Process recipe updating method and device, and computer device

Abstract

Embodiments of the present application disclose a process recipe updating method and device and a computer device. Embodiments of the present application can display a process recipe updating page of a process recipe management system, the process recipe updating page comprising a plurality of object identifiers, the plurality of objects comprising the process recipe management system and at least one semiconductor device in communication connection with the process recipe management system, and the objects storing a process recipe set. In response to a selection operation on a first object identifier, a plurality of process recipe identifiers contained in the first object are displayed. In response to a selection operation on at least one first target process recipe identifier of the first object, a first target process recipe to be transmitted is determined. In response to an updating operation on the first target process recipe, the first target process recipe is transmitted to at least one second object, and updating state information is displayed on the process recipe updating page, thereby efficiently synchronizing the process recipe among the plurality of semiconductor devices.

Description

Technical Field

[0001] This application relates to the semiconductor field, specifically to a method, apparatus, and computer equipment for updating process formulations. Background Technology

[0002] Semiconductor equipment is one of the key infrastructures in semiconductor manufacturing. To meet the demands of highly automated and complex processes, manufacturing plants typically deploy a large number of identical pieces of equipment. These devices rely on thousands of process recipes as the core of their stable operation. Due to differences in processes, production batches, and different stages of actual production, engineers need to continuously update these process recipes. Currently, the mainstream method for synchronizing and updating process recipes across multiple devices still relies on copying them using USB drives. This method is not only inefficient but also poses significant information security risks. Summary of the Invention

[0003] This application provides a method, apparatus, and computer equipment for updating process formulas, which can improve the efficiency and security of process formula updates.

[0004] This application discloses a method for updating a process formulation, including:

[0005] Display the process recipe update page of the process recipe management system. The process recipe update page includes multiple object identifiers. The multiple objects include the process recipe management system and at least one semiconductor device that establishes a communication connection with the process recipe management system. The objects store a set of process recipes.

[0006] In response to a selection operation on a first object identifier, multiple process recipe identifiers contained in the first object are displayed;

[0007] In response to a selection operation for at least one first target process recipe identifier for the first object, a first target process recipe to be transmitted is determined;

[0008] In response to an update operation for the first target process recipe, the first target process recipe is transmitted to at least one second object, and update status information is displayed on the process recipe update page.

[0009] This application discloses a process formula updating device, comprising:

[0010] The update page display module is used to display the process recipe update page of the process recipe management system. The process recipe update page includes multiple object identifiers. The multiple objects include the process recipe management system and at least one semiconductor device that establishes a communication connection with the process recipe management system. The objects store a set of process recipes.

[0011] The process recipe display module is used to display multiple process recipe identifiers contained in the first object in response to a selection operation on the first object identifier;

[0012] The first formulation module is configured to determine the first target process formulation to be transmitted in response to a selection operation of at least one first target process formulation identifier for the first object.

[0013] The first update module is configured to, in response to an update operation for the first target process recipe, transmit the first target process recipe to at least one second object and display update status information on the process recipe update page.

[0014] In some embodiments of this application, the process recipe display module can be used for:

[0015] In response to a selection operation for a first object identifier and a selection operation for at least one second object identifier, a comparative analysis is performed on the process formula sets of the first object and the second object, and multiple formula analysis results are displayed on the process formula update page. The formula analysis results include comparison results of process formula identifiers that are only present in the first object or only in the second object, and process formula identifiers that are present in both the first object and the second object.

[0016] In some embodiments of this application, the process formula updating device further includes a second formula module and a second updating module, wherein,

[0017] The second formulation module is used to determine the second target process formulation to be transmitted in response to a selection operation of at least one second target process formulation identifier for the second object.

[0018] The second update module is used to transmit the second target process formula to the first object in response to the update operation for the second target process formula, and to display update status information on the process formula update page.

[0019] In some embodiments of this application, the process formula update page further includes multiple category controls, each category control corresponding to a comparison result, and the first update module can be specifically used for:

[0020] In response to a trigger operation targeting a target category control, all candidate process formulations corresponding to the target comparison results are determined, and the candidate formulation analysis results for each candidate process formulation are displayed on the process formulation update page.

[0021] In response to the selection operation of the first target process formulation identifier in the candidate formulation analysis results, the first target process formulation to be transmitted is extracted from the process formulation set of the first object;

[0022] The second update module can be specifically used for:

[0023] In response to the selection operation of the second target process formulation identifier in the candidate formulation analysis results, the second target process formulation to be transferred is extracted from the process formulation set of the second object.

[0024] In some embodiments of this application, the comparison results include a first result indicating that the two process formulations are the same, a second result indicating that the two process formulations are different, and a third result indicating that the two process formulations are the same only in terms of key parameter information or attribute information.

[0025] In some embodiments of this application, the process formulation includes multi-level classification, and the process formulation display module can be used for:

[0026] In response to a selection operation on a first object identifier and a selection operation on at least one second object identifier, a comparative analysis is performed on the process recipe sets of the first and second objects, and the multi-level dataset analysis results are displayed on the process recipe update page. The dataset analysis results include the analysis results of the process recipe set and the analysis results of the process recipe subsets corresponding to each level of classification.

[0027] In response to a triggered action based on the analysis results of the target dataset, multiple formulation analysis results from the process formulation set or the target process formulation subset are displayed on the process formulation update page.

[0028] In some embodiments of this application, the process recipe updating device further includes a first backup module, used for:

[0029] From the target process recipe identifier and all process recipe identifiers in the process recipe set of the second object, find the same process recipe identifier that both the first object and the second object have, and save the same process recipes in the process recipe set of the second object to construct a backup recipe set for the second object.

[0030] In some embodiments of this application, the process recipe update page further includes a history control, and the process recipe update device further includes:

[0031] The history display module is used to display at least one historical update record in response to a trigger operation on the history control;

[0032] The history view module is used to respond to the viewing operation of historical update records and display the update status information of the process formula corresponding to the historical update record.

[0033] In some embodiments of this application, the process formula updating device further includes:

[0034] The second backup module is used to search for a first process recipe identifier that only the first object has in the target process recipe identifier corresponding to the first object and all process recipe identifiers corresponding to the second object, and save the first process recipe identifier to construct a backup recipe set for the second object.

[0035] The rollback module is used to respond to rollback operations for historical update records, control the second object to delete the first process recipe in its own process recipe set based on the first process recipe identifier in the backup recipe set, and update its own process recipe set with the same process recipe in the backup recipe set, so that the process recipe set of the target object is rolled back to the state before the update.

[0036] In some embodiments of this application, the history display module may be specifically used for:

[0037] In response to a trigger operation on the history control, a history search area and a history display area are displayed on the process recipe update page. The history search area includes at least one filter control, which includes an update time control and an update type control.

[0038] In response to an input operation to the filter control, at least one set of target filter data is determined, including the start update time, end update time, and target update type.

[0039] Filter historical update records that match the target filter data, and display the historical update records in the history display area.

[0040] In some embodiments of this application, the process recipe updating device further includes a user management module, used for:

[0041] The user management page of the administrator account of the process formulation management system is displayed. The user management page includes at least one user information of the process formulation system.

[0042] In response to a selection operation targeting a user, the system displays the user's current account type and the authorized function modules within the process formulation management system.

[0043] In response to adjustments made to the account type of the target user, update the display of the target user's account type;

[0044] In response to the operation permission adjustment operation for the target user, update and display the operation function modules that the target user has permission to perform.

[0045] Accordingly, this application also provides a computer device, including a processor and a memory, wherein the memory stores a computer program, and the processor is used to run the computer program in the memory to implement the steps in the process formula update method provided in this application.

[0046] Accordingly, embodiments of this application also provide a computer-readable storage medium having a computer program stored thereon, wherein the computer program is executed by a processor to implement the steps in the process formula update method provided in embodiments of this application.

[0047] Accordingly, embodiments of this application also provide a computer program product, including a computer program or instructions, which are executed by a processor to implement the steps in the process formula update method provided in embodiments of this application.

[0048] This application embodiment can display a process recipe update page of a process recipe management system. The process recipe update page includes multiple object identifiers. The multiple objects include the process recipe management system and at least one semiconductor device that has established a communication connection with the process recipe management system. The objects store a set of process recipes. In response to a selection operation for a first object identifier, multiple process recipe identifiers contained in the first object are displayed. In response to a selection operation for at least one first target process recipe identifier of the first object, a first target process recipe to be transmitted is determined. In response to an update operation for the first target process recipe, the first target process recipe is transmitted to at least one second object, and update status information is displayed on the process recipe update page. This application performs unified data management through the process recipe management system. Target process recipes for synchronization can be selected from the management system's local storage or from semiconductor devices that have established a communication connection with the management system. The management system controls automatic data synchronization between devices, significantly improving data synchronization efficiency and security. Attached Figure Description

[0049] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0050] Figure 1 This is a schematic diagram illustrating an application scenario of the process formula update method provided in the embodiments of this application;

[0051] Figure 2 This is a schematic flowchart of the process formula update method provided in the embodiments of this application;

[0052] Figure 3 This is a schematic diagram of the page operation of the process formula update method provided in the embodiments of this application;

[0053] Figure 4 This is another page operation diagram of the process formula update method provided in the embodiments of this application;

[0054] Figure 5 This is another page operation diagram of the process formula update method provided in the embodiments of this application;

[0055] Figure 6 This is another page operation diagram of the process formula update method provided in the embodiments of this application;

[0056] Figure 7 This is another page operation diagram of the process formula update method provided in the embodiments of this application;

[0057] Figure 8 This is another page operation diagram of the process formula update method provided in the embodiments of this application;

[0058] Figure 9 This is another page operation diagram of the process formula update method provided in the embodiments of this application;

[0059] Figure 10 This is a schematic diagram of the structure of the computer device provided in the embodiments of this application. Detailed Implementation

[0060] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0061] The terms “first,” “second,” “third,” “fourth,” etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms “comprising” and “corresponding,” and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0062] This application discloses a process recipe update method applied to a process recipe management system, comprising: displaying a process recipe update page of the process recipe management system, the process recipe update page including multiple object identifiers, the multiple objects including the process recipe management system and at least one semiconductor device that establishes a communication connection with the process recipe management system, the objects storing a set of process recipes; in response to a selection operation for a first object identifier, displaying multiple process recipe identifiers contained in the first object; in response to a selection operation for at least one first target process recipe identifier of the first object, determining a first target process recipe to be transmitted; in response to an update operation for the first target process recipe, transmitting the first target process recipe to at least one second object, and displaying update status information on the process recipe update page.

[0063] The process recipe update method of this application is applied between a process recipe management system and multiple semiconductor devices. Semiconductor devices typically include computing and control systems, which include computer devices with computing functions. The process recipe management system of this application can be integrated into a semiconductor device or a computer device that performs other functions within a manufacturing plant, or it can be integrated into a separately set up computer device. The process recipe update between semiconductor devices and the process recipe management system / other semiconductor devices can be understood as data flow occurring between computer devices / between different local storage areas of computer devices.

[0064] Computer devices can include terminals, servers, etc. Terminal device types include, but are not limited to, at least one of: smartphones, tablets, wearable devices, personal computers (PCs), laptops, and desktop computers. Those skilled in the art will understand that the number of the aforementioned terminals can be more or less. This application does not limit the number or type of terminals.

[0065] A server can be a standalone physical server, a server cluster or distributed system composed of multiple physical servers, or a cloud server that provides cloud computing services such as cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, content delivery networks (CDN), and basic cloud computing services such as big data and artificial intelligence platforms.

[0066] In this embodiment of the application, computer devices can be connected via wired or wireless networks. In the manufacturing plant, each computer device is deployed on an internal local area network.

[0067] For example, Figure 1The system architecture diagram of the process recipe update method according to the embodiment of this application is disclosed. The process recipe management system integrated in computer device 1 and semiconductor devices 1, 2 and 3 are deployed in the same network. Computer device 1 and semiconductor devices 1, 2 and 3 are respectively connected to each other. Computer device 1 and semiconductor devices 1, 2 and 3 all store process recipe sets. The process recipe sets can be stored in a database. The database can be deployed locally on the device or on a server. The specific settings can be flexibly configured according to the application scenario. This application does not impose any restrictions on this.

[0068] For example, computer device 1 displays the process recipe update page of the process recipe management system. The process recipe update page includes the identifier of the process recipe management system and the identifiers of semiconductor devices 1, 2, and 3. In response to the user's trigger operation on the identifier of semiconductor device 1, computer device 1 displays the identifiers of multiple process recipes in the process recipe set of semiconductor device 1. In response to the user's trigger operation on the identifier of all process recipes, it determines all target process recipes to be transmitted. In response to the user's trigger operations on the identifiers of semiconductor devices 2 and 3, as well as the trigger operation on the update of target process recipes, computer device 1 transmits the target process recipes to semiconductor devices 2 and 3 respectively, and displays the update status information on the process recipe update page.

[0069] The method for updating the process formulation in this application will be described in detail below. Figure 2 The flowchart of the process formulation update method of this application is disclosed, specifically:

[0070] Step 110: Display the process recipe update page of the process recipe management system. The process recipe update page includes multiple object identifiers. The multiple objects include the process recipe management system and at least one semiconductor device that has established a communication connection with the process recipe management system. The objects store process recipe sets.

[0071] In this embodiment, the process recipe management system can manage process recipes. Specifically, it can save various versions of process recipes locally, update process recipes to semiconductor devices, and control process recipe updates between semiconductor devices. The process recipe management system provides an operation page and supports simple and clear operation logic, making it easy for users to quickly and flexibly update process recipes according to current needs.

[0072] Operation pages, such as the process recipe update page, can display identifiers for objects such as the process recipe management system and semiconductor equipment that has established a communication connection with the process recipe management system. Object identifiers can include unique identifiers and can be presented in various forms, such as characters, icons, images, and controls. The first object identifier can include the identification information of the object providing the update data, and the second object identifier can include the identification information of the object receiving the update data.

[0073] Semiconductor equipment encompasses precision instrument systems covering the entire process of chip manufacturing, packaging, and testing. It includes process recipe sets, which are the sets of instructions and parameters that drive the operation of semiconductor equipment. Testing equipment includes film thickness / critical dimension measurement equipment, defect detection equipment, overlay error detection equipment, and optoelectronic property testing equipment.

[0074] There are multiple ways to display and select multiple object identifiers. For example, you can set a first object selection area and a second object selection area, and display all object identifiers in both areas. Operators can directly select the first object identifier in the first object selection area or the second object identifier in the second object selection area. Alternatively, you can display all object identifiers in the object selection area, and then set up controls for the first object, the second object, and subsequent operations, etc., and select the first object identifier and the second object identifier by combining the selection of the target identifier and the trigger control.

[0075] In this application embodiment, one first object identifier and one or more second object identifiers can be selected. Therefore, single selection and / or multi-selection functions can be implemented based on radio / checkbox, radio / check button, drop-down selection box, toggle switch, etc. The actual selection and setting method can be flexibly implemented according to the needs and is not limited here.

[0076] In this embodiment of the application, after the computer device starts the process recipe management system, it can attempt to initiate communication requests to various semiconductor devices and display the identifiers of the semiconductor devices that have established communication connections on the process recipe process page. Of course, all semiconductor devices that the process recipe management system has management authority can also be displayed here, and the semiconductor devices that have established communication connections can be highlighted by icons, highlighting, etc.

[0077] In this embodiment, the process recipe set can be stored locally on the process recipe management system / semiconductor device, or it can be stored on other computer devices (such as servers) connected to the process recipe management system / semiconductor device. The process recipe set can exist in various forms such as files (such as those stored in folders), tables or collections in databases, and memory data structures, and can be flexibly selected according to specific needs.

[0078] For example, see Figure 3 , Figure 3 The flowchart shows the process recipe update process management system. The user first triggers the drop-down menu on the left side of the process recipe update page. The drop-down menu includes objects that can provide update data: process recipe management system local (i.e., Local) and devices 001-004 that have established a communication connection with the process recipe management system. The user selects Local as the first object.

[0079] In this embodiment, to enhance the security of the process formula management system and ensure the orderly management and updating of process formulas, access control can be implemented for system accounts. For example, if an account logging into the process formula management system wants to update a process formula, the administrator account needs to set operation permissions for it in advance. In this embodiment, the process formula management system can implement functions such as process matching formula comparison, viewing historical records, and update rollback through modules. Therefore, the administrator can set operation permissions by setting module / submodule permissions.

[0080] Specifically, the system can display the user management page of the administrator account of the process formulation management system, which includes at least one user information of the process formulation system; in response to a selection operation for a target user, it can display the target user's current account type and the operation function modules that the target user has permission to operate in the process formulation management system; in response to an operation to adjust the target user's account type, it can update the display of the target user's account type; and in response to an operation to adjust the target user's operation permissions, it can update the display of the operation function modules that the target user has permission to operate.

[0081] See Figure 4 The user management page of the administrator account in the process formula management system can display the registered user information. As shown in the figure, the administrator can adjust the role level of the selected user 2, and can also set operation permissions for specific modules / sub-modules. As shown in the figure, the role level of user 2 is unauthorized, and the role permissions include sub-modules 3-5.

[0082] Step 120: In response to the selection operation for the first object identifier, display the multiple process recipe identifiers contained in the first object.

[0083] In this embodiment, after selecting the first object providing updated data, the identifiers of multiple process recipes included in the process recipe set of the first object can be displayed. The process recipes are categorized at multiple levels. To improve display efficiency, the process recipes can be displayed hierarchically according to their relationship. A search control can be set to facilitate quick searching of specific process recipes. A filter control can also be set to facilitate filtering a batch of process recipes that meet preset conditions. A display rule control can also be set, specifically, options such as update time, general options, and memory options, to display the identifiers and / or update times, memory sizes, etc., of each process recipe according to different rules.

[0084] The selection operation here can be implemented in various ways, such as triggering a button, triggering a switch, or selecting an icon in a radio button / checkbox, as mentioned above. In some embodiments, the selection operation can also be implemented based on technologies such as speech recognition and computer vision, through voice or body movements, to further improve the flexibility of operation.

[0085] After the computer device responds to the selection operation, it can retrieve the process recipe identifier set of the first object from the local computer or other computer devices and display it on the process recipe update page. Here, the process recipe management system can pre-store the process recipe identifier set of the first object, or it can send a request message to the first object and receive the process recipe identifier set returned by the first object based on the request message.

[0086] For example, see Figure 3 When a user selects Local, the process recipe update page displays the identifiers of each process recipe in the local process recipe set.

[0087] In this embodiment of the application, the second object identifier can be selected / modified before the update operation is triggered, and the timing is very flexible, such as before selecting the first object identifier, before selecting the target process formula identifier, and after selecting the target process formula identifier.

[0088] In some embodiments of this application, after selecting the first object identifier and the second object identifier, the process formula set of the first object and the process formula set of each second object can be compared respectively, and the comparison analysis results of the first object and each second object can be displayed.

[0089] The process formulation includes multi-level classification, which can divide the process formulation set into multi-level subsets. The comparative analysis results can include the entire process formulation set, each level of subset, and the comparison results between two process formulations. The comparative analysis results can also be displayed hierarchically, or specific comparative analysis results can be viewed directly through pre-setting, setting controls, etc.

[0090] Specifically, the comparative analysis results of two process formulation sets / subsets can include the number of process formulations for each set, the number / proportion of identical and different process formulations, etc.

[0091] For example, in response to a selection operation on a first object identifier and a selection operation on at least one second object identifier, a comparative analysis of the process formula sets of the first object and the second object can be performed, and multiple formula analysis results can be displayed on the process formula update page. The formula analysis results include comparison results of process formula identifiers that are only present in the first object or only in the second object, and process formula identifiers that are present in both the first object and the second object.

[0092] See Figure 5The process recipe update page displays a list of equipment, including: local process recipe management system, equipment xxxx, equipment zzzz, and equipment aaaa. When the user selects equipment xxxx and equipment aaaa and triggers the comparison button, the process recipe update page displays the recipe analysis results of each process recipe in the process recipe sets of the two equipment, including the same recipe 2, different recipes 3, approximately equal recipes 4, recipes 5-8 that are only available for equipment xxxx, and recipes 9-11 that are only available for equipment aaaa.

[0093] For example, in response to a selection operation on a first object identifier and a selection operation on at least one second object identifier, a comparative analysis of the process formula sets of the first and second objects can be performed, and the multi-level dataset analysis results can be displayed on the process formula update page. The dataset analysis results include the analysis results of the process formula set and the analysis results of the process formula subsets corresponding to each level of classification. In response to a trigger operation on the analysis results of the target dataset, multiple formula analysis results from the process formula set or the target process formula subset can be displayed on the process formula update page.

[0094] The process formula update page here can directly display the analysis results of the process formula set, as well as the analysis results of the process formula subsets corresponding to each level of classification; alternatively, it can first display the analysis results of the process formula set, and set up a control for displaying the next level subset. When the operator triggers the control for displaying the next level subset, the process formula update page displays the analysis results of the next level subset.

[0095] When an operator triggers the analysis results of a process formula set / subset, the process formula update page can display multiple formula analysis results from that process formula set / subset.

[0096] See Figure 6 The process recipe update page displays a list of equipment, including: Local (process recipe management system), Equipment xxxx, Equipment zzzz, and Equipment aaaa. When the user selects Equipment xxxx and Equipment aaaa and triggers the comparison button, the process recipe update page displays the analysis results of the process recipe sets for both equipment: the total number of recipes in each process recipe set, and, through user-triggered hierarchical display, the total number of each subset (a collection of recipes from different subcategories), the number of identical recipes, and the number of different recipes (compared to the other equipment). Users can trigger controls next to the dataset / subset to view all recipe analysis results contained within it, such as... Figure 6 When the operator triggers the details button next to recipe subclass 1, the process recipe update page displays the analysis results of multiple recipes contained in this subset.

[0097] For example, it can also respond to the selection operation for the first object identifier and the selection operation for at least one second object identifier, and perform comparative analysis on the process formula sets of the first object and the second object, displaying multiple analysis result options on the process formula update page, such as overall comparison option, comparison option for each level of subset, and item-by-item comparison option, and display the target analysis result in response to the selection operation for the target analysis result option.

[0098] As can be seen from the above, the process formula management system can respond to user operations, compare and analyze the process formula sets of the first and second objects, and display multiple formula analysis results directly or based on user operations on the process formula update page.

[0099] Specifically, each formulation analysis result includes a comparison of process formulation identifiers that are only present in the first object or the second object, and process formulation markers that are present in both the first object and the second object. The comparison results may include a first result indicating that the two are the same, a second result indicating that the two are different, and a third result indicating that the two are the same only in key parameter information or attribute information.

[0100] Comparison results can be presented using icons, characters, or color / font differences. Multiple formula analysis results can be displayed in layouts such as tables or cards.

[0101] Due to the large number of process formulas, in order to facilitate finding the analysis results of a specific formula, the process formula update page can also include multiple category controls corresponding to different comparison results, a first control indicating that the first object has a process formula that the second object does not, a second control indicating that the first object does not have a process formula that the second object has, conditional filter controls, search controls, etc.

[0102] For example, in response to a trigger operation on the first category control corresponding to the first result, the process formula management system can update the displayed content, showing only the first result that has the process formula identifier shared by both the first and second objects. Figure 7 The operator triggers a button that is not equal to the function button. The process recipe update page only displays information about Recipe 3 that both xxxx and aaaa have but are not equal.

[0103] For example, in response to a trigger operation on the first control, the process recipe management system can update the displayed content, showing only all process recipe identifiers that are unique to the first object. Figure 8 When the operator triggers the left button (i.e., the first control), the process recipe update page only displays information for Recipes 5-8 that xxxx has. The All button in the upper left corner of the page is used to display all recipes.

[0104] Step 130: In response to the selection operation of at least one first target process recipe identifier for the first object, determine the first target process recipe to be transmitted.

[0105] In this embodiment, selection controls can be set next to each process formula identifier, each process formula set / subset identifier, the first control, and the second control. Selection controls for the first object or the second object can also be set next to the filter control, the search control, and the multiple category controls, thereby providing multiple selection methods including selecting individual process formulas, selecting process formula subsets, selecting the entire process formula set, and selecting a portion of the process formulas in batches.

[0106] For example, see Figure 3 Users can select the process recipes to be synchronized: Recipe2 and Recipe3, and can also select the second objects to be updated: Device 003 and Device 002. In some embodiments of this application, the process recipe management system can respond to display operations on a subset of process recipes, trigger operations on filter controls, search controls, first controls, second controls, multiple category controls, etc., to display partial recipe analysis results on the process recipe update page, and then respond to the selection operation on the target process recipe identifier (such as by triggering a selection control) to determine the target process recipe to be transmitted. For example, in response to the trigger operation on the target category control, all candidate process recipes corresponding to the target comparison results are determined, and the candidate recipe analysis results of each candidate process recipe are displayed on the process recipe update page; in response to the selection operation on the target process recipe identifier of the first object in the candidate recipe analysis results, the target process recipe to be transmitted is extracted from the process recipe set of the first object; in response to the selection operation on the target process recipe identifier of the second object in the candidate recipe analysis results, the target process recipe to be transmitted is extracted from the process recipe set of the second object.

[0107] See Figure 8 When the operator triggers the left button, the process formula can be screened once. The process formula update page can display information for Recipes 5-8. When the operator selects Recipe 6 and triggers the update button, the process formula management system can send information to xxxx to instruct it to transmit Recipe 6 to aaaa. After receiving the relevant information sent by xxxx or aaaa, the formula analysis results will be updated on the page.

[0108] In some embodiments of this application, the process formula update page can also view the details of each formula analysis result. The process formula itself includes multiple parameters, and the process formula also includes attribute information such as identifier, creation / modification time, storage address, and file name. The formula analysis result can include the analysis of the parameters and attribute information of two process formulas one by one, and display the comparison results of the same / different / nearly the same. By triggering the details control, the comparison of each parameter and attribute information can also be viewed on the details page of the formula analysis result.

[0109] In some embodiments of this application, a comparison control can also be set on the process formula update page that displays multiple formula analysis results. The operator can select the identifiers of two process formulas and trigger the comparison control. The page can then update to display a details page showing the comparison results of the parameters and attribute information of the two process formulas one by one.

[0110] If two process formulas come from the first object and the second object respectively, the details page can also set up bidirectional update controls. When the user triggers different update controls, the process formula management system can synchronize the process formula of the first object to the second object, or synchronize the process formula of the second object to the first object.

[0111] Step 140: In response to the update operation for the first target process recipe, transmit the first target process recipe to at least one second object and display update status information on the process recipe update page.

[0112] The update status information may include the update progress of all target process formulations, the update status of each target process formulation (pending update, update successful, update failed, etc.), and the update time.

[0113] For example, see Figure 3 When the operator triggers the start update button, the process recipe management system transmits the target process recipe to devices 002 and 003 locally, and displays the update progress bar and the update status of each process recipe update task.

[0114] In some embodiments of this application, the process formulation management system displays multiple formulation analysis results while also supporting bidirectional data updates on the process formulation update page. Users can select a first target process formulation identifier for a first object or a second target process formulation identifier for a second object within the formulation analysis results. The process formulation management system can then determine and transmit the first target process formulation to the second object, or determine and transmit the second target process formulation to the first object. This allows operators to quickly update process formulations between objects based on the analysis results, making the process more convenient and efficient. This can be implemented in various ways; for example, the process formulation management system can collect and recognize the user's voice, actions, etc., to determine the selected target process formulation identifier, the update command issued by the user, etc., and automatically perform target process formulation updates for the first or second object.

[0115] For example, a two-way data update control can be set. The first data update control can be used to trigger the update of the process formula of the first object to the second object, and the second data update control can be used to trigger the update of the process formula of the second object to the first object. At this time, if the operator selects at least one target process formula of the first object and triggers the first data update control, the process formula management system can transmit the target process formula of the first object to the second object; if the operator selects at least one target process formula of the second object and triggers the second data update control, the process formula management system can transmit the target process formula of the second object to the first object.

[0116] For example, see Figure 5 The arrow button pointing to the right is the first data update control, and the arrow button pointing to the left is the second data update control. See also... Figure 7 and Figure 8 Selecting the process formula identifier from xxxx and triggering the right-facing arrow button will update the process formula direction of xxxx to aaaa; selecting the process formula identifier from aaaa and triggering the right-facing arrow button will update the process formula direction of aaaa to zzzz.

[0117] Specifically, after obtaining the identifier of the target process formula, the process formula management system can retrieve the target process formula from the first object and save it locally, such as to an .ert file. The .ert file includes the material information associated with the target process formula and related process formula files. The process formula management system can then search the process formula set of the second object for process formulas with the same process formula identifier as the target process formula and back them up in the process formula management system. The process formula management system can then parse the .ert file containing the target process formula and transmit the parsed target process formula, along with the associated material information and related process formula files, to the second object, thus updating the target process formula from the first object to the second object. As a relay station for the transmission of the target process formula, the process formula management system can perform preliminary processing on the target process formula data / files (such as parsing, decryption, and packaging), effectively improving data update efficiency. Furthermore, by using the process formula management system as a trusted entity for data relay, data security during the process formula transmission process can also be improved.

[0118] In some embodiments of this application, the process formula management system also supports viewing historical update records. Specifically, the process formula update page can also be configured with a history record control. In response to a trigger operation on the history record control, the process formula management system can display at least one historical update record; and in response to a viewing operation on the historical update record, it can display the update status information of the process formula corresponding to the historical update record.

[0119] To improve the efficiency of viewing historical update records, you can also set up filter controls, search controls, and sort controls on the process recipe update page to quickly find the desired historical update records. Filter controls can set at least one filter condition, such as start time, end time, update type, backup file location, etc. Update types include deletion, rollback, synchronization, backup, etc.

[0120] For example, in response to a trigger operation on the history record control, a history record search area and a history record display area can be displayed on the process recipe update page. The history record search area includes at least one filter condition control, which includes an update time control and an update type control. In response to an input operation on the filter condition control, at least one set of target filter data can be determined. The target filter data includes the start update time, the end update time, and the target update type. Historical update records that match the target filter data can be filtered and displayed in the history record display area.

[0121] See Figure 9The process formula update page also includes a history button. When the operator triggers the history button, the history search area is displayed on the left side of the process formula update page. The history search area can include filter controls for start and end times. After setting the start and end times and triggering the search button, the history display area on the right can display the historical update records within that time period. Triggering the details button on the right side of a specific historical update record can display the update status information of all process formulas corresponding to that historical update record.

[0122] In some embodiments of this application, the process recipe management system can also revert the updated process recipe sets of each object to the state before the update. See also Figure 9 Each historical update record also includes a rollback button on the right. If this button is triggered, the process formula management system will control the updated object's process formula set to revert to the state before the update.

[0123] Specifically, after the target process recipe to be transmitted is determined during the update process, the process recipe system can, from the target process recipe identifier and all process recipe identifiers of the process recipe set of the second object, 1) find the same process recipe identifier that both the first object and the second object have, and save the same process recipe in the process recipe set of the second object, 2) find the first process recipe identifier that only the first object has, and save the first process recipe identifier, thereby constructing a backup recipe set for the second object.

[0124] If an updated process formula needs to be rolled back, the process formula management system can control the second object to delete the first process formula in its own process formula set based on the first process formula identifier in the backup formula set, and update its own process formula set with the same process formula in the backup formula set, so that the process formula set of the target object can be rolled back to the state before the update. The rollback can be triggered by an operator. For example, the process formula management system can respond to a rollback operation on a historical update record and implement the aforementioned steps to roll back the process formula set of the target object to the state before the update. Thus, rapid rollback can be achieved when there are abnormalities in the process formula update process or when there are abnormalities in the updated process formula set of the second object. It should be noted that the users / operators mentioned in the embodiments of this application may include engineers in manufacturing plants, intelligent robots, virtual intelligent voice assistants on computer devices, AI agents, etc.

[0125] This application embodiment can display a process recipe update page of a process recipe management system. The process recipe update page includes multiple object identifiers. The multiple objects include the process recipe management system and at least one semiconductor device that has established a communication connection with the process recipe management system. The objects store a set of process recipes. In response to a selection operation for a first object identifier, multiple process recipe identifiers contained in the first object are displayed. In response to a selection operation for at least one first target process recipe identifier of the first object, a first target process recipe to be transmitted is determined. In response to an update operation for the first target process recipe, the first target process recipe is transmitted to at least one second object, and update status information is displayed on the process recipe update page. This application performs unified data management through the process recipe management system. Target process recipes for synchronization can be selected from the management system's local storage or from semiconductor devices that have established a communication connection with the management system. The management system controls automatic data synchronization between devices, significantly improving data synchronization efficiency and security.

[0126] This application also provides a computer device, such as... Figure 10 As shown, it illustrates a structural schematic diagram of a computer device involved in an embodiment of this application. This computer device can be a terminal or a server, etc. Specifically:

[0127] The computer device may include components such as a processor 401 with one or more processing cores, a memory 402 with one or more computer-readable storage media, a power supply 403, and an input unit 404. Those skilled in the art will understand that... Figure 7 The computer device structure shown does not constitute a limitation on the computer device and may include more or fewer components than shown, or combine certain components, or have different component arrangements. Wherein:

[0128] The processor 401 is the control center of the computer device, connecting various parts of the computer device through various interfaces and lines. It performs various functions and processes data by running or executing computer programs and / or modules stored in the memory 402, and by calling data stored in the memory 402. Optionally, the processor 401 may include one or more processing cores; preferably, the processor 401 may integrate an application processor and a modem processor, wherein the application processor mainly handles the operating system, user interface, and computer programs, and the modem processor mainly handles wireless communication. It is understood that the modem processor may not be integrated into the processor 401.

[0129] The memory 402 can be used to store computer programs and modules. The processor 401 executes various functional applications and data processing by running the computer programs and modules stored in the memory 402. The memory 402 may mainly include a program storage area and a data storage area. The program storage area may store the operating system, computer programs required for at least one function (such as sound playback function, image playback function, etc.), etc.; the data storage area may store data created according to the use of the computer device, etc. In addition, the memory 402 may include high-speed random access memory, and may also include non-volatile memory, such as at least one disk storage device, flash memory device, or other volatile solid-state storage device. Accordingly, the memory 402 may also include a memory controller to provide the processor 401 with access to the memory 402.

[0130] The computer device also includes a power supply 403 that supplies power to the various components. Preferably, the power supply 403 can be logically connected to the processor 401 through a power management system, thereby enabling functions such as charging, discharging, and power consumption management through the power management system. The power supply 403 may also include one or more DC or AC power supplies, recharging systems, power fault detection circuits, power converters or inverters, power status indicators, and other arbitrary components.

[0131] The computer device may also include an input unit 404, which can be used to receive input digital or character information and generate keyboard, mouse, joystick, optical or trackball signal inputs related to user settings and function control.

[0132] Although not shown, the computer device may also include a display unit, etc., which will not be described in detail here. Specifically, in this embodiment, the processor 401 in the computer device loads the executable files corresponding to the processes of one or more computer programs into the memory 402 according to the following instructions, and the processor 401 runs the application programs stored in the memory 402 to realize various functions, as follows:

[0133] The process recipe update page of the process recipe management system is displayed. The process recipe update page includes multiple object identifiers. The multiple objects include the process recipe management system and at least one semiconductor device that has established a communication connection with the process recipe management system. The objects store a set of process recipes. In response to a selection operation on a first object identifier, multiple process recipe identifiers contained in the first object are displayed. In response to a selection operation on at least one first target process recipe identifier of the first object, a first target process recipe to be transmitted is determined. In response to an update operation on the first target process recipe, the first target process recipe is transmitted to at least one second object, and update status information is displayed on the process recipe update page.

[0134] For details on the implementation of each of the above operations, please refer to the previous examples, which will not be repeated here.

[0135] Those skilled in the art will understand that all or part of the steps in the various methods of the above embodiments can be performed by a computer program, or by a computer program controlling related hardware. The computer program can be stored in a computer-readable storage medium and loaded and executed by a processor.

[0136] Therefore, embodiments of this application provide a computer-readable storage medium storing a computer program that can be loaded by a processor to execute the steps in any of the process formula update methods provided in embodiments of this application. For example, the computer program can execute the following steps:

[0137] The process recipe update page of the process recipe management system is displayed. The process recipe update page includes multiple object identifiers. The multiple objects include the process recipe management system and at least one semiconductor device that has established a communication connection with the process recipe management system. The objects store a set of process recipes. In response to a selection operation for a first object identifier, multiple process recipe identifiers contained in the first object are displayed. In response to a selection operation for at least one first target process recipe identifier of the first object, a first target process recipe to be transmitted is determined. In response to an update operation for the first target process recipe, the first target process recipe is transmitted to at least one second object, and update status information is displayed on the process recipe update page.

[0138] The computer-readable storage medium may include: read-only memory (ROM), random access memory (RAM), disk or optical disk, etc.

[0139] Since the computer program stored in the computer-readable storage medium can execute the steps in any of the process formula update methods provided in the embodiments of this application, the beneficial effects that any of the process formula update methods provided in the embodiments of this application can achieve can be realized, as detailed in the preceding embodiments, and will not be repeated here.

[0140] This application also provides a computer program product, which includes a computer program stored in a computer-readable storage medium. A processor of a computer device reads the computer program from the computer-readable storage medium and executes the computer program, causing the computer device to perform the methods provided in various optional implementations of the above-described process formula update method.

[0141] The above provides a detailed description of a process formula update method provided by the embodiments of this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A method for updating a process formulation, characterized in that, include: Display the process recipe update page of the process recipe management system. The process recipe update page includes multiple object identifiers. The multiple objects include the process recipe management system and at least one semiconductor device that establishes a communication connection with the process recipe management system. The objects store a set of process recipes. In response to a selection operation on a first object identifier, multiple process formula identifiers contained in the first object are displayed, including: in response to a selection operation on a first object identifier and a selection operation on at least one second object identifier, a comparative analysis of the process formula sets of the first object and the second object is performed, and multiple formula analysis results are displayed on the process formula update page. The formula analysis results include comparison results of process formula identifiers that are only present in the first object or only in the second object, and process formula identifiers that are present in both the first object and the second object. In response to a selection operation for at least one first target process recipe identifier for the first object, a first target process recipe to be transmitted is determined; In response to an update operation for the first target process recipe, the first target process recipe is transmitted to at least one second object, and update status information is displayed on the process recipe update page.

2. The method according to claim 1, characterized in that, The method further includes: In response to a selection operation of at least one second target process recipe identifier for the second object, a second target process recipe to be transmitted is determined; In response to an update operation for the second target process formulation, the second target process formulation is transmitted to the first object, and update status information is displayed on the process formulation update page.

3. The method according to claim 2, characterized in that, The process formula update page also includes multiple category controls, each category control corresponding to a comparison result. The step of determining the first target process formula to be transmitted in response to the selection operation of at least one first target process formula identifier for the first object includes: In response to a trigger operation targeting a target category control, all candidate process formulations corresponding to the target comparison results are determined, and the candidate formulation analysis results for each candidate process formulation are displayed on the process formulation update page. In response to the selection operation of the first target process formulation identifier in the candidate formulation analysis results, the first target process formulation to be transmitted is extracted from the process formulation set of the first object; The step of determining the second target process recipe to be transmitted in response to a selection operation of at least one second target process recipe identifier for the second object includes: In response to the selection operation of the second target process formulation identifier in the candidate formulation analysis results, the second target process formulation to be transferred is extracted from the process formulation set of the second object.

4. The method according to claim 3, characterized in that, The comparison results include a first result indicating that the two process formulations are the same, a second result indicating that the two process formulations are different, and a third result indicating that the two process formulations are the same only in terms of key parameter information or attribute information.

5. The method according to claim 1, characterized in that, The process formulation includes multi-level classification. In response to a selection operation on a first object identifier and a selection operation on at least one second object identifier, a comparative analysis is performed on the process formulation sets of the first and second objects, and multiple formulation analysis results are displayed on the process formulation update page, including: In response to a selection operation for a first object identifier and a selection operation for at least one second object identifier, a comparative analysis is performed on the process recipe sets of the first object and the second object, and the multi-level dataset analysis results are displayed on the process recipe update page. The dataset analysis results include the analysis results of the process recipe sets and the analysis results of the process recipe subsets corresponding to each level of classification. In response to a triggered operation on the analysis results of the target dataset, multiple formulation analysis results from the process formulation set or the target process formulation subset are displayed on the process formulation update page.

6. The method according to claim 1, characterized in that, After determining the first target process recipe to be transmitted in response to a selection operation of at least one first target process recipe identifier for the first object, the method further includes: From the target process recipe identifier and all process recipe identifiers in the process recipe set of the second object, find the same process recipe identifier that both the first object and the second object have, and save the same process recipes in the process recipe set of the second object to construct a backup recipe set for the second object.

7. The method according to claim 6, characterized in that, The process recipe update page also includes a history control. After transmitting the first target process recipe to at least one second object in response to an update operation for the first target process recipe, and displaying update status information on the process recipe update page, the method further includes: In response to a trigger operation on the history control, at least one history update record is displayed; In response to a viewing operation of historical update records, the update status information of the process formula corresponding to the historical update record is displayed.

8. The method according to claim 7, characterized in that, The method further includes: Among the target process formula identifiers corresponding to the first object and all process formula identifiers corresponding to the second object, find the first process formula identifier that only the first object has, and save the first process formula identifier to construct a backup formula set for the second object; In response to a rollback operation on a historical update record, the control of the second object is to delete the first process recipe in its own process recipe set based on the first process recipe identifier in the backup recipe set, and to update its own process recipe set with the same process recipe in the backup recipe set, so that the process recipe set of the second object is rolled back to the state before the update.

9. The method according to claim 7, characterized in that, The response to a trigger operation on the history control, displaying at least one history update record, includes: In response to a trigger operation on the history control, a history search area and a history display area are displayed on the process recipe update page. The history search area includes at least one filter control, which includes an update time control and an update type control. In response to an input operation to the filter control, at least one set of target filter data is determined, the target filter data including start update time, end update time, and target update type; Filter historical update records that match the target filter data, and display the historical update records in the historical record display area.

10. The method according to claim 1, characterized in that, The method further includes: The user management page of the display process formulation management system includes at least one user information of the process formulation system; In response to a selection operation targeting a user, the current account type of the target user and the operation function modules that the user has permission to access in the process formula management system are displayed. In response to the account type adjustment operation for the target user, update the display of the target user's account type; In response to the operation permission adjustment operation for the target user, update and display the operation function modules that the target user has permission to operate.

11. A process formula updating device, characterized in that, include: The update page display module is used to display the process recipe update page of the process recipe management system. The process recipe update page includes multiple object identifiers. The multiple objects include the process recipe management system and at least one semiconductor device that establishes a communication connection with the process recipe management system. The objects store a set of process recipes. The process formula display module is used to display multiple process formula identifiers contained in the first object in response to a selection operation on the first object identifier, including: in response to a selection operation on the first object identifier and a selection operation on at least one second object identifier, performing comparative analysis on the process formula sets of the first object and the second object, and displaying multiple formula analysis results on the process formula update page, wherein the formula analysis results include comparison results of process formula identifiers that are only present in the first object or only in the second object, and process formula identifiers that are present in both the first object and the second object; The first formulation module is configured to determine the first target process formulation to be transmitted in response to a selection operation of at least one first target process formulation identifier for the first object. The first update module is configured to, in response to an update operation for the first target process recipe, transmit the first target process recipe to at least one second object and display update status information on the process recipe update page.

12. A computer device comprising a processor and a memory, the memory storing a computer program, the processor being configured to run the computer program in the memory to perform the method as claimed in any one of claims 1 to 10.

13. A computer-readable storage medium having a computer program stored thereon, wherein, The computer program is executed by a processor to perform the method as described in any one of claims 1 to 10.

14. A computer program product comprising a computer program or instructions which are executed by a processor to perform the method as claimed in any one of claims 1 to 10.

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