Coil assembly for superconductive unductor and method and apparatus for manufacturing same

Abstract

The invention relates to a coil assembly for a superconducting undulator and a method and apparatus for manufacturing the same. The superconductive undulator comprises a skeleton which comprises a rod body, and the interior of the rod body is provided with a beam channel; the double-line threads are located on the outer surface of the rod body, and a first thread groove and a second thread groove are limited by the double-line threads; the first end piece is arranged on the rod body and located at the first end of the rod body, and the first end piece is provided with a first wiring groove; the second end piece is arranged on the rod body and located at the second end of the rod body, and the second end piece is provided with a second wiring groove; and the superconducting conductor is arranged in the first wiring groove and the second wiring groove, and the superconducting conductor is wound on the framework clockwise along the first thread groove and is wound on the framework anticlockwise along the second thread groove.

Description

Technical Field

[0001] This invention relates to the field of superconducting technology, and more specifically to coil assemblies for superconducting undulators and methods for manufacturing them, superconducting undulators, light source devices, and photolithography systems. Background Technology

[0002] In a superconducting spiral undulator, the coil frame is the supporting component, consisting of the frame body and the frame ends. There are generally three methods for continuously winding the ends of superconducting wires: 1) the "return-peg" type; 2) the "turn-around pin" type; and 3) the "balloon" type. However, all three end structures of the spiral undulators have certain limitations. For example, the "return-peg" type has low winding efficiency, and the "turn-around pin" type is complex and impractical. Neither of these two methods is suitable for winding stress-strain sensitive superconducting materials, such as low-temperature superconducting Nb3Sn round wire and high-temperature superconducting Re-Ba-Cu-O coated conductors. The "balloon" type has a large turning radius, aiming to reduce the critical current decay of Re-Ba-Cu-O coated conductors during high-temperature superconducting spiral coil winding, but this method results in high space occupation at the coil ends and a significant reduction in magnetic field utilization efficiency, making it unsuitable for winding coils in low-temperature superconducting Nb-Ti spiral undulators.

[0003] Therefore, there is a need in the field for a new coil structure for superconducting undulators. Summary of the Invention

[0004] This disclosure provides a coil assembly for a superconducting undulator, the structure of which enables continuous winding of the superconducting coil and the winding method is simple, which helps to improve the magnetic field utilization efficiency.

[0005] According to a first aspect of this disclosure, a coil assembly for a superconducting undulator is provided, comprising: a frame including: a rod having a beam channel inside; and a double-threaded section on an outer surface of the rod defining a first threaded groove and a second threaded groove; a first end member disposed on the rod and located at a first end of the rod, the first end member having a first wiring groove; a second end member disposed on the rod and located at a second end of the rod, the second end member having a second wiring groove; and a superconducting conductor disposed within the first wiring groove and the second wiring groove, the superconducting conductor being wound clockwise around the frame along the first threaded groove and counterclockwise around the frame along the second threaded groove.

[0006] Optionally, the first wiring groove extends from one side of the first end member around the first end member to the other side of the first end member.

[0007] Optionally, the second wiring groove extends from one side of the second end member around the second end member to the other side of the second end member.

[0008] Optionally, the first end piece has a first through hole through which the rod passes.

[0009] Optionally, the first wiring groove has a first opening aligned with the first threaded groove and a second opening aligned with the second threaded groove.

[0010] Optionally, the second end piece has a second through hole through which the rod passes.

[0011] Optionally, the second wiring groove has a third opening aligned with the first threaded groove and a fourth opening aligned with the second threaded groove.

[0012] Optionally, the first wiring groove is tangent to the first threaded groove at the first opening, and the first wiring groove is tangent to the second threaded groove at the second opening.

[0013] Optionally, the second wiring groove is tangent to the first threaded groove at the third opening, and the second wiring groove is tangent to the second threaded groove at the fourth opening.

[0014] Optionally, the superconducting conductor enters the first threaded groove from the first opening of the first wiring groove, extends along the first threaded groove into the third opening of the second wiring groove, extends along the second wiring groove from the fourth opening into the second threaded groove, and extends along the second threaded groove into the second opening of the first wiring groove.

[0015] Optionally, the first end piece has an inlet and an outlet, the inlet being used to guide the superconducting conductor into the first wiring groove, and the outlet being used to guide the superconducting conductor out of the first wiring groove.

[0016] Optionally, the superconducting conductor includes superconducting wire or superconducting tape, wherein the superconducting wire includes Nb-Ti, Nb3Sn or Bi-2212, and the superconducting tape includes Bi-2223 or Re-Ba-Cu-O.

[0017] Optionally, the coil assembly includes N layers of the superconducting conductor in the radial direction, at least two of the N layers having different axial widths.

[0018] Optionally, the axial width of each superconducting layer in the N-layer superconducting conductor decreases as its winding radius increases.

[0019] Optionally, the i-th superconducting layer in the N-layer superconducting conductor has a winding radius R.i Let i = 1, ..., N, where N is an integer greater than 1, and the axial width w of the i-th superconducting layer is... i Characterized by the following formula:

[0020]

[0021] Where, λ u l is the period length of the coil assembly, and l is the width of the superconducting conductor.

[0022] Optionally, the first superconducting conductor in the N layers of superconducting conductors is the innermost superconducting conductor, and the innermost superconducting conductor contacts the bottom of the first threaded groove and the second threaded groove.

[0023] Optionally, the Nth superconducting conductor in the N layers of superconducting conductors is the outermost superconducting conductor, and the winding radius of the outermost superconducting conductor is less than or equal to the radial height of at least one of the first threaded groove and the second threaded groove.

[0024] Optionally, the period length of the coil assembly is between 10 mm and 15 mm.

[0025] Optionally, the diameter of the hole in the rod can be between 5 mm and 10 mm.

[0026] Optionally, the width of the superconducting conductor is between 1 mm and 5 mm.

[0027] According to a second aspect of this disclosure, a method for manufacturing a coil assembly as described above is provided, comprising: providing the skeleton; disposing a first end member at a first end of the rod; disposing a second end member at a second end of the rod; and winding a superconducting conductor on the skeleton, the first end member, and the second end member.

[0028] Optionally, the step of winding the superconducting conductor includes: (a) causing the superconducting conductor to enter the first threaded groove from the first wiring groove, extend along the first threaded groove into the second wiring groove, extend along the second wiring groove into the second threaded groove, extend along the second threaded groove into the first wiring groove, and extend along the first wiring groove.

[0029] Optionally, the step of winding the superconducting conductor further includes repeating step (a) to form N layers of the superconducting conductor in the radial direction of the skeleton.

[0030] According to a third aspect of this disclosure, a superconducting undulator is provided, comprising the coil assembly described above.

[0031] According to a fourth aspect of this disclosure, a light source device is provided, including the superconducting undulator as described above.

[0032] According to a fifth aspect of this disclosure, a photolithography system is provided, including the light source device described above. Attached Figure Description

[0033] The invention can be better understood by describing exemplary embodiments of the invention in conjunction with the accompanying drawings, in which:

[0034] Figure 1 A front view of a coil assembly 100 for a superconducting undulator according to an exemplary embodiment of the present invention is shown.

[0035] Figure 2 A schematic diagram of the extension path of the superconducting conductor in the first and second wiring slots is shown.

[0036] Figure 3 A perspective view of a coil assembly 100 for a superconducting undulator according to an exemplary embodiment of the present invention is shown.

[0037] Figure 4 It shows Figure 3 A perspective view of the coil assembly 100 for a superconducting undulator rotated 180° in the horizontal direction.

[0038] Figure 5A A cross-sectional view of a coil assembly 100 for a superconducting undulator according to an exemplary embodiment of the present invention is shown.

[0039] Figure 5B A partially enlarged view of a coil assembly 100 for a superconducting undulator according to an exemplary embodiment of the present invention is shown.

[0040] Figure 6 A flowchart of a method 600 for manufacturing a coil assembly for a superconducting undulator according to an exemplary embodiment of the present invention is shown. Detailed Implementation

[0041] The following describes specific embodiments of the present invention. It should be noted that, in order to provide a concise description, this specification cannot exhaustively describe all features of the actual embodiments. It should be understood that, in the actual implementation of any embodiment, just as in any engineering or design project, various specific decisions are often made to achieve the developer's specific goals and to meet system-related or business-related constraints, and this can change from one embodiment to another. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this invention, some design, manufacturing, or production modifications based on the technical content disclosed herein are merely conventional technical means and should not be construed as insufficient content of this disclosure.

[0042] Unless otherwise defined, the technical or scientific terms used in the claims and description shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in the patent application description and claims of this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. The terms "an" or "a" and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including" and similar terms mean that the element or object preceding "comprising" or "including" encompasses the element or object listed following "comprising" or "including" and its equivalents, and do not exclude other elements or objects. The terms "connected" or "linked" and similar terms are not limited to physical or mechanical connections, nor are they limited to direct or indirect connections.

[0043] In this disclosure, a structure may be referred to as "for" or "configured to" perform certain tasks, even if the structure is not currently in operation. For example, "laser for / configured to output laser" is intended to cover a laser having components that perform the function during operation, even if the laser is not currently in use (e.g., not connected to a power source).

[0044] Unless otherwise specified, all embodiments and preferred embodiments mentioned herein can be combined to form new technical solutions. Similarly, unless otherwise specified, all technical features and preferred features mentioned herein can be combined to form new technical solutions.

[0045] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0046] The coil assembly for a superconducting undulator according to an embodiment of the present invention is described in detail below with reference to the accompanying drawings.

[0047] refer to Figure 1 -5, of which Figure 1 A front view of a coil assembly 100 for a superconducting undulator according to an exemplary embodiment of the present invention is shown; Figure 2 A schematic diagram of the extension path of the superconducting conductor in the first and second wiring slots is shown. Figure 3 A perspective view of a coil assembly 100 for a superconducting undulator according to an exemplary embodiment of the present invention is shown; Figure 4 It shows Figure 3 A perspective view of the coil assembly 100 for a superconducting undulator rotated 180° in the horizontal direction; Figure 5A A cross-sectional view of a coil assembly 100 for a superconducting undulator according to an exemplary embodiment of the present invention is shown; Figure 5B A partially enlarged view of a coil assembly 100 for a superconducting undulator according to an exemplary embodiment of the present invention is shown.

[0048] The coil assembly 100 for a superconducting undulator may include a frame 10, a first end piece 20, a second end piece 30, and a superconducting conductor (not shown).

[0049] The frame 10 may include a rod 110. The interior of the rod 110 may be hollow, for example, having a through hole 111 (see...). Figure 5A In some embodiments, the via 111 can serve as a beam channel (e.g., for providing an electron beam). In other embodiments, the via 111 can house a separate vacuum beam tube to provide a beam channel.

[0050] The skeleton 10 may also include a double-start thread 120 on the outer surface of the rod 110. The double-start thread 120 may be a thread formed by two helices equidistantly distributed in the axial direction of the rod 110. The double-start thread 120 may have a constant pitch (i.e., the axial distance between adjacent teeth of the two helices). The double-start thread 120 may define a first thread groove 101 and a second thread groove 102. The first thread groove 101 and the second thread groove 102 may be nested within each other.

[0051] The first end piece 20 can be disposed on the rod 110 and located at the first end of the rod 110 (end A as shown in the figure). The first end piece 20 can have a first wiring groove 21.

[0052] The second end piece 30 can be disposed on the rod 110 and located at the second end of the rod (end B as shown in the figure). The second end piece 20 can have a second wiring groove 22.

[0053] A superconducting conductor can be disposed within the first wiring groove 21 and the second wiring groove 22. The superconducting conductor can rotate clockwise along the first threaded groove 101 (in the first direction, e.g., from...). Figure 1 The wire (shown as end A towards end B) is wound around the skeleton 10 and rotates counterclockwise along the second threaded groove 102 (in a second direction opposite to the first direction, for example from...). Figure 1 The wire (with end B facing end A) is wound around the skeleton 10. The superconducting conductor may include superconducting wire or superconducting tape. Superconducting wire may include Nb-Ti, Nb3Sn, or Bi-2212. Superconducting tape may include Bi-2223 or Re-Ba-Cu-O. See also... Figure 2 The broken line L1 schematically shows the extension path of the superconducting conductor in the first wiring groove 21, and the broken line L2 schematically shows the extension path of the superconducting conductor in the second wiring groove 22.

[0054] In the coil assembly 100 for a superconducting undulator of the present invention, when the superconducting conductor is energized, the current direction of the portion of the superconducting conductor wound clockwise along the first threaded groove 101 is positive, and the current direction of the portion of the superconducting conductor wound counterclockwise along the second threaded groove 102 is negative, causing the current direction of the superconducting conductor on the frame 10 to alternate between positive and negative, thereby generating a helical magnetic field along the axial direction. When a high-energy electron beam passes through the electron beam current channel inside the rod 110 of the coil assembly 100 for a superconducting undulator, it continuously twists and turns under the action of the helical magnetic field, generating circularly polarized photons, which helps to generate coherent synchrotron radiation. The innovative coil assembly structure design proposed in this invention utilizes the combination of double threaded grooves and end wiring grooves to achieve continuous winding of the superconducting coil with a simple winding method, which helps to improve the magnetic field utilization efficiency.

[0055] In some embodiments of the present invention, the first wiring groove 21 can be accessed from one side of the first end member 20 (e.g., as shown in the image). Figure 3 The right side shown extends around the first end member 20 (e.g., around the outer periphery of the first end member 20) to the other side of the first end member 20 (e.g., as shown on the right side). Figure 4 (As shown on the left).

[0056] In some embodiments of the present invention, the second wiring groove 22 can be accessed from one side of the second end member 30 (e.g., as shown in the image). Figure 3The right side shown extends around the second end member 30 (e.g., around the outer periphery of the second end member 30) to the other side of the second end member 30 (e.g., as shown on the right side). Figure 4 (As shown on the left).

[0057] In some embodiments of the present invention, the first end member 20 may have a first through hole (not shown), through which the rod 110 may pass; the second end member 30 may have a second through hole (not shown), through which the rod 110 may pass.

[0058] In some embodiments of the present invention, the first wiring groove 21 may also have a first opening 31 aligned with the first threaded groove 101 (see [link]). Figure 3 ) and the second opening 32 aligned with the second threaded groove 102 (see Figure 4 The second wiring groove 22 may have a third opening 33 aligned with the first threaded groove 101 (see...). Figure 3 ) and the fourth opening 34 aligned with the second threaded groove 102 (see Figure 4 In this manner, the superconducting conductor can enter the first threaded groove 101 from the first opening 31 of the first wiring groove 21, extend along the first threaded groove 101 into the third opening 33 of the second wiring groove 22, extend along the second wiring groove 22 from the fourth opening 34 into the second threaded groove 102, and extend along the second threaded groove 102 into the second opening 32 of the first wiring groove 21.

[0059] In some embodiments of the present invention, the first wiring groove 21 is tangent to the first threaded groove 101 at the first opening 31, and the first wiring groove 21 is tangent to the second threaded groove 102 at the second opening 32. In this manner, a smooth transition of the superconducting conductor from the first wiring groove 21 to the first threaded groove 101 and the second threaded groove 102 can be ensured, which is beneficial for realizing the continuous winding of the superconducting conductor.

[0060] In some embodiments of the present invention, the second wiring groove 22 is tangent to the first threaded groove 101 at the third opening 33, and the second wiring groove 22 is tangent to the second threaded groove 102 at the fourth opening 34. In this manner, a smooth transition of the superconducting conductor from the second wiring groove 22 to the first threaded groove 101 and the second threaded groove 102 can be ensured, which is beneficial for realizing the continuous winding of the superconducting conductor.

[0061] In some embodiments of the present invention, see Figure 3 and Figure 4The first end piece 20 may have an inlet 41 and an outlet 42. The inlet 41 may be used to guide the superconducting conductor into the first wiring groove 21. The outlet 42 may be used to guide the superconducting conductor out of the first wiring groove 21. In other embodiments of the invention, the second end piece 20 may also have an inlet for guiding the superconducting conductor into the second wiring groove 22 and an outlet for guiding the superconducting conductor out of the second wiring groove 22.

[0062] The advantage of the end structure (first end piece 20 and second end piece 30) of the coil assembly 100 for a superconducting undulator of the present invention is that it facilitates the winding of superconducting conductors at the ends of the coil assembly 100, thereby improving magnetic field utilization. For example, compared to the "return-peg" type scheme for end winding, the end structure of the coil assembly 100 of the present invention has higher winding efficiency, improving the overall magnetic field utilization of the superconducting undulator 100. Compared to the "pin" type scheme for end winding, the winding method of the end structure of the coil assembly 100 of the present invention is simple and has high practicality. The end structure of the coil assembly 100 of the present invention is also suitable for winding stress-strain sensitive superconducting materials, such as low-temperature superconducting Nb3Sn round wire and high-temperature superconducting Re-Ba-Cu-O coated conductors. Compared to the "balloon" type scheme for end winding, the end structure of the coil assembly 100 of the present invention occupies less space, improving the overall magnetic field utilization of the superconducting undulator 100, and is also suitable for winding low-temperature superconducting Nb-Ti spiral undulator coils.

[0063] In some embodiments of the invention, the coil assembly 100 for a superconducting undulator comprises N layers of superconducting conductors in the radial direction, at least two of which have different axial widths. Optionally, the axial width of each of the N layers decreases as its winding radius increases.

[0064] The ridge line equation of a helical undulator is a trajectory line that spirals along the surface of a cylinder. On a cylindrical surface of radius R, its path can be represented as...

[0065]

[0066] Where θ is an angular variable (radians), and λ u The period length of coil assembly 10. Helix angle. (Also known as the lead angle or helix angle) can be expressed through the period length λ. u Calculated using the helix radius R:

[0067] In some embodiments of the present invention, the coil assembly 100 for the superconducting undulator may include N layers of superconducting conductors in the radial direction. The i-th superconducting conductor in the N layers may have a winding radius R.i (For example, the distance between the i-th superconducting conductor and the central axis of the rod 110), i = 1, ..., N, where N is an integer greater than 1.

[0068] In some embodiments of the present invention, see Figure 1 and Figures 5A-5B The axial width w of the i-th superconducting layer i It can be represented by the following formula:

[0069]

[0070] Where, λ u Let l be the period length of coil assembly 10, and l be the width of the superconducting conductor. Let be the helix angle at the i-th layer of the superconducting conductor.

[0071] Based on the width of the superconducting conductor, the period length of the coil assembly 10 used in the superconducting undulator, and the radius R of the i-th layer of the superconducting conductor... i and helix angle To adjust the axial width w of the i-th superconducting layer i This helps ensure that the coil is tightly wound, thereby improving the efficiency of magnetic field utilization.

[0072] helix angle of the thread The tangent is equal to the oscillator period length (λ). u The circumference of the thread section circle of the helical oscillator (2πR) i The ratio of the thread pitch to the width (l) of the superconducting conductor is used to design the helical undulator skeleton structure. Because the circumference of the cross-section on the inner and outer sides of the thread is different, the helical angles on the inner and outer sides of the thread on the rod body are different. Furthermore, the thread pitch is constrained by the width (l) of the superconducting conductor; the ratio of l to the thread pitch is the helical angle. The tangent value. In some embodiments, the pitch may be less than the period length (λ). u One-half of ).

[0073] The N layers of superconducting conductors can be sequentially numbered from 1 to N along the radial direction of the coil assembly 100 for the superconducting undulator. The first layer of superconducting conductor can be the innermost superconducting conductor, contacting the bottom 118 of the first threaded groove 101 and the second threaded groove 102. The Nth layer of superconducting conductor can be the outermost superconducting conductor, flush with the edge 119 of at least one of the first threaded groove 101 and the second threaded groove 102.

[0074] See Figure 5A and Figure 5B With the outermost superconducting conductor 4N winding radius as R N Taking the innermost superconducting conductor 41 with a winding radius of R1 as an example, the axial width w of the outermost superconducting conductor 4N and the innermost superconducting conductor 41... NWith w1

[0075]

[0076] Since R1≠R N Therefore, we know that w1 ≠ w N .

[0077] In some embodiments, the period length of the coil assembly 100 (i.e., the period length of the oscillator) λ u The diameter R of the rod can be between 10mm and 15mm, for example, 10mm, 11mm, 12mm, 13mm, 14mm, or 15mm. The aperture R of the rod can be between 5mm and 10mm, for example, 5mm, 6mm, 7mm, 8mm, 9mm, or 10mm. The radius R of each layer of superconducting conductor (high-temperature superconducting wire or tape) tightly wound on the skeleton 10 is... i They are not the same. The width of a superconducting conductor can be between 1 mm and 5 mm, for example, 1 mm, 2 mm, 3 mm, 4 mm or 5 mm.

[0078] According to another exemplary embodiment of the present invention, the present invention also provides a method for manufacturing a coil assembly 100 for a superconducting undulator according to an exemplary embodiment of the present invention. See also Figure 6 The diagram shows a flowchart of a method 600 for manufacturing a coil assembly for a superconducting undulator according to an exemplary embodiment of the present invention.

[0079] like Figure 6 As shown, method 600 may include the following steps S610 to S650.

[0080] In step S610, a skeleton 10 is provided. The skeleton 10 includes a rod 110. The rod 110 has a beam channel (e.g., for providing an electron beam) inside. The skeleton 10 may also include a double-threaded groove 120 on the outer surface of the rod 110. The double-threaded groove 120 may define a first threaded groove 101 and a second threaded groove 102. In some embodiments, the skeleton 10 may be formed by CNC machining or 3D printing from materials such as stainless steel, iron, or brass.

[0081] In step S630, the first end piece 20 is disposed at the first end A of the rod body 110. The first end piece 20 has a first wiring groove 21.

[0082] In step S650, the second end piece 30 is disposed at the second end B of the rod body 110. The second end piece 30 has a first wiring groove 22.

[0083] In some embodiments, the first end piece 20 and the second end piece 30 may be formed by CNC machining or 3D printing from materials such as stainless steel, iron or brass.

[0084] In step S670, a superconducting conductor is wound around the skeleton 10, the first end piece 20, and the second end piece 30.

[0085] Step S670 may include sub-step (a) causing the superconducting conductor to enter the first threaded groove 101 from the first opening 31 of the first wiring groove 21, extend along the first threaded groove 101 into the third opening 33 of the second wiring groove 22, extend along the second wiring groove 22 into the second threaded groove 102 from the fourth opening 34, extend along the second threaded groove 102 into the second opening 32 of the first wiring groove 21, and extend along the first wiring groove 21 to the first opening 31. In this manner, one layer / one turn of superconducting conductor can be wound.

[0086] Specifically, at the start of winding the superconducting conductor, the superconducting conductor remains in contact with the thread and groove surfaces. The thread of the bobbin defines the arrangement of the superconducting wire or strip. Winding of the superconducting material begins at inlet 41, with the coil bobbin rotating clockwise. During winding, the superconducting material remains in contact with the threaded side of the first groove and advances spirally along the axial direction, with the current direction defined as positive. Upon reaching the coil end (second end piece), the coil extends along the second wiring groove to the second threaded groove. During rewinding, the coil bobbin switches to counterclockwise rotation, maintaining contact between the superconducting material and the threaded side of the second groove while advancing spirally along the axial direction, with the current direction defined as reversed. After applying current to the superconducting conductor, the current direction of the superconducting spiral coil in the coil assembly alternates between positive and negative, generating an axial spiral magnetic field suitable for producing circularly polarized photons.

[0087] When it is necessary to wind a multi-layer / multi-turn coil assembly, step S670 may further include sub-step (b) repeating sub-step (a) to form N layers / turns of superconducting conductor in the radial direction of the bobbin 10. In some embodiments, when winding a multi-layer / multi-turn coil assembly, auxiliary tools may be used to ensure the positional accuracy of the superconducting conductor wire or strip. For example, before coil winding, the first end of the rod 110 (end A as shown) may be assembled with a winding machine, the second end of the rod 110 (end B as shown) may be supported by a bracket to keep the bobbin horizontal, the coil with the superconducting conductor wire or strip may be fixed at the same height of the bobbin by another bracket, and the tangent of the angle between the coil and the extension line of the bobbin is approximately the ratio of the outer diameter circumference of the coil assembly to the period length. The wire or strip enters the first wiring groove 21 through the inlet 41 of the first end piece 30. Passing through a winding machine, the wire or strip enters the first thread groove 101 through the first opening 31, winds along the first thread groove 101 to the third opening 33, enters the second end piece 30, winds once along the second wiring groove 22 of the second end piece 30, then enters the second thread groove 102 through the fourth opening 34 for winding, winds along the second thread groove 102 to the second opening 32, returns to the first end piece 20, and winds back to the first opening 31 along the first wiring groove 21. Repeating this process multiple times completes the winding of a multi-turn coil. When current is applied, the helical undulator generates oscillating magnetic fields in the xz and yz planes that differ by a quarter of a cycle.

[0088] According to another exemplary embodiment of this application, a superconducting undulator is also proposed. The superconducting undulator may include the coil assembly as described above.

[0089] According to another exemplary embodiment of this application, a light source device is also proposed. The light source device may include a superconducting undulator as described above. In one embodiment, the light source device may be configured to generate high-brightness coherent synchrotron radiation.

[0090] According to another exemplary embodiment of this application, a photolithography system is also proposed. The photolithography system may include the light source device as described above. In one embodiment, the photolithography system may be configured for use in a photolithography process with a wavelength of 10-121 nanometers.

[0091] The foregoing describes in detail, according to exemplary embodiments of the present invention, a coil assembly for a superconducting undulator and its manufacturing method, a superconducting undulator, a light source device, and a photolithography system. The present invention proposes a novel superconducting spiral undulator coil skeleton structure, possessing at least one of the following advantages: enabling continuous winding of cryogenic or high-temperature superconducting wires; possessing advantages such as simple winding, high magnetic field utilization efficiency, and adaptability to various types of superconducting wire winding; achieving more stable and reliable superconducting coils, avoiding problems such as premature quench failure; widely applicable in engineering for cryogenic and high-temperature superconducting spiral undulators; and well applicable to conduction cooling scenarios in Gifford-McMahon refrigerators.

[0092] It should be understood that the above description is illustrative and not restrictive. For example, the above embodiments (and / or aspects thereof) can be used in combination with each other. Furthermore, many modifications can be made to adapt particular conditions or materials to the teachings of the various embodiments of the invention without departing from the scope of the invention. While the dimensions and types of materials described herein are used to define parameters of the various embodiments of the invention, the embodiments are not intended to be restrictive but are exemplary. Many other embodiments will become apparent to those skilled in the art upon reading the above description. Therefore, the scope of the various embodiments of the invention should be determined by reference to the appended claims and the full scope of their equivalents.

Claims

1. A coil assembly for a superconducting undulator, comprising: The skeleton includes: A rod body, the interior of which has a beam channel; and A double-threaded groove is located on the outer surface of the rod, the double-threaded groove defining a first thread groove and a second thread groove; A first end piece is disposed on the rod and located at the first end of the rod, and the first end piece has a first wiring groove. A second end piece, disposed on the rod body and located at the second end of the rod body, the second end piece having a second wiring groove; and A superconducting conductor is disposed in the first wiring groove and the second wiring groove. The superconducting conductor is wound clockwise around the skeleton along the first thread groove and counterclockwise around the skeleton along the second thread groove.

2. The coil assembly as claimed in claim 1, characterized in that, The first wiring groove extends from one side of the first end member around the first end member to the other side of the first end member; and / or The second wiring groove extends from one side of the second end member around the second end member to the other side of the second end member.

3. The coil assembly as claimed in claim 1, characterized in that, The first wiring groove has a first opening aligned with the first threaded groove and a second opening aligned with the second threaded groove; and / or The second wiring groove has a third opening aligned with the first threaded groove and a fourth opening aligned with the second threaded groove.

4. The coil assembly as claimed in claim 3, characterized in that, The first wiring groove and the first threaded groove are tangent at the first opening, and the first wiring groove and the second threaded groove are tangent at the second opening; and / or The second wiring groove is tangent to the first threaded groove at the third opening, and the second wiring groove is tangent to the second threaded groove at the fourth opening.

5. The coil assembly as claimed in claim 3, characterized in that, The superconducting conductor enters the first threaded groove from the first opening of the first wiring groove, extends along the first threaded groove into the third opening of the second wiring groove, extends along the second wiring groove from the fourth opening into the second threaded groove, and extends along the second threaded groove into the second opening of the first wiring groove.

6. The coil assembly as claimed in claim 1, characterized in that, The first end piece has an inlet and an outlet, the inlet being used to guide the superconducting conductor into the first wiring groove, and the outlet being used to guide the superconducting conductor out of the first wiring groove.

7. The coil assembly as claimed in claim 1, characterized in that, The superconducting conductor includes superconducting wire or superconducting tape, the superconducting wire includes Nb-Ti, Nb3Sn or Bi-2212, and the superconducting tape includes Bi-2223 or Re-Ba-Cu-O.

8. The coil assembly as claimed in claim 1, characterized in that, The coil assembly for the superconducting undulator comprises N layers of superconducting conductors in the radial direction, at least two of the N layers having different axial widths.

9. The coil assembly as claimed in claim 8, characterized in that, The axial width of each superconducting layer in the N-layer superconducting conductor decreases as its winding radius increases.

10. The coil assembly as claimed in claim 9, characterized in that, The i-th superconducting layer in the N-layer superconducting conductor has a winding radius R. i Let i = 1, ..., N, where N is an integer greater than 1, and the axial width w of the i-th superconducting layer is... i Characterized by the following formula: Where, λ u l is the period length of the coil assembly, and l is the width of the superconducting conductor.

11. The coil assembly as claimed in claim 10, characterized in that, The first superconducting conductor in the N-layer superconducting conductor is the innermost superconducting conductor, and the innermost superconducting conductor contacts the bottom of the first threaded groove and the bottom of the second threaded groove; and / or The Nth superconducting conductor in the Nth layer of the superconducting conductor is the outermost superconducting conductor, and the winding radius of the outermost superconducting conductor is less than or equal to the radial height of at least one of the first thread groove and the second thread groove.

12. The coil assembly as claimed in any one of claims 1-11, characterized in that, At least one of the following: The period length of the coil assembly is between 10mm and 15mm; The diameter of the hole in the rod can be between 5mm and 10mm; and The width of the superconducting conductor is between 1 mm and 5 mm.

13. A method of manufacturing a coil assembly as described in any one of claims 1-12, comprising: Provide the skeleton; The first end piece is disposed at the first end of the rod; The second end piece is disposed at the second end of the rod; A superconducting conductor is wound around the skeleton, the first end piece, and the second end piece.

14. The method as described in claim 13, characterized in that, The steps involved in winding a superconducting conductor include: (a) The superconducting conductor enters the first threaded groove from the first wiring groove, extends along the first threaded groove into the second wiring groove, extends along the second wiring groove into the second threaded groove, extends along the second threaded groove into the first wiring groove, and extends along the first wiring groove.

15. An apparatus comprising a coil assembly as claimed in any one of claims 1-12.

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