Probe and step gauge

Abstract

The invention provides a probe and a step profiler, and the probe comprises a probe rod and a probe head. Wherein the needle head is conical and comprises a needle tip and a connecting end far away from the needle tip; on the first cross section of the needle head, the needle point forms an included angle of 59-61 degrees; the central axis of the needle is located on the first section; the needle rod comprises a first diameter part, the connecting end of the needle head is connected with the first end of the first diameter part, and the end face size of the connecting end is the same as that of the first end. According to the probe provided by the embodiment of the invention, the connection strength between the probe head and the probe rod is increased by improving the connection structure between the probe head and the probe rod of the probe; and moreover, the needle tip shape of the needle head is improved, and the wear resistance of the needle head is improved, so that the problem that the needle head is easy to wear is solved on the basis of improving the strength and the wear resistance of the probe. In addition, through the improvement of the shape of the needle tip, the problems of high processing difficulty and high processing cost of the probe in the prior art can be solved.

Description

Technical Field

[0001] This application relates to the field of testing technology, and in particular to a probe and a step tester. Background Technology

[0002] The step profiler uses a probe to detect samples. However, the probes used in the existing technology have problems such as easy wear of the needle tip, frequent replacement, high processing difficulty, and high processing cost. Summary of the Invention

[0003] The purpose of this application is to provide a probe and a step meter to solve the problems of rapid wear, high processing difficulty and high processing cost of the probe used in the existing step meter.

[0004] To address the aforementioned technical problems, this application provides a probe, including a needle shaft and a needle tip; wherein:

[0005] The needle is conical in shape, including a needle tip and a connecting end away from the needle tip; wherein, on a first cross-section of the needle, the needle tip forms an angle between 59 degrees and 61 degrees; wherein, the central axis of the needle is located on the first cross-section;

[0006] The needle bar includes a first diameter portion, and the connecting end of the needle tip is connected to the first end of the first diameter portion, and the end face size of the connecting end is the same as the end face size of the first end.

[0007] Optionally, the probe, wherein the first diameter portion is made of stainless steel, and / or the needle tip is made of diamond.

[0008] Optionally, in the probe, the connecting end of the needle tip is connected to the first end of the first diameter portion by welding.

[0009] Optionally, the probe, wherein the probe shaft further includes:

[0010] The second diameter portion is connected to the second end of the first diameter portion, and the second end is the end away from the first end;

[0011] The third diameter portion is connected to the end of the second diameter portion that is furthest from the first diameter portion;

[0012] The first diameter portion, the second diameter portion, and the third diameter portion are arranged along the same central axis, and the diameter of the second diameter portion is larger than the diameters of the first diameter portion and the third diameter portion.

[0013] Optionally, the probe wherein the diameter of the third diameter portion is less than or equal to the diameter of the first diameter portion.

[0014] Optionally, the probe wherein the first diameter portion, the second diameter portion, and the third diameter portion are integrally formed.

[0015] Optionally, the probe, wherein the first diameter portion, the second diameter portion, and the third diameter portion are all made of 303 stainless steel.

[0016] Optionally, the probe, wherein the needle tip is at a 60-degree angle on the first cross-section of the needle.

[0017] One embodiment of this application also provides a step meter, which includes a probe as described in any of the preceding claims.

[0018] At least one of the above technical solutions in the specific embodiments of this application has the following beneficial effects:

[0019] The probe of this embodiment improves the connection structure between the probe tip and the shank, increasing the connection strength between them. Furthermore, by improving the tip shape, the probe's wear resistance is enhanced. This addresses the problem of easy tip wear while simultaneously increasing probe strength and wear resistance. Additionally, the improved tip shape also solves the problems of high manufacturing difficulty and cost associated with existing probes. Attached Figure Description

[0020] Figure 1 This is a partial structural diagram of a typical technical probe;

[0021] Figure 2 This is a schematic cross-sectional view of the probe described in an embodiment of this application;

[0022] Figure 3 A photograph of a standard specimen used to test the probe described in this application;

[0023] Figure 4 Test data for accuracy testing using the probe described in the embodiments of this application;

[0024] Figure 5 The data changes are for the accuracy test of standard sample A using the probe described in the embodiments of this application;

[0025] Figure 6 The data changes are for the accuracy test of standard sample B using the probe described in the embodiments of this application;

[0026] Figure 7 This refers to test data obtained from stability testing using the probe described in the embodiments of this application.

[0027] Figure 8 The average data change is the result of using the probe described in the embodiments of this application to perform an accuracy test on standard sample A.

[0028] Figure 9 The standard deviation variation of the probe used in the embodiments of this application for the accuracy test of standard sample A;

[0029] Figure 10 The average data change is the result of using the probe described in the embodiments of this application to perform an accuracy test on standard sample B.

[0030] Figure 11 The standard deviation variation of the probe used in the embodiments of this application for the accuracy test of standard sample B;

[0031] Figure 12 This is a schematic diagram of the test results of deep hole testing using the probe described in the embodiments of this application. Detailed Implementation

[0032] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "a" or "one," and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "connected" or "linked," and similar terms, are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship also changes accordingly.

[0034] like Figure 1 This is a partial structural diagram of the probe in a typical technical stepper. The probe 10 includes a needle bar 11 and a needle head 12. The needle head 12 is in contact with the conical top surface of the needle bar 11, and the contact area is small. In addition, the included angle α of the needle tip 13 of the needle head 12 is about 56 degrees, which leads to the problem of easy wear of the needle head. Moreover, the included angle of the needle tip 13 is a non-standard angle, which leads to the problem of high processing difficulty and high processing cost.

[0035] To address this technical problem, embodiments of this application provide a probe. By improving the connection structure between the probe tip and the shank, the connection strength between the tip and shank is increased. Furthermore, by improving the shape of the needle tip, the wear resistance of the needle tip is increased. Thus, by increasing the probe's strength and wear resistance, the problem of easy needle wear is solved. In addition, the improvement in the needle tip shape also addresses the issues of high processing difficulty and high processing cost of existing probes.

[0036] like Figure 2 This is a schematic cross-sectional view of a probe 100 according to one embodiment of this application. The probe 100 includes:

[0037] Needle bar 110 and needle tip 120;

[0038] The needle 120 is conical and includes a needle tip 121 and a connecting end 122 away from the needle tip 121; wherein, on the first cross section of the needle 120, the needle tip 121 is at an angle α between 59 degrees and 61 degrees; wherein, the central axis L of the needle 120 is located on the first cross section;

[0039] The needle bar 110 includes a first diameter portion 111, and the connecting end 122 of the needle tip 120 is connected to the first end 1111 of the first diameter portion 111, and the end face size of the connecting end 122 is the same as the end face size of the first end 1111.

[0040] Using the probe described in this embodiment, the first diameter portion 111 of the needle bar 110 is cylindrical, and the needle tip 120 is fixedly connected to the end face of the cylindrical structure of the needle bar 110. Since the first diameter portion 111 of the needle bar 110 connected to the needle tip 120 is a standard structural part, the top surface of the cylindrical structure of the first diameter portion 111 is connected to the needle tip 120. Compared with the prior art where the top surface of the conical portion of the needle tip 120 is in contact with the top surface of the needle bar, the probe described in this application improves the connection structure between the needle tip 120 and the needle bar 110, thereby increasing the connection area between the needle tip and the needle bar, and thus increasing the connection strength between the two.

[0041] On the other hand, the probe described in the embodiments of this application, such as Figure 2 As shown, on the first cross section of the needle 120, the needle tip 121 has an angle between 59 and 61 degrees. Compared with the existing technology where the needle tip has an angle of 56 degrees, this reduces the sharpness of the needle tip. Thus, by improving the shape of the needle tip, the wear resistance of the needle is increased.

[0042] In this embodiment of the application, optionally, on the first cross section of the needle 120, the needle tip 121 is at a 60-degree angle. This angle makes the needle tip 121 form a standard angle, which is easier to process, thereby solving the problems of high processing difficulty and high processing cost of probes in the prior art.

[0043] In some embodiments of this application, optionally, to ensure the wear resistance of the needle tip, the needle tip 120 is made of diamond material.

[0044] In some embodiments, the first diameter portion 111 of the needle bar 110 may optionally be made of stainless steel, and the first diameter portion 111 may optionally be made of, but is not limited to, 303 stainless steel.

[0045] By adopting this implementation structure, and taking advantage of the corrosion resistance and easy processing characteristics of stainless steel, the first diameter portion 111 is made of stainless steel, which makes the probe easier to process and further reduces the probe manufacturing cost.

[0046] In this embodiment of the application, optionally, the connecting end 122 of the needle 120 and the first end 1111 of the first diameter portion 111 are connected by welding. This welding method can be, but is not limited to, thermocompression welding. Using thermocompression welding to connect the needle 120 and the first diameter portion 111 results in a stronger joint between the needle 120 and the first diameter portion 111, and lower manufacturing costs.

[0047] In this embodiment, the needle 120 and the needle bar 110 are arranged on the same central axis.

[0048] Combination Figure 2 As shown, in one embodiment of this application, the needle bar 110 further includes:

[0049] The second diameter portion 112 is connected to the second end 1112 of the first diameter portion 111, and the second end 1112 is the end away from the first end 1111.

[0050] The third diameter portion 113 is connected to the end of the second diameter portion 112 that is away from the first diameter portion 111;

[0051] The first diameter portion 111, the second diameter portion 112, and the third diameter portion 113 are arranged along the same central axis, and the diameter of the second diameter portion 112 is larger than the diameters of the first diameter portion 111 and the third diameter portion 113.

[0052] Optionally, the diameter of the third diameter portion 113 is less than or equal to the diameter of the first diameter portion 111; alternatively, the first diameter portion 111, the second diameter portion 112, and the third diameter portion 113 are integrally formed.

[0053] In this embodiment, the first diameter portion 111, the second diameter portion 112, and the third diameter portion 113 may be integrally made of stainless steel to reduce the cost of probe manufacturing.

[0054] In this embodiment, the first diameter portion 111, the second diameter portion 112, and the third diameter portion 113 are each formed into a cylindrical shape.

[0055] The third diameter portion 113 is used to connect with the needle seat on the needle bar 110. The diameter of the third diameter portion 113 is between 0.52 ± 0.015 mm, depending on the mounting structure dimensions of the needle seat.

[0056] Optionally, the diameter of the second diameter portion 112 is between 1.5 ± 0.015 mm, and the diameter of the first diameter portion 111 is between 1 ± 0.015 mm.

[0057] In some embodiments, optionally, the length of the first diameter portion 111 is between 3.5 ± 0.015 mm, the length of the second diameter portion 112 is between 0.6 ± 0.015 mm, and the length of the third diameter portion 113 is between 3.0 ± 0.015 mm.

[0058] Based on the above-described implementation structure of the probe, taking an angle α of 60 degrees for the tip 121 on the first cross section as an example, the accuracy, stability and deep hole tests of the probe 100 are performed.

[0059] Among them, there are physical images of the standard specimens used for accuracy and stability testing, such as... Figure 3 As shown, the film thickness of standard sample A is 320 nm (i.e., 0.320 μm), and the film thickness of standard sample B is 45.9 nm (i.e., 0.0459 μm).

[0060] After mounting the probe described in this embodiment onto the step tester, tests were performed on standard sample A and standard sample B, respectively. The test results for 10 tests on each of standard sample A and standard sample B are as follows: Figures 4 to 6 As shown.

[0061] according to Figures 4 to 6 For standard sample A, the average value Avg of 10 test data is 321 nm, the standard deviation σ is 0.46 nm, the maximum value of the test data is 321.2 nm, the minimum value is 319.7 nm, and each test data is between the lower limit LCL (315 nm) and the upper limit HCL (325 nm) of the test requirements, and the test accuracy meets the equipment specification requirements of ±5 nm.

[0062] For standard sample B, the average value Avg of the test data from 10 tests is 45.7 nm, the standard deviation σ is 0.4 nm, the maximum value of the test data is 46.4 nm, the minimum value is 45.1 nm, and each test data is between the lower limit LCL (40.9 nm) and the upper limit HCL (50.9 nm) of the test requirements, and meets the equipment test specification requirements of ±5 nm.

[0063] Therefore, according to Figures 4 to 6 The test results show that the probe with this implementation structure meets the accuracy requirements of the step tester.

[0064] Furthermore, the detection stability of the probe can also be tested using the aforementioned standard sample A and standard sample B. After the probe is installed on the profilometer for sample testing, the standard sample A and standard sample B are tested multiple times at preset intervals (e.g., weekly). After multiple tests on the standard samples at preset intervals, the detection stability of the probe is obtained based on the test data.

[0065] The test data obtained by using this probe to test standard sample A and standard sample B are as follows: Figure 7 As shown. The curvature of the average value Avg obtained from multiple tests on standard sample A is shown in the figure. Figure 8 As shown, the curvature of the standard deviation σ of the test sample A is as follows: Figure 9 As shown, according to Figure 8 It can be seen that the average value Avg from multiple tests is between the lower limit LCL (315nm) and the upper limit HCL (325nm) of the test requirements; according to Figure 9 It can be seen that the standard deviation σ of multiple tests is less than 3 nm, which meets the equipment testing specification requirement of ±5 nm.

[0066] The curvature of the average value Avg after multiple tests on standard sample B is as follows: Figure 10 As shown, the curvature of the standard deviation σ of the test sample B is as follows: Figure 11 As shown, according to Figure 10 It can be seen that the average Avg from multiple tests is consistently between the lower limit LCL (40.9nm) and the upper limit HCL (50.9nm) of the test requirements; according to Figure 11 It can be seen that the standard deviation σ of multiple tests is less than 3 nm, which meets the equipment testing specification requirement of ±5 nm.

[0067] In addition, a sample with an aspect ratio of 8.6µm / 10µm was selected, and deep hole testing was performed using this probe. The test results are as follows. Figure 12 As shown. According to Figure 12It can be seen that this probe can normally detect the bottom of deep holes, which meets the requirements for deep hole testing.

[0068] Based on the above, by improving the connection structure between the probe tip and the probe shaft, and by improving the shape of the probe tip, the wear resistance of the probe tip can be increased, thus solving the problem of easy wear of the probe tip. In addition, it can also solve the problems of high processing difficulty and high processing cost of probes in the prior art. Moreover, the probe using this embodiment structure meets the accuracy, stability, and deep hole testing requirements of step meter testing.

[0069] One embodiment of this application also provides a step meter, which includes a probe with the structure described above.

[0070] Combination Figure 2 Those skilled in the art should be able to understand the specific implementation structure of the stepper using the probe with this implementation structure, which will not be described in detail here.

[0071] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

[0072] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A probe comprising a needle shaft and a needle head; characterized in that: the needle head is conical, comprising a needle tip and a connecting end away from the needle tip; wherein, on a first cross section of the needle head, the needle tip is an included angle between 59 degrees and 61 degrees; wherein, a central axis of the needle head is located on the first cross section; the needle shaft comprises a first diameter part, the connecting end of the needle head is connected with a first end of the first diameter part, and an end surface size of the connecting end is the same as an end surface size of the first end.

2. The probe of claim 1, wherein the first diameter part is made of stainless steel material, and / or the needle head is made of diamond material.

3. The probe of claim 1, wherein the connecting end of the needle head and the first end of the first diameter part are connected by welding.

4. The probe according to any one of claims 1 to 3, characterized in that the needle shaft further comprises: a second diameter part connected with a second end of the first diameter part, the second end being an end away from the first end; a third diameter part connected with an end of the second diameter part away from the first diameter part; wherein, the first diameter part, the second diameter part and the third diameter part are coaxially arranged, and a diameter of the second diameter part is greater than diameters of the first diameter part and the third diameter part.

5. The probe of claim 4, wherein a diameter of the third diameter part is less than or equal to a diameter of the first diameter part.

6. The probe of claim 4, wherein the first diameter part, the second diameter part and the third diameter part are integrally made.

7. The probe of claim 4, wherein the first diameter part, the second diameter part and the third diameter part are all made of 303 stainless steel material.

8. The probe of claim 1, wherein on the first cross section of the needle head, the needle tip is an included angle of 60 degrees.

9. A step meter, characterized in that a probe according to any one of claims 1 to 8.

Images