Servo motor and semiconductor device

Abstract

The invention provides a servo motor and a semiconductor device. The servo motor includes a motor and an encoder. A shell of the motor is provided with a first vent hole. A stator of the motor is arranged in the shell. A rotating shaft of the motor is arranged in the shell and rotates under the electromagnetic action of the stator. The rotating shaft is partially hollow and is provided with a second vent hole for air to circulate in the first vent hole and the second vent hole. The encoder is arranged in the shell, detects rotation information of the motor and encodes the rotation information into a signal. And the accuracy and the service life of the encoder are maintained by the independent sealed space. In addition, the vent hole of the motor can be connected with a vacuumizing device to generate a negative pressure adsorption effect.

Description

Technical Field

[0001] This invention relates to motors, and more particularly to a servo motor for semiconductor process equipment. Background Technology

[0002] Currently, servo motors used in semiconductor processes have through holes on their shafts, allowing gas to pass from one side of the motor through the shaft to the other, thus achieving a vacuum adsorption effect. In addition, an encoder is installed inside the motor to control its speed.

[0003] Furthermore, the coating process environment in the semiconductor industry is filled with acidic and alkaline solutions and gases, but the encoder inside the motor needs to be kept clean to ensure accurate optical signals. Therefore, shaft seals are required between the front and rear output shafts and the motor housing to isolate contaminants and protect the encoder. Moreover, motor speeds have been increasing with market demand; however, increased speeds mean faster wear, aging, or deterioration of the shaft seals, leading to a decrease in their ability to isolate contaminants.

[0004] In view of this, the applicant has devoted himself to studying the aforementioned prior art and applying theoretical principles to try his best to solve the above-mentioned problems, which has become the target of the applicant's improvement. Summary of the Invention

[0005] One objective of this invention is to provide a servo motor that maintains the accuracy and lifespan of the encoder and can be connected to a vacuum device to generate a negative pressure adsorption effect.

[0006] To achieve the above objectives, the present invention provides a servo motor, including a motor and an encoder. The motor includes a housing, a stator, and a shaft. The housing has a first vent. The stator is disposed within the housing. The shaft is disposed within the housing and rotates under the electromagnetic influence of the stator. The shaft is partially hollow and has a second vent for gas to flow through the first and second vents. The encoder is disposed within the housing and detects the rotation information of the motor and encodes it into a signal.

[0007] To achieve the above objectives, the present invention provides a semiconductor device for adsorbing and moving a wafer. The semiconductor device includes a servo motor and a loading module. The loading module is fixed on the shaft of the servo motor and rotates on one side of the servo motor driven by the motor shaft. The wafer is adsorbed by negative pressure and rotates with the loading module.

[0008] In one embodiment of the present invention, the housing includes a rear cover for sealing the encoder, the rear cover being located on a rear side of the rotating shaft and not covering the first vent hole.

[0009] In one embodiment of the present invention, the rotating shaft includes a front shaft section, a middle shaft section and a rear shaft section. The front shaft section includes a hollow channel and is partially hollow, protruding out of the housing. The middle shaft section is provided with a second vent hole corresponding to the position of the stator, and the end of the second vent hole is connected to the hollow channel. The rear shaft section extends from the middle shaft section, and an encoder is attached to the end of the rear shaft section.

[0010] In one embodiment of the invention, the hollow channel is located at the center of the front axle section and extends from the front axle section to the middle axle section.

[0011] In one embodiment of the present invention, the central shaft section is provided with a groove, and the second vent is located in the groove.

[0012] In one embodiment of the present invention, there are multiple second vent holes, which are spaced apart in the central axis section and connected to the hollow channel.

[0013] In one embodiment of the present invention, the central axis section is provided with a corresponding second vent hole on the opposite side of the hollow channel.

[0014] In one embodiment of the present invention, the rotating shaft includes a rotor silicon steel sheet surrounding the inside of the stator and a plurality of magnets attached to the outside of the rotor silicon steel sheet.

[0015] In one embodiment of the present invention, a groove is provided in the middle section of the rotating shaft, the groove is provided on the rotor silicon steel sheet, and the second vent extends to the rotor silicon steel sheet and corresponds to the position of the groove.

[0016] Compared to conventional designs, the servo motor of this invention features a first vent in the housing and a partially hollow shaft with a second vent, allowing gas to flow through both vents. Furthermore, through this gas flow channel design, the encoder mounted on the shaft can form a seal within the housing without requiring additional sealing structures or a rear cover, thus simplifying and reducing the number of components and lowering costs. Additionally, the servo motor of this invention can employ a reflective encoder, offering advantages such as easy assembly and small size. Moreover, since the encoder is located in a closed space, it provides high sealing and reliability. Furthermore, due to the small size of the reflective encoder and its small contact area with the motor body, heat from the motor is not transferred to the encoder but can be directly dissipated to the outside, improving the motor's heat dissipation efficiency. Attached Figure Description

[0017] Figure 1 and Figure 2 This is a three-dimensional view of the servo motor of the present invention from both sides.

[0018] Figure 3 and Figure 4 This is a cross-sectional view of the servo motor of the present invention from both sides.

[0019] Figure 5 This is an exploded perspective view of the rotating shaft of the present invention.

[0020] Figure 6 This is a cross-sectional view of the rotating shaft of the present invention.

[0021] Figure 7 This is another embodiment of the servo motor of the present invention, in which a groove is provided on the rotating shaft.

[0022] Figure 8 This is another embodiment of the encoder for the servo motor of the present invention.

[0023] Figure 9 This is a schematic diagram illustrating the application of the servo motor of the present invention.

[0024] The attached figures are labeled as follows:

[0025] 1: Servo Motor

[0026] 2: Chip

[0027] 3: Loading Module

[0028] 10: Motor

[0029] 11: Shell

[0030] 111: First vent

[0031] 112: Back cover

[0032] 12: Stator

[0033] 13: Shaft

[0034] 130: Second vent

[0035] 131: Front axle section

[0036] 1311: Hollow passage

[0037] 132: Central section

[0038] 133: Rear axle section

[0039] 134: Groove

[0040] 135: Rotor silicon steel sheet

[0041] 136:Magnet

[0042] 20: Encoder

[0043] 22: Sensing elements and light sources

[0044] 23: Encoding disk

[0045] 1a: Servo motor

[0046] 10a: Motor

[0047] 11a: Shell

[0048] 111a: First vent

[0049] 12a: Stator

[0050] 13a: Shaft

[0051] 130a: Second vent

[0052] 20a: Encoder

[0053] 21a: Light source

[0054] 22a: Sensing element

[0055] 23a: Encoding disk Detailed Implementation

[0056] The detailed description and technical content of the present invention are explained below with reference to the accompanying drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit the present invention.

[0057] Please refer to Figure 1 and Figure 2 This is a perspective view of the servo motor of the present invention from both sides. The servo motor 1 of the present invention includes a motor 10 and an encoder 20. The encoder 20 is disposed inside the motor 10 to sense the rotation of the motor 10 and transmit signals. The structure of the servo motor 1 is described in more detail below.

[0058] Please refer to again Figure 3 and Figure 4 This is a cross-sectional view of the servo motor of the present invention from two sides. The motor 10 of the present invention includes a housing 11, a stator 12, and a rotating shaft 13. The housing 11 has a first vent 111 (see also...). Figure 2 The stator 12 is disposed within the housing 11. The rotating shaft 13 is disposed within the housing 11 and rotates under the electromagnetic influence of the stator 12. In this embodiment, the rotating shaft 13 is partially hollow and has at least one second vent hole 130. Furthermore, the second vent hole 130 connects to the first vent hole 111, allowing gas to flow through the first vent hole 111 and the second vent hole 130. It should be noted that the winding structure of the stator 12 in this invention is not shown for simplification.

[0059] It should be noted that the housing 11 is provided with a first vent 111 for connecting a vacuum device. The hollow portion of the rotating shaft 13 and the second vent 130 are provided to form a vacuum flow channel within the housing 11. Air inside the housing 11 can flow through the hollow portion of the rotating shaft 13 and be extracted from the first vent 111 after passing through the second vent 130.

[0060] In this embodiment, the housing 11 includes a rear cover 112 that seals the encoder 20. The rear cover 112 is located on a rear side of the rotating shaft 13 and is attached to an outer side of the encoder 20, and does not cover the first vent 111.

[0061] The encoder 20 is housed within the housing 11 and is used to detect the rotational information of the motor 10 and encode it into a signal. Specifically, the encoder 20 is a reflective encoder, comprising a sensing element and a light source 22, with the sensing element and light source 22 located on the same side as the encoder disk 23. Furthermore, the encoder 20 is located at one end of the rotating shaft 13, but this is not a limitation. It should be noted that the encoder 20 can also be configured as a through-type encoder, depending on the actual application requirements.

[0062] It should be noted that when encoder 20 is configured as a reflective encoder, it has advantages such as easy assembly and small size. Due to the small size of the reflective encoder and its small contact area with the motor body, the heat from the motor stator is not transferred to encoder 20 but is directly dissipated to the outside, thus improving heat dissipation. Furthermore, the encoder 20 is installed in a closed space with high sealing performance, protecting it from contamination by external objects and ensuring high reliability.

[0063] Please refer to another source. Figure 5 and Figure 6 This is an exploded perspective view and a cross-sectional view of the rotating shaft of the present invention. Please also refer to... Figure 3 and Figure 4 The rotating shaft 13 of the present invention includes a front shaft section 131, a middle shaft section 132, and a rear shaft section 133. The front shaft section 131 includes a hollow channel 1311 and is partially hollow, protruding from the housing 11. The middle shaft section 132 corresponds to the position of the stator 12 and is provided with a second vent hole 130, and one end of the second vent hole 130 communicates with the hollow channel 1311. The rear shaft section 133 extends from the middle shaft section 132, and an encoder 20 is connected to the end of the rear shaft section 133.

[0064] Specifically, the central shaft section 132 of the rotating shaft 13 is provided with a groove 134, and the second vent 130 corresponds to the position of the groove 134. Furthermore, there are multiple second vents 130. These multiple second vents 130 are spaced apart in the central shaft section 132 and respectively connect to the hollow channel 1311. In this embodiment, the hollow channel 1311 is located at the center of the front shaft section 131 and extends from the front shaft section 131 to the central shaft section 132. Furthermore, the central shaft section 132 has corresponding second vents 130 on the opposite side of the hollow channel 1311.

[0065] Furthermore, the rotating shaft 13 includes a rotor silicon steel sheet 135 surrounding the inner side of the stator 12 and a plurality of magnets 136 attached to the outside of the rotor silicon steel sheet 135. The rotor silicon steel sheet 135 and the magnets 136 are configured as a rotor structure and located at the position of the central shaft section 132, so as to generate rotation under the electromagnetic action of the stator 12. It should be noted that the rotor silicon steel sheet 135 is made of stacked thin silicon steel sheets to shorten the eddy current path and reduce eddy current losses. However, this is not a limitation in actual implementation.

[0066] Please continue reading. Figure 7 This is another embodiment of the servo motor of the present invention, in which a groove is provided on the shaft. As mentioned above, the servo motor 1 of the present invention has a groove 134 provided on the shaft 13, and the second vent 130 corresponds to the position of the groove 134. Compared to Figure 4 The groove 134 is located at the position of the central shaft section 132. Figure 7 The groove 134 is provided on the rotor silicon steel sheet 135, and the second vent 130 extends to the rotor silicon steel sheet 135 and corresponds to the position of the groove 134.

[0067] Please refer to again Figure 8 This is another embodiment of the encoder for the servo motor of the present invention. In this embodiment, the servo motor 1 includes a motor 10 and an encoder 20a. The motor 10 includes a housing 11, a stator 12 disposed within the housing 11, and a rotating shaft 13. The housing 11 has a first vent 111. The rotating shaft 13 is partially hollow and has at least one second vent 130. This embodiment is different from... Figure 3 The difference lies in the implementation of the encoder 20a. Figure 3 The encoder 20 is a reflective encoder, and its sensing element and the light source 22 encoder disk are located on the same side. Additionally, Figure 8 The encoder 20a is a through-type encoder, and its light source 21a, sensing element 22a and encoder disk 23a are located on different sides.

[0068] Please continue reading. Figure 9 This is a schematic diagram illustrating the application of the servo motor of the present invention. The servo motor 1 of the present invention can be used to adsorb a wafer 2 and drive the wafer 2 to rotate. In actual implementation, the servo motor 1 may include a holding module 3, and the holding module 3 is disposed on a rotating shaft 13 protruding from the housing 11. In addition, the holding module 3 may be a carrier such as a suction cup, and the interior of the holding module 3 has a flow channel design to connect to the hollow channel 1311 of the rotating shaft 13.

[0069] Since the hollow channel 1311 of the rotating shaft 13 of the present invention connects the second vent 130 and the first vent 111, when a vacuum device (not shown) is connected to the first vent 111 of the housing 11, the gas inside the housing 11 can flow through the hollow channel 1311 (hollow part) of the rotating shaft 13, and be extracted from the first vent 111 after passing through the second vent 130. Accordingly, a negative pressure will be formed inside the housing 11, and the holding module 3 (such as a suction cup) can produce an adsorption and fixation effect.

[0070] Accordingly, the container module 3 is fixed to the rotating shaft 13 of the servo motor 1 and rotates on one side of the servo motor 1 under the drive of the rotating shaft 13. Furthermore, the container module 3 can hold the wafer 2. The servo motor 1 can then rotate the wafer. It should be noted that the flow channel design of this invention achieves a vacuum effect, thereby generating a stable suction force from inside the servo motor, which in turn creates a negative pressure between the container module 3 and the wafer 2, preventing the container module 3, which is loaded by the servo motor 1, from failing to firmly hold the wafer 2, and thus avoiding coating process failure.

[0071] It is worth noting that the gas flow channel of the servo motor 1 of the present invention allows the air inside the housing 11 to flow through the hollow channel 1311 (hollow portion) of the rotating shaft 13, and is drawn out from the first vent 111 after passing through the second vent 130. Therefore, the gas inside the servo motor 1 of the present invention will not flow through the encoder 20, ensuring that the encoder 20 is not contaminated by air and maintains its accuracy.

[0072] The above description is only a preferred embodiment of the present invention and is not intended to define the patent scope of the present invention. Other equivalent variations that utilize the patent spirit of the present invention should all fall within the patent scope of the present invention.

Claims

1. A servo motor, comprising: A motor, including: A housing having a first vent. A certain element is disposed within the housing; and A rotating shaft, disposed within the housing and rotated by the electromagnetic force of the stator, is partially hollow and has at least one second vent hole for gas to flow through the first vent hole and the second vent hole; and An encoder, located inside the housing, detects the rotation information of the motor and encodes it into a signal.

2. The servo motor of claim 1, wherein the housing includes a rear cover that seals the encoder, the rear cover being located on a rear side of the shaft and not covering the first vent.

3. The servo motor as claimed in claim 1, wherein the shaft comprises a front shaft section, a middle shaft section and a rear shaft section, the front shaft section includes a hollow channel and is partially hollow, and protrudes from the housing, the middle shaft section is provided with the second vent hole corresponding to the stator position, and one end of the second vent hole communicates with the hollow channel, the rear shaft section extends from the middle shaft section, and the encoder is connected to the end of the rear shaft section.

4. The servo motor of claim 3, wherein the hollow channel is located at the center of the front axle section and extends from the front axle section to the middle axle section.

5. The servo motor as claimed in claim 3, wherein the central shaft section is provided with a groove, and the second vent hole corresponds to the position of the groove.

6. The servo motor as claimed in claim 3, wherein there are multiple second vent holes, and the multiple second vent holes are spaced apart in the central shaft section and connected to the hollow channel.

7. The servo motor as claimed in claim 6, wherein the central shaft section is provided with a corresponding second vent on the opposite side of the hollow channel.

8. The servo motor of claim 1, wherein the shaft comprises a rotor silicon steel sheet surrounding the inside of the stator and a plurality of magnets attached to the outside of the rotor silicon steel sheet.

9. The servo motor as claimed in claim 8, wherein a groove is provided in the middle section of the shaft, the groove is provided on the rotor silicon steel sheet, and the second vent extends to the rotor silicon steel sheet at the position corresponding to the groove.

10. A semiconductor device for driving a wafer, the semiconductor device comprising: A servo motor as described in any one of claims 1 to 9; and A loading module is fixed on a rotating shaft of the servo motor. The loading module is driven by the rotating shaft of the servo motor to rotate on one side of the servo motor. The wafer is attracted by negative pressure and rotates with the loading module.

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