Optical coating machine, coating control method and storage medium
By setting up a changing mechanism and a monitoring plate in the optical coating machine, and using the emitted spectrum to control the coating thickness, the problem of error accumulation during the coating process is solved, and high-precision coating control is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-23
- Publication Date
- 2026-03-17
AI Technical Summary
In the existing technology, the single-wavelength direct optical monitoring method causes the thickness error of the previous film layer to accumulate and amplify layer by layer due to the different refractive indices of HL materials during the coating process, which affects the coating accuracy.
An optical coating machine is used, with a changing mechanism and a monitoring sheet. The target monitoring sheet is moved to the through hole by a rotating shaft. The coating thickness of the coating gun group is controlled based on the emission spectrum of the monitoring sheet, ensuring that each monitoring sheet monitors only a single refractive index material and promptly interrupting the error transmission chain.
It improves coating accuracy and ensures that even if errors occur during the coating process, the coating process can be brought back to normal in a timely manner, thus achieving high-precision coating control.
Smart Images
Figure CN121674907A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of optical coating technology, and in particular to an optical coating machine and coating control method, and a storage medium. Background Technology
[0002] Optical coating involves depositing multiple thin films on the surface of an optical substrate using physical or chemical methods to alter the propagation characteristics of light waves, thereby giving optical elements certain reflection or transmission properties to meet requirements such as reducing or increasing light reflection, beam splitting, filtering, and polarization.
[0003] Currently, the single-wavelength direct optical monitoring method in related technologies uses a single monitoring chip to monitor multiple HL (high refractive index) film stacks, where H represents high refractive index material and L represents low refractive index material. However, due to the different refractive indices of the HL materials, the thickness error of the preceding film layers will change the substrate optical properties (effective refractive index) during the monitoring of subsequent film layers. The error accumulates and amplifies layer by layer, resulting in deviations in the judgment of the coating timing and affecting the final spectrum. Summary of the Invention
[0004] In view of the above-mentioned defects or deficiencies in the related technologies, it is desirable to provide an optical coating machine, a coating control method, and a storage medium that can promptly cut off the error transmission chain and improve coating accuracy.
[0005] In a first aspect, this application provides an optical coating machine, the optical coating machine comprising: A coating stage is provided with a glass substrate changing mechanism and a first through hole corresponding to the glass substrate changing mechanism, and a second through hole for mounting a glass substrate. The glass substrate changing mechanism includes a chassis and a plurality of monitoring plates disposed on the chassis. The chassis has a rotating shaft, and the monitoring plates are used to monitor the coating process of a single refractive index material. A coating gun assembly and a light source are located on one side of the coating stage. The coating gun assembly is used to coat the glass substrate and the monitoring sheet, and the light source is used to illuminate the monitoring sheet through the first through hole. The detection module and control module are located on the other side of the coating stage. The detection module is used to detect the emission spectrum of the monitoring film, and the control module is used to obtain the current position of the target monitoring film. If the current position of the target monitoring film is different from the position of the first through hole, the target monitoring film is moved to the first through hole using the rotating shaft, and the coating thickness of the coating gun assembly is controlled based on the emission spectrum of the target monitoring film.
[0006] Optionally, in some embodiments of this application, the coating stage is further provided with a third through hole for transmitting reference light, the third through hole being adjacent to the first through hole, and the reference light being formed by the light source.
[0007] Optionally, in some embodiments of this application, the control module includes a controller and a motor unit and a cylinder unit connected to the controller. The motor unit controls the rotation of the coating stage, and the cylinder unit controls the rotation of the wafer changing mechanism. The controller is used to determine the coding position of the motor unit, the cylinder descent position and the cylinder ascent position of the cylinder unit based on the position of the reference light at the start of coating, and to record the number of times the cylinder completes descent or ascent during the coating process, and to determine the current position of the target monitoring piece based on the number of times the cylinder completes descent or ascent.
[0008] Optionally, in some embodiments of this application, the wafer-changing mechanism further includes a shielding plate and a toggle member sleeved on the rotating shaft. The shielding plate has a window for exposing the monitoring wafer, and the toggle member is used to drive the chassis to rotate.
[0009] Optionally, in some embodiments of this application, the coating stage is a platform or a curved stage.
[0010] Optionally, in some embodiments of this application, the detection module includes a monochromator that receives the emitted light from the monitoring chip using a light-guiding optical fiber, and a photodetector and a data processor connected in sequence to the monochromator. The data processor is used to output the emitted spectrum of the monitoring chip.
[0011] Optionally, in some embodiments of this application, the optical coating machine further includes a vacuum chamber, with the coating stage, the coating gun assembly, and the light source located inside the vacuum chamber, and the detection module and the control module located outside the vacuum chamber.
[0012] Secondly, this application provides a coating control method, which is used in the control module of the optical coating machine according to any one of the first aspects, and the coating control method includes: Obtain the current location of the target surveillance video; If the current position of the target monitoring piece is different from the position of the first through hole on the coating stage, the target monitoring piece is moved to the first through hole using the rotation axis of the chassis, and the coating thickness of the coating gun assembly is controlled based on the emission spectrum of the target monitoring piece.
[0013] Optionally, in some embodiments of this application, controlling the coating thickness of the coating gun assembly based on the emission spectrum of the target monitoring film includes: Calculate the first difference between two adjacent actual extreme transmittance values in the emitted spectrum of the target monitoring film; Based on the second difference between two adjacent theoretical extreme transmittance values, the third difference between the theoretical stopping point transmittance and the previous theoretical extreme transmittance value, and the first difference, calculate the fourth difference between the actual stopping point transmittance and the previous actual extreme transmittance value. The actual stop point transmittance is obtained based on the fourth difference and the previous actual extreme transmittance. When the real-time transmittance in the emission spectrum of the target monitoring film is the actual stop point transmittance, the coating gun assembly is controlled to stop coating the current film layer.
[0014] Thirdly, this application provides a computer-readable storage medium storing one or more programs that can be executed by one or more processors to implement the steps of the coating control method according to any one of the second aspects.
[0015] As can be seen from the above technical solutions, the embodiments of this application have the following advantages: This application provides an optical coating machine, a coating control method, and a storage medium. By setting a changing mechanism on the coating stage to switch the target monitoring sheet to the first through hole, and each target monitoring sheet only monitors the coating process of a single refractive index material, that is, different refractive index materials are coated crosswise. Even if an error occurs in a certain film layer, the transmission chain can be interrupted in time and the system can return to normal. The coating thickness of the coating gun assembly can be accurately controlled based on the emission spectrum of the target monitoring sheet, thereby greatly improving the coating accuracy. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the structure of an optical coating machine provided in an embodiment of this application; Figure 2 This is a schematic diagram of the structure of a coating stage provided in an embodiment of this application; Figure 3 This is a schematic diagram of the structure of a plate-changing mechanism provided in an embodiment of this application; Figure 4 A schematic flowchart of a coating control method provided in an embodiment of this application; Figure 5 A schematic diagram illustrating the relationship between theoretical and actual spectral curves provided in this application embodiment; Figure 6This is a schematic diagram of the coating monitoring curve of the first monitoring chip in the related technology; Figure 7 This is a schematic diagram of the coating monitoring curve of the second monitoring chip in the related technology; Figure 8 This is a schematic diagram of the coating monitoring curve of the third monitoring chip in the related technology; Figure 9 This is a schematic diagram of the coating monitoring curve of the first monitoring chip in the embodiments of this application; Figure 10 This is a schematic diagram of the coating monitoring curve of the second monitoring chip in the embodiments of this application; Figure 11 This is a schematic diagram of the coating monitoring curve of the third monitoring chip in the embodiments of this application; Figure 12 This is a schematic diagram of the coating monitoring curve of the fourth monitoring chip in the embodiments of this application.
[0018] Figure label: 1-Optical coating machine, 11-Coating stage, 111-Clad plate changing mechanism, a-Base, b-Shielding plate, c-Actuating component, 112-First through hole, 113-Second through hole, 114-Third through hole, 12-Coating gun assembly, 13-Light source, 14-Detection module, 141-Monochromator, 142-Photodetector, 143-Data processor, 15-Control module, 151-Controller, 152-Motor unit, 153-Cylinder unit, 16-Vacuum chamber. Detailed Implementation
[0019] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0020] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0021] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The following examples illustrate this. Figures 1 to 12 The optical coating machine, coating control method, and storage medium provided in the embodiments of this application are described in detail.
[0022] Please refer to Figure 1This is a schematic diagram of an optical coating machine provided in an embodiment of this application. The optical coating machine 1 includes a coating stage 11, a coating gun assembly 12 and a light source 13 located on one side of the coating stage 11, and a detection module 14 and a control module 15 located on the other side of the coating stage 11. The coating stage 11 can be... Figure 1 The platform shown can also be used for Figure 2 The curved stage shown is umbrella-shaped. This coating stage 11 is equipped with a substrate changing mechanism 111, a first through-hole 112 corresponding to the substrate changing mechanism 111, and a second through-hole 113 for mounting glass substrates. Figure 3 As shown, the wafer changing mechanism 111 may include a chassis a and multiple monitoring wafers disposed on the chassis a. The chassis a has a rotating shaft, and the monitoring wafers are used to monitor the coating process of a single refractive index material, i.e., cross-coating of materials with different refractive indices. In some embodiments of this application, the wafer changing mechanism 111 may further include a shielding disk b and a toggle member c sleeved on the rotating shaft. The shielding disk b has a window for exposing the monitoring wafers, and the toggle member c is used to drive the chassis a to rotate. The toggle member c includes, but is not limited to, connected springs and claws. The advantage of this arrangement is that it can provide torque, making the switching of monitoring wafers more precise and less prone to slippage.
[0023] The coating gun assembly 12 is used to coat the glass substrate and the monitoring sheet. It may include a first coating gun and a second coating gun. The first coating gun emits an electron beam to heat a high-refractive-index material, causing the high-refractive-index material to form vapor and deposit onto the glass substrate and the monitoring sheet. The high-refractive-index material may be TiO2. The second coating gun emits an electron beam to heat a low-refractive-index material, causing the low-refractive-index material to form vapor and deposit onto the glass substrate and the monitoring sheet. The low-refractive-index material may be SiO2. The light source 13 is used to irradiate the monitoring sheet through the first through-hole 112, and it may be a laser. It is understood that the coating gun assembly 12 and the light source 13 are located at different positions on the coating stage 11 to prevent the coating gun assembly 12 from coating the light source 13.
[0024] Additionally, the detection module 14 is used to detect the emission spectrum of the monitoring film. It may include a monochromator 141 that receives the emitted light from the monitoring film using an optical fiber, and a photodetector 142 and a data processor 143 connected in sequence to the monochromator 141. The data processor 143 is used to output the emission spectrum of the monitoring film. The control module 15 is used to obtain the current position of the target monitoring film. If the current position of the target monitoring film is different from the position of the first through-hole 112, the target monitoring film is moved to the first through-hole 112 using a rotating shaft, and the coating thickness of the coating gun assembly 12 is controlled based on the emission spectrum of the target monitoring film.
[0025] For example, the coating stage 11 is also provided with a third through hole 114 for the passage of reference light. The third through hole 114 is adjacent to the first through hole 112, which can ensure that the light signal fluctuation is consistent in the shortest time. The reference light is formed by the light source 13. The control module 15 may include a controller 151 and a motor unit 152 and a cylinder unit 153 connected to the controller 151. The motor unit 152 is used to control the rotation of the coating stage 11, and includes, but is not limited to, a servo motor and an encoder. The cylinder unit 153 is used to control the rotation of the changing mechanism 111, and includes, but is not limited to, a counter, a proximity sensor, a cylinder and a lever. When the proximity sensor detects the arrival of the changing mechanism 111, the cylinder is used to operate the lever to rotate the changing mechanism 111.
[0026] In actual use, the controller 151 can determine the coding position of the motor unit 152, the cylinder descent position, and the cylinder ascent position of the cylinder unit 153 based on the position of the reference light at the start of coating. Since the third through hole 114 is unobstructed, the reference light is 100% transmitted. The position where the photocurrent is maximum detected by the detection module 14 is the position of the reference light. At this time, the encoder reading is the coding position of the motor unit 152. Subtracting the preset value from the encoder reading gives the cylinder descent position, and adding the preset value to the encoder reading gives the cylinder ascent position, thus achieving initialization. During the coating process, a counter is used to record the number of times the cylinder completes descent or ascent, and the current position of the target monitoring piece is determined based on the number of times the cylinder completes descent or ascent. This is repeated until the target monitoring piece moves to the first through hole 112. For example, the changing mechanism 111 has... n At position, the current value of the counter is [number]. K ,but K / n The remainder is the actual position of the plate changing mechanism 111.
[0027] In some embodiments of this application, the optical coating machine 1 may further include a vacuum chamber 16, with the coating stage 11, coating gun assembly 12 and light source 13 located inside the vacuum chamber 16, and the detection module 14 and control module 15 located outside the vacuum chamber 16. By setting the vacuum chamber 16, it is possible not only to ensure that the target material sublimated into atomic or molecular state does not collide with air molecules and that the travel path does not deviate from the preset direction, thus accurately depositing it on the glass substrate and monitoring sheet, but also to avoid introducing impurities and improve the coating quality.
[0028] The optical coating machine provided in this application embodiment switches the target monitoring sheet to the first through hole by setting a sheet changing mechanism on the coating stage. Each target monitoring sheet only monitors the coating process of a single refractive index material. In other words, different refractive index materials are coated in a cross manner. Even if an error occurs in a certain film layer, the transmission chain can be interrupted in time and the machine can return to the normal state. The coating thickness of the coating gun assembly can be accurately controlled based on the emission spectrum of the target monitoring sheet, thereby greatly improving the coating accuracy.
[0029] Based on the foregoing embodiments, this application provides a coating control method, which is used for... Figures 1 to 3 The control module 15 of the optical coating machine 1 in the corresponding embodiment. Please refer to... Figure 4 This is a schematic flowchart of a coating control method provided in an embodiment of this application. The coating control method specifically includes the following steps: S101, Obtain the current location of the target surveillance video.
[0030] For example, suppose the film changing mechanism 111 has n At position, the current value of the counter is [number]. K ,but K / n The remainder is the actual position of the film changing mechanism 111, and the current position of the target monitoring film can be determined based on the actual position of the film changing mechanism 111 and the rotation direction of the film changing mechanism 111.
[0031] S102, if the current position of the target monitoring film is different from the position of the first through hole on the coating stage, the target monitoring film is moved to the first through hole by the rotation axis of the chassis, and the coating thickness of the coating gun assembly is controlled based on the emission spectrum of the target monitoring film.
[0032] It should be noted that the matrix calculation method in thin-film optics is a tool that transforms complex electromagnetic field boundary condition problems into matrix algebra operations. In this embodiment, a 2×2 characteristic matrix can be established for each monitoring film. The characteristic matrix of the monitoring film changes accordingly with each monitored film layer. Assuming an incident angle of 0° (perpendicular incidence), the characteristic matrix of a single-layer film... It can be represented as: = (1) In equation (1), Indicates the first The phase thickness of the film, its value is , Indicates the wavelength of light in a vacuum. Indicates the first The optical refractive index of the film, Indicates the first Optical thickness of the film; Represents the imaginary unit. .
[0033] Furthermore, from the first layer closest to the substrate to the second layer closest to the incident medium... Q The total characteristic matrix of the multilayer membrane system can be obtained by multiplying the characteristic matrices of all single-layer membranes in sequence. ,Right now: = (2) Here, the order of matrix multiplication is that the incident light first enters the first... Q The outermost layer, then the first layer (the innermost layer, right next to the base), so matrix multiplication starts from the first layer (outermost layer). (Outermost layer) ride to (Innermost layer). Next, calculate the effective admittance. , Indicate the optical refractive index of the substrate; for K9 glass, it is 1.52. Calculate the reflection coefficient. and reflectivity , The refractive index of the incident medium is 1 for air. The transmittance of a multilayer thin film under ideal conditions with no absorption is... Therefore, the theoretical extreme transmittance and theoretical stopping point transmittance of each film layer can be calculated.
[0034] For example, such as Figure 5 As shown, the solid line represents the theoretical spectral curve, and the dashed line represents the actual spectral curve. First, calculate the first difference A2 between two adjacent actual extreme transmittance values (P1, P2) in the emitted spectrum of the target monitoring film. Then, based on the second difference A1 between two adjacent theoretical extreme transmittance values (TP1, TP2), the third difference B1 between the transmittance at the theoretical stopping point (S1) and the previous theoretical extreme transmittance value (TP2), and the first difference A2, calculate the fourth difference B2 = A2 between the transmittance at the actual stopping point (S2) and the previous actual extreme transmittance value (P2). B1 / A1; then, based on the fourth difference B2 and the previous actual extreme transmittance (P2), the actual stop point (S2) transmittance is obtained, and when the real-time transmittance in the emission spectrum of the target monitoring film is the actual stop point transmittance, the coating gun group is controlled to stop the coating of the current film layer.
[0035] Taking a 45° optical communication filter as an example, Figures 6 to 8 This is a schematic diagram of the coating monitoring curves for related technologies. The first monitoring plate monitors layers 1-20. Figure 6 As shown), the second monitoring panel monitors floors 21-36. Figure 7 As shown), the third monitoring panel monitors floors 37-52 ( Figure 8As shown in the image, using a single monitoring chip to monitor multiple HL-combined membrane stacks results in errors accumulating and amplifying layer by layer, causing significant fluctuations and failing to obtain a spectral curve close to the design curve. Figures 9 to 12 This is a schematic diagram of the coating monitoring curve in an embodiment of this application. The first and third monitoring sheets monitor material H, and the second and fourth monitoring sheets monitor material L. That is to say, each monitoring sheet independently monitors material H or material L. Even if an error occurs in a certain film layer, it will not affect the determination of the stop point of the next layer, and the transmission chain can still be interrupted in time and return to the normal state.
[0036] The descriptions of the same steps and contents as in other embodiments in this example can be found in the descriptions of other embodiments, and will not be repeated here.
[0037] The coating control method provided in this application provides a coating stage with a changing mechanism to switch the target monitoring sheet to the first through hole. Each target monitoring sheet monitors only the coating process of a single refractive index material. In other words, different refractive index materials are coated in a cross manner. Even if an error occurs in a certain film layer, the transmission chain can be interrupted in time and the system can return to normal. The coating thickness of the coating gun assembly can be accurately controlled based on the emission spectrum of the target monitoring sheet, thereby greatly improving the coating accuracy.
[0038] In another aspect, embodiments of this application provide a computer-readable storage medium for storing program code for executing the aforementioned... Figures 4 to 12 Any implementation of the coating control method in the corresponding embodiment.
[0039] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and modules described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.
[0040] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative. For instance, the division of modules is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple modules or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed between each other can be through some interfaces, indirect coupling or communication connection between devices or modules, and can be electrical, mechanical, or other forms. Modules described as separate components may or may not be physically separate, and components shown as modules may or may not be physical units, i.e., they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs.
[0041] Furthermore, the functional modules in the various embodiments of this application can be integrated into one processing unit, or each module can exist physically separately, or two or more units can be integrated into one module. The integrated unit can be implemented in hardware or as a software functional unit. If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium.
[0042] Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the coating control method of the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as a USB flash drive, a portable hard drive, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk.
[0043] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0044] This document uses specific examples to illustrate the principles and implementation methods of this application. The descriptions of the above embodiments are only for the purpose of helping to understand the methods and core ideas of this application. Furthermore, those skilled in the art will recognize that, based on the ideas of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.
Claims
1. An optical coating machine, characterized in that, The optical coating machine (1) includes: A coating stage (11) is provided with a glass changing mechanism (111) and a first through hole (112) corresponding to the glass changing mechanism (111) and a second through hole (113) for mounting glass substrates. The glass changing mechanism (111) includes a chassis (a) and a plurality of monitoring plates disposed on the chassis (a). The chassis (a) has a rotating shaft. The monitoring plates are used to monitor the coating process of a single refractive index material. A coating gun assembly (12) and a light source (13) are located on one side of the coating stage (11). The coating gun assembly (12) is used to coat the glass substrate and the monitoring sheet, and the light source (13) is used to irradiate the monitoring sheet through the first through hole (112). The detection module (14) and control module (15) are located on the other side of the coating stage (11). The detection module (14) is used to detect the emission spectrum of the monitoring film. The control module (15) is used to obtain the current position of the target monitoring film. If the current position of the target monitoring film is different from the position of the first through hole (112), the target monitoring film is moved to the first through hole (112) by the rotating shaft, and the coating thickness of the coating gun assembly (12) is controlled based on the emission spectrum of the target monitoring film.
2. The optical coating machine according to claim 1, characterized in that, The coating stage (11) is also provided with a third through hole (114) for passing reference light. The third through hole (114) is adjacent to the first through hole (112), and the reference light is formed by the light source (13).
3. The optical coating machine according to claim 2, characterized in that, The control module (15) includes a controller (151) and a motor unit (152) and a cylinder unit (153) connected to the controller (151). The motor unit (152) is used to control the rotation of the coating stage (11), and the cylinder unit (153) is used to control the rotation of the wafer changing mechanism (111). The controller (151) is used to determine the coding position of the motor unit (152), the cylinder descent position and the cylinder ascent position of the cylinder unit (153) based on the position of the reference light at the start of coating, and to record the number of times the cylinder completes descent or ascent during the coating process, and to determine the current position of the target monitoring piece based on the number of times the cylinder completes descent or ascent.
4. The optical coating machine according to claim 1, characterized in that, The film changing mechanism (111) further includes a shielding plate (b) and a toggle (c) sleeved on the rotating shaft. The shielding plate (b) has a window for exposing the monitoring film, and the toggle (c) is used to drive the chassis (a) to rotate.
5. The optical coating machine according to any one of claims 1 to 4, characterized in that, The coating stage (11) is a platform or a curved stage.
6. The optical coating machine according to claim 5, characterized in that, The detection module (14) includes a monochromator (141) that receives the emitted light from the monitoring chip using a light-guiding optical fiber, and a photodetector (142) and a data processor (143) connected in sequence to the monochromator (141). The data processor (143) is used to output the emitted spectrum of the monitoring chip.
7. The optical coating machine according to claim 5, characterized in that, The optical coating machine (1) also includes a vacuum chamber (16), the coating stage (11), the coating gun assembly (12) and the light source (13) are located inside the vacuum chamber (16), and the detection module (14) and the control module (15) are located outside the vacuum chamber (16).
8. A coating control method, characterized in that, The coating control method is used in the control module of the optical coating machine according to any one of claims 1 to 7, and the coating control method includes: Obtain the current location of the target surveillance video; If the current position of the target monitoring piece is different from the position of the first through hole on the coating stage, the target monitoring piece is moved to the first through hole using the rotation axis of the chassis, and the coating thickness of the coating gun assembly is controlled based on the emission spectrum of the target monitoring piece.
9. The coating control method according to claim 8, characterized in that, The control of the coating thickness of the coating gun assembly based on the emission spectrum of the target monitoring film includes: Calculate the first difference between two adjacent actual extreme transmittance values in the emitted spectrum of the target monitoring film; Based on the second difference between two adjacent theoretical extreme transmittance values, the third difference between the theoretical stopping point transmittance and the previous theoretical extreme transmittance value, and the first difference, calculate the fourth difference between the actual stopping point transmittance and the previous actual extreme transmittance value. The actual stop point transmittance is obtained based on the fourth difference and the previous actual extreme transmittance. When the real-time transmittance in the emission spectrum of the target monitoring film is the actual stop point transmittance, the coating gun assembly is controlled to stop coating the current film layer.
10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores one or more programs, which can be executed by one or more processors to implement the steps of the coating control method according to any one of claims 8 to 9.