Flow channel structure of thermal gas micro-flow sensor

By using a detachable rib and groove layer structure design, combined with fluid simulation and parts replacement, the flow channel of the thermal gas micro-flow sensor can be quickly adjusted, solving the problem of the flow channel being unadjustable, improving R&D efficiency and reducing iteration costs.

CN121594989APending Publication Date: 2026-03-03BEIJING INST OF CONTROL ENG
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Patent Information

Application Number
CN202511734417.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-11-24
Publication Date
2026-03-03

AI Technical Summary

Technical Problem

The existing flow channel structure of thermal gas microflow sensors cannot be flexibly adjusted, resulting in long development cycles, high iteration costs, and an inability to quickly adapt to the needs of different measurement gases and flow ranges.

Method used

It adopts a detachable rib layer, groove layer and chip layer structure, which is fixedly connected by fasteners. The ribs are inserted into the grooves and ventilation intervals are set at both ends of the flow channel to achieve adjustable flow channel cross-sectional shape and size. Combined with fluid simulation and parts replacement, the optimal performance parameters can be quickly located.

Benefits of technology

This enables convenient and adjustable flow channel performance, shortens the R&D cycle, reduces iteration costs, and improves the R&D efficiency and flexibility of sensors.

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Abstract

The invention relates to the technical field of gas micro-flow sensors, in particular to a thermal gas micro-flow sensor, a flow channel structure and a design method. A rib plate layer, a groove layer and a chip layer of the runner structure of the thermal gas micro-flow sensor are fixedly connected through detachable fasteners, a rib plate is inserted into a groove, first ventilation intervals are formed between the rib plate and the two ends of the groove in the length direction, second ventilation intervals are formed between the rib plate and the bottom of the groove, and a mounting groove is opposite to a through groove in position. And the gas inlet, the gas outlet, the second ventilation interval and the two first ventilation intervals are communicated. By replacing the rib plate layers with different rib plate sizes and / or the groove layers with different sizes, the shape and size of the cross section of the runner can be adjusted. Through mechanical structure innovation, the flow channel performance is convenient and adjustable, great flexibility is provided for sensor research and development, the research and development period is shortened, and the iteration cost is reduced.
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