Preparation method and application of heating wire

Abstract

The invention relates to the technical field of heating wire preparation, in particular to a preparation method and application of a heating wire, and the preparation method at least comprises the following steps: carrying out laser cutting, slag removal treatment and heat treatment on a tungsten sheet or a tantalum sheet to obtain a finished heating wire. According to the preparation method of the heating wire, a tungsten sheet or a tantalum sheet is precisely cut and machined through high-power laser to prepare the heating wire, a traditional wire winding process is replaced, and the machining precision of the heating wire is guaranteed; compared with a low-speed wire feeding electric spark machining process, laser machining is more flexible, small-amount and multi-piece customized production is facilitated, the production efficiency is high, the production cost is greatly reduced compared with the low-speed wire feeding process, and the problems of defects and residual machining stress in the prior art are solved.

Description

Technical Field

[0001] This invention relates to the field of heating wire preparation technology, specifically to a method for preparing a heating wire and its application. Background Technology

[0002] Resistance heating evaporation sources are commonly used in evaporation coating or molecular epitaxy heating systems. These sources utilize the resistance heat generated when an electric current is applied to the heating element to achieve high temperatures, thereby melting the film material and causing it to evaporate. The heating material is typically a refractory metal tungsten or tantalum wire, shaped appropriately for use in the evaporation source.

[0003] The most common heating wires are tantalum or tungsten wires manufactured using a winding process. For example, Chinese utility model patent CN214612731U provides a tungsten heating wire for vacuum coating. However, traditional winding processes suffer from drawbacks such as complex operation, poor precision control, and small deposition area. The wires are also prone to deformation at high temperatures, affecting thermal stability and even causing short circuits, thus impacting equipment stability and lifespan. Existing flat heating wire designs have significantly improved upon the defects of winding processes. Electrical discharge machining (EDM) is widely used in the market, offering much higher precision than winding. However, the high cost of EDM keeps the price of heating wires high. Therefore, a new heating wire manufacturing method is urgently needed to improve processing precision, eliminate processing defects, and ultimately enhance the performance of the heating wire. Summary of the Invention

[0004] To address the problems in the prior art, the first aspect of the present invention provides a method for preparing a heating wire, comprising at least the following steps: laser cutting a pure tungsten sheet or a pure tantalum sheet, removing slag, and heat treating it to obtain a finished heating wire.

[0005] In one embodiment, the thickness T of the pure tungsten sheet or pure tantalum sheet is 0.1-3 mm.

[0006] In one embodiment, the laser cutting uses a green laser or an infrared fiber laser to cut pure tungsten or pure tantalum sheets.

[0007] In one embodiment, when the thickness of the pure tungsten sheet or pure tantalum sheet is 0.1 mm ≤ T < 0.5 mm, a green laser is used for cutting.

[0008] In one embodiment, the parameters of the green laser are: the frequency of the green optical fiber is 60000-90000Hz, the power is 20-50W, and the cutting speed is 120-250mm / s.

[0009] In one embodiment, when the thickness of the pure tungsten sheet or pure tantalum sheet is 0.5mm≤T<1mm, the parameters of the infrared fiber laser are: infrared fiber frequency 450-650Hz, power 50-150W, and cutting speed 5-12mm / s.

[0010] In one embodiment, when the thickness of the tungsten or tantalum sheet is 1mm≤T<3mm, the parameters of the infrared fiber laser are: infrared fiber frequency 800-3000Hz, power 150-3000W, and cutting speed 5-12mm / s.

[0011] In one embodiment, the slag removal step uses different surface treatment processes to remove the slag based on the size of the slag generated by laser cutting.

[0012] In one embodiment, the surface treatment process includes any one of ultrasonic treatment, polishing, grinding, and sandblasting.

[0013] In one embodiment, when the slag size is less than 0.03 mm, ultrasonic and polishing equipment is used to treat the slag; when the slag size is between 0.03 and 0.05 mm, grinding is used to treat the slag; and when the slag size is greater than 0.05 mm, sandblasting is used to treat the slag.

[0014] In one embodiment, the ultrasound conditions are 10 minutes of ultrasound at a power of 2000W.

[0015] The heating wire structure of this invention is S-shaped spring-like. After processing and surface treatment, it has problems such as deformation and warping, so the heating wire needs to be heat-treated to correct its shape.

[0016] In one embodiment, the heating wire blank obtained after slag removal is placed in a straightening fixture and heat-treated under a protective atmosphere or vacuum.

[0017] In one embodiment, the heat treatment temperature is 300-1100℃, and the holding time is 1-5h.

[0018] The second aspect of the present invention provides a method for preparing a heating wire and its application in preparing a heating wire for an evaporation source heating device.

[0019] Beneficial effects 1. This invention provides a method for preparing heating wire for a vapor deposition source heating device. The heating wire is made by precision cutting tungsten or tantalum sheets using a high-power laser, replacing the traditional wire winding process. This method effectively ensures the processing accuracy of the heating wire and avoids the impact of plastic deformation caused by wire winding on the uniformity of its temperature field, thereby affecting its service life. Compared with slow wire EDM, laser processing is more flexible and can achieve customized production of multiple varieties in small quantities without complex tooling. It has high production efficiency and significantly reduces production costs compared with traditional processes.

[0020] 2. The slag and burrs generated after laser cutting in this invention are removed by ultrasonic treatment, polishing, grinding, sandblasting and other technologies to ensure the straightness and smoothness of the processed edges.

[0021] 3. After removing the slag, the present invention uses a heat treatment process to remove the processing stress and performs heat straightening, which further improves the forming accuracy of the heating wire.

[0022] 4. The heating wire preparation method provided by the present invention solves the problems of low processing accuracy, product defects due to process influence, large residual internal stress, and high processing cost in the prior art. Attached Figure Description

[0023] Figure 1 The finished heating wire prepared according to the present invention. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Experimental methods not specifying specific conditions in the embodiments were performed under conventional conditions or conditions recommended by the manufacturer. Reagents or instruments whose manufacturers are not specified are all commercially available conventional products.

[0025] Example 1 The first aspect of this example provides a method for preparing a heating wire, including the following steps: laser cutting a tantalum sheet, removing slag, and heat treating it to obtain a finished tantalum heating wire that meets the requirements for temperature field uniformity and stability at high temperatures.

[0026] The thickness T of the tantalum sheet is 0.4 mm.

[0027] The laser cutting uses a green laser; the parameters of the green laser are: the frequency of the green fiber is 70000Hz, the power is 40W, and the cutting speed is 200mm / s.

[0028] The slag produced by the laser cutting has a size of 0.02 mm, and an ultrasonic device is used for slag post-treatment; the ultrasonic conditions are: time 10 min, power 2000 W.

[0029] The heat treatment step involves placing the heating wire blank obtained after slag post-treatment in a straightening fixture and performing heat treatment under a protective atmosphere.

[0030] The heat treatment temperature is 800℃, and the holding time is 3 hours.

[0031] The second aspect of this example provides a method for preparing a heating wire and its application in preparing heating wires for evaporation plating or molecular epitaxial evaporation sources.

[0032] Figure 1 The finished heating wire prepared according to the present invention.

Claims

1. A method for preparing a heating wire, characterized in that, At least the following steps are included: The finished heating wire is obtained by laser cutting, slag removal, and heat treatment of tungsten or tantalum sheets.

2. The method for preparing the heating wire according to claim 1, characterized in that, The thickness T of the tungsten or tantalum sheet is 0.1-3 mm.

3. The method for preparing the heating wire according to claim 2, characterized in that, The laser cutting process uses a green laser or an infrared fiber laser to cut tungsten or tantalum sheets.

4. The method for preparing the heating wire according to claim 3, characterized in that, When the thickness of the tungsten or tantalum sheet is 0.1mm≤T<0.5mm, a green laser is used for cutting.

5. The method for preparing the heating wire according to claim 4, characterized in that, The parameters of the green laser are as follows: the frequency of the green optical fiber is 60000-90000Hz, the power is 20-50W, and the cutting speed is 120-250mm / s.

6. The method for preparing the heating wire according to claim 3, characterized in that, When the thickness T of the tungsten or tantalum sheet is 0.5mm ≤ T < 3mm, an infrared fiber laser is used for cutting.

7. The method for preparing the heating wire according to claim 6, characterized in that, When the thickness of the tungsten or tantalum sheet is 0.5mm≤T<1mm, the parameters of the infrared fiber laser are: infrared fiber frequency 450-650Hz, power 50-150W, and cutting speed 5-12mm / s.

8. The method for preparing the heating wire according to claim 6, characterized in that, When the thickness of the tungsten or tantalum sheet is 1mm≤T<3mm, the parameters of the infrared fiber laser are: infrared fiber frequency 800-3000Hz, power 150-3000W, and cutting speed 5-12mm / s.

9. The method for preparing the heating wire according to claim 1, characterized in that, The heat treatment temperature is 300-1100℃, and the holding time is 1-5h.

10. The application of a method for preparing a heating wire according to any one of claims 1-9 in the preparation of a heating wire for a vapor deposition source heating device.

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