Laser spot adjusting method and laser processing device

Abstract

The embodiment of the invention discloses a laser spot adjusting method and a laser processing device. The method comprises the following steps: selecting a target light spot motion path; determining an adjusting instruction of the two-dimensional electromagnetic galvanometer mechanism according to the target light spot motion path; and the two-dimensional electromagnetic galvanometer mechanism responds to the adjustment instruction and generates a corresponding electromagnetic driving force to drive a reflector of the two-dimensional electromagnetic galvanometer mechanism to rotate around a first shaft and / or a second shaft, so that the laser spot moves along a target spot movement path. According to the laser spot adjusting method, the diversity of laser spot motion paths is achieved, the swing pattern of the laser spots is upgraded from a simple line to a complex pattern, laser processing is upgraded from traditional linear processing to surface processing, and the process flexibility and adaptability of laser processing are improved.

Description

Technical Field

[0001] This invention relates to the field of laser processing technology, and in particular to a laser spot adjustment method and a laser processing apparatus. Background Technology

[0002] The basic optical principle of a laser handheld laser gun head includes three parts: beam collimation, beam oscillation, and beam focusing. After the laser beam is emitted from the QBH (Qlass Beam Head), it is collimated into parallel light by a collimating lens, then reflected by a galvanometer to a focusing lens, and finally focused onto the workpiece surface. Specifically, the collimating lens converts the diverging laser beam into parallel light, the galvanometer deflects at high speed under the drive of a motor, changing the laser beam path and achieving beam oscillation, and the focusing lens concentrates the parallel beams together to form a small spot with extremely high energy density for processing the workpiece.

[0003] In traditional laser processing systems, especially handheld laser welding devices equipped with one-dimensional galvanometer mechanisms, the laser beam can only be deflected in a single dimension (such as the X-axis or Y-axis), and can only achieve linear movement of the laser spot. This results in simple linear processing, lacks process flexibility and adaptability, and directly affects the processing effect, processing accuracy and processing efficiency.

[0004] In actual laser processing, different laser spot oscillation patterns need to be adapted to different plate thicknesses and processing requirements in order to achieve higher quality, higher precision and higher efficiency laser processing. Summary of the Invention

[0005] Based on this, it is necessary to propose a laser spot adjustment method and a laser processing device to address the above problems.

[0006] A laser spot adjustment method is applied to a laser processing apparatus, the laser processing apparatus including a two-dimensional electromagnetic galvanometer mechanism, the method comprising: Select the target light spot's motion path; The adjustment command for the two-dimensional electromagnetic galvanometer mechanism is determined based on the target light spot's motion path; The two-dimensional electromagnetic galvanometer mechanism responds to the adjustment command and generates a corresponding electromagnetic driving force to drive the reflector of the two-dimensional electromagnetic galvanometer mechanism to rotate around the first axis and / or the second axis, so that the laser spot moves along the target spot motion path.

[0007] Preferably, the target light spot movement path includes, but is not limited to, one of the following: "circular", "figure-eight", or "rhomboid".

[0008] Preferably, the adjustment command is a control command for regulating the driving power of the two-dimensional electromagnetic galvanometer mechanism, and the driving power includes driving voltage and / or driving current.

[0009] Preferably, the control command controls the amplitude of the rotation of the reflector of the two-dimensional electromagnetic galvanometer mechanism along the first axis and / or the second axis through a DAC signal, thereby realizing the target light spot motion path.

[0010] Preferably, it further includes: acquiring the actual light spot motion path through an image acquisition unit.

[0011] Preferably, it further includes: fine-tuning the two-dimensional electromagnetic galvanometer mechanism or adjusting the amplitude compensation of the two-dimensional electromagnetic galvanometer mechanism according to the difference between the actual light spot movement path and the target light spot movement path.

[0012] Preferably, the image acquisition unit is a CCD detector.

[0013] Preferably, the method further includes: pre-establishing a database; the database stores the correspondence between the processing requirements and the target light spot movement path, the correspondence including but not limited to functional relationships, curve relationships, or lookup tables.

[0014] Preferably, the method further includes: synchronously collecting the adjusted actual spot motion path and corresponding processing effect data to generate feedback data, and dynamically establishing and / or updating the processing requirement-target spot motion path mapping library based on the feedback data.

[0015] A laser processing apparatus includes a processor and a memory, wherein the memory stores a computer program, and when executed by the processor, the computer program causes the processor to perform the following steps: Select the corresponding target light spot motion path; The adjustment command for the two-dimensional electromagnetic galvanometer mechanism is determined based on the target light spot's motion path; The two-dimensional electromagnetic galvanometer mechanism responds to the adjustment command and generates a corresponding electromagnetic driving force to drive the reflector of the two-dimensional electromagnetic galvanometer mechanism to rotate around the first axis and / or the second axis, so that the laser spot moves along the target spot motion path.

[0016] The embodiments of the present invention have the following beneficial effects: This invention achieves intelligent and rapid selection and control of the laser spot's motion path by establishing a correspondence between processing requirements and the target laser spot's motion path, and by utilizing the drive control of a two-dimensional galvanometer mechanism. Once the target laser spot's motion path is determined, it is converted into high-precision adjustment commands such as DAC signals to drive the reflectors of the two-dimensional electromagnetic galvanometer mechanism to swing collaboratively along two axes, thereby controlling the laser spot's oscillation pattern. Furthermore, for the electromagnetic galvanometer mechanism of this invention, the magnetic components are directly fixed to the frame of the elastic component, the magnetic excitation component is directly fixed to the electrical connector body, and the magnetic components are nested together, resulting in a small size, flat design, light weight, high precision, and high reliability. Using this small, flat, light weight, high precision, and high reliability electromagnetic galvanometer mechanism in the laser spot adjustment method of this invention allows for greater diversity in laser spot motion paths compared to existing technologies, upgrading the laser spot's oscillation pattern from simple lines to complex patterns, and transforming laser processing from traditional linear processing to surface processing, thus increasing the flexibility and adaptability of laser processing. Furthermore, by fine-tuning the galvanometer or compensating for its amplitude based on the difference between the actual and the target, a closed-loop calibration and correction mechanism for the laser spot trajectory was constructed, which effectively overcame mechanical and thermal drift errors and ensured the high-precision distribution of laser energy along the motion path. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] in: Figure 1 This is a schematic diagram of a laser processing apparatus in one embodiment.

[0019] Figure 2 This is a first-angle perspective view of a two-dimensional electromagnetic galvanometer mechanism in one embodiment.

[0020] Figure 3 This is a second-angle perspective view of a two-dimensional electromagnetic galvanometer mechanism in one embodiment.

[0021] Figure 4 This is an exploded view of a two-dimensional electromagnetic galvanometer mechanism in one embodiment.

[0022] Figure 5 This is a schematic diagram of the electrical connector in a two-dimensional electromagnetic galvanometer mechanism in one embodiment.

[0023] Figure 6 This is a flowchart of a method for dynamically adjusting the light spot in one embodiment. Detailed Implementation

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] This invention provides a laser spot adjustment method, applied to laser processing equipment, such as... Figure 1 As shown, the laser processing apparatus includes: A laser is used to output a laser beam. A two-dimensional electromagnetic galvanometer mechanism is located downstream of the laser and is used to receive the incident laser beam and change the propagation direction of the incident laser beam by adjusting the angle. The control unit, electrically connected to the two-dimensional electromagnetic galvanometer mechanism, is used to control the operation of the laser processing device.

[0026] like Figure 2-5 As shown, the two-dimensional electromagnetic galvanometer mechanism includes: Reflector 1 is used to reflect the laser beam and adjust the reflected beam by changing its angle. The elastic component 2 includes a frame 201, at least two elastic elements 202 disposed on the frame 201, and a magnetic component 203. The reflector 1 is installed in the central region of the frame 201, and the elastic element 202 has a preset elastic degree of freedom. The electrical connector 3 includes an electrical connector body 301 and at least two magnetic excitation components 302 disposed on the electrical connector body 301. The magnetic excitation components 302 are electrically connected to the electrical connector body 301 and are disposed corresponding to the magnetic components 203 on the elastic component 2. The magnetic excitation components 302 and the magnetic components 203 constitute a driving component. One end of the electrical connector body 301 is used to receive a real-time current control signal and pass a driving current to the magnetic excitation component 302, so that an electromagnetic driving force is generated between the magnetic excitation component 302 and the magnetic component 203. The electromagnetic driving force is used to drive the elastic component 2 to deform, so as to drive the reflector 1 to change its angle.

[0027] By directly fixing the magnetic excitation component 302 to the electrical connector body 301, without the need for a complex transmission mechanism, the magnetic component and the elastic component 2, which are designed as an integral part, can transmit power to the elastic component 2 without loss, driving the reflector 1 to deflect. This avoids the problems of backlash error and friction loss commonly found in traditional indirect drive. The two-dimensional electromagnetic galvanometer mechanism achieves the beneficial effects of small size, flatness, light weight, high precision, and good reliability through the layout of the magnetic component 203 on the same side as the reflector 1, the integrated design of the magnetic component and the elastic component 2, and the sleeve of the magnetic excitation component 302.

[0028] For example, a reflector 1 is fixed in the central region of the frame 201.

[0029] The function of the reflector 1 is to reflect the laser beam and change the direction of the beam by controlling its angle, thereby achieving precise control in laser processing.

[0030] For example, the electrical connector 3 is disposed on the front side of the reflector 1 on the elastic component 2, and the electrical connector body 301 has a hollow area at one end corresponding to the elastic component 2, and the hollow area does not block the effective reflection area of ​​the reflector 1.

[0031] For example, the magnetic component 301 is a permanent magnet, the magnetic excitation component 302 is a coil, the magnetic excitation component 302 forms a receiving space, the permanent magnet 301 can be placed in the receiving space of the magnetic excitation component 302 and the outer peripheral surface is provided with a gap between the inner wall of the space, so that the permanent magnet 301 can move in a preset direction within the receiving space.

[0032] For example, the electrical connector body 301 is a rigid circuit board (PCB), a flexible circuit board (FPC), a flexible flat cable (FFC), or a rigid-flex PCB.

[0033] For example, the number of driving components and elastic elements 202 are the same. When there are 4 driving components and they are distributed along the X and Y axes, two-dimensional adjustment is achieved.

[0034] For example, the two-dimensional electromagnetic galvanometer mechanism further includes a support base 4, which is disposed on the front side of the reflector 1 on the elastic component 2 and is rigidly connected to the elastic component 2 to limit the displacement of the elastic component 2 in the non-deformation direction. The support base 4 has a hollow area that does not block the effective reflection area of ​​the reflector 1.

[0035] For example, the support base 4 is provided with a clearance groove 401 through which the magnetic component 203 and the magnetic excitation component 302 can pass, and its position and shape are adapted to the magnetic excitation component 302.

[0036] Furthermore, the two-dimensional electromagnetic galvanometer mechanism also includes a support plate 5, which is disposed on the back side of the reflector 1 on the elastic component 2 and is arranged parallel to the support base 4 to form a closed support frame. The support plate 5 and the support base 4 are detachably and fastened together.

[0037] Furthermore, the two-dimensional electromagnetic galvanometer mechanism also includes at least two fixing members 6 for fastening the two-dimensional electromagnetic galvanometer mechanism. The fixing members 6 can pass through the two-dimensional electromagnetic galvanometer mechanism and connect to the installation interface.

[0038] For example, the two-dimensional electromagnetic galvanometer mechanism further includes at least one sensor assembly disposed on the elastic component 2 and / or the electrical connector 3, the sensor assembly being electrically connected to the electrical connector 3 for real-time monitoring and feedback of the angle change of the reflector 1.

[0039] like Figure 6 As shown, the method includes: Step 101: Select the target light spot motion path; Specifically, the appropriate target spot motion trajectory is selected based on the target material, process requirements, or application requirements of the laser processing.

[0040] The types of target spot motion paths are diverse. The target spot motion paths include, but are not limited to, one of the following: "circular", "figure-eight", or "rhomboid".

[0041] For example, a figure-eight oscillation can be selected for high-absorption materials that require enhanced energy coupling. For brittle materials that require uniform heating to prevent stress concentration, a circular oscillation is used. The preset path selection mechanism ensures that the beam adjustment is targeted and efficient.

[0042] Step 102: Determine the adjustment command of the two-dimensional electromagnetic galvanometer mechanism according to the target light spot motion path; Specifically, the adjustment command is essentially a control signal used to regulate the driving electrical energy of the two-dimensional electromagnetic galvanometer mechanism.

[0043] The driving energy includes driving voltage and / or driving current.

[0044] In order to achieve complex and dynamic light spot movement, the control command needs to control the amplitude of the rotation of the reflector 1 of the two-dimensional electromagnetic galvanometer mechanism along the first axis and / or the second axis through DAC (digital-to-analog converter) signals.

[0045] The control unit generates the required swing angle of the reflector around the first axis and / or the second axis based on the geometric characteristics of the target light spot's motion path (such as circular, rhomboid, or figure-eight shape).

[0046] Step 103: The two-dimensional electromagnetic galvanometer mechanism responds to the adjustment command and generates a corresponding electromagnetic driving force to drive the reflector 1 of the two-dimensional electromagnetic galvanometer mechanism to rotate around the first axis and / or the second axis, so that the laser spot moves along the target spot motion path.

[0047] Specifically, the two-dimensional electromagnetic galvanometer mechanism receives the adjustment command determined in step 102, i.e., the real-time current control signal, and transmits it to the corresponding coil. An electromagnetic driving force is generated between the coil and the permanent magnet on the elastic component 2. This electromagnetic driving force acts on the elastic component 2 where the reflector 1 is located, driving it to deform, thereby causing the reflector 1 to rotate around the first axis and / or the second axis, precisely changing the reflection angle of the incident laser beam, and ultimately making the laser spot move accurately along the target spot movement path (such as a circle or a rhombus).

[0048] This invention achieves intelligent and rapid selection and control of the laser spot's motion path by establishing a correspondence between processing requirements and the target laser spot's motion path, and by utilizing the drive control of a two-dimensional galvanometer mechanism. Once the target laser spot's motion path is determined, it is converted into high-precision adjustment commands such as DAC signals to drive the reflector 1 of the two-dimensional electromagnetic galvanometer mechanism to swing along two axes, thereby controlling the laser spot's oscillation pattern. Simultaneously, for the electromagnetic galvanometer mechanism of this invention, the magnetic component 203 is directly fixed to the elastic component 201 of the elastic component 2, the magnetic excitation component 302 is directly fixed to the electrical connector body 301, and the magnetic components 203 are nested together, achieving small size, flatness, light weight, high precision, and high reliability. Using this small, flat, light-weight, high-precision, and reliable electromagnetic galvanometer mechanism in the laser spot adjustment method of this invention allows for greater diversity in laser spot motion paths compared to existing technologies, upgrading the laser spot's oscillation pattern from simple lines to complex patterns, and transforming laser processing from traditional linear processing to surface processing, thus increasing the flexibility and adaptability of laser processing.

[0049] Specifically, the command parameters are converted into drive current signals via a digital-to-analog converter (DAC) to control the reflector 1 of the two-dimensional electromagnetic galvanometer mechanism to swing together along the X and Y axes.

[0050] When the X-axis and Y-axis galvanometers swing simultaneously, their angular signals superimpose along the laser emission direction, causing the reflected laser direction to include components of both the X and Y axes. Ultimately, the laser beam forms a dynamic two-dimensional (X,Y) trajectory on the processing plane, which is the desired swing pattern.

[0051] By adjusting the swing amplitude ratio of the X-axis and Y-axis reflectors 1, detailed changes in the pattern can be achieved, such as adjusting a circle to an ellipse or changing the flatness of a figure-eight shape to adapt to different requirements for molten pool width or energy density.

[0052] By adjusting the center positions of the X-axis and Y-axis reflectors 1, the position of the entire oscillating pattern on the processing plane can be precisely adjusted, ensuring that the oscillating area of ​​the spot is precisely aligned with the weld or cutting path.

[0053] Furthermore, the method also includes: acquiring the actual light spot motion path through an image acquisition unit.

[0054] Specifically, after the two-dimensional electromagnetic galvanometer mechanism is driven by a command, due to factors such as the mechanical inertia of the reflector 1, electronic signal delay, and changes in ambient temperature, the actual motion path of the laser spot often deviates slightly from the emitted target motion path. Therefore, this invention introduces an image acquisition unit as the core feedback sensor to monitor the actual trajectory of the laser spot on the processing plane in real time or near real time. Through high-frequency image capture, the dynamic motion process of the laser spot can be converted into quantifiable digital coordinate data.

[0055] The actual light spot motion path is obtained by the image acquisition unit, realizing high-precision and real-time trajectory feedback. This enables the understanding of the true state of the light spot motion, providing data support for discovering and solving the nonlinearity problem of the response of mirror 1 and ensuring the geometric accuracy of complex swing trajectories (such as figure-eight or rhombus).

[0056] Furthermore, the method also includes: fine-tuning the two-dimensional electromagnetic galvanometer mechanism or adjusting the amplitude compensation of the two-dimensional electromagnetic galvanometer mechanism based on the difference between the actual light spot movement path and the target light spot movement path.

[0057] Specifically, after acquiring the actual light spot movement path, the control unit performs path difference analysis. It compares the actual coordinate sequence acquired by the image acquisition unit with the ideal target coordinate sequence generated in step 102 point by point, calculating the spatial deviation value. This deviation value reflects the systematic and random errors of the two-dimensional electromagnetic galvanometer mechanism when executing commands. Based on this difference, the control commands for the two-dimensional electromagnetic galvanometer mechanism need to be dynamically or statically corrected.

[0058] The correction mechanism mainly includes two methods: fine-tuning and amplitude compensation. Fine-tuning is usually a subtle, real-time correction to the current drive signal to eliminate trajectory jitter caused by momentary drift or high-frequency noise. Amplitude compensation, on the other hand, is a more systematic correction that addresses the overall size or proportional distortion of the light spot path (e.g., the target path diameter is 1mm, but the actual diameter is 1.05mm). By adjusting the gain coefficient of the drive current sent to the two-dimensional electromagnetic galvanometer mechanism (i.e., amplitude compensation), the actual path can be precisely scaled to perfectly match the target path.

[0059] Amplitude compensation is used to address more systematic and steady-state errors, particularly oscillation amplitude distortion caused by temperature variations, mechanical wear, or manufacturing tolerances. For example, if the target requires the light spot to oscillate into a circle with a diameter of 1.2 mm, but the actual monitored diameter is always 1.15 mm, the amplitude gain of the control signal will be adjusted. By increasing or decreasing the peak value of the drive voltage or current, the actual oscillation amplitude can be precisely corrected to perfectly match the amplitude required by the target's motion path, eliminating accumulated errors over long-term operation and ensuring the geometric accuracy of the light spot trajectory.

[0060] By implementing fine-tuning and amplitude compensation, high-precision tracking and consistency of the laser spot's motion trajectory are ensured. This effectively overcomes the thermal drift and mechanical errors caused by the electromagnetic galvanometer under high-speed, long-term operation, allowing laser energy to be accurately distributed along the target path, greatly improving the stability of the processing and the yield rate.

[0061] Furthermore, the method further includes: the image acquisition unit is a CCD detector.

[0062] Specifically, a CCD detector was chosen as the image acquisition unit because of its high resolution and high sensitivity. In laser processing equipment, CCDs are typically configured for confocal or off-axis monitoring, enabling them to clearly and accurately capture the trajectory of the laser spot across a specific plane. The path information acquired by the CCD, including the actual shape of the spot, the amplitude of its oscillation, and the geometric distortion of the path, provides reliable and accurate raw data for subsequent calibration and correction.

[0063] Furthermore, prior to laser processing, the method further includes calibrating the laser beam.

[0064] This invention also provides a laser processing apparatus, including a processor and a memory, wherein the memory stores a computer program, and when the processor executes the computer program, the processor performs the following steps: Step 101: Select the corresponding target spot movement path according to the laser processing requirements; Step 102: Determine the adjustment command of the two-dimensional electromagnetic galvanometer mechanism according to the target light spot motion path; Step 103: The two-dimensional electromagnetic galvanometer mechanism responds to the adjustment command and generates a corresponding electromagnetic driving force to drive the reflector 1 of the two-dimensional electromagnetic galvanometer mechanism to rotate around the first axis and the second axis, so that the laser spot moves along the target spot motion path.

[0065] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. Any references to memory, storage, databases, or other media used in the embodiments provided in this application can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), RAMbus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and RAMbus dynamic RAM (RDRAM), etc.

[0066] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0067] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A laser spot adjustment method, characterized by, The method is applied to a laser processing device comprising a two-dimensional electromagnetic galvanometer mechanism, and the method comprises: selecting a target light spot movement path; determining adjustment instructions of the two-dimensional electromagnetic galvanometer mechanism according to the target light spot movement path; the two-dimensional electromagnetic galvanometer mechanism generates corresponding electromagnetic driving force to drive the mirror of the two-dimensional electromagnetic galvanometer mechanism to rotate around the first axis and the second axis in response to the adjustment instructions, so that the laser light spot moves along the target light spot movement path.

2. The light spot dynamic adjustment method of claim 1, wherein, The target light spot movement path includes but is not limited to one of "circular", "8-shaped", "diamond" swing patterns.

3. The laser calibration method of claim 1, wherein, The adjustment instructions are control instructions for regulating the driving electric energy of the two-dimensional electromagnetic galvanometer mechanism, and the driving electric energy includes driving voltage and / or driving current.

4. The light spot dynamic adjustment method of claim 3, wherein, The control instructions control the amplitude of the mirror of the two-dimensional electromagnetic galvanometer mechanism rotating along the first axis and / or the second axis through a DAC signal, so as to realize the target light spot movement path.

5. The laser calibration method of claim 1, wherein, Further comprising: acquiring an actual light spot movement path through an image acquisition unit.

6. The laser calibration method of claim 5, wherein, Further comprising: fine-tuning or adjusting the amplitude compensation of the two-dimensional electromagnetic galvanometer mechanism according to the difference between the actual light spot movement path and the target light spot movement path.

7. The laser calibration method of claim 5, wherein, The image acquisition unit is a CCD detector.

8. The light spot dynamic adjustment method of claim 1, wherein, Further comprising: pre-establishing a database; the database stores the corresponding relationship between the processing requirements and the target light spot movement path, and the corresponding relationship includes but is not limited to a functional relationship, a curve relationship or a lookup table.

9. The light spot dynamic adjustment method of claim 8, wherein, The method further comprises: synchronously collecting the adjusted actual light spot movement path and the corresponding processing effect data to generate feedback data, and dynamically establishing and / or updating the processing requirement-target light spot movement path mapping library according to the feedback data.

10. A laser processing apparatus characterized by comprising: A processor and a memory are included, and the memory stores a computer program, and the computer program is executed by the processor to realize the light spot dynamic adjustment method in any one of claims 1 to 10.

Images