Fixing module and processing device

Abstract

The invention discloses a fixing module and a processing device. The fixing module comprises a first clamping assembly, a second clamping assembly, a fixing assembly, a rotating assembly and an elastic assembly. The first clamping assembly is configured to clamp an object. The second clamping assembly corresponds to the first clamping assembly, and the second clamping assembly is configured to be used for clamping an object. The fixing assembly corresponds to the second clamping assembly. The rotating assembly corresponds to the second clamping assembly. The elastic assembly is connected to the second clamping assembly and the fixing assembly, and a part of a body of the elastic assembly is arranged on the rotating assembly in a sleeving mode. The fixing module pulls the second clamping assembly through the elastic assembly so that the second clamping assembly can exert tensioning force on the object. Therefore, the fixing module and the processing device can improve the coating yield and the surface coating uniformity.

Description

Technical Field

[0001] This invention relates to a fixing module and a processing device, and more particularly to a fixing module and a processing device with an automatic stretching function. Background Technology

[0002] In general, during the coating process, the object to be coated is fixed in place using a fixture. Therefore, when the object is heated during the coating process, it will deform, for example, by becoming longer. At this time, the object may sag or become wavy, resulting in uneven coating thickness.

[0003] Therefore, how to overcome the above-mentioned defects through structural design improvements has become an important issue to be addressed in this technical field. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a fixed module and a processing device to address the shortcomings of the prior art.

[0005] To address the aforementioned technical problems, one technical solution adopted by the present invention is to provide a fixing module, which includes a first clamping component, a second clamping component, a fixing component, a rotating component, and an elastic component. The first clamping component is configured to clamp an object. The second clamping component corresponds to the first clamping component and is configured to clamp the object. The fixing component corresponds to the second clamping component. The rotating component corresponds to the second clamping component. The elastic component is connected to the second clamping component and the fixing component, with a portion of the elastic component sleeved on the rotating component. The fixing module pulls the second clamping component through the elastic component, causing the second clamping component to apply a tension force to the object.

[0006] In one feasible or optional embodiment, the first clamping component is located on one side of the second clamping component, the rotating component is located on the other side of the second clamping component, and the fixing component is located at one end of the second clamping component.

[0007] In one feasible or optional embodiment, the fixing module further includes a base assembly configured to house the first clamping assembly, the second clamping assembly, the fixing assembly, and the rotating assembly.

[0008] In one feasible or optional embodiment, the first clamping assembly includes a first base member, a first upper clamping member, and a first lower clamping member. The first base member is connected to the base assembly. The first lower clamping member is movably connected to the first upper clamping member and connected to the first base member, and the first lower clamping member and the first upper clamping member are configured to clamp the object. The second clamping assembly includes a second base member, a second upper clamping member, and a second lower clamping member. The second base member is movably connected to the base assembly. The second lower clamping member is movably connected to the second upper clamping member and connected to the second base member, and the second lower clamping member and the second upper clamping member are configured to clamp the object.

[0009] In one feasible or optional embodiment, the base assembly has a groove portion, and the second base member has a slider portion movably connected to the groove portion. The first upper clamp or the first lower clamp is electrically connected to a first external power supply terminal, and the second upper clamp or the second lower clamp is electrically connected to a second external power supply terminal.

[0010] To address the aforementioned technical problems, another technical solution adopted by the present invention is to provide a processing device, which includes a chamber module and a fixing module. The chamber module has a working space inside. The fixing module is located within the working space and includes a first clamping assembly, a second clamping assembly, a fixing assembly, a rotating assembly, and an elastic assembly. The first clamping assembly is configured to clamp an object. The second clamping assembly corresponds to the first clamping assembly and is configured to clamp the object. The fixing assembly corresponds to the second clamping assembly. The rotating assembly corresponds to the second clamping assembly. The elastic assembly is connected to the second clamping assembly and the fixing assembly, with a portion of the elastic assembly sleeved on the rotating assembly. The fixing module pulls the second clamping assembly through the elastic assembly, causing the second clamping assembly to apply a tension force to the object.

[0011] In one feasible or optional embodiment, the first clamping component is located on one side of the second clamping component, the rotating component is located on the other side of the second clamping component, and the fixing component is located at one end of the second clamping component.

[0012] In one feasible or optional embodiment, the fixing module further includes a base assembly configured to house the first clamping assembly, the second clamping assembly, the fixing assembly, and the rotating assembly.

[0013] In one feasible or optional embodiment, the first clamping assembly includes a first base member, a first upper clamping member, and a first lower clamping member. The first base member is connected to the base assembly. The first lower clamping member is movably connected to the first upper clamping member and connected to the first base member, and the first lower clamping member and the first upper clamping member are configured to clamp the object. The second clamping assembly includes a second base member, a second upper clamping member, and a second lower clamping member. The second base member is movably connected to the base assembly. The second lower clamping member is movably connected to the second upper clamping member and connected to the second base member, and the second lower clamping member and the second upper clamping member are configured to clamp the object.

[0014] In one feasible or optional embodiment, the base assembly has a groove portion, and the second base member has a slider portion, the slider portion being movably connected to the groove portion; wherein the first upper clamp or the first lower clamp is electrically connected to a first external power supply terminal, and the second upper clamp or the second lower clamp is electrically connected to a second external power supply terminal.

[0015] One of the beneficial effects of this invention is that the fixing module provided by this invention can improve the coating yield and surface coating uniformity through the technical solution of "a first clamping component configured to clamp an object. A second clamping component corresponding to the first clamping component, the second clamping component configured to clamp the object. A fixing component corresponding to the second clamping component. A rotating component corresponding to the second clamping component. An elastic component connected to the second clamping component and the fixing component, a portion of the elastic component being sleeved on the rotating component. The fixing module pulls the second clamping component through the elastic component, so that the second clamping component applies a tension force to the object".

[0016] Another beneficial effect of the present invention is that the processing device provided by the present invention can improve the coating yield and surface coating uniformity through the technical solution of "a chamber module having a working space inside. A first clamping component is configured to clamp an object. A second clamping component corresponds to the first clamping component and is configured to clamp the object. A fixing component corresponds to the second clamping component. A rotating component corresponds to the second clamping component. An elastic component is connected to the second clamping component and the fixing component, and a portion of the body of the elastic component is sleeved on the rotating component. The fixing module pulls the second clamping component through the elastic component, so that the second clamping component applies a tension force to the object".

[0017] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are for reference and illustration only and are not intended to limit the present invention. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the processing device according to an embodiment of the present invention.

[0019] Figure 2 This is a functional block diagram of the processing device according to an embodiment of the present invention.

[0020] Figure 3 This is a perspective view of the fixed module of the processing device according to an embodiment of the present invention.

[0021] Figure 4 This is a partially enlarged schematic diagram of the fixed module of the processing device according to an embodiment of the present invention.

[0022] Figure 5 This is a front view schematic diagram of the fixed module of the processing device according to an embodiment of the present invention.

[0023] Figure 6 This is a partial rear view of the fixed module of the processing device according to an embodiment of the present invention.

[0024] Figure label:

[0025] Z: Processing device; 1: Chamber module; 10: Working space; 11: Gas inlet; 12: Gas outlet; 2: Control module; D: Fixing module; D1: First clamping assembly; D10: First base piece; D11: First upper clamp; D12: First lower clamp; D120: First connecting piece; D2: Second clamping assembly; D20: Second base piece; D200: First positioning part; D201: Slider part; D21: Second upper clamp; D22: Second lower clamp; D220: Second connecting piece; D3: Fixing assembly; D30: Second positioning part; D4: Rotating assembly; D5: Elastic assembly; D6: Base assembly; D60: Slide groove; B: Object; E1: First external power supply terminal; E2: Second external power supply terminal. Detailed Implementation

[0026] The following specific embodiments illustrate the implementation of the "fixed module and processing device" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, it should be noted beforehand that the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions based on actual dimensions. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.

[0027] It should be understood that while terms such as “first,” “second,” and “third” may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term “or” as used herein may, as appropriate, include any combination of one or more of the associated listed items.

[0028] Example

[0029] Please see Figures 1 to 6 The figures above are schematic diagrams of the structure of the processing device according to embodiments of the present invention, functional block diagrams, perspective views of the fixing module, enlarged partial views of the fixing module, front views of the fixing module, and partial rear views of the fixing module. As shown in the figures above, the first embodiment of the present invention provides a processing device Z, which may include a chamber module 1 and a fixing module D. The processing device Z of the present invention may be a processing device applied to sputtering, but is not limited thereto; the processing device Z of the present invention may also be a processing device applied to other uses or types, such as a chemical deposition device.

[0030] Cooperate Figure 1 As shown, the chamber module 1 may have a working space 10 inside, which can be configured to house the fixed module D. Furthermore, the chamber module 1 may also have a gas inlet 11 and a gas outlet 12. The gas inlet 11 and the gas outlet 12 are connected to the working space 10. The gas inlet 11 can be configured to introduce a specific gas (not shown in the figure, such as a gas used for coating, but not limited thereto). The gas outlet 12 can be configured to discharge gas from the working space 10 (e.g., to create a vacuum) or to discharge the aforementioned specific gas.

[0031] Next, in coordination Figures 1 to 6 As shown, the fixing module D can be located within the workspace 10. The fixing module D may include a first clamping component D1, a second clamping component D2, a fixing component D3, a rotating component D4, and an elastic component D5.

[0032] Furthermore, in coordination Figures 1 to 5 As shown, the first clamping assembly D1 can be configured to clamp an object B. For example, the first clamping assembly D1 may include a first base member D10, a first upper clamp member D11, and a first lower clamp member D12. The first base member D10 may be made of an insulating, non-conductive material. The first upper clamp member D11 and the first lower clamp member D12 may be made of a conductive material (e.g., copper, but not limited thereto); the first upper clamp member D11 is movably connected to one side of the first lower clamp member D12, and the other side of the first lower clamp member D12 is connected to the first base member D10. The first lower clamp member D12 and the first upper clamp member D11 can be configured to clamp one end of the object B.

[0033] Furthermore, the first lower clamp D12 may also have at least one first connector D120 (e.g., screw or other type of connecting component), and the first lower clamp D12 can be connected to the first external power supply terminal E1 (e.g., an external power supply device that provides positive or negative electrical energy) through the first connector D120, but is not limited thereto; in other optional embodiments, the present invention can also be electrically connected to the first external power supply terminal E1 through the first upper clamp D11.

[0034] Next, in coordination Figures 1 to 6 As shown, the second clamping assembly D2 may correspond to the first clamping assembly D1, and the second clamping assembly D2 may be configured to clamp object B. For example, the second clamping assembly D2 may include a second base member D20, a second upper clamping member D21, and a second lower clamping member D22. The second base member D20 may be made of an insulating, non-conductive material, and one side of the second base member D20 may protrude outward to form a first positioning portion D200. The second upper clamping member D21 and the second lower clamping member D22 may be made of a conductive material (e.g., copper, but not limited thereto); the second upper clamping member D21 is movably connected to one side of the second lower clamping member D22, and the other side of the second lower clamping member D22 is connected to the second base member D20. The second lower clamping member D22 and the second upper clamping member D21 are configured to clamp the other end of object B. The first clamping assembly D1 may be located on one side of the second clamping assembly D2.

[0035] Furthermore, the second lower clamp D22 may also have at least one second connector D220 (e.g., screw or other type of connecting component), and the second lower clamp D22 may be connected to the second external power supply terminal E2 (e.g., an external power supply device that provides positive or negative electrical energy) via the second connector D220, but is not limited thereto; in other alternative embodiments, the present invention may also be electrically connected to the second external power supply terminal E2 via the second upper clamp D21.

[0036] Next, in coordination Figures 3 to 5 As shown, the fixing component D3 may correspond to the second clamping component D2. For example, the fixing component D3 may be located at one end of the second clamping component D2. The fixing component D3 may be made of an insulating, non-conductive material, and one side of the fixing component D3 may protrude outward to form a second positioning part D30.

[0037] Next, in coordination Figures 3 to 5 As shown, the rotating component D4 may correspond to the second clamping component D2. For example, the rotating component D4 may be a pulley or other type of rotating wheel. The rotating component D4 may be located on the other side of the second clamping component D2.

[0038] Next, in coordination Figures 3 to 5As shown, the elastic component D5 can be connected to the second clamping component D2 and the fixing component D3, and a portion of the body of the elastic component D5 can be sleeved on the rotating component D4. For example, the elastic component D5 can be a spring or other type of elastic component. One end of the elastic component D5 can be connected to the first positioning part D200 of the second clamping component D2, and the other end of the elastic component D5 can be connected to the second positioning part D30 of the fixing component D3, and the elastic component D5 can use the rotating component D4 as a fulcrum.

[0039] Furthermore, the fixing module D of the present invention may further include a base assembly D6, which can be configured to house the first clamping assembly D1, the second clamping assembly D2, the fixing assembly D3, and the rotating assembly D4. Figures 3 to 6 As shown, for example, a first base member D10 is connected to a base assembly D6, and a second base member D20 is movably connected to the base assembly D6. Further, the base assembly D6 may have a groove portion D60, which may be a groove structure or other type of channel. The second base member D20 may have a slider portion D201 on the side corresponding to the base assembly D6, and the slider portion D201 is movably connected to the groove portion D60.

[0040] Therefore, the fixing module D can pull the second clamping component D2 through the elastic component D5, so that the second clamping component D2 applies a tension force to the object B.

[0041] For example, coordination Figures 1 to 6 As shown, when the processing device Z of the present invention is used, an object B (e.g., a metal object to be plated, but not limited thereto) can be placed on the fixing module D; that is, one end of the object B is clamped by the first upper clamp D11 and the first lower clamp D12 of the fixing module D, and the other end of the object B is clamped by the second lower clamp D22 and the second upper clamp D21 of the fixing module D. At this time, the elastic component D5 will pull the second clamping component D2, so that the second clamping component D2 applies a tension force to the object B.

[0042] Next, during the coating process on object B, electrical energy can be supplied to the first clamping assembly D1 through the first external power supply terminal E1 and to the second clamping assembly D2 through the second external power supply terminal E2 to heat object B. During heating, object B will deform due to heat, such as stretching, expanding, or elongating. At this time, the elastic assembly D5 can pull the second clamping assembly D2 through its own contraction force, so that the second clamping assembly D2 applies a tension force to object B, thereby keeping object B in a taut state. Therefore, during the coating process, the surface of object B can be evenly and uniformly coated with a substance (e.g., a film).

[0043] Therefore, the processing device Z of the present invention can utilize the structural configuration of the fixed module D through the above technical solution to ensure that the object B is kept in a taut state during the surface treatment process, thereby allowing the surface to be coated with material evenly and uniformly.

[0044] Furthermore, in coordination Figures 1 to 2 As shown, the processing device Z may further include a control module 2, which is electrically connected to a first external power supply terminal E1 and a second external power supply terminal E2. The control module 2 may be configured to control the first external power supply terminal E1, the second external power supply terminal E2, or both to provide or stop providing power to the first clamping assembly D1 and the second clamping assembly D2. For example, the control module 2 may be a processor or a terminal device (e.g., a computer, but not limited thereto).

[0045] In addition, based on the above content, in conjunction with Figures 1 to 6 As shown, the present invention further provides a fixing module D, which may include a first clamping component D1, a second clamping component D2, a fixing component D3, a rotating component D4, and an elastic component D5. The first clamping component D1 may be configured to clamp an object B. The second clamping component D2 may correspond to the first clamping component D1 and is configured to clamp the object B. The fixing component D3 may correspond to the second clamping component D2. The rotating component D4 may correspond to the second clamping component D2. The elastic component D5 may be connected to the second clamping component D2 and the fixing component D3, and a portion of the elastic component D5 may be sleeved on the rotating component D4. The fixing module D can pull the second clamping component D2 through the elastic component D5, so that the second clamping component D2 applies a tension force to the object B.

[0046] However, the examples given above are merely one possible embodiment and are not intended to limit the invention.

[0047] Beneficial effects of the embodiments

[0048] One of the beneficial effects of the present invention is that the fixing module D provided by the present invention can improve the coating yield and surface coating uniformity through the technical solution that "a first clamping component D1 can be configured to clamp an object B. A second clamping component D2 can correspond to the first clamping component D1 and is configured to clamp the object B. A fixing component D3 can correspond to the second clamping component D2. A rotating component D4 can correspond to the second clamping component D2. An elastic component D5 can be connected to the second clamping component D2 and the fixing component D3, and a portion of the body of the elastic component D5 can be sleeved on the rotating component D4. The fixing module D can pull the second clamping component D2 through the elastic component D5, so that the second clamping component D2 applies a tension force to the object B".

[0049] Another beneficial effect of the present invention is that the processing device Z provided by the present invention can improve the coating yield and surface coating uniformity through the technical solution of "the chamber module 1 can have a working space 10 inside. The first clamping component D1 can be configured to clamp the object B. The second clamping component D2 can correspond to the first clamping component D1 and can be configured to clamp the object B. The fixing component D3 can correspond to the second clamping component D2. The rotating component D4 can correspond to the second clamping component D2. The elastic component D5 can be connected to the second clamping component D2 and the fixing component D3, and a part of the body of the elastic component D5 can be sleeved on the rotating component D4. In this way, the fixing module D can pull the second clamping component D2 through the elastic component D5 so that the second clamping component D2 applies a tension force to the object B".

[0050] Furthermore, the processing device Z of the present invention can utilize the above-mentioned technical solution and the structural configuration of the fixed module D, that is, automatically stretch and elastically clamp the object B through the first clamping component D1, the second clamping component D2 and the elastic component D5, so that the object B can be continuously kept in a tense and taut state during the surface treatment process, thereby allowing the surface to be evenly and uniformly coated with the substance.

[0051] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the scope of protection of the claims of the present invention. Therefore, all equivalent technical changes made based on the content of the present invention specification and drawings are included within the scope of protection of the claims of the present invention.

Claims

1. A fixed module, characterized in that, The fixing module includes: A first clamping assembly, configured to clamp an object; A second clamping assembly, corresponding to the first clamping assembly, is configured to clamp the object; A fixing component, which corresponds to the second clamping component; A rotating assembly, the rotating assembly corresponding to the second clamping assembly; and An elastic component is connected to the second clamping component and the fixing component, and a portion of the elastic component is sleeved on the rotating component; The fixing module pulls the second clamping component through the elastic component, so that the second clamping component applies a tension force to the object.

2. The fixing module according to claim 1, characterized in that, The first clamping component is located on one side of the second clamping component, the rotating component is located on the other side of the second clamping component, and the fixing component is located at one end of the second clamping component.

3. The fixing module according to claim 1, characterized in that, The fixing module further includes a base assembly configured to house the first clamping assembly, the second clamping assembly, the fixing assembly, and the rotating assembly.

4. The fixing module according to claim 3, characterized in that, The first clamping component includes: A first base component, the first base component being connected to the base assembly; First upper clamp; and A first lower clamp is movably connected to the first upper clamp and to the first base member, and the first lower clamp and the first upper clamp are configured to clamp the object; The second clamping component includes: A second base member, which is movably connected to the base assembly; The second upper clamp; and A second lower clamp is movably connected to the second upper clamp and to the second base member, the second lower clamp and the second upper clamp being configured to clamp the object.

5. The fixing module according to claim 4, characterized in that, The base assembly has a sliding groove, and the second base member has a slider, the slider being movably connected to the sliding groove; wherein the first upper clamp or the first lower clamp is electrically connected to a first external power supply terminal, and the second upper clamp or the second lower clamp is electrically connected to a second external power supply terminal.

6. A processing apparatus, characterized in that, The processing device includes: A chamber module, wherein the chamber module has an internal working space; and A fixing module, located within the workspace, comprising: A first clamping assembly, configured to clamp an object; A second clamping assembly, corresponding to the first clamping assembly, is configured to clamp the object; A fixing component, which corresponds to the second clamping component; A rotating assembly, the rotating assembly corresponding to the second clamping assembly; and An elastic component is connected to the second clamping component and the fixing component, and a portion of the elastic component is sleeved on the rotating component; The fixing module pulls the second clamping component through the elastic component, so that the second clamping component applies a tension force to the object.

7. The processing apparatus according to claim 6, characterized in that, The first clamping component is located on one side of the second clamping component, the rotating component is located on the other side of the second clamping component, and the fixing component is located at one end of the second clamping component.

8. The processing apparatus according to claim 6, characterized in that, The fixing module further includes a base assembly configured to house the first clamping assembly, the second clamping assembly, the fixing assembly, and the rotating assembly.

9. The processing apparatus according to claim 8, characterized in that, The first clamping component includes: A first base component, the first base component being connected to the base assembly; First upper clamp; and A first lower clamp is movably connected to the first upper clamp and to the first base member, and the first lower clamp and the first upper clamp are configured to clamp the object; The second clamping component includes: A second base member, which is movably connected to the base assembly; The second upper clamp; and A second lower clamp is movably connected to the second upper clamp and to the second base member, the second lower clamp and the second upper clamp being configured to clamp the object.

10. The processing apparatus according to claim 9, characterized in that, The base assembly has a sliding groove, and the second base member has a slider, the slider being movably connected to the sliding groove; wherein the first upper clamp or the first lower clamp is electrically connected to a first external power supply terminal, and the second upper clamp or the second lower clamp is electrically connected to a second external power supply terminal.

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