Data reporting method of semiconductor process equipment and related device

Abstract

The embodiment of the invention provides a data reporting method, which comprises the following steps of: obtaining a system time point by calling a target function, determining whether to trigger a reporting task based on a timing time point and the system time point, triggering a target thread to report semiconductor process equipment data when determining to trigger the reporting task, and reporting the semiconductor process equipment data based on a set data reporting interval. And updating the timing time point, and returning to execute the step of acquiring the semiconductor process equipment data of the EDA server to be reported, so that the relationship between the system time point and the timing time point is used as a condition for judging whether the reporting task is triggered or not, and the timing does not need to be performed depending on the timer frequency of the system of the CTC equipment end. The situation of overtime reporting caused by timing based on the timer frequency is avoided, and the real-time performance of the data reporting method is improved.

Description

Technical Field

[0001] This specification relates to the field of computer application technology, specifically to semiconductor data reporting technology within the field of computer application technology, and more specifically to a data reporting method and related apparatus for semiconductor process equipment. Background Technology

[0002] Data reporting refers to the process of transmitting data from one system or device to another, a central server, or the cloud. In some application scenarios, data reporting has very high real-time requirements; real-time performance is a parameter that measures whether a data reporting device can report data at a specified time. For example, in the semiconductor industry, factory technicians need to obtain various data from semiconductor process equipment in a timely manner to understand and control the process. The interval between each data report is typically on the order of milliseconds, which places high demands on the real-time performance of data reporting. However, currently, the real-time performance of data reporting in related technologies is relatively poor. Summary of the Invention

[0003] This specification provides a data reporting method and related apparatus for semiconductor process equipment to improve the real-time performance of the data reporting method for semiconductor process equipment.

[0004] To achieve the above technical objectives, the embodiments of this specification provide the following technical solutions:

[0005] Firstly, one embodiment of this specification provides a data reporting method for semiconductor process equipment, applied to the CTC device side of a data reporting system. The data reporting method for semiconductor process equipment includes:

[0006] Obtain semiconductor process equipment data to be reported to the EDA server;

[0007] Call the target function to obtain the system time point, which is used to characterize the system runtime;

[0008] Based on the timed time point and the system time point, it is determined whether to trigger the reporting task. When it is determined that the reporting task should be triggered, the target thread is triggered to report the semiconductor process equipment data. Based on the set data reporting interval, the timed time point is updated, and the process returns to the step of obtaining the semiconductor process equipment data to be reported from the EDA server.

[0009] Secondly, one embodiment of this specification provides a data reporting method for semiconductor process equipment, applied to the EDA server of a data reporting system. The data reporting method for semiconductor process equipment includes:

[0010] A data reporting instruction is sent to the CTC device, which instructs the CTC device to acquire semiconductor process equipment data to be reported to the EDA server; a target function is called to obtain a system time point, which is used to characterize the system runtime; based on the timed time point and the system time point, it is determined whether to trigger a reporting task; if it is determined to trigger the reporting task, the target thread is triggered to report the semiconductor process equipment data; based on the set data reporting interval, the timed time point is updated, and the process returns to the step of acquiring semiconductor process equipment data to be reported to the EDA server.

[0011] Thirdly, one embodiment of this specification provides a data reporting system, including: a CTC device and an EDA server; wherein...

[0012] The EDA server is configured to send a data reporting command to the CTC device.

[0013] The CTC device is configured to: acquire semiconductor process equipment data to be reported to the EDA server; call a target function to obtain a system time point, which is used to characterize the system runtime; determine whether to trigger a reporting task based on a timed time point and the system time point; if the reporting task is triggered, trigger the target thread to report the semiconductor process equipment data; update the timed time point based on the set data reporting interval; and return to execute the step of acquiring semiconductor process equipment data to be reported to the EDA server.

[0014] Fourthly, one embodiment of this specification also provides a computing device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the data reporting method for semiconductor process equipment as described above.

[0015] Fifthly, one embodiment of this specification also provides a computer-readable storage medium storing a computer program that, when executed by a processor, implements the data reporting method for semiconductor process equipment as described above.

[0016] Sixthly, embodiments of this specification provide a computer program product or computer program, the computer program product including a computer program stored in a computer-readable storage medium; the processor of the computer device reads the computer program from the computer-readable storage medium, and when the processor executes the computer program, it implements the steps of the above-described data reporting method for semiconductor process equipment.

[0017] As can be seen from the above technical solution, the data reporting method for semiconductor process equipment provided in this specification obtains the system time point by calling a target function, and determines whether to trigger a reporting task based on the timed time point and the system time point. When it is determined that the reporting task should be triggered, the target thread is triggered to report the semiconductor process equipment data. Based on the set data reporting interval, the timed time point is updated, and the process returns to the step of obtaining the semiconductor process equipment data to be reported to the EDA server. In this way, the relationship between the system time point and the timed time point is used as the condition for whether to trigger the reporting task, without relying on the timer frequency of the CTC device system itself for timing. This avoids the timeout reporting situation caused by timing based on the timer frequency, which is beneficial to improving the real-time performance of the data reporting method for semiconductor process equipment. In addition, when the data reporting task is triggered, the data reporting method for semiconductor process equipment avoids the delay caused by thread queuing and thread switching by triggering a specific target thread to report the semiconductor process equipment data, which is beneficial to improving the real-time performance of the data reporting method for semiconductor process equipment. At the same time, by triggering a specific target thread to report semiconductor process equipment data, it is also possible to avoid the situation where multiple threads report the same semiconductor process equipment data at the same time, thus avoiding the duplicate reporting of the same data. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments or prior art of this specification, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this specification. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0019] Figure 1 A schematic diagram of the framework structure of a data reporting system provided for the implementation of this specification;

[0020] Figure 2 This is a schematic diagram of a data reporting method for semiconductor process equipment in related technologies;

[0021] Figure 3 A flowchart illustrating a data reporting method for semiconductor process equipment provided for embodiments of this specification;

[0022] Figure 4 This is a schematic diagram illustrating the experimental results of data reporting methods for semiconductor process equipment in related technologies.

[0023] Figure 5 A schematic diagram illustrating the experimental results of the data reporting method for semiconductor process equipment provided in the embodiments of this specification;

[0024] Figure 6A schematic diagram of the framework structure of another data reporting system provided for the implementation of this specification;

[0025] Figure 7 This is a schematic diagram of the structure of a computing device provided for the implementation of this specification. Detailed Implementation

[0026] Unless otherwise defined, the technical or scientific terms used in the embodiments of this specification shall have the ordinary meaning understood by one of ordinary skill in the art to which this specification pertains. The terms "first," "second," and similar terms used in the embodiments of this specification do not indicate any order, quantity, or importance, but are merely used to avoid confusion of constituent elements.

[0027] Unless the context otherwise requires, throughout this specification, "a plurality of" means "at least two," and "including" is interpreted as open-ended or encompassing, that is, "including, but not limited to." In the description of this specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this specification. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example.

[0028] The technical solutions in the embodiments of this specification will now be described with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments in this specification without inventive effort are within the scope of protection of this specification.

[0029] Overview

[0030] Taking data reporting in the semiconductor industry as an example, during the semiconductor device manufacturing process, the factory's clients need to obtain various data reported by the semiconductor process equipment through a data distribution server. This allows maintenance personnel to analyze the process progress and adjust process parameters based on the data. Because semiconductor device manufacturing is a precise process, it requires analyzing the large amount of data reported by the semiconductor process equipment to understand its status at various moments, laying the foundation for accurately grasping the process progress and adjusting process parameters.

[0031] In related technologies, reference Figure 1 , Figure 1The diagram illustrates the framework of a data reporting system during the semiconductor device manufacturing process. The CTC (Cluster Tool Controller) device can refer to the semiconductor process equipment, specifically the host computer of the semiconductor process equipment. The CTC device can receive or collect various data fed back by the slave computer, and report the semiconductor process equipment data to the data distribution server. The data distribution server then distributes the received semiconductor process equipment data to the corresponding factory client.

[0032] In some implementations, the data distribution server and the factory client can communicate based on the Equipment Data Acquisition (EDA) standard and the WCF (Windows Communication Foundation) communication framework. Similarly, the data distribution server and the CTC device communicate based on the EDA standard and the WCF communication framework. The EDA standard is a SEMI (Semiconductor Equipment and Materials International) standard designed to facilitate and improve communication between data acquisition software applications on factory clients and semiconductor process equipment. Factory clients use this standard to collect various data from semiconductor process equipment and then analyze this data to determine how to better improve productivity, process quality, and reduce costs.

[0033] The WCF communication framework is used to build service-oriented applications. It supports various communication protocols, data formats, and network transmission methods, helping developers create secure, reliable, and interoperable services. In EDA projects, WCF can be used as a means to achieve communication between devices and data exchange that conforms to EDA standards.

[0034] In related technologies, the data reporting process between the CTC device and the data distribution server can be referenced. Figure 2 ,exist Figure 2In this process, once the CTC device is started, the data distribution server connects to the started CTC device. Maintenance personnel can select the CTC device already connected to the data distribution server through the factory client. The factory client defines the required DCP (Data Collection Plan) for the CTC device according to the EDA standard and sends the DCP activation to the data distribution server. Upon receiving the DCP, the data distribution server initiates device software performance monitoring and sends a data reporting command to the corresponding CTC device, instructing it to report the data to be collected. The CTC device responds to the data reporting command, capturing performance parameter values ​​and other parameters as semiconductor process equipment data. It reports the performance parameter values ​​in real time based on a system timer (e.g., using a SystemThreading Timer). After receiving the reported performance parameter values, the data distribution server performs performance data processing.

[0035] The system thread timer is a class in the .NET Framework used to execute periodic or delayed tasks, located in the System.Threading (system thread) namespace. In related technologies, executing data reporting tasks based on the system thread timer may result in timeouts due to the timer frequency. Furthermore, triggering data reporting tasks based on the system thread timer may lead to thread queuing and thread switching, which in turn cause additional delays. Moreover, triggering data reporting tasks based on the system thread timer may result in multiple threads submitting duplicate reports. The reasons for these problems are analyzed in detail below:

[0036] The core of the system thread processing timer's operation is the ThreadPool. When the system thread processing timer's duration exceeds the set data reporting interval, it triggers a response event (data reporting task). Executing this response event requires requesting a thread from the thread pool. In other words, the system thread processing timer delegates the task of requesting threads to the thread pool. Every certain period (i.e., the data reporting interval mentioned earlier), the system thread processing timer informs the thread pool that a response event has been triggered and the corresponding data reporting function needs to be executed. The thread pool then requests thread resources from the device's operating system. If a thread is allocated, it will execute the data reporting function provided to the thread pool by the system thread processing timer on that thread, thus achieving data reporting.

[0037] However, the size of a thread pool is limited. Threads in the pool may be used to perform other tasks, which could lead to a situation where there are no idle threads in the pool when a data reporting task is triggered, resulting in a queue of waiting threads. The thread pool requests thread resources from the system at regular intervals. When the number of threads in the pool reaches its maximum, the requests submitted by the thread pool will remain in a queue, causing delays in data reporting and degrading its real-time performance. The longer the wait, the greater the delay. Furthermore, the system's thread processing timer is not single-threaded, and thread switching also incurs time overhead. Additionally, when the number of threads in the pool reaches its maximum, the pool may submit multiple requests. If multiple threads are released simultaneously, multiple threads may execute data reporting tasks concurrently, resulting in data from the same semiconductor process device being reported to the data distribution server by multiple threads at the same time. This could require the data distribution server to allocate excessive resources to receive and filter this identical data.

[0038] Furthermore, the timing of system timers in the .NET framework, such as system thread processing timers, is derived from the system's own timing mechanism, which can also lead to timing delays. In the system, the kernel initiates tick interrupts based on the operating system's timer frequency. The timer frequency represents the number of clock hardware tick interrupts generated per second, and the time corresponding to each tick interrupt is one second divided by the timer frequency. For example, for a computer with a timer frequency of 250Hz, this means 250 tick interrupts are generated per second, so one tick interrupt is 4ms. The timing of system thread processing timers depends on tick interrupts; that is, its timing duration can only be an integer multiple of one tick interrupt. When the data reporting interval is 10ms, at least 3 tick interrupts (12ms) are needed before the system thread processing timer considers data reporting necessary, causing the actual data reporting interval to change from 10ms to 12ms. This reduces the real-time performance of data reporting. Simultaneously, the thread queuing and thread switching mentioned above further increase data reporting latency, further degrading the real-time performance of data reporting.

[0039] To address this issue, the inventors discovered that a system time point can be obtained by calling a target function. Based on the system time point and a timed interval, it can be determined whether to trigger a reporting task. When the reporting task is triggered, a target thread is activated to report the semiconductor process equipment data. The timed interval is updated based on a set data reporting interval, and the process returns to retrieve the semiconductor process equipment data to be reported to the EDA server. Thus, by using the relationship between the system time point and the timed interval as the condition for triggering the reporting task, it eliminates the need to rely on the timer frequency of the CTC device's own system, avoiding timeouts caused by timer-based timing. This improves the real-time performance of the semiconductor process equipment data reporting method. Furthermore, by triggering a specific target thread to report semiconductor process equipment data when a reporting task is triggered, the method avoids delays caused by thread queuing and thread switching, further enhancing the real-time performance of the semiconductor process equipment data reporting method.

[0040] Based on the above concept, this specification provides a data reporting method for semiconductor process equipment. The data reporting method for semiconductor process equipment provided in this specification will be described exemplarily below with reference to the accompanying drawings.

[0041] Exemplary methods

[0042] To be applied Figure 3 Taking the CTC device of the data reporting system shown in the figure as an example, this specification provides a data reporting method for semiconductor process equipment, such as... Figure 3 As shown, the data reporting method for the semiconductor process equipment includes:

[0043] S301: Obtain semiconductor process equipment data to be reported to the EDA server;

[0044] Semiconductor process equipment data may include data transmitted from the lower-level machine of the semiconductor process equipment to the CTC device. In addition, it may also include data during the operation of the CTC device itself. This specification does not limit this, and it depends on the actual situation.

[0045] S302: Call the target function to obtain the system time point, which is used to characterize the system runtime;

[0046] The system time point can be the current system time. The system runtime can refer to the running time of the operating system on the CTC device since this startup, or it can refer to the cumulative runtime of the operating system on the CTC device. This manual does not limit this, and it depends on the actual situation.

[0047] The target function can refer to an operating system function on the CTC device side, whose purpose is to return the system time. In an optional implementation, the target function includes a system time function, which, when called, returns the time elapsed since the CTC device was started. This system time function includes, but is not limited to, the timeGetTime function. Obtaining the system time point through the system time function eliminates the need to compile the function manually, thus simplifying the method.

[0048] S303: Based on the timed time point and the system time point, determine whether to trigger the reporting task. If it is determined that the reporting task is to be triggered, trigger the target thread to report the semiconductor process equipment data. Based on the set data reporting interval, update the timed time point and return to the step of obtaining the semiconductor process equipment data to be reported from the EDA server.

[0049] The timed time point refers to the time point used to execute the reporting task. The timed time point can be a preset time point or an automatically generated time point. The interval between adjacent timed time points can be the same or different. This specification does not limit this and depends on the actual situation.

[0050] After obtaining the system time point returned by the objective function, the relationship between the system time point and the timing time point can be used to determine whether to trigger the reporting task. This eliminates the need to time based on the system's timer frequency, avoiding timeout reporting caused by timer frequency timing, and improving the real-time performance of data reporting methods for semiconductor process equipment.

[0051] Furthermore, the data reporting method for semiconductor process equipment, when triggering a reporting task, avoids delays caused by thread queuing and thread switching by triggering a specific target thread to report semiconductor process equipment data, thus improving the real-time performance of the data reporting method. Simultaneously, triggering a specific target thread to report semiconductor process equipment data also avoids the situation where multiple threads simultaneously report the same semiconductor process equipment data, preventing duplicate reporting of the same data.

[0052] In an alternative implementation, reference is still made to Figure 3 The data reporting method for the semiconductor process equipment further includes:

[0053] S304: When it is determined that the reporting task will not be triggered, after a predetermined time, return to the step of calling the target function to obtain the system time point, wherein the predetermined time is less than the data reporting interval.

[0054] In this embodiment, the timing duration is delayed by waiting for a predetermined time and then re-executing the target function to obtain the system time point.

[0055] Optionally, the step of returning to execute the target function to obtain the system time point after a predetermined time when it is determined that the reporting task will not be triggered includes:

[0056] If it is determined that the reporting task will not be triggered, a sleep task is executed. After the sleep task is completed, the process returns to the step of calling the target function to obtain the system time point.

[0057] The sleep task includes sleeping for the predetermined time.

[0058] Taking a C#-based operating system as an example, a sleep task can be executed using the Thread.Sleep method. Taking a JavaScript-based operating system as an example, a sleep task can be executed using the setTimeout function. This manual does not limit the specific implementation; the choice depends on the actual situation.

[0059] In an optional implementation, determining whether to trigger a reporting task based on a timed point and the system time point includes:

[0060] Determine whether the system time point is less than the scheduled time point. If not, determine whether to trigger the reporting task; if so, determine whether to not trigger the reporting task.

[0061] Assuming the system time and the timed time are represented by timestamps, when the system time is 1692788460 and the timed time is 1692788400, the system time is greater than the timed time, so the reporting task is triggered. Based on the set data reporting interval (assuming 2 minutes), the timed time is updated to 1692788520.

[0062] When the system time point is 1692788520 and the timer time point is 1692788580, the system time point is less than the timer time point. Then, after waiting for a predetermined time (e.g., 2ms), return to step S302 to reacquire the system time point.

[0063] In this embodiment, the need to trigger a reporting task can be determined by simply judging two time points. It is easy to execute, based on accurate timing and not dependent on the system's timer frequency.

[0064] To ensure that the objective function can be prioritized for execution by the CTC device, reducing the latency of reporting tasks and improving their real-time performance, in one embodiment, before triggering the target thread to report the semiconductor process equipment data, the following steps are also included:

[0065] The priority of the target thread is set to be greater than or equal to the priority threshold, and the priority of the thread is positively correlated with the priority of the CTC device in executing the thread.

[0066] In this embodiment, the priority of the target thread can be set to be greater than or equal to a priority threshold to ensure that the target thread can be scheduled for execution with priority, thereby ensuring the real-time performance of the reported task. Optionally, the priority threshold can be the highest priority, so that the priority of the target thread can be set to the highest priority to ensure that the target thread can be scheduled for execution with priority.

[0067] Taking an EDA server applied to a data reporting system as an example, this specification provides a data reporting method for semiconductor process equipment, which includes:

[0068] A data reporting instruction is sent to the CTC device, which instructs the CTC device to obtain semiconductor process equipment data to be reported to the EDA server. The CTC device then calls a target function to obtain a system time point, which represents the system runtime. Based on the timed interval and the system time point, it is determined whether to trigger a reporting task. If the reporting task is triggered, the target thread is triggered to report the semiconductor process equipment data. Based on the set data reporting interval, the timed interval is updated, and the process returns to the step of obtaining the semiconductor process equipment data to be reported to the EDA server.

[0069] In one embodiment, a feasible implementation of a data reporting method for semiconductor process equipment is provided. In this method, when the CTC device is started, a target thread for reporting semiconductor process equipment data can be created, and the priority of the target thread can be adjusted to the highest priority, so as to prioritize the acquisition of system resources and the execution of reporting tasks.

[0070] When the CTC device receives a data reporting instruction from the EDA server, it begins executing the data reporting method, updating the timer, calling the target function (e.g., the timeGetTime function) to obtain the system time, and determining whether the system time is greater than the timer. If so, the target thread is triggered to execute the reporting task, and based on the set data reporting interval, the timer is updated, and the process of calling the target function to obtain the system time is returned. If not, the target thread is put to sleep for a predetermined time, and the target function is called again to obtain the system time after the predetermined sleep time, and the comparison between the system time and the target time is performed again.

[0071] The following section compares and explains the data reporting method for semiconductor process equipment based on a system thread processing timer in related technologies with the data reporting method for semiconductor process equipment provided in the embodiments of this specification, using a data reporting interval of 10ms as an example.

[0072] refer to Figure 4 , Figure 4 The data reporting method for semiconductor process equipment based on system thread processing timer is shown in the related technology. The reporting interval and reporting thread number of each data report are shown. It can be found that the reporting interval between two data reports reaches a maximum of 22ms, which is more than twice the delay of the 10ms data reporting interval, and the reporting thread number jumps between 4 and 5.

[0073] refer to Figure 5 , Figure 5 The data reporting method for semiconductor process equipment provided in this specification shows the reporting interval and reporting thread number for each data report. It can be seen that the reporting interval between two data reports is stable at 10ms, and the reporting thread number is fixed at 3. That is, a target thread is used specifically for the execution of the reporting task, avoiding delays caused by thread queuing, thread switching, etc.

[0074] Exemplary device

[0075] In one exemplary embodiment of this specification, a data reporting device is also provided, applied to the CTC device terminal of a data reporting system, the data reporting device comprising:

[0076] The data acquisition module is used to acquire semiconductor process equipment data to be reported to the EDA server;

[0077] The function call module is used to call the target function to obtain the system time point, which is used to characterize the system runtime.

[0078] The data reporting module is used to determine whether to trigger a reporting task based on a timed time point and the system time point. When it is determined that the reporting task should be triggered, the target thread is triggered to report the semiconductor process equipment data. Based on the set data reporting interval, the timed time point is updated, and the process returns to the step of obtaining the semiconductor process equipment data to be reported from the EDA server.

[0079] In one exemplary embodiment of this specification, a data reporting device is also provided, applied to the EDA server of a data reporting system, the data reporting device comprising:

[0080] The instruction sending module is used to send a data reporting instruction to the CTC device, which instructs the CTC device to obtain semiconductor process equipment data to be reported to the EDA server; call the target function to obtain the system time point, which is used to characterize the system runtime; determine whether to trigger the reporting task based on the timed time point and the system time point; if it is determined that the reporting task should be triggered, trigger the target thread to report the semiconductor process equipment data; update the timed time point based on the set data reporting interval; and return to execute the step of obtaining the semiconductor process equipment data to be reported to the EDA server.

[0081] For specific limitations regarding the data reporting device, please refer to the limitations on data reporting methods for semiconductor process equipment mentioned above, which will not be repeated here. Each module in the aforementioned data reporting device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in or independent of the processor in the computer device in hardware form, or stored in the memory of the computer device in software form, so that the processor can call and execute the operations corresponding to each module.

[0082] Exemplary systems and computing devices

[0083] This specification also provides a data reporting system, such as... Figure 6 As shown, it includes: CTC device 701 and EDA server 702; wherein,

[0084] The EDA server 702 is configured to send a data reporting instruction to the CTC device 701.

[0085] The CTC device 701 is configured to: acquire semiconductor process equipment data to be reported to the EDA server 702; call a target function to obtain a system time point, which is used to characterize the system runtime; determine whether to trigger a reporting task based on a timed time point and the system time point; if it is determined that the reporting task should be triggered, trigger the target thread to report the semiconductor process equipment data; update the timed time point based on the set data reporting interval; and return to execute the step of acquiring semiconductor process equipment data to be reported to the EDA server.

[0086] Optionally, the CTC device includes: a host computer for semiconductor process equipment;

[0087] The EDA server includes: a data distribution server.

[0088] The data distribution server can connect to the factory client and transmit semiconductor process equipment data to the factory client.

[0089] This specification also provides a CTC device terminal in one embodiment, including: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the data reporting method for semiconductor process equipment as described in any of the above embodiments.

[0090] Another embodiment of this specification also provides a computing device, see [link to documentation]. Figure 7 As shown, an exemplary embodiment of this specification also provides a computing device, including: a memory and a processor, the memory storing a computer program, the processor executing the computer program to perform the steps in the data reporting method for semiconductor process equipment according to various embodiments of this specification described above.

[0091] The internal structure of the computing device can be as follows: Figure 7 As shown, the computing device includes a processor, memory, network interface, and input devices connected via a system bus. The processor provides computing and control capabilities. The memory includes a non-volatile storage medium and internal memory. The non-volatile storage medium stores an operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium. The network interface is used to communicate with external terminals via a network connection. When the computer program is executed by the processor, it follows the steps of the data reporting method for semiconductor process equipment according to various embodiments of this specification as described in the above embodiments.

[0092] The processor may include the main processor, as well as baseband chips, modems, etc.

[0093] The memory stores a program that executes the technical solution of this invention, and may also store an operating system and other critical business functions. Specifically, the program may include program code, which includes computer operation instructions. More specifically, the memory may include read-only memory (ROM), other types of static storage devices capable of storing static information and instructions, random access memory (RAM), other types of dynamic storage devices capable of storing information and instructions, disk storage, flash memory, etc.

[0094] The processor can be a general-purpose processor, such as a general-purpose central processing unit (CPU), a microprocessor, etc., or an application-specific integrated circuit (ASIC), or one or more integrated circuits used to control the execution of the program of the present invention. It can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), an off-the-shelf programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0095] Input devices may include devices that receive data and information input by the user, such as keyboards, mice, cameras, scanners, light pens, voice input devices, touch screens, pedometers, or gravity sensors.

[0096] Output devices may include devices that allow information to be output to the user, such as displays, printers, speakers, etc.

[0097] The communication interface may include any transceiver-like device for communicating with other devices or communication networks, such as Ethernet, Radio Access Network (RAN), Wireless Local Area Network (WLAN), etc.

[0098] The processor executes the program stored in the memory and calls other devices, which can be used to implement the various steps of the data reporting method for any semiconductor process equipment provided in the above embodiments of this specification.

[0099] The computing device may also include a display component and a voice component. The display component may be a liquid crystal display screen or an e-ink display screen. The input device of the computing device may be a touch layer covering the display component, or a button, trackball or touchpad set on the casing of the computing device, or an external keyboard, touchpad or mouse, etc.

[0100] Those skilled in the art will understand that Figure 7 The structures shown are merely block diagrams of some structures related to the solutions in this specification and do not constitute a limitation on the computing devices on which the solutions in this specification are applied. Specific computing devices may include more or fewer components than those shown in the figures, or combine certain components, or have different component arrangements.

[0101] Exemplary computer program products and storage media

[0102] In addition to the methods and devices described above, the data reporting method for semiconductor process equipment provided in the embodiments of this specification can also be a computer program product, which includes computer program instructions that, when executed by a processor, cause the processor to perform the steps in the data reporting method for semiconductor process equipment according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0103] The aforementioned computer program product can be implemented through hardware, software, or a combination thereof. In one optional embodiment, the computer program product is specifically embodied in a computer storage medium; in another optional embodiment, the computer program product is specifically embodied in a software product, such as a software development kit (SDK), etc.

[0104] The computer program product described herein can be written in any combination of one or more programming languages ​​to perform the operations of the embodiments described herein. These programming languages ​​include object-oriented programming languages ​​such as Java and C++, as well as conventional procedural programming languages ​​such as C or similar languages. The program code can be executed entirely on the user's computing device, partially on the user's computing device, as a standalone software package, partially on the user's computing device and partially on a remote computing device, or entirely on a remote computing device or server.

[0105] Furthermore, embodiments of this specification also provide a computer-readable storage medium having a computer program stored thereon, the computer program being executed by a processor of the steps in the data reporting method for semiconductor process equipment according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0106] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the methods described above. Any references to memory, storage, databases, or other media used in the embodiments provided in this specification can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), RAMbus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and RAMbus dynamic RAM (RDRAM), etc.

[0107] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0108] The embodiments described above are merely illustrative of several implementation methods outlined in this specification. While the descriptions are specific and detailed, they should not be construed as limiting the scope of the solutions provided in this specification. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this specification, and these all fall within the scope of protection of this specification. Therefore, the scope of protection for this patent should be determined by the appended claims.

Claims

1. A data reporting method for semiconductor process equipment, characterized in that, The data reporting method, applied to the CTC (Control Center) device terminal of a clustered device control program, is connected to the device data acquisition EDA (Electronic Data Acquisition) server. Obtain semiconductor process equipment data to be reported to the EDA server; Call the target function to obtain the system time point, which is used to characterize the system runtime; Based on the timed time point and the system time point, it is determined whether to trigger the reporting task. When it is determined that the reporting task should be triggered, the target thread is triggered to report the semiconductor process equipment data. Based on the set data reporting interval, the timed time point is updated, and the process returns to the step of obtaining the semiconductor process equipment data to be reported from the EDA server.

2. The method according to claim 1, characterized in that, Also includes: If it is determined that the reporting task will not be triggered, after a predetermined time, the step of returning to execute the target function to obtain the system time point is performed, wherein the predetermined time is less than the data reporting interval.

3. The method according to claim 2, characterized in that, The step of returning to execute the target function to obtain the system time point after a predetermined time, when it is determined that the reporting task will not be triggered, includes: If it is determined that the reporting task will not be triggered, a sleep task is executed. After the sleep task is completed, the process returns to the step of calling the target function to obtain the system time point. The sleep task includes sleeping for the predetermined time.

4. The method according to claim 3, characterized in that, The sleep task includes: You can perform a sleep task using the Thread.Sleep method, or by using the setTimeout function.

5. The method according to claim 1, characterized in that, The process of determining whether to trigger a reporting task based on a timed point and the system time point includes: Determine whether the system time point is less than the scheduled time point. If not, determine whether to trigger the reporting task; if so, determine whether to not trigger the reporting task.

6. The method according to claim 1, characterized in that, Before the target thread is triggered to report the semiconductor process equipment data, the method further includes: The priority of the target thread is set to be greater than or equal to the priority threshold, and the priority of the thread is positively correlated with the priority of the CTC device in executing the thread.

7. The method according to any one of claims 1 to 6, characterized in that, The objective function includes a system time function, which, when called, returns the elapsed time since the CTC device was started.

8. A cluster device control program (CTC) device terminal, characterized in that, include: A memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor, when executing the computer program, implements the data reporting method for a semiconductor process apparatus according to any one of claims 1 to 7.

9. A data reporting system for semiconductor process equipment, characterized in that, include: CTC device side and EDA server side; among them. The EDA server is configured to send a data reporting command to the CTC device. The CTC device is configured to: acquire semiconductor process equipment data to be reported to the EDA server; call a target function to obtain a system time point, which is used to characterize the system runtime; determine whether to trigger a reporting task based on a timed time point and the system time point; if the reporting task is triggered, trigger the target thread to report the semiconductor process equipment data; update the timed time point based on the set data reporting interval; and return to execute the step of acquiring semiconductor process equipment data to be reported to the EDA server.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program, which, when executed by a processor, implements the data reporting method for semiconductor process equipment according to any one of claims 1 to 7.

Images