Inductive position measuring device

Abstract

The invention relates to an inductive position measuring device comprising a first component having a first interaction surface and a second component having a second interaction surface. The two components are arranged opposite each other in a third direction and are movable relative to each other. The first assembly includes a plurality of first field interaction elements arranged parallel to the first interaction surface and connected to the evaluation electronics. The second assembly includes a plurality of second field interaction elements arranged in a flat distribution over a second interaction surface. The inductive position measuring device is characterized in that it comprises at least four first field interaction elements in the form of linear sensors, arranged in a quadrangle along a first direction and a second direction, the first field interaction elements at least partially overlapping at the corners of the quadrangle arrangement.

Description

Technical Field

[0001] The present invention relates to an inductive position measuring device as described in the preamble of claim 1. Background Technology

[0002] A motion device with a position determination system is known from patent document WO 2020 088 869A1. The device includes a stationary component and a motion component. Both components are equipped with their own power sources and include multiple coils or capacitor plates of a ring design that interact electromagnetically with each other.

[0003] The drawback of the aforementioned prior art is that both moving and stationary components use electrical components that must be connected to active electronic devices. This results in each component requiring its own power supply and data connection, leading to significantly more complex structures, especially in stationary components. Summary of the Invention

[0004] The purpose of this invention is to provide an inductive position measuring device that can locate moving components in multiple degrees of freedom and has the advantages of compact structure and low manufacturing cost.

[0005] This objective is achieved by the features of claim 1. Advantageous embodiments and further improvements are given in the dependent claims.

[0006] The inductive position measuring device according to the invention includes a first component having a first interaction surface and a second component having a second interaction surface. These two components are arranged opposite each other in a third-order orientation and are movable relative to each other. The first component includes a plurality of first field interaction elements arranged parallel to the first interaction surface and connected to evaluation electronics. The second component includes a plurality of second field interaction elements arranged planarly on the second interaction surface. The first and second field interaction elements are capable of generating electromagnetic interaction. The inductive position measuring device includes at least four first field interaction elements in the form of linear sensors, arranged in a quadrilateral along a first and a second direction, wherein the first field interaction elements at least partially overlap at the corners of the quadrilateral arrangement.

[0007] According to an advantageous improvement of the invention, the first field interaction element includes at least one excitation element for generating an electromagnetic field and at least one receiving element for receiving the electromagnetic field.

[0008] In another design scheme, the first field interaction element

[0009] Each includes a first receiving element and a second receiving element, the first receiving element and the second receiving element having a periodic orientation with a constant period length, wherein the receiving elements are arranged in a first direction or a second direction at a distance of one-quarter of the period length relative to each other; and

[0010] Each includes an excitation element, which in particular surrounds two receiving elements in the form of a quadrilateral.

[0011] Advantageously, the first component includes four first field interaction elements arranged in the first interaction surface and respectively arranged perpendicular to each other.

[0012] If an embodiment with four first field interaction elements is proposed, it is advantageous to configure the receiving elements of these four first field interaction elements such that the oscillation width of the first field interaction elements corresponds to at least one period length.

[0013] Alternatively, the first component includes eight first field interaction elements arranged in a first interaction surface and arranged as parallel pairs of field interactions, wherein four sets of field interaction pairs are then arranged perpendicular to each other.

[0014] If an embodiment with eight field interaction elements or four sets of field interaction pairs is proposed, it is advantageous that the first receiving elements of at least one set of field interaction pairs are identically constructed and connected in series. Furthermore, the second receiving elements of at least one set of field interaction pairs are also identically constructed and connected in series. The oscillation width of at least one of the receiving elements is less than half the period length, and the distance between two first receiving elements or two second receiving elements within at least one set of field interaction pairs is half the period length.

[0015] Here, distance is understood as the distance within a pair of field interaction elements, which is formed relative to a virtual zero crossing between the receiving elements of one first field interaction element and the receiving elements of another first field interaction element.

[0016] Preferably, in each of the four sets of field interaction pairs, the first receiving element is constructed identically, and the first receiving elements within a set of field interaction pairs are connected in series. Also preferably, in each of the four sets of field interaction pairs, the second receiving element is constructed identically, and the first receiving elements within a set of field interaction pairs are connected in series.

[0017] Preferably, the second field interaction element

[0018] Constructed into a quadrilateral shape, especially a square surface, and

[0019] They have the same size and are uniformly distributed in a grid form on the second interacting surface.

[0020] Advantageously, the quadrilaterals in the quadrilateral arrangement are rectangles, and especially squares.

[0021] The second field interaction element is advantageously fabricated using planar technology, especially thick film technology, and supplementally or alternatively using thin film technology.

[0022] The first field interaction element is preferably capable of being operated alternately by the evaluation electronics at a predetermined switching frequency.

[0023] The predetermined switching frequency is advantageously determined by the current relative speed of the first component and the supplementary or replaceable second component, as well as the historical (i.e. previous) relative speed of the supplementary or replaceable component.

[0024] Furthermore, it is proposed that the evaluation electronic device includes at least one signal generator module, at least one evaluation module, and at least one switching unit. A first field interaction element can be selectively connected individually or in pairs to the evaluation module or the signal generator module via at least one switching unit.

[0025] In another design, the switching unit includes at least one multiplexer and at least one control module, wherein the control module controls at least one multiplexer according to the switching frequency, such that a first field interaction element extending in the same direction is paired with an evaluation module or a signal generation module.

[0026] In another design, the second component is not connected to the active power supply device and the data processing device.

[0027] Therefore, only the first component is connected to the active power supply device and the data processing device.

[0028] Further features and advantages of this invention will be further explained in conjunction with the description of the embodiments and with reference to the accompanying illustrative drawings. Attached Figure Description

[0029] The attached diagram shows:

[0030] Figure 1 A perspective view of an inductive position measuring device including a first component and a second component is shown;

[0031] Figure 2 A floor plan of the second component is shown;

[0032] Figure 3 A plan view of a first embodiment of the first field interaction element is shown;

[0033] Figure 4A plan view of a second embodiment of the first field interaction element is shown;

[0034] Figure 5 A view of the first interacting surface of the first component is shown;

[0035] Figure 6a , Figure 6b A schematic diagram of an inductive position measuring device is shown in plan view, in which the relative rotation of a first component about a third-direction coordinate axis is shown;

[0036] Figure 7 A schematic block diagram of the evaluation electronics of the first component of the inductive position measuring device is shown. Detailed Implementation

[0037] according to Figure 1 The inductive position measuring device 1 described in the following embodiment includes a first component 10 and a second component 20, which are arranged opposite each other in a third direction z and are movable relative to each other. The first component 10 and the second component 20 are arranged spaced apart from each other, thereby forming an air gap between the first component 10 and the second component 20.

[0038] The first component 10 includes a first interaction surface 11 having a plurality of first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', and 10.Y2”, wherein the first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', and 10.Y2” are arranged parallel to and flatly within the first interaction surface 11. The first component 10 is supplied with electrical energy to generate at least one excitation signal S1 and receive at least one reception signal S2. This can be achieved, for example, via cable or wireless means. The energy source can be a battery located within the first component 10 or located outside the first component 10.

[0039] The second component 20 includes a second interaction surface 21 having a plurality of second field interaction elements 20.1 to 20.n. The second field interaction elements 20.1 to 20.n are arranged on the second interaction surface 21 or are arranged in a plane within the second interaction surface and are distributed flatly on the second interaction surface. The second component 20 does not autonomously generate its own magnetic field, nor does it actively obtain electrical energy through cables or similar means, because the second component 20 interacts with the first component 10 only passively.

[0040] The second interaction surface 21 of the second component 20 is typically designed to be larger than the first interaction surface 11 of the first component 10, such that there is always sufficient overlap between the first component 10 and the second component 20, even if the first component 10 is located in the edge region of the second component 20.

[0041] Two interacting surfaces 11, 21 are arranged opposite to each other and spaced apart, thereby enabling position determination through electromagnetic interaction between the first and second field interacting elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2” or 20.1 to 20.n. This is particularly true in a planar view observed in the third direction z, especially when the first and second field interacting elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2” or 20.1 to 20.n at least partially overlap.

[0042] During operation of the inductive position measuring device 1, the position and orientation of the first component 10 and the second component 20 can vary relative to each other in three directions x, y, and z. Advantageously, the three directions x, y, and z are orthogonal to each other. The current position and orientation in six degrees of freedom are determined and evaluated by the inductive position measuring device 1 through the electromagnetic interaction between the first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', and 10.Y2” and the second field interaction elements 20.1 to 20.n. To analyze the position and orientation of the first component 10, evaluation electronics are arranged inside or outside the first component 10. Data transmission can be performed, for example, via a wired method or alternatively, wirelessly.

[0043] Preferably, one of the components remains stationary and fixed, while the other component is free to move. It is particularly reasonable to set the second component 20 to be stationary and fixed when the second interaction surface 21 of the second component 20 is many times larger than the first interaction surface 11 of the first component 10. Alternatively, the first component 10 may be set to be stationary and fixed, and the second component 20 may be allowed to move relative to the first component 10. This is reasonable, for example, when it is impossible to provide electrical power to the moving component.

[0044] Figure 2 A preferred design of the second interaction surface 21 of the second component 20 is shown. The second interaction surface 21 can have almost any topology or be arbitrarily curved, and is preferably designed to be planar.

[0045] The second interaction surface 21 is preferably the surface of a circuit board, which is fabricated using thin-film technology and may alternatively be fabricated using thick-film technology. The circuit board includes an electrically insulating substrate 19, such as fiber-reinforced epoxy resin. A conductive layer, particularly made of copper, is coated on the substrate 19 of the circuit board, and the conductive layer is structured to form a plurality of second interaction elements 20.1 to 20.n.

[0046] Alternatively, the individual second field interaction elements 20.1 to 20.n and the second interaction surface 21 may also be made of a substrate. The substrate may in particular be a metal substrate, wherein the individual second field interaction elements 20.1 to 20.n are constructed in a raised manner, and no metal substrate is present between the individual second field interaction elements 20.1 to 20.n. The region between the individual second field interaction elements 20.1 to 20.n may form voids or air gaps, or may be filled, for example, with epoxy resin to form a flat surface.

[0047] The second field interaction elements 20.1 to 20.n are distributed on the second interaction surface 21 in the form of a quadrilateral grid, and are spaced apart from each other. The columns and rows of the grid of second field interaction elements 20.1 to 20.n are arranged along the orthogonally extending first direction x and second direction y. All second field interaction elements 20.1 to 20.n have the same dimensions, and are in particular square form. Of course, other shapes, such as circles, rectangles, spirals, etc., can also be considered.

[0048] like Figure 2 As shown, the grid can be completely filled by the second field interaction elements 20.1 to 20.n, thereby making the second field interaction elements 20.1 to 20.n uniformly distributed in a grid form. Alternatively, the second field interaction elements 20.1 to 20.n can also be non-uniformly distributed on the second interaction surface 21, such that the grid may, for example, include individual locations or regions without the second field interaction elements 20.1 to 20.n.

[0049] Preferably, each of the second field interaction elements 20.1 to 20.n is constructed identically, and all the second field interaction elements 20.1 to 20.n are arranged in the grid at equal intervals.

[0050] Figure 3 A first embodiment of the first field interaction elements 10.X1, 10.X2, 10.Y1, and 10.Y2 is shown. The first field interaction element 10.X1 shown is an elongated linear sensor that includes a planar excitation element 10.1 for generating an electromagnetic field and two planar receiving elements 10.21 and 10.22 for receiving the electromagnetic field.

[0051] The first receiving element 10.21 is configured as a receiving guide and consists of multiple guide segments. The basic trajectory of the first receiving element 10.21 resembles a sine curve, wherein the amplitudes of each guide are not necessarily constant in structure. In the basic trajectory, the amplitudes of two adjacent guides consist of a positive and a negative guide amplitude and have a period length T1 and an oscillation width SB1.

[0052] The first receiving element 10.21 can be divided into a preamble and a return segment. The preamble, in its basic direction, resembles the graph of a function f(x) = a·sin(x), where... The return segment, in its basic direction, resembles the graph of the function g(x) = -a·sin(x), where That is, the return segment of the first receiving element 10.21 approximately corresponds to the leading segment mirrored at the line of symmetry.

[0053] The second receiving element 10.22 is configured as a receiving guide like the first receiving element 10.21, but is arranged at an offset of one-quarter of the period length T1 (offset V1) relative to the first receiving element 10.21. This offset V1 is implemented specifically along the first direction x or the second direction y. The offset arrangement of the two receiving elements 10.21 and 10.22 allows for the corresponding generation of phase-shifted signals. The two receiving elements 10.21 and 10.22 are electrically connected such that they provide 0° and 90° signals, respectively.

[0054] The two receiving elements 10.21 and 10.22 are different in length from each other. For example, the first receiving element 10.21 has a length of 3 times the period length T1, and the second receiving element 10.22 has a length of 2.5 times the period length T1.

[0055] In addition to the sinusoidal orientation of the receiving elements 10.21 and 10.22, other curved forms, such as triangular orientations, can also be considered.

[0056] In receiving elements 10.21 and 10.22, the swing width SB1 refers to the height of the offset between the minimum and maximum values ​​within a period length T1. It extends in a direction perpendicular to the period length T1, i.e., perpendicular to either the first direction x or the second direction y.

[0057] According to the first embodiment of the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2, the swing width SB1 of the first receiving element 10.21 and the swing width SB1 of the second receiving element 10.22 are constructed to be the same on average and correspond to at least one period length T1.

[0058] Figure 3The swing width SB1 of the receiving elements 10.21 and 10.22 shown corresponds to approximately 1.5 times the period length T1.

[0059] The two receiving elements 10.21 and 10.22 are composed of multiple guide rail segments located at different positions on the carrier substrate. Detailed information about this multi-layered structure composed of guide rail segments is described in European patent application EP23200280, filed on September 28, 2023, and is expressly referenced herein.

[0060] To compensate for pitch tilt, receiving elements 10.21 and 10.22 can be equipped with additional loops S and S' at certain locations. These loops are also composed of guide rail segments. For this purpose, at predetermined positions along the basic orientation, loops S and S' are positioned below the guide rail amplitude. At the positions with additional loops S and S', the guide rail amplitude of receiving elements 10.21 and 10.22 deviates from the basic orientation and translates outward, i.e., towards the excitation element 10.1, by a predetermined amount. Loops S and S' are slightly inward relative to the guide rail amplitude along the basic orientation, i.e., translated towards the virtual zero-crossing point of the basic orientation of receiving elements 10.21 and 10.22. However, the overall amplitude signal obtained in the structurally different guide rail amplitudes with loops is the same magnitude as the amplitude signal in the ordinary guide rail amplitude without loops.

[0061] The loops S and S' are part of the receiving guide rail and are preferably arranged on the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2, such that the loops are arranged in a mirror symmetric manner with respect to the A-axis that divides the leading section and the returning section into equal parts.

[0062] The loop S of the first receiving element 10.21 can be arranged within the leading section of the receiving rail, and can be arranged supplementarily or alternatively within the returning section of the receiving rail.

[0063] The loop S' of the second receiving element 10.22 can also be arranged in the leading section of the receiving rail, and can be arranged in the return section of the receiving rail as a supplement or alternative.

[0064] The two receiving elements 10.21 and 10.22 are surrounded by the excitation element 10.1, i.e., completely covered from the sides. The excitation element 10.1 serves as an excitation guide and is structurally constructed in the form of a quadrilateral. In particular, the quadrilateral is at least rectangular.

[0065] According to the second embodiment of the first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2”, their arrangement can also form field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2.

[0066] Figure 4 The field interaction pair 10.PX1 shown includes a first field interaction element 10.X1' and another first field interaction element 10.X1". These two first field interaction elements 10.X1' and 10.X1" are configured as elongated linear sensors and together include a planar excitation element 10.2 (see...). Figure 4 Alternatively, it may include a planar excitation element (not shown) for generating an electromagnetic field.

[0067] The first field interaction element 10.X1' includes a planar first receiving element 10.23 and a planar second receiving element 10.24 for receiving electromagnetic fields. The other first field interaction element 10.X' also includes a planar first receiving element 10.25 and a planar second receiving element 10.26 for receiving electromagnetic fields.

[0068] The first field interaction elements 10.X1' and 10.X1" are arranged spaced apart from each other, thus forming an offset V3 between the two first field interaction elements 10.X1' and 10.X1" relative to the receiving elements 10.23, 10.24 and the receiving elements 10.25, 10.26. This offset V3 is implemented particularly along the first direction x or the second direction y. Preferably, the offset V3 corresponds to half a period length T2.

[0069] According to the second embodiment, the structure of the first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2” and their arrangement as field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 ensures that the lateral sensitivity of the inductive position measuring device 1 is reduced. In particular, the lateral sensitivity perpendicular to the x-direction or y-direction is reduced.

[0070] The first receiving elements 10.23 and 10.25 are constructed as receiving rails and consist of multiple rail segments. The basic trends of the first receiving elements 10.23 and 10.25 are similar to sine curves, where the amplitude of each rail is not necessarily constant in structure. In the basic trend, the amplitude of two adjacent rails consists of a positive rail amplitude and a negative rail amplitude, and has a period length T2 and an oscillation width SB2.

[0071] The first receiving elements 10.23 and 10.25 can be divided into a preamble and a return segment, respectively. The basic trend of the preamble is similar to the graph of a function f(x) = a·sin(x), where... The basic trend of the return segment is similar to the graph of the function g(x) = -a·sin(x), where In other words, the return segments of the first receiving elements 10.23 and 10.25 roughly correspond to the leading segments mirrored at the line of symmetry.

[0072] The second receiving elements 10.24 and 10.26 are configured as receiving rails like the first receiving elements 10.23 and 10.25, but are arranged at an offset of one-quarter of the period length T2 (offset V2) relative to the corresponding first receiving elements 10.23 and 10.25. This offset V2 is implemented specifically along the first direction x or the second direction y. By the staggered arrangement of these two receiving elements 10.23 and 10.25 and 10.24 and 10.26, a phase-shifted signal can be generated accordingly. The two receiving elements 10.24 and 10.26 are electrically connected such that they provide a 0° signal and a 90° signal, respectively.

[0073] The two receiving elements 10.23 and 10.25 are different in length. For example, the first receiving element 10.23 has a length of 3 times the period length T2, and the second receiving element 10.25 has a length of 2.5 times the period length T2.

[0074] In the structure of the first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', and 10.Y2” according to the second embodiment, the first receiving element 10.23 of the first field interaction element 10.X1' is connected in series with the first receiving element 10.25 of the other first field interaction element 10.X1”. Furthermore, the second receiving element 10.24 of the first field interaction element 10.X1' is connected in series with the second receiving element 10.26 of the other first field interaction element 10.X1”. Through this series connection, 0° and 90° signals with higher signal amplitudes are ultimately obtained, respectively.

[0075] In addition to the receiving elements 10.23, 10.24, 10.25, and 10.26 exhibiting a sinusoidal curve, other curve forms, such as triangular trajectories, may also be considered.

[0076] In receiving elements 10.23, 10.25, 10.24, and 10.26, the swing width SB2 refers to the offset height between the minimum and maximum values ​​within a period length T2. The receiving element extends perpendicular to the period length T2, or perpendicular to a first direction x or a second direction y.

[0077] According to the second embodiment of the first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2”, the swing width SB2 of the first receiving elements 10.23, 10.25 is constructed to be on average equal to the swing width SB2 of the corresponding second receiving elements 10.24, 10.26 and corresponds at most to half of the period length T2.

[0078] like Figure 3 As shown, receiving elements 10.23, 10.25, 10.24, and 10.26 have a swing width SB2, which is approximately one-third of the period length T2.

[0079] The first and second receiving elements 10.23, 10.25, 10.24, and 10.26 are also composed of multiple guide rail segments arranged at different positions on the substrate, as in the first embodiment.

[0080] To compensate for pitch tilt, receiving elements 10.23, 10.25, 10.24, and 10.26 can also be locally equipped with additional loops S and S' formed by guide rail segments. For this purpose, loops S and S' are arranged below the guide rail amplitude at predetermined positions along the basic orientation. At the positions with additional loops S and S', the guide rail amplitude of receiving elements 10.21 and 10.22 deviates from the basic orientation and moves outward, i.e., toward the excitation element 10.1, by a predetermined amount. Loops S and S' are slightly inward relative to the orientation of the basic guide rail amplitude of receiving elements 10.23, 10.25, 10.24, and 10.26, i.e., translated toward the virtual zero-crossing direction of the basic orientation of receiving elements 10.23, 10.25, 10.24, and 10.26. However, the overall amplitude signal obtained in the structurally different guide rail amplitudes with loops is the same magnitude as the amplitude signal in the ordinary guide rail amplitude without loops.

[0081] The loops S and S' are part of the receiving guide rail and are preferably arranged on the two first field interaction elements 10.X1' and 10.X1" such that the loops are arranged in a mirror symmetric manner with respect to the A-axis that divides the leading or returning segment into equal parts.

[0082] The loop S of the first receiving elements 10.23 and 10.25 can be arranged in the leading section of the receiving rail, and can be supplemented or alternatively arranged in the return section of the receiving rail.

[0083] The loop S' of the second receiving elements 10.24 and 10.26 can also be arranged in the leading section of the receiving rail, and can be supplemented or alternatively arranged in the return section of the receiving rail.

[0084] As previously described, receiving elements 10.23, 10.25, 10.24, and 10.26 are either surrounded by a common excitation element 10.2 or by multiple independent excitation elements, i.e., surrounded from all sides. The excitation element 10.2 is configured as an excitation guide and is structurally formed in at least the form of a quadrilateral. In particular, the quadrilateral is at least rectangular.

[0085] For example, an excitation element 10.2 can form two rectangles, respectively surrounding receiving elements 10.23 and 10.24 and receiving elements 10.25 and 10.26, such as... Figure 4 As shown. Alternatively, two excitation elements can be provided, each forming a rectangle that surrounds receiving elements 10.23, 10.24 and receiving elements 10.25, 10.26 respectively.

[0086] The first field interaction elements 10.X1, 10.X1', 10.X1”, 10.X2, 10.X2', 10.X2”, 10.Y1, 10.Y1', 10.Y1”, 10.Y2, 10.Y2', 10.Y2” are constructed within the first interaction surface 11 of the first component 10. The first interaction surface 11 is the surface of a circuit board, which is fabricated using thin-film technology and may be alternatively fabricated using thick-film technology. To form the structured first field interaction elements 10.X1, 10.X1', 10.X1”, 10.X2, 10.X2', 10.X2”, 10.Y1, 10.Y1', 10.Y1”, 10.Y2, 10.Y2', 10.Y2”, multiple layers of independently stacked and conductive layers can be provided, which are isolated from each other by insulating layers. At a predetermined location, namely the so-called through-hole, there is an electrical connection between the guide rails of different conductive layers.

[0087] like Figure 5 As shown, two field interaction elements 10.X1, 10.X2 or two pairs of field interaction elements 10.PX1, 10.PX2 extend parallel to each other along a first direction x and are arranged at intervals of Dx. Two field interaction elements 10.Y1, 10.Y2 or two pairs of field interaction elements 10.PY1, 10.PY2 extend parallel to each other along a second direction y and are also arranged at intervals of Dy. Advantageously, the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 or the field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 are arranged in a quadrilateral arrangement, especially in a square arrangement (Dx = Dy).

[0088] Advantageously, the individual first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2 or the quadrilaterally arranged field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 partially or completely overlap at the corners A, B, C, D of the quadrilateral arrangement.

[0089] Overlap refers to the overlap of at least two adjacent and mutually orthogonal first field interaction elements 10.X1, 10.X1', 10.X1”, 10.X2, 10.X2', 10.X2”, 10.Y1, 10.Y1', 10.Y1”, 10.Y2, 10.Y2', 10.Y2” or field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​which is formed in a planar view observed along the third direction z.

[0090] Partial overlap indicates that the overlap area of ​​at least two adjacent and mutually orthogonal first field interaction elements 10.X1, 10.X1', 10.X1”, 10.X2, 10.X2', 10.X2”, 10.Y1, 10.Y1', 10.Y1”, 10.Y2, 10.Y2', 10.Y2” or field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 is not equal to the maximum possible overlap area.

[0091] Complete overlap means that the overlap area of ​​at least two adjacent and mutually orthogonal first field interaction elements 10.X1, 10.X1', 10.X1”, 10.X2, 10.X2', 10.X2”, 10.Y1, 10.Y1', 10.Y1”, 10.Y2, 10.Y2', 10.Y2” or field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 is equal to the maximum possible overlap area.

[0092] For example, in all four corners A, B, C, D of the quadrilateral arrangement, all adjacent first field interaction elements 10.X1, 10.X1', 10.X1”, 10.X2, 10.X2', 10.X2”, 10.Y1, 10.Y1', 10.Y1”, 10.Y2, 10.Y2', 10.Y2” or field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 achieve complete overlap, thereby minimizing the size of the first interaction surface 11, thus enabling a particularly compact first component 10. Ideally, the individual first field interaction elements 10.X1, 10.X1', 10.X1”, 10.X2, 10.X2', 10.X2”, 10.Y1, 10.Y1', 10.Y1”, 10.Y2, 10.Y2', 10.Y2” or field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 will not protrude or will only protrude slightly at the four corners A, B, C, and D.

[0093] Especially when arranging the first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2” into field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​it is possible to set, for example... Figure 1 , Figure 6a and Figure 6b As shown, for the inner first field interaction elements 10.X1”, 10.X2”, 10.Y1”, 10.Y2”, their excitation element 10.2 and receiving elements 10.23, 10.24, 10.25, 10.26 achieve (complete) overlap with the adjacent inner first field interaction elements 10.X1”, 10.X2”, 10.Y1”, 10.Y2” at the four corners A, B, C, and D. Among the outer first field interaction elements 10.X1’, 10.X2’, 10.Y1’, 10.Y2’, the excitation element 10.2 will achieve (complete) overlap, but the receiving elements 10.23, 10.24, 10.25, 10.26 will not overlap.

[0094] However, the overlap between the excitation element 10.2 and the receiving elements 10.23, 10.24, 10.25, and 10.26 applies not only to the internal first field interaction elements 10.X1”, 10.X2”, 10.Y1”, and 10.Y2”, but also to the external first field interaction elements 10.X1’, 10.X2’, 10.Y1’, and 10.Y2’.

[0095] By using receiving elements 10.21, 10.22, 10.23, 10.24, 10.25, 10.26 of each first field interaction element 10.X1, 10.X2, 10.Y1, 10.Y2 or each pair of field interaction elements 10.PX1, 10.PX2, 10.PY1, 10.PY2 staggered in the first direction x and the second direction y, each field interaction element 10.X1, 10.X2, 10.Y1, 10.Y2 or each pair of field interaction elements 10.PX1, 10.PX2, 10.PY1, 10.PY2 can provide two measurements, a 0° signal and a 90° signal, respectively, thus a total of eight measurements can be used for position determination.

[0096] For each field interaction element 10.X1, 10.X2, 10.Y1, 10.Y2 or field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​a linear position value and signal amplitude are first determined in the corresponding direction x or y based on the 0° and 90° signals. The signal amplitude can be used to generate a distance value. The distance value of the first field interaction element 10.X1, 10.X2, 10.Y1, 10.Y2 or field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 is used to quantify the distance between the corresponding field interaction element 10.X1, 10.X2, 10.Y1, 10.Y2 or field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2 and the second interaction surface 21 of the second component 20 in the third direction z.

[0097] like Figure 5 As shown, the first field interaction element 10.X1 or the field interaction pair 10.PX1 provides first measurement information X1 including a first position value in the first direction x and a first signal amplitude for determining a position value in the third direction z. Similarly, the first field interaction element 10.X2 or the field interaction pair 10.PX2 provides second measurement information X2 including a second position value in the first direction x and a second signal amplitude for determining a position value in the third direction z. The first field interaction element 10.Y1 or the field interaction pair 10.PY1 provides third measurement information Y1 including a third position value in the second direction y and a third signal amplitude for determining a position value in the third direction z. The first field interaction element 10.Y2 or the field interaction pair 10.PY2 provides fourth measurement information Y2 including a fourth position value in the second direction y and a fourth signal amplitude for determining a position value in the third direction z.

[0098] Therefore, the inductive position measuring device 1 provides two sets of measurement information X1 and X2 for the first direction x and two sets of measurement information Y1 and Y2 for the second direction y within one measurement cycle, wherein each set of measurement information X1, X2, Y1, Y2 consists of at least one position value and at least one signal amplitude.

[0099] In this way, the relative position and orientation of the first component 10 with respect to the second component 20 can be determined, up to six degrees of freedom.

[0100] Figure 6a and Figure 6b A schematic plan view of the inductive position measuring device 1 is shown, in which only a first interaction surface 11 with a plurality of paired first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2” is shown on the first component 10. The first component 10 and the second component 20 are opposite each other and located on two parallel planes, thereby forming an air gap between the first component 10 and the second component 20. Figure 6a In the middle, the first component 10 is in the first position. Figure 6b It shows Figure 6a The first component 10 is positioned at a later time, having deflected and now in the second position. During the transition from the first position to the second position, the first component 10 undergoes a relative rotation about the third coordinate axis z. The second component 20 remains stationary. The inductive position measuring device 1 is capable of determining and evaluating one or more relative rotations of the first component 10 in the three directions x, y, and z.

[0101] like Figure 6a and Figure 6bAs shown, the location determination is preferably based on those field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 that can form sufficiently strong coupling, that is, for those field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 that at least partially overlap with the second field interaction elements 20.1 to 20.n in the planar graph observed in the third direction z. Advantageously, the dimensions of the first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', and 10.Y2” are all larger than those of the second field interaction elements 20.1 to 20.n. Therefore, there are always multiple second field interaction elements 20.1 to 20.n covered by at least one first field interaction element 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', and 10.Y2”. Among them, the receiving elements 10.23, 10.24, 10.25, and 10.26 of the first field interaction elements 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', and 10.Y2” particularly cover multiple second field interaction elements 20.1 to 20.n.

[0102] Figure 7 A block diagram of the evaluation electronics 3 of the inductive position measuring device 1 is shown schematically.

[0103] The evaluation electronic device 3 includes an excitation oscillation circuit as a signal generator module 3.1, an application-specific integrated circuit (ASIC) as an evaluation module 3.2, and a switching unit 3.3. The evaluation module 3.2 can also access a non-volatile memory module to store current and historical speeds.

[0104] The switching unit 3.3 includes a control module 3.4, such as a microcontroller, which controls three multiplexers MUX1, MUX2, and MUX3 and communicates with the evaluation module 3.2.

[0105] Each of the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2” or field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 is connected to the evaluation electronics 3, wherein the evaluation electronics... 3. Perform periodic and alternating operation on each of the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2” or field interaction elements 10.PX1, 10.PX2, 10.PY1, 10.PY2 at a predetermined switching frequency.

[0106] The predetermined switching frequency is selected by the switching unit 3.3 to achieve reliable position and direction determination. The switching frequency is preset to the frequency of change between the predetermined first field interaction elements 10.X1, 10.X1', 10.X1”, 10.X2, 10.X2', 10.X2”, 10.Y1, 10.Y1', 10.Y1”, 10.Y2, 10.Y2', 10.Y2” or the field interaction pairs 10.PX1, 10.PX2, 10.PY1, 10.PY2 and the signal generator module 3.1 or the evaluation module 3.2.

[0107] For example, this can be achieved through an adaptive switching frequency that continuously adjusts its offset based on the historical relative velocity of the first component 10, supplemented or alternatively based on the current relative velocity. A predetermined switching frequency is always selected to enable reliable real-time position and orientation determination. When the first component 10 is rapidly offset, a correspondingly increased switching frequency is selected. When the first component 10 does not offset or only slightly offsets, a constant or correspondingly decreased switching frequency is used.

[0108] Advantageously, the field interaction pairs 10.X1, 10.X2; 10.Y1, 10.Y2 arranged parallel to each other and along the same x- or y-direction are operated simultaneously. This means that within one measurement cycle, only the field interaction pairs 10.PX1 and 10.PX2 along the first direction x are operated first. During this process, the excitation elements 10.2 of the two sets of field interaction pairs 10.PX1, 10.PX2 are temporarily connected to the signal generator module 3.1, and then the receiving elements 10.23, 10.24, 10.25, 10.26 of the two sets of field interaction pairs 10.PX1, 10.PX2 are connected to the evaluation module 3.2 respectively. Then, only the field interaction pairs 10.PY1, 10.PY2 along the second direction y are operated. In this process, the excitation element 10.2 of the two sets of field interaction pairs 10.PY1 and 10.PY2 is first temporarily connected to the signal generator module 3.1, and then the receiving elements 10.23, 10.24, 10.25 and 10.26 of the two sets of field interaction pairs 10.PY1 and 10.PY2 are respectively connected to the evaluation module 3.2.

[0109] By alternating operation of the first field interaction elements 10.X1, 10.X1', 10.X1”, 10.X2, 10.X2', 10.X2”, 10.Y1, 10.Y1', 10.Y1”, 10.Y2, 10.Y2', 10.Y2” or the field interaction pair 10.PX1, 10.PX2, 10.PY1, 10.PY2, ​​the following advantages are obtained in the first direction x and the second direction y: the electronic components inside the evaluation electronic device can be saved because only one signal generator module 3.1 and one processing module 3.2 are needed, which can be used simultaneously in both directions x and y.

[0110] The position is determined within a predetermined measurement range using an absolute measurement method. The measurement range depends on the lengths of the first field interaction elements 10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1”, 10.X2', 10.X2”, 10.Y1', 10.Y1”, 10.Y2', 10.Y2” in the corresponding first direction x or second direction y, or on the obtained 0° and 90° signals.

[0111] At the start of the measurement, the first component 10 and the second component 20 are positioned relative to each other within the measurement range, for example by centering the first component 10 relative to the second component 20 (see [link]). Figure 6a When the first component 10 deflects relative to the second component 20, the absolute position of the first component within the measurement range can be determined.

[0112] Preferably, the area of ​​the second interacting surface 21 is less than or equal to the area of ​​the measurement range.

Claims

1. An inductive position measuring device (1) comprising a first component (10) having a first interaction surface (11) and a second component (20) having a second interaction surface (21), wherein, The components (10, 20) are arranged opposite to each other in a third direction (z) and are movable relative to each other, wherein the first component (10) comprises a plurality of first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") arranged parallel to a first interaction surface (21) and connected to evaluation electronics (3), wherein the second component (20) comprises a plurality of second field interaction elements (20.1 to 20.n) arranged in a flat distribution on the second interaction surface (21), wherein the first and second field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2"; 20.1 to 20.n) are capable of generating an electromagnetic interaction, characterized in that the inductive position measuring device (1) comprises at least four first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") in the form of linear sensors, which are arranged in a quadrangle along a first and a second direction (x, y), wherein the first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") at least partially overlap at the corners (A, B, C, D) of the quadrangular arrangement. The first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") each comprise at least one excitation element (10.1; 10.2) for generating an electromagnetic field and at least one receiving element (10.21, 10.22; 10.23, 10.24, 10.25, 10.26) for receiving an electromagnetic field. The first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") each comprise a first receiving element (10.21; ​ ​ 2. An inductive position measuring device according to claim 1, characterized in that ​ ​ 3. An inductive position measuring device according to claim 2, characterized in that ​ ​ 10.23, 10.25) and a second receiving element (10.22; 10.24, 10.26), which first and second receiving elements have a periodic course with a constant period length (T1; T2), wherein the receiving elements (10.21, 10.22; 10.23, 10.24, 10.25, 10.26) are arranged in one of the first or second direction (x, y) offset by a quarter of the period length (T1; T2) of the receiving elements relative to each other, and The first field interaction elements each comprise an excitation element (10.1; 10.2), which surrounds the two receiving elements (10.21, 10.22; 10.23, 10.24, 10.25, 10.26).

4. An inductive position measuring device according to at least any one of the preceding claims, characterized in that The first assembly (10) comprises four first field interaction elements (10.X1, 10.X2, The receiving elements (10.21, 10.22) of the four first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2) are configured such that the swing width (SB1) of the first field interaction elements corresponds to at least one period length (T1).

5. An inductive position measuring device according to claim 3 and 4, characterized in that 6. Inductive position measuring device according to one of claims 1 to 3, characterized in that The first assembly (10) comprises eight first field interaction elements (10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2"), which are arranged in the first interaction surface (21) and arranged in four groups of pairwise parallel field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2), wherein the four groups of field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are each arranged perpendicularly relative to each other. The first receiving elements (10.23, 10.25) of at least one group of field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and connected in series; 7. An inductive position measuring device according to claim 3 and 6, characterized in that The second receiving elements (10.24, 10.26) of at least one group of field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are identically configured and connected in series; The receiving elements (10.23, 10.24, 10.25, 10.26) of the field interaction pairs (10.PX1, 10.PX2, 10.PY1, 10.PY2) are configured such that the receiving elements have a swing width (SB2), which is less than half the period length (T2); ​ The distance (V3) between two receiving elements (10.23, 10.24; 10.25, 10.26) within at least one pair of field interaction (10.PX1, 10.PX2, 10.PY1, 10.PY2) is half the length of the period (T2).

8. An inductive position measuring device according to at least any one of the preceding claims, characterized in that The second field interaction elements (20.1 to 20.n) are configured as quadrilaterals, in particular as squares, and The second field interaction elements have the same size and are uniformly distributed in a grid on the second interaction surface (21).

9. An inductive position measuring device according to at least any one of the preceding claims, characterized in that The quadrilaterals are rectangles and in particular squares.

10. An inductive position measuring device according to at least any one of the preceding claims, characterized in that The second field interaction elements (20.1 to 20.n) are produced using planar technology, in particular by thick-film technology and / or thin-film technology.

11. An inductive position measuring device according to at least any of the preceding claims, wherein, The first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") can be alternately operated by the evaluation electronics (3) at a predetermined switching frequency. The predetermined switching frequency depends on the current relative speed and / or the historical relative speed of the first and / or second assembly (10, 20).

12. An inductive position measuring device according to claim 11, characterized in that The evaluation electronics (3) comprises at least one signal generator module (3.1), at least one evaluation module (3.2) and at least one switching unit (3.3), wherein the first field interaction elements (10.X1, 10.X2, 10.Y1, 10.Y2; 10.X1', 10.X1", 10.X2', 10.X2", 10.Y1', 10.Y1", 10.Y2', 10.Y2") can be selectively connected individually or in pairs to the evaluation module (3.2) or the signal generator module (3.1) by the at least one switching unit (3.3).

13. An inductive position measuring device according to at least any one of the preceding claims, characterized in that The switching unit (3.3) comprises at least one multiplexer (MUX1, MUX2, MUX3) and at least one control module (3.4), wherein the control module (3.4) controls at least one multiplexer (MUX1, MUX2, MUX3) depending on the switching frequency, such that the first field interaction elements (10.X1, 10.X1', 10.X2, 10.X2', 10.Y1, 10.Y1', 10.Y2, 10.Y2') extending in the same direction (x, y) are connected in pairs to the evaluation module (3.2) or the signal generation module (3.1).

14. An inductive position measuring device according to claim 13, characterized in that The second assembly (20) is not connected to active energizing means and data processing means. ​ 15. An inductive position measuring device according to at least any one of the preceding claims, characterized in that ​

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