Line edge bin photoresist management system

Abstract

The invention relates to a line edge bin photoresist management system. The line edge bin photoresist management system can obtain the unique code corresponding to the pre-packaged photoresist entering the line edge bin, set photoresist related parameters corresponding to the entering photoresist of different material types, and output real-time data after the photoresist entering the warehouse, so that checking, management and data analysis are facilitated, and the management efficiency is improved. For example, the ice-withdrawing state and the validity period state of the warehouse-in photoresist can be monitored, the situations that the photoresist without ice-withdrawing is put out of the warehouse and the expired photoresist is used are avoided, and when a machine platform end sends out photoresist pipeline empty information, the line side warehouse photoresist management system can screen out available photoresist which is subjected to ice-withdrawing and is not expired from the warehouse-in photoresist, so that the line side warehouse photoresist management system can be used for managing the warehouse-in photoresist. And one pre-packaged photoresist which needs to be delivered to a machine is recommended by utilizing the same production batch priority and first-in first-out rules, so that compared with the photoresist which is manually selected and used for replacement, the photoresist replacement accuracy can be improved, the possibility of wrong replacement can be reduced, and clamping control is facilitated.

Description

Technical Field

[0001] This invention relates to the field of warehousing, and more particularly to a line-side warehouse photoresist management system. Background Technology

[0002] Photoresist is a crucial material in semiconductor manufacturing. With the advancement of semiconductor process technology, the types of photoresist and the recipes using photoresist have surged. Line-side warehouses need to efficiently store and categorize different photoresists to ensure a rapid and accurate supply to the corresponding lithography machines, avoiding material mixing or downtime.

[0003] Currently, there are the following issues in the control of optical resist in line-side warehouses:

[0004] Firstly, the entry and exit of photoresist are usually recorded manually using Excel spreadsheets, which may lead to errors or omissions in the data entry. Furthermore, the entry time is usually written manually on the photoresist bottle, resulting in inaccurate and incomplete information about the photoresist. This makes it difficult to view and manage the photoresist information and may cause errors in the photoresist being issued and installed (such as photoresist that has not been de-iced being issued and installed).

[0005] Secondly, currently, the only way to alert the machine to the absence of photoresist after it leaves the warehouse and is put into operation is through a machine-level alert ("absence alert" means that the amount of photoresist in the specific pipeline connected to the machine is lower than the safe value and needs to be replaced). The validity period of the photoresist cannot be controlled, which may lead to the situation where expired photoresist is still used in production. Moreover, when replacing the photoresist after the machine-level alert, it is still done manually, which may result in the possibility of incorrect replacement and makes control difficult. Summary of the Invention

[0006] This invention provides a line-side warehouse photoresist management system, which can obtain photoresist information of incoming line-side warehouses according to rules and set relevant de-icing information and validity period, making it convenient for viewing, management and data analysis. It can also recommend suitable photoresist for replacement when the machine reports that the photoresist is empty, which can reduce the possibility of incorrect replacement and facilitate control.

[0007] The line-side warehouse photoresist management system provided by this invention includes:

[0008] The warehousing module is used to obtain the unique code corresponding to each pre-packaged photoresist in the warehousing line side warehouse. The code includes the material type identification number, production batch and packaging number corresponding to each pre-packaged photoresist.

[0009] The parameter setting module is used to set the photoresist-related parameters for different material types of photoresist entering the warehouse. The photoresist-related parameters include the time required for de-icing, the shelf life after de-icing, and the shelf life after loading the machine.

[0010] The photoresist management module is used to output real-time data after the photoresist is received, based on the code of the received photoresist, the photoresist-related parameters, and the corresponding outbound information. The real-time data includes the de-icing start time, the current de-icing status obtained based on the de-icing start time and the required de-icing time, the expiration time obtained based on the de-icing validity period, and the expiration time obtained based on the validity period after installation.

[0011] The photoresist replacement module is used to obtain the photoresist pipeline empty information at the machine end, and to select usable photoresists that have been de-iced and have not expired from the photoresists in the warehouse of the inbound line. It also recommends a pre-packaged photoresist that needs to be sent out for machine use based on the priority of the same production batch and the first-in-first-out rule.

[0012] Optionally, the code obtained by the warehousing module may also include the production date of each pre-packaged photoresist in the warehousing line side warehouse, the photoresist-related parameters may also include the product expiration date, and the real-time data may also include the remaining expiration date of the product based on the product expiration date.

[0013] Optionally, the photoresist-related parameters may also include at least one of the following: viscosity, manufacturer, storage temperature, and process category for the pre-packaged photoresist of different material types.

[0014] Optionally, the line-side warehouse photoresist management system further includes:

[0015] The storage area management module is used to classify the photoresist storage areas in the line-side warehouse based on whether the photoresist has been de-iced and / or its different uses.

[0016] Optionally, the photoresist replacement module includes:

[0017] A pipeline photoresist association unit is used for a first binding relationship between the photoresist pipeline at the machine end and the material type of the photoresist in the warehouse, and a second binding relationship between the photoresist pipeline at the machine end and the production batch of the photoresist in the warehouse.

[0018] A photoresist recommendation unit is configured to obtain the pre-packaged photoresist to be recommended based on a photoresist recommendation logic, wherein the photoresist recommendation logic includes:

[0019] Determine whether the photoresist pipeline involved in the photoresist pipeline emptying information has a corresponding first binding relationship with the material type of the pre-packaged photoresist in the line-side warehouse. If not, end the photoresist recommendation logic; if so, use the first binding relationship to obtain the specified material type bound to the pipeline of the photoresist to be replaced; and

[0020] If the machine photoresist pipeline involved in the photoresist pipeline empty information has a corresponding second binding relationship with the production batch of the pre-packaged photoresist of the specified material type, then the second binding relationship is used to obtain the specified production batch bound to the pipeline of the photoresist to be replaced. Furthermore, it is determined whether the photoresist of the specified material type and the specified production batch has been de-iced and is not expired, so as to obtain information on pre-packaged photoresist that has been de-iced, is not expired, and has the specified material type and the specified production batch, and to make recommendations. If it is determined that there is no second binding relationship or the photoresist of the specified production batch has not been de-iced or has expired, information on other pre-packaged photoresist of the specified material type that has been de-iced, is not expired, and is made recommendations according to the first-in, first-out principle.

[0021] Optionally, the photoresist replacement module includes:

[0022] The outbound confirmation unit is used to, after recommending a pre-packaged photoresist to be outbound for machine installation, obtain the coding information of the pre-packaged photoresist to be outbound and determine whether it matches the coding of the recommended pre-packaged photoresist; it also obtains the information of the photoresist pipeline at the machine end and determines whether it matches the empty information of the photoresist pipeline; only when the determination results are both yes, is the photoresist allowed to be outbound; and / or,

[0023] The photoresist replacement confirmation unit is used to obtain confirmation information from at least one relevant worker after the recommended pre-packaged photoresist is released from the warehouse, in order to confirm that the photoresist replacement process for the photoresist pipeline empty information is completed.

[0024] Optionally, the parameter setting module is also used to set the safety stock of the pre-packaged photoresist of different material types in the line-side warehouse; the photoresist management module also outputs the quantity of pre-packaged photoresist of different material types to be claimed, wherein the quantity to be claimed is the difference between the safety stock and the current stock of the pre-packaged photoresist of the corresponding material type.

[0025] Optionally, the line-side warehouse photoresist management system is integrated with the MES system.

[0026] On the other hand, the present invention provides a line-side warehouse photoresist management system, which includes a processor and a memory. The memory is configured to store executable instructions of the processor, and when the executable instructions are executed by the processor, the following method is performed:

[0027] Obtain a unique code for each pre-packaged photoresist in the warehouse side warehouse. The code includes the material type identification number, production batch and packaging number for each pre-packaged photoresist.

[0028] Set the photoresist-related parameters for different material types entering the warehouse. The photoresist-related parameters include the time required for de-icing, the shelf life after de-icing, and the shelf life after loading the machine.

[0029] Based on the encoding of the photoresist upon entry into the warehouse, the photoresist's related parameters, and the corresponding outbound information, real-time data after the photoresist's entry into the warehouse is output. This real-time data includes the de-icing start time, the current de-icing status obtained based on the de-icing start time and the required de-icing time, the expiration time obtained based on the post-de-icing validity period, and the expiration time obtained based on the post-installation validity period; and...

[0030] Obtain the empty information of the photoresist pipeline at the machine end, and select usable photoresists that have been de-iced and have not expired from the photoresists in the warehouse of the inbound line. Then, using the priority of the same production batch and the first-in-first-out rule, recommend a pre-packaged photoresist that needs to be sent out of the warehouse and put into the machine.

[0031] Optionally, before recommending a pre-packaged photoresist to be shipped out and put into operation, a first binding relationship is established between the photoresist pipeline at the machine end and the material type, and a second binding relationship is established between the photoresist pipeline at the machine end and the production batch; the process of selecting usable photoresist that has been de-iced and has not expired from the photoresist in the warehouse at the warehousing line, and recommending a pre-packaged photoresist to be shipped out and put into operation based on the rules of priority for the same production batch and first-in-first-out, includes:

[0032] Determine whether the photoresist pipeline involved in the photoresist pipeline emptying information has a corresponding first binding relationship with the material type of the pre-packaged photoresist in the line-side warehouse. If not, end the photoresist recommendation logic; if so, use the first binding relationship to obtain the specified material type bound to the pipeline of the photoresist to be replaced; and

[0033] If the machine photoresist pipeline involved in the photoresist pipeline empty information has a corresponding second binding relationship with the production batch of the pre-packaged photoresist of the specified material type, then the second binding relationship is used to obtain the specified production batch bound to the pipeline of the photoresist to be replaced. Furthermore, it is determined whether the photoresist of the specified material type and the specified production batch has been de-iced and is not expired, so as to obtain information on pre-packaged photoresist that has been de-iced, is not expired, and has the specified material type and the specified production batch, and to make recommendations. If it is determined that there is no second binding relationship or the photoresist of the specified production batch has not been de-iced or has expired, information on other pre-packaged photoresist of the specified material type that has been de-iced, is not expired, and has the specified material type is obtained and recommended according to the first-in, first-out principle.

[0034] Optionally, after recommending a pre-packaged photoresist to be shipped out for use, the method further includes: obtaining the coding information of the pre-packaged photoresist to be shipped out and determining whether it is consistent with the coding of the recommended pre-packaged photoresist; obtaining the information of a photoresist pipeline at the machine end and determining whether it is consistent with the photoresist pipeline empty information; and allowing the photoresist to be shipped out only when the determination results are both yes; and / or, after the recommended pre-packaged photoresist is shipped out, obtaining confirmation information from at least one relevant staff member to confirm that the photoresist replacement process for the photoresist pipeline empty information is completed.

[0035] Optionally, the method further includes: classifying the photoresist storage area in the line-side warehouse based on whether the photoresist has been de-iced and / or its different uses; and / or setting a safety stock of pre-packaged photoresist of different material types in the line-side warehouse, and outputting the pending quantity of pre-packaged photoresist of different material types, wherein the pending quantity is the difference between the safety stock and the current stock of the corresponding material type of pre-packaged photoresist.

[0036] The line-side warehouse photoresist management system provided by this invention can obtain the unique code corresponding to the pre-packaged photoresist (such as bottled photoresist) entering the line-side warehouse, and set photoresist-related parameters corresponding to photoresist of different material types. It outputs real-time data after the photoresist enters the warehouse, which is convenient for viewing, management and data analysis. For example, it can monitor the thawing status and expiration status of the photoresist entering the warehouse, avoiding the situation where unthawed photoresist is sent out and put into the machine or expired photoresist is used. Furthermore, when the machine sends a photoresist pipeline empty information, the line-side warehouse photoresist management system can select a bottled photoresist with a specified number from the photoresist entering the warehouse and recommend it for sending out and putting into the machine. Compared with manually selecting photoresist for replacement, it can improve the accuracy of photoresist replacement, reduce the possibility of replacement error and facilitate control. Attached Figure Description

[0037] Figure 1 This is a schematic diagram of the structure of a line-side warehouse photoresist management system according to an embodiment of the present invention.

[0038] Figure 2 This is a schematic diagram of the coding structure of bottled photoresist in one embodiment of the present invention.

[0039] Figure 3 This is a schematic diagram of the photoresist recommendation logic in one embodiment of the present invention.

[0040] Figure 4 This is a schematic diagram of a method executed by the processor in a line-side warehouse photoresist management system according to an embodiment of the present invention. Detailed Implementation

[0041] The line-side warehouse photoresist management system of the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be understood that the accompanying drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0042] Reference Figure 1 Some embodiments of the present invention relate to a line-side warehouse photoresist management system 100. The line-side warehouse photoresist management system 100 includes an inbound module 110, a parameter setting module 120, a photoresist management module 140, and a photoresist replacement module 150. It may also include a storage area management module 130. This line-side warehouse photoresist management system 100 can be integrated into a manufacturing enterprise's MES (Manufacturing Execution Management) system, for example, through a new client interface developed from the MES system.

[0043] The warehousing module 110 is used to obtain a unique code corresponding to each pre-packaged photoresist in the warehousing line side warehouse. This code includes the material type identification number, production batch number, and packaging number for each pre-packaged photoresist. In the following embodiments, bottled photoresist is used as an example for illustration. It is understood that, depending on the actual needs of the pipeline connecting the photoresist to the machine end, the pre-packaged photoresist can also adopt other packaging forms. In the following text, the pre-packaged photoresist in the warehousing line side warehouse is also referred to as the warehousing photoresist.

[0044] In this embodiment, to obtain information such as the material type and production batch of pre-packaged photoresist in the receiving warehouse for management purposes, bottled photoresist in the receiving warehouse is assigned a unified and unique code. This code includes at least the photoresist's material information, the corresponding bottled photoresist's production information, and the packaging number (e.g., bottle number) for the same material and production information. Upon receiving the photoresist, the code can be scanned manually using a barcode scanner or automatically by a scanning device, allowing the receiving module 110 to obtain the code. After obtaining the code, the receiving module 110 can retrieve the information of the corresponding bottled photoresist contained within the code according to the code's structure rules. Using a unified code for receiving management facilitates obtaining more accurate and complete receiving photoresist information, making it easier to view, manage, and analyze the information. The receiving module 110 can store the code of the receiving photoresist and the photoresist information obtained from the code in the MES database.

[0045] As an example, the coding of pre-packaged photoresist in the receiving warehouse includes material type (i.e., photoresist identification code), production date, production batch, and packaging number, and the number of digits for each item can be set according to specific needs. Figure 2 The encoding format of bottled photoresist in one embodiment is shown. (Refer to...) Figure 2The photoresist bottle's code consists of 29 digits. The first 7 digits (the "AAAAAAA" segment) represent the photoresist's material type, identifying the material using a material type identification number (i.e., photoresist identification code), for example, corresponding to the photoresist name provided by the reference manufacturer. The 8th to 15th digits (the "BBBBBBBB" segment) represent the production date in the format of "four-digit year + two-digit month + two-digit day". The 16th to 23rd digits (the "CCCCCCCC" segment) represent the production batch. The 24th to 29th digits (the "DDDDDD" segment) represent the bottle number. For two or more bottles of photoresist with the same photoresist identification code, production date, and production batch number, they can be distinguished by the bottle number, ensuring each bottle of photoresist corresponds to a unique code. It should be noted that... Figure 2 The letters A, B, C, and D in the diagram are only used to indicate different segments of the encoding and do not represent the encoding itself. The encoding may include numbers, letters, and special symbols as needed. Furthermore, the photoresist encoding in this embodiment is not limited to... Figure 2 The format shown can be set according to specific needs in practice. For example, in some embodiments, the production batch is represented by the production date, so the code may not include the production batch number segment; or, if the production batch number already contains the production date information, the code may not include the production date segment.

[0046] In this embodiment of the invention, after obtaining the code of the bottled photoresist, the warehousing module 110 can output the code to the output terminal, such as displaying it on the display interface. Alternatively, it can output information such as the material type (e.g., material type identification number), production date, production batch, and packaging number of the corresponding bottled photoresist obtained according to the coding rules on the display interface, so as to facilitate viewing, management, and data analysis.

[0047] The parameter setting module 120 is used to set the photoresist-related parameters corresponding to different material types of photoresist entering the warehouse. The photoresist-related parameters include the time required for de-icing, the shelf life after de-icing, and the shelf life after installation.

[0048] The material type of the photoresist entering the warehouse can be obtained from the material type identification number in the above-mentioned code, and the photoresist type can be represented by the corresponding material type identification number. The parameter setting module 120 can set the corresponding photoresist-related parameters before or after the photoresist enters the warehouse, according to the material type of the photoresist to be stored in the warehouse. The photoresist-related parameters corresponding to photoresist of different material types can be the same or different.

[0049] Photoresist entering the line-side warehouse needs to undergo a defrosting process before it can be used. In this embodiment of the invention, the photoresist-related parameters include the defrosting time, the shelf life after defrosting, and the shelf life after machine use. The defrosting time refers to the time required for the bottled photoresist of the corresponding material type to defrost from the start of the process at the line-side warehouse until defrosting is complete. The shelf life after defrosting refers to the remaining time before expiration after defrosting. The shelf life after machine use refers to the remaining time before expiration after the bottled photoresist of the corresponding material type is machine-used (machine use refers to the bottled photoresist leaving the line-side warehouse and connecting to the corresponding pipeline at the machine end where the photoresist is used). By setting the defrosting time, the shelf life after defrosting, and the shelf life after machine use, combined with information such as the warehouse entry time, the system can monitor whether each bottle of photoresist in the line-side warehouse has defrosted and whether it has expired, preventing the use of undefrosted photoresist and the use of expired photoresist in production. In some embodiments, the photoresist-related parameters also include the product expiration date, i.e., the time that bottled photoresist of the corresponding material type can be stored in an undried state, calculated from the production date. The product expiration date, the thawing time, the post-thawing expiration date, and the post-installation expiration date can all be used to monitor whether the bottled photoresist corresponding to each number has expired. For example, if the thawing of a bottled photoresist corresponding to a current number is not complete, it is monitored whether it is within the product expiration date. If thawing is complete but it has not been installed, it is monitored whether the bottled photoresist is simultaneously within the post-thawing expiration date and the product expiration date. If either exceeds one, the bottled photoresist corresponding to that number is determined to be expired. If a bottled photoresist corresponding to a number has been installed, it is monitored whether the bottled photoresist is simultaneously within the post-installation expiration date and the product expiration date. If either exceeds one, the bottled photoresist corresponding to that number is determined to be expired.

[0050] In some embodiments, the photoresist-related parameters also include at least one of the following: viscosity, manufacturer, storage temperature, and process category for bottled photoresists of different material types, to facilitate viewing, management, and data analysis. The process category refers to the type of process used for the corresponding bottled photoresist application.

[0051] The quantity of bottled photoresist stored in the line-side warehouse should be maintained at an appropriate level to avoid shortages that could prevent timely machine operation. Furthermore, since the photoresist begins de-icing immediately upon arrival in the line-side warehouse and must be used within a de-icing validity period after completion, the quantity of bottled photoresist in the warehouse should not be excessive. To reasonably control the quantity of bottled photoresist stored in the line-side warehouse, avoiding both excessive and insufficient quantities, and to provide a reference for requesting photoresist replenishment, in some embodiments, the photoresist parameter setting module 120 is also used to set a safety stock level for pre-packaged photoresist of different material types in the line-side warehouse. Based on this safety stock level, operators can promptly request replenishment when the quantity of pre-packaged photoresist of the corresponding material type in the line-side warehouse falls below the safety stock level, and control the replenishment quantity to avoid exceeding the safety stock level.

[0052] Reference Figure 1 In some embodiments, the line-side warehouse photoresist management system 100 further includes a storage area management module 130. The storage area management module 130 is used to classify the photoresist storage areas within the line-side warehouse according to whether the incoming photoresist has been de-iced and / or its intended use, so that each photoresist storage area stores photoresist in a corresponding de-iced state or for a specific purpose. As an example, the line-side warehouse has multiple photoresist cabinets, each of which may include one or more layers of photoresist storage areas. As needed, the photoresist cabinets or different layers within them can be classified, and the types of photoresist stored in each cabinet or layer can be set. For example, photoresist before de-icing can be placed in a designated photoresist cabinet or a designated layer within a photoresist cabinet; photoresist used for testing can be placed in a designated photoresist cabinet or a designated layer within a photoresist cabinet; and de-iced photoresist used for production can be placed in a designated photoresist cabinet or a designated layer within a photoresist cabinet.

[0053] The photoresist management module 140 is used to output real-time data after the photoresist is put into storage, based on the above-mentioned code of the photoresist, the photoresist-related parameters and the corresponding outbound information. The real-time data includes the de-icing start time, the current de-icing status obtained based on the de-icing start time and the de-icing time required, the expiration time obtained based on the validity period after de-icing, and the expiration time obtained based on the validity period after installation.

[0054] The de-icing start time is, for example, the time when the bottled photoresist is scanned and enters the line-side warehouse (i.e., the warehousing time). The time when the warehousing module 110 obtains the code of the corresponding bottled photoresist can be used as the de-icing start time.

[0055] The current thawing status may include thawing in progress or thawing completed. To obtain the current thawing status, the time can be counted from the thawing start time. If the required thawing time has not been reached, the current thawing status is thawing in progress. If the required thawing time has been reached, the current thawing status is thawing completed.

[0056] The expiration time obtained based on the de-icing shelf life can be obtained by adding the de-icing shelf life to the corresponding coded de-icing time of the bottled photoresist. This expiration time can be represented by a date, for example.

[0057] The expiration time obtained based on the validity period after installation can be obtained by adding the validity period after installation to the corresponding coded time of completion of the bottled photoresist installation. This expiration time can be represented by a date, for example.

[0058] In some embodiments, the real-time data for the photoresist in storage may also include the remaining shelf life of the product based on the aforementioned product expiration date. The remaining shelf life can be obtained by calculating the elapsed time from the production date of the bottled photoresist and subtracting the elapsed time from the product expiration date. Based on the expiration time and remaining shelf life output by the photoresist management module 140, it is convenient to check whether the photoresist has expired after being stored. When the real-time data indicates that a bottled photoresist with a specific code has expired, staff can take timely action, reducing the risk of expired photoresist being used.

[0059] In some embodiments, the photoresist management module 140 can also output the quantity of pre-packaged photoresists of different material types to be collected, so as to facilitate the replenishment of photoresists in the line-side warehouse by staff. The quantity of pre-packaged photoresists to be collected for each material type is the difference between the safe stock and the current stock of the corresponding material type of pre-packaged photoresists in the line-side warehouse.

[0060] The line-side warehouse photoresist management system 100 can acquire information from the machine end (such as the machine's EAP system). When a photoresist is missing from the pipeline connecting the machine to the photoresist, the machine will issue a photoresist pipeline empty report. The photoresist replacement module 150 is used to acquire the photoresist pipeline empty report from the machine end, and select usable photoresists that have been de-iced and have not expired from the photoresists in the line-side warehouse. Utilizing the priority of the same production batch and the first-in-first-out rule, it recommends a pre-packaged photoresist (only one pre-packaged photoresist with the corresponding number is recommended) that needs to be issued for machine use, in order to replenish the photoresist in the machine's photoresist pipeline involved in the empty report. Using the photoresist replacement module 150 to recommend photoresist for issuance and machine use is more efficient, more accurate, and easier to control than manually selecting and replacing photoresists in the machine's pipeline.

[0061] The line-side warehouse photoresist management system 100 is associated with machines and the piping of each machine, each with a corresponding name or number. In this embodiment of the invention, the line-side warehouse photoresist management system 100 can associate the material type of the photoresist in the line-side warehouse with the piping of the machine using the photoresist, so that when the photoresist in a specified machine's piping needs to be replaced, bottled photoresist from the associated line-side warehouse can be recommended. For example... Figure 1 As shown, as an example, the photoresist replacement module 150 may include a pipeline photoresist association unit 151, which is used to set a first binding relationship between the machine-end photoresist pipeline and the material type of the received photoresist, and a second binding relationship between the machine-end photoresist pipeline and the production batch of the received photoresist. The photoresist replacement module 150 may also include a photoresist recommendation unit 152, which is used to obtain a recommended pre-packaged photoresist according to a photoresist recommendation logic.

[0062] Figure 3The photoresist recommendation logic in one embodiment is shown. (Refer to...) Figure 3 As an example, the photoresist recommendation logic includes the following process:

[0063] First, determine whether the material type of the machine photoresist pipeline involved in the photoresist pipeline empty information has a corresponding first binding relationship with the pre-packaged photoresist (i.e. bottled photoresist) in the line-side warehouse. If not, end the photoresist recommendation logic. If yes, use the first binding relationship to obtain the specified material type bound to the pipeline of the photoresist to be replaced.

[0064] Next, it is determined whether the machine photoresist pipeline involved in the photoresist pipeline empty information has a corresponding second binding relationship with the production batch of the pre-packaged photoresist (i.e., bottled photoresist) of the specified material type. If so, the specified production batch bound to the pipeline of the photoresist to be replaced is obtained using the second binding relationship, and it is further determined whether the photoresist of the specified material type and the specified production batch has been de-iced and has not expired, so as to obtain information on pre-packaged photoresist that has been de-iced, has not expired and has the specified material type and the specified production batch and make recommendations. If it is determined that there is no second binding relationship or the photoresist of the specified production batch has not been de-iced or has expired, information on other pre-packaged photoresist that has been de-iced, has not expired and has the specified material type is obtained and recommended according to the first-in-first-out principle.

[0065] In the above photoresist recommendation logic, when there is only one pre-packaged photoresist that meets the requirements of being de-iced, not expired, and having the specified material type and production batch, the information of that pre-packaged photoresist is output. When there are more than one pre-packaged photoresist that meets the requirements of being de-iced, not expired, and having the specified material type and production batch, the pre-packaged photoresist that was received earliest is selected based on the warehousing time and the corresponding information is output. In addition, when obtaining information on other pre-packaged photoresists that are de-iced, not expired, and have the specified material type, if there is more than one pre-packaged photoresist that meets the requirements, the pre-packaged photoresist that was received earliest is selected based on the warehousing time and the corresponding information is output. That is, the first-in-first-out principle is used to select a pre-packaged photoresist corresponding to a code and recommend it for shipment and installation.

[0066] It should be noted that the above photoresist recommendation logic is only an example, and the photoresist recommendation unit 152 may also adopt a different photoresist recommendation logic.

[0067] To avoid errors in the bottled photoresist during actual shipment and errors in the machine piping when replacing photoresist, please refer to... Figure 1The photoresist replacement module 150 may include an outbound confirmation unit 153. The outbound confirmation unit 153 is used to, after recommending a pre-packaged photoresist to be outbound, obtain the coding information of the pre-packaged photoresist to be outbound and determine whether it matches the coding of the recommended pre-packaged photoresist. It also obtains information about the photoresist pipeline at the machine end and determines whether it matches the photoresist pipeline's empty information. If both determinations are correct, it indicates that the pre-packaged photoresist to be outbound and the machine end photoresist pipeline of the photoresist to be replaced are correct, and only then is the photoresist outbound allowed. Otherwise, the photoresist outbound process cannot be completed; for example, the system interface will not continue to redirect, thus preventing the photoresist replacement process from being completed. Furthermore, to confirm whether the photoresist replacement is complete, the photoresist replacement module 150 may also include a photoresist replacement confirmation unit 154. The photoresist replacement confirmation unit 154 is used to, after the recommended pre-packaged photoresist is outbound, obtain confirmation information from at least one relevant worker (e.g., two relevant workers) to confirm that the photoresist replacement process for the photoresist pipeline's empty information is complete.

[0068] In this embodiment, the information on photoresist entering the warehouse, de-icing, leaving the warehouse, emptying, and machine operation (such as machine ID and pipeline number) as well as the information of relevant personnel can be stored in a designated location in the system (such as as an operation log stored in the MES database) for easy viewing.

[0069] The line-side warehouse photoresist management system 100 of this invention may include multiple computers, hardware, or devices interconnected via network communication, or may include a single computer, hardware, or device implementing this invention. The computer may include a central processing unit (CPU), memory, and input / output components, etc., and the input / output components may include a keyboard, mouse, touchscreen, or display, etc. As used herein, "module" or "unit" generally refers to components of this invention, such as logically separable software (computer program), hardware, or equivalent components. For example, the aforementioned warehousing module 110, parameter setting module 120, storage area management module 130, photoresist management module 140, and photoresist replacement module 150 may be combined into one module, or any one of these modules may be split into multiple modules, or at least some of the functions of one or more of these modules may be combined with at least some of the functions of other modules and implemented in one module. According to embodiments of the invention, at least one of the modules is generally implemented in conjunction with hardware using software programs; however, all or part of them may also be implemented using electronic hardware or software programs. Whether implemented in software or hardware, certain parts can be carried out by personnel familiar with the fields of electronics and software; therefore, the details will not be elaborated in this manual.

[0070] Other embodiments of the present invention also relate to a line-side warehouse photoresist management system. The line-side warehouse photoresist management system can be integrated into a manufacturing enterprise's MES (Manufacturing Execution Management) system, for example, implemented through a new client interface developed from the MES system. In these other embodiments, the line-side warehouse photoresist management system includes a processor and a memory, the memory being configured to store executable instructions of the processor, which, when executed by the processor, perform actions such as... Figure 4 The method is illustrated. The memory may include a hard disk, random access memory (RAM), read-only memory (ROM), external storage medium, storage device via communication lines, and registers, etc.

[0071] Reference Figure 4 The method executed by the processor of the line-side warehouse photoresist management system includes:

[0072] Step S1: Obtain the unique code corresponding to each pre-packaged photoresist in the warehouse of the inbound line. The code includes the material type identification number, production batch and packaging number corresponding to each pre-packaged photoresist.

[0073] Step S2: Set the photoresist-related parameters for different material types of photoresist, including the time required for de-icing, the shelf life after de-icing, and the shelf life after installation.

[0074] Step S3: Based on the code of the photoresist entering the warehouse, the photoresist-related parameters, and the corresponding outbound information, output the real-time data after the photoresist enters the warehouse. The real-time data includes the de-icing start time, the current de-icing status obtained based on the de-icing start time and the de-icing time required, the expiration time obtained based on the validity period after de-icing, and the expiration time obtained based on the validity period after installation.

[0075] Step S4: Obtain the empty information of the photoresist pipeline at the machine end, and select usable photoresist that has been de-iced and has not expired from the photoresist in the warehouse of the inbound line. Then, using the priority of the same production batch and the first-in-first-out rule, recommend a pre-packaged photoresist that needs to be sent out of the warehouse and put into the machine.

[0076] In some embodiments, the method may further include: classifying the photoresist storage area in the line-side warehouse based on whether the photoresist has been de-iced and / or its different uses; and / or setting a safety stock of pre-packaged photoresist of different material types in the line-side warehouse, and outputting the pending quantity of pre-packaged photoresist of different material types, wherein the pending quantity is the difference between the safety stock and the current stock of the pre-packaged photoresist of the corresponding material type.

[0077] Optionally, before recommending a pre-packaged photoresist that needs to be shipped out and put into operation, a first binding relationship is set between the photoresist pipeline at the machine end and the aforementioned material type, and a second binding relationship is set between the photoresist pipeline at the machine end and the photoresist production batch. To recommend the photoresist that needs to be shipped out and put into operation, step S4 above may include the following photoresist recommendation logic: First, determine whether the machine photoresist pipeline involved in the photoresist pipeline empty information has a corresponding first binding relationship with the material type of the pre-packaged photoresist in the line-side warehouse. If not, end the photoresist recommendation logic; if yes, use the first binding relationship to obtain the specified material type bound to the pipeline of the photoresist to be replaced; then, determine whether the machine photoresist pipeline involved in the photoresist pipeline empty information has a corresponding second binding relationship with the production batch of the pre-packaged photoresist of the specified material type. If yes... Then, the second binding relationship is used to obtain the designated production batch bound to the pipeline of the photoresist to be replaced, and it is further determined whether the photoresist of the designated material type and the designated production batch has been de-iced and has not expired, so as to obtain information on pre-packaged photoresist that has been de-iced, has not expired and has the designated material type and the designated production batch and make recommendations. If it is determined that there is no second binding relationship or the photoresist of the designated production batch has not been de-iced or has expired, information on other pre-packaged photoresist that has been de-iced, has not expired and has the designated material type is obtained and recommended according to the first-in-first-out principle.

[0078] In the above photoresist recommendation logic, when there is only one pre-packaged photoresist that meets the requirements of being de-iced, not expired, and having the specified material type and production batch, the information of that pre-packaged photoresist is output. When there are more than one pre-packaged photoresist that meets the requirements of being de-iced, not expired, and having the specified material type and production batch, the pre-packaged photoresist that was received earliest is selected based on the warehousing time and the corresponding information is output. In addition, when obtaining information on other pre-packaged photoresists that are de-iced, not expired, and have the specified material type, if there are more than one pre-packaged photoresist that meets the requirements, the pre-packaged photoresist that was received earliest is selected based on the warehousing time and the corresponding information is output. That is, the first-in-first-out principle is used to select a pre-packaged photoresist corresponding to a code and recommend it for shipment.

[0079] In some embodiments, after recommending a pre-packaged photoresist to be shipped out for use, the method may further include the following steps: obtaining the coding information of the pre-packaged photoresist to be shipped out and determining whether it is consistent with the coding of the recommended pre-packaged photoresist; also obtaining the information of a photoresist pipeline at the machine end and determining whether it is consistent with the photoresist pipeline empty information; only when the determination results are both yes, is the photoresist allowed to be shipped out; and / or, after the recommended pre-packaged photoresist is shipped out, obtaining confirmation information from at least one relevant staff member to confirm that the photoresist replacement process for the photoresist pipeline empty information is completed.

[0080] The steps in the method executed by the processor described above correspond to the various modules and units of the line-side warehouse photoresist management system 100 in the above embodiments. This involves obtaining the unique code corresponding to the pre-packaged photoresist (such as bottled photoresist) entering the line-side warehouse, setting photoresist-related parameters for photoresist of different material types, outputting real-time data after photoresist is stored, and recommending a pre-packaged photoresist that needs to be released when the machine reports an empty photoresist. The method can be understood with reference to the description of the line-side warehouse material management system 100 in the foregoing embodiments.

[0081] Using the line-side warehouse photoresist management system described in the above embodiments, more detailed information about each pre-packaged photoresist entering the line-side warehouse can be obtained according to the coding rules. It can set photoresist-related parameters corresponding to pre-packaged photoresists of different material types and monitor the de-icing status and expiration date of the entering photoresists, facilitating viewing, management, and data analysis. This prevents un-de-iced photoresists from being released and used, and avoids the use of expired photoresists. Furthermore, when a photoresist pipeline malfunctions at the machine end, the line-side warehouse photoresist management system can filter out usable photoresists that have been de-iced and are not expired. Utilizing the priority and first-in-first-out rules of the same production batch, it recommends a pre-packaged photoresist that needs to be released and used. Compared to manually selecting photoresists for replacement, this reduces the possibility of incorrect replacement and facilitates control.

[0082] The description of the preferred embodiments of the present invention is not intended to limit the scope of the invention. Any person skilled in the art can make possible changes and modifications to the technical solutions of the present invention by utilizing the methods and techniques disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall fall within the protection scope of the technical solutions of the present invention.

Claims

1. A line-edge-bin photoresist management system, characterized by, The application comprises: a storage module for obtaining a unique code corresponding to each pre-packaged photoresist in a storage line-side warehouse, the code comprising a material type identification number, a production batch number and a package number corresponding to each pre-packaged photoresist; a parameter setting module for setting photoresist-related parameters corresponding to photoresists of different material types, the photoresist-related parameters comprising a required ice melting time, a post-ice melting validity period and a post-machine use validity period; a photoresist management module for outputting real-time data of photoresist storage based on the code of the storage photoresist, the photoresist-related parameters and corresponding delivery information, the real-time data comprising an ice melting start time, a current ice melting state based on the ice melting start time and the required ice melting time, an expiration time based on the post-ice melting validity period and an expiration time based on the post-machine use validity period; and a photoresist replacement module for obtaining photoresist pipeline empty information at a machine end, screening available photoresists that have been ice melted and are not expired from the photoresists in the storage line-side warehouse, and recommending a pre-packaged photoresist that needs to be delivered and used on a machine by using the same production batch priority and first-in-first-out rules. The code obtained by the storage module further comprises a production date of each pre-packaged photoresist in the storage line-side warehouse, the photoresist-related parameters further comprise a product validity period, and the real-time data further comprise a product remaining validity period based on the product validity period.

2. The in-line pod photoresist management system of claim 1, wherein, The photoresist-related parameters further comprise at least one of viscosity, manufacturer, storage temperature and process category of the pre-packaged photoresist corresponding to different material types.

3. The in-line pod photoresist management system of claim 1, wherein, The application further comprises:

4. The in-line pod photoresist management system of claim 1, wherein, a storage area management module for classifying photoresist storage areas in the line-side warehouse based on whether the storage photoresist is ice melted and / or has different uses. The photoresist replacement module comprises:

5. The in-line pod photoresist management system of claim 1, wherein, a pipeline photoresist association unit for setting a first binding relationship between a machine end photoresist pipeline and the material type of the storage photoresist and a second binding relationship between the machine end photoresist pipeline and the production batch number of the storage photoresist; a photoresist recommendation unit for obtaining the pre-packaged photoresist to be recommended according to a photoresist recommendation logic, the photoresist recommendation logic comprising: judging whether a machine photoresist pipeline involved in the photoresist pipeline empty information has a corresponding first binding relationship with the material type of the pre-packaged photoresist in the line-side warehouse, if not, ending the photoresist recommendation logic, and if yes, obtaining a specified material type bound to the pipeline of the photoresist to be replaced by using the first binding relationship; and ​ The judgment of whether the machine photoresist pipeline involved in the photoresist pipeline empty report information has a corresponding second binding relationship with the production batch of the pre-packaged photoresist of the specified material type, if yes, the specified production batch bound with the pipeline of the photoresist to be replaced is obtained by using the second binding relationship, and further judgment is made on whether the photoresist of the specified production batch has been de-iced and is not expired, to obtain the information of the pre-packaged photoresist of the specified material type and the specified production batch which has been de-iced, is not expired and has the second binding relationship, and make a recommendation, if it is judged that there is no second binding relationship or the photoresist of the specified production batch has not been de-iced or is expired, the information of the pre-packaged photoresist of other production batches which has been de-iced, is not expired and has the specified material type is obtained and a recommendation is made according to the first-in-first-out principle.

6. The in-line pod photoresist management system of claim 1, wherein, The photoresist replacement module comprises: An out-of-warehouse confirmation unit, configured to, after recommending one pre-packaged photoresist to be taken out of the warehouse, obtain the code information of the pre-packaged photoresist to be taken out of the warehouse and judge whether it is consistent with the code of the recommended pre-packaged photoresist, and further obtain the information of a machine-end photoresist pipeline and judge whether it is consistent with the photoresist pipeline empty report information, and only when the judgment results are both yes, the photoresist is allowed to be taken out of the warehouse; and / or A photoresist replacement confirmation unit, configured to, after the recommended pre-packaged photoresist is taken out of the warehouse, obtain confirmation information from at least one relevant staff to confirm that the photoresist replacement process for the photoresist pipeline empty report information is completed.

7. The in-line pod photoresist management system of claim 1, wherein, The parameter setting module is further configured to set the safe inventory of the pre-packaged photoresist of different material types in the line-side warehouse; and the photoresist management module further outputs the number of pre-packaged photoresists of different material types to be taken, which is the difference between the safe inventory and the current inventory of the pre-packaged photoresist of the corresponding material type.

8. The in-line pod photoresist management system of any one of claims 1 to 7, wherein, The line-side warehouse photoresist management system is integrated with the MES system.

9. A line-edge-bin photoresist management system, characterized by, The system comprises a processor and a memory configured to store executable instructions of the processor, and when the executable instructions are executed by the processor, the following method is performed: Obtain the unique code corresponding to each pre-packaged photoresist in the warehouse line-side warehouse, the code including the material type identification number, production batch and packaging number corresponding to each pre-packaged photoresist; Set the photoresist-related parameters corresponding to photoresists of different material types, the photoresist-related parameters including the de-icing time required, the effective period after de-icing and the effective period after machine use; According to the code of the warehouse photoresist, the photoresist-related parameters and the corresponding out-of-warehouse information, output the real-time data of the photoresist after being taken into the warehouse, the real-time data including the de-icing start time, the current de-icing state based on the de-icing start time and the de-icing time required, the expiration time based on the effective period after de-icing and the expiration time based on the effective period after machine use; And Obtain the photoresist pipeline empty report information of the machine end, and from the photoresists in the warehouse line-side warehouse, screen out the available photoresists which have been de-iced and are not expired, and recommend one pre-packaged photoresist to be taken out of the warehouse according to the same production batch priority and the first-in-first-out rule.

10. The in-line pod photoresist management system of claim 9, wherein, Before recommending a pre-packaged photoresist to be taken out of the warehouse for machine use, a first binding relationship between a machine-end photoresist pipeline and a material type and a second binding relationship between the machine-end photoresist pipeline and a production batch are set; the usable photoresist that has been thawed and is not expired is screened out from the photoresist in the warehouse-in line side warehouse, and a pre-packaged photoresist to be taken out of the warehouse for machine use is recommended by using the same production batch priority and first-in-first-out rule, which includes: determining whether the machine photoresist pipeline involved in the photoresist pipeline empty information has a corresponding first binding relationship with the material type of the pre-packaged photoresist in the line side warehouse, if not, ending the photoresist recommendation logic, if yes, using the first binding relationship to obtain a specified material type bound to the pipeline of the photoresist to be replaced; and determining whether the machine photoresist pipeline involved in the photoresist pipeline empty information has a corresponding second binding relationship with the production batch of the pre-packaged photoresist of the specified material type, if yes, using the second binding relationship to obtain a specified production batch bound to the pipeline of the photoresist to be replaced, and further determining whether the photoresist of the specified material type and the specified production batch has been thawed and is not expired, to obtain information of the pre-packaged photoresist that has been thawed, is not expired, has the specified material type and the specified production batch, and is recommended, if it is determined that the second binding relationship is not present or the photoresist of the specified production batch is not thawed or expired, information of the pre-packaged photoresist that has been thawed, is not expired, has the specified material type and other production batches is obtained and recommended according to the first-in-first-out principle.

11. The in-line pod photoresist management system of claim 9, wherein, After recommending a pre-packaged photoresist to be taken out of the warehouse for machine use, the method further includes: obtaining the code information of the pre-packaged photoresist to be taken out of the warehouse and determining whether it is consistent with the code of the recommended pre-packaged photoresist, and further obtaining the information of a machine-end photoresist pipeline and determining whether it is consistent with the photoresist pipeline empty information, when the determination results are both yes, the photoresist is allowed to be taken out of the warehouse; and / or, after the recommended pre-packaged photoresist is taken out of the warehouse, confirmation information from at least one related worker is obtained to confirm that the photoresist replacement process for the photoresist pipeline empty information is completed.

12. The in-line pod photoresist management system of claim 9, wherein, The method further includes: classifying the photoresist storage area in the line side warehouse based on whether the warehouse-in photoresist is thawed and / or has different uses; and / or setting the safe inventory of the pre-packaged photoresist of different material types in the line side warehouse, and outputting the number of pre-packaged photoresists of different material types to be picked up, which is the difference between the safe inventory and the current inventory of the pre-packaged photoresist of the corresponding material type.

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