Electrode lifting magnetic isolation mechanism of magnetic field single crystal furnace

Abstract

The invention belongs to the technical field of crystal manufacturing, and particularly relates to a magnetic field single crystal furnace electrode lifting magnetic isolation mechanism which comprises a crucible, a sealing cover is fixedly mounted at the bottom of the crucible, a furnace base plate is fixedly mounted in the sealing cover, lifting motors are symmetrically and fixedly mounted in the furnace base plate, and four corrugated pipes are symmetrically arranged at the output ends of the lifting motors. Heaters are fixedly mounted at the tops of the four corrugated pipes; when a lifting plate moves, a reset spring in the lifting plate can push a push table to move through elasticity, the push table can push magnetic isolation rings to move outwards in the lifting plate, the two magnetic isolation rings can slide relatively end to end, the two magnetic isolation rings can be completely attached to the inner wall of a sealing cover in cooperation with elastic pushing of the reset spring, and therefore during moving, the magnetic isolation rings can be tightly attached to the inner wall of the sealing cover. The magnetism isolating ring can be completely attached to the inner wall of the sealing cover, and the situation that due to abrasion of the magnetism isolating ring, a gap is formed between the magnetism isolating ring and the sealing cover, and the isolation effect on a magnetic field at the bottom of the crucible is affected is avoided.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of crystal manufacturing, in particular to a magnetic field single crystal furnace electrode lifting magnetic shielding mechanism. BACKGROUND

[0002] A single crystal furnace is a core device for growing single crystals such as silicon single crystals and sapphire single crystals. By precisely controlling environmental parameters such as temperature, magnetic field, and vacuum, the single crystal furnace melts polycrystalline raw materials and grows high-purity single crystals in a specific crystallization direction. It is a source equipment for high-end industries such as semiconductors, photovoltaics, and LEDs. Its core value is to provide single crystal substrate materials with complete structure and low defect rate for downstream industries, which determines the performance upper limit of terminal products such as chips and photovoltaic cells.

[0003] The single crystal furnace electrode lifting mechanism is the core executive component of the single crystal furnace heating system. It is defined as a special mechanism that realizes the stable lifting of the electrode (connected to the heating component) in the furnace through mechanical transmission and precise control, adjusts the relative position of the heating component and the crucible, and finally dynamically adapts to the heat field requirements of each stage of single crystal growth.

[0004] In the prior art, when the magnetic field single crystal furnace is operating, a certain superconducting magnetic field is generated inside. When the lifting mechanism drives the single crystal operation, the magnetic components inside the motor may interact with the leaked magnetic field in the furnace, causing the external magnetic field to cancel out the magnetic field of the motor permanent magnet, resulting in fluctuations in the motor output torque, causing stalls or overshoots during lifting, and causing uneven crystal diameter during crystal pulling operation. Not only is it not conducive to the crystal pulling operation, but it also causes damage to the motor.

[0005] Therefore, the application provides a magnetic field single crystal furnace electrode lifting magnetic shielding mechanism. SUMMARY

[0006] In order to make up for the shortcomings of the prior art and solve at least one technical problem raised in the background art.

[0007] The technical scheme adopted by the present application to solve its technical problems is: the magnetic field single crystal furnace electrode lifting magnetic isolation mechanism comprises a crucible, a sealing cover is fixedly installed at the bottom of the crucible, a furnace bottom disc is fixedly installed inside the sealing cover, lifting motors are fixedly and symmetrically installed inside the furnace bottom disc, four bellows are symmetrically arranged at the output end of the lifting motor, heaters are fixedly installed at the top of the four bellows, a lifting plate is slidably arranged inside the crucible, four groups of magnetic isolation assemblies are symmetrically arranged at the top of the lifting plate, the magnetic isolation assemblies are arranged above the bellows, the magnetic isolation assemblies are used to preliminarily block the magnetic field of the single crystal furnace when the lifting motor drives the heaters to lift and heat the single crystal furnace, a covering assembly is arranged inside the lifting plate, the covering assembly comprises a magnetic isolation ring, and the covering assembly is used to secondarily block the magnetic field of the single crystal furnace when the lifting plate moves in the sealing cover through the magnetic isolation ring, and the magnetic isolation assemblies are used to isolate the magnetic field; When the single crystal furnace needs to be heated, the lifting motor in the sealing cover is driven to drive the bellows to move upwards, the bellows drive the heaters to move from the top of the furnace bottom disc to the bottom of the crucible, and the heaters are lifted to heat the crucible, so as to realize the heating operation of the single crystal in the crucible, when the bellows drive the heaters to move upwards, the bellows drive the lifting plate to move upwards, the magnetic isolation assemblies at the top of the lifting plate preliminarily block the magnetic field of the single crystal furnace, and the covering assembly in the lifting plate secondarily blocks the magnetic field of the single crystal furnace through the magnetic isolation ring, so as to cooperate with the magnetic isolation assemblies to isolate the magnetic field, through the cooperation of the two, when the lifting motor drives the heaters to move upwards through the bellows, the two can block and isolate the magnetic field of the single crystal furnace, prevent the magnetic field of the single crystal furnace from entering the sealing cover during the operation, avoid the magnetic components in the lifting motor from interacting with the leaked magnetic field in the furnace during the operation, cause the output torque of the lifting motor to fluctuate, and affect the crystal pulling operation, reduce the magnetic interference of the magnetic field on the lifting motor, and enable the lifting mechanism to drive the heaters to heat the single crystal furnace, so that the crystal in the crucible can be more stably pulled during the pulling operation.

[0008] Preferably, the magnetic isolation assembly comprises a magnetic plate fixedly installed on the top of the lifting plate, a magnetic adjuster fixedly installed on the inner wall of the lifting plate, and a magnetic pole sensor fixedly installed on the top of the magnetic plate and connected with the magnetic adjuster through wires. When the lifting motor drives the heater to move towards the bottom of the crucible through the bellows, the magnetic pole sensor captures the magnetic field emitted from the bottom of the crucible, and then the magnetic adjuster supplies the magnetic plate with a magnetic pole field opposite to the magnetic field emitted from the bottom of the crucible through system calculation, so that the magnetic field emitted from the magnetic plate repels the magnetic field emitted from the bottom of the crucible. By using the principle that like magnetic poles repel each other, the repulsive force is formed between the external magnetic field and the original magnetic field to change the propagation path of the original magnetic force line, so as to weaken the magnetic field in a specific area and preliminarily isolate the magnetic force.

[0009] Preferably, the inner wall of the sealing cover is fixedly installed with a vertical shaft, the outer wall of the vertical shaft is slidingly connected with a sliding frame, the output ends of the two lifting motors are fixedly connected with the bottom of the sliding frame, four guide shafts are symmetrically and fixedly installed between the bottom of the sliding frame and the inner wall of the furnace bottom plate, and the four bellows are provided with a connecting assembly between the sliding frame. When it is necessary to drive the heater to move towards the bottom of the crucible, the lifting motor is driven to work, so that the sliding frame is driven to slide upwards on the vertical shaft and the guide shaft, the sliding frame drives the four bellows to move upwards through the connecting assembly, so that the heater is driven to move towards the bottom of the crucible, thereby providing power for the movement of the heater. Through the arrangement of the vertical shaft and the guide shaft, the bellows can move more stably when the lifting motor drives the bellows to move upwards, which is more conducive to the heating operation of the heater on the crucible.

[0010] Preferably, the connecting assembly comprises a connecting block fixedly installed on the outer wall of the sliding frame, the top of the connecting block is fixedly connected with the bottom of the lifting plate, the outer wall of the connecting block is slidingly connected with the inner wall of the sealing cover, the outer part of the connecting block is provided with a slot rod, and the outer wall of the bellows is fixedly installed with a connecting rod. When the sliding frame moves upwards, the connecting block is driven to move upwards, the connecting block drives the connecting rod to move upwards through the slot rod, and the slot rod drives the bellows to move upwards, so that the bellows drive the heater to move towards the bottom of the crucible, thereby connecting and driving the bellows to move synchronously.

[0011] Preferably, the outer wall of the vertical shaft is symmetrically fixedly installed with a magnetic isolation cover, and the two lifting motors are respectively arranged in the two magnetic isolation covers. The output ends of the two magnetic isolation covers are slidingly connected with the inner walls of the two magnetic isolation covers. When the lifting motor works, the output end of the lifting motor extends out of the magnetic isolation cover, so that the sliding frame is driven to move upwards. The magnetic isolation cover is arranged to cover the lifting motor when the lifting motor works, so as to further magnetically isolate and protect the lifting motor. The magnetic isolation cover works together with the magnetic isolation assembly and the magnetic isolation cover assembly to cover the lifting motor for magnetic isolation.

[0012] Preferably, four electric telescopic rods are symmetrically fixedly installed at the bottom of the furnace base. Each of the four electric telescopic rods has a base block fixedly installed at its output end. Each of the four base blocks has an inner sliding shaft fixedly installed at its top. The outer walls of the four inner sliding shafts are slidably connected to the inner walls of the furnace base. The outer walls of the four inner sliding shafts are also slidably connected to the inner walls of the four bellows. Four limiting plates are fixedly installed at the bottom of the furnace base. The outer walls of the four base blocks are slidably connected to the inner walls of the four limiting plates. The outer walls of the four heaters are slidably connected to the inner walls of the lifting plates. When the heating position needs to be adjusted, the electric telescopic rods push the base blocks within the limiting plates at the bottom of the furnace base. The base blocks then move the inner sliding shafts, which in turn pull the bellows. This causes the bellows to move the heaters laterally at the bottom of the crucible, thereby adjusting the heating position of the heaters when heating the crucible.

[0013] Preferably, the inner wall of the connecting block is slidably connected to a displacement shaft, one end of the groove rod is fixedly connected to the outer wall of the displacement shaft, and the outer wall of the connecting rod is slidably connected to the inner wall of the groove rod. When the inner sliding shaft pulls the bellows to move, the bellows will pull the groove rod to move through the connecting rod, and the groove rod will drive the displacement shaft to slide inside the connecting block. This ensures that when the inner sliding shaft pulls the bellows to adjust the lateral heating position, the connecting rod and the groove rod can always maintain a connection relationship, so that the two will not interfere with each other during operation, thus playing the role of connecting the connecting block and the bellows.

[0014] Preferably, four sets of vertical plates are fixedly installed on the top of the lifting plate, and four sets of slotted plates are symmetrically fixedly installed on the bottom of the crucible. The outer walls of the four sets of vertical plates are slidably connected to the inner walls of the four sets of slotted plates. The four vertical plates are placed between the four magnetic plates. When the lifting plate moves up, it will drive the top vertical plate to move up, and the top vertical plate of the lifting plate will move in the slotted plate. The lifting plate and the heater will then move towards the bottom of the crucible. By setting the slotted plates and vertical plates, the top of the lifting plate can be divided into four independent areas. By setting corresponding magnetic isolation components in each area, it is easier for the magnetizer to repel the magnetic field at the bottom of the crucible through the magnetic plates, thus dividing the repulsive areas.

[0015] Preferably, each of the four heaters has a stop block fixedly installed on its top. The outer walls of the four stop blocks are slidably connected to the top of the lifting plate, and the outer walls of the four stop blocks are slidably connected to the outer walls of the four sets of vertical plates respectively. When the electric telescopic rod drives the bellows to move through the inner sliding shaft, the bellows will drive the heater to slide inside the lifting plate. The heater will then drive the stop block to slide between the vertical plates, thereby blocking the gap between the heater and the lifting plate and preventing the magnetic field from leaking out from the gap between them, thus playing the role of blocking the gap.

[0016] Preferably, the enclosure assembly further includes sliding rods and two magnetic isolation rings, which are slidably connected end-to-end. The outer walls of both magnetic isolation rings are slidably connected to the inner wall of the lifting plate. Multiple sliding rods are also included, with one end fixedly connected to the inner wall of the lifting plate and the other end slidably connected to a pusher. One end of each pusher is slidably connected to the inner wall of the two magnetic isolation rings. A return spring is provided between one side of each pusher and the inner wall of the lifting plate. When the lifting plate moves within the sealing cover, the return springs within the lifting plate elastically push the pushers on the sliding rods, thus pushing the pushers forward. As the moving magnetic shielding ring moves outward within the lifting plate, the two magnetic shielding rings slide relative to each other. With the elastic push of the return spring, the two magnetic shielding rings completely adhere to the inner wall of the sealing cover. This ensures that the magnetic shielding rings remain completely against the inner wall of the sealing cover during movement, preventing wear and tear that could create gaps between the magnetic shielding rings and the sealing cover, thus affecting the isolation effect on the magnetic field at the bottom of the crucible. This function works in conjunction with the magnetic shielding assembly to shield the magnetic field at the bottom of the crucible. Simultaneously, the elastic push of the return spring, combined with the sliding opening and closing of the magnetic shielding rings, allows the device to perform magnetic shielding operations on single crystal furnaces of various sizes.

[0017] The beneficial effects of this invention are as follows: 1. The magnetic shielding mechanism for lifting electrodes of a magnetic field single crystal furnace as described in this invention, when the lifting plate moves, the reset spring inside the lifting plate will elastically push the pusher to move, and the pusher will push the magnetic shielding ring to move outward inside the lifting plate. The two magnetic shielding rings will slide relative to each other, and with the elastic push of the reset spring, the two magnetic shielding rings will completely fit against the inner wall of the sealing cover. Thus, when it moves, the magnetic shielding rings can completely fit against the inner wall of the sealing cover, avoiding the gap between the magnetic shielding rings and the sealing cover due to wear, which would affect the isolation effect on the magnetic field at the bottom of the crucible.

[0018] 2. The magnetic field isolation mechanism for lifting electrodes of a single crystal furnace described in this invention works by having a magnetic pole sensor capture the magnetic field emitted from the bottom of the crucible when the lifting motor drives the heater to move towards the bottom of the crucible via a bellows. Subsequently, through system calculation, the magnetizer introduces a magnetic pole field opposite to the magnetic field emitted from the bottom of the crucible onto the magnetic plate, thereby causing the magnetic field emitted from the magnetic plate to repel the magnetic field emitted from the bottom of the crucible. Utilizing the principle of repulsion between like magnetic poles, the external magnetic field forms a repulsive force with the original magnetic field, changing the propagation path of the original magnetic field lines, thereby weakening the magnetic field in a specific area and playing a role in weakening the magnetic force for preliminary magnetic isolation.

[0019] 3. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism of the present invention, when it is necessary to move the heater to the bottom of the crucible, drives the lifting motor to operate. The lifting motor drives the slide to slide upward on the vertical axis and the guide axis. The slide then drives the four bellows to move upward through the connecting component, thereby moving the heater to the bottom of the crucible and providing power for the movement of the heater. Through the setting of the vertical axis and the guide axis, when the lifting motor drives the bellows to move upward, the bellows can be more stable during movement, which is more conducive to the upward movement of the heater to heat the crucible.

[0020] 4. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism of the present invention uses an electric telescopic rod to push the bottom block to move within the limiting plate at the bottom of the furnace bottom plate. The bottom block will then drive the inner sliding shaft to move, and the inner sliding shaft will pull the bellows to move. This will cause the bellows to drive the heater to move laterally at the bottom of the crucible, thereby adjusting the heating position of the heater when heating the crucible, thus achieving the function of adjusting the heating position.

[0021] 5. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism of the present invention, when the lifting plate moves up, the lifting plate will drive the top vertical plate to move up, and the top vertical plate will move within the slot plate. The lifting plate and the heater will then move towards the bottom of the crucible. By setting the slot plate and the vertical plate, the top of the lifting plate can be divided into four independent areas. By setting a corresponding magnetic isolation component in each area, it is easier for the magnetizer to repel the magnetic field at the bottom of the crucible through the magnetic plate, thus playing the role of dividing the repulsive area. Attached Figure Description

[0022] The invention will now be further described with reference to the accompanying drawings.

[0023] Figure 1 This is an overall diagram of the invention; Figure 2 This is a main body diagram of the present invention; Figure 3 This is a schematic diagram of the structure of the magnetic plate in this invention; Figure 4 This is a schematic diagram of the structure at the guide shaft in this invention; Figure 5 This is a schematic diagram of the structure at the bottom block in this invention; Figure 6 This is a schematic diagram of the structure at the groove rod in this invention; Figure 7 This is a schematic diagram of the structure of the lifting plate in this invention; Figure 8 This is a schematic diagram of the structure of the magnetic isolation ring in this invention; Figure 9 This is a schematic diagram of the pusher platform in this invention.

[0024] In the diagram: 1. Crucible; 2. Sealing cover; 3. Furnace bottom plate; 4. Lifting plate; 401. Slot plate; 402. Vertical plate; 5. Vertical shaft; 6. Electric telescopic rod; 601. Limiting plate; 602. Bottom block; 603. Inner sliding shaft; 7. Bellows; 8. Magnetic shielding cover; 801. Slide frame; 802. Lifting motor; 9. Magnetic plate; 901. Magnetic pole sensor; 902. Magnetizer; 10. Heater; 1001. Resistance block; 11. Connecting block; 1101. Shifting shaft; 1102. Connecting rod; 1103. Slot rod; 12. Magnetic shielding ring; 1201. Return spring; 1202. Limiting rod; 1203. Push table; 13. Guide shaft. Detailed Implementation

[0025] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0026] like Figures 1 to 9 As shown in the embodiment of the present invention, a magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism includes a crucible 1, a sealing cover 2 fixedly installed at the bottom of the crucible 1, a furnace bottom plate 3 fixedly installed inside the sealing cover 2, a lifting motor 802 symmetrically fixedly installed inside the furnace bottom plate 3, four bellows 7 symmetrically arranged at the output end of the lifting motor 802, a heater 10 fixedly installed at the top of each of the four bellows 7, a lifting plate 4 slidably arranged inside the crucible 1, four sets of magnetic isolation components symmetrically arranged at the top of the lifting plate 4, the magnetic isolation components being arranged above the bellows 7, the magnetic isolation components being used to initially block the magnetic field emitted by the single crystal furnace when the lifting motor 802 drives the heater 10 to lift and heat the single crystal furnace through the bellows 7, the magnetic isolation components being used to initially block the magnetic field emitted by the single crystal furnace, the lifting plate 4 having a covering component inside, the covering component including a magnetic isolation ring 12, the covering component being used to secondary block the magnetic field emitted by the single crystal furnace through the magnetic isolation ring 12 when the lifting plate 4 moves inside the sealing cover 2, and working with the magnetic isolation component to isolate the magnetic field; When the lifting mechanism drives the single crystal to operate, the magnetic components inside the motor may interact with the magnetic field leaking inside the furnace, causing fluctuations in the motor's output torque. This can lead to jamming or overshoot during the lifting motion, resulting in uneven crystal diameter during the crystal pulling operation. When heating is required in the single crystal furnace, the bellows 7 is moved upward by the lifting motor 802 inside the sealing cover 2. The bellows 7 then moves the heater 10 from the top of the furnace base 3 to the bottom of the crucible 1. The heater 10 then moves upward to heat the crucible 1, thus heating the single crystal inside the crucible 1. When the bellows 7 moves the heater 10 upward, it also moves the lifting plate 4 upward. The magnetic shielding component at the top of the lifting plate 4 initially blocks the magnetic field emitted by the single crystal furnace. At the same time, the shielding component inside the lifting plate 4 further blocks the magnetic field emitted by the single crystal furnace through the magnetic shielding ring 12, thus working in conjunction with the magnetic shielding component. The magnetic field is isolated by the working mechanism. When the lifting motor 802 moves the heater 10 upward through the bellows 7, the two components block and isolate the magnetic field emitted from the single crystal furnace. This prevents the magnetic field emitted from the single crystal furnace from entering the sealing cover 2 during operation. It also prevents the magnetic components inside the lifting motor 802 from interacting with the magnetic field leaking from the furnace, which could cause fluctuations in the output torque of the lifting motor 802 and affect the crystal pulling operation. This reduces the magnetic interference of the magnetic field on the lifting motor 802, allowing for a more stable crystal pulling operation in the crucible 1 when the lifting mechanism drives the heater 10 to heat the single crystal furnace.

[0027] like Figures 3 to 7 As shown, the magnetic shielding assembly includes a magnetic plate 9, which is fixedly installed on the top of the lifting plate 4. A magnetizer 902 is fixedly installed on the inner wall of the lifting plate 4. The magnetizer 902 and the magnetic plate 9 are connected by a wire. A magnetic pole sensor 901 is fixedly installed on the top of the magnetic plate 9. When the lifting motor 802 drives the heater 10 to move towards the bottom of the crucible 1 through the bellows 7, the magnetic pole sensor 901 captures the magnetic field emitted from the bottom of the crucible 1. Then, through system calculation, the magnetizer 902 introduces a magnetic field opposite to the magnetic field at the bottom of the crucible 1 onto the magnetic plate 9. This causes the magnetic field emitted by the magnetic plate 9 to repel the magnetic field emitted from the bottom of the crucible 1. Utilizing the principle of repulsion between like magnetic poles, the external magnetic field forms a repulsive force with the original magnetic field, changing the propagation path of the original magnetic field lines. This weakens the magnetic field in a specific area, thus achieving the initial magnetic isolation effect. It should be noted that the magnetizer 902 should be equipped with a magnetic field switching mechanism and a magnetic force adjustment mechanism. The magnetic field switching mechanism is used to switch the positive and negative poles of the magnetic plate 9, and the magnetic force adjustment mechanism is used to control the magnitude of the magnetic force of the magnetic plate 9. The two work together. Both are existing technologies, so they are only described and not shown in this solution.

[0028] like Figures 2 to 4As shown, a vertical shaft 5 is fixedly installed on the inner wall of the sealing cover 2, and a slide 801 is slidably connected to the outer wall of the vertical shaft 5. The output ends of the two lifting motors 802 are fixedly connected to the bottom of the slide 801. Four guide shafts 13 are symmetrically fixedly installed between the bottom of the slide 801 and the inner wall of the furnace bottom plate 3. A through-connection component is provided between the four bellows 7 and the slide 801. When it is necessary to move the heater 10 to the bottom of the crucible 1, the lifting motor 802 is driven to operate. The lifting motor 802 will drive the slide 801 to slide upward on the vertical shaft 5 and the guide shaft 13. The slide 801 will then drive the four bellows 7 to move upward through the connecting assembly, thereby driving the heater 10 to move to the bottom of the crucible 1. This provides power for the movement of the heater 10. With the setting of the vertical shaft 5 and the guide shaft 13, when the lifting motor 802 drives the bellows 7 to move upward, the bellows 7 can move more stably, which is more conducive to the heater 10 moving upward to heat the crucible 1.

[0029] like Figures 4 to 6 As shown, the connecting component includes a connecting block 11, which is fixedly installed on the outer wall of the slide 801. The top of the connecting block 11 is fixedly connected to the bottom of the lifting plate 4. The outer wall of the connecting block 11 is slidably connected to the inner wall of the sealing cover 2. A grooved rod 1103 is provided on the outside of the connecting block 11. A connecting rod 1102 is fixedly installed on the outer wall of the bellows 7. The connecting rod 1102 is placed inside the grooved rod 1103. When the slide 801 moves upward, the slide 801 will drive the connecting block 11 to move upward. The connecting block 11 will then push the connecting rod 1102 upward through the groove rod 1103. The groove rod 1103 will drive the bellows 7 to move upward, thereby causing the bellows 7 to drive the heater 10 to move towards the bottom of the crucible 1, thus playing the role of connecting and driving the bellows 7 to move synchronously.

[0030] like Figures 3 to 4 As shown, magnetic shielding covers 8 are symmetrically fixedly installed on the outer wall of the vertical shaft 5. Two lifting motors 802 are respectively placed inside the two magnetic shielding covers 8. The output ends of the two magnetic shielding covers 8 are slidably connected to the inner walls of the two magnetic shielding covers 8. When the lifting motor 802 is in operation, its output end extends from the magnetic shielding cover 8, thereby driving the slide 801 to move upward. The magnetic shielding cover 8 is designed to cover the lifting motor 802 when it is in operation, providing further magnetic isolation protection. Working together with the magnetic shielding component and the covering component, it serves to cover the lifting motor 802 and provide magnetic isolation. It should be noted that a magnetic shielding seal should be provided between the output end of the lifting motor 802 and the magnetic shielding cover 8.

[0031] like Figures 3 to 7As shown, four electric telescopic rods 6 are symmetrically fixedly installed on the bottom of the furnace base plate 3. The output ends of the four electric telescopic rods 6 are all fixedly installed with base blocks 602. The tops of the four base blocks 602 are all fixedly installed with inner sliding shafts 603. The outer walls of the four inner sliding shafts 603 are slidably connected to the inner walls of the furnace base plate 3. The outer walls of the four inner sliding shafts 603 are slidably connected to the inner walls of the four corrugated pipes 7. Four limiting plates 601 are fixedly installed on the bottom of the furnace base plate 3. The outer walls of the four base blocks 602 are slidably connected to the inner walls of the four limiting plates 601 respectively. The outer walls of the four heaters 10 are slidably connected to the inner walls of the lifting plates 4. Since the position of the crucible 1 to be heated varies, when the heating position needs to be adjusted, the bottom block 602 is moved within the limiting plate 601 at the bottom of the furnace base plate 3 by the electric telescopic rod 6. The bottom block 602 will then drive the inner sliding shaft 603 to move, which in turn will pull the bellows 7 to move. This will cause the bellows 7 to drive the heater 10 to move laterally at the bottom of the crucible 1, thereby adjusting the heating position of the heater 10 when heating the crucible 1, thus achieving the function of adjusting the heating position.

[0032] like Figures 5 to 6 As shown, a displacement shaft 1101 is slidably connected to the inner wall of the connecting block 11, one end of the groove rod 1103 is fixedly connected to the outer wall of the displacement shaft 1101, and the outer wall of the connecting rod 1102 is slidably connected to the inner wall of the groove rod 1103. When the inner sliding shaft 603 pulls the bellows 7 to move, the bellows 7 will pull the groove rod 1103 to move through the connecting rod 1102. The groove rod 1103 will then drive the shifting shaft 1101 to slide inside the connecting block 11. This ensures that when the inner sliding shaft 603 pulls the bellows 7 to adjust its lateral heating position, the connecting rod 1102 and the groove rod 1103 can always maintain a connection, preventing interference during operation and serving to connect the connecting block 11 and the bellows 7.

[0033] like Figures 6 to 7 As shown, four sets of vertical plates 402 are fixedly installed on the top of the lifting plate 4, and four sets of slot plates 401 are symmetrically fixedly installed on the bottom of the crucible 1. The outer walls of the four sets of vertical plates 402 are slidably connected to the inner walls of the four sets of slot plates 401 respectively, and the four vertical plates 402 are respectively placed between the four magnetic plates 9. When the lifting plate 4 moves upward, it will drive the top vertical plate 402 to move upward. The top vertical plate 402 of the lifting plate 4 will then move within the slot plate 401. The lifting plate 4 and the heater 10 will then move towards the bottom of the crucible 1. Through the arrangement of the slot plate 401 and the vertical plate 402, the top of the lifting plate 4 can be divided into four independent areas. By setting a corresponding magnetic isolation component in each area, it is easier for the magnetizer 902 to repel the magnetic field at the bottom of the crucible 1 through the magnetic plate 9, thus playing the role of dividing the repulsive areas.

[0034] like Figures 3 to 4 As shown, a stop block 1001 is fixedly installed on the top of each of the four heaters 10. The outer walls of the four stop blocks 1001 are slidably connected to the top of the lifting plate 4. The outer walls of the four stop blocks 1001 are slidably connected to the outer walls of the four sets of vertical plates 402 respectively. When the electric telescopic rod 6 drives the bellows 7 to move via the inner sliding shaft 603, the bellows 7 will drive the heater 10 to slide inside the lifting plate 4. The heater 10 will then drive the block 1001 to slide between the vertical plates 402, thereby blocking the gap between the heater 10 and the lifting plate 4 and preventing the magnetic field from leaking out from the gap. It should be noted that the slot plate 401, the vertical plate 402, the lifting plate 4 and the block 1001 are all made of magnetic shielding material.

[0035] like Figures 7 to 9 As shown, the partition assembly also includes a sliding rod 1202, two magnetic rings 12, the two magnetic rings 12 are slidably connected to each other at their ends, the outer walls of the two magnetic rings 12 are slidably connected to the inner wall of the lifting plate 4, and multiple sliding rods 1202. One end of each of the multiple sliding rods 1202 is fixedly connected to the inner wall of the lifting plate 4, and the other end of each of the multiple sliding rods 1202 is slidably connected to a pusher 1203. One end of each of the multiple pushers 1203 is slidably connected to the inner wall of the two magnetic rings 12, and a return spring 1201 is provided between one side of each of the multiple pushers 1203 and the inner wall of the lifting plate 4. When the lifting plate 4 moves within the sealing cover 2, the return spring 1201 within the lifting plate 4 elastically pushes the pusher 1203 to move on the sliding rod 1202. The pusher 1203 is then pushed, causing the magnetic shielding ring 12 to move outward within the lifting plate 4. The two magnetic shielding rings 12 slide relative to each other, and with the elastic push of the return spring 1201, the two magnetic shielding rings 12 completely adhere to the inner wall of the sealing cover 2. This ensures that the magnetic shielding rings 12 can completely adhere to the inner wall of the sealing cover 2 during movement. The wall is designed to prevent wear of the magnetic shielding ring 12, which could lead to gaps between the magnetic shielding ring 12 and the sealing cover 2, thus affecting the isolation effect on the magnetic field at the bottom of the crucible 1. It works in conjunction with the magnetic shielding assembly to shield the magnetic field at the bottom of the crucible 1. At the same time, the elastic push of the return spring 1201 pushes the magnetic shielding ring 12 to slide open and close, allowing it to expand outward. This enables the device to perform magnetic shielding operations on single crystal furnaces of various sizes. It should be noted that the magnetic shielding ring 12 should be made of magnetic shielding materials such as ceramics or silicon steel sheets.

[0036] Working Principle: When heating is required in the single crystal furnace, the lifting motor 802 inside the drive sealing cover 2 moves the bellows 7 upward. The bellows 7 then moves the heater 10 from the top of the furnace base 3 to the bottom of the crucible 1. The heater 10 then moves upward to heat the crucible 1, thus heating the single crystal inside the crucible 1. When the bellows 7 moves the heater 10 upward, it also moves the lifting plate 4 upward. The magnetic shielding component at the top of the lifting plate 4 initially blocks the magnetic field emitted by the single crystal furnace. Simultaneously, the shielding component inside the lifting plate 4 further blocks the magnetic field emitted by the single crystal furnace through the magnetic shielding ring 12, thus cooperating with the shielding... The magnetic components isolate the magnetic field. Through their cooperation, when the lifting motor 802 moves the heater 10 upward through the bellows 7, the two components block and isolate the magnetic field emitted from the single crystal furnace. This prevents the magnetic field emitted from the single crystal furnace from entering the sealing cover 2 during operation. It also prevents the magnetic components inside the lifting motor 802 from interacting with the magnetic field leaking from the furnace during operation, which would cause fluctuations in the output torque of the lifting motor 802 and thus affect the crystal pulling operation. This reduces the magnetic interference of the magnetic field on the lifting motor 802, allowing for a more stable crystal pulling operation in the crucible 1 when the lifting mechanism drives the heater 10 to heat the single crystal furnace. When the lifting motor 802 drives the heater 10 to move towards the bottom of the crucible 1 through the bellows 7, the magnetic pole sensor 901 captures the magnetic field emitted from the bottom of the crucible 1. Then, through system calculation, the magnetizer 902 will introduce a magnetic pole field opposite to the magnetic field at the bottom of the crucible 1 into the magnetic plate 9. This causes the magnetic field emitted by the magnetic plate 9 to repel the magnetic field emitted from the bottom of the crucible 1. By utilizing the principle of mutual repulsion between like magnetic poles, the external magnetic field forms a repulsive force with the original magnetic field, changing the propagation path of the original magnetic field lines. This weakens the magnetic field in a specific area, thus playing a role in weakening the magnetic force and performing preliminary magnetic isolation. When it is necessary to move the heater 10 to the bottom of the crucible 1, the lifting motor 802 is driven to operate. The lifting motor 802 will drive the slide 801 to slide upward on the vertical shaft 5 and the guide shaft 13. The slide 801 will then drive the four bellows 7 to move upward through the connecting assembly, thereby driving the heater 10 to move to the bottom of the crucible 1. This provides power for the movement of the heater 10. With the setting of the vertical shaft 5 and the guide shaft 13, when the lifting motor 802 drives the bellows 7 to move upward, the bellows 7 can move more stably, which is more conducive to the heater 10 moving upward to heat the crucible 1. When the slide 801 moves upward, the slide 801 will drive the connecting block 11 to move upward. The connecting block 11 will then push the connecting rod 1102 to move upward through the groove rod 1103. The groove rod 1103 will drive the bellows 7 to move upward, thereby causing the bellows 7 to drive the heater 10 to move towards the bottom of the crucible 1, thus playing the role of connecting and driving the bellows 7 to move synchronously. When the lifting motor 802 is in operation, the output end of the lifting motor 802 will extend out from the magnetic shielding cover 8, thereby driving the slide 801 to move upward. The magnetic shielding cover 8 is set up to cover the lifting motor 802 when the lifting motor 802 is in operation, and to provide further magnetic isolation protection for the lifting motor 802. It works together with the magnetic shielding component and the covering component to cover the lifting motor 802 and provide magnetic isolation. When the heating position needs to be adjusted, the electric telescopic rod 6 pushes the bottom block 602 to move within the limiting plate 601 at the bottom of the furnace bottom plate 3. The bottom block 602 will then drive the inner sliding shaft 603 to move, which in turn will pull the bellows 7 to move. This will cause the bellows 7 to drive the heater 10 to move laterally at the bottom of the crucible 1, thereby adjusting the heating position of the heater 10 when heating the crucible 1, thus achieving the function of adjusting the heating position. When the inner sliding shaft 603 pulls the bellows 7 to move, the bellows 7 will pull the groove rod 1103 to move through the connecting rod 1102. The groove rod 1103 will then drive the shifting shaft 1101 to slide inside the connecting block 11. This ensures that when the inner sliding shaft 603 pulls the bellows 7 to adjust the lateral heating position, the connecting rod 1102 and the groove rod 1103 can always maintain a connection, so that the two will not interfere with each other during operation, thus serving to connect the connecting block 11 and the bellows 7. When the lifting plate 4 moves upward, it will drive the top vertical plate 402 to move upward. The top vertical plate 402 of the lifting plate 4 will then move within the slot plate 401. The lifting plate 4 and the heater 10 will then move towards the bottom of the crucible 1. Through the arrangement of the slot plate 401 and the vertical plate 402, the top of the lifting plate 4 can be divided into four independent areas. By setting a corresponding magnetic shielding component in each area, it is easier for the magnetizer 902 to repel the magnetic field at the bottom of the crucible 1 through the magnetic plate 9, thus playing the role of dividing the repulsive area. When the electric telescopic rod 6 drives the bellows 7 to move through the inner sliding shaft 603, the bellows 7 will drive the heater 10 to slide inside the lifting plate 4. The heater 10 will drive the block 1001 to slide between the vertical plates 402, thereby blocking the gap between the heater 10 and the lifting plate 4, preventing the magnetic field from leaking out from the gap between them, and playing the role of blocking the gap. When the lifting plate 4 moves within the sealing cover 2, the return spring 1201 within the lifting plate 4 will elastically push the pusher 1203 to move on the sliding rod 1202. The pusher 1203 will be pushed, thereby pushing the magnetic shielding ring 12 to move outward within the lifting plate 4. The two magnetic shielding rings 12 will slide relative to each other. With the elastic push of the return spring 1201, the two magnetic shielding rings 12 will completely fit against the inner wall of the sealing cover 2. This ensures that the magnetic shielding rings 12 can completely fit against the inner wall of the sealing cover 2 during movement, preventing wear of the magnetic shielding rings 12 and the resulting gap between the magnetic shielding rings 12 and the sealing cover 2, which would affect the isolation effect on the magnetic field at the bottom of the crucible 1. This serves to cooperate with the magnetic shielding assembly to shield the magnetic field at the bottom of the crucible 1. At the same time, the elastic push of the return spring 1201, combined with the sliding opening and closing of the magnetic shielding rings 12, allows the device to perform magnetic shielding operations on single crystal furnaces of various sizes.

[0037] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism, characterized in that: The system includes a crucible, a sealed cover fixedly installed at the bottom of the crucible, a furnace base plate fixedly installed inside the sealed cover, a lifting motor symmetrically fixedly installed inside the furnace base plate, four bellows symmetrically arranged at the output end of the lifting motor, and a heater fixedly installed at the top of each of the four bellows. A lifting plate is slidably arranged inside the crucible, and four sets of magnetic shielding components are symmetrically arranged at the top of the lifting plate. The magnetic shielding components are located above the bellows. When the lifting motor drives the heater through the bellows to lift and heat the single crystal furnace, the magnetic shielding components are used to initially block the magnetic field emitted by the single crystal furnace. A covering component is arranged inside the lifting plate. The covering component includes a magnetic shielding ring. When the lifting plate moves inside the sealed cover, the covering component blocks the magnetic field emitted by the single crystal furnace a second time through the magnetic shielding ring, thus working with the magnetic shielding components to isolate the magnetic field.

2. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism according to claim 1, characterized in that: The magnetic shielding assembly includes a magnetic plate, which is fixedly installed on the top of the lifting plate. A magnetic adjuster is fixedly installed on the inner wall of the lifting plate. The magnetic adjuster is connected to the magnetic plate by a wire. A magnetic pole sensor is fixedly installed on the top of the magnetic plate.

3. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism according to claim 2, characterized in that: A vertical shaft is fixedly installed on the inner wall of the sealing cover, and a slide is slidably connected to the outer wall of the vertical shaft. The output ends of the two lifting motors are fixedly connected to the bottom of the slide. Four guide shafts are symmetrically fixed between the bottom of the slide and the inner wall of the furnace bottom plate. A connecting component is provided between the four corrugated pipes and the slide.

4. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism according to claim 3, characterized in that: The connecting component includes a connecting block, which is fixedly installed on the outer wall of the carriage. The top of the connecting block is fixedly connected to the bottom of the lifting plate. The outer wall of the connecting block is slidably connected to the inner wall of the sealing cover. A grooved rod is provided on the outside of the connecting block. A connecting rod is fixedly installed on the outer wall of the bellows and is placed inside the grooved rod.

5. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism according to claim 4, characterized in that: The outer wall of the vertical shaft is symmetrically fixed with magnetic shielding covers. Two lifting motors are respectively placed inside the two magnetic shielding covers, and the output ends of the two magnetic shielding covers are slidably connected to the inner walls of the two magnetic shielding covers.

6. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism according to claim 5, characterized in that: Four electric telescopic rods are symmetrically fixedly installed at the bottom of the furnace base. Each of the four electric telescopic rods has a base block fixedly installed at its output end. Each of the four base blocks has an inner sliding shaft fixedly installed at its top. The outer walls of the four inner sliding shafts are slidably connected to the inner walls of the furnace base. The outer walls of the four inner sliding shafts are also slidably connected to the inner walls of the four bellows. Four limiting plates are fixedly installed at the bottom of the furnace base. The outer walls of the four base blocks are slidably connected to the inner walls of the four limiting plates. The outer walls of the four heaters are slidably connected to the inner walls of the lifting plates.

7. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism according to claim 6, characterized in that: The inner wall of the connecting block is slidably connected to a displacement shaft, one end of the groove rod is fixedly connected to the outer wall of the displacement shaft, and the outer wall of the connecting rod is slidably connected to the inner wall of the groove rod.

8. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism according to claim 7, characterized in that: Four sets of vertical plates are fixedly installed on the top of the lifting plate, and four sets of slotted plates are symmetrically fixedly installed on the bottom of the crucible. The outer walls of the four sets of vertical plates are slidably connected to the inner walls of the four sets of slotted plates, and the four vertical plates are respectively placed between four magnetic plates.

9. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism according to claim 8, characterized in that: Each of the four heaters has a fixed stop block installed on its top. The outer walls of the four stop blocks are slidably connected to the top of the lifting plate, and the outer walls of the four stop blocks are slidably connected to the outer walls of the four sets of vertical plates, respectively.

10. The magnetic field single crystal furnace electrode lifting and magnetic isolation mechanism according to claim 9, characterized in that: The partition assembly also includes a sliding rod and two magnetic isolation rings. The two magnetic isolation rings are slidably connected to each other at their ends. The outer walls of the two magnetic isolation rings are slidably connected to the inner wall of the lifting plate. There are multiple sliding rods. One end of each sliding rod is fixedly connected to the inner wall of the lifting plate. The other end of each sliding rod is slidably connected to a pusher. One end of each pusher is slidably connected to the inner wall of the two magnetic isolation rings. A return spring is provided between one side of each pusher and the inner wall of the lifting plate.

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