Ion spectrometer

Abstract

The invention provides an ion spectrometer, and relates to the technical field of low-energy ion detection in space, and the ion spectrometer comprises an energy spectrum screening device which applies a first electric field to a plurality of to-be-detected ion beams with different energies so as to enable the plurality of to-be-detected ion beams to deflect and allow target ions with a predetermined energy range to exit, the energy spectrum screening device comprises a first housing; the first polar plate is configured to be arc-shaped and is arranged on the first shell, and the first polar plate and the first shell are grounded; the second pole plate is installed in the first shell in an electric insulation mode and is constructed to be in an arc shape concentric with the first pole plate, and a variable first electric field is formed between the second pole plate and the first pole plate by adjusting the voltage applied to the second pole plate; and the mass spectrum testing device is used for applying a second electric field to the target ions, so that the target ions are accelerated and keep flying at a constant speed, and a plurality of different ions are separated based on different flight times of the plurality of different ions in the target ions to obtain mass-to-charge ratios of the plurality of different ions.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of low-energy ion detection in space, and more particularly to an ion spectrometer. BACKGROUND

[0002] Low-energy ion detection in space is an important research direction in space environment detection, which is generally completed by in-situ measurement of space environment ions by relevant satellite payloads. These payloads aim to collect and return quantitative data, enabling researchers to verify or reject existing theories and raise new questions.

[0003] In order to effectively do this, in addition to the rational design of the low-energy ion detection payload, the payload must also be properly calibrated on the ground to obtain accurate measurements of the environment. Without accurate calibration, it is doubtful whether the data obtained can be correctly interpreted.

[0004] A set of ion source systems are generally used to calibrate low-energy ion detection payloads on the ground to simulate ion behavior in space. Before using the ion source to calibrate the ion detection payload, the beam generated by the ion source needs to be tested to ensure the smooth progress of subsequent calibration work and to be compared with the calibration results, so the ion beam monitoring system suitable for the ion source is a necessary requirement in the task of low-energy ion detection payload in space.

[0005] At present, the most common tool for testing ion beams is the Faraday cup, which is used to collect and measure the beam current density of the ion beam. However, only the beam current density test of the ion beam is not enough for the calibration of the commonly used low-energy ion detection payloads, such as the space omnidirectional low-energy ion energy spectrometer and mass spectrometer. SUMMARY

[0006] To solve at least one of the technical problems in the prior art, the embodiments of the present application provide an ion spectrometer suitable for 0.1eV~5000eV low-energy ion beams, which first performs energy screening on a plurality of ion beams to be measured having different energies, and then performs mass resolution on target ions having a predetermined energy range entering the mass spectrometry device, thereby improving the mass resolution.

[0007] The embodiment of the present application provides an ion spectrometer, comprising: an energy spectrum screening device configured to deflect a plurality of ion beams to be measured by applying a first electric field to the plurality of ion beams to be measured with different energies, and allow target ions with a predetermined energy range to exit, the energy spectrum screening device comprising: a first shell; a first electrode plate configured to be arc-shaped and mounted to the first shell, the first electrode plate and the first shell being grounded; a second electrode plate electrically insulatedly mounted in the first shell, the second electrode plate being configured to be arc-shaped and concentric with the first electrode plate, and a variable first electric field is formed between the second electrode plate and the first electrode plate by adjusting the voltage applied to the second electrode plate; and a mass spectrum testing device configured to apply a second electric field to the target ions, so that the target ions are accelerated and kept uniform flight, and a plurality of different ions in the target ions are separated based on different flight times of the plurality of different ions to obtain mass-to-charge ratios of the plurality of different ions.

[0008] Optionally, the first shell comprises: a first mounting plate, a first slit is formed in the first mounting plate to allow the ion beams to be measured to pass through; and a second mounting plate, one end of the second mounting plate is connected with the first mounting plate and arranged perpendicularly to the first mounting plate, and a second slit is formed in the second mounting plate to allow the target ions to exit; wherein the first electrode plate is mounted to outer ends of the first mounting plate and the second mounting plate; and the second electrode plate is electrically insulatedly mounted between the first mounting plate and the second mounting plate, and the energy resolution of the energy spectrum screening device is changed by adjusting the widths of the first slit and the second slit.

[0009] Optionally, the width of the first slit and the width of the second slit are the same and are 1mm-6mm.

[0010] Optionally, the mass spectrometry testing device includes: a second housing, mounted on the outside of the second mounting plate, and having a third slit aligned with the second slit to allow the target ions to pass through; the second housing is grounded; an ion separation assembly, including an ion flight cylinder, the interior of which forms an ion flight chamber and is electrically insulated within the second housing; the input end of the ion flight cylinder faces the third slit and has a fourth slit communicating with the ion flight chamber; the ion flight cylinder is configured to use the second electric field formed between the input end and the second housing to accelerate the target ions entering the mass spectrometry testing device through the third slit, so that multiple different ions among the target ions maintain uniform flight speed and have different flight times within the ion flight chamber, thereby separating them within the ion flight chamber; and an ion collection assembly, disposed at the end of the ion flight cylinder opposite to the fourth slit, configured to collect multiple different ions to obtain the termination flight times of the multiple different ions.

[0011] Optionally, the ion separation assembly further includes: a carbon film disposed in the fourth slit, configured to generate first and second electrons under impact after the target ion is accelerated by the second electric field, and to allow multiple different ions to pass through; and a first molybdenum mesh support installed at one end of the ion flight cylinder facing the third slit to fix the carbon film in the fourth slit and reduce the number of multiple different ions passing through.

[0012] Optionally, the thickness of the carbon film is less than 0.1 μg / cm. 2 .

[0013] Optionally, the side of the ion flight cylinder is provided with an opening communicating with the ion flight cavity. The ion separation assembly further includes a second molybdenum mesh support, which is installed in the opening and is configured to deflect the first and second electrons by applying a voltage. The voltage applied to the second molybdenum mesh support is greater than the voltage applied to the ion flight cylinder.

[0014] Optionally, the ion collection assembly includes: a first multiplier section, the inlet of which is connected to the output of the ion flight cylinder, the radius of which gradually decreases in the direction away from the ion flight cylinder, the first multiplier section being configured to form a third electric field by applying a voltage, causing multiple different ions to accelerate after uniform flight, and to generate second secondary electrons under the impact of the accelerated ions; a second multiplier section, the inlet of which is connected to the outlet of the first multiplier section, the second multiplier section having a second channel, the second secondary electrons obtaining a secondary electron cloud by repeatedly impacting the inner wall of the second channel; and an anode plate disposed at the outlet of the second multiplier section, configured to collect the secondary electron cloud to obtain the termination flight time of multiple different ions.

[0015] Optionally, the mass spectrometry testing device further includes: an electron collection component, the inlet end of which faces the second molybdenum mesh support, the electron collection component being configured to collect the first and second electrons to obtain the termination flight time of the first and second electrons; and a processor configured to obtain the mass-to-charge ratio of the multiple different ions based on the difference between the termination flight time of the multiple different ions and the termination flight time of the first and second electrons, the voltage applied to the second electrode plate, and the voltage applied to the ion flight cylinder.

[0016] Optionally, insulating elements are provided between the two ends of the second electrode plate and the first housing, and between the ion flight cylinder and the second housing, to provide electrical insulation between the second electrode plate and the first housing, and between the ion flight cylinder and the second housing.

[0017] According to an embodiment of the present invention, the ion spectrometer includes an energy spectrum screening device and a mass spectrometry testing device. The energy spectrum screening device is configured to apply a first electric field to multiple ion beams of different energies, causing the multiple ion beams to deflect and allowing target ions with a predetermined energy range to exit. The mass spectrometry testing device is configured to apply a second electric field to the target ions, causing the target ions to accelerate and maintain uniform flight. Based on the different flight times of multiple different ions in the target ions, multiple different ions are separated to obtain multiple different ion mass-to-charge ratios. The ion spectrometer provided by the present invention is suitable for low-to-medium energy ion beams from 0.1 eV to 5000 eV. By combining the energy spectrum screening device and the mass spectrometry testing device, energy screening of multiple ion beams of different energies is performed first, and then mass resolution is performed on target ions with a predetermined energy range entering the mass spectrometry testing device, thereby improving mass resolution. Attached Figure Description

[0018] Figure 1 This is a perspective view of an ion spectrometer according to an embodiment of the present invention;

[0019] Figure 2 This is a three-dimensional perspective view of an ion spectrometer according to an embodiment of the present invention;

[0020] Figure 3 This is a three-dimensional cross-sectional view of an ion spectrometer according to an embodiment of the present invention;

[0021] Figure 4 This is a cross-sectional view of an ion spectrometer according to an embodiment of the present invention;

[0022] Figure 5 This is a perspective view of an energy spectrum screening device according to an embodiment of the present invention;

[0023] Figure 6 This is a perspective view of an energy spectrum screening device according to another embodiment of the present invention;

[0024] Figure 7 This is a schematic diagram of a channel electron multiplier tube according to an embodiment of the present invention;

[0025] Figure 8 This is a schematic diagram of an ion optics simulation of the flight paths of multiple ion beams with different energies according to an embodiment of the present invention.

[0026] Figure 9 This is a three-dimensional cross-sectional view of a mass spectrometry testing apparatus according to an embodiment of the present invention;

[0027] Figure 10 This is a schematic diagram of ion optics simulation of the flight paths of multiple different ions through a carbon film according to an embodiment of the present invention.

[0028] The meanings of the reference numerals in the attached figure are as follows:

[0029] 1. Energy dispersive spectroscopy (EDS) screening device;

[0030] 11. First shell;

[0031] 110. First slit;

[0032] 111. The second slit;

[0033] 12. First electrode plate;

[0034] 13. Second electrode plate;

[0035] 2. Mass spectrometry testing device;

[0036] 21. Second shell;

[0037] 22. Ion separation component;

[0038] 220. The third slit;

[0039] 221. Ion flight cylinder;

[0040] 222. The fourth slit;

[0041] 223. First molybdenum mesh support;

[0042] 224. Second molybdenum mesh support;

[0043] 23. Ion collection assembly;

[0044] 230. The First Doubling Part;

[0045] 231. The second doubling part;

[0046] 24. Electron collection assembly;

[0047] 240. The third doubling part;

[0048] 241. The fourth doubling part;

[0049] 3. Connecting plate;

[0050] 4. Insulating components;

[0051] 5. First ion collection sensor;

[0052] 6. Second ion collection sensor;

[0053] 61. Accelerator section;

[0054] 62. Conveying Department. Detailed Implementation

[0055] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the invention. In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the embodiments of the invention for ease of explanation. However, it will be apparent that one or more embodiments may be practiced without these specific details. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concept of the invention.

[0056] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0057] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0058] When using expressions such as "at least one of A, B, and C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, and C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.). When using expressions such as "at least one of A, B, or C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, or C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.).

[0059] To address the issue that beam density testing using only ion beams is insufficient for calibrating commonly used low- and medium-energy ion detection payloads for space-based omnidirectional low-energy ion spectrometers and mass spectrometers, according to one aspect of the invention, an ion spectrometer is provided. The ion spectrometer includes an energy spectrum screening device and a mass spectrometry testing device. The energy spectrum screening device is configured to apply a first electric field to multiple ion beams of different energies, causing the multiple ion beams to deflect and allowing target ions with a predetermined energy range to exit. The energy spectrum screening device includes a first housing, a first electrode plate, and a second electrode plate. The first electrode plate is arc-shaped and mounted on the first housing, and the first electrode plate and the first housing are grounded. The second electrode plate is electrically insulated and mounted inside the first housing, and is arc-shaped concentric with the first electrode plate. By adjusting the voltage applied to the second electrode plate, a variable first electric field is formed between the second electrode plate and the first electrode plate. The mass spectrometry testing device is configured to apply a second electric field to the target ions, causing the target ions to accelerate and maintain uniform flight, thereby separating multiple different ions based on their different flight times and obtaining the mass-to-charge ratios of multiple different ions. The ion spectrometer provided by this invention is suitable for low- and medium-energy ion beams from 0.1 eV to 5000 eV. By combining the energy spectrum screening device and the mass spectrometry testing device, multiple ion beams to be tested with different energies are first screened by energy, and then the target ions with a predetermined energy range that enter the mass spectrometry testing device are mass-resolved, thereby improving the mass resolution.

[0060] The embodiments of this invention provide an ion spectrometer suitable for testing low- to medium-energy ion beams (0.1 eV to 5000 eV) before formal operation, ensuring that the beam current characteristics of the low- to medium-energy ion beam meet the mission requirements for normal operation. The ion spectrometer provided by the embodiments of this invention is particularly suitable for beam current testing of ground-based calibration ion source calibration systems for low- to medium-energy ion detection payloads in space before the commencement of formal payload calibration.

[0061] Figure 1 This is a perspective view of an ion spectrometer according to an embodiment of the present invention. Figure 2 This is a three-dimensional perspective view of an ion spectrometer according to an embodiment of the present invention. Figure 3 This is a three-dimensional cross-sectional view of an ion spectrometer according to an embodiment of the present invention. Figure 4 This is a cross-sectional view of an ion spectrometer according to an embodiment of the present invention.

[0062] An ion spectrometer provided according to an embodiment of the present invention, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the ion spectrometer includes an energy dispersive spectroscopy (EDS) screening device 1 and a mass spectrometry (MS) testing device 2. The EDS screening device 1 is configured to apply a first electric field to multiple ion beams of different energies, causing the multiple ion beams to deflect and allowing target ions with a predetermined energy range to be emitted. The EDS screening device 1 includes a first housing 11, a first electrode 12, and a second electrode 13. The first electrode 12 is arc-shaped and mounted on the first housing 11. The first electrode 12 and the first housing 11 are grounded. The second electrode 13 is electrically insulated and mounted inside the first housing 11. The second electrode 13 is arc-shaped and concentric with the first electrode 12. By adjusting the voltage applied to the second electrode 13, a variable first electric field is formed between the second electrode 13 and the first electrode 12. The MS testing device 2 is configured to apply a second electric field to the target ions, causing the target ions to accelerate and maintain a uniform flight speed, so as to separate multiple different ions based on their different flight times, thereby obtaining multiple different ion mass-to-charge ratios.

[0063] According to an embodiment of the present invention, multiple ion beams of different energies are ion beams of a ground calibration system for a low-energy ion detection payload in space, with an energy range of 0.1 eV to 5000 eV.

[0064] According to an embodiment of the present invention, a target ion having a predetermined energy range is defined as containing multiple different types of ions within the predetermined energy range.

[0065] According to embodiments of the present invention, the ion spectrometer is suitable for low- and medium-energy ion beams ranging from 0.1 eV to 5000 eV, and is particularly suitable for testing low-energy ion beams with energies not exceeding 10 eV. By combining the energy spectrum screening device 1 and the mass spectrometry testing device 2, multiple ion beams to be tested with different energies are first screened by energy, and then the target ions with a predetermined energy range that enter the mass spectrometry testing device 2 are mass-resolved. This can improve the mass resolution and is an essential part of the development process of low-energy ion detection payloads in space.

[0066] According to embodiments of the present invention, such as Figure 2 , Figure 3 and Figure 4 As shown, the first housing 11 includes a first mounting plate and a second mounting plate. A first slit 110 is formed on the first mounting plate to allow the ion beam to pass through. One end of the second mounting plate is connected to the first mounting plate and is arranged perpendicularly to it. A second slit 111 is formed on the second mounting plate to allow the target ion to exit. A first electrode 12 is mounted at the outer ends of the first and second mounting plates. A second electrode 13 is electrically insulated between the first and second mounting plates. The energy resolution of the energy spectrum screening device 1 is changed by adjusting the widths of the first slit 110 and the second slit 111.

[0067] In one illustrative embodiment, the first housing 11 and the first electrode plate 12 form a quarter-cylinder shape. The first electrode plate 12 is constructed in an arc shape and mounted on the outer ends of the first mounting plate and the second mounting plate, with a radius of 100 mm. The second electrode plate 13 is constructed in an arc shape concentric with the first electrode plate 12, with a radius of 50 mm. There is a wide difference between the inner and outer radii of the second electrode plate 13 and the first electrode plate 12.

[0068] According to an embodiment of the present invention, the first housing 11, the first electrode plate 12 and the second electrode plate 13 are made of conductive materials, such as aluminum alloy.

[0069] According to an embodiment of the present invention, by adjusting the voltage applied to the second electrode 13 and the widths of the first slit 110 and the second slit 111, a variable first electric field is formed between the second electrode 13 and the first electrode 12, so that target ions with different predetermined energy ranges are emitted from the second slit 111.

[0070] According to an embodiment of the present invention, the width of the first slit 110 is the same as the width of the second slit 111, and both are 1mm to 6mm.

[0071] According to an embodiment of the present invention, a window is provided on the first mounting plate, and a detachable mounting plate is mounted on the window. A first slit 110 is provided on the detachable mounting plate. A window is also provided on the second mounting plate, and a detachable mounting plate is mounted on the window. A second slit 111 is provided on the detachable mounting plate. By making the first slit 110 and the second slit 111 detachable, the width and shape of the first slit 110 and the width and shape of the second slit 111 can be changed, thereby changing the energy resolution and ion throughput of the energy spectrum screening device 1.

[0072] According to an embodiment of the present invention, the radial width of the first slit 110 is the same as the radial width of the second slit 111, and the distance between the first slit 110 and the intersection of the first mounting plate and the second mounting plate is the same as the distance between the second slit 111 and the intersection of the first mounting plate and the second mounting plate.

[0073] According to an embodiment of the present invention, when the width of the first slit 110 and the width of the second slit 111 are both 1 mm, the electrostatic analyzer constant is 1 / 3, and the energy resolution of the energy spectrum screening device 1 is 0.026. When the width of the first slit 110 and the width of the second slit 111 are both 2 mm, the electrostatic analyzer constant is 1 / 3, and the energy resolution of the energy spectrum screening device 1 is 0.05. When the width of the first slit 110 and the width of the second slit 111 are both 4 mm, the electrostatic analyzer constant is 1 / 3, and the energy resolution of the energy spectrum screening device 1 is 0.1. When the width of the first slit 110 and the width of the second slit 111 are both 6 mm, the electrostatic analyzer constant is 1 / 3, and the energy resolution of the energy spectrum screening device 1 is 0.21.

[0074] According to embodiments of the present invention, it can be seen from the influence of the width of the first slit 110 and the width of the second slit 111 on the electrostatic analyzer constant and energy resolution that the width of the first slit 110 and the width of the second slit 111 do not affect the electrostatic analyzer constant, but the smaller the width of the first slit 110 and the width of the second slit 111, the better the energy resolution of the energy spectrum screening device 1. The larger the width of the first slit 110 and the width of the second slit 111, the more ions the energy spectrum screening device 1 can accept, and some ions will be lost due to other factors (such as potential jumps, space charge effects, etc.) during the ion deflection process between the first electrode 12 and the second electrode 13. Therefore, when facing ion beams with low beam current intensity (e.g., 0.1 eV), the width of the first slit 110 and the width of the second slit 111 cannot be less than 1 mm. Setting different widths of the first slit 110 and the second slit 111 is mainly to adapt to the needs of monitoring ion sources with different energy resolutions and beam current intensities.

[0075] Figure 5 This is a perspective view of an energy spectrum screening device according to an embodiment of the present invention.

[0076] According to embodiments of the present invention, the energy dispersive spectroscopy (EDS) screening device 1 and the mass spectrometry (MS) testing device 2 can be used separately under different measurement task conditions. For example... Figure 5 As shown, Figure 5 The diagram shows the energy spectrum screening device 1 used alone. A first ion collection sensor 5 is provided at the position facing the second slit 111. The first ion collection sensor 5 can be, for example, an anode plate.

[0077] According to an embodiment of the present invention, the first ion collection sensor 5 is suitable for collecting target ions emitted from the second slit 111. Only when the beam intensity of the target ions is large enough to form a current signal (current intensity above pA) can subsequent energy spectrum testing be performed.

[0078] Figure 6 This is a perspective view of an energy spectrum screening device according to another embodiment of the present invention.

[0079] According to embodiments of the present invention, such as Figure 6 As shown, Figure 6 The diagram also shows the case where the energy spectrum screening device 1 is used alone. A second ion collection sensor 6 is provided at the position facing the second slit 111. The second ion collection sensor 6 can be, for example, a channel electron multiplier tube (CEM). The second ion collection sensor 6 is suitable for counting and measuring each ion in the target ions emitted from the second slit 111, and is used when the beam intensity is low.

[0080] Figure 7 This is a schematic diagram of a channel electron multiplier tube according to an embodiment of the present invention.

[0081] According to embodiments of the present invention, such as Figure 7 As shown in (a), the accelerating section 61 of the channel electron multiplier tube is configured in a funnel shape, with its input end facing the second slit 111. By applying a voltage to the accelerating section 61, an accelerating potential of -2000V is formed. Each ion in the target ion, after being accelerated by the potential of the funnel structure, collides with the inner wall of the funnel structure, generating secondary electrons. The transport section 62 of the channel electron multiplier tube is configured to have a transport channel. The secondary electrons are further accelerated by the accelerating potential along a designed path through the transport channel of the transport section 62 and collide multiple times with the inner wall of the transport channel, generating more secondary electrons. Figure 7 As shown in (b), the weak signal of a single ion is eventually converted into a detectable charge pulse of an electron cloud, which can be collected and counted by the anode plate located at the output end.

[0082] According to an embodiment of the present invention, the energy spectrum screening device 1 is suitable for medium and low energy ion beams of 0.1 eV to 5000 eV, and is especially suitable for low energy ion beams with energies not exceeding 10 eV. When the energy spectrum screening device 1 is used alone, target ions with high beam current intensity are collected by a first ion collection sensor 5 (e.g., an anode plate), and target ions with low beam current intensity are collected by a second ion collection sensor 6 (e.g., a channel electron multiplier tube). It can be used for a wide range of ion beam energy screening scenarios, and can be used for ion beam screening of all beam current intensities.

[0083] Figure 8 This is a schematic diagram of an ion optics simulation of the flight paths of multiple ion beams with different energies according to an embodiment of the present invention.

[0084] According to an embodiment of the present invention, the initial conditions are set such that ion beams of energies of 5 eV, 5.2 eV, and 4.8 eV are injected perpendicularly into the first slit 110 of the energy spectrum screening device 1. The first housing 11 and the first electrode 12 of the energy spectrum screening device 1 are integrally connected and set to ground potential, while the second electrode 13 is set to a potential of -10V. Figure 8 As shown, only 5 eV target ions can pass through the second slit 111 under the deflection of the first electric field, and are then collected by the anode plate or channel electron multiplier tube at the rear end, obtaining the relative number of target ions in this energy range in the entire ion beam to be measured. By adjusting the voltage applied to the second electrode 13 and the widths of the first slit 110 and the second slit 111, a variable first electric field is formed between the second electrode 13 and the first electrode 12, which can resolve target ions in different energy ranges, thereby completing the measurement of the energy spectrum of the entire ion beam to be measured. Calculations show that its energy resolution reaches approximately 2%, which can meet the energy resolution requirements of most spatial energy spectrum detection. As a type of electrostatic analyzer, the potential of the second electrode 13 is proportional to the unit charge energy of the ions that can pass through, and the proportionality coefficient is called the electrostatic analyzer constant K. K is 1 / 3, which is suitable for the energy resolution of low-energy ions (down to 0.1 eV).

[0085] According to an embodiment of the present invention, the ionic unit charge energy E1 can be expressed by the following formula (1):

[0086] (1);

[0087] Where E1 represents the energy per unit charge of the ion, q represents the amount of charge per unit charge of the ion, K represents the constant of the electrostatic analyzer, and V represents the voltage applied to the second electrode 13.

[0088] Figure 9 This is a three-dimensional cross-sectional view of a mass spectrometry testing device according to an embodiment of the present invention.

[0089] According to embodiments of the present invention, such as Figure 2 and Figure 9 As shown, the mass spectrometry testing device 2 includes a second housing 21, an ion separation assembly 22, and an ion collection assembly 23. The second housing 21 is mounted on the outside of the second mounting plate and has a third slit 220 aligned with the second slit 111 to allow target ions to pass through. The second housing 21 is grounded. The ion separation assembly 22 includes an ion flight cylinder 221, which forms an ion flight chamber and is electrically insulated within the second housing 21. The input end of the ion flight cylinder 221 faces the third slit 220 and has a fourth slit 222 communicating with the ion flight chamber. The ion flight cylinder 221 is configured to use a second electric field formed between the input end and the second housing 21 to accelerate the target ions entering the mass spectrometry testing device 2 through the third slit 220, so that multiple different ions in the target ions maintain a uniform speed and have different flight times within the ion flight chamber, thereby being separated within the ion flight chamber. The ion collection component 23 is located at the end of the ion flight cylinder 221 opposite to the fourth slit 222. The ion collection component 23 is configured to collect multiple different ions to obtain multiple different ion termination flight times.

[0090] According to embodiments of the present invention, such as Figure 2 As shown, the first housing 11 of the energy dispersive spectroscopy (EDS) screening device 1 and the second housing 21 of the mass spectrometry (MS) testing device 2 are connected by a connecting plate 3. The two ends of the connecting plate 3 are fixed to the first housing 11 and the second housing 21 respectively by fasteners (e.g., bolts). The connecting plate 3 can be made of, for example, aluminum alloy.

[0091] In one illustrative embodiment, the second housing 21 has a length of 140 mm, a width of 100 mm, and a height of 100 mm.

[0092] According to an embodiment of the present invention, the second shell 21 and the ion flight cylinder 221 are made of a conductive material, such as an aluminum alloy.

[0093] According to an embodiment of the present invention, an external power supply device applies a voltage to the ion flight cylinder 221 to form a second electric field between the input end of the ion flight cylinder 221 and the second housing 21, thereby accelerating the target ions that enter the mass spectrometry testing device 2 through the third slit 220.

[0094] In one illustrative embodiment, the ion flight cavity formed inside the ion flight cylinder 221 is constructed as a cylinder with a radius of 7 mm at both ends of the circular end face and a length of 80 mm, so as to provide a near field-free ion flight region for multiple different ions in the target ion. Multiple different ions in the target ion maintain approximately uniform flight speed and have different flight times in the ion flight cavity, thereby separating in the ion flight cavity.

[0095] According to embodiments of the present invention, such as Figure 9 As shown, the ion separation assembly 22 also includes a carbon film and a first molybdenum mesh support 223. The carbon film is disposed in the fourth slit 222 and is configured to generate first and second electrons upon impact with the target ions after being accelerated by the second electric field, allowing multiple different ions to pass through. The first molybdenum mesh support 223 is mounted on the end of the ion flight cylinder 221 facing the third slit 220 to fix the carbon film in the fourth slit 222 and reduce the number of multiple different ions passing through.

[0096] According to an embodiment of the present invention, the first molybdenum mesh support 223 includes a molybdenum mesh and a frame, the molybdenum mesh being mounted on the frame, and the mesh structure of the molybdenum mesh being able to fix the soft carbon film to the fourth slit 222.

[0097] In one illustrative embodiment, the molybdenum mesh has a transmittance of 85%, which reduces the number of multiple different ions passing through and attenuates the ion beam, so that the number of ions passing through the carbon membrane does not exceed the threshold of the ion collection component 23.

[0098] According to an embodiment of the present invention, the thickness of the carbon film is less than 0.1 μg / cm. 2 .

[0099] According to an embodiment of the present invention, the carbon film is an ultrathin carbon film with a thickness of less than 0.1 μg / cm. 2 This ensures that after the target ion is accelerated by the second electric field, the target ion can generate first and second electrons with a high probability after being accelerated to an energy of more than 1 keV and striking the carbon film. At the same time, multiple different ions in the target ion can also pass through the carbon film and lose less energy.

[0100] According to embodiments of the present invention, such as Figure 9 As shown, the side of the ion flight cylinder 221 has an opening that communicates with the ion flight chamber. The ion separation assembly 22 also includes a second molybdenum mesh support 224, which is installed in the opening. The second molybdenum mesh support 224 is configured to deflect the first and second electrons by applying a voltage. The voltage applied to the second molybdenum mesh support 224 is greater than the voltage applied to the ion flight cylinder 221.

[0101] According to an embodiment of the present invention, an external power supply device applies a voltage to the second molybdenum mesh support 224, causing the first and second electrons to deflect. The difference between the voltage applied to the second molybdenum mesh support 224 and the voltage applied to the ion flight cylinder 221 does not exceed 2KV, which enables the peaks of ions with similar unit charge mass numbers (e.g., oxygen and nitrogen ions) to be distinguished.

[0102] According to an embodiment of the present invention, the second molybdenum mesh support 224 includes a molybdenum mesh and a frame, wherein the molybdenum mesh is mounted on the frame and the transmittance of the molybdenum mesh is above 99%.

[0103] According to an embodiment of the present invention, an insulating element is provided between the second molybdenum mesh support 224 and the ion flight cylinder 221 to electrically insulate the second molybdenum mesh support 224 and the ion flight cylinder 221. The insulating element may be made of, for example, polyetheretherketone (PEEK).

[0104] According to embodiments of the present invention, such as Figure 3 , Figure 4 and Figure 9 As shown, the ion collection assembly 23 includes a first multiplier section 230, a second multiplier section 231, and an anode plate. The inlet end of the first multiplier section 230 is connected to the output end of the ion flight cylinder 221. The radius of the first multiplier section 230 gradually decreases in the direction away from the ion flight cylinder 221. The first multiplier section 230 is configured to form a third electric field by applying a voltage, causing multiple different ions to accelerate after flying at a constant speed. Under the action of the accelerated ion collisions, second and secondary electrons are generated. The inlet end of the second multiplier section 231 is connected to the outlet end of the first multiplier section 230. The second multiplier section 231 has a second channel. The second and secondary electrons obtain a secondary electron cloud by repeatedly colliding with the inner wall of the second channel. The anode plate is disposed at the outlet end of the second multiplier section 231. The anode plate is configured to collect the secondary electron cloud and obtain the termination flight time of multiple different ions.

[0105] According to an embodiment of the present invention, the ion collection assembly 23 may be selected, for example, a channel electron multiplier, which includes a first multiplier 230, a second multiplier 231 and an anode plate.

[0106] According to an embodiment of the present invention, the carbon film combined with the ion collection component 23 enables a fast response speed. Combined with the anode plate located at the outlet end for counting, the fastest counting rate can reach the ps order of magnitude, with high sensitivity, making it suitable for monitoring ground-based ion beams with wide energy spectrum and wide beam current intensity.

[0107] According to embodiments of the present invention, such as Figure 3 , Figure 4 and Figure 9As shown, the mass spectrometry testing device 2 also includes an electron collection component 24 and a processor. The inlet end of the electron collection component 24 faces the second molybdenum mesh support 224. The electron collection component 24 is configured to collect first and second electrons to obtain the termination flight times of the first and second electrons. The processor is configured to obtain the mass-to-charge ratios of multiple different ions based on the difference between the termination flight times of multiple different ions and the termination flight times of the first and second electrons, the voltage applied to the second electrode 13, and the voltage applied to the ion flight cylinder 221.

[0108] According to an embodiment of the present invention, the electron collecting assembly 24 includes a third multiplier 240 and a fourth multiplier 241. The inlet end of the third multiplier 240 faces the second molybdenum mesh support 224, and the radius of the third multiplier 240 gradually decreases in the direction away from the second molybdenum mesh support 224. The third multiplier 240 is configured to generate a fourth electric field by applying a voltage, thereby accelerating the first and second electrons. Under the impact of the accelerated first and second electrons, more first and second electrons are generated. The inlet end of the fourth multiplier 241 is connected to the outlet end of the third multiplier 240. The fourth multiplier 241 has a third channel. More first and second electrons form an "avalanche effect" by repeatedly impacting the inner wall of the third channel, and a detectable charge pulse is formed at the outlet end of the third channel, which indicates the termination time of the first and second electrons.

[0109] According to an embodiment of the present invention, the electron collection component 24 is configured to collect first and second electrons to obtain the termination flight time of the first and second electrons. Since the flight time of the first and second electrons is negligible, the termination flight time of the first and second electrons is represented as the starting flight time of multiple different ions passing through the carbon film and entering the ion flight chamber. Based on the difference between the termination flight time of multiple different ions and the starting flight time of multiple different ions passing through the carbon film and entering the ion flight chamber, the voltage applied to the second electrode 13, and the voltage applied to the ion flight cylinder 221, the processor obtains the mass-to-charge ratio of multiple different ions.

[0110] Figure 10 This is a schematic diagram of ion optics simulation of the flight paths of multiple different ions through a carbon film according to an embodiment of the present invention.

[0111] According to embodiments of the present invention, in order to adapt to different measurement task conditions, when the mass spectrometry testing device 2 is used alone, such as... Figure 10As shown, the initial conditions are set such that oxygen and nitrogen ion beams with energies of 20 eV are incident perpendicularly to the third slit 220 of the mass spectrometry testing device 2. Accelerated by a second electric field of -15 kV formed between the input end of the ion flight cylinder 221 and the second shell 21, the carbon film is bombarded with energies of 150-20 eV. When the carbon film is bombarded with ions of energies above 1 keV, it generates first and second electrons. Simultaneously, positive ions passing through the carbon film have a probability of not changing their charge, or a probability of becoming negative ions of the same element or neutral particles. Particles with different charges will have different flight paths within the ion flight cavity after being subjected to the second electric field; therefore, the field-free conditions within the ion flight cavity are crucial.

[0112] According to an embodiment of the present invention, the first and second electrons generated by the carbon film are deflected by the second molybdenum mesh support 224 on one side, and the accelerated charge pulses collected by the electron collection component 24 form a start signal (the termination time of the first and second electrons' flight). Multiple different ions passing through the carbon film continue to fly within the ion flight chamber, and the charge pulses collected by the ion collection component 23 form a termination signal (the termination time of the multiple different ions' flight). Considering that the different ions passing through the carbon film have different charges and different flight times under the influence of the second electric field, the voltage applied to the second molybdenum mesh support 224 should be close to the voltage applied to the ion flight cylinder 221 to ensure a near-field-free flight environment within the ion flight chamber. Figure 10 As shown, the voltage applied to the second housing 21 is -15KV, the voltage applied to the second molybdenum mesh support 224 is -14.5KV, and the voltage applied to the anode plate of the electron collecting assembly 24 is -4KV. Under these voltage settings, the time taken for multiple different ions to pass through the carbon film and be collected by the ion collecting assembly 23 is relatively close, ultimately forming a termination signal. Since the velocity of the first and second electrons is much greater than the velocity of other ions, the difference between the termination signal and the starting signal is... The flight time of ions within the ion flight chamber can be considered as the flight time of the ions, which can be expressed by the following formula (2):

[0113] (2);

[0114] Where L represents the length of the ion flight cavity, and m represents the mass of the ion incident through the third slit 220.

[0115] According to an embodiment of the present invention, when the mass spectrometry testing device 2 is used alone, E2 in formula (2) represents the energy of the incident ions after being accelerated by the second electric field through the third slit 220, which can be expressed by the following formula (3):

[0116] (3);

[0117] Wherein, U represents the voltage applied to the ion flight cylinder 221.

[0118] According to an embodiment of the present invention, the mass-to-charge ratio of the ions obtained by the processor can be expressed by the following formula (4):

[0119] (4).

[0120] According to an embodiment of the present invention, when the energy spectrum screening device 1 and the mass spectrometry testing device 2 are used in combination, E2 in formula (2) is expressed as the sum of the energy of the incident ion (target ion) accelerated by the second electric field by the third slit 220 and the energy of the ion flying through the ion flight cavity, which can be expressed by the following formula (5):

[0121] (5).

[0122] According to an embodiment of the present invention, the mass-to-charge ratio of the ions obtained by the processor can be expressed by the following formula (6):

[0123] (6).

[0124] According to an embodiment of the present invention, the mass spectrum distribution of ions can be obtained by continuous testing. Based on the same mass and the time-of-flight error between ions at different potentials, the mass resolution of the mass spectrometry testing device 2 can reach approximately 2%, which can meet the energy resolution requirements of most spatial mass spectrometry detections.

[0125] According to an embodiment of the present invention, when the average energy of the ion beam to be tested is below 100 eV, after acceleration by the second electric field formed between the input end of the ion flight tube 221 and the second shell 21, the flight time difference between accelerated ions of the same mass but different energies (15000 eV~15100 eV) has negligible influence on mass resolution. However, for mass spectrometry measurements of ion beams to be tested above 100 eV, their initial energy difference is affected during the flight time. To address this, the energy spectrum screening device 1 and the mass spectrometry testing device 2 can be combined to first perform energy screening on multiple ion beams to be tested with different energies. Target ions with a predetermined energy range that pass through the energy spectrum screening device 1 then enter the mass spectrometry testing device 2 for mass resolution. This avoids the influence of ions far from the average energy in the ion beam to be tested on the mass spectrometry test, and provides better mass resolution.

[0126] According to embodiments of the present invention, such as Figure 3 , Figure 4 and Figure 9As shown, insulating elements 4 are provided between the two ends of the second electrode plate 13 and the first housing 11, and between the ion flight cylinder 221 and the second housing 21, so as to provide electrical insulation between the second electrode plate 13 and the first housing 11, and between the ion flight cylinder 221 and the second housing 21.

[0127] According to an embodiment of the present invention, insulating members 4 are respectively provided between the two ends of the second electrode plate 13 and the first mounting plate and the second mounting plate to electrically insulate the second electrode plate 13 from the first mounting plate and the second mounting plate. The material of the insulating member 4 can be, for example, polyetheretherketone (PEEK).

[0128] According to an embodiment of the present invention, an insulating member 4 is provided between the ion flight cylinder 221 and the second housing 21 to electrically insulate the ion flight cylinder 221 from the second housing 21. The insulating member 4 may be made of, for example, polyetheretherketone (PEEK).

[0129] According to an embodiment of the present invention, all components in the ion spectrometer that require voltage are supplied via external power supply equipment using power lines. The other end of the power line is welded to a terminal and crimped to any one of the fixing screws of the conductor requiring power. Simultaneously, since the ion spectrometer is housed in a vacuum chamber, a vacuum conductive through-hole is required to connect the internal and external electrical wires to ensure airtightness.

[0130] Those skilled in the art will understand that the features described in the various embodiments and / or claims of the present invention can be combined or combined in various ways, even if such combinations or combinations are not explicitly described in the present invention. In particular, the features described in the various embodiments and / or claims of the present invention can be combined and / or combined in various ways without departing from the spirit and teachings of the present invention. All such combinations and / or combinations fall within the scope of the present invention.

[0131] It should also be noted that the directional terms mentioned in the embodiments, such as "up," "down," "front," "back," "left," and "right," are only for reference to the directions in the accompanying drawings and are not intended to limit the scope of protection of the present invention. Throughout the accompanying drawings, the same elements are represented by the same or similar reference numerals. Conventional structures or constructions will be omitted where they may cause confusion in understanding the present invention, and the shapes and dimensions of the components in the drawings do not reflect actual size and proportion, but are only schematic representations of the embodiments of the present invention.

[0132] Unless otherwise stated, the numerical parameters in this specification and the appended claims are approximate values ​​and can be varied according to the desired characteristics obtained from the content of this invention. Specifically, all figures used in the specification and claims to indicate the content of components, reaction conditions, etc., should be understood to be modified by the term "about" in all cases. Generally, this means that there may be variations of ±10% in some embodiments, ±5% in some embodiments, ±1% in some embodiments, and ±0.5% in some embodiments.

[0133] The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify the corresponding elements does not imply that the element has any ordinal number, nor does it represent the order of one element with another element, or the order of manufacturing methods. The use of these ordinal numbers is only to enable a named element to be clearly distinguished from another element with the same name.

[0134] Furthermore, unless specifically described or required to occur in a specific order, the order of the above steps is not limited to those listed above and can be varied or rearranged according to the desired design. Moreover, the above embodiments can be used in combination with each other or with other embodiments based on design and reliability considerations; that is, technical features from different embodiments can be freely combined to form more embodiments.

[0135] The embodiments of the present invention have been described above. However, these embodiments are merely illustrative and not intended to limit the scope of the invention. Although various embodiments have been described above, this does not mean that the measures in the various embodiments cannot be used advantageously in combination. The scope of the invention is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the invention, and all such substitutions and modifications should fall within the scope of the invention.

Claims

1. An ion spectrometer, characterized in that, include: An energy spectrum screening device is configured to deflect multiple ion beams of different energies by applying a first electric field, thereby allowing the emission of target ions with a predetermined energy range. The energy spectrum screening device includes: First shell; The first electrode plate is constructed in an arc shape and installed on the first housing, and the first electrode plate and the first housing are grounded; The second electrode plate is electrically insulated and installed inside the first housing. The second electrode plate is constructed into an arc shape concentric with the first electrode plate. By adjusting the voltage applied to the second electrode plate, a variable first electric field is formed between the second electrode plate and the first electrode plate. A mass spectrometry testing device is configured to apply a second electric field to the target ion, causing the target ion to accelerate and maintain a constant speed of flight, so as to separate multiple different ions based on the different flight times of multiple different ions in the target ion, and obtain the mass-charge ratio of multiple different ions.

2. The ion spectrometer according to claim 1, characterized in that, The first housing includes: A first mounting plate, wherein a first slit is provided on the first mounting plate to allow the ion beam to be tested to pass through; A second mounting plate, one end of which is connected to the first mounting plate and is arranged perpendicularly to the first mounting plate, and a second slit is provided on the second mounting plate to allow the target ions to be emitted; The first electrode plate is mounted on the outer ends of the first mounting plate and the second mounting plate, and the second electrode plate is electrically insulated between the first mounting plate and the second mounting plate. The energy resolution of the energy spectrum screening device is changed by adjusting the width of the first slit and the second slit.

3. The ion spectrometer according to claim 2, characterized in that, The width of the first slit is the same as the width of the second slit, and both are 1mm to 6mm.

4. The ion spectrometer according to claim 2, characterized in that, The mass spectrometry testing device includes: A second housing is mounted on the outside of the second mounting plate and has a third slit aligned with the second slit to allow the target ions to pass through. The second housing is grounded. An ion separation assembly includes an ion flight cylinder, the interior of which forms an ion flight chamber and is electrically insulated within a second housing. The input end of the ion flight cylinder faces a third slit and has a fourth slit communicating with the ion flight chamber. The ion flight cylinder is configured to use a second electric field formed between the input end and the second housing to accelerate target ions entering the mass spectrometry testing device through the third slit, causing multiple different ions within the target ion to maintain uniform flight speed and have different flight times within the ion flight chamber, thereby achieving separation within the ion flight chamber. An ion collection component, disposed at the end of the ion flight cylinder opposite to the fourth slit, is configured to collect multiple different ions to obtain the termination flight times of multiple different ions.

5. The ion spectrometer according to claim 4, characterized in that, The ion separation component further includes: A carbon film, disposed in the fourth slit, is configured to generate first and second electrons upon impact with the target ions after they are accelerated by the second electric field, and to allow multiple different ions to pass through. A first molybdenum mesh support is installed at one end of the ion flight cylinder facing the third slit to fix the carbon film in the fourth slit and reduce the number of the various ions passing through.

6. The ion spectrometer according to claim 5, characterized in that, The thickness of the carbon film is less than 0.1 μg / cm. 2 .

7. The ion spectrometer according to claim 6, characterized in that, The ion flight cylinder has an opening on its side that communicates with the ion flight chamber, and the ion separation assembly further includes: A second molybdenum mesh support, installed at the opening, is configured to deflect the first secondary electrons by applying a voltage, wherein the voltage applied to the second molybdenum mesh support is greater than the voltage applied to the ion flight cylinder.

8. The ion spectrometer according to claim 7, characterized in that, The ion collection assembly includes: The first multiplier section has its inlet end connected to the output end of the ion flight cylinder. The radius of the first multiplier section gradually decreases in the direction away from the ion flight cylinder. The first multiplier section is configured to form a third electric field by applying a voltage, so that multiple different ions fly at a constant speed and then accelerate, and under the action of the accelerated ion collision, generate second and secondary electrons. The second multiplier section has an inlet end connected to the outlet end of the first multiplier section. The second multiplier section has a second channel. The second secondary electrons obtain a secondary electron cloud by repeatedly impacting the inner wall of the second channel. An anode plate, located at the outlet end of the second multiplier section, is configured to collect the secondary electron cloud to obtain the termination flight times of multiple different ions.

9. The ion spectrometer according to claim 8, characterized in that, The mass spectrometry testing device also includes: An electron collecting component, the inlet end of which faces the second molybdenum mesh support, is configured to collect the first secondary electrons to obtain the termination flight time of the first secondary electrons. The processor is configured to obtain the mass-to-charge ratio of the multiple different ions based on the difference between the termination flight time of the multiple different ions and the termination flight time of the first secondary electron, the voltage applied to the second electrode, and the voltage applied to the ion flight cylinder.

10. The ion spectrometer according to claim 5, characterized in that, Insulating components are provided between the two ends of the second electrode plate and the first housing, and between the ion flight cylinder and the second housing, to provide electrical insulation between the second electrode plate and the first housing, and between the ion flight cylinder and the second housing.

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