A heater and a single crystal furnace

Abstract

This application provides a heater and a single-crystal furnace. The heater includes: a heating element; a foot plate, at least partially disposed opposite to the heating element along a first direction; and a connecting assembly, the connecting assembly including two connectors, one connector connected to the side of the heating element away from the foot plate, and the other connector connected to the side of the foot plate away from the heating element. The two connectors are detachably connected to clamp the heating element and the foot plate. Because the two connectors are detachably connected, allowing indirect connection between the heating element and the foot plate, bolt holes are not required for the heating element and the foot plate, avoiding cracking problems caused by opening holes. Simultaneously, when repairing or replacing the heating element or the foot plate, structural damage caused by direct disassembly of the heating element and the foot plate is avoided, allowing the heating element and the foot plate to be replaced individually, improving the utilization rate of the heating element or the foot plate, and reducing subsequent maintenance costs.

Description

Technical Field

[0001] This application belongs to the field of monocrystalline silicon production technology, specifically relating to a heater and a monocrystalline furnace. Background Technology

[0002] The single crystal furnace is the main equipment used to prepare single crystal silicon. Among them, the heater is the key component that provides heat to the raw materials in the single crystal furnace. Its structural design has an important impact on the uniformity of the thermal field and the quality of the product in the single crystal furnace.

[0003] In related technologies, heaters typically consist of a heating element and a foot plate, which are connected by bolts for easy installation, disassembly, and maintenance. However, in practical applications, abnormal cracks are prone to occur at the bolt holes of the heating element and the foot plate, affecting the reliability of the heater. In addition, various chemical reactions and physical phenomena within the single crystal furnace cause corrosion products to accumulate and volatiles to deposit in the pores of the bolt holes, increasing the difficulty of repairing or replacing the heating element or foot plate individually and raising subsequent maintenance costs. Utility Model Content

[0004] This application aims to provide a heater and a single crystal furnace to solve the problems of low reliability and high maintenance cost of heating elements and foot plates in existing heaters.

[0005] To solve the above-mentioned technical problems, this application is implemented as follows:

[0006] In a first aspect, this application discloses a heater, the heater comprising:

[0007] Heating element;

[0008] The foot plate is at least partially disposed opposite to the heating element along a first direction;

[0009] The connection assembly includes two connectors, one connector being connected to the side of the heating element away from the footplate, and the other connector being connected to the side of the footplate away from the heating element. The two connectors are detachably connected to clamp the heating element and the footplate.

[0010] Optionally, the connector includes a mating part and two connecting parts, the two connecting parts being disposed on both sides of the mating part along a second direction, the second direction intersecting the first direction;

[0011] The connecting portion of one of the connectors is provided in a one-to-one correspondence with the connecting portion of the other connector and is detachably connected. The mating portion of the two connectors is used to clamp the heating element and the foot plate.

[0012] Optionally, the connecting part is provided with a connecting hole, and the connecting assembly further includes a fastener, which passes through the connecting holes of the two connecting parts to connect the two connecting parts.

[0013] Optionally, there are multiple connecting holes, which are spaced apart along a third direction, and the third direction intersects with the first direction and the second direction.

[0014] Optionally, the connector further includes a mating part, which, when the two connectors are connected to each other, engages with the heating element and / or the foot plate for limiting.

[0015] Optionally, the mating part includes two limiting bosses spaced apart along a third direction, and at least a portion of the heating element and the foot plate are located between the two limiting bosses;

[0016] One of the limiting bosses is engaged with the heating element, and the other limiting boss is engaged with the foot plate. The third direction intersects with the first direction.

[0017] Optionally, the heating element includes a first side and a second side disposed opposite to each other along the first direction. The first side is provided with a first limiting groove, and the second side is provided with a second limiting groove. The mating parts of the two connecting members are respectively limited and mated with the first limiting groove and the second limiting groove.

[0018] Optionally, the foot plate includes a third side and a fourth side disposed opposite to each other along the first direction. The third side is provided with a third limiting groove, and the fourth side is provided with a fourth limiting groove. The mating parts of the two connecting members are respectively limited and engaged with the third limiting groove and the fourth limiting groove.

[0019] Optionally, the heating element includes a first stepped portion, and the foot plate includes a second stepped portion, wherein the first stepped portion and the second stepped portion are at least partially disposed opposite to each other along the first direction and are engaged in a stepped fit.

[0020] Secondly, this application also discloses a single crystal furnace, including the heater described in any of the above claims.

[0021] In this embodiment, the heater includes a heating element, a foot plate, and a connecting assembly. The connecting assembly includes two connectors: one connector is connected to the side of the heating element away from the foot plate, and the other connector is connected to the side of the foot plate away from the heating element. Because the two connectors are detachably connected, they can clamp the heating element and the foot plate, allowing for an indirect connection. Therefore, bolt holes are not required between the heating element and the foot plate, avoiding cracking caused by such holes. Furthermore, during maintenance or replacement of the heating element or foot plate, the two connectors can be disassembled to separate the heating element and foot plate, preventing structural damage caused by deposits in the pores when directly disassembling them. This allows the heating element and foot plate to be replaced individually, improving their utilization rate and reducing subsequent maintenance costs.

[0022] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0023] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0024] Figure 1 This is a schematic diagram of the heater structure in an embodiment of this application;

[0025] Figure 2 This is a schematic diagram of the interaction between the heating element and the foot plate in an embodiment of this application;

[0026] Figure 3 Figure 2 Enlarged diagram of section A in the middle;

[0027] Figure 4 This is one of the structural schematic diagrams of the heating element in the embodiments of this application;

[0028] Figure 5 This is the second schematic diagram of the heating element in the embodiments of this application;

[0029] Figure 6 Figure 5 Enlarged schematic diagram of section B in the middle;

[0030] Figure 7 This is a schematic diagram of the foot plate structure in an embodiment of this application;

[0031] Figure 8 This is a front view of the foot plate in an embodiment of this application;

[0032] Figure 9 This is a cross-sectional view of the foot plate in an embodiment of this application;

[0033] Figure 10 This is a schematic diagram of the structure of the first connector in the embodiments of this application;

[0034] Figure 11 This is a schematic diagram of the structure of the second connector in the embodiments of this application.

[0035] Reference numerals: 10 - heating element, 11 - first limiting groove, 12 - second limiting groove, 13 - first step, 20 - foot plate, 21 - third limiting groove, 22 - fourth limiting groove, 23 - second step, 30 - connector, 301 - first connector, 302 - second connector, 31 - connecting part, 311 - connecting hole, 32 - mating part, 321 - limiting boss, X - first direction, Y - second direction, Z - third direction. Detailed Implementation

[0036] The embodiments of this application will now be described in detail. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0037] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0038] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0039] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0040] In the semiconductor and photovoltaic industries, single crystal furnaces are core equipment. By precisely controlling the internal thermal environment, they allow raw materials to gradually grow into high-purity, large-size single crystal materials under specific conditions. During single crystal growth, the heater, as a key component providing a stable heat source, has a decisive impact on thermal uniformity, temperature control accuracy, and the overall lifespan of the equipment due to its structural design and material selection. Currently, a common connection method in the structural design of single crystal furnace heaters is to create bolt holes between the heating element and the base plate, connecting them with bolts. While this design facilitates installation, disassembly, and subsequent maintenance, it has revealed several problems that urgently need to be addressed in practical applications.

[0041] First, during operation, the heaters in a single crystal furnace typically withstand temperatures exceeding 1000 degrees Celsius. The difference in thermal expansion coefficients between the heating element and the foot plate leads to significant thermal stress between them. Simultaneously, during equipment start-up, shutdown, and temperature adjustment, the heaters are also subjected to mechanical stress caused by temperature changes. The stress concentration effect around the bolt holes is significant, making them highly susceptible to abnormal cracking. This cracking not only compromises the overall structural integrity of the heater and affects the uniformity and stability of the thermal field but may also lead to more serious safety accidents. Second, the working environment of a single crystal furnace usually contains various corrosive gases and volatiles, which accelerate the corrosion of metal materials under high temperatures. Bolt holes, being tiny spaces, easily become sites for the deposition of corrosive media and volatiles. As the heater is used for longer periods, corrosion products and deposits gradually accumulate within the holes, reducing or even completely blocking the clearance between the bolts and the hole walls. When the heater needs maintenance or replacement, operators often find that the bolts cannot be easily unscrewed due to corrosion and deposits, which brings great difficulties to the disassembly and maintenance of the equipment. More seriously, due to the tight connection between the heater and the foot plate under the bolt connection, once the bolt hole has a problem, it is often necessary to replace the entire heater or foot plate at the same time, rather than replacing only the damaged part. This not only increases the downtime and maintenance cost of the equipment, but also causes unnecessary waste of materials.

[0042] Based on the above reasons, this application provides a heater to solve the problems mentioned above in the prior art. The heater in the embodiments of this application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, as... Figure 1 As shown, the heating element has a first direction, a second direction, and a third direction that intersect each other in pairs. The heating element is a heating ring. The first direction is arranged approximately along the radial direction of the heating element, the second direction is arranged approximately along the circumferential direction of the heating element, and the third direction is arranged approximately along the axial direction of the heating element.

[0043] like Figure 1 As shown, the heater disclosed in this application may specifically include: a heating element 10, a foot plate 20, and a connecting assembly. The foot plate 20 and the heating element 10 are at least partially disposed opposite each other along a first direction X. The connecting assembly includes two connectors 30. One connector 30 is connected to the side of the heating element 10 away from the foot plate 20, and the other connector 30 is connected to the side of the foot plate 20 away from the heating element 10. The two connectors 30 are detachably connected to clamp the heating element 10 and the foot plate 20.

[0044] The heating element 10 is the core component of the heater. In this embodiment, the heating element 10 has a ring structure, and its bottom is connected to the foot plate 20 to support it. The heating element 10 is typically made of high-purity graphite or carbon-based composite material to maintain chemical stability at high temperatures. The heating element 10 achieves the melting of silicon material and the orderly growth of crystals through the conversion of electrical energy into thermal energy and the precise control of the thermal field. When current flows through the heating element 10, free electrons inside the material collide with lattice atoms, converting electrical energy into thermal energy.

[0045] The foot plate 20, serving as a component connecting the heating element 10 to the power supply, is connected to the bottom of the heating element 10, providing a stable conductive path and mechanical support. As the interface between the heating element 10 and the external power supply, the foot plate 20 is responsible for transmitting high current and high voltage. The foot plate 20 is typically made of high-purity graphite or copper-graphite composite material to achieve low-resistance transmission, thereby reducing energy loss. Furthermore, the heating element 10 is fixed to the furnace body of the single-crystal furnace via the foot plate 20, which provides stable support for the heating element 10. In this embodiment, two foot plates 20 are provided, evenly spaced along the circumference of the heating element 10 to form stable support. In practical applications, the number of foot plates 20 can be multiple, such as three, four, or five, depending on actual needs. Multiple foot plates 20 can be evenly spaced along the axial direction of the heating element 10. The number of foot plates 20 and their positional relationship with the heating element 10 are not specifically limited in this application.

[0046] In this embodiment, the connecting assembly is used to connect the heating element 10 and the foot plate 20, and the number of connecting assemblies corresponds to the number of foot plates 20. Specifically, the heating element 10 and the foot plate 20 are at least partially disposed opposite to each other and in contact with each other along the first direction X. The connecting assembly includes two connecting members 30, which are disposed opposite to each other along the first direction X. The heating element 10 includes a first side and a second side disposed opposite to each other along the first direction X, and the foot plate 20 includes a third side and a fourth side disposed opposite to each other along the first direction X. The second side of the heating element 10 is connected to the third side of the foot plate 20. One connecting member 30 is connected to the first side of the heating element 10, and the other connecting member 30 is connected to the fourth side of the foot plate 20. The two connecting members 30 are detachably connected to clamp the heating element 10 and the foot plate 20.

[0047] For example, in this embodiment, the first side and the second side are the inner and outer sides of the heating element 10 along the first direction X, respectively, and the third side and the fourth side are the inner and outer sides of the foot plate 20 along the first direction X, respectively. The heating element 10 has a center. The inner side refers to the side of the heating element 10 and the foot plate 20 close to the center of the heating element 10, and the outer side refers to the side opposite to the inner side along the first direction X. The connecting assembly includes a first connector 301 and a second connector 302, which have the same or similar structures. The outer side of the heating element 10 is connected to the inner side of the foot plate 20. The first connector 301 is connected to the inner side of the heating element 10, and the second connector 302 is connected to the outer side of the foot plate 20. The first connector 301 and the second connector 302 are opposite each other along the first direction X to clamp the heating element 10 and the foot plate 20 located between them from the first direction X. When the first connector 301 and the second connector 302 are detachably connected, the heating element 10 and the foot plate 20 are also detachably connected. It should be noted that, in the case of heating element 10, as... Figure 4 and Figure 5 In the case of the cylindrical heating coil shown, the heating element 10 has an arc along its circumference, and the foot plate 20 also has the same arc. Correspondingly, the first connector 301 and the second connector 302 also have the same arc as the heating element 10 and the foot plate 20 to ensure a reliable connection between the heating element 10 and the foot plate 20.

[0048] In this embodiment of the application, the heater includes a heating element 10, a foot plate 20, and a connecting assembly. The connecting assembly includes two connectors 30, one connector 30 is connected to the side of the heating element 10 away from the foot plate 20, and the other connector 30 is connected to the side of the foot plate 20 away from the heating element 10. Because the detachable connection between the two connectors 30 can clamp the heating element 10 and the foot plate 20, the heating element 10 and the foot plate 20 are indirectly connected through the two connectors 30. Therefore, the heating element 10 and the foot plate 20 do not need to have bolt holes, avoiding cracking problems caused by holes. At the same time, when repairing or replacing the heating element 10 or the foot plate 20, the heating element 10 and the foot plate 20 can be separated by disassembling the two connectors 30. This also avoids structural damage to the heating element 10 or the foot plate 20 caused by deposits in the gaps when directly disassembling the heating element 10 and the foot plate 20. This allows the heating element 10 and the foot plate 20 to be replaced separately, improving the utilization rate of the heating element 10 or the foot plate 20 and reducing the later maintenance costs.

[0049] Optionally, the heating element 10 includes a first step portion 13, and the foot plate 20 includes a second step portion 23. The first step portion 13 and the second step portion 23 are at least partially disposed opposite each other along the first direction X and are stepped to fit together to form a tighter fit.

[0050] Specifically, the heating element 10 includes a heating element 10 body and a first step portion 13. The heating element 10 body has a ring structure. The first step portion 13 is connected to the heating element 10 body and is used to connect and cooperate with the foot plate 20 to realize the connection between the heating element 10 and the foot plate 20. The foot plate 20 includes a foot plate 20 body and a second step portion 23. The second step portion 23 is connected to the foot plate 20 body and is used to connect with the heating element 10 to realize the connection between the heating element 10 and the foot plate 20.

[0051] In some optional embodiments of this application, the heating element 10 includes a heating element 10 body and two first step portions 13. The two first step portions 13 are evenly spaced along the circumference of the heating element 10 body. Correspondingly, two foot plates 20 are provided. The second step portion 23 of one foot plate 20 is used to contact and cooperate with one of the first step portions 13 of the heating element 10. In this way, the heating element 10 is supported by the two foot plates 20, which improves the stability and reliability of the heater. In practical applications, a first limiting structure and a second limiting structure can be respectively provided on the first step portion 13 and the second step portion 23. Before the connecting component is connected to the heating element 10 and the foot plate 20, the initial limiting cooperation of the first limiting structure and the second limiting structure can realize the positioning and pre-assembly between the heating element 10 and the foot plate 20, thereby facilitating the assembly between the connecting component 30 and the heating element 10 and the foot plate 20 and improving the assembly efficiency.

[0052] Optionally, the connector 30 includes a mating part 32 and two connecting parts 31. The two connecting parts 31 of the heating element 10 are arranged on both sides of the mating part 32 of the heating element 10 along the second direction Y. The connecting part 31 of one heating element 10 connector 30 is correspondingly arranged with the connecting part 31 of the other heating element 10 connector 30 and is detachably connected. The mating part 32 of the two heating element 10 connectors 30 is used to clamp the heating element 10 and the foot plate 20 of the heating element 10, so that the heating element 10 and the foot plate 20 are detachably connected through the connecting assembly.

[0053] like Figure 10 and Figure 11 The figures shown are schematic diagrams of the first connector 301 and the second connector 302 in the embodiments of this application. The first connector 301 is used to mate with the outer side of the foot plate 20, and the second connector 302 is used to mate with the inner side of the heating element 10. When the connecting components are connected to the heating element 10 and the foot plate 20, the two connecting portions 31 are located on both sides of the heating element 10 and the foot plate 20 along the second direction Y, respectively, to avoid the first step portion 13 of the heating element 10 and the second step portion 23 of the foot plate 20, so as to facilitate the connection operation between the two connectors 30. When the connector 30 is provided with two connecting parts 31, the two connecting parts 31 on the first connector 301 can be respectively provided on both sides of the heating element 10 and the foot plate 20 along the second direction Y and detachably connected to the two connecting parts 31 on the second connector 302. In this way, the two connectors 30 are connected to each other through the connecting parts 31 on both sides, which improves the connection strength of the detachable connection between the two connectors 30, thereby ensuring the connection reliability between the heating element 10 and the foot plate 20 located between the two connectors 30, and ensuring the structural stability and performance of the heater.

[0054] The detachable connection method between the connecting parts 31 of the two connectors 30 may include bolt connection, screw connection, pin connection, etc. This application does not specifically limit the detachable connection method between the two connectors 30.

[0055] Optionally, the connecting part 31 is provided with a connecting hole 311, and the connecting assembly also includes a fastener, which passes through the connecting hole 311 of the two connectors 30 to connect the two connectors 30.

[0056] Specifically, in this embodiment, the two connectors 30 are detachably connected by bolts. The connection hole 311 is a through hole, and the fasteners include bolts and nuts. The bolts pass through the connection holes 311 on the two connectors 30 in sequence and are locked by the nuts to achieve a detachable connection between the two connectors 30. The connector 30 is a carbon-carbon composite material connector 30. Utilizing the high modulus of the carbon-carbon composite material, the risk of cracking at the opening of the connection hole 311 can be effectively avoided, thereby reducing abnormal accidents such as connection failure caused by the opening.

[0057] In practical applications, since the connection hole 311 is easily affected by the internal environment of the single crystal furnace, deposits may accumulate. If the foot plate 20 or the heating element 10 needs to be replaced separately, the deposits around the connection hole 311 of the connector 30 can be removed with an angle grinder. Then, the bolts and nuts can be removed to separate the heating element 10 from the foot plate 20. Under this structure, the structure of the heating element 10 and the foot plate 20 is not affected by the disassembly of the connector 30. The heating element 10 or the foot plate 20 can be replaced separately, and then a new connector 30 can be used to connect the heating element 10 and the foot plate 20. This can improve the utilization rate of the foot plate 20 and the heating element 10 and reduce the later maintenance costs.

[0058] Optionally, there are multiple connection holes 311, and the multiple connection holes 311 are spaced apart along the third direction Z.

[0059] like Figure 10 and Figure 11 As shown, each connecting part 31 is provided with multiple connecting holes 311, which are spaced apart along the third direction Z. Fasteners can be selected to pass through any of the multiple connecting holes 311, or fasteners can pass through each connecting hole 311. In this way, the connection strength between the two connecting parts 30 can be enhanced, and the connection uniformity between the two connecting parts 30 along the third direction Z is also guaranteed, thereby ensuring the connection strength and reliability of the connection position between the heating element 10 and the foot plate 20.

[0060] Furthermore, the connector 30 also includes a mating part 32. When the two connectors 30 are connected to each other, the mating part 32 is in a limiting fit with the heating element 10 and / or the foot plate 20, thereby improving the fit strength between the connector assembly and the heating element 10 and the foot plate 20.

[0061] Specifically, the connector 30 includes a mating part 32 and two connecting parts 31. When the two connectors 30 are connected to each other, the connecting parts 31 of the two connectors 30 are detachably connected by bolts. The mating part 32 of the two connectors 30 has a limiting fit with the heating element 10 and / or the foot plate 20. In this way, the connector 30 not only connects the heating element 10 and the foot plate 20 together through the detachable connection between its connecting part 31 and the connecting part 31 of the other connector 30, but also effectively prevents the connector 30 from loosening or shifting between the heating element 10 or the foot plate 20 due to external forces during the use of the heater, thereby ensuring the stability and reliability of the entire connection structure. In addition, the mating part 32 can also play a role in quick positioning during the connection process, enabling the operator to quickly and accurately align and fix the connector 30 with the heating element 10 and the foot plate 20, improving assembly efficiency. It should be noted that the limiting engagement method between the mating part 32 and the heating element 10 and / or the foot plate 20 may include, but is not limited to, the engagement of the boss and the groove, the engagement of the limiting post and the limiting hole, etc.

[0062] In some optional embodiments of this application, such as Figure 10 , Figure 11 As shown, the mating part 32 includes two limiting bosses 321 spaced apart along the third direction Z. At least a portion of the heating element 10 and the foot plate 20 are located between the two limiting bosses 321. One limiting boss 321 is engaged with the heating element 10, and the other limiting boss 321 is engaged with the foot plate 20. By engaging the two limiting bosses 321 with the heating element 10 and the foot plate 20 respectively, the integrity and connection reliability between the heating element 10, the foot plate 20 and the connecting components are improved.

[0063] Specifically, two limiting bosses 321 on a connector 30 are respectively disposed at both ends of the mating portion 32 along the third direction Z and extend outward along the first direction X, forming a recess between the two limiting bosses 321 for accommodating the heating element 10 and / or the foot plate 20. Figure 2 and Figure 3 As shown, when the first step portion 13 of the heating element 10 is engaged with the second step portion 23 of the foot plate 20, a portion of the first step portion 13 and a portion of the second step portion 23 are located on the same plane. In this way, the two limiting bosses 321 of the mating portion 32 on a connector 30 can be connected and snapped to the heating element 10 and the foot plate 20 respectively, thereby improving the integrity between the heating element 10, the foot plate 20 and the connecting components, thus ensuring the overall structural stability of the heater during the operation of the single crystal furnace.

[0064] Optionally, the heating element 10 includes a first side and a second side disposed opposite to each other along the first direction X. The first side is provided with a first limiting groove 11, and the second side is provided with a second limiting groove 12. The mating parts 32 of the two connecting members 30 are respectively limited and engaged with the first limiting groove 11 and the second limiting groove 12.

[0065] For example, in the embodiments of this application, the first side is the inner side of the heating element 10, and the second side is the outer side of the heating element 10, such as... Figures 4 to 6 As shown, a schematic diagram and a partially enlarged schematic diagram of the heating element 10 are presented respectively. Figure 6 In the enlarged schematic diagram shown, the left side represents the inner side of the heating element 10, and the right side represents the outer side of the heating element 10. The first limiting groove 11 and the second limiting groove 12 are respectively located on the inner and outer sides of the heating element 10, and are situated between the heating element 10 body and the first step portion 13 along the third direction Z. When the two connecting pieces 30 are connected, one connecting piece 30 engages with the first limiting groove 11, and the other connecting piece 30 engages with the second limiting groove 12. In this way, one connecting piece 30 is not only detachably connected to the connecting portion 31 of the other connecting piece 30 via the connecting portion 31, but the two connecting pieces 30 also have mutual limiting engagement with the first limiting groove 11 or the second limiting groove 12 on the heating element 10, making the connection between the two connecting pieces 30 and the heating element 10 more reliable and stable. This avoids the risk of the heating element 10 and the foot plate 20 detaching due to the failure of the clamping effect of the connecting components on the heating element 10 and the foot plate 20.

[0066] Optionally, the foot plate 20 includes a third side and a fourth side disposed opposite to each other along the first direction X. The third side is provided with a third limiting groove 21, and the fourth side is provided with a fourth limiting groove 22. The mating parts 32 of the two connecting members 30 are respectively limited and engaged with the third limiting groove 21 and the fourth limiting groove 22.

[0067] For example, in this embodiment of the application, the third side is the inner side of the foot plate 20, and the fourth side is the outer side of the foot plate 20, such as... Figures 7 to 9 As shown, the structural schematic diagram and cross-sectional view of the foot plate 20 are shown respectively. Figure 9In the cross-sectional view shown, the left side is the inner side of the foot plate 20, and the right side is the outer side of the foot plate 20. The third limiting groove 21 and the fourth limiting groove 22 are respectively located on the inner and outer sides of the foot plate 20, and are situated between the foot plate 20 body and the second step portion 23 along the third direction Z. When the two connecting pieces 30 are connected, one connecting piece 30 engages with the third limiting groove 21, and the other connecting piece 30 engages with the fourth limiting groove 22. In this way, one connecting piece 30 is not only detachably connected to the connecting portion 31 of the other connecting piece 30 via the connecting portion 31, but the two connecting pieces 30 also have mutual limiting engagement with the third limiting groove 21 or the fourth limiting groove 22 on the foot plate 20, making the connection between the two connecting pieces 30 and the foot plate 20 more reliable and stable. This avoids the risk of the heating element 10 and the foot plate 20 detaching due to the failure of the clamping effect of the connecting assembly on the heating element 10 and the foot plate 20.

[0068] Furthermore, the heating element 10 has a first limiting groove 11 on its first side and a second limiting groove 12 on its second side. Meanwhile, the foot plate 20 has a third limiting groove 21 on its third side and a fourth limiting groove 22 on its fourth side. Of the two connecting members 30, the two limiting bosses 321 on the inner side of the connecting member 30 respectively engage with the first limiting groove 11 of the heating element 10 and the third limiting groove 21 of the foot plate 20. The two limiting bosses 321 on the outer side of the connecting member 30 respectively engage with the second limiting groove 12 of the heating element 10 and the fourth limiting groove 22 of the foot plate 20. Thus, through the detachable connection between the connecting members 30, the limiting engagement between the connecting members 30 and the heating element 10, and the limiting engagement between the connecting members 30 and the foot plate 20, the integrity and tightness of the connection assembly, the heating element 10, and the foot plate 20 are significantly enhanced. This ensures the reliability of the detachable connection between the heating element 10 and the foot plate 20 through the connecting assembly and improves the overall structural stability of the heater.

[0069] In summary, the heater provided in this application embodiment may include at least the following advantages:

[0070] In this embodiment, the heater includes a heating element, a foot plate, and a connecting assembly. The connecting assembly includes two connectors: one connector is connected to the side of the heating element away from the foot plate, and the other connector is connected to the side of the foot plate away from the heating element. Because the two connectors are detachably connected, they can clamp the heating element and the foot plate, allowing for indirect connection. Therefore, bolt holes are not required between the heating element and the foot plate, avoiding cracking caused by such holes. Furthermore, during maintenance or replacement of the heating element or foot plate, the two connectors can be disassembled to separate the heating element and foot plate, preventing structural damage caused by deposits in the pores when directly disassembling them. This allows the heating element and foot plate to be replaced individually, improving their utilization rate and reducing subsequent maintenance costs.

[0071] This application also provides a single crystal furnace, including the heater described above.

[0072] It should be noted that in this embodiment, the structure of the heater is the same as that of the heater in any of the above embodiments, and its beneficial effects are similar, so it will not be described in detail here.

[0073] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0074] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A heater, characterized in that, The heater includes: Heating element (10); The footplate (20) is at least partially disposed opposite to the heating element (10) along a first direction (X); The connection assembly includes two connectors (30), one connector (30) being connected to the side of the heating element (10) away from the foot plate (20), and the other connector (30) being connected to the side of the foot plate (20) away from the heating element (10). The two connectors (30) are detachably connected to clamp the heating element (10) and the foot plate (20).

2. The heater according to claim 1, characterized in that, The connector (30) includes a mating part (32) and two connecting parts (31). The two connecting parts (31) are disposed on both sides of the mating part (32) along a second direction (Y), and the second direction (Y) intersects with the first direction (X). The connecting part (31) of one of the connectors (30) is provided in a one-to-one correspondence with the connecting part (31) of the other connector (30) and is detachably connected. The mating part (32) of the two connectors (30) is used to clamp the heating element (10) and the foot plate (20).

3. The heater according to claim 2, characterized in that, The connecting part (31) is provided with a connecting hole (311), and the connecting assembly also includes a fastener, which passes through the connecting holes (311) of the two connecting parts (30) to connect the two connecting parts (30).

4. The heater according to claim 3, characterized in that, The number of the connecting holes (311) is multiple, and the multiple connecting holes (311) are spaced apart along a third direction (Z), which intersects with the first direction (X) and the second direction (Y).

5. The heater according to claim 1, characterized in that, The connector (30) includes a mating part (32) which, when two connectors (30) are connected to each other, engages with the heating element (10) and / or the foot plate (20) in a limiting fit.

6. The heater according to claim 5, characterized in that, The mating part (32) includes two limiting bosses (321) spaced apart along a third direction (Z), and at least a portion of the heating element (10) and the foot plate (20) are located between the two limiting bosses (321); One of the limiting bosses (321) is engaged with the heating element (10), and the other limiting boss (321) is engaged with the foot plate (20). The third direction (Z) intersects with the first direction (X).

7. The heater according to claim 6, characterized in that, The heating element (10) includes a first side and a second side disposed opposite to each other along the first direction (X). The first side is provided with a first limiting groove (11), and the second side is provided with a second limiting groove (12). The mating parts (32) of the two connecting members (30) are respectively limited and engaged with the first limiting groove (11) and the second limiting groove (12).

8. The heater according to claim 6 or 7, characterized in that, The foot plate (20) includes a third side and a fourth side disposed opposite to each other along the first direction (X). The third side is provided with a third limiting groove (21), and the fourth side is provided with a fourth limiting groove (22). The mating parts (32) of the two connecting members (30) are respectively limited and engaged with the third limiting groove (21) and the fourth limiting groove (22).

9. The heater according to any one of claims 1 to 6, characterized in that, The heating element (10) includes a first step portion (13), and the foot plate (20) includes a second step portion (23). The first step portion (13) and the second step portion (23) are at least partially disposed opposite to each other along the first direction (X) and are engaged in a step-like manner.

10. A single crystal furnace, characterized in that, Includes the heater as described in any one of claims 1-9.

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