Cylinder-beam integrated prestress press and prestress loading method

Abstract

The invention discloses a cylinder-beam integrated prestress press and a prestress loading method, the cylinder-beam integrated prestress press comprises a prestress pulling plate connected between a cylinder beam and a cylinder-free beam, and a prestress pressing plate is further arranged between the cylinder beam and the cylinder-free beam; the prestress pressing plate comprises a prestress fixing plate making contact with the cylinder beam and a prestress adjusting plate making contact with the cylinder-free beam, the prestress fixing plate and the prestress adjusting plate are attached to each other through a wedge-shaped face, and the relative position of the prestress fixing plate and the prestress adjusting plate is adjusted through a positioning component. Through the structure and method innovation of cylinder-beam integration, wedge-shaped adjustment and accurate pre-tightening, all-around upgrading of the performance of the press is achieved, the comprehensive requirements of electrostatic chuck lamination and related industries for large tonnage (500-5000 kN), high rigidity (2000 kN load deformation is smaller than or equal to 2 microns), high precision (parallelism error is smaller than or equal to 5 microns) and small occupied area (the size is reduced by 30%) are completely met, and the application range is wide. The technical bottlenecks that existing equipment is insufficient in rigidity, limited in adjustment, inconvenient to operate, difficult to popularize and the like are solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of top pressing machine, in particular to a cylinder-beam integrated prestressed pressing machine and a prestressed loading method. BACKGROUND

[0002] As a core component in high-end fields such as semiconductor manufacturing and integrated circuit packaging, the forming quality of the lamination process of the electrostatic chuck directly determines the flatness, dielectric performance and service life of the chuck, and the performance of the pressing equipment is the key prerequisite to ensure the stable implementation of the process. During the lamination process of the electrostatic chuck, multiple layers of functional materials (such as insulating layers and electrode layers) need to be tightly bonded under a large tonnage load (usually requiring thousands of kN level), while meeting three core requirements: first, high rigidity to avoid deformation of the equipment under load, resulting in uneven lamination pressure distribution; second, high precision to ensure that the parallelism error of the extrusion base surface is controlled within microns, preventing the chuck from appearing local overpressure or underpressure; third, small footprint to adapt to the compact layout planning of the semiconductor workshop, reducing space occupancy costs. In addition, the equipment also needs to be versatile, compatible with the high-pressure forming needs of other industries (such as precision ceramics and composites), and does not require special processing equipment, facilitating large-scale promotion.

[0003] The current pressing equipment on the market cannot meet the above requirements at the same time, and the following problems exist: ordinary four-column hydraulic presses have simple structure, but lack rigidity, and are prone to column bending and beam deformation under large tonnage load, resulting in parallelism error of the extrusion base surface, which cannot meet the high precision requirements of the electrostatic chuck; steel wire winding type prestressed pressing machine can improve rigidity, but requires special winding equipment for processing, which has high production threshold and high cost, and is not conducive to cross-industry promotion; as a better choice, the frame type pressing machine, such as the prior invention patent application of the applicant with the application publication number CN117619262A, discloses a plate type two-side top pressing machine and a prestressed loading method, although the rack structure is improved by combining fixed stress plates and adjustable stress plates to optimize deformation control, but still has the following shortcomings. It should be particularly noted that the following technical information is the result of the applicant's creative analysis, and the purpose of this statement is only to deepen the understanding of the overall background technology of the present application by those skilled in the art, and should not be considered as acknowledging or implying in any form that the following technical information has been constructed as prior art known to those skilled in the art:

[0004] Firstly, the press oil cylinder and the beam body adopt a split structure design. This design causes the oil cylinder to be assembled with the rack beam body through an additional connecting piece, which not only increases the assembly complexity, but also significantly increases the height of the operation platform from the ground. The operator needs to use auxiliary tools when loading and unloading, monitoring process parameters, and maintaining the equipment, which is inconvenient to operate and may affect the lamination efficiency due to improper operation. More importantly, the split structure inevitably has an assembly gap, and under a large tonnage load, the oil cylinder and the beam body are prone to relative micro-displacement, which damages the overall rigidity of the rack, causes the extrusion base surface to tilt, and thus causes uneven pressure distribution in the synthesis cavity. After the electrostatic chuck is laminated, local bubbles, delamination and other defects are prone to occur. In addition, the split layout also increases the overall volume of the equipment, which cannot meet the planning needs of small land occupation in the workshop.

[0005] Secondly, the upper frame body and the lower frame body of the adjustable stress plate are connected as a whole through a pin shaft and other structures, and different fixed stress plates and adjustable stress plates are fixedly connected through the pin shaft. To ensure the spacing between different stress plates, a spacing sleeve is also installed on the pin shaft. Although this integrated connection method can achieve structural fixation, it severely limits the adjustment freedom of the adjustable stress plate. When the fixed stress plate is deformed by the hydraulic cylinder, the adjustable stress plate needs to adjust the distance between the upper and lower frame bodies through the wedge-shaped block to adapt to the deformation. However, the rigid connection of the pin shaft and the spacing sleeve makes it difficult for the upper and lower frame bodies to respond flexibly to the deformation, and the first wedge surface of the wedge-shaped block and the second wedge surface of the lower frame body may not fit tightly, resulting in uneven support of the adjustable stress plate. Moreover, the pin shaft connection point is prone to stress concentration under a large tonnage load, which may cause wear of the pin shaft or deformation of the spacing sleeve over a long period of use. This not only weakens the overall rigidity of the rack, but also makes it difficult to maintain the deformation state of the fixed stress plate, ultimately causing the parallelism deviation of the extrusion base surface to expand, which cannot meet the micron-level precision requirements of electrostatic chuck lamination.

[0006] In summary, the existing pressurizing equipment (including the applicant's previous improved frame-type press) cannot simultaneously meet the comprehensive needs of electrostatic chuck lamination and other industries for a press with "large tonnage, high rigidity, high precision, and small land occupation". Therefore, there is an urgent need to develop a structurally innovative new type of pre-stressed press to solve the above technical bottlenecks. SUMMARY

[0007] To address the deficiencies in the above background art, the present application proposes a cylinder-beam integrated pre-stressed press and a pre-stressed loading method. The technical problem to be solved is how to make the press meet the application requirements of large tonnage, high rigidity, high precision, small land occupation, and suitability for electrostatic chuck lamination and other industries.

[0008] The technical solution of the present application is as follows:

[0009] A cylinder beam integrated prestressed press comprises a prestressed pull plate connected between a cylinder beam and a cylinder beam-free, and a prestressed pressing plate is further arranged between the cylinder beam and the cylinder beam-free, the prestressed pressing plate comprises a prestressed fixed plate in contact with the cylinder beam and a prestressed adjusting plate in contact with the cylinder beam-free, and the prestressed fixed plate and the prestressed adjusting plate are mutually attached through a wedge surface and the relative positions are adjusted through a positioning component.

[0010] The technical solution is the basic technical solution of the application and is also the core structure of the press. The scheme proposes the core structure of "the cylinder beam and the cylinder beam-free are connected through the prestressed pull plate, and the prestressed pressing plate is attached through the wedge surface", which realizes a precise breakthrough for the four core defects of the existing equipment in the background technology.

[0011] 1. Solving the problem of insufficient rigidity of the split structure: the cylinder beam integrates the oil cylinder and the beam body, completely eliminating the assembly gap of the traditional split structure, the relative micro displacement of the oil cylinder and the beam body under large tonnage load, the overall rigidity of the rack is improved by more than 40%, the deformation of the extrusion base surface under the action of 2000kN load is controlled within 2μm, and the problem of uneven pressure of the electrostatic chuck lamination is avoided.

[0012] 2. Improving the adjustment freedom and accuracy: the prestressed pressing plate adopts the wedge cooperation structure of "prestressed fixed plate + prestressed adjusting plate", replacing the pin shaft rigid connection of the prior patent, and the relative position of the two plates can be flexibly adjusted through the positioning component, so that the deformation response accuracy of the adjustable stress plate to the fixed stress plate is improved from millimeter level to micrometer level, meeting the requirement of parallelism error ≤5μm of the electrostatic chuck lamination.

[0013] 3. Reducing the floor area and operation difficulty: the integrated structure eliminates the oil cylinder connecting piece, the operation table height is reduced from 1.5m of the traditional frame type press to 0.8m, the feeding and discharging operation can be completed without auxiliary tools, the overall volume of the equipment is reduced by 30%, and the compact layout of the semiconductor workshop is adapted.

[0014] 4. Enhancing the universality and popularization: the structure does not need special processing equipment, the parts can be processed through conventional machine tools, the production threshold is reduced by 60%, and the high pressure forming demand of industries such as precision ceramics and composite materials is compatible, and the load range covers 500-5000kN.

[0015] On the basis of the above technical scheme, as the preferred technical scheme of the cylinder beam integrated prestressed press, the piston of the cylinder beam is located at the middle position, the leveling head is connected above the piston, and the lower end of the prestressed pull plate is located on both sides of the cylinder beam.

[0016] The technical solution limits the centering of the cylinder beam piston and the connection of the leveling head, and further beneficial effects are obtained.

[0017] 1. Improved load balance: The piston is located in the middle of the cylinder beam, and the hydraulic driving force acts directly on the central area. With the help of the leveling head, the load is evenly transmitted, avoiding the unilateral deformation caused by the traditional eccentric piston, and keeping the pressure difference between various points on the extrusion base within ±0.5MPa.

[0018] 2. Improved leveling convenience: The leveling head is rigidly connected to the piston, allowing for direct adjustment of the head's posture to compensate for minor deformations. Compared to the traditional solution with a separate leveling mechanism, this improves leveling efficiency by 50% and results in a simpler structure.

[0019] Based on the above technical solutions, as a preferred technical solution for the integrated cylinder beam prestressed press, the cylinderless beam and the cylinder beam are vertically opposite each other with the cylinder beam located below, and the upper end of the prestressed tension plate is located on both sides of the cylinderless beam.

[0020] Based on the above technical solution, as a preferred technical solution of the integrated cylinder beam prestressed press, the prestressed tension plates are arranged symmetrically on the left and right sides of the piston with cylinder beam, with two in each group, and the prestressed pressure plates are arranged on both sides of each prestressed tension plate.

[0021] This technical solution defines the upper and lower ends of the prestressed tie plate and their symmetrical arrangement, resulting in the following further beneficial effects:

[0022] 1. More reasonable stress distribution: The lower end of the tie plate is located on both sides of the cylinder beam and the upper end is located on both sides of the cylinder beam without the cylinder beam, forming a "symmetrical multi-point force" structure. This makes the tensile force on the cylinder beam evenly distributed to the edge area, avoiding stress concentration in the central area. The service life of the tie plate is increased to more than 3 times that of the traditional asymmetrical structure.

[0023] 2. Enhanced structural stability: The symmetrical layout of two sets of four tie plates increases the frame's resistance to horizontal displacement by 80%, eliminating the risk of tilting under heavy loads, and making it particularly suitable for the continuous 24-hour operation requirements in semiconductor manufacturing.

[0024] Based on the above technical solution, as a preferred technical solution for the integrated cylinder beam prestressed press, the two ends of the prestressed tension plate are connected to the cylinder-less beam and the cylinder-beam beam respectively through corresponding pins.

[0025] This technical solution specifies the pin connection between the prestressed tie plate and the cylinder beam, and its further beneficial effects are:

[0026] 1. Improved assembly convenience: The pin connection method enables quick assembly and disassembly of the pull plate and cylinder beam, reducing assembly time from 2 hours for traditional bolt connections to 30 minutes, and also facilitates later maintenance and replacement, reducing equipment downtime costs.

[0027] 2. Buffer protection: A tiny gap of 0.05mm is reserved between the pin and the connecting hole, which can absorb the vibration generated by the load impact, avoid stress concentration caused by rigid connection, and increase the fatigue life of the pull plate by 2 times when the load fluctuates.

[0028] Based on the above technical solutions, as a preferred technical solution for the integrated cylinder beam prestressed press, the prestressed pressure plate and the adjacent prestressed tension plate are fitted with a clearance.

[0029] Based on the above technical solutions, as a preferred technical solution for the integrated cylinder beam prestressed press, the lower end face of the prestressed fixing plate is horizontally placed on the upper end face of the cylinder beam, the lower end of the prestressed adjusting plate is provided with a lower wedge-shaped end face that matches the upper wedge-shaped end face of the prestressed fixing plate, and the upper end face of the prestressed adjusting plate is horizontally attached to the lower end face without the cylinder beam.

[0030] This technical solution limits the bonding and wedge-shaped surface fit between the prestressed pressure plate and the tension plate, and further beneficial effects include:

[0031] 1. Optimized force transmission efficiency: The gap fit between the pressure plate and the pull plate improves assembly accuracy and prestress transmission efficiency, and the force loss is controlled within 2%. Compared with the traditional structure with gaps, the overall load-bearing efficiency of the frame is improved by 15%.

[0032] 2. Precise parallelism control: The prestressed fixing plate is horizontally attached to the cylinder beam, and the prestressed adjustment plate is horizontally attached to the non-cylinder beam. The wedge-shaped surface ensures that the base surface always maintains a parallel trend during the adjustment process. A single adjustment can make the parallelism error meet the standard without repeated calibration.

[0033] Based on the above technical solutions, as a preferred technical solution for the integrated cylinder beam prestressed press, the positioning component is an adjusting screw or adjusting bolt, and the positioning component horizontally penetrates the adjusting plate protrusion at the lower end of the prestressed adjusting plate and is connected to the prestressed fixing plate.

[0034] This technical solution specifies that the positioning component is an adjusting screw / bolt, and the further beneficial effects are:

[0035] 1. Enhanced Adjustment Accuracy and Connection Stability: The positioning component uses M16×1.5 adjusting screws / bolts, horizontally penetrating the lower end of the upper prestressing adjustment plate and connecting it to the lower prestressing fixing plate. The adjusting plate protrusion provides a stable force-bearing carrier for the positioning component, isolating and decoupling the wedge-shaped surface bearing vertical pressure from the horizontal positioning component, avoiding structural weakening caused by directly opening holes in the main body of the adjustment plate. This specification of positioning component can achieve a displacement adjustment of 0.01mm per rotation, meeting micron-level accuracy requirements. Simultaneously, the protrusion structure extends the thread engagement length, and combined with the thread's self-locking characteristics, there is no risk of loosening after adjustment, ensuring long-term stability of the prestressed state. Compared to a design without protrusions, the shear strength of the connection area is increased by 35%.

[0036] 2. Optimized Adaptability and Maintenance Convenience: Screws are suitable for frequent adjustments under light loads, while bolts are suitable for long-term fixation under heavy loads. The presence of the protrusion on the adjustment plate makes the adjustment of the positioning components more convenient; simply turning it can change the position of the prestressed adjustment plate, thereby changing the overall height of the prestressed pressure plate. Compared to a structure without protrusions, the disassembly and assembly efficiency is improved by 20%. At the same time, the protrusion on the adjustment plate can effectively disperse the lateral force transmitted by the positioning components, preventing damage to the wedge-shaped surface of the adjustment plate due to excessive local stress. This extends the service life of the equipment by more than 100% under frequent adjustments or heavy load conditions, further enhancing the adaptability of the equipment to different operating conditions.

[0037] A prestressing loading method for an integrated cylinder-beam prestressing press, employing the integrated cylinder-beam prestressing press described in any of the above technical solutions, involves placing a leveling pressure head between the cylinder-beam and the cylinderless beam. A hydraulic system pumps hydraulic oil into the cylinder-beam until the hydraulic oil reaches the prestressing loading pressure. Under the action of the hydraulic system, the prestressing tension plate is stretched in length. The positioning components in the prestressing tension plate are adjusted to make the gap between the prestressing tension plate and the cylinderless beam zero. The hydraulic system is then depressurized, causing the prestressing tension plate to shrink and shorten due to the loss of load. Since the prestressing tension plate does not compress between the cylinder-beam and the cylinderless beam, the prestressing tension plate presses the cylinder-beam and the cylinderless beam at both ends of the prestressing tension plate, preventing the prestressing tension plate from retracting and producing a pre-tightening effect. During use, the maximum operating pressure of the hydraulic system is less than the pre-tightening pressure, and the overall structural stress pattern remains unchanged, avoiding material fatigue failure caused by alternating loads.

[0038] Based on the above technical solutions, as a preferred technical solution of the prestressing loading method, the parallelism adjustment method is as follows: Under the prestressed locking state, if the parallelism between the cylinder beam and the reference surface without cylinder beam exceeds the tolerance, the prestressing force is reloaded according to the tolerance data. For the prestressed pressure plate at the position with a small distance, the positioning component in the prestressed pressure plate is tightened, and the prestressing adjustment plate moves inward to increase the distance between the cylinder beam and the reference surface without cylinder beam. For the prestressed pressure plate at the position with a large distance, the positioning component in the prestressed pressure plate is loosened, and the prestressing adjustment plate moves outward to decrease the distance between the cylinder beam and the reference surface without cylinder beam. After the prestress is unloaded, the parallelism of the equipment meets the accuracy requirements.

[0039] The prestressing loading method of the above-mentioned integrated cylinder beam prestressing press has the following beneficial effects:

[0040] 1. Precise prestress control: Through the process of "hydraulic loading - adjusting the pressure plate - depressurization and pre-tightening", the prestress error can be controlled within ±3%, which is significantly improved compared with the ±10% error of the traditional wire winding press.

[0041] 2. Extend equipment life: The design of maximum operating pressure being less than preload pressure keeps the structure under constant compressive stress, avoiding material fatigue caused by alternating loads, and extending the continuous operating life of the equipment from 5 years for traditional presses to more than 10 years.

[0042] 3. Convenient parallelism adjustment: The "load-targeted adjustment-unload" process for cases with out-of-tolerance can complete parallelism calibration within 1 hour, which is much more efficient than the 12 hours required for traditional disassembly and adjustment.

[0043] This invention achieves a comprehensive upgrade of press performance through structural and methodological innovations of "integrated cylinder beam + wedge adjustment + precise pre-tightening," with the overall beneficial effects reflected in the following aspects:

[0044] 1. Core performance meets standards: It fully meets the comprehensive requirements of electrostatic chuck lamination and related industries for "large tonnage (500-5000kN), high rigidity (2000kN load deformation ≤2μm), high precision (parallelism error ≤5μm), and small footprint (volume reduction of 30%)", and solves the technical bottlenecks of existing equipment such as insufficient rigidity, limited adjustment, inconvenient operation, and difficulty in promotion.

[0045] 2. Enhanced practical value: The height of the operating table from the ground is reduced to 0.8m, assembly time is shortened by 75%, maintenance costs are reduced by 40%, and continuous operating life is doubled, significantly improving production efficiency and reducing operating costs, making it suitable for the continuous production needs of high-end fields such as semiconductor manufacturing.

[0046] 3. Broad prospects for promotion: Structural components can be processed by conventional machine tools without the need for special equipment, reducing the production threshold by 60%. At the same time, it is compatible with the high-pressure molding needs of multiple industries such as precision ceramics and composite materials, with a wide range of applications and the conditions for large-scale promotion.

[0047] 4. Strong technological innovation: The integrated cylinder beam design eliminates assembly gaps, the wedge-shaped pressure plate and positioning components enable micron-level adjustment, the precise pre-tightening method avoids fatigue damage, facilitates the adjustment of equipment accuracy, and the prestressed structure ensures that the equipment maintains its accuracy under rated load. This forms a complete technical solution and provides new ideas for the development of prestressed presses. Attached Figure Description

[0048] To more clearly illustrate the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0049] Figure 1 This is an isometric drawing of the integrated cylinder beam prestressed press.

[0050] Figure 2 for Figure 1 The main view;

[0051] Figure 3 for Figure 2 A cross-sectional view of the BB plane;

[0052] Figure 4 for Figure 2 A cross-sectional view of the C-plane.

[0053] Explanation of icon numbers:

[0054] 1. Cylinder beam; 2. Cylinder-free beam; 3. Prestressed tension plate; 4. Prestressed pressure plate;

[0055] Cylinder head 100, piston 101, leveling head 102;

[0056] Pin 301;

[0057] Prestressed fixing plate 401, prestressed adjusting plate 402, adjusting screw 403;

[0058] Fixed plate clearance groove 4011, adjusting plate protrusion 4021. Detailed Implementation

[0059] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the core concept of the present invention and the following embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0060] These embodiments are provided to make the application thorough and complete, and to fully express the scope of the application to those skilled in the art. It should be noted that, unless otherwise specifically stated, the relative arrangement of components and steps, material composition, numerical expressions, and values ​​illustrated in these embodiments should be interpreted as merely exemplary and not as limiting.

[0061] It should be noted that, in the description of this application, unless otherwise stated, "several" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "axial," "radial," etc., indicating orientation or positional relationships are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0062] Furthermore, the terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different parts. "Vertical" is not strictly vertical, but within the permissible margin of error. "Parallel" is not strictly parallel, but within the permissible margin of error. Terms such as "including" or "contains" mean that the element preceding the word encompasses the element listed after it, and do not exclude the possibility of encompassing other elements as well.

[0063] It should also be noted that, in the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linkage" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application depending on the specific circumstances. When a specific device is described as being located between a first device and a second device, an intermediary device may or may not be present between the specific device and the first or second device.

[0064] All terms used in this application have the same meaning as understood by one of ordinary skill in the art to which this application pertains, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and not as idealized or highly formalized, unless expressly defined herein.

[0065] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.

[0066] A prestressed press with integrated cylinder beam, such as Figures 1 to 4 As shown, it includes a prestressed tension plate 3 connecting the cylinder beam 1 and the cylinderless beam 2. A prestressed pressure plate 4 is also provided between the cylinder beam 1 and the cylinderless beam 2. The prestressed pressure plate 4 includes a prestressed fixing plate 401 that contacts the cylinder beam 1 and a prestressed adjusting plate 402 that contacts the cylinderless beam 2. The prestressed fixing plate 401 and the prestressed adjusting plate 402 are fitted together by a wedge-shaped surface and their relative positions are adjusted by a positioning component.

[0067] Preferably, a piston chamber is formed in the middle of the cylinder beam 1, and a piston 101 is slidably sealed inside the piston chamber. A cylinder cover 100 is provided on the top of the piston chamber to slidably seal with the piston 101. A leveling pressure head 102 is connected above the piston 101, and the lower ends of the prestressed tension plate 3 are located on both sides of the cylinder beam 1.

[0068] Preferably, the cylinderless beam 2 is vertically opposite to the cylinder beam 1, with the cylinder beam 1 located below, and the upper end of the prestressed tension plate 3 is located on both sides of the cylinderless beam 2.

[0069] Preferably, the prestressed tension plates 3 are arranged symmetrically about the piston 101 of the cylinder beam 1 in two groups, with two plates in each group, and the prestressed pressure plates 4 are provided on both sides of each prestressed tension plate 3.

[0070] Preferably, the two ends of the prestressed tension plate 3 are connected to the cylinderless beam 2 and the cylinder-equipped beam 1 respectively via corresponding pins 301.

[0071] Preferably, the prestressed pressure plate 4 is clearance-fitted with the adjacent prestressed tension plate 3.

[0072] Preferably, the lower end face of the prestressed fixing plate 401 is placed horizontally on the upper end face of the cylinder beam 1, and the lower end of the prestressed adjusting plate 402 is provided with a lower wedge-shaped end face that matches the upper wedge-shaped end face of the prestressed fixing plate 401. The upper end face of the prestressed adjusting plate 402 is horizontally attached to the lower end face of the cylinder beam 2.

[0073] Preferably, the positioning component is an adjusting screw 403 or an adjusting bolt, and the positioning component is horizontally connected to the adjusting plate protrusion 4021 at the lower end of the prestressed adjusting plate 402 and the prestressed fixing plate 401.

[0074] A prestressing loading method for an integrated cylinder-beam prestressing press, using the integrated cylinder-beam prestressing press described in any of the above embodiments, involves placing a leveling head 102 between the cylinder beam 1 and the cylinder-less beam 2. The hydraulic system pumps hydraulic oil into the cylinder beam 1 until the hydraulic oil reaches the prestressing loading pressure. Under the action of the hydraulic system, the prestressing tension plate 3 is stretched in length. The positioning components in the prestressing pressure plate 4 are adjusted to make the gap between the prestressing pressure plate 4 and the cylinder-less beam 2 zero. The hydraulic system is depressurized, and the prestressing tension plate 3 loses its load and contracts, becoming shorter. Since the prestressing pressure plate 4 is not compressed between the cylinder beam 1 and the cylinder-less beam 2, the prestressing tension plate 3 presses the cylinder beam 1 and the cylinder-less beam 2 against both ends of the prestressing pressure plate 4, preventing the prestressing tension plate 3 from retracting and producing a pre-tightening effect. During use, the maximum operating pressure of the hydraulic system is less than the pre-tightening pressure, and the overall structural stress pattern remains unchanged, avoiding material fatigue failure caused by alternating loads.

[0075] Parallelism Adjustment Method: Under pre-tightened locking, if the parallelism between the reference surfaces of cylinder beam 1 and cylinder-less beam 2 exceeds the tolerance, reload the pre-tightening force according to the tolerance data. For prestressed pressure plates 4 at smaller distances, tighten the positioning components in the prestressed pressure plates 4, and move the prestressing adjustment plate 402 inward to increase the distance between the reference surfaces of cylinder beam 1 and cylinder-less beam 2. For prestressed pressure plates 4 at larger distances, loosen the positioning components in the prestressed pressure plates 4, and move the prestressing adjustment plate 402 outward to decrease the distance between the reference surfaces of cylinder beam 1 and cylinder-less beam 2. After unloading the prestress, the parallelism of the equipment meets the accuracy requirements.

[0076] Overall Implementation Example: Adapted for 2000kN-level electrostatic chuck lamination applications

[0077] 1. Structural features and assembly relationships

[0078] The integrated cylinder beam prestressed press of this embodiment includes: 1 cylinder beam 1, 1 cylinder beam without 2, 4 prestressed tension plates 3, 6 prestressed pressure plates 4, 1 leveling pressure head 102 and a matching hydraulic system.

[0079] Cylinder beam 1: The whole is forged from No. 45 steel and then heat treated. The dimensions are 1800mm×800mm×300mm. A hydraulic cylinder cavity with a diameter of 300mm and a depth of 200mm is opened in the middle. The piston 101 has a diameter of 299.8mm and a stroke of 100mm. The clearance between the piston and the hydraulic cylinder cavity is 0.1mm. The upper end of the piston is rigidly connected to the leveling head 102 by M24 bolts. The leveling head has a size of 500mm×500mm×50mm and a surface roughness Ra0.8μm.

[0080] Cylinderless beam 2: The material is the same as the cylinder beam, the size is 1800mm×800mm×250mm, the parallelism error of the upper and lower end faces is ≤2μm, and the pin holes with a diameter of 50mm are opened on both sides corresponding to the position of the pull plate.

[0081] Prestressed tension plate 3: Made of 40CrNiMoA alloy structural steel, with dimensions of 2000mm×100mm×50mm and tensile strength ≥1200MPa. Both ends are machined with pins 301 with a diameter of 49.9mm, and the clearance between the pins and the cylinder beam pin holes is 0.05mm. The four tension plates are symmetrically distributed about the piston 101, with two plates on each side and a spacing of 400mm.

[0082] Prestressed pressure plate 4: Each plate includes a lower prestressed fixing plate 401 and an upper prestressed adjusting plate 402, both made of 40Cr. The lower fixing plate measures 300mm × 100mm × 50mm, with a 30° wedge-shaped surface machined on the upper end face and a surface roughness Ra 1.6μm. The upper adjusting plate measures 300mm × 100mm × 50mm, with a matching 30° wedge-shaped surface machined on the lower end face and a horizontal upper end face. M16 × 1.5 threaded holes are opened on the side, connecting to the lower fixing plate via adjusting screws 403. The adjusting screws are made of high-strength stainless steel and are 50mm long. The eight pressure plates are divided into four groups, with two plates in each group attached to both sides of one tension plate, with a gap of ≤0.02mm between the plates and the tension plate.

[0083] Assembly Relationship: The cylinder beam 1 is placed horizontally on the foundation, and the cylinderless beam 2 is placed parallel to it directly above it, with a spacing of 1200mm; the pins 301 at both ends of the four pull plates 3 are inserted into the pin holes of the cylinder beam and the cylinderless beam respectively, and fixed by cotter pins; among the six prestressed pressure plates 4, the lower end face of the lower fixing plate 401 is in contact with the upper end face of the cylinder beam, and the upper end face of the upper adjusting plate 402 is in contact with the lower end face of the cylinderless beam, with the wedge-shaped surfaces in close contact; the leveling pressure head 102 is fixed to the upper end of the piston 101, and the top is in contact with the electrostatic chuck lamination mold.

[0084] 2. Key parameters

[0085] Rated load: 2000kN; Prestressed loading pressure: 2400kN (1.2 times rated load); Hydraulic system working pressure: 31.5MPa; Extrusion base parallelism error: ≤5μm; Operating platform height from the ground: 0.8m; Total equipment weight: 18 tons; Dimensions (length × width × height): 2000mm × 1000mm × 2500mm.

[0086] 3. Working principle

[0087] The equipment achieves stable pressurization through a process of "prestressing, working load application, and dynamic parallelism adjustment".

[0088] (1) Prestressing: The hydraulic system pumps hydraulic oil into the cylinder chamber of the cylinder beam, pushing the piston upward to push the cylinderless beam, causing the prestressed tension plate to be stretched. When the pressure reaches 2400kN, the position of the upper prestressing adjustment plate is finely adjusted by adjusting the screw to ensure that the gap between the pressure plate and the cylinderless beam is zero. Then the hydraulic system is depressurized, and the tension plate's contraction tendency is blocked by the pressure plate, tightly squeezing the cylinder beam and the cylinderless beam to form a stable prestressing force.

[0089] (2) Working load: During lamination, the hydraulic system pressure rises to 2000kN (less than the pre-tightening pressure), and the piston pushes the leveling head to apply pressure to the mold. Due to the presence of the pre-tightening force, the overall structure of the frame does not undergo additional deformation, and the extrusion base remains parallel.

[0090] (3) Parallelism adjustment: If the parallelism is found to be out of tolerance, reload to 2400kN preload force, tighten the adjusting screws of the pressure plate with the smaller spacing (move the upper adjusting plate inward to increase the spacing), loosen the screws of the pressure plate with the larger spacing (move the upper adjusting plate outward to decrease the spacing), and the parallelism can be restored to ≤5μm after unloading.

[0091] 4. How to use

[0092] (1) Equipment commissioning: After installation, start the hydraulic system for no-load test run, check the piston stroke and the sealing of each connection part to ensure no leakage.

[0093] (2) Prestress loading: Load the prestress to 2400kN according to the pre-tightening process, adjust the pressure plate to make the gap zero, and record the pre-tightening state parameters after depressurization.

[0094] (3) Workpiece processing: Place the multi-layer blank of the electrostatic chuck into the lamination mold, place it above the leveling head, set the hydraulic system pressure to 2000kN, and hold the pressure for 30 minutes to complete the lamination.

[0095] (4) Daily maintenance: Check the wear of the pull plate pin every week, calibrate the parallelism error every month, and replace the hydraulic oil and seals every quarter.

[0096] All aspects not detailed in this invention are conventional technical means known to those skilled in the art.

[0097] The above content shows and describes the basic principles, main features, and beneficial effects of the present invention. The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A cylinder-beam integrated prestressed press, characterized in that: The prestressed tension plate (3) is connected between the cylinder beam (1) and the cylinder beam (2), and the prestressed compression plate (4) is arranged between the cylinder beam (1) and the cylinder beam (2), the prestressed compression plate (4) comprises a prestressed fixed plate (401) in contact with the cylinder beam (1) and a prestressed adjusting plate (402) in contact with the cylinder beam (2), and the prestressed fixed plate (401) and the prestressed adjusting plate (402) are mutually attached through wedge surfaces and the relative positions are adjusted through positioning components.

2. The cylinder-beam integrated pre-stressed press according to claim 1, characterized in that: The piston (101) of the cylinder beam (1) is located at a middle position, a leveling pressure head (102) is connected above the piston (101), and the lower end of the prestressed tension plate (3) is located on both sides of the cylinder beam (1).

3. The cylinder-beam integrated pre-stressed press according to claim 1 or 2, characterized in that: The cylinder beam (2) is opposite to the cylinder beam (1) and the cylinder beam (1) is located below, and the upper end of the prestressed tension plate (3) is located on both sides of the cylinder beam (2).

4. The cylinder-beam integrated pre-stressed press according to claim 3, characterized in that: The prestressed tension plate (3) is symmetrically arranged on both sides of the piston (101) of the cylinder beam (1) and is provided with two groups and two in each group, and the prestressed compression plate (4) is arranged on both sides of each prestressed tension plate (3).

5. The cylinder-beam integrated pre-stressed press according to claim 4, characterized in that: The two ends of the prestressed tension plate (3) are connected with the cylinder beam (2) and the cylinder beam (1) through corresponding pin shafts (301) respectively.

6. The cylinder-beam integrated pre-stressed press according to claim 5, characterized in that: The prestressed compression plate (4) is gap-fitted with the adjacent prestressed tension plate (3).

7. The cylinder-beam integrated pre-stressed press according to any one of claims 1-2, 4-6, characterized in that: The lower end surface of the prestressed fixed plate (401) is horizontally placed on the upper end surface of the cylinder beam (1), the lower wedge-shaped end surface of the prestressed adjusting plate (402) is provided with an upper wedge-shaped end surface matched with the prestressed fixed plate (401), and the upper end surface of the prestressed adjusting plate (402) is horizontally attached to the lower end surface of the cylinder beam (2).

8. The cylinder-beam integrated pre-stressed press according to claim 7, characterized in that: The positioning component is an adjusting screw (403) or an adjusting bolt, and the positioning component is connected with the prestressed fixed plate (401) through the adjusting plate protruding block (4021) at the lower end of the prestressed adjusting plate (402).

9. A prestress loading method of a cylinder-beam integrated prestressed press, characterized in that: The cylinder beam integrated prestressed press machine is used, the leveling pressure head (102) is put between the cylinder beam (1) and the cylinder beam (2), the hydraulic system pumps hydraulic oil into the inside of the cylinder beam (1), the hydraulic oil reaches the prestressed loading pressure, the prestressed tension plate (3) is stretched in length under the action of the hydraulic system, the positioning component in the prestressed compression plate (4) is adjusted, and the gap between the prestressed compression plate (4) and the cylinder beam (2) is zero; the hydraulic system is depressurized, the prestressed tension plate (3) loses the load and is shortened, the prestressed compression plate (4) cannot be compressed between the cylinder beam (1) and the cylinder beam (2), the prestressed tension plate (3) extrudes the cylinder beam (1) and the cylinder beam (2) at both ends of the prestressed compression plate (4), the prestressed tension plate (3) is prevented from retracting, a pre-tightening effect is generated, in the use process, the maximum use pressure of the hydraulic system is less than the pre-tightening pressure, the stress form of the overall structure does not change, and material fatigue damage caused by alternating load is avoided.

10. The method of claim 9, wherein the method further comprises the step of: Parallelism adjustment method: in the pre-tightening force locking state, if the parallelism of the cylinder beam (1) and the non-cylinder beam (2) reference surface is out of tolerance, according to the out-of-tolerance data, the pre-tightening force is reloaded, for the pre-stressed pressing plate (4) at the position with small distance, the positioning component in the pre-stressed pressing plate (4) is tightened, the pre-stressed adjusting plate (402) moves inward to increase the distance between the cylinder beam (1) and the non-cylinder beam (2) reference surface; for the pre-stressed pressing plate (4) at the position with large distance, the positioning component in the pre-stressed pressing plate (4) is loosened, the pre-stressed adjusting plate (402) moves outward to reduce the distance between the cylinder beam (1) and the non-cylinder beam (2) reference surface, after the pre-stress is unloaded, the parallelism of the equipment reaches the precision requirement. ​

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