Packaging equipment for gallium nitride semiconductor processing

Abstract

The invention belongs to the technical field of special equipment for semiconductor devices, and particularly relates to packaging equipment for gallium nitride semiconductor processing. Comprising a machine case, a mounting seat is fixedly connected to the machine case, transfer frames which are symmetrically distributed are arranged on the mounting seat, an upper pressing piece is installed on the machine case, a plurality of pairs of positioning blocks which are distributed in an array mode are connected to the transfer frames in a sliding mode, the positioning blocks are rotationally connected with first clamping pieces, and the positioning blocks are fixedly connected with second clamping pieces. The first clamping piece and the adjacent second clamping piece jointly clamp and fix materials. All the first clamping pieces and the adjacent second clamping pieces clamp the materials together, an existing material clamping mode is changed, so that mechanical damage or position deviation caused by an improper clamping mode to the materials in the material packaging process is reduced, the stability of the materials is guaranteed, meanwhile, manual operation steps are reduced, and the production efficiency is improved. And the risk of accidents is reduced, so that the material packaging effect is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device equipment technology, and more particularly to a packaging device for gallium nitride semiconductor processing. Background Technology

[0002] Gallium nitride (GaN), as a high-performance third-generation semiconductor material, is widely used in the manufacture of high-end electronic devices requiring high voltage, high frequency, and high temperature. In the packaging process of GaN devices, the lead frame not only carries the chip but also plays a crucial role in circuit connection. Its positioning accuracy and fixation reliability during loading and transport directly affect the performance and yield of the final product. Currently, the industry commonly uses a loading tray structure composed of a top cover and a bottom plate to achieve stable fixation of the lead frame. The specific operation process is as follows: first, the lead frame is neatly arranged on the bottom plate, then the top cover is placed on top, and the two are tightly fixed using clips or locking mechanisms. This ensures tight clamping of the lead frame during handling and waiting for materials, effectively preventing displacement or scattering.

[0003] However, this traditional loading tray structure has significant limitations in actual packaging operations. After the loading tray is transported to the packaging machine (such as a molding press), the top cover must be removed to expose the lead frame for molding. This removal operation not only increases the workload of operators and introduces unnecessary non-productive time, leading to a decrease in overall equipment efficiency, but more seriously, it inherently constitutes a critical quality risk point: during removal, the top cover is highly susceptible to scratching or colliding with the lead frame, causing the frame to shift or become damaged. This disturbance directly leads to misalignment of the lead frame in subsequent packaging, resulting in packaging failure, product scrap, and a series of other quality problems. Summary of the Invention

[0004] In order to overcome the shortcomings mentioned in the background art, the present invention provides a packaging device for gallium nitride semiconductor processing.

[0005] The technical solution of the present invention is: a packaging device for gallium nitride semiconductor processing, comprising a chassis, a mounting base fixedly connected to the chassis, a symmetrically distributed transfer frame provided on the mounting base, the symmetrically distributed transfer frames being hinged to each other, an upper pressure member mounted on the chassis, a plurality of arrayed pairs of positioning blocks slidably connected to the transfer frames, a first clamping member rotatably connected to the positioning blocks, a second clamping member fixedly connected to the positioning blocks, the first clamping member and the adjacent second clamping member jointly clamping and fixing the material, and a driving mechanism provided on the transfer frames, the driving mechanism being used to drive all the first clamping members on the adjacent transfer frames to rotate.

[0006] Furthermore, a first elastic element is provided between each side of the positioning block and the adjacent transfer frame.

[0007] Furthermore, both the first clamp and the second clamp are provided with flexible pads.

[0008] Furthermore, the driving mechanism includes a first grip rod, which is fixed to the side wall of the transfer frame. The transfer frame is rotatably connected to a second grip rod, and a second elastic element is provided between the two. A transmission plate is slidably connected inside the transfer frame. The second grip rod is slidably connected to the transmission plate and is used to drive the transmission plate to slide. The transfer frame is rotatably connected to symmetrically distributed driving rods. The positioning block is rotatably connected to the adjacent driving rod. The driving rod is splinedly connected to the adjacent first clamping member. The transmission plate is used to drive the symmetrically distributed driving rods to rotate.

[0009] Furthermore, positioning rods are fixed to both sides of the transmission plate, and a guide groove is provided on the side of the drive rod near the adjacent transmission plate. The positioning rod on the transmission plate slides within the guide groove of the adjacent drive rod.

[0010] Furthermore, a connecting rod is slidably connected inside the transfer frame, and the connecting rod is slidably connected to the second gripping rod. A first rack frame is fixed to both sides of the connecting rod. Several pairs of second rack frames are slidably connected inside the transfer frame. The second rack frames and the first rack frames are used together to clamp and fix the adjacent positioning blocks. The second rack frames are connected to the adjacent first rack frames through spur gears.

[0011] Furthermore, a swing rod is rotatably connected to the second grip, and a third elastic element is provided between the two. A first telescopic push rod is fixedly connected inside the transfer frame, and a limit block is fixedly connected to the telescopic end of the first telescopic push rod. The limit block is used to limit the first telescopic push rod.

[0012] Furthermore, the mounting base is fixed with symmetrically distributed fixing blocks, and the mounting base is slidably connected with symmetrically distributed extrusion plates. The extrusion plates correspond one-to-one with the fixing blocks, and a fourth elastic element is provided between the fixing blocks and the adjacent extrusion plates. The transfer frame is fixed with a second telescopic push rod, and the fixing part of the second telescopic push rod is connected to the fixing part of the corresponding first telescopic push rod. The extrusion plate near the adjacent grip rod is used to extrude the telescopic end of the corresponding second telescopic push rod.

[0013] Furthermore, the transfer frame is rotatably connected to support rods, all of which are centrally symmetrically distributed. The centrally symmetrically distributed support rods are slidably connected to a positioning shell. Each support rod is fixedly connected to a rack. The positioning shell is driven by two racks via spur gears. The support shell is slidably connected to the mounting base, and a fifth elastic element is provided between the two. An elastic limiting element is slidably connected inside the support shell, and the mounting base limits the support shell through the elastic limiting element.

[0014] Furthermore, the positioning shell is provided with symmetrically distributed inclined surfaces, and the support shell is provided with a trapezoidal groove, which is used to guide the positioning shell.

[0015] Compared with existing packaging equipment, the present invention has the following beneficial effects: all the first clamps and the adjacent second clamps of the present invention jointly clamp the material, changing the existing way of clamping the material, thereby reducing mechanical damage or positional displacement of the material caused by improper clamping during the material packaging process, ensuring the stability of the material, reducing manual operation steps, reducing the risk of accidents, and thus improving the material packaging effect.

[0016] This invention achieves material clamping by pressing the two gripping rods, reducing the difficulty of operation, ensuring stability during material packaging, and improving packaging quality.

[0017] The present invention clamps and fixes adjacent positioning blocks by a first rack and a second rack, so that the positioning blocks remain stable during movement, thereby reducing the probability of displacement during material transfer and ensuring the quality of material packaging.

[0018] This invention ensures the stability of the second gripping rod during movement by limiting the mutual movement between the swing rod and the limiting block, thereby guaranteeing the clamping force of the first clamping member on the material and the positioning effect of the first rack and second rack on the adjacent positioning blocks, preventing the material from shifting during movement, and thus improving the quality of material packaging. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a three-dimensional structural diagram of the mounting base and transfer frame of the present invention; Figure 3 This is a three-dimensional structural diagram of grip bar one and grip bar two of the present invention; Figure 4 This is a three-dimensional structural diagram of the extrusion plate and positioning shell of the present invention; Figure 5 This is a three-dimensional structural diagram of the transmission plate and drive rod of the present invention; Figure 6 This is a three-dimensional structural diagram of the connecting rod and the first rack frame of the present invention; Figure 7 This is a three-dimensional structural diagram of the first and second clamps of the present invention; Figure 8 This is a three-dimensional structural diagram of the swing rod and the first telescopic push rod of the present invention; Figure 9 For the present invention Figure 5 Enlarged view of the 3D structure at point A; Figure 10 For the present invention Figure 6 Enlarged view of the 3D structure at point B; Figure 11 This is a three-dimensional structural diagram of the first telescopic push rod and the limiting block of the present invention; Figure 12 For the present invention Figure 3 Enlarged view of the 3D structure at point C; Figure 13 This is a three-dimensional structural diagram of the support shell and elastic limiting member of the present invention.

[0020] In the attached diagram, the following labels are used: 1-chassis, 2-mounting base, 3-transfer frame, 4-upper pressure piece, 5-positioning block, 6-first clamping piece, 7-second clamping piece, 21-grip one, 22-grip two, 23-transmission plate, 24-drive rod, 41-connecting rod, 42-first rack frame, 43-second rack frame, 51-swing rod, 52-first telescopic push rod, 53-limiting block, 61-fixing block, 62-pressing plate, 63-second telescopic push rod, 71-support rod, 72-positioning shell, 73-straight rack, 74-support shell, 75-elastic limiting piece. Detailed Implementation

[0021] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0022] Example 1 Once the loading tray arrives at the packaging station, the top cover must be removed before molding can begin. This introduces a primary quality risk: the top cover is highly susceptible to scratching the lead frame, causing it to shift. Therefore, the top cover removal operation is not only cumbersome and inefficient, increasing labor and time costs, but the resulting damage to the lead frame and misalignment are also fatal hazards leading to packaging failures, severely restricting production yield and efficiency.

[0023] A packaging device for gallium nitride semiconductor processing, such as Figures 1-7As shown, the device includes a chassis 1, a mounting base 2 fixedly connected to the chassis 1, and symmetrically distributed transfer frames 3 on the mounting base 2. The two transfer frames 3 are existing feeding tray structures, hinged together. Each transfer frame 3 has four arrayed receiving slots. An upper pressing component 4 is mounted on the chassis 1; this upper pressing component 4 is an existing packaging pressing module, the internal structure of which will not be described in detail. The upper pressing component 4 is used to press the material to achieve packaging. Four pairs of positioning blocks 5 are slidably connected to the transfer frames 3 in a linear array, each pair of positioning blocks 5 corresponding one-to-one with a receiving slot on the transfer frame 3. Each positioning block 5 is rotatably connected to a first clamp. The positioning block 5 is fixedly connected to a second clamping member 7. The first clamping member 6 is located above the adjacent second clamping member 7. Both the first clamping member 6 and the second clamping member 7 are provided with flexible pads. The flexible pads are used to reduce the hard extrusion force on the material. The first clamping member 6 and the adjacent second clamping member 7 work together to clamp and fix the material. The transfer frame 3 is provided with a driving mechanism, which is used to drive all the first clamping members 6 on the adjacent transfer frame 3 to rotate. The front and rear sides of the positioning block 5 are provided with a first elastic element, which is a spring, between it and the adjacent transfer frame 3. The first elastic element is used to buffer the vibration of the positioning block 5 and ensure the stability of the material.

[0024] like Figures 2-11 As shown, the drive mechanism includes a first grip rod 21, which is fixed to the front side of the transfer frame 3. A second grip rod 22 is rotatably connected to the front side of the transfer frame 3, and a second elastic element, which is a tension spring, is provided between the two to drive the adjacent second grip rod 22 to return to its original position. A transmission plate 23 is slidably connected inside the transfer frame 3. A straight sliding groove is provided on the lower side of the transmission plate 23. The upper side of the rear part of the second grip rod 22 is a protrusion. The protrusion on the upper side of the second grip rod 22 slides within the straight sliding groove of the transmission plate 23, and the second grip rod 22 is used to drive the transmission plate 23 to slide. The transfer frame 3 is rotatably connected to symmetrically distributed drive rods 24. The positioning block 5 is rotatably connected to the adjacent drive rod 24. The drive rod 24 is splinedly connected to the adjacent first clamp 6. The transmission plate 23 is used to drive the symmetrically distributed drive rods 24 to rotate. Positioning rods are fixed to both sides of the transmission plate 23. A guide groove is provided on the front side of the drive rod 24. The guide groove is spiral. When the positioning rod on the transmission plate 23 moves back and forth, the positioning rod slides in the guide groove of the adjacent drive rod 24, thus causing the drive rod 24 to rotate.

[0025] like Figures 6-8 , Figure 10 and Figure 11As shown, a connecting rod 41 is slidably connected inside the transfer frame 3. The connecting rod 41 is located below the transmission plate 23. A straight sliding groove is provided on the upper side of the connecting rod 41, and the lower side of the grip rod 22 is set as a convex column. The convex column on the lower side of the grip rod 22 slides in the straight sliding groove on the connecting rod 41. A first rack frame 42 is fixedly connected to both the left and right sides of the connecting rod 41. The first rack frame 42 has four rack parts distributed in an array. The first rack frame 42 has four support rods distributed in an array. Four pairs of second rack frames 43 are slidably connected inside the transfer frame 3. The support rods on the first rack frame 42 and the adjacent second rack frames 43 are located on the front and rear sides of the adjacent positioning block 5, respectively. The second rack frames 43 and the support rods on the first rack frames 42 are used together to clamp and fix the adjacent positioning block 5. Four pairs of spur gears are rotatably connected inside the transfer frame 3. The second rack frames 43 are connected to the adjacent first rack frames 42 through the spur gears.

[0026] like Figure 6 , Figure 8 and Figure 11 As shown, a swing rod 51 is rotatably connected to the grip 22, and a third elastic element, which is a spring, is provided between the two. The swing rod 51 is hook-shaped and has an inclined surface. A first telescopic push rod 52 is fixedly connected inside the transfer frame 3. The first telescopic push rod 52 is an existing elastic telescopic rod with a spring inside. A limit block 53 is fixedly connected to the telescopic end of the first telescopic push rod 52. The limit block 53 is hook-shaped and also has an inclined surface. The limit block 53 is used to limit the first telescopic push rod 52.

[0027] like Figure 6 , Figure 8 , Figure 9 and Figure 11 As shown, a rectangular array of fixing blocks 61 are fixedly connected to the mounting base 2. A rectangular array of extrusion plates 62 are slidably connected to the mounting base 2. An inclined surface is provided on the upper side of the extrusion plates 62. The extrusion plates 62 correspond one-to-one with the fixing blocks 61. A fourth elastic element, which is a spring, is provided between the fixing blocks 61 and the adjacent extrusion plates 62. All the extrusion plates 62 are used to position the two transfer frames 3. The transfer frames 3 are fixedly connected to a second telescopic push rod 63. The fixing part of the second telescopic push rod 63 is connected to the fixing part of the corresponding first telescopic push rod 52. Both fixing parts are filled with hydraulic oil. The front extrusion plate 62 is used to extrude the telescopic end of the corresponding second telescopic push rod 63.

[0028] The working principle of this embodiment: When this device is needed to package materials, the materials to be packaged are first placed into the receiving slots of the transfer frame 3, so that the materials are located on the two corresponding second clamps 7. Then, the operator places both hands on the corresponding grip rod 1 21 and holds the adjacent grip rod 22. Taking the transfer frame 3 on the left and its parts as an example, the grip rod 22 rotates clockwise relative to the transfer frame 3. The grip rod 22 stretches the adjacent second elastic element. The protrusion on the upper side of the grip rod 22 moves along the straight slide groove on the transmission plate 23 and squeezes the transmission plate 23, causing the transmission plate 23 to slide forward. The transmission plate 23 drives the protrusion on it. As the transmission plate 23 moves, the two positioning rods on it press against the guide grooves on the two drive rods 24, causing the two drive rods 24 to rotate relative to each other. At this time, the drive rods 24 drive all the first clamping parts 6 on them to rotate. The first clamping parts 6 rotate relative to the adjacent positioning blocks 5. The two rows of first clamping parts 6 on the left transfer frame 3 rotate relative to each other. During the rotation of the first clamping parts 6, the first clamping parts 6 gradually rotate from a vertical state to a horizontal state, so that the flexible pads on the first clamping parts 6 come into contact with the material. At this time, the first clamping parts 6 and the adjacent second clamping parts 7 together clamp the left and right sides of the material, replacing the existing top cover plate to fix the material.

[0029] During the rotation of grip 22, grip 22 drives swing rod 51 to rotate. Swing rod 51 gradually contacts the adjacent limiting block 53. After the inclined surfaces of the two contacts, as swing rod 51 moves, swing rod 51 squeezes the limiting block 53. Swing rod 51 rotates relative to grip 22 and squeezes the adjacent third elastic element, causing the two to slide against each other along their inclined surfaces. After grip 22 stops rotating, swing rod 51 loses contact with the inclined surface of limiting block 53, and the third elastic element on swing rod 51 rotates in the opposite direction. Swing rod 51 and limiting block 53 limit each other. In this way, the limiting block 53 limits swing rod 51, thereby limiting grip 22, preventing grip 22 from rotating in the opposite direction and avoiding all first clamping parts 6 from rotating in the opposite direction and losing their grip on the material.

[0030] During the rotation of the grip rod 22, the protrusion on the lower side of the grip rod 22 slides along the straight groove on the connecting rod 41. At the same time, the grip rod 22 squeezes the connecting rod 41, causing the connecting rod 41 to move forward. The connecting rod 41 drives the first rack frame 42 on it to slide forward. The rack part on the first rack frame 42 drives the adjacent second rack frame 43 to move through the adjacent spur gear on the transfer frame 3. That is, the support rod on the first rack frame 42 and the adjacent second rack frame 43 move in opposite directions, thereby fixing the adjacent positioning block 5 and preventing all positioning blocks 5 from shaking and causing material displacement during the transfer of the two transfer frames 3.

[0031] After all the first clamps 6 clamp and fix the adjacent materials, the operator places the two transfer frames 3 on the mounting base 2 using two grips 1 21 and two grips 22. During placement, the transfer frames 3 drive the second telescopic push rods 63 on them to move downward. After the telescopic end of the second telescopic push rod 63 contacts the extrusion plate 62, as the second telescopic push rod 63 moves downward, the extrusion plate 62 on the front side extrudes the telescopic ends of the adjacent second telescopic push rods 63, causing the telescopic ends of the two second telescopic push rods 63 to retract. The hydraulic oil in the fixing part of the second telescopic push rod 63 is squeezed into the fixing part of the corresponding first telescopic push rod 52, and the telescopic end of the first telescopic push rod 52 begins to retract. The telescopic end of the first telescopic push rod 52 drives the adjacent limit block 53 to move, causing the limit block 53 to lose contact with the adjacent swing rod 51, thereby releasing the limit block 53 from locking the adjacent swing rod 51. After that, the operator releases the pressure on the two grips 22.

[0032] After the pressure on the two gripping rods 22 is released, the two gripping rods 22 rotate in the opposite direction to reset under the action of the adjacent second elastic elements. The two gripping rods 22 press the adjacent transmission plates 23 respectively, causing the drive rod 24 to rotate in the opposite direction, thereby causing all the first clamping pieces 6 to rotate in the opposite direction and lose their grip on the material. At the same time, the gripping rods 22 press the adjacent connecting rod 41, causing the connecting rod 41 to drive the two first rack frames 42 on it to move in the opposite direction. The first rack frame 42 drives the adjacent second rack frame 43 to move through the spur gear, thereby causing the second rack frame 43 and the first rack frame 42 to lose their fixation on the adjacent positioning block 5.

[0033] After the telescopic end of the second telescopic push rod 63 is fully pushed back, the telescopic end of the second telescopic push rod 63 is flush with the side of the adjacent transfer frame 3. As the transfer frame 3 continues to move downward, the telescopic end of the second telescopic push rod 63 and the transfer frame 3 squeeze the adjacent extrusion plate 62. The extrusion plate 62 compresses the adjacent fourth elastic element. At this time, the extrusion plates 62 on both sides jointly center all the transfer frames 3, so that all the materials are aligned with the upper pressure member 4. After both transfer frames 3 are in contact with the mounting base 2, the movement of the transfer frames 3 is stopped, the operator releases the grip rod 21 with both hands, and then opens the upper pressure member 4 to squeeze and seal the materials.

[0034] After the first clamp 6 releases its grip on the material, during the downward movement of the transfer frame 3 and the upper pressure member 4, the positioning block 5 is positioned by the first elastic members on its front and rear sides. The first elastic members buffer the vibration generated during the operation of the device and the movement of the transfer frame 3, ensuring the stability of the positioning block 5, thereby reducing the probability of material movement and ensuring the accuracy of its position when the material is packaged.

[0035] After the material is packaged, the operator holds the two levers 21 and removes the transfer rack 3 from the mounting base 2. Then, the packaged material is taken out and the next work cycle begins: new materials to be packaged are placed on each of the second clamps 7 in sequence, and the aforementioned clamping, transfer and packaging steps are repeated.

[0036] Example 2 Based on Example 1, such as Figures 3-6 , Figure 12 and Figure 13 As shown, a support rod 71 is rotatably connected to the front of the transfer frame 3. All the support rods 71 ​​are centrally symmetrically distributed. Two centrally symmetrically distributed support rods 71 ​​are slidably connected to a positioning shell 72. The positioning shell 72 is provided with symmetrically distributed inclined surfaces. A trapezoidal groove is provided on the mounting base 2. A spur rack 73 is fixedly connected to the support rod 71. A spur gear is rotatably connected inside the positioning shell 72. The positioning shell 72 is connected to the two spur racks 73 through the spur gear inside. A support shell 74 is slidably connected to the mounting base 2, and a fifth elastic element, which is a spring, is provided between the two to drive the support shell 74 to move upward and reset. An elastic limiting element 75 is slidably connected inside the support shell 74. The mounting base 2 limits the support shell 74 through the elastic limiting element 75. Two limiting holes (e.g., near the support shell 74) are provided inside the mounting base 2. Figure 12 As shown), when the elastic limiting member 75 is inserted into the upper limiting hole, the state of the support shell 74 is as follows. Figure 12 As shown, when the elastic limiting member 75 is inserted into the lower limiting hole, both transfer frames 3 are in contact with the mounting base 2, and the fifth elastic member of the support shell 74 is in a compressed state.

[0037] The working principle of this embodiment: Before transferring the two transfer frames 3 to the mounting base 2, fold them in half to form an angle. Then, hold the two grips 1 21 and press the two grips 22 to move the transfer frame 3. The transfer frame 3 drives the support rod 71 on it to move the positioning shell 72. The operator inserts the positioning shell 72 into the trapezoidal groove of the support shell 74. As the positioning shell 72 moves downward, the trapezoidal groove of the support shell 74 squeezes the positioning shell 72, causing the positioning shell 72 to move towards the middle of the support shell 74. The positioning shell 72 drives the spur gear on it to move synchronously. The spur gear on the positioning shell 72 drives the spur racks 73 on its upper and lower sides to move synchronously, so that the two spur racks 73 drive the adjacent support rods 71 ​​to move, thereby adjusting the position of the two transfer frames 3 so that the hinge axis between the two transfer frames 3 is located in the middle of the mounting base 2. During this process, the support shell 74 cannot move downward under the action of its fifth elastic element.

[0038] After the two transfer frames 3 are adjusted to be centered, the positioning shell 72 is fully inserted into the trapezoidal groove of the support shell 74, meaning that the support shell 74 and the positioning shell 72 cannot move relative to each other. The operator rotates the two transfer frames 3 so that they are in the same plane. After the two transfer frames 3 are rotated to a horizontal position, the operator continues to move the two transfer frames 3 downwards. The two transfer frames 3 together move the positioning shell 72 downwards, pressing the support shell 74 downwards. The support shell 74 then moves the elastic limiting member 75 on it downwards, causing the elastic limiting member 75 to disengage from the upper limiting hole of the mounting base 2. The mounting base 2 presses the elastic limiting member 75 into the support shell 74. During this process, the support shell 74 presses the fifth elastic member until all the second telescopic push rods 63 are extended. After the constricted end contacts the adjacent extrusion plates 62, the operation steps of Embodiment 1 are repeated to release the clamping of the material and perform the sealing operation. As the transfer frame 3 continues to move downward, when the elastic limiting member 75 aligns with the lower limiting hole of the mounting base 2, the elastic limiting member 75 inserts into the lower limiting hole and limits the support shell 74. At this time, both transfer frames 3 are in a horizontal state and are in contact with the mounting base 2. Under the action of the elastic limiting member 75, the support shell 74 cannot move upward. After the material is sealed, the operator lifts the support shell 74 upward with a hook, so that the elastic limiting member 75 loses contact with the lower limiting hole. At the same time, the support shell 74 moves upward under the action of the fifth elastic member, so that the elastic limiting member 75 re-enters the upper limiting hole. The above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the protection scope of the present invention.

Claims

1. An encapsulation apparatus for gallium nitride semiconductor processing, characterized by: The utility model provides an organic box (1), the box (1) is fixedly connected with the mounting seat (2), the mounting seat (2) is provided with the symmetrically distributed transfer frame (3), the symmetrically distributed transfer frame (3) is hinged to each other, the box (1) is installed with upper pressure spare (4), the transfer frame (3) is slidably connected with array distribution's several pairs of positioning block (5), the positioning block (5) is rotatably connected with first clamping piece (6), the positioning block (5) is fixedly connected with second clamping piece (7), the first clamping piece (6) and adjacent second clamping piece (7) are commonly used for clamping and fixing material, the transfer frame (3) is provided with drive mechanism, and the drive mechanism is used to drive all first clamping piece (6) on adjacent transfer frame (3) rotates.

2. The packaging apparatus for gallium nitride semiconductor processing according to claim 1, wherein: The two sides of the positioning block (5) are provided with first elastic members between the adjacent transfer frames (3).

3. The packaging apparatus for gallium nitride semiconductor processing according to claim 1, wherein: The first clamping piece (6) and the second clamping piece (7) are provided with flexible pads.

4. The packaging apparatus for gallium nitride semiconductor processing according to claim 1, wherein: The drive mechanism comprises a first handle (21), the first handle (21) is fixedly connected to the side wall of the transfer frame (3), the transfer frame (3) is rotatably connected with a second handle (22), and a second elastic member is arranged between the first handle (21) and the second handle (22), the transfer frame (3) is slidably connected with a transmission plate (23), the second handle (22) is slidably connected with the transmission plate (23), and the second handle (22) is used to drive the transmission plate (23) to slide, the transfer frame (3) is rotatably connected with symmetrically distributed drive rods (24), the positioning block (5) is rotatably connected with adjacent drive rods (24), the drive rods (24) are spline-connected with adjacent first clamping pieces (6), and the transmission plate (23) is used to drive the symmetrically distributed drive rods (24) to rotate.

5. The packaging apparatus for gallium nitride semiconductor processing according to claim 4, wherein: The two sides of the transmission plate (23) are fixedly connected with positioning rods, one side of the drive rod (24) close to the adjacent transmission plate (23) is provided with a guide groove, and the positioning rod on the transmission plate (23) slides in the guide groove of the adjacent drive rod (24).

6. The packaging apparatus for gallium nitride semiconductor processing according to claim 4, wherein: The transfer frame (3) is slidably connected with a connecting rod (41), the connecting rod (41) is slidably connected with the second handle (22), the two sides of the connecting rod (41) are fixedly connected with first rack frames (42), the transfer frame (3) is slidably connected with array distribution's several pairs of second rack frames (43), the second rack frames (43) and the first rack frames (42) are used to clamp and fix adjacent positioning blocks (5) together, and the second rack frames (43) are drivingly connected with adjacent first rack frames (42) through spur gears.

7. The packaging apparatus for gallium nitride semiconductor processing according to claim 4, wherein: The second handle (22) is rotatably connected with an oscillating rod (51), and a third elastic member is arranged between the second handle (22) and the oscillating rod (51), the transfer frame (3) is fixedly connected with a first telescopic push rod (52), one end of the first telescopic push rod (52) is fixedly connected with a limiting block (53), and the limiting block (53) is used to limit the first telescopic push rod (52).

8. The packaging apparatus for gallium nitride semiconductor processing according to claim 7, wherein: The mounting base (2) is fixedly connected with symmetrically distributed fixing blocks (61), the mounting base (2) is slidably connected with symmetrically distributed extrusion plates (62), the extrusion plates (62) correspond to the fixing blocks (61) one by one, fourth elastic members are arranged between the fixing blocks (61) and the adjacent extrusion plates (62), the transfer frame (3) is fixedly connected with a second telescopic push rod (63), the fixed part of the second telescopic push rod (63) is in communication with the fixed part of the first telescopic push rod (52), and the extrusion plate (62) close to the adjacent holding rod (21) is used for extruding the telescopic end of the corresponding second telescopic push rod (63).

9. The packaging apparatus for gallium nitride semiconductor processing according to claim 1, wherein: The transfer frame (3) is rotatably connected with support rods (71), all the support rods (71) are centrally and symmetrically distributed, the centrally and symmetrically distributed support rods (71) are commonly slidably connected with a positioning shell (72), the support rods (71) are fixedly connected with straight racks (73), the positioning shell (72) is in transmission connection with the two straight racks (73) through a straight gear, the mounting base (2) is slidably connected with a support shell (74), and a fifth elastic member is arranged between the mounting base (2) and the support shell (74), the support shell (74) is slidably connected with an elastic limiting member (75) in the mounting base (2), and the mounting base (2) limits the support shell (74) through the elastic limiting member (75).

10. The packaging apparatus for gallium nitride semiconductor processing according to claim 9, wherein: The positioning shell (72) is provided with symmetrically distributed inclined surfaces, and the support shell (74) is provided with a trapezoidal groove for guiding the positioning shell (72).

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