Cleaning agent composition as well as preparation method and cleaning method thereof

Abstract

The invention relates to a cleaning agent composition and a preparation method and a cleaning method thereof in the technical field of substrate cleaning, the cleaning agent composition comprises acid, tetrafluoroethyl trifluoroethyl ether, trans-dichloroethylene and an additive, and the additive is selected from at least one of a corrosion inhibitor and a polymerization inhibitor. The cleaning agent composition can effectively remove scaling powder on the DBC board, prevent oxidation of the DBC board and prolong the service life of the DBC board, and is low in cost.

Description

Technical Field

[0001] This application relates to the field of substrate cleaning technology, and in particular to a cleaning agent composition, its preparation method, and cleaning method. Background Technology

[0002] In the field of precision cleaning technology, DBC (Direct Copper Ceramic Substrate) boards are common electronic components, and their surface cleanliness directly affects subsequent assembly and usage. However, DBC boards often retain flux residues during the manufacturing process. This flux not only affects the appearance of the DBC board but may also impact its performance. Therefore, effectively removing this flux and improving the cleanliness of DBC boards is a pressing issue in the field of electronic component cleaning technology. In the semiconductor equipment manufacturing industry, the oxidation of DBC boards is a significant problem. Oxidation leads to a decline in DBC board performance and may even cause equipment malfunctions. Therefore, preventing DBC board oxidation and extending its lifespan is also a problem that needs to be addressed in the semiconductor equipment manufacturing industry. Trans-dichloroethylene (t-DCE) is a commonly used precision cleaning agent, but its easy polymerization is often overlooked. t-DCE readily polymerizes to form high molecular weight polymers, which affects the performance of the cleaning agent. Therefore, inhibiting the polymerization of t-DCE and improving the stability of the cleaning agent is also a problem that needs to be solved in the preparation of solvent-based cleaning agents. Summary of the Invention

[0003] The main objective of this invention is to provide a cleaning agent composition, its preparation method, and a cleaning method thereof, in order to solve at least one of the above-mentioned technical problems.

[0004] To achieve the above objectives, the present invention provides a cleaning agent composition comprising an acid, tetrafluoroethyl trifluoroethyl ether (HFE-347), trans-dichloroethylene (t-DCE), and additives.

[0005] In some embodiments of the present invention, the mass ratio of the tetrafluoroethyl trifluoroethyl ether to trans-dichloroethylene is 1:(1.6-10).

[0006] In some embodiments of the present invention, the acid is selected from one or more of sulfuric acid, hydrochloric acid, nitric acid, and citric acid.

[0007] In some embodiments of the present invention, the additive is selected from at least one of corrosion inhibitors and polymerization inhibitors.

[0008] In some embodiments of the present invention, the corrosion inhibitor is selected from one or more of benzotriazole and chromate.

[0009] In some embodiments of the present invention, the polymerization inhibitor is selected from one or more of hydroquinone, thiol, and p-methylphenol.

[0010] In some embodiments of the present invention, the contents of each component of the cleaning agent composition, by mass percentage, are as follows:

[0011] Acid 5~20%;

[0012] Tetrafluoroethyl trifluoroethyl ether 7-32%;

[0013] trans-dichloroethylene 60-70%;

[0014] Additives: 3-10%.

[0015] To achieve the above objectives, the present invention also proposes a method for preparing the cleaning agent composition as described above, comprising the following steps: mixing the components of the cleaning agent composition in proportion to form a cleaning agent composition.

[0016] To achieve the above objectives, the present invention also proposes a method for cleaning a DBC board using the above-mentioned cleaning agent composition, comprising the following steps: placing the DBC board into the cleaning agent composition, heating and ultrasonically treating it.

[0017] In some embodiments of the present invention, the ultrasound duration is 5-15 minutes and the temperature is 60-70°C.

[0018] Compared with the prior art, the present invention achieves the following technical effects:

[0019] 1. Highly efficient flux removal: This invention uses t-DCE with strong cleaning power to form a cleaning agent composition that can effectively remove flux from DBC boards by compounding it with other solvents, thereby improving the cleanliness of DBC boards and avoiding the impact of flux residue on the performance of DBC boards.

[0020] 2. Effective oxidation prevention: The cleaning agent composition of the present invention contains acid + corrosion inhibitor / polymerization inhibitor, which can effectively prevent the oxidation of DBC board, extend the service life of DBC board, and solve the problem of unsatisfactory anti-oxidation effect in the prior art.

[0021] 3. Inhibition of t-DCE polymerization: The cleaning agent composition of the present invention contains a polymerization inhibitor, which can effectively inhibit the polymerization of t-DCE and avoid the impact of t-DCE polymerization on the performance of the cleaning agent.

[0022] 4. Low cost: The raw materials used in the cleaning agent composition of the present invention are mainly t-DCE, which is inexpensive and has a simple preparation method. Therefore, the cleaning agent composition of the present invention has a low cost and higher economic benefits compared with the prior art. Attached Figure Description

[0023] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application.

[0024] Figure 1 a is a photograph of the DBC board in Example 1 before cleaning. Figure 1 b is a photograph of the DBC board after cleaning with the cleaning agent composition of Example 1.

[0025] Figure 2 a is a photograph of the DBC board in Comparative Example 1 before cleaning. Figure 2 b is a photograph of the DBC board after cleaning with the cleaning agent composition of Comparative Example 1. Detailed Implementation

[0026] The present invention will be further described below with reference to specific embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the invention. Those skilled in the art will readily identify several non-critical parameters that can be varied or modified without yielding substantially the same results.

[0027] Unless otherwise specified, the techniques or conditions described in the examples shall be performed in accordance with the techniques or conditions described in the literature in this field, or in accordance with the product instructions. Reagents or instruments whose manufacturers are not specified are all conventional products that can be purchased through legitimate channels. Unless otherwise specified, the experimental methods in the following examples are conventional methods. Unless otherwise specified, the experimental materials used in the following examples are all commercially available products.

[0028] This invention discloses a cleaning agent composition comprising an acid, tetrafluoroethyltrifluoroethyl ether (HFE-347), trans-dichloroethylene (t-DCE), and additives.

[0029] In some embodiments of the present invention, the mass ratio of the tetrafluoroethyl trifluoroethyl ether to trans-dichloroethylene is 1:(1.6-10).

[0030] In some embodiments of the present invention, the mass ratio of tetrafluoroethyltrifluoroethyl ether to trans-dichloroethylene is not particularly limited, and those skilled in the art can make reasonable selections according to actual needs. As some specific examples, it can be 1:(1.6 to 10), such as 1:1.6, 1:2, 1:3, 1:4, 1:5, 1:6, 1:7, 1:8, 1:9, 1:10.

[0031] The additive is selected from at least one of corrosion inhibitors and polymerization inhibitors.

[0032] It should be understood that the cleaning agent composition of the present invention may include an acid, tetrafluoroethyl trifluoroethyl ether, trans dichloroethylene and a corrosion inhibitor; or the cleaning agent composition may include an acid, tetrafluoroethyl trifluoroethyl ether, trans dichloroethylene and a polymerization inhibitor; or the cleaning agent composition may include an acid, tetrafluoroethyl trifluoroethyl ether, trans dichloroethylene, a corrosion inhibitor and a polymerization inhibitor.

[0033] In this invention, a cleaning agent composition is formed by compounding t-DCE with other solvents to effectively remove flux from DBC boards, thereby improving the cleanliness of the DBC boards and avoiding the impact of flux residue on their performance. Moreover, the cleaning agent composition of this invention contains acid, corrosion inhibitors and / or polymerization inhibitors, which can effectively prevent the oxidation of DBC boards, extend their service life, and solve the problem of unsatisfactory anti-oxidation effect in the prior art.

[0034] In some embodiments of the present invention, the contents of each component of the cleaning agent composition by mass percentage are as follows: acid 5-20%; tetrafluoroethyl trifluoroethyl ether 7-32%; trans-dichloroethylene 60-70%; and additives 3-10%.

[0035] For example, when the cleaning agent composition includes acid, tetrafluoroethyl trifluoroethyl ether, trans-dichloroethylene, and corrosion inhibitor, the content of each component in the cleaning agent composition by mass percentage can be as follows: acid 5-20%; tetrafluoroethyl trifluoroethyl ether 7-32%; trans-dichloroethylene 60-70%; and corrosion inhibitor 3-5%.

[0036] When the cleaning agent composition includes acid, tetrafluoroethyl trifluoroethyl ether, trans-dichloroethylene and polymerization inhibitor, the content of each component in the cleaning agent composition by mass percentage can be as follows: acid 5-20%; tetrafluoroethyl trifluoroethyl ether 7-32%; trans-dichloroethylene 60-70%; polymerization inhibitor 3-5%.

[0037] When the cleaning agent composition includes acid, tetrafluoroethyl trifluoroethyl ether, trans-dichloroethylene, corrosion inhibitor, and polymerization inhibitor, the content of each component in the cleaning agent composition by mass percentage can be as follows: acid 5-20%; tetrafluoroethyl trifluoroethyl ether 7-29%; trans-dichloroethylene 60-70%; corrosion inhibitor 3-5%; polymerization inhibitor 3-5%.

[0038] The cleaning agent composition of the present invention uses t-DCE as the main raw material, which is inexpensive and has a simple preparation method. Therefore, the cleaning agent composition of the present invention has a lower cost and higher economic benefits compared with the prior art. At the same time, when the cleaning agent composition of the present invention contains a polymerization inhibitor, it can effectively inhibit the polymerization of t-DCE and avoid the performance of the cleaning agent being affected by the polymerization of t-DCE.

[0039] In this invention, a cleaning agent composition is prepared by mixing a specific proportion of acid, tetrafluoroethyltrifluoroethyl ether, t-DCE, corrosion inhibitor or polymerization inhibitor, or a combination of corrosion inhibitor and polymerization inhibitor by weight percentage. This composition is more effective in removing flux from DBC boards and can further improve the cleanliness of DBC boards.

[0040] In some embodiments of the present invention, the acid is selected from one or more of sulfuric acid, hydrochloric acid, nitric acid, and citric acid. When multiple acids are used, there are no specific requirements on the mass ratio of each acid, and those skilled in the art can make reasonable selections according to actual needs.

[0041] It should be noted that the acid used in this invention can be any other common acid as needed.

[0042] In some embodiments of the present invention, the corrosion inhibitor is selected from one or more of benzotriazole and chromate, preferably benzotriazole.

[0043] In some embodiments of the present invention, the polymerization inhibitor is selected from one or more of hydroquinone, thiol, and p-methylphenol.

[0044] Preferably, the polymerization inhibitor is p-methylphenol or a combination of multiple polymerization inhibitors, used to inhibit the polymerization reaction of t-DCE.

[0045] In this invention, adding specific acids and corrosion inhibitors or polymerization inhibitors, or a combination of corrosion inhibitors and polymerization inhibitors, to the cleaning agent composition can effectively prevent the oxidation of DBC boards and extend their service life. At the same time, such corrosion inhibitors are environmentally friendly and will not affect the health of operators. Specific polymerization inhibitors can effectively inhibit t-DCE polymerization and improve the stability of the cleaning agent. They can inhibit t-DCE polymerization without affecting the cleaning agent's effectiveness.

[0046] The present invention also discloses a method for preparing the above-mentioned cleaning agent composition, comprising the following steps: mixing the components of the cleaning agent composition in proportion to form a cleaning agent composition.

[0047] Furthermore, the mixing process can be carried out at room temperature and stirred evenly; it should be understood that room temperature refers to the temperature of the indoor environment, and its specific range can vary according to different standards and needs, such as a temperature between 18 and 26°C.

[0048] The present invention also discloses a method for cleaning a DBC board using the above-mentioned cleaning agent composition, comprising the following steps: placing the DBC board into the cleaning agent composition, heating it to a certain temperature, and ultrasonically treating it.

[0049] In some embodiments of the present invention, the temperature is not particularly limited, and those skilled in the art can make a reasonable selection according to actual needs. As some specific examples, it can be 60-70℃, such as 60℃, 61℃, 62℃, 63℃, 64℃, 65℃, 66℃, 67℃, 68℃, 69℃, and 70℃.

[0050] In some embodiments of the present invention, the ultrasound time is not particularly limited, and those skilled in the art can make a reasonable selection according to actual needs. As some specific examples, it can be 5-15 minutes, such as 5 minutes, 6 minutes, 7 minutes, 8 minutes, 9 minutes, 10 minutes, 11 minutes, 12 minutes, 13 minutes, 14 minutes, and 15 minutes.

[0051] The present invention also provides the following embodiments, comparative examples, and test results.

[0052] Example 1

[0053] Step 1: Prepare and thoroughly mix the raw materials, including acid, HFE-347, t-DCE, corrosion inhibitor, and polymerization inhibitor. The acid is a mixture of hydrochloric acid and nitric acid, with a mass percentage of 5%; HFE-347 has a mass percentage of 27%; t-DCE has a mass percentage of 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 5%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%.

[0054] Step 2: Mix the above raw materials in a certain proportion to form a cleaning agent composition. This ensures that while effectively removing flux, preventing DBC board oxidation, and inhibiting t-DCE polymerization, the cleaning agent's effectiveness is not affected, and it does not pollute the environment.

[0055] Step 3: Immerse the DBC board in the cleaning agent composition and sonicate for 10 minutes at 65°C. In this step, it is crucial to control the immersion time and temperature, as this directly affects the cleaning effect of the cleaning agent and the quality of the DBC board.

[0056] Example 2

[0057] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The acid is a mixture of hydrochloric acid and nitric acid, with a mass percentage of 5%; HFE-347 has a mass percentage of 27%; t-DCE has a mass percentage of 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 3%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 5%. Steps 2 and 3 are the same as in Example 1.

[0058] Example 3

[0059] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, and polymerization inhibitor. The acid is a mixture of hydrochloric acid and nitric acid, with a mass percentage of 5%; HFE-347 has a mass percentage of 32%; t-DCE has a mass percentage of 60%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0060] Example 4

[0061] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, and corrosion inhibitor. The acid is a mixture of hydrochloric acid and nitric acid, with a mass percentage of 5%; HFE-347 has a mass percentage of 32%; t-DCE has a mass percentage of 60%; and the corrosion inhibitor is benzotriazole, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0062] Example 5

[0063] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The acid is a mixture of hydrochloric acid and nitric acid, with a mass percentage of 10%; HFE-347 has a mass percentage of 22%; t-DCE has a mass percentage of 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 5%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0064] Example 6

[0065] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The acid is a mixture of sulfuric acid and nitric acid, with a mass percentage of 10%; HFE-347 has a mass percentage of 22%; t-DCE has a mass percentage of 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 3%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 5%. Steps 2 and 3 are the same as in Example 1.

[0066] Example 7

[0067] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, and polymerization inhibitor. The acid is a mixture of sulfuric acid and nitric acid, with a mass percentage of 10%; HFE-347 has a mass percentage of 27%; t-DCE has a mass percentage of 60%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0068] Example 8

[0069] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, and corrosion inhibitor. The acid is a mixture of sulfuric acid and nitric acid, with a mass percentage of 10%; HFE-347 has a mass percentage of 27%; t-DCE has a mass percentage of 60%; and the corrosion inhibitor is benzotriazole, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0070] Example 9

[0071] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The acid is a mixture of sulfuric acid and nitric acid, with a mass percentage of 15%; HFE-347 has a mass percentage of 17%; t-DCE has a mass percentage of 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 5%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0072] Example 10

[0073] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The acid is a mixture of sulfuric acid and nitric acid, with a mass percentage of 15%; HFE-347 has a mass percentage of 17%; t-DCE has a mass percentage of 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 3%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 5%. Steps 2 and 3 are the same as in Example 1.

[0074] Example 11

[0075] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, and polymerization inhibitor. The acid is a mixture of citric acid and nitric acid, with a mass percentage of 15%; HFE-347 has a mass percentage of 22%; t-DCE has a mass percentage of 60%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0076] Example 12

[0077] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, and corrosion inhibitor. The acid is a mixture of citric acid and nitric acid, with a mass percentage of 15%; HFE-347 has a mass percentage of 22%; t-DCE has a mass percentage of 60%; and the corrosion inhibitor is benzotriazole, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0078] Example 13

[0079] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The acid is a mixture of citric acid and nitric acid, with a mass percentage of 20%; HFE-347 has a mass percentage of 12%; t-DCE has a mass percentage of 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 5%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0080] Example 14

[0081] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The acid is a mixture of citric acid and nitric acid, with a mass percentage of 20%; HFE-347 has a mass percentage of 12%; t-DCE has a mass percentage of 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 3%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 5%. Steps 2 and 3 are the same as in Example 1.

[0082] Example 15

[0083] Step 1: Prepare and mix the raw materials thoroughly, including acid, HFE-347, t-DCE, and polymerization inhibitor. The acid is a mixture of citric acid and nitric acid, with a mass percentage of 20%; HFE-347 has a mass percentage of 17%; t-DCE has a mass percentage of 60%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0084] Example 16

[0085] Step 1: Prepare and mix the raw materials evenly, including acid, HFE-347, t-DCE, and corrosion inhibitor. The acid is nitric acid, with a mass percentage of 20%; HFE-347 has a mass percentage of 17%; t-DCE has a mass percentage of 60%; and the corrosion inhibitor is benzotriazole, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0086] Example 17

[0087] Step 1: Prepare and mix the raw materials evenly, including acid, HFE-347, t-DCE, and polymerization inhibitor. The acid is nitric acid, with a mass percentage of 20%; HFE-347 has a mass percentage of 7%; t-DCE has a mass percentage of 70%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0088] Example 18

[0089] Step 1: Prepare and mix the raw materials evenly, including acid, HFE-347, t-DCE, and corrosion inhibitor. The acid is nitric acid, with a mass percentage of 20%; HFE-347 has a mass percentage of 7%; t-DCE has a mass percentage of 70%; and the corrosion inhibitor is benzotriazole, with a mass percentage of 3%. Steps 2 and 3 are the same as in Example 1.

[0090] Table 1 Experimental Results of Examples

[0091] Serial Number HFE-347 t-DCE acid corrosion inhibitor Polymerization inhibitor DBC turns black Flux removal Example 1 27％ 60％ 5％ 5％ 3％ no yes Example 2 27％ 60％ 5％ 3％ 5％ no yes Example 3 32％ 60％ 5％ 0％ 3％ no yes Example 4 32％ 60％ 5％ 3％ 0％ no yes Example 5 22％ 60％ 10％ 5％ 3％ no yes Example 6 22％ 60％ 10％ 3％ 5％ no yes Example 7 27％ 60％ 10％ 0％ 3％ no yes Example 8 27％ 60％ 10％ 3％ 0％ no yes Example 9 17％ 60％ 15％ 5％ 3％ no yes Example 10 17％ 60％ 15％ 3％ 5％ no yes Example 11 22％ 60％ 15％ 0％ 3％ no yes Example 12 22％ 60％ 15％ 3％ 0％ no yes Example 13 12％ 60％ 20％ 5％ 3％ no yes Example 14 12％ 60％ 20％ 3％ 5％ no yes Example 15 17％ 60％ 20％ 0％ 3％ no yes Example 16 17％ 60％ 20％ 3％ 0％ no yes Example 17 7％ 70％ 20％ 0％ 3％ no yes Example 18 7％ 70％ 20％ 3％ 0％ no yes

[0092] Figure 1 a is a photograph of the DBC board in Example 1 before cleaning. Figure 1 b is a photograph of the DBC board after cleaning with the cleaning agent composition of Example 1. Figure 1 As shown in Table 1, the above three steps can complete the cleaning of the DBC board, namely, removing flux, preventing DBC board oxidation, inhibiting t-DCE polymerization, and at low cost.

[0093] Comparative Example 1

[0094] Step 1: Prepare and thoroughly mix the raw materials, including HFE-347, t-DCE, and acid. The mass percentage of HFE-347 is 35%; the mass percentage of t-DCE is 60%; and the acid is nitric acid, with a mass percentage of 5%. Step 2: Mix the above raw materials in a specific ratio to form a cleaning agent composition. Step 3: Place the DBC plate into the cleaning agent composition and sonicate for 10 minutes at a temperature of 65°C.

[0095] Comparative Example 2

[0096] Step 1: Prepare and mix the raw materials thoroughly, including HFE-347, t-DCE, and acid. The mass percentage of HFE-347 is 30%; the mass percentage of t-DCE is 60%; and the acid is nitric acid, with a mass percentage of 10%. Steps 2 and 3 are the same as Comparative Example 1.

[0097] Comparative Example 3

[0098] Step 1: Prepare and mix the raw materials thoroughly, including HFE-347, t-DCE, and acid. The mass percentage of HFE-347 is 25%; the mass percentage of t-DCE is 60%; and the acid is nitric acid, with a mass percentage of 15%. Steps 2 and 3 are the same as Comparative Example 1.

[0099] Comparative Example 4

[0100] Step 1: Prepare and mix the raw materials thoroughly, including HFE-347, t-DCE, and acid. The mass percentage of HFE-347 is 20%; the mass percentage of t-DCE is 60%; and the acid is nitric acid, with a mass percentage of 20%. Steps 2 and 3 are the same as Comparative Example 1.

[0101] Comparative Example 5

[0102] Step 1: Prepare and mix the raw materials evenly, including HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The mass percentage of HFE-347 is 32%; the mass percentage of t-DCE is 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 5%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as Comparative Example 1.

[0103] Comparative Example 6

[0104] Step 1: Prepare and mix the raw materials evenly, including HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The mass percentage of HFE-347 is 32%; the mass percentage of t-DCE is 60%; the corrosion inhibitor is benzotriazole, with a mass percentage of 3%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 5%. Steps 2 and 3 are the same as Comparative Example 1.

[0105] Comparative Example 7

[0106] Step 1: Prepare and mix the raw materials evenly, including HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The mass percentage of HFE-347 is 22%; the mass percentage of t-DCE is 70%; the corrosion inhibitor is benzotriazole, with a mass percentage of 5%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as Comparative Example 1.

[0107] Comparative Example 8

[0108] Step 1: Prepare and mix the raw materials thoroughly, including HFE-347, t-DCE, polymerization inhibitor, and corrosion inhibitor. The mass percentage of HFE-347 is 22%; the mass percentage of t-DCE is 70%; the corrosion inhibitor is benzotriazole, with a mass percentage of 3%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 5%. Steps 2 and 3 are the same as Comparative Example 1.

[0109] Comparative Example 9

[0110] Step 1: Prepare and mix the raw materials, including HFE-347, t-DCE, and polymerization inhibitor. The mass percentage of HFE-347 is 27%; the mass percentage of t-DCE is 70%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 3%. Steps 2 and 3 are the same as Comparative Example 1.

[0111] Comparative Example 10

[0112] Step 1: Prepare and mix the raw materials thoroughly, including HFE-347, t-DCE, and polymerization inhibitor. The mass percentage of HFE-347 is 25%; the mass percentage of t-DCE is 70%; and the polymerization inhibitor is hydroquinone, with a mass percentage of 5%. Steps 2 and 3 are the same as Comparative Example 1.

[0113] Comparative Example 11

[0114] Step 1: Prepare and mix the raw materials thoroughly, including HFE-347, t-DCE, and corrosion inhibitor. The mass percentage of HFE-347 is 27%; the mass percentage of t-DCE is 70%; and the corrosion inhibitor is benzotriazole, with a mass percentage of 3%. Steps 2 and 3 are the same as comparative example 1.

[0115] Comparative Example 12

[0116] Step 1: Prepare and mix the raw materials thoroughly, including HFE-347, t-DCE, and corrosion inhibitor. The mass percentage of HFE-347 is 25%; the mass percentage of t-DCE is 70%; and the corrosion inhibitor is benzotriazole, with a mass percentage of 5%. Steps 2 and 3 are the same as comparative example 1.

[0117] Comparative Example 13

[0118] Step 1: Prepare the raw materials and mix them evenly, including HFE-347 and t-DCE. The mass percentage of HFE-347 is 7%; the mass percentage of t-DCE is 93%. Steps 2 and 3 are the same as Comparative Example 1.

[0119] Comparative Example 14

[0120] Step 1: Prepare the raw materials and mix them evenly, including HFE-347 and t-DCE. The mass percentage of HFE-347 is 17%; the mass percentage of t-DCE is 83%. Steps 2 and 3 are the same as Comparative Example 1.

[0121] Comparative Example 15

[0122] Step 1: Prepare and mix the raw materials, including HFE-347 and t-DCE. The mass percentage of HFE-347 is 27%, and the mass percentage of t-DCE is 73%. Steps 2 and 3 are the same as Comparative Example 1.

[0123] Comparative Example 16

[0124] Step 1: Prepare the raw materials and mix them evenly, including HFE-347 and t-DCE. The mass percentage of HFE-347 is 37%; the mass percentage of t-DCE is 63%. Steps 2 and 3 are the same as Comparative Example 1.

[0125] Table 2 Comparative Experiment Results

[0126] Serial Number HFE-347 t-DCE acid corrosion inhibitor Polymerization inhibitor DBC turns black Flux removal Comparative Example 1 35％ 60％ 5％ 0％ 0％ yes yes Comparative Example 2 30％ 60％ 10％ 0％ 0％ yes yes Comparative Example 3 25％ 60％ 15％ 0％ 0％ yes yes Comparative Example 4 20％ 60％ 20％ 0％ 0％ yes yes Comparative Example 5 32％ 60％ 0％ 5％ 3％ yes yes Comparative Example 6 32％ 60％ 0％ 3％ 5％ yes yes Comparative Example 7 22％ 70％ 0％ 5％ 3％ yes yes Comparative Example 8 22％ 70％ 0％ 3％ 5％ yes yes Comparative Example 9 27％ 70％ 0％ 0％ 3％ yes yes Comparative Example 10 25％ 70％ 0％ 0％ 5％ yes yes Comparative Example 11 27％ 70％ 0％ 3％ 0％ yes yes Comparative Example 12 25％ 70％ 0％ 5％ 0％ yes yes Comparative Example 13 7％ 93％ 0％ 0％ 0％ yes yes Comparative Example 14 17％ 83％ 0％ 0％ 0％ yes yes Comparative Example 15 27％ 73％ 0％ 0％ 0％ yes yes Comparative Example 16 37％ 63％ 0％ 0％ 0％ yes yes

[0127] Figure 2 a is a photograph of the DBC board in Comparative Example 1 before cleaning. Figure 2 b is a photograph of the DBC board after cleaning with the cleaning agent composition of Comparative Example 1. Figure 2 As shown in Table 2, although the comparative example completed the flux cleaning through the above three steps, the DBC board was severely blackened, which had a significant impact on the quality of the DBC board.

[0128] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A cleaning agent composition, characterized in that, It includes acids, tetrafluoroethyltrifluoroethyl ether, trans-dichloroethylene, and additives.

2. The cleaning agent composition according to claim 1, characterized in that, The mass ratio of the tetrafluoroethyl trifluoroethyl ether to trans-dichloroethylene is 1:(1.6-10).

3. The cleaning agent composition according to claim 1, characterized in that, The acid is selected from one or more of sulfuric acid, hydrochloric acid, nitric acid, and citric acid.

4. The cleaning agent composition according to claim 1, characterized in that, The additive is selected from at least one of corrosion inhibitors and polymerization inhibitors.

5. The cleaning agent composition according to claim 4, characterized in that, The corrosion inhibitor is selected from one or more of benzotriazole and chromate.

6. The cleaning agent composition according to claim 4, characterized in that, The polymerization inhibitor is selected from one or more of hydroquinone, thiol, and p-methylphenol.

7. The cleaning agent composition according to claim 1, characterized in that, The components of the cleaning agent composition are present in the following percentages by mass: Acid 5~20%; Tetrafluoroethyl trifluoroethyl ether 7-32%; trans-dichloroethylene 60-70%; Additives: 3-10%.

8. A method for preparing a cleaning agent composition according to any one of claims 1-7, characterized in that, Includes the following steps: The components of the cleaning agent composition are mixed in proportion to form the cleaning agent composition.

9. A method for cleaning a DBC board using a cleaning agent composition as described in any one of claims 1-7, characterized in that, Includes the following steps: The DBC board is placed in the cleaning agent composition, heated, and ultrasonically treated.

10. The method according to claim 9, characterized in that, The ultrasound duration is 5-15 minutes, and the temperature is 60-70℃.

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