A material frame conveying device

Abstract

The application discloses a material frame conveying device, which comprises a material basket for conveying silicon wafers, a tool for grabbing and transferring the material basket, a wafer separating and feeding device for conveying the material basket and feeding the silicon wafers, the wafer separating and feeding device comprising a water tank, a feeding mechanism installed in the water tank, a wafer separating mechanism installed in the water tank, a conveying mechanism located at the output end of the wafer separating mechanism, a conveying belt one located at the output end of the conveying mechanism, and a conveying belt two located in the transmission direction of the conveying belt one. Compared with the prior art, the device integrates the feeding mechanism and the conveying device, can realize continuous feeding of full material baskets and continuous unloading of empty material baskets, and can change the conveying direction of the silicon wafers through the transmission switching mechanism, so that the silicon wafers can be conveyed between multiple conveying belt twos, thereby reducing the empty flight time in the production process and effectively improving the conveying efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of silicon wafer conveying production line, and particularly relates to a material frame conveying device. BACKGROUND

[0002] In the production process of single crystal silicon wafers, the silicon wafers contained in the material frame are taken out one by one and loaded into a material basket to complete the wafer insertion operation, and then the full material basket of silicon wafers is transported and conveyed between subsequent processes. However, in the existing silicon wafer production process, the material flow and processing links generally have low automation degree and poor process connection, which is specifically manifested in that the loading and unloading processes are discrete operations, the continuous flow of full material baskets and empty material baskets cannot be realized, a large amount of empty waiting time of equipment is caused, and the overall conveying efficiency is restricted. At the same time, the conveying path of the silicon wafers is single and fixed, and lacks the ability to flexibly switch between different production lines or stations, thereby limiting the flexibility of production. Therefore, it is necessary to design a material frame conveying device to solve the above problems. SUMMARY

[0003] In order to overcome the deficiencies in the prior art, the purpose of the present application is to provide a material frame conveying device.

[0004] The purpose of the present application is achieved by the following technical scheme: a material frame conveying device, comprising a material basket and silicon wafers, the material basket is used for conveying the silicon wafers;

[0005] a tool for grabbing and transporting the material basket;

[0006] a wafer separation and loading device for conveying the material basket and loading the silicon wafers;

[0007] The wafer separation and loading device comprises a water tank, a loading mechanism installed in the water tank, a wafer separation mechanism installed in the water tank, a conveying mechanism located at the output end of the wafer separation mechanism, a conveying belt one located at the output end of the conveying mechanism, a conveying belt two located in the transmission direction of the conveying belt one, and a transmission switching mechanism located in the region between the conveying belt one and the conveying belt two.

[0008] a conveying device located at the output end of the wafer separation and loading device for loading the material basket for wafer insertion;

[0009] a turnover device located at the output end of the conveying device for conveying the material basket.

[0010] According to the material frame conveying device, the material basket is composed of a material frame and block bodies installed on the material frame in a straight line array, the block bodies are provided with a wafer insertion area, and the silicon wafers are inserted into the wafer insertion area.

[0011] According to the material frame conveying device, the feeding mechanism comprises a supporting rail installed on the inner bottom wall of the sink, a conveying chain installed on the inner wall of the sink, a driving assembly for driving the conveying chain, a supporting frame located on the inner wall of the sink, a cylinder I symmetrically installed on both sides of the supporting frame, and a cylinder II symmetrically installed on the sink, wherein the cylinder I is used to drive the supporting frame to lift.

[0012] According to the material frame conveying device, the driving assembly comprises a driving motor I installed on the outer wall of the sink, a driving gear I located on the output end of the driving motor I, a transmission chain installed on the outer wall of the driving gear I, a driven gear I meshed and connected on the other side of the inner wall of the transmission chain, and the driven gear I is installed on the transmission shaft on one side of the conveying chain.

[0013] According to the material frame conveying device, the separating mechanism comprises a pneumatic separating water knife installed in the sink, a driving motor II installed on the outer wall of the sink, a driving gear II located on the output end of the driving motor II, a synchronous belt I meshed and connected on the outer wall of the driving gear II, a driven gear II meshed and connected on the other side of the inner wall of the synchronous belt I, a rotating shaft I installed in the middle of the driven gear II, a driving pulley I installed on the rotating shaft I, a conveying belt III installed on the outer wall of the driving pulley I, a driven pulley I installed on the other side of the inner wall of the conveying belt III, a supporting shaft located in the middle of the driven pulley I, a fixing frame installed on the supporting shaft, and a pneumatic suction cup arranged on the fixing frame.

[0014] According to the material frame conveying device, the fixing frame is provided with a cross rod, the cross rod is symmetrically provided with vertical plates, the vertical plates are fixedly provided with supporting rods, and the outer wall of the supporting rods is rotatably connected with guide rollers.

[0015] According to the material frame conveying device, the conveying mechanism comprises a driving motor III installed on the outer wall of the sink, a driving gear III located on the output end of the driving motor III, a synchronous belt II meshed and connected on the outer wall of the driving gear III, a driven gear III meshed and connected on the other side of the inner wall of the synchronous belt II, and a conveying disc connected with the driven gear III.

[0016] According to the material frame conveying device, the transmission switching mechanism comprises a driving motor four installed on the conveying mechanism, a driving gear four installed on the output end of the driving motor four, a synchronous belt three meshed and connected to the outer wall of the driving gear four, a driven gear four meshed and connected to the inner wall of the other side of the synchronous belt three, a support seat installed on the conveying mechanism, a rotating shaft two installed at the center part of the driven gear four, a conveying table installed at the other end of the rotating shaft two, a plate body installed on one side of the conveying table, a driving motor five installed on the plate body, a driving pulley two located at the output end of the driving motor five, a driven pulley three installed on the conveying table, a driven pulley two installed on the plate body, and a conveying belt four installed on the driving pulley two, the driven pulley three and the driven pulley two.

[0017] According to the material frame conveying device, the conveying device comprises a three-axis gantry electric sliding table module, pneumatic clamping jaws one and two installed on the Z-axis of the three-axis gantry electric sliding table module, and lifting assemblies one and two located below the three-axis gantry electric sliding table module, the pneumatic clamping jaws one and two are used for grabbing the material basket, the lifting assembly one is composed of an electric linear guide rail arranged vertically upward and a supporting plate one installed on the electric linear guide rail, the supporting plate one is used for supporting the material basket, and the electric linear guide rail is used for driving the material basket to lift.

[0018] According to the material frame conveying device, the overturning device is composed of a transmission guide rail, a pneumatic cylinder three installed on the side wall of the transmission guide rail, a connecting rod located at the output end of the pneumatic cylinder three, a shaft body installed at the other end of the connecting rod, a supporting plate two installed on the shaft body, and a fixed plate installed on the transmission guide rail, and the shaft body penetrates through the fixed plate and is rotationally connected with the fixed plate.

[0019] The above-mentioned scheme has the beneficial effects that:

[0020] 1. By arranging the feeding mechanism, the conveying device and the transmission switching mechanism, compared with the prior art, the device integrates the feeding mechanism and the conveying device, can realize continuous feeding of full material baskets and continuous unloading of empty material baskets, and can change the conveying direction of the silicon wafer through the transmission switching mechanism, so that the silicon wafer can be conveyed between multiple conveying belts two, thereby reducing the empty shooting time in the production process and effectively improving the conveying efficiency.

[0021] 2. By arranging the slicing mechanism, the conveying mechanism, the conveying device and the overturning device, compared with the prior art, the device can insert a plug into an empty material basket through the lifting movement of the empty material basket under the cooperation of the lifting assembly one, the lifting assembly two and the conveying belt two, effectively improves the plug efficiency, and after the plug is completed, the conveying device can be used to transfer the plug to the overturning device for conveying, thereby improving the work efficiency.

[0022] Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will become apparent to those skilled in the art upon examination of the following and / or can be learned by practice of the application. BRIEF DESCRIPTION OF DRAWINGS

[0023] The application will be further described below with reference to the drawings and examples.

[0024] Figure 1 It is an overall structure schematic view of a material frame conveying device of the application;

[0025] Figure 2 It is an overall structure schematic view of a piece feeding device of a material frame conveying device of the application;

[0026] Figure 3 It is an overall structure schematic view of a piece feeding device of a material frame conveying device of the application;

[0027] Figure 4 It is a structure schematic view of a conveying table of a material frame conveying device of the application;

[0028] Figure 5 It is a structure schematic view of a conveying belt one of a material frame conveying device of the application;

[0029] Figure 6 It is a structure schematic view of a transmission switching mechanism of a material frame conveying device of the application;

[0030] Figure 7 It is a structure schematic view of a conveying belt two of a material frame conveying device of the application;

[0031] Figure 8 It is a structure schematic view of a material basket of a material frame conveying device of the application;

[0032] Figure 9 It is a structure schematic view of a piece mechanism of a material frame conveying device of the application;

[0033] Figure 10 It is a structure schematic view of a feeding mechanism of a material frame conveying device of the application;

[0034] Figure 11 It is a structure schematic view of a material frame conveying device of the application; Figure 10 It is an enlarged structure schematic view of A in the above figure;

[0035] Figure 12 It is a structure schematic view of a conveying mechanism of a material frame conveying device of the application;

[0036] Figure 13 It is a structure schematic view of a conveying device of a material frame conveying device of the application;

[0037] Figure 14 Fig. 1 is a structural schematic diagram of a lifting assembly one of a material frame conveying device of the present application;

[0038] Figure 15 Fig. 2 is a structural schematic diagram of a tooling of a material frame conveying device of the present application;

[0039] Figure 16 Fig. 3 is a structural schematic diagram of a turnover device of a material frame conveying device of the present application.

[0040] Fig. 4 is a structural schematic diagram of a material frame conveying device of the present application.

[0041] 1, material basket; 101, material frame; 102, block; 103, insert piece area; 2, silicon wafer; 3, tooling; 4, water tank; 5, feeding mechanism; 51, support rail; 52, conveying chain; 53, driving assembly; 531, driving motor one; 532, driving gear one; 533, transmission chain; 534, driven gear one; 54, support bracket; 55, air cylinder one; 56, air cylinder two; 6, piece separating mechanism; 601, pneumatic separating water cutter; 602, driving motor two; 603, driving gear two; 604, synchronous belt one; 605, driven gear two; 606, rotating shaft one; 607, driving pulley one; 608, conveying belt three; 609, driven pulley one; 610, support shaft; 611, fixed frame; 612, pneumatic suction cup; 7, conveying mechanism; 71, driving motor three; 72, driving gear three; 73, synchronous belt two; 74, driven gear three; 75, conveying disc; 8, conveying belt one; 9, conveying belt two; 10, transmission switching mechanism; 1001, driving motor four; 1002, driving gear four; 1003, synchronous belt three; 1004, driven gear four; 1005, support seat; 1006, rotating shaft two; 1007, conveying table; 1008, plate body; 1009, driving motor five; 1010, driving pulley two; 1011, driven pulley three; 1012, driven pulley two; 1013, conveying belt four; 11, conveying device; 111, three-axis gantry electric sliding table module; 112, pneumatic clamping jaw one; 113, pneumatic clamping jaw two; 114, lifting assembly one; 1141, electric linear guide rail; 1142, support plate one; 115, lifting assembly two; 12, turnover device; 121, transmission rail; 122, air cylinder three; 123, connecting rod; 124, shaft body; 125, support plate two; 126, fixed plate; 13, cross bar; 14, vertical plate; 15, support rod; 16, guide roller. DETAILED DESCRIPTION

[0042] The specific embodiments of the present application will be described in detail below, the preferred embodiments of the present application are shown in the drawings, the role of the drawings is to supplement the description of the text part of the description, so that people can intuitively and visually understand each technical feature and the overall technical scheme of the present application, but it cannot be understood as a limitation on the scope of protection of the present application.

[0043] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" and the like can be explicitly or implicitly included one or more. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0044] In the description of the present application, it should be noted that unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between the two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.

[0045] Referring to Figures 1-16 , continuing to refer to Figure 1 and Figure 2 , Figure 1 is a structural schematic diagram of the basket 1, Figure 2 is a structural schematic diagram of the silicon wafer 2, a basket conveying device includes a basket 1 and a silicon wafer 2, the basket 1 is used to convey the silicon wafer 2; the basket 1 has two states, one is the empty basket 1 state when the silicon wafer 2 is not loaded in the basket 1, the other is the full basket 1 state when the silicon wafer 2 is loaded into the basket 1, hereinafter referred to as the empty basket 1 and the full basket 1, which are the manifestations of the two states.

[0046] Continuing to refer to Figure 15 , Figure 15Fig. 3 is a schematic view of the structure of the tool 3, the tool 3 is used for grabbing the transfer basket 1; the tool 3 is composed of a frame body and a hook, the hook is used for hooking the transfer basket 1, the position adjustment driving mode of the tool 3 is the same as that of the pneumatic gripper 112, that is, X, Y and Z three-axis adjustment, and the driving mode is also the same, through the tool 3, the transfer basket 1 can be transferred and conveyed between multiple processes.

[0047] With reference to the above Figure 3 And Figure 7 , Figure 3 Fig. 4 is a schematic view of the structure of the water tank 4, Figure 7 Fig. 9 is a schematic view of the structure of the conveying belt 2, the slicing and feeding device is used for conveying the transfer basket 1 and feeding the silicon wafer 2;

[0048] The slicing and feeding device includes the water tank 4, the feeding mechanism 5 installed in the water tank 4, the slicing mechanism 6 installed in the water tank 4, the conveying mechanism 7 located at the output end of the slicing mechanism 6, the conveying belt 1 8 located at the output end of the conveying mechanism 7, the conveying belt 2 9 located in the conveying direction of the conveying belt 1 8, and the transmission switching mechanism 10 located in the region between the conveying belt 1 8 and the conveying belt 2 9; the water tank 4 is also provided with a filtering device, which can filter the water in the water tank 4, and the water tank 4 can preliminarily clean the silicon wafer 2.

[0049] The conveying device 1 1 is located at the output end of the slicing and feeding device, and is used for feeding the transfer basket 1.

[0050] The overturning device 1 2 is located at the output end of the conveying device 1 1, and is used for conveying the transfer basket 1.

[0051] Further, with reference to the above Figure 8 , Figure 8 Fig. 1 is a schematic view of the structure of the transfer basket 1, the transfer basket 1 is composed of a frame 1 01 and block bodies 1 02 installed on the frame 1 01 in a linear array, and the block bodies 1 02 are provided with a plug-in area 1 03, and the silicon wafer 2 is inserted into the plug-in area 1 03.

[0052] The block bodies 1 02 on the transfer basket 1 are detachable, are limited by connecting shafts, and the frame 1 01 is provided with a limiting plate limiting the positions of the block bodies 1 02, the block bodies 1 02 are split into long bodies and plug-in blocks, the plug-in blocks are inserted into the long bodies and are connected through a latch, the silicon wafer 2 can be fed into the plug-in area 1 03 in a manual plug-in or mechanical automatic plug-in mode, and feeding is realized.

[0053] Further, with reference to the above Figure 10 , Figure 10As a schematic view of the structure of the feeding mechanism 5, the feeding mechanism 5 comprises a support rail 51 mounted on the inner bottom wall of the sink 4, a conveying chain 52 mounted on the inner wall of the sink 4, a driving assembly 53 for driving the conveying chain 52, a supporting bracket 54 located on the inner wall of the sink 4, a cylinder I 55 symmetrically mounted on both sides of the supporting bracket 54, and a cylinder II 56 symmetrically mounted on the sink 4, the cylinder I 55 being used to drive the supporting bracket 54 to ascend and descend.

[0054] Further, with continuous reference to Figure 11 , Figure 11 As a schematic view of the structure of the driving assembly 53, the driving assembly 53 comprises a driving motor I 531 mounted on the outer wall of the sink 4, a driving gear I 532 located at the output end of the driving motor I 531, a transmission chain 533 mounted on the outer wall of the driving gear I 532, and a driven gear I 534 meshed and connected on the other side of the inner wall of the transmission chain 533, the driven gear I 534 being mounted on the transmission shaft on one side of the conveying chain 52.

[0055] The full-basket 1 carrying the silicon wafers 2 is clamped and placed on the conveying chain 52 by the tooling 3, the driving motor I 531 is started to drive the driving gear I 532 to rotate through its output end, the driving gear I 532 rotates to mesh with and drive the transmission chain 533 mounted on its outer wall, the transmission chain 533 drives the driven gear I 534 to rotate, the driven gear I 534 drives the transmission shaft on the inner wall of one side of the conveying chain 52 to rotate, thereby driving the conveying chain 52 to rotate, the conveying chain 52 conveys the full-basket 1 to the wafer separating mechanism 6 for wafer separation, after the silicon wafers 2 on the full-basket 1 are all conveyed by the wafer separating mechanism 6, the full-basket 1 is in an empty-basket 1 state without silicon wafers 2, the empty-basket 1 is conveyed by the conveying chain 52 to the supporting bracket 54, and the tooling 3 clamps and places another full-basket 1 on the conveying chain 52 for conveying, the cylinder I 55 is started to drive the supporting bracket 54 to descend, the supporting bracket 54 drives the empty-basket 1 to descend to the bottom of the sink 4, the cylinder II 56 is started to push the empty-basket 1 to move to one side of the support rail 51 through its output end, the empty-basket 1 on the support rail 51 is clamped to the outside by the tooling 3, the silicon wafers 2 are inserted into the wafer insertion area 103 of the empty-basket 1 by manual or external equipment for feeding, in this way, the full-basket 1 can be continuously fed and the empty-basket 1 can be continuously unloaded, the emptying time is reduced, and the conveying efficiency is improved.

[0056] Further, with continuous reference to Figure 9 , Figure 9As a schematic view of the slicing mechanism 6, the slicing mechanism 6 comprises a pneumatic separation water knife 601 installed inside the water tank 4, a driving motor two 602 installed on the outer wall of the water tank 4, a driving gear two 603 located at the output end of the driving motor two 602, a synchronous belt one 604 meshed and connected to the outer wall of the driving gear two 603, a driven gear two 605 meshed and connected to the inner wall of the other side of the synchronous belt one 604, a rotating shaft one 606 installed in the middle of the driven gear two 605, a driving pulley one 607 installed on the rotating shaft one 606, a conveying belt three 608 installed on the outer wall of the driving pulley one 607, a driven pulley one 609 installed on the inner wall of the other side of the conveying belt three 608, a support shaft 610 located in the middle of the driven pulley one 609, a fixing frame 611 installed on the support shaft 610, and a pneumatic suction cup 612 arranged on the fixing frame 611.

[0057] Further, referring to Figure 9 , the fixing frame 611 is provided with a cross rod 13, the cross rod 13 is symmetrically provided with vertical plates 14, the vertical plates 14 are fixedly provided with support rods 15, and the outer wall of the support rods 15 is rotatably connected with guide rollers 16.

[0058] When the full basket 1 is conveyed to the slicing mechanism 6 by the feeding mechanism 5, the pneumatic separation water knife 601 blows the silicon wafer 2 in the wafer area 103 to change its position, the silicon wafer 2 is adsorbed by the pneumatic suction cup 612, the driving motor two 602 is started to drive the driving gear two 603 to rotate through its output end, the driving gear two 603 drives the synchronous belt one 604 meshed and connected thereto to rotate, the synchronous belt one 604 drives the driven gear two 605 meshed and connected thereto to rotate, the driven gear two 605 drives the driving pulley one 607 through the rotating shaft one 606 in the middle thereof to rotate, the driving pulley one 607 drives the conveying belt three 608 to rotate, the conveying belt three 608 drives the driven pulley one 609 to rotate, and the silicon wafer 2 is driven to move upward by the conveying belt three 608, under the action of the guide rollers 16, the silicon wafer 2 can be prevented from falling and can be guided, so that the single silicon wafer 2 is conveyed to the conveying disc 75 for conveying. It should be noted that the driven pulley one 609 is limited by the fixing frame 611, so that it can only rotate circumferentially and cannot move up and down under the driving action of the conveying belt three 608.

[0059] Further, referring to Figure 12 , Figure 12 As a schematic view of the conveying mechanism 7, the conveying mechanism 7 comprises a driving motor three 71 installed on the outer wall of the water tank 4, a driving gear three 72 located at the output end of the driving motor three 71, a synchronous belt two 73 meshed and connected to the outer wall of the driving gear three 72, a driven gear three 74 meshed and connected to the inner wall of the other side of the synchronous belt two 73, and a conveying disc 75 connected with the driven gear three 74.

[0060] The driving motor three 71 drives the driving gear three 72 to rotate through its output end, the driving gear three 72 drives the synchronous belt two 73 in meshing connection with its outer wall to rotate, the synchronous belt two 73 drives the driven gear three 74 in meshing connection therewith to rotate, the driven gear three 74 drives the conveying disc 75 to rotate, thereby conveying the silicon wafer 2 through the conveying disc 75. Meanwhile, the conveying mechanism 7 is also provided with a guide plate, which can guide the silicon wafer 2 to move along the guide plate to avoid deviation of the conveying position, thus being convenient to use.

[0061] Further, with continuous reference to Figure 4 、 Figure 5 and Figure 6 , Figure 4 Fig. 7 is a structural schematic view of the conveying table 1007, Figure 5 Fig. 8 is a structural schematic view of the synchronous belt three 1003, Figure 6 Fig. 9 is a structural schematic view of the transmission switching mechanism 10, which comprises the driving motor four 1001 installed on the conveying mechanism 7, the driving gear four 1002 installed at the output end of the driving motor four 1001, the synchronous belt three 1003 in meshing connection with the outer wall of the driving gear four 1002, the driven gear four 1004 in meshing connection with the other inner wall of the synchronous belt three 1003, the support seat 1005 installed on the conveying mechanism 7, the rotating shaft two 1006 assembled at the center part of the driven gear four 1004, the conveying table 1007 installed at the other end of the rotating shaft two 1006, the plate body 1008 installed at one side of the conveying table 1007, the driving motor five 1009 installed on the plate body 1008, the driving pulley two 1010 at the output end of the driving motor five 1009, the driven pulley three 1011 installed on the conveying table 1007, the driven pulley two 1012 installed on the plate body 1008, and the conveying belt four 1013 installed on the driving pulley two 1010, the driven pulley three 1011 and the driven pulley two 1012.

[0062] The shaft two 1006 is movably connected with the support seat 1005, the support seat 1005 is in a top-down sleeving relationship with the shaft two 1006, the support seat 1005 does not rotate with the shaft two 1006, the number of the conveying belt one 8 is two groups, the two groups of conveying belt one 8 are symmetrically arranged, the number of the conveying belt two 9 is four groups, each two groups of conveying belt two 9 correspond to one group of conveying belt one 8, the four groups of conveying belt two 9 are in parallel distribution, the number of the transmission switching mechanism 10 is two groups, the two groups of transmission switching mechanism 10 are in the same output direction as the two groups of conveying belt one 8, one group of transmission switching mechanism 10 corresponds to two groups of conveying belt two 9, taking one group of conveying belt one 8, one group of transmission switching mechanism 10 and two groups of conveying belt two 9 as an example, in the initial state, the output end of the transmission switching mechanism 10 corresponds to one of the conveying belt two 9, the conveying belt one 8 conveys the silicon wafer 2 to the transmission switching mechanism 10 and conveys the silicon wafer 2 to the conveying belt two 9 through the transmission switching mechanism 10, and then conveys the silicon wafer 2 to the next process through the conveying belt two 9, when it is needed to change the output end direction of the transmission switching mechanism 10 to correspond to the other conveying belt two 9, the driving motor four 1001 is started, the driving motor four 1001 drives the driving gear four 1002 at the output end to do axial circular rotation, the driving gear four 1002 rotates the synchronous belt three 1003 meshing with the outer wall thereof to drive the driven gear four 1004 to rotate, the driven gear four 1004 rotates to drive the conveying table 1007 to rotate through the shaft two 1006 in the center thereof, so that the output end of the transmission switching mechanism 10 corresponds to the other conveying belt two 9, and then the conveying belt one 8 conveys the silicon wafer 2 to the transmission switching mechanism 10, the driving motor five 1009 installed on the plate body 1008 is started, the driving motor five 1009 drives the driving pulley two 1010 to rotate, the driving pulley two 1010 rotates to drive the driven pulley three 1011 and the driven pulley two 1012 to rotate through the conveying belt four 1013 on the outer wall thereof, and the silicon wafer 2 is conveyed through the conveying belt four 1013, so that the transmission switching mechanism 10 can be alternately transmitted to the silicon wafer 2, the empty flight time is greatly reduced, and the conveying efficiency is effectively improved.

[0063] Further, continuing to refer to Figure 13 and Figure 14 , Figure 13 is a structural schematic view of the conveying device 11, Figure 14As a schematic view of the structure of the supporting plate one 1142, the conveying device 11 comprises a three-axis gantry electric sliding table module 111, a pneumatic clamp one 112 and a pneumatic clamp two 113 installed on the Z-axis of the three-axis gantry electric sliding table module 111, a lifting assembly one 114 and a lifting assembly two 115 located below the three-axis gantry electric sliding table module 111, the pneumatic clamp one 112 and the pneumatic clamp two 113 are used to grab the material basket 1, the lifting assembly one 114 is composed of an electric linear guide rail 1141 arranged vertically upward and a supporting plate one 1142 installed on the electric linear guide rail 1141, the supporting plate one 1142 is used to support the material basket 1, and the electric linear guide rail 1141 is used to drive the material basket 1 to rise and fall.

[0064] The pneumatic clamp one 112 and the pneumatic clamp two 113 can clamp the empty material basket 1 onto the supporting plate one 1142, the electric linear guide rail 1141 can be started to drive the supporting plate one 1142 to rise and fall, the material basket 1 is provided with a hanging rod on both sides, the supporting plate one 1142 is provided with a through groove matched with the hanging rod, and the empty material basket 1 is driven by the electric linear guide rail 1141 to rise and fall to realize the loading of the silicon wafer 2 into the empty material basket 1, the working principle and structure of the lifting assembly two 115 are the same as those of the lifting assembly one 114, the lifting assembly one 114 and the lifting assembly two 115 are symmetrically arranged, when the insertion of the empty material basket 1 on the supporting plate one 1142 is completed, the material basket 1 is full at this time, the pneumatic clamp one 112 and the pneumatic clamp two 113 can clamp the full material basket 1, and then the full material basket 1 is clamped and transferred to the turnover device 12 for conveying.

[0065] Further, continuing to refer to Figure 16 , Figure 16 As a schematic view of the structure of the turnover device 12, the turnover device 12 is composed of a transmission guide rail 121, a cylinder three 122 installed on the side wall of the transmission guide rail 121, a connecting rod 123 located at the output end of the cylinder three 122, a shaft body 124 installed on the other end of the connecting rod 123, a supporting plate two 125 installed on the shaft body 124, and a fixed plate 126 installed on the transmission guide rail 121, the shaft body 124 penetrates through the fixed plate 126 and is rotationally connected with the fixed plate 126.

[0066] The full basket 1 completed by the inserting piece is transferred to the supporting plate two 125 by the pneumatic clamping jaw one 112 and the pneumatic clamping jaw two 113, at this time, the full basket 1 is placed vertically upward, the cylinder three 122 is started, the output end of the cylinder three 122 is telescopic, which can drive the connecting rod 123 to rotate, the connecting rod 123 drives the shaft body 124 to rotate, the shaft body 124 drives the supporting plate two 125 to rotate, the shaft body 124 is supported by the fixed plate 126, so that the shaft body 124 does the circular motion, at this time, the supporting plate two 125 is turned over from the vertical state to the horizontal state, the full basket 1 is transported by the transmission guide rail 121, the transmission drive mode of the transmission guide rail 121 is the same as that of the conveying mechanism 7, after the transmission, the supporting plate two 125 of the overturning device 12 is automatically returned to the original position, and the next batch of full basket 1 is supported.

[0067] Working principle: the first step is to insert the silicon wafer 2 into the inserting piece area 103 of the empty basket 1 by artificial or automatic inserting piece way of mechanical equipment;

[0068] The second step is to clamp the full basket 1 to the feeding mechanism 5 by the tool 3 to feed and separate the pieces: after the inserting piece is completed, the tool 3 clamps the full basket 1 to the conveying chain 52, and the conveying chain 52 is driven by the driving assembly 53 to convey the full basket 1 to the piece separating mechanism 6, with the conveying of the conveying chain 52, the pneumatic separating water knives 601 on both sides blow out the single silicon wafer 2 in the inserting piece area 103 to make the silicon wafer 2 move, and the silicon wafer 2 is sucked by the pneumatic suction cup 612, the driving motor two 602 is started to drive the driving gear two 603 to rotate through the output end, the driving gear two 603 drives the driven gear two 605 to rotate through the synchronous belt one 604, the driven gear two 605 drives the driving pulley one 607 to rotate through the rotating shaft one 606 in the middle, the driving pulley one 607 drives the driven pulley one 609 to rotate through the conveying belt three 608, the conveying belt three 608 rotates to convey the silicon wafer 2 to the conveying disc 75, and the silicon wafer 2 is conveyed to the conveying belt one 8 through the conveying mechanism 7, the driving mode of the conveying belt one 8 and the conveying belt two 9 is the same as that of the conveying belt three 608, the conveying belt one 8 conveys the silicon wafer 2 to the conveying belt four 1013 on the transmission switching mechanism 10, the conveying belt four 1013 conveys the silicon wafer 2 to the conveying belt two 9 to output, when all the silicon wafers 2 on the full basket 1 are separated and conveyed, the next full basket 1 is fed to the conveying chain 52 by the tool 3, at the same time, the empty basket 1 is conveyed to the supporting frame 54 by the conveying chain 52, the cylinder one 55 is started to drive the supporting frame 54 to descend, then the cylinder two 56 is started to push the empty basket 1 to the supporting guide rail 51, the tool 3 clamps the empty basket 1 out of the water tank 4 to continue inserting piece, so as to realize continuous feeding of the full basket 1 and discharging of the empty basket 1, and realize continuous operation;

[0069] The third step is to insert the wafer into the empty basket 1 through the conveying device 11 to the lifting assembly one 114 and the lifting assembly two 115 and then unload the full basket 1 to the turnover device 12: the pneumatic gripper one 112 and the pneumatic gripper two 113 are independently driven, and the pneumatic gripper one 112 and the pneumatic gripper two 113 can move in the X, Y and Z three-axis directions on the three-axis gantry electric sliding table module 111, the empty basket 1 can be loaded on the supporting plate one 1142 through the pneumatic gripper one 112 and the pneumatic gripper two 113, the number of the lifting assembly one 114 and the lifting assembly two 115 is two groups, which are arranged in parallel at the output end of the four sets of conveying belts two 9, the silicon wafer 2 is loaded into the empty basket 1 on the supporting plate one 1142 through the four sets of conveying belts two 9, and the wafer is inserted into the empty basket 1 through the lifting of the lifting assembly one 114 and the lifting assembly two 115, when the wafer insertion of the empty basket 1 is completed, the full basket 1 state is achieved, and the pneumatic gripper one 112 or the pneumatic gripper two 113 clamps and transfers the full basket 1 to the supporting plate two 125 of the turnover device 12;

[0070] Finally, the full basket 1 is conveyed to the next process through the turnover device 12 and the tooling 3: after the pneumatic gripper one 112 and the pneumatic gripper two 113 clamp and transfer the full basket 1 to the supporting plate two 125, the cylinder three 122 is started, the cylinder three 122 drives the connecting rod 123 to rotate through the extension and retraction movement of the output end, the connecting rod 123 drives the shaft body 124 to rotate in the inner wall of the fixed plate 126, the shaft body 124 drives the supporting plate two 125 to rotate, the vertical supporting plate two 125 is converted into a horizontal state, then the transmission guide rail 121 conveys the horizontal full basket 1, and when the full basket 1 is conveyed to the end of the transmission guide rail 121, the tooling 3 hooks and transfers the full basket 1 to the next process for processing;

[0071] The device integrates the feeding mechanism 5 and the conveying device 11, can realize the continuous feeding of the full basket 1 and the continuous unloading of the empty basket 1, at the same time, the transmission switching mechanism 10 can change the conveying direction of the silicon wafer 2, so that the silicon wafer 2 can be conveyed between the multiple conveying belts two 9, thereby reducing the empty time in the production process and improving the conveying efficiency.

[0072] The embodiments of the application are described in detail above with reference to the drawings, but the application is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the application.

Claims

1. A material frame conveying device, characterized in that, a material basket and a silicon wafer, the material basket is used for conveying the silicon wafer; a tool for grabbing and transferring the material basket; a wafer feeding device for conveying the material basket and feeding the silicon wafer; the wafer feeding device comprises a water tank, a feeding mechanism installed in the water tank, a wafer separating mechanism installed in the water tank, a conveying mechanism located at the output end of the wafer separating mechanism, a conveying belt one located at the output end of the conveying mechanism, a conveying belt two located in the transmission direction of the conveying belt one, a transmission switching mechanism located in the area between the conveying belt one and the conveying belt two; the feeding mechanism comprises a support rail installed on the inner bottom wall of the water tank, a conveying chain installed on the inner wall of the water tank, a driving assembly for driving the conveying chain, a supporting bracket located on the inner wall of the water tank, a cylinder one symmetrically installed on both sides of the supporting bracket, and a cylinder two symmetrically installed on the water tank, the cylinder one is used to drive the supporting bracket to lift; a conveying device located at the output end of the wafer feeding device, used for feeding the material basket for wafer insertion; a turnover device located at the output end of the conveying device, used for conveying the material basket.

2. A magazine conveyor as claimed in claim 1, wherein, The material basket is composed of a material frame and block bodies installed in a linear array on the material frame, the block bodies are provided with wafer insertion areas, and the silicon wafer is inserted into the wafer insertion areas.

3. A frame conveyor as claimed in claim 1, wherein The driving assembly comprises a driving motor one installed on the outer wall of the water tank, a driving gear one located at the output end of the driving motor one, a transmission chain installed on the outer wall of the driving gear one, a driven gear one meshed and connected on the other side of the inner wall of the transmission chain, and the driven gear one is installed on the transmission shaft of one side of the conveying chain.

4. A frame conveyor as claimed in claim 1, wherein The wafer separating mechanism comprises a pneumatic separating water knife installed in the water tank, a driving motor two installed on the outer wall of the water tank, a driving gear two located at the output end of the driving motor two, a synchronous belt one meshed and connected on the outer wall of the driving gear two, a driven gear two meshed and connected on the other side of the inner wall of the synchronous belt one, a rotating shaft one installed in the middle of the driven gear two, a driving pulley one installed on the rotating shaft one, a conveying belt three installed on the outer wall of the driving pulley one, a driven pulley one installed on the other side of the inner wall of the conveying belt three, a support shaft located in the middle of the driven pulley one, a fixing frame installed on the support shaft, and a pneumatic suction cup arranged on the fixing frame.

5. A magazine conveyor as claimed in claim 4, wherein, A cross bar is installed on the fixing frame, vertical plates are symmetrically installed on the cross bar, support rods are fixedly arranged on the vertical plates, and guide rollers are rotatably connected to the outer wall of the support rods.

6. A pallet conveyor as claimed in claim 1, wherein, The conveying mechanism comprises a driving motor three installed on the outer wall of the water tank, a driving gear three located at the output end of the driving motor three, a synchronous belt two meshed and connected on the outer wall of the driving gear three, a driven gear three meshed and connected on the other side of the inner wall of the synchronous belt two, and a conveying disc connected with the driven gear three.

7. A frame conveyor as claimed in claim 6, wherein The transmission switching mechanism comprises a driving motor four installed on the conveying mechanism, a driving gear four installed at the output end of the driving motor four, a synchronous belt three meshedly connected to the outer wall of the driving gear four, a driven gear four meshedly connected to the inner wall of the other side of the synchronous belt three, a support seat installed on the conveying mechanism, a rotating shaft two installed at the center part of the driven gear four, a conveying table installed at the other end of the rotating shaft two, a plate body installed on one side of the conveying table, a driving motor five installed on the plate body, a driving pulley two located at the output end of the driving motor five, a driven pulley three installed on the conveying table, a driven pulley two installed on the plate body, and a conveying belt four installed on the driving pulley two, the driven pulley three and the driven pulley two.

8. A pallet conveyor as claimed in claim 1, wherein, The conveying device comprises a three-axis gantry electric sliding table module, pneumatic clamping jaws one and two installed on the Z-axis of the three-axis gantry electric sliding table module, and lifting assemblies one and two located below the three-axis gantry electric sliding table module, the pneumatic clamping jaws one and two are used for grabbing the material basket, the lifting assembly one is composed of an electric linear guide rail arranged vertically upward and a supporting plate one installed on the electric linear guide rail, and the supporting plate one is used for supporting the material basket, and the electric linear guide rail is used for driving the material basket to ascend and descend.

9. A frame conveyor as claimed in claim 1, wherein, The turnover device comprises a transmission guide rail, a cylinder three installed on the side wall of the transmission guide rail, a connecting rod located at the output end of the cylinder three, a shaft body installed at the other end of the connecting rod, a supporting plate two installed on the shaft body, and a fixed plate installed on the transmission guide rail, and the shaft body penetrates through the fixed plate and is rotationally connected with the fixed plate.

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