Crystal diameter measuring device

Abstract

The invention relates to a crystal diameter measuring device. The crystal diameter measuring device comprises a fixing assembly used for being fixed on a window of a single crystal furnace, and the single crystal furnace is used for growing a monocrystalline silicon crystal bar; the moving assembly comprises a guide rail connected to the fixed assembly and a sliding block installed on the guide rail, the guide rail is linear, and the sliding block can slide along the guide rail; the measuring assembly comprises a sighting device and a magnetic grid displacement detection structure which are connected with the sliding block, the sighting device is used for positioning a measuring point on the monocrystalline silicon crystal bar, and the magnetic grid displacement detection structure is used for obtaining the diameter of the monocrystalline silicon crystal bar according to the displacement of the sliding block. According to the invention, the accuracy and reliability of the diameter measurement of the monocrystalline silicon crystal bar are ensured.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a crystal diameter measuring device. Background Technology

[0002] Accurate measurement of the diameter of the grown monocrystalline silicon ingot in a single-crystal furnace is a crucial step in ensuring the quality of the growth. This accurate measurement is a prerequisite for the smooth execution of subsequent processes. Currently, the diameter is primarily measured using a CCD camera, followed by a secondary comparative measurement using a 600mm vernier caliper. These vernier calipers are widely used in crystal diameter measurement due to their simple structure, ease of operation, and low cost.

[0003] However, during the measurement of monocrystalline silicon ingots growing in a single-crystal furnace, the growth of these ingots requires a certain amount of space, necessitating a diameter measuring device with sufficient span to accommodate the ingot's size range. Therefore, a 600mm vernier caliper has become the mainstream device for measuring the diameter of monocrystalline silicon ingots. However, when using a 600mm vernier caliper to measure the diameter of a monocrystalline silicon ingot, the excessively long span can easily cause the caliper to bend. For example, when the span is 600mm, the caliper may completely deform due to its own weight and the force applied during operation. This bent and deformed caliper affects the accuracy and reliability of crystal diameter measurement, severely impacting the monitoring of the monocrystalline silicon ingot's growth quality and ultimately leading to variations in the quality of the grown monocrystalline silicon ingot.

[0004] Therefore, improving the accuracy and reliability of crystal diameter measurement and ensuring the growth quality of single-crystal silicon ingots are urgent technical problems that need to be solved. Summary of the Invention

[0005] This invention provides a crystal diameter measuring device to improve the accuracy and reliability of crystal diameter measurement and ensure the growth quality of single-crystal silicon ingots.

[0006] According to some embodiments, the present invention provides a crystal diameter measuring device, comprising: A fixing component for fixing to the viewing window of a single crystal furnace used for growing single crystal silicon rods; A movable component includes a guide rail connected to the fixed component and a slider mounted on the guide rail, the guide rail being linear and the slider being capable of sliding along the guide rail; The measuring assembly includes an aiming device and a magnetic grating displacement detection structure, both connected to the slider. The aiming device is used to locate the measuring point on the single-crystal silicon rod, and the magnetic grating displacement detection structure is used to obtain the diameter of the single-crystal silicon rod based on the displacement of the slider.

[0007] In some embodiments, the fixing component includes: A fixed base includes a base body and a third-direction opening penetrating the base body. The base body is used to fix to the outer periphery of the viewing window of the single crystal furnace. The base body includes a back side for attaching to the single crystal furnace and a front side opposite to the back side. The opening is used to align with the viewing window. The third-direction intersects perpendicularly with the front side of the base body. The fixing buckle has one end for connecting to the end of the base body along a first direction and the other end for connecting to the mounting part on the outer periphery of the viewing window of the single crystal furnace. The first direction is parallel to the front of the base body.

[0008] In some embodiments, the fixing base is made of stainless steel or aluminum alloy.

[0009] In some embodiments, the fixed base further includes a mounting groove on the front side of the base body, two mounting grooves are symmetrically distributed on opposite sides of the opening along the first direction, and the two ends of the guide rail are respectively fixed in the two mounting grooves.

[0010] In some embodiments, the length of the guide rail along the first direction is greater than or equal to 600 mm.

[0011] In some embodiments, the moving component further includes a locking knob disposed on the side of the slider, the locking knob being used to fix the position of the slider on the guide rail.

[0012] In some embodiments, the measuring component further includes: The mounting bracket has a first end fixedly connected to the top surface of the slider, and a second end extending out of the slider and having a mounting hole, into which the aiming device is mounted.

[0013] In some embodiments, the mounting bracket further includes a vertical connecting portion, the two ends of which are respectively connected to the first end and the second end, and the first end and the second end are distributed on opposite sides of the vertical connecting portion along a second direction, the second direction being parallel to the front surface of the base body, and the first direction intersecting the second direction perpendicularly; the measuring component further includes: An adjustment knob is connected to the second end, used to drive the second end to translate along the first direction and the second direction.

[0014] In some embodiments, the magnetic grating displacement detection structure includes: A magnetic scale is attached to the side of the guide rail; A magnetic grating displacement sensor is mounted on the side of the slider, and the magnetic grating ruler and the magnetic grating displacement sensor are located on the same side of the guide rail.

[0015] In some embodiments, it also includes: A display is mounted on the top surface of the slider and is connected to the magnetic grating displacement detection structure to display the diameter of the single-crystal silicon rod detected by the magnetic grating displacement detection structure.

[0016] The crystal diameter measuring device provided by this invention comprises a fixed component, a moving component, and a measuring component. The fixed component is fixed to the viewing window of a single crystal furnace. The moving component includes a guide rail connected to the fixed component and a slider mounted on the guide rail. The guide rail is linear, and the slider can slide along the guide rail. The measuring component includes an aiming device for positioning the measuring point on the single crystal silicon rod and a magnetic grating displacement detection structure for detecting the diameter of the single crystal silicon rod. The fixed component provides stable support for the moving component and the measuring component, ensuring that the moving component and the measuring component do not undergo complete deformation during the diameter measurement of the single crystal silicon rod. The high-precision guide rail, slider, aiming device, and magnetic grating displacement detection structure work together to achieve a measurement accuracy far exceeding that of a vernier caliper, meeting the requirements for high-precision crystal diameter measurement. This ensures the accuracy and reliability of the single crystal silicon rod diameter measurement, thereby ensuring the growth quality of the single crystal silicon rod and the smooth progress of subsequent processing steps.

[0017] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the invention. Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1This is a schematic diagram of the crystal diameter measuring device in a specific embodiment of the present invention; Figure 2 This is another structural schematic diagram of the crystal diameter measuring device in a specific embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of the crystal diameter measuring device after it is installed on the single crystal furnace in a specific embodiment of the present invention; Figure 4 This is another schematic diagram of the crystal diameter measuring device after it has been installed on a single crystal furnace in a specific embodiment of the present invention.

[0020] Explanation of reference numerals in the attached figures 10 base body 101 Front 11 openings 12 guide rails 13 sliders 14 mounting slots 15-sight 16-Magnetic Grating Displacement Sensor 17 Magnetic Grid Ruler 18 monitors 19 Mounting brackets 30 Single Crystal Furnace 31 Single Crystal Silicon Ingot 32 windows Detailed Implementation The technical solutions in the embodiments of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] This specific embodiment provides a crystal diameter measuring device. Figure 1 This is a schematic diagram of a crystal diameter measuring device according to a specific embodiment of the present invention. Figure 2 This is another structural schematic diagram of the crystal diameter measuring device in a specific embodiment of the present invention. Figure 3 This is a schematic diagram of the crystal diameter measuring device after it has been installed on a single crystal furnace according to a specific embodiment of the present invention. Figure 4 This is another structural schematic diagram of the crystal diameter measuring device after it has been installed on a single crystal furnace in a specific embodiment of the present invention. (See diagram below.) Figures 1-4 As shown, the crystal diameter measuring device includes: A fixing component is used to fix the single crystal furnace 30 to the viewing window 32 of the single crystal furnace 30, which is used to grow single crystal silicon rods 31; The movable component includes a guide rail 12 connected to the fixed component and a slider 13 mounted on the guide rail 12. The guide rail 12 is linear, and the slider 13 is capable of sliding along the guide rail. The measuring assembly includes an aiming device 15 and a magnetic grating displacement detection structure, both connected to the slider 13. The aiming device 15 is used to locate the measuring point on the single crystal silicon rod 31, and the magnetic grating displacement detection structure is used to obtain the diameter of the single crystal silicon rod 31 based on the displacement of the slider 13.

[0022] Specifically, the crystal diameter measuring device is installed above the viewing window 32 of the single crystal furnace 30 to measure the diameter of the single crystal silicon ingot 31 that is being grown (e.g., in the constant diameter stage) or has already been grown within the single crystal furnace 30. The crystal diameter measuring device includes a fixing component, a moving component, and a measuring component. One side of the fixing component is fixed to the viewing window 32 of the single crystal furnace 30, and the other side supports the moving component and the measuring component, preventing positional displacement of the moving component and the measuring component from affecting the accuracy of the measurement results during the measurement process. The moving component includes a guide rail 12 fixedly connected to the fixing component and a slider 13 mounted on the guide rail 12. The guide rail 12 is a straight guide rail, for example, the guide rail 12 extends in a straight line along a first direction D1. The slider 13 can slide freely along the straight guide rail 12, thereby ensuring the stability and straightness of the slider 13 during the sliding process. The aiming device 15 and the magnetic grating displacement detection structure in the measurement assembly are both connected to the slider 13, so that the aiming device 15 and the magnetic grating displacement detection structure can slide synchronously with the slider 13. The aiming device 15 is used to locate the measurement point on the single crystal silicon rod 31, and the magnetic grating displacement detection structure is used to obtain the diameter of the single crystal silicon rod 31 based on the displacement distance of the slider 13 and the electromagnetic induction effect.

[0023] For example, when measuring the diameter of the single-crystal silicon ingot 31 using the crystal diameter measuring device mounted on the viewing window 32 of the single-crystal furnace 30, the slider 13 is first driven to slide along the guide rail 12, allowing the aiming device 15 to aim at one edge of the single-crystal silicon ingot 31. The displacement data of the slider 13 during this process is detected by the magnetic grating displacement detection structure and used as the first displacement data. Then, the slider 13 is driven to slide along the guide rail 12, allowing the aiming device 15 to aim at the other (opposite) edge of the single-crystal silicon ingot 31. The displacement data of the slider 13 during this process is detected by the magnetic grating displacement detection structure and used as the second displacement data. Next, the magnetic grating displacement detection structure calculates the absolute value of the difference between the first displacement data and the second displacement data, and uses the absolute value as the diameter of the single-crystal silicon ingot 31.

[0024] In this specific embodiment, the fixed component provides stable support for the moving component and the measuring component. The diameter of the single-crystal silicon rod 31 is measured through the coordinated action of the guide rail 12, the slider 13, the aiming device 15, and the magnetic grating displacement detection structure. Since the detection accuracy of the magnetic grating displacement detection structure is high (for example, the detection accuracy of the magnetic grating displacement detection structure can reach ±0.001mm), which is much higher than the measurement accuracy of traditional vernier calipers, it helps to improve the accuracy of crystal diameter measurement. Simultaneously, the sliding of the slider 13 along the guide rail 12 drives the movement of the aiming device 15 and the magnetic grating displacement detection structure. The guide rail 12 is fixedly mounted on the fixing assembly, ensuring it always maintains a straight extension. This prevents bending or deformation of the guide rail 12 during measurement, or deviation of the slider 13's sliding path. The slider 13 can slide smoothly and linearly along the guide rail 12, ensuring the straightness and stability of the test path of the measuring assembly connected to the slider 13. This meets the requirements for high-precision crystal diameter measurement, ensuring the accuracy and reliability of single-crystal silicon rod diameter measurement, and consequently ensuring the growth quality of the single-crystal silicon rod and the smooth progress of subsequent processing.

[0025] In some embodiments, the fixing component includes: A fixed base includes a base body 10 and a third-direction D3 through an opening 11. The base body 10 is used to fix to the outer periphery of the viewing window 32 of the single crystal furnace 30. The base body 10 includes a back side for attaching to the single crystal furnace 30 and a front side 101 opposite to the back side. The opening 11 is used to align with the viewing window 32. The third-direction D3 intersects perpendicularly with the front side 101 of the base body 10. The fixing buckle has one end for connecting to the end of the base body 10 along the first direction D1, and the other end for connecting to the mounting part on the outer periphery of the viewing window 32 of the single crystal furnace 30. The first direction D1 is parallel to the front surface 101 of the base body 10.

[0026] In some embodiments, the fixing base is made of stainless steel or aluminum alloy.

[0027] Specifically, the fixed base includes a base body 10 and an opening 11 extending through the base body 10 along the third direction D3, thus making the entire fixed base a frame-like structure. When the crystal diameter measuring device is installed on the viewing window 32 on the single crystal furnace 30, the base body 10 is fixed to the outer periphery of the viewing window 32 of the single crystal furnace 30, thereby aligning the opening 11 with the viewing window 32, so as to observe and measure the single crystal silicon rod 31 inside the single crystal furnace 30 through the opening 11 and the viewing window 32, and so that the aiming device 15 can easily aim at the measurement point on the single crystal silicon rod 31 through the opening 11. The fixed base is made of stainless steel or aluminum alloy, thus giving the fixed base high rigidity and avoiding the problem of inaccurate measurement results due to deformation of the fixed base itself during the measurement of the single crystal silicon rod 31.

[0028] In one example, the fixing assembly includes two fixing clips, which are installed at opposite ends of the fixing base along the first direction D1. One end of each fixing clip is connected to the end of the base body 10 along the first direction D1, and the other end is connected to the mounting portion around the viewing window 32 of the single crystal furnace 30, to stably connect and fix the fixing base to the single crystal furnace 30, preventing the fixing base from loosening or shifting during the measurement of the diameter of the single crystal silicon ingot 31. In one example, each fixing clip includes a fixing seat and a movable pressure block. The fixing seat is fixedly connected to the end of the fixing base by bolts, and the movable pressure block is hinged to the fixing seat by a rotating shaft, with a locking bolt at the end of the movable pressure block. When the fixing assembly is installed onto the single crystal furnace 30, the back of the base body 10 is pressed against the single crystal furnace 30, the base body 10 is pressed by rotating the movable pressure block, and then the locking bolt is tightened to achieve fixation.

[0029] In some embodiments, the fixed base further includes a mounting groove 14 located on the front side of the base body 10. The two mounting grooves 14 are symmetrically distributed on opposite sides of the opening 11 along the first direction D1, and the two ends of the guide rail 12 are respectively fixed in the two mounting grooves 14 to limit the position of the guide rail 12 on the fixed base and prevent the guide rail 12 from being displaced during the measurement process.

[0030] In one example, the end of the guide rail 12 can be secured to the mounting groove 14 using a mortise and tenon joint. In another example, the end of the guide rail 12 can also be fixed to the mounting groove 14 using bolts.

[0031] In some embodiments, the length of the guide rail 12 along the first direction D1 is greater than or equal to 600 mm.

[0032] In some embodiments, the moving component further includes a locking knob disposed on the side of the slider 13, the locking knob being used to fix the position of the slider 13 on the guide rail 12.

[0033] Specifically, the moving component is used to drive the measuring component to move linearly in a horizontal direction (e.g., the first direction D1), and the diameter of the single crystal silicon ingot 31 inside the single crystal furnace 30 is measured by adjusting the position of the measuring component. The guide rail 12 is a high-precision linear guide rail with a straightness error less than or equal to 0.005 mm / m, thereby ensuring the smoothness and straightness of the slider 13 when sliding along the guide rail 12. In one example, the material of the guide rail 12 can be bearing steel. By providing the locking knob on the side of the slider 13, the slider 13 can be positioned and fixed on the guide rail 12, preventing the accuracy of the measurement results from being affected by the movement of the slider 13 during the measurement process.

[0034] In some embodiments, the measuring component further includes: Mounting bracket 19, the first end of which is fixedly connected to the top surface of slider 13, the second end of which extends out of slider 13 and has a mounting hole, in which aiming device 15 is mounted.

[0035] In some embodiments, the mounting bracket 19 further includes a vertical connecting portion, the two ends of which are respectively connected to the first end and the second end, and the first end and the second end are distributed on opposite sides of the vertical connecting portion along the second direction D2, the second direction D2 being parallel to the front surface 101 of the base body 10, and the first direction D1 intersecting the second direction D2 perpendicularly; the measuring component further includes: An adjustment knob is connected to the second end, which is used to drive the second end to translate along the first direction D1 and the second direction D2.

[0036] Specifically, such as Figure 1 and Figure 2 As shown, the mounting bracket 19 includes a vertical connecting portion extending along the third direction D3, a first end portion connected to the bottom end of the vertical connecting portion, and a second end portion connected to the top end of the vertical connecting portion. The first end portion and the second end portion are distributed on opposite sides of the vertical connecting portion along the second direction D2. The first end portion is mounted to the top of the slider 13 by a structure such as bolts. The second end portion has a mounting hole, and one end of the aiming device 15 passes through the mounting hole, while the other end is fixed inside the mounting hole. In one example, the aiming device 15 can be a telescope, such as an optical aiming telescope. The adjustment knob is used to drive the second end portion to translate along the first direction D1 and the second direction D2, thereby adjusting the relative positional relationship between the aiming device 15 and the slider 13 and the magnetic grating displacement detection structure connected to the slider 13. This ensures that the aiming device 15 can accurately aim at the measurement point position on the single crystal silicon rod 31, thereby further ensuring the accuracy and reliability of the diameter measurement of the single crystal silicon rod 31.

[0037] In some embodiments, the magnetic grating displacement detection structure includes: A magnetic scale 17 is attached to the side of the guide rail 12; A magnetic grating displacement sensor 16 is mounted on the side of the slider 13, and the magnetic grating ruler 17 and the magnetic grating displacement sensor 16 are located on the same side of the guide rail 12.

[0038] Specifically, the magnetic grating ruler 17 is fixedly attached to the side of the guide rail 12, and the length of the magnetic grating ruler 17 matches the length of the guide rail 12, for example, the length of the magnetic grating ruler 17 is greater than or equal to 600mm. The grating pitch of the magnetic grating ruler 17 is 0.01mm, providing high-precision displacement detection capability. The magnetic grating displacement sensor 16 is mounted on the side of the slider 13, and the magnetic grating ruler 17 and the magnetic grating displacement sensor 16 are located on the same side of the guide rail 12, that is, the magnetic grating displacement sensor 16 is arranged opposite to the magnetic grating ruler 17. In one example, there is a gap between the magnetic grating displacement sensor 16 and the magnetic grating ruler 17, thereby avoiding direct contact between the magnetic grating displacement sensor 16 and the magnetic grating ruler 17, reducing wear on the magnetic grating ruler 17 and the magnetic grating displacement sensor 16, and helping to improve the service life of the magnetic grating displacement detection structure. The magnetic grating displacement detection structure is based on the electromagnetic induction effect. Through the electromagnetic coupling between the magnetic grating displacement sensor 16 and the magnetized grating in the magnetic grating ruler 17, the mechanical displacement of the magnetic grating displacement sensor 16 is converted into an electrical signal, thereby realizing the accurate measurement of the diameter of the crystal (e.g., a single crystal silicon rod).

[0039] To facilitate users in timely and conveniently knowing the measured diameter of the single-crystal silicon ingot 31, in some embodiments, the crystal diameter measuring device further includes: A display 18 is mounted on the top surface of the slider 13. The display 18 is connected to the magnetic grating displacement detection structure and is used to display the diameter of the single crystal silicon rod 31 detected by the magnetic grating displacement detection structure.

[0040] In one example, the display 18 also has operation buttons such as a reset button and a calibration button. The reset button is used to reset the data in the display 18, and the upload button is used to upload the data displayed in the display 18 to the host computer to realize data storage and sharing.

[0041] The following example illustrates the specific steps of the crystal diameter measuring device in measuring the diameter of the single-crystal silicon ingot within the single-crystal furnace. First, the fixing base in the fixing assembly is installed above the viewing window 32 of the single-crystal furnace 30 via the fixing clip, and the data in the display 18 is zeroed. Next, the slider 13 is moved along the guide rail 12 so that the aiming device 15 can aim at one edge of the single-crystal silicon ingot 31 within the single-crystal furnace 30. At this time, the displacement data detected by the magnetic grating displacement sensor 16 is the first displacement data. Then, by driving the slider 13 to slide along the guide rail 12, the aiming device 15 can aim at the other edge of the single-crystal silicon ingot 31. At this time, the displacement data detected by the magnetic grating displacement sensor 16 is the second displacement data. Next, the microprocessor in the magnetic grating displacement detection structure calculates the absolute value of the difference between the first displacement data and the second displacement data, using this absolute value as the diameter of the single-crystal silicon ingot 31, and displays it on the display 18.

[0042] The crystal diameter measuring device provided in this specific embodiment comprises a fixed component, a moving component, and a measuring component. The fixed component is fixed to the viewing window of the single crystal furnace. The moving component includes a guide rail connected to the fixed component and a slider mounted on the guide rail. The guide rail is linear, and the slider can slide along the guide rail. The measuring component includes an aiming device for positioning the measuring point on the single crystal silicon rod and a magnetic grating displacement detection structure for detecting the diameter of the single crystal silicon rod. The fixed component provides stable support for the moving component and the measuring component, ensuring that the moving component and the measuring component do not undergo complete deformation during the diameter measurement of the single crystal silicon rod. The high-precision guide rail, slider, aiming device, and magnetic grating displacement detection structure work together to achieve a measurement accuracy far exceeding that of a vernier caliper, meeting the requirements for high-precision crystal diameter measurement. This ensures the accuracy and reliability of the single crystal silicon rod diameter measurement, thereby ensuring the growth quality of the single crystal silicon rod and the smooth progress of subsequent processing steps.

[0043] It should be noted that references to "an embodiment," "an embodiment," "an exemplary embodiment," "some embodiments," etc., in the specification indicate that the described embodiments may include specific features, structures, or characteristics, but each embodiment may not necessarily include that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure, or characteristic is described in connection with an embodiment, whether explicitly described or not, implementing such a feature, structure, or characteristic in conjunction with other embodiments is within the knowledge of those skilled in the art.

[0044] It should be noted that the terms "comprising" and "having," and their variations, used in this invention document are intended to cover non-exclusive inclusion. The terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence, unless explicitly indicated by the context. It should be understood that such data used interchangeably where appropriate. Furthermore, embodiments and features within embodiments of this invention can be combined with each other unless otherwise specified. In addition, descriptions of well-known components and technologies have been omitted in the above description to avoid unnecessarily obscuring the concepts of this invention. In the various embodiments described above, each embodiment focuses on its differences from other embodiments; similar or identical parts between embodiments can be referred to interchangeably.

[0045] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A crystal diameter measuring device, characterized in that, include: A fixing component for fixing to the viewing window of a single crystal furnace used for growing single crystal silicon rods; A movable component includes a guide rail connected to the fixed component and a slider mounted on the guide rail, the guide rail being linear and the slider being capable of sliding along the guide rail; The measuring assembly includes an aiming device and a magnetic grating displacement detection structure, both connected to the slider. The aiming device is used to locate the measuring point on the single-crystal silicon rod, and the magnetic grating displacement detection structure is used to obtain the diameter of the single-crystal silicon rod based on the displacement of the slider.

2. The crystal diameter measuring device according to claim 1, characterized in that, The fixing component includes: A fixed base includes a base body and a third-direction opening penetrating the base body. The base body is used to fix to the outer periphery of the viewing window of the single crystal furnace. The base body includes a back side for attaching to the single crystal furnace and a front side opposite to the back side. The opening is used to align with the viewing window. The third-direction intersects perpendicularly with the front side of the base body. The fixing buckle has one end for connecting to the end of the base body along a first direction and the other end for connecting to the mounting part on the outer periphery of the viewing window of the single crystal furnace. The first direction is parallel to the front of the base body.

3. The crystal diameter measuring device according to claim 1, characterized in that, The material of the fixed base is stainless steel or aluminum alloy.

4. The crystal diameter measuring device according to claim 2, characterized in that, The fixed base also includes a mounting groove on the front of the base body. The two mounting grooves are symmetrically distributed on opposite sides of the opening along the first direction, and the two ends of the guide rail are respectively fixed in the two mounting grooves.

5. The crystal diameter measuring device according to claim 4, characterized in that, The length of the guide rail along the first direction is greater than or equal to 600 mm.

6. The crystal diameter measuring device according to claim 4, characterized in that, The moving component also includes a locking knob disposed on the side of the slider, the locking knob being used to fix the position of the slider on the guide rail.

7. The crystal diameter measuring device according to claim 6, characterized in that, The measurement component also includes: The mounting bracket has a first end fixedly connected to the top surface of the slider, and a second end extending out of the slider and having a mounting hole, into which the aiming device is mounted.

8. The crystal diameter measuring device according to claim 6, characterized in that, The mounting bracket further includes a vertical connecting portion, the two ends of which are respectively connected to the first end and the second end, and the first end and the second end are distributed on opposite sides of the vertical connecting portion along a second direction, the second direction being parallel to the front surface of the base body, and the first direction intersecting the second direction perpendicularly; the measuring component further includes: An adjustment knob is connected to the second end, used to drive the second end to translate along the first direction and the second direction.

9. The crystal diameter measuring device according to claim 1, characterized in that, The magnetic grating displacement detection structure includes: A magnetic scale is attached to the side of the guide rail; A magnetic grating displacement sensor is mounted on the side of the slider, and the magnetic grating ruler and the magnetic grating displacement sensor are located on the same side of the guide rail.

10. The crystal diameter measuring device according to claim 9, characterized in that, Also includes: A display is mounted on the top surface of the slider and is connected to the magnetic grating displacement detection structure to display the diameter of the single-crystal silicon rod detected by the magnetic grating displacement detection structure.

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