Phase shifter unit and liquid crystal antenna

Abstract

The invention relates to a phase shifter unit and a liquid crystal antenna, and the phase shifter unit comprises a phase shifter which comprises a first surface far away from a first substrate and a first side surface connected with the first surface; the protection layer and the phase shifting device are located on the same side of the first substrate, the protection layer covers the phase shifting device and part of the first substrate, the protection layer comprises a first opening, and the first opening exposes part of the first side face; the conductive layer is located on one side, away from the first substrate, of the protective layer; the conductive layer comprises a first conductive part extending in the first direction, and the first conductive part is electrically connected with the phase shift device at least through the first opening; the first opening comprises a first sub-opening edge and a second sub-opening edge which are opposite to each other along a first direction, and the first side surface comprises a first sub-side edge and a second sub-side edge which are opposite to each other along the first direction; the orthographic projections of the first sub-side edge and the second sub-side edge on the first substrate are located between the orthographic projections of the first sub-opening edge and the second sub-opening edge on the first substrate. The reliability and the yield can be improved.

Description

Technical Field

[0001] This application relates to the field of liquid crystal antenna technology, and in particular to a phase shifter unit and a liquid crystal antenna. Background Technology

[0002] Liquid crystal antennas have broad application prospects in satellite receiving antennas, vehicle-mounted radar, 5G base station antennas, and other fields. Liquid crystal antennas are a new type of arrayed antenna made by combining conventional patch antennas with liquid crystal phase-shifting devices. The liquid crystal phase-shifting device adjusts the effective dielectric constant of the dielectric layer by controlling the deflection of liquid crystal molecules, thereby adjusting the phase difference between the inlet and outlet of the phase-shifting device. Typically, liquid crystal antennas array the phase-shifting devices to improve antenna gain and overall performance.

[0003] However, the reliability and yield of liquid crystal antennas in related technologies still need to be improved. Summary of the Invention

[0004] Therefore, it is necessary to provide a phase shifter unit and a liquid crystal antenna to address the issue that the reliability and yield of liquid crystal antennas in related technologies still need to be improved.

[0005] In a first aspect, embodiments of this application provide a phase shifter unit, including:

[0006] First substrate;

[0007] A phase-shifting device is located on one side of the first substrate, the phase-shifting device including a first surface away from the first substrate and a first side surface connected to the first surface;

[0008] A protective layer is located on the same side of the first substrate as the phase-shifting device. The protective layer covers the phase-shifting device and a portion of the first substrate. The protective layer includes a first opening that exposes a portion of the first side surface.

[0009] A conductive layer is located on the side of the protective layer away from the first substrate; the conductive layer includes a first conductive portion extending along a first direction, the first conductive portion being electrically connected to the phase-shifting device at least through the first opening;

[0010] The first opening includes a first sub-opening edge and a second sub-opening edge that are opposite each other along a first direction, and the first side includes a first sub-side edge and a second sub-side edge that are opposite each other along the first direction.

[0011] The orthographic projections of the first sub-side and the second sub-side onto the first substrate are both located between the orthographic projections of the first sub-opening edge and the second sub-opening edge onto the first substrate.

[0012] Secondly, based on the same concept, embodiments of this application provide a liquid crystal antenna, including:

[0013] The phase shifter unit described in any one of the above statements;

[0014] The second substrate is disposed opposite to the first substrate, and the second substrate and the first substrate form a sealed space;

[0015] A liquid crystal layer is located between the first substrate and the second substrate.

[0016] In this embodiment, the phase shifter unit includes: a first substrate; a phase shifter device located on one side of the first substrate, the phase shifter device including a first surface away from the first substrate and a first side surface connected to the first surface; a protective layer located on the same side of the first substrate as the phase shifter device, the protective layer covering the phase shifter device and a portion of the first substrate, the protective layer including a first opening, the first opening exposing a portion of the first side surface; a conductive layer located on the side of the protective layer away from the first substrate; the conductive layer including a first conductive portion extending along a first direction, the first conductive portion being electrically connected to the phase shifter device at least through the first opening; wherein, the first opening includes a first sub-opening edge and a second sub-opening edge opposite to each other along the first direction, the first side surface including a first sub-side edge and a second sub-side edge opposite to each other along the first direction; the orthographic projections of the first sub-side edge and the second sub-side edge on the first substrate are both located between the orthographic projections of the first sub-opening edge and the second opening edge on the first substrate. A first opening is formed in the protective layer at the first side, exposing a portion of the first side. In a first direction, the first sub-opening edge and the second sub-opening edge are located outside the first sub-side and the second sub-side, so that the protective layer is completely removed at the first direction extension of the first opening. Firstly, this avoids the protective layer at the first side and the first opening from being pulled apart due to the contraction of the phase-shifting device, and prevents the etching solution forming the first conductive part from seeping in, thereby preventing the first conductive part from breaking and improving the reliability and yield of the liquid crystal antenna. Secondly, the first conductive part is in direct contact with the phase-shifting device between the first sub-opening edge and the second sub-opening edge. Both the phase-shifting device and the first conductive part are conductive or metallic materials. Compared to the insulating material protective layer, the expansion coefficients of the phase-shifting device and the first conductive part are closer, further preventing the first conductive part from breaking due to the contraction of the phase-shifting device. Thirdly, the protective layer extends in the first direction of the first opening. The first conductive part is completely removed, preventing breakage at both the first sub-side (top of the ramp) and the second sub-side (bottom of the ramp). This prevents the first conductive part from breaking more easily at the first sub-side (top of the ramp) due to its thinner thickness, further improving the reliability and yield of the liquid crystal antenna. Fourthly, the protective layer is retained on both sides of the first opening in the second direction, intersecting the first direction. This avoids excessively large or small contact areas between the first conductive part and the phase-shifting device, ensuring an appropriate contact area and preventing performance degradation of the liquid crystal antenna. Fifthly, the protective layer is retained on both sides of the first opening in the second direction, allowing the first opening to release stress in the protective layer on both sides of the first opening in the second direction, thus preventing breakage of the first conductive part on both sides of the first opening in the second direction, further improving the reliability and yield of the liquid crystal antenna. The embodiments of this application have at least one of the above-mentioned beneficial effects. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a first cross-sectional structure of a phase shifter unit provided in an embodiment of this application.

[0019] Figure 2 This is another schematic diagram of a first cross-sectional structure of a phase shifter unit provided in an embodiment of this application.

[0020] Figure 3 This is a schematic diagram of a first top view of a phase shifter unit provided in an embodiment of this application.

[0021] Figure 4 This is another schematic diagram of a first top view structure of a phase shifter unit provided in an embodiment of this application.

[0022] Figure 5 This is a schematic diagram of a second top view of a phase shifter unit provided in an embodiment of this application.

[0023] Figure 6 This is a schematic diagram of a third top view structure of a phase shifter unit provided in an embodiment of this application.

[0024] Figure 7 This is a schematic diagram of a liquid crystal antenna provided in an embodiment of this application.

[0025] Explanation of reference numerals in the drawings: Liquid crystal antenna 200; Phase shifter unit 100; First substrate 11; Phase shifter device 12; Protective layer 13; Conductive layer 14; First surface 12a; First side surface 12b; First opening 13k; First conductive portion 141; First sub-opening edge 13k1; Second sub-opening edge 13k2; First sub-side edge 12b1; Second sub-side edge 12b2; Third sub-opening edge 13k3; Fourth sub-opening edge 13k4; First sub-conductive portion 1411; Second sub-conductive portion 1412; Third sub-conductive portion 1413; Second opening 13f; Fifth sub-opening edge 13f1; Sixth sub-opening edge 13f2;

[0026] First dashed line C1-C1; First direction X; Second direction Y; First length d1; Second length d2; Third length d3; Fourth length d4; First width h1; Second width h2; Third width h3; Fourth width h4; First distance L1; Second distance L2; Second substrate 21; First metal layer 22; First insulating layer 23; Second conductive layer 24; Liquid crystal layer 31; Encapsulation part 32; Electrical connector part 321; First alignment film 15; Second alignment film 25. Detailed Implementation

[0027] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings. Preferred embodiments of this application are shown in the drawings. However, this application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a thorough and complete understanding of the disclosure of this application.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the specification of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0029] When describing positional relationships, unless otherwise specified, when an element, such as a layer, film, or substrate, is referred to as being "on" another element, it may be directly on the other element or there may be intermediate elements present. Furthermore, when a layer is referred to as being "below" another layer, it may be directly below it or there may be one or more intermediate elements present. It is also understood that when a layer is referred to as being "between" two layers, it may be the only layer between the two layers, or there may be one or more intermediate elements present.

[0030] When using the terms “including,” “having,” and “comprising” as described herein, another component may be added unless explicitly qualifying terms such as “only,” “consisting of,” etc. are used. Unless otherwise stated, singular terms may include plural forms and should not be construed as having a quantity of one.

[0031] It should be understood that although the terms “first,” “second,” etc., may be used herein to describe various elements, these elements should not be limited by these terms. These terms are used only to distinguish one element from another. For example, without departing from the scope of this application, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element.

[0032] It should also be understood that, in interpreting an element, although not explicitly described, the element is interpreted as including a range of error, which should be within the acceptable deviation range of a particular value as determined by a person skilled in the art. For example, "approximately," "about," or "substantially" can mean within one or more standard deviations, without limitation herein.

[0033] Furthermore, in the instruction manual, the phrase "planar distribution diagram" refers to the diagram when the target part is viewed from above, and the phrase "cross-sectional diagram" refers to the diagram when the target part is viewed from the side as a cross-section taken by vertically cutting the target part.

[0034] Furthermore, the accompanying drawings are not drawn to a 1:1 scale, and the relative dimensions of the components are shown in the drawings only as examples and not necessarily to actual scale.

[0035] The reliability and yield of liquid crystal antennas in related technologies still need improvement. A phase shifter unit includes a first substrate, a phase shifting device, a protective layer, and a conductive layer. The phase shifting device is located on one side of the first substrate, including a first surface away from the first substrate and a first side surface connected to the first surface. The protective layer is located on the same side of the first substrate as the phase shifting device, covering the phase shifting device and part of the first substrate, and covering the first side surface. The conductive layer is located on the side of the protective layer away from the first substrate. When the conductive portion climbs up the first side surface to the first surface on the first substrate, due to the relatively thick film layer of the phase shifting device (e.g., thickness greater than or equal to 2 micrometers), a large amount of stress accumulates. Therefore, during processes such as chemical vapor deposition (CVD) and high-temperature annealing of the conductive layer, the release of tensile stress in the phase shifting device causes it to shrink, pulling apart the protective layer at the first side surface (e.g., at the bottom or top of the slope). This leads to the etching solution forming the first conductive portion seeping in, causing the conductive portion to break, resulting in reliability and yield issues for the liquid crystal antenna, as well as a reduction in yield.

[0036] Based on the aforementioned technical problems, the inventors have discovered that the phase shifter unit includes: a first substrate; a phase shifting device located on one side of the first substrate, the phase shifting device including a first surface away from the first substrate and a first side surface connected to the first surface; a protective layer located on the same side of the first substrate as the phase shifting device, the protective layer covering the phase shifting device and a portion of the first substrate, the protective layer including a first opening, the first opening exposing a portion of the first side surface; a conductive layer located on the side of the protective layer away from the first substrate; the conductive layer including a first conductive portion extending along a first direction, the first conductive portion being electrically connected to the phase shifting device at least through the first opening; wherein, the first opening includes a first sub-opening edge and a second sub-opening edge opposite to each other along the first direction, the first side surface including a first sub-side edge and a second sub-side edge opposite to each other along the first direction; the orthographic projections of the first sub-side edge and the second sub-side edge on the first substrate are both located between the orthographic projections of the first sub-opening edge and the second sub-opening edge on the first substrate. A first opening is formed in the protective layer at the first side, exposing a portion of the first side. In a first direction, the first sub-opening edge and the second sub-opening edge are located outside the first sub-side and the second sub-side, so that the protective layer is completely removed at the first direction extension of the first opening. Firstly, this avoids the protective layer at the first side and the first opening from being pulled apart due to the contraction of the phase-shifting device, and prevents the etching solution forming the first conductive part from seeping in, thereby preventing the first conductive part from breaking and improving the reliability and yield of the liquid crystal antenna. Secondly, the first conductive part is in direct contact with the phase-shifting device between the first sub-opening edge and the second sub-opening edge. Both the phase-shifting device and the first conductive part are conductive or metallic materials. Compared to the insulating material protective layer, the expansion coefficients of the phase-shifting device and the first conductive part are closer, further preventing the first conductive part from breaking due to the contraction of the phase-shifting device. Thirdly, the protective layer extends in the first direction of the first opening. The first conductive part is completely removed, preventing breakage at both the first sub-side (top of the ramp) and the second sub-side (bottom of the ramp). This prevents the first conductive part from breaking more easily at the first sub-side (top of the ramp) due to its thinner thickness, further improving the reliability and yield of the liquid crystal antenna. Fourthly, the protective layer is retained on both sides of the first opening in the second direction, intersecting the first direction. This avoids excessively large or small contact areas between the first conductive part and the phase-shifting device, ensuring an appropriate contact area and preventing performance degradation of the liquid crystal antenna. Fifthly, the protective layer is retained on both sides of the first opening in the second direction, allowing the first opening to release stress in the protective layer on both sides of the first opening in the second direction, thus preventing breakage of the first conductive part on both sides of the first opening in the second direction, further improving the reliability and yield of the liquid crystal antenna. The embodiments of this application have at least one of the above-mentioned beneficial effects.

[0037] The above is the core idea of ​​this application. The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0038] Please see Figures 1 to 6 . Figure 1 This is a schematic diagram of a first cross-sectional structure of a phase shifter unit provided in an embodiment of this application. Figure 2 This is another schematic diagram of a first cross-sectional structure of a phase shifter unit provided in an embodiment of this application. Figure 1 and Figure 2 The phase shifter units have the same structure, only some of the numbering is different.

[0039] Figure 3 This is a schematic diagram of a first top view of a phase shifter unit provided in an embodiment of this application. Figure 4 This is another schematic diagram of a first top view structure of a phase shifter unit provided in an embodiment of this application. Figure 3 and Figure 4 The phase shifter units have the same structure, only some of the numbering is different.

[0040] Figure 5 This is a schematic diagram of a second top view of a phase shifter unit provided in an embodiment of this application. Figure 6 This is a schematic diagram of a third top view structure of a phase shifter unit provided in an embodiment of this application.

[0041] Figure 1 and Figure 2 for Figures 3 to 6 In the diagram, a cross-sectional structure is shown at the first opening along the first direction X, for example... Figure 1 and Figure 2 for Figure 5 A schematic diagram of the cross-sectional structure at the first dashed line C1-C1.

[0042] It should be noted that, in Figures 3 to 6 The protective layer is not shown in the diagram; instead, a dashed box indicates the first opening in the protective layer, which is located between the phase-shifting device and the conductive layer.

[0043] This application provides a phase shifter unit 100, which includes a first substrate 11, a phase shifting device 12, a protective layer 13, and a conductive layer 14. The phase shifting device 12 is located on one side of the first substrate 11 and includes a first surface 12a away from the first substrate 11 and a first side surface 12b connected to the first surface 12a. The protective layer 13 is located on the same side of the first substrate 11 as the phase shifting device 12, covering the phase shifting device 12 and a portion of the first substrate 11. The protective layer 13 includes a first opening 13k that exposes a portion of the first side surface 12b. The conductive layer 14 is located on the side of the protective layer 13 away from the first substrate 11 and includes a first conductive layer extending along a first direction X. The first conductive part 141 is electrically connected to the phase shifting device 12 at least through the first opening 13k; wherein, the first opening 13k includes a first sub-opening edge 13k1 and a second sub-opening edge 13k2 opposite to each other along the first direction X, and the first side surface 12b includes a first sub-side edge 12b1 and a second sub-side edge 12b2 opposite to each other along the first direction X; the orthographic projections of the first sub-side edge 12b1 and the second sub-side edge 12b2 on the first substrate 11 are both located between the orthographic projections of the first sub-opening edge 13k1 and the second sub-opening edge 13k2 on the first substrate 11.

[0044] For example, the protective layer 13 can protect the surface of the phase shifter 12 and prevent the phase shifter 12 from being scratched or damaged during the manufacturing process of the phase shifter unit 100.

[0045] For example, the resistance of the conductive layer 14 material is greater than the resistance of the phase shifter 12 material. The material of the phase shifter 12 needs to have good conductivity, that is, it needs to have low resistance; the material of the conductive layer 14 needs to have high resistance to prevent the signal of the phase shifter 12 from leaking and being lost along the path of the conductive layer 14.

[0046] For example, the material of the phase shifting device 12 includes metals, such as copper-molybdenum, copper, gold, or silver.

[0047] For example, the material of the conductive layer 14 includes, but is not limited to, transparent conductive oxides such as ITO (indium tin oxide), AZO (aluminum-zinc oxide), or FTO (fluorine-tin oxide). The material of the conductive layer 14 has good conductivity and ductility, and can meet the requirements of thinness, resistance to breakage, and good climbing performance while satisfying the conductivity requirements.

[0048] For example, the material of the protective layer 13 includes a dielectric material with a dielectric constant greater than or equal to 5, and the dielectric material includes a silicon-containing material, which includes silicon nitride or silicon oxide.

[0049] For example, since the first conductive portion 141 blocks radio frequency signals, the smaller the width of the first conductive portion 141 in the second direction Y, the better. However, the wider the width of the first conductive portion 141 in the second direction Y, the higher the process stability and process deviation tolerance (margin) of the width of the first conductive portion 141. Therefore, it is necessary to provide a first conductive portion 141 of appropriate width, that is, to provide an appropriate overlap area / contact area between the first conductive portion 141 and the phase shifter 12 in the direction perpendicular to the plane of the first substrate 11. Whether overall or locally, an excessively large or small overlap area / contact area will reduce the performance of the phase shifter unit 100 and the liquid crystal antenna.

[0050] In this embodiment, the phase shifter unit 100 includes: a first substrate 11; a phase shifter 12 located on one side of the first substrate 11, the phase shifter 12 including a first surface 12a away from the first substrate 11 and a first side surface 12b connected to the first surface 12a; a protective layer 13 located on the same side of the first substrate 11 as the phase shifter 12, the protective layer 13 covering the phase shifter 12 and a portion of the first substrate 11, the protective layer 13 including a first opening 13k that exposes a portion of the first side surface 12b; and a conductive layer 14 located on the side of the protective layer 13 away from the first substrate 11; The electrical layer 14 includes a first conductive portion 141 extending along a first direction X. The first conductive portion 141 is electrically connected to the phase shifting device 12 at least through a first opening 13k. The first opening 13k includes a first sub-opening edge 13k1 and a second sub-opening edge 13k2 opposite to each other along the first direction X. The first side surface 12b includes a first sub-side edge 12b1 and a second sub-side edge 12b2 opposite to each other along the first direction X. The orthographic projections of the first sub-side edge 12b1 and the second sub-side edge 12b2 on the first substrate 11 are both located between the orthographic projections of the first sub-opening edge 13k1 and the second sub-opening edge 13k2 on the first substrate 11.A first opening 13k is formed in the protective layer 13 at the first side 12b, exposing a portion of the first side 12b. In the first direction X, the first sub-opening edge 13k1 and the second sub-opening edge 13k2 are located outside the first sub-side 12b1 and the second sub-side 12b2, so that the protective layer 13 is completely removed at the extension of the first opening 13k in the first direction X. This avoids the protective layer 13 at the first side 12b and the first opening 13k being broken due to the contraction of the phase-shifting device 12, and avoids etching to form the first conductive portion 141. The etching solution penetrates, thus preventing the first conductive part 141 from breaking, improving the reliability and yield of the liquid crystal antenna; secondly, the first conductive part 141 is in direct contact with the phase shifting device 12 between the first sub-opening edge 13k1 and the second sub-opening edge 13k2. Both the phase shifting device 12 and the first conductive part 141 are conductive or metallic materials. Compared with the insulating protective layer 13, the expansion coefficients of the phase shifting device 12 and the first conductive part 141 are closer, which can further prevent the first conductive part 141 from breaking due to the contraction of the phase shifting device 12; thirdly, the protective layer 13 is completely removed at the first opening 13k in the first direction X extension, so that the first sub-side 12b1 (top of the ramp) and the second sub-side 12b2 (bottom of the ramp) can both prevent the first conductive part 141 from breaking. For example, it prevents the first conductive part 141 from breaking more easily at the first sub-side 12b1 (top of the ramp) because it is thinner, further improving the reliability and yield of the liquid crystal antenna; Fourthly, the protective layer 13 is retained on both sides of the first opening 13k in the second direction Y, where the second direction Y intersects with the first direction X, which can avoid The first conductive part has an excessively large or small contact area with the phase-shifting device. The contact area between the first conductive part 141 and the phase-shifting device 12 is appropriate, thereby preventing performance degradation of the liquid crystal antenna. Fifthly, the protective layer 13 is retained on both sides of the first opening 13k in the second direction Y. The first opening 13k can release stress in the protective layer 13 located on both sides of the first opening 13k in the second direction Y, thereby preventing breakage of the first conductive part 141 located on both sides of the first opening 13k in the second direction Y, further improving the reliability and yield of the liquid crystal antenna. The embodiments of this application have at least one of the above-mentioned beneficial effects.

[0051] In some implementations, such as Figure 1 and Figure 2As shown, in the first direction X, the first sub-side 12b1 is located between the first sub-opening edge 13k1 and the second sub-side 12b2, and the second sub-side 12b2 is located between the first sub-side 12b1 and the second sub-opening edge 13k2; the distance between the orthographic projection of the first sub-opening edge 13k1 on the first substrate 11 and the orthographic projection of the second sub-opening edge 13k2 on the first substrate 11 is the first length d1; the distance between the orthographic projection of the first sub-side 12b1 on the first substrate 11 and the orthographic projection of the second sub-side 12b2 on the first substrate 11 is the second length d2; the ratio of the first length d1 to the second length d2 is greater than or equal to 2.

[0052] For example, if the ratio of the first length d1 to the second length d2 is greater than or equal to 2, during the manufacturing process of the phase shifter unit 100, even if there are process errors / offsets in the manufacturing process of the first opening 13k, it can be ensured that the first sub-side 12b1 is located between the first sub-opening edge 13k1 and the second sub-side 12b2, and the second sub-side 12b2 is located between the first sub-side 12b1 and the second sub-opening edge 13k2.

[0053] In some implementations, such as Figure 1 and Figure 2 As shown, the distance between the orthographic projection of the first sub-opening edge 13k1 on the first substrate 11 and the orthographic projection of the first sub-side edge 12b1 on the first substrate 11 is the third length d3; the ratio of the third length d3 to the second length d2 is greater than or equal to 0.5.

[0054] For example, if the ratio of the third length d3 to the second length d2 is greater than or equal to 0.5, firstly, even if there is a process error / offset, it can be ensured that the first sub-side 12b1 is located between the first sub-opening edge 13k1 and the second sub-side 12b2, and the second sub-side 12b2 is located between the first sub-side 12b1 and the second sub-opening edge 13k2; secondly, between the first sub-opening edge 13k1 and the first sub-side 12b1, and between the second sub-side 12b2 and the second sub-opening edge 13k2, it can be ensured that the first conductive part 141 and the phase shifting device 12 have a sufficiently large contact area / length, which can reduce the resistance value of the electrical connection between the first conductive part 141 and the phase shifting device 12.

[0055] In some implementations, such as Figure 1 and Figure 2 As shown, the distance from the orthographic projection of the second sub-opening edge 13k2 on the first substrate 11 to the orthographic projection of the second sub-side edge 12b2 on the first substrate 11 is the fourth length d4; the fourth length d4 is equal to the third length d3.

[0056] For example, the fourth length d4 is equal to the third length d3. Firstly, during the manufacturing process of the phase shifter unit 100, during the manufacturing process of the first opening 13k, even if the process error extends along the first direction X in any sub-direction (e.g., ...), ... Figure 1 The offset (to the left and right) also ensures that the first sub-side 12b1 is located between the first sub-opening edge 13k1 and the second sub-side 12b2, and the second sub-side 12b2 is located between the first sub-side 12b1 and the second sub-opening edge 13k2. Secondly, it can ensure that the stress of the phase shifting device 12 is released uniformly between the first sub-opening edge 13k1 and the first sub-side 12b1, and between the second sub-side 12b2 and the second sub-opening edge 13k2, avoiding large differences in the film shape and film performance of the first conductive portion 141 on both sides of the first direction X of the first opening 13k, and improving the performance uniformity of the first conductive portion 141.

[0057] In some implementations, such as Figure 3 and Figure 4 As shown, the width of the first opening 13k in the second direction Y is smaller than the width of the first conductive part 141 in the second direction Y, and the first direction X intersects with the second direction Y.

[0058] For example, the width of the first opening 13k in the second direction Y is a first width h1, and the width of the first conductive part 141 in the second direction Y is a second width h2. The first width h1 is smaller than the second width h2. The first conductive part 141 has the function of a bias line and requires a smaller width, which can reduce the overlap area between the first conductive part 141 and the phase shifter 12 in the direction perpendicular to the plane of the first substrate 11, thereby avoiding performance degradation of the liquid crystal antenna. At the same time, the first conductive part 141 slopes up on the protective layer 13 on both sides of the first opening 13k in the second direction Y, reducing the area of ​​direct contact between the first conductive part 141 and the phase shifter 12, and improving the performance of the phase shifter unit 100 and the liquid crystal antenna 200. Meanwhile, the protective layer 13 on both sides of the first opening 13k in the second direction Y can block the penetration and diffusion of etching solution, preventing the first conductive part 141 from breaking.

[0059] For example, the first direction X intersects the second direction Y. In some embodiments, the first direction X and the second direction Y are perpendicular to each other. In some embodiments,

[0060] In some implementations, such as Figure 3 and Figure 4 As shown, the width of the first opening 13k in the second direction Y is smaller than the width of the phase shifting device 12 in the second direction Y, and the first direction X intersects with the second direction Y.

[0061] For example, such as Figure 3 and Figure 4As shown, the width of the phase shifter 12 in the second direction Y is the third width h3. The first width h1 is smaller than the third width h3. The larger width of the phase shifter 12 can reduce the second width h2, so that the phase shifter 12 has a smaller resistance. This allows the first conductive part 141 to have a smaller width in the second direction Y, thus enabling the first conductive part 141 to have a better bias line function.

[0062] In some implementations, such as Figure 3 and Figure 4 As shown, in any of the phase shifter units 100 described above, the first conductive portion 141 includes a first sub-conductive portion 1411 and a second sub-conductive portion 1412 that are interconnected in the first direction X. In a direction perpendicular to the plane of the first substrate 11, the first sub-conductive portion 1411 overlaps with the phase shifting device 12, and the second sub-conductive portion 1412 is electrically connected to the phase shifting device 12 through a first opening 13k. The width of the first sub-conductive portion 1411 in the second direction Y is less than or equal to the width of the second sub-conductive portion 1412 in the second direction Y, and the second direction Y intersects the first direction X.

[0063] For example, the first conductive part 141 includes a first sub-conductive part 1411, a second sub-conductive part 1412 and a third sub-conductive part 1413 connected sequentially in the first direction X. When the third sub-conductive part 1413 extends toward the first sub-conductive part 1411, it climbs up the first side 12b through the second sub-conductive part 1412.

[0064] For example, such as Figure 4 As shown, the width of the first sub-conductive portion 1411 in the second direction Y is equal to the width of the second sub-conductive portion 1412 in the second direction Y.

[0065] For example, such as Figure 5 and Figure 6As shown, the width of the first sub-conductive portion 1411 in the second direction Y is smaller than the width of the second sub-conductive portion 1412 in the second direction Y. That is, increasing the width of a portion of the first conductive portion 141 (the second sub-conductive portion 1412) not only avoids the risk of breakage of the second sub-conductive portion 1412, but also increases the width (first width h1) of the first opening 13k in the second direction Y, making the width (first width h1) of the first opening 13k in the second direction Y more stable when etching to form the first opening 13k, further improving the area stability / uniformity of the second sub-conductive portion 1412, thereby reducing the risk of wire breakage of the second sub-conductive portion 1412; furthermore, the width of the portions of the second sub-conductive portion 1412 on both sides of the first opening 13k in the second direction Y can be appropriately increased, thereby reducing the risk of wire breakage of the second sub-conductive portion 1412; at least any one of these three aspects can improve the process error / offset tolerance (margin) of the phase shifter unit 100 and improve the yield of the phase shifter unit 100.

[0066] In some implementations, such as Figure 6 As shown, the protective layer 13 includes at least one second opening 13f, and the first sub-conductive part 1411 is electrically connected to the phase shifting device 12 through the second opening 13f; the width of the second opening 13f in the second direction Y is smaller than the width of the first opening 13k in the second direction Y.

[0067] For example, the protective layer 13 includes at least one second opening 13f through which the first sub-conductive portion 1411 is electrically connected to the phase shifting device 12, and the second opening 13f exposes a portion of the first surface 12a. In some embodiments, the protective layer 13 includes a plurality of second openings 13f.

[0068] For example, such as Figure 6 As shown, and in combination Figure 4 As shown, the width of the second opening 13f in the second direction Y is the fourth width h4, and the width of the first opening 13k in the second direction Y is the first width h1. The fourth width h4 is smaller than the first width h1. The smaller width of the second opening 13f in the second direction Y can prevent the contact area between the first sub-conductive part 1411 and the phase shifting device 12 from being too large, and can also prevent the phase shifting device 12 from being oxidized through the second opening 13f. The larger width of the first opening 13k in the second direction Y increases the width of the first opening 13k in the second direction Y (the first width h1), making the width of the first opening 13k in the second direction Y (the first width h1) more stable when etching to form the first opening 13k. This further improves the area stability / uniformity of the second sub-conductive part 1412, thereby reducing the risk of wire breakage in the second sub-conductive part 1412.

[0069] For example, such as Figure 6 As shown, the width of the second opening 13f in the second direction Y is smaller than the width of the first opening 13k in the second direction Y; furthermore, the width of the first sub-conductive portion 1411 in the second direction Y is smaller than the width of the second sub-conductive portion 1412 in the second direction Y. Furthermore, the width of the portions of the second sub-conductive portion 1412 on both sides of the first opening 13k in the second direction Y can be appropriately increased, thereby reducing the risk of wire breakage in the second sub-conductive portion 1412.

[0070] It should be noted that in some embodiments, the length of the second opening 13f in the first direction X is less than the length of the first opening 13k in the first direction X. This reduces the area of ​​the phase shifting device 12 exposed in the second opening 13f, thus preventing the phase shifting device 12 from being oxidized through the second opening 13f.

[0071] In some implementations, such as Figure 5 As shown, in the second direction Y, the width of the first sub-conductive portion 1411 is smaller than the width of the second sub-conductive portion 1412, and the width of the second sub-conductive portion 1412 is smaller than the width of the phase shifting device 12.

[0072] For example, such as Figure 5 As shown, the width of the first sub-conductive portion 1411 is smaller than the width of the second sub-conductive portion 1412, and the width of the second sub-conductive portion 1412 is smaller than the width of the phase shifting device 12. Increasing the width of a portion of the first conductive portion 141 (the second sub-conductive portion 1412) not only avoids the risk of breakage of the second sub-conductive portion 1412, but also prevents the width of the second sub-conductive portion 1412 from increasing excessively, thus reducing the material usage of the first conductive portion 141.

[0073] For example, by increasing the width of the second sub-conductive portion 1412, the process deviation tolerance (margin) is improved. Since the performance of the first conductive portion 141 in the second direction Y is better, and the overlap area between the first conductive portion 141 and the phase shifting device 12 is smaller, the first conductive portion 141 trace is widened only at the ramp, and the first opening 13k is set in addition, the full illumination yield of the liquid crystal antenna 200 can be improved to more than 95%.

[0074] In some implementations, such as Figure 6 As shown, in the second direction Y, the width of the first opening 13k is greater than the width of the first sub-conductive part 1411.

[0075] For example, such as Figure 6As shown, the first opening 13k has a larger width in the second direction Y, which increases the width (first width h1) of the first opening 13k in the second direction Y. This makes the width (first width h1) of the first opening 13k in the second direction Y more stable when the first opening 13k is etched, which further improves the area stability / uniformity of the second sub-conductive part 1412, thereby reducing the risk of wire breakage in the second sub-conductive part 1412.

[0076] In some implementations, such as Figure 6 As shown, in the second direction Y, the width of the second sub-conductive portion 1412 is greater than the width of the phase shifting device 12.

[0077] For example, such as Figure 6 As shown, in the second direction Y, the width of the second sub-conductive portion 1412 is greater than the width of the phase shifter 12. The increased width of a portion of the first conductive portion 141 (the second sub-conductive portion 1412) can avoid the risk of breakage of the second sub-conductive portion 1412. Furthermore, the second sub-conductive portion 1412 can be sloped on both end faces in the second direction Y of the phase shifter unit 100, further reducing the risk of breakage.

[0078] For example, in product applications involving the phase shifter unit 100 and the liquid crystal antenna 200, selection can be made based on product performance requirements. Figure 3 , Figure 5 and Figure 6 The settings in the example. For instance, if it is necessary to minimize the width of the first conductive part 141 in the second direction Y and minimize the overlap / contact area between the first conductive part 141 and the phase shifting device 12, the following can be selected: Figure 3 The settings in the example. For instance, if the product has a greater tolerance for the width of the first conductive portion 141 in the second direction Y, and a larger layout area is provided for the second sub-conductive portion 1412, it can be selected. Figure 6 The settings in the example.

[0079] In some implementations, such as Figure 4As shown, the first opening 13k further includes a third sub-opening edge 13k3 and a fourth sub-opening edge 13k4 opposite each other along the second direction Y, and the second opening 13f further includes a fifth sub-opening edge 13f1 and a sixth sub-opening edge 13f2 opposite each other along the second direction Y. The third sub-opening edge 13k3 and the fifth sub-opening edge 13f1 are both close to the edge on the same side of the first conductive part 141, and the fourth sub-opening edge 13k4 and the sixth sub-opening edge 13f2 are both close to the edge on the other side of the first conductive part 141. The distance from the third sub-opening edge 13k3 to the edge of the first conductive part 141 is equal to the distance from the fifth sub-opening edge 13f1 to the edge of the first conductive part 141; and / or, the distance from the fourth sub-opening edge 13k4 to the edge of the first conductive part 141 is equal to the distance from the sixth sub-opening edge 13f2 to the edge of the first conductive part 141.

[0080] For example, such as Figure 4 As shown, the distance from the fourth sub-opening edge 13k4 to the edge of the first conductive part 141 is the first distance L1, and the distance from the sixth sub-opening edge 13f2 to the edge of the first conductive part 141 is the second distance L2. The first distance L1 is equal to the second distance L2.

[0081] For example, such as Figure 4 As shown, the distance from the third sub-opening edge 13k3 to the edge of the first conductive part 141 is equal to the distance from the fifth sub-opening edge 13f1 to the edge of the first conductive part 141; and / or, the first distance L1 is equal to the second distance L2. This results in the phase shifter unit 100 / liquid crystal antenna having better process consistency, more uniform performance, and more stable performance.

[0082] Please see Figure 7 , Figure 7 This is a schematic diagram of a liquid crystal antenna provided in an embodiment of this application.

[0083] Secondly, based on the same concept, this application also provides a liquid crystal antenna 200, which includes a phase shifter unit 100, a second substrate 21, and a liquid crystal layer 31 as described above. The second substrate 21 is disposed opposite to the first substrate 11, and the second substrate 21 and the first substrate 11 form a sealed space; the liquid crystal layer 31 is located between the first substrate 11 and the second substrate.

[0084] For example, such as Figure 7As shown, the liquid crystal antenna 200 includes a first substrate 11, a phase-shifting device 12, a protective layer 13, and a conductive layer 14. The phase-shifting device 12 is located on one side of the first substrate 11 and includes a first surface 12a away from the first substrate 11 and a first side surface 12b connected to the first surface 12a. The protective layer 13 is located on the same side of the first substrate 11 as the phase-shifting device 12 and covers the phase-shifting device 12 and a portion of the first substrate 11. The protective layer 13 includes a first opening 13k that exposes a portion of the first side surface 12b. The conductive layer 14 is located on the side of the protective layer 13 away from the first substrate 11. The conductive layer 14 includes a first conductive portion 141 extending along a first direction X. The first conductive portion 141 is electrically connected to the phase-shifting device 12 at least through the first opening 13k.

[0085] For example, such as Figure 7 As shown, the liquid crystal antenna 200 also includes a second substrate 21, a first metal layer 22, a first insulating layer 23, and a second conductive layer 24. The first metal layer 22 is located on one side of the second substrate 21, the first insulating layer 23 is located on the side of the first metal layer 22 away from the second substrate 21, and the second conductive layer 24 is located on the side of the first insulating layer 23 away from the second substrate 21.

[0086] For example, such as Figure 7 As shown, the liquid crystal antenna 200 also includes a liquid crystal layer 31 and a packaging portion 32. The packaging portion 32 can be bonded between the first substrate 11 and the second substrate 21, and the packaging portion 32 can seal the liquid crystal layer 31. The phase shifting device 12, the protective layer 13, the conductive layer 14, the first metal layer 22, the first insulating layer 23, the second conductive layer 24, the liquid crystal layer 31, and the packaging portion 32 are all located between the first substrate 11 and the second substrate 21.

[0087] For example, such as Figure 7 As shown, the package portion 32 may include an electrical connection sub-portion 321 located within the package portion 32. The electrical connection sub-portion 321 can electrically connect the first metal layer 22 and / or the second conductive layer 24 to one side of the first substrate 11.

[0088] For example, the specific working principle of the liquid crystal antenna 200 or the phase shifter unit 100 is as follows: the phase shifter 12 is connected to a bias voltage signal through the first conductive part 141, and the second conductive layer 24 is connected to a fixed potential (e.g., ground potential). This creates an electric field between the bias voltage signal on the phase shifter 12 and the second conductive layer 24. The electric field can drive the liquid crystal molecules in the liquid crystal layer 31 to deflect, causing the radio frequency signal transmitted on the phase shifter 12 to shift phase, thereby changing the phase of the radio frequency signal and realizing the phase shifting function of the radio frequency signal. The specific working principle of the liquid crystal antenna 200 or the phase shifter unit 100 is not limited to this.

[0089] For example, the liquid crystal antenna 200 or phase shifter unit 100 further includes a first alignment film 15 and a second alignment film 25. The first alignment film 15 is disposed on the side of the conductive layer 14 away from the first substrate 11, and the second alignment film 25 is disposed on the side of the second conductive layer 24 away from the second substrate 21. Both the first alignment film 15 and the second alignment film 25 can align liquid crystal molecules.

[0090] It should be noted that the structure and operation of the liquid crystal antenna 200 are not limited to those described above, and will not be repeated here.

[0091] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0092] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A phase shifter cell, characterized by, The application relates to a phase shifter unit, comprising: a first substrate; a phase shifter device located on one side of the first substrate, the phase shifter device comprising a first surface away from the first substrate and a first side surface connected to the first surface; a protective layer located on the same side of the first substrate as the phase shifter device, the protective layer covering the phase shifter device and part of the first substrate, the protective layer comprising a first opening that exposes part of the first side surface; a conductive layer located on the side of the protective layer away from the first substrate, the conductive layer comprising a first conductive part extending in a first direction, the first conductive part being electrically connected to the phase shifter device through the first opening; wherein the first opening comprises a first sub-opening edge and a second sub-opening edge opposite each other in the first direction, and the first side surface comprises a first sub-side edge and a second sub-side edge opposite each other in the first direction; the first sub-side edge and the second sub-side edge are both located between the projections of the first sub-opening edge and the second sub-opening edge on the first substrate.

2. The phase shifter unit of claim 1, wherein: in the first direction, the first sub-side edge is located between the first sub-opening edge and the second sub-side edge, and the second sub-side edge is located between the first sub-side edge and the second sub-opening edge; the distance between the projection of the first sub-opening edge on the first substrate and the projection of the second sub-opening edge on the first substrate is a first length; the distance between the projection of the first sub-side edge on the first substrate and the projection of the second sub-side edge on the first substrate is a second length; the ratio of the first length to the second length is greater than or equal to 2.

3. The phase shifter unit of claim 2, wherein: the distance between the projection of the first sub-opening edge on the first substrate and the projection of the first sub-side edge on the first substrate is a third length; the ratio of the third length to the second length is greater than or equal to 0.

5.

4. The phase shifter unit of claim 3, wherein: the distance between the projection of the second sub-opening edge on the first substrate and the projection of the second sub-side edge on the first substrate is a fourth length; the fourth length is equal to the third length.

5. The phase shifter unit of claim 1, wherein: the width of the first opening in a second direction is less than the width of the first conductive part in the second direction, the first direction intersecting the second direction.

6. The phase shifter unit of claim 1, wherein: the width of the first opening in a second direction is less than the width of the phase shifter device in the second direction, the first direction intersecting the second direction.

7. The phase shifter cell of any one of claims 1 to 4, wherein, the first conductive part comprises a first sub-conductive part and a second sub-conductive part connected to each other in the first direction; in a direction perpendicular to the plane of the first substrate, the first sub-conductive part overlaps the phase shifter device, and the second sub-conductive part is electrically connected to the phase shifter device through the first opening. The first sub-conductive part has a width in the second direction that is less than or equal to a width of the second sub-conductive part in the second direction, the second direction intersecting the first direction.

8. The phase shifter cell of claim 7, wherein, The protective layer includes at least one second opening, and the first sub-conductive part is electrically connected to the phase shift device through the second opening. The second opening has a width in the second direction that is less than a width of the first opening in the second direction.

9. The phase shifter unit of claim 7, wherein, In the second direction, the first sub-conductive part has a width that is less than a width of the second sub-conductive part, and the second sub-conductive part has a width that is less than a width of the phase shift device.

10. The phase shifter unit of claim 7, wherein, In the second direction, the first opening has a width that is greater than a width of the first sub-conductive part.

11. The phase shifter unit of claim 7, wherein, In the second direction, the second sub-conductive part has a width that is greater than a width of the phase shift device.

12. The phase shifter unit of claim 8, wherein, The first opening further includes a third sub-opening edge and a fourth sub-opening edge opposite in the second direction, and the second opening further includes a fifth sub-opening edge and a sixth sub-opening edge opposite in the second direction, the third sub-opening edge and the fifth sub-opening edge are both close to an edge of the first conductive part on the same side, and the fourth sub-opening edge and the sixth sub-opening edge are both close to an edge of the first conductive part on the other side. The distance from the third sub-opening edge to the edge of the first conductive part is equal to the distance from the fifth sub-opening edge to the edge of the first conductive part; and / or, The distance from the fourth sub-opening edge to the edge of the first conductive part is equal to the distance from the sixth sub-opening edge to the edge of the first conductive part.

13. A liquid crystal antenna, characterized by Comprising: The phase shifter unit of any one of claims 1 to 12; A second substrate is arranged opposite to the first substrate, and the second substrate and the first substrate form a sealed space; A liquid crystal layer is located between the first substrate and the second substrate.

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