High-cleanliness quartz furnace tube opening damage prevention protective sleeve

Abstract

The invention discloses a high-cleanliness quartz furnace tube orifice damage prevention protective sleeve, and belongs to the technical field of semiconductor manufacturing equipment. According to the protective jacket, the tube opening of the quartz furnace tube is designed in a full-surrounding manner, and the protective jacket is made of polytetrafluoroethylene, so that the protective jacket has good wear resistance and chemical inertness, and the damage risk of the tube opening of the quartz furnace tube in the dismounting, carrying and mounting processes can be greatly reduced. The design of the blind hole in the protective sleeve can effectively reduce the overall weight of the protective sleeve and reduce the operation difficulty; meanwhile, the tube opening of the quartz furnace tube is effectively sealed, and the high cleanliness of the quartz furnace tube is considered. The protective jacket has the characteristics of simple design, convenience in disassembly and assembly, high practicability and remarkable economic benefit, can effectively avoid mechanical damage to the quartz furnace tube, remarkably prolongs the service life, and is particularly suitable for the processes of disassembly, transfer, assembly and the like of the quartz furnace tubes in the industries of horizontal semiconductor diffusion furnaces, oxidation furnaces, low-pressure chemical vapor deposition furnaces and the like.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing equipment technology and relates to a damage-resistant protective sleeve for protecting the inlet of a quartz furnace tube from mechanical damage and improving the cleanliness of quartz furnace tube transfer. It is particularly suitable for the disassembly, transfer, and installation of quartz furnace tubes used in industries such as horizontal semiconductor diffusion furnaces, oxidation furnaces, and low-pressure chemical vapor deposition furnaces. Background Technology

[0002] Quartz furnace tubes are characterized by high temperature resistance and high purity, and are widely used in high-temperature equipment in the semiconductor manufacturing industry.

[0003] To ensure the cleanliness of quartz furnace tubes and the stability of the process, regular disassembly and cleaning are usually required during actual use. However, the tube openings are prone to mechanical damage during disassembly, transfer, cleaning, and installation due to frequent contact with the furnace chamber and handling equipment, or manual handling. Especially during disassembly and installation, the limited space within the furnace chamber makes the tube openings susceptible to impacts, leading to chipping or cracking and reducing the tube's sealing performance. Furthermore, if the tube openings are not properly sealed during transfer after cleaning, secondary contamination can occur, further reducing the tube's cleanliness and ultimately affecting product performance. Therefore, there is an urgent need to develop a protective sleeve for the quartz furnace tube openings that balances cleanliness during transfer with damage prevention capabilities. Summary of the Invention

[0004] (a) Purpose of the invention The purpose of this invention is to provide a high-purity protective sleeve for the inlet of a quartz furnace tube, which solves the problems of inconvenience in disassembling and installing quartz furnace tubes, susceptibility to mechanical damage, and susceptibility to contamination during the transfer process.

[0005] (II) Technical Solution To solve the above-mentioned technical problems, the present invention provides a high-purity quartz furnace tube inlet protection sleeve. The protection sleeve 1 is a cylindrical structure with an opening 1-6 at the front end, divided into four sections from front to back, which are respectively called the conical guide section 1-4, the straight section 1-7, the slot section 1-1, and the internal positioning section 1-3. The front part of the quartz furnace tube 2 is fitted outside the internal positioning section 1-3 and the front end of the quartz furnace tube 2 is embedded in the slot of the slot section 1-1. The outer diameter of the conical guide section 1-4 is smaller than the outer diameter of the straight section 1-7. The quartz furnace tube 2 with the protection sleeve 1 is inserted into the furnace chamber by the guidance of the conical guide section 1-5.

[0006] Furthermore, the inner cavity of the protective sleeve 1 is a cylindrical cavity.

[0007] Furthermore, the wall thickness of the tapered guide section 1-4 gradually increases from front to back, forming the third chamfer 1-5.

[0008] Furthermore, the outer diameter of the straight section 1-7 is smaller than the inner diameter of the furnace chamber, ensuring that the quartz furnace tube 2, which is equipped with the protective sleeve 1, can smoothly enter and exit the furnace chamber.

[0009] Furthermore, the outer diameter of the slot section 1-1 is the same as the outer diameter of the straight section 1-7.

[0010] Furthermore, the slot of the slot section 1-1 is an annular slot, which is divided into two along the depth direction. The radius of the half of the slot near the straight section 1-7 is the same as the wall thickness of the quartz furnace tube 2, while the radius of the other half of the slot is greater than the wall thickness of the quartz furnace tube 2 and gradually increases from front to back, forming the first chamfer 1-2.

[0011] Furthermore, the internal positioning section 1-3 is divided into two parts along its length. The outer diameter of the half of the positioning section near the slot section 1-1 is the same as the inner diameter of the quartz furnace tube 2, while the outer diameter of the other half of the positioning section is smaller than the inner diameter of the quartz furnace tube 2 and gradually decreases from front to back, forming a second chamfer.

[0012] Furthermore, the slot of the slot section 1-1 fixes the protective sleeve 1 to the opening of the quartz furnace tube, and the first chamfer 1-2 and the second chamfer reduce the difficulty of aligning the quartz furnace tube 2 with the protective sleeve 1.

[0013] Furthermore, a third chamfer 1-5 is provided on the outer side of the tapered guide section 1-4 to reduce the difficulty of aligning the protective sleeve 1 with the high-temperature furnace.

[0014] Furthermore, the protective sleeve 1 is made of polytetrafluoroethylene.

[0015] (III) Beneficial Effects The high-purity quartz furnace tube inlet protection sleeve provided by the above technical solution has the following beneficial effects: 1. The protective sleeve of this invention adopts a fully enclosed design for the quartz furnace tube opening, which greatly reduces the risk of damage to the quartz furnace tube opening during disassembly, handling and installation.

[0016] 2. The protective sleeve of this invention is made of polytetrafluoroethylene, which is wear-resistant and chemically inert. While protecting against damage, it also ensures the high cleanliness of the quartz furnace tube.

[0017] 3. The protective sleeve of this invention has a simple structure design, is easy to disassemble and install, is highly practical, and has significant economic benefits. Attached Figure Description

[0018] Figure 1 This is a three-dimensional schematic diagram of the quartz furnace tube inlet protection sleeve provided by the present invention.

[0019] Figure 2 This is a side view of the quartz furnace tube inlet protection sleeve provided by the present invention.

[0020] Figure 3 A three-dimensional schematic diagram of the protective sleeve for preventing damage to the quartz furnace tube opening provided by the present invention installed at the quartz furnace tube opening.

[0021] Figure 4 A side view of the quartz furnace tube inlet protective sleeve installed at the quartz furnace tube inlet, as provided by the present invention. Detailed Implementation

[0022] To make the objectives, contents, and advantages of the present invention clearer, the specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples.

[0023] like Figures 1 to 4 As shown, in this embodiment, the high-cleanliness quartz furnace tube inlet anti-damage protective sleeve 1 is a cylindrical structure with an opening 1-6 at the front end, divided into four sections from front to back, which are respectively called the conical guide section 1-4, the straight section 1-7, the slot section 1-1, and the internal positioning section 1-3; the front part of the quartz furnace tube 2 is fitted outside the internal positioning section 1-3 and the front end of the quartz furnace tube 2 is embedded in the slot of the slot section 1-1. The outer diameter of the conical guide section 1-4 is smaller than the outer diameter of the straight section 1-7. The quartz furnace tube 2 with the protective sleeve 1 is inserted into the furnace chamber by the guidance of the conical guide section 1-5.

[0024] The inner cavity of the protective sleeve 1 is a cylindrical cavity.

[0025] The wall thickness of the tapered guide section 1-4 gradually increases from front to back, forming the third chamfer 1-5.

[0026] The outer diameter of the straight section 1-7 is smaller than the inner diameter of the furnace chamber, ensuring that the quartz furnace tube 2, which is equipped with the protective sleeve 1, can smoothly enter and exit the furnace chamber.

[0027] The outer diameter of the slot section 1-1 is the same as the outer diameter of the straight section 1-7.

[0028] The slot in the slot section 1-1 is an annular slot, which is divided into two along the depth direction. The radius of the half of the slot near the straight section 1-7 is the same as the wall thickness of the quartz furnace tube 2, while the radius of the other half of the slot is greater than the wall thickness of the quartz furnace tube 2 and gradually increases from front to back, forming the first chamfer 1-2.

[0029] The internal positioning section 1-3 is divided into two parts along its length. The outer diameter of the half of the positioning section near the slot section 1-1 is the same as the inner diameter of the quartz furnace tube 2. The outer diameter of the other half of the positioning section is smaller than the inner diameter of the quartz furnace tube 2 and gradually decreases from front to back, forming a second chamfer.

[0030] In this embodiment, the slot 1-1 is used to fix the protective sleeve 1 to the opening of the quartz furnace tube. The first chamfer 1-2 and the second chamfer can reduce the difficulty of aligning the quartz furnace tube 2 with the protective sleeve 1, making it easier to install the protective sleeve 1 at the opening of the quartz furnace tube 2.

[0031] A third chamfer 1-5 is provided on the outer side of the tapered guide section 1-4 to reduce the difficulty of aligning the protective sleeve 1 with the high-temperature furnace chamber, making the quartz furnace tube 2 with the protective sleeve 1 installed easier to disassemble and install in the furnace chamber.

[0032] The tapered guide section 1-4 is provided with openings 1-6, which have three main functions: a. to reduce the overall weight of the protective sleeve 1 and reduce the difficulty of operation; b. to provide a certain operating space so that the operator can easily lift the quartz furnace tube from the direction of the quartz furnace tube opening; c. to seal the quartz furnace tube opening to ensure that the quartz furnace tube is not contaminated during the handling process after cleaning.

[0033] The protective cover 1 is made of polytetrafluoroethylene, which has the advantages of being lightweight and easy to clean.

[0034] The steps for disassembling the quartz furnace tube based on the protective sleeve at the tube opening described in this invention are as follows: 1. Install the protective sleeve 1 of the present invention onto the inlet of the quartz furnace tube 2.

[0035] 2. Lift the conical guide sections 1-4 and slowly move the quartz furnace tube 2 out of the furnace chamber. During the moving process, the protective sleeve 1 can effectively prevent mechanical damage to the opening of the quartz furnace tube 2 caused by impact.

[0036] 3. Remove the protective sleeve 1 described in this invention from the opening of the quartz furnace tube 2 to complete the disassembly of the quartz furnace tube 2.

[0037] 4. Place the quartz furnace tube 2 into the furnace tube cleaning machine for cleaning.

[0038] The installation steps for the quartz furnace tube with the protective sleeve at the tube opening described in this invention are as follows: 1. After the cleaned quartz furnace tube 2 is removed from the furnace tube cleaning machine, the protective sleeve 1 described in this invention is immediately installed on the opening of the quartz furnace tube 2 to ensure that the quartz furnace tube 2 maintains a high degree of cleanliness during the transfer process.

[0039] 2. Slowly push the quartz furnace tube 2 into the furnace chamber. During the pushing process, the protective sleeve 1 can effectively prevent mechanical damage to the opening of the quartz furnace tube 2 caused by impact.

[0040] 3. Remove the protective sleeve 1 described in this invention from the port of the quartz furnace tube 2 to complete the installation of the quartz furnace tube 2.

[0041] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A high-purity quartz furnace tube inlet protection sleeve, characterized in that, The protective sleeve (1) is a cylindrical structure with an opening (1-6) at the front end. It is divided into four sections from front to back, which are respectively called the conical guide section (1-4), the straight section (1-7), the slot section (1-1), and the internal positioning section (1-3). The front part of the quartz furnace tube (2) is fitted outside the internal positioning section (1-3) and the front end of the quartz furnace tube (2) is embedded in the slot of the slot section (1-1). The outer diameter of the conical guide section (1-4) is smaller than the outer diameter of the straight section (1-7). The quartz furnace tube (2) with the protective sleeve (1) is inserted into the furnace chamber through the guidance of the conical guide section (1-5).

2. The high-purity quartz furnace tube inlet protection sleeve as described in claim 1, characterized in that, The inner cavity of the protective sleeve (1) is a cylindrical cavity.

3. The high-purity quartz furnace tube inlet protection sleeve as described in claim 2, characterized in that, The wall thickness of the tapered guide section (1-4) gradually increases from front to back, forming the third chamfer (1-5).

4. The high-purity quartz furnace tube inlet protection sleeve as described in claim 3, characterized in that, The outer diameter of the straight section (1-7) is smaller than the inner diameter of the furnace chamber, ensuring that the quartz furnace tube (2) with the protective sleeve (1) can smoothly enter and exit the furnace chamber.

5. The high-purity quartz furnace tube inlet protection sleeve as described in claim 4, characterized in that, The outer diameter of the slot section (1-1) is the same as the outer diameter of the straight section (1-7).

6. The high-purity quartz furnace tube inlet protection sleeve as described in claim 5, characterized in that, The slot of the slot section (1-1) is an annular slot, which is divided into two along the depth direction. The radius of the half of the slot close to the straight section (1-7) is consistent with the wall thickness of the quartz furnace tube (2), while the radius of the other half of the slot is greater than the wall thickness of the quartz furnace tube (2) and gradually increases from front to back, forming the first chamfer (1-2).

7. The high-purity quartz furnace tube inlet protection sleeve as described in claim 6, characterized in that, The internal positioning section (1-3) is divided into two parts along its length. The outer diameter of the half of the positioning section near the slot section (1-1) is the same as the inner diameter of the quartz furnace tube (2). The outer diameter of the other half of the positioning section is smaller than the inner diameter of the quartz furnace tube (2) and gradually decreases from front to back, forming a second chamfer.

8. The high-purity quartz furnace tube inlet protection sleeve as described in claim 7, characterized in that, The slot of the slot section (1-1) fixes the protective sleeve (1) to the opening of the quartz furnace tube. The first chamfer (1-2) and the second chamfer reduce the difficulty of aligning the quartz furnace tube (2) with the protective sleeve (1).

9. The high-purity quartz furnace tube inlet protection sleeve as described in claim 8, characterized in that, A third chamfer (1-5) is provided on the outer side of the tapered guide section (1-4) to reduce the difficulty of aligning the protective sleeve (1) with the high-temperature furnace.

10. The high-purity quartz furnace tube inlet protection sleeve as described in claim 9, characterized in that, The protective cover (1) is made of polytetrafluoroethylene.

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