Mask assembly manufacturing device

Abstract

An embodiment of the present invention provides a mask assembly manufacturing apparatus, which may include: a mask stage on which a mask frame having an opening is placed; the clamp unit is arranged on one side of the mask table, the clamp unit is provided with a plurality of first clamps which are arranged in the first direction and used for clamping the first edge of the first mask piece, and a second edge, on the side opposite to the first edge, of the first mask piece is arranged above the opening; a sensing unit for sensing a second edge of the first mask sheet; and a control section for adjusting the first jig to align the first mask sheet based on the information of the second edge sensed by the sensing unit.

Description

Technical Field

[0001] Embodiments of the present invention relate to a mask assembly manufacturing apparatus. Background Technology

[0002] Mobile electronic devices are widely used. Besides small electronic devices such as mobile phones, tablet computers have recently become widely used as mobile electronic devices.

[0003] To support multiple functions and to provide users with visual information such as images or videos, such mobile electronic devices include display devices. Recently, with the miniaturization of other components used to drive the display device, the proportion of display devices in electronic devices has been gradually increasing, and structures that can be bent from a flat state to a specified angle are also being developed.

[0004] In organic light-emitting display devices, organic materials or metals used as electrodes are deposited using vacuum deposition. This vacuum deposition method forms a thin film by depositing the corresponding material onto a substrate under a vacuum atmosphere. The vacuum deposition method is carried out by placing the substrate of the organic thin film to be formed inside a vacuum chamber, ensuring close contact between the substrate and a mask, and then using a deposition source to evaporate or sublimate the organic material to deposit it onto the substrate. The mask has a pattern identical to that of the thin film to be formed.

[0005] This mask forms organic thin films on multiple substrates through repeated deposition and cleaning processes, and maintains the durability of the mask.

[0006] The aforementioned background technology refers to technical information held by the inventor in order to derive this invention or acquired in the process of deriving this invention, and is not necessarily publicly known technology that was disclosed to the general public before the application of this invention. Summary of the Invention

[0007] Embodiments of the present invention may provide a mask assembly manufacturing apparatus.

[0008] An embodiment of the present invention discloses a mask assembly manufacturing apparatus, comprising: a mask stage for mounting a mask frame having an opening; a clamping unit disposed on one side of the mask stage, the clamping unit having a plurality of first clamps arranged along a first direction for clamping a first edge of a first mask sheet, and a second edge of the first mask sheet on the side opposite to the first edge disposed above the opening; a sensing unit for sensing the second edge of the first mask sheet; and a control unit for adjusting the first clamps to align the first mask sheet based on information about the second edge sensed by the sensing unit.

[0009] In this embodiment, the clamping unit may further include a plurality of second clamps, which are arranged along a second direction different from the first direction and are used to clamp the third edge of the first mask sheet located between the first edge and the second edge.

[0010] In this embodiment, the control unit can be used to align the first mask by adjusting the first clamp along the second direction and maintaining the position of the second clamp in the first direction.

[0011] In this embodiment, the control unit can be used to raise and lower the clamping unit.

[0012] In this embodiment, the first fixture may be arranged on a first imaginary line that extends between adjacent deposition openings on the first mask.

[0013] In this embodiment, the control unit can be used to adjust the first clamp based on the position of the point where the second edge of the first mask and the first imaginary line intersect.

[0014] In this embodiment, the clamping unit may further have a plurality of second clamps for clamping the second mask piece, and the second mask piece is arranged adjacent to the first mask piece.

[0015] In this embodiment, the control unit can be used to adjust the first clamp based on the distance between the second edge of the first mask and the second mask.

[0016] In this embodiment, a welding unit may be further included, which is used to weld the second edge of the first mask sheet and the second mask sheet together.

[0017] In this embodiment, a support member may be further included, which is arranged between the opening of the clamping unit and the mask frame.

[0018] Another embodiment of the present invention discloses a mask assembly manufacturing apparatus, comprising: a mask stage for mounting a mask frame having an opening; a clamping unit disposed on one side of the mask stage, the clamping unit having a plurality of first clamps arranged along a first direction for clamping a first edge of a first mask sheet; a sensing unit for sensing a second edge of the first mask sheet that engages with a second mask sheet, the second mask sheet being arranged adjacent to the first mask sheet in a second direction; and a control unit for adjusting the first clamps to apply a compressive force to the first mask sheet based on information of the second edge sensed by the sensing unit.

[0019] In this embodiment, the control unit can detect the distance between the second edge of the first mask and the second mask as information about the second edge.

[0020] In this embodiment, the control unit can move the first clamp in the second direction based on the distance between the second edge and the second mask to apply a compressive force in the second direction to the first mask.

[0021] In this embodiment, the control unit can move the first clamp in the second direction based on the distance between the second edge and the second mask piece, so that a region of the first mask piece moves closer to the second mask piece.

[0022] In this embodiment, the first clamp may include a first a clamp and a first b clamp. The control unit may use a first point on the second edge corresponding to the first a clamp and a second point on the second edge corresponding to the first b clamp to move the first a clamp and the first b clamp.

[0023] In this embodiment, the first point may be the point on the second edge that intersects with the first imaginary line passing through the first a clamp and parallel to the second direction, and the second point may be the point on the second edge that intersects with the first imaginary line passing through the first b clamp and parallel to the second direction.

[0024] In this embodiment, the first imaginary line may be an imaginary line extending between adjacent deposition openings on the first mask sheet.

[0025] In this embodiment, the clamping unit may further include a plurality of second clamps, which are arranged along the second direction and are used to clamp the third edge of the first mask sheet located between the first edge and the second edge.

[0026] In this embodiment, the control unit can adjust the first clamp along the second direction to align the position of the first mask while maintaining the position of the second clamp in the first direction.

[0027] In this embodiment, a welding unit may be further included, which is used to weld the second edge of the first mask sheet to the second mask sheet.

[0028] The mask assembly manufacturing apparatus of the present invention can precisely align the welding lines of multiple mask sheets by adjusting the position of the edges of the mask sheets by a jig unit.

[0029] However, the effects that can be obtained by the present invention are not limited to those described above, and those skilled in the art will clearly understand other technical effects not mentioned from the following description of the invention. Attached Figure Description

[0030] The following drawings, which are attached to this application, illustrate preferred embodiments of the invention and, together with the detailed description below, serve to further illustrate the technical concept of the invention. Therefore, the invention should not be interpreted as limited to the matters described in these drawings.

[0031] Figure 1 This is a perspective view schematically illustrating a mask assembly manufacturing apparatus according to an embodiment of the present invention.

[0032] Figure 2 yes Figure 1 A top view of the mask assembly manufacturing apparatus.

[0033] Figure 3 yes Figure 1 A side sectional view of the mask assembly manufacturing apparatus.

[0034] Figure 4 This is a block diagram illustrating the usage state of the control unit according to an embodiment of the present invention.

[0035] Figure 5 This is a diagram illustrating a mask assembly manufacturing apparatus in the state before the fixture unit is aligned with the mask sheet according to an embodiment of the present invention.

[0036] Figure 6 Is Figure 5 The diagram shows the alignment state of the mask.

[0037] Figure 7 This is a diagram illustrating a mask assembly manufacturing apparatus during the process of aligning a clamping unit with a mask sheet according to an embodiment of the present invention.

[0038] Figure 8 Is Figure 7 The diagram shows the alignment state of the mask.

[0039] Figure 9 This diagram illustrates the process of welding the mask sheet by a welding unit after the mask sheet is aligned.

[0040] Figure 10 This is a schematic diagram illustrating the process of depositing a layer onto a substrate using a mask assembly.

[0041] Figure 11 It means in Figure 10 A cross-sectional view of a sub-pixel of an organic light-emitting display device on which a light-emitting layer is deposited on a substrate.

[0042] Explanation of reference numerals in the attached figures

[0043] 1: Mask assembly manufacturing equipment

[0044] 100: Mask stage

[0045] 200: Fixture Unit

[0046] 300: Sensing Unit

[0047] 400: Support component

[0048] 500: Welding Unit

[0049] 600: Control Department Detailed Implementation

[0050] This invention can be modified in many ways and has many embodiments. Specific embodiments are schematically illustrated in the accompanying drawings, and detailed descriptions are provided in the detailed embodiments. The effects and features of the invention, as well as methods of implementing them, will become clear with reference to the accompanying drawings and the embodiments described in detail below. However, the invention is not limited to the embodiments disclosed below, but can be implemented in many different forms.

[0051] In the following embodiments, the terms "first" and "second" are not used in a limiting sense, but are used for the purpose of distinguishing one structural element from another.

[0052] In the following embodiments, the singular expression includes the plural expression, provided that it does not clearly indicate a different meaning in the context.

[0053] In the following embodiments, terms such as "comprising" or "having" indicate the presence of a feature or structural element described in the application, rather than precluding the possibility of adding more than one other feature or structural element.

[0054] In the following embodiments, when a part referred to as a unit, region, structural element, etc. is located above or on another part, this includes not only the case where it is directly above the other part, but also the case where there are other units, regions, structural elements, etc. in between.

[0055] In the following embodiments, terms such as “connection” or “combination” do not imply that the two components must be directly and / or fixedly connected or combined, unless they clearly indicate different meanings in the context, and do not exclude the existence of other components between the two components.

[0056] For ease of illustration, the size of structural elements may be exaggerated or reduced in the accompanying drawings. For example, the size and / or thickness of the structures shown in the drawings are arbitrarily shown for ease of illustration, and therefore the invention is not necessarily limited to the depicted content.

[0057] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing with reference to the accompanying drawings, the same or corresponding structural elements will be given the same reference numerals, and repeated descriptions of the structural elements will be omitted.

[0058] In this application, the first direction DR1 and the second direction DR2 intersecting the first direction DR1 are substantially defined as horizontal directions, and the third direction DR3 is defined as a vertical direction. Furthermore, in embodiments of the present invention, the first direction DR1 may correspond to the width direction of the mask stage 100 or the mask frame MF, the second direction DR2 may correspond to the length direction of the mask stage 100 or the mask frame MF, and the third direction DR3 may correspond to the height direction of the mask stage 100 or the mask frame MF.

[0059] In this application, "when viewed from above" can mean the state observed from a third party to DR3.

[0060] In this application, the mask assembly may be an open mask, but is not limited to this. The mask assembly can be interpreted as various masks used for deposition in the manufacturing process of displays or semiconductors, such as fine metal masks.

[0061] In this application, a mask assembly can be interpreted as a structure in which multiple mask sheets MS are combined on a mask frame MF.

[0062] The mask frame MF may have a quadrilateral frame shape having a short side extending in a first direction DR1 and a long side extending in a second direction DR2 intersecting the first direction DR1, but the shape of the mask frame MF is not limited to this.

[0063] Depending on the shape of the mask frame MF, an opening can be defined on the mask frame MF. When viewed from above, the opening may have a quadrilateral shape, but the shape of the opening is not limited to this.

[0064] The outer sides of the mask frame MF may have sides extending in a first direction DR1 and sides extending in a second direction DR2. The outer sides of the mask frame MF may be defined as outer surfaces. The outer surfaces of the mask frame MF may be defined as the border of the mask frame MF.

[0065] The inner surface of the mask frame MF may be defined by a side of the mask frame MF opposite to the outer surface. An opening may be defined by the inner surface of the mask frame MF.

[0066] The mask frame MF may include a metallic material. For example, the mask frame MF may include Invar or stainless steel.

[0067] In this application, the multiple mask sheets MS used to construct a mask assembly can be defined as a first mask sheet MS1, a second mask sheet MS2, and a third mask sheet MS3. However, this can be interpreted as meaning that multiple mask sheets MS can be used to manufacture a mask assembly, not that the number of mask sheets MS in a mask assembly is limited to three. The mask sheets MS joined together to manufacture a mask assembly can be two or more.

[0068] In this application, "mask MS" can be interpreted as a collective term for the first mask MS1 to the third mask MS3.

[0069] A mask sheet MS can be arranged on a mask frame MF. The mask sheet MS can have a plane defined by a first direction DR1 and a second direction DR2. The mask sheet MS can have a quadrilateral shape with a side extending in the first direction DR1 and a side extending in the second direction DR2, but the shape of the mask sheet MS is not limited to this.

[0070] In this application, for ease of explanation, the mask pieces MS arranged sequentially from one side to the other along the second direction DR2 of the mask frame MF when viewed from above are defined as the first mask piece MS1, the second mask piece MS2, and the third mask piece MS3.

[0071] For example, the first mask piece MS1 can be interpreted as being positioned on the far left of the mask frame MF when viewed from above (with...). Figure 2 The third mask, MS3, can be interpreted as being positioned on the far right of the mask frame MF when viewed from above. Figure 2 The second mask MS2 can be interpreted as a mask arranged between the first mask MS1 and the third mask MS3.

[0072] Furthermore, although the operation and control method of the first fixture 210 and the control unit 600 are described based on the first mask MS1 in this application, the first mask MS1 can be replaced with the third mask MS3 for explanation.

[0073] Multiple deposition openings OP can be defined on the mask sheet MS. For example, the multiple deposition openings OP can be arranged in a first direction DR1 and a second direction DR2. When viewed from above, the deposition openings OP of the mask sheet MS can overlap with the openings of the mask frame MF. The deposition openings OP of the mask sheet MS can have a quadrilateral shape that extends longer in the second direction DR2 than in the first direction DR1, but the shape of the deposition openings OP is not limited to this.

[0074] For example, a first deposition opening OP1 and a second deposition opening OP2 may be formed on a mask sheet MS. In this application, the first deposition opening OP1 and the second deposition opening OP2 are defined as deposition openings OP that are adjacent to each other along a first direction DR1.

[0075] To fabricate a large-area mask assembly, multiple mask sheets MS are stretched and bonded to the mask frame MF. Before stretching and bonding the multiple mask sheets MS to the mask frame MF, the first mask sheet MS1 to the third mask sheet MS3, which are joined together to form a plate, can be stretched and welded to the mask frame MF.

[0076] In order to precisely join multiple mask sheets MS before stretching and bonding them to the mask frame MF, it may be necessary to have a process of precisely aligning the joints of the multiple mask sheets MS before bonding.

[0077] According to an embodiment of the present invention, a mask assembly manufacturing apparatus 1 can use a jig unit 200 to precisely align a plurality of mask sheets MS, and a detailed description thereof is provided below.

[0078] Figure 1 This is a perspective view schematically illustrating a mask assembly manufacturing apparatus 1 according to an embodiment of the present invention. Figure 2 yes Figure 1 Top view of mask assembly manufacturing apparatus 1 Figure 3 yes Figure 1 A side cross-sectional view of the mask assembly manufacturing apparatus 1.

[0079] Reference Figures 1 to 3 A mask assembly manufacturing apparatus 1 according to an embodiment of the present invention may include a mask stage 100, a fixture unit 200, a sensing unit 300, a support member 400, a welding unit 500, and a control unit 600 (see reference). Figure 4 ).

[0080] The mask stage 100 can support the mask frame MF. For example, the mask stage 100 can have a generally rectangular plate shape on which the mask frame MF can be arranged.

[0081] On the mask stage 100, the mask sheet MS can be soldered onto the mask frame MF.

[0082] That is, the mask stage 100 can provide space for manufacturing mask assemblies.

[0083] A fixture unit 200 may be arranged on one side of the mask stage 100.

[0084] For example, the fixture unit 200 may be arranged along the outer periphery of the mask stage 100. When viewed from above, the fixture unit 200 may be arranged above the mask stage 100 at a predetermined interval from the mask frame MF.

[0085] As one embodiment, the clamping unit 200 can be connected to the mask stage 100 and is movable. For example, the clamping unit 200 can be connected to the mask stage 100 and is movable in a second direction DR2 or a third direction DR3.

[0086] As an alternative embodiment, the fixture unit 200 and the mask stage 100 may be arranged at predetermined intervals.

[0087] For example, the clamping unit 200 may be spaced at a predetermined interval from the mask stage 100 and clamp the edges of the first mask piece MS1 to the third mask piece MS3 arranged above the mask stage 100.

[0088] The fixture unit 200 may be arranged on one side of the mask stage 100 and used to hold the mask sheet MS. The fixture unit 200 may include a plurality of first fixtures 210 and a plurality of second fixtures 220.

[0089] Multiple first clamps 210 can be arranged along the first direction DR1 and can clamp the first edge EL1 of the first mask sheet MS1.

[0090] In this application, "first edge EL1" can be interpreted as the edge of the first mask piece MS1 that is parallel to the first direction DR1 and overlaps with the mask frame MF or mask stage 100 when viewed from above.

[0091] The first edge EL1 can be defined as the short side of the mask MS that forms a plate when the first mask MS1 to the third mask MS3 are joined together.

[0092] In this application document, "second edge EL2" can be interpreted as an edge in the edge of the first mask MS1 that is parallel to the first direction DR1 and engages with the second mask MS2, and can also be interpreted as an edge located at the opposite position to the first edge EL1.

[0093] In this application, "third edge EL3" can be interpreted as the edge of the first mask MS1 that is parallel to the second direction DR2. The third edge EL3 can be defined as the long side of the mask MS that forms a plate when the first mask MS1 and the third mask MS3 are joined.

[0094] Multiple first clamps 210 can be arranged sequentially along the first direction DR1 on the short side of the mask stage 100. The first clamps 210 can receive power from the outside and can move in the second direction DR2 or the third direction DR3.

[0095] Reference Figure 2The first fixture 210 may be arranged on the first imaginary line IL1, which extends between adjacent deposition openings OP on the first mask sheet MS1.

[0096] In this application, "first imaginary line IL1" can be interpreted as an imaginary line that is parallel to the second direction DR2 and extends between adjacent deposition openings OP on the first mask sheet MS1.

[0097] For example, the first imaginary line IL1 can be interpreted as an imaginary line that passes through the region between the first depositional opening OP1 and the second depositional opening OP2 and extends along the second direction DR2.

[0098] The first clamp 210 can move linearly along the first imaginary line IL1 in the second direction DR2. For example, the central axis of the movement direction of the first clamp 210 and the first imaginary line IL1 can be coaxial.

[0099] Reference Figure 2 The central axis of the first fixture 210 can be arranged at a distance from the area where the deposition opening OP of the mask sheet MS is located.

[0100] For example, an imaginary line passing through the first clamp 210 and extending in the second direction DR2 can be arranged at intervals from the area where the deposition opening OP of the mask sheet MS is located.

[0101] Therefore, when the first clamp 210 holding the first edge EL1 of the first mask sheet MS1 moves in the second direction DR2 to apply a compressive force to the first mask sheet MS1, it can prevent the compressive force from being transmitted to the deposition opening OP, which would cause the shape of the deposition opening OP to deform, and the compressive force cannot be transmitted to the second edge EL2.

[0102] This has the following effect: when the first clamp 210 clamps the first edge EL1 and moves in the second direction DR2, the second edge EL2 can move in the second direction DR2 along with the movement of the first clamp 210.

[0103] The first clamp 210 can clamp the first mask sheet MS1 and move it towards the second mask sheet MS2 along the second direction DR2 while applying a compressive force to the first mask sheet MS1. The first clamp 210 can also restrict the application of a tensile force to the first mask sheet MS1.

[0104] The first clamp 210 can hold the edge of the first mask MS1 or the third mask MS3, and can be arranged at a predetermined interval from the second mask MS2.

[0105] Multiple second clamps 220 can be arranged along a second direction DR2, which is different from the first direction DR1, and can clamp the third edge EL3 of the first mask sheet MS1.

[0106] Multiple second clamps 220 can be arranged sequentially along the second direction DR2 on the long side of the mask stage 100, and the second clamps 220 can receive power from the outside to move on the third direction DR3.

[0107] Multiple first clamps 210 hold the first edge EL1 of the first mask piece MS1, and multiple second clamps 220 hold the third edge EL3 of the first mask piece MS1, so that the first clamps 210 and the second clamps 220 can arrange the second edge EL2 of the first mask piece MS1 above the opening of the mask frame MF.

[0108] Multiple first clamps 210 and multiple second clamps 220 can simultaneously clamp the first edge EL1 and the third edge EL3 of the first mask piece MS1, respectively, and the movement of the second clamps 220 can be restricted during the movement of the first clamps 210.

[0109] For example, after the second clamp 220 clamps the first mask piece MS1, the movement of the second clamp 220 in the first direction DR1 and the second direction DR2 can be restricted.

[0110] Reference Figure 2 The clamping unit 200 can use multiple second clamps 220 to clamp the second mask piece MS2, and arrange the second mask piece MS2 adjacent to the first mask piece MS1.

[0111] For example, the first mask MS1 and the second mask MS2 are arranged adjacent to each other in the second direction DR2, separated by a pre-defined second imaginary line IL2.

[0112] In this application, "second imaginary line IL2" can be interpreted as an imaginary line parallel to the first direction DR1 and passing through the region between the first mask MS1 and the second mask MS2 or the region between the second mask MS2 and the third mask MS3.

[0113] However, it is not limited to this. The second imaginary line IL2 can be interpreted as the boundary line that realizes the joining of the first mask MS1 and the second mask MS2.

[0114] However, it is not limited to this. The second imaginary line IL2 can be interpreted as an imaginary line that passes through the edge of the second mask MS2 parallel to the first direction DR1 and extends in the first direction DR1 when viewed from above.

[0115] In one embodiment of the present invention, the sensing unit 300 can sense the second edge EL2 of the first mask sheet MS1.

[0116] As one embodiment, the sensing unit 300 may be composed of a vision camera that can acquire an image of the second edge EL2 of the first mask MS1.

[0117] However, it is not limited to this. The sensing unit 300 can be composed of a variety of devices that can acquire information about the second edge EL2 of the first mask MS1 and the spacing information between the first mask MS1 and the second mask MS2.

[0118] For example, the sensing unit 300 may be composed of a laser sensor, an ultrasonic sensor, a line scan camera, a laser profile sensor, a spectral camera, an infrared camera, etc.

[0119] Figure 4 This is a block diagram illustrating the usage state of the control unit according to an embodiment of the present invention.

[0120] Reference Figures 2 to 4 The sensing unit 300 can sense the second edge EL2 of the first mask MS1 and provide information about the second edge EL2 to the control unit 600. Based on the information about the second edge EL2 sensed by the sensing unit 300, the control unit 600 can adjust the clamping unit 200 to align the first mask MS1. The control unit 600 can align the first mask MS1 by adjusting the first clamp 210 along the second direction DR2 and maintaining the position of the second clamp 220 in the first direction DR1.

[0121] The method by which the control unit 600 adjusts the drive of the fixture unit 200 based on the information of the second edge EL2 to align the first mask piece MS1 will be described in detail in the following description related to the control unit 600.

[0122] Refer again Figures 1 to 3 In one embodiment of the present invention, the support member 400 is used to support the edge side of the mask sheet MS and can be arranged between the clamping unit 200 and the opening of the mask frame MF.

[0123] The support member 400 can be formed into a rod shape extending along the first direction DR1.

[0124] The support member 400 can be arranged on the upper surface of the mask frame MF opposite to the first mask piece MS1 or the third mask piece MS3.

[0125] The support member 400 can be arranged at a predetermined interval from the first clamp 210, and one side of the support member 400 can contact the surface of the first mask MS1 or the third mask MS3.

[0126] A step may be formed on the side of the mask frame MF opposite to the mask sheet MS, and the height of the mask frame MF on the third direction DR3 may vary based on the step.

[0127] For example, the height of the side of the mask frame MF adjacent to the first clamp 210 with respect to the step can be configured to be relatively lower than the height of the other side of the mask frame MF opposite to the step with respect to the other side.

[0128] When the edge of the first mask piece MS1, which is in face contact with and supported on the other side of the mask frame MF, is held by the first clamp 210, the first mask piece MS1 may sag on the side of the mask frame MF due to the lower height of the side of the mask frame MF located between the first clamp 210 and the other side of the mask frame MF.

[0129] The support member 400 can be arranged on one side of the mask frame MF, and the height of the support member 400 on the third direction DR3 can be the same as or similar to the height of the other side of the mask frame MF and the difference between the height of the first side.

[0130] Therefore, by arranging support members 400 in the portion of the mask frame MF where the height is reduced due to the formation of steps, the low-height portion of the mask frame MF can be compensated.

[0131] This reduces the sagging of the mask sheet MS in the stepped portion of the mask frame MF.

[0132] Reference Figure 4 In one embodiment of the present invention, the welding unit 500 can weld and connect adjacent mask sheets MS.

[0133] The welding unit 500 can weld the second edge EL2 of the first mask MS1 and the second mask MS2. For example, the welding unit 500 can make the second edge EL2 of the first mask MS1 and the second mask MS2 join each other on the second imaginary line IL2.

[0134] The welding unit 500 may be composed of a variety of devices that can weld the edges of the first mask MS1 and the edges of the second mask MS2.

[0135] For example, welding unit 500 can be composed of laser welding machine, ultrasonic welding machine, resistance welding machine, TIG (tungsten inert gas welding) welding machine, MIG (methane inert gas welding) welding machine, plasma welding machine, micro welding machine, etc.

[0136] In one embodiment of the present invention, the control unit 600 can adjust the first clamp 210 to align the first mask sheet MS1 based on information of the second edge EL2 sensed by the sensing unit 300.

[0137] The following is a detailed description of the method by which the control unit 600 controls the driving of the fixture unit 200 and the welding unit 500 based on the sensing information sensed by the sensing unit 300.

[0138] Figure 5 This diagram illustrates the mask assembly manufacturing apparatus 1 in a state before the fixture unit 200 is aligned with the mask sheet MS according to an embodiment of the present invention. Figure 6 Is Figure 5 The diagram shows the alignment state of the mask MS under the specified conditions.

[0139] Reference Figure 3 , Figure 5 and Figure 6 When the first mask piece MS1 is placed above the mask frame MF, one side of the first mask piece MS1 may sag toward the opening side of the mask frame MF due to the load of the first mask piece MS1.

[0140] Although the first edge EL1 side of the first mask piece MS1 is supported at a set height by the first clamp 210, the support 400 or one side of the mask frame MF, the second edge EL2 of the first mask piece MS1 is located above the opening of the mask frame MF, and may therefore droop downward relative to the first edge EL1.

[0141] Since the second edge EL2 of the first mask MS1 droops downward relative to the first edge EL1, when the first mask MS1 is viewed from the front, the position of the second edge EL2 of the first mask MS1 is pulled to the side of the first edge EL1.

[0142] Therefore, the second edge EL2 may be separated from the edge of the second imaginary line IL2 or the edge of the second mask MS2 by a specified interval.

[0143] If the first mask MS1 and the second mask MS2 are welded together in this state, the process accuracy may be reduced, such as the formation of steps between the boundary lines of the first mask MS1 and the second mask MS2.

[0144] In this application, the first a clamp 210a and the first b clamp 210b can be interpreted as any two clamps among a plurality of first clamps 210, and the first point P1 can be interpreted as the point on the second edge EL2 that intersects with the first imaginary line IL1 passing through the first a clamp 210a.

[0145] Furthermore, the second point P2 can be interpreted as the point on the second edge EL2 that intersects with the first imaginary line IL1 passing through the first b clamp 210b.

[0146] The control unit 600 can obtain information about the second edge EL2 from the sensing unit 300, or it can detect information about the second edge EL2 based on the sensing information provided by the sensing unit 300.

[0147] In this application, "information on the second edge EL2" can be interpreted not only as an optical / non-optical image of the second edge EL2, but also as the location information of the second edge EL2 detected using the image of the second edge EL2.

[0148] For example, the information of the second edge EL2 can be interpreted as the distance between the second edge EL2 and the second mask piece MS2, the distance between the second edge EL2 and the second imaginary line IL2, or the distance between the second edge EL2 and a mark located in a region of the mask assembly manufacturing apparatus 1, etc.

[0149] The control unit 600 can detect the distance between the edge of the second mask MS2 opposite to the first mask MS1 and the second edge EL2 of the first mask MS1 as information of the second edge EL2.

[0150] For example, the control unit 600 can obtain the image of the second edge EL2 and the image information of the second mask MS2 from the sensing unit 300 to detect the distance between a location on the second edge EL2 through which the first imaginary line IL1 passes and a location on the second mask MS2 through which the first imaginary line IL1 passes.

[0151] As one embodiment, the control unit 600 can detect the distance between the second edge EL2 and the second mask MS2 as information about the second edge EL2.

[0152] For example, the control unit 600 can acquire the image of the second edge EL2 and the image information of the second mask MS2 from the sensing unit 300 to detect the distance between the first point P1 on the first imaginary line IL1 passing through the first point P1 and the edge of the second mask MS2, and the distance between the second point P2 on the first imaginary line IL1 passing through the second point P2 and the edge of the second mask MS2.

[0153] As one embodiment, the control unit 600 can detect the distance between the second edge EL2 and the second imaginary line IL2 as information about the second edge EL2.

[0154] For example, the control unit 600 can obtain an image of the second edge EL2 and information of the second imaginary line IL2 from the sensing unit 300 to detect the distance between the first point P1 on the first imaginary line IL1 passing through the first point P1 and the second imaginary line IL2, and the distance between the second point P2 on the first imaginary line IL1 passing through the second point P2 and the second imaginary line IL2.

[0155] As one embodiment, the control unit 600 can detect the distance between the second edge EL2 and a mark located in a region of the mask assembly manufacturing apparatus 1 as information of the second edge EL2.

[0156] For example, the control unit 600 can obtain the image and marking information of the second edge EL2 from the sensing unit 300 to detect the distance between the first point P1 and the mark, and the distance between the second point P2 and the mark.

[0157] The process by which the control unit 600 uses information from the second edge EL2 to control the drive of the first clamp 210 to align the first mask sheet MS1 will be described below.

[0158] Figure 7 This diagram illustrates the mask assembly manufacturing apparatus 1 during the alignment of the clamping unit 200 with the mask sheet MS according to an embodiment of the present invention. Figure 8 Is Figure 7 The diagram shows the alignment state of the mask MS under the specified conditions.

[0159] Reference Figure 4 , Figure 7 and Figure 8 The control unit 600 can use the information from the second edge EL2 to control the drive of the first clamp 210.

[0160] As an example, when the distance between the second edge EL2 and the second mask MS2 exceeds a set distance, the control unit 600 can move a region of the first mask MS1 toward the direction of the second mask MS2 by moving the first clamp 210 in the second direction DR2.

[0161] For example, when the distance between the first point P1 and the second mask MS2 is A (μm), and the distance between the second point P2 and the second mask MS2 is B (μm), which is greater than A, the control unit 600 can move the first a clamp 210a towards the second mask MS2 by C (μm), and move the first b clamp 210b towards the second mask MS2 by D (μm), which is greater than C.

[0162] Therefore, even if the second edge EL2 is separated from the second mask MS2 due to the sagging of the first mask MS1, the first edge EL1 can be pushed towards the second mask MS2 by the first clamp 210, so that the second edge EL2 is close to the second mask MS2.

[0163] As an example, when the distance between the second edge EL2 and the second imaginary line IL2 exceeds a set distance, the control unit 600 can move a region of the first mask MS1 toward the direction of the second mask MS2 by moving the first clamp 210 in the second direction DR2.

[0164] For example, when the distance between the first point P1 and the second imaginary line IL2 is A (μm), and the distance between the second point P2 and the second imaginary line IL2 is B (μm), which is greater than A, the control unit 600 can move the first a clamp 210a towards the second mask MS2 by C (μm), and move the first b clamp 210b towards the second mask MS2 by D (μm), which is greater than C.

[0165] Therefore, even if the second edge EL2 is separated from the second mask MS2 due to the sagging of the first mask MS1, the first edge EL1 can be pushed towards the second mask MS2 by the first clamp 210, so that the second edge EL2 is close to the second mask MS2.

[0166] Even if the first clamp 210 moves in the second direction DR2 to push the first edge EL1 toward the second mask plate MS2, the power provided by the first clamp 210 to the first mask plate MS1 cannot be effectively transmitted to the second edge EL2 due to the friction between the first mask plate MS1 and the support member 400 or the friction between the first mask plate MS1 and the mask frame MF.

[0167] After the first clamp 210 moves according to the control signal of the control unit 600 to push the first edge EL1 toward the second mask sheet MS2 side, the control unit 600 can cause the first clamp 210 and the second clamp 220 to rise and then fall on the third direction DR3.

[0168] Therefore, after the first edge EL1 is pushed towards the second mask piece MS2 by the first clamp 210, the first mask piece MS1 is separated from the support member 400 and the mask frame MF, thereby eliminating the friction between the first mask piece MS1 and the support member 400 or the friction between the first mask piece MS1 and the mask frame MF.

[0169] Therefore, the power provided by the first clamp 210 to the first edge EL1 can be effectively transmitted to the second edge EL2, thereby causing the second edge EL2 to move toward the second mask MS2 side.

[0170] After the control unit 600 raises and lowers the first clamp 210 and the second clamp 220 on the third-direction DR3, it can receive image information of the second edge EL2 from the sensing unit 300 again and detect the information of the second edge EL2 again.

[0171] As an example, when the distance between the second edge EL2 and the second mask MS2 detected again exceeds the set distance, the control unit 600 can control the driving of the first clamp 210 according to the above method, and when the distance between the second edge EL2 and the second mask MS2 detected again is detected to be below the set distance, the control unit 600 can stop the driving of the first clamp 210.

[0172] As an example, when the distance between the second edge EL2 and the second imaginary line IL2 detected again exceeds the set distance, the control unit 600 can control the drive of the first clamp 210 according to the above method, and when the distance between the second edge EL2 and the second imaginary line IL2 detected again is detected to be below the set distance, the control unit 600 can stop the drive of the first clamp 210.

[0173] The following describes the process by which the control unit 600 controls the driving of the welding unit 500 after aligning the first mask sheet MS1.

[0174] Figure 9 This diagram illustrates the process of welding the mask MS by the welding unit 500 after alignment.

[0175] Reference Figure 9 When the distance between the second edge EL2 and the second mask MS2, the distance between the second edge EL2 and the second imaginary line IL2, or the distance between the second edge EL2 and a mark located in a region of the mask assembly manufacturing apparatus 1 is detected to be below a set value, the control unit 600 can determine that the first mask MS1 has been aligned and fix the positions of the first clamp 210 and the second clamp 220.

[0176] When the control unit 600 determines that the first mask MS1 has been aligned, the control unit 600 can control the operation of the welding unit 500 to weld the second edge EL2 of the first mask MS1 and the second mask MS2 together.

[0177] For example, the control unit 600 can control the operation of the welding unit 500, so that the welding unit 500 welds the first mask MS1 and the second mask MS2 along the second imaginary line IL2.

[0178] Thus, the first mask MS1 and the second mask MS2, whose bonding lines are precisely aligned, can be bonded together as one unit.

[0179] Figure 10 This is a schematic diagram illustrating the deposition of a layer onto a substrate S using a mask assembly MA.

[0180] Reference Figure 10 In order to utilize the mask assembly MA to deposit the organic light-emitting display device 1100 (see reference 1100) Figure 11 The organic light-emitting layer or electrode of the deposition apparatus 10 may include a vacuum chamber 11.

[0181] A deposition source 12 may be arranged inside the vacuum chamber 11, and a mask assembly MA may be disposed above the deposition source 12. In this case, the mask assembly MA may include multiple mask sheets MS.

[0182] A mask sheet MS can be arranged on a mask frame MF, and a substrate S can be arranged above the mask sheet MS. In addition, an additional support member 13 for fixing the mask assembly MA can be further included at the edge of the mask assembly MA.

[0183] The process of depositing the deposited material DPM on the substrate S is briefly described below.

[0184] First, the mask assembly MA can be fixed to the support member 13 and the substrate S to be deposited can be positioned above the mask sheet MS. Next, a deposition material DPM can be sprayed onto the mask assembly MA from the deposition source 12 located inside the vacuum chamber 11. The deposition material DPM passing through the mask sheet MS can be deposited onto one side of the substrate S. The deposition material DPM deposited on the substrate S can have a predetermined pattern through the deposition opening OP of the mask sheet MS.

[0185] Figure 11 It means in Figure 10 A cross-sectional view of a sub-pixel of an organic light-emitting display device on which a light-emitting layer is deposited on a substrate.

[0186] Reference Figure 11 The organic light-emitting display device 1100 may include a display substrate 1101. The display substrate 1101 may be made of a flexible insulating material or a rigid insulating material. The display substrate 1101 may be transparent, translucent, or opaque.

[0187] A barrier film 1102 may be formed on the display substrate 1101. The barrier film 1102 may completely cover the upper surface of the display substrate 1101. The barrier film 1102 may include an inorganic film or an organic film.

[0188] A thin-film transistor (TFT) can be formed on the barrier film 1102. A semiconductor active layer 1103 can be formed on the barrier film 1102. A source region 1104 and a drain region 1105 can be formed in the semiconductor active layer 1103 by doping with N-type or P-type impurity ions. The region between the source region 1104 and the drain region 1105 can be an undoped channel region 1106.

[0189] A gate insulating film 1107 may be deposited on the semiconductor active layer 1103. The gate insulating film 1107 may include an inorganic film such as a silicon oxide film, a silicon nitride film, or a metal oxide film. The gate insulating film 1107 may be a single-layer or multi-layer structure.

[0190] A gate electrode 1108 may be formed in a defined area on the gate insulating film 1107. The gate electrode 1108 may be a single-layer film or a multilayer film of Au, Ag, Cu, Ni, Pt, Pd, Al, Mo, Cr, etc. The gate electrode 1108 may be an alloy such as Al:Nd or Mo:W.

[0191] An interlayer insulating film 1109 may be formed on the gate electrode 1108. The interlayer insulating film 1109 may include an inorganic film such as a silicon oxide film or a silicon nitride film, or an organic film.

[0192] An active electrode 1110 and a drain electrode 1111 can be formed on the interlayer insulating film 1109. Specifically, contact holes can be formed on the gate insulating film 1107 and the interlayer insulating film 1109 by selective removal. The contact holes allow the source electrode 1110 to be electrically connected to the source region 1104 and the drain electrode 1111 to be electrically connected to the drain region 1105.

[0193] A protective film (passivation film and / or planarization film) 1112 may be formed on the source electrode 1110 and the drain electrode 1111. The protective film 1112 may include an inorganic film such as a silicon oxide film or a silicon nitride film, or an organic film such as acrylic, polyimide, benzocyclobutene (BCB).

[0194] An organic light-emitting element (OLED) can be formed above the thin-film transistor (TFT).

[0195] An organic light-emitting element (OLED) can be formed on a protective film 1112. The OLED may include a first electrode 1113, an intermediate layer 1122, and a second electrode 1115, wherein the intermediate layer 1122 includes an organic light-emitting layer.

[0196] The first electrode 1113 functions as an anode and can be formed from various conductive materials. The first electrode 1113 can be formed as a transparent electrode or a reflective electrode. For example, when the first electrode 1113 is used as a transparent electrode, it may include a transparent conductive film. When the first electrode 1113 is used as a reflective electrode, it may include a reflective film and a transparent conductive film formed on the reflective film.

[0197] The pixel defining film 1114 may cover a portion of the protective film 1112 and the first electrode 1113. The pixel defining film 1114 may define the light-emitting area of ​​each sub-pixel by surrounding the edge of the first electrode 1113. The first electrode 1113 may be patterned for each sub-pixel. The pixel defining film 1114 may be formed of an organic film or an inorganic film. Furthermore, the pixel defining film 1114 may be constructed as a single-layer film or a multilayer film.

[0198] An intermediate layer 1122 may be formed in the region exposed on the first electrode 1113 by etching a portion of the pixel-defined film 1114. The intermediate layer 1122 may be formed by a deposition process. Figure 1 The deposition opening of the mask sheet MS is used to pattern the deposition material of the OP deposition.

[0199] The intermediate layer 1122 may include an organic light-emitting layer. Alternatively, the intermediate layer 1122 may include an organic light-emitting layer (emissive layer), and may further include at least one of a hole injection layer (HIL), a hole transport layer (HTL), an electron transport layer (ETL), and an electron injection layer (EIL). This embodiment is not limited to this; the intermediate layer 1122 may include an organic light-emitting layer and further include various other functional layers.

[0200] The second electrode 1115 may be formed on the intermediate layer 1122.

[0201] The second electrode 1115 can function as a cathode. The second electrode 1115 may be a transparent electrode or a reflective electrode. For example, when the second electrode 1115 is used as a transparent electrode, it may include a metal film and a transparent conductive film formed on the metal film. When the second electrode 1115 is used as a reflective electrode, it may include a metal film.

[0202] In one embodiment, a plurality of sub-pixels may be formed on the display substrate 1101, and each sub-pixel may be configured to display a color of red, green, blue, or white. However, this disclosure is not limited thereto.

[0203] A sealing substrate 1116 may be formed above the organic light-emitting element (OLED). The sealing substrate 1116 is formed to protect the intermediate layer 1122 and other thin films from external moisture or oxygen. The sealing substrate 1116 may be a rigid glass, a polymer resin, or a flexible film. The sealing substrate 1116 may be formed by alternately stacking organic films 1117, 1119 and inorganic films 1118 on the OLED. In one embodiment, at least one organic film 1117, 1119 and an inorganic film 1118 may be included.

[0204] The embodiments described above are embodiments that can be implemented independently, but there is no doubt that the structure of each embodiment can be combined and applied to other embodiments.

[0205] Thus, the invention has been illustrated with reference to the embodiments shown, but this is merely illustrative, and those skilled in the art should understand that various modifications and other equivalent embodiments are possible based on these embodiments. Therefore, the true scope of protection of this invention should be determined by the technical concept of the claims.

[0206] The specific implementations described in the embodiments are one example and are not intended to limit the scope of the embodiments in any way. Furthermore, unless specifically mentioned with expressions such as "must" or "important," structural elements may not be necessary for applying the invention.

[0207] In this application (particularly the claims), the term "as stated" and similar descriptive terms can refer to both the singular and the plural. Furthermore, if a range is described in the embodiments, it includes the application of individual values ​​belonging to the range (unless otherwise stated), which is the same as when each individual value constituting the range is described in the detailed description. Finally, if the steps of the method relating to an embodiment are not explicitly stated in order or are not stated in reverse order, the steps may be performed in an appropriate order, and the embodiment is not necessarily limited by the order in which the steps are stated. In the embodiments, all examples or illustrative terms are used only to describe the embodiments in detail, and the scope of the embodiments is not limited by the examples or illustrative terms unless defined in the claims. Moreover, those skilled in the art will understand that various modifications, combinations, and alterations can be made within the scope of the claims or their equivalents, depending on design conditions and factors.

Claims

1. A mask assembly manufacturing apparatus comprising: a mask stage for placing a mask frame having an opening; a clamp unit arranged on a side of the mask stage, the clamp unit having a plurality of first clamps arranged in a first direction and for clamping a first edge of a first mask sheet, and arranging a second edge of the first mask sheet on a side opposite to the first edge above the opening; a sensing unit for sensing the second edge of the first mask sheet; and a control section for adjusting the first clamps to align the first mask sheet based on information of the second edge sensed by the sensing unit.

2. The mask assembly manufacturing apparatus according to claim 1, wherein the clamp unit further has a plurality of second clamps arranged in a second direction different from the first direction and for clamping a third edge of the first mask sheet between the first edge and the second edge.

3. The mask assembly manufacturing apparatus according to claim 2, wherein the control section is for aligning the first mask sheet by adjusting the first clamps in the second direction while keeping the second clamps in the first direction.

4. The mask assembly manufacturing apparatus according to claim 1, wherein the control section is for raising and lowering the clamp unit.

5. The mask assembly manufacturing apparatus according to claim 1, wherein the first clamps are arranged on a first imaginary line extending between adjacent deposition openings on the first mask sheet.

6. The mask assembly manufacturing apparatus according to claim 5, wherein the control section is for adjusting the first clamps based on a position of a point where the second edge of the first mask sheet and the first imaginary line intersect.

7. The mask assembly manufacturing apparatus according to claim 1, wherein the clamp unit further has a plurality of second clamps for clamping a second mask sheet, and arranges the second mask sheet adjacent to the first mask sheet.

8. The mask assembly manufacturing apparatus according to claim 7, wherein the control section is for adjusting the first clamps based on a distance apart between the second edge of the first mask sheet and the second mask sheet.

9. The mask assembly manufacturing apparatus according to claim 7, further comprising a welding unit for welding the second edge of the first mask sheet and the second mask sheet.

10. The mask assembly manufacturing apparatus according to claim 1, further comprising a support arranged between the clamp unit and the opening of the mask frame.

11. A mask assembly manufacturing apparatus comprising: a mask stage for placing a mask frame having an opening; a clamp unit arranged on a side of the mask stage, the clamp unit having a plurality of first clamps arranged in a first direction and for clamping a first edge of a first mask sheet; a sensing unit for sensing a second edge of the first mask sheet engaged with a second mask sheet arranged adjacent to the first mask sheet in a second direction; and a control section for adjusting the first clamps to align the first mask sheet based on information of the second edge sensed by the sensing unit. ​ a control unit configured to adjust the first clamp to apply a compression force to the first mask sheet based on information of the second edge sensed by the sensing unit.

12. The mask assembly manufacturing apparatus according to claim 11, wherein the control unit detects a distance between the second edge of the first mask sheet and the second mask sheet as the information of the second edge.

13. The mask assembly manufacturing apparatus according to claim 12, wherein the control unit moves the first clamp in the second direction to apply the compression force to the first mask sheet in the second direction based on the distance between the second edge and the second mask sheet.

14. The mask assembly manufacturing apparatus according to claim 12, wherein the control unit moves the first clamp in the second direction to move a region of the first mask sheet in a direction closer to the second mask sheet based on the distance between the second edge and the second mask sheet.

15. The mask assembly manufacturing apparatus according to claim 11, wherein the first clamp includes a first-a clamp and a first-b clamp, the control unit moves the first-a clamp and the first-b clamp using a first point of the second edge corresponding to the first-a clamp and a second point of the second edge corresponding to the first-b clamp.

16. The mask assembly manufacturing apparatus according to claim 15, wherein the first point is a point on the second edge intersecting a first imaginary line passing through the first-a clamp and parallel to the second direction, the second point is a point on the second edge intersecting the first imaginary line passing through the first-b clamp and parallel to the second direction.

17. The mask assembly manufacturing apparatus according to claim 16, wherein the first imaginary line is an imaginary line extending between adjacent deposition openings on the first mask sheet.

18. The mask assembly manufacturing apparatus according to claim 11, wherein the clamp unit further includes a plurality of second clamps arranged in the second direction and configured to clamp a third edge of the first mask sheet between the first edge and the second edge.

19. The mask assembly manufacturing apparatus according to claim 18, wherein the control unit adjusts the first clamp in the second direction to align a position of the first mask sheet while maintaining a position of the second clamps in the first direction.

20. The mask assembly manufacturing apparatus according to claim 11, further comprising a welding unit configured to weld the second edge of the first mask sheet to the second mask sheet.

Images