston rod in the cylinder 7 is fastened to the cylinder limit block 8 by a threaded connection. The bottom end of the cylinder limit block 8 is connected and fixed to the base mounting plate 1 by bolts. The bottom end of the cylinder locking block 27 is fixedly connected to the base mounting plate 1 by bolts. A reset fixing block 26 is provided on one side of the cylinder limit block 8. The reset fixing block 26 is fixed to the base mounting plate 1 by a hard limit block 10.

[0028] The bottom end of the wedge-shaped mounting plate 11 is fixedly connected to the cylinder locking block 27 by bolts. The guide rail mounting block 2 is located inside the longitudinal cross roller guide rail 3. The bottom ends of the reading head mounting block 13 and the cover mounting block 18 are both fixed with wire harness fixing blocks 17. The longitudinal section of the wedge-shaped mounting plate 11 is an H-shaped structure, and the top two flanges are inclined structures with one side higher and the other side lower. The bottom of the mounting main block 20 is also integrally fixed with ribs of inclined structure. The transverse cross roller guide rail 28 is fixed between the two sets of inclined structures. The unique H-shaped longitudinal section structure of the wedge-shaped mounting plate 11, as well as the inclined structure with one side higher and the other side lower on the top two flanges, cooperate with the inclined structure ribs integrally fixed at the bottom of the mounting main block 20, so that the transverse cross roller guide rail 28 can be firmly fixed between the two sets of inclined structures. This ingenious design not only enhances the connection stability between components, but also effectively disperses the various forces borne by the platform during movement, reduces stress concentration, and thus improves the overall stability of the platform.

[0029] During actual movement, the linear motor mover is energized. Due to electromagnetic effects, the linear motor mover moves horizontally in a specified direction within the linear motor magnetic track, driving the wedge-shaped mounting plate 11 to move horizontally. The mounting block 20 is slidably connected to the wedge-shaped mounting plate via the guide rail mounting block 27. Due to the wedge shape of the wedge-shaped mounting plate 11, the sliding connection is oblique. Simultaneously, the reading head 14 and the first grating ruler 9 provide high-precision displacement control. The mounting block 20 is guided vertically by the longitudinal cross roller guide rail 3 and the guide rail mounting block 2, and the stroke is precisely controlled by the reading head 14 and the second grating ruler 15. The final direction of movement is changed to an upward vertical movement of the mounting block 20, and reset by the cylinder 7 structure. Simultaneously, the guide rail mounting block 22 can autonomously rotate. Thus, the overall structure satisfies the functions of lifting and rotation.

[0030] Specifically: First, the base mounting plate 1, as the supporting foundation of the entire platform, needs to be firmly fixed to the work site. Using suitable fasteners, the base mounting plate 1 is securely fixed to the ground or workbench, ensuring that it will not shift or shake during subsequent work, laying a solid foundation for the stable operation of the entire platform. Next, each component is inspected. Check for damage or deformation of components such as the guide rail mounting block 2, linear motor mover 5, and cylinder end fixing block 6, ensuring their surfaces are smooth and free of obvious scratches or wear. Simultaneously, check whether the piston rod of cylinder 7 can extend and retract smoothly, and whether the fit between the linear motor magnetic rail 4 and the linear motor mover 5 is good and free of jamming.

[0031] After verification, the installation and debugging of the components began. According to the design requirements, the linear motor mover 5 was accurately installed within the magnetic field track of the linear motor magnetic track 4, ensuring that the electromagnetic induction between them could function normally and achieve precise linear motion. The end fixing block 6 of the cylinder 7 was fitted and fixed to the tail of the cylinder 7, and the cylinder limit block 8 was connected and fixed to the base mounting plate 1 with bolts. Then, the other end of the cylinder 7 was fixed to the cylinder limit block 8, enabling the cylinder to stably provide power.

[0032] When installing the guide rails, ensure the installation accuracy of the transverse cross roller guide rail 12 and the longitudinal cross roller guide rail 3, and ensure that the flatness and perpendicularity of the guide rails meet the requirements to guarantee the stability and accuracy of the platform during movement. Install and connect the reading head mounting block 13 and the reading head mounting block 25 to the reading head 14, and ensure that the relative position of the reading head 14 with the first grating ruler 9 and the second grating ruler 15 is accurate, so as to be able to read position information in real time and accurately.

[0033] Finally, the electrical system of the entire platform is debugged. The wiring of each component is checked for secure connections and any looseness or short circuits. After powering on, the control system is tested to ensure it can receive and send commands normally, controlling the movement of components such as cylinder 7 and the linear motor.

[0034] Example 2: A high-precision lifting and rotating platform operation method, used to implement the platform structure in Example 1. Step 1: Test the equipment, check the fit between the linear motor magnetic track 4 and the linear motor mover 5, verify the grating ruler system, and check the pneumatic system; Step 2: Lifting and lowering operation. ① Power on the linear motor mover 5 and set the motion parameters through the control system. ② The linear motor mover 5 is driven by electromagnetic effect within the magnetic track 4, moving horizontally and synchronously driving the wedge-shaped mounting plate 11 to move horizontally. ③ The horizontal movement of the wedge-shaped mounting plate 11 is transformed into the oblique movement of the mounting block 20 by reducing friction through the cooperation of its top inclined surface and the bottom inclined rib of the mounting body block 20 and the transverse cross roller guide 28. ④ The mounting block 20 is guided and constrained by the longitudinal cross roller guide rail 3 and the guide rail mounting block 2, and its oblique movement is restricted to vertical upward movement. ⑤ The reading head 14 reads the vertical and vertical data from the first grating ruler 9 and the second grating ruler 15 in real time and feeds it back to the control system to achieve high-precision displacement control. ⑥ When the main installation block 20 reaches the target height, the control system cuts off the power to the linear motor actuator 5, the platform stops moving, and the lifting and positioning are completed; Step 3: Reset: ① After the operation is completed, start the cylinder 7 reset program. The cylinder piston rod is pulled in the opposite direction through the threaded connection with the cylinder limit block 8, which drives the cylinder locking block 27 and the connected mounting main block 20, wedge mounting plate 11 and linear motor mover 5 back to the initial position during the reset process. ② The hard limit block 10 cooperates with the reset fixing block 26 to ensure that the component is accurately returned to its position and to avoid overtravel. The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high-precision lifting and rotating platform, characterized in that, The base mounting plate (1) includes a guide rail mounting block (2), a linear motor mover (5), a cylinder end fixing block (6), a hard limit block (10), a transverse cross roller guide rail (12), a reading head mounting block (13), a cover mounting block (18), a cover mounting block (19), and a reading head mounting block (25). One end of the cylinder end fixing block (6) is fitted and fixed to the tail of the cylinder (7). A linear motor magnetic track (4) is provided on one side of the linear motor magnetic track (4), and a linear motor mover (5) is provided in the magnetic field track of the linear motor magnetic track (4). The middle part of the cylinder (7) is fixedly connected to the cylinder locking block (27). The top of the linear motor magnetic track (4) is fixedly connected to the wedge mounting plate (11) by bolts. The bottom end of the wedge mounting plate (11) is fixedly connected to the transverse cross roller guide (12) by bolts. Both sides of the wedge mounting plate (11) are locked. A groove is provided, and a first grating ruler (9) is attached to the groove. A reading head (14) and a second reading head mounting block (25) are provided on one side of the first grating ruler (9). The wedge-shaped mounting plate (11) is provided at the bottom of the mounting main block (20). One side of the mounting main block (20) is fixedly connected to the top of the cylinder locking block (27) by bolts. A second transverse cross roller guide rail (28) is provided at the bottom of the mounting main block (20). Both ends of the outer side of the mounting block (20) are fixedly connected to the longitudinal cross roller guide (3) and the guide rail mounting block (2) by bolts. A grating ruler patch block (16) is fixed on one side wall of the mounting block (20). The front end of the grating ruler patch block (16) is fixed to the second grating ruler (15) by adhesive. The top end of the mounting block (20) is fixedly connected to the pneumatic connecting plate (21). The top end of the pneumatic connecting plate (21) is fixedly connected to the pneumatic floating platform (22).

2. The high-precision lifting and rotating platform according to claim 1, characterized in that, The base mounting plate (1) has multiple sets of connection holes and slots pre-drilled in the middle. The structure on the plate is connected and fixed to the base mounting plate (1) by bolts. The other end of the cylinder (7) is fixedly connected to the cylinder limit block (8). The bottom end of the cylinder limit block (8) is connected and fixed to the base mounting plate (1) by bolts. The bottom end of the cylinder locking block (27) is fixedly connected to the base mounting plate (1) by bolts. A reset fixing block (26) is provided on one side of the cylinder limit block (8). The reset fixing block (26) is fixed to the base mounting plate (1) by a hard limit block (10).

3. A high-precision lifting and rotating platform according to claim 2, characterized in that, The bottom end of the wedge mounting plate (11) is fixedly connected to the cylinder locking block (27) by bolts. The guide rail mounting block (2) is located on the inner side of the longitudinal cross roller guide rail (3). The bottom ends of the reading head mounting block (13) and the cover mounting block (18) are both fixed with wire harness fixing blocks (17).

4. The high-precision lifting and rotating platform according to claim 1, characterized in that, The second grating ruler (15) is provided with a reading head (14) at the front end. The bottom end of the reading head (14) is fixedly connected to the second reading head mounting block (25) by bolts, and one side of the reading head (14) is fixedly connected to the first reading head mounting block (13) by bolts.

5. A high-precision lifting and rotating platform according to claim 4, characterized in that, The outer sides of the reading head mounting block 1 (13) and the cover mounting block 1 (18) are respectively fixed with cover 1 (23) and cover 2 (24).

6. A high-precision lifting and rotating platform according to claim 1, characterized in that, The longitudinal section of the wedge mounting plate (11) is an H-shaped structure, and the top two flanges are inclined structures with one side high and the other side low. The bottom of the mounting main block (20) is also integrally fixed with ribs of inclined structure. The transverse cross roller guide rail (28) is fixed between the two sets of inclined structures.

7. A high-precision lifting and rotating platform according to claim 1, characterized in that, The piston rod in the cylinder (7) is fastened to the cylinder limit block (8) by means of a threaded connection.

8. A high-precision lifting and rotating platform according to claim 1, characterized in that, The linear motor magnetic track (4) has no surface on one side and is hollow inside. The linear motor mover (5) is inserted into the hollow structure on one side. The outer side of the linear motor mover (5) is fixedly connected to the mounting body block (20) through the cylinder locking block (27).

9. A high-precision lifting and rotating platform according to claim 1, characterized in that, The guide rail mounting blocks (2) are symmetrically arranged in two sets, and each set of guide rail mounting blocks (2) has a groove and mounting holes pre-set on the inner side.

10. A method for operating a high-precision lifting and rotating platform, used to implement the high-precision lifting and rotating platform described in any one of claims 1-9, characterized in that, Step 1: Test the equipment, check the matching status of the linear motor magnetic track (4) and the linear motor mover (5), verify the grating ruler system, and check the pneumatic system; Step 2: Lifting and lowering operation. ① Power on the linear motor mover (5) and set the motion parameters through the control system. ② The linear motor mover (5) is driven by electromagnetic effect within the magnetic track (4) and moves horizontally, synchronously driving the wedge-shaped mounting plate (11) to move horizontally. ③ The horizontal movement of the wedge mounting plate (11) is transformed into the oblique movement of the mounting block (20) through the cooperation between its top inclined surface and the bottom inclined rib of the mounting body block (20) (the transverse cross roller guide rail (28) reduces friction); ④ The mounting block (20) is guided and constrained by the longitudinal cross roller guide (3) and the guide rail mounting block (2), and its oblique movement is restricted to vertical upward movement. ⑤ The reading head (14) reads the vertical and vertical data from the first grating ruler (9) and the second grating ruler (15) in real time, and feeds it back to the control system to achieve high-precision displacement control. ⑥ When the main installation block (20) reaches the target height, the control system cuts off the power to the linear motor mover (5), the platform stops moving, and the lifting and positioning is completed; Step 3: Reset: ① After the operation is completed, start the cylinder (7) reset program. The cylinder piston rod is pulled in the opposite direction through the threaded connection with the cylinder limit block (8), which drives the cylinder locking block (27) and the connected mounting main block (20), wedge mounting plate (11), and linear motor mover (5) back to the initial position. During the reset process; ② The hard limit block (10) cooperates with the reset fixing block (26) to ensure that the component is accurately returned to its position and avoid overtravel.

Images