Opening device for pneumatic valve of air supply equipment

Abstract

The invention discloses an opening device for a pneumatic valve of gas supply equipment, and relates to the technical field of opening devices.The opening device for the pneumatic valve of the gas supply equipment comprises a shell, a pressure adjusting structure and a gas output structure, a gas storage cavity is formed in the shell and used for storing gas, and the pressure adjusting structure communicates with the gas storage cavity; the pressure adjusting structure is used for adjusting gas pressure in the gas storage cavity so as to adjust a gas pressure value in the gas storage cavity to a target pressure value, the gas output structure is provided with a connecting port, the connecting port is used for communicating with a pneumatic valve of the gas supply equipment, and the gas output structure is used for communicating the gas storage cavity with the pneumatic valve. According to the opening device, the duration for opening the pneumatic valve of the air supply equipment can be shortened, the efficiency for opening the pneumatic valve of the air supply equipment can be improved, the probability of shutdown of the semiconductor equipment can be reduced, the risk of wasting production materials can be reduced, and the economical efficiency of a semiconductor chip manufacturing process can be improved.

Description

Technical Field

[0001] This invention relates to the field of opening device technology, and in particular to an opening device for a pneumatic valve in an air supply equipment. Background Technology

[0002] In related technologies, during the semiconductor chip manufacturing process, when the pneumatic valve of the gas supply equipment of the semiconductor equipment malfunctions, the existing methods for opening the pneumatic valve are time-consuming, inefficient, and prone to causing the semiconductor equipment to shut down, resulting in a waste of production materials. Summary of the Invention

[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. Therefore, one object of the present invention is to provide an opening device for a pneumatic valve of a gas supply equipment, which is beneficial for shortening the time required to open the pneumatic valve, improving the efficiency of opening the pneumatic valve, reducing the probability of semiconductor equipment downtime, reducing the risk of wasting production materials, and improving the economics of semiconductor chip manufacturing processes.

[0004] An opening device for a pneumatic valve of a gas supply device according to an embodiment of the present invention includes: a housing, a pressure regulating structure, and a gas output structure. A gas storage chamber is formed inside the housing for storing gas. The pressure regulating structure is connected to the gas storage chamber and is used to regulate the gas pressure in the gas storage chamber to adjust the gas pressure value in the gas storage chamber to a target pressure value. The gas output structure has a connection port for connecting to the pneumatic valve of the gas supply device and for connecting the gas storage chamber and the pneumatic valve.

[0005] The opening device for the pneumatic valve of the gas supply equipment according to the embodiments of this application can shorten the time for opening the pneumatic valve of the gas supply equipment, improve the efficiency of opening the pneumatic valve of the gas supply equipment, reduce the probability of semiconductor equipment downtime, reduce the risk of wasting production materials, and improve the economy of semiconductor chip manufacturing process.

[0006] According to some embodiments of the present invention, the gas output structure further includes a gas output channel and a first on / off valve, wherein the outlet of the gas output channel is the connection port, and the gas output channel is provided with the first on / off valve, through which the gas storage chamber and the pneumatic valve are selectively connected.

[0007] According to some embodiments of the present invention, there are multiple gas output channels and multiple first on / off valves, and each gas output channel is provided with at least one first on / off valve.

[0008] According to some embodiments of the present invention, the gas output structure further includes: a plurality of operating switches, wherein the plurality of operating switches are connected one-to-one with a plurality of first opening and closing valves, and the operating switches are used to control the corresponding first opening and closing valves to open or close.

[0009] According to some embodiments of the present invention, the gas output structure further includes a gas communication channel that connects the gas storage chamber and the gas output channel.

[0010] According to some embodiments of the present invention, the pressure regulating structure includes an air pump and a pressure regulating valve, wherein the pressure regulating valve is connected between the air storage chamber and the air pump.

[0011] According to some embodiments of the present invention, the pressure regulating structure further includes: a first one-way valve connected between the air pump and the pressure regulating valve, so as to allow gas flowing out of the air pump to flow into the pressure regulating valve.

[0012] According to some embodiments of the present invention, the opening device further includes: a gas replenishment structure, which is connected to the gas storage chamber and replenishes gas into the gas storage chamber through the gas replenishment structure.

[0013] According to some embodiments of the present invention, the gas replenishment structure includes: a gas replenishment path and a second on / off valve, one end of the gas replenishment path being connected to the gas storage chamber, and the second on / off valve being disposed in the gas replenishment path to control whether the gas replenishment path is open or closed.

[0014] According to some embodiments of the present invention, the air replenishment structure further includes: a second one-way valve, the second one-way valve being disposed in the air replenishment path and located downstream of the second on-off valve.

[0015] According to some embodiments of the present invention, the opening device further includes: a carrying structure, the carrying structure being fixed to the housing and located outside the housing.

[0016] According to some embodiments of the present invention, the opening device further includes: a pressure detection element and a controller, wherein the controller is communicatively connected to both the pressure detection element and the pressure regulating structure, the pressure detection element is used to detect the gas pressure value in the gas storage chamber, and the controller is configured to control the operation of the pressure regulating structure according to the detection information of the pressure detection element.

[0017] According to some embodiments of the present invention, the gas output structure is configured to connect the gas storage chamber and the pneumatic valve when the gas pressure value in the gas storage chamber reaches the target pressure value.

[0018] According to some embodiments of the present invention, the opening device further includes an operation panel and a battery structure, the battery structure being electrically connected to at least one of the pressure regulating structure, the gas output structure and the operation panel, the operation panel being used to display parameter information.

[0019] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0020] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of an opening device according to an embodiment of this application.

[0021] Figure label: Opening device 1, 10 for the outer casing, 11 for the installation space. Gas storage chamber 20, Pressure regulating structure 30, air pump 31, first check valve 32, second connecting pipe 33, pressure regulating valve 34. Gas output structure 40, connection port 41, operating switch 42. Air supply structure 50, air supply path 51, second on / off valve 52, second check valve 53. Carrying structure 60, Pressure testing component 70, Operation panel 81, battery structure 82, main power switch 83, charging connector 84. Detailed Implementation

[0022] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0023] The following is for reference. Figure 1 A pneumatic valve opening device 1 for an air supply device according to an embodiment of the present invention is described.

[0024] According to an embodiment of the present invention, an opening device 1 for a pneumatic valve of a gas supply equipment, such as... Figure 1As shown, the opening device 1 for the pneumatic valve of the gas supply equipment may include: a housing 10, a pressure regulating structure 30, and a gas output structure 40. A gas storage chamber 20 is formed inside the housing 10. The gas storage chamber 20 is used to store gas. The pressure regulating structure 30 is connected to the gas storage chamber 20 and is used to regulate the gas pressure in the gas storage chamber 20 to adjust the gas pressure value in the gas storage chamber 20 to a target pressure value. The gas output structure 40 has a connection port 41. The connection port 41 is used to connect to the pneumatic valve of the gas supply equipment. The gas output structure 40 is used to connect the gas storage chamber 20 and the pneumatic valve.

[0025] It should be noted that in the semiconductor chip manufacturing process, when the pneumatic valve of the gas supply equipment of the semiconductor equipment malfunctions, the existing methods for opening the pneumatic valve are time-consuming and inefficient, which can easily cause the semiconductor equipment to stop and result in waste of production materials. Based on this, this application proposes an opening device 1 for a pneumatic valve of a gas supply equipment. The opening device 1 may include a housing 10, which defines an installation space 11. A gas storage chamber 20 may be formed within the housing 10, located within the installation space 11. The gas storage chamber 20 can store gas and supply gas when the opening device 1 opens the pneumatic valve of the gas supply equipment. A pressure regulating structure 30 may be disposed within the installation space 11 and communicates with the gas storage chamber 20. The pressure regulating structure 30 can regulate the gas pressure within the gas storage chamber 20 to a target pressure value, which is the rated pressure value that enables the pneumatic valve of the gas supply equipment to open. When the gas pressure within the gas storage chamber 20 is adjusted to the target pressure value, the gas in the gas storage chamber 20 can flow out of the gas storage chamber 20 and be used to open the pneumatic valve.

[0026] At least a portion of the gas output structure 40 may be located within the installation space 11. The gas output structure 40 may have a connection port 41, which may be located on the housing 10. The connection port 41 may be used to communicate with the pneumatic valve of the gas supply equipment. The gas output structure 40 may be used to connect the gas storage chamber 20 and the pneumatic valve. That is, the gas in the gas storage chamber 20 can be transmitted to the pneumatic valve through the gas output structure 40. When the gas pressure in the gas storage chamber 20 is adjusted to the target pressure value, the gas in the gas storage chamber 20 can flow out of the gas storage chamber 20 and flow to the pneumatic valve. The gas flowing to the pneumatic valve can impact the pneumatic valve to open it, thereby allowing the gas supply equipment of the semiconductor equipment to continue to operate, which helps to reduce the risk of semiconductor equipment downtime.

[0027] In this embodiment, the housing 10, pressure regulating structure 30, and gas output structure 40 can be constructed as an integral structure. When the pneumatic valve of the semiconductor equipment's gas supply device malfunctions, the opening device 1 can be directly used to open the pneumatic valve. The opening device 1 can be connected to the pneumatic valve through the connection port 41. The pressure regulating structure 30 adjusts the gas pressure value in the gas storage chamber 20. The gas in the gas storage chamber 20 flows to the pneumatic valve through the gas output structure 40. The gas flowing to the pneumatic valve can impact the pneumatic valve to open it, thereby allowing the semiconductor equipment's gas supply device to continue operating. By using the opening device 1, it is beneficial to shorten the time required to open the pneumatic valve of the gas supply device, improve the efficiency of opening the pneumatic valve, reduce the probability of semiconductor equipment downtime, reduce the risk of wasting production materials, and improve the economics of semiconductor chip manufacturing processes.

[0028] As an example, the pneumatic valve can be connected to a first connecting pipe. When the opening device 1 is used to open the pneumatic valve, the first connecting pipe can be fitted to the connection port 41, thereby allowing the connection port 41 to communicate with the pneumatic valve of the gas supply equipment, and allowing the gas in the gas storage chamber 20 to flow to the pneumatic valve. A quick-connect plug can be provided at the connection port 41, and the first connecting pipe can be fitted with the quick-connect plug, allowing the first connecting pipe to communicate with the connection port 41. This facilitates the flow of gas from the gas storage chamber 20 to the corresponding pneumatic valve through the gas output structure 40. By providing a quick-connect plug, the first connecting pipe and the connection port 41 can be quickly fitted together, which improves the connection speed between the opening device 1 and the pneumatic valve, shortens the time required to open the pneumatic valve of the gas supply equipment, improves the efficiency of opening the pneumatic valve, and ensures good airtightness at the connection between the first connecting pipe and the connection port 41, thus reducing the risk of gas leakage.

[0029] As an example, the opening device 1 can have a gas storage structure that defines a gas storage chamber 20, and the gas storage structure can be located within the installation space 11. The gas storage structure can be made of 316L stainless steel, thus giving it acid and alkali resistance, corrosion resistance, and other properties. Depending on the actual application of the opening device 1 in production, the volume of the gas storage structure can be 500mL, allowing the gas within the gas storage structure to cumulatively support the opening device 1 in performing more than 40 forced opening operations of the pneumatic valve.

[0030] As an example, the target pressure value of the gas in the gas storage chamber 20 can be F1, satisfying the relationship: 0.37 MPa ≤ F1 ≤ 0.5 MPa. Exemplarily, the target pressure value of the gas in the gas storage chamber 20 can be 0.37 MPa, 0.4 MPa, 0.42 MPa, 0.47 MPa, 0.5 MPa, etc. The target pressure value of the gas in the gas storage chamber 20 only needs to be within the range of 0.37 MPa to 0.5 MPa. Any value, including the endpoint value, is a selectable target pressure value for the gas in the gas storage chamber 20 according to this invention. If the target pressure value of the gas in the gas storage chamber 20 is less than 0.37 MPa, the target pressure value is too low, and the gas flowing to the pneumatic valve cannot open the pneumatic valve. If the target pressure value of the gas in the gas storage chamber 20 is greater than 0.5 MPa, the target pressure value is too high, and the gas flowing to the pneumatic valve is prone to damaging the pneumatic valve when used to open it, affecting the service life of the pneumatic valve. Therefore, the target pressure of the gas in the gas storage chamber 20 is between 0.37 MPa and 0.5 MPa, which is beneficial for the gas flowing to the pneumatic valve to open the pneumatic valve smoothly, and also helps to extend the service life of the pneumatic valve.

[0031] As an example, the housing 10 can be made of explosion-proof material, thereby giving the housing 10 waterproof, dustproof, and impact-resistant properties.

[0032] In some embodiments of the present invention, the gas output structure 40 further includes a gas output channel and a first on / off valve. The outlet of the gas output channel is a connection port 41. The gas output channel is provided with a first on / off valve, which controls the selective connection between the gas storage chamber 20 and the pneumatic valve.

[0033] The gas output structure 40 may have a gas output channel and a first on / off valve. The gas output channel may be connected between the connection port 41 and the gas storage chamber 20. The outlet of the gas output channel may be the connection port 41. Gas in the gas storage chamber 20 can flow through the gas output channel to the corresponding connection port 41. The gas output channel may be equipped with a first on / off valve, which can selectively open or close. By controlling the opening or closing of the first on / off valve, the corresponding gas output channel can be selectively connected, achieving the effect of selective connection between the gas storage chamber 20 and the pneumatic valve. This facilitates the selective flow of gas in the gas storage chamber 20 to the pneumatic valve. When the first on / off valve is open, the corresponding gas output channel is connected, the gas storage chamber 20 and the pneumatic valve are connected, and the gas in the gas storage chamber 20 can flow through the corresponding gas output channel to the pneumatic valve and be used to open the pneumatic valve. When the first on / off valve is closed, the corresponding gas output channel is not open, the gas storage chamber 20 and the pneumatic valve are not connected, and the gas in the gas storage chamber 20 cannot flow to the pneumatic valve through the corresponding gas output channel.

[0034] In some embodiments of the present invention, there are multiple gas output channels and multiple first on / off valves, and each gas output channel is provided with at least one first on / off valve.

[0035] There can be multiple gas output channels and multiple first on / off valves. Each gas output channel has a corresponding first on / off valve, and each gas output channel can have at least one first on / off valve. Each first on / off valve can selectively control the opening of the corresponding gas output channel. By setting multiple gas output channels and multiple first on / off valves, it is beneficial to enable the opening device 1 to communicate with multiple pneumatic valves, to enable the opening device 1 to open multiple pneumatic valves simultaneously, and to improve the practicality of the opening device 1. This application embodiment is illustrated by taking the example of each gas output channel having a first on / off valve, with multiple gas output channels and multiple first on / off valves configured in a one-to-one correspondence.

[0036] In some embodiments of the present invention, such as Figure 1 As shown, the gas output structure 40 may also include: multiple operating switches 42, which are connected one-to-one with multiple first opening and closing valves. The operating switches 42 are used to control the opening or closing of the corresponding first opening and closing valves.

[0037] Multiple operating switches 42 can be connected one-to-one with multiple first opening and closing valves. Each first opening and closing valve has a corresponding operating switch 42. Each operating switch 42 can control the opening or closing of the corresponding first opening and closing valve, thereby controlling the opening or closing of the corresponding gas output channel. When the operating switch 42 controls the corresponding first opening and closing valve to open, the corresponding gas output channel is open, and the gas in the gas storage chamber 20 can flow to the corresponding pneumatic valve through the corresponding gas output channel. When the operating switch 42 controls the corresponding first opening and closing valve to close, the corresponding gas output channel is closed, and the gas in the gas storage chamber 20 cannot flow out through the corresponding gas output channel. By setting multiple operating switches 42, it is beneficial to achieve the effect of independent control of multiple first opening and closing valves, which is beneficial to improve the reliability of the opening device 1, and further beneficial to achieve the effect of simultaneously opening multiple pneumatic valves, which is beneficial to further improve the practicality of the opening device 1.

[0038] As an example, when the opening device 1 is used to open the pneumatic valve, and there are multiple pneumatic valves, the same number of connection ports 41 can be selected according to the number of pneumatic valves. Multiple connection ports 41 can be connected to multiple pneumatic valves one by one. Each pneumatic valve has a corresponding connection port 41. The corresponding operating switch 42 can connect the air storage chamber 20 and the corresponding pneumatic valve by controlling the corresponding first opening and closing valve, thereby further realizing the effect of the opening device 1 opening multiple pneumatic valves at the same time.

[0039] As an example, the operating switch 42 can be a self-locking physical button. When the operating switch 42 is pressed, the first opening and closing valve can be opened. When the operating switch 42 is pressed again, the operating switch 42 pops up and closes the first opening and closing valve. The operation of the operating switch 42 is simple and reliable, which helps to reduce the probability of operation error.

[0040] In some embodiments of the present invention, the gas output structure 40 further includes a gas communication channel that connects the gas storage chamber 20 and the gas output channel.

[0041] The gas communication channel can connect the gas storage chamber 20 and the gas output channel. Multiple gas output channels can be connected to the gas communication channel, and multiple gas output channels can be connected to the gas storage chamber 20 through the gas communication channel. That is, multiple gas output channels do not need to be directly connected to the gas storage chamber 20, which is beneficial to shorten the length of the gas output channel, simplify the channel arrangement of the gas output structure 40, and reduce costs.

[0042] In some embodiments of the present invention, such as Figure 1 As shown, the pressure regulating structure 30 may include an air pump 31 and a pressure regulating valve 34, with the pressure regulating valve 34 connected between the air storage chamber 20 and the air pump 31.

[0043] The air pump 31 can be connected to the air storage chamber 20. The air pump 31 can draw in gas from the external environment and pressurize it. The air pump 31 can drive the high-pressure gas to flow into the air storage chamber 20, thereby increasing the gas pressure value inside the air storage chamber 20. This facilitates the adjustment of the gas pressure value inside the air storage chamber 20 to the target pressure value. The pressure regulating valve 34 can be connected between the air storage chamber 20 and the air pump 31. By adjusting the opening of the pressure regulating valve 34, the flow rate of gas from the air pump 31 to the air storage chamber 20 can be adjusted, which helps to control the rate of gas pressurization inside the air storage chamber 20. When the gas pressure in the gas storage chamber 20 is adjusted to the target pressure value, and the gas in the gas storage chamber 20 is used to open the pneumatic valve, the pressure regulating valve 34 can be used to regulate the flow rate of the gas from the air pump 31 to the gas storage chamber 20 so that the gas pressure in the gas storage chamber 20 is always kept at the target pressure value. This is beneficial to improving the stability of the gas pressure in the gas storage chamber 20, and to enabling the opening device 1 to be continuously used to open the pneumatic valve, which is beneficial to further improving the reliability of the opening device 1.

[0044] As an example, a second connecting pipe 33 can be connected between the gas storage chamber 20 and the air pump 31. The second connecting pipe 33 connects the gas storage chamber 20 and the air pump 31. The air pump 31 can drive high-pressure gas to flow into the second connecting pipe 33, and the gas in the second connecting pipe 33 can flow into the gas storage chamber 20, thereby further increasing the gas pressure in the gas storage chamber 20. A pressure regulating valve 34 can be provided on the second connecting pipe 33. By adjusting the opening of the pressure regulating valve 34, it is beneficial to regulate the gas flow rate in the second connecting pipe 33, which in turn helps to regulate the gas flow from the air pump 31 to the gas storage chamber 20, and further helps to regulate the gas pressure value in the gas storage chamber 20.

[0045] In some embodiments of the present invention, such as Figure 1 As shown, the pressure regulating structure 30 may further include: a first check valve 32, which is connected between the air pump 31 and the pressure regulating valve 34 so that the gas flowing out of the air pump 31 flows into the pressure regulating valve 34.

[0046] The first one-way valve 32 can be connected between the air pump 31 and the pressure regulating valve 34, that is, the second connecting pipe 33 can be equipped with the first one-way valve 32. The first one-way valve 32 can prevent gas backflow. By setting the first one-way valve 32, the gas flowing out of the air pump 31 can flow into the pressure regulating valve 34, and the gas flowing into the pressure regulating valve 34 will not flow back to the air pump 31. This is beneficial to achieving the effect that the gas flowing out of the air pump 31 can flow unidirectionally and stably to the pressure regulating valve 34, which is beneficial to improving the reliability of the pressure regulating structure 30 during operation and further improving the reliability of the opening device 1.

[0047] In some embodiments of the present invention, such as Figure 1 As shown, the opening device 1 may also include: a gas replenishment structure 50, which is connected to the gas storage chamber 20, and replenishes gas into the gas storage chamber 20 through the gas replenishment structure 50.

[0048] The gas replenishment structure 50 can be connected to the gas storage chamber 20. When the gas in the gas storage chamber 20 is insufficient, gas can be replenished into the gas storage chamber 20 through the gas replenishment structure 50. This helps the gas storage chamber 20 to continuously supply gas when the opening device 1 is used to open the pneumatic valve, which helps to reduce the probability of insufficient gas in the gas storage chamber 20 and further improves the reliability of the opening device 1.

[0049] In some embodiments of the present invention, such as Figure 1 As shown, the gas replenishment structure 50 may include: a gas replenishment path 51 and a second on / off valve 52. One end of the gas replenishment path 51 is connected to the gas storage chamber 20, and the second on / off valve 52 is provided in the gas replenishment path 51 to control whether the gas replenishment path 51 is open or closed.

[0050] One end of the supplementary gas flow path 51 can be connected to the gas storage chamber 20. Gas supplied to the gas storage chamber 20 can flow into the supplementary gas flow path 51 through its other end, and gas supplied to the gas storage chamber 20 can also flow into the gas storage chamber 20 through the supplementary gas flow path 51. A second on / off valve 52 can be located in the supplementary gas flow path 51. The second on / off valve 52 can selectively open or close, thereby controlling the conduction or non-conduction of the supplementary gas flow path 51, which is beneficial for selectively supplying gas to the gas storage chamber 20. When the second on / off valve 52 is open, the supplementary gas flow path 51 is open, and gas supplied to the gas storage chamber 20 can flow into the gas storage chamber 20 through the supplementary gas flow path 51. When the second on / off valve 52 is closed, the supplementary gas flow path 51 is not open, and gas cannot be supplied to the gas storage chamber 20.

[0051] As an example, the other end of the supplementary airflow path 51 can be connected to the atmospheric environment, and the supplementary air structure 50 can supplement air into the air storage chamber 20.

[0052] As another example, the other end of the gas supply path 51 can be connected to a gas storage cylinder containing inert gas, and the gas supply structure 50 can replenish inert gas into the gas storage chamber 20.

[0053] In some embodiments of the present invention, such as Figure 1 As shown, the air supply structure 50 may further include: a second one-way valve 53, which is located in the air supply path 51 and downstream of the second on-off valve 52.

[0054] The second one-way valve 53 can be located in the gas supply path 51. The second one-way valve 53 prevents gas backflow. It can be located downstream of the second on-off valve 52, i.e., between the second on-off valve 52 and the gas storage chamber 20. It should be noted that, along the gas flow direction, the side to which the gas flowing out of the second on-off valve 52 flows is the downstream side of the second on-off valve 52. By setting the second one-way valve 53, gas flowing into the gas supply path 51 from the other end can flow into the gas storage chamber 20 through the gas supply path 51, and the gas flowing into the gas storage chamber 20 will not flow back to the other end of the gas supply path 51. This facilitates a unidirectional and stable flow of gas into the gas storage chamber 20 from the other end of the gas supply path 51, improving the reliability of the gas supply structure 50 during operation and further enhancing the reliability of the opening device 1.

[0055] In some embodiments of the present invention, such as Figure 1 As shown, the opening device 1 may further include a carrying structure 60, which is fixed to the housing 10 and located outside the housing 10.

[0056] The carrying structure 60 can be fixed to the housing 10 by means of snap-fit, bolt connection or other means. The carrying structure 60 can be located outside the housing 10. The carrying structure 60 can be set on the outer surface of the housing 10. This is beneficial for the operator to move the opening device 1 through the carrying structure 60, which is beneficial for improving the ease of movement of the opening device 1, further reducing the time for the opening device 1 to open the pneumatic valve, further improving the efficiency of the opening device 1 in opening the pneumatic valve, and further reducing the probability of semiconductor equipment shutdown.

[0057] As an example, the carrying structure 60 may include a carrying handle, which may be located on the top wall of the housing 10, so that the operator can carry the opening device 1 to move the opening device 1.

[0058] As another example, the carrying structure 60 may also include a shoulder strap interface, which may be located on the side wall of the housing 10. The opening device 1 may also include an adjustable shoulder strap, which may be fitted with the shoulder strap interface, so that the operator can carry the opening device 1 to move the opening device 1.

[0059] In some embodiments of the present invention, such as Figure 1 As shown, the opening device 1 may also include a pressure detection element 70 and a controller. The controller is communicatively connected to the pressure detection element 70 and the pressure regulating structure 30. The pressure detection element 70 is used to detect the gas pressure value in the gas storage chamber 20. The controller is configured to control the operation of the pressure regulating structure 30 according to the detection information of the pressure detection element 70.

[0060] The controller can communicate with both the pressure detection element 70 and the pressure regulating structure 30. The pressure detection element 70 can be a pressure sensor used to detect the gas pressure value within the gas storage chamber 20. The pressure detection element 70 can send detection information to the controller, which can be configured to control the pressure regulating structure 30 based on the detection information from the pressure detection element 70, thereby regulating the gas pressure value within the gas storage chamber 20. The pressure detection element 70 can detect the gas pressure value within the gas storage chamber 20 in real time and send the detection information to the controller, which is beneficial for achieving automatic regulation of the gas pressure value within the gas storage chamber 20, improving the automation efficiency of the opening device 1, increasing the working efficiency of the opening device 1, and further improving the efficiency of the opening device 1 in opening pneumatic valves.

[0061] When the opening device 1 is working, the air pump 31 delivers gas into the gas storage chamber 20, the pressure detection element 70 detects the gas pressure value in the gas storage chamber 20, the controller receives the detection information from the pressure detection element 70, and the controller drives the air pump 31 and the pressure regulating valve 34 to work according to the detection information from the pressure detection element 70. By adjusting the opening of the pressure regulating valve 34, the gas pressure value in the gas storage chamber 20 is adjusted to the target pressure value.

[0062] In some embodiments of the present invention, the gas output structure 40 is configured to connect the gas storage chamber 20 and the pneumatic valve when the gas pressure value in the gas storage chamber 20 reaches the target pressure value.

[0063] When the gas pressure in the gas storage chamber 20 reaches the target pressure value, the gas output structure 40 connects the gas storage chamber 20 and the pneumatic valve. The gas in the gas storage chamber 20 can flow to the corresponding pneumatic valve through the gas output structure 40, thereby enabling the opening device 1 to open the corresponding pneumatic valve. When the gas pressure in the gas storage chamber 20 has not yet reached the target pressure value, the gas output structure 40 does not connect the gas storage chamber 20 and the pneumatic valve.

[0064] In some embodiments of the present invention, such as Figure 1 As shown, the opening device 1 may further include: an operation panel 81 and a battery structure 82, wherein the battery structure 82 is electrically connected to at least one of the pressure regulating structure 30, the gas output structure 40 and the operation panel 81, and the operation panel 81 is used to display parameter information.

[0065] The battery structure 82 is electrically connected to at least one of the pressure regulating structure 30, the gas output structure 40, and the operation panel 81. The battery structure 82 can provide power to at least one of the pressure regulating structure 30, the gas output structure 40, and the operation panel 81, thereby achieving the effect of driving at least one of the pressure regulating structure 30, the gas output structure 40, and the operation panel 81 to work. In this embodiment, the battery structure 82 is electrically connected to the pressure regulating structure 30, the gas output structure 40, and the operation panel 81, and the battery structure 82 provides power to all three.

[0066] The operation panel 81 can communicate with the controller, which can provide various detection information to the operation panel 81. The operation panel 81 can be used to display parameter information, and the operator can control the opening device 1 to operate based on the parameter information on the operation panel 81. The parameter information can be various, including: the gas pressure value in the gas storage chamber 20, the gas flow rate in the gas storage chamber 20, and the operating time of the opening device 1, etc.

[0067] As an example, staff can set the target pressure value of the gas storage chamber 20 through the control panel 81.

[0068] As an example, the pressure sensor 70 can detect the gas pressure value inside the gas storage chamber 20. The controller can receive the detection information from the pressure sensor 70 and feed it back to the operation panel 81, allowing the operator to read and display the parameter information of the gas pressure value inside the gas storage chamber 20. The controller can also drive the pressure regulating valve 34 to operate based on the detection information from the pressure sensor 70, adjusting the opening of the pressure regulating valve 34 to adjust the gas pressure value inside the gas storage chamber 20 to the target pressure value.

[0069] When the gas pressure in the gas storage chamber 20 is adjusted to the target pressure value, the operation panel 81 can display the real-time gas pressure value in the gas storage chamber 20 as the target pressure value. When the operator reads through the operation panel 81 that the gas pressure in the gas storage chamber 20 has been adjusted to the target pressure value, the operator can turn on the operation switch 42 to open the corresponding first on / off valve, thereby opening the corresponding gas output channel, allowing the gas in the gas storage chamber 20 to flow to the corresponding pneumatic valve to open the corresponding pneumatic valve.

[0070] As an example, the controller can also communicate with the operating switch 42 and the first opening / closing valve. When the operator presses the operating switch 42, the opening information of the operating switch 42 can be transmitted to the controller, and the controller can control the corresponding first opening / closing valve to open. When the operator presses the operating switch 42 again, the switch pops up, and the closing information of the operating switch 42 can be transmitted to the controller, and the controller can control the first opening / closing valve to close.

[0071] As an example, a flow detection device can also be installed in the gas storage chamber 20. The flow detection device can communicate with the controller and can be used to detect the flow rate of the gas in the gas storage chamber 20. The pressure detection device 70 can detect the flow rate of the gas in the gas storage chamber 20 in real time and send the detection information to the controller. The controller can receive the detection information from the flow detection device and feed it back to the operation panel 81. The operator can selectively open or close the second on / off valve 52 according to the flow rate of the gas in the gas storage chamber 20 displayed on the operation panel 81. The second on / off valve 52 can be configured as a manual ball valve.

[0072] As an example, the controller can record the running time of the opening device 1 and feed the running time back to the operation panel 81 so that the operator can read the running time of the opening device 1.

[0073] As an example, the opening device 1 may also include a main power switch 83, which can be connected to the battery structure 82 and can be used to control the operation of the battery structure 82. When the main power switch 83 is in the open position, the battery structure 82 operates and can provide power to the pressure regulating structure 30, the gas output structure 40, and the operation panel 81. When the main power switch 83 is in the closed position, the battery structure 82 does not operate, and the opening device 1 does not operate.

[0074] As an example, the battery structure 82 can be a lithium battery, and the opening device 1 can also include a charging connector 84, which can be connected to the battery structure 82 and can be connected to an external power source to charge the battery structure 82.

[0075] As an example, when the pneumatic valve of the gas supply equipment for semiconductor equipment malfunctions, the first connecting pipe of the pneumatic valve is connected to the connection port 41 of the opening device 1. The operator turns on the main power switch 83 and sets the target pressure value of the gas storage chamber 20 on the operation panel 81. After the operator clicks "confirm" on the operation panel 81, the controller saves the parameters and enters the operating state. The operation panel 81 simultaneously displays the dynamic adjustment range between the target pressure value and the gas pressure value in the gas storage chamber 20. The pressure detection element 70 detects the gas pressure value in the gas storage chamber 20. The controller receives the detection information from the pressure detection element 70 and feeds back the detection information from the pressure detection element 70 to the operation panel 81 in real time. The operator reads the parameter information of the gas pressure value in the gas storage chamber 20 displayed on the operation panel 81. Simultaneously, the controller also drives the pressure regulating valve 34 to work according to the detection information from the pressure detection element 70, adjusting the opening degree of the pressure regulating valve 34 to adjust the gas pressure value in the gas storage chamber 20 to the target pressure value. When the control panel 81 displays the gas pressure value in the gas storage chamber 20 and adjusts it to the target pressure value, the operator turns on the operation switch 42, and the controller controls the corresponding first opening and closing valve to open. The gas in the gas storage chamber 20 flows to the pneumatic valve to open the corresponding pneumatic valve.

[0076] Once the pneumatic valve has completed its opening action, the operator presses the operating switch 42. The switch pops up, and the on / off information of the operating switch 42 is transmitted to the controller. The controller then controls the first on / off valve to close. The operating panel 81 can display a "Work Completed" page. The operator then turns off the main power switch 83 and disconnects the first connecting pipe and the connecting port 41. The operator can then use the carrying structure 60 to carry the opening device 1 back to its storage point, thus completing the emergency opening operation of the pneumatic valve of the air supply equipment.

[0077] During the operation of the opening device 1, the opening device 1 can continuously monitor and display parameters such as the remaining gas volume, the current pressure value in the gas storage chamber 20, and the operating time of the opening device 1.

[0078] Other configurations and operations of the opening device 1 according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0079] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0080] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An opening device for a pneumatic valve in a gas supply equipment, characterized in that, include: The outer shell (10) has a gas storage cavity (20) formed inside it, and the gas storage cavity (20) is used to store gas; Pressure regulating structure (30) is connected to the gas storage chamber (20). The pressure regulating structure (30) is used to regulate the gas pressure in the gas storage chamber (20) to adjust the gas pressure value in the gas storage chamber (20) to the target pressure value. A gas output structure (40) has a connection port (41) for communicating with a pneumatic valve of a gas supply device. The gas output structure (40) is used to connect the gas storage chamber (20) and the pneumatic valve.

2. The opening device according to claim 1, characterized in that, The gas output structure (40) also has a gas output channel and a first on / off valve. The outlet of the gas output channel is the connection port (41). The gas output channel is equipped with the first on / off valve, which controls the selective connection between the gas storage chamber (20) and the pneumatic valve.

3. The opening device according to claim 2, characterized in that, There are multiple gas output channels and multiple first on / off valves, and each gas output channel is provided with at least one first on / off valve.

4. The opening device according to claim 3, characterized in that, The gas output structure (40) further includes: multiple operating switches (42), which are connected one-to-one with multiple first opening and closing valves. The operating switches (42) are used to control the opening or closing of the corresponding first opening and closing valves.

5. The opening device according to claim 2, characterized in that, The gas output structure (40) also has a gas communication channel that connects the gas storage chamber (20) and the gas output channel.

6. The opening device according to claim 1, characterized in that, The pressure regulating structure (30) includes an air pump (31) and a pressure regulating valve (34), wherein the pressure regulating valve (34) is connected between the air storage chamber (20) and the air pump (31).

7. The opening device according to claim 6, characterized in that, The pressure regulating structure (30) further includes a first check valve (32), which is connected between the air pump (31) and the pressure regulating valve (34) to allow gas flowing from the air pump (31) to flow into the pressure regulating valve (34).

8. The opening device according to claim 1, characterized in that, The opening device (1) further includes a gas replenishment structure (50), which is connected to the gas storage chamber (20) and replenishes gas into the gas storage chamber (20) through the gas replenishment structure (50).

9. The opening device according to claim 8, characterized in that, The gas replenishment structure (50) includes: a gas replenishment path (51) and a second on / off valve (52). One end of the gas replenishment path (51) is connected to the gas storage chamber (20). The second on / off valve (52) is located in the gas replenishment path (51) to control whether the gas replenishment path (51) is open or closed.

10. The opening device according to claim 9, characterized in that, The air supply structure (50) further includes a second one-way valve (53), which is located in the air supply path (51) and downstream of the second on / off valve (52).

11. The opening device according to claim 1, characterized in that, The opening device (1) further includes a carrying structure (60), which is fixed to the outer shell (10) and located outside the outer shell (10).

12. The opening device according to any one of claims 1-11, characterized in that, The opening device (1) further includes a pressure detection element (70) and a controller. The controller is communicatively connected to the pressure detection element (70) and the pressure regulating structure (30). The pressure detection element (70) is used to detect the gas pressure value in the gas storage chamber (20). The controller is configured to control the operation of the pressure regulating structure (30) according to the detection information of the pressure detection element (70).

13. The opening device according to claim 12, characterized in that, The gas output structure (40) is configured to connect the gas storage chamber (20) and the pneumatic valve when the gas pressure value in the gas storage chamber (20) reaches the target pressure value.

14. The opening device according to claim 12, characterized in that, The opening device (1) further includes an operation panel (81) and a battery structure (82), wherein the battery structure (82) is electrically connected to at least one of the pressure regulating structure (30), the gas output structure (40) and the operation panel (81), and the operation panel (81) is used to display parameter information.

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