Evaporation line source shielding device and evaporation system

Abstract

The invention discloses an evaporation line source shielding device which comprises a shielding part and a driving part used for driving the shielding part to be close to or away from an evaporation line source. The shielding part comprises a baffle moving mechanism and a guide mechanism for driving the baffle moving mechanism to act, the baffle moving mechanism comprises a bottom plate and a fixing block horizontally sliding on the bottom plate, and a shielding plate is movably connected to the lower portion of the fixing block; the guide mechanism comprises a guide limiting plate used for driving the fixing block to horizontally slide on the bottom plate, the shielding device is arranged in the evaporation chamber, combination and unfolding of the device are achieved through the crank arm folding mechanism, the unoccupied space outside a line source evaporation area can be fully utilized, and the shielding device is convenient to use and high in practicability. Therefore, the effective space of the transmission cavity is saved, interference among parts is reduced, the baffle plate is extremely close to the nozzle when folded, shielding can be effectively carried out, and evaporated materials are prevented from being attached and accumulated in all the cavities.

Description

Technical Field

[0001] This invention relates to the field of vapor deposition equipment technology, specifically to a vapor deposition line source shielding device and vapor deposition system. Background Technology

[0002] Vacuum evaporation refers to a method of evaporating coating materials under vacuum conditions using a specific heating and evaporation method, causing the vaporized particles to condense on the substrate surface and form a film. During the pre-melting evaporation and final evaporation stages, due to the unstable evaporation rate, a shielding plate is required to isolate the evaporation source from the substrate, preventing impurities from adhering to the substrate and affecting the coating quality. When using point source evaporation, the larger bottom space facilitates the placement of the shielding device; however, when using line source evaporation, the larger volume of the line source necessitates placing the shielding device within the transfer chamber. This not only occupies a large space and makes maintenance difficult, but also makes it challenging to shield the drive components, potentially damaging the connectors over time. Furthermore, the large number of nozzles and the greater distance between their evaporation surfaces and the substrate negatively impact the shielding effect.

[0003] Existing technologies mostly employ rack and pinion drives, horizontally arranged within the transfer chamber. Because the transfer chamber needs to house key components such as transmission rollers for substrate transfer and anti-sticking plates, the overall structure is relatively compact. During design, there is a risk of interference with components such as anti-sticking plates. In this layout, it is also difficult to shield the transmission components such as rack and pinion. Therefore, sufficient space must be reserved when designing and installing shielding devices, which greatly increases the volume of the transfer chamber. In addition, when this shielding device is closed, it mainly shields the opening area, which is far from the nozzle position, resulting in severe material adhesion to various components in the vapor deposition chamber. Summary of the Invention

[0004] The purpose of this invention is to provide a vapor deposition line source shielding device and a vapor deposition system to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A vapor deposition line source shielding device includes a shielding part and a driving part for driving the shielding part to move closer to or away from the vapor deposition line source.

[0007] The shielding part includes a baffle moving mechanism and a guide mechanism for driving the baffle moving mechanism. The baffle moving mechanism includes a base plate and a fixed block that slides horizontally on the base plate. A baffle is movably connected below the fixed block. The guide mechanism includes a guide limiting plate for driving the fixed block to slide horizontally on the base plate.

[0008] As a further aspect of the present invention: the driving part is a curved arm folding mechanism, the curved arm folding mechanism includes a driving component and a connecting component connecting the driving component and the shielding part.

[0009] As a further aspect of the present invention: the driving assembly includes a driving motor, the output end of the driving motor is poweredly connected to a first curved arm via a bearing, the end of the first curved arm away from the driving motor is rotatably connected to a second curved arm via a connecting assembly, and the shielding part is disposed on the second curved arm.

[0010] As a further aspect of the present invention: the connecting assembly includes a connecting rod, one end of which is fixedly arranged by a fixed seat, the connecting rod is rotatably connected to the fixed seat, and the other end of the connecting rod is rotatably connected to a mounting frame. The first curved arm and the second curved arm are both rotatably connected to the mounting frame, and the first curved arm, the mounting frame, and the connecting rod form a multi-link structure.

[0011] As a further embodiment of the present invention: the articulated arm folding mechanism is provided in two sets, the two sets of the articulated arm folding mechanism are connected to both sides of the base plate, the two sides of the base plate are fixedly connected to the second articulated arm, the base plate is provided with at least one second guide rail arranged along the Y-axis, multiple fixed blocks are slidably connected on the second guide rail, and a second drive assembly is fixedly connected on the fixed block. The second drive assembly is poweredly connected to the baffle plate through a guide shaft. The second drive assembly is an electric cylinder, a pneumatic cylinder, or a drive motor. The center of the base plate is provided with a through groove for avoiding the guide shaft.

[0012] As a further aspect of the present invention: a limiting post is fixedly connected to the lower end of the baffle plate, and an inclined stop block is provided on the inner side of the baffle plate.

[0013] As a further embodiment of the present invention: the second curved arms on both sides are provided with first guide rails arranged in the X direction, the guide limiting plate is slidably connected to the second curved arm through the first guide rails, the guide limiting plate is provided with guide holes, the number of guide holes is not less than the number of the blocking plates, and the guide shaft is slidably connected in the guide holes.

[0014] As a further aspect of the present invention: the guide hole is elongated, and the two ends of the guide hole are the guide hole head end and the guide hole tail end, respectively, and the spacing between adjacent guide holes gradually increases from the guide hole head end to the guide hole tail end.

[0015] As a further aspect of the present invention: the guiding mechanism includes a connecting plate fixedly connected to the second crank arm, a first driving component fixedly connected to the connecting plate, a connecting block connected to the output end of the first driving component, the first driving component being an electric cylinder, a pneumatic cylinder, or a drive motor, and the connecting block being fixedly connected to the guide limiting plate.

[0016] A vapor deposition system includes a shielding device, a vapor deposition chamber, and a transfer chamber disposed above the vapor deposition chamber. A vapor deposition line source is disposed within the vapor deposition chamber. The shielding device is located above the vapor deposition line source and is connected to the inner wall of the vapor deposition chamber. The shielding device includes a shielding part and a driving part for driving the shielding part closer to or away from the vapor deposition line source. The driving part is a folding arm mechanism. The folding arm mechanism includes a driving assembly and a connecting assembly connecting the driving assembly and the shielding part. The output shaft of the driving motor of the driving assembly is slidably connected to the inner wall of the vapor deposition chamber through a magnetohydrodynamic seal. A fixing seat within the connecting assembly is fixedly connected to the inner wall of the vapor deposition chamber.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] As explained above, this patent has the following beneficial effects:

[0019] 1. The shielding device of this application is arranged in the vapor deposition chamber. The device can be combined and unfolded by the curved arm folding mechanism. It can make full use of the spare space outside the line source vapor deposition area, thereby saving the effective space of the transfer chamber and reducing the occurrence of interference between components. Moreover, the shielding plate of this application is very close to the nozzle when folded, which can effectively shield and prevent the evaporated material from adhering and accumulating in each chamber.

[0020] 2. If the shielding device in this application is arranged in the transmission chamber, it is difficult to shield the driving components of the shielding device due to the complex and compact structure of various components. However, the side wall of the vapor deposition chamber itself needs to be equipped with anti-sticking plates. Most of the driving components of the shielding device can be arranged behind the anti-sticking plates, and it is also convenient to arrange the anti-sticking plates for other key components. This can effectively extend the service life of the components and facilitate maintenance.

[0021] 3. Since the nozzles of the same line source are not evenly distributed, and there are certain differences in height due to certain processing and installation errors, or multiple line sources with different nozzle heights may be set in the same vapor deposition chamber, in order to effectively block nozzles with different spacing and height, this blocking device sets a blocking plate for each nozzle, and is equipped with a guiding mechanism and a moving mechanism. The blocking plate is controlled to disperse and move downward by the drive component, thereby adapting to each nozzle and improving the adaptability and flexibility of the equipment.

[0022] 4. To reduce the contamination of the vapor deposition chamber by dust generated by the rolling parts, the shielding device is mostly electrically driven, which has a higher degree of cleanliness, thus ensuring the coating quality and uniformity. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the line source evaporation system in this embodiment;

[0024] Figure 2 This is an isometric perspective view of the shielding device in this embodiment;

[0025] Figure 3 This is a schematic diagram of the unfolded state of the folding mechanism in this embodiment;

[0026] Figure 4 This is a schematic diagram of the folding mechanism in its combined state according to this embodiment;

[0027] Figure 5 This is a schematic diagram of the guide mechanism structure when the baffles are concentrated in this embodiment;

[0028] Figure 6 This is a schematic diagram of the guiding mechanism structure when the shielding plate disperses in this embodiment;

[0029] Figure 7 This is a schematic diagram of the baffle moving mechanism in this embodiment.

[0030] In the diagram: 10-Crank arm folding mechanism, 11-Drive assembly, 111-Drive motor, 112-Bearing, 113-Magnetic fluid seal, 12-Connecting assembly, 121-Fixed seat, 122-Connecting rod, 123-Mounting bracket, 13-First crank arm, 14-Second crank arm, 20-Guide mechanism, 21-First drive assembly, 22-Connecting block, 23-Guide limiting plate, 231-Guide hole, 2311-Guide hole head end, 2312-Guide hole tail end, 24-First guide rail, 25-Connecting plate, 30-Baffle moving mechanism, 31-Second drive assembly, 32-Guide shaft, 33-Fixed block, 34-Second guide rail, 35-Baffle plate, 351-Block, 352-Limiting post, 36-Base plate. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Please see Figure 2-7 In this embodiment of the invention, a vapor deposition line source shielding device includes a shielding part and a driving part for driving the shielding part to move closer to or away from the vapor deposition line source.

[0033] The driving unit is a folding arm mechanism 10, which includes a driving assembly 11 and a connecting assembly 12 connecting the driving assembly 11 and the blocking part. The driving assembly 11 includes a driving motor 111, and the output end of the driving motor 111 is poweredly connected to a first folding arm 13 through a bearing 112. In this embodiment, the first folding arm 13 is arranged to rotate around the end closer to the driving motor 111. The output end of the driving motor 111 is poweredly connected to the first folding arm 13 through a gear set, thereby driving the first folding arm 13 to rotate. The end of the first folding arm 13 away from the driving motor 111 is connected to the first folding arm 13 through a gear set. The connecting component 12 is rotatably connected to the second curved arm 14. The connecting component 12 includes a connecting rod 122. One end of the connecting rod 122 is fixedly arranged through a fixed seat 121. The connecting rod 122 is rotatably connected to the fixed seat 121. The other end of the connecting rod 122 is rotatably connected to a mounting frame 123. The first curved arm 13 and the second curved arm 14 are both rotatably connected to the mounting frame 123. The first curved arm 13, the mounting frame 123, and the connecting rod 122 form a multi-link structure. The first curved arm 13 can be pushed and pulled by the drive motor 111, thereby completing the unfolding and folding of the first curved arm 13 and the second curved arm 14.

[0034] The shielding part includes a baffle moving mechanism 30 and a guide mechanism 20 for driving the baffle moving mechanism 30. The baffle moving mechanism 30 includes a base plate 36 and a fixed block 33 that slides horizontally on the base plate 36. A baffle 35 is movably connected below the fixed block 33. The guide mechanism 20 includes a guide limiting plate 23 for driving the fixed block 33 to slide horizontally on the base plate 36.

[0035] In this embodiment, the articulated arm folding mechanism 10 is provided in two sets. The two sets of articulated arm folding mechanisms 10 are fixedly connected to both sides of the base plate 36. The two sides of the base plate 36 are fixedly connected to the second articulated arm 14. At least one second guide rail 34 is provided on the base plate 36 along the Y-axis direction. Multiple fixing blocks 33 are slidably connected on the second guide rail 34. A second drive assembly 31 is fixedly connected to the fixing block 33. The second drive assembly 31 is poweredly connected to the baffle plate 35 through the guide shaft 32. The second drive assembly 31 is an electric cylinder, a pneumatic cylinder, or a drive motor. In this embodiment, the second drive assembly 31 is a drive motor and is poweredly connected to the guide shaft 32 through a reduction mechanism. A through groove is provided in the middle of the base plate 36 to avoid the guide shaft 32. A limit post 352 is fixedly connected to the lower end of the baffle plate 35 to ensure that it can be adjusted and moved down to the same distance as the nozzle before stopping. An inclined stop block 351 is provided on the inner side of the baffle plate 35 to more effectively adsorb materials.

[0036] The second curved arms 14 on both sides are provided with first guide rails 24 arranged along the X direction. The guide limiting plate 23 is slidably connected to the second curved arm 14 through the first guide rails 24. The guide limiting plate 23 is provided with guide holes 231. The number of guide holes 231 is not less than the number of baffle plates 35. The guide shaft 32 is slidably connected in the guide holes 231. The guide holes 231 are elongated, and the two ends of the guide holes 231 are the guide hole head end 2311 and the guide hole tail end 2312, respectively. The spacing between adjacent guide holes 231 is provided by guide holes. The guide mechanism 20 gradually increases in the direction from the first end 2311 to the guide hole 2312. The guide mechanism 20 includes a connecting plate 25 fixedly connected to the second crank arm 14. A first drive assembly 21 is fixedly connected to the connecting plate 25. A connecting block 22 is fixedly connected to the output end of the first drive assembly 21. The connecting block 22 is fixedly connected to the guide limit plate 23. The first drive assembly 21 is an electric cylinder, a pneumatic cylinder, or a drive motor. In this embodiment, the first drive assembly 21 is a drive motor and is poweredly connected to the connecting block 22 through a reduction mechanism.

[0037] Please see Figure 1 In this embodiment of the invention, a vapor deposition system includes a shielding device, a vapor deposition chamber, and a transfer chamber disposed above the vapor deposition chamber. The vapor deposition chamber contains a vapor deposition line source. The shielding device is located above the vapor deposition line source and is connected to the inner wall of the vapor deposition chamber. The shielding device includes a shielding part and a driving part for driving the shielding part to move closer to or away from the vapor deposition line source. The driving part is a curved arm folding mechanism 10. The curved arm folding mechanism 10 includes a driving assembly 11 and a connecting assembly 12 connecting the driving assembly 11 and the shielding part. The output shaft of the driving motor 111 of the driving assembly 11 is slidably connected to the inner wall of the vapor deposition chamber through a magnetic fluid seal 113. The fixing seat 121 in the connecting assembly 12 is fixedly connected to the inner wall of the vapor deposition chamber.

[0038] When using this invention, if it is necessary to shield the evaporation line source, the drive motor 111 is first started. The output shaft of the drive motor 111 drives the first curved arm 13 to rotate clockwise through the gear set, which in turn drives the second curved arm 14 to unfold through the connecting assembly 12, that is, the second curved arm 14 extends above the evaporation line source, as shown in the attached specification. Figure 3In this state, the shielding part on the second curved arm 14 is located above the evaporation line source. In this embodiment, the evaporation line source includes multiple nozzles. When the shielding plate 35 is located above the nozzles, the first drive assembly 21 is activated. The first drive assembly 21 drives the guide limiting plate 23 to move along the X-axis direction on the second curved arm 14. Since the guide limiting plate 23 is provided with a long strip-shaped guide hole 231, and the guide shaft 32 on the fixing block 33 is slidably connected to the guide hole 231, when the guide limiting plate 23 slides along the X-axis direction, the guide shaft 32 tends to follow the slide. Since the guide shaft 32 is slidably connected to the second guide rail 34 through the fixing block 33, it is relatively close to the bottom plate 36 along the Y-axis direction. Sliding, therefore, under the combined action of the guide limiting plate 23 and the base plate 36, the guide shaft 32 will eventually move along the Y-axis. Due to the variable spacing arrangement of the adjacent guide holes 231, the spacing of the adjacent guide shafts 32 can be adjusted according to the distance between the adjacent nozzles, so that the baffle plate 35 is located directly above the nozzle. When the baffle plate moves directly above the nozzle, the second drive component 31 is activated. The second drive component 31 drives the baffle plate 35 to move downward, so that the baffle plate 35 moves towards the nozzle until the limiting post 352 of the western section of the baffle plate 35 is pressed against the nozzle. At this time, the stop block 351 is located above the nozzle, and the vapor deposition material sprayed from the nozzle can be absorbed through the stop block 351.

[0039] When the substrate to be vaporized is moved above the vaporization line source in the transfer chamber and vaporization is required, the second drive assembly 31 first drives the baffle 35 away from the nozzle, and then the drive motor 111 drives the first curved arm 13 to rotate counterclockwise, thereby causing the second curved arm 14 to fold with the first curved arm 13, as shown in the attached instruction manual. Figure 4 As shown, at this time, the shielding device is folded to the inner wall of one side of the vapor deposition chamber, completely opening up the space above the vapor deposition line source so that the material to be vapor-deposited in the upper transmission chamber can be vapor-deposited through the vapor deposition line source.

[0040] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0041] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A vapor deposition line source shielding device, characterized in that, It includes a shielding part and a driving part for driving the shielding part to move closer to or away from the evaporation line source; The shielding part includes a baffle moving mechanism (30) and a guide mechanism (20) for driving the baffle moving mechanism (30) to move. The baffle moving mechanism (30) includes a base plate (36) and a fixed block (33) that slides horizontally on the base plate (36). A baffle plate (35) is movably connected below the fixed block (33). The guide mechanism (20) includes a guide limiting plate (23) for driving the fixed block (33) to slide horizontally on the base plate (36).

2. The vapor deposition line source shielding device according to claim 1, characterized in that, The drive unit is a folding arm mechanism (10), which includes a drive assembly (11) and a connecting assembly (12) connecting the drive assembly (11) and the shielding part.

3. The vapor deposition line source shielding device according to claim 2, characterized in that, The drive assembly (11) includes a drive motor (111), the output end of the drive motor (111) is poweredly connected to a first crank arm (13) via a bearing (112), and the end of the first crank arm (13) away from the drive motor (111) is rotatably connected to a second crank arm (14) via a connecting assembly (12), and the shielding part is disposed on the second crank arm (14).

4. The vapor deposition line source shielding device according to claim 3, characterized in that, The connecting component (12) includes a connecting rod (122). One end of the connecting rod (122) is fixedly arranged through a fixed seat (121). The connecting rod (122) is rotatably connected to the fixed seat (121). The other end of the connecting rod (122) is rotatably connected to a mounting frame (123). The first curved arm (13) and the second curved arm (14) are both rotatably connected to the mounting frame (123). The first curved arm (13), the mounting frame (123), and the connecting rod (122) form a multi-link structure.

5. The vapor deposition line source shielding device according to claim 3, characterized in that, The folding arm mechanism (10) is provided in two sets. The two sets of folding arm mechanisms (10) are connected to both sides of the base plate (36). The two sides of the base plate (36) are fixedly connected to the second folding arm (14). The base plate (36) is provided with at least one second guide rail (34) arranged along the Y-axis. Multiple fixing blocks (33) are slidably connected on the second guide rail (34). A second drive assembly (31) is fixedly connected on the fixing block (33). The second drive assembly (31) is poweredly connected to the baffle plate (35) through the guide shaft (32). The second drive assembly (31) is an electric cylinder, a pneumatic cylinder, or a drive motor. The center of the base plate (36) is provided with a through groove for avoiding the guide shaft (32).

6. The vapor deposition line source shielding device according to claim 1, characterized in that, The lower end of the baffle plate (35) is fixedly connected to a limiting post (352), and an inclined stop block (351) is provided on the inner side of the baffle plate (35).

7. The vapor deposition line source shielding device according to claim 5, characterized in that, The second curved arms (14) on both sides are provided with first guide rails (24) arranged in the X direction. The guide limiting plate (23) is slidably connected to the second curved arm (14) through the first guide rails (24). The guide limiting plate (23) is provided with guide holes (231). The number of guide holes (231) is not less than the number of the shielding plates (35). The guide shaft (32) is slidably connected in the guide holes (231).

8. The vapor deposition line source shielding device according to claim 7, characterized in that, The guide hole (231) is elongated, and the two ends of the guide hole (231) are the guide hole head end (2311) and the guide hole tail end (2312), respectively. The distance between adjacent guide holes (231) gradually increases from the guide hole head end (2311) to the guide hole tail end (2312).

9. A vapor deposition line source shielding device according to claim 3, characterized in that, The guide mechanism (20) includes a connecting plate (25) fixedly connected to the second crank arm (14). A first drive assembly (21) is fixedly connected to the connecting plate (25). A connecting block (22) is connected to the output end of the first drive assembly (21). The first drive assembly (21) is an electric cylinder, a pneumatic cylinder, or a drive motor. The connecting block (22) is fixedly connected to the guide limiting plate (23).

10. A vapor deposition system, characterized in that, The shielding device according to any one of claims 1-9 further includes a vapor deposition chamber and a transfer chamber disposed above the vapor deposition chamber. The vapor deposition chamber is provided with a vapor deposition line source. The shielding device is located above the vapor deposition line source and is connected to the inner wall of the vapor deposition chamber. The shielding device includes a shielding part and a driving part for driving the shielding part to move closer to or away from the vapor deposition line source. The driving part is a curved arm folding mechanism (10). The curved arm folding mechanism (10) includes a driving assembly (11) and a connecting assembly (12) connecting the driving assembly (11) and the shielding part. The output shaft of the driving motor (111) of the driving assembly (11) is slidably connected to the inner wall of the vapor deposition chamber through a magnetic fluid seal (113). The fixing seat (121) in the connecting assembly (12) is fixedly connected to the inner wall of the vapor deposition chamber.

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