EBSD test sample table for geological slice and EBSD test method

Abstract

The invention relates to an EBSD test sample table for a geological slice and an EBSD test method, and the EBSD test sample table comprises a plugging pedestal, a rotating support arm, a driving mechanism, a substrate table and a gravity center keeping mechanism. The rotary support arm is hinged with the insertion base; the driving mechanism is in driving connection with the rotating support arm and is used for driving the rotating support arm to rotate; the substrate table is connected with the rotary support arm, and the rotary support arm is connected to the center of the substrate table; the gravity center keeping mechanism and the rotating support arm move in a related mode, so that the overall gravity center of the rotating support arm and the substrate table is always kept in the vertical direction where the inserting base is located. According to the invention, the center-of-gravity shift of the large-size geological slice can be prevented, and the data acquisition precision is ensured.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of geological sample testing, and in particular relates to an EBSD test sample stage for geological thin sections and an EBSD test method. BACKGROUND

[0002] In the field of material microstructure analysis, electron backscatter diffraction (EBSD) technology is an important means for studying mineral crystal orientation, texture and microstructure, and is usually used in conjunction with a scanning electron microscope (SEM). The sample area supported by the substrate stage is usually ≤1cm², such as a square sample with a side length ≤1cm or a circular sample with a diameter ≤1cm. However, in geological research, the mineral crystal size in geological thin sections such as rock and mineral thin sections is generally large, and the thin sections themselves often exist in a larger size (the sample area is usually greater than 1cm²).

[0003] Currently, for EBSD analysis of geological samples, the sample is required to be tilted at a predetermined angle (70°) in the SEM to optimize the interaction between the electron beam and the detector. Currently, there is no substrate stage that can control the sample to tilt autonomously, and for large-size geological thin sections that are larger than the size of the existing substrate stage, the center of gravity of the sample is significantly offset when tilted, which can easily cause image drift during SEM imaging, affecting the accuracy of data acquisition, and there is also a risk of the sample falling off the substrate stage. SUMMARY

[0004] In view of the above analysis, the embodiments of the present application aim to provide an EBSD test sample stage for geological thin sections and an EBSD test method to solve at least one of the above problems in the prior art.

[0005] The purpose of the present application is achieved as follows:

[0006] In one aspect, an EBSD test sample stage for geological thin sections is provided, comprising:

[0007] A plug-in base, the lower part of the plug-in base is arranged on the mounting seat;

[0008] A rotating arm, the bottom of the rotating arm is hinged to the upper part of the plug-in base;

[0009] A driving mechanism, in driving connection with the rotating arm, for driving the rotating arm to rotate;

[0010] A substrate stage, the bottom surface center of the substrate stage is connected to the top of the rotating arm;

[0011] A center of gravity maintaining mechanism, connected to the bottom of the substrate stage, for moving in association with the rotating arm after the rotating arm is tilted relative to the plug-in base, so that the center of gravity of the rotating arm and the substrate stage is maintained in the vertical direction of the plug-in base.

[0012] Further, the plug-in base comprises a plug-in table and a plug-in part, the plug-in table is hollow inside, the driving mechanism comprises a linear driving motor and a driving gear plate, the plug-in table is installed at one end of the linear driving motor, the driving shaft of the linear driving motor penetrates into the plug-in table, the plug-in part is installed at the other end of the linear driving motor, the driving gear plate is connected with the driving shaft of the linear driving motor, a hinge shaft is transversely inserted on the side of the plug-in table, the hinge shaft is rotatable, a gear slot is formed on the side wall of the plug-in table where the hinge shaft is located, the driving gear plate is engaged with the hinge shaft, and the rotating arm is connected with the part of the hinge shaft located outside the plug-in table.

[0013] Further, the plug-in part is used for plugging into the mounting seat, and after the plug-in part is plugged into the mounting seat, the end surface of the linear driving motor abuts against the end surface of the mounting seat.

[0014] Further, the gravity center maintaining mechanism comprises:

[0015] A slide rail is connected to the bottom of the base plate table and is arranged in axial symmetry with the rotating arm;

[0016] A counterweight part is slidingly connected to the slide rail;

[0017] A counterweight driving mechanism is arranged at the bottom of the base plate table and is used for driving the counterweight part to move to a predetermined position when the rotating arm rotates in a first direction or a second direction opposite to the first direction, so that the center of the base plate table and the counterweight part as a whole is maintained in the vertical direction of the plug-in base.

[0018] Further, the slide rail comprises a hanger and a meandering track, one end of the hanger is connected to the meandering track, the other end of the hanger is connected to the bottom of the base plate table, the counterweight part is provided with a sliding hole, the counterweight part penetrates through the horizontal frame below the meandering track and can slide relative to the horizontal frame.

[0019] Further, the counterweight driving mechanism comprises a synchronous belt, a pulley, a wheel frame and a gear shift set, the pulley is arranged at the outer side of both ends of the slide rail, the pulley is rotatably connected to the wheel frame, the wheel frame is connected to the base plate table, the synchronous belt is engaged with the pulley, the gear shift set is drivingly connected with the synchronous belt, the hinge shaft is engaged with the gear shift set, and the synchronous belt is connected with the counterweight part.

[0020] Further, the gear shift set comprises a first gear shift wheel, a second gear shift wheel, a conversion shaft, a shaft sleeve and a third gear shift wheel, the first gear shift wheel is sleeved on the end of the hinge shaft extending outside, the rotating arm is provided with a mounting hole, the third gear shift wheel is arranged in the mounting hole, the conversion shaft is rotatably connected to the rotating arm, one end of the conversion shaft penetrates into the mounting hole and is connected with the third gear shift wheel, the opposite end penetrates out of the rotating arm and extends to a position above the first gear shift wheel, the second gear shift wheel is engaged with the first gear shift wheel, the shaft sleeve is sleeved on the conversion shaft and is connected with the rotating arm, and the synchronous belt penetrates into the mounting hole and is engaged with the third gear shift wheel.

[0021] Further, the third variable speed wheel, the synchronous belt, the pulley, the slide rail and the counterweight are all located in the rotation plane of the rotating support arm.

[0022] Further, two pushing members are connected to the outer belt surface of the synchronous belt, and a through hole is further arranged on the counterweight, the synchronous belt penetrates into the through hole, the two pushing members are arranged on opposite sides of the through hole respectively and are in close contact with the counterweight, and the through hole has a gap with the belt surface of the synchronous belt.

[0023] Further, the table surface of the substrate table is further provided with a sliding groove, a clamping rail is arranged in the sliding groove, two sliding seats are arranged on the clamping rail, the sliding seats are slidable relative to the clamping rail, a positioning member is arranged at the middle position of the clamping rail, an elastic pull rope is arranged between the positioning member and the sliding seat, one end of the elastic pull rope is connected to the positioning member, and the opposite end is connected to the sliding seat, a v-shaped clamping claw is hinged to the sliding seat, the clamping claw comprises a clamping side wing and a connecting side wing, a spring is connected to the connecting side wing, the spring is further connected to the sliding seat, the clamping side wing is located on the table surface of the substrate table, and the clamping side wing can rotate about the connecting side wing as the rotation axis.

[0024] On the other hand, an EBSD testing method is also provided, which uses the above-mentioned EBSD testing sample table to test a geological thin section, and comprises the following steps:

[0025] Fixing a large-size geological thin section to be tested on the substrate table;

[0026] Driving the driving mechanism to tilt the substrate table to 70°, at this time, the gravity center maintaining mechanism moves in association with the rotating support arm, so that the overall gravity center of the rotating support arm and the substrate table is always maintained in the vertical direction of the plug-in base, and the installation of the large-size geological thin section is completed;

[0027] Subsequently, the test is started, and the test result is obtained.

[0028] Compared with the prior art, the EBSD testing sample table for geological thin sections and the EBSD testing method provided by the present application can at least achieve one of the following beneficial effects:

[0029] 1. The plug-in base is used as a support component and is hinged to the rotating support arm, the driving mechanism is drivingly connected to the rotating support arm to provide rotating power. When the driving mechanism is actuated, the rotating support arm rotates around the hinge point, driving the centrally connected substrate table to tilt to a predetermined angle. At this time, the gravity center maintaining mechanism moves in association with the rotating support arm, so that the overall gravity center of the rotating support arm and the substrate table is always maintained in the vertical direction of the plug-in base, preventing the gravity center from shifting when the large-size geological thin section is tilted. By actively balancing the gravity center, the shift of the gravity center caused by the tilting of the large-size sample is avoided, ensuring the stability of SEM imaging and improving the data acquisition accuracy. The integrated driving and gravity center adjustment function can realize stable tilting without manual intervention, simplifying the operation process.

[0030] 2. By increasing the area of ​​the substrate stage supporting the sample, the testing of larger-sized geological thin section samples was achieved. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this specification or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings.

[0032] Figure 1 A schematic diagram of the overall structure of the EBSD test sample stage for geological thin sections provided by the present invention;

[0033] Figure 2 for Figure 1 A schematic diagram of the EBSD test sample stage viewed from below;

[0034] Figure 3 This is a schematic diagram of the center-of-gravity holding mechanism of the EBSD test sample stage provided by the present invention;

[0035] Figure 4 for Figure 1 Enlarged structural diagram of region A in the middle;

[0036] Figure 5 for Figure 3 A magnified structural diagram of region B in the middle;

[0037] Figure 6 for Figure 3 A magnified structural diagram of region C in the middle;

[0038] Figure 7 A schematic diagram of the substrate stage of the EBSD test sample stage provided by the present invention;

[0039] Figure 8 for Figure 7 A magnified structural diagram of region D in the middle.

[0040] Figure label:

[0041] 10. Plug-in base; 101. Plug-in platform; 102. Plug-in component; 11. Mounting base;

[0042] 20. Rotary support arm; 201. Mounting hole;

[0043] 30. Base plate stage; 31. Slide groove; 32. Clamping rail; 33. Slide block; 34. Positioning component; 35. Elastic pull rope; 36. Claw; 361. Snap-on side wing; 362. Connecting side wing;

[0044] 40, gravity center maintaining mechanism; 401, slide rail; 4011, hanger; 4012, meander track; 402, counterweight; 403, synchronous belt; 4031, pushing member; 4032, through hole; 404, pulley; 405, first speed changing wheel; 406, second speed changing wheel; 407, conversion shaft; 408, shaft sleeve; 409, third speed changing wheel;

[0045] 50, linear motor; 51, driving toothed plate; 52, hinge shaft. DETAILED DESCRIPTION

[0046] In order to make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application but not all the embodiments. It should be noted that the embodiments and the features in the embodiments in the present disclosure can be combined, separated, interchanged and / or rearranged without conflict. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative effort fall within the scope of the present application.

[0047] In the drawings, the size and relative sizes of parts can be exaggerated for clarity and / or descriptive purposes. When the exemplary embodiments can be carried out in different ways, a specific process sequence can be performed in a different order from the described order. For example, two consecutively described processes can be performed substantially simultaneously or in the reverse order from the described order. In addition, the same reference numerals indicate the same parts.

[0048] The terms used herein are for the purpose of describing specific embodiments and are not intended to be limiting. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. Furthermore, to the extent that the terms "including," "includes," "having," "has," "a," "an," "one," and / or "said" are used in this specification and / or claims, they are intended to be inclusive (i.e., to say that one thing is included, or one thing is not excluded, or both (A or B; i.e., A and / or B)). Additionally, it should also be noted that the terms "substantially," "approximately," and other similar terms are used as terms of approximation and not as terms of degree, as such, they are used to account for inherent deviations in measurements, calculations, and / or provided values that would be recognized by those of ordinary skill in the art.

[0049] One specific embodiment of the present application discloses an EBSD test sample stage for geological thin sections, which can be referred to as EBSD test sample stage hereinafter. As shown in the drawings, Figures 1 to 8As shown, the EBSD test sample stage includes a mounting seat 11, a plug-in base 10, a rotating arm 20, a driving mechanism, a base plate 30 and a gravity center maintaining mechanism 40;

[0050] The mounting seat 11 serves as a support component of the test sample stage, and the top surface of the mounting seat is provided with a plug hole; the plug-in base 10 is inserted into the mounting seat 11 at the lower part of the plug-in base 10; the bottom of the rotating arm 20 is hinged to the upper part of the plug-in base 10; the driving mechanism is drivingly connected with the rotating arm 20 for driving the rotating arm 20 to rotate; the base plate 30 is connected with the rotating arm 20, and the rotating arm 20 is connected at the center of the base plate 30; the geological slice to be tested is fixedly installed on the base plate 30; the gravity center maintaining mechanism 40 is arranged at the bottom of the base plate 30, and is used for moving in association with the rotating arm 20 after the rotating arm 20 is inclined relative to the plug-in base 10, so that the gravity center of the rotating arm 20 and the base plate 30 is maintained in the vertical direction of the plug-in base 10, that is, the gravity center of the rotating arm 20 and the base plate 30 is located on or substantially on the axis of the cylindrical plug-in base 10.

[0051] It should be noted that the gravity center of the rotating arm 20 and the base plate 30 as a whole can be located on the axis of the cylindrical plug-in base 10, or can have a small deviation from the axis of the plug-in base 10, for example, after adjusting the gravity center, the vertical distance between the gravity center of the two as a whole and the axis of the plug-in base 10 is not more than 3mm.

[0052] Compared with the prior art, the EBSD test sample stage of the present application uses the plug-in base 10 as a support component, and is hinged to the rotating arm 20, and the driving mechanism is drivingly connected with the rotating arm 20 to provide rotating power. The plug-in base 10 can be plugged into the mounting seat 11, the mounting seat 11 is a disc structure, the top surface of the mounting seat 11 is provided with at least one plug hole, and the plug-in base 10 can be plugged into the plug hole. When the driving mechanism is actuated, the rotating arm 20 rotates around the hinge point, driving the centrally connected base plate 30 to be inclined to a predetermined angle, and the inclination is 70°. At this time, the gravity center maintaining mechanism 40 moves in association with the rotating arm 20, so that the overall gravity center of the rotating arm 20 and the base plate 30 is always maintained in the vertical direction of the plug-in base 10, preventing the gravity center from deviating when the large-size geological slice is inclined. By actively balancing the gravity center, the deviation of the gravity center caused by the inclination of the large-size sample is avoided, the SEM imaging is stable, and the data acquisition accuracy is improved. The integrated driving and gravity center adjusting functions can realize stable inclination without manual intervention, simplifying the operation process.

[0053] In this embodiment, the substrate table 30 supports a sample with an area > 1 cm2; preferably, the area of the substrate table 30 supporting the sample is a rectangular area with a length and a width of 4 cm, so that two large-size geological slices can be installed. By increasing the area of the substrate table 30 supporting the sample, the testing of larger-size geological slices (i.e., large-size samples) is satisfied.

[0054] In some alternative embodiments, the docking base 10 comprises a docking table 101 and a docking piece 102, the docking table 101 is hollow inside, and the docking piece 102 is a solid cylindrical rod. The driving mechanism comprises a linear driving motor 50 and a driving toothed plate 51. The docking table 101 is installed at one end of the linear driving motor 50, the driving shaft of the linear driving motor 50 penetrates into the docking table 101, the docking piece 102 is installed at the other end of the linear driving motor 50, the driving toothed plate 51 is connected with the driving shaft of the linear driving motor 50, a hinge shaft 52 is transversely arranged on the docking table 101, the hinge shaft 52 is rotatable, a tooth groove is arranged on the side wall of the docking table 101 where the hinge shaft 52 is located, the driving toothed plate 51 is engaged with the hinge shaft 52, and the rotating arm 20 is connected with the part of the hinge shaft 52 located outside the docking table 101.

[0055] The docking table 101 of the docking base 10 is a hollow cylindrical structure, and the docking piece 102 is a solid cylindrical structure. The driving mechanism comprises a linear driving motor 50 and a driving toothed plate 51. The docking table 101 is installed at one end of the linear driving motor 50, the driving shaft penetrates into the docking table 101 to connect the driving toothed plate 51; the docking piece 102 is installed at the other end of the linear driving motor 50, the docking piece 102 is fixedly connected with the motor shell of the linear driving motor 50, the docking piece 102 is used to connect with the mounting seat 11 of the SEM, and the docking piece 102 is coaxially arranged with the driving shaft of the linear driving motor 50 and the docking table 101. In this way, the linear driving motor 50 body can be used as a support structure, so that multiple parts are integrated into one, which is beneficial to the control of the center of gravity. When the driving shaft of the linear driving motor 50 reciprocates, the driving toothed plate 51 pushes the hinge shaft 52 to rotate, and then drives the rotating arm 20 connected with the exposed part of the hinge shaft 52 to rotate, so as to realize the tilting action of the substrate table 30. The hollow docking table 101 provides installation space for the driving toothed plate 51 and the hinge shaft 52, which is suitable for the limited installation environment inside the scanning electron microscope and avoids structural interference.

[0056] The plug-in part 102 is used to be plugged into the mounting base 11, and the end surface of the linear drive motor 50 abuts against the end surface of the mounting base 11 after the plug-in part 102 is plugged into the mounting base 11. After the plug-in part 102 is plugged into the mounting base 11, the end surface of the linear drive motor 50 abuts against the end surface of the mounting base 11, and a rigid support is formed through mechanical cooperation to limit the micro-displacement of the substrate table 30 caused by electron beam bombardment or mechanical vibration during SEM imaging. The abutment eliminates the fitting gap in the mounting process, ensures the positioning accuracy of the substrate table 30 during the tilting movement, and further suppresses image drift. At the same time, better support and stability are provided for the substrate table 30.

[0057] In some optional embodiments, the gravity center maintaining mechanism 40 includes a slide rail 401, a counterweight 402, and a counterweight driving mechanism. The slide rail 401 is connected to the bottom of the substrate table 30 and is arranged in axial symmetry with respect to the rotating arm 20. The counterweight 402 is in sliding connection with the slide rail 401. The counterweight driving mechanism is arranged at the bottom of the substrate table 30 and is used to drive the counterweight 402 to move to a predetermined position when the rotating arm 20 rotates in a first direction or a second direction opposite to the first direction, so that the center of the substrate table 30 and the counterweight 402 as a whole is maintained in the vertical direction of the plug-in base 10.

[0058] When the rotating arm 20 rotates in a first direction (for example, left), the counterweight driving mechanism drives the counterweight 402 to move to a predetermined position in a second direction opposite to the first direction (for example, right). Conversely, the counterweight 402 is also driven to move in the opposite direction. Through the position adjustment of the counterweight 402, the center of gravity of the substrate table 30 and the counterweight 402 as a whole is always maintained on the vertical axis of the plug-in base 10, and the gravity center deviation when the large-size sample is tilted is balanced. According to the tilting angle and direction of the rotating arm 20, the counterweight driving mechanism synchronously adjusts the position of the counterweight 402 to form a dynamic balance moment, thereby ensuring the stability of SEM imaging.

[0059] In one optional embodiment, the length of the rotating arm 20 is set to 4 cm, the weight of the substrate table 30 and the sample is set to 50 g, the counterweight 402 moves 3 cm to the right after the rotating arm 20 rotates 20 degrees to the left from the vertical state, and the weight of the counterweight 402 is set to 22.8 g. The weight of the rotating arm 20 is ignored in the calculation, or the center of gravity of the rotating arm 20 is located at the hinge point. In actual use, the weight of various additional structures should be considered.

[0060] In one alternative embodiment, the slide rail 401 comprises a hanger 4011, a meandering rail 4012, one end of the hanger 4011 is connected to the meandering rail 4012, and the other end of the hanger 4011 is connected to the bottom of the substrate table 30. The counterweight 402 is provided with a sliding hole, and the counterweight 402 is arranged on the lower transverse frame of the meandering rail 4012 and can slide relative to the transverse frame. The meandering rail 4012 is suspended on the bottom of the substrate table 30 through the hanger 4011, and the transverse frame provides a straight sliding path for the counterweight 402, and the movement direction of the counterweight 402 is consistent with the table surface of the substrate table 30.

[0061] In one alternative embodiment, the counterweight driving mechanism comprises a synchronous belt 403, a pulley 404, a wheel frame, and a gear set. The pulley 404 is arranged on the outer side of both ends of the slide rail 401 and is rotatably connected to the wheel frame. The wheel frame is connected to the substrate table 30. The synchronous belt 403 is connected to the pulley 404 in a meshing manner. The gear set is drivingly connected to the synchronous belt 403. The hinge shaft 52 is connected to the gear set in a meshing manner. The synchronous belt 403 is connected to the counterweight 402.

[0062] The pulley 404 on the outer side of both ends of the slide rail 401 is fixed to the substrate table 30 through the wheel frame. The synchronous belt 403 is meshed with the pulley 404 and connected to the counterweight 402. When the hinge shaft 52 rotates, the hinge shaft 52 drives the gear set to rotate. The gear set drives the synchronous belt 403 to move after speed conversion, and in turn drives the counterweight 402 to slide along the slide rail 401. The gear set converts the transmission ratio through gear meshing, so that the movement speed of the counterweight 402 matches the inclination angle of the rotating arm 20. For example, when the hinge shaft 52 rotates 20 degrees to the left, the synchronous belt 403 drives the counterweight 402 to move 3 cm to the right through the action of the gear set. When the counterweight 402 moves to this position, the center of gravity of the inclined substrate table 30 and the counterweight 402 as a whole remains in a vertical direction with the center of the substrate table 30 in a vertical state.

[0063] The angle change of the rotating arm 20 is converted into the position adjustment of the counterweight 402 in real time through the coupling transmission of the gear set and the synchronous belt 403, so as to realize the dynamic synchronization of the center of gravity compensation. When detecting, the angle of rotation of the substrate table 30 is usually 20 degrees relative to the vertical direction. When the substrate table 30 needs to be rotated to different angles, the movement distance and weight of the counterweight 402 need to be preset in advance to avoid the proportion relationship between the torque and the angle of rotation of the substrate table 30 not corresponding.

[0064] In one of the alternative embodiments, the gear set comprises a first gear 405, a second gear 406, a conversion shaft 407, a shaft sleeve 408, a third gear 409, the first gear 405 is sleeved on the extended end of the hinge shaft 52, the rotating arm 20 is provided with a mounting hole 201, the third gear 409 is arranged in the mounting hole 201, the conversion shaft 407 is rotatably connected to the rotating arm 20, one end of the conversion shaft 407 is arranged into the mounting hole 201 and connected to the third gear 409, the opposite end is arranged outside the rotating arm 20 and extends to a position above the first gear 405, the second gear 406 is meshingly connected to the first gear 405, the shaft sleeve 408 is sleeved on the conversion shaft 407 and connected to the rotating arm 20, and the synchronous belt 403 is arranged into the mounting hole 201 and meshingly connected to the third gear 409.

[0065] When the hinge shaft 52 rotates, the first gear 405 drives the second gear 406 to rotate, the third gear 409 is driven to rotate through the conversion shaft 407, and the synchronous belt 403 meshingly connected to the third gear 409 is moved to pull the counterweight 402 to slide. The shaft sleeve 408 can strengthen the connection of the conversion shaft 407, so that the conversion shaft 407 stably rotates.

[0066] In one of the alternative embodiments, the first gear 405, the second gear 406, the conversion shaft 407, the shaft sleeve 408 and the third gear 409 can all be made of nylon or engineering plastic, further reducing the weight of the rotating arm 20. A counterweight can also be arranged on the rotating arm 20 to balance the force of the second gear 406 on the rotating arm 20 in the lateral direction.

[0067] In one of the alternative embodiments, the hinge shaft 52 rotates to the left, the first gear 405 is sleeved on the hinge shaft 52, and the two are coaxial and rotate in the same direction, so the first gear 405 rotates to the left. When the gears mesh, the adjacent gears rotate in opposite directions. The first gear 405 rotates to the left, pushing the second gear 406 to rotate to the right. The second gear 406 is coaxial with the third gear 409, and rotates in the same direction, so the third gear 409 rotates in the same direction as the second gear 406. When the synchronous belt 403 meshes with the third gear 409, the rotation direction of the gear determines the moving direction of the synchronous belt 403. When the third gear 409 rotates to the right, the upper synchronous belt 403 is driven to move to the right, and the lower synchronous belt 403 moves to the left. Therefore, the counterweight 402 connected to the upper synchronous belt 403 moves to the right.

[0068] In one alternative embodiment, the first gear 405 has 6 teeth, the second gear 406 has 33 teeth, and the third gear 409 has 33 teeth. The first gear 405 has a diameter of 0.54 cm, the second gear 406 has a diameter of 2.97 cm, and the third gear 409 has a diameter of 2.97 cm. With the above arrangement, the counterweight 402 is moved to the right through the combination of the synchronous belt 403 and the gears when the hinge shaft 52 rotates to the left, thus completing the center of gravity balancing action of the substrate table 30. It should be understood that the above parameters can be adjusted according to actual conditions.

[0069] The third gear 409, the synchronous belt 403, the pulley 404, the slide rail 401, and the counterweight 402 are all located in the rotation plane of the rotating arm 20. The third gear 409, the synchronous belt 403, the pulley 404, the slide rail 401, and the counterweight 402 are all located in the rotation plane of the rotating arm 20 (i.e., the plane perpendicular to the axis of the hinge shaft 52). When the rotating arm 20 rotates around the hinge shaft 52, all the moving parts move in the same plane, the synchronous belt 403 moves along the slide rail 401, and the counterweight 402 slides along with the synchronous belt 403 in the rotation plane, thus ensuring that the force arm change of the center of gravity adjustment and the inclination angle change are coupled in the same plane. The above arrangement eliminates the motion coupling error in three-dimensional space, so that the position adjustment of the counterweight 402 directly corresponds to the offset of the center of gravity in the rotation plane, thus improving the response speed of the balancing control.

[0070] In one alternative embodiment, the top of the rotating arm 20 and the connection part of the substrate table 30 are Y-shaped structures, and the slide rail 401, the counterweight 402, and the synchronous belt 403 all pass through the space of the Y-shaped structure at the top of the rotating arm 20.

[0071] In one alternative embodiment, two pushers 4031 are connected to the outer belt surface of the synchronous belt 403, and a through hole 4032 is further provided on the counterweight 402. The synchronous belt 403 passes through the through hole 4032, and the two pushers 4031 are respectively arranged on the opposite sides of the through hole 4032 and tightly contact the counterweight 402. The through hole 4032 has a gap with the belt surface of the synchronous belt 403. The pushers 4031 are respectively located on the opposite sides of the through hole 4032 and tightly contact the counterweight 402. When the synchronous belt 403 moves, the pushers 4031 push the counterweight 402 to slide along the slide rail 401, and the gap allows the synchronous belt 403 to freely pass through the through hole 4032, avoiding friction between the belt surface and the hole wall. At the same time, the direct connection between the synchronous belt 403 and the counterweight 402 is avoided, thus sharing the weight of the counterweight 402 and causing imbalance.

[0072] In an alternative embodiment, the substrate table 30 is further provided with clamping and fixing assemblies for clamping and fixing the geological slices to be tested on the substrate table 30.

[0073] The number of clamping and fixing assemblies is two, and the two clamping and fixing assemblies can clamp and fix two geological slices. Preferably, each clamping and fixing assembly has four clamping and fixing points for the edge position of the geological slice, and the four clamping and fixing points are located at the four corners of a rectangle.

[0074] In an alternative embodiment, the clamping and fixing assembly includes a clamping rail 32, a sliding seat 33, a positioning member 34, an elastic pull rope 35, and a claw 36. The surface of the substrate table 30 is further provided with a sliding groove 31, the sliding groove 31 is provided with the clamping rail 32, the clamping rail 32 is provided with two sliding seats 33, the sliding seats 33 can slide relative to the clamping rail 32, the clamping rail 32 is provided with the positioning member 34 at the middle position, the elastic pull rope 35 is provided between the positioning member 34 and the sliding seat 33, one end of the elastic pull rope 35 is connected to the positioning member 34, and the opposite end is connected to the sliding seat 33. The sliding seat 33 is hinged with a v-shaped claw 36, the claw 36 includes a clamping side wing 361 and a connecting side wing 362, a spring is connected to the connecting side wing 362, and the spring is further connected to the sliding seat 33. The clamping side wing 361 is located on the surface of the substrate table 30, and the clamping side wing 361 can rotate about the connecting side wing 362 as the rotation axis.

[0075] When the geological slice is installed on the substrate table 30, the sliding seat 33 adjusts the position of the claw 36, and the elastic pull rope 35 provides a pre-tightening force. After the geological slice is placed in position, the claws 36 on both sides of the geological slice press the geological slice, so that the geological slice is fixed. The claw 36 presses the sample, the clamping side wing 361 can rotate through the connecting side wing 362 to adapt to geological slices of different thicknesses, and at the same time, the surface of the geological slice is pressed and fixed, so that the geological slice is attached to the substrate table 30. The cooperation of the elastic pull rope 35 and the spring enables the sliding seat 33 to automatically adjust the position according to the size of the geological slice, the claw 36 uniformly applies clamping force, firmly fixes large-size geological slices, and avoids sample drift caused by traditional adhesive methods.

[0076] For example, the number of clamping and fixing assemblies is two, the number of sliding grooves 31 is four, each geological slice corresponds to two sliding grooves 31 and four claws 36, the sliding grooves 31 correspond to the side edge positions of the geological slice respectively, and the claws 36 correspond to the opposite ends of the geological slice. Two claws 36 can be provided at each end. The claw 36, the clamping rail 32, and the sliding seat 33 are made of conductive metal, such as copper.

[0077] The embodiment also provides an EBSD testing method for testing a geological slice by using the EBSD testing sample stage.

[0078] The EBSD testing method provided by the embodiment can test a large-size geological slice, prevent the center of gravity of the large-size geological slice from deviating when the large-size geological slice is tilted, ensure SEM imaging stability, improve data collection accuracy, and realize stable tilting without manual intervention, thereby simplifying an operation process.

[0079] The specific embodiments are further described in the above description to illustrate the purposes, technical solutions, and beneficial effects of the present application. It should be understood that the above description is merely a specific embodiment of the present application and is not used to limit the protection scope of the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An EBSD sample stage for a geological thin section, characterized in that, The utility model relates to a kind of rotating mechanism of substrate, including: Plug-in base, the lower part of the plug-in base is arranged on the mounting base; Rotary support arm, the bottom of the rotary support arm is hinged to the upper part of the plug-in base; Driving mechanism, driving connection with the rotary support arm, for driving the rotary support arm to rotate; Substrate table, the bottom center of the substrate table is connected to the top of the rotary support arm; Center of gravity maintaining mechanism, connected to the bottom of the substrate table, for after the rotary support arm is inclined relative to the plug-in base, the center of gravity maintaining mechanism moves in association with the rotary support arm, so that the center of gravity of the rotary support arm and the substrate table is maintained in the vertical direction of the plug-in base.

2. The EBSD sample stage for geological thin sections according to claim 1, characterized in that The plug-in base includes a plug-in table and a plug-in piece, the inside of the plug-in table is hollow, the driving mechanism includes a linear drive motor and a driving gear plate, the plug-in table is installed at one end of the linear drive motor, the driving shaft of the linear drive motor penetrates into the plug-in table, the plug-in piece is installed at the other end of the linear drive motor, the driving gear plate is connected with the driving shaft of the linear drive motor, a hinge shaft is transversely inserted on the side of the plug-in table, the hinge shaft can rotate, a gear slot is formed in the side wall of the plug-in table where the hinge shaft is located outside the plug-in table, the driving gear plate is engaged with the hinge shaft, and the rotary support arm is connected with the part of the hinge shaft located outside the plug-in table.

3. EBSD sample stage for geological thin sections according to claim 2, characterized in that The plug-in piece is used for plugging into the mounting base, and when the plug-in piece is plugged into the mounting base, the end surface of the linear drive motor abuts against the end surface of the mounting base.

4. The EBSD sample stage for geological thin sections according to claim 2, characterized in that, The center of gravity maintaining mechanism includes: A slide rail is connected to the bottom of the substrate table and is arranged in axial symmetry with the rotary support arm; A counterweight is slidingly connected to the slide rail; A counterweight driving mechanism is arranged at the bottom of the substrate table, for driving the counterweight to move to a predetermined position when the rotary support arm rotates in a first direction or a second direction opposite to the first direction, so that the center of the substrate table and the counterweight as a whole is maintained in the vertical direction of the plug-in base.

5. EBSD sample stage for geological thin sections according to claim 4, characterized in that The slide rail includes a hanger and a meandering track, one end of the hanger is connected to the meandering track, the other end of the hanger is connected to the bottom of the substrate table, the counterweight is provided with a sliding hole, the counterweight is penetrated on the lower transverse frame of the meandering track and can slide relative to the transverse frame.

6. EBSD sample stage for geological thin sections according to claim 5, characterized in that The counterweight driving mechanism includes a synchronous belt, a pulley, a wheel carrier, and a gear shift set, the pulley is rotatably connected to the outer side of both ends of the slide rail, the wheel carrier is connected to the substrate table, the synchronous belt is engaged with the pulley, the gear shift set is drivingly connected with the synchronous belt, the hinge shaft is engaged with the gear shift set, and the synchronous belt is connected with the counterweight.

7. EBSD sample stage for geological thin sections according to claim 6, characterized in that The variable gear set comprises a first variable gear, a second variable gear, a conversion shaft, a shaft sleeve, and a third variable gear, the first variable gear is sleeved on the one end of the hinge shaft extending outside, the rotating arm is provided with a mounting hole, the third variable gear is arranged in the mounting hole, the conversion shaft is rotationally connected on the rotating arm, one end of the conversion shaft is arranged into the mounting hole and connected with the third variable gear, the opposite end is arranged outside the rotating arm and extends to the position above the first variable gear, the second variable gear is meshingly connected with the first variable gear, the shaft sleeve is sleeved on the conversion shaft and connected with the rotating arm, the synchronous belt is arranged into the mounting hole and meshingly connected with the third variable gear.

8. EBSD sample stage for geological thin sections according to claim 7, characterized in that The third variable gear, the synchronous belt, the pulley, the slide rail and the counterweight are located in the rotating plane of the rotating arm.

9. The EBSD sample stage for geological thin sections of claim 6, wherein, Two pushers are connected on the outer belt surface of the synchronous belt, the counterweight is further provided with a through hole, the synchronous belt is arranged into the through hole, the two pushers are respectively arranged on the opposite sides of the through hole and closely contact with the counterweight, and the through hole has a gap with the belt surface of the synchronous belt.

10. An EBSD testing method, characterized by, The EBSD sample stage of any one of claims 1 to 9 is used to test a geological slice, comprising the following steps: Fixing a large-size geological slice to be tested on the substrate table; Driving the mechanism to tilt the substrate table to 70°, at this time, the gravity center retaining mechanism moves in association with the rotating arm, so that the overall gravity center of the rotating arm and the substrate table is always maintained in the vertical direction of the plug-in base, and the large-size geological slice is installed; Then, the test is started, and the test result is obtained.

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